JPWO2003006971A1 - Substrate holding device - Google Patents

Substrate holding device Download PDF

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JPWO2003006971A1
JPWO2003006971A1 JP2003512690A JP2003512690A JPWO2003006971A1 JP WO2003006971 A1 JPWO2003006971 A1 JP WO2003006971A1 JP 2003512690 A JP2003512690 A JP 2003512690A JP 2003512690 A JP2003512690 A JP 2003512690A JP WO2003006971 A1 JPWO2003006971 A1 JP WO2003006971A1
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substrate
holding
suction
holding device
suction member
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JP3752501B2 (en
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友博 北原
友博 北原
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Olympus Corp
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Abstract

開口部を有する枠状に形成され、ガラス基板(4)の周縁部を吸着保持する基板ホルダ(1)と、この基板ホルダの開口部内における所定の位置に設けられ、ガラス基板を吸着保持する基板吸引部材(20)とを備える。A substrate holder (1) formed in a frame shape having an opening and adsorbing and holding a peripheral portion of the glass substrate (4), and a substrate provided at a predetermined position in the opening of the substrate holder and adsorbing and holding the glass substrate A suction member (20).

Description

技術分野
本発明は、例えば液晶ディスプレイや有機ELディスプレイなどのフラットパネルディスプレイ(FPD)の大型のガラス基板を保持する基板保持装置に関する。
背景技術
特開2000−7146公報には、例えば液晶ディスプレイや有機ELディスプレイなどのフラットパネルディスプレイ(FPD)のガラス基板(プラスチック基板も含む半導体デバイス基板)を保持するガラス基板保持具が記載されている。このガラス基板保持具は、ガラス基板を吸着保持する保持枠と、この保持枠の透過照明用開口を閉塞する透明部材と、この透明部材の上面に複数立設されてガラス基板を支持する支持ピンとからなるガラス基板保持具が記載されている。
このガラス基板保持具では、薄いガラス基板を複数の支持ピンに載せ、そのガラス基板の周縁のみを保持枠に吸着保持しているため、クリーンルームのダウンフローやグレーチング床等からの振動によりガラス基板の中央部分が撓んだり振動してしまう。
又、ガラス基板の大型化に伴い図10に示す基板保持装置が提案された。基板ホルダ1は、枠状に形成されている。この基板ホルダ1の開口部には、角柱の複数の保持台2が架設されている。これら保持台2の上面には、所定間隔で複数の支持ピン3がそれぞれ一列に配置されて固定されている。
基板ホルダ1の枠部周縁には、ガラス基板4を吸着保持するための複数の吸引部材(吸着パッド)5が設けられている。これら吸引部材5は、図示しない吸引チューブに接続され、吸引ポンプの吸引動作を受けて吸引作用を行なう。又、基板ホルダ1の枠部周縁には、複数の基準ピン6及び複数の押付けピン7が設けられている。
ガラス基板4の表面検査を行なうときは、ガラス基板4が基板ホルダ1上に載置され、複数の押付けピン7により複数の基準ピン6に押し付けられて、基準位置にセッティングされる。この後、ガラス基板4は、複数の吸引部材5により基板ホルダ1上に吸着固定される。
しかしながら、薄いガラス基板4を押付けピン7により基準ピン6に押し付けたとこに、ガラス基板4の中央部に浮きが生じることがある。又、マクロ検査のために基板ホルダ1を揺動させることによりガラス基板4の中央部が上下方向に煽られて大きく振動したり、クリーンルームのダウンフロー等によってガラス基板4の中央部に振動が生じることがある。
このように、ガラス基板4の中央部が上下方向に煽られて大きく振動すると、欠陥が揺れ動いてしまい観察し難くなる。又、顕微鏡を用いてガラス基板4を観察する場合、ガラス基板4が浮き上がっていると顕微鏡の観察位置を振動せた際に対物レンズとガラス基板4の表面との間隔が変化し、焦点ずれが生じる。又、顕微鏡で観察する場合、ガラス基板4に振動が生じると、振動が治まるまでオートフォーカスができなくなる問題が生じる。
又、上下方向の振動を受けると、ガラス基板4の裏面が支持ピン3に当たり傷が付くおそれがある。さらにダウンフローの風圧の変化により、ガラス基板4の中央部が上下方向に大きく振れたり、ガラス基板4が薄くなると、ガラス基板4自体の自動ダウンフローの風圧により支持ピン3との間で微少な撓みが生じ、ガラス基板4が波打つことがある。このため、ガラス基板4の水平度を維持することができなくなり、顕微鏡等によるミクロ観察の際に焦点位置がずれてしまう。一方、保持台2の強度を上げるために金属製の角柱を用いると、透過検鏡法による透過照明光が複数の保持台2により遮られ、ガラス基板4上に影となって投影され検査に支障をきたす。
本発明は、基板中央部分の浮きや振動を防止できる基板保持装置を提供することを目的とする。
本発明は、基板ホルダ枠に架設された保持台による透過照明光の光量の減少による影響を抑え、良好な透過検鏡を実現でき、かつ支持ピンの高さ調整が簡単な基板保持装置を提供することを目的とする。
発明の開示
本発明の主要な観点によれば、開口部を有する枠状に形成され、基板の周縁部を吸着保持する基板ホルダと、基板ホルダの開口部内における所定の位置に設けられ、基板を吸着保持する基板吸引部材とを具備した基板保持装置が提供される。
発明を実施するための最良の形態
以下、本発明の一実施の形態について図面を参照して説明する。なお、図10と同一部分には同一符号を付してその詳しい説明は省略する。
図1は基板保持装置の構成図である。この基板保持装置は、フラットパネルディスプレイのガラス基板4の表面を検査する表面検査装置に適用される。基板ホルダ1の開口部内には、複数の保持台10が架設されている。これら保持台10は、桟状に形成され、基板ホルダ1の開口部内の互いに対向する2辺間に所定の間隔で並設されている。これら保持台10は、互いの板面が向かい合って配置された帯状の2枚の保持板10a、10bとから構成される。これら保持板10a、10bの間には、透過照明光が通過するための空間部11が形成されている。保持板10a、10bは、板厚に対して充分に長い幅寸法を有し、剛性の高い金属からなる。又、保持板10a、10bは、振動を抑える目的でその板面に防振材(高減衰材料)をコーティングしたり、保持板10a、10bを粒界腐食ステンレス等の制振金属で作製する。防振材としては、高分子のゴム、樹脂や、振動吸収塗料、ゲル状物質を用いるとよい。振動吸収塗料としては、ウレタン、アクリル、シリコン系樹脂塗料がある。又、ゲル状物質としては、オルガノゲル、ポリマー系ゲル、シリコン系ゲル、フッ素イオン交換樹脂などがある。又、2枚の保持板10a、10bの間に透明な防止材を挟んでもよい。又、各保持台10が振動しないように保持板10a、10bの板厚を変えたり、防振材の厚みや量を変えるなど各保持台10の共振周波数を異ならせ、保持台10同士間の共振をなくすことが好ましい。
基板ホルダ1の開口部内における所定位置、例えば中央部分に対応する各保持台10には、複数の基板吸引部材20が設けられている。又、各保持台10には、複数の支持ピン30が設けられている。
図2A及び図2Bは保持台10に対する基板吸引部材20及び支持ピン30の取り付けを示す構成図であって、図2Aは上方から見た構成図、図2Bは側面図である。これら基板吸引部材20及び支持ピン30は、2枚の保持板10a、10bの間に所定間隔に挟持されている。各基板吸引部材20には、吸引チューブ21が接続されている。この吸引チューブ21は、2枚の保持板10a、10bの間に配置されている。この吸引チューブ21は、例えば光透過性の材料により形成されている。2枚の保持板10a、10bの底面は、光透過性の部材により形成されているのが好ましい。
図3A及び図3Bは保持台10に対して支持ピン30のみを取り付けた構成図であって、図3Aは上方から見た構成図、図3Bは側面図である。2枚の保持板10a、10bの間には、複数の支持ピン30が所定間隔毎に挟持されている。
図4は基板吸引部材20の断面構成図である。基板吸引部材20には、基板保持軸22が設けられている。この基板保持軸22には、吸引通路23が軸方向に形成されている。基板保持軸22の先端部には、弾性材により形成された吸着部材24が抜けでないように取り付けられている。この吸着部材24には、吸引通路23と連通するための吸引孔25が形成されている。吸着部材24は、抜け防止リング26によって基板保持軸22の先端部に保持されている。又、基板吸引部材20の下部には、取り付け端部27によって吸引チューブ21が取り付けられている。この吸引チューブ21は、基板吸引部材20に取り付けられることにより吸引通路23に連通する。なお、吸引チューブ21は、基板ホルダ1の外部に設けられた吸引ポンプPに接続されている。
図5は支持ピン30の断面構成図である。支持ピン30には、円柱状の保持軸31が設けられている。この保持軸31の先端部には、凹部32が形成され、この凹部32内にボール33が回転可能に設けられている。保持軸31の元側には、固定ネジ34のネジ締めを受けるための当付け溝35と、固定ネジ36が当接しないようにするための逃げ溝37とが形成されている。さらに、逃げ溝37の下方の保持軸31にはネジ31aが形成され、保持軸3131は保持軸受け38の下部に形成されたネジ孔38aに螺合し、上下方向(矢印イ方向)に移動可能に設けられている。
従って、支持ピン30の高さ調整は、保持軸受け38の底部開口からドライバを用いて保持軸31を回転させながら矢印イ方向に移動させて、高さ位置を調整した後、固定ネジ34を締めて保持軸31を保持軸受け38に固定することにより行われる。
保持軸受け38の下部には、2枚の保持板10a、10bを受けるための各平面部39、40が両側に形成されている。又、保持軸受け38には、各固定ネジ34、36を通すための各ネジ穴41、42が形成されている。
このような構造の支持ピン30であれば、固定ネジ36を緩めることにより、2枚の保持板10a、10bの間に対して取り付け、取り外しが可能で、かつ保持軸31を回転させるだけで支持ピン30の高さを調整できる。
次に、基板ホルダ1に設けられる複数の基板吸引部材20及び複数の支持ピン30の高さ調整について図6を参照して説明する。
基準平面44が形成された基準ブロック43が用意される。この基準平面44は、歪みや凹凸の無い平面である。この基準平面44上の両端には、それぞれ各基準台45が設けられている。これら基準台45は、複数の基板吸引部材20及び複数の支持ピン30の各高さを調整するための基準高さHに形成されている。これら基準台45は、基板ホルダ1のサイズに適合した間隔に配置され、この基準台45、45間に保持台10を逆さまに載置する。
又、基板吸引部材20及び支持ピン30の高さ調整は、基板ホルダ1を基準平面44上に載置してもよい。
基板吸引部材20の高さ調整は、図4に示す基板保持軸22の先端部の吸着部材24が弾性材により形成されているので、この吸着部材34が基準平面44に当接されると、基準平面44の高さに従って伸縮する。この状態に、基板吸引部材20は、2枚の保持板10a、10bに対して固定ネジ等により固定される。
一方、支持ピン30の高さ調整は、図5に示す保持軸受け38を底部開口よりドライバを差し込み、保持軸31の先端部のボール33が基準平面44に当接するまで回転させる。この保持軸31の高さを調整した後、固定ネジ34を締め付け、保持軸31を保持軸受け38に固定する。
この結果、全ての基板吸引部材20及び支持ピン30の高さ位置が基準平面44に揃い、これら基板吸引部材20及び支持ピン30の高さ調整が終了する。
なお、複数の支持ピン30のみの高さ調整は、上記同様に、各支持ピン30の各保持軸31がそれぞれ上下移動させることにより行われる。
次に、上記の如く構成された装置の作用について説明する。
ガラス基板4の表面検査を行なうとき、ガラス基板4は、各押付けピン7により各基準ピン6に押し付けられて基準位置にセッティングされた後、先ず、ガラス基板4の中央部分が基板吸引部材20により吸着固定される。続いて、各吸引パッド5によりガラス基板4の周縁が基板ホルダ1上に吸着固定される。
吸引ポンプPが吸引動作すると、複数の基板吸引部材20は、それぞれ吸着動作を行い、ガラス基板4をその中央部において吸着保持する。これと共に、ガラス基板4は、複数の支持ピン30により支持される。
この結果、ガラス基板4は、周縁部と中央部とにおいて吸着保持されるので、水平度が常に維持される。従って、マクロ検査時に基板ホルダ1を揺動したとしても、又ダウンフロー等の影響を受けたとしても、ガラス基板4の中央部に浮きは生じない。
表面検査は、ガラス基板4に対して透過照明又は落射照明を用いた検鏡方式によって行われる。透過照明の検鏡方式では、透過照明光は、ガラス基板4の下方から照射される。保持台10の架設位置では、2枚の保持板10a、10bの間の空間部13を通って透過照明光がガラス基板4に照射される。これと共に各保持板10a、10bの回りから透過照明光が回り込み、この回り込んだ透過照明光がガラス基板4に照射される。又、吸引チューブ21が設けられている位置でも、透過照明光は、光透過性の吸引チューブ21により拡散されてガラス基板4に照射される。
従って、透過照明検鏡方式であっても、ガラス基板4に照射される透過照明光の光量が保持台10の架設位置でも光量の減少を少なく抑えることができ、ガラス基板4の表面検査を良好に行なえる。
このように上記一実施の形態においては、ガラス基板4を基板ホルダ1上に載置したときのガラス基板4の中央部に対応するところに複数の基板吸引部材20を取り付けたので、ガラス基板4は、基板ホルダ1周辺部の各吸引部材5により周辺部が固定吸着されると共に、中央部が固定吸着される。この結果、ガラス基板4を高い水平度で確実に保持できる。これにより、ガラス基板4のマクロ検査に誤検査が生じることなく、正確にガラス基板4の表面検査を行なうことができる。顕微鏡等による高倍率でのミクロ観察時でも、対物レンズとガラス基板4表面との距離が一定に保たれて焦点ずれが生ぜず、ガラス基板4の全面において合焦点の画像で検査ができる。
複数の基板吸引部材20を2枚の保持板10a、10bの間に挟み、複数の支持ピン30も2枚の保持板10a、10bの間に挟み込む構成としたので、透過照明光は、2枚の保持板10a、10bの間の空間部13を通ってガラス基板4に照射され、かつこれら保持板10a、10bの回りから回り込んだ透過照明光がガラス基板4に照射される。さらに、透過照明光は、光透過性の吸引チューブ21により拡散されてガラス基板4に照射される。これにより、ガラス基板4に照射される透過照明光の光量の減少を最小限に抑えることができ、良好な透過検鏡を実現することができる。
各保持板10a、10bは、加工が容易であり、製造時間を短縮でき、コストダウンが図れる。
複数の基板吸引部材20は、2枚の保持板10a、10bの間に対して取り付け、取り外しが可能なので、2枚の保持板10a、10bの直線上における所望の位置に取り付け、取り外しできる。これら基板吸引部材20は、配置間隔をガラス基板4のサイズや重量に応じて任意に調整できる。
複数の基板吸引部材20及び複数の支持ピン30は、基準ブロック43及び各基準台45を用いて全ての高さを同一に調整できる。この場合、基板吸引部材20は、吸着部材24が基準平面44に倣うことにより高さ調整し、支持ピン30は、保持軸31を上下移動させることにより高さ調整できる。従って、ガラス基板4を高い水平度で確実に保持できる。
保持板10a、10bを防振材でコーティング、若しくは制振金属で作製し、又保持板10a、10bの隙間に防振材を挟むことで、保持台10の振動を低減できる。従って、支持ピン30上に載置されるガラス基板4の振動を抑えることができる。
次に、本発明の第2の実施の形態について図面を参照して説明する。なお、図1乃至図6と同一部分には同一符号を付してその詳しい説明は省略する。この第2の実施の形態の上記第1の実施の形態と相違するところは、図7に示すように2枚の保持板10a、10bの間に、光散乱又は拡散用の光学部品としての光学レンズ50を設けたことである。
この光学レンズ50は、かまぼこレンズ状に形成され、かつ各係止部50aが形成されている。これにより光学レンズ50は、2枚の保持板10a、10bに対して係止され、各保持板10a、10bに対して取り付け、取り外し自在で、かつ各保持板10a、10bの間から落下しない。なお、光学レンズ50は、かまぼこレンズ状に限らず、拡散板を設けたり、プリズム、フルネルレンズなどを設けても良い。
2枚の保持板10a、10bの下部には、互い内側を向いて各切欠き部51a、51bが形成されている。各切欠き部51a、51bは、下方からの透過照明光の一部をそれぞれ各保持板10a、10bの間に反射させ、光学レンズ50により拡散される透過照明光の光量を増加させる作用を持つ。
次に、光学レンズ50の製造方法の一例を説明する。先ず、図8Aに示すような光透過性の樹脂(例えばプラスチック)により形成した円柱部材(ロット)52を図8Bに示すようにその長手方向に2分割して、2つのレンズ部材52a、52bを作成する。
次に、各レンズ部材52a、52bの両側をそれぞれカットし、2本のかまぼこレンズ状の光学レンズ50を製造する。
なお、レンズ部材52a、52bの両側をそれぞれカットせずに、レンズ部材52a、52bのままで2枚の保持板10a、10bの間に挿入できれば、これらレンズ部材52a、52bを光学レンズ50として用いても良い。
次に、上記の如く構成された装置の作用について説明する。
透過照明の検鏡方式でガラス基板4の表面検査を行うとき、ガラス基板4の下方から照射される透過照明光は、2枚の保持板10a、10bの間に設けられた光学レンズ40により拡散されてガラス基板4に照射される。これと共に2枚の保持板10a、10bの各切欠き部51a、51bに当たった透過照明光は、これら切欠き部51a、51bで2枚の保持板10a、10b間に向けて反射し、光学レンズ40を通って拡散されてガラス基板4に照射される。
従って、透過照明の検鏡方式であっても、ガラス基板4に照射される透過照明光の光量が保持台10の架設位置でも、その光量の減少を少なく抑えることができ、透過照明の検鏡方式でのガラス基板4の表面検査が可能になる。そのうえ透過照明光の一部が各切欠き部51a、51bで反射して2枚の保持板10a、10bの間に入射するので、ガラス基板4に照射される透過照明光の光量を上記第1の実施の形態よりも増加できる。
このように上記第2の実施の形態においては、2枚の保持板10a、10bの間に、光散乱又は拡散用の光学部品としての光学レンズ50を設けたので、この光学レンズ50により透過照明光を拡散してガラス基板4に照射することができ、ガラス基板4に照射される透過照明光の光量の減少を少なく抑え、透過照明の検鏡方式でのガラス基板4の表面検査の範囲を拡大できる。
さらに、各切欠き部51a、51bを形成することにより、ガラス基板4に照射される透過照明光の光量を上記第1の実施の形態よりも増加できる。
なお、本発明は、上記第1及び第2の実施の形態に限定されるものでなく、種々に変形することが可能である。
例えば、上記第1及び第2の実施の形態では、液晶ディスプレイなどのフラットパネルディスプレイのガラス基板4の表面を検査する表面検査装置に適用されるものについて説明したが、これに限らず、フラットパネルディスプレイのガラス基板4の製造ラインに配備されるステッパーなどの各種製造の基板ホルダにも適用できる。
又、基板吸引部材20は、基板ホルダ1の開口部内の任意の位置に設けることができ、各保持台の全てに設けてもよい。さらに基板吸引部材20は、基板ボルダ1の支持ピン30の全てを基板吸引部材20に代えてもよい。
又、透過照明が可能なので、基板ホルダ1の下面開口部を透明な保持体(例えばガラス板)で閉鎖し、この透明な保持体上に基板吸引部材20を配置してもよい。
又、基板吸引部材20は、図9に示すように基板吸引部材本体60に対して基板保持軸61を螺合して設け、この基板保持軸61bを回転させながら上下移動させることにより高さ調整可能にしてもよい。基板吸引部材本体60aの内面にはネジ溝62が形成され、かつ基板保持軸61の先端部にはネジ山63が形成されている。基板吸引部材本体60と基板保持軸61との間には、吸引漏れ防止用のOリング64が設けられている。吸引通路23は、基板吸引部材本体60の空間部65を介して吸引チューブ21に連通している。
基板吸引部材20の高さ調整は、基板保持軸61が回転させながら上下移動され、この基板保持軸61の先端部の吸着部材24が基準平面44に当接される。この後、固定ネジ66が締め付けら、基板保持軸61が固定される。
産業上の利用可能性
本発明は、例えば液晶ディスプレイや有機ELディスプレイなどのフラットパネルディスプレイ(FPD)に用いられるガラス基板などの半導体ガラス基板の表面欠陥検査に用いられる。
【図面の簡単な説明】
図1は本発明の第1の実施の形態を示す基板保持装置の構成図。
図2Aは保持台に対する基板吸引部材及び支持ピンの取付上面図。
図2Bは保持台に対する基板吸引部材及び支持ピンの取付側面図。
図3Aは保持台に対する支持ピンの取付上面図。
図3Bは保持台に対する支持ピンの取付側面図。
図4は基板吸引部材の断面構成図。
図5は支持ピンの断面構成図。
図6は複数の基板吸引部材及び支持ピンの高さ調整方法を説明するための図。
図7は本発明の第2の実施の形態を示す光学レンズの構成図。
図8Aは光学レンズの製造方法の一例を示す図。
図8Bは光学レンズの製造方法の一例を示す図。
図8Cは光学レンズの製造方法の一例を示す図。
図9は基板吸引部材の変形例を示す構成図。
図10は従来の基板保持装置の概略構成図。
TECHNICAL FIELD The present invention relates to a substrate holding device for holding a large glass substrate of a flat panel display (FPD) such as a liquid crystal display or an organic EL display.
BACKGROUND ART Japanese Patent Application Laid-Open No. 2000-7146 describes a glass substrate holder for holding a glass substrate (a semiconductor device substrate including a plastic substrate) of a flat panel display (FPD) such as a liquid crystal display or an organic EL display. . The glass substrate holder includes a holding frame that sucks and holds the glass substrate, a transparent member that closes a transmission illumination opening of the holding frame, and a plurality of support pins that stand upright on the upper surface of the transparent member to support the glass substrate. A glass substrate holder made of
In this glass substrate holder, a thin glass substrate is placed on a plurality of support pins, and only the peripheral edge of the glass substrate is held by suction on a holding frame. Therefore, the glass substrate is held down by vibration from a downflow in a clean room, a grating floor, or the like. The central part bends or vibrates.
In addition, a substrate holding device shown in FIG. 10 has been proposed with an increase in the size of a glass substrate. The substrate holder 1 is formed in a frame shape. In the opening of the substrate holder 1, a plurality of prism-shaped holders 2 are provided. A plurality of support pins 3 are arranged and fixed at a predetermined interval on the upper surface of the holding table 2.
A plurality of suction members (suction pads) 5 for holding the glass substrate 4 by suction are provided on the periphery of the frame portion of the substrate holder 1. These suction members 5 are connected to a suction tube (not shown), and perform a suction operation by receiving a suction operation of a suction pump. A plurality of reference pins 6 and a plurality of pressing pins 7 are provided on the periphery of the frame of the substrate holder 1.
When inspecting the surface of the glass substrate 4, the glass substrate 4 is placed on the substrate holder 1, is pressed against the plurality of reference pins 6 by the plurality of pressing pins 7, and is set at the reference position. Thereafter, the glass substrate 4 is suction-fixed on the substrate holder 1 by the plurality of suction members 5.
However, when the thin glass substrate 4 is pressed against the reference pins 6 by the pressing pins 7, floating may occur at the center of the glass substrate 4. Further, by swinging the substrate holder 1 for macro inspection, the central portion of the glass substrate 4 is vertically swung and greatly vibrated, or the central portion of the glass substrate 4 is vibrated due to a downflow of a clean room or the like. Sometimes.
As described above, when the central portion of the glass substrate 4 is vibrated largely in the vertical direction, the defect oscillates, making it difficult to observe. When the glass substrate 4 is observed using a microscope, if the glass substrate 4 is lifted, the distance between the objective lens and the surface of the glass substrate 4 changes when the observation position of the microscope is vibrated, and the defocus is caused. Occurs. In addition, in the case of observation with a microscope, if vibration occurs in the glass substrate 4, a problem arises that autofocus cannot be performed until the vibration subsides.
Further, when receiving the vibration in the vertical direction, the back surface of the glass substrate 4 may hit the support pins 3 and be damaged. Further, when the wind pressure of the downflow changes the central portion of the glass substrate 4 greatly in the vertical direction, or when the glass substrate 4 is thinned, the glass substrate 4 itself may be slightly weakened between the support pins 3 by the wind pressure of the automatic downflow. Deflection may occur, and the glass substrate 4 may undulate. For this reason, the horizontality of the glass substrate 4 cannot be maintained, and the focal position shifts during microscopic observation with a microscope or the like. On the other hand, if a metal prism is used to increase the strength of the holding table 2, the transmitted illumination light by the transmission microscopy method is blocked by the plurality of holding tables 2 and projected as a shadow on the glass substrate 4 for inspection. Cause trouble.
SUMMARY OF THE INVENTION It is an object of the present invention to provide a substrate holding device capable of preventing floating and vibration of a substrate central portion.
The present invention provides a substrate holding device that suppresses the influence of a decrease in the amount of transmitted illumination light by a holding table provided on a substrate holder frame, realizes a good transmission speculum, and that can easily adjust the height of support pins. The purpose is to do.
DISCLOSURE OF THE INVENTION According to a main aspect of the present invention, a substrate holder is formed in a frame shape having an opening and adsorbs and holds a peripheral portion of a substrate. There is provided a substrate holding device including a substrate suction member for holding by suction.
BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, an embodiment of the present invention will be described with reference to the drawings. The same parts as those in FIG. 10 are denoted by the same reference numerals, and detailed description thereof will be omitted.
FIG. 1 is a configuration diagram of the substrate holding device. This substrate holding device is applied to a surface inspection device that inspects the surface of a glass substrate 4 of a flat panel display. In the opening of the substrate holder 1, a plurality of holding tables 10 are provided. The holding tables 10 are formed in a crosspiece shape, and are juxtaposed at predetermined intervals between two opposing sides in the opening of the substrate holder 1. These holding tables 10 are composed of two band-shaped holding plates 10a and 10b arranged so that their plate faces face each other. A space 11 through which the transmitted illumination light passes is formed between the holding plates 10a and 10b. The holding plates 10a and 10b have a width dimension sufficiently long with respect to the plate thickness, and are made of a highly rigid metal. The holding plates 10a and 10b are coated with a vibration-proof material (high-attenuation material) for the purpose of suppressing vibration, and the holding plates 10a and 10b are made of a damping metal such as grain boundary corrosion stainless steel. As the vibration damping material, a polymer rubber, a resin, a vibration absorbing paint, or a gel-like substance may be used. Examples of the vibration absorbing paint include urethane, acrylic, and silicone resin paints. Examples of the gel substance include an organogel, a polymer gel, a silicon gel, and a fluorine ion exchange resin. Further, a transparent prevention member may be interposed between the two holding plates 10a and 10b. In addition, the resonance frequency of each holding table 10 is changed by changing the thickness of the holding plates 10a and 10b so that the holding tables 10 do not vibrate, or by changing the thickness and amount of the vibration isolating material. It is preferable to eliminate resonance.
A plurality of substrate suction members 20 are provided on each holding table 10 corresponding to a predetermined position in the opening of the substrate holder 1, for example, a central portion. Further, each support 10 is provided with a plurality of support pins 30.
2A and 2B are configuration diagrams showing attachment of the substrate suction member 20 and the support pins 30 to the holding table 10, FIG. 2A is a configuration diagram viewed from above, and FIG. 2B is a side view. The substrate suction member 20 and the support pins 30 are held at a predetermined interval between the two holding plates 10a and 10b. A suction tube 21 is connected to each substrate suction member 20. The suction tube 21 is disposed between the two holding plates 10a and 10b. The suction tube 21 is formed of, for example, a light transmissive material. It is preferable that the bottom surfaces of the two holding plates 10a and 10b are formed of a light transmitting member.
3A and 3B are configuration diagrams in which only the support pins 30 are attached to the holding table 10, FIG. 3A is a configuration diagram viewed from above, and FIG. 3B is a side view. A plurality of support pins 30 are held at predetermined intervals between the two holding plates 10a and 10b.
FIG. 4 is a sectional configuration diagram of the substrate suction member 20. The substrate holding member 22 is provided on the substrate suction member 20. A suction passage 23 is formed in the substrate holding shaft 22 in the axial direction. An adsorbing member 24 made of an elastic material is attached to the tip of the substrate holding shaft 22 so as not to come off. A suction hole 25 for communicating with the suction passage 23 is formed in the suction member 24. The suction member 24 is held at the distal end of the substrate holding shaft 22 by a detachment prevention ring 26. Further, a suction tube 21 is attached to a lower portion of the substrate suction member 20 by an attachment end 27. The suction tube 21 is connected to the suction passage 23 by being attached to the substrate suction member 20. Note that the suction tube 21 is connected to a suction pump P provided outside the substrate holder 1.
FIG. 5 is a sectional configuration diagram of the support pin 30. The support pin 30 is provided with a columnar holding shaft 31. A recess 32 is formed at the tip of the holding shaft 31, and a ball 33 is rotatably provided in the recess 32. On the base side of the holding shaft 31, an abutment groove 35 for receiving the screw tightening of the fixing screw 34 and a clearance groove 37 for preventing the fixing screw 36 from abutting are formed. Further, a screw 31a is formed in the holding shaft 31 below the escape groove 37, and the holding shaft 3131 is screwed into a screw hole 38a formed in a lower portion of the holding bearing 38, and can be moved in the vertical direction (the direction of arrow A). It is provided in.
Therefore, the height of the support pin 30 is adjusted by moving the holding shaft 31 from the bottom opening of the holding bearing 38 in the direction of arrow A while rotating the holding shaft 31 with a screwdriver, adjusting the height position, and then tightening the fixing screw 34. The fixing is performed by fixing the holding shaft 31 to the holding bearing 38.
In the lower part of the holding bearing 38, flat portions 39 and 40 for receiving the two holding plates 10a and 10b are formed on both sides. The holding bearing 38 is formed with screw holes 41 and 42 for passing the fixing screws 34 and 36, respectively.
The support pin 30 having such a structure can be attached to and detached from the two holding plates 10a and 10b by loosening the fixing screw 36, and can be supported only by rotating the holding shaft 31. The height of the pin 30 can be adjusted.
Next, height adjustment of the plurality of substrate suction members 20 and the plurality of support pins 30 provided on the substrate holder 1 will be described with reference to FIG.
A reference block 43 on which a reference plane 44 is formed is prepared. The reference plane 44 is a plane having no distortion or unevenness. At each end on the reference plane 44, each reference stand 45 is provided. These reference stands 45 are formed at a reference height H for adjusting the heights of the plurality of substrate suction members 20 and the plurality of support pins 30. The reference tables 45 are arranged at intervals suitable for the size of the substrate holder 1, and the holding table 10 is placed upside down between the reference tables 45.
The height of the substrate suction member 20 and the support pins 30 may be adjusted by placing the substrate holder 1 on the reference plane 44.
The height adjustment of the substrate suction member 20 is performed when the suction member 24 at the distal end of the substrate holding shaft 22 shown in FIG. 4 is formed of an elastic material. It expands and contracts according to the height of the reference plane 44. In this state, the substrate suction member 20 is fixed to the two holding plates 10a and 10b with fixing screws or the like.
On the other hand, to adjust the height of the support pin 30, the driver inserts the holding bearing 38 shown in FIG. 5 from the bottom opening and rotates the ball 33 at the tip of the holding shaft 31 until the ball 33 comes into contact with the reference plane 44. After adjusting the height of the holding shaft 31, the fixing screw 34 is tightened to fix the holding shaft 31 to the holding bearing 38.
As a result, the height positions of all the substrate suction members 20 and the support pins 30 are aligned with the reference plane 44, and the height adjustment of the substrate suction members 20 and the support pins 30 is completed.
Note that the height adjustment of only the plurality of support pins 30 is performed by moving the holding shafts 31 of the support pins 30 up and down in the same manner as described above.
Next, the operation of the device configured as described above will be described.
When inspecting the surface of the glass substrate 4, the glass substrate 4 is pressed against each reference pin 6 by each pressing pin 7 and set at a reference position. Adsorbed and fixed. Subsequently, the peripheral edge of the glass substrate 4 is suction-fixed on the substrate holder 1 by each suction pad 5.
When the suction pump P performs the suction operation, the plurality of substrate suction members 20 perform the suction operation, and hold the glass substrate 4 by suction at the center thereof. At the same time, the glass substrate 4 is supported by the plurality of support pins 30.
As a result, the glass substrate 4 is suction-held at the peripheral portion and the central portion, so that the levelness is always maintained. Therefore, even if the substrate holder 1 is swung at the time of the macro inspection, or if the substrate holder 1 is affected by downflow or the like, no floating occurs at the center of the glass substrate 4.
The surface inspection is performed by a speculum method using transmission illumination or epi-illumination on the glass substrate 4. In the transmitted illumination microscopic method, the transmitted illumination light is emitted from below the glass substrate 4. At the position where the holding table 10 is installed, the glass substrate 4 is irradiated with transmitted illumination light through the space 13 between the two holding plates 10a and 10b. At the same time, the transmitted illumination light wraps around each of the holding plates 10a and 10b, and the wrapped transmitted illumination light is applied to the glass substrate 4. Further, even at the position where the suction tube 21 is provided, the transmitted illumination light is diffused by the light-transmitting suction tube 21 and irradiates the glass substrate 4.
Therefore, even in the case of the transmitted illumination speculum system, the amount of transmitted illumination light applied to the glass substrate 4 can be kept from decreasing even at the position where the holding base 10 is erected, and the surface inspection of the glass substrate 4 is excellent. Can be done.
As described above, in the above-described embodiment, the plurality of substrate suction members 20 are attached to portions corresponding to the central portion of the glass substrate 4 when the glass substrate 4 is placed on the substrate holder 1. The peripheral portion is fixedly adsorbed by the suction members 5 in the peripheral portion of the substrate holder 1 and the central portion is fixedly adsorbed. As a result, the glass substrate 4 can be reliably held at a high level. Thus, the surface inspection of the glass substrate 4 can be accurately performed without causing an erroneous inspection in the macro inspection of the glass substrate 4. Even at the time of microscopic observation at a high magnification with a microscope or the like, the distance between the objective lens and the surface of the glass substrate 4 is kept constant, and no defocus occurs, so that an inspection can be performed on the entire surface of the glass substrate 4 with a focused image.
Since the plurality of substrate suction members 20 are sandwiched between the two holding plates 10a and 10b, and the plurality of support pins 30 are sandwiched between the two holding plates 10a and 10b, the transmitted illumination light is two sheets. The glass substrate 4 is irradiated through the space 13 between the holding plates 10a and 10b, and the transmitted illumination light sneaking from around these holding plates 10a and 10b is irradiated on the glass substrate 4. Further, the transmitted illumination light is diffused by the light-transmissive suction tube 21 and applied to the glass substrate 4. Thus, the decrease in the amount of transmitted illumination light applied to the glass substrate 4 can be minimized, and a good transmission microscope can be realized.
Each of the holding plates 10a and 10b is easy to process, can reduce the manufacturing time, and can reduce the cost.
Since the plurality of substrate suction members 20 can be attached to and detached from the two holding plates 10a and 10b, they can be attached and detached at desired positions on the straight line of the two holding plates 10a and 10b. The arrangement intervals of these substrate suction members 20 can be arbitrarily adjusted according to the size and weight of the glass substrate 4.
All of the plurality of substrate suction members 20 and the plurality of support pins 30 can be adjusted to the same height using the reference block 43 and the respective reference stands 45. In this case, the height of the substrate suction member 20 can be adjusted by the suction member 24 following the reference plane 44, and the height of the support pin 30 can be adjusted by moving the holding shaft 31 up and down. Therefore, the glass substrate 4 can be reliably held at a high level.
The vibration of the holding base 10 can be reduced by coating the holding plates 10a and 10b with a vibration damping material or manufacturing the holding plates 10a and 10b with a vibration damping metal and sandwiching the vibration damping material between the holding plates 10a and 10b. Therefore, vibration of the glass substrate 4 placed on the support pins 30 can be suppressed.
Next, a second embodiment of the present invention will be described with reference to the drawings. 1 to 6 are denoted by the same reference numerals, and detailed description thereof will be omitted. The difference between the second embodiment and the first embodiment is that an optical component as an optical component for scattering or diffusing light is provided between two holding plates 10a and 10b as shown in FIG. That is, the lens 50 is provided.
The optical lens 50 is formed in a semi-cylindrical lens shape, and has each locking portion 50a. As a result, the optical lens 50 is locked to the two holding plates 10a and 10b, can be attached to and removed from the holding plates 10a and 10b, and does not fall from between the holding plates 10a and 10b. In addition, the optical lens 50 is not limited to a semi-cylindrical lens shape, and may be provided with a diffusion plate, a prism, a Fresnel lens, or the like.
At the lower part of the two holding plates 10a, 10b, notches 51a, 51b are formed facing inward from each other. The notches 51a and 51b have a function of reflecting a part of the transmitted illumination light from below between the holding plates 10a and 10b, respectively, and increasing the amount of the transmitted illumination light diffused by the optical lens 50. .
Next, an example of a method for manufacturing the optical lens 50 will be described. First, a columnar member (lot) 52 formed of a light-transmitting resin (for example, plastic) as shown in FIG. 8A is divided into two in the longitudinal direction as shown in FIG. 8B to form two lens members 52a and 52b. create.
Next, both sides of each of the lens members 52a and 52b are cut, respectively, to manufacture two kamaboko lens-shaped optical lenses 50.
If the lens members 52a and 52b can be inserted between the two holding plates 10a and 10b without cutting the both sides of the lens members 52a and 52b, the lens members 52a and 52b may be used as the optical lens 50. May be.
Next, the operation of the device configured as described above will be described.
When the surface inspection of the glass substrate 4 is performed by the inspection method of the transmitted illumination, the transmitted illumination light emitted from below the glass substrate 4 is diffused by the optical lens 40 provided between the two holding plates 10a and 10b. Then, the glass substrate 4 is irradiated. At the same time, the transmitted illumination light hitting the notches 51a and 51b of the two holding plates 10a and 10b is reflected by the notches 51a and 51b toward the space between the two holding plates 10a and 10b, and The light is diffused through the lens 40 and irradiates the glass substrate 4.
Therefore, even in the case of the speculative method of the transmitted illumination, even when the amount of the transmitted illumination light applied to the glass substrate 4 is at the position where the holding table 10 is erected, a decrease in the amount of the transmitted light can be suppressed to a small extent. Inspection of the surface of the glass substrate 4 by the method can be performed. In addition, a part of the transmitted illumination light is reflected by the notches 51a and 51b and enters between the two holding plates 10a and 10b. Can be increased as compared with the embodiment.
As described above, in the second embodiment, the optical lens 50 as an optical component for scattering or diffusing light is provided between the two holding plates 10a and 10b. The light can be diffused and applied to the glass substrate 4, the reduction in the amount of transmitted illumination light applied to the glass substrate 4 can be suppressed to a small extent, and the range of the surface inspection of the glass substrate 4 by the speculative method of the transmitted illumination can be reduced. Can be expanded.
Further, by forming the notches 51a and 51b, the amount of transmitted illumination light applied to the glass substrate 4 can be increased as compared with the first embodiment.
Note that the present invention is not limited to the first and second embodiments, and can be variously modified.
For example, in the above-described first and second embodiments, a description has been given of an example in which the present invention is applied to a surface inspection apparatus that inspects the surface of a glass substrate 4 of a flat panel display such as a liquid crystal display. The present invention can also be applied to a substrate holder for various manufacturing such as a stepper provided on a manufacturing line for a glass substrate 4 of a display.
Further, the substrate suction member 20 can be provided at an arbitrary position in the opening of the substrate holder 1 and may be provided on all the holding tables. Further, in the substrate suction member 20, all the support pins 30 of the substrate boulder 1 may be replaced with the substrate suction member 20.
Further, since the transmitted illumination can be performed, the lower surface opening of the substrate holder 1 may be closed by a transparent holder (for example, a glass plate), and the substrate suction member 20 may be disposed on the transparent holder.
As shown in FIG. 9, the substrate suction member 20 is provided with a substrate holding shaft 61 screwed to the substrate suction member main body 60, and is moved up and down while rotating the substrate holding shaft 61b to adjust the height. May be enabled. A screw groove 62 is formed on the inner surface of the substrate suction member main body 60 a, and a screw thread 63 is formed at the tip of the substrate holding shaft 61. An O-ring 64 for preventing suction leakage is provided between the substrate suction member main body 60 and the substrate holding shaft 61. The suction passage 23 communicates with the suction tube 21 via the space 65 of the substrate suction member main body 60.
The height adjustment of the substrate suction member 20 is performed by moving the substrate holding shaft 61 up and down while rotating the substrate holding shaft 61, and the suction member 24 at the tip end of the substrate holding shaft 61 is brought into contact with the reference plane 44. Thereafter, the fixing screw 66 is tightened, and the substrate holding shaft 61 is fixed.
INDUSTRIAL APPLICABILITY The present invention is used for surface defect inspection of a semiconductor glass substrate such as a glass substrate used for a flat panel display (FPD) such as a liquid crystal display and an organic EL display.
[Brief description of the drawings]
FIG. 1 is a configuration diagram of a substrate holding device according to a first embodiment of the present invention.
FIG. 2A is a top view of mounting a substrate suction member and a support pin to a holding table.
FIG. 2B is a side view of mounting the substrate suction member and the support pins on the holding table.
FIG. 3A is a top view of mounting the support pins on the holding table.
FIG. 3B is a side view of mounting the support pins on the holding table.
FIG. 4 is a sectional configuration diagram of a substrate suction member.
FIG. 5 is a sectional configuration diagram of a support pin.
FIG. 6 is a diagram for explaining a method of adjusting the height of a plurality of substrate suction members and support pins.
FIG. 7 is a configuration diagram of an optical lens according to a second embodiment of the present invention.
FIG. 8A is a diagram illustrating an example of a method for manufacturing an optical lens.
FIG. 8B is a diagram illustrating an example of a method for manufacturing an optical lens.
FIG. 8C is a diagram illustrating an example of a method for manufacturing an optical lens.
FIG. 9 is a configuration diagram showing a modification of the substrate suction member.
FIG. 10 is a schematic configuration diagram of a conventional substrate holding device.

Claims (14)

開口部を有する枠状に形成され、基板の周縁部を吸着保持する基板ホルダと、
前記基板ホルダの前記開口部内における所定の位置に設けられ、前記基板を吸着保持する基板吸引部材と、
を具備したことを特徴とする基板保持装置。
A substrate holder formed in a frame shape having an opening and adsorbing and holding a peripheral portion of the substrate,
A substrate suction member that is provided at a predetermined position in the opening of the substrate holder and that sucks and holds the substrate;
A substrate holding device comprising:
前記基板ホルダの前記開口部内に設けられ、前記基板を支持する複数の支持ピンを備えたことを特徴とする請求項1記載の基板保持装置。The substrate holding device according to claim 1, further comprising a plurality of support pins provided in the opening of the substrate holder to support the substrate. 前記基板吸引部材は、前記基板の少なくとも中央部に対応する位置に設けられたことを特徴とする請求項1記載の基板保持装置。The substrate holding device according to claim 1, wherein the substrate suction member is provided at a position corresponding to at least a central portion of the substrate. 前記基板吸引部材又は前記支持ピンは、前記基板ホルダの前記開口部の互いに対向する2辺間に架設される桟状の保持体に設けられたことを特徴とする請求項1又は2記載の基板保持装置。The substrate according to claim 1, wherein the substrate suction member or the support pin is provided on a bar-shaped holding member that is provided between two opposing sides of the opening of the substrate holder. Holding device. 前記保持体は、前記基板吸引部材又は前記支持ピンを挟持する帯状の2枚の保持板からなることを特徴とする請求項4記載の基板保持装置。5. The substrate holding apparatus according to claim 4, wherein the holding body is formed of two band-shaped holding plates that sandwich the substrate suction member or the support pin. 前記保持板は、その板面に防振材をコーティングしたことを特徴とする請求項5記載の基板保持装置。6. The substrate holding device according to claim 5, wherein the holding plate has a plate surface coated with a vibration damping material. 前記保持板は、制振金属で作られていることを特徴とする請求項5記載の基板保持装置。The substrate holding device according to claim 5, wherein the holding plate is made of a damping metal. 前記保持板は、帯状の2枚の保持板からなり、この2枚の保持板の間に透明な防振材を設けたことを特徴とする請求項5記載の基板保持装置。The substrate holding device according to claim 5, wherein the holding plate includes two band-shaped holding plates, and a transparent vibration isolator is provided between the two holding plates. 前記基板吸引部材又は前記支持ピンは、高さ調整可能であることを特徴とする請求項1又は2記載の基板保持装置。The substrate holding device according to claim 1, wherein a height of the substrate suction member or the support pin is adjustable. 前記基板吸引部材は、前記基板ホルダにおける前記開口部の下面を閉塞する透明な保持体上に設けたことを特徴とする請求項1記載の基板保持装置。2. The substrate holding device according to claim 1, wherein the substrate suction member is provided on a transparent holder that closes a lower surface of the opening in the substrate holder. 前記基板吸引部材は、内部に空間が形成された基板吸引部材本体と、
この基板吸引部材本体に対して移動可能で、前記空間に連通する吸引通路が形成された基板保持軸と、
この基板保持軸の先端部に設けられた弾性材により形成された吸着部材と、
前記基板吸引部材本体に接続され、前記空間を介して前記吸引通路に連通した吸引チューブと、
から成ることを特徴とする請求項1項記載の基板保持装置。
The substrate suction member, a substrate suction member body having a space formed therein,
A substrate holding shaft movable with respect to the substrate suction member main body and formed with a suction passage communicating with the space;
An adsorption member formed of an elastic material provided at a tip end of the substrate holding shaft;
A suction tube connected to the substrate suction member main body and communicating with the suction passage through the space;
2. The substrate holding device according to claim 1, comprising:
前記吸引チューブは、光透過性の材料により形成され前記基板吸引部材を挟持する2枚の保持板間に沿って配置されることを特徴とする請求項11項記載の基板保持装置。12. The substrate holding device according to claim 11, wherein the suction tube is formed of a light transmissive material, and is disposed along a space between two holding plates that sandwich the substrate suction member. 前記2枚の保持板の空間には、透過照明光を散乱又は拡散させる光学部材が配置されたことを特徴とする請求項5記載の基板保持装置。The substrate holding device according to claim 5, wherein an optical member that scatters or diffuses the transmitted illumination light is disposed in a space between the two holding plates. 前記支持部材は、先端部にボールが設けられた保持軸と、
この保持軸を移動可能に受ける保持軸受けと、
前記保持軸を前記保持軸受けに対して固定する固定ネジと、
から成ることを特徴とする請求項2記載の基板保持装置。
The support member, a holding shaft provided with a ball at the tip,
A holding bearing movably receiving the holding shaft;
A fixing screw for fixing the holding shaft to the holding bearing,
3. The substrate holding device according to claim 2, comprising:
JP2003512690A 2001-07-02 2002-06-28 Substrate holding device Expired - Fee Related JP3752501B2 (en)

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