CN111965960A - 3D mobile phone cover plate glass exposure device and method based on linear array imaging assembly - Google Patents
3D mobile phone cover plate glass exposure device and method based on linear array imaging assembly Download PDFInfo
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- CN111965960A CN111965960A CN202010886127.3A CN202010886127A CN111965960A CN 111965960 A CN111965960 A CN 111965960A CN 202010886127 A CN202010886127 A CN 202010886127A CN 111965960 A CN111965960 A CN 111965960A
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- 238000003384 imaging method Methods 0.000 title claims abstract description 54
- 238000000034 method Methods 0.000 title claims abstract description 21
- 239000005357 flat glass Substances 0.000 title claims abstract description 12
- 230000033001 locomotion Effects 0.000 claims description 20
- 239000011521 glass Substances 0.000 claims description 16
- 239000006059 cover glass Substances 0.000 claims description 14
- 238000012937 correction Methods 0.000 claims description 5
- 239000003292 glue Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 2
- 238000003708 edge detection Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 description 5
- 241000252254 Catostomidae Species 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 238000003745 diagnosis Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7073—Alignment marks and their environment
- G03F9/7084—Position of mark on substrate, i.e. position in (x, y, z) of mark, e.g. buried or resist covered mark, mark on rearside, at the substrate edge, in the circuit area, latent image mark, marks in plural levels
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Studio Devices (AREA)
Abstract
The invention relates to the field of maskless exposure, in particular to a 3D mobile phone cover plate glass exposure device and method based on a linear array imaging assembly. The invention has the advantages that: this application adopts linear array imaging assembly, can improve counterpoint efficiency to show the productivity that promotes whole platform equipment.
Description
Technical Field
The invention relates to the field of maskless exposure, in particular to a 3D mobile phone cover plate glass exposure device and method based on a linear array imaging assembly.
Background
At present, the main technology for transferring the patterns to the wafer, the circuit board and the mobile phone cover plate is the traditional film exposure technology and the direct-writing exposure technology based on exposure equipment, and the linear exposure technology is gradually favored by the market due to the characteristics that the film is not consumed, the generated circuit has high precision, the connection can be realized and the like, and is also widely applied to the mobile phone cover plate glass production industry.
With the increasing application of exposure technology in circuit board production, screen printing and mobile phone cover glass production, it becomes crucial to improve the exposure positioning accuracy and the exposure efficiency of the exposure equipment. The existing mobile phone cover plate glass is positioned by using an area array camera, a moving device is required to capture pictures after being stopped and stabilized, and at least 4 pictures are required to be shot by one piece of glass, so that the production efficiency of the equipment is greatly influenced, if 80 pictures are required to be shot for a mobile phone cover plate array with 5 rows and 4 columns, the equipment needs to undergo 80 times of acceleration and deceleration movement, steady diagnosis and other operations. Meanwhile, the area-array camera captures local information of the mobile phone glass, so that the measurement precision is influenced, and the equipment cannot be helped to judge whether all cover plate glasses on the tray are good products, so that defective products flow into the next link, and economic loss is caused to customers. Fig. 3 is a schematic diagram illustrating positioning of photographing four sides of a cover glass by using an area-array camera in the prior art.
Disclosure of Invention
In order to improve the alignment efficiency, the invention provides a 3D mobile phone cover plate glass exposure device and method based on a linear array imaging assembly.
In order to achieve the purpose, the invention adopts the following technical scheme:
the 3D mobile phone cover plate glass exposure device based on the linear array imaging assembly is characterized by comprising a base, suckers moving on the base along the column direction, and a portal frame fixed on the base and crossing the suckers, wherein a bottom camera is fixed at the bottom of each sucker, a linear array imaging assembly and an exposure lens are arranged on a cross beam of the portal frame, two parallel axes in the row direction are respectively arranged along the length direction of the cross beam, and the linear array imaging assembly and the exposure lens correspondingly move on the two axes.
Specifically, the device also comprises a main control assembly and an early warning assembly connected with the main control assembly, wherein the main control assembly is connected with a motion control assembly driving the sucker, the linear array imaging assembly and the exposure lens to move on corresponding axes, and is also connected with the linear array imaging assembly, the exposure lens and the bottom camera.
The method for using the 3D mobile phone cover plate glass exposure device based on the linear array imaging assembly comprises the following steps:
s1, correcting and calibrating the device, and acquiring initial information after correction and calibration by the main control assembly;
s2, placing mobile phone cover glass on a sucker, tightly sucking the mobile phone cover glass by the sucker, driving a linear array imaging assembly to scan a mobile phone cover glass carrying disc on the sucker in the row direction by a moving platform, stepping the linear array imaging assembly on a guide rail in the row direction after scanning one row, reversely scanning the next row of glass by the linear array imaging assembly, and repeating the scanning action until the scanning is finished to obtain positioning information;
and S3, the main control component controls the exposure lens and the sucker to scan according to the initial information obtained in the step S1 and the positioning information obtained in the step S2 until the exposure is finished.
The invention has the advantages that:
(1) this application adopts linear array imaging assembly, can improve counterpoint efficiency to show the productivity that promotes whole platform equipment.
(2) The invention is provided with a main control component and an early warning component, and provides a hardware basis for generating early warning when detecting the non-defective products.
(3) The method firstly corrects and calibrates the device, so as to obtain the initial information of the equipment, and provide a basis for obtaining the accuracy of the positioning and exposure results of the glass at the later stage.
(4) The second purpose of the invention is to use the linear array camera to detect the edge breakage and the glue dropping of the mobile phone glass, thereby preventing unqualified glass from flowing into the next link.
(5) The invention accurately obtains all initial information by adjusting the light source in the linear array imaging component, correcting the distortion of the lens of the linear array camera, measuring the included angle between the linear array camera and the motion direction, calibrating the pixel size of the linear array camera and calibrating the position relation between the linear array camera in the linear array imaging component and the exposure lens in sequence.
(6) The purpose of selecting the highest order of four times in the process of fitting the distortion coefficient is to prevent overfitting on the premise of ensuring the fitting effect.
(7) The mobile phone glass is positioned by using the linear array camera, and the four edges of the glass are extracted by using an image processing method, and the center and the angle of the glass are calculated.
Drawings
FIG. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a flowchart of the steps for obtaining initial information.
Fig. 3 is a flowchart illustrating a conventional area-array camera.
Fig. 4 is a scanning picture of the linear array camera in the up-down direction.
Fig. 5 is a flow chart of a method of the 3D mobile phone cover glass exposure device based on the linear array imaging assembly.
The notations in the figures have the following meanings:
1-base 2-sucker 3-gantry 4-bottom camera 5-linear array imaging component 6-exposure lens 71-first shaft 72-second shaft 73-third shaft 8-motion control component
Detailed Description
As shown in fig. 1, the 3D mobile phone cover plate glass exposure device based on the linear array imaging assembly comprises a base 1, suckers 2 moving on the base 1 along the column direction, and a portal frame 3 fixed on the base 1 and crossing the suckers 2, wherein a bottom camera 4 is fixed at the bottom of each sucker 2, a linear array imaging assembly 5 and an exposure lens 6 are arranged on a beam of the portal frame 3, two parallel axes in the row direction are respectively arranged along the length direction of the beam, and the linear array imaging assembly 5 and the exposure lens 6 correspondingly move on the two axes. Preferably, the exposure lens 6 may be arrayed in plural along the row direction. Specifically, the linear array imaging assembly 5 and the exposure lens 6 are respectively arranged below and correspond to the first shaft 71 and the second shaft 72. The suction cup 2 is moved on the base 1 by means of the third shaft 73.
The device is characterized by further comprising a main control assembly and an early warning assembly connected with the main control assembly, wherein the main control assembly is connected with a motion control assembly 8 which drives the sucker 2, the linear array imaging assembly 5 and the exposure lens 6 to move on corresponding axes, and is also connected with the linear array imaging assembly 5, the exposure lens 6 and the bottom camera 4.
As shown in fig. 5, the method for using the 3D mobile phone cover glass exposure apparatus based on the linear array imaging assembly according to embodiment 1 comprises the following steps:
s1, correcting and calibrating the device, and acquiring initial information by the main control assembly;
as shown in fig. 2, the obtaining of the initial information includes the following steps: and adjusting a light source in the linear array imaging assembly 5, correcting the distortion of a lens of the linear array camera, measuring an included angle between the linear array camera and the motion direction, calibrating the pixel size of the linear array camera, and calibrating the position relation between the linear array camera in the linear array imaging assembly 5 and the exposure lens 6 in sequence.
The distortion correction steps of the linear array camera lens are as follows:
s211, placing the circular array calibration plate on the sucker 2 for tight suction, and scanning the circular array calibration plate by the linear array imaging assembly 5 to obtain a scanned image;
s212, the main control assembly calculates a distortion coefficient through the difference between the center distance of the circular array on the image and a standard value; the linear array camera lens has the minimum distortion at the center position, the farther away from the center, the larger the distortion, and the distortion different from the distortion of the area array camera lens is that the distortion in the y direction does not exist, so that the distortion coefficient can be obtained by fitting the distortion by using a higher order function:
Error(x)＝a+bx+cx2+dx3+ex4
wherein x is the distance from the calibration center point to the center of the linear array camera lens, and a, b, c, d and d are parameters after fitting;
and S221, the main control component corrects the distortion of the linear array camera by using the distortion coefficient.
The method for measuring the included angle between the linear array camera and the motion direction comprises the following steps:
s221, placing the circular array calibration plate on the sucker 2 for tight suction, and scanning the circular array calibration plate by the linear array imaging assembly 5 to obtain a scanned image;
s222, if the linear array camera forms an included angle with the motion direction, the scanned rectangle is cut into a parallelogram in a staggered mode, and the included angle between the linear array camera and the motion direction is calculated according to the included angle of the parallelogram formed by round circles at four corners of the parallelogram.
The steps of calibrating the pixel size of the linear array camera are as follows:
s231, placing the circular array calibration plate on the sucker 2 for tight suction, and scanning the circular array calibration plate by the linear array imaging assembly 5 to obtain a scanned image;
s232, dividing the pixel size of the linear array camera into x-direction pixel size and y-direction pixel size, determining the x-direction pixel size by the pixel size of a chip of the linear array camera and the lens magnification of the linear array camera, determining the y-direction pixel size by the motion speed of the linear array camera, and calculating the x-direction pixel size and the y-direction pixel size of the linear array camera according to the difference between the transverse circle spacing and the longitudinal circle spacing and the standard value.
The calibration steps of the position relationship between the linear array camera in the linear array imaging assembly 5 and the exposure lens 6 are as follows:
s241, the main control component drives the exposure lens 6 to move on a corresponding axis through the motion control component 8, and when the projection center of the linear array camera in the linear array imaging component 5 is located at the center position of the bottom camera 4, the position relation between the linear array camera and the bottom camera 4 is obtained; the main control component drives the exposure lens 6 to move on a corresponding axis through the motion control component 8, so that the position relation between the exposure lens 6 and the bottom camera 4 is obtained; when a plurality of exposure lenses 6 are arrayed in the row direction, it is necessary to obtain the positional relationship of each exposure lens 6 with the bottom camera 4.
And S242, the main control assembly obtains the position relation between the linear array camera and the exposure lens 6 according to the position relation between the linear array camera and the bottom camera 4 and the position relation between the exposure lens 6 and the bottom camera 4.
S2, placing mobile phone cover glass on the sucker 2, tightly sucking the mobile phone cover glass by the sucker 2, driving the linear array imaging assembly 5 to scan the mobile phone cover glass carrying disc on the sucker 2 in the row direction by the sucker 2, stepping the linear array imaging assembly 5 on a guide rail in the row direction after scanning one row, reversely scanning the next row of glass by the linear array imaging assembly 5, and repeating the scanning action until the scanning is finished to obtain positioning information; compared with the traditional positioning mode, as shown in fig. 4, for a glass array with 5 rows and 4 columns, 80 pictures need to be shot in the traditional area-array camera method, and the device needs to undergo 80 times of acceleration and deceleration motions, steady diagnosis and other operations; as shown in fig. 4, the present invention only needs to go through 4 accelerations and decelerations.
Optimally, in order to prevent unqualified glass from flowing into the next link, edge detection is carried out on an image scanned by the linear array camera, the image is compared with a standard template through an edge matching method, and whether edge breakage occurs or not is determined through a comparison result; judging whether the glass has a glue dropping phenomenon or not through background uniformity detection; the linear array camera sends data to the main control assembly, and if edge breakage and glue dropping phenomena occur, the main control assembly controls the early warning assembly to give out early warning.
And S3, the main control component controls the exposure lens 6 and the sucker 2 to scan in the same way as the calibration movement according to the initial information obtained in the step S1 and the positioning information obtained in the step S2 until the exposure is finished.
The invention is not to be considered as limited to the specific embodiments shown and described, but is to be understood to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims.
Claims (9)
1. 3D cell-phone apron glass exposure device based on linear array imaging assembly, its characterized in that includes base (1), along sucking disc (2) of row direction motion on base (1), fix portal frame (3) on base (1) and span sucking disc (2), the bottom of sucking disc (2) is fixed with bottom camera (4), be provided with linear array imaging assembly (5) and exposure camera lens (6) on the crossbeam of portal frame (3), arrange two parallel axles in the line direction respectively along crossbeam length direction, linear array imaging assembly (5) and exposure camera lens (6) correspond and move on two axles.
2. The 3D mobile phone cover plate glass exposure device based on the linear array imaging assembly is characterized by further comprising a main control assembly and an early warning assembly connected with the main control assembly, wherein the main control assembly is connected with a motion control assembly (8) which drives the sucker (2), the linear array imaging assembly (5) and the exposure lens (6) to move on corresponding axes, and is further connected with the linear array imaging assembly (5), the exposure lens (6) and the bottom camera (4).
3. The method for using the 3D mobile phone cover glass exposure device based on the linear array imaging assembly as claimed in claim 2, characterized by comprising the following steps:
s1, correcting and calibrating the device, and acquiring initial information after correction and calibration by the main control assembly;
s2, placing mobile phone cover glass on a sucker (2), tightly sucking the mobile phone cover glass by the sucker (2), driving a linear array imaging assembly (5) to scan a mobile phone cover glass carrying disc on the sucker (2) in a column direction by a moving platform, stepping the linear array imaging assembly (5) on a guide rail in a row direction after scanning one column, reversely scanning the next column of glass by the linear array imaging assembly (5), and repeating the scanning action until the scanning is finished to obtain positioning information;
and S3, the main control component controls the exposure lens (6) and the sucker (2) to scan according to the initial information obtained in the step S1 and the positioning information obtained in the step S2 until the exposure is finished.
4. The method of claim 3, wherein the steps S2 and S3 further include edge detection of the scanned image of the line camera, aligning the scanned image with a standard template by an edge matching method, comparing the scanned result with the standard template, and determining whether edge breakage occurs according to the comparison result; judging whether the glass has a glue dropping phenomenon or not through background uniformity detection; the linear array camera sends the detected result to the main control assembly, and if edge breakage and glue dropping phenomena occur, the main control assembly controls the early warning assembly to give out early warning.
5. The method according to claim 4, wherein in step S1, the obtaining of the initial information comprises the following steps: and sequentially carrying out light source adjustment in the linear array imaging assembly (5), lens distortion correction of a linear array camera in the linear array imaging assembly (5), measurement of an included angle between the linear array camera and the motion direction, pixel size calibration of the linear array camera and position relationship calibration of the linear array camera and an exposure lens (6).
6. The method according to claim 5, wherein the distortion correction step for the linear array camera lens in the step S1 is as follows:
s211, placing the circular array calibration plate on a sucker (2) for tight suction, and scanning the circular array calibration plate by a linear array imaging assembly (5) to obtain a scanned image;
s212, the main control assembly calculates a distortion coefficient through the difference between the center distance of the circular array on the image and a standard value; and (3) fitting the distortion by using a unitary high-order function to obtain a distortion coefficient:
Error(x)＝a+bx+cx2+dx3+ex4
wherein x is the distance from the calibration center point to the center of the linear array camera lens, and a, b, c, d and d are parameters after fitting;
and S221, the main control component corrects the distortion of the linear array camera by using the distortion coefficient.
7. The method of claim 5, wherein the step of measuring the angle between the line camera and the moving direction in step S1 is as follows:
s221, placing the circular array calibration plate on a sucker (2) for tight suction, and scanning the circular array calibration plate by a linear array imaging assembly (5) to obtain a scanned image;
s222, if an included angle exists between the linear array camera and the motion direction, the scanned rectangle is cut into a parallelogram in a staggered mode, and the included angle between the linear array camera and the motion direction is calculated according to the included angle of the parallelogram formed by the centers of circles of four corners of the parallelogram.
8. The method according to claim 5, wherein the step of determining the linear camera pixel size in step S1 is as follows:
s231, placing the circular array calibration plate on the sucker (2) for tight suction, and scanning the circular array calibration plate by the linear array imaging assembly (5) to obtain a scanned image;
s232, calculating the pixel size of the linear array camera in the x direction according to the difference between the horizontal circle distance and the standard value corresponding to the calibration plate, and calculating the pixel size of the linear array camera in the y direction according to the difference between the vertical circle distance and the standard value corresponding to the calibration plate.
9. The method according to claim 5, characterized in that the calibration step of the positional relationship between the line camera and the exposure lens (6) in the line imaging assembly (5) in step S1 is as follows:
s241, the main control component drives the linear array imaging component (5) and the sucker (2) to move on corresponding shafts through the motion control component (8), and when a sensing chip of the bottom camera (4) is located in the center of an image captured by the linear array camera, the position relation between the linear array camera and the bottom camera (4) is obtained; the main control component drives the exposure lens (6) and the sucker (2) to move on corresponding axes through the motion control component (8), and when a circle projected by the exposure lens (6) is positioned at the center of the bottom camera (4), the position relation between the exposure lens (6) and the bottom camera (4) is obtained;
and S242, the main control assembly obtains the position relation between the linear array camera and the exposure lens (6) according to the position relation between the linear array camera and the bottom camera (4) and the position relation between the exposure lens (6) and the bottom camera (4).
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| CN202010886127.3A CN111965960A (en) | 2020-08-28 | 2020-08-28 | 3D mobile phone cover plate glass exposure device and method based on linear array imaging assembly |
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| CN202010886127.3A CN111965960A (en) | 2020-08-28 | 2020-08-28 | 3D mobile phone cover plate glass exposure device and method based on linear array imaging assembly |
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| WO2024000708A1 (en) * | 2022-06-29 | 2024-01-04 | 深圳凯世光研股份有限公司 | Workpiece batch exposure method and device |
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