CN1272624C - Flood light for appearance inspection - Google Patents
Flood light for appearance inspection Download PDFInfo
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- CN1272624C CN1272624C CNB01802520XA CN01802520A CN1272624C CN 1272624 C CN1272624 C CN 1272624C CN B01802520X A CNB01802520X A CN B01802520XA CN 01802520 A CN01802520 A CN 01802520A CN 1272624 C CN1272624 C CN 1272624C
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- light
- fresnel lens
- appearance inspection
- lighting source
- catoptron
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
A floodlight for appearance inspection, comprising an illuminating light source, a reflecting optical system reflecting the light from the illuminating light source to an inspected member, and a converging optical system disposed in the reflecting light route of the reflecting optical system, wherein the converging optical system is divided into at least two parts so that the entire surface of the inspected member can be radiated by an illumination light flux from each part of the converging optical system.
Description
Technical field
The present invention relates to be used for the flood light for appearance inspection of the visual examination of large substrates such as liquid crystal glass base.
Background technology
In the past, for the quality with the glass substrate of LCD remains on stable status, the visual examination of dust that adheres on uneven or the irregular or substrate surface of the figure that is printed on the visual examination of the pin hole on the irregular or ITO film of thickness such as the resist on the substrate etc. and the substrate or damage etc. is extremely important.In the visual examination of such substrate, using to be disclosed in (Japan) spy and to open flat 5-232040 communique, spy and open that flat 5-232032 communique, spy are opened flat 9-273996 communique, the spy opens the flood light for appearance inspection in the 2000-97864 communique.
Fig. 7 is that expression is disclosed in the figure that the spy opens the schematic configuration of the flood light for appearance inspection in the flat 5-232032 communique.In flood light for appearance inspection shown in Figure 7, carry out the visual examinations such as pin hole on the irregular or ITO film of the thickness such as resist on the glass substrate.
Configuration ELLIPTIC REVOLUTION mirror 102 in the back of light source 101.Illumination light from light source 101 is reflected by ELLIPTIC REVOLUTION mirror 102, accumulates on the gate 104 by infrared absorbing filter 103.And then illumination light incides optically focused with on the Fresnel lens 106 by light filter 105, is restricted to parallel beam.In by the parallel beam of this optically focused, will dispose with respect to the angle that optical axis has regulation as the glass substrate 107 of part being inspected with Fresnel lens 106 restrictions.
In the flood light for appearance inspection that constitutes such structure, the surface of illuminating glass substrate 107 equably, observer 108 can be by the visual small scattered light that produces from the surface of glass substrate 107 of observing.Thus, detect defective part such as pin hole 109 on irregular, the ITO film of thickness such as resist on the glass substrate 107.
Fig. 8 is that expression is disclosed in the figure that the spy opens the schematic configuration of the flood light for appearance inspection in the flat 5-232032 communique.In Fig. 8, attached with same numeral for the part identical with Fig. 7.In flood light for appearance inspection shown in Figure 8, can carry out the visual examination of the dust that on uneven or the irregular or substrate surface of the figure that prints on the glass substrate, adheres to or damage etc.
In Fig. 8, except the structure of Fig. 7, in by the parallel beam of optically focused, also dispose light projector Fresnel lens 110 with Fresnel lens 106 restrictions.In the light path of the A front, pack position of the light beam that this light projector produces with Fresnel lens 110, the glass substrate 107 of part being inspected is disposed with respect to the angle that optical axis has regulation.
In the flood light for appearance inspection that constitutes such structure, the surface of illuminating glass substrate 107 equably, observer 108 is from can be by the visual small scattered light that produces from the surface of glass substrate 107 of observing near the catoptrical pack position S of glass substrate 107.Thus, can detect defective part 111 such as the dust that on uneven or irregular or glass substrate 107 surfaces of figure of printing on the glass substrate 107, adheres to or damage.
But at present, LCD has the trend that maximizes day by day.Along with this trend, the glass substrate that is used for LCD is also maximized, and reaches the size of 1000mm * 1200mm.
Yet,, when glass substrate maximizes, also need and the equal above optically focused of the size of this glass substrate Fresnel lens 106 or light projector Fresnel lens 110 even constitute any one flood light for appearance inspection of said structure.Therefore, these optically focused have the trend that maximizes day by day with Fresnel lens 106 or light projector with Fresnel lens 110.
In the prior art, lens diameter increases to more than necessity, is difficult in the making lens performance is kept certain, therefore also is difficult to throw light on equably on glass substrate 107.Therefore, the problem that has the reliability decrease of the visual examination that makes large substrate.And, if use large-scale optically focused with Fresnel lens 106 or light projector with Fresnel lens 110, so otherwise the bending deflection that produces the lens that cause because of deadweight then is difficult to be installed on the device, but also produce the unavoidable device such problem that maximizes of keeping away.
The object of the present invention is to provide a kind of small-sized flood light for appearance inspection, can throw light on equably for the integral body of large-scale part being inspected.
Summary of the invention
(1) a kind of flood light for appearance inspection, it is to be used at the surface irradiation beam spot of large substrate it is characterized in that comprising with the appearance inspection device that the whole face of substrate carried out visual examination: a plurality of lighting sources that thrown light in the surface of described large substrate; A plurality of catoptrons, it is set between described each lighting source and the described large substrate, and the illumination light from described each lighting source is reflected to described large substrate; And a plurality of Fresnel lenses, be configured a plurality ofly in its reflected light path between described each catoptron and described large substrate, and make from the described illumination light pack of described each lighting source and shine the surface of described large substrate,
Making described each Fresnel lens is centroclinal with the lateral margin that adjoins each other, so that overlapped on described large substrate from the part of each convergent pencil of rays of described each Fresnel lens.
As above-mentioned (1) described flood light for appearance inspection, it is characterized in that (2) described each lighting source and described each catoptron are single to be set up corresponding to described each Fresnel lens.
(3) as above-mentioned (1) described flood light for appearance inspection, it is characterized in that, described a plurality of Fresnel lens is 1 group with 2 of configuration arranged side by side, 2 described each catoptrons are set, so that single to each Fresnel lens that should organize and reflecting surface toward the outer side, and, these each catoptrons of single correspondence and 2 described each lighting sources are set.
(4) as above-mentioned (1) described flood light for appearance inspection, it is characterized in that, described a plurality of Fresnel lens is 1 group with 2 of configuration arranged side by side, singlely make reflecting surface 2 described each catoptrons are set to each Fresnel lens that should organize to be 1 group, 1 rotatable 180 ° described lighting source is set between described 2 catoptrons that constitute this group towards medially.
(5) as above-mentioned (1) described flood light for appearance inspection, it is characterized in that, described a plurality of Fresnel lens is interconnected setting, and with the joint is that the center tilts downwards with respect to horizontal direction, and the optical axis that makes described each Fresnel lens intersects in the focal position or concentrates, so that by surperficial overlapping at described large substrate of the part of each illuminating bundle of each Fresnel lens pack.
(6) as above-mentioned (1) described flood light for appearance inspection, it is characterized in that described a plurality of Fresnel lens, be provided with four at fore-and-aft direction and left and right directions, the depth size that is arranged at the Fresnel lens of rear side forms longer than the depth size of the Fresnel lens that is arranged at the front side.
As above-mentioned (1) described flood light for appearance inspection, it is characterized in that (7) described each Fresnel lens comprises: make the 1st Fresnel lens that becomes parallel beam by the illumination light of described reflective optics reflection; And respectively make from the 2nd Fresnel lens of the parallel beam pack of described the 1st Fresnel lens ejaculation.
(8) as above-mentioned (1) described flood light for appearance inspection, it is characterized in that described each catoptron is configured in the top of the body interior of described appearance inspection device, and be the center rotation with the support portion, thus, with respect to the illumination light of above-mentioned large substrate scanning from described each lighting source.
(9) as above-mentioned (8) described flood light for appearance inspection, it is characterized in that described support portion is set at the position of being partial to described light source side from the center of described each catoptron.
(10) as above-mentioned (1) described flood light for appearance inspection, it is characterized in that, has the driving mechanism that described each lighting source or described each Fresnel lens are relatively moved with respect to optical axis direction, by this driving mechanism described each lighting source or described each Fresnel lens are moved on optical axis direction, and can adjust the range of exposures of the illumination beam on the surface that is irradiated onto described large substrate.
Description of drawings
Fig. 1 is the outboard profile of schematic configuration of the flood light for appearance inspection of expression the present invention the 1st embodiment.
Fig. 2 is the front view (FV) of schematic configuration of the flood light for appearance inspection of expression the present invention the 1st embodiment.
Fig. 3 is the outboard profile of schematic configuration of the flood light for appearance inspection of expression the present invention the 2nd embodiment.
Fig. 4 is the front view (FV) of schematic configuration of the flood light for appearance inspection of expression the present invention the 2nd embodiment.
Fig. 5 is the outboard profile of schematic configuration of the flood light for appearance inspection of expression the present invention the 3rd embodiment.
Fig. 6 is the vertical view of schematic configuration of the flood light for appearance inspection of expression the present invention the 3rd embodiment.
Fig. 7 is the figure of schematic configuration of the flood light for appearance inspection of expression conventional example.
Fig. 8 is the figure of schematic configuration of another flood light for appearance inspection of expression conventional example.
Embodiment
Below, with reference to accompanying drawing embodiments of the invention are described.
Fig. 1 is the outboard profile of schematic configuration of the flood light for appearance inspection of expression the present invention the 1st embodiment.In Fig. 1, at the internal configurations support 2 of device body 1.This support 2 keeps as the large-size glass substrate 3 that uses in the flat-panel monitors such as part being inspected, for example LCD.Its central part of support 2 can be supported with rotating freely, is that (swing) or counter-rotating are played down along fore-and-aft direction in the center with this support portion.And, can also left and right directions or on front and back and left and right directions swinging mounting 2.
Above device body 1 inside, a plurality of the 1st lighting sources 4 are set.Lighting source 4 for example is made of metal halide lamp.Lighting source 4 towards the face side of device body 1 and on direction all around configuration amount to 4.In Fig. 1, for the sake of simplicity, only illustrate two lighting sources 4,4 of front and back, left side.
Above device body 1 inside, will as a plurality of catoptrons of reflective optics respectively with each lighting source 4 corresponding setting.Catoptron 5 amounts to 4 towards the front and in direction configuration all around.Each catoptron 5 is with respect to the horizontal direction tilted configuration.Two catoptrons 5 of front side with the surface towards front side below, so that will reflect to glass substrate direction described later from the light of each lighting source 4 of front side respectively.Two catoptrons 5 of rear side with the surface towards rear side below, so that will reflect to glass substrate direction described later from the light of each lighting source 4 of rear side.
In each reflected light path of these catoptrons 5, configuration is divided into the light-gathering optics 6 of 4 parts.Each light-gathering optics 6 includes the 1st Fresnel lens 61 and the 2nd Fresnel lens 62 of rectangular-shaped formation.The 1st Fresnel lens 61 is from catoptron 5 incident illumination light and penetrate parallel beam.The 2nd Fresnel lens 62 make from the parallel beam pack of the 1st Fresnel lens 61 incidents and as illumination beam to glass substrate 3.
These four light-gathering optics 6 (6FL, 6FR, 6RL, 6RR) two of each and row arrangement on the fore-and-aft direction of device body 1 and left and right directions.In Fig. 1, for the sake of simplicity, only illustrate two light-gathering optics 6 (6FL, 6RL) of front and back, left side.For two light-gathering optics 6 (6RL, 6RR) of rear side left-right symmetric position identical width dimensions (side-to-side dimensions) is arranged at two light-gathering optics 6 (6FL, 6FR) of left-right symmetric position, the front side of device body 1, depth size (front and back size) forms slightly shortly.For two light-gathering optics 6 (6FL, 6FR) of front side identical width dimensions is arranged at two light-gathering optics 6 (6RL, 6RR) of the rear side left-right symmetric position of device body 1, the depth size forms slightly longways.
Above device body 1 inside, a plurality of the 2nd lighting sources 8 are set.Lighting source 8 for example is made of sodium vapor lamp.Lighting source 8 is disposing 4 altogether on the direction all around towards the face side of device body 1.These lighting sources 8 light that wavelength is different with the metal halide lamp of lighting source 4 shines on the glass substrate 3 by corresponding respectively catoptron 5, light-gathering optics 6.
Fig. 2 is the front view (FV) of the schematic configuration of the above-mentioned flood light for appearance inspection of expression.In Fig. 2, attached with same numeral for the part identical with Fig. 1.As shown in Figure 2, each lateral margin of two light-gathering optics 6 (6FL, 6FR) of device body 1 front side interconnects near the center of the Width of device body 1.And each light-gathering optics 6 (6FL, 6FR) that arrange the front side is the center with each lateral margin that connects, and tilts downwards so that illuminating bundle 7,7 is folded in glass substrate 3 last phase-splitting mutual respects.At this moment, the optical axis of each light-gathering optics 6 is intersected near focus or concentrate, so that from illuminating bundle 7,7 overlapped part on glass substrate 3 of each light-gathering optics 6 (6FL, 6FR).Thus, the zone of the preceding half side part on the glass substrate 3 is by partial illumination.
Interconnect near the center of each side source of two light-gathering optics 6 (6RL, 6RR) of device body 1 rear side and above-mentioned same Width at device body 1.And each light-gathering optics 6 (6FL, 6FR) that rear side is arranged is the center with each lateral margin that connects, and tilts downwards so that illuminating bundle 7,7 is folded in glass substrate 3 last phase-splitting mutual respects.At this moment, the optical axis of each light-gathering optics 6 is intersected near focus or concentrate, so that from illuminating bundle 7,7 overlapped part on glass substrate 3 of each light-gathering optics 6 (6RL, 6RR).Thus, the zone of the preceding half side part on the glass substrate 3 is by partial illumination.
And two light-gathering optics 6 (6RL, 6RR) that are positioned at device body 1 rear side tilt downwards with respect to two light-gathering optics 6 (6FL, 6FR) that are positioned at device body 1 front side.Thus, each beam spot of tandem each light-gathering optics 6FR and 6FL or 6RR and 6RL is near focus, and pack is at different separately position A, A ', B, B '.
Thus, the part of the beam spot of 4 light-gathering optics 6 (6FL, 6FR, 6RL, 6RR) of all around arranging overlapping all beam spot on glass substrate 3.
The front and back of these light-gathering optics 6 and about the angle of inclination be set to angle arbitrarily, so that when support 2 and glass substrate 3 are rotated simultaneously, the illuminating bundle 7 by seeing through each light-gathering optics 6 is the whole surface of illuminating glass substrate 3 equably.In addition, two light-gathering optics 6 (6RL, 6RR) that are positioned at two light-gathering optics 6 (6FL, 6FR) of device body 1 front side and are positioned at device body 1 rear side use each focal length focal length about equally.Yet, also can set the focal length that for example is positioned at two light-gathering optics 6 (6FL, 6FR) of device body 1 front side short, and the focal length that will be positioned at two light-gathering optics 6 (6RL, 6RR) of device body 1 rear side be set longly.
Below, the as above working condition of the flood light for appearance inspection of formation is described.At first, the observer will be placed on the support 2 as the glass substrate 3 of part being inspected.Then, as shown in Figure 1, the observer makes support 2 rise and inclination corresponding to the height of sight line.
Under this state, by each catoptron 5 reflections, incide on 4 light-gathering optics from the light of each lighting source 4.So, in these light-gathering optics 6, penetrate parallel beams from the 1st Fresnel lens 61 separately, penetrate illuminating bundles 7 from the 2nd Fresnel lens 62, shine the subregion of the glass substrate 3 on the support 2 equably.Thus, the observer can damage or fine inspection such as stain by visual for the whole surface of the glass substrate 3 of each illuminating bundle 7 illuminations.
According to this 1st embodiment, will reflect to glass substrate 3 by each catoptron 5 from the light of each lighting source 4, and light-gathering optics 6 is configured on its reflected light path.By 4 such light-gathering optics 6 are set, will shine the subregion of glass substrate 3 from the illuminating bundle 7 of these light-gathering optics 6, make the whole surface of glass substrate 3 illuminated.Therefore, even glass substrate 3 is large-scale, the whole base plate surface of also can throwing light on equably can be checked the fine observation of damage or stain accurately.
Fig. 3 is the outboard profile of schematic configuration of the flood light for appearance inspection of expression the present invention the 2nd embodiment.In Fig. 3, attached with same numeral for the part identical with Fig. 1.
In Fig. 3, each side by side two of configuration on the fore-and-aft direction of device body 1, promptly four light-gathering optics 6 above, two lighting sources 10 are set.Lighting source 10 for example is made up of metal halide lamp.Lighting source 10 is towards the face side of device body 1, on left and right directions and row arrangement.Each light-gathering optics 6 (6FL, 6FR, 6RL, 6RR) is same with the 1st embodiment, centroclinal to glass substrate 3, each optically focused light beam near beam spot, pack is at different separately position A, A ', B, B ', the part of all beam spots overlaps on the glass substrate 3.
In Fig. 3, for the sake of simplicity, the lighting source 10 in left side only is shown.These lighting sources 10 are by not shown driving mechanism, and are rotatable in the scope with respect to vertical direction 180 ° of directions of arrow in figure.
Fig. 4 is the front view (FV) of the schematic configuration of the above-mentioned flood light for appearance inspection of expression.In Fig. 4, attached with same numeral for the part identical with Fig. 3.In this structure, make each lighting source 10 carry out 180 ° of rotations along mutually same direction, under the state of each catoptron 5 of front side, shine preceding half side regional 31 on the glass substrate 3 by each catoptron 5 and each light-gathering optics 6 at device body 1 separately from the light of each lighting source 10.
Make each lighting source 10 equally along 180 ° of rotations of other direction, under the state of each catoptron 5 of rear side, shine territory, later half lateral areas 32 on the glass substrate 3 by each catoptron 5 and each light-gathering optics 6 at device body 1 separately from the light of each lighting source 10.
That is, ° switch direction of illumination, can replace preceding half side and back each half side zone of illuminating glass substrate 3 by making each lighting source 10 Rotate 180.Thus, can check the fine observation of the damage of glass substrate 3 or stain etc. accurately.
According to this 2nd embodiment, can constitute by two lighting sources 10 of left and right directions setting, to compare with the 1st embodiment, part count reduces, and can make equipment miniaturization, and can make on low price ground.
Fig. 5 is the outboard profile of schematic configuration of the flood light for appearance inspection of the expression embodiment of the invention 3.In Fig. 5, attached with same numeral for the part identical with Fig. 1.In Fig. 5, above device body 1 inside, the lamp optical system 20 of the drive-type of many group (being two groups in illustrated example) lighting sources 21 and catoptron composition is set.Lighting source 21 for example is made up of metal halide lamp.Lamp optical system 20 adds up to two groups of configurations towards the face side of device body 1 on the left and right directions of rear side.In Fig. 5, for the sake of simplicity, the lamp optical system 20 (20L) in left side only is shown.
And, above device body 1 inside, will as a plurality of catoptrons 51 of reflective optics respectively with the corresponding setting of each lamp optical system 20 (20L, 20R).Catoptron 51 adds up to two of configurations on face side and the left and right directions at rear side.Each catoptron 51 is the center with support portion 52, can swing along fore-and-aft direction, will reflect to glass substrate direction described later from the light of each lamp optical system 20 (20L, 20R).
In each reflected light path of these catoptrons 51, configuration is divided into the light-gathering optics 6 of two parts.These two light-gathering optics 6 (6L, 6R) tilt downwards and are configured in side by side on the left and right directions of device body 1.At this moment, pack is at different position A, A respectively near beam spot for each beam spot of each light-gathering optics 6L, 6R, and the part of all beam spots overlaps on the glass substrate 3.In Fig. 5, for the sake of simplicity, only illustrate a light-gathering optics 6 (6L) in left side.
Fig. 6 is the vertical view of the schematic configuration of the above-mentioned flood light for appearance inspection of expression.In Fig. 6, attached with same numeral for the part identical with Fig. 5.In each lamp optical system 20 (20L, 20R), lighting source 21 and catoptron 22 carry out interlock and by direction driving to the left and right, catoptron 22 is rotated by not shown cam mechanism simultaneously.Each lighting source 21 difference of lamp optical system 20 (20L, 20R) are direction, right irradiates light left.On the light path of each lighting source 21, dispose catoptron 22 respectively.Each catoptron 22 will tilt orientating reflex mirror 51 respectively upward to reflection from the light of each lighting source 21.
Each lamp optical system 20 (20L, 20R) from A condition under the situation of B state-driven, each lighting source 21 moves to the lateral direction of device body 1 (left to, right) respectively.Move to this lateral direction with each catoptron 22 of each lighting source 21 interlock, simultaneously by the direction rotation slightly laterally of above-mentioned cam mechanism.Light from each lighting source 21 passes through each catoptron 22 obliquely upward to irradiation.Thus, from the light of each lamp optical system 20 (20L, 20R) by catoptron 51 and each light-gathering optics 6 shine on the zone in the outside (left side, right side) on the glass substrate 3 separately.Each lamp optical system 20L, 20R carry out drive, perhaps also can drive by interlock on same direction.
Be driven to from the state of B in each lamp optical system 20 (20L, 20R) under the situation of state of A, each lighting source 21 moves to the interior side direction of device body 1 (left to, right) respectively.Move with each catoptron 22 side direction in this of each lighting source 21 interlock, simultaneously by the direction rotation slightly to the inside of above-mentioned cam mechanism.Light from each lighting source 21 shines obliquely upward by catoptron 22 respectively.Thus, shine the zone of the inboard (right side, left side) on the glass substrate 3 respectively by each catoptron 51 and each light-gathering optics 6 from the light of each lamp optical system 20 (20L, 20R).
Promptly, each lamp optical system 20 (20L, 20R) of the left-right symmetric configuration formed of direction portable lighting light source 21 and catoptron 22 to the left and right, and by with each catoptron 51 forwards, backwards direction move, irradiates light is scanned, at random each zone on the illuminating glass substrate 3 all around.Thus, can check the damage of glass substrate 3 or the fine observation of stain accurately by the whole surface scan illumination light of each catoptron 22 and 51 pairs of glass substrates 3.
According to the 3rd embodiment, constitute by two lighting sources 21 and two catoptrons 51, so compare with the 1st, the 2nd embodiment, part count reduces, and can make equipment miniaturization, and can make on low price ground.
In above-mentioned the 1st～the 3rd embodiment, use four or two light-gathering optics 6, equably the whole surface on the illuminating glass substrate 3.The present invention is not limited to this, also can use three above light-gathering optics 6, with the further segmentation of zone of the local lighting on the glass substrate 3.In addition, if cut the beam diameter that can reduce light-gathering optics 6, can replace Fresnel lens with convex lens so and constitute light-gathering optics 6 by the segmentation of field of illumination.
In above-mentioned the 2nd embodiment, only rotate lighting source 10, but also a lighting source 10 and catoptron 5 interlocks can be driven, alternately preceding half side and back each the half side zone on the illuminating glass substrate 3.According to such structure, further reduce part count, can make equipment miniaturization, and low price ground makes.
Also the lighting source 4,10,21 of above-mentioned the 1st～the 3rd embodiment can be moved with respect to catoptron 5,5,22 (optical axis direction) respectively by not shown driving mechanism.In this case, along with making lighting source 4,10,21, enlarge, thereby the range of exposures on the glass substrate 3 increases from catoptron 5,5,22 beam reflected near catoptron 5,5,22.Along with lighting source 4,10,21 away from catoptron 5,5,22, narrow down from catoptron 5,5,22 beam reflected, thereby the range of exposures on the glass substrate 3 reduces.
Light-gathering optics 6 can be moved with respect to catoptron 5,5,21 (optical axis direction).In this case, along with making light-gathering optics 6, enlarge, thereby the range of exposures on the glass substrate 3 increases from catoptron 5,5,51 beam reflected near catoptron 5,5,51.Along with light-gathering optics 6 away from catoptron 5,5,51, narrow down from catoptron 5,5,51 beam reflected, thereby the range of exposures on the glass substrate 3 reduces.Have again, can drive each lighting source and each light-gathering optics respectively, and can adjust the angle of inclination of each light-gathering optics separately.
So, relatively move by making lighting source and light-gathering optics, for the focal position of light-gathering optics, make the position deviation optical axis direction of lighting source, can be fit to the adjustment of the range of exposures of glass substrate 3 sizes.
According to switching to opaque or transparent scattering liquid crystal plate (transmissive liquid crystal panel) to giving the purpose of the optical characteristics of regulation from the pack light beam of light-gathering optics leaded light, also can being provided with.Shear (シ ャ-カ ス) illumination by having used this scattering liquid crystal plate can not have the throw light on whole surface of large substrate, speckle ground, detects the defective of pin hole on the irregular or nesa coating of thickness etc. well.
According to the present invention as above, the whole surface of the large-scale part being inspected of can throwing light on equably can be damaged the fine inspection with stain etc. accurately.In addition,, light-gathering optics is split up into a plurality of focal lengths that shorten illuminator, the height of restraining device, miniaturization that can implement device by return light with catoptron from illuminator.
The present invention is not limited to the various embodiments described above, can be out of shape enforcement in the scope that does not change main spirit in good time.
But the usability on the industry
According to the present invention, can provide large-scale part being inspected is evenly thrown light on whole little The flood light for appearance inspection of type.
Claims (10)
1. flood light for appearance inspection, it is to be used at the surface irradiation beam spot of large substrate it is characterized in that comprising with the appearance inspection device that the whole face of substrate carried out visual examination:
The a plurality of lighting sources that thrown light in the surface of described large substrate;
A plurality of catoptrons, it is set between described each lighting source and the described large substrate, and the illumination light from described each lighting source is reflected to described large substrate; And
A plurality of Fresnel lenses are configured a plurality ofly in its reflected light path between described each catoptron and described large substrate, and make from the described illumination light pack of described each lighting source and shine the surface of described large substrate,
Making described each Fresnel lens is centroclinal with the lateral margin that adjoins each other, so that overlapped on described large substrate from the part of each convergent pencil of rays of described each Fresnel lens.
2. flood light for appearance inspection as claimed in claim 1 is characterized in that, described each lighting source and described each catoptron are single to be set up corresponding to described each Fresnel lens.
3. flood light for appearance inspection as claimed in claim 1, it is characterized in that, described a plurality of Fresnel lens is 1 group with 2 of configuration arranged side by side, 2 described each catoptrons are set, so that single to each Fresnel lens that should organize and reflecting surface toward the outer side, and, these each catoptrons of single correspondence and 2 described each lighting sources are set.
4. flood light for appearance inspection as claimed in claim 1, it is characterized in that, described a plurality of Fresnel lens is 1 group with 2 of configuration arranged side by side, singlely make reflecting surface 2 described each catoptrons are set to each Fresnel lens that should organize to be 1 group, 1 rotatable 180 ° described lighting source is set between described 2 catoptrons that constitute this group towards medially.
5. flood light for appearance inspection as claimed in claim 1, it is characterized in that, described a plurality of Fresnel lens is interconnected setting, and with the joint is that the center tilts downwards with respect to horizontal direction, and the optical axis that makes described each Fresnel lens intersects in the focal position or concentrates, so that by surperficial overlapping at described large substrate of the part of each illuminating bundle of each Fresnel lens pack.
6. flood light for appearance inspection as claimed in claim 1, it is characterized in that, described a plurality of Fresnel lens is provided with four at fore-and-aft direction and left and right directions, and the depth size that is arranged at the Fresnel lens of rear side forms longer than the depth size of the Fresnel lens that is arranged at the front side.
7. flood light for appearance inspection as claimed in claim 1 is characterized in that, described each Fresnel lens comprises: make the 1st Fresnel lens that is become parallel beam by the illumination light of described reflective optics reflection; And respectively make from the 2nd Fresnel lens of the parallel beam pack of described the 1st Fresnel lens ejaculation.
8. flood light for appearance inspection as claimed in claim 1, it is characterized in that described each catoptron is configured in the top of the body interior of described appearance inspection device, and be the center rotation with the support portion, thus, with respect to the illumination light of above-mentioned large substrate scanning from described each lighting source.
9. flood light for appearance inspection as claimed in claim 8 is characterized in that described support portion is set at the position of being partial to described light source side from the center of described each catoptron.
10. flood light for appearance inspection as claimed in claim 1, it is characterized in that, has the driving mechanism that described each lighting source or described each Fresnel lens are relatively moved with respect to optical axis direction, by this driving mechanism described each lighting source or described each Fresnel lens are moved on optical axis direction, and can adjust the range of exposures of the illumination beam on the surface that is irradiated onto described large substrate.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000253924 | 2000-08-24 | ||
| JP253924/00 | 2000-08-24 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2004100578198A Division CN1645115A (en) | 2000-08-24 | 2001-08-23 | Flood light for appearance inspection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1388897A CN1388897A (en) | 2003-01-01 |
| CN1272624C true CN1272624C (en) | 2006-08-30 |
Family
ID=18742953
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2004100578198A Pending CN1645115A (en) | 2000-08-24 | 2001-08-23 | Flood light for appearance inspection |
| CNB01802520XA Expired - Fee Related CN1272624C (en) | 2000-08-24 | 2001-08-23 | Flood light for appearance inspection |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2004100578198A Pending CN1645115A (en) | 2000-08-24 | 2001-08-23 | Flood light for appearance inspection |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP4383047B2 (en) |
| KR (2) | KR20040053375A (en) |
| CN (2) | CN1645115A (en) |
| TW (1) | TW514725B (en) |
| WO (1) | WO2002016916A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102778461A (en) * | 2012-08-21 | 2012-11-14 | 深圳市华星光电技术有限公司 | Detection method and detection device of glass substrate in liquid crystal display |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100508190B1 (en) * | 2003-11-11 | 2005-08-17 | 주식회사 에이디피엔지니어링 | A Flood Light for appearance inspection of LCD surface |
| TW200614412A (en) * | 2004-09-27 | 2006-05-01 | Olympus Corp | Macroscopic inspection apparatus and macroscopic inspection method |
| KR101032079B1 (en) * | 2004-11-18 | 2011-05-02 | 엘아이지에이디피 주식회사 | Apparatus for inspecting substrate |
| JP4633499B2 (en) * | 2005-02-28 | 2011-02-16 | オリンパス株式会社 | Appearance inspection apparatus and appearance inspection method |
| KR100834853B1 (en) * | 2007-03-27 | 2008-06-03 | 호서대학교 산학협력단 | Lighting apparatus of checking large glass plate for display device |
| JP2011175735A (en) * | 2008-06-27 | 2011-09-08 | Abel Systems Inc | Light beam adder |
| CN103868938A (en) * | 2012-12-17 | 2014-06-18 | 中国振华集团永光电子有限公司 | Filling quality detection method and apparatus for LED module |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09106705A (en) * | 1995-10-11 | 1997-04-22 | Mitsubishi Electric Corp | Light source device and projection display device using it |
| JP3625953B2 (en) * | 1996-04-03 | 2005-03-02 | オリンパス株式会社 | Projection device for visual inspection |
| JP4576006B2 (en) * | 1998-09-21 | 2010-11-04 | オリンパス株式会社 | Projection device for visual inspection |
-
2001
- 2001-08-23 CN CNA2004100578198A patent/CN1645115A/en active Pending
- 2001-08-23 KR KR10-2004-7008035A patent/KR20040053375A/en active Search and Examination
- 2001-08-23 KR KR1020027004474A patent/KR20020065480A/en active Search and Examination
- 2001-08-23 JP JP2002521961A patent/JP4383047B2/en not_active Expired - Fee Related
- 2001-08-23 WO PCT/JP2001/007216 patent/WO2002016916A1/en not_active Application Discontinuation
- 2001-08-23 CN CNB01802520XA patent/CN1272624C/en not_active Expired - Fee Related
- 2001-08-24 TW TW090120969A patent/TW514725B/en not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102778461A (en) * | 2012-08-21 | 2012-11-14 | 深圳市华星光电技术有限公司 | Detection method and detection device of glass substrate in liquid crystal display |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20020065480A (en) | 2002-08-13 |
| KR20040053375A (en) | 2004-06-23 |
| TW514725B (en) | 2002-12-21 |
| CN1388897A (en) | 2003-01-01 |
| JP4383047B2 (en) | 2009-12-16 |
| WO2002016916A1 (en) | 2002-02-28 |
| CN1645115A (en) | 2005-07-27 |
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