KR20040047062A - Display panel conveyer for multipurpose optics test having stage type - Google Patents

Abstract

PURPOSE: A display panel transfer apparatus having a stage type for a multipurpose optical check is provided to transfer safely without wave by a guide portion and a gripping portion. CONSTITUTION: The display panel transfer apparatus(100) is mounted to a general in-line apparatus(40). The in-line apparatus(40) comprises a base(30), a plurality of vibration insulation member(32) mounted to an upper portion of the base(30), a scan section(34) and a review section(36) which are arranged sequentially to the upper portion of the vibration insulation member(32). The transfer apparatus(100) guides a display panel(D) for checking to the scan section(34) and the review section(36). The transfer apparatus(100) is equipped with a guide member(110) and a gripping member(120).

Description

Technical Field [0001] The present invention relates to a display panel conveying apparatus for multi-purpose optical inspection,

The present invention relates to a display panel transfer apparatus mounted on an inline inspection apparatus among FPD inspection apparatuses, and more particularly, to a scan section and a review section, which are continuously arranged, and a review section The display panel can be safely transported without shaking, and at the same time, the display panel can be safely transported to the lower portion of the in-line inspection equipment To a multi-purpose optical inspection display panel transfer apparatus having a stage system capable of freely installing an inspection camera and transmission illumination.

Generally, an in-line FPD automatic optical inspection device captures an image of an object to be inspected by using an optical lens and a CCD camera while guiding a display panel such as a TFT LCD panel, a PDP, and a color filter It is a device to detect various defects that users want to find by applying vision image processing algorithm. Such inline inspection equipment is largely divided into a scan section, a review section and an unload section for detecting defects. It is also important to accurately identify the location and size of detected defects in order to fulfill its role as an inspection system. Thus, it is possible to carry out a repair process for recovering the defect to be detected, and even if it is detected as a defect, it is possible to ignore defects whose size is small enough not to affect the performance of the FPD circuit.

For this purpose, the "top surface", which the camera looks down at from the top, and the "back surface", which the camera looks up from below, are classified according to the object to be inspected, the respective sections or types of defects to be detected, The lower part is also inspected at the same time. In addition, reflecting illumination and transmittance illumination are required depending on the illumination method for the object, respectively. For example, it is advantageous to inspect the top surface of the display panel using reflections in order to find particles such as dust that have fallen on the top surface of the display panel. In order to detect a scratch defect on the back surface of the display panel, Further, in order to detect defects such as pinholes well, it is effective to perform top surface inspection using transmission illumination.

3 and 4 are views showing an example of a conventional display panel transfer apparatus. The inspection method shown in FIG. 3 is a method of detecting defects while moving the vacuum chuck plate 10 while the display panel D is being fixed on the upper surface of the vacuum chuck plate 10 in the most general inspection equipment type The inspection method shown in FIG. 4 is a method in which the camera scan is performed while the display panel D is being conveyed on the conveyor roller 20. 3 is advantageous in that the display panel D is not distorted and can be accurately tracked with respect to the display panel D but structurally using the reflective illumination 12 and the upper surface camera 14 There is a disadvantage that it is impossible to perform only the upper surface inspection. The system shown in FIG. 4 is very fast as a structure suitable for an in-line production process. In addition, the camera 22 and the transmission light 24 can be installed through the rollers 20 under the display panel D, (26) and the reflective light (28) can be installed at the same time. The display panel D is scanned from the beginning to the end of the scan while rolling over the roller 20 so that the progress of the display panel D may be skewed or deviated during the scan or a slip between the roller 20 and the display panel D silp) are generated and the positional accuracy of the vision inspection result is degraded.

SUMMARY OF THE INVENTION The present invention has been conceived in order to solve the above-mentioned problems, and an object of the present invention is to provide a scan section and a review section which are arranged continuously, a guide section disposed at one side of the scan section and at the other edge of the review section, The display panel can be safely transported without being shaken and the bottom surface of the inline inspection equipment can be freely installed on the lower surface of the inspection camera and the transmission light. And to provide a display panel transfer apparatus for a multi-purpose optical inspection.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a view showing an operating state of an in-line inspection apparatus equipped with a multi-purpose optical inspection display panel transfer apparatus having a stage system according to the present invention,

2 is an enlarged view of the display panel transfer apparatus shown in Fig. 1, and Fig.

3 and 4 are views showing an example of a conventional display panel transfer apparatus.

Description of the Related Art

100: conveying device 110: guide part

112a: first fixing member 112b: second fixing member

114a: first movable element 114b: second movable element

116: air glider 120: gripping portion

122a: first stage 122b: second stage

124a, 124b: rotary stages 126a, 126b: up-down stage

128a, 128b: rotating bearings 134a, 134b: vacuum gripper

In order to achieve the above-mentioned object of the present invention,

1. A transfer device for guiding a display panel to a scan section and a review section side in an in-line inspection equipment comprising a scan section and a review section, the transfer device comprising:

The transfer device comprises:

A first movable body that is horizontally disposed on one side edge of the scan section and the review section and extends to a central portion of the scan section and the review section, a first movable body that is moved along the first fixed body, A guide portion having a second movable body that is moved along the second fixed body; And

A first stage which reciprocates the scanning section and the review section section by vacuum adsorbing the display panel which is disposed on the upper side of the first movable body and the second movable body and which has the same shape and is put in, And a gripping portion having a second stage for reciprocating the review section section by vacuum-adsorbing the display panel. The present invention also provides a multi-purpose optical inspection display panel transfer apparatus having a stage system.

Preferably, the first stage and the second stage control the rotating bearings, the first servomotor and the first servomotor for rotating the rotating bearings while being fixedly disposed on the first movable body and the second movable body, respectively, A " C " shaped bracket coupled to the upper portion of the rotary bearing of each rotary stage, a linear guide vertically arranged on one side of the bracket, a linear guide block fed along the linear guide, A second servo motor for driving the guide block, and a vacuum gripper disposed on the upper portion of the linear guide block and vacuum-sucking the inputted display panel.

As described above, according to the present invention, there are provided a guide section disposed at one side of a continuously scanned section and a review section and at the other edge of a review section, and a display panel guided along the guide section, By providing the gripping portion, the display panel can be safely transported without shaking, and the under surface inspection camera and the transmission illumination can be freely installed on the lower portion of the inline inspection equipment.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a display panel transfer apparatus for a multi-purpose optical inspection according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings.

1 is a view showing an operating state of an inline inspection apparatus equipped with a multi-purpose optical inspection display panel transfer apparatus having a stage system according to the present invention, and Fig. 2 is an enlarged view of the display panel transfer apparatus shown in Fig. FIG.

Referring to FIGS. 1 and 2, a display panel transfer apparatus 100 for a multi-purpose optical inspection according to the present invention includes a base 30, a plurality of vibration insulators 32 disposed on the top of the base 30, Is mounted on a conventional in-line inspection equipment (40) having a scan section (34) and a review section (36) arranged sequentially on top of the vibration isolator (32) Guides the display panel D to be inspected to each of the scan section 34 and the review section 36 side.

At this time, the conveying apparatus 100 includes a guide unit 110 and a gripping unit 120.

First, the guide portion 110 includes a first fixing body 112a, a first movable body 114a, a second fixing body 112b, and a second movable body 114b. The first fixing body 112a is horizontally disposed at one side edge of the scan section 34. [ The first fixing member 112a thus formed is provided with the first movable member 114a which is conveyed along the first fixing member 112a.

Preferably, the first fixed body 112a and the first movable body 114a adopt a pair of linear motors. On the other hand, the second fixing body 112b extends from the rear portion of the scanning section 34 to the review section 36. The second fixing body 112b is disposed horizontally on the other edge of the scan section 34 and the review section 36. [ That is, the second fixing bodies 112b are arranged to face each other while facing the first fixing bodies 112a. The second fixing body 112b is provided with a second movable body 114b which is conveyed along the second fixing body 112b. Preferably, the second fixed body 112b and the second movable body 112b adopt a pair of linear motors.

On the other hand, a plurality of air gliders 116 are disposed on the upper surface of the scan section 34 and the review section 36. [ The air glider 116 is arranged on one side and the other side of the first fixing body 112a and the second fixing body 112b and a bottom camera (not shown) and transmission light (not shown) are arranged on the center portion Lt; / RTI > A gripping portion 120 is mounted on the first movable body 114a and the second movable body 114b which are conveyed along the first fixing body 112a and the second fixing body 112b thus formed.

The gripping portion 120 has a first stage 122a disposed on the upper portion of the first movable body 114a and a second movable body 114b having the same structure as the first stage 122a and disposed on the upper portion of the second movable body 114b 2 stage 122b. These first and second stages 122a and 122b include rotary stages 124a and 124b and up down stages 126a and 126b.

First, the lower portions of the rotary stages 124a and 124b are fixedly disposed on the upper portions of the first movable body 114a and the second movable body 114b. Rotary bearings 128a and 128b exposed to the top of each of the rotary stages 124a and 124b, a first servo motor (not shown) for rotating the rotary bearings 128a and 128b, and a second servo motor And an encoder (not shown). Up-down stages 126a and 126b are disposed above the respective rotary stages 124a and 124b, which are the combination of the rotary bearings 128a and 128b, the first servo motor, and the encoder.

The up-down stages 126a and 126b are provided with brackets 129a and 129b of a letter shape connected to the upper portions of the respective rotation bearings 128a and 128b and linearly arranged on one side of the brackets 129a and 129b. A guide 130a and 130b and a second servo motor (not shown) for driving the linear guide blocks 132a and 132b and the linear guide blocks 132a and 132b to be transported along the linear guides 130a and 130b do. At this time, vacuum grippers 134a and 134b are disposed above the linear guide blocks 132a and 132b.

The vacuum grippers 134a and 134b extend horizontally to both sides along the first fixing body 112a and the second fixing body 112b at the upper portions of the linear guide blocks 132a and 132b. Groove grooves 136a and 136b are formed on the upper surfaces of the vacuum grippers 134a and 134b along the vacuum grippers 134a and 134b so as to be concave downwardly. The center of the groove grooves 136a and 136b The vacuum supply holes 138a and 138b are formed.

Hereinafter, the operation state of the conveying apparatus 100 formed as described above will be briefly described.

First, a signal is sent from the upstream equipment to the inline inspection equipment 40 side to transfer the display panel D, and then the transfer device 100 of the inline inspection equipment 40 starts operating. The first stage 122a of the gripping portion 120 of the transfer device 100 is inserted into one side of the lower surface of the display panel D guided to the scan section 34 side of the inline inspection equipment 40. [ When the first stage 122a is inserted into the lower portion of the display panel D, the second servo motor is driven to feed the linear guide block 132a upward. The upper surface of the vacuum gripper 134a is brought into close contact with the lower surface of the display panel D as the linear guide block 132a is conveyed upward. At this time, adsorption air is generated through the vacuum supply hole 138a to adsorb and fix the display panel D on the upper surface of the vacuum gripper 134a. The display panel D sucked and fixed to the first stage 122a as described above is driven by a rotation bearing 128a which rotates by the first servo motor after reading a mark by an alignment camera Thereby correcting the rotation error (?) Of the panel (D).

As described above, the display panel D whose position is corrected on the first stage 122a is transferred to the scan section 34 to perform a scan operation. At this time, the first movable body 114a fixed to the lower part of the first stage 122a completes the scanning operation while transferring the scan section 34 along the first fixing body 112a.

When the scanning operation is completed, the first stage 122a guides the display panel D to the intermediate position between the scanning section 34 and the review section 36. [ When the first stage 122a guides the display panel D to the intermediate position of the scan section 34 and the review section 36, the second stage 122b is moved in the same manner as the first stage 122a, The vacuum gripper 134a of the first stage 122a releases the fixing of the display panel D at this time. At this time, in the vacuum supply hole 138a, the generation of adsorption air is stopped, and the second servo motor is operated to lower the linear guide block 132a. As a result, the vacuum gripper 134a is released from the display panel D .

On the other hand, the display panel D vacuum-adsorbed to the second stage 122b is transferred to the review section 36 side to start the inspection. When the inspection is completed in the review section 36, And is released to the outside of the display panel (D). At this time, the first stage 122a is conveyed again so as to be guided to another display panel D again.

On the other hand, the display panel D transferred to the scan section 34 and the review section 36 is slightly floated by the air glider 116 to correct the transport error or the rotation error? Of the display panel D The friction acting on the display panel D can be solved and the inspection camera (not shown) and the transmission illumination (not shown) can be installed between the air gliders 116 so as not to interfere with the transfer device 100 .

As described above, in the multi-purpose optical inspection display panel transfer apparatus 100 having the stage system according to the present invention, the guide section 110 is fixedly disposed on one side of the scan section 34 and the review section 36, The gripping portions 120 for vacuum suctioning the panel D are respectively transportably mounted to the guide portion 110 so that interference of the transfer device 100 on the upper surface of the inline inspection equipment 40 is avoided, The transmission light can be easily installed and the accuracy of the inspection result can be improved.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention as defined by the appended claims. .

Claims (4)

1. A transfer device for guiding a display panel to the scan section and the review section side in an in-line inspection equipment comprising a scan section and a review section, the transfer device comprising: Wherein the transfer device comprises: A first fixed body extending horizontally to one side edge of the scan section and the review section while extending to a center portion of the scan section and the review section, a first movable body conveyed along the first fixed body, A second fixing body horizontally disposed on the other edge of the section, and a guide portion having a second movable body conveyed along the second fixing body; And A first stage which has the same shape and which is arranged on the upper side of the first movable body and the second movable body so as to reciprocate the scan section and the review section section by vacuum adsorbing the input display panel, And a gripping unit having a second stage for reciprocating the review section section by vacuum suctioning the display panel on which the scanning operation is completed. 2. The multi-purpose optical inspection display (1) according to claim 1, wherein the first fixed body and the first movable body as well as the second fixed body and the second movable body are a pair of linear motors Panel conveying device. [2] The apparatus of claim 1, wherein the first stage and the second stage each include a rotating bearing which is fixedly disposed on the first movable body and the second movable body and is exposed upward, a first servo motor rotating the rotating bearing, A rotary guide having an encoder for controlling the first servomotor; a "B" shaped bracket coupled to an upper portion of the rotary bearing of each of the rotary stages; a linear guide vertically disposed on one side of the bracket; An up-down stage having a linear guide block that is transported along the linear guide, a second servo motor that drives the linear guide block, and a vacuum gripper that is disposed on the upper portion of the linear guide block and vacuum- And a second stage optical system Ray panel transfer device. 4. The linear gripper according to claim 3, wherein the vacuum gripper extends horizontally along the first fixing body and the second fixing body at an upper portion of each of the linear guide blocks, And a vacuum supply hole is formed in a central portion of the groove groove.