CN1249427C - Substrate holding device - Google Patents
Substrate holding device Download PDFInfo
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- CN1249427C CN1249427C CNB028022920A CN02802292A CN1249427C CN 1249427 C CN1249427 C CN 1249427C CN B028022920 A CNB028022920 A CN B028022920A CN 02802292 A CN02802292 A CN 02802292A CN 1249427 C CN1249427 C CN 1249427C
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- base plate
- substrate
- retainer shaft
- keeping device
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/04—Optical benches therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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Abstract
A substrate holding device comprises a substrate holder (1) in the form of a frame having an opening and attractively holding the peripheral edge of a glass substrate (4), and a substrate sucking member (20) disposed in a predetermined position in the opening in the substrate holder to attractively hold the glass plate.
Description
Technical field
The present invention relates to for example base plate keeping device of the large-size glass substrate of the flat-panel screens of LCD or OLED display etc. (FPD) of a kind of maintenance.
Background technology
Open in the 2000-7146 communique the spy, put down in writing keep for example flat-panel screens such as LCD and OLED display FPD) the substrate holder of glass substrate (the semiconductor display base plate that also comprises plastic base).This glass substrate keeper be recited as by absorption keep glass substrate the maintenance frame, seal the transillumination of this maintenances frame and be provided with a plurality of glass substrate keepers that constitute with the supporting pin of maintenance glass substrate above with the transparent component of opening, on this transparent component.
In this glass substrate keeper, because thin glass substrate mounting is on a plurality of supporting pins, only the absorption of the edge of this glass substrate is remained on and keep on the frame, thereby, utilize the vibration of the downstream of decontamination chamber or grid bed etc. to make the crooked and vibration of middle body of glass substrate.
In addition, be accompanied by the maximization of glass substrate, proposed base plate keeping device as shown in figure 10.Substrate holder 1 forms shaped as frame.Prismatic a plurality of maintenance platforms 2 are set at the peristome place of this substrate holder 1.On these keep platform 2, with interval configuration and fixing a plurality of supporting pins 3 of regulation with becoming row respectively.
On the frame portion periphery of substrate holder 1, be provided for adsorbing a plurality of attraction members (absorption layer) 5 that keep glass substrate 4.These adsorption elements 5 are connected on the not shown suction tube, and sucking action is carried out in the attraction operation that is subjected to suction pump.In addition, the frame portion periphery at substrate holder 1 is provided with a plurality of reference pins 6 and a plurality of by pad 7.
When the surface of carrying out glass substrate 4 was detected, glass substrate 4 mountings utilized a plurality of pins 7 that compress to be pressed against on a plurality of reference pins 6 on substrate holder 1, and the reference position is set.Then, utilize a plurality of attraction members 5 that glass substrate 4 absorption are fixed on the substrate holder 1.
But, compress pin 7 and will approach glass substrate 4 and be pressed against on the reference pins 6 owing to utilize, produce the situation of floating so be present in the central portion of glass substrate 4.In addition,, make the central portion of glass substrate 4 shake along the vertical direction, cause bigger vibration, because the dirty grade of decontamination chamber causes the central portion at glass substrate 4 to produce vibration owing to swinging substrate holder 1 in order to carry out the macroscopic view detection.
Like this, if the central portion of glass substrate 4 shakes along the vertical direction and produces bigger vibration, then defective also produces swing and is difficult to it is observed.In addition, under the situation of utilizing microscopic examination glass substrate 4, if glass substrate 4 upwards floats, then the interval between the surface of object lens and glass substrate 4 changes when the microscopical observation place of vibration, produces focus and departs from.In addition, under the situation of observing,, then before stopping, vibration can not carry out automatic focusing if glass substrate 4 produces vibration with microscope.
In addition, if be subjected to the vibration of above-below direction, the back side that then has a glass substrate 4 contacts with supporting pin 3 and produces the possibility of scar.And then, because dirty blast changes, the central portion of glass substrate 4 produces very big vibration along the vertical direction, if glass substrate 4 is thinner, then since the automatic dirty blast of glass substrate 4 self and supporting pin 3 between produce small bending, glass substrate 4 formation waves.Thereby, can not keep the levelness of glass substrate 4, when utilizing microscope etc. to carry out microscopic observation, cause the focal position to be departed from.On the other hand, when adopting metal prism in order to improve the intensity that keeps platform 2, the transillumination light that is formed by the transmission microscopy observation is blocked by a plurality of maintenance platforms 2, and projection goes out shadow on glass substrate 4, and inspection is caused obstacle.
Summary of the invention
The purpose of this invention is to provide a kind of base plate keeping device that floats and vibrate that can prevent the substrate center part.
The purpose of this invention is to provide a kind of base plate keeping device, this base plate keeping device can suppress to keep platform to make the light quantity of transillumination light reduce the influence that is caused owing to keeping at substrate setting up on the frame, can realize that good transmission microscopy detects, and can adjust the height of supporting pin simply.
Adopt main points of view of the present invention, a kind of base plate keeping device is provided, this base plate keeping device is furnished with: form shaped as frame, absorption with peristome keep the substrate holder of substrate periphery portion and be arranged on the assigned position in the substrate holder peristome, absorption keeps the substrate of substrate to attract member.
Description of drawings
Fig. 1 is the structural drawing of the base plate keeping device of expression first form of implementation of the present invention.
Fig. 2 A is that substrate attracts member and the supporting pin top view with respect to the installation that keeps platform.
Fig. 2 B is that substrate attracts member and the supporting pin side view with respect to the installation that keeps platform.
Fig. 3 A is the top view of supporting pin with respect to the installation that keeps platform.
Fig. 3 B is the side view of supporting pin with respect to the installation that keeps platform.
Fig. 4 is the sectional structure chart that substrate attracts member.
Fig. 5 is the sectional structure chart of supporting pin.
Fig. 6 is used to illustrate that a plurality of substrates attract the diagram of the method for adjusting height of member and supporting pin.
Fig. 7 is the structural drawing of the optical lens of expression second form of implementation of the present invention.
Fig. 8 A is the diagram of an example of the manufacture method of expression optical lens.
Fig. 8 B is the diagram of an example of the manufacture method of expression optical lens.
Fig. 8 C is the diagram of an example of the manufacture method of expression optical lens.
Fig. 9 is the structural drawing that the expression substrate attracts the deformation of members example.
Figure 10 is the summary structural drawing of the existing base plate keeping device of expression.
The optimised form that carries out an invention
Below, with reference to accompanying drawing a form of implementation of the present invention is described.In addition, the part identical with Figure 10 adopts identical symbol, and omits detailed description thereof.
Fig. 1 is the structural drawing of base plate keeping device.This base plate keeping device is applicable in the surface examining device that the surface of the glass substrate 4 of flat-panel screens is checked.In the peristome of substrate holder 1, a plurality of maintenance platforms 10 have been set up.These keep platforms 10 to form skeleton shapes, are arranged on the spacing parallel arranging of regulation in the peristome of substrate holder 1 mutually between two limits of subtend.These keep platform 10 to be made of in the face of banded holding plate 10a, the 10b that overlaps the ground configuration mutually the two boards face.Between these holding plates 10a, 10b, be formed for making the spatial portion 11 of transillumination light transmission.Holding plate 10a, 10b have sufficiently long width dimensions with respect to thickness of slab, are made by the metal that rigidity is high.In addition, holding plate 10a, 10b are coated with vibration-proof material (high attenuating material) in order to suppress vibration on its plate face, make holding plate 10a, 10b with antivibration metals such as grain boundary corrosion stainless steels.As vibration-proof material, can adopt polymer rubber, resin or absorption of vibrations coating, spawn.As absorption of vibrations coating urethanes, propylene, silicone cold coating etc. are arranged.In addition, as spawn organogel, polymer class gel, silicone gel, fluorine ion exchange resin etc. are arranged.In addition, between two holding plate 10a, 10b, also can accompany transparent protective materials.In addition, preferably, change the thickness of holding plate 10a, 10b, change the thickness and the amount of vibration-proof material, make the resonant frequency difference that respectively keeps platform 10, keep platform 10 can not produce resonance each other thereby make so that respectively keep platform 10 can not vibrate.
Assigned position in the peristome of substrate holder 1, for example corresponding to respectively the keeping on the platform 10 of middle body, a plurality of substrates are set attract members 20.In addition, keep on the platform 10 a plurality of supporting pins 30 being set at each.
Fig. 2 A and Fig. 2 B are that the expression substrate attracts member 20 and supporting pin 30 structural drawing with respect to the installation that keeps platform 10, and Fig. 2 A is the structural drawing of observing from the top, and Fig. 2 B is a side view.These substrates attract member 20 and supporting pin 30 to be clamped between two holding plate 10a, the 10b with prescribed distance.Attract to be connected with suction tube 21 on the member 20 at each substrate.This suction tube 21 is configured between two holding plate 10a, the 10b.This suction tube 21 is for example formed by the transmitance material.The bottom surface of two holding plate 10a, 10b is preferably formed by the transmitance member.
Fig. 3 A and Fig. 3 B only are installed in supporting pin 30 structural drawing that keeps on the platform 10.Fig. 3 A is the structural drawing of observing from the top, and Fig. 3 B is a side view.Between two holding plate 10a, 10b, a plurality of supporting pins 30 are arranged every a determining deviation clamping.
Fig. 4 is the sectional structure chart that substrate attracts member 20.Substrate attracts member 20 to be provided with substrate retainer shaft 22.On this substrate retainer shaft 22, form vertically and attract path 23.The adsorption element 24 that is formed by resilient material is installed on the leading section of substrate retainer shaft 22 in the mode that can not come off.On this adsorption element 24, be formed for and the attraction hole 25 that attracts path 23 to be communicated with.Adsorption element 24 utilizes slip-off preventing ring 26 to remain on the leading section of substrate retainer shaft 22.In addition, on the bottom of substrate attraction member 20, suction tube 21 is installed by mounting end 27.This suction tube 21 attracts to be communicated with attracting path 23 on the member 20 by being installed to substrate.In addition, suction tube 21 links to each other with suction pump P on the outside that is arranged on substrate holder 1.
Fig. 5 is the sectional structure chart of supporting pin 30.On supporting pin 30, be provided with columned retainer shaft 31.On the leading section of this retainer shaft 31, form recess 32, in this recess 32, rotatably be provided with ball 33.On the basic side of retainer shaft 31, be formed for accepting the mating groove 35 of the bolted of set bolt 34, be used to form not with set bolt 36 state of contact keep out of the way groove 37.And then, on the retainer shaft 31 of keeping out of the way below the groove 37, form bolt 31a, retainer shaft 31 be formed at the bolt hole 38a threaded engagement that keeps bearing 38 bottoms, (arrow イ direction) is provided with movably along the vertical direction.
Thereby, the height control of supporting pin 30 is performed such: adopt driver to put retainer shaft 31 rotations from the bottom opening that keeps bearing 38 on one side, one edge arrow イ direction moves, and after adjusting height and position, fastening set bolt 34 keeps on the bearing 38 so that retainer shaft 31 is fixedly led.
In the bottom that keeps bearing 38, each planar portions 39,40 that is formed for bearing two holding plate 10a, 10b in both sides.In addition, keeping being formed for each bolt hole 41,42 that each set bolt 34,36 is passed through on the bearing 38.
Adopt the supporting pin 30 that constitutes like this,, can be installed between two holding plate 10a, the 10b and from disassembling therebetween by unclamping set bolt 36, and, only rotate the height that retainer shaft 31 just can be adjusted supporting pin 30.
Secondly, attract the height adjusting of member 20 and a plurality of supporting pin 30 to describe with reference to Fig. 6 to a plurality of substrates that are arranged on the substrate holder 1.
Preparation forms the reference plate 43 of reference plane 44.This reference plane 44 is not have distortion and concavo-convex plane.Two ends on this reference plane 44 are respectively arranged with each standard station 45.These standard stations 45 form altitude datum H, in order to adjust the height that a plurality of substrates attract member 20 and a plurality of supporting pin 30.The arranged spaced that these standard stations 45 adapt with the size with substrate holder 1 will keep platform to turn mounting around between standard station 45,45.
In addition, the height control of substrate attraction member 20 and supporting pin 30 also can be with substrate holder 1 mounting on reference plane 44.
Substrate attracts the height control of member 20, because the adsorption element 24 of the leading section of substrate retainer shaft 22 as shown in Figure 4 forms by resilient material, so the height along with reference plane 44 stretches when this adsorption element 34 contacts with reference plane 44.In this state, substrate attracts member 20 to be fixed with respect to two holding plate 10a, 10b by set bolt etc.
On the other hand, the height control of supporting pin 30 is, from bottom opening insert driver up to the ball 33 of retainer shaft 31 leading sections with till reference plane 44 contacts, maintenance bearing shown in Figure 5 38 is rotated.After the height of this retainer shaft 31 was adjusted, fastening set bolt 34 was fixed to retainer shaft 31 on the maintenance bearing 38.
As a result, whole base plate attracts the height and position of member 20 and supporting pin 30 consistent with reference plane 44, finishes the height control that substrate attracts member 20 and supporting pin 30.
In addition,,, be to be undertaken only by each retainer shaft 31 that moves up and down each supporting pin 30 respectively with above-mentioned the same to the height control of a plurality of supporting pins 30.
Below, the effect of the device that constitutes is in a manner described described.
When carrying out the surface inspection of glass substrate 4, glass substrate 4 is being pressed against on each reference pins 6 and after setting the reference position by respectively compressing pin 7, at first, utilize substrate to attract member 20 to attract the middle body of fixing glass substrate 4.Then, utilize each to attract pad 5 that the edge absorption of glass substrate 4 is fixed on the substrate holder 1.
When suction pump P attracted to operate, a plurality of substrates attracted members 20 to carry out adsorption operations respectively, at the central portion of glass substrate 4 it were adsorbed maintenance.Meanwhile, with a plurality of supporting pin 30 support glass substrates 4.
As a result, owing on the position of periphery and central portion, glass substrate 4 is adsorbed maintenance, so can keep levelness consistently.Thereby, even substrate holder 1 produces swing when macro check, perhaps be subjected to the influence of dirty grade, can not produce unsteady at the central portion of glass substrate 4 yet.
Surface inspection is by adopting the microscopic examination mode of transillumination or indirect illumination to carry out to glass substrate 4.In the microscopic examination mode of transillumination, from the below irradiation transillumination light of glass substrate 4.On the decorating position that keeps platform 10, transillumination illumination is mapped on the glass substrate 4 by the spatial portion 13 between two holding plate 10a, the 10b.Simultaneously, because the rotation of each holding plate 10a, 10b is come the transillumination x-ray diffraction, the transillumination illumination that this diffraction is come is mapped on the glass substrate 4.In addition, on the position that is provided with suction tube 21, transillumination light is spread owing to the attraction light 21 of transmitance and is shone on the glass substrate 4.
Thereby, adopt transillumination microscopic examination mode, shine the light quantity of the transillumination light on the glass substrate 4, even on the decorating position that keeps platform 10, also can suppress the minimizing of light quantity, carry out the surface inspection of glass substrate 4 well.
Like this, in above-mentioned form of implementation, with with glass substrate 4 mountings glass substrate 4 central portions on substrate holder 1 time corresponding in, a plurality of substrates are installed are attracted member 20, thereby, utilize the member 5 that respectively attracts of substrate holder 1 periphery to fix absorption to glass substrate 4, simultaneously, central portion is fixed absorption at periphery.As a result, keep glass substrate 4 reliably with very high levelness.Therefore, when the macro check of glass substrate 4, bug check can not be produced, the surface inspection of glass substrate 4 can be correctly carried out.When carrying out microscopic observation with high magnification by microscope etc., also can make the surface distance of object lens and glass substrate 4 keep certain, can not produce the focus deviation, can on whole of glass substrate 4, utilize the image that overlaps with focus to check.
Each holding plate 10a, 10b are easy to processing, can shorten manufacturing time, so that reduce the cost.
Because a plurality of substrates attract members 20 can be installed between two holding plate 10a, the 10b and from pulling down therebetween, thereby, can be installed on the desired location on the straight line of two holding plate 10a, 10b, and pull down from it.These substrates attract member 20 at random to adjust configuration space according to the size and the weight of glass substrate 4.
A plurality of substrates attract member 20 can adopt reference plate 43 all to adjust to identical height with each standard station 45 with a plurality of supporting pins 30.In this case, substrate attracts member 20 to carry out height control by copying reference plane 44, and supporting pin 30 can carry out height control by retainer shaft 31 is moved up and down.Thereby, can make glass substrate 4 keep higher levelness reliably.
Utilize vibration-proof material that holding plate 10a, 10b are applied (coating), perhaps make holding plate 10a, 10b, perhaps in the gap of holding plate 10a, 10b, sandwich vibration-proof material, reduce the vibration that keeps platform 10 whereby with the vibrationproof metal.Thereby, can suppress the vibration of the glass substrate 4 of mounting on supporting pin 30.
Below, with reference to accompanying drawing second form of implementation of the present invention described.And the part identical with Fig. 1 to Fig. 6 adopts identical symbol, and omits detailed description thereof.This second form of implementation and the above-mentioned first form of implementation difference are, as shown in Figure 7, are provided as the optical lens 50 of the optical component of light scattering or diffusion usefulness between two holding plate 10a, 10b.
This optical lens 50 forms the shape of semicircle cone lens, and, form each auxiliary section 50a.Therefore, optical lens 50 is fixed with respect to two holding plate 10a, 10b, can freely install, dismantle with respect to each holding plate 10a, 10b, and can not come off between each holding plate 10a, 10b.In addition, optical lens 50 is not limited to semicircle cone lensing, also can be provided with diffuser plate, prism, Off Le ネ Le lens.
In the bottom of two holding plate 10a, 10b, the inboard forms each notch 51a, 51b mutually opposite to each other.The part that each notch 51a, 51b have the transillumination light that will come from the below reflexes to respectively between each holding plate 10a, 10b, increases the effect of the light quantity of the transillumination light that is spread by optical lens 50.
Below, an example of the manufacture method of optical lens 50 is described.At first, shown in Fig. 8 B, the column part (bar) 52 that is formed by transmitance resin (for example plastics) that will be shown in Fig. 8 A forms two lens component 52a, 52b along its length direction separated into two parts.
Secondly, two half-terete optical lenses 50 are made in the both sides of cutting each lens component 52a, 52b respectively.
In addition, also can not cut the both sides of lens component 52a, 52b, lens component 52a, 52b former state are inserted between two holding plate 10a, the 10b, these lens components 52a, 52b are used as optical lens 50.
Secondly, the effect by the device of top described formation is described.
When the microscopic examination mode of utilizing transillumination is carried out the surface inspection of glass substrate 4, from the transillumination light of the below of glass substrate 4 irradiation, be set at two between holding plate 10a, the 10b optical lenses 40 diffusions and shine on the glass substrate 4.Meanwhile, the transillumination light with each notch 51a, 51b of two holding plate 10a, 10b contact is reflected between two holding plate 10a, 10b by these notchs 51a, 51b, is spread and shines on the glass substrate 4 by optical lens 40.
Thereby, adopt the microscopic examination mode of transillumination, even the light quantity that shines the transillumination light on the glass substrate 4 also can suppress the minimizing of light quantity on the decorating position that keeps platform 10, can carry out the surface inspection of the glass substrate 4 in the microscopic examination mode of transillumination.And the part of transillumination light is by each notch 51a, 51b reflection and incide between two holding plate 10a, the 10b, thereby, can increase the light quantity of the transillumination light that shines on the glass substrate 4 than above-mentioned first form of implementation better.
Like this, in above-mentioned second form of implementation, owing between two holding plate 10a, 10b, be provided with optical lens 50 as the optical component of light scattering or diffusion usefulness, so utilize optical lens 50 can make transillumination light diffusion and shine on the glass substrate 4, the light quantity that suppresses to shine the transillumination light on the glass substrate 4 reduces, and can enlarge the surface inspection scope of the glass substrate 4 in the microscopic examination mode of transillumination.
And then, by forming each notch 51a, 51b, can increase the light quantity of the transillumination light that shines on the glass substrate 4 better than above-mentioned first form of implementation.
In addition, the invention is not restricted to above-mentioned first and second forms of implementation, but can carry out various distortion.
For example, in above-mentioned first and second forms of implementation, though the embodiment that is applicable to the surface examining device that the surface of the glass substrate 4 of flat-panel screens such as LCD is checked is illustrated, but, the present invention is not limited to this, but goes for being configured in the substrate holder of the various manufacturings of portable one by one exposure device (ス テ Star パ-) on the production line of glass substrate 4 of flat-panel screens etc.
In addition, substrate attracts member 20 can be arranged on the optional position in the peristome of substrate holder 1, and each keeps on platforms also can be arranged on all.And then substrate attracts member 20 also can attract member 20 to replace the supporting pin 30 of all substrate holders 1 with substrate.
In addition, because can transillumination, (the lower aperture portion of glass plate closed substrate keeper 1 for example, placement substrate attracts member 20 on this transparent maintenance body so also can utilize the maintenance body of lens.
In addition, substrate attracts member 20, also can attract member body 60 threaded engagement ground be provided with substrate retainer shaft 61 with respect to substrate as shown in Figure 9, while adjust highly by this substrate retainer shaft 61b being rotated move up and down.On the inner face of substrate attraction member body 60a, form thread groove 62, and form thread protrusion 63 at the leading section of substrate retainer shaft 61.Attract between member body 60 and the substrate retainer shaft 61 at substrate, anti-0 ring 64 that attracts to leak usefulness is set.Attract path 23 to attract the spatial portion 65 of member body 60 to be communicated with suction tube 21 via substrate.
Substrate attracts the height control of member 20 to be, moves up and down while substrate retainer shaft 61 is rotated, and the adsorption element 24 of the leading section of substrate retainer shaft 61 contacts with reference plane 44.Then, fastening set bolt 66, fixing base retainer shaft 61.
Industrial utilizability
The present invention is used for checking such as the blemish at the semiconducting glass substrate of the glass substrate of the flat-panel screens such as liquid crystal display or OLED display (FPD) use etc.
Claims (12)
1, a kind of base plate keeping device, in the peristome of the substrate holder that forms the shaped as frame shape, set up a plurality of maintenance platforms, and keep on the platform a plurality of supporting pins or substrate adsorption element being set, thereby in aforementioned peristome, flatly keep substrate at these, it is characterized in that
The aforementioned platform that respectively keeps is set as lower than substrate installed surface at aforementioned peristome internal frame;
Aforementioned supporting pin or substrate adsorption element possess adjusting mechanism, this adjusting mechanism comprises being configured in and aforementionedly respectively keeps the platform side and be formed with the bearing portion of bolt hole and be formed with the retainer shaft that is coupled to the bolt in the aforementioned bolt hole that this bearing portion forms, by in the aforementioned bolt hole of aforementioned bearings portion, cooperating the aforementioned bolt of aforementioned retainer shaft, adjust the height of aforementioned retainer shaft.
2, base plate keeping device as claimed in claim 1 is characterized in that, aforementioned supporting pin is made of following part: have ball that rotates freely and the retainer shaft that forms bolt in basic side at leading section; Be formed with the maintenance bearing portion of the bolt hole that screws togather with this retainer shaft; Aforementioned retainer shaft is fixed to set bolt in the aforementioned maintenance bearing portion.
3, base plate keeping device as claimed in claim 2 is characterized in that, aforementioned maintenance bearing portion forms the tubular of internal run-through, inserts throw by the opening from basic side end, makes aforementioned retainer shaft rotation, carries out aforementioned height control whereby.
4, base plate keeping device as claimed in claim 1 is characterized in that, aforesaid base plate attracts member to be made of following part: retainer shaft has the adsorption section that is made of the elastic component that adsorbs aforesaid base plate at leading section, and is formed with bolt in basic side; The gas communication path connects aforementioned retainer shaft and forms, and is communicated with aforementioned adsorption section; Substrate adsorption element main body constitutes the shaft supporting part that supports aforementioned retainer shaft, is formed with the spatial portion that is connected with aforementioned gas communication path, and is formed with the bolt hole that screws togather with aforementioned retainer shaft; Set bolt is fixed on aforementioned retainer shaft on the aforesaid base plate adsorption element main body.
5, base plate keeping device as claimed in claim 1 is characterized in that, aforementioned maintenance platform disposes in the opposed facing mode of plate face and constitutes by being two banded holding plates, clamping and fixing aforementioned bearings portion between these two holding plates.
6, base plate keeping device as claimed in claim 1, it is characterized in that, aforementioned maintenance platform is disposed in the opposed facing mode of plate face by two holding plates that are band shape and constitutes, to constitute the aforementioned bearings portion clamping of aforesaid base plate attraction member and be fixed between these two holding plates, and, form the suction tube that is communicated with aforementioned bearings portion with the transmitance member, and aforementioned suction tube is arranged between aforementioned two holding plates.
7, base plate keeping device as claimed in claim 5 is characterized in that, disposes optical component between aforementioned two holding plates, and this optical component makes transillumination light transmission, scattering or diffusion.
8, base plate keeping device as claimed in claim 7 is characterized in that, separated into two parts and the lens that form constitute aforementioned optical component along its length by forming columniform lens with the light transmitting resin.
9, base plate keeping device as claimed in claim 1 is characterized in that, the surface of aforementioned maintenance platform applies with vibration-proof material.
10, base plate keeping device as claimed in claim 1 is characterized in that, the transmitance vibration-proof material that suppresses vibration is set in the gap of aforementioned maintenance platform.
11, base plate keeping device as claimed in claim 1 is characterized in that, changes the thickness or the quality of aforementioned a plurality of maintenance platforms, makes it have different resonant frequencies, makes these keep platform can not produce resonance each other.
12, base plate keeping device as claimed in claim 1 is characterized in that, aforementioned holding plate is disposed in the opposed facing mode of plate face by two holding plates that are band shape and constitutes, and changes the thickness or the quality of these two holding plates, so that the resonant frequency difference.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001201329 | 2001-07-02 | ||
| JP201329/01 | 2001-07-02 | ||
| JP201329/2001 | 2001-07-02 | ||
| JP201328/01 | 2001-07-02 | ||
| JP201328/2001 | 2001-07-02 | ||
| JP2001201328 | 2001-07-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1464976A CN1464976A (en) | 2003-12-31 |
| CN1249427C true CN1249427C (en) | 2006-04-05 |
Family
ID=26618009
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB028022920A Expired - Fee Related CN1249427C (en) | 2001-07-02 | 2002-06-28 | Substrate holding device |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP3752501B2 (en) |
| KR (1) | KR100859933B1 (en) |
| CN (1) | CN1249427C (en) |
| TW (1) | TW550732B (en) |
| WO (1) | WO2003006971A1 (en) |
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| CN103203726B (en) * | 2012-01-11 | 2016-08-10 | 昆山允升吉光电科技有限公司 | Accurately control the object stage of position |
| CN103663994A (en) * | 2012-09-21 | 2014-03-26 | 昆山思拓机器有限公司 | Support mechanism for machining double-sided ITO (Indium Tin Oxide) glass |
| CN102879406A (en) * | 2012-09-24 | 2013-01-16 | 苏州五方光电科技有限公司 | Blue glass inspection tool |
| CN105044949B (en) * | 2015-09-17 | 2018-03-06 | 昆山精讯电子技术有限公司 | Rotary table and display panel testing |
| CN108426897B (en) * | 2018-05-07 | 2021-03-12 | 芜湖良匠机械制造有限公司 | Glass substrate defect detection device |
| CN108772787A (en) * | 2018-05-28 | 2018-11-09 | 苏州光越微纳科技有限公司 | A kind of mantle carrier |
| EP3810825A1 (en) * | 2018-06-25 | 2021-04-28 | Applied Materials, Inc. | Carrier for a substrate and method for carrying a substrate |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09159615A (en) * | 1995-12-08 | 1997-06-20 | Matsushita Electric Ind Co Ltd | Defect inspection device and method of light transmission sheet material |
| JP4175697B2 (en) * | 1998-06-18 | 2008-11-05 | オリンパス株式会社 | Glass substrate holder |
| JP4121662B2 (en) * | 1999-03-24 | 2008-07-23 | オリンパス株式会社 | Board inspection equipment |
-
2002
- 2002-06-28 WO PCT/JP2002/006566 patent/WO2003006971A1/en active Application Filing
- 2002-06-28 CN CNB028022920A patent/CN1249427C/en not_active Expired - Fee Related
- 2002-06-28 KR KR1020037002516A patent/KR100859933B1/en not_active IP Right Cessation
- 2002-06-28 JP JP2003512690A patent/JP3752501B2/en not_active Expired - Fee Related
- 2002-07-02 TW TW091114668A patent/TW550732B/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| CN1464976A (en) | 2003-12-31 |
| KR20030027059A (en) | 2003-04-03 |
| KR100859933B1 (en) | 2008-09-23 |
| JPWO2003006971A1 (en) | 2004-11-04 |
| JP3752501B2 (en) | 2006-03-08 |
| WO2003006971A1 (en) | 2003-01-23 |
| TW550732B (en) | 2003-09-01 |
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