1307929 九、發明說明： 【智^ •々貝 】 發明領域 本發明係有關於一種使用透過照明進行基板之檢查之 5 基板檢查裝置。 本案主張在2005年5月12曰提申之曰本專利申請案第 2005-139515號之優先權，並援用其内容。 發明背景 10 在液晶顯示等之平面顯示器之製造工程中，係使用檢 查玻璃基板上之外觀且調查有無缺陷等之基板檢查裝置。 基板檢查裝置具有浮起檯，該浮起檯係利用氣體使玻璃基 板浮起之狀態下進行搬運而不會傷害玻璃基板者。於該浮 起檯’朝上下方向貫通之間隙係設置成與玻璃基板之搬運 15方向直交，而可透過照明玻璃基板。基板檢查裝置透過該 間隙由下方將照明光照射於玻璃基板，照明玻璃基板，並 且使用配置於玻璃基板上方之顯微鏡觀察玻璃基板。 其中，玻璃基板通過設置於浮起檯之間隙上方時，因 為空氣的喷附而浮力降低，因此玻璃基板會撓曲，產生顯 20 微鏡失焦等問題。又，搬運到浮起檯上之玻璃基板的前端 通過間隙上方時，由於該間隙使浮力降低，因此玻璃基板 的前端會鉤到間隙的邊緣，使玻璃基板的搬運變得困難。 為了解決此種問題，若縮小間隙的幅度，則無法將透過照 明光源配置於間隙，並且透過照明光源會遠離玻璃基板， 1307929 並且田間隙的幅度縮小時，通過間隙之照明光的光量會減 ^因此照明光的開口數會變少，觀察影像變暗。 此*習知之基板檢查裝置中，係於間隙配設空氣車由 ^ 二乳軸承對通過間隙上方之玻璃基板同時進行空 1的人附與°及引’間隙上之玻璃基板可高精確度地維持預 疋之回度(例如’參照日本專利公開公報特開第2002-181714 號）。 ,、；而如習知之基板檢查裝置，當將空氣軸承配置於 間隙時’浮起檯必須另外設有用以噴出空氣之壓氣機與用 10 以吸引空痛 二氣之真空泵，因此，會有裝置構造變複雜的問題。 雖…Ά有空氣軸承還是需要透過照明光可通過之間隙，但 是仁是田配置該透過照明光源之間隙的幅度加大時’會產 生〃别述同樣的問題，當間隙縮小時，空氣軸承會阻擋照 明光之一部份，結果光量不足。 本發明係有鐘於上述情形而作成者，其主要目的在於 提供-種可為簡單構造，且可防止通過浮起檯之間隙上方 之基板變形，更精準地檢查基板之基板檢查裝置。 【發明内容】 發明概要 20 本發明之基板檢查裝置含1浮起檯，係用以使基板浮 起者；觀察機構，係用以觀察在前述浮起檯上搬運之前述 基板之上面者；透過照明光源，係由前述基板下面將照明 光照射於前述基板者；照明光通過部，係形成於前述浮起 檯’並由前述照明光可通過之間隙構成者；及透過構件， J307929 係嵌入於前述照明光通過部，並使前述照 、 …、乃尤遷過者。 本發明之基板檢查裝置係藉浮起檯输 運基板’並昭射 照明光於基板然後觀察基板。為了使照明光透尚 …町 過構件使之可覆蓋形成於浮起檯之間隙之入透 5 此 由浮起檯噴出之氣體進入透過構件與基^之;:= 形成空氣層，藉該空氣層在照明光通過部亦可 ^ 浮起之狀態。 根據本發明之基板檢查裝置，由於， 田於照明光通過部插入 有透過構件，因此，可藉由浮起檯送出 <二氣，在透過構 10件與基板之間形成空氣層，藉該空氣展 ^ Θ 礼層，在照明光通過部 亦可使基板浮起。因此，可使照明异 九通過部中之基板保持 在大略-定的高度，並可使用觀察機構更精確地檢查基板。 圖式簡單說明 15 第1圖係顯示本發明之實施型態之基板檢查裝置之構 成圖。 第2圖係浮起檯之照明光通過部附近之放大圖，且說明 使用高度調整螺絲固定散射板之分解圖。 第3圖係由下方視看散射板之透視圖。 20 第4圖係顯示散射板插入於照明光通過部之狀態圖。 第5圖係顯示設有送風單元之顯微鏡者。 第6圖係說明使用墊片固定散射板之分解圖。 第7圖係使用墊片與真空吸著固定散射板之分解圖。 第8圖係顯示將透過照明光源與散射板一體且設置於 1307929 照明光通過部之情況。 t實施方式j 較佳實施例之詳細說明 以下參照®式詳細制實施本發明 。 5 ⑻實施型態） 立如第1圖所示，基板檢查裝置1具有底部2，底部2之上 Μ己置有浮起檯3、及沿著浮起檯3搬運玻璃基板界之搬運 部4。第1圖中，搬運部4係舖設於底部2之上面，且設置成 可在朝X方向延伸之導軌33上自由移動。搬運部4設有由下 1〇方抵接且吸著保持於玻璃基板W之外緣部之複數個吸著墊 %。該搬運部4係由吸著墊35吸著保持浮在浮起楼3上之玻 =基板W之外緣部，並將該玻璃基板w強制搬運到由浮起 & 3之剷側之一端部到他端部之搬運方向（以下稱為X方 15向）進一步，於底部2，在沿著X方向由一端部到他端部之 間固疋有檢查部5。檢查部5具有：配設於與X方向直交之γ 方向且跨越浮起檯3及搬運部4之門型框ό、設置於門型框6 之樑部6Α且可自由移動於其上之顯微鏡(觀察機構)7、及設 置於顯微鏡7下方且與顯微鏡7連動而移動之透過照明光源1307929 IX. Description of the Invention: [Intelligent ^ Mussel] Field of the Invention The present invention relates to a substrate inspection apparatus using a substrate for inspection by illumination. The present application claims priority to the present patent application No. 2005-139515, filed on May 12, 2005, and the content thereof is incorporated. Background of the Invention In a manufacturing process of a flat panel display such as a liquid crystal display, a substrate inspection apparatus that inspects the appearance on a glass substrate and inspects for defects or the like is used. The substrate inspecting device has a floating table that is transported in a state where the glass substrate is floated by gas without damaging the glass substrate. The gap that penetrates in the vertical direction of the floating table is disposed so as to be orthogonal to the direction of conveyance 15 of the glass substrate, and is permeable to the illumination glass substrate. The substrate inspection apparatus irradiates the illumination light to the glass substrate from below through the gap, illuminates the glass substrate, and observes the glass substrate using a microscope disposed above the glass substrate. Among them, when the glass substrate is placed above the gap of the floating table, the buoyancy is lowered due to the air spray, and the glass substrate is deflected, causing problems such as defocusing of the micromirror. Further, when the tip end of the glass substrate conveyed onto the floating table passes over the gap, the buoyancy is lowered by the gap, so that the tip end of the glass substrate is hooked to the edge of the gap, which makes it difficult to convey the glass substrate. In order to solve this problem, if the amplitude of the gap is reduced, the transmitted illumination source cannot be placed in the gap, and the illumination source is far away from the glass substrate. When the amplitude of the field gap is reduced, the amount of illumination light passing through the gap is reduced. Therefore, the number of openings of the illumination light is reduced, and the observed image is darkened. In the conventional substrate inspection device, the air vehicle is disposed in the gap, and the glass substrate on the glass substrate passing through the gap is simultaneously attached to the glass substrate on the gap and the gap is high precision. The degree of recovery is maintained (for example, see Japanese Patent Laid-Open Publication No. 2002-181714). And, as in the conventional substrate inspection device, when the air bearing is disposed in the gap, the floating table must be additionally provided with a compressor for ejecting air and a vacuum pump for attracting air and air, so that there is a device. Constructing a complex problem. Although there are air bearings that still need to pass through the gap between the illumination light, but when Ren is the size of the gap through the illumination source, the same problem will occur. When the gap is reduced, the air bearing will Blocking one part of the illumination light results in insufficient light. The present invention has been made in view of the above circumstances, and its main object is to provide a substrate inspection apparatus which can be a simple structure and which can prevent deformation of a substrate above a gap of a floating table and more accurately inspect a substrate. SUMMARY OF THE INVENTION The present invention provides a substrate inspection apparatus comprising: a floating stage for suspending a substrate; and an observation mechanism for observing the upper surface of the substrate conveyed on the floating stage; The illumination light source is configured such that the illumination light is irradiated onto the substrate by the lower surface of the substrate; the illumination light passage portion is formed on the floating table and formed by the gap through which the illumination light can pass; and the transmission member, J307929 is embedded in The illumination light passing through the portion, and the aforementioned illumination, ..., is particularly moved. The substrate inspecting apparatus of the present invention transports the substrate by the floating table and exposes the illumination light to the substrate and then observes the substrate. In order to make the illumination light pass through, the member can cover the gap formed in the gap of the floating table. 5 The gas ejected from the floating table enters the transmitting member and the base; : = an air layer is formed, by which the air is formed The layer can also be floated in the illumination light passage portion. According to the substrate inspection device of the present invention, since the transmissive member is inserted into the illumination light passage portion, the air layer can be formed by the floating table and the air layer can be formed between the transmission member and the substrate. The air show ^ Θ layer can also float the substrate in the illumination light passage. Therefore, the substrate in the illumination passing portion can be maintained at a roughly-determined height, and the substrate can be inspected more accurately using the observation mechanism. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing the construction of a substrate inspection apparatus according to an embodiment of the present invention. Fig. 2 is an enlarged view of the vicinity of the illumination light passage portion of the floating table, and an exploded view of the diffusion plate fixed by the height adjustment screw. Figure 3 is a perspective view of the diffuser plate viewed from below. 20 Fig. 4 is a view showing a state in which a diffusion plate is inserted into an illumination light passage portion. Figure 5 shows the microscope with the air supply unit. Figure 6 is an exploded view showing the use of a spacer to fix the scatter plate. Figure 7 is an exploded view of a fixed scatter plate using a gasket and vacuum suction. Fig. 8 shows a case where the illumination light source and the diffusion plate are integrated and disposed in the illumination light passage portion of 1307929. t. Embodiment j Detailed Description of Preferred Embodiments The present invention will be described in detail below with reference to the specification of the formula. 5 (8) Embodiment) As shown in Fig. 1, the substrate inspection apparatus 1 has a bottom portion 2, a floating table 3 on the bottom portion 2, and a transport portion 4 for transporting the glass substrate boundary along the floating table 3. . In Fig. 1, the conveying portion 4 is laid on the upper surface of the bottom portion 2, and is provided to be freely movable on the guide rail 33 extending in the X direction. The conveyance unit 4 is provided with a plurality of suction pads % which are abutted against the lower side of the glass substrate W and are sucked and held by the lower side. The transport unit 4 sucks and holds the outer edge portion of the glass substrate W floating on the floating floor 3 by the absorbing pad 35, and forcibly transports the glass substrate w to one side of the shovel side of the float & Further, in the conveyance direction of the end portion (hereinafter referred to as the X-direction 15 direction), the inspection portion 5 is fixed to the bottom portion 2 from the one end portion to the other end portion along the X direction. The inspection unit 5 has a door frame that is disposed in the γ direction orthogonal to the X direction and that spans the floating table 3 and the conveyance unit 4, and a microscope that is disposed on the beam portion 6 of the door frame 6 and is freely movable thereon. (observation mechanism) 7, and an illumination source that is disposed below the microscope 7 and moves in conjunction with the microscope 7
8 〇 V 。又，第1圖中，透過照明光源8係位於浮起檯3之外側， 但檢查時係移動到與顯微鏡7之物鏡對向之光軸下。 與X方向平行之凹部10成複數條平行形成於浮起檯3。 凹。卩10除外之浮起檯3上面3Α係呈等間隔地穿設有喷出空 氣之多數孔11。多數孔U之下每隔一條形成一空間，其空 間係與不圖示之壓氣機連接。又’浮起檯3之一端侧到他端 1307929 側之途中’形成有作為用以使來自透過照明光源8之照明光8 〇 V . Further, in Fig. 1, the transmitted illumination light source 8 is located outside the floating table 3, but moves to the optical axis opposite to the objective lens of the microscope 7 during inspection. The recesses 10 parallel to the X direction are formed in parallel in a plurality of rows on the floating table 3. concave. A plurality of holes 11 for ejecting air are provided at equal intervals on the upper surface of the floating table 3 except for the 卩10. Each of the plurality of holes U forms a space every other one, and the space is connected to a compressor (not shown). Further, on the way from the one end side of the floating table 3 to the side of the other end 1307929, an illumination light for transmitting the light from the illumination light source 8 is formed.
通過之間隙之照明光通過部15。該照明光通過部15係與Y 方向平行且上下貫通浮起檯3。如第2圖所示，支持部16係 突出设置於挾持照明光通過部15且對向之浮起檯3之側部 5 12 ° 作為使照明光透過之透過構件之散射板2 0係由上方嵌 入於照明光通過部15 ’散射板20可藉固定構件21而固定於 浮起棱3。散射板2〇可使來自透過照明光源8之照明光散射 並透過者’例如由印刷玻璃或白色丙烯板等製造。散射板 10 20之x方向的幅度與形成於浮起檯3之照明光通過部15之乂 方向的幅度大略相等，且散射板20之Y方向的長度與浮起檯 3之Y方向之長度大略相等，因此，散射板2〇係嵌合於配置 在下游侧與上游側之各浮起檯3之側部12，並且沿著散射板 20之Υ方向之緣部載置於支持部16上，散射板20之上面與各 15浮起檯3之上面係大略在同一面。散射板20係藉固定構件 21(固定機構）而固定於浮起檯3之預定位置。 又’若藉於透過照明光源8設置使光散射透過之構件來 進行照明光之均一化，亦可不設置散射板20，而使用玻璃 或塑膠等透明材料構成之透明構件。 2〇 如第3圖所示，固定構件21係藉於下面之外緣部藉接著 而與散射板20連結，以便不會遮住透過照明光。固定構件 21之間的間隔係與凹部1〇之間隔相合。固定構件21具有可 插入於浮起檯3之凹部10之寬度的形狀，其高度低於由凹部 之底面到浮起檯3之上面3A。如第2圖所示，固定構件21 1307929 低於上面3A，因此固定構件21會堵塞凹部10之端部開口而 可防止照明光通過部15穿透凹部1 〇。藉此，由浮起擾3之各 孔11喷出之空氣的一部份會流入散射板20與固定機構21的 上面，並藉散射板20與玻璃基板W之間的空氣層，玻璃基 5板界由散射板20的上面浮起到一定的高度。其中，當使顯 微鏡7與透過照明光源8同步移動時，來自透過照明光源8之 聚光燈照明光會導入照明光通過部15，並經散射板2〇散射 而成為散射光後，由下方均一地照明玻璃基板W。顯微鏡7 由CCD(Charged Coupled Device)接收散射光所照明之玻璃 10基板W之表面的擴大影像後，顯示於與(：(：1：>連接之顯示器 (未圖示）。玻璃基板W上有異物等缺陷時，可藉擴大影像而 發現此等異物，採取必要處置。在檢查部5結束玻璃基板w 上之觀察對象的檢查後，搬運部4返回一端部側後，則解除 真空吸著。解除真空吸著之玻璃基板w可藉機器人而由基 15 板檢查裝置1搬出，送到下一工程。The illumination light passing through the gap 15 passes through the portion 15. The illumination light passage portion 15 is parallel to the Y direction and vertically passes through the floating table 3. As shown in Fig. 2, the support portion 16 is protruded from the side portion 5 of the floating table 3 that is opposite to the holding illumination light passage portion 15 as a scattering plate 20 for transmitting the illumination light. The diffusing plate 20 is embedded in the illuminating light passage portion 15 and can be fixed to the floating rib 3 by the fixing member 21. The diffusing plate 2 〇 can scatter the illuminating light from the illuminating light source 8 and transmit it by, for example, printing glass or a white acrylic plate. The width of the diffusing plate 10 20 in the x direction is substantially equal to the width of the illuminating light passing portion 15 formed in the floating table 3, and the length of the diffusing plate 20 in the Y direction is substantially the same as the length of the floating table 3 in the Y direction. Therefore, the scattering plate 2 is slidably fitted to the side portions 12 of the floating tables 3 disposed on the downstream side and the upstream side, and is placed on the support portion 16 along the edge of the scattering plate 20 in the , direction. The upper surface of the diffusing plate 20 is substantially flush with the upper surface of each of the 15 floating tables 3. The diffusion plate 20 is fixed to a predetermined position of the floating table 3 by a fixing member 21 (fixing mechanism). Further, if the illumination light is uniformized by the means for scattering light through the illumination light source 8, the transparent member made of a transparent material such as glass or plastic may be used without providing the diffusion plate 20. 2〇 As shown in Fig. 3, the fixing member 21 is connected to the diffusion plate 20 by the outer edge portion of the lower surface so as not to block the transmission of the illumination light. The spacing between the fixing members 21 coincides with the interval of the recesses 1〇. The fixing member 21 has a shape that can be inserted into the width of the recess 10 of the floating table 3, and has a height lower than the bottom surface of the recessed portion 3 to the upper surface 3A of the floating table 3. As shown in Fig. 2, the fixing member 21 1307929 is lower than the upper portion 3A, so that the fixing member 21 blocks the end opening of the recess 10 to prevent the illumination light passing portion 15 from penetrating the recess 1 〇. Thereby, a part of the air ejected from each of the holes 11 of the floating disturbance 3 flows into the upper surface of the diffusion plate 20 and the fixing mechanism 21, and the air layer between the diffusion plate 20 and the glass substrate W, the glass base 5 The plate boundary is floated to a certain height by the upper surface of the diffusion plate 20. When the microscope 7 is moved in synchronization with the illumination light source 8, the illumination light from the spotlight transmitted through the illumination source 8 is introduced into the illumination light passage portion 15 and scattered by the diffusion plate 2 to become scattered light, and then uniformly illuminated from below. Glass substrate W. The microscope 7 receives an enlarged image of the surface of the substrate 10 of the glass 10 illuminated by the scattered light by a CCD (Charged Coupled Device), and displays it on a display (not shown) connected to (:1:> on the glass substrate W. When there is a defect such as a foreign matter, the foreign matter can be found by expanding the image, and the necessary treatment can be taken. After the inspection unit 5 finishes the inspection of the observation target on the glass substrate w, the conveyance unit 4 returns to the one end side, and then the vacuum suction is released. The glass substrate w from which the vacuum suction is released can be carried out by the base 15 inspection device 1 by the robot and sent to the next project.
根據该實施型態，以照明光可透過之透明或半透明之 板材塞住作為使透過照明光通過之照明光通過部15且形成 於浮起檯3之間隙，藉此由浮起檯3喷出之空氣會流入玻璃 基板W與散射板20之間，形成空氣層，因此藉該空氣層， 20即使玻璃基板w位於照明光通過部15上也可維持在一定的 高度。藉此，可防止玻璃基板臀之變形等，並且玻璃基板 可正確地進行玻璃基 W可保持在大略一定的高度。因此， 板w的檢查。在此， 整對浮起檯3之位置 散射板20謂固定構件21而精確地調 ，因此玻璃基板评與散射板20不會接 12 1307929 與浮起檯3之凹部10的間隔相合，且固定於散射板2〇之裏面 外緣部。該固定構件51之外形與第丨實施形態之固定構件21 相同。 在固定散射板20時，係於浮起檯3之凹部1〇舖設墊片 5 52並由其上在接近嵌合之狀態下插入固定構件5丨。墊片 52¾/成有缺口 52a可避免干擾締結構件22。墊片係相同形 狀4尽度不同者，準備有複數種類。固定散射板時，可 > 一個一個交換所準備之複數種類的墊片52，調整成散射板 20之上面低於浮起檯3之上面3A且與上面3八平行，並且由 1〇浮起檯3的上面3A到散射板20之高低差在lmm以下。較佳的 是，調整成與上面3A在大略同一平面上，使玻璃基板w無 礙地通過。 根據該實施型態，可藉散射板2〇阻塞照明光通過部15 之間隙，得到與第1實施型態相同之效果。又，可僅藉交換 15墊片52，調整散射板2〇的高度。 | (第3實施型態） 本發明之第3實施型態僅散射板之固定方法與第1、2 實施型態不同。因此，省略與第卜2實施型態重複之說明。 如第7圖所示，該實施型態中，於浮起檯3側設有藉空 20氣吸著固定散射板2〇之保持固定機構。即，浮起檯3之支持 部16形成有朝上下貫通之複數孔61。各孔61係與固定在支 持部16下方之各接頭62連結，並且各接頭62經由配管63而 連接。配管63係連接於未圖示之真空泵。又，孔61之上側 開口的周緣部配置有兼作為調整機構之吸著部之塾片64。 14 1307929 一定的高度。 又’如第8圖所示，亦可使用透過照明光源7〇。該透過 照明光源70具有殼體71、將螢光燈或LED配列成直線狀之 直線照明光源72、及散射板73。殼體71的幅度大略與照明 5光通過部15之X方向的寬度相同，殼體71的長度大略與浮起 檯之Y方向的長度相等。直線照明光源72朝γ方向延伸，並 收容於殼體71内。散射板73係使來自直線照明光源72之直 線照明光散射且透過之透過構件，並且固定成覆蓋在殼體 71上面。透過照明光源70經由升降機構74而安裝於底部2。 10升降機構74係由如空氣驅動之氣閥所構成，在調整一次高 度後’會保持其位置。透過照明光源70係定位成，散射板 73之上面低於浮起檯3之上面3A且與上面3A平行，並且由 浮起檯3之上面3A到散射板20之高低差在1mm以下。該直線 照明光源72係配置於顯微鏡7之物鏡的移動執跡上，並且在 15檢查時’僅顯微鏡7(參照第1圖）朝Y方向移動進行檢查。根 據此等構成’可得到與第1實施型態相同之效果。又，亦可 使用可切換成透明狀態或散亂狀態之透過型液晶散射板以 代替散射板20。 亦可將用以將在與顯微鏡7之光軸對向之上面形成隙 狀之射出透過口全部反射之柱狀透鏡插入照明光通過部 15 ’並使來自光源之照明光入射於該柱狀透鏡的底面，藉 此將直線照明光照射於玻璃基板W。可藉將照明光通過部 15之間隙設定成與直徑大略同一尺寸，並且將該柱狀透鏡 嵌入照明光通過部15之間隙，藉此以縮小照明光通過部15 16 1307929 之間隙，並可提高作用於玻璃基板w之浮力。藉如此之構 成亦可得到與第1實施型態相同之效果。 更進一步，若設定孔11之穿設間隔、及照明光通過部 15之X方向的幅度，使浮起檯3之孔11於X方向上等間隔配 5 置，即使沒有散射板20亦可使玻璃基板保持在大略一定的 南度。 以上，係說明本發明之較佳實施型態，但本發明並不 受限於前述實施型態。在不脫離本發明之宗旨的範圍内可 附加、省略、置換構成以及作其他之變更。本發明並不受 10 限於前述說明，僅受限於添附之申請專利範圍。 【圖式簡單說明3 第1圖係顯示本發明之實施型態之基板檢查裝置之構 成圖。 第2圖係浮起檯之照明光通過部附近之放大圖，且說明 15 使用高度調整螺絲固定散射板之分解圖。 第3圖係由下方視看散射板之透視圖。 第4圖係顯示散射板插入於照明光通過部之狀態圖。 第5圖係顯示設有送風單元之顯微鏡者。 第6圖係說明使用墊片固定散射板之分解圖。 20 第7圖係使用墊片與真空吸著固定散射板之分解圖。 第8圖係顯示將透過照明光源與散射板一體且設置於 照明光通過部之情況。 17 1307929 【主要元件符號說明】 1...基板檢查裝置 21，51.·.固定構件 2...底部 22…締結構件 3…浮起檯 23...插入孔 3A...浮起檯上面 24...調整用螺孔 4".搬運部 25...高度調整螺絲 5...檢查部 31，33···導軌 6...門型框 35...吸著墊 6A...樑部 42...送風單元 7…顯微鏡 52...塾片 8,70...透過照明光源 52A".缺口 10...凹部 62,64. ··接頭 11，61·.·孔 63...配管 12…側部 71…殼體 13...螺孔 72...直線照明光源 15...照明光通過部 74···升降構件 16···支持部 20,73…散射板 W…玻璃勒反 18According to this embodiment, the transparent or translucent plate permeable to the illumination light is inserted as a gap between the floating table 3 and the illumination light passing portion 15 through which the illumination light passes, whereby the floating table 3 is sprayed. The air that has exited flows between the glass substrate W and the diffusion plate 20 to form an air layer. Therefore, even if the glass substrate w is positioned on the illumination light passage portion 15, the air layer can be maintained at a constant height. Thereby, deformation of the glass substrate hips and the like can be prevented, and the glass substrate can be accurately held at a substantially constant height. Therefore, the inspection of the board w. Here, the positional scattering plate 20 of the entire pair of floating tables 3 is precisely adjusted by the fixing member 21, so that the glass substrate rating and scattering plate 20 does not contact 12 1307929 and the interval of the recess 10 of the floating table 3, and is fixed. On the inner edge of the inner side of the diffuser plate 2〇. The outer shape of the fixing member 51 is the same as that of the fixing member 21 of the second embodiment. When the diffusion plate 20 is fixed, the spacers 5 52 are laid in the recesses 1 of the floating table 3, and the fixing members 5 are inserted from the upper side thereof in a state of being close to the fitting. The gasket 523⁄4/ is notched 52a to avoid interference with the structural member 22. If the gasket is the same shape and the degree is different, prepare a plurality of types. When the scatter plate is fixed, a plurality of shims 52 of the prepared type can be exchanged one by one, and the upper surface of the scatter plate 20 is adjusted to be lower than the upper surface 3A of the floating table 3 and parallel to the upper three octets, and floated by 1 〇. The height difference between the upper surface 3A of the stage 3 and the scattering plate 20 is less than 1 mm. Preferably, it is adjusted so as to be substantially flush with the upper surface 3A to allow the glass substrate w to pass unimpeded. According to this embodiment, the gap between the illumination light passing portions 15 can be blocked by the diffusion plate 2, and the same effects as those of the first embodiment can be obtained. Further, the height of the diffusion plate 2 can be adjusted by simply swapping the 15 spacers 52. (Third embodiment) In the third embodiment of the present invention, only the method of fixing the scattering plate is different from the first and second embodiments. Therefore, the description overlapping with the second embodiment will be omitted. As shown in Fig. 7, in this embodiment, a holding and fixing mechanism for absorbing the fixed diffusion plate 2 by air is provided on the side of the floating table 3. That is, the support portion 16 of the floating table 3 is formed with a plurality of holes 61 penetrating upward and downward. Each of the holes 61 is coupled to each of the joints 62 fixed to the lower portion of the support portion 16, and each of the joints 62 is connected via a pipe 63. The piping 63 is connected to a vacuum pump (not shown). Further, a gusset 64 which serves as a absorbing portion of the adjustment mechanism is disposed on the peripheral edge portion of the upper side of the hole 61. 14 1307929 A certain height. Further, as shown in Fig. 8, an illumination source 7 亦可 can also be used. The transmission illumination source 70 has a casing 71, a linear illumination source 72 in which a fluorescent lamp or an LED is arranged in a straight line, and a diffusion plate 73. The width of the casing 71 is substantially the same as the width of the illumination 5 light passing portion 15 in the X direction, and the length of the casing 71 is substantially equal to the length of the floating table in the Y direction. The linear illumination source 72 extends in the gamma direction and is housed in the casing 71. The diffusion plate 73 is a transmission member that scatters and transmits linear illumination light from the linear illumination source 72, and is fixed to cover the upper surface of the casing 71. The illumination source 70 is attached to the bottom portion 2 via the elevating mechanism 74. The elevating mechanism 74 is composed of an air-driven air valve, and maintains its position after adjusting the height. The illumination light source 70 is positioned such that the upper surface of the diffusion plate 73 is lower than the upper surface 3A of the floating table 3 and parallel to the upper surface 3A, and the height difference from the upper surface 3A of the floating table 3 to the diffusion plate 20 is 1 mm or less. The linear illumination source 72 is disposed on the movement track of the objective lens of the microscope 7, and when the inspection is performed 15, only the microscope 7 (see Fig. 1) is moved in the Y direction for inspection. According to these configurations, the same effects as those of the first embodiment can be obtained. Further, instead of the diffusion plate 20, a transmissive liquid crystal scattering plate which can be switched to a transparent state or a disordered state can be used. A lenticular lens for totally reflecting the emission through-holes formed on the upper surface opposite to the optical axis of the microscope 7 may be inserted into the illumination light passage portion 15' and the illumination light from the light source may be incident on the lenticular lens. The bottom surface is thereby irradiated with the linear illumination light to the glass substrate W. The gap between the illumination light passing portions 15 can be set to be approximately the same size as the diameter, and the lenticular lens can be inserted into the gap of the illumination light passing portion 15, thereby reducing the gap between the illumination light passing portions 15 16 1307929 and improving Acting on the buoyancy of the glass substrate w. With this configuration, the same effects as those of the first embodiment can be obtained. Further, if the interval between the opening of the hole 11 and the width of the illumination light passage portion 15 in the X direction are set, the holes 11 of the floating table 3 are arranged at equal intervals in the X direction, even if the scattering plate 20 is not provided. The glass substrate is kept at a certain southerly degree. The preferred embodiments of the present invention have been described above, but the present invention is not limited to the foregoing embodiments. The components may be added, omitted, replaced, and modified without departing from the spirit and scope of the invention. The present invention is not limited to the foregoing description, but is limited only by the scope of the appended patent application. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing the construction of a substrate inspecting apparatus according to an embodiment of the present invention. Fig. 2 is an enlarged view of the vicinity of the illumination light passing portion of the floating table, and shows an exploded view of the scattering plate fixed by the height adjusting screw. Figure 3 is a perspective view of the diffuser plate viewed from below. Fig. 4 is a view showing a state in which a diffusion plate is inserted into an illumination light passage portion. Figure 5 shows the microscope with the air supply unit. Figure 6 is an exploded view showing the use of a spacer to fix the scatter plate. 20 Figure 7 is an exploded view of the fixed diffuser plate using a gasket and a vacuum suction. Fig. 8 shows a case where the illumination light source is integrated with the diffusion plate and provided in the illumination light passage portion. 17 1307929 [Description of main component symbols] 1...Substrate inspection device 21, 51.. Fixing member 2...Bottom 22...Construction member 3...Floating table 23...Insert hole 3A...Floating table The upper 24...adjustment screw hole 4".transportation unit 25...height adjustment screw 5...inspection unit 31,33···guide rail 6...door frame 35...sucking pad 6A. .. beam portion 42...air supply unit 7...microscope 52...battery 8,70...through illumination source 52A".notch 10...recess 62,64. ··Connector 11,61·.· Hole 63...Pipe 12...Side 71...Casing 13...Pin hole 72...Linear illumination source 15...Illumination light passage portion 74··· Lifting member 16···Support unit 20, 73 ...scattering plate W...glass reverse 18