CN113176277A - Panel defect detection equipment - Google Patents

Abstract

The invention provides a panel defect detection device, which relates to the technical field of panel defect detection and comprises a bearing table, a first gantry, a second gantry, a leveling mechanism, an initial detection mechanism and a rechecking mechanism, wherein two ends of the first gantry and two ends of the second gantry are respectively connected to the bearing table through the leveling mechanism, the initial detection mechanism is arranged on the first gantry and is suitable for moving on the first gantry, the rechecking mechanism is arranged on the second gantry and is suitable for moving on the second gantry, the initial detection mechanism is used for scanning a panel to be detected, and the rechecking mechanism is used for rechecking the panel to be detected. Through the arrangement, the height of the two ends of the first gantry and/or the height of the two ends of the second gantry can be adjusted through the liftable leveling mechanism, so that the first gantry and the second gantry can be parallel to the bearing table through adjusting the corresponding leveling mechanism, the initial scanning camera and the secondary scanning camera can have correct imaging angles, and imaging effects can be guaranteed.

Description

Panel defect detection equipment

Technical Field

The invention relates to the technical field of panel defect detection, in particular to panel defect detection equipment.

Background

At present, the liquid crystal display panel after production is finished may have defects, some defects are difficult to directly find, and the defects need to be detected through optical detection equipment to obtain the defects.

At present, there is optical detection equipment, namely panel defect detection equipment, specially used for panel defect detection on the market, and the structure of the existing panel defect detection equipment is as follows, the existing panel defect detection equipment comprises a primary scanning camera, a secondary scanning camera, a bearing table and two gantries, the gantries are fixed on the bearing table, the primary scanning camera is arranged on one gantry, the secondary scanning camera is arranged on the other gantry, the primary scanning camera performs primary scanning on a panel to be detected, and the secondary scanning camera performs secondary scanning on the panel to be detected. Wherein, the final panel defect check out test set is influenced to the formation of image effect of camera and the camera of sweeping again of sweeping first, but in the present panel defect check out test set, it is difficult to guarantee that the distance of camera and/or the camera of sweeping again and the panel that awaits measuring is the best imaging distance, also is difficult to guarantee that the shooting angle of camera and/or the camera of sweeping again is the correct angle, consequently, in the present panel defect check out test set, the camera of sweeping first and the camera of sweeping again probably have the not good problem of formation of image effect.

Disclosure of Invention

The invention solves the problem that the imaging effect of a primary scanning camera and a secondary scanning camera in the conventional panel defect detection equipment is possibly poor.

In order to solve the above problems, the present invention provides a panel defect detecting apparatus, which includes a carrier, a first gantry, a second gantry, a leveling mechanism, an initial detecting mechanism and a re-detecting mechanism, wherein the carrier is used for carrying a panel to be detected and driving the panel to be detected to move, two ends of the first gantry and two ends of the second gantry are respectively connected to the carrier through the leveling mechanism, the leveling mechanism is suitable for lifting, the initial detecting mechanism is arranged on the first gantry, the initial detecting mechanism is suitable for moving on the first gantry, the re-detecting mechanism is arranged on the second gantry, the re-detecting mechanism is suitable for moving on the second gantry, the initial detecting mechanism is used for scanning the panel to be detected, and the re-detecting mechanism is used for re-detecting the panel to be detected.

Further, the bearing table comprises a bearing frame and an air floatation mechanism arranged on the bearing frame, and the air floatation mechanism is used for suspending and supporting the panel to be detected.

Further, the air supporting mechanism includes air supporting platform and air supporting strip, the air supporting platform with the air supporting strip is used for the suspension support the panel that awaits measuring, bear the frame including first support, second support and the third support that sets gradually, first support with be equipped with on the third support the air supporting strip, be equipped with on the second support the air supporting platform, the preliminary examination mechanism and/or the scanning of reinspection mechanism during the panel that awaits measuring, the panel that awaits measuring suspend in on the air supporting platform.

Further, the plummer still includes panel fixture, panel fixture is used for driving the panel that awaits measuring is in the motion on the plummer.

Further, panel fixture includes adsorption apparatus, adsorption apparatus is suitable for vertical absorption the panel that awaits measuring to be suitable for the drive the panel that awaits measuring removes or horizontal hunting.

Furthermore, the plummer also comprises a pre-positioning mechanism, and the pre-positioning mechanism is used for correcting the position of the panel to be detected.

Further, the pre-positioning mechanism comprises a first movable support frame and a first fixed support frame which are arranged at intervals along a first direction, a first positioning wheel mechanism is arranged on the first movable support frame, a second positioning wheel mechanism is arranged on the first fixed support frame, and the first positioning wheel mechanism is suitable for moving towards the second positioning wheel mechanism so as to correct the position of the panel to be detected.

Further, the first movable support frame is arranged on the adsorption mechanism.

Furthermore, the pre-positioning mechanism comprises a second movable support frame and a second fixed support frame which are arranged at intervals along the first direction, third positioning wheel mechanisms are arranged on the second movable support frame and the second fixed support frame respectively, and the third positioning wheel mechanisms of the second movable support frame and the second fixed support frame are suitable for relative movement so as to correct the position of the panel to be detected.

Further, the second movable support is erected on the adsorption mechanism.

Furthermore, the pre-positioning mechanism further comprises two third movable support frames which are arranged at intervals along the second direction, a fourth positioning wheel mechanism is arranged on each third movable support frame, and the fourth positioning wheel mechanisms are suitable for relative movement to correct the position of the panel to be measured, wherein the first direction is crossed with the second direction.

Furthermore, the air floating mechanism comprises a plurality of air floating strips, the air floating strips are arranged at intervals, the third movable supporting frame is arranged in a gap between the two air floating strips, and the height of the fourth positioning wheel mechanism is suitable for being adjusted to be located at the same height with the panel to be detected.

Further, the preliminary examination mechanism includes first focus device and locates first camera of sweeping on the first focus device, first camera of sweeping is used for right the panel that awaits measuring scans, first focus device is used for monitoring first camera of sweeping with the distance of panel that awaits measuring, and according to first camera of sweeping with the distance of panel that awaits measuring makes first camera of sweeping relative first longmen vertical motion, so that first camera of sweeping with the distance of panel that awaits measuring is the best imaging distance of first camera of sweeping.

Further, first focus device includes voice coil motor, fly leaf, connecting plate and gravity compensation mechanism, voice coil motor stator is located on the connecting plate, voice coil motor active cell with the fly leaf is connected, just sweep the camera and be suitable for locating on the fly leaf, the fly leaf is suitable for relatively the vertical motion of connecting plate, voice coil motor is used for the drive the fly leaf motion, in order to drive just sweep the camera motion, gravity compensation mechanism be used for provide one with just sweep the opposite constant force of gravity direction of camera.

Furthermore, the rechecking mechanism comprises a second focusing device and a rechecking camera arranged on the second focusing device, the rechecking camera is used for rechecking the panel to be detected, the second focusing device is used for monitoring the distance between the rechecking camera and the panel to be detected, and the rechecking camera vertically moves relative to the second gantry according to the distance between the rechecking camera and the panel to be detected, so that the distance between the rechecking camera and the panel to be detected is the optimal imaging distance of the rechecking camera.

Furthermore, the second focusing device comprises a voice coil motor, a movable plate, a connecting plate and a gravity compensation mechanism, wherein a voice coil motor stator is arranged on the connecting plate, a voice coil motor rotor is connected with the movable plate, the compound scanning camera is suitable for being arranged on the movable plate, the movable plate is suitable for moving vertically relative to the connecting plate, and the voice coil motor is used for driving the movable plate to move so as to drive the compound scanning camera to move.

Further, the second gantry comprises a second cross beam, a linear driving mechanism and an air bearing, a walking cavity is arranged in the second cross beam, the linear driving mechanism is arranged in the walking cavity and is suitable for reciprocating linear motion in the walking cavity, the linear driving mechanism is connected with the air bearing, the air bearing is arranged around the second cross beam, an air film gap is formed between each surface of the air bearing and the second cross beam, and the air bearing is used for installing the re-inspection mechanism.

The invention has the beneficial effects that: the two ends of the first gantry and the two ends of the second gantry are respectively connected to the bearing platform through leveling mechanisms, the primary inspection mechanism is arranged on the first gantry, and the secondary inspection mechanism is arranged on the second gantry, so that the heights of the two ends of the first gantry and/or the heights of the two ends of the second gantry can be adjusted through the liftable leveling mechanisms, the first gantry and the second gantry can be guaranteed to be parallel to the bearing platform through adjusting the corresponding leveling mechanisms, the primary scanning camera and the secondary scanning camera can have correct imaging angles, and imaging effects can be guaranteed; in addition, the heights of the first gantry and the second gantry can be adjusted by adjusting the corresponding leveling mechanisms, so that the distances between the first scanning camera and the panel to be detected and the distances between the second scanning camera and the panel to be detected are ensured to be proper imaging distances.

Drawings

FIG. 1 is an exemplary diagram of a panel defect detecting apparatus according to an embodiment of the present invention;

FIG. 2 is a schematic top view illustrating a process of inspecting a panel defect inspection apparatus according to an embodiment of the present invention;

FIG. 3 is a schematic side view of a panel defect inspection apparatus according to an embodiment of the present invention;

FIG. 4 is a schematic view of a carrier stage according to an embodiment of the invention;

FIG. 5 is an exemplary diagram of a panel defect inspection apparatus rectification process according to an embodiment of the present invention;

FIG. 6 is an enlarged view taken at I in FIG. 5;

fig. 7 is a schematic structural view of a second movable supporting frame integrated on a clamping mechanism according to an embodiment of the present invention;

FIG. 8 is a block diagram of a clamping mechanism according to an embodiment of the invention;

FIG. 9 is a schematic diagram of a clamping mechanism adsorbing a panel to be tested according to an embodiment of the invention;

FIG. 10 is a schematic structural view of a second fixing support and a corresponding structure thereon according to an embodiment of the present invention;

FIG. 11 is a schematic structural diagram of a second movable supporting frame and a corresponding structure thereon according to an embodiment of the present invention;

FIG. 12 is a schematic structural view of a third movable supporting frame and a corresponding structure thereon according to an embodiment of the present invention;

FIG. 13 is a schematic structural diagram of a first gantry in accordance with an embodiment of the present invention;

FIG. 14 is a schematic structural diagram of a second gantry in accordance with an embodiment of the present invention;

FIG. 15 is a schematic structural diagram of a second focusing device according to an embodiment of the present invention;

FIG. 16 is a bottom view of a second focusing apparatus according to an embodiment of the present invention;

fig. 17 is a schematic diagram of a focusing process of a second focusing device according to an embodiment of the invention.

Description of reference numerals:

1-a bearing frame, 11-a first bracket, 12-a second bracket, 13-a third bracket, 2-an air floating mechanism, 21-an air floating table, 22-an air floating strip, 3-a panel clamping mechanism, 31-a second supporting cross beam, 32-a driving device, 33-a guiding device, 34-an adsorption mechanism, 35-a support, 4-a pre-positioning mechanism, 41-a first movable supporting frame, 411-a first positioning wheel mechanism, 412-a first adjusting device, 42-a first fixed supporting frame, 421-a second positioning wheel mechanism, 43-a second movable supporting frame, 431-a third supporting cross beam, 44-a second fixed supporting frame, 441-a supporting base, 442-a fixed base, 443-an adjusting spring and 444-a height adjusting seat, 445-a first supporting beam, 446-a third positioning wheel mechanism, 4461-a third positioning wheel, 45-a third movable supporting frame, 451-a fourth positioning wheel mechanism, 4511-a fourth positioning wheel, 452-a second adjusting device, 453-a third adjusting device, 454-a supporting seat, 5-a first gantry, 51-a first beam, 52-a first upright post, 53-a first guiding mechanism, 54-a driving mechanism, 6-a second gantry, 61-a second beam, 62-a second upright post, 63-an air bearing, 64-a linear driving mechanism, 7-a primary inspection mechanism, 71-a first focusing device, 72-a primary scanning camera, 8-a secondary inspection mechanism, 81-a second focusing device, 811-a voice coil motor, 812-a gravity compensation mechanism, 813-fixed guide part, 814-movable guide part, 815-first ranging sensor, 816-position encoder, 817-connecting plate, 818-movable plate, 82-repeated scanning camera, 9-panel to be measured and 10-jack.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", and the like, which indicate orientations or positional relationships, are based on the orientations or positional relationships shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, are not to be construed as limiting the present invention.

The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature.

As shown in the drawing, an XYZ coordinate system is provided in which an X-axis forward direction indicates "front", an X-axis reverse direction indicates "rear", a Y-axis forward direction indicates "right", a Y-axis reverse direction indicates "left", a Z-axis forward direction indicates "up", and a Z-axis reverse direction indicates "down".

In this embodiment, the first direction is a Y-axis direction, the second direction is an X-axis direction, and the second direction is a moving direction of the panel 9 to be measured on the air floating mechanism 2.

As shown in fig. 1 to 3, a panel defect detecting apparatus according to an embodiment of the present invention includes a carrier, a first gantry 5, a second gantry 6, a leveling mechanism, an initial detecting mechanism 7, and a re-detecting mechanism 8, the bearing platform is used for bearing a panel 9 to be tested and driving the panel 9 to be tested to move, two ends of the first gantry 5 and two ends of the second gantry 6 are respectively connected to the bearing platform through the leveling mechanisms, the leveling mechanism is suitable for lifting, the primary inspection mechanism 7 is arranged on the first gantry 5, the primary inspection mechanism 7 is suitable for moving on the first gantry 5, the rechecking mechanism 8 is arranged on the second gantry 6, the rechecking mechanism 8 is suitable for moving on the second gantry 6, the initial inspection mechanism 7 is used for scanning the panel 9 to be inspected, and the rechecking mechanism 8 is used for rechecking the panel 9 to be inspected.

The initial detection mechanism 7 and the re-detection mechanism 8 are respectively electrically connected with the controller; wherein, the preliminary examination mechanism 7 is used for scanning the panel 9 that awaits measuring and to the controller sends the scanning image, the controller is used for the analysis the scanning image is in order to confirm the defect point and the defect point coordinate of panel 9 that awaits measuring, and will defect point coordinate send recheck mechanism 8, recheck mechanism 8 is used for the basis defect point coordinate is right panel 9 that awaits measuring rechecks, and to the controller sends the recheck image, the controller still is used for the analysis the recheck image is in order to confirm the defect type of defect point.

Specifically, as shown in fig. 13 and 14, the first gantry 5 includes a first cross member 51, a first column 52, a first guide mechanism 53, and a drive mechanism 54. The first guide mechanism 53 comprises a first guide piece and a second guide piece, the second guide piece can move relative to the first guide piece, the first guide piece is installed on the first upright post 52, the second guide piece and the driving mechanism 54 are fixedly connected with the scanning gantry beam, the primary inspection mechanism 7 is fixed on the first beam 51, the driving mechanism 54 drives the first beam 51 to move, and then the primary inspection mechanism 7 installed on the first beam 51 is driven to move back and forth along the guide direction of the first guide mechanism 53. The second gantry 6 comprises a second upright post 62 and a second cross beam 61 arranged on the second upright post 62, a certain gap is formed between the second cross beam 61 and the upper surface of the support frame, and the rechecking mechanism 8 is arranged on one side surface of the second cross beam 61

In application, the initial inspection mechanism 7 is disposed at the front side of the first beam 51, and the re-inspection mechanism 8 is disposed at the front side of the second beam 61.

The two ends of the first gantry 5 and the two ends of the second gantry 6 are respectively connected to the bearing table through leveling mechanisms, the primary detection mechanism 7 is arranged on the first gantry 5, and the secondary detection mechanism 8 is arranged on the second gantry 6, so that the heights of the two ends of the first gantry 5 and/or the heights of the two ends of the second gantry 6 can be adjusted through the liftable leveling mechanisms, the first gantry 5 and the second gantry 6 can be ensured to be parallel to the bearing table by adjusting the corresponding leveling mechanisms, the primary scanning camera 72 and the secondary scanning camera 82 can have correct imaging angles, and imaging effects can be ensured; in addition, the heights of the first gantry 5 and the second gantry 6 can be adjusted by adjusting corresponding leveling mechanisms, so that the distances between the primary scanning camera 72 and the secondary scanning camera 82 and the panel 9 to be measured are ensured to be proper imaging distances.

Alternatively, as shown in fig. 1 and 4, the leveling mechanism is a jack 10.

By adopting the jack 10 as the adjusting mechanism, the parallelism between the first cross beam 51 and/or the second cross beam 61 and the air floatation platform can be quickly adjusted, the installation and adjustment difficulty can be reduced, and higher assembly precision can be more easily realized, so that the imaging quality of the optical detection motion platform is ensured.

Optionally, as shown in fig. 1 to 5, the carrying table includes a carrying frame 1 and an air floating mechanism 2 disposed on the carrying frame 1, where the air floating mechanism 2 is configured to suspend and support the panel 9 to be tested.

Specifically, the panel 9 to be detected is supported in a suspending manner through the air floating mechanism 2, friction force between the panel 9 to be detected and the bearing table is reduced, the panel 9 to be detected can move on the bearing table conveniently, the moving speed of the panel 9 to be detected on the bearing table can be improved, and therefore the detection efficiency is improved.

Optionally, as shown in fig. 4, the air floating mechanism 2 includes an air floating table 21 and an air floating strip 22, the air floating table 21 and the air floating strip 22 are used for supporting in a suspended manner the panel 9 to be tested, the bearing frame 1 includes a first support 11, a second support 12 and a third support 13 which are sequentially arranged, the first support 11 and the third support 13 are provided with the air floating strip 22, the second support 12 is provided with the air floating table 21, the preliminary inspection mechanism 7 and/or the re-inspection mechanism 8 scans the panel 9 to be tested, and the panel 9 to be tested is suspended on the air floating table 21.

In particular, the loading ledge 1 comprises, among other things, a first bracket 11, a second bracket 12, and a third bracket 13 arranged in sequence from front to back, the first bracket 11 and the third bracket 13 being rigidly connected to the second bracket 12, respectively. Air floating strips 22 are fixedly arranged on the first support 11 and the third support 13, and air floating platforms 21 are correspondingly arranged on the second support 12. The panel detection area and the non-panel detection area are distinguished, namely, the panel detection area and the non-panel detection area are divided into the air floating table 21 and the air floating strips 22, so that the panel detection area is guaranteed to have higher precision, namely, the air floating table 21 is guaranteed to have higher precision, the integral precision requirement is reduced, and the production cost of the bearing table is reduced.

In application, the air floating platform 21 comprises an integral flat plate, a plurality of air floating holes are formed in the flat plate, the air to be detected 9 is supported through the air floating holes, the air floating mechanism 2 comprises a plurality of air floating strips 22, each air floating strip 22 is arranged along a first direction, and each air floating strip 22 is arranged in parallel and at intervals.

Optionally, as shown in fig. 5, the carrier further includes a panel clamping mechanism 3, and the panel clamping mechanism 3 is configured to drive the panel 9 to be tested to move on the carrier.

Specifically, the panel clamping mechanism 3 is disposed on one side of the air floating mechanism 2 and can move from the front end to the rear end of the air floating mechanism 2, so as to drive the panel 9 to be tested to move on the bearing table after clamping the panel 9 to be tested.

Specifically, the panel clamping mechanism 3 includes a second supporting beam 31, a driving device 32, a guiding device 33, a clamping member and a support 35, in this embodiment, the clamping member is an adsorption mechanism 34, the second supporting beam 31 is disposed on the support 35, the second supporting beam 31 is disposed along the front-back direction, the driving device 32 is disposed on the second supporting beam 31, the driving device 32 is fixedly connected to the guiding device 33, the adsorption mechanism 34 is disposed on the guiding device 33, the moving direction of the adsorption mechanism 34 is limited by the guiding device 33, the driving device 32 drives the guiding device 33 to reciprocate along the beam direction, and then the adsorption mechanism 34 is driven to move, so as to realize the reciprocating movement of the panel 9 to be detected.

The panel clamping mechanism 3 can also be a clamp connected to the side end of the air floating mechanism 2 in a sliding manner, and clamps the panel 9 to be tested through the clamp and drives the panel 9 to be tested to move.

Preferably, as shown in fig. 5 to 9, the panel clamping mechanism 3 includes an adsorption mechanism 34, and the adsorption mechanism 34 is adapted to vertically adsorb the panel 9 to be tested and is adapted to drive the panel 9 to be tested to move.

The side of the adsorption mechanism 34 contacting the panel 9 to be tested needs to have a higher parallelism with respect to the panel 9 to be tested, so as to avoid affecting the parallelism of the panel 9 to be tested.

Through set up adsorption apparatus 34 on first activity support frame 41 to through the vertical panel 9 that awaits measuring of adsorption apparatus 34, make adsorption apparatus 34 can drive the panel 9 motion that awaits measuring, drive the panel 9 motion that awaits measuring through absorbent mode, compare and drive the panel 9 motion that awaits measuring with the centre gripping mode, can effectively reduce the probability of panel damage.

In the application, after the preliminary location of panel 9 that awaits measuring is accomplished, adsorption mechanism 34 can drive panel 9 that awaits measuring and move to aiming at the camera below, aim at the position of camera detection locating mark on the panel 9 that awaits measuring, adjust adsorption mechanism 34's angle according to the testing result, and then adjust the angle of panel 9 that awaits measuring to realize the accurate location of panel 9 that awaits measuring.

Optionally, the plummer further includes a pre-positioning mechanism 4, and the pre-positioning mechanism 4 is configured to correct the position of the panel 9 to be measured.

Specifically, the pre-positioning mechanism 4 is arranged to correct the panel 9 to be detected in the horizontal direction, so that the movement track of the panel 9 to be detected on the bearing table is limited, and the panel 9 to be detected is prevented from deviating from the preset movement track to influence the detection effect of the panel defects.

Optionally, the pre-positioning mechanism 4 includes a first movable support frame 41 and a first fixed support frame 42 that are arranged along a first direction at intervals, a first positioning wheel mechanism 411 is arranged on the first movable support frame 41, a second positioning wheel mechanism 421 is arranged on the first fixed support frame 42, and the first positioning wheel mechanism 411 is suitable for moving towards the second positioning wheel mechanism 421, so as to correct the position of the panel 9 to be measured.

Specifically, the first movable supporting frame 41 and the first fixed supporting frame 42 are respectively and fixedly installed on the left end and the right end of the first supporting frame 11, the first positioning wheel mechanism 411 includes a first adjusting device 412 and a first positioning wheel, the first adjusting device 412 is installed on the first movable supporting frame 41, the first adjusting device 412 is suitable for moving left or right relative to the first movable supporting frame 41, the first positioning wheel is installed on the first adjusting device 412, when the first adjusting device 412 moves, the first positioning wheel moves left or right relative to the first movable supporting frame 41, the second positioning wheel mechanism 421 includes a second positioning wheel, the second positioning wheel is installed on the first fixed supporting frame 42, the second positioning wheel cannot move left or right relative to the first fixed supporting frame 42, and the second positioning wheel mechanism 421 faces the direction of the first positioning wheel mechanism 411, therefore, when the panel 9 to be measured is transported from the previous station to the air floating strip 22 at the front end of the supporting frame, first adjusting device 412 moves to the right, drives the first locating wheel of installing on it and moves to the right, and first locating wheel moves to the side butt with the panel 9 that awaits measuring to promote the panel 9 that awaits measuring to move to the right, and the another side and the second locating wheel butt of panel 9 that awaits measuring until, thereby has rectified the panel 9 that awaits measuring through the cooperation of first locating wheel mechanism 411 and second locating wheel mechanism 421.

The first movable supporting frame 41 and the first fixed supporting frame 42 may further have corresponding height adjusting mechanisms, the height adjusting mechanism of the first movable supporting frame 41 is used for adjusting the height of the first positioning wheel, and the height adjusting mechanism of the first fixed supporting frame 42 is used for adjusting the height of the second positioning wheel. Through the setting of height adjustment mechanism for the height of first positioning wheel mechanism 411 and second positioning wheel mechanism 421 can independently be adjusted, and each positioning wheel mechanism installation and debugging mutually noninterference, thereby be convenient for adjust first positioning wheel mechanism 411 and second positioning wheel mechanism 421 to predetermined height, so that first positioning wheel mechanism 411 and second positioning wheel mechanism 421 can with the side butt of panel 9 that awaits measuring.

In use, the first movable support bracket 41 may have a structure similar to that of the second fixed support bracket 44 shown in fig. 10.

Optionally, the first movable supporting frame 41 is disposed on the adsorption mechanism 34. Through integrating first movable support frame 41 on adsorption apparatus 34 to make the correction of panel 9 that awaits measuring accomplish the back, panel fixture 3 need not the motion and can adsorb panel 9 that awaits measuring, thereby has saved the time that panel fixture 3 moved to pre-positioning mechanism 4 below, thereby has improved panel detection efficiency.

In another embodiment, as shown in fig. 5, 10 and 11, the pre-positioning mechanism 4 includes a second movable supporting frame 43 and a second fixed supporting frame 44 that are arranged at intervals along the first direction, a third positioning wheel mechanism 446 is arranged on each of the second movable supporting frame 43 and the second fixed supporting frame 44, and the third positioning wheel mechanism 446 of the second movable supporting frame 43 and the third positioning wheel mechanism 446 of the second fixed supporting frame 44 are adapted to move relatively to correct the position of the panel 9 to be measured.

In application, the second movable supporting frame 43 is provided with a plurality of third positioning wheel mechanisms 446, and the second fixed supporting frame 44 is correspondingly provided with a plurality of third positioning wheel mechanisms 446, so as to prevent the panel 9 to be measured from deviating in the correction process.

Specifically, as shown in fig. 11, the second movable supporting frame 43 and the second fixed supporting frame 44 are respectively disposed on the left and right ends of the first bracket 11, the third positioning wheel mechanism 446 includes a first adjusting device 412 and a third positioning wheel 4461, the first adjusting device 412 is respectively disposed on the second movable supporting frame 43 and the second fixed supporting frame 44, the first adjusting device 412 is adapted to move leftwards or rightwards, the third positioning wheel 4461 is respectively disposed on the second movable supporting frame 43 and the first adjusting device 412 of the second fixed supporting frame 44, when the first adjusting device 412 on the second movable supporting frame 43 moves, the third positioning wheel 4461 on the second movable supporting frame 43 moves leftwards or rightwards relative to the second movable supporting frame 43, when the first adjusting device 412 on the second fixed supporting frame 44 moves, the third positioning wheel 4461 on the second fixed supporting frame 44 moves leftwards or rightwards relative to the second fixed supporting frame 44, through the cooperation of the second movable supporting frame 43 and the first adjusting device 412 on the second fixed supporting frame 44, the relative movement between the third positioning wheel 4461 on the second movable supporting frame 43 and the third positioning wheel 4461 on the second fixed supporting frame 44 can be realized, so as to correct the position of the panel 9 to be measured.

Correspondingly, the second movable supporting frame 43 and the second fixed supporting frame 44 may also be provided with corresponding height adjusting mechanisms, so as to adjust the heights of the corresponding third positioning wheels 4461 through the height adjusting mechanisms. A plurality of third positioning wheel mechanisms 446 are arranged on the second movable supporting frame 43 and the second fixed supporting frame 44.

In application, as shown in fig. 10, the second fixing support frame 44 may be configured as follows, the second fixing support frame 44 includes a support base 441, a fixing base 442, an adjusting spring 443 and a height adjusting seat 444, the support base 441 is disposed on the support base 441, the fixing base 442 is disposed on the support base 441, the height adjusting seat 444 is connected to the fixing base 442 through the adjusting spring 443, wherein the height and the parallelism of the second fixing support frame 44 are adjusted through the cooperation of the height adjusting seat 444, the adjusting spring 443 and the fixing base 442, specifically, the height and the parallelism of the second fixing support frame 44 are adjusted through adjusting the tightness of the locking screw by locking the fixing base 442 to the support base 441 through the height adjusting seat 444 and the adjusting spring 443. The height adjusting seat 444 is provided with a first supporting beam 445, the first supporting beam 445 is provided with a plurality of adjusting device mounting seats, the first adjusting devices 412 are respectively mounted on the adjusting device mounting seats, the first adjusting devices 412 are arranged along the extending direction of the first supporting beam 445, the first adjusting devices 412 are provided with positioning wheel mounting seats, and the third positioning wheel 4461 is arranged on the positioning wheel mounting seats.

The height adjusting mechanism in the present application may adopt a combination structure similar to the height adjusting seat 444, the adjusting spring 443 and the fixing base 442.

Alternatively, as shown in fig. 6 and 7, the second movable supporting frame 43 is disposed on the adsorption mechanism 34.

If the pre-positioning mechanism 4 and the panel clamping mechanism 3 are separated, when the panel 9 to be measured is transported to the air floating mechanism 2 by external equipment, the position of the panel 9 to be measured needs to be corrected through the pre-positioning mechanism 4, after the correction is completed, the panel clamping mechanism 3 needs to move to the position below the pre-positioning mechanism 4, and then the panel 9 to be measured is clamped.

In this embodiment, through locating second movable support frame 43 adsorption apparatus constructs 34 to integrate second movable support frame 43 on panel fixture 3, thereby make the correction of panel 9 that awaits measuring accomplish the back, panel fixture 3 need not the motion can the centre gripping panel 9 that awaits measuring, thereby has saved the time that panel fixture 3 moved to pre-positioning mechanism 4 below, thereby has improved panel detection efficiency.

In application, when the second movable supporting frame 43 is disposed on the panel clamping mechanism 3, the panel clamping mechanism 3 includes the second supporting beam 31, the driving device 32, the guiding device 33, the adsorbing mechanism 34 and the support 35, the specific structure of the panel clamping mechanism 3 has been explained previously, and is not described herein again, except that the second movable supporting frame 43 is disposed on the adsorbing mechanism 34, so that when the driving device 32 drives the guiding device 33 to reciprocate along the direction of the second supporting beam 31, the second movable supporting frame 43 will reciprocate along the direction of the second supporting beam 31 with the adsorbing mechanism 34. The second movable supporting frame 43 includes a third supporting beam 431, the third supporting beam 431 is provided with a plurality of adjusting device mounting seats, the plurality of first adjusting devices 412 are respectively mounted on the plurality of adjusting device mounting seats, and the first adjusting devices 412 are provided with a third positioning wheel mechanism 446.

Optionally, as shown in fig. 5 and 12, the pre-positioning mechanism 4 further includes two third movable support frames 45 arranged at intervals along the second direction, a fourth positioning wheel mechanism 451 is arranged on the third movable support frame 45, and the two fourth positioning wheel mechanisms 451 are adapted to move relatively to correct the position of the panel 9 to be measured, where the first direction is crossed with the second direction.

Among them, the second direction is preferably perpendicular to the first direction.

Two third movable support frames 45 are arranged in the second direction, and a fourth positioning wheel mechanism 451 used for pushing the panel 9 to be tested is arranged on the third movable support frames 45, so that the panel 9 to be tested is pushed through the relative movement of the two fourth positioning wheel mechanisms 451, and the panel 9 to be tested is subjected to auxiliary correction; simultaneously, because first direction and second direction are perpendicular, then support the panel border from the panel all around simultaneously through locating wheel mechanism and carry out the panel correction, can prevent effectively that the panel from sliding, improve the location precision.

Specifically, two third movable supporting frames 45 are respectively arranged at the front end and the rear end of the front end bracket, the third movable supporting frames 45 comprise a supporting seat 454, a second adjusting device 452 and a third adjusting device 453, the second adjusting device 452 is arranged on the supporting seat 454, the second adjusting device 452 is suitable for moving forwards or backwards, the third adjusting device 453 is arranged on the second adjusting device 452, the third adjusting device 453 is suitable for moving upwards or downwards, the fourth positioning wheel mechanism 451 comprises a fourth positioning wheel 4511, and the fourth positioning wheel 4511 is arranged on the third adjusting device 453. A third adjusting device 453 can be further disposed on the supporting seat 454, a second adjusting device 452 can be further disposed on the third adjusting device 453, and a fourth positioning wheel 4511 can be further disposed on the second adjusting device 452.

Optionally, the air floating mechanism 2 includes a plurality of air floating strips 22, each of the air floating strips 22 is disposed at intervals, the third movable supporting frame 45 is disposed in a gap between the two air floating strips 22, and the height of the fourth positioning wheel mechanism 451 is suitable for being adjusted to be located at the same height as the panel 9 to be measured.

Specifically, since the third movable supporting frames 45 are respectively disposed at the front end and the rear end of the front end bracket, and the front-rear direction is the moving direction of the panel 9 to be measured, after the panel 9 to be measured is corrected, in order to avoid the fourth positioning wheels 4511 disposed on the third movable supporting frames 45 from obstructing the front-rear movement of the panel 9 to be measured, the height of the fourth positioning wheels 4511 needs to be adjusted to be lower than the height of the panel 9 to be measured. In order to achieve the above purpose, in this embodiment, the air-floating strips 22 are configured to include a plurality of air-floating strips 22, the air-floating strips 22 support the panel 9 to be tested in a floating manner, a gap is formed between two adjacent air-floating strips 22, and the third movable supporting frame 45 is disposed in the gap between two air-floating strips 22, so that the fourth positioning wheel 4511 can descend into the gap, thereby preventing the fourth positioning wheel 4511 from obstructing the movement of the panel 9 to be tested.

Optionally, as shown in fig. 13, the preliminary inspection mechanism 7 includes a first focusing device 71 and a preliminary scanning camera 72 disposed on the first focusing device 71, the preliminary scanning camera 72 is configured to perform preliminary scanning on the panel 9 to be detected, the first focusing device 71 is configured to monitor a distance between the preliminary scanning camera 72 and the panel 9 to be detected, and vertically move relative to the first gantry 5 according to the distance between the preliminary scanning camera 72 and the panel 9 to be detected, so that the distance between the preliminary scanning camera 72 and the panel 9 to be detected is an optimal imaging distance of the preliminary scanning camera 72.

Wherein the initial scan camera 72 comprises a line scan camera.

In application, assuming that the optimal imaging distance of the first scanning camera 72 is x, when the first focusing device 71 detects that the vertical distance between the first scanning camera 72 and the panel 9 to be measured is y, comparing x and y, and moving the first scanning camera 72 upward or downward relative to the first gantry 5 according to the comparison result, so that the vertical distance between the first scanning camera 72 and the panel 9 to be measured is x.

Because the panel 9 to be detected has a tiny air flotation on the air flotation platform, and the distance between the first scanning camera 72 and the panel 9 to be detected is changed, it is difficult to ensure that the distance between the first scanning camera 72 and the panel 9 to be detected is always the optimal imaging distance, therefore, in this embodiment, the first scanning camera 72 is arranged on the first focusing device 71, so as to ensure that the distance between the first scanning camera 72 and the panel 9 to be detected is the optimal imaging distance through the focusing of the first focusing device 71, so as to ensure the imaging effect of the first scanning camera 72, and further improve the effect of detecting the panel defects.

As shown in fig. 14 to 16, the second focusing device 81 includes a voice coil motor 811, a first distance measuring sensor 815, a position encoder 816 and a processor, the voice coil motor 811, the first distance measuring sensor 815 and the position encoder 816 are respectively electrically connected to the processor, the first distance measuring sensor is configured to monitor a spacing distance between the scanning camera 82 and the panel 9 to be measured and feed back the spacing distance to the processor, the position encoder 816 is configured to monitor position information of the scanning camera 82 and feed back the position information to the processor, the voice coil motor 811 is configured to drive the scanning camera 82 to move, the processor is configured to control the voice coil motor 811 according to the spacing distance, the position information and a predicted optimal imaging distance of the scanning camera 82, so that the voice coil motor 811 drives the scanning camera 82 to move to an optimal imaging position, to ensure the imaging effect of the complex scan camera 82.

When the first focusing device 61 and the second focusing device 81 have the same structure, in the first focusing device 61, the first scanning camera 72 is mounted on the movable plate 818 corresponding to the mounting position of the second scanning camera 82 in the second focusing device 8.

In application, the first distance measuring sensor 815 monitors the spacing distance between the scanning camera 82 and the panel 9 in real time and feeds the spacing distance back to the processor, the processor compares the spacing distance with the optimal imaging distance of the scanning camera 82, wherein the optimal imaging distance of the multi-scan camera 82 is predetermined and preset in the processor, when the spacing distance is different from the optimal imaging distance of the multi-scan camera 82, the distance that the multi-scan camera 82 needs to move is calculated, then the multi-scan camera 82 is driven to move upwards or downwards, and during the movement, the position encoder 816 acquires the position information of the multi-scan camera 82 in real time, so as to acquire the movement distance of the multi-scan camera 82 and feed back the movement distance to the processor, thus, the position encoder 816, the first ranging sensor 815 and the processor form a closed-loop control, which enables the complex scan camera 82 to move to the optimal imaging position with precision and high speed.

Monitoring the spacing distance from the double-scanning camera 82 to the surface of the panel 9 to be detected through the first distance measuring sensor 815 and sending detection data to the processor, so that the processor can compare the spacing distance with the optimal imaging distance of the double-scanning camera 82 conveniently, and the distance required by walking of the double-scanning camera 82 is obtained; meanwhile, the voice coil motor 811 is controlled by the processor to drive the double-scan camera 82 to move to the optimal imaging position, and in the operation process of the double-scan camera 82, the current position information of the double-scan camera 82 is fed back in real time through the position encoder 816, so that closed-loop control is formed by the position encoder, the first distance measuring sensor 815 and the processor, and the double-scan camera 82 can be ensured to accurately move to the optimal imaging position at high speed.

Optionally, the first focusing device 71 includes a voice coil motor 811, a movable plate 818, a connecting plate 817 and a gravity compensation mechanism 812, wherein a stator of the voice coil motor 811 is disposed on the connecting plate 817, a mover of the voice coil motor 811 is connected to the movable plate 818, the first-scan camera 72 is adapted to be disposed on the movable plate 818, the movable plate 818 is adapted to move vertically relative to the connecting plate 817, the voice coil motor 811 is configured to drive the movable plate 818 to move the first-scan camera 72, and the gravity compensation mechanism 812 is configured to output a constant force in a direction opposite to a gravity direction of the first-scan camera 72.

By using the voice coil motor 811 as the driving device 32, the high-frequency reciprocating motion of the initial scanning camera 72 can be realized by using the high-frequency high-speed response characteristic of the voice coil motor 811, thereby realizing the rapid focusing during the panel motion. In addition, the gravity compensation mechanism 812 is combined with the voice coil motor 811, and a constant force opposite to the gravity direction of the initial scanning camera 72 is output through the gravity compensation mechanism 812, so that the defect that the output force of the voice coil motor 811 is insufficient is overcome, and the focusing of the heavy-load optical device is realized.

Optionally, as shown in fig. 14, the review mechanism 8 includes a second focus device 81 and a review camera 82 disposed on the second focus device 81, the review camera 82 is configured to review the panel 9 to be detected, the second focus device 81 is configured to monitor a distance between the review camera 82 and the panel 9 to be detected, and vertically move the review camera 82 relative to the second gantry 6 according to the distance between the review camera 82 and the panel 9 to be detected, so that the distance between the review camera 82 and the panel 9 to be detected is the optimal imaging distance of the review camera 82.

The complex scan camera 82 includes an area scan camera.

Because the panel 9 to be detected has a slight air flotation on the air flotation platform, and the distance between the double scan camera 82 and the panel 9 to be detected is changed, it is difficult to ensure that the distance between the double scan camera 82 and the panel 9 to be detected is always the optimal imaging distance, and by arranging the double scan camera 82 on the second focusing device 81, the distance between the double scan camera 82 and the panel 9 to be detected is the optimal imaging distance through the automatic focusing of the second focusing device 81, so as to ensure the imaging effect of the double scan camera 82, and further improve the effect of detecting the panel defects.

Alternatively, as shown in fig. 15 to 17, the second focusing device 81 includes a voice coil motor 811, a movable plate 818, a connecting plate 817 and a gravity compensation mechanism 812, wherein a stator of the voice coil motor 811 is disposed on the connecting plate 817, a mover of the voice coil motor 811 is connected to the movable plate 818, the double scan camera 82 is adapted to be disposed on the movable plate 818, the movable plate 818 is adapted to move vertically relative to the connecting plate 817, the voice coil motor 811 is configured to drive the movable plate 818 to move the double scan camera 82, and the gravity compensation mechanism 812 is configured to output a constant force opposite to a gravity direction of the double scan camera 82.

By using the voice coil motor 811 as the driving device 32, the high-frequency reciprocating motion of the double scan camera 82 can be realized by using the high-frequency high-speed response characteristic of the voice coil motor 811, thereby realizing the rapid automatic focusing in the panel motion process. In addition, the gravity compensation mechanism 812 is combined with the voice coil motor 811, and a constant force opposite to the gravity direction of the double-scan camera 82 is output through the gravity compensation mechanism 812, so that the defect that the output force of the voice coil motor 811 is insufficient is overcome, and the automatic focusing of the heavy-load optical device is realized.

In application, the first focusing device 71 and the second focusing device 81 have the same structure, the second focusing device 81 includes a voice coil motor 811, a gravity compensation mechanism 812, a fixed guide 813, a movable guide 814, a first distance measuring sensor 815, a position encoder 816, a connecting plate 817 and a movable plate 818, the connecting plate 817 is adapted to be mounted on the second beam 61, a stator of the voice coil motor 811 is fixed on the connecting plate 817, a mover of the voice coil motor 811 is connected with the movable plate 818, the fixed guide 813 is mounted on the connecting plate 817, the movable guide 814 is fixedly connected with the movable plate 818, one side of the gravity compensation unit is connected with the connecting plate 817, and the other side is connected with the movable plate 818; the double-scan camera 82 is fixedly mounted on the movable plate 818, the voice coil motor 811 drives the movable plate 818 to move, and further drives the double-scan camera 82 to move, and simultaneously, the moving track of the movable plate 818 is limited through the cooperation of the movable guide 814 and the fixed guide 813, so that the moving track of the double-scan camera 82 is limited. A first distance measuring sensor 815 is installed on the moving plate 818 or the double scan camera 82 for detecting the distance from the optical lens to the upper surface of the panel 9; a position encoder 816 is mounted on the movable plate 818 for feeding back the distance traveled by the scanning camera 82 to the voice coil motor 811 in real time.

Specifically, the stator of the voice coil motor 811 is disposed on the connecting plate 817, and the mover of the voice coil motor 811 is connected to the movable plate 818, so that the voice coil motor 811 can drive the movable plate 818 to move relative to the connecting plate 817, and since the double scan camera 82 is disposed on the movable plate 818, the voice coil motor 811 drives the movable plate 818 to drive the double scan camera 82. In addition, if the voice coil motor 811 is directly connected to the double scan camera 82, the voice coil motor 811 drives the double scan camera 82 to directly apply a force to the double scan camera 82, which is likely to cause deformation of the double scan camera 82, and further affect the imaging effect of the double scan camera 82. In the present embodiment, the voice coil motor 811 is connected to the double-scan camera 82 through the movable plate 818, the deformation of the movable plate 818 does not affect the double-scan camera 82, the movable plate 818 and the double-scan camera 82 have a larger contact area, the stress of the double-scan camera 82 is more uniform when driven, and the deformation of the double-scan camera 82 is smaller; meanwhile, since the moving part is the whole of the moving plate 818 and the double-scan camera 82, the rigidity is high, and the deformation degree of the double-scan camera 82 is further reduced.

Alternatively, as shown in fig. 14 to 16, the position encoder 816 is disposed on the movable plate 818, and the first ranging sensor 815 is adapted to be disposed on the double scan camera 82.

Specifically, since the moving plate 818 is provided with the double-scan camera 82, the moving distance of the moving plate 818 is the moving distance of the double-scan camera 82, the effect obtained by disposing the position encoder 816 on the moving plate 818 and the effect obtained by disposing the position encoder 816 on the double-scan camera 82 are the same, and the disposition of the position encoder 816 on the double-scan camera 82 may press the double-scan camera 82, which may cause local deformation of the double-scan camera 82 and affect the imaging effect of the double-scan camera 82, therefore, in this embodiment, the position encoder 816 is disposed on the moving plate 818.

In order to ensure the imaging effect, the distance between the optical lens of the double scan camera 82 and the panel 9 to be measured needs to be the optimal imaging distance, and the first distance measuring sensor 815 cannot be disposed at the same position as the optical lens, so that in order to reduce the possible error, the first distance measuring sensor 815 is required to be as close to the optical lens as possible, and therefore, the first distance measuring sensor 815 is disposed on the double scan camera 82.

In this embodiment, optionally, the first ranging sensor 815 may also be disposed at a corresponding position of the movable plate 818, so as to avoid the deformation of the double scan camera 82 caused by the first ranging sensor 815 being disposed on the double scan camera 82.

The voice coil motor 811 has a characteristic of high-frequency response, but has a defect of insufficient output, and it is difficult to drive the large-load rescan camera 82 to perform high-frequency reciprocating motion, so in this embodiment, the gravity compensation mechanism 812 compensates for the defect of insufficient output of the voice coil motor 811, and can greatly reduce the output required by the voice coil motor 811, which is beneficial to reducing the size of the voice coil motor 811, and simultaneously can ensure that the voice coil motor 811 can stably drive the large-load rescan camera 82 to perform high-frequency reciprocating motion, ensure the image acquisition stability of the rescan camera 82, and ensure that the distance from the rescan camera 82 to the surface of the panel 9 to be measured is the optimal imaging distance.

In this application, the magnitude of the constant force output by the gravity compensation mechanism 812 is preferably the same as the magnitude of the gravity force received by the movable plate 818 and the structure thereon.

Optionally, the gravity compensation mechanism 812 is an air cylinder, a piston rod of the air cylinder is connected to the movable plate 818, and a cylinder barrel of the air cylinder is disposed on the connecting plate 817.

Specifically, the air cylinder includes a cylinder barrel and a piston rod, a piston cavity is disposed in the cylinder barrel, the piston rod is disposed in the piston cavity, and when the air pressure in the piston cavity is constant, the thrust force applied to the piston rod is constant, so that when the gravity compensation mechanism 812 is an air cylinder, a constant force can be stably output to act on the movable plate 818.

In use, the force exerted by the cylinder on movable plate 818 may be varied by varying the air pressure within the piston chamber of the cylinder.

In another embodiment, the gravity compensation mechanism 812 includes an electromagnet, a magnetic attraction member and a second distance measuring sensor, when the electromagnet is powered on, an electromagnetic acting force exists between the electromagnet and the magnetic attraction member, the magnetic attraction member is disposed on the movable plate 818, the second distance measuring sensor is electrically connected to the electromagnet, the second distance measuring sensor is used for measuring a distance between the magnetic attraction member and the electromagnet, and the electromagnet is used for adjusting a current input to the electromagnet according to the distance so that the electromagnetic acting force between the electromagnet and the magnetic attraction member is a constant force.

Optionally, the second focusing device 81 further comprises a second guiding mechanism for limiting the moving direction of the movable plate 818 relative to the connecting plate 817.

Since the panel 9 to be measured is raised and lowered on the air floating platform, in order to ensure the imaging effect of the double scan camera 82, the double scan camera 82 should move up and down along with the air floating platform, in order to define the motion track of the double scan camera 82 relative to the connecting plate 817, a second guiding mechanism needs to be arranged on the connecting plate 817, and the moving direction of the movable plate 818 relative to the connecting plate 817 is defined by the second guiding mechanism, so as to define the moving direction of the double scan camera 82 arranged on the movable plate 818.

Alternatively, the second guiding mechanism includes a movable guiding member 814 and a fixed guiding member 813, the fixed guiding member 813 is disposed on the connecting plate 817, the movable guiding member 814 is connected to the movable plate 818, and the movable guiding member 814 is adapted to move along the extending direction of the fixed guiding member 813 relative to the fixed guiding member 813.

The extending direction of the fixing guide 813 is the vertical direction.

Specifically, the fixed guide 813 is slidably connected to the movable guide 814, and the movable guide 814 can only move up and down due to the restriction of the fixed guide 813, so that the movable guide 814 is connected to the movable plate 818 by disposing the fixed guide 813 on the connecting plate 817, so that the movable plate 818 is in the up-down direction with respect to the movable direction of the connecting plate 817, thereby defining the moving direction of the double scan camera 82 as the up-down direction.

Optionally, the fixed guide 813 includes two guide rails, the two guide rails are parallel and spaced apart, and the gravity compensation mechanism 812 is disposed between the two guide rails.

Specifically, the gravity compensation mechanism 812 is disposed between the two guide rails, so that the compactness of the overall structure of the second focusing device 81 is improved, and the volume of the second focusing device 81 is reduced.

The guide rail may be an air-floating rail as described below.

Optionally, the fixed guide 813 includes an air floating rail, an air film gap is formed between the movable guide 814 and the air floating rail, and the air floating rail is disposed on the connecting plate 817.

Specifically, since an air film gap is formed between the movable guide 814 and the air floatation rail, the friction force between the air floatation rail and the movable guide 814 is low, and compared with the traditional contact type transmission mode adopting a linear guide rail, the friction and wear are reduced, and the service life is prolonged; on the other hand, the conventional linear guide has inconsistent deflection deformation at each positioning position, which results in inconsistent positioning accuracy of the movable guide when the movable guide is positioned at a short distance or a long distance, making it difficult for the double-scan camera 82 to accurately move to the optimal imaging position. The air floatation track has an error homogenization function, and can realize consistent positioning precision of the movable guide piece when the movable guide piece is positioned at a short distance or a long distance, so that the accuracy of the focusing process of the double-scanning camera 82 is improved.

Optionally, the movable guide 814 includes an air bearing, an air film gap is formed between the air bearing and the fixed guide 813, and the air bearing is connected to the movable plate 818. The same effects as those of the above embodiment can be achieved by this embodiment.

Optionally, the second focusing device 81 further includes two third distance measuring sensors, the third distance measuring sensors are used for monitoring the distance between the third distance measuring sensors and the panel 9 to be measured, and the distance between the two third distance measuring sensors and the lower edge of the movable plate 818 is the same.

In general, during assembly, the movable plate 818 is parallel to the panel 9 to be measured, but after the second focusing device 81 is used for a period of time, the movable plate 818 may tilt relative to the panel 9 to be measured, and when the tilt angle exceeds a certain value, the imaging effect of the multiple scanning camera 82 on the movable plate 818 will be deteriorated, and therefore, the tilt angle of the movable plate 818 needs to be monitored for subsequent adjustment. In this embodiment, the distances measured by the two third distance measuring sensors are compared to determine whether the movable plate 818 is parallel to the panel 9 to be measured according to the measurement data, and when the distances measured by the third distance measuring sensors are inconsistent, it can be determined that the lower edge of the movable plate 818 is not parallel to the panel, and the angle of the movable plate 818 can be adjusted according to the measurement data.

Optionally, as shown in fig. 14, the second gantry 6 includes a second cross beam 61, a linear driving mechanism 64, and an air bearing 63, a walking cavity is disposed in the second cross beam 61, the linear driving mechanism 64 is disposed in the walking cavity, the linear driving mechanism 32 is adapted to reciprocate in the walking cavity, the linear driving mechanism 64 is connected to the air bearing 63, the air bearing 63 is disposed around the second cross beam 61, an air film gap is formed between each surface of the air bearing 63 and the second cross beam 61, and the air bearing 63 is used for mounting the re-inspection mechanism 8.

The second cross beam 61 is provided with a walking cavity, and the linear driving mechanism 64 is arranged in the walking cavity, so that the structural compactness of the second gantry 6 is improved; meanwhile, the linear driving mechanism 64 is connected with the air bearing 63, and air film gaps are formed between each surface of the air bearing 63 and the second cross beam 61, so that friction force between the air bearing 63 and the gantry cross beam is small, the linear driving mechanism 64 can conveniently and stably drive the air bearing 63 to move, the stable movement of the re-inspection mechanism 8 installed on the air bearing 63 is further ensured, and the imaging effect of the re-inspection mechanism 8 is improved.

In this embodiment, the detection process of the panel 9 to be detected is as follows, when the panel is transferred from the previous station to the air floating strip 22 at the front end, the panel clamping mechanism 3 drives the second movable supporting frame 43 to move to the correcting position, the height adjusting mechanism on the third movable supporting frame 45 adjusts the height of the fourth positioning wheel mechanism 451, so that the fourth positioning wheel mechanism 451 moves upwards to the same height as the panel 9 to be detected, then the second adjusting device 452 on the third movable supporting frame 45 adjusts simultaneously to drive the fourth positioning wheel mechanism 451 to move to abut against the front and rear edges of the panel 9 to be detected, at the same time, the first adjusting devices 412 on the first supporting beam 445 and the third supporting beam 431 act simultaneously to drive the third positioning wheel mechanism 446 on the second fixed supporting frame 44 and the second movable supporting frame 43 to move simultaneously to the left and right edges of the panel 9 to be detected, and the first positioning wheel mechanism 411 and the fourth positioning wheel mechanism 451 cooperate to abut against the panel edges from the left and right directions and front directions of the panel respectively After the correction of the panel is completed, the adsorption mechanism 34 of the panel clamping mechanism 3 adsorbs the edge of the panel, and the first positioning wheel mechanism 411 and the fourth positioning wheel mechanism 451 are reset to start the precise positioning of the panel 9 to be measured. After the precise positioning is finished, the adsorption mechanism 34 drives the panel 9 to be detected to move to the air floating platform 21 and drives the panel 9 to be detected to reciprocate on the air floating platform 21; the scanning camera is arranged on the front side surface of the gantry beam, the repeated scanning camera 82 is arranged on the other side surface of the gantry beam, and the scanning camera on the gantry beam moves back and forth along the direction of the gantry beam at the moment, so that the defect scanning identification and the defect coordinate positioning are carried out on the panel 9 to be detected passing through the lower part of the scanning camera; meanwhile, the scanning camera 82 also moves back and forth along the direction of the gantry beam to perform re-inspection and defect classification on the panel 9 to be detected passing below the scanning camera.

Although the present disclosure has been described above, the scope of the present disclosure is not limited thereto. Various changes and modifications may be effected therein by one of ordinary skill in the pertinent art without departing from the spirit and scope of the present disclosure, and these changes and modifications are intended to be within the scope of the present disclosure.

Claims (17)

1. The panel defect detection equipment is characterized by comprising a bearing platform, a first gantry (5), a second gantry (6), a leveling mechanism, an initial detection mechanism (7) and a rechecking mechanism (8), wherein the bearing platform is used for bearing a panel (9) to be detected and driving the panel (9) to be detected to move, the two ends of the first gantry (5) and the two ends of the second gantry (6) are respectively connected onto the bearing platform through the leveling mechanism, the leveling mechanism is suitable for lifting, the initial detection mechanism (7) is arranged on the first gantry (5), the initial detection mechanism (7) is suitable for moving on the first gantry (5), the rechecking mechanism (8) is arranged on the second gantry (6), the rechecking mechanism (8) is suitable for moving on the second gantry (6), the initial detection mechanism (7) is used for scanning the panel (9) to be detected, and the rechecking mechanism (8) is used for rechecking the panel (9) to be detected.

2. The panel defect detecting apparatus according to claim 1, wherein the carrying table comprises a carrying frame (1) and an air floating mechanism (2) arranged on the carrying frame (1), and the air floating mechanism (2) is used for supporting the panel (9) to be detected in a floating manner.

3. The panel defect detecting apparatus according to claim 2, wherein the air floating mechanism (2) includes an air floating table (21) and an air floating bar (22), the air floating table (21) and the air floating bar (22) are used for supporting the panel (9) to be detected in a floating manner, the bearing frame (1) includes a first support (11), a second support (12) and a third support (13) which are sequentially arranged, the air floating bar (22) is arranged on the first support (11) and the third support (13), the air floating table (21) is arranged on the second support (12), and the panel (9) to be detected is suspended on the air floating table (21) when the panel (9) to be detected is scanned by the preliminary inspection mechanism (7) and/or the repeated inspection mechanism (8).

4. The panel defect detecting apparatus according to claim 3, wherein the carrier table further comprises a panel clamping mechanism (3), and the panel clamping mechanism (3) is used for driving the panel (9) to be detected to move on the carrier table.

5. The panel defect detecting apparatus according to claim 4, wherein the panel holding mechanism (3) comprises an adsorption mechanism (34), and the adsorption mechanism (34) is adapted to vertically adsorb the panel (9) to be detected and to drive the panel (9) to be detected to move.

6. The panel defect detecting apparatus according to claim 5, wherein the loading stage further comprises a pre-positioning mechanism (4), and the pre-positioning mechanism (4) is used for correcting the position of the panel (9) to be detected.

7. The panel defect detecting apparatus according to claim 6, wherein the pre-positioning mechanism (4) comprises a first movable supporting frame (41) and a first fixed supporting frame (42) arranged at intervals along a first direction, a first positioning wheel mechanism (411) is arranged on the first movable supporting frame (41), a second positioning wheel mechanism (421) is arranged on the first fixed supporting frame (42), and the first positioning wheel mechanism (411) is adapted to move towards the second positioning wheel mechanism (421) to correct the position of the panel (9) to be detected.

8. The panel defect detecting apparatus according to claim 7, wherein the first movable supporting frame (41) is provided on the suction mechanism (34).

9. The panel defect detecting apparatus according to claim 6, wherein the pre-positioning mechanism (4) comprises a second movable supporting frame (43) and a second fixed supporting frame (44) spaced apart from each other along the first direction, each of the second movable supporting frame (43) and the second fixed supporting frame (44) is provided with a third positioning wheel (4461) mechanism (446), and the third positioning wheel (4461) mechanism (446) of the second movable supporting frame (43) and the third positioning wheel (4461) mechanism (446) of the second fixed supporting frame (44) are adapted to move relatively to each other to correct the position of the panel (9) to be detected.

10. The panel defect detecting apparatus according to claim 9, wherein the second movable supporting frame (43) is provided on the suction mechanism (34).

11. The panel defect detecting apparatus according to any one of claims 7 to 10, wherein the pre-positioning mechanism (4) further comprises two third movable supporting frames (45) arranged at intervals along the second direction, a fourth positioning wheel mechanism (451) is arranged on the third movable supporting frames (45), and the two fourth positioning wheel mechanisms (451) are suitable for relative movement to correct the position of the panel (9) to be detected, wherein the first direction intersects with the second direction.

12. The panel defect detecting apparatus according to claim 11, wherein the air floating mechanism (2) comprises a plurality of air floating strips (22), each air floating strip (22) is arranged at intervals, the third movable supporting frame (45) is arranged in a gap between the two air floating strips (22), and the height of the fourth positioning wheel mechanism (451) is suitable for being adjusted to be at the same height as the panel (9) to be detected.

13. The panel defect detecting apparatus according to claim 1, wherein the preliminary inspection mechanism (7) comprises a first focusing device (71) and a preliminary scanning camera (72) disposed on the first focusing device (71), the preliminary scanning camera (72) is used for scanning the panel (9) to be detected, the first focusing device (71) is used for monitoring a distance between the preliminary scanning camera (72) and the panel (9) to be detected, and the preliminary scanning camera (72) is vertically moved relative to the first gantry (5) according to the distance between the preliminary scanning camera (72) and the panel (9) to be detected, so that the distance between the preliminary scanning camera (72) and the panel (9) to be detected is an optimal imaging distance of the preliminary scanning camera (72).

14. The panel defect detecting apparatus of claim 13, wherein the first focusing device (71) comprises a voice coil motor (811), a movable plate (818), a connecting plate (817), and a gravity compensation mechanism (812), wherein a stator of the voice coil motor (811) is disposed on the connecting plate (817), a mover of the voice coil motor (811) is connected to the movable plate (818), the first scan camera (72) is adapted to be disposed on the movable plate (818), the movable plate (818) is adapted to move vertically relative to the connecting plate (817), the voice coil motor (811) is configured to drive the movable plate (818) to move the first scan camera (72), and the gravity compensation mechanism (812) is configured to provide a constant force opposite to a gravity direction of the first scan camera (72).

15. The panel defect detecting apparatus according to claim 1 or 13, wherein the rechecking mechanism (8) comprises a second focus device (81) and a rechecking camera (82) disposed on the second focus device (81), the rechecking camera (82) is used for rechecking the panel (9) to be detected, the second focus device (81) is used for monitoring the distance between the rechecking camera (82) and the panel (9) to be detected, and the rechecking camera (82) is vertically moved relative to the second gantry (6) according to the distance between the rechecking camera (82) and the panel (9) to be detected, so that the distance between the rechecking camera (82) and the panel (9) to be detected is the optimal imaging distance of the rechecking camera (82).

16. The panel defect detecting apparatus of claim 15, wherein the second focusing device (81) comprises a voice coil motor (811), a movable plate (818), a connecting plate (817), and a gravity compensation mechanism (812), wherein a stator of the voice coil motor (811) is disposed on the connecting plate (817), a mover of the voice coil motor (811) is connected to the movable plate (818), the double scan camera (82) is adapted to be disposed on the movable plate (818), the movable plate (818) is adapted to vertically move relative to the connecting plate (817), the voice coil motor (811) is configured to drive the movable plate (818) to move the double scan camera (82), and the gravity compensation mechanism (812) is configured to output a constant force opposite to a gravity direction of the double scan camera (82).

17. The panel defect detecting apparatus according to claim 1, wherein the second gantry (6) includes a second cross beam (61), a linear driving mechanism (64) and an air bearing (63), a traveling cavity is provided in the second cross beam (61), the linear driving mechanism (64) is provided in the traveling cavity, the linear driving mechanism (64) is adapted to reciprocate in the traveling cavity, the linear driving mechanism (64) is connected with the air bearing (63), the air bearing (63) is disposed around the second cross beam (61), an air film gap is formed between each surface of the air bearing (63) and the second cross beam (61), and the air bearing (63) is used for installing the re-inspection mechanism (8).

Images