KR20020019376A - Apparatus for inspecting a substrate - Google Patents

Abstract

PURPOSE: To efficiently perform highly accurate defect inspection for an inspecting substrate. CONSTITUTION: A position coordinates detecting means detecting position coordinates of a defect part on the inspection target substrate is provided with two sets of guide rails 7031, 7032, and 704 provided in two directions along side edges of the inspection target substrate, a light source 707 movably provided along one set of the guide rails 704 provided in one direction and emitting light perpendicularly to the one direction, a projected member 743 movably provided in a state laid astride the inspection target substrate along one set of the guide rails 7031 and 7032 provided in another direction and projected by light emitted from the light source, and a detection part positioning the light beam emitted from the light source and the projected member above the defect part and detecting the position coordinates of the defect part on the basis of positions of the light source and the projected member in regard to each set of the guide rails.

Description

Substrate Inspection Equipment {APPARATUS FOR INSPECTING A SUBSTRATE}

TECHNICAL FIELD This invention relates to the board | substrate inspection apparatus used for defect inspection of glass substrates, such as a liquid crystal display (LCD), for example.

A device for inspecting defects in glass substrates used in conventional LCDs includes a macro observation that matches an illumination light to a glass substrate surface and observes a defect such as a defect on the surface of the glass substrate from an optical change of the reflected light, and the macro observation detected by the macro observation. There is one thing that can be performed by switching the micro observation which enlarges and observes a defective part.

For example, Japanese Unexamined Patent Application Publication No. 5-322783 provides a macro observation system and a micro observation system in correspondence with an XY stage capable of horizontal movement in the X and Y directions, and mounts a substrate under test on the XY stage. In this state, the XY stage is moved in the two-dimensional directions in the X and Y directions to position the inspection region of the inspected substrate in the observation region of the macro observation system or the micro observation system. An apparatus is disclosed that allows for observation or microobservation.

By the way, the size of the glass substrate which accompanies the enlargement of LCD in recent years is gradually increasing in size. For this reason, in the defect inspection of such a large-size glass substrate, in a device in which the XY stage as described above is horizontally moved in the two-dimensional directions in the X and Y directions, the range of the XY stage is four times as large as the glass substrate area. As the size of the glass substrate increases, the size of the apparatus cannot be avoided.

Moreover, in the apparatus comprised in this way, since the surface of a board | substrate under test is far from the eye position of an examiner, it is difficult to test | inspect a micro flaw. In addition, since it is difficult to obtain the positional information or the like of the detected defect portion on the surface of the inspected substrate, there is a problem that defect inspection with high accuracy cannot be performed.

SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate inspection apparatus that can realize miniaturization and efficiently perform defect inspection with high accuracy on a substrate to be inspected.

(1) The substrate inspection apparatus of the present invention includes a rectangular substrate holding means for holding a substrate to be inspected, a driving means for raising the substrate holding means to a predetermined angle, and at least an edge of the substrate to be inspected next to the substrate holding means. Provided along two orthogonal directions and provided with position coordinate detecting means for detecting a position coordinate of a defective portion on the inspected substrate, wherein the position coordinate detecting means comprises two pairs of two pairs arranged in two directions along a side edge of the inspected substrate. A guide rail, a light source which is installed to be movable along a pair of guide rails installed in one of the two directions, and emits light in a direction orthogonal to the one direction, and the other of the two directions in a state spanning the substrate to be inspected; A projection member installed to be movable along a pair of guide rails installed in a direction and projecting light emitted from the light source; A detection unit for placing the light beam emitted from the light source and the projection member on the defect portion, and detecting a position coordinate of the defect portion on the basis of the positions of the light source and the projection member on the pair of guide rails; have.

(2) The substrate inspection apparatus of the present invention is the apparatus described in the above (1), and further includes two moving means for moving the projection member along the pair of guide rails by electric force. One of the two means of movement comprises a motor, each means of movement consisting of two pulleys and a belt operated by driving of the motor, further connecting one pulley of each of the means of movement. It has a shaft.

(3) The substrate inspection apparatus of the present invention is the apparatus described in the above (1), and further includes two moving means for moving the projection member along the pair of guide rails by electric force, each of the moving means It consists of two pulleys and a belt, and is further provided with the connecting shaft which connects one pulley of each said moving means, and the motor which drives this connecting shaft.

(4) The substrate inspection apparatus of the present invention is the apparatus described in any one of (1) to (3) above, and further comprises a evacuation mechanism for evacuating the projection member from the substrate under test.

(5) The substrate inspection apparatus of the present invention is the apparatus described in any one of (1) to (3) above, and further includes adjusting means for adjusting an optical axis of light emitted from the light source.

(6) The substrate inspection apparatus of the present invention is the apparatus described in the above (4), and is provided with adjustment means for adjusting the optical axis of the light emitted from the light source.

BRIEF DESCRIPTION OF THE DRAWINGS The perspective view which shows the structure of the board | substrate inspection apparatus which concerns on embodiment of this invention.

2 is a side view showing the configuration of a substrate inspection apparatus according to an embodiment of the present invention.

3 is a top view showing the configuration of a substrate inspection apparatus according to an embodiment of the present invention.

4 is a diagram showing an example of the configuration of transmission line illumination in a substrate inspection apparatus according to an embodiment of the present invention.

5 is a diagram showing a detailed configuration of a holder in the substrate inspection apparatus according to the embodiment of the present invention.

Fig. 6 is a diagram showing the configuration of a position detection unit in the substrate inspection apparatus according to the embodiment of the present invention.

7A to 7C are views showing a specific configuration of a laser light source according to the embodiment of the present invention.

8A to 8C are diagrams showing modifications of the specific configuration of the laser light source according to the embodiment of the present invention.

9 is a diagram showing an inspection situation in the substrate inspection apparatus according to the embodiment of the present invention.

10A to 10D are diagrams showing the evacuation mechanism of the projection plate in the substrate inspection apparatus according to the embodiment of the present invention.

11A to 11D are views showing a modification of the retraction mechanism of the projection plate in the substrate inspection device according to the embodiment of the present invention.

It is a figure which shows the modification of the drive mechanism which concerns on embodiment of this invention.

<Explanation of symbols for the main parts of the drawings>

1: device body 2: holder

3: substrate under test 4: guide rail

5: Observation unit support 6: Observation unit

7: Transmission line illumination light source 8: Surface illumination light source

9: Micro Observation Unit 10: Partial Macro Lighting

11: control unit 12: TV monitor

13: Y scale 14: X scale

15: support shaft 16: pulley

17: belt 18: motor

21: laser light source 30: full surface macro illumination light source

31: metal halogen lamp 32: reflective mirror

33: Fresnel lens 51: back plate

71: light source portion 72: glass rod

73: white stripe 91: objective lens

92: eyepiece 93: TV camera

101: macro illumination light 111: input unit

181: axis of rotation 201 :; Board Positioning Member

211: laser light source 212, 213: cylindrical lens

702: holding member 704: guide rail

706: guide movement portion 707: reflector

709, 710: pulley 712: belt

713, 714: motor 716: axis of rotation

717, 718, 719, 720: sensor 721: holding member

730: connecting shaft 730a, 730b: connecting shaft

730c: First Cam 730d: Second Cam

741, 742: prop 743: projection board

744: guide member 750: laser light

751, 752: coil spring 801, 802, 901, 902: lens frame

803: shading tube 805: spring

806: adjustment service 807, 907: base

811-814, 911-914: Nokpin 815, 915: laser beam

816, 916: laser pressing member 817: Vis

904: fixed screws 7011, 7012: holding member

7013, 7014: Vertical surface 7031, 7032: Guide rail

7033, 7034: stopper 7051, 7052: guide moving part

7071, 7072, 7081, 7082: pulleys 7111, 7112: belt

7130: 2-axis motor 7130a, 7130b, 7131: rotating shaft

7411, 7421: axis of rotation 7412: 7422: pin

7431: Bottom 7441: Slope

a: defective part

Embodiments of the present invention will be described below with reference to the drawings.

1-3 is a figure which shows the structure of the board | substrate inspection apparatus which concerns on embodiment of this invention, FIG. 1 is a perspective view, FIG. 2 is a side view, FIG. 3 is a top view. 1 to 3, a holder 2 holding the substrate 3 to be inspected is provided on the apparatus main body 1. As shown in FIG. 2, the holder 2 is freely supported by the support shaft 15 in a rotational movement with respect to the apparatus body 1, and a pulley 16 is provided around the support shaft 15. . The motor body 18 is provided in the apparatus main body 1, and the annular belt 17 hangs on the rotating shaft 181 and the pulley 16 of the motor 18. As shown in FIG. By transmitting the rotational driving force of the motor 18 from the rotating shaft 181 to the pulley 16 via the belt 17, the holder 2 in a horizontal state with the support shaft 15 as an axis, for example, an advantage It can be raised and inclined to the position of the broken line, that is, up to a predetermined angle θ.

In addition, the holder 2 has an edge shape, and at its periphery, the holder 2 is placed in a large size to be inspected, such as a glass substrate used for an LCD. In the holder 2, the space portion surrounded by the periphery thereof has a rectangular shape, and the area of the space portion is slightly smaller than the area of the substrate 3 to be inspected. In the holder 2, the board | substrate positioning member 201 which consists of several cylindrical pin in the X-axis direction and the Y-axis direction along the peripheral part is arrange | positioned so that it may protrude slightly from the surface of the holder 2. As shown in FIG. The positioning of the substrate 3 under test is accomplished by bringing the two sides of the substrate 3 under test into the side of each substrate positioning member 201 on the holder 2. In addition, the periphery of the substrate 3 to be inspected is adsorbed on the surface of the holder 2 by a suction device (not shown) from a plurality of holes (adsorption pads) (not shown) provided along the entire periphery of the holder 2. (3) is held so as not to fall off on the holder (2). In addition, the detailed structure of the holder 2 is mentioned later.

As shown in FIGS. 1-3, the pair of guide rails 4 and 4 are arrange | positioned in the Y-axis direction along the both edges of the holder 2 on the apparatus main body 1 in parallel. In addition, an upper side of the holder 2 is provided with an observation unit support 5 having a columnar shape to hold the holder 2, and the observation unit support 5 is inspected along the guide rails 4 and 4. The upper part of the holder 2 hold | maintained in the horizontal state shown by the solid line in FIG. 1 above the board | substrate 3 is provided so that a movement to a Y-axis direction is possible.

The observation unit support part 5 is supported by the observation unit 6 so that the observation unit 6 is movable along the guide rail which is not shown in the direction (X-axis direction) orthogonal to the movement direction (Y-axis direction) of the observation unit support part 5. have. In addition, the transmission unit illumination light source 7 is provided in the observation unit support part 5 so as to oppose the moving line of the observation unit 6. The transmission line illumination light source 7 is arranged along the X-axis direction on the back plate 51 of the support part 5 passing below the holder 2, and transmits linearly from the bottom of the substrate 3 to be inspected. By illuminating, it is movable with the observation unit support part 5 in the Y-axis direction.

The observation unit 6 has a micro observation unit 9 provided with an indicator illumination light source 8 and a partial macro illumination light source 10 for macro observation. The surface illuminating light source 8 is for specifying the defect position on the inspected substrate 3, and transmits the optically focused spot light onto the inspected substrate 3 surface. Since the reflected light from the surface of the inspected substrate 3 by the spot light is brighter than the reflected light from the surface of the inspected substrate 3 by the partial macro illumination light source 10, the macroscopic illumination by the partial macro illumination light source 10 is observed. It is possible to visually observe by spot light.

The micro-observing unit 9 has a microscope function having an objective lens 91, an eyepiece 92, and a non-illustrated illumination light source not shown, and the inspector is provided with an object on the surface of the substrate 3 to be inspected. It can be observed by the eyepiece 92 through the lens 91. In addition, the micro-observing unit 9 is attached with a TV camera 93 via a trinocular tube. In addition, when the micro observation by the naked eye is unnecessary, only the TV camera 93 can be attached via direct communication. The TV camera 93 picks up an observation image of the surface of the test substrate 3 obtained by the objective lens 91 and sends it to the control unit 11. The control unit 11 displays the observation image captured by the TV camera 93 on the TV monitor 12. The control unit 11 is connected to an input unit 111 for the operator to perform operation instruction or data input.

The partial macro illumination light source 10 is used for macro observation and irradiates a part of the surface of the substrate 3 on the holder 2 held in a horizontal state with the macro illumination light 101. The illumination angle of the partial macro illumination light source 10 with respect to the surface of the substrate 3 to be inspected can be adjusted to an angle that is optimal for macro observation.

4 is a diagram illustrating a configuration example of the transmission line illumination light source 7. As shown in FIG. 4, the transmission line illumination light source 7 has the light source part 71 and the solid glass rod 72. As shown in FIG. Light emitted from the light source unit 71 and diffusely reflected by the reflecting plate 712 is incident on the end of the glass rod 72 and is totally transmitted through the glass rod 72, and along the distribution (bottom) of the glass rod 72. The light on the line is emitted upward by the lens action of the glass rod 72 to be diffused by the coated white stripe 73. The transmission line illumination is not limited to the above configuration, and may be, for example, line illumination by a fluorescent lamp or the like.

5 is a diagram illustrating a detailed configuration of the holder 2 in the substrate inspection apparatus. In FIG. 5, the same code | symbol is attached | subjected to the same part as FIG. In FIG. 5, holding members 7011 and 7012 are attached to both side surfaces of the holder 2 in the Y-axis direction, respectively. The holding member 702 is attached to one side of the holder 2 in the X-axis direction. The surfaces of the holding members 7011, 7012, 702 are positioned downward to generate a step with respect to the surface of the holder 2. The holding members 7011 and 7012 are provided with guide rails 7031 and 7032 so as to follow the Y-axis direction of the edge of the holder 2, respectively. Further, the guide moving parts 7071 and 7052 are provided to be movable along the guide rails 7031 and 7032 so as to span the guide rails 7031 and 7032, respectively. The holding member 702 is provided with a guide rail 704 along the X-axis direction of the edge of the holder 2. In addition, the guide moving part 706 is provided to be movable along the guide rail 704 so as to extend the guide rail 704.

Pulleys 709 and 710 are supported at both ends of the holding member 702, respectively. The belt 712 is hooked on the pulley 709 and the pulley 710 in a ring shape. A guide moving part 706 is hooked to a part of the belt 712. The rotation shaft 716 of the motor 714 is fitted to the pulley 710. On one side of the holder 2 in the X-axis direction, optical sensors 719 and 720 for detecting the presence of the guide moving part 706 are provided.

In the guide moving part 706, a reflector (mirror) 707 in the Y-axis direction is provided so as to be perpendicular or acute to the surface of the substrate 3 to be inspected. A holding member 721 having a height substantially equal to that of the holder 2 is provided at a position where the holding members 7011 and 702 intersect. On the holding member 721, a laser light source 21 to be described later is provided on an extension line of the guide rail 704.

Pulleys 7071 and 7081 and pulleys 7082 and 7082 are held at both ends of the vertical surfaces 7013 and 7014 of the holding members 7011 and 7012, respectively. A belt 7111 is hooked to the pulley 7071 and the pulley 7071, and a belt 7112 is hooked to the pulley 7092 and the pulley 7082 in a ring shape. Guide moving parts 7071 and 7052 are attached to each part of the belts 7111 and 7112, respectively. The rotation shaft 7131 of the motor 713 is fitted to the pulley 7071. On one side of the holder 2 in the Y-axis direction, optical sensors 717 and 718 for detecting the presence of the guide moving portion 7051 are provided. A coupling shaft 730 is disposed below the holder 2, and both ends of the coupling shaft 730 are fitted to the pulley 7081 and the pulley 7082, respectively.

On the side surface of the holder 2 side of the guide movement parts 7051 and 7052, struts 741 and 742 are respectively supported so that rotational movement is possible as mentioned later. Both ends of the elongated projection plate 743 are attached to each top end of these pillars 741 and 742, respectively. The surface of the projection plate 743 is inclined, for example, to be black and at an angle of about 45 ° to the surface of the substrate 3 to be inspected, and is directed in the direction of the reflector 707. At this time, the posts 741 and 742 are in an upright state with respect to the surface of the substrate 3 to be inspected.

The projection plate 743 moves on the inspected substrate 3 in the Y-axis direction in a parallel state having a predetermined gap with respect to the surface thereof in accordance with the synchronous movement of the guide moving parts 7051 and 7052. A guide member 744 is fixed to the holder 2 side of the guide rail 7031 in the vicinity of the holding member 721 to rotate the support 741 as described later.

In addition, when the presence of the guide movement part 7701 is detected by the sensor 717 or 718, the drive of the motor 713 is automatically stopped by the control part 11. As shown in FIG. That is, the guide moving part 7071 may reciprocate only a section on the guide rail 7031 corresponding to the sensors 717 and 718. Similarly, when the presence of the guide moving part 706 is detected by the sensor 719 or 720, the drive of the motor 714 is automatically stopped by the control part 11. That is, the guide mover 706 may reciprocate only a section on the guide rail 704 corresponding to the sensors 719 and 720.

In addition, the holding member 702 attached to the proximal end of the holder 2 is freely supported by the support shaft 15 with respect to the apparatus body 1 in a rotational motion. Thus, the holder 2 can be raised or oscillated at a predetermined angle as indicated by the double-dotted line in FIG. 2.

In addition, the control part 11 shown in FIG. 1 has position coordinates (X, Y), Y scale (defect) of the defect part on the board | substrate 3 to be detected detected by each guide scale which is not shown along the guide rails 704 and 7031. 13) and the observation unit support part 5 and observation by each drive mechanism not shown, starting with management of the observation unit support part 5 and the position coordinates of the observation unit 6 detected by the X-scale 14. Movement control of the unit 6 is performed. In addition, as shown in FIG. 2, the control part 11 has previously memorize | stored the space | interval X0 of the optical axis of the surface illumination light source 8 and the objective lens 91 in the memory which is not shown in figure. The control part 11 observes that the observation axis | shaft of the objective lens 91 in the micro observation unit 9 coincides with the position coordinates X and Y of the defect part on the to-be-tested board | substrate 3 provided from each said guide scale. The unit support part 5 and the observation unit 6 are moved and controlled.

In addition, when the control unit 11 is given a predetermined instruction from the input unit 111 by the inspector in a state where the spot center of the surface illumination light source 8 is located at a defective portion on the inspection target board 3, the Y scale ( 13) and the position coordinates of the defect portion from the position coordinate data detected by the detection unit (not shown) of the X scale 14, and the obtained position coordinates, the optical axis for the surface illumination light source 8, and the objective lens 91 optical axis. The observation unit support part 5 and the observation unit 6 are moved and controlled so that the observation axis of the objective lens 91 coincides with the defect portion on the substrate 3 to be inspected based on the data indicating the interval X0.

Fig. 6 is a diagram showing the configuration of the position detection unit in the substrate inspection apparatus. In FIG. 6, the same code | symbol is attached | subjected to the same part as FIG. The position detection section is provided with a laser light source 21 consisting of a laser light source section 211 and cylindrical lenses 212, 213, and a reflector (mirror) 707 that reflects the laser light emitted from the laser light source section 211 in the Y-axis direction. consist of. The reflector 707 is provided so as to be perpendicular or at an angle to the surface of the substrate 3 to be inspected.

The laser light transmitted from the laser light source portion 211 of the light source 21 and transmitted through the cylindrical lenses 212 and 213 becomes a laser light on a plane substantially perpendicular to the surface of the substrate 3 to be inspected, and is emitted in the X-axis direction. . The laser light is reflected from the reflector 707 in the perpendicular direction, that is, in the Y-axis direction, to become a laser light 750 on a plane substantially perpendicular to the surface of the substrate 3 to be inspected, and to the inclined surface of the projection plate 743. Reflected.

7A, 7B, and 7C are diagrams showing the specific configuration of the laser light source 21 shown in FIG. 6, FIG. 7A is a top view, and FIG. 7B is a partial side cross-sectional view (central view) by AA of FIG. 7A, and FIG. 7C. Is a side cross-sectional view partially by BB of FIG. 7A. The cylindrical lens 213 is assigned to and assigned to the allocation surface 8011 of the lens frame 801. The cylindrical lens 212 is assigned to and assigned to the assignment surface 821 of the lens frame 802. The light shield tube 803 is inserted into the lens frame 801 and is fixed to the lens frame 801 with a fixing screw (not shown). The lens frame 802 is temporarily fixed to the lens frame 801 by a spring 805 attached to the adjustment frame 806.

A plurality of knock pins 811 to 814 are erected on the base 807. Lens frames 801 and 802 are temporarily fixed to the base 807 with the rust pins 811 and 812 as guides. Further, the laser beam 815 is fixed to the base 807 with the pins 813 and 814 as guides. The laser light source portion 211 is fixed to the laser stage 815 by the laser pressing member 816. The base 807 is also fixed to the holding member 721 shown in FIG.

In the case of adjusting the optical axis of the laser light, the inspector puts a shim under the lens frame 801 while emitting the laser light from the laser light source unit 211 so that there is no distortion in the optical axis between the lenses 212 and 213. The lens frame 801 is fixed to the base 807 by a vis 817. Next, the inspector adjusts the optical axis distance between the lenses 212 and 213 by using the adjustment vis 806 to adjust the optical axis distance between the lenses 212 and 213, and the lens frame 803 to the base 807 by the vis 818. Fix it.

8A, 8B, and 8C are diagrams showing modifications of the specific configuration of the laser light source 21 shown in FIG. 6, FIG. 8A is a top view, and FIG. 8B is a side sectional partial view (center) of AA in FIG. 8A. . 8C is a partial cross-sectional side view taken along line B-B of FIG. 8A. The cylindrical lens 213 is assigned to and attached to the assignment surface 9011 of the lens frame 901. The cylindrical lens 212 is assigned to and attached to the allocation surface 9021 of the lens frame 902. The lens frame 901 is inserted into the lens frame 902 and is temporarily fixed to the lens frame 902 by the fixing screws 904.

A plurality of rust pins 911 to 914 are erected on the base 907. Lens frames 901 and 902 are fixed to the base 907 using the rust pins 911 and 912 as guides. In addition, the laser beam 915 is fixed to the base 907 using the rust pins 913 and 914 as guides. The laser light source portion 211 is fixed to the laser beam 915 by the laser pressing member 916. The base 907 is also fixed to the holding member 721 shown in FIG.

When adjusting the optical axis of the laser light, the inspector adjusts the position of the lens frame 901 by using the fixed vis 904 while emitting the laser light from the laser light source unit 211. At this time, the inspector adjusts the optical axis between the lenses 212 and 213 so that there is no distortion, and at the same time adjusts the optical axis distances between the lenses 212 and 213 so that the laser light becomes parallel light. After that, the inspector fixes the lens frame 901 to the lens frame 902 with the fixing screw 904.

In the conventional laser light source, since the optical member for constituting the collimator light was processed integrally, the distance between the lenses could not be properly adjusted. In addition, there is a problem that the optical axis is distorted depending on the method of attaching the lens. As a result, the laser beam diffused, converged, or twisted after passing through the cylindrical lenses 212 and 213.

By dividing the lens frame attaching the lens, and by adjusting the optical axis twist and the optical axis distance between the lenses to eliminate the distortion of the optical axis between the cylindrical lenses (212, 213) can be adjusted to the appropriate inter-lens distance, The laser light after passing through 212 and 213 becomes a laser light without parallel or twist.

9 is a diagram showing the inspection status in the substrate inspection apparatus. As shown in FIG. 9, the whole surface macro illumination light source 30 which irradiates the whole surface of the board | substrate 3 on the holder 2 on the upper part of the apparatus main body 1 is provided. The full surface macro illumination light source 30 includes a metal halogen lamp 31 as a point light source, a reflection mirror 32 disposed to face the metal halogen lamp 31, and a reflection mirror 32 disposed below. Fresnel lens 33 is made. The reflection mirror 32 is installed at an angle of approximately 45 ° with respect to the apparatus main body 1, and reflects the light from the metal halogen lamp 31 to give it to the Fresnel lens 33. The Fresnel lens 33 irradiates the entire surface to be inspected 3 on the holder 2 as convergent light as shown in the light reflected by the reflection mirror 32. In addition, as shown in FIG. 1, the apparatus body 1 is provided with a Y scale 13 for detecting a position coordinate in the Y-axis direction of the observation unit support 5, and the observation unit 6 is provided with an observation unit 6. The X scale 14 for detecting the position coordinate of the X-axis direction of () is provided.

The operation of the substrate inspection apparatus configured as described above will be described. First, in the case of performing macro observation of the surface of the substrate 3 to be inspected, the inspector gives a predetermined instruction from the input unit 111 to the control unit 11 so that the observation unit support unit 5 is controlled by the drive control of the control unit 11. Retreat to the initial position shown in FIG. Thereafter, the tester 3 is supplied to the holder 2 in which the tester is in a horizontal state. In this state, the substrate 3 to be inspected is pressed and positioned on the plurality of substrate positioning members 201, and at the same time, the suction member is sucked and held to prevent the substrate 3 from being removed from the holder 2 by the aspirator. Inspection of defects by observation is started.

Next, the case where the macro observation of the whole surface of the board | substrate 3 under test is collectively demonstrated using macro illumination is demonstrated. In this full surface macro observation, the inspector starts the motor 18 shown in FIG. 2 to rotate the support shaft 15 by the pulley 16 via the rotation shaft 181 and the belt 17, and this support shaft The holder 2 is inclined at a predetermined angle θ, preferably 30 to 45 ° around the center of 15, and then the motor 18 is stopped to stop the holder 2. Next, the inspector lights up the metal halogen lamp 31 shown in FIG. 9 to inspect the light on the holder 2 as convergent light through the reflection mirror 32 and the Fresnel lens 33 through the light from the metal halogen lamp 31. The whole surface of the board | substrate 3 is irradiated. In this state, the inspector inspects the inspected substrate 3 on the holder 2 visually for defects such as scratches or contamination on the inspected substrate 3. In addition, not only the defect inspection is carried out in a state where the holder 2 is inclined at a predetermined angle, but also the inspection is performed by the control unit 11 so as to periodically change the rotational direction of the motor 18. It is also possible to perform defect inspection while sliding the holder 2 within a predetermined range around 15). In this case, since the incident angle of the irradiation light from the metal halogen lamp 31 to the substrate 3 to be inspected becomes variable, the substrate 3 to be inspected can be observed with the irradiation light incident from various angles.

As shown in Fig. 9, the inspector macro-irradiates the surface of the inspected substrate 3 in a state in which the holder 2 is raised to a predetermined angle, and in the macro-observation, the defective portion a on the inspected substrate 3. If it is recognized by operating the operation unit (joystick) to drive the motor 714 to rotate the rotating shaft 716 in one direction or another direction by the pulleys (710, 709) in one direction or the other direction of the X axis To work. Accordingly, the reflector 707 on the guide moving portion 706 is moved along the guide rail 704 with respect to the defect portion a on the surface of the substrate 3 to match the laser beam 750 with the coupling portion a. Let's do it.

In addition, the inspector operates the operation unit to drive the motor 713 to rotate the rotary shaft 7171 in one direction or the other direction to operate the belt 7111 in one direction or the other direction of the Y axis through the pulleys 7071 and 7081. . Accordingly, the support 741 and the projection plate 743 are moved along the guide rail 7031 along the guide rail 7031 with respect to the defective portion a on the surface of the substrate 3 to be inspected. The lower side 7471 is matched on the defect portion a. At this time, with the rotation of the pulley 7081, the pulley 7082 rotates in the same direction as the pulley 7081 through the connecting shaft 730, and the belt 7112 is the belt 7111 through the pulleys 7082 and 7082. ) Is working in the same direction. That is, since the guide moving parts 7071 and 7052 move in the same direction on the Y side in synchronization, the projection plate 743 always moves in the Y axis direction in a state parallel to the X axis.

When the defect position is specified, the laser beam 750 may be matched after the projection plate 743 is matched with the defect portion a, contrary to the above.

The inspector then turns the footswitch ON. Then, at this time, the value of each unillustrated guide scale provided along the guide rails 7031 and 704, that is, the displacement amount in the Y-axis direction from the predetermined origin of the projection plate 743 and the predetermined origin of the reflector 707 The amount of displacement in the X-axis direction is detected as the position coordinates (X, Y) of the defective portion a by each detection portion of each of the guide scales, and the detection result is transmitted from the respective detection portions to the controller 11. Is output.

Thereafter, the same operation is repeated each time the inspector recognizes the defective part on the inspected substrate 3, and data indicating the positional coordinates X and Y of each defective part is input to and stored in the control unit 11. When the inspector finishes the macro observation as described above with respect to the entire surface of the substrate 3 to be inspected, the inspector 15 starts the motor 18 again by the pulley 16 through the rotation shaft 181 and the belt 17. Rotate in the opposite direction to the above to return the holder 2 to the original horizontal state. When the macro observation above is completed, after the evacuation operation of the projection plate 743 shown below is performed, the micro observation is performed.

10A to 10D are views showing the evacuation mechanism of the projection plate 743. FIG. 10A is a top view of a portion of the guide moving part 7701, FIG. 10B is a side view thereof, and FIG. 10C is a top view of a portion of the guide member 744. FIG. 10D is a side view thereof. During the operation of matching the above-described projection plate 743 on the defect portion a, as shown in FIGS. 10A and 10B, the support posts 741 and 742 are in an upright state, and the projection plate 743 is about 45 degrees. It is located on the upper side of the substrate under test 3 in an inclined state. In addition, the support posts 741 and 742 are rotatably supported by the guide moving parts 7701 and 7052 by the rotation shafts 7741 and 7421 (not shown), respectively.

As shown by the solid line in FIG. 1, when micro-observing by the micro-observing unit 9 is performed while the holder 2 is horizontal, the projection plate does not collide with the projection plate 743. 743 must be evacuated from the inspected substrate 3. In this case, the operator operates the operation unit to drive the motor 713 to move the guide moving portions 7071 and 7052 toward the holding member 702. At the same time, when the support 741 reaches the guide member 744 shown in FIG. 10C, as shown in FIG. 10D, the protrusion of the lower part of the support 741 is gradually pushed upward along the slope 7744 of the guide member 744. . Accompanying this, the support posts 741 and 742 are rotated about the rotation shafts 7141 and 7421, respectively, and are finally in a state parallel to the substrate 3 to be inspected. At this time, the posts 741 and 742 are positioned downward from the holder 2 because they are stored in the extended portion of the space between the holder 2 and the guide rail 704. Thereby, the objective lens 91 does not collide with the projection plate 743 at the time of micro observation.

11A to 11D show a modification of the evacuation mechanism of the projection plate 743. FIG. 11A is a top view, FIG. 11B is a front view, and FIG. 11C and 11D are side views. The struts 741 and 742 are rotatably supported by the guide movement parts 7701 and 7052 by the rotation shafts 7741 and 7421, respectively. Coil springs 751 and 752 are wound around the rotation shafts 7741 and 7421, respectively.

End pieces 7511 and 7521 of the coil springs 751 and 752 are hanging on the back of the ceiling part of the guide moving parts 7701 and 7052, respectively. The other ends 7512 and 7522 of the coil springs 751 and 752 protrude from the lower sides of the struts 741 and 742, respectively, at approximately 90 ° with respect to the one end 7511 and 7521, respectively. (Not shown), 7422). In addition, cylindrical stoppers 7033 and 7034 are rotatably supported on the inner side surfaces of the guide rails 7031 and 7032, respectively.

As shown in Figs. 11A to 11C, when the struts 741 and 742 are in an upright state, the elastic bearing force of the coil springs 751 and 752 is respectively supported through the pins 7142 and 7422. 741, 742).

In this state, when the projection plate 743 is retracted from the inspection target board 3, the operator operates the operation unit to drive the motor 713, and the guide moving parts 7071 and 7052 are directed in the holding member 702 direction. Go to. At the same time, when the struts 741 and 742 reach the stoppers 7033 and 7034, the projections 7741 and 7423 below the struts 741 and 742 follow the curved surfaces of the stoppers 7033 and 7034, respectively, as shown in Fig. 11D. It is slowly pushed upwards. Accompanying this, the support posts 741 and 742 are rotated about the rotational shafts 7141 and 7421 against the elastic bearing force of the coil springs 751 and 752, respectively, and are finally parallel to the substrate 3 to be inspected. . At this time, each end piece 7511, 7521 of the coil springs 751, 752 and the other end pieces 7512, 7522 are in a substantially parallel state.

Next, the case where micro observation is performed by the micro observation unit 9 about each defect part detected by the macro observation mentioned above is demonstrated. First, the position coordinates X and Y of the defective portion stored in the memory are read by the control section 11, and then the position coordinates X and Y of the objective lens 91 in the micro observation unit 9 are read. The observation unit support 5 and the observation unit 6 are controlled to move along the guide rails (not shown) above so that the observation axis coincides.

Accordingly, the inspector can microscopically observe the defect portion on the inspected substrate 3 obtained through the objective lens 91 by looking into the eyepiece 92 of the microobservation unit 9. In addition, a microscopic observation is performed by imaging the defect portion of the surface of the inspection target substrate 3 obtained from the objective lens 91 on the TV camera 93, and displaying the image on the TV monitor 12 so that the inspector views the image.

According to the board | substrate inspection apparatus of this embodiment, the holder 2 which hold | maintained the board | substrate 3 to be tested is rotated about the support shaft 15, and a predetermined angle is raised, and a tester can fix a defect in a position close to an eye, Since the macro inspection can be performed by tilting the substrate 3 at an easy-to-view angle, high-precision visual inspection can be performed in a comfortable posture. In addition, even when the holder 2 is raised at any angle, the holder 2 is integrally formed to raise the position coordinate detection unit so that the defective position can always be accurately detected even when the substrate 3 is tilted at any angle. have. Also, by projecting the laser light 750 onto the projection plate 743, the laser landmark can be reliably projected onto the projection plate 743 so that it can be easily adjusted to the defect position by the naked eye.

In addition, since the guide moving parts 7071 and 706 constituting the position coordinate detection part are electrically driven, the inspector can control the operation of the reflector 707 and the projection plate 743 in front of the eyes by operating the operation part. Therefore, especially when a large inspection board is inspected, by matching the laser beam and the projection plate 743 to the defect section, the positional information can be easily taken out even in the defect section far from the inspector.

Furthermore, the movement of the observation unit support part 5 on the surface of the board | substrate 3 with respect to the holder 2 along the one direction, and the observation unit 6 in the direction orthogonal to the movement direction of the observation unit support part 5 is carried out. The observation unit 6 can be moved to any position on the inspected substrate 3 by the movement of. Therefore, the area of the holder 2 can be fixed to approximately the same size as the area of the substrate 3 to be inspected, so that the size of the substrate inspection apparatus can be miniaturized and the installation area of the substrate inspection apparatus can be significantly reduced.

In addition, a guide ball screw or a linear motor may be used to drive the guide moving parts 7071 and 7052 and the projection plate 743. It is also possible to use a light source that emits a parallel light beam such as an LED, and the light source may be replaced with the reflector 707 and attached to the guide moving part 706. The projection plate 743 is not limited to a long plate as long as it can project slit light or spot light such as a laser light, and may be a rod or a rod of a triangular prism.

In addition, although the motor 713 is attached to the pulley 7071 in the structure of FIG. 5 mentioned above, you may make it the structure which attaches the biaxial motor 7130 to the connection shaft 730, as shown in FIG. One rotation shaft 7130a of the biaxial motor 7130 is connected to one connecting shaft 730a through the first cam 730c, and the other rotation shaft 7130b is connected through the second cam 730d. It is connected to the other connecting shaft 730b.

According to this configuration, the two-axis motor 7130 is driven, and the pulleys 7081 and 7082 are rotated in the same direction through the connecting shafts 730a and 730b to operate the belts 7111 and 7112 in the same direction. Accordingly, the guide moving parts 7071 and 7052 can be moved in synchronization with more accuracy.

According to the present invention has the following effects.

(1) According to the substrate inspection apparatus of the present invention, the inspector can perform macro inspection of the inspection target substrate at a position close to the eye, so that defect inspection can be performed in a comfortable posture, so that the substrate holding means can be raised at any angle. Since the position coordinate detecting means is raised by being integrated with the substrate holding means, the defective position can always be accurately detected even when the substrate under test is inclined at any angle. In particular, in the case of inspecting a large inspected substrate, by matching the light and the projection member to the defect portion, the positional information can be easily taken out even in the defect portion far from the inspector. In addition, the area of the substrate holding means can be fixed to the same size as that of the substrate under test, so that the size of the substrate inspection apparatus can be reduced, and the installation area of the substrate inspection apparatus can be significantly reduced.

(2) According to the substrate inspection apparatus of the present invention, since the two pulleys connected through the connecting shaft rotate in the same direction, and the two belts operate in the same direction, the two moving means move in the same direction in synchronization, and the projection member Always moves in parallel.

(3) According to the substrate inspection apparatus of the present invention, the micro-observation system does not collide with the projection member by evacuating the projection member from the substrate under inspection during micro-observation.

In addition, this invention is not limited only to the said embodiment, A deformation | transformation suitably can be implemented in the range which does not change a summary.

According to the present invention, it is possible to provide a substrate inspection apparatus which can realize miniaturization and efficiently perform defect inspection with high precision on a substrate to be inspected.

Claims (6)

Rectangular substrate holding means for holding a substrate under test; Drive means for raising the substrate holding means to a predetermined angle; A position coordinate detecting means provided in the substrate holding means along at least two orthogonal directions of an edge next to the substrate under test to detect a position coordinate of a defective portion on the substrate under test; The position coordinate detection means, Two pairs of guide rails installed in two directions along a side edge of the test substrate; A light source installed to be movable along a pair of guide rails installed in one of the two directions and emitting light in a direction orthogonal to the one direction; A projection member which is installed to be movable along a pair of guide rails installed in the other direction in the two directions while the substrate to be inspected is projected to project light emitted from the light source; And a detection unit for positioning the light beam emitted from the light source and the projection member on the defect portion, and detecting the position coordinates of the defect portion based on the positions of the light source and the projection member in the pair of guide rails. Substrate inspection apparatus, characterized in that. The method of claim 1, Two moving means for moving the projection member along the pair of guide rails by electric force, One of the two moving means has a motor, Each of the moving means, It consists of two pulleys and a belt operated by the drive of the motor, Further, a substrate inspection apparatus comprising a connecting shaft for connecting one pulley of each of the moving means. The method of claim 1, Two moving means for moving the projection member along the pair of guide rails by electric force, Each of the moving means, Consists of two pulleys and a belt, In addition, the connecting shaft for connecting one pulley of each of the moving means, A board inspection apparatus comprising a motor for driving the connecting shaft. The method according to any one of claims 1 to 3, wherein And a evacuation mechanism for evacuating the projection member from the substrate under test. The method according to any one of claims 1 to 3, wherein And an adjusting means for adjusting an optical axis of light emitted from the light source. The method of claim 4, wherein And an adjusting means for adjusting an optical axis of light emitted from the light source.