CN115753024A - Automatic centering method for lens MTF test - Google Patents
Automatic centering method for lens MTF test Download PDFInfo
- Publication number
- CN115753024A CN115753024A CN202211476488.6A CN202211476488A CN115753024A CN 115753024 A CN115753024 A CN 115753024A CN 202211476488 A CN202211476488 A CN 202211476488A CN 115753024 A CN115753024 A CN 115753024A
- Authority
- CN
- China
- Prior art keywords
- lens
- image
- center
- disc
- pixel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
The invention relates to the technical field of lens testing, in particular to an automatic centering method for lens MTF testing, which is characterized in that a special driving disc is designed aiming at a lens structure, and a plurality of uniformly distributed hole sites are arranged on the special driving disc; when the MTF test machine platform tests one of the lenses to be tested, the special drive disc is moved to enable the center of the lens to be tested to be pre-aligned with the center of a Reticle of the MTF test machine platform and the center of an optical axis of a central camera; designing a moving path for the lens to be tested, moving a special drive disc according to the moving path, acquiring an image through a central camera every time the lens to be tested is moved, and searching for an H-shaped feature by utilizing the Hough transform principle; and calculating the actual eccentric distance of the lens to realize automatic centering. According to the moving algorithm of the special drive disc and the image processing algorithm of the H-shaped characteristic, the invention can complete the quick and accurate automatic centering work; the method of the invention carries out necessary compensation on the processing error of the disc drive, can reduce the processing precision requirement of the disc drive, and realizes the automatic test of the whole disc lens.
Description
Technical Field
The invention relates to the technical field of lens testing, in particular to an automatic centering method for lens MTF testing.
Background
During the testing process of the MTF testing machine, the lens is placed on a hole site of a special driving disc, the special driving disc is formed by independently processing the lens structure, and one lens to be tested can be placed on the hole site of the special driving disc at a fixed distance. The special driving disc is driven by a control motor of the MTF testing machine to move so as to adjust the position of the lens to be tested, and after the first lens to be tested is correctly aligned by a human adjuster under an ideal state, each lens can be sequentially correctly aligned by controlling the motor to move the fixed distance.
However, a certain processing error exists when the special drive disk is used as a processing piece, which can cause that the ideal effect can not be achieved after the special drive disk moves according to the distance, and the phenomenon of serious eccentricity occurs in an imaging system. Therefore, a centering method is needed to realize automatic program centering, improve the testing efficiency and realize full-scale automatic testing.
Disclosure of Invention
The present invention is directed to solve at least one of the problems of the prior art, and provides an automatic centering method for lens MTF test.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows: an automatic centering method for lens MTF test comprises the following steps:
and 4, calculating the eccentric pixel number of the H-shaped image by calculating the mass center position of the H-shaped image, finally calculating the actual eccentric distance of the lens by using the camera imaging principle, and driving the special drive disc to reversely move according to the actual eccentric distance to realize automatic centering.
Furthermore, the transverse distance and the longitudinal distance of the centers of the hole sites of the special drive disc are both 9.5mm.
Furthermore, the moving path of the lens to be measured is formed by moving in the X direction and moving in the Y direction, single movement only moves in the X direction or the Y direction independently, and the whole moving path moves outwards around the initial position from the initial position in a spiral track structure.
Further, calculating the moving path of the lens to be measured according to the resolution of the central camera;
the resolution of the central camera is 720 × 540, and the actual distance between two vertical lines of the reticule H type is D H =0.1mm, the center camera is a CCD industrial camera, the pixel size of the center camera is 7.4um, according to the EFL of the lens to be measured 1 And industrial camera lens EFL 2 Calculating system magnification Mag = EFL 2 /EFL 1 Is approximately equal to 16; the number of pixels between two vertical lines at which the H-shape is obtained is Δ H = D H *1000 mag/7.4 ≈ 220Pixel; the number of pixels of the horizontal line of the "H" pattern from the upper and lower image edges is 540/2=270pixel;
and finally, calculating to obtain that the moving step distance in the X direction is 50um, and the moving step distance in the Y direction is 125um.
Further, judging whether the image has H-shaped characteristics by using the Hough transform principle specifically comprises the following steps:
if there are three straight lines in the "H" type feature description image, i.e. two vertical lines and one horizontal line, the equation of the straight line in polar coordinates can be expressed as: r = xcos θ + ysin θ;
for the passing point (x) 0 ,y 0 ) Is/are as followsThe linear cluster can be represented as: r is θ ＝x 0 cosθ+y 0 sin θ, i.e., (r θ, θ) may represent a pass (x) 0 ,y 0 ) A straight line of (a);
if a point (x) is given 0 ,y 0 ) Drawing all straight lines passing through the polar coordinate pair polar angle plane of the polar diameter to obtain a sine curve;
by performing the above operation on all points on the image edge feature, a plurality of sinusoidal curves can be obtained, and the three sinusoidal curves intersect at one point (theta, a) θ ) Then one straight line (θ, a) can be considered to exist θ ) Passing through the three points simultaneously;
the Hough transform principle is that an algorithm is utilized to automatically track intersection points between curves corresponding to each point in an image, if the number of the curves intersected with the same point exceeds a set threshold value, the straight line represented by the intersection point can be regarded as one straight line in the image, and when three straight lines forming an H shape are found in the image, the H shape is regarded to appear;
and judging whether the image has an H shape, if not, controlling the lens to be detected to move tentatively according to a preset track, and judging the image repeatedly by the Hough transform principle every time when a position point is reached until the H shape appears in the image.
Further, said calculating the centroid position of the "H" shape comprises: on the pixel coordinates, the horizontal coordinate average value of two vertical lines of H is used as the horizontal coordinate X of the centroid of H, the vertical coordinate average value of the horizontal line of H is used as the vertical coordinate Y of the centroid, and after X and Y are obtained, the difference between the X and Y and the image center coordinate is calculated to obtain the number of eccentric pixels of H, namely delta X and delta Y.
Further, the Pixel difference is converted from the actual distance, the eccentric Pixel distance of the centroid of "H" in the X direction is X _ Pixel =7.4 × Δ X, and the eccentric Pixel distance in the Y direction is Y _ Pixel =7.4 × Δ Y;
the actual eccentric distance of the lens to be measured in the X direction is as follows: x _ Dis = X _ Pixel/Mag (um);
the actual eccentric distance of the lens to be measured in the Y direction is as follows: y _ Dis = Y _ Pixel/Mag (um).
The invention has the beneficial effects that: as can be seen from the above description of the present invention, compared with the prior art, in the MTF test process, the automatic centering method for lens MTF test of the present invention moves the special driving disc through the control motor of the MTF test machine to pre-align the center of the lens to be tested with the center of the tilt and the center of the optical axis of the central camera, designs the moving path for the lens to be tested and obtains the image, and judges whether the image has the "H" type characteristic by using the hough transform principle; calculating the eccentric pixel number of the H-shaped image by calculating the position of the mass center of the H-shaped image, calculating the actual eccentric distance of the lens by the camera imaging principle, and driving the special driving disc to reversely move according to the actual eccentric distance so as to realize automatic centering, ensure that a lens imaging system in a test does not have a serious eccentric phenomenon and improve the test accuracy; according to the moving algorithm of the special drive disc and the image processing algorithm of the H-shaped characteristic, the invention can complete the quick and accurate automatic centering work; the method of the invention carries out necessary compensation on the processing error of the disc drive, can reduce the processing precision requirement of the disc drive, and realizes the automatic test of the whole disc lens.
Drawings
FIG. 1 is a flow chart of steps of an automatic centering method for lens MTF testing in a preferred embodiment of the present invention;
FIG. 2 is a schematic view of a partial structure of an MTF testing apparatus according to an embodiment of the present invention;
FIG. 3 is a schematic diagram illustrating a moving path of a lens to be measured according to a preferred embodiment of the present invention;
reference numerals are as follows: 1. a special drive disc; 2. a particle; 3. a center camera; 4. and (5) a lens to be tested.
Detailed Description
The technical solutions in the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, e.g., as being fixed or detachable or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood in a specific case to those of ordinary skill in the art.
Referring to fig. 1-3, a preferred embodiment of the present invention, an automatic centering method for lens MTF test, comprises the following steps:
the working principle of the MTF test machine is that an object to be imaged is arranged on the image surface of the tested lens by reversing the positions of an object and an image of a lens imaging system, and a camera is arranged at the position of the object surface of the tested lens to take a picture, so that the MTF value of the central image field and/or the peripheral image field of the tested lens in the normal direction S and/or the tangential direction T can be obtained.
the MTF test machine comprises a Reticle2 center and a center camera 3, wherein the Reticle2 is an object to be imaged, an image is in an H shape which is universal for detection, the center camera 3 is a camera right above the Reticle2, cameras are arranged on the periphery of the center camera 3 and used for taking pictures of the image of the Reticle2, during testing, a lens 4 to be tested is located in the middle between the Reticle2 and the center camera 3, namely, in a test center, and a special driving disc 1 needs to be moved to enable the center of the lens 4 to be tested to be aligned with the center of the Reticle2 of the MTF test machine and the center of the optical axis of the center camera 3 in advance.
because the lens 4 to be tested is not necessarily located in the test center, the lens 4 to be tested needs to be moved to the test center, which is an optimized moving process, in order to avoid missing the test center, a moving path needs to be designed according to specific parameters of the lens 4 to be tested and the MTF test machine, so as to ensure that the test center is found in a shorter time, the lens 4 to be tested obtains an image through the center camera 3 every time the lens 4 to be tested moves, and because automatic centering is needed instead of manually observing the image, a control system of the MTF test machine needs to automatically judge whether the image has an "H" type characteristic by using a hough transformation principle, if the "H" type characteristic appears, the position closest to the test center is found, and the lens 4 to be tested stops moving.
And 4, calculating the eccentric pixel number of the H-shaped image by calculating the mass center position of the H-shaped image, finally calculating the actual eccentric distance of the lens by using the camera imaging principle, and driving the special drive disc 1 to reversely move according to the actual eccentric distance to realize automatic centering.
The center of mass position of the H-shaped image is automatically calculated through a control system of the MTF testing machine, namely the center position of the image, because the image is imaged through the lens 4 to be tested, the eccentric pixel number of the H-shaped image is calculated, finally the actual eccentric distance of the lens is calculated through a camera imaging principle, the special driving disc 1 is driven to reversely move according to the actual eccentric distance, the lens 4 to be tested is moved to the testing center, automatic centering can be achieved, the control system of the MTF testing machine is automatically operated in the whole process, testing efficiency is improved, and testing precision is improved.
In the MTF test process, the special driving disc 1 is moved by a control motor of an MTF test machine to pre-align the center of a lens 4 to be tested with the center of a rotor 2 and the center of the optical axis of a central camera 3, a moving path is designed for the lens 4 to be tested, an image is acquired, and the Hough transform principle is utilized to judge whether the image has H-shaped characteristics or not; the eccentric pixel number of the H-shaped image is calculated by calculating the mass center position of the H-shaped image, the actual eccentric distance of the lens is calculated by the camera imaging principle, and the special drive disc 1 is driven to move reversely according to the actual eccentric distance, so that automatic centering is realized, the lens imaging system in the test is ensured not to have serious eccentric phenomenon, and the test accuracy is improved; according to the moving algorithm of the special drive disc 1 and the image processing algorithm of the H-shaped characteristic, the invention can complete the rapid and accurate automatic centering work; the method of the invention carries out necessary compensation on the processing error of the disc drive, can reduce the processing precision requirement of the disc drive, and realizes the automatic test of the whole disc lens.
As a preferred embodiment of the present invention, it may also have the following additional technical features:
in this embodiment, the transverse spacing and the longitudinal spacing of the hole site centers of the special drive disc 1 are both 9.5mm. When the MTF test is carried out, in order to improve the test efficiency, the test of a plurality of lenses is completed at one time, a station for placing a special driving disc 1 is arranged on an MTF test machine table, the special driving disc 1 is controlled to drive the special driving disc 1 to move, a plurality of hole sites for placing lenses are arranged on the special driving disc 1, the transverse distance and the longitudinal distance between adjacent hole sites are fixed so as to process the special driving disc 1, the transverse distance and the longitudinal distance of the center of each hole site are set to be 9.5mm according to the size of the station of the MTF test machine table by the special driving disc 1, a certain processing error exists because the special driving disc 1 is a machined part, and the processed distance is not necessarily 9.5mm, therefore, when the first lens is tested and the special driving disc 1 is controlled to move by 9.5mm to test the next lens, because the processing error of the special driving disc 1, the center of the next lens cannot be aligned with the center of the 2 and the optical axis of the center camera 3, the serious eccentricity phenomenon can occur during the test, and the measurement precision is influenced.
In this embodiment, the moving path of the lens 4 to be measured is composed of an X-direction movement and a Y-direction movement, a single movement only moves in the X-direction or the Y-direction, and the whole moving path moves from the initial position to the outside around the initial position in a spiral track structure. The lens 4 to be tested moves independently in the X direction or the Y direction in a single movement, so that the movement path is convenient to control, the moving step pitch precision is improved, in order to avoid missing the test center, all the position points need to be scanned outwards around the initial position, the scanning range is continuously expanded until the H-shaped characteristic is found, and the spiral track structure formed by the transverse lines and the vertical lines can avoid missing the position points and prevent missing the test center. Referring to fig. 3, starting from the initial position of point 01, an "H" shaped feature is sought outward.
In the embodiment, the moving path of the lens 4 to be measured is calculated according to the resolution of the central camera 3;
the resolution of the central camera 3 is 720 × 540, and the actual distance between two vertical lines of the tilt 2"H" pattern is D H =0.1mm, the center camera 3 is a CCD industrial camera, the pixel size of the center camera 3 is 7.4um, and the EFL is measured according to the lens 4 to be measured 1 And industrial camera lens EFL 2 Calculating system magnification Mag = EFL 2 /EFL 1 Approximately equals 16; the number of pixels between two vertical lines at which the H-shape is obtained is Δ H = D H *1000 mag/7.4 ≈ 220Pixel; the number of pixels of the horizontal line of the "H" pattern from the upper and lower image edges is 540/2=270pixel;
when the motor moves in the X direction, namely two vertical lines are searched, after one of the vertical lines is searched, the motor searches the minimum moving distance of the other vertical line to be DH/2=50um, in order to improve the searching efficiency and avoid missing H, the step distance in the X direction is set to be 50um in the method; when the motor moves in the Y direction, i.e. searches for the horizontal line, in the case that the horizontal line of "H" disappears, in order to search for the horizontal line of "H" and make the horizontal line approximately centered, the minimum distance that the motor moves should be 270pixel x 7.4um/Pixel/Mag =125um, in order to improve the efficiency of the search algorithm so as to find the test center quickly, the search step distance in the Y direction in the method is set to 125um. Finally, the moving step distance in the X direction is 50um, and the moving step distance in the Y direction is 125um.
In this embodiment, judging whether an image has an "H" type feature by using a hough transform principle specifically includes:
if there are three lines in the "H" type feature description image, i.e. two vertical lines and one horizontal line, the equation of the line in polar coordinates can be expressed as: r = xcos θ + ysin θ;
for the passing point (x) 0 ,y 0 ) Can be expressed as: r θ = x0cos θ + y0sin θ, i.e., (r θ, θ) may represent a pass (x θ, θ) 0 ,y 0 ) A straight line of (d);
if a point (x) is given 0 ,y 0 ) Drawing all straight lines passing through the polar coordinate pair polar angle plane of the polar diameter to obtain a sine curve;
by performing the above operations on all points on the edge feature of the image, a plurality of sinusoidal curves can be obtained, and the three sinusoidal curves intersect at one point (theta, a) θ ) Then one straight line (θ, a) can be considered to exist θ ) Passing through the three points simultaneously;
the Hough transform principle is that an algorithm is utilized to automatically track intersection points between curves corresponding to each point in an image, if the number of the curves intersected with the same point exceeds a set threshold value, the straight line represented by the intersection point can be regarded as one straight line in the image, and when three straight lines forming an H shape are found in the image, the H shape is regarded to appear;
and judging whether the image has an H shape, if not, controlling the lens 4 to be detected to move tentatively according to a preset track, and judging the image repeatedly by the Hough transform principle every time when a position point is reached until the image has the H shape.
In this embodiment, the calculating the centroid position of the "H" type includes: on the pixel coordinates, the abscissa average value of two vertical lines of 'H' is used as the centroid abscissa X of 'H', the ordinate average value of the horizontal line of 'H' is used as the ordinate Y of the centroid, and after X and Y are obtained, the difference between the X and Y and the image center coordinates can be calculated to obtain the number of 'H' eccentric pixels delta X and delta Y.
In this embodiment, the Pixel difference is converted from the actual distance, and the "H" centroid is eccentric by a Pixel distance X _ Pixel =7.4 × Δ X in the X direction, and is eccentric by a Pixel distance Y _ Pixel =7.4 × Δ Y in the Y direction;
the actual eccentric distance of the lens to be measured in the 4X direction is as follows: x _ Dis = X _ Pixel/Mag (um);
the actual eccentric distance of the lens to be measured in the 4Y direction is as follows: y _ Dis = Y _ Pixel/Mag (um).
The above additional technical features can be freely combined and used in superposition by those skilled in the art without conflict.
It is to be understood that the present invention has been described with reference to certain embodiments, and that various changes in the features and embodiments, or equivalent substitutions may be made therein by those skilled in the art without departing from the spirit and scope of the invention. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the invention without departing from the essential scope thereof. Therefore, it is intended that the invention not be limited to the particular embodiment disclosed, but that the invention will include all embodiments falling within the scope of the appended claims.
Claims (7)
1. An automatic centering method for lens MTF test is characterized by comprising the following steps:
step 1, designing a special drive disc (1) aiming at a lens structure, wherein a plurality of uniformly distributed hole sites are arranged on the special drive disc (1), placing a plurality of lenses in the hole sites, placing the special drive disc (1) on an MTF test machine table, and sequentially testing the lenses through the MTF test machine table;
step 2, when the MTF testing machine platform tests one of the lenses (4) to be tested, the special driving disc (1) is moved to enable the center of the lens (4) to be tested to be pre-aligned with the center of a reticule (2) and the center of an optical axis of a central camera (3) of the MTF testing machine platform, and the image of the reticule (2) is H-shaped;
step 3, designing a moving path for the lens (4) to be detected, enabling the special driving disc (1) to move according to the moving path, acquiring an image through the central camera (3) when the lens (4) to be detected moves once, judging whether the image has H-shaped characteristics or not by utilizing the Hough transformation principle, and stopping moving the lens (4) to be detected if the H-shaped characteristics appear;
and 4, calculating the eccentric pixel number of the H-shaped image by calculating the mass center position of the H-shaped image, finally calculating the actual eccentric distance of the lens by using the camera imaging principle, and driving the special driving disc (1) to reversely move according to the actual eccentric distance to realize automatic centering.
2. The automatic centering method for lens MTF test according to claim 1, wherein the lateral spacing and the longitudinal spacing of the hole site center of the special drive disk (1) are both 9.5mm.
3. The automatic centering method for lens MTF test according to claim 1, wherein the moving path of the lens (4) under test is composed of X-direction movement and Y-direction movement, a single movement only moves in X-direction or Y-direction, and the whole moving path moves from the initial position to the outside around the initial position in a spiral track structure.
4. The automatic centering method for lens MTF test according to claim 3, wherein the moving path of the lens (4) to be tested is calculated according to the resolution of the center camera (3);
the resolution of the central camera (3) is 720 × 540, and the actual distance between two vertical lines of the shape of the reticule (2) "H" is D H =0.1mm, the central camera (3) is a CCD industrial camera, the pixel size of the central camera (3) is 7.4um, and EFL is carried out according to a lens to be measured (4) 1 And industrial camera lens EFL 2 Calculating system magnification Mag = EFL 2 /EFL 1 Is approximately equal to 16; the number of pixels between two vertical lines to obtain an "H" pattern is Δ H = D H *1000 mag/7.4 ≈ 220Pixel; the number of pixels of the horizontal line of the "H" pattern from the upper and lower image edges is 540/2=270pixel;
the moving step distance in the X direction is calculated to be 50um, and the moving step distance in the Y direction is 125um.
5. The automatic centering method for lens MTF test according to claim 1, wherein judging whether an image has an "H" type feature by using Hough transform principle specifically includes:
if there are three straight lines in the "H" type feature description image, i.e. two vertical lines and one horizontal line, the equation of the straight line in polar coordinates can be expressed as: r = x cos θ + y sin θ;
for the passing point (x) 0 ,y 0 ) The linear cluster of (a) can be represented as: r is θ ＝x 0 cosθ+y 0 sin θ, also denoted (r θ, θ), may represent a pass (x) 0 ,y 0 ) A straight line of (d);
if a point (x) is given 0 ,y 0 ) Drawing all straight lines passing through the polar coordinate pair polar angle plane of the polar diameter to obtain a sine curve;
by performing the above operations on all points on the edge feature of the image, a plurality of sinusoidal curves can be obtained, and the three sinusoidal curves intersect at one point (theta, a) θ ) Then one straight line (θ, a) can be considered to exist θ ) Passing through the three points simultaneously;
the Hough transform principle is that an algorithm is utilized to automatically track intersection points between curves corresponding to each point in an image, if the number of the curves intersected with the same point exceeds a set threshold value, the straight line represented by the intersection point can be regarded as one straight line in the image, and when three straight lines forming an H shape are found in the image, the H shape is regarded to appear;
and judging whether the image is H-shaped or not, if not, controlling the lens (4) to be detected to move tentatively according to a preset track, and judging the image by the Hough transformation principle repeatedly when each position point is reached until the image is H-shaped.
6. The automatic centering method for lens MTF test of claim 5, wherein said calculating the centroid position of "H" type comprises: on the pixel coordinates, the horizontal coordinate average value of two vertical lines of H is used as the horizontal coordinate X of the centroid of H, the vertical coordinate average value of the horizontal line of H is used as the vertical coordinate Y of the centroid, and after X and Y are obtained, the difference between the X and Y and the image center coordinate is calculated to obtain the number of eccentric pixels of H, namely delta X and delta Y.
7. The automatic centering method for lens MTF test of claim 6, wherein the Pixel difference is converted to the actual distance, the "H" centroid is eccentric Pixel distance in X direction is X _ Pixel =7.4 Δ X, and the eccentric Pixel distance in Y direction is Y _ Pixel =7.4 Δ Y;
the actual eccentric distance of the lens (4) to be measured in the X direction is as follows: x _ Dis = X _ Pixel/Mag (um);
the actual eccentric distance of the lens (4) to be measured in the Y direction is as follows: y _ Dis = Y _ Pixel/Mag (um).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211476488.6A CN115753024A (en) | 2022-11-23 | 2022-11-23 | Automatic centering method for lens MTF test |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211476488.6A CN115753024A (en) | 2022-11-23 | 2022-11-23 | Automatic centering method for lens MTF test |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115753024A true CN115753024A (en) | 2023-03-07 |
Family
ID=85336223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211476488.6A Pending CN115753024A (en) | 2022-11-23 | 2022-11-23 | Automatic centering method for lens MTF test |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115753024A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116197652A (en) * | 2023-04-27 | 2023-06-02 | 江西联益光学有限公司 | Automatic assembling method, assembling machine and assembling system for split lens |
-
2022
- 2022-11-23 CN CN202211476488.6A patent/CN115753024A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116197652A (en) * | 2023-04-27 | 2023-06-02 | 江西联益光学有限公司 | Automatic assembling method, assembling machine and assembling system for split lens |
| CN116197652B (en) * | 2023-04-27 | 2023-09-01 | 江西联益光学有限公司 | Automatic assembling method, assembling machine and assembling system for split lens |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10276417B2 (en) | Pre-alignment device and method for wafer | |
| JP6701101B2 (en) | Device and method for positioning multi-aperture optics with multiple optical channels relative to an image sensor | |
| TWI734891B (en) | Method for imaging a specimen along a desired x'-direction of the specimen and microscope system | |
| CN110006905B (en) | Large-caliber ultra-clean smooth surface defect detection device combined with linear area array camera | |
| US5825913A (en) | System for finding the orientation of a wafer | |
| CN107957659B (en) | Mask and wafer defect detection orthogonality compensation method | |
| CN114695225A (en) | Wafer pre-alignment device and wafer pre-alignment method | |
| CN110783245B (en) | Alignment method | |
| EP3264181B1 (en) | Substrate pre-alignment method | |
| CN107993958B (en) | Orthogonality compensation method and compensation system in semiconductor defect detection/photoetching | |
| CN109580658B (en) | Inspection method and inspection apparatus | |
| CN115753024A (en) | Automatic centering method for lens MTF test | |
| CN112697112A (en) | Method and device for measuring horizontal plane inclination angle of camera | |
| CN106292197B (en) | A kind of focusing leveling device and method based on image processing techniques | |
| CN110702685A (en) | Defect detection method and defect detection system of display panel | |
| CN110783246B (en) | Alignment method | |
| CN110006921B (en) | Automatic pose adjusting method and device for large-curvature-radius spherical optical element | |
| US6868354B2 (en) | Method of detecting a pattern and an apparatus thereof | |
| CN115127483A (en) | Detection method for measuring coaxiality and system for detecting coaxiality | |
| CN114111578B (en) | Automatic pose determining method for large-caliber element | |
| KR20000044563A (en) | Center aligning device for wafer and method therefor | |
| CN115575406A (en) | Surface defect detection device and detection method thereof | |
| JPH11326229A (en) | Foreign matter inspection apparatus | |
| CN115468747A (en) | Method for correcting included angle between lens optical axis and longitudinal movement axis in microscopic depth focusing measurement | |
| TWI796315B (en) | Exposure device and exposure method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |