CN110018171A - Substrate detection apparatus - Google Patents
Substrate detection apparatus Download PDFInfo
- Publication number
- CN110018171A CN110018171A CN201910327317.9A CN201910327317A CN110018171A CN 110018171 A CN110018171 A CN 110018171A CN 201910327317 A CN201910327317 A CN 201910327317A CN 110018171 A CN110018171 A CN 110018171A
- Authority
- CN
- China
- Prior art keywords
- scanning element
- substrate
- detection apparatus
- control system
- substrate detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
Abstract
A kind of substrate detection apparatus, including scanning element, control system and optical ranging unit, optical ranging unit is arranged in scanning element, first distance value between real-time monitoring scanning element and substrate, and control system is sent by first distance value, control system adjusts the height of scanning element so that first distance value is identical as the setting value in control system.By the way that optical ranging unit is arranged, real-time monitoring and adjustment the distance between scanning element and substrate, so that distance between the two is kept constant value, will not lead to camera because of the variation of the flatness of substrate or hardware wear and aging sweeps artwork paste, and then the problem of avoiding base board defect missing inspection, and the calibration cycle of detection device can be postponed.
Description
Technical field
The present invention relates to display panel manufacturing technology field more particularly to a kind of substrate detection apparatus.
Background technique
The glass substrate of Thin Film Transistor-LCD is in the route after complicated process flow manufacture, on substrate
Circuit break and short circuit phenomenon easy to form detects on substrate the circuit break and short circuit of route and repairs that the good of product can be improved
Rate, the detection speed for accelerating equipment and the hardware configuration for reducing equipment can reach the mesh for improving detection efficiency and save the cost
's.
Different types of defect will be generated in whole technology chain, defect is substantially micron level, and operating personnel can not
By visually directly discovering.Automatic optical checking machine (Automated Optical Inspection, AOI) can capture scarce
Sunken position, and the defects of the picture of shooting is amplified, clear picture is provided and is looked into computer display screen for operating personnel
See confirmation.
During AOI equipment carries out Defect Scanning, the flatness of glass baseplate surface has greatly the effect of inspection
Influence, glass substrate is in the state moved along scanning direction on air floating platform in entire checking process, and substrate is in gas
It not can guarantee level on floating platform, can there is certain fluctuation, lead to the flatness big rise and fall of substrate surface, however scan phase
The distance between machine and substrate are fixed values, it may appear that the unsharp phenomenon of gray-scale figure be easy to cause the feelings of segmental defect missing inspection
Condition occurs, and eventually affects inspection result.
Summary of the invention
The present invention provides a kind of substrate detection apparatus, to solve existing substrate detection apparatus, since substrate is flat in air bearing
Moved on platform, horizontality cannot be kept constantly, lead to the flatness big rise and fall of substrate surface, so cause scanning camera with
The distance between substrate changes, and the unsharp phenomenon of gray-scale figure occurs in the picture for causing scanning camera to shoot, be easy to cause
The case where segmental defect missing inspection, occurs, and then influences the technical issues of showing.
To solve the above problems, technical solution provided by the invention is as follows:
The present invention provides a kind of substrate detection apparatus, comprising: platform, multiple scanning elements, control to bearing substrate
System and optical ranging unit；The control system is connect with the scanning element, and the optical ranging unit is set to institute
It states in scanning element, the optical ranging unit is to the first distance between scanning element described in real-time monitoring and the substrate
Value；Wherein, the optical ranging unit is connect with the control system, and the optical ranging unit sends out the first distance value
Be sent to the control system, the control system by adjust the scanning element height so that the first distance value with
Setting value in the control system is identical.
In at least one embodiment of the invention, the optical ranging unit is fixedly connected with the scanning element, institute
Optical ranging unit is stated to move together with the scanning element.
In at least one embodiment of the invention, the substrate detection apparatus, which is characterized in that the substrate detection dress
Setting further includes supporting mechanism, and the scanning element is set on the supporting mechanism.
In at least one embodiment of the invention, the supporting mechanism is connect with the control system, the support machine
Structure moves in the vertical direction.
In at least one embodiment of the invention, the supporting mechanism includes horizontal support bar and vertical support rod, institute
Horizontal support bar is stated to connect with the vertical support rod.
In at least one embodiment of the invention, it is provided on the vertical support rod and connect with the control system
Actuator, the actuator drive the scanning element to move in the vertical direction.
In at least one embodiment of the invention, the scanning element is connect with the horizontal support bar, the scanning
Unit is slided along the extending direction of the horizontal support bar.
In at least one embodiment of the invention, multiple horizontal support bars are arranged side by side in the upper of the platform
Side.
In at least one embodiment of the invention, conveyer belt is provided with below the platform, the transmission belt drives institute
Substrate is stated to move along the extending direction of the platform.
In at least one embodiment of the invention, the substrate detection apparatus further includes light source, and the light source is set to
The top of the platform.
The invention has the benefit that by the way that optical ranging unit is arranged in scanning element, so that the optical ranging list
The distance between first real-time monitoring scanning element and substrate, so that distance between the two is adjusted in real time, so that scanning is single
The distance between member and substrate will not cause camera to sweep artwork paste because of the variation of the flatness of substrate or hardware wear and aging, in turn
The problem of avoiding base board defect missing inspection, and the calibration cycle of detection device can be postponed.
Detailed description of the invention
It, below will be to embodiment or the prior art in order to illustrate more clearly of embodiment or technical solution in the prior art
Attached drawing needed in description is briefly described, it should be apparent that, the accompanying drawings in the following description is only some of invention
Embodiment for those of ordinary skill in the art without creative efforts, can also be attached according to these
Figure obtains other attached drawings.
Fig. 1 is the top view of substrate detection apparatus of the present invention；
Fig. 2 is the side view of substrate detection apparatus of the present invention；
Fig. 3 is the system control process figure of substrate detection apparatus of the present invention.
Specific embodiment
The explanation of following embodiment is referred to the additional illustration, the particular implementation that can be used to implement to illustrate the present invention
Example.The direction term that the present invention is previously mentioned, such as [on], [under], [preceding], [rear], [left side], [right side], [interior], [outer], [side]
Deng being only the direction with reference to annexed drawings.Therefore, the direction term used be to illustrate and understand the present invention, rather than to
The limitation present invention.The similar unit of structure is with being given the same reference numerals in the figure.
The present invention cannot keep water since substrate moves on air floating platform for existing substrate detection apparatus constantly
Level state, leads to the flatness big rise and fall of substrate surface, and then causes to the distance between scanning camera and substrate to become
The case where changing, the picture of scanning camera shooting is caused the unsharp phenomenon of gray-scale figure occur, cause segmental defect missing inspection generation, into
And the technical issues of influencing display, the present embodiment is able to solve the defect.
As shown in FIG. 1 to 3, the present invention provides a kind of substrate detection apparatus 100, including platform 10, supporting mechanism 20, more
A scanning element 30, control system 60 and optical ranging unit 40,100 real-time monitoring of substrate detection apparatus base to be measured
The flatness of plate 70 changes, and adjusts the height of scanning element 30 in real time, it is ensured that the gray scale image that scanning element 30 detects is clear, quasi-
Really.
Wherein, the platform 10 is to carry substrate 70 to be detected, and the substrate 70 is on the platform 10 along institute
The extending direction (Y direction) for stating platform 10 is mobile, and the platform 10 can be positioned below conveyer belt, the belt-driven institute
The forward movement of substrate 70 is stated, further, the platform 10 can be air floating platform, adsorb the substrate 70 and move forward.
The scanning element 30 is set to 10 top of platform, and the scanning element 30 and the control system 60 are electrical
Connection, the scanning element 30 takes pictures to the substrate 70 of moved beneath, and is by the picture transfer of shooting to the control
System 60 carries out defect recognition.
The optical ranging unit 40 is set in the scanning element 30, and specifically, the optical ranging unit 40 is set
It is placed in the side of the scanning element 30, the optical ranging unit 40 is fixedly connected with the scanning element 30, sweeps with described
Unit 30 is retouched to move on vertical direction (Z-direction, the direction vertical with the platform 10) together.
The optical ranging unit 40 is electrically connected with the control system 60,40 real-time monitoring of optical ranging unit
First distance value between the scanning element 30 and the substrate 70, and the first distance value is sent to the control in real time
System 60 processed, then the first distance value is compared the control system 60 with the setting value in the control system 60,
The control system 60 issues adjustment signal later, the height of the scanning element 30 is adjusted, so that the first distance value
Identical as the setting value, the first distance is vertical range (distance in the Z-axis direction) between the two, the setting
Value be the scanning element 30 shoot picture optimum state under the scanning element 30 and the substrate 70 between it is vertical away from
From value.
As shown in Fig. 2, the scanning element 30 is set on the supporting mechanism 20, the scanning element 30 is slideably
It is connect with the supporting mechanism 20, the scanning element 30 is moved along the direction of motion perpendicular to the substrate 70, i.e., along X-axis side
To movement, the supporting mechanism 20 moves in vertical direction (Z-direction), to realize the scanning element 30 in vertical direction
Movement.
Further, the supporting mechanism 20 includes horizontal support bar 21 and vertical support rod 22, the horizontal support bar
21 connect with the vertical support rod 22.
As shown in Figure 1, the supporting mechanism 20 includes multiple spaced horizontal support bars 21, the water in the present embodiment
Flat 21 quantity of support rod is two, and two horizontal support bars 21 are arranged side by side in the top of the platform 10, the horizontal branch
The extending direction of strut 21 is vertical with the extending direction of the platform 10.
Multiple scanning elements 30 are connect with the horizontal support bar 21, and multiple on two horizontal support bars 21 sweep
Unit 30 to be retouched to be oppositely arranged, the scanning element 30 is slided along the extending direction (X-direction) of the horizontal support bar 21, into
And it realizes fixed point and takes pictures.
In other embodiments, more than two horizontal support bar 21 can be set in 70 direction of advance of substrate,
Scanning element 30 is set on the horizontal support bar 21, to repeat to take pictures to the substrate 70, substrate 70 is carried out with this
Reinspection.
Further, actuator 50, the actuator 50 and the control system are provided on the vertical support rod 22
60 are electrically connected, and the control system 60 controls the starting or closing of the actuator 50, and the actuator 50 drives described
Scanning element 30 and the optical ranging unit 40 move in the Z-axis direction, to realize the focusing adjustment of scanning element 30.
In other embodiments, the horizontal support bar 21 can be slidably connected with the vertical support rod 22, the level
Support rod 21 drives and moves in short transverse of the scanning element 30 along the vertical support rod 22.
The substrate detection apparatus 100 further includes positioning mechanism and the light source for being set to 10 top of platform, specifically may be used
Referring to the prior art, which is not described herein again.
The scanning element 30 includes scanning camera and defect enlarger, and the scanning camera takes pictures to defect,
Defect is amplified and provides display screen of the clear picture into the control system 60 by defect enlarger, for operating personnel
Check confirmation.
The optical ranging unit 40 can be laser ranging instrument, which includes laser emission element and swash
Light receiving unit.
As shown in figure 3, during carrying out defects detection to substrate 70, picture that the scanning element 30 will take
It is sent to the control system 60, operating personnel carries out defect recognition, at the same time, the optical ranging list by observation picture
First distance value between the scanning element 30 monitored and the substrate 70 is sent to the control system 60 by member 40,
The control system 60 judges the first distance value, if the first distance value is identical as the setting value, scans
Unit 30 carries out the detection of next point, if the first distance value is different from the setting value, the actuator 50 starts, control
It makes the scanning element 30 and rises or falls certain height, until the first distance value monitored again is identical as setting value.
The utility model has the advantages that by the way that optical ranging unit is arranged in scanning element, so that the optical ranging unit real-time monitoring
The distance between scanning element and substrate, to adjust distance between the two in real time so that scanning element and substrate it
Between distance will not change because of the flatness of substrate or hardware wear and aging due to cause camera to sweep artwork paste, and then avoid substrate
The problem of defect missing inspection, and the calibration cycle of detection device can be postponed.
In conclusion although the present invention has been disclosed above in the preferred embodiment, but above preferred embodiment is not to limit
The system present invention, those skilled in the art can make various changes and profit without departing from the spirit and scope of the present invention
Decorations, therefore protection scope of the present invention subjects to the scope of the claims.
Claims (10)
1. a kind of substrate detection apparatus characterized by comprising
Platform, to bearing substrate；
Multiple scanning elements are set to above the platform；
Control system is connect with the scanning element；And
Optical ranging unit is set in the scanning element, between scanning element described in real-time monitoring and the substrate
First distance value；Wherein,
The optical ranging unit is connect with the control system, and the optical ranging unit sends the first distance value to
The control system, the control system by adjust the scanning element height so that the first distance value with it is described
Setting value in control system is identical.
2. substrate detection apparatus according to claim 1, which is characterized in that the optical ranging unit and the scanning are single
Member is fixedly connected, and the optical ranging unit is moved together with the scanning element.
3. substrate detection apparatus according to claim 1, which is characterized in that the substrate detection apparatus further includes support machine
Structure, the scanning element are set on the supporting mechanism.
4. substrate detection apparatus according to claim 3, which is characterized in that the supporting mechanism and the control system connect
It connects, the supporting mechanism moves in the vertical direction.
5. substrate detection apparatus according to claim 3, which is characterized in that the supporting mechanism includes at least two horizontal
Support rod and vertical support rod, the horizontal support bar are connect with the vertical support rod.
6. substrate detection apparatus according to claim 5, which is characterized in that be provided on the vertical support rod with it is described
The actuator of control system connection, the actuator drive the scanning element to move in the vertical direction.
7. substrate detection apparatus according to claim 5, which is characterized in that the scanning element and the horizontal support bar
Connection, the scanning element are slided along the extending direction of the horizontal support bar.
8. substrate detection apparatus according to claim 7, which is characterized in that the horizontal support bar is arranged side by side in described
The top of platform.
9. substrate detection apparatus according to claim 1, which is characterized in that be provided with conveyer belt below the platform, institute
Stating transmission belt drives the substrate to move along the extending direction of the platform.
10. substrate detection apparatus according to claim 1, which is characterized in that the substrate detection apparatus further includes light source,
The light source is set to the top of the platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910327317.9A CN110018171A (en) | 2019-04-23 | 2019-04-23 | Substrate detection apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910327317.9A CN110018171A (en) | 2019-04-23 | 2019-04-23 | Substrate detection apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110018171A true CN110018171A (en) | 2019-07-16 |
Family
ID=67192229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910327317.9A Pending CN110018171A (en) | 2019-04-23 | 2019-04-23 | Substrate detection apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110018171A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111504221A (en) * | 2020-05-15 | 2020-08-07 | 苏州精濑光电有限公司 | Screen image focus tracking device and method thereof |
| CN113176278A (en) * | 2021-03-19 | 2021-07-27 | 哈工大机器人(中山)无人装备与人工智能研究院 | Panel defect detection equipment and panel defect detection method |
| CN113176273A (en) * | 2021-03-19 | 2021-07-27 | 哈工大机器人(中山)无人装备与人工智能研究院 | Automatic focusing device and method and panel defect detection system |
| CN113176277A (en) * | 2021-03-19 | 2021-07-27 | 哈工大机器人(中山)无人装备与人工智能研究院 | Panel defect detection equipment |
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| CN109632828A (en) * | 2018-10-29 | 2019-04-16 | 彩虹显示器件股份有限公司 | A kind of plate glass defect reinspection system and reinspection method |
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| CN1837900A (en) * | 2005-03-23 | 2006-09-27 | 三星电子株式会社 | Visual inspection apparatus and method of inspecting display panel using the visual inspection apparatus |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111504221A (en) * | 2020-05-15 | 2020-08-07 | 苏州精濑光电有限公司 | Screen image focus tracking device and method thereof |
| CN113176278A (en) * | 2021-03-19 | 2021-07-27 | 哈工大机器人(中山)无人装备与人工智能研究院 | Panel defect detection equipment and panel defect detection method |
| CN113176273A (en) * | 2021-03-19 | 2021-07-27 | 哈工大机器人(中山)无人装备与人工智能研究院 | Automatic focusing device and method and panel defect detection system |
| CN113176277A (en) * | 2021-03-19 | 2021-07-27 | 哈工大机器人(中山)无人装备与人工智能研究院 | Panel defect detection equipment |
| CN113176278B (en) * | 2021-03-19 | 2022-07-22 | 哈工大机器人(中山)无人装备与人工智能研究院 | Panel defect detection equipment and panel defect detection method |
| CN113176273B (en) * | 2021-03-19 | 2023-08-15 | 哈工大机器人(中山)无人装备与人工智能研究院 | Automatic focusing device, method and panel defect detection system |
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