CN103203726A - Object stage with accurately-controlled position - Google Patents
Object stage with accurately-controlled position Download PDFInfo
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- CN103203726A CN103203726A CN2012100068626A CN201210006862A CN103203726A CN 103203726 A CN103203726 A CN 103203726A CN 2012100068626 A CN2012100068626 A CN 2012100068626A CN 201210006862 A CN201210006862 A CN 201210006862A CN 103203726 A CN103203726 A CN 103203726A
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- support column
- base station
- pin
- objective table
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Abstract
The invention relates to an object stage with an accurately-controlled position, which is mainly used for solving the problem that an object stage cannot be accurately positioned in the prior art. The object stage with an accurately-controlled position comprises support columns, pins and a base, wherein the support columns and the pins are fixed on the base; the pins which are vertical to the base are higher than the support columns; a plane is formed by the apexes of support positions on the support columns; the support positions of the support columns have curved structures or conical structures; and the base is arranged at the support positions of the support columns, and is positioned on the inner sides of the pins. According to the object stage, the problem is well solved; and the object stage can be applied to industrial production of precisely-operated object stages.
Description
Technical field
The present invention relates to a kind of objective table of accurate control position.
Background technology
Along with the development of society, every profession and trade is more and more higher to the requirement of the placement environment of the hardware facility that relates in its industry and plummer, particularly to the placement of some precision instruments.For example, at the operating desk that relates to optical element work, often require its support platform to have enough smoothnesses.
Chinese patent CN101738127A discloses a kind of adiabatic supporting device, comprise cold of having a plurality of installing holes on it and be used for supporting described cold support bar, described support bar comprises the top support bar again, presses down support bar, cooperate with described installing hole with a contact or the line way of contact respectively, but the bracing frame of this invention has four support columns.
Chinese patent CN2574502 discloses a kind of supported at three point balance table, it comprises the support section of plummer and support bearing platform, table top three fulcrums of support section are by a vertically direct support column, two indirectly vertical support columns that are connected on the oblique brace summer provide, the other end of two oblique brace summers is fixed on the same point of direct vertically support column, and three support columns of this invention are supporting desktop simultaneously not.
Chinese patent CN201468443U desktop bracing frame, it is characterized in that: the desktop bracing frame is provided with underframe, the quarter butt of triangular support pin is connected with underframe, side lever is provided with the brace of band connecting hole in each triangular support pin, fixture passes connecting hole each triangular support pin is fixed, the upper corners of three triangular support pin is in same plane, and forms the desktop supporting surface, but support column is that face contacts with desktop.
But CN102102986A the present invention relates to a kind of aligning and transfers the circularity/cylindricity measurement workbench that inclines, and comprises the pedestal that is connected with line shaft, operating platform, three bracing frames that are used for placing measured workpiece; Wherein bracing frame comprises two flexible bracing frames and a fixing support rack, and the upper end of flexible bracing frame contacts with the operating platform sphere, and the fixing support rack upper end links to each other with operating platform by the Hooke's hinge assembly, but support column is that sphere contacts with table top.
3 have the effect of determining a plane, the bracing frame that adopts three support columns to constitute has the function that supported objects is fixed on a certain plane, but there is following problem in supported at three point: near supported object center of gravity drops on the leg-of-mutton edge that three strong points constitute or departed from the triangle interior zone, supported object is turned on one's side easily, thereby caused the object accidental injury, even can cause security incident.
Bracing frame and the support platform of prior art report all are the operating desk of face contact type, all can't guarantee the enough smooth of its face, and in different operating process, the plan-position reappearance that object is placed on the operating desk is bad, is unfavorable for accurate operation.Particularly in the measuring process at some precision instrument, the position difference of measured object has very big influence to final actual result in the operation of some instruments.The invention provides a kind of objective table of accurate control position, it can accurately be fixed on supported object on a certain position.
Summary of the invention
Technical problem to be solved by this invention is that objective table is difficult for pinpoint problem in the prior art, and a kind of objective table of accurate control position newly is provided, the advantage that this loading stand has supporting ﹠ stablizing, accurately locatees.
For solving the problems of the technologies described above, the technical solution used in the present invention is as follows: a kind of objective table of accurate control position, comprise base station, support column and pin, support column and pin are fixed on the base station, are higher than the height of support column perpendicular to pin height on the direction of base station, the summit of the support zone of described support column forms a plane, table top is positioned on the support zone of support column, and is positioned at the inboard of pin, wherein, described pin is eccentric pin, is fixed on the base station by screw thread.
In the technique scheme, optimized technical scheme is that the support zone of described support column is curved-surface structure or pyramidal structure; Described objective table has three hard spot support columns at least, and described objective table has two pins at least.Optimized technical scheme is that support column is made of three hard spot support columns and a plurality of soft spots support column; Three pins are arranged on the base station; Optimized technical scheme is that objective table contains three hard spot support columns, a soft spots support column, and three hard spot support columns are distributed in base station position loca and constitute a triangle, and soft spots support column loca is in described leg-of-mutton perimeter; Optimized technical scheme is three hard spot support column position loca line form right angles or acute triangle, and the support zone curved-surface structure of described support column is spherical structure.Optimized technical scheme is that three support column position loca lines constitute isosceles right angle or isosceles acute triangle; Described support column and base station contacting structure are cylinder, rectangular strip or helicitic texture, and described three hard spot support columns and pin are made by hard material, and the soft spots support column is made of flexible material.Optimized technical scheme is that described three hard spot support columns are made by the abrasion-proof stainless steel material; The soft spots support column is combined by hard material and flexible material and forms; The main body of described hard spot support column is rectangular structure; Described hard spot support column screws mode by welding or screw thread and is fixed on the base station, and threads turn is passed through at the position that the soft spots support column contacts with base station.
Optimized technical scheme is that base station is made of hard material; Standby screw is arranged on the base station, have nut on the hard spot support column, the soft spots support column is the bulb resilient plunger, and the support zone of described support column contacts or the line contact for point with the way of contact of table top.Optimized technical scheme is that base station is made by lightweight aluminium material or alloy material; The support zone of described support column is that point contacts with the way of contact of table top.
Described hard spot support column screws mode by welding or screw thread and is fixed on the base station, and threads turn is passed through at the position that the soft spots support column contacts with base station.Described hard spot support column is to be fixed on the base station by the mode that screw thread screws.Described base station can be Any shape, and as preferably, it is generally more regular shape.
The agent structure of the described soft spots support column of optimized technical scheme can be identical with the structure of hard spot support column, also can be different, its purpose is to provide certain support force to supported object in a certain orientation, place supported object rollover, as preferably, it has following several middle structure: the soft spots support column all is made of flexible material, and threads turn can be passed through in its position that contacts with base station, both can be so that the soft spots support column had carried out certain movement in vertical direction; The soft spots support column is combined by hard material and flexible material and forms, and wherein hard material distortion is little, can reduce single flexible material perpendicular to the movement on the direction of support column; Soft spots can also be made of hard material entirely, and for example, it can be the bulb resilient plunger.
The described support column of optimized technical scheme is to be fixed on the base station by the mode that screw thread screws, and has a plurality of standby screws at base station, in order to change the position of support column, thereby makes bracing frame adapt to the support of different size object.Optimized technical scheme, the base station of described fixed support post is made of hard material, can be made by lightweight aluminium material or alloy material as preferred its.
The described objective table of optimized technical scheme can will be fixed in by object carrier on a certain plane, and described pin has regulating action, and can will accurately be fixed in the effect of a certain definite position on the plane by article carrying piece.Optimized technical scheme, described pin are three.Optimized technical scheme, described pin with regulating action is cam pin, and it has the effect of adjusting, and it can carry out certain fine setting in the plan-position with object, thereby object is determined on a certain in the plane definite position.
Optimized technical scheme, described have the cam pin of regulating action for adjustable continuously, and it can realize the fixing of eccentric shaft by related measure after each the adjusting, no longer loosening after namely can making eccentric shaft locate, as preferably, the main body of described eccentric shaft is cylindrical structure, and its locking measure can be that screw is fixed.Optimized technical scheme, described objective table can be any structure shape, as preferably, has the support column that several can regulate height on the described objective table, the top of support column is as the strong point, as preferably, support column is made of three hard spot support columns or is made of three hard spot support columns and several soft spots support columns.Optimized technical scheme, described pin is by manual adjustments, has on the pin for the mechanism that regulates; The manual adjustments parts are projection, groove or circular hole.Has nut on the pin.The main body of the eccentric shaft of described eccentric pin is that cylindrical structure and base station stiff end have screw thread, and during the rotating eccentricity pin, its vertical central is laterally mobile.
Objective table provided by the invention, have the following advantages: the support zone of each strong point is curved-surface structure, when it supports the object that other has the face structure, can make and contact for point between bracing frame and the object or line contacts, can fully locate and only locate owing to support, 3 of meeting geometric allocate the face rule, and this kind design can be determined object in one plane; In addition, when the object that supports when needs is regular planar structure, take three strong points can be with the object that supports on the plane of some needs, and because the position of three strong points constitutes a triangle, be easy to realize center of gravity control with object in delta-shaped region inside, thereby make supported object be not easy to turn on one's side.In addition, the bracing frame that has supplemental support point provided by the present invention has higher smoothness, three hard spots support the tram of having determined supported object, one soft spots supplemental support has guaranteed that supported object is difficult for turning on one's side, and pin is fixed table top, is difficult for mobile.
Objective table provided by the invention, adopt simple Machine Design, the energy realization is comprehensive to position supported object, it can accurately be fixed on supported object on a certain position, operation at some instruments, particularly in the measuring process of some precision instrument, reduce the position difference of measured object to the influence of final actual result.
In the operating process of precision instrument, with it as objective table, cooperate high operating system closely can finish the higher relatively operation of required precision, particularly when the instrument that relates to accurate measurement uses, objective table of the present invention has enough smoothnesses, the plan-position favorable reproducibility that object is placed on the operating desk is not easy to turn on one's side, and is conducive to accurate operation.
The present invention can realize the particularly accurate placement of the object of ordered structure of object, object for the same type of pattern rule, smooth tabular in edge for example, can guarantee that each placement all has very high position repeatability, namely can realize one-time positioning, repeatedly operation, can also realize comprehensive supported object being positioned, it can accurately be fixed on supported object on a certain position, has obtained better technical effect.
Description of drawings
Fig. 1 is the support frame structure schematic diagram that has pin in the embodiment of the invention 1.
Fig. 2 is the eccentric pin structural representation in the embodiment of the invention 1.
Fig. 3 is objective table structural representation in the embodiment of the invention 1.
Among Fig. 1,11 is that base station, 12 is pin; 13 is support column; 14 is nut.
Among Fig. 2,21 is that the surface is the bottom cylinder of helicitic texture, and 22 is the upper end cylinder; Two cylinders 21,22 disalignments; Wherein, cam pin 12 is fixed on the objective table by helicitic texture, and also there is helicitic texture in 22 surfaces near 21 position, and it is used for stop nut 14 pin of adjusting is fixed on objective table.
Among Fig. 3,11 is that base station support column, 12 is pin; 13 is support column; 21 is contained object.
The invention will be further elaborated below by representational specific embodiment, is not limited only to present embodiment, also belongs to protection scope of the present invention by simple transformation or equivalent application.
The specific embodiment
[embodiment 1]
A kind of objective table of accurate control position, as shown in Figure 1, it comprises objective table 11 and 3 controls by the pin 12 of object carrier position, described pin has regulating action, and can accurately be positioned the effect of a certain definite position on the plane by the object that carries.Described pin 12 with regulating action is cam pin, its a kind of structure as shown in Figure 2, it is by two cylinders 21 of out-of-alignment, 22 constitute, wherein 21 surfaces are helicitic texture, cam pin 12 is fixed on the objective table by this structure, also there is helicitic texture in 22 surfaces near 21 position, it is used for stop nut 14 pin of adjusting is fixed on objective table, has governor motion at pin in addition, governor motion is a circular port in the present embodiment, insert the action that wherein can rotate and regulate by the bar shaped rod, as restriction foundation of the present invention, governor motion can not be other mechanisms yet in circular port mechanism.
Have 3 hard spot support columns 13 on the objective table 11 in the present embodiment, it can will be fixed on a certain plane adjustable height of hard spot support column 13 by three strong points by object carrier.When using this objective table, as shown in Figure 3, the object 21 that will be carried is placed on the objective table 11 by support column 13 jack-up, regulates the height of support column 13, makes object be positioned on certain horizontal plane; Mobile object makes object edge be close to 3 cam pins 12, regulate cam pin 12, in the process of rotating cam pin 12, make object 21 edges be close to cam pin 12, because the rotation of cam pin, had certain variation in the position in the plane by object carrier 21,, get final product cam pin is fixing by nut 14 until correct position at 3 cam pins 12 of fit adjustment.In the present embodiment, cam pin 12 is higher than support column 13 projecting heights on the described objective table 11 at the projecting height on the objective table.
[embodiment 2]
A kind of objective table of accurate control position is used for placing the object that pattern is regular and position accuracy demand is high, and bracing frame comprises the base station of support column, pin and fixed support post and pin.Described support column is not point-blank rigid support posts of 3 positions, it is prepared by stainless steel material, and support column and base station position contacting have can the rotational support post helicitic texture, namely can regulate the height of each support column strong point by helicitic texture.3 support columns can be fixed in supported table top on a certain plane.3 eccentric pins are fixedly arranged on the base station in the present embodiment, and it is made by hard wear-resistant material, and the position of pin is in support column and constitutes leg-of-mutton periphery, and not point-blank, its fixed position is decided by the supporting object shape and size of objective table correspondence.Pin is higher than the projecting height on base station of described support column at the projecting height on the base station.Objective table is in the process of using, and all pins are tactile with the side edge of supported object, and it can be fixed in supported object a certain definite position on the plane.
[embodiment 3]
A kind of objective table of accurate control position is provided, as different from Example 1, increased by a soft spots support column on the basis of embodiment 1, in the use of bracing frame, it plays and prevents that the object center of gravity from deflecting away from the delta-shaped region that support column shown in the embodiment 1 constitutes and the phenomenon of turning on one's side, and the soft spots support column is spring-loaded plunger.
[embodiment 4]
Present embodiment provides a kind of accurate control position, and it comprises the base station of three hard spot support columns, soft spots support column and fixed support post, 3 eccentric pins, circular hole on the eccentric pin.Three hard spot support columns are distributed on the different position of base station, and its position loca has constituted a right angled triangle, and the soft spots support column is in described leg-of-mutton perimeter, and four support column positions constitute a rectangular configuration.
Three hard spot support columns are made by the hard, wear-resistant stainless steel material, and it is embedded in support column column main body one end by the support end sphere structure and constitutes, and the support column column main body other end is helicitic texture, and a nut is fixed on the support column column main body by screw thread.The support end sphere structure is designed to sphere structure, is that three support columns can be determined a plane because sphere is generally a contact when contacting with other face; The design nut structure is easily loosening in order to prevent that support column is fixed on the base station.
The soft spots support column is a bulb resilient plunger, and bulb resilient plunger top is divided into hollow-core construction, and a spring is arranged in the hollow area, and there is a movable spheroid its upper end with spring is contacted, and spheroid and spring are fixed in the certain space by bulb resilient plunger agent structure; In the lower part of bulb resilient plunger agent structure helicitic texture is arranged in addition, by rotating bulb resilient plunger agent structure, the soft spots support column that can make has certain movement in the direction perpendicular to base station.When using the soft spots support column, adjust its height, make the movable spheroid in top of soft spots support column touch supported body surface and spring has elastic deformation a little to get final product.
Support column is to be fixed in the screw corresponding with support column on the base station by the mode that screw thread screws, there are a plurality of standby screws at base station, in order to can change the position of support column at any time according to the pattern of supported objects, thereby make bracing frame adapt to the support of different size object.The base station of fixed support post is made by the hard and light aluminum of matter.
The position of pin is in the hard spot support column and constitutes leg-of-mutton periphery, and not point-blank, its fixed position is decided by the supporting object shape and size of objective table correspondence.Pin is higher than the projecting height on base station of hard spot support column at the projecting height on the base station.Objective table is in the process of using, and all pins are tactile with the side edge of supported object, and it can be fixed in supported object a certain definite position on the plane.
[embodiment 5]
Present embodiment provides a kind of objective table of accurate control position, and its structure is identical with embodiment 4, and three support columns are distributed near the edge of base station; And its material is the hard, wear-resistant stainless steel material and makes, and support column screws mode by screw thread and is fixed on the hard base station, and the hard base station is made by the lightweight aluminium material; Three support column position locas constitute leg-of-mutton three summits, and the triangle that constitutes is right angled triangle.The structure of soft spots support column is made by having certain flexible rubber material.
[embodiment 6]
Support column is identical with embodiment 4 with base station among the embodiment 6, has a plurality of standby screws at base station.Change the position of three hard strong points as different from Example 4, the triangle that its loca is formed is equilateral triangle.Have nut structure and helicitic texture on the hard spot support column, have the screwed hole corresponding with helicitic texture at base station, support column is to be fixed in the screw corresponding with support column on the base station by the mode that screw thread screws, and screwing nut then is that support column and base station are combined closely.The base station of fixed support post is made by the hard and light aluminum of matter.
[embodiment 7]
A kind of objective table of accurate control position, support column is identical with embodiment 1 with base station, and its material is the hard, wear-resistant stainless steel material and makes, and the hard base station is made by the lightweight aluminium material; Three hard support column position locas constitute leg-of-mutton three summits, and the triangle that constitutes is non-isosceles acute triangle.The spherical structure of table top and bracing frame forms point and contacts, this objective table good stability, and the plan-position favorable reproducibility that object is placed on the objective table is not easy to turn on one's side.
[embodiment 8]
A kind of objective table of accurate control position, support column is identical with embodiment 4 with the position relation of base station, and this support column constitutes by ellipsoidal structure and cylindrical structure, and oval curved-surface structure is support zone.And its material is the hard, wear-resistant stainless steel material and makes, and support column is fixed on the hard base station by engage thread, and the hard base station is made by the lightweight aluminium material.The oval curved-surface structure of table top and bracing frame forms line and contacts this objective table stability height.
[embodiment 9]
A kind of objective table of accurate control position comprises the base station of three hard support columns and soft support column and fixed support post, and three hard support columns are distributed near the edge of base station; This hard support column arrangement constitutes by ellipsoidal structure and cylindrical structure, oval curved-surface structure is support zone, and its material is the hard, wear-resistant stainless steel material and makes, support column has the identical helicitic texture of embodiment 4, have the screwed hole corresponding with helicitic texture at base station, support column is tightened on base station by helicitic texture.The hard base station is made by the lightweight aluminium material; Three support column position locas constitute leg-of-mutton three summits, and the triangle that constitutes is isosceles acute triangle.The position of pin is in the hard spot support column and constitutes leg-of-mutton periphery, and not point-blank, its fixed position is decided by the supporting object shape and size of objective table correspondence.Pin is higher than the projecting height on base station of hard spot support column at the projecting height on the base station.Objective table is in the process of using, and all pins are tactile with the side edge of supported object, and it can be fixed in supported object a certain definite position on the plane.
[embodiment 10]
A kind of objective table that has the accurate control position of supplemental support point, three hard spot support columns constitute by pyramidal structure and cylindrical structure, and pyramidal structure is support zone.Other parts are identical with embodiment 4, and its material is the hard, wear-resistant stainless steel material and makes, support column has the identical helicitic texture of embodiment 4, has the screwed hole corresponding with helicitic texture at base station, and support column is tightened on base station by helicitic texture.The hard base station is made by the lightweight aluminium material; Three support column position locas constitute leg-of-mutton three summits, and the triangle that constitutes is isosceles acute triangle.The awl point structure of table top and bracing frame forms point and contacts this objective table stability height.
Claims (9)
1. the objective table of an accurate control position, comprise base station, support column and pin, support column and pin are fixed on the base station, the height that is higher than support column perpendicular to pin height on the direction of base station, the summit of the support zone of described support column forms a plane, be positioned over by object carrier on the support zone of support column, and be positioned at the inboard of pin; Wherein, described pin is eccentric pin, is fixed on the base station by screw thread.
2. the objective table of accurate control position according to claim 1 is characterized in that described support column is hard spot support column and soft spots support column, and the support zone of described support column is curved-surface structure or pyramidal structure; Described objective table has at least two pins.
3. the objective table of accurate control position according to claim 2, the support zone curved-surface structure that it is characterized in that described support column is spherical structure; Support column has three hard spot support columns and a plurality of soft spots support column to constitute; Three hard spot support columns are distributed in base station position loca and constitute a triangle, and soft spots support column loca is in described leg-of-mutton perimeter; Three pins are arranged on the base station, have nut on the pin.
4. the objective table of accurate control position according to claim 3 is characterized in that three hard spot support column position loca line form right angles or acute triangle; Described support column and base station contacting structure are helicitic texture, and threads turn is passed through at the position that the soft spots support column contacts with base station.
5. the objective table of accurate control position according to claim 4 is characterized in that three support column position loca lines constitute isosceles right angle or isosceles acute triangle; Described hard spot support column is made by the abrasion-proof stainless steel material; The soft spots support column is combined by hard material and flexible material and forms; Standby screw is arranged on the base station, have nut on the hard spot support column, the soft spots support column is the bulb resilient plunger, and the support zone of described support column contacts or the line contact for point with the way of contact of table top.
6. the objective table of accurate control position according to claim 1 is characterized in that described base station made by lightweight aluminium material or alloy material; The support zone of described support column is that point contacts with the way of contact of table top.
7. the objective table of accurate control position according to claim 1, the main body that it is characterized in that the eccentric shaft of described eccentric pin are that cylindrical structure and the fixing stiff end of base station have screw thread, and during the rotating eccentricity pin, its vertical central is laterally mobile.
8. the objective table of accurate control position according to claim 1 is characterized in that having the manual adjustments parts on the eccentric pin.
9. the objective table of accurate control position according to claim 8 is characterized in that the manual adjustments parts are projection, groove or circular hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210006862.6A CN103203726B (en) | 2012-01-11 | 2012-01-11 | Accurately control the object stage of position |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210006862.6A CN103203726B (en) | 2012-01-11 | 2012-01-11 | Accurately control the object stage of position |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103203726A true CN103203726A (en) | 2013-07-17 |
| CN103203726B CN103203726B (en) | 2016-08-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210006862.6A Expired - Fee Related CN103203726B (en) | 2012-01-11 | 2012-01-11 | Accurately control the object stage of position |
Country Status (1)
| Country | Link |
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| CN (1) | CN103203726B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105710637A (en) * | 2014-12-04 | 2016-06-29 | 焱智精密机械（上海）有限公司 | Short-distance parallelism adjusting device and method of short-distance parallelism adjusting device |
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| JPS59121338A (en) * | 1982-12-28 | 1984-07-13 | Toshiba Corp | Exposing device for printed wiring board |
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| CN1746776A (en) * | 2004-09-06 | 2006-03-15 | 东京毅力科创株式会社 | Substrate processing apparatus and substrate positioning device |
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| CN202572353U (en) * | 2012-01-11 | 2012-12-05 | 昆山允升吉光电科技有限公司 | Objective table precise in position control |
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Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59121338A (en) * | 1982-12-28 | 1984-07-13 | Toshiba Corp | Exposing device for printed wiring board |
| JPH0774143A (en) * | 1993-08-31 | 1995-03-17 | Dainippon Screen Mfg Co Ltd | Substrate holder |
| CN1464976A (en) * | 2001-07-02 | 2003-12-31 | 奥林巴斯光学工业株式会社 | Substrate holding device |
| CN1536640A (en) * | 2003-02-20 | 2004-10-13 | 应用材料有限公司 | Method for positioning substratge relatively to supporting table and its equipment |
| CN1746776A (en) * | 2004-09-06 | 2006-03-15 | 东京毅力科创株式会社 | Substrate processing apparatus and substrate positioning device |
| US20110225554A1 (en) * | 2010-03-09 | 2011-09-15 | Kla-Tencor Mie Gmbh | Method for the Reproducible Determination of the Position of Structures on a Mask with a Pellicle Frame |
| CN202572353U (en) * | 2012-01-11 | 2012-12-05 | 昆山允升吉光电科技有限公司 | Objective table precise in position control |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105710637A (en) * | 2014-12-04 | 2016-06-29 | 焱智精密机械（上海）有限公司 | Short-distance parallelism adjusting device and method of short-distance parallelism adjusting device |
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| Publication number | Publication date |
|---|---|
| CN103203726B (en) | 2016-08-10 |
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