CN103203726B - Accurately control the object stage of position - Google Patents
Accurately control the object stage of position Download PDFInfo
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- CN103203726B CN103203726B CN201210006862.6A CN201210006862A CN103203726B CN 103203726 B CN103203726 B CN 103203726B CN 201210006862 A CN201210006862 A CN 201210006862A CN 103203726 B CN103203726 B CN 103203726B
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- support column
- base station
- pin
- support
- object stage
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Abstract
The present invention relates to the object stage of a kind of accurate control position, mainly solving in prior art object stage can not pinpoint problem, the present invention is by using the object stage of a kind of accurate control position, including support column, pin and base station, support column and pin are fixed on base station, being perpendicular to height of pin on the direction of base station and form a plane higher than support column, the summit of the support zone of described support column, the support zone of described support column is curved-surface structure or pyramidal structure；Table top is positioned on the support zone of support column, and is positioned at the technical scheme of the inner side of pin, preferably solves this problem, in the commercial production of the object stage that can be used for accurate operation.
Description
Technical field
The present invention relates to the object stage of a kind of accurate control position.
Background technology
Along with the development of society, the requirement placing environment and plummer of the every profession and trade hardware facility to relating in its industry is more and more higher, the particularly placement to some precision instruments.Such as, relating to the operating board of optical element work, often requiring that its support platform has enough smoothnesses.
Chinese patent CN101738127A discloses a kind of adiabatic supporting device, including there is the cold bench of multiple installing hole and for supporting the support bar of described cold bench on it, described support bar includes again topmast strut, presses support bar down, coordinate with described installing hole with point cantact or linear contact lay mode respectively, but the bracing frame of this invention has four support columns.
Chinese patent CN2574502 discloses a kind of three point supporting balance table, it includes plummer and the support section of support bearing platform, table top three fulcrum of support section is by a support column the most direct, two the most vertically support columns being connected on skewed horizontal load beam provide, the other end of two skewed horizontal load beams is fixed in the same point of the most vertically support column, supporting desktop during this three support column difference of invention.
Chinese patent CN201468443U table top supporter, it is characterized in that: table top supporter is provided with underframe, the quarter butt of triangular support foot is connected with underframe, in each triangular support foot, side lever is provided with the connection sheet of band connecting hole, each triangular support foot is fixed by fixture through connecting hole, the upper corners of three triangular support feet is in same plane, and forms desktop support face, but support column is that face contacts with desktop.
CN102102986A the present invention relates to a kind of adjusting center and adjusts the circularity/cylindricity measurement workbench inclined, including the pedestal connected with line shaft, for placing the operating platform of measured workpiece, three bracing frames；Wherein bracing frame includes two retractable support framves and a fixing support rack, the upper end of retractable support frame and operating platform sphere-contact, and fixing support rack upper end is connected with operating platform by Hooke's hinge assembly, but support column and table top are sphere-contact.
3 have the effect determining a plane, the bracing frame using three support columns to constitute has the function that supported objects is fixed on a certain plane, but there is problem below in supported at three point: when the object center of gravity supported falls the adjacent edges of the triangle constituted at three strong points or deviate from triangle interior region, the object supported is susceptible to rollover, thus cause object accidental injury, even can cause security incident.
The bracing frame of prior art report and support platform, be all the operating board of face contact type, all cannot ensure the most smooth of its face, and in different operating process, the plan-position repeatability that on operating board, object is placed is bad, is unfavorable for the operation of precision.In the operation of some instruments particularly during the measurement of some precision instrument, final actual result is had a great impact by the position difference of measured object.The present invention provides the object stage of a kind of accurate control position, and the object supported can be accurately fixed on a certain position by it.
Summary of the invention
The technical problem to be solved is that in prior art, object stage is difficult to pinpoint problem, it is provided that a kind of new object stage accurately controlling position, the advantage that this loading stand has supporting & stablizing, is accurately positioned.
For solving above-mentioned technical problem, the technical solution used in the present invention is as follows: the object stage of a kind of accurate control position, it is fixed on base station including base station, support column and pin, support column and pin, is perpendicular to height of pin on the direction of base station and is higher than the height of support column, the summit of the support zone of described support column forms a plane, table top is positioned on the support zone of support column, and is positioned at the inner side of pin, wherein, described pin is eccentric pin, is threadedly secured on base station.
In technique scheme, preferred technical scheme be the support zone of described support column be curved-surface structure or pyramidal structure；Described object stage at least three hard spot support columns, described object stage at least two pins.Preferably technical scheme is that support column is made up of with multiple soft spots support columns three hard spot support columns；Three pins are had on base station；Preferably technical scheme is that object stage contains three hard spot support columns, a soft spots support column, and three hard spot support columns are distributed in base station position point and constitute a triangle, and soft spots support column point is in the perimeter of described triangle；Preferably technical scheme is three hard spot support column position point line form right angles or acute triangle, and the support zone curved-surface structure of described support column is spherical structure.Preferably technical scheme is that three support column position point lines constitute isosceles right angle or isosceles acute triangle；The structure that described support column contacts with base station is cylinder, rectangular strip or helicitic texture, and described three hard spot support columns and pin are made up of hard material, and soft spots support column is made up of flexible material.Preferably technical scheme is that described three hard spot support columns are made up of abrasion-proof stainless steel material；Soft spots support column is combined by hard material and flexible material and forms；The main body of described hard spot support column is elongate configuration；Described hard spot support column is fixed on base station by welding or screw thread screw-fashion, and threads turn is passed through at the position that soft spots support column contacts with base station.
Preferably technical scheme is that base station is made up of hard material；Having standby screw on base station, hard spot support column has nut, soft spots support column is bulb resilient plunger, and the support zone of described support column and the way of contact of table top are point cantact or linear contact lay.Preferably technical scheme is that base station is made up of lightweight aluminium material or alloy material；The support zone of described support column and the way of contact of table top are point cantact.
Described hard spot support column is fixed on base station by welding or screw thread screw-fashion, and threads turn is passed through at the position that soft spots support column contacts with base station.Described hard spot support column is to be fixed on base station by the way of screw thread screws.Described base station can be any shape, and as preferably, it is generally more regular shape.
Preferably the agent structure of soft spots support column described in technical scheme can be identical with the structure of hard spot support column, can also be different, its object is to the object supported is provided in a certain orientation certain support force, place the object supported to turn on one's side, as preferably, it has following several middle structure: soft spots support column is all made up of flexible material, and threads turn can be passed through in its position contacted with base station, both so that soft spots support column carries out certain movement in the vertical direction；Soft spots support column is combined by hard material and flexible material and forms, and wherein hard material deformation is little, can reduce the movement on the direction being perpendicular to support column of the single flexible material；Soft spots can also be made up of hard material entirely, and such as, it can be bulb resilient plunger.
Preferably support column described in technical scheme is to be fixed on by the way of screw thread screws on base station, there is multiple standby screw on base station, in order to change the position of support column, so that bracing frame adapts to the support of different size object.Preferably technical scheme, the base station of described fixing support column is made up of hard material, as preferably it can be made up of lightweight aluminium material or alloy material.
Preferably object stage described in technical scheme can will be fixed in a certain plane by object carrier, and described pin has regulation effect, and a certain effect determining position that can will be accurately fixed in plane by article carrying piece.Preferably technical scheme, described pin is three.Preferably technical scheme, described in have the pin of regulation effect be cam pin, it has the effect of regulation, and object can be carried out certain fine setting on plan-position by it, thus is determined in the most a certain defined location by object.
Preferably technical scheme, the described cam pin with regulation effect is continuously adjustabe, and it can realize the fixing of eccentric shaft by related measure after regulating every time, i.e. enable to after eccentric shaft positions the most loosening, as preferably, the main body of described eccentric shaft is cylindrical structure, and its locking measure can be that screw is fixed.Preferably technical scheme, described object stage can be any planform, as preferably, there is on described object stage several support columns that can regulate height, the top of support column is as the strong point, as preferably, support column is made up of three hard spot support columns or is made up of with several soft spots support columns three hard spot support columns.Preferably technical scheme, described pin is manually to regulate, and pin has the mechanism for regulation；Manually regulation parts are protruding, groove or circular hole.There is on pin nut.The main body of the eccentric shaft of described eccentric pin is cylindrical structure, and base station is fixed end and had screw thread, during rotating eccentricity pin, and its vertical central transverse shifting.
The object stage that the present invention provides, the support zone having the advantage that each strong point is curved-surface structure, when it supports other object with face structure, enable between bracing frame and object as point cantact or linear contact lay, can fully position owing to supporting and only position, meeting at geometric 3 and allocate face rule, this kind is designed to determine in one plane object；Additionally, when being regular planar structure when needing the object supported, take three strong points can be by the object of support in some plane needed, and owing to the position of three strong points constitutes a triangle, it is easily achieved by the gravity's center control of object inside delta-shaped region, so that rollover is less likely to occur the object supported.It addition, the bracing frame with the auxiliary strong point provided by the present invention, there is higher smoothness, three hard spots support the tram determining supported object part, one soft spots auxiliary support ensure that supported object is not susceptible to rollover, and table top fixed by pin, not easily shifted.
The object stage that the present invention provides, use simple Machine Design, can realize comprehensive being positioned by the object supported, the object supported can be accurately fixed on a certain position by it, operation at some instruments, particularly during the measurement of some precision instrument, reduce the impact on final actual result of the position difference of measured object.
In the operating process of precision instrument, using it as object stage, coordinate high operating system closely can complete the operation that required precision is of a relatively high, particularly when the instrument relating to accurately measure uses, the object stage of the present invention has enough smoothnesses, the plan-position favorable reproducibility that on operating board, object is placed, it is not easy to turn on one's side, is conducive to accurate operation.
The present invention is capable of the accurate placement of the object of object particularly ordered structure, same type of object for pattern rule, the tabular of such as flush edge, can ensure that each placement all has the highest position repeatability, i.e. can realize one-time positioning, many subjobs, can also realize comprehensive being positioned by the object supported, the object supported can be accurately fixed on a certain position by it, achieves preferable technique effect.
Accompanying drawing explanation
Fig. 1 is the support frame structure schematic diagram with pin in the embodiment of the present invention 1.
Fig. 2 is the eccentric pin structural representation in the embodiment of the present invention 1.
Fig. 3 is carrier structure schematic diagram in the embodiment of the present invention 1.
In Fig. 1,11 it is base station, 12 for pin；13 is support column；14 is nut.
In Fig. 2,21 is the bottom cylinder that surface is helicitic texture, and 22 is upper end cylinder；Two cylinders 21,22 are the most coaxial；Wherein, cam pin 12 is fixed on object stage by helicitic texture, and 22 surfaces there is also helicitic texture near the position of 21, and the pin adjusted is fixed on object stage for stop nut 14 by it.
In Fig. 3,11 it is base station support column, 12 for pin；13 is support column；21 is contained object.
Below by representational specific embodiment, the invention will be further elaborated, is not limited only to the present embodiment, falls within protection scope of the present invention by the application of simple transformation or equivalence.
Detailed description of the invention
[embodiment 1]
The object stage of a kind of accurate control position, as it is shown in figure 1, it includes that object stage 11 and 3 control by the pin 12 of object carrier position, described pin has regulation effect, and the object carried can be accurately located at a certain effect determining position in plane.The described pin 12 with regulation effect is cam pin, its a kind of structure is as shown in Figure 2, it is by two cylinders 21 of out-of-alignment, 22 are constituted, wherein 21 surfaces are helicitic texture, cam pin 12 is fixed on object stage by this structure, 22 surfaces there is also helicitic texture near the position of 21, the pin adjusted is fixed on object stage for stop nut 14 by it, separately there is on pin governor motion, in the present embodiment, governor motion is a circular port, it is inserted the action regulated that can rotate by bar shaped rod, the foundation of the circular port mechanism present invention without limitation, governor motion can also be other mechanisms.
Having 3 hard spot support columns 13 on object stage 11 in the present embodiment, it will can be fixed in a certain plane by object carrier by three strong points, the height adjustable of hard spot support column 13.When using this object stage, as it is shown on figure 3, the object 21 carried is placed on object stage 11 by support column 13 jack-up, the height of regulation support column 13 so that object is positioned on certain horizontal plane；Mobile object makes object edge be close to 3 cam pins 12, eccentric adjustment pin 12, during rotating cam pin 12, object 21 edge is made to be close to cam pin 12, rotation due to cam pin, had certain change by object carrier 21 position in the plane, coordinating 3 cam pins 12 of regulation until correct position, by nut 14, cam pin is being fixed.In the present embodiment, the cam pin 12 projecting height on object stage is higher than support column 13 projecting height on described object stage 11.
[embodiment 2]
The object stage of a kind of accurate control position, for placing regular appearance and the high object of position accuracy demand, bracing frame includes support column, pin and fixing support column and the base station of pin.Described support column is 3 positions rigid support posts the most point-blank, it is prepared by stainless steel material, and be there is the height that with the helicitic texture of rotational support post, i.e. can be regulated each support column strong point by helicitic texture in the position that support column contacts with base station.The table top supported can be fixed in a certain plane by 3 support columns.Being fixed with 3 eccentric pins in the present embodiment on base station, it is prepared by hard wear-resistant material, and the position of pin is in the periphery that support column is triangle, and the most point-blank, depending on its fixed position is by supporter shape corresponding to object stage and size.Pin projecting height on base station is higher than the projecting height on base station of described support column.Object stage is during using, and all pins touch with the side edge of the object supported, and what the object supported can be fixed in plane by it a certain determines position.
[embodiment 3]
The object stage of a kind of accurate control position is provided, as different from Example 1, a soft spots support column is added on the basis of embodiment 1, during the use of bracing frame, it plays and prevents object center of gravity from deflecting away from the delta-shaped region of the composition of support column shown in embodiment 1 and the phenomenon of rollover occurs, and soft spots support column is spring-loaded plunger.
[embodiment 4]
The present embodiment provides a kind of accurate control position, and it includes three hard spot support columns, a soft spots support column and the base station of fixing support column, 3 eccentric pins, circular hole on eccentric pin.Three hard spot support columns are distributed on the position that base station is different, and its position point constitutes a right angled triangle, and soft spots support column is in the perimeter of described triangle, and four support column positions constitute a rectangular configuration.
Three hard spot support columns are made up of hard, wear-resistant stainless steel material, and it is embedded in support column column main body one end and constitutes by support end sphere structure, and the support column column main body other end is helicitic texture, and a nut is threadedly secured in support column column main body.Support end sphere structure is designed as sphere structure, is because being generally point contact type when sphere contacts with other face, and three support columns can determine that a plane；Design nut structure, is easily to loosen to prevent support column to be fixed on base station.
Soft spots support column is a bulb resilient plunger, and bulb resilient plunger top is divided into hollow-core construction, has a spring in hollow area, and what its upper end and spring interface touched has an active sphere, spheroid and spring to be fixed in certain space by bulb resilient plunger agent structure；Separately the lower part in bulb resilient plunger agent structure has helicitic texture, and by rotating bulb resilient plunger agent structure, the soft spots support column that can make has certain movement on the direction be perpendicular to base station.The when of using soft spots support column, adjust its height so that the top active sphere of soft spots support column touches the body surface supported and spring has elastic deformation somewhat.
Support column is to be fixed on by the way of screw thread screws in screw corresponding with support column on base station, base station exists multiple standby screw, so that the position of support column can be changed according to the pattern of supported objects at any time, so that bracing frame adapts to the support of different size object.The base station of fixing support column is made up of the aluminum that matter is hard and light.
The position of pin is in the periphery that hard spot support column is triangle, and the most point-blank, depending on its fixed position is by supporter shape corresponding to object stage and size.Pin projecting height on base station is higher than the projecting height on base station of hard spot support column.Object stage is during using, and all pins touch with the side edge of the object supported, and what the object supported can be fixed in plane by it a certain determines position.
[embodiment 5]
The present embodiment provides the object stage of a kind of accurate control position, and its structure is identical with embodiment 4, and three support columns are distributed near the edge of base station；And its material is hard, wear-resistant stainless steel material and prepares, support column is fixed on hard base station by screw thread screw-fashion, and hard base station is prepared by lightweight aluminium material；Three summits that three support column position points are triangle, and the triangle constituted is right angled triangle.The structure of soft spots support column is made by having certain elastic quality of rubber materials.
[embodiment 6]
In embodiment 6, support column is identical with base station and embodiment 4, there is multiple standby screw on base station.Change the position of three hard strong points as different from Example 4 so that it is the triangle that point is formed is equilateral triangle.There is on hard spot support column nut structure and helicitic texture, base station has the screwed hole corresponding with helicitic texture, support column is to be fixed on by the way of screw thread screws in screw corresponding with support column on base station, and then tightening nut is support column and base station is combined closely.The base station of fixing support column is made up of the aluminum that matter is hard and light.
[embodiment 7]
The object stage of a kind of accurate control position, support column is identical with base station and embodiment 1, and its material is hard, wear-resistant stainless steel material and prepares, and hard base station is prepared by lightweight aluminium material；Three summits that three hard support column position points are triangle, and the triangle constituted is non-isosceles acute triangle.The spherical structure of table top and bracing frame forms point cantact, this object stage good stability, the plan-position favorable reproducibility that on object stage, object is placed, it is not easy to turn on one's side.
[embodiment 8]
The object stage of a kind of accurate control position, support column is identical with the position relationship of base station and embodiment 4, and this support column is constituted by ellipsoidal structure and cylindrical structure, and oval curved-surface structure is support zone.And its material is hard, wear-resistant stainless steel material and prepares, support column is threadedly fixed on hard base station, and hard base station is prepared by lightweight aluminium material.The oval curved-surface structure of table top and bracing frame forms linear contact lay, and this object stage degree of stability is high.
[embodiment 9]
The object stage of a kind of accurate control position, including three hard support columns and a soft support column and the base station of fixing support column, three hard support columns are distributed near the edge of base station；This hard support column arrangement is constituted by ellipsoidal structure and cylindrical structure, oval curved-surface structure is support zone, and its material is hard, wear-resistant stainless steel material and prepares, support column has the helicitic texture that embodiment 4 is identical, having the screwed hole corresponding with helicitic texture on base station, support column is tightened on base station by helicitic texture.Hard base station is prepared by lightweight aluminium material；Three summits that three support column position points are triangle, and the triangle constituted is isosceles acute triangle.The position of pin is in the periphery that hard spot support column is triangle, and the most point-blank, depending on its fixed position is by supporter shape corresponding to object stage and size.Pin projecting height on base station is higher than the projecting height on base station of hard spot support column.Object stage is during using, and all pins touch with the side edge of the object supported, and what the object supported can be fixed in plane by it a certain determines position.
[embodiment 10]
A kind of object stage accurately controlling position with the auxiliary strong point, three hard spot support columns are constituted by pyramidal structure and cylindrical structure, and pyramidal structure is support zone.Other parts are identical with embodiment 4, and its material is hard, wear-resistant stainless steel material and prepares, support column has the helicitic texture that embodiment 4 is identical, has the screwed hole corresponding with helicitic texture on base station, and support column is tightened on base station by helicitic texture.Hard base station is prepared by lightweight aluminium material；Three summits that three support column position points are triangle, and the triangle constituted is isosceles acute triangle.The cone structure of table top and bracing frame forms point cantact, and this object stage degree of stability is high.
Claims (7)
1. the object stage of an accurate control position, including base station, support column and pin, described support column and pin are fixed on base station, it is characterized in that, it is perpendicular to height of pin on the direction of base station and is higher than the height of support column, the summit of the support zone of described support column forms a plane, is positioned on the support zone of support column by object carrier, and is positioned at the inner side of pin；The support zone of described support column is spherical structure；Support column has three hard spot support columns to constitute with multiple soft spots support columns；Three hard spot support columns are distributed in base station position point and constitute a triangle, and soft spots support column point is in the perimeter of described triangle；Having three pins on described base station, described pin is eccentric pin, is threadedly secured on base station, and pin has nut.
The object stage of accurate control position the most according to claim 1, it is characterised in that three hard spot support column position point line form right angles or acute triangle；The structure that described support column contacts with base station is helicitic texture, and threads turn is passed through at the position that soft spots support column contacts with base station.
3. according to the object stage accurately controlling position described in claim 2, it is characterised in that three hard spot support column position point lines constitute isosceles right angle or isosceles acute triangle；Described hard spot support column is made up of abrasion-proof stainless steel material；Soft spots support column is combined by hard material and flexible material and forms；Having standby screw on base station, hard spot support column has nut, soft spots support column is bulb resilient plunger, and the support zone of described soft spots support column and hard spot support column and the way of contact of table top are point cantact or linear contact lay.
4. according to the object stage accurately controlling position described in claim 1, it is characterised in that described base station is made up of lightweight aluminium material or alloy material；The support zone of described soft spots support column and hard spot support column and the way of contact of table top are point cantact.
5. according to the object stage accurately controlling position described in claim 1, it is characterised in that the main body of the eccentric shaft of described eccentric pin is cylindrical structure, and the fixing end that base station is fixed has screw thread, during rotating eccentricity pin, and its vertical central transverse shifting.
6. according to the object stage accurately controlling position described in claim 1, it is characterised in that have on eccentric pin and manually regulate parts.
7. according to the object stage accurately controlling position described in claim 6, it is characterised in that manually regulation parts are protruding, groove or circular hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210006862.6A CN103203726B (en) | 2012-01-11 | 2012-01-11 | Accurately control the object stage of position |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210006862.6A CN103203726B (en) | 2012-01-11 | 2012-01-11 | Accurately control the object stage of position |
Publications (2)
| Publication Number | Publication Date |
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| CN103203726A CN103203726A (en) | 2013-07-17 |
| CN103203726B true CN103203726B (en) | 2016-08-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201210006862.6A Expired - Fee Related CN103203726B (en) | 2012-01-11 | 2012-01-11 | Accurately control the object stage of position |
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| CN (1) | CN103203726B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105710637A (en) * | 2014-12-04 | 2016-06-29 | 焱智精密机械（上海）有限公司 | Short-distance parallelism adjusting device and method of short-distance parallelism adjusting device |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59121338A (en) * | 1982-12-28 | 1984-07-13 | Toshiba Corp | Exposing device for printed wiring board |
| JPH0774143A (en) * | 1993-08-31 | 1995-03-17 | Dainippon Screen Mfg Co Ltd | Substrate holder |
| JP3752501B2 (en) * | 2001-07-02 | 2006-03-08 | オリンパス株式会社 | Substrate holding device |
| EP1450398A3 (en) * | 2003-02-20 | 2004-11-10 | Applied Materials, Inc. | A method and an apparatus for positioning a substrate relative to a support stage |
| JP4410063B2 (en) * | 2004-09-06 | 2010-02-03 | 東京エレクトロン株式会社 | Substrate processing equipment |
| DE102010015884B4 (en) * | 2010-03-09 | 2015-05-28 | Kla-Tencor Mie Gmbh | Method for reproducibly determining the position of structures on a pellicle frame mask |
| CN202572353U (en) * | 2012-01-11 | 2012-12-05 | 昆山允升吉光电科技有限公司 | Objective table precise in position control |
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