CN1532532A - Large base hoard holder - Google Patents
Large base hoard holder Download PDFInfo
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- CN1532532A CN1532532A CNA2004100300483A CN200410030048A CN1532532A CN 1532532 A CN1532532 A CN 1532532A CN A2004100300483 A CNA2004100300483 A CN A2004100300483A CN 200410030048 A CN200410030048 A CN 200410030048A CN 1532532 A CN1532532 A CN 1532532A
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- substrate retainer
- large substrate
- retainer according
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- lattice bar
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
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- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mathematical Physics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Vibration Prevention Devices (AREA)
Abstract
A holder for large substrate is provided to protect and hold a glass substrate of an LCD(liquid crystal display), a PDP(plasma display panel) and an organic EL(electroluminescence) display. A large substrate holder has a body(2) in the form of frame. A plurality of ribs(4) are located in an opening(3) of the body of the substrate holder in one direction. The ribs are arranged at a predetermined interval between two opposite sides of the opening of the body. Each rib is composed of stripe-shaped two protecting/holding plates(4a,4b) arranged opposite to each other. A space(4c) through which transmitted light passes is formed between the two protecting/holding plates. A transparent material is interposed between the protecting/holding plates.
Description
Technical field
The present invention relates to the large substrate retainer, this retainer for example is used to keep the glass substrate of flat-panel monitors (FPD) such as LCD (LCD), Plasmia indicating panel (PDP), organic EL (electroluminescence) display.
Background technology
For example, along with the progress of LCD Technology in recent years, the size that is used for the glass substrate of LCD maximizes, has for example reached more than 1m * 1m.
Such glass substrate in the manufacturing process of LCD, is placed in and carries out defect inspection on the substrate retainer.The substrate retainer that is used for defect inspection for example is documented in the Japanese patent laid-open 9-189641 communique.Structure in the Te Kaiping 9-189641 communique is to be provided with a plurality of lattice bars (Zhan) in substrate keeps frame-saw.Defect inspection is then illuminated glass substrate according to the inspectoral visual macro check of checking defect part and will amplify the micro of checking with microscope by the defect part that this macro check is found.
But, though glass substrate is placed on the substrate retainer, wait the vibration of transient cause generation to be passed on the substrate retainer because of the mobile of for example people, make the glass substrate vibration.In addition, the influence that the vibration of glass substrate is not only moved, for example be subjected to the following current blast that flows to clean room and vibrate, the influence of the vibration that produces when perhaps being subjected to transferring the loading and unloading action of glass substrate, vibrate from the vibration of grating floor set (grating floor) etc.And also the mobile immanent cause that waits because of substrate retainer itself produces vibration, makes glass substrate vibrate.
The substrate retainer is set to keep the length of each the lattice bar in the frame-saw also elongated for keeping size for example for the above large-size glass substrate of 1m * 1m maximizes.Therefore, these lattice bars are with small vibration resonance, and its vibration becomes big, makes the glass substrate vibration.Contain low-frequency vibration and dither in this vibration.And, since glass substrate to be formed plate thickness thinner, therefore be vulnerable to the vibration of substrate retainer.
If glass substrate vibrates, then when checking glass substrate, the enlarged image of the defect part that arrives by microscopic examination when for example carrying out micro vibrates, the observation mis-behave of enlarged image like this.Especially, along with the amplification of microscope multiplying power, the enlarged image that arrives by microscopic examination is even be subjected to small vibration or faint following current blast also can produce for example small vibration.Therefore, the observation mis-behave of enlarged image becomes defective image for checking glass substrate.Its result can not carry out the micro of defect part and the line width on the glass substrate is measured with sufficient precision.
As the method for the vibration that prevents such glass substrate, the method for absorption glass substrate is comprehensively for example arranged on the substrate retainer, and as in the patent documentation 1 record will constitute method that a plurality of lattice bars of substrate retainer constitute with hardware etc.
But, to adsorb in the method for glass substrate comprehensively, the rear side of glass substrate is blocked by the substrate retainer, can not be from the rear side irradiation transmission illumination light of glass substrate.Therefore, can not utilize transmission illumination to carry out the defect inspection of glass substrate.
In addition, in the method that the lattice bar shown in the patent documentation 1 is made of hardware, because of hardware is a rigid body, so vibration easily.
Summary of the invention
According to main points of view of the present invention, large substrate retainer provided by the invention has: frame shape objective table (ス テ one ジ); A plurality of lattice bar (Zhan), it is arranged in this objective table frame, is used for mounting large substrate flatly, is provided with shock arrester (-tor), absorbs between each lattice bar the vibration that produces because of transient cause and immanent cause.
Large substrate retainer of the present invention has objective table and a plurality of lattice bar of frame shape, and described lattice bar is used for mounting flatly and is arranged on large substrate in the described objective table frame, it is characterized in that,
Be provided with shock arrester (-tor) between described each lattice bar, this shock arrester (-tor) absorbs the vibration of transient cause and immanent cause.
Described large substrate retainer is characterized in that, described shock arrester (-tor) is arranged on the junction surface of described objective table frame and a plurality of described lattice bars.
Described large substrate retainer is characterized in that, described shock arrester (-tor) is arranged on the spatial portion between two holding plates that constitute described lattice bar.
Described large substrate retainer is characterized in that, described shock arrester (-tor) is arranged on the junction surface of described objective table frame and a plurality of described lattice bars, and is arranged on the spatial portion between two holding plates that constitute described lattice bar.
Described large substrate retainer is characterized in that, is set side by side with a plurality of described lattice bars in described objective table frame.
Described large substrate retainer is characterized in that, is provided with a plurality of described lattice bars with concentric circles in described objective table frame.
Described large substrate retainer is characterized in that, described shock arrester (-tor) is set at respectively between each of described each lattice bar, and is configured multiple row in parallel to each other in described objective table frame.
Described large substrate retainer is characterized in that, described shock arrester (-tor) is set at respectively between each of described each lattice bar, and is configured to the straight line shape by the central portion in the described objective table frame.
Described large substrate retainer is characterized in that, described shock arrester (-tor) between each of described each lattice bar respectively by decentralized configuration.
Described large substrate retainer is characterized in that, described shock arrester (-tor) has the described elastic body that forms than the interval length of described each lattice bar, and described elastic body is pressed between described each lattice bar.
Described large substrate retainer is characterized in that, described elastic body is a rubber.
Described large substrate retainer is characterized in that described elastic body is formed by high molecular rubber.
Described large substrate retainer is characterized in that, described elastic body is formed by resin, absorption of vibrations coating or spawn.
Described large substrate retainer is characterized in that, described elastomeric length, height and width correspond respectively to the magnitude of vibrations of the described substrate retainer self that is produced by transient cause and immanent cause and be formed.
Described large substrate retainer is characterized in that, the vibration that described elastic body absorbs and decay produces on vertical, horizontal and short transverse.
Described large substrate retainer is characterized in that, described shock arrester (-tor) has applied cover body on described elastic body.
Described large substrate retainer is characterized in that, described shock arrester (-tor) applies on described elastic body.
Described large substrate retainer is characterized in that, has carried out poly coating at described surface of elastomer.
Description of drawings
Fig. 1 is the structural drawing that the 1st embodiment of the large substrate retainer that the present invention relates to is shown.
Fig. 2 A keeps installation base plate on the platform to attract the structural drawing of member and fulcrum post in the 1st embodiment of the large substrate retainer that the present invention relates to.
Fig. 2 B keeps installation base plate on the platform to attract the structural drawing of member and fulcrum post in the 1st embodiment of the large substrate retainer that the present invention relates to.
Fig. 3 is the decomposition chart of absorption of vibrations member in the 1st embodiment of the large substrate retainer that the present invention relates to.
Fig. 4 is the figure that is pressed into the state of rubber in the 1st embodiment of the large substrate retainer that the present invention relates between each lattice bar.
Fig. 5 A is the figure of the last lower cover of rubber in the 1st embodiment of the large substrate retainer that the present invention relates to of expression.
Fig. 5 B is the figure of the last lower cover of rubber in the 1st embodiment of the large substrate retainer that the present invention relates to of expression.
Fig. 6 has installed the structural drawing of absorption of vibrations deformation of members example at the central portion of substrate retainer body in the 1st embodiment of the large substrate retainer that the present invention relates to of expression.
Fig. 7 is the structural drawing that disperses to install absorption of vibrations deformation of members example in the 1st embodiment of the large substrate retainer that the present invention relates to of expression.
Fig. 8 is the structural drawing that is pressed into the embedding distortion example of rubber in the 1st embodiment of the large substrate retainer that the present invention relates to of expression between each lattice bar.
Fig. 9 is the structural drawing that is pressed into the embedding distortion example of rubber in the 1st embodiment of the large substrate retainer that the present invention relates to of expression between each lattice bar.
Figure 10 is the Facad structure figure of the 2nd embodiment of the large substrate retainer that the present invention relates to of expression.
Figure 11 is the top structural drawing of the 2nd embodiment of the large substrate retainer that the present invention relates to of expression.
Embodiment
Below, with reference to description of drawings the 1st embodiment of the present invention.
Fig. 1 is the structural drawing of large substrate retainer.This large substrate retainer for example is applicable in the surface examining device that the surface of the large-size glass substrate 1 of flat-panel monitor is checked.Substrate retainer body 2 is formed the frame shape.In the peristome 3 of this substrate retainer body 2, set up a plurality of lattice bar (Zhan along directions X) 4.These lattice bars 4 in the peristome 3 of substrate retainer body 2, are set up in parallel between mutual opposed both sides with predetermined space.These lattice bars 4 are made of 2 banded holding plate 4a, the 4b that mutual plate face disposes in opposite directions.Between these holding plates 4a, 4b, be formed with and be used for the spatial portion 4c that transmission illumination light passes through.Between these holding plates 4a, 4b, for example also can sandwich transparent protective materials.
Precalculated position in the peristome 3 of substrate retainer body 2 on each for example corresponding with middle body lattice bar 4, is provided with a plurality of substrates and attracts member 5.In addition, each lattice bar 4 is provided with a plurality of fulcrum posts 6, in order to flatly to keep glass substrate 1.
Fig. 2 A and Fig. 2 B are illustrated in the structural drawing that installation base plate on the lattice bar 4 attracts member 5 and supporting pin 6.The structural drawing of Fig. 2 A for seeing from the top, Fig. 2 B is an outboard profile.These substrates attract member 5 and fulcrum post 6, are clamped between 2 holding plate 4a, the 4b with predetermined space.5 attractions of substrate attraction member keep being positioned in respectively the glass substrate 1 on the substrate retainer body 2.Fulcrum post 6 flatly supports this glass substrate 1.As shown in Figure 1, these substrates attract member 5 and fulcrum post 6, are set up with the height identical with the periphery mounting 2a of portion of substrate retainer body 2.
Attract to be connected with suction tube 7 on the member 5 at each substrate.This suction tube 7 is configured between 2 holding plate 4a, the 4b.This suction tube 7 is for example formed by translucent material.In addition, each suction tube 7 of configuration for example is wound in 1, and is connected with the suction pump P that is arranged on substrate retainer body 2 outsides as shown in Figure 1 on each lattice bar 4.
Moreover, the lattice bar 4 that substrate attracts member 5 and fulcrum post 6 has been installed shown in Fig. 2 A and Fig. 2 B, when not having installation base plate to attract member, a plurality of fulcrum posts 6 are clamped between each holding plate 4a, 4b at regular intervals.
In the peristome 3 of substrate retainer body 2, a plurality of absorption of vibrations members 8 are installed along the vertical direction of configuration direction (directions X) with respect to a plurality of lattice bars 4.These absorption of vibrations members 8 are arranged multiple row in peristome 3, for example arranged totally 3 row of central portion and its both sides among Fig. 1 with predetermined space.These absorption of vibrations members 8, low-frequency vibration and dither to the substrate retainer self that produces because of transient cause and immanent cause carry out attenuation by absorption.
Fig. 3 is with the absorption of vibrations member 8 local decomposition charts that amplify.Between each lattice bar 4, inhale device as vibration, for example be pressed into elastomeric rubber 9 respectively.This rubber 9 for example forms rectangular parallelepiped by polymer rubber.Polymer rubber 9 has the character of the vibration that absorption applies.For example, when object collided on the polymer rubber 9, polymer rubber 9 had impact that absorption is subjected to from object and does not apply the character of the impact when colliding to object.In addition, polymer rubber 9 does not produce dust.
The length of this rubber 9 forms longer a little than the interval of each lattice bar 4.Moreover, the length of rubber 9, height and width, the size that can vibrate according to the substrate retainer self because of transient cause and immanent cause generation waits to be adjusted.
The rubber 9 of clamping is covered by each cover body 10,11 up and down between these each lattice bars 4.Upper outlet body 10 is formed concavity.This upper outlet body 10, the place that enters at each lattice bar 4 is provided with notch part 12.Lower cover 11 is formed concavity.It is that interval between holding plate 4b and the 4a is short a little that the length of this lower cover 11 forms interval than each lattice bar 4. Lower cover 10,11 on these, shown in Fig. 5 A, rubber 9 covered from above-below direction, and is for example fixing with Screw 13.Moreover shown in Fig. 5 A, rubber 9 can not be supported to yet and contact with last lower cover 10,11.In addition, shown in Fig. 5 B, rubber 9 also can sandwich with upper outlet body 11 and keep.Have, rubber 9 also can contact and cover with the both sides of last lower cover 10,11 again.
Moreover each holding plate 4a, 4b of each lattice bar 4 has sufficient length and width degree size with respect to the thickness of plate, and the metal high by rigidity constitutes.These holding plates 4a, 4b are that purpose is coated with vibration-proof material on its plate face to suppress vibration, but perhaps with metal manufacturings of shaking such as intergranular corrosion resistance stainless steels.As vibration-proof material, for example use high molecular rubber or resin, absorption vibration coating, spawn.As spawn, for example use organogel, polymer gel, silica gel, fluorine ion exchange resin etc.
In addition, preferably change the plate thickness of each holding plate 4a, 4b,, perhaps change the thickness of vibration-proof material or amount and wait the resonant frequency that changes each lattice bar 4 self, make can not produce resonance between each lattice bar 4 so that each lattice bar 4 do not resonate.
In addition, on the periphery mounting 2a of portion of substrate retainer body 2, be provided with and be used to adsorb a plurality of attraction members (absorption backing plate) 14 that keep glass substrate 1.These attract members 14 to be connected on the suction tube 7, and the attraction that is subjected to suction pump P is moved and carried out sucking action.In addition, on substrate retainer body 2, be provided with a plurality of reference pins 15 and a plurality of by pad 16.
Below, the action of the retainer of structure is as mentioned above described.
Keep on the body 2 at substrate, mounting for example is used for the large-size glass substrate 1 of the above size of 1m * 1m on the LCD.This glass substrate 1 usefulness is a plurality of to be pressed on a plurality of reference pins 15 by pad 16, thereby is installed on the reference position.Afterwards, the action of glass substrate 1 by suction pump P is adsorbed and remains on each substrate and attract member 5 and each to attract on member 14.
Under this state, on the surface of glass substrate 1, throw light on, carry out macro check by prosecutor's visualization.Then, amplify the defect part of checking out through macro check, carry out micro by observing this enlarged image with microscope.And the enlarged image with microscope photographing glass substrate 1 surface carries out Flame Image Process to this view data and measures glass substrate 1 lip-deep live width.
In the present embodiment, the pairing position of central portion in substrate retainer body 2 is pressed into a plurality of rubber 9 as absorption of vibrations member 8, and therefore, the vibration that the central portion in substrate retainer body 2 produces is absorbed and decay by each rubber 9.And, a plurality of rubber 9 that are used as absorption of vibrations member 8 between each lattice bar 4 are linked, so even in vertically (directions X), laterally (Y direction) and upward generation vibration of short transverse (Z direction), the vibration of these directions is also absorbed by rubber 9 and decays.
Its result, when glass substrate was carried out micro, the enlarged image of the glass substrate 1 lip-deep defect part that arrives by microscopic examination can not observed quiveringly well.Especially, even microscopical multiplying power uprises, the situation that institute's enlarged image is observed quiveringly can not take place yet.In addition, can also go out live width on the glass substrate 1 with sufficient precision determination.
In aforesaid above-mentioned the 1st embodiment, be pressed into rubber 9 as absorption of vibrations member 8 between a plurality of lattice bars 4 in substrate retainer body 2, therefore, can utilize rubber 9 to absorb and decay because of transient cause and immanent cause in horizontal and vertical vibration that produces, can will be positioned in the vibration suppression of the large-size glass substrate 1 on the substrate retainer body 2 in Min..
In addition, by linking, make the resonant frequency decay that is delivered on each lattice bar 4 between a plurality of lattice bars 4 with absorption of vibrations member 8, the resonance between each lattice bar 4 is disappeared.
In addition, attract member 5 by absorption of vibrations member 8 and substrate are set on the pairing position of central portion of substrate retainer body 2, the vibration that can make vibration become maximum substrate retainer body 2 middle bodies is absorbed and decays.Thus, when glass substrate 1 is carried out micro, even observe with high magnification by microscope, also can not produce observing well quiveringly of its enlarged image, the live width on glass substrate 1 is measured also can access in (Line width of cloth Measuring is fixed) and is observed image well.
In addition, owing to only between each lattice bar 4, be pressed into each rubber 9 in this structure, therefore, can eliminate the influence of vibration by being installed to simply on the existing substrate retainer.
In addition, each rubber 9 is used lower cover 10,11 and is covered, and therefore, even rubber 9 drops out between each lattice bar 4, also can not break away from from substrate retainer body 2.
Moreover above-mentioned the 1st embodiment also can followingly be out of shape.
In above-mentioned the 1st embodiment, along the vertical direction of the configuration direction of a plurality of relatively lattice bars 4 a plurality of absorption of vibrations members 8 have been installed, but for example as shown in Figure 6, also can be at the central portion in the peristome 3 of substrate retainer body 2, absorption of vibrations member 8 is installed on straight line shape ground.That is, the glass substrate 1 on substrate retainer 2 becomes maximum in its magnitude of vibrations of central portion.Therefore, if vibration in the central portion of glass substrate 1 is absorbed and decays, then can make the vibration of glass substrate 1 become minimum.Thereupon, even only link with absorption of vibrations member 8, also play and absorb and the effect of the vibration of decay glass substrate 1 by central portion with each lattice bar 4 of substrate retainer body 2.
In addition, as shown in Figure 7, for example, also absorption of vibrations member 8 can be disperseed to be installed between each lattice bar 4 staggeredly.Moreover the installation site of absorption of vibrations member 8 can be depended on arbitrarily, if straight word preferably is installed in the central portion that vibration becomes peristome 3 big, substrate retainer body 2.In addition, also can analyze, and absorption of vibrations member 8 is installed to the vibration antinode of glass substrate 1 or vibrates the part that produces maximumly the vibration that absorption remains on the glass substrate 1 on the substrate retainer body 2.
Be pressed into the rubber 9 between each lattice bar 4, for example as shown in Figure 8, also can be provided with respectively and respectively sell 20,21, between these pins 20,21, embed rubber 9 in the opposed locations of lattice bar 4 as absorption of vibrations member 8.Being provided with on each lattice bar 4 respectively sold 20,21 each several part formation embedding recess 22.At this recess 22, also can embed the end that is formed columned rubber 9.Rubber 9 for example is formed cylindricly, and is formed for respectively inserting respectively at both ends and respectively sells each hole 23a, 23b of 20,21.
Therefore, in each hole 23a, 23b, insert and respectively sell 20,21, and at each embedding of each holding plate 4a, 4b embedding rubber 9 in the recess 22.In this case, the possibility that does not fall down if rubber 9 is clamped between each lattice bar 4 is then removed each pin 20,21, and directly embedding rubber 9 also can in recess 22.
The rubber 9 that is pressed between each lattice bar 4 for example, also can form coniform recess 24,25 respectively in the position in opposite directions of lattice bar 4, and the front end that is pressed into tabular or column form cone shape rubber 9 as shown in Figure 9 in these recesses 24,25.Under this situation, rubber 9 is formed tabular, and both ends form leg-of-mutton corner angle portion.Each recess 24,25 forms the delthyrium with the corner angle portion tabling of each rubber 9.
The shape of rubber 9 is not limited only to cylindric or tabular, for example also can form dihedral.
Fig. 3, Fig. 8 and each rubber 9 shown in Figure 9, its surface can be for example with coatings such as tygon.The permanance of rubber 9 can be improved by coating, and static can be prevented to produce.And, also not can and lattice bar 4 between friction and produce dust or shed particles.In addition, even rubber 9 is put into the tube that is formed by teflon (teflon), also can prevent to produce static.
The position that is provided with of absorption of vibrations member 8 is not limited between each lattice bar 4, also can be arranged on by the part of transmitting vibrations, for example each bound fraction 26 between the absorption of vibrations member 8 in substrate retainer body 2 shown in Fig. 1 and substrate retainer body 2 frames.In addition, absorption of vibrations member 8 also can be inserted in each the holding plate 4a and the spatial portion 4c between the 4b that constitutes lattice bar 4.In addition, absorption of vibrations member 8 also can be arranged on the both sides of the spatial portion 4c between each bound fraction 26 and each holding plate 4a and the 4b.These absorption of vibrations members 8 for example can use resin, absorption of vibrations coating or spawn.By inserting these vibration-proof materials, absorb the vibration that produces because of transient cause and immanent cause, can improve vibration-isolating effect.
Below, with reference to description of drawings the present invention the 2nd embodiment.
Figure 10 and Figure 11 are the structural drawing that is applicable to the retainer of base board checking device.Figure 10 is a front elevation, and Figure 11 is a vertical view.
In testing fixture body 30, pedestal 32 is provided with substrate retainer body 31.On substrate retainer body 31, as shown in figure 11, be provided with to concentric circles a plurality of ring-type lattice bars 33 that are configured to concentric circles.These ring-type lattice bars 33 are by spend a plurality of linearity lattice bars 34 bindings that are provided with on radial direction and with every predetermined angular for example per 60.Between these each ring-type lattice bars 33 and linearity lattice bar 34, be formed with the peristome 36 that transmission illumination is used respectively.But between each ring-type lattice bar 33 of first and second in the outside, per 120 degree dispose linearity supporting lattice bar 34, so that lifter pin described later 44,45 can move in the scopes of 120 degree.Thus, the peripheral part side at substrate retainer body 31 forms guiding peristome 35-3～35-4.In addition,, be formed with guiding, be used for lifter pin 44,45 described later and move with peristome 35-1,35-2 in the outside of substrate retainer body 31.
Between each of a plurality of ring-type lattice bars 33, on radial direction, be equipped with and a plurality of absorption of vibrations member 8-1～8-6 of same structure as shown in Figure 3.Thus, between each of each ring-type lattice bar 33, be pressed into rubber 9 as vibration absorption component.Each ring-type lattice bar 33 is linked by rubber 9.
Have, these absorption of vibrations members 8-1～8-6 is not limited to be installed into row on radial direction again, for example also can only be installed between the big a part of ring-type lattice bar 33 of vibration change.In addition, also dispersedly the each between each ring-type lattice bar 33 every an absorption of vibrations member 8 being installed at an arbitrary position.In addition, the shape of ring-type lattice bar 33 is not limited to 2 holding plate 4a, 4b as above-mentioned first embodiment, also can be that the elongated rectangle sheet material in cross section, cross section are that rectangular-shaped square rod material, cross section is the square material with hollow bulb of rectangle or the square rod material that the cross section is the コ font.
Below substrate retainer body 31, be provided with rotating mechanism 37 as shown in figure 10.This rotating mechanism 37 is made of drive division 38 and lift-pin mechanism 39, with the top that glass substrate 1 is lifted substrate retainer body 31 by each peristome 35-1～35-4, for example rotates about 90 degree under this state that lifts.Drive division 38 drives and carries out moving up and down and rotating of lift-pin mechanism 39.
As shown in figure 11, lift-pin mechanism 39 is made of each lifter pin cramp bar 40,41 and each lifter pin 42～45 of erecting two leading sections that are arranged on these lifter pin cramp bars 40,41 respectively.
Therefore, when rotating under the state that lift-pin mechanism 39 is rising, with move in peristome 35-1, the 35-2 circular-arcly, each lifter pin 44,45 also moves with peristome 35-4,35-3 along each guiding each lifter pin 42,43 circular-arcly along each guiding.
In addition, on the base 32 of substrate retainer body 31 both end sides, the guide rail 46,47 of Y direction is provided with in parallel to each other.Between these guide rails 46,47, stride across substrate retainer body 31 the top be provided with door pillar arm 48.Door pillar arm 48 is configured to and can moves along the Y direction with respect to guide rail 46,47, and microscope 49 is configured to and can moves along directions X with respect to this door pillar arm 48.
Above substrate retainer body 31, though not shown, be provided with macroscopical lighting device.Below substrate retainer body 31, be provided with linear transmission illumination device 50.
Then, the inspection action of the retainer of structure describes to using as above.
Be on the substrate retainer body 31 of horizontality the large-scale dimension glass substrate 1 of mounting.Substrate retainer body 31 lifts at a predetermined angle, swings.Under this state, illumination light shines on the surface of glass substrate 1 from macroscopical lighting device.Thus, check defect parts such as adhering to of glass substrate 1 lip-deep scar for example, breach, dirty, dust.
On the other hand, under the situation of carrying out micro, substrate retainer body 31 is configured to horizontality.Door pillar arm 49 moves along the Y direction with respect to guide rail 47,48.Meanwhile, microscope 49 moves along directions X with respect to door pillar arm 49, thus, utilizes microscope 49 to carry out the micro of defect part.
In such inspection, when the vibration that produces because of transient cause or immanent cause is passed on the substrate retainer body 31, become maximum in its vibrations of central portion of a plurality of ring-type lattice bars 33 that are mixed with concentric circles.
In the present embodiment, be configured to be pressed into rubber 9 between each ring-type lattice bar 33 of concentric circles, therefore, can absorbing and decay is delivered to vibration on each ring-type lattice bar 33 by each rubber 9.And even in vertically (directions X), laterally (Y direction) and upward generation vibration of short transverse (Z direction), the vibration of these directions is also absorbed and decay by each rubber 9.
Its result when the micro of glass substrate, by the enlarged image of microscope 49 observed glass substrate 1 lip-deep defect parts, can not observed quiveringly well.Especially, even microscopical multiplying power uprises, the observed quiveringly situation of enlarged image can not take place yet.
The present invention for example in the inspecting substrate of the flat-panel monitor glass substrates such as (FPD) of Plasmia indicating panel (PDP), organic EL (electroluminescence) display etc., is used to keep this glass substrate.
Claims (18)
1, a kind of large substrate retainer has objective table and a plurality of lattice bar of frame shape, and described lattice bar is used for mounting flatly and is arranged on large substrate in the described objective table frame, it is characterized in that,
Be provided with shock arrester (-tor) between described each lattice bar, this shock arrester (-tor) absorbs the vibration of transient cause and immanent cause.
2, large substrate retainer according to claim 1 is characterized in that, described shock arrester (-tor) is arranged on the junction surface of described objective table frame and a plurality of described lattice bars.
3, large substrate retainer according to claim 1 is characterized in that, described shock arrester (-tor) is arranged on the spatial portion between two holding plates that constitute described lattice bar.
4, large substrate retainer according to claim 1 is characterized in that, described shock arrester (-tor) is arranged on the junction surface of described objective table frame and a plurality of described lattice bars, and is arranged on the spatial portion between two holding plates that constitute described lattice bar.
5, large substrate retainer according to claim 1 is characterized in that, is set side by side with a plurality of described lattice bars in described objective table frame.
6, large substrate retainer according to claim 1 is characterized in that, is provided with a plurality of described lattice bars with concentric circles in described objective table frame.
7, large substrate retainer according to claim 1 is characterized in that, described shock arrester (-tor) is set at respectively between each of described each lattice bar, and is configured multiple row in parallel to each other in described objective table frame.
8, large substrate retainer according to claim 1 is characterized in that, described shock arrester (-tor) is set at respectively between each of described each lattice bar, and is configured to the straight line shape by the central portion in the described objective table frame.
9, large substrate retainer according to claim 1 is characterized in that, described shock arrester (-tor) between each of described each lattice bar respectively by decentralized configuration.
10, large substrate retainer according to claim 1 is characterized in that, described shock arrester (-tor) has the described elastic body that forms than the interval length of described each lattice bar, and described elastic body is pressed between described each lattice bar.
11, large substrate retainer according to claim 10 is characterized in that, described elastic body is a rubber.
12, large substrate retainer according to claim 10 is characterized in that, described elastic body is formed by high molecular rubber.
13, large substrate retainer according to claim 10 is characterized in that, described elastic body is formed by resin, absorption of vibrations coating or spawn.
14, large substrate retainer according to claim 10 is characterized in that, described elastomeric length, height and width correspond respectively to the magnitude of vibrations of the described substrate retainer self that is produced by transient cause and immanent cause and be formed.
15, large substrate retainer according to claim 10 is characterized in that, the vibration that described elastic body absorbs and decay produces on vertical, horizontal and short transverse.
16, large substrate retainer according to claim 10 is characterized in that, described shock arrester (-tor) has applied cover body on described elastic body.
17, large substrate retainer according to claim 10 is characterized in that, described shock arrester (-tor) applies on described elastic body.
18, large substrate retainer according to claim 10 is characterized in that, has carried out poly coating at described surface of elastomer.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP074040/2003 | 2003-03-18 | ||
| JP2003074040A JP4276867B2 (en) | 2003-03-18 | 2003-03-18 | Substrate holder and surface inspection apparatus provided with the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1532532A true CN1532532A (en) | 2004-09-29 |
| CN1532532B CN1532532B (en) | 2010-12-08 |
Family
ID=33289785
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2004100300483A Expired - Fee Related CN1532532B (en) | 2003-03-18 | 2004-03-18 | Basal plate holder |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4276867B2 (en) |
| KR (1) | KR101011850B1 (en) |
| CN (1) | CN1532532B (en) |
| TW (1) | TWI332931B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100428001C (en) * | 2005-05-12 | 2008-10-22 | 奥林巴斯株式会社 | Substrate checking device |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009231437A (en) * | 2008-03-21 | 2009-10-08 | Olympus Corp | Macro inspection device, macro inspection system, and macro inspection method |
| CN102686768B (en) * | 2009-12-11 | 2016-02-03 | Kgt石墨科技有限公司 | Substrate support |
| KR101881408B1 (en) * | 2016-08-22 | 2018-07-23 | 주성엔지니어링(주) | Substrate supporting holder and substrate processing apparatus using the same |
| TWI658532B (en) * | 2017-08-09 | 2019-05-01 | 明安國際企業股份有限公司 | Substrate receiving box |
| KR102607248B1 (en) * | 2018-06-25 | 2023-11-30 | 어플라이드 머티어리얼스, 인코포레이티드 | Carriers for substrates and methods for transporting substrates |
| TWD210557S (en) | 2020-01-21 | 2021-03-21 | 志聖工業股份有限公司 | Carrier plate for thermal process |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3636235B2 (en) * | 1996-01-08 | 2005-04-06 | オリンパス株式会社 | Board holder |
| JP4175697B2 (en) | 1998-06-18 | 2008-11-05 | オリンパス株式会社 | Glass substrate holder |
| CN2370524Y (en) * | 1999-01-07 | 2000-03-22 | 神基科技股份有限公司 | Data storage device with shock-proof structure |
| JP3752501B2 (en) * | 2001-07-02 | 2006-03-08 | オリンパス株式会社 | Substrate holding device |
| JP2003049558A (en) * | 2001-08-07 | 2003-02-21 | Kazuhiko Kasai | Vibration control stud |
-
2003
- 2003-03-18 JP JP2003074040A patent/JP4276867B2/en not_active Expired - Fee Related
-
2004
- 2004-03-10 TW TW093106400A patent/TWI332931B/en not_active IP Right Cessation
- 2004-03-16 KR KR1020040017622A patent/KR101011850B1/en not_active IP Right Cessation
- 2004-03-18 CN CN2004100300483A patent/CN1532532B/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100428001C (en) * | 2005-05-12 | 2008-10-22 | 奥林巴斯株式会社 | Substrate checking device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4276867B2 (en) | 2009-06-10 |
| KR20040082305A (en) | 2004-09-24 |
| KR101011850B1 (en) | 2011-01-31 |
| TWI332931B (en) | 2010-11-11 |
| TW200418703A (en) | 2004-10-01 |
| CN1532532B (en) | 2010-12-08 |
| JP2004281907A (en) | 2004-10-07 |
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