JP2013120907A - Substrate transfer device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate transfer device capable of stabilizing transfer of a substrate by preventing transmission of vibration to the substrate even in a roller transfer.SOLUTION: An FPD inspection device 1 includes a transfer stage 13 which transfers a substrate W to be transferred along a predetermined transfer direction D by using a plurality of free rollers 131. A substantially plate-like holding member 22 is provided which is movable along the transfer direction D on the transfer stage 13 while being supported by the free rollers 131, and which comes into surface contact with the substrate W and supports it.

Description

  The present invention relates to a substrate transfer device for transferring, for example, a glass substrate, a semiconductor substrate, or a printed board for a flat panel display.

  In recent years, in the manufacture of FPD (flat panel display), semiconductors, etc., various processes for forming a pattern on the surface of a substrate while conveying a glass substrate or wafer substrate (hereinafter referred to as a substrate) as a base material are performed. Various processing apparatuses such as a manufacturing apparatus to perform, an inspection apparatus to perform defect inspection processing, and a defect correction apparatus to perform defect correction processing are used. These processing apparatuses are integrally provided with a substrate transport device for transporting the substrate. The substrate transport apparatus includes a transport unit that carries the substrate into a processing unit that performs processing such as inspection from the outside, or carries the substrate out of the processing unit. This loading and unloading of the substrate is referred to as substrate conveyance.

  The transport unit includes a stage configured to support a substrate and includes a plurality of rotatable rollers along the transport direction, and a suction pad that sucks the substrate and can move in the transport direction. The transport unit sucks and holds the substrate supported by the roller by the suction pad, and transports the substrate by moving the suction pad. For supporting the substrate, a floating stage that floats the substrate using a floating plate may be used instead of the stage using a roller. The levitation plate has a plurality of air holes on the conveyance surface for conveying the substrate, and the substrate is levitated by blowing air from the air holes. The levitation plate can suppress vibration generated due to the conveyance of the substrate as compared with the roller and vibration generated due to a down flow caused by FFU (Fan Filter Unit) for purifying the air in the apparatus.

  As the above-described substrate transfer device, the substrate inspection is provided in the transfer unit and has a plurality of substrate floating mechanisms for floating the substrate, and the substrate floating mechanisms are alternately arranged in the inspection processing unit with respect to the direction orthogonal to the transfer direction. An apparatus is disclosed (see, for example, Patent Document 1). In this substrate inspection apparatus, the substrate is floated to stabilize the conveyance, and when the substrate is imaged during the inspection, the reflection of the substrate floating mechanism can be prevented.

JP 2010-203944 A

  However, although the substrate inspection apparatus disclosed in Patent Document 1 can prevent vibrations generated during conveyance from being transmitted to the substrate, it is expensive to install each substrate floating mechanism and has high assembly accuracy. It is required and labor is required for the adjustment. Further, although a floating plate is used in Patent Document 1, if the above-described roller is used to transport the substrate, the substrate can be transported at a low price, but vibration during transportation is more intense than that of the floating transport. Thus, in terms of stable substrate holding, it is inferior to floating transportation.

  The present invention has been made in view of the above, and an object of the present invention is to provide a substrate transport apparatus capable of preventing the transmission of vibration to the substrate even in roller transport and stabilizing the transport of the substrate. .

  In order to solve the above-described problems and achieve the object, a substrate transport apparatus according to the present invention includes a transport stage that transports a substrate to be transported along a predetermined transport direction by using a plurality of rollers. A substantially plate-shaped holding member that is supported by a part of the plurality of rollers and is movable on the transfer stage along the transfer direction and that holds the substrate in surface contact with the substrate; It is characterized by having.

  The substrate transfer apparatus according to the present invention is characterized in that, in the above invention, the substrate transfer device includes a transfer unit that holds the holding member and can reciprocate on a transfer shaft extending in parallel with the transfer direction.

  Further, the substrate transport apparatus according to the present invention includes, in the above invention, an imaging unit that performs imaging processing of the substrate, and an illumination unit that irradiates illumination light to an imaging region captured by the imaging unit, and the holding The member is made of a material that transmits illumination light emitted from the illumination unit.

  In the substrate transfer apparatus according to the present invention, in the above invention, the holding member penetrates in the plate thickness direction and communicates with a flow path in a pipe connected to an air supply unit that performs an air intake / exhaust operation. It has a through hole, and the substrate is held by sucking the substrate through the first through hole.

  In the substrate transfer apparatus according to the present invention as set forth in the invention described above, the pipe is made of a material that transmits light.

  Further, in the above invention, the substrate transport apparatus according to the present invention is provided in a direction perpendicular to the plane passing through the upper ends of the plurality of rollers so as to be able to advance and retreat within a range passing through the plane, and the substrate at the tip. The holding member includes a plurality of lift pins for supporting each, and the holding member has a second through-hole penetrating in the plate thickness direction and inserting the lift pin.

  According to the present invention, since the substrate W is held by the plate-like holding member placed on the roller, the transmission of vibration to the substrate is prevented even in the roller conveyance, and the substrate conveyance is stabilized. There is an effect that can be.

FIG. 1 is a perspective view showing a configuration of a flat panel display (FPD) inspection apparatus according to an embodiment of the present invention. FIG. 2 is a front view showing the configuration of the FPD inspection apparatus according to the embodiment of the present invention. FIG. 3 is a top view schematically showing the configuration of the FPD inspection apparatus according to the embodiment of the present invention. FIG. 4 is a side view schematically showing the configuration of the FPD inspection apparatus according to the embodiment of the present invention. FIG. 5 is a perspective view showing a configuration of a main part of the FPD inspection apparatus according to the embodiment of the present invention. FIG. 6 is a perspective view showing a configuration of a main part of the FPD inspection apparatus according to the embodiment of the present invention. FIG. 7 is a perspective view showing a configuration of a main part of the FPD inspection apparatus according to the embodiment of the present invention. FIG. 8 is a perspective view showing the configuration of the FPD inspection apparatus according to the embodiment of the present invention, and shows a case where a substrate is carried in from an external mechanism. FIG. 9 is a perspective view showing a configuration of a main part of the FPD inspection apparatus according to the embodiment of the present invention, and shows a case where a substrate is carried in from an external mechanism.

  DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention will be described in detail with reference to the drawings. In addition, this invention is not limited by the following embodiment. The drawings referred to in the following description only schematically show the shape, size, and positional relationship so that the contents of the present invention can be understood. That is, the present invention is not limited only to the shape, size, and positional relationship illustrated in each drawing.

  First, a substrate transfer apparatus according to an embodiment of the present invention will be described in detail with reference to the drawings. In the following description, a flat panel display (FPD) inspection apparatus that inspects a substrate to be inspected will be described as an example of the substrate transport apparatus. The FPD inspection apparatus may be an inline type that directly connects to a manufacturing apparatus such as an exposure apparatus, a coater / developer, an etching apparatus, etc., and inspects all the substrates to be inspected, or a substrate stocker such as a cassette An off-line type (stand-alone type) in which only a part of the substrate is sampled and inspected by direct loading / unloading from the board may be used.

  FIG. 1 is a perspective view showing a configuration of a flat panel display (FPD) inspection apparatus according to the present embodiment. FIG. 2 is a front view showing the configuration of the FPD inspection apparatus according to the present embodiment. FIG. 3 is a top view schematically showing the configuration of the FPD inspection apparatus according to the present embodiment. FIG. 4 is a side view schematically showing the configuration of the FPD inspection apparatus according to the present embodiment.

  As shown in FIG. 1, the FPD inspection apparatus 1 includes a substrate processing unit 2 that detects a defect in a conveyed rectangular substrate W and a control mechanism 3 that controls the entire substrate processing unit 2. The substrate processing unit 2 also includes a gantry 10 that holds the optical unit 100 that detects defects in the moving substrate W, a transfer stage 13 (stages 13A to 13D) that transfers the substrate W, and a transfer of the substrate W. And an illuminating section 14 that extends substantially perpendicular to the direction and irradiates the substrate W with illumination light. The gantry 10 has a portal frame structure and is provided so as to straddle the transfer stage 13.

  The gantry 10 and the transfer stage 13 (stages 13A to 13D) are fixed to gantry 11, 12 as shown in FIG. The gantry 11, 12 is provided on each end side parallel to the transport direction D of the transport stage 13 and extends along the transport direction D. The mounts 11 and 12 are preferably composed of members having high earthquake resistance such as block-shaped marble and steel pipe frames combined with steel materials. In addition, a vibration absorbing mechanism 110 configured by, for example, a spring, a pneumatic damper, a hydraulic damper, or the like is provided between the bases 11 and 12 and the installation surface (for example, a floor). Thereby, the vibration of the gantry 10 and the conveyance stage 13 (stages 13A to 13D) is further prevented. Further, on the upper surface of the gantry 12, a substrate transport mechanism 20 that is driven in the transport direction D and sucks and holds the substrate W is provided. Note that the configurations of the gantry 11 and 12 are not limited to the configurations disclosed in the present embodiment, but may be any shape as long as the configuration of the stage has the functions of supporting the gantry 10, supporting the substrate, and transporting the substrate. May be adopted.

  The optical unit 100 includes an image pickup unit that picks up an image of the substrate W passing through the inspection line L <b> 1 parallel to the width direction of the transfer stage 13 set on the transfer path formed by the transfer stage 12 via the microscope 101. By analyzing the image (high magnification image) acquired by the optical unit 100, it is possible to detect whether or not a defect exists in the substrate W. The optical unit 100 can move along the inspection line L1. Further, the illumination unit 14 irradiates the substrate W with light, and the microscope 101 acquires the reflected light. Based on the image data obtained from the acquired reflected light, the inspection unit 33 sets the substrate W. The film thickness of the film formed above is measured.

  Note that the above-described configuration may be another configuration as long as the optical unit 100 and the substrate W are relatively moved. For example, the substrate W may be fixed on the transport stage 12 and the optical unit 100 may be configured to scan on the plane of the substrate W. In addition, instead of the configuration in which the optical unit 100 is moved, a configuration in which a plurality of the optical units 100 are arranged in the gantry 10 may be employed. In this case, an image can be acquired by scanning a part or the whole of the moving substrate with the plurality of optical units 100. In this description, an area where the optical unit 100 (gantry 10) is provided is referred to as an examination space PR1. An area other than the inspection space PR1 is referred to as a transport space TR1, TR2.

  The optical unit 100 includes, for example, a defect correction unit that performs defect correction such as laser irradiation and coating correction on a defective portion of the substrate W, an imaging unit that includes a high-resolution camera that performs observation and image storage instead of the microscope 101, It is possible to appropriately replace another processing unit that performs processing at a predetermined position such as a measurement unit that performs dimension measurement of wirings, film thickness measurement, color measurement, and the like. Further, a plurality of these processing units may be mounted on one inspection apparatus. That is, the processing unit includes at least one of an optical unit, a defect correction unit, an imaging unit, a measurement unit, and the like. Further, the FPD inspection apparatus 1 according to the present embodiment may include a configuration in which the processing unit described above performs each process on the substrate W on the stage on which the substrate W is placed.

  The transport stage 13 (stages 13 </ b> A to 13 </ b> D) has a structure in which, for example, a plurality of plate-like members are arranged in parallel in a direction perpendicular to the transport direction D of the substrate W and are combined in a saw-tooth shape. The transport stage 13 forms a transport path for the substrate W by arranging the stages 13 </ b> A to 13 </ b> D having a structure combined in a sawtooth shape along the transport direction D. The plate-like members of the stages 13A to 13D are each provided with a free roller 131 that holds the holding member 22 on the upper surface and can rotate about an axis orthogonal to the transport direction D as a central axis. In addition, it is preferable that the free roller 131 is arrange | positioned at the space | interval which is hard to generate | occur | produce the bending vibration of the member mounted like a Lagrange point. The free roller is preferably made of an engineering plastic excellent in friction resistance such as a PEEK (polyether, ether, ketone) material or a fluorine resin. Further, the plurality of free rollers may be arranged at regular intervals or at irregular intervals.

  In the transport stage 13 of the present embodiment, a plurality of plate-like members are arranged side by side in a saw-like shape, and a plurality of free rollers are provided on the plate-like member, but instead of this configuration, for example, a substrate A configuration may be adopted in which a plurality of shafts extending in the direction perpendicular to the transport direction are provided at intervals in the substrate transport direction, and a plurality of free rollers are provided on the shaft. That is, the transport stage 13 is configured to support and move the holding member 22 by a plurality of rotatable roller members, and any configuration may be adopted.

  Here, the substrate W transported to the transport stage 13 (stage 13A) is positioned so as to be placed at a predetermined position. As a positioning method of the substrate W, a plurality of lift pins 133 (see FIGS. 8 and 9) for supporting the substrate W carried on the transport stage 13 and placing it on the transport stage 13 and placed on the transport stage 13 A method using an alignment mechanism 132 or the like for aligning the substrates W may be mentioned. The lift pins 133 are provided on the stage 13A, and are provided so as to be able to advance and retreat within a range passing through the plane in a direction orthogonal to the plane passing through the upper end of each free roller 131 of the stage 13A (the upper surface of the holding member 22). The tip of the lift pin 133 is preferably formed using an engineering plastic such as a PEEK material.

  FIG. 5 is a perspective view showing a configuration in the vicinity of the illumination unit 14 of the FPD inspection apparatus 1 according to the present embodiment. The illumination unit 14 irradiates transmitted illumination light that irradiates illumination light toward the surface of the substrate W opposite to the optical unit 100 side. The illumination unit 14 extends in a direction orthogonal to the direction in which the transport stage 13 extends. For example, the illumination unit 14 is provided between the stages 13B and 13C and at a position where illumination light can be irradiated along the inspection line L1. The illumination unit 14 may be configured by an illumination member 14 a extending in parallel with the inspection line L <b> 1, or may move a light source as the optical unit 100 moves. Further, the illumination member 14a may be configured to be a linear light source, for example, by a combination of a halogen lamp and a rod lens, or may have a plurality of LED light sources as point light sources. An illumination unit that irradiates epi-illumination light that illuminates illumination light toward the substrate W is provided in the optical unit 100, and light reflected from the substrate W is received by the optical unit 100. Good.

  FIG. 6 is a perspective view showing a configuration of the substrate transport mechanism 20 of the FPD inspection apparatus 1 according to the present embodiment. The substrate transport mechanism 20 is provided on the upper surface side of the gantry 12 and is supported by the transport unit 21 moving on the transport shaft 12a extending in parallel with the transport direction D, the transport unit 21 and the free roller 131, and holds the substrate W. The holding member 22 has a flat plate shape, and an air supply unit 23 that performs an air intake / exhaust operation under the control of the control unit 30. The transport unit 21 is placed on the transport shaft 12a, and moves in the transport direction D. The plate-shaped mobile body 21a, two struts 21b extending in the vertical direction from the plate surface of the mobile body 21a, and the struts 21b A holding plate 21c that holds the holding member 22 and that is provided at an end on a different side from the side that is connected to the moving body 21a. The holding plate 21c and the holding member 22 are fixed by screws 21d.

  The holding member 22 has a substantially plate shape formed using a transparent member that can transmit illumination light from the illumination unit 14. The transparent member is made of, for example, glass or light-transmitting resin, and may have any configuration as long as it has a flat plate shape such as a single plate-like member or a plurality of plate-like members joined together. The holding member 22 forms a plurality of through holes 22a (first through holes) penetrating in the plate thickness direction and an internal space having a larger diameter than the through hole 22a through the plate thickness direction, and the lift pins 133 can be inserted therethrough. A plurality of through-holes 22b (second through-holes) and a pipe 22c (see FIG. 7) that communicates with the through-hole 22a at one end, extends along the transport direction D, and connects to the air supply unit 23 at the other end. Have. In addition, the substrate W placed on the holding member 22 is at least partially in surface contact via the through hole 22a and the pipe 22c by an intake operation by driving a pump (not shown) of the air supply unit 23. 22 is held by suction. The substrate transport mechanism 20 is realized, for example, by using a linear motor guide as the transport shaft 12a and using a linear motor as the moving body 21a. In addition, the board | substrate conveyance mechanism 20 is realizable also with the structure using a ball screw other than a linear motor and a linear motor guide.

  Here, the plate thickness of the holding member 22 is preferably thicker than the plate thickness of the substrate W. In addition to preventing vibration transmitted from the flow roller 131, the holding member 22 preferably prevents the substrate from being bent when the optical unit 100 performs imaging. As the plate thickness of the holding member 22 is increased, transmission of vibration from the free roller 131 can be prevented, and bending of the substrate W to be placed can be prevented. The plate thickness of the holding member 22 is appropriately set in consideration of the size of the substrate W, that is, the size of the substrate W to be inspected, the material used for the holding member 22, and the like. In imaging of the substrate W, as shown in FIG. 2, it is preferable to prevent bending in the direction orthogonal to the transport direction D, and can be realized by the rigidity of the holding member 22.

  The end of the pipe 22c on the side different from the side communicating with the through hole 22a extends to the inside of the gantry 12 via the support column 21b and the like. In addition, the support height of the board | substrate W by the board | substrate conveyance mechanism 20 can be adjusted by adjusting the support | pillar 21b. Moreover, it is preferable that at least the part located on the holding member 22 side of the pipe 22c is made of a transparent member that transmits the illumination light from the illumination unit 14, such as glass or light transmissive resin, and is located on the gantry 12 side. It is preferable that the portion to be made of a flexible resin.

  The alignment mechanism 132 is provided on each outer peripheral side of the transfer stage 13 (stage 13A), and the contact member that contacts the substrate W is controlled at least in the perspective direction with respect to the end surface of the substrate W under the control of the control unit 30. It is movable. One or two alignment mechanisms 132 are provided corresponding to each side of the substrate W, and the contact members of the alignment mechanisms 132 are in contact with the corresponding end surfaces of the substrate W, respectively, so that the substrate W is positioned. Do. For example, when two alignment mechanisms 132 are disposed on one side of the substrate W, one alignment mechanism 132 is disposed on the opposite side. At this time, it is preferable that the figure formed by connecting the alignment mechanisms 132 is a triangle (regular triangle or isosceles triangle).

  The alignment mechanism 132 is configured such that when the substrate W is loaded into the FPD inspection apparatus, the substrate W is placed on the holding member 22 in a state where the substrate W is positioned with a predetermined accuracy, for example, with a high accuracy by a loading robot arm. If it is placed, it is not always necessary.

  Further, if the FPD inspection apparatus 1 includes an exterior having an FFU that surrounds at least the substrate processing unit 2 and feeds clean air (hereinafter referred to as clean air) provided above the optical unit 100, a clean room is formed. This is preferable. This clean room is a sealed internal space except for the substrate entrance and exit and the lower duct.

  The FFU, for example, sends clean air from which dust such as particles have been removed. As a result, the moving region of the optical unit 100 is made clean with less dust. Further, clean air concentrated and sent in the vicinity of the optical unit 100 forms a downflow in the clean room and is then exhausted from the exhaust port.

  The control mechanism 3 includes a control unit 30, an input unit 31, an output unit 32, an inspection unit 33, and a storage unit 34. The control mechanism 3 is realized by a computer having a ROM, a RAM, a communication function, and the like.

  The control unit 30 controls the entire FPD inspection apparatus 1. The input unit 31 is configured by using a keyboard, a mouse, a touch panel, buttons, and the like, and inputs various information necessary for analyzing a sample, instruction information for analysis operation, and the like from the outside. The output unit 32 is configured using a display or the like.

  The inspection unit 33 measures and / or inspects the substrate W based on the image acquired by the optical unit 100 or its spectrum.

  The storage unit 34 includes a hard disk that magnetically stores information and a memory that loads various programs including an inspection program related to the process when the FPD inspection apparatus 1 executes the process and electrically stores the program. Constructed using.

  In the FPD inspection apparatus 1 described above, under the control of the control unit 30, the substrate W carried into the transport stage 13 from the outside is sucked and held by the substrate transport mechanism 20 and transported in the transport direction D. 100 performs an inspection process such as a defect inspection of the substrate W. At this time, the substrate transport mechanism 20 transports the substrate W by moving the holding member 22 that sucks and holds the surface of the substrate W through the through hole 22b along the transport direction D.

  FIG. 8 is a perspective view showing the configuration of the FPD inspection apparatus 1 according to the present embodiment, and shows a case where a substrate W is carried in from an external mechanism. FIG. 9 is a perspective view showing a configuration of a main part of the FPD inspection apparatus 1 according to the present embodiment, and shows a case where the substrate W is carried in from an external mechanism. When receiving the substrate W from the outside, as shown in FIGS. 8 and 9, the transfer robot 200 loads the substrate W held by the comb-shaped arm 201 into the transfer stage 13 (stage 13A). The transfer robot 200 moves down after the arm 201 holding the substrate W has advanced onto the stage 13A. At this time, in the stage 13A, the lift pins 133 are raised and project from the through holes 22b, and the arm 201 enters between the lift pins 133. Thereafter, the arm 201 is lowered so that the substrate W is held by the lift pins 133. After the substrate W is supported by the lift pins 133, the transfer robot 200 causes the arm 201 to move away from the transfer stage 13 (FPD inspection apparatus 1) along the transfer direction D.

  Thereafter, the lift pins 133 supporting the substrate W are lowered and retracted below the stage 13A under the control of the control unit 30. At this time, air is blown from the through hole 22 a by the exhaust operation of the air supply unit 23, and the substrate W is supported by the air by the retraction operation of the lift pins 133. When the substrate W is held on the holding member 22, the positioning is performed by the alignment mechanism 132 described above, and is fixed at the positioned position by suction by the air supply unit 23.

  Regarding the positioning of the substrate W, the configuration of the through hole 22b and the lift pin 133 of the holding member 22 is omitted based on various conditions such as the type of the inspection apparatus, the size of the substrate W to be inspected, the material of the holding member 22, and the like. Then, the alignment mechanism 132 may position the substrate W while the substrate W is directly placed on the holding member 22. In this case, the apparatus configuration can be simplified and the cost can be reduced.

  In the above-described embodiment, since the substrate W is held by the plate-like holding member 22 placed on the free roller 131, the transfer of vibration to the substrate is prevented even in the roller conveyance, and the substrate is conveyed. Can be stabilized. In particular, with the recent increase in size of the substrate, vibration on the substrate is likely to occur. Therefore, by preventing the vibration generated from the free roller 131 and the like from being transmitted to the substrate W, it is possible to stably transport the substrate. There is an effective effect.

  In addition, in the conventional method of transporting the substrate by floating it with air, it is possible to transport the substrate in a stable state by preventing the occurrence of vibrations during transport, but for the installation of each substrate floating mechanism In addition to being expensive, assembly accuracy is required, and adjustment is required. In addition, in order to perform stable transport processing and imaging processing, it is necessary to control the air blowout amount (air pressure) supplied to float the substrate, and the configuration (control system configuration) is complicated. There was a risk. On the other hand, in the present embodiment, because of the roller conveyance using the free roller, a conveyance system can be constructed easily and inexpensively, and also in the air for holding the substrate of the holding member, the air pressure is as high as that described above. It can be constructed without the need for accuracy and without complicating the configuration.

  In addition, in the conventional method of supporting and transporting a substrate by a free roller, although a transport system can be constructed at a low price, vibration generated is larger than that of transport by air. In addition, depending on the arrangement interval of the free rollers, there is a difference in height between the support points of each free roller and the substrate and the central part between these support points, and the substrate surface becomes uneven (flexed), and imaging processing There was a risk of affecting the On the other hand, in the present embodiment, since the substrate is transported using a plate-like holding member placed on the free roller, the substrate can be prevented from being bent and stable imaging processing can be performed.

  Further, in the conventional method of transporting a substrate by air or free rollers, when a transmission illumination system is used, it is necessary to change the transport system according to the inspection line. For example, in order to prevent the free roller from appearing, no free roller is provided on the inspection line, in order to prevent the substrate from being bent, the number of free rollers near the inspection line is increased, or the inspection area And control to change the air pressure between and other areas. On the other hand, in this embodiment, since the substrate is transported using the holding member that transmits the transmitted illumination light, the holding member increases the rigidity of the substrate and prevents the substrate from being bent, so that the free roller in the inspection line. Even in the case of not providing the sensor, stable imaging processing can be performed without bending the substrate.

  In addition, in the conventional method of transporting a substrate by air or free rollers, the transport axis of the transport unit is connected to the transport stage in order to prevent the substrate from being displaced from or separated from the transport unit during acceleration / deceleration due to movement of the transport unit. It was arranged at the center in the width direction (direction perpendicular to the transport direction). However, although the above-described configuration can prevent displacement or separation of the substrate during acceleration / deceleration, there is a problem that it is difficult to dispose the illumination unit that emits transmitted illumination light. On the other hand, in this embodiment, even when an illumination unit that emits transmitted illumination light is arranged and the conveyance axis of the conveyance unit is provided on the side in the width direction of the conveyance stage, the substrate is held by the holding member. Therefore, it is possible to prevent the substrate from being displaced or detached during acceleration / deceleration and to perform an imaging process by arranging an illumination unit that emits transmitted illumination light.

  Moreover, in this Embodiment mentioned above, it is possible to convey a board | substrate using the holding member of board thickness more than a board | substrate, and raises the rigidity of a board | substrate with a holding member, and prevents the board | substrate from bending, and conveys it. As a whole, the number of free rollers in the entire transport system can be reduced compared to the number of free rollers in conventional roller transport.

  Note that although this embodiment has been described as being applied to an off-line type FPD inspection apparatus, it is also applicable to an inline type FPD inspection apparatus. Moreover, in the conveyance of the board | substrate concerning embodiment mentioned above, it may replace with the adsorption holding | maintenance by air, and the structure which hold | maintains and conveys a board | substrate with a sealing material etc. may be sufficient, and the structure which clamps a board | substrate and conveys a board | substrate Even so, it is applicable.

  In the present embodiment, the transport unit 21 of the substrate transport mechanism 20 has been described as being provided on one side of the transport stage 13 and holding the holding member 22, but is provided on both of the transport stages 13. Even the one that holds the holding member 22 can be applied.

  As described above, the substrate transport apparatus according to the present invention is useful for preventing the transmission of vibration to the substrate even in roller transport and stabilizing the transport of the substrate.

DESCRIPTION OF SYMBOLS 1 FPD inspection apparatus 2 Substrate processing part 3 Control mechanism 10 Gantry 11, 12 Mount 13 Transfer stage 13A-13D Stage 14 Illumination part 14a Illumination member 20 Substrate conveyance mechanism 21 Conveyance part 21a Moving body 21b Prop 21c Holding plate 21d Screw 22 Holding member 22a, 22b Through hole 22c Piping 23 Air supply unit 30 Control unit 31 Input unit 32 Output unit 33 Inspection unit 34 Storage unit 100 Optical unit 101 Microscope 110 Vibration absorption mechanism 131 Free roller 132 Alignment mechanism 133 Lift pin 200 Transport robot 201 Arm L1 Inspection Line PR1 Inspection space TR1, TR2 Transport space W Substrate

Claims (6)

A substrate transport apparatus having a transport stage for transporting a substrate to be transported along a predetermined transport direction by using a plurality of rollers,
A substantially plate-like holding member that is supported by a part of the plurality of rollers and is movable along the carrying direction on the carrying stage and holds the substrate in surface contact with the substrate. A substrate transfer device.   The substrate transfer apparatus according to claim 1, further comprising a transfer unit that holds the holding member and can reciprocate on a transfer shaft extending in parallel with the transfer direction. An imaging unit that performs imaging processing of the substrate;
An illumination unit that irradiates illumination light to an imaging region imaged by the imaging unit;
With
The substrate transport apparatus according to claim 1, wherein the holding member is made of a material that transmits illumination light emitted from the illumination unit. The holding member is
Having a first through hole that communicates with a flow path in a pipe that is connected to an air supply unit that penetrates in the plate thickness direction and performs an air suction and discharge operation
The substrate transfer apparatus according to claim 1, wherein the substrate is held by sucking the substrate through the first through hole.   5. The substrate transfer apparatus according to claim 4, wherein the pipe is made of a material that transmits light. A plurality of lift pins provided in a direction perpendicular to the plane passing through the upper ends of the plurality of rollers so as to advance and retreat within a range passing through the plane, each supporting the substrate at the tip;
The substrate transport apparatus according to claim 1, wherein the holding member has a second through hole that penetrates in the plate thickness direction and passes through the lift pin.

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