JP4079651B2

JP4079651B2 - Substrate support device

Info

Publication number: JP4079651B2
Application number: JP2002034196A
Authority: JP
Inventors: 一高橋
Original assignee: Olympus Corp
Current assignee: Olympus Corp
Priority date: 2002-02-12
Filing date: 2002-02-12
Publication date: 2008-04-23
Anticipated expiration: 2022-02-12
Also published as: JP2003232742A

Description

【０００１】
【発明の属する技術分野】
本発明は、液晶表示パネルやプラズマ表示パネル（ＰＤＰ）などに用いられる透明基板を、検査、観察する際に支持する基板支持装置に関する。
【０００２】
【従来の技術】
近年、液晶表示パネルに用いられるガラス基板は大型化、薄型化している。これに伴って、ガラス基板を検査装置で検査、観察するときに生じる振動が益々問題になっている。ガラス基板に対しては、品質管理の上から、一般的に顕微鏡などを使用した各種の検査が行なわれている。これらの検査は、ガラス基板を検査装置の大型ステージ上に載置した状態で行なわれている。
【０００３】
ところで、このようなガラス基板の検査は、防塵のためダウンフローと呼ばれる天井から床に向かう一定の強さの風を流すようにしたクリーンルーム内で行なわれる。しかし、このダウンフローの風が検査時に直接ガラス基板面に当たり、これが基板の振動源となることがある。また、検査装置は、ダウンフローを通過させるグレーチング床に設置されるため、このグレーチング床を介して他の装置の振動が検査装置に伝わり、これが基板の振動源となることがある。
【０００４】
また、ガラス基板はその大きさに対して厚さ（例えば、０．７ｍｍ）が極めて薄く、たわみ（撓み）や振動が発生し易いものになっている。さらに、ガラス基板自体の共振周波数が下がり、その結果、振動振幅が増大するという問題がある。振動振幅が大きいと、高倍率での観察やオートフォーカスをするために、ガラス基板の振動が収まるまで待たなければならず、検査時間の増大が懸念される。
【０００５】
このようなガラス基板のたわみや振動を防止するために、一般的には、検査装置のガラス基板ホルダに桟を設け、その桟に複数のピンを立て、そのピンでガラス基板を支えるピン支え方式が用いられている。
【０００６】
また、特開平１１−９４７５５号公報においては、顕微鏡の観察光軸上で基板を押さえ付ける機構を設け、局部的に振動振幅を低減させる構造が開示されている。
【０００７】
【発明が解決しようとする課題】
上述した従来の技術により、ガラス基板の振動の低減は可能であるが、それぞれ以下のような問題がある。
【０００８】
特開平１１−９４７５５号公報においては、メカニズムが複雑になるためコストの上昇が懸念される。
【０００９】
さらに、特開平１０−１１８８６９号公報においては、ガラス基板の一次共振周波数を上げることにより振動振幅を小さくすることは可能であるが、中央部の振動の腹は存在する。このため、急速に大判化するガラス基板に対しては、拘束がゆるくなる分、たわみが大きくなったり、ガラス基板の自重により十分な吸着力が得られないといった問題がある。
【００１０】
本発明の目的は、コストの上昇を押さえながら、支持する基板のたわみと振動振幅を低減させる基板支持装置を提供することにある。
【００１１】
【課題を解決するための手段】
上記課題を解決し目的を達成するために、本発明の基板支持装置は以下の如く構成されている。
【００１２】
本発明の基板支持装置は、透明基板を透過光により観察する際に支持する基板支持装置において、前記透明基板の周縁を吸着載置する開口部を有する基板ホルダ枠と、中空の角材からなり、前記基板ホルダ枠の前記開口部内に掛け渡されるように複数配置され前記透明基板を前記開口部内で支持する桟と、前記桟に複数配置され前記透明基板を水平に支持するピンとを備え、前記桟の断面形状が前記透明基板に対して平行する幅寸法より前記透明基板面に対して直交する高さ寸法を長く形成し、該各桟毎に幅寸法、高さ寸法、前記角材を構成する高減衰部材の材質、及び前記角材を構成する板材の板厚のいずれか一つを変えて共振周波数を異ならせることを特徴とする。
また、本発明の基板支持装置は、透明基板を透過光により観察する際に支持する基板支持装置において、前記透明基板の周縁を吸着載置する開口部を有する基板ホルダ枠と、間の空いた二枚の板部材からなり、前記基板ホルダ枠の前記開口部内に掛け渡されるように複数配置され前記透明基板を前記開口部内で支持する桟と、前記桟に複数配置され前記透明基板を水平に支持するピンとを備え、前記桟の断面形状が前記透明基板に対して平行する幅寸法より前記透明基板面に対して直交する高さ寸法を長く形成し、該各桟毎に幅寸法、高さ寸法、及び前記板部材を構成する高減衰部材の材質のいずれか一つを変えて共振周波数を異ならせることを特徴とする。
また、本発明の基板支持装置は、透明基板を透過光により観察する際に支持する基板支持装置において、前記透明基板の周縁を吸着載置する開口部を有する基板ホルダ枠と、中空の角材からなり、前記基板ホルダ枠の前記開口部内に掛け渡されるように複数配置され前記透明基板を前記開口部内で支持する桟と、前記桟に複数配置され前記透明基板を水平に支持するピンとを備え、前記桟の断面形状が前記透明基板に対して平行する幅寸法より前記透明基板面に対して直交する高さ寸法を長く形成し、前記桟の中空部分に挿入される高減衰部材の挿入パターンを変えて共振周波数を異ならせることを特徴とする。
また、本発明の基板支持装置は、透明基板を透過光により観察する際に支持する基板支持装置において、前記透明基板の周縁を吸着載置する開口部を有する基板ホルダ枠と、間の空いた二枚の板部材からなり、前記基板ホルダ枠の前記開口部内に掛け渡されるように複数配置され前記透明基板を前記開口部内で支持する桟と、前記桟に複数配置され前記透明基板を水平に支持するピンとを備え、前記桟の断面形状が前記透明基板に対して平行する幅寸法より前記透明基板面に対して直交する高さ寸法を長く形成し、前記桟の二枚の板部材の間に挿入される高減衰部材の挿入パターンを変えて共振周波数を異ならせることを特徴とする。
【００１８】
上記手段を講じた結果、以下のような作用を奏する。
【００１９】
本発明の基板支持装置によれば、桟によって透過光が遮られることを最小限に抑えるべく桟の幅を狭くし、それに対し桟の高さを大きくすることにより、コストをかけずにガラス基板の方向に発生する低次の振動周波数を高くすることができる。その結果、ガラス基板のたわみを低減できるとともに、ガラス基板は基板面に垂直な方向の振動モードを有するため、ピン等を介して載置されるガラス基板が桟の振動の影響を受けにくくなる。さらに、ダウンフローなどで発生するガラス基板の桟の方向へ向かう平面内の振動も、桟の振動周波数を高くすることができるため、低減することが可能になる。
【００２０】
【発明の実施の形態】
以下、本発明の実施の形態を図面を参照して説明する。
【００２１】
（第１の実施の形態）
図１は、本発明の第１の実施の形態に係る基板支持装置の構成を示す図であり、（ａ）は平面図、（ｂ）は（ａ）のＡ−Ａ断面図である。なお、この基板支持装置は、ガラス基板等の検査を行なう基板検査装置に備えられ、振動防止機構を有している。
【００２２】
図１に示すように、ガラス基板ホルダ１０を構成する枠１は、長辺部材１１，１２と短辺部材２１，２２からなる四角形状をなす。枠１の対向する長辺部材１１，１２には、角材からなる複数の桟３がほぼ平行をなすよう掛け渡されている。各桟３上には、透明基板として、例えば液晶ディスプレイのガラス基板６を水平に保持する複数のピン４がほぼ等間隔で設けられている。各ピン４の頂部は基板に傷が付かないように球面をなしている。また、長辺部材１１，１２と短辺部材２１，２２の所定位置には、枠１に載置されるガラス基板６の周縁部を吸着するための複数の吸着パッド５が設けられている。
【００２３】
ガラス基板６は、搬送ロボットにより枠１の長辺部材１１，１２と短辺部材２１，２２及び各ピン４の上に載置される。そしてガラス基板６は、図示しない基準位置決め機構により位置決めされた後、ガラス基板６の縁付近が各吸着パッド５を介して吸引されることで、枠１上に吸着保持される。上記基板検査装置では、ガラス基板６を下方からの透過照明光により観察する。各桟３の幅は、透過照明光が遮られることを抑えるべく狭くすることが要望されている。
【００２４】
上記のようにガラス基板６が枠１に載置された場合に、ガラス基板６を各ピン４の頂部で支えることで、枠１の内側で生じるガラス基板６の重力によるたわみと振動を低減する。桟３の断面形状は、ガラス基板６に対して垂直な辺の長さｈ（高さ）を、ガラス基板６に対して平行な辺の長さｂ（幅）より長くする。
【００２５】
以上のような構成により、各桟３は両持ち梁として両端が枠１に完全に拘束され、ガラス基板６の自重が各桟３に均等にかかっているとした場合、各桟３の中央部でのガラス基板６のたわみ量δmaxは、
δmax＝５／３８４（ｐＬ⁴／ＥＩ）
となる。ここで、Ｉ:桟３の断面二次モーメント、p:桟３にかかっているガラス基板６の自重による圧力、Ｌ:桟３の長さ、Ｅ: 桟３の縦弾性係数である。
【００２６】
また、桟３の断面二次モーメントＩは、
Ｉ＝ｂｈ³／１２
となる。ここで、ｂ:桟３の幅、ｈ:桟３の高さである。したがって、たわみを小さくするためには、桟３の幅ｂに対して高さｈを大きくした方がよいことが分かる。
【００２７】
図２の（ａ），（ｂ）は、桟３の１次モード振動がガラス基板６に対して平行な方向である状態を示すモード図である。上述した構成にて、図２の（ａ）に示すように桟３の幅ｂよりも高さｈを大きくした条件下では、図２の（ｂ）に示すように桟３ではその高さ方向に対して直角な方向（横方向）に一次の共振モードが存在する。また、ガラス基板６は基板面に対して垂直な方向（縦方向）に振動モードが存在する。すなわち、桟３の振動方向とガラス基板６の振動方向は、低次の場合に異なる。したがって、桟３とガラス基板６の共振周波数が同じとしても、振動の方向が異なるので、ガラス基板２は桟３の振動を、また桟３はガラス基板２の振動を受けにくくなる。
【００２８】
また、桟３を構成する材料の減衰能力が高くなれば、振動振幅も小さくなり、桟３そのものの振動がガラス基板６に与える影響も小さくなる上、ガラス基板６の振動が桟３に伝達された場合もその振動を桟３で吸収することが可能になり、ガラス基板６の振動を低減することが可能になる。このため桟３を構成する材料は、セラミック、プラスチック等の高減衰材料やその複合材料からなる。さらに、桟３のガラス基板６に対して垂直な方向の一次共振周波数を、ガラス基板６の垂直方向の１次共振周波数よりも２倍以上高くすることで、桟３からガラス基板６への振動伝達、及びガラス基板６から桟３への振動伝達を抑制することができる。また、桟３のガラス基板６に対して平行な方向の共振周波数とガラス基板６の垂直方向の共振周波数とをさらに２倍以上離すことで、より大きなガラス基板６の振動を低減させることが可能になる。
【００２９】
なお、各桟３の幅ｂと高さｈの比率は全て同一でなくてもよく、振幅の大きい中央部または基板の振動の腹に対応する部分などガラス基板の振動状態に応じて各桟３毎に「ｂ＜ｈ」の条件下で比率が異なってもよい。また、「ｂ＜ｈ」の条件下で異なる比率を有する桟３を複数用意し、例えば第１の比率の桟３と第２の比率の桟３とを、枠１に対して交互または配列を変えて交換可能に配置してもよい。このように桟３の幅ｂと高さｈの比率を変える場合、桟３による透過照明の遮光の影響を極力小さくするために各桟３の幅ｂをピン４を支える最小限の幅寸法に抑え、桟３の高さｈを変えることが望ましい。この場合、各桟３に取付けられるピン４を共通化させるために、各桟３の上面の取付部の高さを枠１の上面から一定にし、各桟３の下端の高さが異なるようにする。
【００３０】
また、桟３の表面にメッキ処理をしたりゴムなどの防振材（高減衰材料）を塗布することにより、ガラス基板６の振動をより一層低減することができる。
【００３１】
（第２の実施の形態）
図３は、本発明の第２の実施の形態に係る基板支持装置を構成する桟の正断面図である。図３に示す桟３１は、上記第１の実施の形態に示した桟３に中空部が設けられた筒状の角材からなり、その中空部に中空材７が一様に挿入された構成をなしている。
【００３２】
図４は、桟３１の１次モード振動がガラス基板６に対して平行な方向である状態を示すモード図である。図４に示すように、桟３１の断面形状が中空部を有する場合でも、桟３の幅ｂよりも高さｈを大きくした条件下では、桟３１のガラス基板６に対して垂直な方向の振動モードを抑えることができる。
【００３３】
さらに、この中空材７の中に、ゲルやゴム、砂などの防振材（高減衰材料）を充填することにより、ガラス基板６の振動をより一層低減することができる。
【００３４】
なお、中空部を形成している各桟３１の板厚は全て同一でなくてもよく、各桟３１毎に板の厚さが異なってもよい。また、異なる板厚を有する桟３１を複数用意し、例えば第１の板厚の桟３１と第２の板厚の桟３１とを、枠１に対して交換可能に配置してもよい。また、桟３１の板の厚さを変える他に、この桟３１の中空部に挿入される中空材７の厚さや種類を変えることもできる。これにより、各桟３１毎の共振周波数が異なるため、桟３１同士が共振することなく、ガラス基板６の振動をより一層低減することができる。
【００３５】
図５の（ａ），（ｂ）は、図３に示した桟３１の変形例を示す側断面図である。図５の（ａ），（ｂ）に示す桟３２は、桟３１と同様の中空部に中空材７が不連続に挿入された構成をなしている。そして、図５の（ａ），（ｂ）の各桟３２は、互いに中空材７の挿入パターンが異なっている。このように各桟３２毎に中空材７の挿入パターンを異ならせることにより、各桟３２毎の共振周波数が異なるため、ガラス基板６の振動をより一層低減することができる。また、中空材７の挿入パターンの異なる桟３２を複数用意し、例えば第１の挿入パターンの桟３２と第２の挿入パターンの桟３２とを、枠１に対して交換可能に配置してもよい。
【００３６】
図６は、図３に示した桟３１の変形例を示す図であり、（ａ）は正断面図、（ｂ）は側断面図である。図６に示す桟３３は、二枚の板部材３３１，３３２の間にゴムなどの防振材８が挟まれた構成をなし、桟３３の幅ｂよりも高さｈを大きくしている。このような構成でも、ガラス基板６の振動をより一層低減することができる。
【００３７】
なお、本発明は上記各実施の形態のみに限定されず、要旨を変更しない範囲で適宜変形して実施できる。
【００３８】
【発明の効果】
本発明によれば、支持する基板のたわみと振動を低減させる基板支持装置を提供できる。すなわち、基板を検査、観察する際の振動の影響を最小限に抑えるとともに、発生した振動をすばやく低減することが可能になるため、検査、観察にかかる時間の短縮化を図ることができる。
【図面の簡単な説明】
【図１】本発明の第１の実施の形態に係る基板支持装置の構成を示す図。
【図２】本発明の第１の実施の形態に係る桟の１次モード振動を示すモード図。
【図３】本発明の第２の実施の形態に係る基板支持装置を構成する桟の正断面図。
【図４】本発明の第２の実施の形態に係る桟の１次モード振動を示すモード図。
【図５】本発明の第２の実施の形態に係る桟の変形例を示す図。
【図６】本発明の第２の実施の形態に係る桟の変形例を示す図。
【符号の説明】
１…枠
１０…ガラス基板ホルダ
１１，１２…長辺部材
２１，２２…短辺部材
３，３１，３２，３３…桟
３３１，３３２…板部材
４…ピン
５…吸着パッド
６…ガラス基板
７…中空材
８…防振材[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a substrate support device that supports a transparent substrate used in a liquid crystal display panel, a plasma display panel (PDP), and the like when inspecting and observing.
[0002]
[Prior art]
In recent years, glass substrates used for liquid crystal display panels have become larger and thinner. Along with this, vibrations that occur when a glass substrate is inspected and observed by an inspection apparatus are becoming increasingly problematic. For glass substrates, various inspections using a microscope or the like are generally performed for quality control. These inspections are performed in a state where the glass substrate is placed on a large stage of an inspection apparatus.
[0003]
By the way, such an inspection of the glass substrate is performed in a clean room in which a certain level of wind from the ceiling to the floor is called for downflow for dust prevention. However, the downflow wind may directly hit the glass substrate surface during inspection, and this may be a vibration source of the substrate. In addition, since the inspection apparatus is installed on a grating floor that allows the downflow to pass through, vibrations of other apparatuses are transmitted to the inspection apparatus through the grating floor, which may be a vibration source of the substrate.
[0004]
In addition, the glass substrate has a very small thickness (for example, 0.7 mm) with respect to its size, and is likely to bend (bend) or vibrate. Furthermore, there is a problem that the resonance frequency of the glass substrate itself is lowered, and as a result, the vibration amplitude is increased. If the vibration amplitude is large, it is necessary to wait until the vibration of the glass substrate is settled in order to perform observation at a high magnification and auto focus, which may increase the inspection time.
[0005]
In order to prevent such deflection and vibration of the glass substrate, a pin support system is generally used in which a cross is provided on the glass substrate holder of the inspection apparatus, a plurality of pins are set up on the cross, and the glass substrate is supported by the pins. Is used.
[0006]
Japanese Patent Application Laid-Open No. 11-94755 discloses a structure in which a mechanism for pressing the substrate on the observation optical axis of a microscope is provided to locally reduce the vibration amplitude.
[0007]
[Problems to be solved by the invention]
Although the vibration of the glass substrate can be reduced by the conventional technique described above, there are the following problems.
[0008]
In Japanese Patent Application Laid-Open No. 11-94755, the mechanism is complicated, and there is a concern about an increase in cost.
[0009]
Furthermore, in Japanese Patent Laid-Open No. 10-118869, it is possible to reduce the vibration amplitude by increasing the primary resonance frequency of the glass substrate, but there is a vibration belly at the center. For this reason, there is a problem that a glass substrate that becomes large in size rapidly has a large amount of deflection due to loosening of the restraint, and a sufficient adsorption force cannot be obtained due to its own weight.
[0010]
An object of the present invention is to provide a substrate support device that reduces the deflection and vibration amplitude of a substrate to be supported while suppressing an increase in cost.
[0011]
[Means for Solving the Problems]
In order to solve the above problems and achieve the object, the substrate support apparatus of the present invention is configured as follows.
[0012]
The substrate support device of the present invention comprises a substrate holder frame having an opening for adsorbing and mounting the periphery of the transparent substrate, and a hollow square member , in the substrate support device that supports the transparent substrate when observing the transparent substrate with transmitted light , A plurality of bars arranged so as to be spanned in the opening of the substrate holder frame and supporting the transparent substrate within the opening; and a plurality of pins disposed on the bar and supporting the transparent substrate horizontally. The cross sectional shape of the cross section is formed so that the height dimension orthogonal to the transparent substrate surface is longer than the width dimension parallel to the transparent substrate, and the width dimension, the height dimension, and the height of the square member are formed for each of the crosspieces. The resonance frequency is varied by changing any one of the material of the damping member and the plate thickness of the plate constituting the square member .
The substrate support device of the present invention is a substrate support device that supports a transparent substrate when observing the transparent substrate with transmitted light, and a substrate holder frame having an opening for adsorbing and mounting the periphery of the transparent substrate. It is composed of two plate members, and is arranged in plural so as to be spanned in the opening of the substrate holder frame and supports the transparent substrate in the opening. A cross-sectional shape of the crosspiece is formed so that a height dimension orthogonal to the transparent substrate surface is longer than a width dimension parallel to the transparent substrate, and a width dimension and a height are provided for each of the crosspieces. The resonance frequency is varied by changing any one of the dimensions and the material of the high attenuation member constituting the plate member.
The substrate support device of the present invention is a substrate support device that supports a transparent substrate when observing the transparent substrate with transmitted light, and includes a substrate holder frame having an opening for adsorbing and mounting the periphery of the transparent substrate, and a hollow square member. A plurality of bars arranged so as to be spanned in the opening of the substrate holder frame and supporting the transparent substrate in the opening, and a plurality of pins disposed on the bar and horizontally supporting the transparent substrate, The cross-sectional shape of the crosspiece is formed such that the height dimension orthogonal to the transparent substrate surface is longer than the width dimension parallel to the transparent substrate, and an insertion pattern of the high attenuation member inserted into the hollow portion of the crosspiece is provided. It is characterized by changing the resonance frequency.
The substrate support device of the present invention is a substrate support device that supports a transparent substrate when observing the transparent substrate with transmitted light, and a substrate holder frame having an opening for adsorbing and mounting the periphery of the transparent substrate. It is composed of two plate members, and is arranged in plural so as to be spanned in the opening of the substrate holder frame and supports the transparent substrate in the opening. A cross-sectional shape of the crosspiece is formed so that a height dimension orthogonal to the transparent substrate surface is longer than a width dimension parallel to the transparent substrate, and between the two plate members of the crosspiece The resonance frequency is made different by changing the insertion pattern of the high-attenuation member inserted into.
[0018]
As a result of taking the above-mentioned means, the following effects are obtained.
[0019]
According to the substrate support apparatus of the present invention, the glass substrate is reduced in cost by reducing the width of the beam and minimizing the height of the beam to minimize the blockage of transmitted light by the beam. The low-order vibration frequency generated in the direction can be increased. As a result, the deflection of the glass substrate can be reduced, and the glass substrate has a vibration mode in a direction perpendicular to the substrate surface, so that the glass substrate placed via pins or the like is not easily affected by the vibration of the crosspiece. Furthermore, the vibration in the plane toward the crosspiece of the glass substrate generated by downflow or the like can be reduced because the vibration frequency of the crosspiece can be increased.
[0020]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0021]
(First embodiment)
1A and 1B are diagrams showing a configuration of a substrate support apparatus according to a first embodiment of the present invention, in which FIG. 1A is a plan view and FIG. 1B is a cross-sectional view taken along line AA in FIG. In addition, this board | substrate support apparatus is equipped with the board | substrate inspection apparatus which test | inspects a glass substrate etc., and has a vibration prevention mechanism.
[0022]
As shown in FIG. 1, the frame 1 constituting the glass substrate holder 10 has a rectangular shape composed of long side members 11 and 12 and short side members 21 and 22. A plurality of crosspieces 3 made of square bars are stretched across the long side members 11 and 12 facing the frame 1 so as to be substantially parallel. On each crosspiece 3, as a transparent substrate, for example, a plurality of pins 4 for holding a glass substrate 6 of a liquid crystal display horizontally are provided at substantially equal intervals. The top of each pin 4 is spherical so that the substrate is not damaged. A plurality of suction pads 5 are provided at predetermined positions of the long side members 11 and 12 and the short side members 21 and 22 for sucking the peripheral edge of the glass substrate 6 placed on the frame 1.
[0023]
The glass substrate 6 is placed on the long side members 11 and 12 and the short side members 21 and 22 and the pins 4 of the frame 1 by the transfer robot. After the glass substrate 6 is positioned by a reference positioning mechanism (not shown), the vicinity of the edge of the glass substrate 6 is sucked and held on the frame 1 through the suction pads 5. In the substrate inspection apparatus, the glass substrate 6 is observed with transmitted illumination light from below. The width of each crosspiece 3 is required to be narrow so as to prevent the transmitted illumination light from being blocked.
[0024]
When the glass substrate 6 is placed on the frame 1 as described above, the glass substrate 6 is supported by the top of each pin 4 to reduce the deflection and vibration caused by the gravity of the glass substrate 6 that occurs inside the frame 1. . The cross-sectional shape of the crosspiece 3 is such that the length h (height) of the side perpendicular to the glass substrate 6 is longer than the length b (width) of the side parallel to the glass substrate 6.
[0025]
With the above configuration, each crosspiece 3 is a cantilever beam, and both ends are completely restrained by the frame 1, and the weight of the glass substrate 6 is evenly applied to each crosspiece 3. The deflection amount δmax of the glass substrate 6 at
δmax = 5/384 (pL ⁴ / EI)
It becomes. Here, I: sectional moment of the crosspiece 3, p: pressure due to the weight of the glass substrate 6 applied to the crosspiece 3, L: length of the crosspiece 3, E: longitudinal elastic modulus of the crosspiece 3.
[0026]
Moreover, the cross-sectional secondary moment I of the crosspiece 3 is
I = bh ^3/12
It becomes. Here, b is the width of the crosspiece 3 and h is the height of the crosspiece 3. Therefore, it can be seen that it is better to increase the height h with respect to the width b of the crosspiece 3 in order to reduce the deflection.
[0027]
FIGS. 2A and 2B are mode diagrams showing a state in which the primary mode vibration of the crosspiece 3 is in a direction parallel to the glass substrate 6. In the configuration described above, under the condition that the height h is larger than the width b of the crosspiece 3 as shown in FIG. 2 (a), the height direction of the crosspiece 3 is shown in FIG. 2 (b). A first-order resonance mode exists in a direction perpendicular to the direction (lateral direction). The glass substrate 6 has a vibration mode in a direction (longitudinal direction) perpendicular to the substrate surface. That is, the vibration direction of the crosspiece 3 and the vibration direction of the glass substrate 6 are different in a low-order case. Therefore, even if the crosspiece 3 and the glass substrate 6 have the same resonance frequency, the directions of vibration are different, so that the glass substrate 2 is less susceptible to vibration of the crosspiece 3 and the crosspiece 3 is less susceptible to vibration of the glass substrate 2.
[0028]
Further, if the damping capacity of the material constituting the crosspiece 3 is increased, the vibration amplitude is reduced, the influence of the vibration of the crosspiece 3 itself on the glass substrate 6 is reduced, and the vibration of the glass substrate 6 is transmitted to the crosspiece 3. In this case, the vibration can be absorbed by the crosspiece 3, and the vibration of the glass substrate 6 can be reduced. For this reason, the material which comprises the crosspiece 3 consists of high damping materials, such as a ceramic and a plastics, and its composite material. Further, the primary resonance frequency in the direction perpendicular to the glass substrate 6 of the crosspiece 3 is set to be twice or more higher than the primary resonance frequency in the vertical direction of the glass substrate 6, thereby vibration from the crosspiece 3 to the glass substrate 6. Transmission and vibration transmission from the glass substrate 6 to the crosspiece 3 can be suppressed. Further, by further separating the resonance frequency in the direction parallel to the glass substrate 6 of the crosspiece 3 from the resonance frequency in the vertical direction of the glass substrate 6, it is possible to reduce the vibration of the larger glass substrate 6. become.
[0029]
Note that the ratio of the width b to the height h of each crosspiece 3 does not have to be the same, and each crosspiece 3 depends on the vibration state of the glass substrate such as the central portion having a large amplitude or the portion corresponding to the antinode of the substrate vibration. Each ratio may be different under the condition of “b <h”. Also, a plurality of crosspieces 3 having different ratios under the condition of “b <h” are prepared. For example, the crosspieces 3 having the first ratio and the crosspieces 3 having the second ratio are alternately or arranged with respect to the frame 1. You may change and arrange | position so that replacement | exchange is possible. When the ratio of the width b to the height h of the crosspiece 3 is changed in this way, the width b of each crosspiece 3 is set to the minimum width dimension that supports the pins 4 in order to minimize the influence of the light transmitted by the crosspiece 3 from being blocked. It is desirable to suppress and change the height h of the crosspiece 3. In this case, in order to make the pins 4 attached to each crosspiece 3 common, the height of the mounting portion on the top surface of each crosspiece 3 is made constant from the top surface of the frame 1 and the height of the lower end of each crosspiece 3 is different. To do.
[0030]
Moreover, the vibration of the glass substrate 6 can be further reduced by plating the surface of the crosspiece 3 or applying a vibration damping material (high damping material) such as rubber.
[0031]
(Second Embodiment)
FIG. 3 is a front sectional view of a crosspiece constituting the substrate support apparatus according to the second embodiment of the present invention. The crosspiece 31 shown in FIG. 3 is composed of a cylindrical square member in which a hollow portion is provided in the crosspiece 3 shown in the first embodiment, and the hollow member 7 is uniformly inserted into the hollow portion. There is no.
[0032]
FIG. 4 is a mode diagram illustrating a state in which the primary mode vibration of the crosspiece 31 is parallel to the glass substrate 6. As shown in FIG. 4, even when the cross-sectional shape of the crosspiece 31 has a hollow portion, under the condition that the height h is larger than the width b of the crosspiece 3, the cross-sectional shape of the crosspiece 31 is perpendicular to the glass substrate 6. Vibration mode can be suppressed.
[0033]
Furthermore, the vibration of the glass substrate 6 can be further reduced by filling the hollow material 7 with a vibration-proof material (high damping material) such as gel, rubber, or sand.
[0034]
It should be noted that the thicknesses of the crosspieces 31 forming the hollow portion may not all be the same, and the thicknesses of the plates may be different for each crosspiece 31. A plurality of crosspieces 31 having different plate thicknesses may be prepared, and for example, the first crosspiece 31 and the second crosspiece 31 may be arranged to be exchangeable with respect to the frame 1. In addition to changing the thickness of the plate of the crosspiece 31, the thickness and type of the hollow member 7 inserted into the hollow portion of the crosspiece 31 can be changed. Thereby, since the resonance frequency for each crosspiece 31 is different, the vibration of the glass substrate 6 can be further reduced without the crosspieces 31 resonating.
[0035]
(A), (b) of FIG. 5 is a sectional side view which shows the modification of the crosspiece 31 shown in FIG. A crosspiece 32 shown in FIGS. 5A and 5B has a configuration in which the hollow material 7 is inserted discontinuously in the same hollow portion as the crosspiece 31. And each crosspiece 32 of FIG. 5 (a), (b) differs in the insertion pattern of the hollow material 7 mutually. Thus, by making the insertion pattern of the hollow material 7 different for each crosspiece 32, the resonance frequency for each crosspiece 32 is different, so that the vibration of the glass substrate 6 can be further reduced. Alternatively, a plurality of crosspieces 32 having different insertion patterns of the hollow material 7 may be prepared, and for example, the first insertion pattern crosspiece 32 and the second insertion pattern crosspiece 32 may be arranged to be exchangeable with respect to the frame 1. Good.
[0036]
6A and 6B are views showing a modification of the crosspiece 31 shown in FIG. 3, in which FIG. 6A is a front sectional view and FIG. 6B is a side sectional view. The crosspiece 33 shown in FIG. 6 has a configuration in which a vibration isolating material 8 such as rubber is sandwiched between two plate members 331 and 332, and the height h is larger than the width b of the crosspiece 33. Even with such a configuration, the vibration of the glass substrate 6 can be further reduced.
[0037]
In addition, this invention is not limited only to said each embodiment, In the range which does not change a summary, it can deform | transform suitably and can implement.
[0038]
【The invention's effect】
ADVANTAGE OF THE INVENTION According to this invention, the board | substrate support apparatus which reduces the bending and vibration of the board | substrate to support can be provided. That is, it is possible to minimize the influence of vibration when inspecting and observing the substrate, and to quickly reduce the generated vibration, so that the time required for inspection and observation can be shortened.
[Brief description of the drawings]
FIG. 1 is a diagram showing a configuration of a substrate support apparatus according to a first embodiment of the present invention.
FIG. 2 is a mode diagram showing primary mode vibration of the crosspiece according to the first embodiment of the present invention.
FIG. 3 is a front sectional view of a crosspiece constituting a substrate support apparatus according to a second embodiment of the present invention.
FIG. 4 is a mode diagram showing first-order mode vibration of a crosspiece according to a second embodiment of the present invention.
FIG. 5 is a view showing a modification of the crosspiece according to the second embodiment of the present invention.
FIG. 6 is a view showing a modified example of the crosspiece according to the second embodiment of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Frame 10 ... Glass substrate holder 11, 12 ... Long side member 21,22 ... Short side member 3, 31, 32, 33 ... Crosspiece 331,332 ... Plate member 4 ... Pin 5 ... Adsorption pad 6 ... Glass substrate 7 ... Hollow material 8 ... Vibration-proof material

Claims

In the substrate support device that supports the transparent substrate when observing with the transmitted light,
A substrate holder frame having an opening for adsorbing and mounting the peripheral edge of the transparent substrate, and a hollow square member, and a plurality of the transparent substrates arranged in the opening of the substrate holder frame are arranged in the opening. A plurality of supporting bars, and a plurality of pins arranged on the bars to horizontally support the transparent substrate,
The cross-sectional shape of the crosspiece is formed so that the height dimension orthogonal to the transparent substrate surface is longer than the width dimension parallel to the transparent substrate, and the width dimension, the height dimension, and the square member are configured for each crosspiece. A substrate support device, wherein the resonance frequency is varied by changing any one of a material of the high attenuation member and a plate thickness of the plate constituting the square member .

2. The substrate support apparatus according to claim 1, wherein a hollow portion of the crosspiece is filled with a high attenuation material.

In the substrate support device that supports the transparent substrate when observing with the transmitted light,
A substrate holder frame having an opening for adsorbing and mounting the peripheral edge of the transparent substrate, and two spaced plate members, and a plurality of the transparent holders arranged so as to be spanned in the opening of the substrate holder frame A crosspiece that supports the substrate within the opening, and a plurality of pins that are arranged on the crosspiece and horizontally support the transparent substrate,
The cross-sectional shape of the crosspiece is formed so that the height dimension orthogonal to the transparent substrate surface is longer than the width dimension parallel to the transparent substrate, and the width dimension, the height dimension, and the plate member for each of the crosspieces A substrate support device characterized in that the resonance frequency is varied by changing any one of the materials of the high-attenuation members constituting the substrate.

4. The substrate support apparatus according to claim 3, wherein a high attenuation material is sandwiched between the two plate members.

In the substrate support device that supports the transparent substrate when observing with the transmitted light,
A substrate holder frame having an opening for adsorbing and mounting the peripheral edge of the transparent substrate, and a hollow square member, and a plurality of the transparent substrates arranged in the opening of the substrate holder frame are arranged in the opening. A plurality of supporting bars, and a plurality of pins arranged on the supporting bars to horizontally support the transparent substrate,
The cross-sectional shape of the crosspiece is formed such that the height dimension orthogonal to the transparent substrate surface is longer than the width dimension parallel to the transparent substrate, and an insertion pattern of the high attenuation member inserted into the hollow portion of the crosspiece is provided. A substrate support apparatus characterized in that the resonance frequency is varied by changing the substrate frequency.

In the substrate support device that supports the transparent substrate when observing with the transmitted light,
A substrate holder frame having an opening for adsorbing and mounting the peripheral edge of the transparent substrate, and two spaced plate members, and a plurality of the transparent holders arranged so as to be spanned in the opening of the substrate holder frame A crosspiece that supports the substrate within the opening, and a plurality of pins that are arranged on the crosspiece and horizontally support the transparent substrate,
The cross-sectional shape of the crosspiece is formed so that the height dimension orthogonal to the transparent substrate surface is longer than the width dimension parallel to the transparent substrate, and is inserted between the two plate members of the crosspiece. A substrate support apparatus, wherein the resonance frequency is varied by changing a member insertion pattern.

2. The crosspieces according to claim 1, wherein the height of the crosspieces is changed to change the resonance frequency so that the top surface of each crosspiece is aligned at a certain height from the top surface of the substrate holder frame. 7. The substrate support apparatus according to any one of claims 6 to 6 .