CN1288435C - Substrate checking apparatus - Google Patents
Substrate checking apparatus Download PDFInfo
- Publication number
- CN1288435C CN1288435C CNB031532381A CN03153238A CN1288435C CN 1288435 C CN1288435 C CN 1288435C CN B031532381 A CNB031532381 A CN B031532381A CN 03153238 A CN03153238 A CN 03153238A CN 1288435 C CN1288435 C CN 1288435C
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- China
- Prior art keywords
- platform
- substrate
- back lighting
- inspection platform
- lighting device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8835—Adjustable illumination, e.g. software adjustable screen
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Signal Processing (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
Apparatus for inspecting a flat substrate for existence of defect including a base part in an upper part of a body, an inspection stage mounted on the base part, having one end to be rotatable around a rotation shaft for detachably placing a substrate to be inspected thereon, a turning means for turning the inspection stage to a required angle, and a back light unit for directing a light to the substrate to be inspected on the inspection stage from a rear side of the inspection stage, thereby permitting more accurate defect verification in making macro and micro observations by detachably attaching a back light unit just rear of the inspection stage the substrate is placed thereon for directing a bright light to entire surface of the substrate to be inspected.
Description
Technical field
The present invention relates to the testing fixture of substrate, particularly with the naked eye check the device of defective of the substrate of LCD (LCD), plasma display (PDP) or like.
Background technology
As everyone knows, the device at the substrate that is used for checking LCD (LCD), plasma display (PDP) or like has a kind of device to change macroscopic observation into microscopic observation.In macroscopic observation, illuminating ray is directly projected on the surface of glass substrate, and observes rejected region, for example crackle or spot.In microscopic observation, more accurate observation is amplified and carried out to the defective of checking out in the macroscopic observation.
In the one type of prior art syringe that is used for checking substrate, disclosed a kind of device among the Japan publication No.H5-322783, wherein substrate be placed on one can be on the X-Y platform that the X-Y direction moves, and this X-Y platform can move in a macroscopic observation system with macroscopic observation function and the microscopic observation system with microscopic observation function bidimensional, and this device is not suitable for checking that present size trends towards the flat-panel screens that constantly increases.
In order to solve the problem of the device of checking substrate, Korean Utility Model publication number 20-0238929 has disclosed a kind of device in (October 8 calendar year 2001), wherein, substrate is placed on the rotating platform, the state that makes its inclination if said apparatus is in that the macroscopic observation platform is rotated can carry out the macroscopic observation check by using the illuminating ray from the trend of purchasing substrate of light source.Be set under the horizontal state at a rotatable platform, when moving in the horizontal direction the microscopic observation system that on rotatable platform, has the illumination of providing for oneself, can carry out the microscopic observation check.
Yet, foregoing problem of one type of prior art syringe existence that is used to check substrate, that is exactly because illuminating ray is below or top from substrate projects on the whole surface of the substrate (substrate to be checked) that will check apart from the far position of substrate, cause total illumination insufficient, make the work for inspection of the defective that exists very difficult.
Further, because illumination is not enough, being used for of prior art checks the device of substrate not check the state that charges into liquid crystal between the LCD two layers of substrate, need separately carry out the inspection of liquid crystal inspection and substrate surface defective, will expend more supervision time and expense like this.
Summary of the invention
Therefore, the present invention relates to a kind of device that is used for substrate examination, this device has solved the one or more problems that produce owing to the restriction of prior art and defective effectively.
An object of the present invention is to provide a kind of device that is used for substrate examination, this device can be confirmed defective more accurately in both macro and micro is observed.
Other characteristics of the present invention and advantage will illustrate in the following description that those of ordinary skills are by reading following content or by implementing the present invention, being appreciated that or recognizing the features and advantages of the present invention.Purpose of the present invention and other advantage can realize by the structure of institute's sets forth in detail in instructions and the accompanying drawing and obtain.
In order to reach these purposes and other advantage and,, be used to check the device of the defective that planar substrates exists to comprise: basic components on body top as following embodiment embodied and prove absolutely according to purpose of the present invention; An inspection platform that is installed in the substrate that is used for placing separably examine on the basic components, this end of checking platform can rotate around a rotation axis; A wheelwork that is used for described inspection platform is turned to the angle of needs; A back lighting device is used for light is projected the substrate of checking on the platform to be checked from the back side of described inspection platform.Can make defect confirmation more accurate by back lighting device being installed like this at the rear portion of the inspection platform of laying substrate.
To the microscopic observation inspection, a microscopic observation device is arranged, comprise: the microscope that can move forward and backward along the upper level direction of basic components by mobile device, when moved at the top of the substrate of microscopic observation device on the inspection platform that horizontal direction is placed, the microscopic observation device can carry out microscopic observation like this.
Back lighting device can be on basic components along on/following direction is moved, and the discerptible rear portion of checking platform that is installed in.For this reason, this device further comprises and is used for described back lighting device is installed to the rear portion of described inspection platform or (fixing) tripping device that splits from the rear portion of checking platform.
By described back lighting device being installed to described inspection platform or the tripping device from checking that platform splits, in macro check, this back lighting device is installed to and is checked on the platform, with the light of guaranteeing to provide a large amount of.In micro, this back lighting device separates with the inspection platform, to guarantee providing to be used in the space of checking mobile emissive lighting light source between platform and the back lighting device.
Be appreciated that above-mentioned explanation of the present invention and following detailed description all are illustrative and indicative, its purpose is to provide further explanation to the scope of protection of present invention.
Description of drawings
The present invention is further detailed by accompanying drawing, and these accompanying drawings describe embodiments of the invention with instructions in conjunction with in this application and constitute the application's a part, illustrate inventive concept of the present invention.In the accompanying drawings:
Fig. 1 is the front view of the device that is used for substrate examination according to a preferred embodiment of the present invention.
Fig. 2 is the planimetric map of platform that is used for the device of substrate examination among Fig. 1.
Fig. 3 is the upward view of the platform among Fig. 2.
Fig. 4 is the side view of the platform among Fig. 3.
Fig. 5 is a planimetric map, schematically illustrates a structure that is used for back lighting device is fixed to the platform of Fig. 2.
Fig. 6 is a sectional view, and attachment of the back lighting device that is used for fixing among Fig. 5 are described.
Fig. 7 is a planimetric map that is used for being adjusted at the Adjustment System (alignment unit) of the substrate on Fig. 2 platform.
Fig. 8 is the front view of explanation chip testing device of the present invention at the mode of operation of macroscopic observation.
Fig. 9 is the front view of explanation chip testing device of the present invention at the mode of operation of microscopic observation.
Embodiment
Now will be in detail with reference to the preferred embodiments of the present invention, in conjunction with the accompanying drawings content of the present invention is elaborated.Fig. 1 is the front view of the device that is used for substrate examination according to a preferred embodiment of the present invention.
With reference to Fig. 1, top at the body 1 of chip testing device, have a plurality of suspension structures 3, each suspension structure all constitutes an elastic construction of filling with air, be used to absorb the vibration of transmitting from the outside, basic components 2 are arranged on suspension structure 3, and an inspection platform 4 that is used for placing separably a substrate to be checked that rotates around turning axle 41 is installed on basic components 2.
Between inspection platform 4 and basic components 2 back lighting device 5 is installed, this back lighting device can move in last/following direction, so that light is shone inspection platform 4 from the rear portion of checking platform 4.For back lighting device 5 is moved along last/following direction, a cover elevator system is arranged, comprising: a base component 6 that on basic components 2, is used to lay back lighting device 5; A plurality of connecting links 7, the top of each root connecting link all pass basic components 2 and are connected with base component 6; A console panel 8, the position of this console panel below basic components 2 is connected with the lower end of connecting link 7; With a pneumatic lifting cylinder 9 that is positioned at below the basic components 2, be used for/descend to move this console panel 8.
There is pair of parallel to be installed in LM guide rod (or being called guide rail) 15 on the basic components 2, on each root LM guide rod 15 movable block 14 is installed all, a microscopic observation device 10 is installed on the movable block, what slided in the relative end of movable block is installed on the LM guide rod 15, is used for moving forward and backward with LM guide rod 15 (or along guide rod) horizontal direction together.
Simultaneously,,, can use a ball-screw and a servomotor, or suitably use known driving mechanism, for example linear electric machine or similarly device for the device that is used for movable block 14 is moved along LM guide rod 15 although do not show among the figure.If use ball-screw and servomotor, ball-screw and the 15 parallel installations of LM guide rod.A nut part engages with movable block 14, and when ball-screw rotated, this nut part can move along nut part.If the use linear electric machine, the then stator of linear electric machine and the 15 parallel installations of LM guide rod, and the mover of linear electric machine is fixed on the movable block 14, and mover is moved along stator.In addition, the driving mechanism of sprocket gear or pulley and belt also can use.
For inspection platform 4 being rotated to the angle of needs, connecting link 16 is connected on the relative limit of checking platform 4, so that connecting link 16 is freely rotated with hinging manner (hinged).Below basic components 2, operating rod 17 movably is installed together with motor 18, each one control lever all has an end to be hinged to the lower end of connecting link 16, its purpose is, when the connecting link 16 that is connected when the end with operating rod 17 folds or opens along with the rotation of the operating rod 17 that is driven by motor 18, run-out check platform 4.
Simultaneously, Fig. 2-7 has illustrated the structure of checking platform 4.
With reference to Fig. 2-7, there is the adsorbent pad 43 of a plurality of substrates to arrange by fixed intervals, in order to vacuum suction and fixed substrate G along the outside of the opening of platform body 42 front portions (front) of square box posture.In order to support the substrate G that is placed on the opening, transparent support bar 48 is installed across opening and by fixed intervals.Vertical ceramic support pin 481 is all arranged on each support bar 48, be used to support top substrate G, remain on the level of requirement to prevent the flatness that is placed on the substrate G sagging (distortion) on the inspection platform 4 and makes substrate G.
On the opposite side of platform body 42 front portions, also have a plurality of locating devices 44, be used to make substrate G to be positioned at the target location of platform body 42.Each locating device comprises the horizontal together bar 442 that moves of 441, one in a cylinder and cylinder 441 and the keeper (pin) 443 of a plurality of L or I shape.The core of each keeper is rotationally coupled on the platform body 42, and being connected on the bar 442 of rotating of (side) limit simultaneously, so that the outward flange of clamping substrate G.
For register pin 443, the relative limit of ' L ' shape register pin clamping (fixing) substrate G, the angle of ' I ' shape register pin clamping substrate G.
The adsorbent pad 47 of a plurality of back lighting devices of arranging by fixed intervals is arranged at the rear portion (back side) of platform body 42, be used for fixing back lighting device 5 by vacuum suction.
In addition, in order to prevent that back lighting device 5 checks that from checking that platform 4 comes off and breaks platform 4 has auxiliary stationary installation under the situation that the vacuum by adsorbent pad 47 breaks down.Be fixed at back lighting device 5 under the state of back lighting device adsorbent pad 47, auxiliary stationary installation is this back lighting device 5 of double fixed mechanically.Should auxiliary stationary installation comprise: a through hole 45 on each angle of platform body 42, pass through hole 45 from each angle of back lighting device 5 and protrude into ' T ' shape connector 52 on the platform body 42, ' U ' shape web member 461 on each angle of platform body 42, this web member is connected with cylinder 462 by the LM guide rod 463 that the motion with cylinder 462 seesaws, in order that and the neck of ' T ' shape connector 52 joint.
Operation to chip testing device describes below.
In the incipient stage of check, check that platform 4 is in horizontal level.In macroscopic observation is checked, with mechanical hand (not having to show) substrate G is placed into the front portion of checking platform 4, and when cylinder 441 dropped into operation, keeper 443 rotated simultaneously.Keeper 443 just and the outward flange of substrate G contacts like this and substrate G is located.Substrate adsorbent pad 43 comes into operation then, substrate G is fixed on checks on the platform 4.
Then, lifting pneumatic cylinder 9 under the basic components 2 puts into operation, console panel 8 is moved up, and the connecting link 7 and the base component 6 that connect with console panel also move up, and back lighting device 5 is moved up to the back side of back lighting device 5 and inspection platform 4 on also closely contact.In this case, the connector 52 on the back lighting device 5 passes the through hole of checking on the platform 4 45 and protrudes on the front portion (front) of checking platform 4.
Then, back lighting device 5 is fixed on the rear portion (following) of checking platform 4 by back lighting device adsorbent pad 47.Meanwhile, cylinder 462 puts into operation, and ' U ' shape web member 461 inserts the neck of ' T ' shape connector, and back lighting device has just been firmly fixed like this.
Then, with reference to Fig. 8, motor 18 puts into operation, and operating rod 17 is upwards rotated, and connecting link 16 just makes and checks platform 4 around rotation axis 41 rotations like this, up to checking that platform 4 tilts to certain angle.
Under the state of checking platform 4 rotations and tilting at a certain angle, when the light of q.s by from checking the back (back side) of platform, project substrate G so that when checking this substrate by back lighting device 5, easier than one type of prior art syringe and method with bore hole (naked eyes) to checking that substrate G on the platform 4 carries out the inspection of any defective.
If need carry out the microscopic observation inspection owing in the macroscopic observation inspection, found defective, with regard to opposite spin motor 18, operating rod 17 is rotated,, make and check that platform 4 rotates up to the position of checking that platform 4 is up to the standard around rotation axis 41 along with the motion of connecting link 16.When discharging the vacuum of the fixing back lighting device adsorbent pad 47 of back lighting device 5, and when making ' U ' shape brace 461 move disengaging ' T ' shape connector 52 backward, back lighting device 5 has just been separated fully.
Then, by promoting pneumatic cylinder 9 console panel 8 is moved downward, so that move down connecting link 7 and base component 6, back lighting device 5 is moved down into below the top surface of basic components 2 of starting stage like this.
Then, with reference to Fig. 9, movable block 14 moves along the LM guide rod, and the microscope 11 in microscopic observation device 10 moves to the defective locations on the substrate G, checks exactly by 11 pairs of defectives of microscope at this.In this case, when movable block 14 moved, the emissive lighting light source 12 of microscopic observation unit 10 moved checking between platform 4 and the back lighting device 5, and made and project fault location below the defective of emissive lighting light from substrate.
Illustrated as the front, because Substrate checking device of the present invention has a separable back lighting device at the rear portion of the inspection platform of placing substrate to be checked, can when checking platform inclination, carry out macroscopic observation, be attached under the state of checking the platform rear portion to checking that platform provides enough light at back lighting device, make defect confirmation become easy and accurate, and also can carry out liquid crystal (promptly being filled with the substrate of liquid crystal) inspection.
The above is the preferred embodiments of the present invention only, is not limited to the present invention, and for a person skilled in the art, the present invention can have various changes and variation.Within the spirit and principles in the present invention all, any modification of being done, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (23)
1. device that is used to check the defective that substrate exists comprises:
Basic components that are positioned at body top;
One is installed in being used on the described basic components and places the inspection platform of substrate to be checked separably, and described inspection platform has an end to rotate around a turning axle;
A wheelwork that is used for described inspection platform is turned to the angle of needs;
A back lighting device, be used for light is projected the substrate of checking on the platform to be checked from the back side of described inspection platform, wherein said back lighting device can be on described basic components along on/following direction moves, and is installed to the rear portion of described inspection platform separably.
2. device according to claim 1 further comprises and is used for described back lighting device is installed to the rear portion of described inspection platform or the tripping device that splits from the rear portion of checking platform.
3. device according to claim 2, wherein said tripping device are a plurality of in the adsorbent pad of checking the platform rear portion, are used for by the fixing described back lighting device of vacuum.
4. device according to claim 1 and 2, wherein said inspection platform comprises:
The platform body of a square box posture has an opening less than substrate to be checked at central part;
A plurality of substrate positioning means for positioning that are used to make on the platform body; With
One is used to make substrate to be fixed on stationary installation on the described platform body separably.
5. device according to claim 4, wherein said stationary installation comprise that a plurality of outsides along described opening are arranged in adsorbent pad on the described platform body portion with fixed intervals, in order to the outward flange by the vacuum fixed substrate.
6. device according to claim 2, further comprise auxiliary stationary installation, be used for being fixed on by described tripping device under the situation at rear portion of described inspection platform,, fix described back lighting device separably with respect to described inspection platform at described back lighting device.
7. device according to claim 6, wherein said auxiliary stationary installation comprises:
A plurality of at the through hole of checking on the platform;
A plurality of connectors, each all protrudes from the front portion of back lighting device, and when back lighting device was fixed on the inspection platform, described connector passed described through hole and protrudes the front surface of checking platform like this;
A plurality of bindiny mechanisms, each all movably is installed in the front portion of described inspection platform, so that engage with described connector.
8. device according to claim 7, wherein said connector comprise having a vertical component and the t connector that is positioned at the horizontal component at described vertical component top perpendicular to described inspection platform, and
Described bindiny mechanism comprises: a U type web member that is used to embed the connector vertical component, a guiding parts and the cylinder that web member is moved forward and backward along guiding parts that is used for fixing a side of described web member.
9. device according to claim 4 comprises that further be used for supporting substrate a plurality of are installed in the support component on the opening of platform body.
10. device according to claim 9, wherein said support component comprises:
Transparent support bar across described opening installation; With
A plurality of supporting pins, described supporting pin is vertically installed with fixed intervals along described support bar, is used for placing substrate in the above.
11. device according to claim 10, wherein said supporting pin is made by pottery.
12. device according to claim 1, wherein said back lighting device comprises:
A square structure that has central opening; With
One group of lamp along described structural arrangement.
13. device according to claim 4 further comprises a lifting gear, is used to make the motion of described back lighting device/down and is toward or away from described inspection platform.
14. device according to claim 13, wherein said lifting gear comprises:
A base component that is used to place described back lighting device; With
One is installed in and is used for functional unit that base component is moved up and down on the described basic components.
15. device according to claim 14, wherein said functional unit comprises:
The top that a plurality of connecting links, described connecting link pass described basic components and described connecting link is fixed on the described base component;
A console panel of below basic components, fixing with the lower end of described connecting link; With
One is positioned at the cylinder that described console panel is moved up and down below the described basic components.
16. device according to claim 1, further comprise a microscopic observation device that can move in the horizontal direction, can observe described substrate when being used for moving at the top of the substrate on the inspection platform that horizontal level is placed along the top of described basic components; With
One is used to mobile device that described microscopic observation device is moved forward and backward in the horizontal direction along described basic components.
17. device according to claim 16, wherein said mobile device comprises:
The guide rail that is parallel to each other in the horizontal direction and installs along the opposite side of described basic components;
Be used to movable block that microscopic observation device horizontal direction is seesawed, each movable block all has respectively the relative end that engages with described guide rail, so that move along guide rail; With
One is used to drive unit that described movable block is moved.
18. device according to claim 17, wherein said drive unit comprises:
Ball-screw with the parallel installation of guide rail;
The nut part that can move along ball-screw, described nut part is connected with a side of described movable block; With
A drive motor that is used to rotate described ball-screw.
19. device according to claim 17, wherein, described drive unit is a linear electric machine, comprising: a stator and the mover with the parallel installation of guide rail, described mover moves along the stator of fixedlying connected with described movable block.
20. device according to claim 17, wherein, described microscopic observation device comprises:
One is installed in the microscope that is used to observe the substrate on the described inspection platform on the described movable block movably;
One is installed in the emissive lighting light source that described movable block bottom can be moved between described inspection platform and back lighting device, be used for light upwards projection below described inspection platform.
21. device according to claim 1, wherein said wheelwork comprises:
At least one connecting link, each connecting link all have an end to be hinged to respectively on the relative limit of described inspection platform;
At least one operating rod, an end of described operating rod is hinged to the other end of connecting link, and the other end of described operating rod is connected on the motor, drives described connecting link motion so that rotated by described motor.
22. device according to claim 1 further comprises a vibration absorption component between described body and basic components, is used to absorb outside vibration.
23. device according to claim 22, wherein said vibration absorption component are air suspension structures with the resilient material of air filling.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2003-0028633A KR100506702B1 (en) | 2003-05-06 | 2003-05-06 | Substrate Inspection Apparatus |
| KRP200328633 | 2003-05-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1548946A CN1548946A (en) | 2004-11-24 |
| CN1288435C true CN1288435C (en) | 2006-12-06 |
Family
ID=34374085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB031532381A Expired - Fee Related CN1288435C (en) | 2003-05-06 | 2003-08-07 | Substrate checking apparatus |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR100506702B1 (en) |
| CN (1) | CN1288435C (en) |
| TW (1) | TWI247899B (en) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100965417B1 (en) * | 2004-11-18 | 2010-06-24 | 엘아이지에이디피 주식회사 | Inspection method of substrate and Apparatus for testing substrate |
| KR100748108B1 (en) * | 2005-02-23 | 2007-08-09 | 참앤씨(주) | apparatus and method for inspecting CRT panel |
| TWI307929B (en) * | 2005-05-12 | 2009-03-21 | Olympus Corp | Substrate inspection apparatus |
| JP2007093411A (en) * | 2005-09-29 | 2007-04-12 | Olympus Corp | Substrate inspection apparatus |
| KR100935259B1 (en) * | 2008-03-28 | 2010-01-06 | 주식회사 사이보그-랩 | Macro inspection device for lcd glass |
| CN103604812A (en) * | 2013-10-23 | 2014-02-26 | 上海华力微电子有限公司 | Multipoint positioning method for wafer macroscopic defect |
| CN104176528B (en) * | 2014-08-08 | 2017-08-25 | 昆山精讯电子技术有限公司 | Switching mechanism for carrying out picture inspection to liquid crystal panel |
| CN106198547A (en) * | 2016-06-24 | 2016-12-07 | 华为技术有限公司 | A kind of display screen detection device |
| CN106950485A (en) * | 2017-03-24 | 2017-07-14 | 京东方科技集团股份有限公司 | A kind of tester substrate microscope carrier and substrate test equipment |
| KR102000081B1 (en) * | 2017-09-19 | 2019-07-17 | 세메스 주식회사 | Die stage unit for testing die and die binding apparatus having the same |
| CN107907549A (en) * | 2017-11-13 | 2018-04-13 | 武汉华星光电半导体显示技术有限公司 | Inspecting substrate equipment and substrate inspecting method |
| CN108613990A (en) * | 2018-07-13 | 2018-10-02 | 江苏东旭亿泰智能装备有限公司 | A kind of microcosmic and compound check machine of macroscopic view |
| CN109211907B (en) * | 2018-10-24 | 2022-01-04 | 北京控制工程研究所 | Tool device for detecting silver ion migration |
-
2003
- 2003-05-06 KR KR10-2003-0028633A patent/KR100506702B1/en not_active IP Right Cessation
- 2003-08-01 TW TW092121179A patent/TWI247899B/en not_active IP Right Cessation
- 2003-08-07 CN CNB031532381A patent/CN1288435C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| KR100506702B1 (en) | 2005-08-09 |
| KR20040095036A (en) | 2004-11-12 |
| CN1548946A (en) | 2004-11-24 |
| TW200424528A (en) | 2004-11-16 |
| TWI247899B (en) | 2006-01-21 |
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