TW550732B - Substrate holding apparatus - Google Patents

Abstract

The present invention provides a substrate holding device comprising a frame having an opening, and a substrate sucking member disposed corresponding to the center of the glass substrate when the glass substrate is disposed on the substrate bracket.

Description

550732 ^ 91114668 1 ———— House—— Amendment 5. Description of the invention (1) [Technical field] The present invention relates to a maintenance solution called a deer-suppressor. ^ A ^, symbol, night display, or organic EL display Isoplanar panel ::, σ a panel display (FPI)) substrate maintenance device for large glass beauty panels. ） [Background technology] Xinbai respectfully violently [Background technology] There is a trip 1 / Khan \ 2 °° 〇-7146 Gazette 'It describes the maintenance of flat panel display units such as LCD monitors or EL displays, etc.] ΓΛ Glass-based & (also includes plastic substrates for semiconductor device substrate maintenance tools. This is mentioned in the record-glass substrate maintenance tools' frame; transparent glass stent maintenance frame, and blocking the openings. The transparent element and the branch clamps of the glass substrates which are erected above the transparent element. In this glass substrate maintenance tool, the thin glass substrate is placed in ash, i: Only the glass substrate is on the support clamp. The surrounding edges are adsorbed and maintained on the frame, so when the down stream of a clean room or a grazing bed vibrates, the center of the glass substrate will bend and vibrate. In addition, with the increase in the size of the glass substrate, the board maintenance device shown in Fig. 10 is proposed. The base bracket (1) is in the shape of a frame. A plurality of openings are mounted on the dust plate bracket ⑴. Corner columnar support table (2). In these A row of support clips (3), σ, are fixed to the upper surface of the maintenance table (2) at fixed intervals, and fixed on the periphery of the frame part of the substrate bracket (1). 4) ^ 41 am 7t pieces (―adsorption pads） (5). These adsorption elements 550732

Case No. 91114668 V. Description of the invention (2) Amendment 5) 'is connected to a suction hose (not shown), and after receiving the suction action of the suction pump, the suction action is performed. In addition, a plurality of reference clips (6) and a plurality of pressing clips (7) are provided around the periphery of the frame portion of the substrate holder (丨). Force When inspecting the surface of the glass substrate (4), the glass substrate (4) is placed on the substrate support (1), and by pressing the number of inflammations (7), it is pressed against the plurality of reference clips (6) 'to set the reference position. Then, the glass substrate (4) is suction-fixed to the substrate holder (1) by a plurality of suction elements (5). However, by pressing the glass substrate (4) in the reference clip (6) by pressing the clip (7), the central portion of the glass substrate (4) floats. In addition, for visual inspection, shake the substrate holder (1), shake the center of the glass substrate (4) up and down, and make it vibrate greatly, or by down-fi (down fi) through a clean room. w), etc., causing the central portion of the glass substrate (4) to vibrate. Vibration will immediately meet the upper body so that when the central part of the glass substrate (4) is shaken up and down and moved greatly, the flawed part will also be difficult to observe as it shakes. In addition, when the glass substrate (4) is observed with a micromirror, when the surface of the glass substrate (4) floats and the observation position of the micromirror is vibrated, the focus distance between the objective lens and the surface of the glass substrate (4) will be out of focus. Case. In addition, when observed with a microscope, although the glass substrate ⑷-vibrates, the problem that autofocusing cannot occur before the vibration stops. For example, when a vibration in the vertical direction is received, the glass substrate (4) may be damaged due to the impact of the fork to the support clip (3). In addition, due to the change in down-flow wind pressure, when the center of the glass substrate (4) is greatly vibrated and the glass substrate becomes thinner, the downstream pressure of the glass substrate will cause the glass substrate (4) to support.

550732 V. Description of the invention (3) Modified q Vo) ί (3) Tiny bends occur between the fields, causing the glass substrate ⑷ to undulate into r, so the level of the glass substrate (4) cannot be maintained. 'Using a microscope, etc. When the T-jaw is micro-observed, its focal position will deviate. For the second aspect, a metal angle (2) is used to increase the strength of the maintenance table (2). This allows the transmitted light through the inspection method to be blocked by a plurality of maintenance tables, resulting in a projection inspection on the glass substrate (4). Obstacles. Sustaining cracks Π: supply of bright light on the substrate that can prevent the central part of the substrate from floating and vibrating: salty: 5 = a maintenance table is set up on the bar to prevent the κ township + inspection mirror caused by the photoless loss, And &## ^ R θ The substrate holding device that is returned to the front fork is [indication of the invention] According to the main point of the present invention, the substrate holder holding the peripheral edge of the substrate is adsorbed and held; A plate holding device is provided on a holding port for holding the substrate horizontally. The base of the supporting clip of the stack structure [Simplified description of the figure:] Figure 1 shows the first embodiment of the present invention rgi. ^ Μ Μ Example of the substrate holding Luo AA Figure 2 A series of maintaining a b Qiqi bamboo attack Figure of the structure— "The adsorption element and support of the substrate on the f-port: the structure of the alpha exhibition"

Page 6 550732 Case No. 91114668 Revised

Page 7 550732 ___________ Case No. 91114668 ______ Date __ V. Description of Invention (5) 11 .........… Space Department 13 .........… Space Department ' 20 ........... Suction element 21 ......... ...... Suction hose 22 ......... ...... Substrate maintenance shaft 23 ............ ················· 24 ............. Sucking element 25 ......... · 26 ............. Shedding groove 27 ......... Mounting end 30 ......... Support clip 31 ......... Maintaining shaft 31a ... .... & ... Screws 32 ......... Recess 33 ......... Small balls 34 ......... … Fixed screws 35 .........… .. Mounting grooves 36 .........…. Screws 37 .........… Temporary grooves 38 .. .......… maintaining the bearing receiving part 3 8a ................ screw hole 39 ............... flat part 40 ... ...... ...... Flat section 41 ......... ...... Screw hole 42 .................. Screw hole

Page 8550732 _____________ Case No. 91114668 ______ Year and Month — Amendment V. Description of Invention (6) 43 ............... • Reference plate 44 ...... ......... •• Reference plane 45 ............... • Reference stage 50 ............... Optical Mirror 51a ............... cut-off portion 51b ............... cut-off portion 5 2a ......... ... mirror element 52b ............ mirror element 60 ......... •• body 61 ... ............. Board holding shaft 62 ............... Screw groove 63 ............... Screw teeth 64 ........ 0 Ring 65 ............ Space 66 ......... ......... Fixing screw [Best embodiment of the invention] Hereinafter, description will be made with reference to only one drawing of one embodiment of the present invention. In addition, the same parts as those in FIG. 10 are denoted by the same symbols, and detailed explanations are omitted. FIG. 1 is a structural diagram of a substrate holding device. The substrate device is suitable for inspecting the surface of a glass substrate (4) of a flat panel display. In the opening portion of the substrate holder (1), a plurality of holding tables (1 0) are set up. These maintenance platforms (10) are stacked and arranged in parallel at a certain interval.

550732 — Case 1 91114668 5. Description of the invention (7) ~ The mouth is in the opening of the substrate holder (1). These sustaining tables (1, (= f plate P; 10a), (1 ° b) are formed. Between these two sustaining plates ul), a space portion (I) is formed through which the illumination light passes. The surname f, 〇〇b) ′ is made of metal two plates with sufficient thickness, length and toughness. In addition, the maintenance plates (10a) and (10b) are made of anti-vibration materials such as rust steel for the purpose of suppressing vibration. The panels are coated with anti-vibration materials (high, *, *). Residues in the grain boundary are not glued, resin, and vibration absorption ^ High polymer rubber is used, and urethane (ethyl aminoacetate is vibrated and coated) In addition, gel-like substances are used, and stone ketone resin Coatings: gel-like, ion-exchange line = organic sol, polymer gel, shiguidone, you can fill in;: = material: two: two holdings; ⑽), (called π 丁士 々 止 材料) 0 In addition, each pull A r 1 η, 仏 can be more vibration-proof = change: hold: ⑽) ,,): degree, rate of change, the two between the maintenance station (10) J = maintenance station (10 Each of the maintenance stages (10) 1 in the central portion of the resonance frequency substrate bracket 1 in the opening bracket), for example, corresponds to the middle and in addition, each of the maintenance stages (10) and σ has a plurality of substrate adsorption elements (20). Figures 2A and 2B, for dimension ί, are provided with a plurality of support clips (30). The installation structure of the clip (30), (H) / the substrate suction element (20), and the second β are side views. This installation is 4— 图 The structure view viewed from above, the picture is arranged at a regular interval 挟 / = ± Attached element (2G) and branch clamp (30), plate adsorption element (20), column far holding plate ( 10a), (10b) in the middle. Each base ⑵), 酉 has been placed on two pieces of suction hose ⑵). The suction hose ⑵) is formed between the transmissive (jGa) and (1Gb). The suction hose

Page 10: --- --- ------- One material is formed. Two pieces of maintenance plate (10a), (l0b) ------——____ 550732

_____R Amendment ---------------__ 91114668 V. Description of the invention (The magic bottom surface is preferably formed of a light-transmitting material. Structure Ξ and-Figure a 'is on the maintenance platform (1G) Only the support clip (30) is installed. Two K ^ three A is a structural view viewed from above, and Figure three B is the support of the side number, mi〇a), u〇b) in the middle, at a fixed interval Duplicates are arranged (2 = γ is a cross-sectional structure view of the substrate adsorption element (20). The substrate adsorption element >, Hachibo cylinder, is provided with a substrate holding shaft (22). In the substrate holding shaft (22), 'Ant forms the adsorption path (23). The front end of the substrate holding shaft (22), (24): f is a suction element attachment hole (πΐ on the suction element (24)) made of an elastic material without being removed. Then there is the rain end of the suction) which is in communication with the suction passage (23). In addition, the lower part of the substrate suction element (20) is attached with a suction hose (⑵). This suction hose ⑵), two = connected, and attached hose ⑵), and the suction 嗖 provided outside the substrate bracket ⑴ have ^: is a cross-sectional structure view of the support clip (30). On the support clip (30), the main shape: the maintenance axis (3). A small ball (33) is provided in the shaft portion (32) at the front end of the maintenance shaft (31). The base of the vehicle (31) is provided with an installation groove for locking the fixing screw (34) and a holding groove (37) when the holding screw is loosened. In addition, there are screws (31a) on the square maintenance shaft (31), and the screw holes kh ik ^ r ο ○ \ in the dimension H are screw holes in the lower part of the maintenance shaft (38) (...) Join and move up and down (in the direction of 刖 硕 刖). Bu Wanxiang 550732 — ^-11114668 V. Description of the invention (9) The correction of the month (3 8) Dibang pq η U moves in the direction of the screwdriver: turn the screwdriver to maintain the axis 〇0 so that it goes to the arrow to maintain Ή / 周 正好 南After fixing the position, lock the fixing screw (34). The shaft (31) is fixed on the bearing receiving portion (38).

(１０〇 巧 1: 7?;: 部 (38) W (38) ± Gugu t plane parts (39), (40). In addition, the bearing receiving part (36) can be maintained; through the screw hole ⑷), ( 42) 'Make the fixing screws (, nails (36H? Support clip (3〇), can be fixed by loosening the fixing screws: sheet retaining plate (10a), (10b), or disassembly The height of the support clip (30) can be adjusted by simply rotating the maintenance shaft (31). ^ Second, regarding the height adjustment of the plurality of substrate adsorption elements and the support clips (30) provided in the substrate holder (丨), Then, it will be described with reference to Fig. 6. A reference plate (block) 43 composed of a reference plane (44) is prepared. The reference plane (44) is a plane without distortion and unevenness. The two ends of the reference plane are provided respectively. Reference bases (45). These reference bases (45) are formed by the U.S. standard height Η of the height of the plurality of substrate adsorption elements (20) and the plurality of support clips (30). These reference bases (45), according to It is suitable for the interval arrangement of the substrate holder, and the table (10) is placed in the reverse direction between the reference tables (45) and (45). In addition, the substrate adsorption element (20) and the support clip (30) height adjustment, the substrate holder (1) can be placed on the reference plane (44). &Amp; Height adjustment of the substrate adsorption element (20) as shown in Figure 4, substrate maintenance (22) The suction element (24) at the front end is formed of an elastic material. Therefore, when the suction element (34) is connected to the reference plane 44, the two ------ --------- -------------—-________ _________________________—. ~ I ^ rye " " —----------—___ ______

Page 12 550732 Λ_Β means correction ~ --------. ^ 1_14668 V. Description of the invention (10) (t 0;: ϊ (because of 44-) ^ 焉 degree of expansion and contraction. In this state, the substrate adsorption element (2 ”screws and so on are fixed to the two maintenance plates (10a), (10b). Adjust the height of the 7-sided support clip (3 0) for the surname, as shown in Figure 5, in (3U 义 ^ 5 3 (38) Insert a screwdriver at the bottom opening, turn the maintenance shaft, and turn the whole shaft twice;;: π 闳 —μ W), then lock the fixing screw (34), and hold the shaft) in the mouth, holding the bearing receiving part (3 8庚 # Ϊ 结 f2 All the substrate adsorption elements (20) and the support clip (30) are on the same level ^ quasi-plane (44), so these substrate adsorption () and the support clip (30) The height adjustment is completed. The height of Ai Er only truncates the number of the support clips (30). As above, 71 f moves the support shaft (31) of each support up and down (31) to adjust. Next, Only the device with the above structure will explain its function. + When the glass substrate (4) is inspected on the surface, the glass substrate (4) is clamped by * 塾 "(7) to each reference clamp (6) and the reference position is set. , First = use Base, suction = 7 blades are attached to the central part of the glass substrate (4) by the element (20). Then, the peripheral edge of the glass substrate (4) is suction-fixed to the substrate holder (1) by each suction pad (5). on.

Suction Puff P — When starting the adsorption action, the plural substrate adsorption elements (): don't perform the adsorption action, and the adsorption maintains the center of the glass substrate ^ Same as the B guard 'glass ㈤ substrate (4) is supported by the plural Clip (30) support. "... Because the peripheral edge and central part of the glass substrate (4) are adsorbed and fixed, it can always maintain the level. Therefore, even if the substrate support (1) is shaken during the visual inspection, or it is subject to downstream (d0wn fi 〇w), the central portion of the glass substrate does not float.

Page 13 550732 —— ^ ——- Turtle in · —Amendment V. Description of the Invention (11) —---: The surface inspection is performed on the glass substrate by using transmission or epi-illumination = mirror mode. In the inspection method of transmission illumination, the transmission illumination light is irradiated below the glass substrate (4). At the erection position of the maintenance table (10), the glass substrate ⑷ was irradiated with the bright light through the space portion (j3) between the two maintenance plates (10 &) and (1⑽). In addition, at the position where the suction hose ⑵) is installed, the transmitted light is diffused on the glass substrate (4) through the transparent suction hose (2 丨). Therefore, even if the amount of transmitted illumination light is irradiated to the glass substrate (4) through the illumination inspection method, the reduction of the amount of light can be suppressed at the installation position of the stage (10), and the glass substrate can be performed well. ⑷ Surface inspection. In this way, in the above embodiment, when the glass substrate (4) is placed on the substrate holder (1), a plurality of substrate adsorption elements (20) are mounted on the central portion of the glass substrate (4), Therefore, the glass substrate (4) can be fixedly adsorbed by the peripheral edge portion 1, and the middle portion of the peripheral edge portion of each substrate element (5) of the substrate holder (1). As a result, a high level of the glass substrate (4) can be reliably maintained. In this way, the visual inspection of the glass substrate (4) is less error-prone and the surface inspection of the glass substrate (4) can be performed accurately. When using a microscope for high magnification microscopic observation, the objective lens can be kept at a certain distance from the surface of the glass substrate p (4) without defocusing, and the image can be focused on the entire surface of the glass substrate (4). Check. A plurality of substrate adsorption elements (20) are installed between two maintenance plates (10a), (10b), and a plurality of support clips (30) are also installed on two maintenance plates (10a), (L〇b), so the transmitted light passes through the two dimensions m ^^ ^

Case 550732 on page 14 l-91114668 Ping Yue _ Amendment V. Invention Description (12) (4), and also installed on the two maintenance boards (00a), (1〇b) later. Only the illumination light is irradiated on the substrate (4). Furthermore, the transmitted light is transmitted to the glass substrate (4) after being diffused through the light-transmitting adsorption tube (2 υ). #This method '1 reduces the amount of light transmitted through the glazed substrate ⑷ and reduces the amount of light transmitted through it. At the minimum, a good penetration inspection of each of the maintenance plates (10a) and (10b) can be achieved, and the goal of easy processing and cost reduction can be achieved. Sister clothing w% Multiple substrate adsorption elements (20), due to ⑽ ), (M) installation and disassembly, households can be installed in two pieces (then, the desired position on the straight line, detachment of / / y anti-plate adsorption element (20), JL with 詈 n A u P ^ two basis weights are arbitrary ㈣. 卩 w can be based on the size of the glass substrate, using the substrate adsorption element (20) and a plurality of branches sandwiched between them, which can be reversed) and each reference platform (45 ), Adjust the height of the surface (44) to% 敕 ancient I + can be hunted by the adsorption element (24) imitating the reference axis ⑶) Shuang (3〇) 'can maintain a high level by moving up and down. In this way, 'the glass substrate (4) can be surely made 3 ° from metal, a) In addition, nt is coated with anti-vibration material, or anti-vibration material is used to suppress vibration, such as: holding plate (10a), 〇b) between the gaps to suppress the vibration placed on the support (30 & maintenance stage (10). Therefore, the next step is the history of the glass substrate (4) vibration. Figure 1 ~ Figure; The second embodiment of the present invention. In addition, it is the same as the second embodiment, and the detailed description is omitted. The second miscellaneous & p N is not detailed, and the detailed description is omitted, which is the same as the first embodiment. The differences are:

Page 15

550732 114668 * ----Amendment V. Description of the invention (13) '0ai' (i 〇b) ^ ^ ^ ^ ^ a 'π; pieces-optical lens (50). to make.梦 此 = ί, king semi-conical, and shaped by each stop (50a) === mirror (50) is tied to 2 pieces to maintain discomfort. Remove the maintenance plates (10a), (10b) from the dimension 2ΓΓ. , And a lens (full nail lens). In addition, the lower part of the diffuser plate, two prisms, one full finger, and the lower part of the holding plate (1 G a) and (1 G b), each with a truncated angle facing the inside = (51 ^), (51b). Each of the truncated corner portions (51a) and (⑽) has a portion of the transmitted illumination light from below reflecting between each of the holding plates (10a) and (10b) and diffusing the optical mirror (50). The effect of the amount of light transmitted through the illumination. Next, an example of an optical (50) manufacturing method will be described. First, a cylindrical member (rod-shaped) 5 2 made of a light-transmitting resin (for example, plastic) as shown in FIG. 8A is divided into two parts according to the long side direction as shown in FIG. 8B to form two mirrors. Components (52a), (52b). Then, two sides of the mirror element (5 2 a) and (5 2 b) are cut away to produce two semi-conical optical mirrors (50).

Moreover, the two sides of the mirror elements (5 2 a) and (5 2 b) are not cut apart, and if the mirror elements (52a) and (52b) can be directly inserted into the two maintenance plates (10a) and (10b), Meanwhile, these mirror elements (52a) and (52b) can also be used as optical mirrors (50). Next, the function of the above-structured device will be described. Surface inspection of glass substrate (4) by inspection of transmitted light

Page 16 550732 —————— m_ ^ I14668 _______ 绦 Zhengwei V. Description of the invention (14) ^ _ When the transmitted illumination light is irradiated from below the glass substrate (4), it is maintained on 2 pieces by setting The optical mirrors (40) between the plates (10a) and (10b) were diffused and irradiated onto the glass substrate (4). At the same time, the transmitted illumination light is irradiated on the chamfered portions (51a) and (51b) on both sides of the two holding plates (10a) and (10b), and these chamfered portions (51a) and (51b) are transmitted. The two sustaining plates (10a) and (10b) are reflected upward and diffused through the light mirror (40) and irradiated onto the glass substrate (4). Therefore, 'even if it is a transmission inspection method, the amount of transmitted illumination light irradiated on the glass substrate (4) can be suppressed at the mounting position of the maintenance stage (10), and the reduction of the amount of light can be suppressed, and the transmission illumination can be achieved by The inspection method is used for surface inspection of the glass substrate (4). Moreover, since a part of the transparent light is reflected on each truncated corner portion ⑸a), (51b) and enters 2 pieces:; ,,,,, and ❸ (10, a), (1 0b), Therefore, the amount of transmitted illumination light irradiated to the glass substrate (4) is much larger than that in the first embodiment. As described above, in the second embodiment described above, between the two holding plates (10, a), and (10b), an optical component "optical mirror (50 ) 'Therefore, the optical lens (50) can be irradiated on the glass substrate (4) after the transmitted illumination light is diffused, and the reduction in the amount of transmitted illumination light on the glass substrate f (4) can be suppressed and enlarged. The scope of the surface of the glass substrate (4) is inspected by the inspection method of transmitted light. Furthermore, the formation of each truncated corner portion (5 1 a) and (5 1 b) is transmitted through the glass substrate (4). The light quantity of the illumination light is also much larger than that of the first embodiment. &Amp; Furthermore, the present invention is not limited to the first and second embodiments described above, and its shape and evil may have various other changes. For example, In the first and second embodiments, although it has been described, it is used for inspection.

The 17th amendment to the month of 550732 dated September 114, only the fifth, invention description (15) = surface of the panel display (such as a panel display) 222 ^ But not only that, it can also be applied to the flat panel No show. at Panel dlsPlay) glass substrate (4) production line stepper and other manufacturing substrate holders. f. The vertical substrate suction element (20) can be installed at the position of the opening of the substrate holder (1), or it can be installed at all positions on each maintenance stage. Plate adsorption element (20), ★ 7, 4, mt 4, and 吸 suck for the substrate == plate bracket ⑴ All support centers are also 'because the transmission light can be used, so the substrate bracket ⑴: 疋If it is sealed with a transparent sheet (for example, a glass plate), a substrate adsorption element (20) can be arranged on the transparent support. 〇 ^ In this case, finVf adsorbs all pieces (2〇), as shown in Figure 9, and maintains on the substrate adsorption element: (61) makes the ST lock t substrate maintain the axis (61), by rotating the substrate, Move up and down to adjust its height. Wu Banji talk-^ body (⑻a inside, with screw grooves (62), and the substrate supports soil holding plate axis =) Where ί (6〇Ϊπ # '! (' 3) ° t (in) there is adsorption Leak-proof ring 0 (64). Suction passage (23), = space of plate suction element body ⑽), and: the height adjustment of the hose 'is the private movement of the rotating substrate maintenance shaft, so that the substrate maintenance shaft (61 ) Attach the front end), and connect to the reference plane (44). Then, tighten the set screw (66) to fix the substrate holding shaft (61). ",

550732 _______________MM 91114668—_year——B ______ a V. Description of the invention (16) The present invention is used to inspect the epidemic on the surface of semiconductor glass tomb plates such as flat panel display panels of liquid crystal displays. Correction, or glass substrate in organic EL display (FPD), etc. 550732 ________________MM 91114668 _________ barrier _________ month a______ simple illustration

Claims (1)

550732 VI. Scope of patent application ~ ...-i. Board placement 'It has a plurality of frame-shaped openings and a plurality of substrate holding surfaces for adsorption and maintenance; more racks == inside,' & placed at low = has the aforementioned substrate 7ic The number of workers σ is placed on these maintenance platforms, and the height adjustment machine of the supporting level of the sub-structure is ^^^ 91114668. 2 pcs. • The substrate holding device as described in the patent application Iff, if the front end is supported, the shaft holding shaft has a small ball connected to y and the screw hole formed by the root maintains the screw hole of the shaft. Maintain the bearing receiving part, the former feature. l The fixing screw holding the fork part of the bearing is composed of 3. The base plate of the patent as described in the second item of Shenyan's patent is maintained. Maintain the bearing by Qiu, newspaper: dagger_holding device 'where the aforementioned opening is inserted for work : It is a tube that penetrates through the inside, from the root end. Insert ... with the substrate maintenance device described in item 丨 of the scope of patent application that can adjust the height of the aforementioned support clip as its feature, which "said the aforementioned maintenance table in the aforementioned opening portion of the substrate holder is positioned and then maintained The substrate adsorption element is its characteristic. The substrate maintaining device according to item 4 of the scope of the patent application, wherein the adsorption element is characterized by having a structure for maintaining the level of the substrate. N n 550732 VI. Patent application scope ^ 11114668 Amendment 6. As described in the patent application, the substrate holding device at the front end of the substrate adsorption element and described above, wherein the adsorption unit is formed, and / or equipped with the aforementioned substrate: Γ 迷 此The substrate maintenance axis, the substrate maintenance axis with the screw groove, is :: the structure of the gas flow path that the substrate maintenance axis is connected to ;; the space of the substrate adsorption element body will have a communication with the adsorption section | adsorption element body It is characterized by fixing the Keshu maintenance shaft to # n 疋 screws. In the case of other substrates, such as the scope of the patent application | maintenance stage, the substrate-maintaining device in the form of a band is described below. The characteristics of Jiuma are constructed by the above-mentioned options through the above-mentioned options. 8 、 If the patent application scope maintains the platform, it consists of a strip-shaped two-piece, f-type substrate maintenance device, of which the former is formed, and the two pieces of maintenance plates The reason: ::: The suction of the substrate suction element which is configured to face each other is fixed by a support clip, and the disc is "... passing light ... becomes its 9th. If the patent application scope maintains the platform, A strip-shaped substrate maintenance device of 2 == is formed, and the 2 pieces of the maintenance plate and the quasi-holding plate are arranged to be mutually spaced, and are configured to transmit the illumination light; page 22 550732_case number 91Π4668_year Modification of the month _ 6. The optical element with a diffused patent scope is a feature of it.: '1 0. The substrate maintaining device according to item 9 of the patented scope, wherein the aforementioned optical element is formed into a cylinder by a translucent resin. It is characterized by a lens that is shaped and divided by the long side direction 2. 1 1. The substrate maintenance device according to item 1 of the scope of patent application, wherein the above-mentioned maintenance platform is coated with anti-vibration material as its feature 1 2. If applying for a patent The substrate holding device according to item 1, wherein the above-mentioned maintenance table has a space part provided with a light-transmitting shock-proof material that controls vibration as a feature. 1 3. The substrate holding device according to item 1 of the scope of patent application, Among them, the aforementioned plurality of maintenance stations change their resonance frequency according to changes in their thickness or quantity, so that the vibration between these maintenance stations disappears as their characteristic. 1 4. The substrate maintenance device according to item 1 of the scope of patent application Wherein, the aforementioned maintenance table is configured by arranging two strip-shaped maintenance plates whose surfaces face each other, and changing the resonance frequency of the two maintenance plates according to the characteristics of the thickness or quantity of the two maintenance plates. Page 23