CN103206591B - Motorized subject table localization method - Google Patents
Motorized subject table localization method Download PDFInfo
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- CN103206591B CN103206591B CN201210006684.7A CN201210006684A CN103206591B CN 103206591 B CN103206591 B CN 103206591B CN 201210006684 A CN201210006684 A CN 201210006684A CN 103206591 B CN103206591 B CN 103206591B
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Abstract
The present invention relates to a kind of motorized subject table localization method, mainly solving in prior art object stage can not pinpoint problem, the present invention includes following step by employing: a) be first fixed on base station by the support column of object stage, and the lower end of support column and the rotating mechanism of motor connect；B) being fixed on base station by eccentric pin, the lower end of eccentric pin and the rotating mechanism of motor connect；C) by the electric machine rotation below regulation support column, make support column upper extreme point be on a horizontal plane, contained object is positioned on bracing frame, and is clipped between eccentric pin and plunger；D) control the electric machine rotation below contained object wherein side eccentric pin, make contained object move horizontally relative to base station；E) by the electric machine rotation below regulation support column, contained object is made to vertically move relative to base station；F) motor below other eccentric pins is regulated, the technical scheme making eccentric pin and plunger that object contained on object stage to be fixed, preferably solve this problem, in the positioning operation of the object stage that can be used for accurate operation.
Description
Technical field
The present invention relates to a kind of motorized subject table localization method.
Background technology
Along with the development of society, the requirement placing environment and plummer of the every profession and trade hardware facility to relating in its industry is more and more higher, the particularly placement to some precision instruments.Such as, relating to the operating board of optical element work, often requiring that its support platform has enough smoothnesses.
Chinese patent CN101738127A discloses a kind of adiabatic supporting device, including there is the cold bench of multiple installing hole and for supporting the support bar of described cold bench on it, described support bar includes again topmast strut, presses support bar down, coordinate with described installing hole with point cantact or linear contact lay mode respectively, but the bracing frame of this invention has four support columns.
Chinese patent CN2574502 discloses a kind of three point supporting balance table, it includes plummer and the support section of support bearing platform, table top three fulcrum of support section is by a support column the most direct, two the most vertically support columns being connected on skewed horizontal load beam provide, the other end of two skewed horizontal load beams is fixed in the same point of the most vertically support column, supporting desktop during this three support column difference of invention.
Chinese patent CN201468443U table top supporter, it is characterized in that: table top supporter is provided with underframe, the quarter butt of triangular support foot is connected with underframe, in each triangular support foot, side lever is provided with the connection sheet of band connecting hole, each triangular support foot is fixed by fixture through connecting hole, the upper corners of three triangular support feet is in same plane, and forms desktop support face, but support column is that face contacts with desktop.
CN102102986A the present invention relates to a kind of adjusting center and adjusts the circularity/cylindricity measurement workbench inclined, including the pedestal connected with line shaft, for placing the operating platform of measured workpiece, three bracing frames；Wherein bracing frame includes two retractable support framves and a fixing support rack, the upper end of retractable support frame and operating platform sphere-contact, and fixing support rack upper end is connected with operating platform by Hooke's hinge assembly, but support column and table top are sphere-contact.
3 have the effect determining a plane, the bracing frame using three support columns to constitute has the function that supported objects is fixed on a certain plane, but there is problem below in supported at three point: when the object center of gravity supported falls the adjacent edges of the triangle constituted at three strong points or deviate from triangle interior region, the object supported is susceptible to rollover, thus cause object accidental injury, even can cause security incident.
The bracing frame of prior art report and support platform, be all the operating board of face contact type, all cannot ensure the most smooth of its face, and in different operating process, the plan-position repeatability that on operating board, object is placed is bad, is unfavorable for the operation of precision.In the operation of some instruments particularly during the measurement of some precision instrument, final actual result is had a great impact by the position difference of measured object.The present invention provides the object stage of a kind of Electronic control position, and the object supported can be accurately fixed on a certain position by it.
Summary of the invention
The technical problem to be solved is that in prior art, object stage is difficult to pinpoint problem, it is provided that a kind of new motorized subject table localization method, the method has the advantage being accurately positioned.
For solving above-mentioned technical problem, the technical solution used in the present invention is as follows: a kind of motorized subject table localization method, including following step:
A) first the helicitic texture of the support column on the bracing frame of object stage and the screw of base station being coordinated, make support column be fixed on base station, the lower end of support column and the rotating mechanism of motor connect；
B) being fixed on base station by eccentric pin, the lower end of eccentric pin and the rotating mechanism of motor connect；
C) by the electric machine rotation below regulation support column, make the helicitic texture of support column move up and down along base station, make support column upper extreme point be on a horizontal plane, contained object is positioned on bracing frame, then plunger is fixed on base station；Contained object is clipped between eccentric pin and plunger；
D) control contained object wherein side electric machine rotation, make eccentric pin axis closer or far from contained object, regulate the electric machine rotation of opposite side simultaneously, make eccentric pin axis away from or near contained object, make contained object move horizontally relative to base station；
E) by the electric machine rotation below regulation support column, the helicitic texture of support column moves up and down along base station, makes contained object vertically move relative to base station；
F) regulate the motor below other eccentric pins, make eccentric pin and plunger that object contained on object stage to be fixed.
In technique scheme, preferably technical scheme is described motorized subject table, including base station, support column, plunger, eccentric pin motor and control station, support column, plunger and eccentric pin are fixed on base station, are perpendicular to the height of eccentric pin and plunger on the direction of base station and are more than the height of support column；The support zone of described support column is curved-surface structure or pyramidal structure, and the summit of the support zone of described support column forms a plane；Contained object is positioned on the support zone of support column, its edge and eccentric pin, plunger contact；At least one plunger is positioned at the relative position of eccentric pin；Eccentric pin and support column lower end have the rotating mechanism matched with motor, and motor position is fixed on the lower section of eccentric pin and support column, and control station has control system, and control system controls electric machine rotation.
In technique scheme, preferred technical scheme, for repeating step c)～step f), makes contained object repeatedly both horizontally and vertically move relative to base station, completes the location of object stage.
In technique scheme, preferred technical scheme is that control station has electric machine control system, and when control system controls electric machine rotation, driven by motor eccentric pin and support column rotate；Plunger is spring-loaded plunger, and it is with when being contacted by object carrier, and the bulb of spring ejection contacts with by object carrier.Described eccentric pin and plunger are distributed in the periphery of support column, and object is fixed in the plane that support column summit determines by the two cooperation；Eccentric pin and plunger are distributed in the not homonymy of base station, and described is the object of regular shape by object carrier；The support zone of described support column is curved-surface structure or pyramidal structure.
Preferably technical scheme is that described object stage has at least 3 hard spot support columns, and described object stage has at least 2 eccentric pins.Preferably technical scheme is that support column is made up of with multiple soft spots support columns 3 hard spot support columns；3 eccentric pins are had on base station；Preferably technical scheme is that object stage contains three hard spot support columns, a soft spots support column, and three hard spot support columns are distributed in base station position point and constitute a triangle, and soft spots support column point is in the perimeter of described triangle；Preferably technical scheme is three hard spot support column position point line form right angles or acute triangle, and the support zone curved-surface structure of described support column is spherical structure.Preferably technical scheme is that three support column position point lines constitute isosceles right angle or isosceles acute triangle；The structure that described support column contacts with base station is cylinder, rectangular strip or helicitic texture, and described three hard spot support columns and eccentric pin are made up of hard material, and soft spots support column is made up of flexible material.Preferably technical scheme is that described three hard spot support columns are made up of abrasion-proof stainless steel material；Soft spots support column is combined by hard material and flexible material and forms；The main body of described hard spot support column is elongate configuration；Described hard spot support column is fixed on base station by welding or screw thread screw-fashion, and threads turn is passed through at the position that soft spots support column contacts with base station.Preferably technical scheme is that base station is made up of hard material；Having standby screw on base station, hard spot support column has nut, soft spots support column is bulb resilient plunger, and the support zone of described support column and the way of contact of table top are point cantact or linear contact lay.Preferably technical scheme is that base station is made up of lightweight aluminium material or alloy material；The support zone of described support column and the way of contact of table top are point cantact.
Described hard spot support column is fixed on base station by screw thread screw-fashion, and threads turn is passed through at the position that soft spots support column contacts with base station.There is multiple standby screw on base station, base station is made up of hard material.Described base station can be any shape, and as preferably, it is generally more regular shape.
Preferably the agent structure of soft spots support column described in technical scheme can be identical with the structure of hard spot support column, can also be different, its object is to the object supported is provided in a certain orientation certain support force, place the object supported to turn on one's side, as preferably, it has following several middle structure: soft spots support column is all made up of flexible material, and threads turn can be passed through in its position contacted with base station, both so that soft spots support column carries out certain movement in the vertical direction；Soft spots support column is combined by hard material and flexible material and forms, and wherein hard material deformation is little, can reduce the movement on the direction being perpendicular to support column of the single flexible material；Soft spots can also be made up of hard material entirely, and such as, it can be bulb resilient plunger.
Preferably support column described in technical scheme is to be fixed on by the way of screw thread screws on base station, there is multiple standby screw on base station, in order to change the position of support column, so that bracing frame adapts to the support of different size object.Preferably technical scheme, the base station of described fixing support column is made up of hard material, as preferably it can be made up of lightweight aluminium material or alloy material.
Preferably technical scheme, described object stage can will be fixed in a certain plane by object carrier, and described eccentric pin has regulation effect, and a certain effect determining position that can will be accurately fixed in plane by article carrying piece.Preferably technical scheme, described eccentric pin is 3.Preferably technical scheme, described in have the eccentric pin of regulation effect be cam pin, it has the effect of regulation, and object can be carried out certain fine setting on plan-position by it, thus is determined in the most a certain defined location by object.
Preferably technical scheme, the described cam pin with regulation effect is continuously adjustabe, and it can realize the fixing of eccentric shaft by related measure after regulating every time, i.e. enable to after eccentric shaft positions the most loosening, as preferably, the main body of described eccentric shaft is cylindrical structure, and its locking measure can be that screw is fixed.Preferably technical scheme, described object stage can be any planform, as preferably, there is on described object stage several support columns that can regulate height, the top of support column is as the strong point, as preferably, support column is made up of 3 hard spot support columns or is made up of with several soft spots support columns 3 hard spot support columns.Preferably technical scheme, described eccentric pin is manually to regulate, and eccentric pin has the mechanism for regulation；Manually regulation parts are protruding, groove or circular hole.There is on eccentric pin nut.The main body of the eccentric shaft of described eccentric pin is cylindrical structure, and the fixing end that base station matches has screw thread, during rotating eccentricity pin, and its vertical central transverse shifting.
Preferably technical scheme, described plunger is at least 1, and it is constituted by the edge supports point of object carrier with described eccentric pin, and preferred technical scheme, described plunger is 2, and it is relative with the position of described eccentric pin.Preferably technical scheme, further, described plunger is spring-loaded plunger, and as preferably, the strong point of plunger is bulb.
Described object stage can prevent by object carrier slip on object stage, i.e. a certain can determine be fixed on object stage by object carrier on position.The support column of described object stage, eccentric pin have regulation effect, can be adjusted by it and be placed on the position of object on object stage.Further, the plunger on described object stage is by providing certain pressure to by object carrier so that can be close to the eccentric pin on described object stage by the edge of object carrier, can prevent by the slip of object carrier.
The object stage that the present invention provides, the support zone having the advantage that each strong point is curved-surface structure, when it supports other object with face structure, enable between bracing frame and object as point cantact or linear contact lay, can fully position owing to supporting, meeting at geometric 3 and allocate face rule, this kind is designed to determine in one plane object；Additionally, when being regular planar structure when needing the object supported, take three strong points can be by the object of support in some plane needed, and owing to the position of three strong points constitutes a triangle, it is easily achieved by the gravity's center control of object inside delta-shaped region, so that rollover is less likely to occur the object supported.It addition, the bracing frame with the auxiliary strong point provided by the present invention, there is higher smoothness, three hard spots support the tram determining supported object part, one soft spots auxiliary support ensure that supported object is not susceptible to rollover, and table top fixed by eccentric pin, not easily shifted.
The object stage that the present invention provides, use simple Machine Design, can realize comprehensive being positioned by the object supported, the object supported can be accurately fixed on a certain position by it, operation at some instruments, particularly during the measurement of some precision instrument, reduce the impact on final actual result of the position difference of measured object.
In the operating process of precision instrument, using it as object stage, coordinate high operating system closely can complete the operation that required precision is of a relatively high, particularly when the instrument relating to accurately measure uses, the object stage of the present invention has enough smoothnesses, the plan-position favorable reproducibility that on operating board, object is placed, it is not easy to turn on one's side, is conducive to accurate operation.
The present invention is capable of the accurate placement of the object of object particularly ordered structure, same type of object for pattern rule, the tabular of such as flush edge, can ensure that each placement all has the highest position repeatability by the rotational angle of control system regulation motor, i.e. can realize one-time positioning, many subjobs, can also realize comprehensive being positioned by the object supported, the object supported can be accurately fixed on a certain position by it, achieves preferable technique effect.
Accompanying drawing explanation
Fig. 1 is the carrier structure schematic diagram in the embodiment of the present invention 1.
Fig. 2 is the structural representation of the eccentric pin in the embodiment of the present invention 1.
Fig. 3 is the structural representation of motor in the embodiment of the present invention 1.
Fig. 4 be eccentric pin with motor mate schematic diagram.
In Fig. 1,11 it is support column, 12 for eccentric pin；13 is plunger；14 is base station；131 is elastic bulb；15 is motor.
In Fig. 2,21 be eccentric pin with by object carrier contact portion, 22 parts being fixed on substrate for eccentric pin；23 is the mechanism that eccentric pin lower end is mated with electrode
In Fig. 3,31 it is motor body, 32 for electric machine rotation part；321 grooves matched with pin lower end for motor.
Below by representational specific embodiment, the invention will be further elaborated, is not limited only to the present embodiment, falls within protection scope of the present invention by the application of simple transformation or equivalence.
Detailed description of the invention
[embodiment 1]
The object stage of a kind of Electronic control position, as it is shown in figure 1, it includes support column 11, pin 12, plunger 13, fixing substrate 14 and can rotate the motor 15 of pin 12 and support column 11.In the present embodiment, support column 11 is 3, and the most at grade, owing to 3 have fully location, meets at geometric 3 and allocate face, and 3, the upper end of support column energy will be determined in one plane by object carrier.
Pin 12 is cam pin, as in figure 2 it is shown, its by mechanism 23 part contacting 22 parts by object carrier 21 part, being fixed on substrate 14 and lower end is mated with electrode, can be regulated by the rotation of pin place on the support columns by the position of object carrier.
Support column 11 is fixed on the part on substrate 14 and there is the mechanism section mated with motor lower end, support column can be driven to move up and down on base station by the rotation of motor, can regulate place on the support columns by the upper-lower position of object carrier.
Motor position is fixed on the lower section of cam pin and support column, and Fig. 3 show the structural representation of motor, and it is made up of motor body 31, electric machine rotation part 32 part, wherein has the groove 321 matched with pin lower end in electric machine rotation part 32 part.
Fig. 4 be cam pin 12 with motor 13 mate schematic diagram, motor 13 can carry out certain rotation to cam pin 12 under control of the control system.Plunger 13 is spring-loaded plunger, and it is with when being contacted by object carrier, and the bulb 131 of spring ejection contacts with by object carrier.
The lower end of support column and the coupling of motor are identical with the compatible portion of eccentric pin and motor.
Being perpendicular to the height of eccentric pin and plunger on the direction of base station and form a plane more than the height of support column, the summit of the support zone of support column, the support zone of described support column is spherical structure；Contained object is positioned on the support zone of support column, its edge and eccentric pin, plunger contact；Plunger is positioned at the relative position of eccentric pin；Eccentric pin and support column lower end have the rotating mechanism matched with motor, and motor position is fixed on the lower section of eccentric pin and support column.
In the present embodiment, pin 12 and plunger 13 are distributed in the peripheral not homonymy of support column, and it can coordinate to be fixed on object and a certain in the plane that support column 11 summit determines determines position.It is wherein the tabular of regular shape by object carrier.
Described motorized subject table localization method, including following step:
A) first the helicitic texture of the support column on the bracing frame of object stage and the screw of base station being coordinated, make support column be fixed on base station, the lower end of support column and the rotating mechanism of motor connect；
B) being fixed on base station by eccentric pin, the lower end of eccentric pin and the rotating mechanism of motor connect；
C) by the electric machine rotation below regulation support column, make the helicitic texture of support column move up and down along base station, make support column upper extreme point be on a horizontal plane, contained object is positioned on bracing frame, then plunger is fixed on base station；Contained object is clipped between eccentric pin and plunger；
D) control contained object wherein side electric machine rotation, make eccentric pin axis closer or far from contained object, regulate the electric machine rotation of opposite side simultaneously, make eccentric pin axis away from or near contained object, make contained object move horizontally relative to base station；
E) by the electric machine rotation below regulation support column, the helicitic texture of support column moves up and down along base station, makes contained object vertically move relative to base station；
F) regulate the motor below other eccentric pins, make eccentric pin and plunger that object contained on object stage to be fixed.
[embodiment 2]
The object stage of a kind of Electronic control position, it includes that object stage and 3 control by the eccentric pin of object carrier position, and described eccentric pin has regulation effect, and the object carried can be accurately located at a certain effect determining position in plane.The described eccentric pin with regulation effect is eccentric pin, it is made up of two cylinders of out-of-alignment, two peripheries have helicitic texture, eccentric pin is fixed on object stage by this structure, for stop nut, the eccentric pin adjusted is fixed on object stage, separately having governor motion on eccentric pin, in the present embodiment, governor motion is a circular port, is inserted, by bar shaped rod, the action regulated that can rotate.
Having 3 hard spot support columns on object stage in the present embodiment, it will can be fixed in a certain plane by object carrier by three strong points, the height adjustable of hard spot support column.When using this object stage, the object carried is placed on object stage by support column jack-up, the height of regulation support column so that object is positioned on certain horizontal plane；Mobile object makes object edge be close to 3 cam pins, eccentric adjustment pin, during rotating cam pin, object edge is made to be close to cam pin, rotation due to cam pin, had certain change by object carrier position in the plane, coordinating 3 cam pins of regulation until correct position, by nut, eccentric pin is being fixed.In the present embodiment, cam pin projecting height on object stage is higher than the support column projecting height on described object stage.
Object stage contains 3 plungers, and it is constituted by the edge supports point of object carrier with described eccentric pin, and relative with the position of described eccentric pin.Use described object stage can prevent by object carrier off normal on object stage, i.e. a certain can determine be fixed on object stage by object carrier on position.
Cam pin is fixed on substrate, and motor position is fixed on the lower section of cam pin and support column, wherein has the groove matched with pin lower end and support column lower end in electric machine rotation part.Motor can drive pin to rotate, by the rotation of pin can regulate place on the support columns by the position of object carrier.
Motorized subject table localization method, including following step: a) first the helicitic texture of the support column on the bracing frame of object stage and the screw of base station being coordinated, make support column be fixed on base station, the lower end of support column and the rotating mechanism of motor connect；B) being fixed on base station by eccentric pin, the lower end of eccentric pin and the rotating mechanism of motor connect；C) by the electric machine rotation below regulation support column, the helicitic texture of support column moves up and down along base station, makes support column upper extreme point be on a horizontal plane, is positioned on bracing frame by contained object, and is clipped between eccentric pin and plunger；D) control contained object wherein side electric machine rotation, make eccentric pin axis closer or far from contained object, regulate the electric machine rotation of opposite side simultaneously, make eccentric pin axis away from or near contained object, make contained object move horizontally relative to base station；E) by the electric machine rotation below regulation support column, the helicitic texture of support column moves up and down along base station, makes contained object vertically move relative to base station；F) regulate the motor below other eccentric pins, make eccentric pin and plunger that object contained on object stage to be fixed；Repeat step c)～step f), make contained object repeatedly both horizontally and vertically move relative to base station, complete the location of object stage.
[embodiment 3]
The object stage of a kind of Electronic control position, for placing regular appearance and the high object of position accuracy demand, bracing frame includes support column, eccentric pin and fixing support column and the base station of eccentric pin.Described support column is 3 positions rigid support posts the most point-blank, it is prepared by stainless steel material, and be there is the height that with the helicitic texture of rotational support post, i.e. can be regulated each support column strong point by helicitic texture in the position that support column contacts with base station.The table top supported can be fixed in a certain plane by 3 support columns.Being fixed with 3 eccentric pins in the present embodiment on base station, it is prepared by hard wear-resistant material, and the position of eccentric pin is in the periphery that support column is triangle, and the most point-blank, depending on its fixed position is by supporter shape corresponding to object stage and size.Eccentric pin projecting height on base station is higher than the projecting height on base station of described support column.Object stage is during using, and all eccentric pins touch with the side edge of the object supported, and what the object supported can be fixed in plane by it a certain determines position.Motor position is fixed on the lower section of cam pin, wherein has the groove matched with pin lower end and support column lower end in electric machine rotation part.Motor can drive pin and support column to rotate, can be regulated by the rotation of pin place on the support columns by the position of object carrier.
The localization method of motorized subject table is with embodiment 1.
[embodiment 4]
The object stage of a kind of Electronic control position is provided, a soft spots support column is added on the basis of embodiment 1, other parts are same as in Example 1, during the use of bracing frame, it plays and prevents object center of gravity from deflecting away from the delta-shaped region of the composition of support column shown in embodiment 1 and the phenomenon of rollover occurs, and soft spots support column is spring-loaded plunger.The localization method of motorized subject table is with embodiment 1.
[embodiment 5]
The object stage of a kind of Electronic control position, it includes three hard spot support columns, a soft spots support column and the base station of fixing support column, 3 eccentric pins, circular hole on eccentric pin.Three hard spot support columns are distributed on the position that base station is different, and its position point constitutes a right angled triangle, and soft spots support column is in the perimeter of described triangle, and four support column positions constitute a rectangular configuration.
Three hard spot support columns are made up of hard, wear-resistant stainless steel material, and it is embedded in support column column main body one end and constitutes by support end sphere structure, and the support column column main body other end is helicitic texture, and nut is threadedly secured in support column column main body.Support end sphere structure is designed as sphere structure, is because being generally point contact type when sphere contacts with other face, and three support columns can determine that a plane；Design nut structure, is easily to loosen to prevent support column to be fixed on base station.
Soft spots support column is a bulb resilient plunger, and bulb resilient plunger top is divided into hollow-core construction, has a spring in hollow area, and what its upper end and spring interface touched has an active sphere, spheroid and spring to be fixed in certain space by bulb resilient plunger agent structure；Separately the lower part in bulb resilient plunger agent structure has helicitic texture, and by rotating bulb resilient plunger agent structure, the soft spots support column that can make has certain movement on the direction be perpendicular to base station.The when of using soft spots support column, adjust its height so that the top active sphere of soft spots support column touches the body surface supported and spring has elastic deformation somewhat.
Support column is to be fixed on by the way of screw thread screws in screw corresponding with support column on base station, base station exists multiple standby screw, so that the position of support column can be changed according to the pattern of supported objects at any time, so that bracing frame adapts to the support of different size object.The base station of fixing support column is made up of the aluminum that matter is hard and light.
The position of eccentric pin is in the periphery that hard spot support column is triangle, and the most point-blank, depending on its fixed position is by supporter shape corresponding to object stage and size.Eccentric pin projecting height on base station is higher than the projecting height on base station of hard spot support column.Object stage is during using, and all eccentric pins touch with the side edge of the object supported, and what the object supported can be fixed in plane by it a certain determines position.
Object stage contains 2 plungers, and it is constituted by the edge supports point of object carrier with eccentric pin, and relative with the position of two of which eccentric pin.Use described object stage can prevent by object carrier off normal on object stage, i.e. a certain can determine be fixed on object stage by object carrier on position.Motor position is fixed on the lower section of cam pin and support column, wherein has the groove matched with pin lower end in electric machine rotation part.Motor can drive pin and support column to rotate, can be regulated by the rotation of pin place on the support columns by the position up and down of object carrier.
The localization method of motorized subject table is with embodiment 2.
[embodiment 6]
The present embodiment is the object stage of a kind of Electronic control position, and its structure is identical with embodiment 1, and three support columns are distributed near the edge of base station；And its material is hard, wear-resistant stainless steel material and prepares, support column is fixed on hard base station by screw thread screw-fashion, and hard base station is prepared by lightweight aluminium material；Three summits that three support column position points are triangle, and the triangle constituted is right angled triangle.The structure of soft spots support column is made by having certain elastic quality of rubber materials.The localization method of motorized subject table is with embodiment 2.
[embodiment 7]
In the present embodiment, support column is identical with base station and embodiment 1, there is multiple standby screw on base station.Change the position of three hard strong points as different from Example 1 so that it is the triangle that point is formed is equilateral triangle.There is on hard spot support column nut structure and helicitic texture, base station has the screwed hole corresponding with helicitic texture, support column is to be fixed on by the way of screw thread screws in screw corresponding with support column on base station, and then tightening nut is support column and base station is combined closely.The base station of fixing support column is made up of the aluminum that matter is hard and light.The localization method of motorized subject table is with embodiment 1.
[embodiment 8]
The object stage of a kind of Electronic control position, support column is identical with base station and embodiment 1, and its material is hard, wear-resistant stainless steel material and prepares, and hard base station is prepared by lightweight aluminium material；Three summits that three hard support column position points are triangle, and the triangle constituted is non-isosceles acute triangle.The spherical structure of table top and bracing frame forms point cantact, this object stage good stability, the plan-position favorable reproducibility that on object stage, object is placed, it is not easy to turn on one's side.
The localization method of motorized subject table is with embodiment 2.
[embodiment 9]
The object stage of a kind of Electronic control position, support column is identical with the position relationship of base station and embodiment 1, and this support column is constituted by ellipsoidal structure and cylindrical structure, and oval curved-surface structure is support zone.And its material is hard, wear-resistant stainless steel material and prepares, support column is threadedly fixed on hard base station, and hard base station is prepared by lightweight aluminium material.The oval curved-surface structure of table top and bracing frame forms linear contact lay, and this object stage degree of stability is high.
The localization method of motorized subject table is with embodiment 1.
[embodiment 10]
The object stage of a kind of Electronic control position, including three hard support columns and a soft support column and the base station of fixing support column, three hard support columns are distributed near the edge of base station；This hard support column arrangement is constituted by ellipsoidal structure and cylindrical structure, oval curved-surface structure is support zone, and its material is hard, wear-resistant stainless steel material and prepares, support column has the helicitic texture that embodiment 5 is identical, having the screwed hole corresponding with helicitic texture on base station, support column is tightened on base station by helicitic texture.Hard base station is prepared by lightweight aluminium material；Three summits that three support column position points are triangle, and the triangle constituted is isosceles acute triangle.The position of eccentric pin is in the periphery that hard spot support column is triangle, and the most point-blank, depending on its fixed position is by supporter shape corresponding to object stage and size.Eccentric pin projecting height on base station is higher than the projecting height on base station of hard spot support column.Object stage is during using, and all eccentric pins touch with the side edge of the object supported, and what the object supported can be fixed in plane by it a certain determines position.The localization method of motorized subject table is with embodiment 2.
[embodiment 11]
The object stage of a kind of Electronic control position with the auxiliary strong point, three hard spot support columns are constituted by pyramidal structure and cylindrical structure, and pyramidal structure is support zone.Other parts are identical with embodiment 1, and its material is hard, wear-resistant stainless steel material and prepares, support column has the helicitic texture that embodiment 4 is identical, has the screwed hole corresponding with helicitic texture on base station, and support column is tightened on base station by helicitic texture.Hard base station is prepared by lightweight aluminium material；Three summits that three support column position points are triangle, and the triangle constituted is isosceles acute triangle.The cone structure of table top and bracing frame forms point cantact, and this object stage degree of stability is high.The localization method of motorized subject table is with embodiment 1.
Claims (9)
1. a motorized subject table localization method, it is characterized in that described motorized subject table, including base station, support column, plunger, eccentric pin, motor and control station, support column, plunger and eccentric pin are fixed on base station, are perpendicular to the height of eccentric pin and plunger on the direction of base station and are more than the height of support column；The support zone of described support column is curved-surface structure or pyramidal structure, and the summit of the support zone of described support column forms a plane；Contained object is positioned on the support zone of support column, its edge and eccentric pin, plunger contact；At least one plunger is positioned at the relative position of eccentric pin；Eccentric pin and support column lower end have the rotating mechanism matched with motor, and motor position is fixed on the lower section of eccentric pin and support column, and control station has control system, and control system controls electric machine rotation；
Wherein concrete motorized subject table localization method includes following step:
A) first the helicitic texture of the support column on the bracing frame of object stage and the screw of base station being coordinated, make support column be fixed on base station, the lower end of support column and the rotating mechanism of motor connect；
B) being fixed on base station by eccentric pin, the lower end of eccentric pin and the rotating mechanism of motor connect；
C) by the electric machine rotation below regulation support column, make the helicitic texture of support column move up and down along base station, make support column upper extreme point be on a horizontal plane, contained object is positioned on bracing frame, then plunger is fixed on base station；Contained object is clipped between eccentric pin and plunger；
D) electric machine rotation below contained object wherein side eccentric pin is controlled, make eccentric pin axis closer or far from contained object, regulate the electric machine rotation of opposite side simultaneously, make eccentric pin axis away from or near contained object, make contained object move horizontally relative to base station；
E) by the electric machine rotation below regulation support column, the helicitic texture of support column moves up and down along base station, makes contained object vertically move relative to base station；
F) regulate the motor below other eccentric pins, make eccentric pin and plunger that object contained on object stage to be fixed.
Motorized subject table localization method the most according to claim 1, it is characterised in that repeat step c)～step f), make contained object repeatedly both horizontally and vertically move relative to base station, complete the location of object stage.
Motorized subject table localization method the most according to claim 1, it is characterised in that when control system controls electric machine rotation, driven by motor eccentric pin and support column rotate；Plunger is spring-loaded plunger, and it is with when being contacted by object carrier, and the bulb of spring ejection contacts with by object carrier；Described support column is divided into hard spot support column and soft spots support column two kinds, and described object stage has at least 2 eccentric pins, has at least 2 plungers；Support column, plunger and eccentric pin are threadedly secured on base station.
Motorized subject table localization method the most according to claim 3, it is characterised in that described eccentric pin and plunger are distributed in the periphery of support column, object is fixed in the plane that support column summit determines by the two cooperation；Support column has 3 hard spot support columns to constitute with multiple soft spots support columns；Three hard spot support columns are distributed in base station position point and constitute a triangle, and soft spots support column is in the outside of described triangle；There are 3 eccentric pins on base station, eccentric pin has nut；The curved-surface structure of the support zone of described support column is spherical structure.
Motorized subject table localization method the most according to claim 4, it is characterised in that eccentric pin and plunger are distributed in the not homonymy of base station, and described is the object of regular shape by object carrier；Hard spot support column position point line form right angle or acute triangle；Threads turn is passed through at the position that soft spots support column contacts with base station.
Motorized subject table localization method the most according to claim 4, it is characterised in that support column position point line constitutes isosceles right angle or isosceles acute triangle；Described hard spot support column is made up of abrasion-proof stainless steel material；Soft spots support column is combined by hard material and flexible material and forms；Having standby screw on base station, hard spot support column has nut, soft spots support column is bulb resilient plunger, and the support zone of described support column and the way of contact of table top are point cantact or linear contact lay.
Motorized subject table localization method the most according to claim 1, it is characterised in that described base station is made up of lightweight aluminium material or alloy material；The support zone of described support column and the way of contact of table top are point cantact.
Motorized subject table localization method the most according to claim 1, it is characterised in that the main body of the eccentric shaft of described eccentric pin is cylindrical structure, the one end being fixed on base station has screw thread, during rotating eccentricity pin, its vertical central transverse shifting；Plunger is made up of circular bulb and pedestal；Have on eccentric pin and manually regulate parts.
Motorized subject table localization method the most according to claim 8, it is characterised in that the strong point of plunger is spherical structure；Plunger is spring-loaded plunger, is fixed by screws on pedestal；Manually regulation parts on eccentric pin are protruding, groove or circular hole；Described contained object is plate-shaped body.
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| JPS58103136A (en) * | 1981-12-16 | 1983-06-20 | Nippon Kogaku Kk <Nikon> | Gap setter |
| US4763420A (en) * | 1987-10-06 | 1988-08-16 | Brown & Sharpe Manufacturing Company | Base assembly for coordinate measuring machine |
| DE4226027A1 (en) * | 1992-08-06 | 1994-02-10 | Arnold & Richter Kg | Optical system support e.g. for light-valve, laser diode, sensor, three-face or Fresnel mirror or prism - contains adjustable mounting or holder provided by triple-screw set and elastic member |
| US5586740A (en) * | 1994-12-19 | 1996-12-24 | General Motors Corporation | Chuckless power seat adjuster slide |
| JP3245833B2 (en) * | 1999-07-08 | 2002-01-15 | 日本エー・エス・エム株式会社 | Semiconductor substrate aligner apparatus and method |
| TW569288B (en) * | 2001-06-19 | 2004-01-01 | Tokyo Electron Ltd | Substrate processing apparatus, liquid processing apparatus and liquid processing method |
| JP4963814B2 (en) * | 2005-09-06 | 2012-06-27 | ペンタックスリコーイメージング株式会社 | Stage device and camera shake correction device using stage device |
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| CN105234772B (en) * | 2015-10-14 | 2017-12-12 | 中国兵器科学研究院宁波分院 | Vacuum chamber optical element lifting-positioning device |
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