CN103206975A - Electric control object stage - Google Patents

Electric control object stage Download PDF

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Publication number
CN103206975A
CN103206975A CN2012100067036A CN201210006703A CN103206975A CN 103206975 A CN103206975 A CN 103206975A CN 2012100067036 A CN2012100067036 A CN 2012100067036A CN 201210006703 A CN201210006703 A CN 201210006703A CN 103206975 A CN103206975 A CN 103206975A
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CN
China
Prior art keywords
support column
base station
eccentric pin
objective table
support
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Granted
Application number
CN2012100067036A
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Chinese (zh)
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CN103206975B (en
Inventor
魏志凌
高小平
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Kunshan Power Stencil Co Ltd
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Kunshan Power Stencil Co Ltd
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Priority to CN201210006703.6A priority Critical patent/CN103206975B/en
Publication of CN103206975A publication Critical patent/CN103206975A/en
Application granted granted Critical
Publication of CN103206975B publication Critical patent/CN103206975B/en
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Abstract

The invention relates to an electric control object stage which mainly solves the problem that an object stage in the prior art cannot position an object accurately. The position electrically controllable object stage comprises base station, supporting columns, eccentric pins, motors and a control console, wherein the supporting columns and the eccentric pins are fixed on the base station, the heights of the eccentric pins are higher than those of the supporting columns in the direction perpendicular to the base station, and a plane is formed by peaks of supporting positions of the supporting columns. An object to be carried is placed at the supporting positions of the supporting columns, the edge of the object to be carried is in contact with the eccentric pins, the lower ends of the eccentric pins and the lower ends of the supporting columns are provided with rotating mechanisms matched with the motors, and the motors are fixed below the eccentric pins and the supporting columns. The electric control object stage solves the problem of inaccuracy well and can be applied to industrial production of object stages for accurate operation.

Description

Electronic control objective table
 
Technical field
The present invention relates to a kind of electronic control objective table.
Background technology
Along with the development of society, every profession and trade is more and more higher to the requirement of the placement environment of the hardware facility that relates in its industry and plummer, particularly to the placement of some exact instrument.For example, at the operator's console that relates to optical element work, often require its support platform to have enough smoothnesses.
Chinese patent CN101738127A discloses a kind of adiabatic supporting device, comprise cold of having a plurality of mounting holes on it and be used for supporting described cold support bar, described support bar comprises the top support bar again, presses down support bar, cooperate with described mounting hole with a contact or the line way of contact respectively, but the bracing frame of this invention has four support columns.
Chinese patent CN2574502 discloses a kind of supported at three point balance table, it comprises the support section of plummer and support bearing platform, table top three fulcrums of support section are by a vertically direct support column, two indirectly vertical support columns that are connected on the oblique brace summer provide, the other end of two oblique brace summers is fixed on the same point of direct vertically support column, and three support columns of this invention are supporting desktop simultaneously not.
Chinese patent CN201468443U desktop bracing frame, it is characterized in that: the desktop bracing frame is provided with underframe, the quarter butt of triangular support pin is connected with underframe, side lever is provided with the brace of band connecting hole in each triangular support pin, fixture passes connecting hole each triangular support pin is fixed, the upper corners of three triangular support pin is in same plane, and forms the desktop supporting surface, but support column is that face contacts with desktop.
But CN102102986A the present invention relates to a kind of aligning and transfers the circularity/cylindricity measurement worktable that inclines, and comprises the pedestal that is connected with line shaft, operating platform, three bracing frames that are used for placing measured workpiece; Wherein bracing frame comprises two flexible bracing frames and a fixing support rack, and the upper end of flexible bracing frame contacts with the operating platform sphere, and the fixing support rack upper end links to each other with operating platform by the Hooke's hinge assembly, but support column is that sphere contacts with table top.
3 have the effect of determining a plane, the bracing frame that adopts three support columns to constitute has the function that supported objects is fixed on a certain plane, but there is following problem in supported at three point: near supported object center of gravity drops on the leg-of-mutton edge that three strong points constitute or departed from the triangle interior zone, supported object is turned on one's side easily, thereby caused the object accidental injury, even can cause security incident.
Bracing frame and the support platform of prior art report all are the operator's console of face contact type, all can't guarantee the enough smooth of its face, and in different operating process, the planimetric position reappearance that object is placed on the operator's console is bad, is unfavorable for accurate operation.Particularly in the measuring process at some exact instrument, the position difference of measured object has very big influence to final actual result in the operation of some instruments.The invention provides a kind of objective table of electronic control, it can accurately be fixed on supported object on a certain position.
Summary of the invention
Technical matters to be solved by this invention is that objective table is difficult for pinpoint problem in the prior art, and a kind of objective table of electronic control newly is provided, the advantage that this loading stand has supporting ﹠ stablizing, accurately locatees.
For solving the problems of the technologies described above, the technical solution used in the present invention is as follows: a kind of objective table of electronic control, comprise base station, support column, eccentric pin, motor and control desk, support column and eccentric pin are fixed on the base station, perpendicular to the height of eccentric pin and plunger on the direction of the base station height greater than support column; The support zone of described support column is curved-surface structure or pyramidal structure, and the summit of the support zone of described support column forms a plane, and described support column is hard spot support column and soft spots support column; Contained object is positioned on the support zone of support column, and contained object edge contacts with eccentric pin; Eccentric pin and support column lower end have the rotating mechanism that matches with motor, and motor position is fixed on the below of eccentric pin and support column, and control desk has control system, and control system control motor rotates.
In the technique scheme, optimized technical scheme is that control desk has electric machine control system, and when control system control motor rotated, driven by motor eccentric pin and support column rotated; Described objective table has at least three hard spot support columns, and described objective table has at least two eccentric pins.Optimized technical scheme is that support column is made of three hard spot support columns and a plurality of soft spots support column; Three eccentric pins are arranged on the base station; Optimized technical scheme is that objective table contains three hard spot support columns, a soft spots support column, and three hard spot support columns are distributed in base station position loca and constitute a triangle, and soft spots support column loca is in described leg-of-mutton perimeter; Optimized technical scheme is three hard spot support column position loca line form right angles or oxygon, and the support zone curved-surface structure of described support column is spherical structure.Optimized technical scheme is that three support column position loca lines constitute isosceles right angle or isosceles oxygon; Described support column and base station contacting structure are right cylinder, rectangular strip or helicitic texture, and described three hard spot support columns and eccentric pin are made by hard material, and the soft spots support column is made of flexible material.Optimized technical scheme is that described three hard spot support columns are made by the abrasion-proof stainless steel material; The soft spots support column is combined by hard material and flexible material and forms; The main body of described hard spot support column is rectangular structure; Described hard spot support column screws mode by welding or screw thread and is fixed on the base station, and threads turn is passed through at the position that the soft spots support column contacts with base station.Optimized technical scheme is that base station is made of hard material; Standby screw is arranged on the base station, have nut on the hard spot support column, the soft spots support column is the bulb resilient plunger, and the support zone of described support column contacts or the line contact for point with the way of contact of table top.Optimized technical scheme is that base station is made by lightweight aluminium material or alloy material; The support zone of described support column is that point contacts with the way of contact of table top.
Described hard spot support column screws mode by screw thread and is fixed on the base station, and threads turn is passed through at the position that the soft spots support column contacts with base station.Have a plurality of standby screws on the base station, base station is made of hard material.Described base station can be Any shape, and as preferably, it is generally more regular shape.
The agent structure of the described soft spots support column of optimized technical scheme can be identical with the structure of hard spot support column, also can be different, its purpose is to provide certain anchorage force to supported object in a certain orientation, place supported object rollover, as preferably, it has following several middle structure: the soft spots support column all is made of flexible material, and threads turn can be passed through in its position that contacts with base station, both can be so that the soft spots support column had carried out certain movement in vertical direction; The soft spots support column is combined by hard material and flexible material and forms, and wherein hard material distortion is little, can reduce single flexible material perpendicular to the movement on the direction of support column; Soft spots can also be made of hard material entirely, and for example, it can be the bulb resilient plunger.
The described support column of optimized technical scheme is to be fixed on the base station by the mode that screw thread screws, and has a plurality of standby screws at base station, in order to change the position of support column, thereby makes bracing frame adapt to the support of different size object.Optimized technical scheme, the base station of described fixed support post is made of hard material, can be made by lightweight aluminium material or alloy material as preferred its.
Optimized technical scheme, described have the eccentric pin of regulating action for adjustable continuously, and it can realize the fixing of excentric shaft by related measure after each the adjusting, no longer loosening after namely can making excentric shaft locate, as preferably, the main body of described excentric shaft is cylindrical structure, and its locking measure can be that screw is fixed.Optimized technical scheme, described objective table can be any structure shape, as preferably, has the support column that several can regulate height on the described objective table, the top of support column is as the strong point, as preferably, support column is made of 3 hard spot support columns or is made of 3 hard spot support columns and several soft spots support columns.Optimized technical scheme, described eccentric pin is by manual adjustments, has on the eccentric pin for the mechanism that regulates; The manual adjustments parts are projection, groove or circular hole.Has nut on the eccentric pin.The main body of the excentric shaft of described eccentric pin is that the stiff end that cylindrical structure and base station match has screw thread, and during the rotating eccentricity pin, its vertical central is laterally mobile.
Optimized technical scheme, described objective table can will be fixed on a certain plane by object carrier, and described eccentric pin has regulating action, and can will accurately be fixed in the effect of a certain definite position on the plane by article carrying piece.Optimized technical scheme, described eccentric pin are 3.Optimized technical scheme, described eccentric pin with regulating action is eccentric pin, and it has the effect of adjusting, and it can carry out certain fine setting in the planimetric position with object, thereby object is determined on a certain in the plane definite position.Optimized technical scheme is that control desk has control system, and control system control motor rotates, and the driven by motor eccentric pin rotates.
Optimized technical scheme is to have on the base station plunger is fixedly arranged, and plunger is spring-loaded plunger, and it is when being contacted by object carrier, the bulb that spring ejects with contacted by object carrier.Described eccentric pin and plunger are distributed in the periphery of support column, and the two cooperation is fixed on object on the plane of determining on the support column summit; Eccentric pin and plunger are distributed in the not homonymy of base station, and described is the object of regular shape by object carrier; , the support zone of described support column is curved-surface structure or pyramidal structure.
Optimized technical scheme, described plunger are at least 1, and itself and described eccentric pin constitute by the marginal branch support point of object carrier, preferred technical scheme, and described plunger is 2, its position with described eccentric pin is relative.Optimized technical scheme, further, described plunger is spring-loaded plunger, as preferably, the strong point of plunger is bulb.
Described objective table can prevent by the slip of object carrier on objective table, namely can be with on a certain definite position of being fixed in by object carrier on the objective table.Support column, the eccentric pin of described objective table have regulating action, can adjust the position that is placed on object on the objective table by it.Further, the plunger on the described objective table is by to certain pressure is provided by object carrier, makes can be close to eccentric pin on the described objective table by the edge of object carrier, can prevent by the slip of object carrier.
Objective table provided by the invention, have the following advantages: the support zone of each strong point is curved-surface structure, when it supports the object that other has the face structure, can make and contact for point between bracing frame and the object or line contacts, can fully locate owing to support, 3 of meeting geometric allocate the face rule, and this kind design can be determined object in one plane; In addition, when the object that supports when needs is regular planar structure, take three strong points can be with the object that supports on the plane of some needs, and because the position of three strong points constitutes a triangle, be easy to realize center of gravity control with object in delta-shaped region inside, thereby make supported object be not easy to turn on one's side.In addition, the bracing frame that has supplemental support point provided by the present invention has higher smoothness, three hard spots support the tram of having determined supported object, one soft spots supplemental support has guaranteed that supported object is difficult for turning on one's side, and eccentric pin is fixed table top, is difficult for mobile.
Objective table provided by the invention, adopt simple Machine Design, the energy realization is comprehensive to position supported object, it can accurately be fixed on supported object on a certain position, operation at some instruments, particularly in the measuring process of some exact instrument, reduce the position difference of measured object to the influence of final actual result.
In the operating process of exact instrument, with it as objective table, cooperate high operating system closely can finish the higher relatively operation of accuracy requirement, particularly when the instrument that relates to accurate measurement uses, objective table of the present invention has enough smoothnesses, the planimetric position favorable reproducibility that object is placed on the operator's console is not easy to turn on one's side, and is conducive to accurate operation.
The present invention can realize the particularly accurate placement of the object of ordered structure of object, object for the same type of pattern rule, smooth tabular in edge for example, the rotational angle of regulating motor by control system can guarantee that each placement all has very high position reappearance, namely can realize one-time positioning, repeatedly operation, can also realize comprehensive supported object being positioned, it can accurately be fixed on supported object on a certain position, has obtained better technical effect.
 
Description of drawings
Fig. 1 is the objective table structural representation in the embodiment of the invention 1.
Fig. 2 is the structural representation of the eccentric pin in the embodiment of the invention 1.
Fig. 3 is the structural representation of motor in the embodiment of the invention 1.
Fig. 4 is the coupling synoptic diagram of eccentric pin and motor.
Among Fig. 1,11 is that support column, 12 is eccentric pin; 13 is plunger; 14 is base station; 131 is the elasticity bulb; 15 is motor.
Among Fig. 2,21 for eccentric pin be fixed in part on the substrate by object carrier contact portion, 22 for eccentric pin; 23 is the mechanism of eccentric pin lower end and electrode coupling
Among Fig. 3,31 is that motor main body, 32 is the motor rotating part; 321 grooves that match with the pin lower end for motor.
The invention will be further elaborated below by representational specific embodiment, is not limited only to present embodiment, also belongs to protection scope of the present invention by simple transformation or equivalent application.
 
Embodiment
[embodiment 1]
A kind of objective table of electronic control position, as shown in Figure 1, it comprises support column 11, pin 12, plunger 13, fixing base 14 and the motor 15 that can rotate pin 12.Support column 11 is 3 in the present embodiment, and not at grade, because 3 have abundant location, 3 of learning of meeting geometric allocate face, and 3 energy in the upper end of support column will be determined in one plane by object carrier.
Pin 12 is eccentric pin, as shown in Figure 2, its by contact by object carrier 21 parts, be fixed in mechanism's 23 parts that 22 parts on the substrate 14 and lower end and electrode mate, by the rotation of pin can regulate be placed on the support column by the position of object carrier.
Support column 11 is fixed in part on the substrate 14 and lower end mechanism's part with the motor coupling, and the rotation by motor can drive support column and move up and down at base station, can regulate be placed on the support column by the upper-lower position of object carrier.
Motor position is fixed on the below of eccentric pin, Figure 3 shows that the structural representation of motor, and it is made of motor main body 31, motor rotating part 32 parts, wherein has the groove 321 that matches with the pin lower end in motor rotating part 32 parts.
Fig. 4 is the coupling synoptic diagram of eccentric pin 12 and motor 13, and motor 13 can carry out certain rotation to eccentric pin 12 under the control of control system.Plunger 13 is spring-loaded plunger, and it is when being contacted by object carrier, the bulb 131 that spring ejects with contacted by object carrier.
The lower end of support column and the coupling of motor are identical with the compatible portion of eccentric pin and motor.
Perpendicular to the height of eccentric pin and plunger on the direction of the base station height greater than support column, the summit of the support zone of support column forms a plane, and the support zone of described support column is spherical structure; Contained object is positioned on the support zone of support column, and its edge contacts with eccentric pin, plunger; Plunger is positioned at the relative position of eccentric pin; Eccentric pin and support column lower end have the rotating mechanism that matches with motor, and motor position is fixed on the below of eccentric pin and support column.
Pin 12 and plunger 13 are distributed in the not homonymy of the periphery of support column in the present embodiment, and it can cooperate object is fixed on a certain definite position on the plane of determining on support column 11 summits.Be the tabular of regular shape by object carrier wherein.
 
[embodiment 2]
A kind of objective table of electronic control position, it comprises objective table and 3 controls by the eccentric pin of object carrier position, described eccentric pin has regulating action, and can accurately be positioned the effect of a certain definite position on the plane by the object that carries.Described eccentric pin with regulating action is eccentric pin, it is made of two right cylinders of out-of-alignment, two peripheries have helicitic texture, eccentric pin is fixed on the objective table by this structure, be used for retainer nut the eccentric pin of adjusting is fixed on objective table, have governor motion at eccentric pin in addition, governor motion is a circular port in the present embodiment, inserts the action that wherein can rotate and regulate by the bar shaped rod.
Have 3 hard spot support columns on the objective table in the present embodiment, it can will be fixed on a certain plane adjustable height of hard spot support column by three strong points by object carrier.When using this objective table, the object that will be carried is placed on the objective table by support column jack-up, regulates the height of support column, makes object be positioned on certain surface level; Mobile object makes object edge be close to 3 eccentric pins, regulate eccentric pin, in the process of rotating eccentric pin, make object edge be close to eccentric pin, because the rotation of eccentric pin, had certain variation in the position in the plane by object carrier,, get final product eccentric pin is fixing by nut until correct position at 3 eccentric pins of fit adjustment.In the present embodiment, eccentric pin is higher than support column projecting height on the described objective table at the projecting height on the objective table.
Objective table contains 3 plungers, and itself and described eccentric pin constitute by the marginal branch support point of object carrier, and relative with the position of described eccentric pin.Use described objective table can prevent by the off normal of object carrier on objective table, namely can be with on a certain definite position of being fixed in by object carrier on the objective table.
Eccentric pin is fixed on the substrate, and motor position is fixed on the below of eccentric pin and support column, wherein has the groove that matches with pin lower end and support column lower end at the motor rotating part.Motor can drive pin and support column and rotate, by the rotation of pin can regulate be placed on the support column by the position up and down of object carrier.
 
[embodiment 3]
A kind of objective table of electronic control position is used for placing the object that pattern is regular and position accuracy demand is high, and bracing frame comprises the base station of support column, eccentric pin and fixed support post and eccentric pin.Described support column is not point-blank rigid support posts of 3 positions, it is prepared by stainless steel material, and support column and base station position contacting have can the rotational support post helicitic texture, namely can regulate the height of each support column strong point by helicitic texture.3 support columns can be fixed in supported table top on a certain plane.3 eccentric pins are fixedly arranged on the base station in the present embodiment, it is made by hard wear-resistant material, the position of eccentric pin is in support column and constitutes leg-of-mutton periphery, and not point-blank, its fixed position is decided by the supporting object shape and size of objective table correspondence.Eccentric pin is higher than the projecting height on base station of described support column at the projecting height on the base station.Objective table is in the process of using, and all eccentric pins are tactile with the side edge of supported object, and it can be fixed in supported object a certain definite position on the plane.Motor position is fixed on the below of eccentric pin and support column, wherein has the groove that matches with pin and support column lower end at the motor rotating part.Motor can drive pin and support column and rotate, by the rotation of pin can regulate be placed on the support column by the position of object carrier.
 
[embodiment 4]
A kind of objective table of electronic control position is provided, increased by a soft spots support column on the basis of embodiment 1, other parts are identical with embodiment 1, in the use of bracing frame, it plays and prevents that the object center of gravity from deflecting away from the delta-shaped region that support column shown in the embodiment 1 constitutes and the phenomenon of turning on one's side, and the soft spots support column is spring-loaded plunger.
 
[embodiment 5]
A kind of objective table of electronic control position, it comprises the base station of three hard spot support columns, soft spots support column and fixed support post, 3 eccentric pins, circular hole on the eccentric pin.Three hard spot support columns are distributed on the different position of base station, and its position loca has constituted a right-angle triangle, and the soft spots support column is in described leg-of-mutton perimeter, and four support column positions constitute a rectangular configuration.
Three hard spot support columns are made by the hard, wear-resistant stainless steel material, and it is embedded in support column column main body one end by the support end sphere structure and constitutes, and the support column column main body other end is helicitic texture, and nut is fixed on the support column column main body by screw thread.The support end sphere structure is designed to sphere structure, is that three support columns can be determined a plane because sphere is generally a contact when contacting with other face; The design nut structure is easily loosening in order to prevent that support column is fixed on the base station.
The soft spots support column is a bulb resilient plunger, and bulb resilient plunger top is divided into hollow-core construction, and a spring is arranged in the hollow area, and there is a movable spheroid its upper end with spring is contacted, and spheroid and spring are fixed in the certain space by bulb resilient plunger agent structure; In the lower part of bulb resilient plunger agent structure helicitic texture is arranged in addition, by rotating bulb resilient plunger agent structure, the soft spots support column that can make has certain movement in the direction perpendicular to base station.When using the soft spots support column, adjust its height, make the movable spheroid in top of soft spots support column touch supported body surface and spring has elastic deformation a little to get final product.
Support column is to be fixed in the screw corresponding with support column on the base station by the mode that screw thread screws, there are a plurality of standby screws at base station, in order to can change the position of support column at any time according to the pattern of supported objects, thereby make bracing frame adapt to the support of different size object.The base station of fixed support post is made by the hard and light aluminum of matter.
The position of eccentric pin is in the hard spot support column and constitutes leg-of-mutton periphery, and not point-blank, its fixed position is decided by the supporting object shape and size of objective table correspondence.Eccentric pin is higher than the projecting height on base station of hard spot support column at the projecting height on the base station.Objective table is in the process of using, and all eccentric pins are tactile with the side edge of supported object, and it can be fixed in supported object a certain definite position on the plane.
Objective table contains 2 plungers, and itself and eccentric pin constitute by the marginal branch support point of object carrier, and relative with the position of two eccentric pins wherein.Use described objective table can prevent by the off normal of object carrier on objective table, namely can be with on a certain definite position of being fixed in by object carrier on the objective table.Motor position is fixed on the below of eccentric pin, wherein has the groove that matches with the pin lower end at the motor rotating part.Motor can drive pin and support column and rotate, by the rotation of pin and support column can regulate be placed on the support column by the position of object carrier.
 
[embodiment 6]
Present embodiment is a kind of objective table of electronic control position, and its structure is identical with embodiment 1, and three support columns are distributed near the edge of base station; And its material is the hard, wear-resistant stainless steel material and makes, and support column screws mode by screw thread and is fixed on the hard base station, and the hard base station is made by the lightweight aluminium material; Three support column position locas constitute leg-of-mutton three summits, and the triangle that constitutes is right-angle triangle.The structure of soft spots support column is made by having certain flexible rubber material.
 
[embodiment 7]
Support column is identical with embodiment 1 with base station in the present embodiment, has a plurality of standby screws at base station.Change the position of three hard strong points as different from Example 1, the triangle that its loca is formed is equilateral triangle.Have nut structure and helicitic texture on the hard spot support column, have the threaded hole corresponding with helicitic texture at base station, support column is to be fixed in the screw corresponding with support column on the base station by the mode that screw thread screws, and screwing nut then is that support column and base station are combined closely.The base station of fixed support post is made by the hard and light aluminum of matter.
 
[embodiment 8]
A kind of objective table of electronic control position, support column is identical with embodiment 1 with base station, and its material is the hard, wear-resistant stainless steel material and makes, and the hard base station is made by the lightweight aluminium material; Three hard support column position locas constitute leg-of-mutton three summits, and the triangle that constitutes is non-isosceles oxygon.The spherical structure of table top and bracing frame forms point and contacts, this objective table good stability, and the planimetric position favorable reproducibility that object is placed on the objective table is not easy to turn on one's side.
 
[embodiment 9]
A kind of objective table of electronic control position, support column is identical with embodiment 1 with the position relation of base station, and this support column constitutes by ellipsoidal structure and cylindrical structure, and oval curved-surface structure is support zone.And its material is the hard, wear-resistant stainless steel material and makes, and support column is fixed on the hard base station by engage thread, and the hard base station is made by the lightweight aluminium material.The oval curved-surface structure of table top and bracing frame forms line and contacts this objective table degree of stability height.
 
[embodiment 10]
A kind of objective table of electronic control position comprises the base station of three hard support columns and soft support column and fixed support post, and three hard support columns are distributed near the edge of base station; This hard support column arrangement constitutes by ellipsoidal structure and cylindrical structure, oval curved-surface structure is support zone, and its material is the hard, wear-resistant stainless steel material and makes, support column has the identical helicitic texture of embodiment 5, have the threaded hole corresponding with helicitic texture at base station, support column is tightened on base station by helicitic texture.The hard base station is made by the lightweight aluminium material; Three support column position locas constitute leg-of-mutton three summits, and the triangle that constitutes is isosceles oxygon.The position of eccentric pin is in the hard spot support column and constitutes leg-of-mutton periphery, and not point-blank, its fixed position is decided by the supporting object shape and size of objective table correspondence.Eccentric pin is higher than the projecting height on base station of hard spot support column at the projecting height on the base station.Objective table is in the process of using, and all eccentric pins are tactile with the side edge of supported object, and it can be fixed in supported object a certain definite position on the plane.
 
[embodiment 11]
A kind of objective table that has the electronic control position of supplemental support point, three hard spot support columns constitute by pyramidal structure and cylindrical structure, and pyramidal structure is support zone.Other parts are identical with embodiment 1, and its material is the hard, wear-resistant stainless steel material and makes, support column has the identical helicitic texture of embodiment 4, has the threaded hole corresponding with helicitic texture at base station, and support column is tightened on base station by helicitic texture.The hard base station is made by the lightweight aluminium material; Three support column position locas constitute leg-of-mutton three summits, and the triangle that constitutes is isosceles oxygon.The awl point structure of table top and bracing frame forms point and contacts this objective table degree of stability height.
 
[embodiment 12]
A kind of objective table of electronic control position,, it comprises support column, pin, fixing base and the motor that can rotate pin, controls the control system that motor rotates in addition.Support column is 3 in the present embodiment, and not at grade, because 3 have abundant location, 3 of learning of meeting geometric allocate face, and 3 energy in the upper end of support column will be determined in one plane by object carrier.
Pin is eccentric pin,, its by contact by object carrier part, be fixed in mechanism's part that part on the substrate and lower end and electrode mate, by the rotation of pin can regulate be placed on the support column by the position of object carrier.
Motor position be fixed on eccentric pin with the support column below, it is made of motor main body, motor rotating part, wherein has the groove that matches with the pin lower end in motor rotating part 2 parts.Motor can rotate eccentric pin and support column under the control of control system.Perpendicular to the height of eccentric pin on the direction of the base station height greater than support column, the summit of the support zone of support column forms a plane, and the support zone of described support column is spherical structure; Contained object is positioned on the support zone of support column, and its edge contacts with eccentric pin; Eccentric pin and support column lower end have the rotating mechanism that matches with motor, and motor position is fixed on the below of eccentric pin and support column.
Pin is distributed in the not homonymy of the periphery of support column in the present embodiment, and it can cooperate object is fixed on a certain definite position on the plane of determining on the support column summit.Be the tabular of regular shape by object carrier wherein.

Claims (10)

1. the objective table of an electronic control comprises base station, support column, eccentric pin, motor and control desk, and support column and eccentric pin are fixed on the base station, perpendicular to the height of eccentric pin and plunger on the direction of the base station height greater than support column; The support zone of described support column is curved-surface structure or pyramidal structure, and the summit of the support zone of described support column forms a plane, and described support column is hard spot support column and soft spots support column; Contained object is positioned on the support zone of support column, and contained object edge contacts with eccentric pin; Eccentric pin and support column lower end have the rotating mechanism that matches with motor, and motor position is fixed on the below of eccentric pin and support column, and control desk has control system, and control system control motor rotates.
2. electronic control objective table according to claim 1, when it is characterized in that control system control motor on the control desk rotates, driven by motor eccentric pin and support column rotate; Described objective table has at least two eccentric pins; Support column and eccentric pin are fixed on the base station by screw thread.
3. electronic control objective table according to claim 2 is characterized in that described eccentric pin is distributed in the periphery of support column, and the two cooperation is fixed on object on the plane of determining on the support column summit; Support column has three hard spot support columns and a plurality of soft spots support column to constitute; Three hard spot support columns are distributed in base station position loca and constitute a triangle, and the soft spots support column is in described leg-of-mutton outside; Three eccentric pins are arranged on the base station, have nut on the eccentric pin; The curved-surface structure of the support zone of described support column is spherical structure.
4. electronic control objective table according to claim 3 is characterized in that eccentric pin and plunger are distributed in the not homonymy of base station, and described is the object of regular shape by object carrier; Hard spot support column position loca line form right angle or oxygon; Threads turn is passed through at the position that the soft spots support column contacts with base station.
5. electronic control objective table according to claim 4 is characterized in that support column position loca line constitutes isosceles right angle or isosceles oxygon; Described hard spot support column is made by the abrasion-proof stainless steel material; The soft spots support column is combined by hard material and flexible material and forms; Standby screw is arranged on the base station, have nut on the hard spot support column, the soft spots support column is the bulb resilient plunger, and the support zone of described support column contacts or the line contact for point with the way of contact of table top.
6. electronic control objective table according to claim 1 is characterized in that described base station made by lightweight aluminium material or alloy material; The support zone of described support column is that point contacts with the way of contact of table top.
7. electronic control objective table according to claim 1 is characterized in that the main body of the excentric shaft of described eccentric pin is cylindrical structure, and an end that is fixed on the base station has screw thread, and during the rotating eccentricity pin, its vertical central is laterally mobile.
8. electronic control objective table according to claim 1 is characterized in that having the manual adjustments parts on the eccentric pin.
9. electronic control objective table according to claim 1 is characterized in that the manual adjustments parts are projection, groove or circular hole; Described is tabular object by object carrier.
10. electronic control objective table according to claim 1 is characterized in that the structure of the mechanism that mechanism that support column lower end and motor cooperate and eccentric pin lower end and motor are joined is identical.
CN201210006703.6A 2012-01-11 2012-01-11 Electric control object stage Expired - Fee Related CN103206975B (en)

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CN201210006703.6A CN103206975B (en) 2012-01-11 2012-01-11 Electric control object stage

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Application Number Priority Date Filing Date Title
CN201210006703.6A CN103206975B (en) 2012-01-11 2012-01-11 Electric control object stage

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CN103206975A true CN103206975A (en) 2013-07-17
CN103206975B CN103206975B (en) 2017-06-06

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4763420A (en) * 1987-10-06 1988-08-16 Brown & Sharpe Manufacturing Company Base assembly for coordinate measuring machine
JPH0774143A (en) * 1993-08-31 1995-03-17 Dainippon Screen Mfg Co Ltd Substrate holder
CN1461260A (en) * 2001-01-19 2003-12-10 吉尔森公司 Plate loactor for precision liquid handler
CN1536640A (en) * 2003-02-20 2004-10-13 应用材料有限公司 Method for positioning substratge relatively to supporting table and its equipment
CN1746776A (en) * 2004-09-06 2006-03-15 东京毅力科创株式会社 Substrate processing apparatus and substrate positioning device
US20070058076A1 (en) * 2005-09-06 2007-03-15 Pentax Corporation Stage apparatus, and camera shake correction apparatus using the stage apparatus
CN202433027U (en) * 2012-01-11 2012-09-12 昆山允升吉光电科技有限公司 Electric objective table

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4763420A (en) * 1987-10-06 1988-08-16 Brown & Sharpe Manufacturing Company Base assembly for coordinate measuring machine
JPH0774143A (en) * 1993-08-31 1995-03-17 Dainippon Screen Mfg Co Ltd Substrate holder
CN1461260A (en) * 2001-01-19 2003-12-10 吉尔森公司 Plate loactor for precision liquid handler
CN1536640A (en) * 2003-02-20 2004-10-13 应用材料有限公司 Method for positioning substratge relatively to supporting table and its equipment
CN1746776A (en) * 2004-09-06 2006-03-15 东京毅力科创株式会社 Substrate processing apparatus and substrate positioning device
US20070058076A1 (en) * 2005-09-06 2007-03-15 Pentax Corporation Stage apparatus, and camera shake correction apparatus using the stage apparatus
CN202433027U (en) * 2012-01-11 2012-09-12 昆山允升吉光电科技有限公司 Electric objective table

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