CN108375582A - Automated optical detection equipment - Google Patents
Automated optical detection equipment Download PDFInfo
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- CN108375582A CN108375582A CN201810034636.6A CN201810034636A CN108375582A CN 108375582 A CN108375582 A CN 108375582A CN 201810034636 A CN201810034636 A CN 201810034636A CN 108375582 A CN108375582 A CN 108375582A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The present invention provides a kind of automated optical detection equipment, by double movements driven mobile Y-axis and detection work piece platform is driven to do Y-direction, photomoduel is driven to do X-direction movement by single movement X-axis of driving, it is preferred that doing the movement of Z-direction by ball screw arrangement drive photomoduel, spatial three-dimensional movement is completed in the resultant motion of tri- axis of XYZ.The sheet material mainly for detection of surfaces such as metal mask plate, solar energy silk screens with fine defects, for filling up blank on the market.
Description
Technical field
The invention belongs to semiconductor applications, and in particular to a kind of automated optical detection equipment of web plate.
Background technology
In metal mask plate and solar energy silk screen manufacturing process, it can be made very on metal mask plate and solar energy silk screen
Mostly small opening, and the influence of manufacturing process and environment can cause to generate tool opening defective in the fabrication process, it is such
Opening is recoverable defect, if can detect defect by detection device and be repaired to it can improve the good of product
Rate.
The accuracy of detection for being used to detect the detection device of web plate opening flaw on the market at present is not mostly high, is extremely difficult to examine
The requirement of metal mask plate and solar energy silk screen defect is surveyed, and the detection method is never effectively in progress.
Invention content
Based on the above, the present invention provides a kind of automated optical detection equipment, mainly for detection of metal mask plate, solar energy
There is the sheet material of fine defects, the detection of this equipment can be as accurate as 10 μm and hereinafter, for filling up on the market on the surfaces such as silk screen
Blank.
Its specific technical solution is as follows：
A kind of automated optical detection equipment, including load bearing unit, mobile detection unit and control system, which is characterized in that described
Mobile detection unit is fixed on the load bearing unit；
The load bearing unit includes base station, work stage, Y-axis guide rail and linear motor, and the work stage is described for carrying sheet material
Work stage is movable to be arranged in the Y-axis guide rail and can be carried out in Y-axis guide rail the movement of Y direction, to by sheet material from first
Beginning position is at the uniform velocity transported to test position；
The mobile detection unit includes crossbeam and detection axis, and the detection axis is used for realizing the detection work of sheet material, the inspection
The movable setting of axis is surveyed on the crossbeam, and carries out the movement of X-direction on the crossbeam；
The control system is used to control the operational process of whole equipment, and the result of sheet material is detected to the mobile detection unit
Carry out analyzing processing.
Further, the Y-axis guide rail is fixed on the base station, and the linear motor is located at the side of the Y-axis guide rail
Also fixed to be arranged on the base station；The work stage is by the movable setting of Y-shaft movable plate in the Y-axis guide rail and described straight
The top of line motor, and the movement of Y direction can be carried out in the Y-axis guide rail with the Y-shaft movable plate, the linear motor is
The movement of the Y-shaft movable plate provides power.
Further, X-axis guide rail, X-axis motor are provided on the crossbeam, the detection axis is set by the way that X-axis movable plate is movable
Set in the X-axis guide rail and can be carried out in the X-axis guide rail with the X-axis movable plate movement of X-direction, the X-axis electricity
Machine provides power for the movement of the X-axis movable plate；It is additionally provided with drag chain on the crossbeam, is used for cabling.
Further, the detection axis is fixed on by Z axis substrate on the X-axis movable plate, and the detection axis includes that Z axis is dynamic
Plate, line-scan digital camera, face camera, line clear off source；The Z-shaft movable plate is movable to be arranged on the Z axis substrate, and opposite Z axis base
Plate carries out the movement of Z-direction；
The line-scan digital camera is fixed in the Z-shaft movable plate, and the line clears off source and is arranged below the line-scan digital camera, the line
It clears off source and provides light source for the line-scan digital camera, the line-scan digital camera is used for detecting the opening on sheet material line by line, and detection is tied
Fruit is sent to control system analysis；
The face camera is located at that the side of the line-scan digital camera is also fixed to be arranged in the Z-shaft movable plate, for the linear array
Defect opening position on the sheet material that camera scanning detected, the face camera can carry out accurate secondary detection to it.
Further, metal plate holder and Y-axis shutter are additionally provided on the base station, the metal plate holder is located at the base station
Two sides and protrude from base station, the metal plate holder of wherein side is fixedly arranged above rodless cylinder, the rodless cylinder packet
Piston slider and cylinder barrel are included, the metal plate holder of the other side is equipped with supporting rod, and Y-axis shutter one end passes through connecting plate
It is fixed on the piston slider of the rodless cylinder, the other end is servo-actuated by idler wheel on the supporting rod, the Y-axis shutter
The movement of Y direction can be carried out on the cylinder barrel with the piston slider, to realize to the institute below the Y-axis shutter
It states work stage and blocks protective effect.
Further, the two sides of the base station are fixed with overarm brace, and the crossbeam is fixed on by the overarm brace
On the base station.
Further, the control system includes computer assembly, after detection axis Scanning Detction sheet material described in analyzing processing
Data.
Further, the optical detection apparatus further includes outline border, and the outline border is metal outer frame, for protecting described in support
Load bearing unit and the mobile detection unit.
The automated optical detection equipment of the present invention drives the movements for detecting work piece platform and doing Y-direction by double movement Y-axis of driving, by
Single movement X-axis of driving drives photomoduel to do X-direction movement, and the fortune of Z-direction is preferably done by ball screw arrangement drive photomoduel
Dynamic, spatial three-dimensional movement is completed in the resultant motion of tri- axis of XYZ.Detection work piece platform is made of band adsorption hole tempered glass, can be with
Detect through-hole aperture size and defect.The outer frame part of automated optical detection equipment of the present invention uses automatic moving door mechanism simultaneously,
Door switch acts when for change detection, and double-button coordinated signals are to ensure the safety of door switch.
The additional aspect of the present invention and advantage will be set forth in part in the description, and will partly become from the following description
Obviously, or practice through the invention is recognized.
Description of the drawings
The above-mentioned and/or additional aspect and advantage of the present invention will become from the following description of the accompanying drawings of embodiments
Obviously and it is readily appreciated that, wherein：
Fig. 1 show overall schematic inside automated optical detection equipment；
Fig. 2 show overall schematic outside automated optical detection equipment；
Wherein, 1 is base station, and 11 be metal plate holder, and 12 be overarm brace, and 2 be work stage, and 21 be Y-axis guide rail, and 22 be straight-line electric
Machine, 3 be crossbeam, and 31 be X-axis motor, and 32 be X-axis guide rail, and 33 be X-axis movable plate, and 34 be drag chain, and 4 be Z axis substrate, and 41 is dynamic for Z axis
Plate, 42 be line-scan digital camera, and 43 clear off source for line, and 44 be face camera, and 5 be Y-axis shutter, and 51 be rodless cylinder, and 6 be sheet material, 7
For display, 8 keyboards in order to control.
Specific implementation mode
The embodiment of the present invention is described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning to end
Same or similar label indicates same or similar element or element with the same or similar functions.Below with reference to attached
The embodiment of figure description is exemplary, and is only used for explaining the present invention, and is not construed as limiting the claims.
In the description of the present invention, it is to be understood that, term "upper", "lower", "bottom", "top", "front", "rear",
The orientation or positional relationship of the instructions such as "inner", "outside", " cross ", " perpendicular " is to be based on the orientation or positional relationship shown in the drawings, and is only
For convenience of description of the present invention and simplification of the description, specific side must be had by not indicating or implying the indicated device or element
Position, with specific azimuth configuration and operation, therefore be not considered as limiting the invention.
Such as Fig. 1 automated optical detection equipments, including load bearing unit, mobile detection unit and control system, which is characterized in that
Load bearing unit includes base station 1, work stage 2, Y-axis guide rail 21 and linear motor 22, and work stage 2 is for carrying sheet material 6, work stage 2
The movable movement being arranged in Y-axis guide rail 21 and Y direction can be carried out in Y-axis guide rail 21, to by sheet material 6 from initial position
At the uniform velocity it is transported to test position；
The mobile detection unit includes crossbeam 3 and detection axis, and detection axis is used for realizing that the detection work of sheet material 6, detection axis are lived
Dynamic setting on crossbeam 3, and on crossbeam 3 carry out X-direction movement；
The mobile detection unit is fixed on the base station 1 of the load bearing unit；
In the present invention, for control system there is no being shown completely, display 7 and control keyboard 8 as show in Figure 2 are structures
It is not limited thereto at the composition of a part for control system, but control system, further includes the various controls not shown
Mechanism（In view of the understanding for not influencing the present invention, therefore it is not unfolded specifically herein）, the operation of entire automated optical detection equipment
Cheng Jun is completed under control of the control system, at the same control system can analyzing processing detection axis scanning sheet material 6 after data.
Further as shown in Figure 1, Y-axis guide rail 21 is fixed on the base station 1, the linear motor 22 is located at Y-axis guide rail
21 side is also fixed to be arranged on base station 1；Work stage 2 is arranged by the way that Y-shaft movable plate is movable in Y-axis guide rail 21 and straight-line electric
The top of machine 22, and the movement of Y direction can be carried out in the Y-axis guide rail 21 with Y-shaft movable plate, linear motor 22 is the Y
The movement of axis movable plate provides power, and the Y-shaft movable plate is not shown in the drawing, but it is understood that can be by work stage
2, which fix the simultaneously movable attachment device being arranged in Y-axis guide rail 21 and linear motor 22 of energy, is suitable for the present invention, can be according to reality
Border is selected.When original state by sheet material 6 to be detected be placed in work stage 2 adsorb fixation it is smooth, then with work
Part platform 2 in Y-axis guide rail 21 at the uniform velocity move to test position, that is, move to the underface of detection axis, herein linear motor 22
Design with Y-axis guide rail 21 can further accurately control the position of the speed and stop of the movement of work stage 2, and can pass through light
Grid ruler is positioned, to occur the case where greatly improving surface sweeping precision of the detection axis to sheet material 6, avoid drain sweep, missing inspection.
Further, X-axis guide rail 32, X-axis motor 31 are provided on the crossbeam 3, the detection axis is lived by X-axis movable plate 33
The dynamic fortune being arranged in the X-axis guide rail 32 and X-direction can be carried out in the X-axis guide rail 32 with the X-axis movable plate 33
Dynamic, the X-axis motor 31 provides power for the movement of the X-axis movable plate 33；It is additionally provided with drag chain 34 on the crossbeam 3, is used for
Cabling.
Further, the detection axis is fixed on by Z axis substrate 4 on the X-axis movable plate 33, i.e., detection axis can be led in X-axis
The movement that X-direction is carried out on rail, to realize that the surface sweeping that detection axis carries out line by line sheet material 6 detects.The detection axis includes Z
Axis movable plate 41, line-scan digital camera 42, face camera 44, line clear off source 43；Z-shaft movable plate 41 passes through Z axis guide rail（It is not shown, no
It influences to understand）It is movable to be arranged on the Z axis substrate 4, and opposite Z axis substrate carries out the movement of Z-direction, so as to adjust line
Distance of the 42 knead dough camera 44 of array camera apart from 6 surface of sheet material.The detection axis further includes Z axis motor, and Z axis motor is the Z
The movement of axis movable plate 41 provides power；
The line-scan digital camera 42 is fixed in the Z-shaft movable plate 41, and the line clears off source 43 and is arranged under the line-scan digital camera 42
Side, it is that the line-scan digital camera 42 provides light source that the line, which clears off source 43, and the line-scan digital camera 42 is used for detecting on sheet material 6 line by line
Opening, and scanning result is sent to control system analysis；It is understood that needing to be fitted under line-scan digital camera 42 corresponding
Camera lens is not illustrated and is also appreciated that herein.
The face camera 44 is located at that the side of the line-scan digital camera 42 is also fixed to be arranged in the Z-shaft movable plate 41, needle
Defect opening position on the sheet material 6 come is scanned to the line-scan digital camera 42, the face camera 44 can carry out it accurately
Secondary detection.The camera lens that the lower section of the face camera 44 is additionally provided with annular light source and is adapted to it, the annular light source are institute
It states face camera 44 and light source is provided, to ensure that the detection visual field of face camera 44 is apparent bright.
Further, metal plate holder 11 and Y-axis shutter 5,11, the metal plate holder are also provided on the base station 1
In the two sides of the base station 1 and base station 1 is protruded from, the metal plate holder 11 of wherein side is fixedly arranged above rodless cylinder
51, the rodless cylinder includes piston slider and cylinder barrel, and the metal plate holder 11 of the other side is equipped with supporting rod, the Y-axis
5 one end of shutter is fixed on by connecting plate on the piston slider of the rodless cylinder 51, and the other end is by idler wheel in the branch
It is servo-actuated on strut, the Y-axis shutter 5 can carry out the movement of Y direction with the piston slider on the cylinder barrel, to real
Now the work stage 2 of 5 lower section of the Y-axis shutter is risen and blocks protective effect.As the extension of the present invention, Y-axis is driven to hide
The rodless cylinder 51 of baffle movement can also use other mechanisms that the function can be achieved to replace, and servo-actuated idler wheel can also use
It is other can be achieved the functions mechanisms replace, such as sliding block and sliding rail combined mechanism.
Further, the two sides of the base station 1 are fixed with overarm brace 12, and the crossbeam 3 passes through the overarm brace 12
It is fixed on the base station 1.
Further, the optical detection apparatus further includes outline border, and shown in Fig. 2, the outline border is metal outer frame, for protecting
Support the load bearing unit and the mobile detection unit.It is used for placing sheet material on the outline border of automated optical detection equipment of the present invention
Part use automatic moving door mechanism, door automatic transfer switch action when being put into, taking out sheet material, while being controlled using double-button linkage
System, to ensure the safety of door switch.
Specific component, structure or the feature for meaning to combine embodiment description for referring to " embodiment " any in the present invention
It is included at least one embodiment of the present invention.It is not necessarily referring in the schematic representation of this specification everywhere identical
Embodiment.Moreover, when describing specific component, structure or feature in conjunction with any embodiment, advocated, in conjunction with others
Within the scope of embodiment realizes that such component, structure or feature all fall within those skilled in the art.
Although the specific implementation mode of the present invention is described in detail in the illustrative examples with reference to the present invention,
It is it must be understood that those skilled in the art can be designed that various other improvement and embodiment, these are improved and embodiment will
It falls within spirit and scope.Specifically, aforementioned disclosure, attached drawing and the scope of the claims it
It is interior, rational variations and modifications can be made in terms of the arrangement that parts and/or sub-combination are laid out, without departing from this
The spirit of invention.In addition to the variations and modifications in terms of parts and/or layout, range is by the following claims and their equivalents
It limits.
Claims (8)
1. a kind of automated optical detection equipment, including load bearing unit, mobile detection unit and control system, which is characterized in that institute
Mobile detection unit is stated to be fixed on the load bearing unit；
The load bearing unit includes base station, work stage, Y-axis guide rail and linear motor, and the work stage is described for carrying sheet material
Work stage is movable to be arranged in the Y-axis guide rail and can be carried out in Y-axis guide rail the movement of Y direction, to by sheet material from first
Beginning position is at the uniform velocity transported to test position；
The mobile detection unit includes crossbeam and detection axis, and the detection axis is used for realizing the detection work of sheet material, the inspection
The movable setting of axis is surveyed on the crossbeam, and carries out the movement of X-direction on the crossbeam；
The control system is used to control the operational process of whole equipment, and the result of sheet material is detected to the mobile detection unit
Carry out analyzing processing.
2. optical detection apparatus according to claim 1, which is characterized in that the Y-axis guide rail is fixed on the base station,
The linear motor is located at that the side of the Y-axis guide rail is also fixed to be arranged on the base station；The work stage is dynamic by Y-axis
Plate is movable to be arranged in the top of the Y-axis guide rail and the linear motor, and can be with the Y-shaft movable plate in the Y-axis guide rail
The upper movement for carrying out Y direction, the linear motor provide power for the movement of the Y-shaft movable plate.
3. optical detection apparatus according to claim 1, which is characterized in that be provided with X-axis guide rail, X-axis on the crossbeam
Motor, the detection axis are arranged by the way that X-axis movable plate is movable in the X-axis guide rail and can be with the X-axis movable plate in the X-axis
The movement of X-direction is carried out on guide rail, the X-axis motor provides power for the movement of the X-axis movable plate；It is also set on the crossbeam
It is equipped with drag chain, is used for cabling.
4. optical detection apparatus according to claim 3, which is characterized in that the detection axis is fixed on by Z axis substrate
On the X-axis movable plate, the detection axis includes that Z-shaft movable plate, line-scan digital camera, face camera, line clear off source；The Z-shaft movable plate activity
Setting on the Z axis substrate, and opposite Z axis substrate carries out the movement of Z-direction；
The line-scan digital camera is fixed in the Z-shaft movable plate, and the line clears off source and is arranged below the line-scan digital camera, the line
It clears off source and provides light source for the line-scan digital camera, the line-scan digital camera is used for detecting the opening on sheet material line by line, and detection is tied
Fruit is sent to control system analysis；
The face camera is located at that the side of the line-scan digital camera is also fixed to be arranged in the Z-shaft movable plate, for the linear array
Defect opening position on the sheet material that camera scanning detected, the face camera can carry out accurate secondary detection to it.
5. optical detection apparatus according to claim 1, which is characterized in that be additionally provided on the base station metal plate holder and
Y-axis shutter, the metal plate holder are located at the two sides of the base station and protrude from base station, wherein the metal plate holder of side
It is fixedly arranged above rodless cylinder, the rodless cylinder includes piston slider and cylinder barrel, and the metal plate holder of the other side is equipped with
Supporting rod, Y-axis shutter one end are fixed on by connecting plate on the piston slider of the rodless cylinder, and the other end passes through rolling
Wheel is servo-actuated on the supporting rod, and the Y-axis shutter can carry out the fortune of Y direction with the piston slider on the cylinder barrel
It is dynamic, block protective effect to realize to play the work stage below the Y-axis shutter.
6. optical detection apparatus according to claim 1, which is characterized in that the two sides of the base station are fixed with crossbeam branch
Frame, the crossbeam are fixed on by the overarm brace on the base station.
7. optical detection apparatus according to claim 1, which is characterized in that the control system includes computer assembly, is used
Data after the detection axis Scanning Detction sheet material described in analyzing processing.
8. optical detection apparatus according to claim 1, which is characterized in that the optical detection apparatus further includes outline border,
The outline border is metal outer frame, and the load bearing unit and the mobile detection unit are supported for protecting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810034636.6A CN108375582A (en) | 2018-01-15 | 2018-01-15 | Automated optical detection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810034636.6A CN108375582A (en) | 2018-01-15 | 2018-01-15 | Automated optical detection equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108375582A true CN108375582A (en) | 2018-08-07 |
Family
ID=63016674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810034636.6A Pending CN108375582A (en) | 2018-01-15 | 2018-01-15 | Automated optical detection equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108375582A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109502125A (en) * | 2018-11-29 | 2019-03-22 | 苏州市运泰利自动化设备有限公司 | Transfer device for labeling |
| CN110018171A (en) * | 2019-04-23 | 2019-07-16 | 深圳市华星光电半导体显示技术有限公司 | Substrate detection apparatus |
| CN110779921A (en) * | 2019-11-13 | 2020-02-11 | 李子帆 | Equipment corrosion detection device with chemical product detection function |
| CN111438564A (en) * | 2020-05-12 | 2020-07-24 | 焦作天裕精密光学有限公司 | Device and method for positioning and processing optical axis of special-shaped optical element |
| CN112362667A (en) * | 2020-11-04 | 2021-02-12 | 广东鑫光智能系统有限公司 | Improved six-surface detection device for plate production and detection method thereof |
| CN113341873A (en) * | 2021-08-06 | 2021-09-03 | 武汉中导光电设备有限公司 | Motion platform control system and control method of optical detection equipment |
| CN113418678A (en) * | 2021-06-10 | 2021-09-21 | Oppo广东移动通信有限公司 | Display detection device and system |
-
2018
- 2018-01-15 CN CN201810034636.6A patent/CN108375582A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109502125A (en) * | 2018-11-29 | 2019-03-22 | 苏州市运泰利自动化设备有限公司 | Transfer device for labeling |
| CN110018171A (en) * | 2019-04-23 | 2019-07-16 | 深圳市华星光电半导体显示技术有限公司 | Substrate detection apparatus |
| CN110779921A (en) * | 2019-11-13 | 2020-02-11 | 李子帆 | Equipment corrosion detection device with chemical product detection function |
| CN111438564A (en) * | 2020-05-12 | 2020-07-24 | 焦作天裕精密光学有限公司 | Device and method for positioning and processing optical axis of special-shaped optical element |
| CN112362667A (en) * | 2020-11-04 | 2021-02-12 | 广东鑫光智能系统有限公司 | Improved six-surface detection device for plate production and detection method thereof |
| CN112362667B (en) * | 2020-11-04 | 2021-07-06 | 广东鑫光智能系统有限公司 | Improved six-surface detection device for plate production and detection method thereof |
| CN113418678A (en) * | 2021-06-10 | 2021-09-21 | Oppo广东移动通信有限公司 | Display detection device and system |
| CN113341873A (en) * | 2021-08-06 | 2021-09-03 | 武汉中导光电设备有限公司 | Motion platform control system and control method of optical detection equipment |
| CN113341873B (en) * | 2021-08-06 | 2021-11-12 | 武汉中导光电设备有限公司 | Motion platform control system and control method of optical detection equipment |
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| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20180807 |
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| WD01 | Invention patent application deemed withdrawn after publication |