TW200644143A - Substrate inspection apparatus - Google Patents

Substrate inspection apparatus

Info

Publication number
TW200644143A
TW200644143A TW095116045A TW95116045A TW200644143A TW 200644143 A TW200644143 A TW 200644143A TW 095116045 A TW095116045 A TW 095116045A TW 95116045 A TW95116045 A TW 95116045A TW 200644143 A TW200644143 A TW 200644143A
Authority
TW
Taiwan
Prior art keywords
substrate
inspection apparatus
substrate inspection
floating stage
illuminating light
Prior art date
Application number
TW095116045A
Other languages
Chinese (zh)
Other versions
TWI307929B (en
Inventor
Shuya Jogasaki
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of TW200644143A publication Critical patent/TW200644143A/en
Application granted granted Critical
Publication of TWI307929B publication Critical patent/TWI307929B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Fluid Mechanics (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

This substrate inspection apparatus includes: a floating stage which allows a substrate to float; an observation device which observes an upper surface of the substrate transported on the floating stage; a transmission luminous source which illuminates the lower surface of the substrate with illuminating light; an illuminating light passing portion formed at the floating stage, and formed by a gap through which the illumination light passes; and a transmission member through which the illumination light is transmitted, inserted in the illuminating light passing portion.
TW095116045A 2005-05-12 2006-05-05 Substrate inspection apparatus TWI307929B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005139515 2005-05-12

Publications (2)

Publication Number Publication Date
TW200644143A true TW200644143A (en) 2006-12-16
TWI307929B TWI307929B (en) 2009-03-21

Family

ID=37389784

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095116045A TWI307929B (en) 2005-05-12 2006-05-05 Substrate inspection apparatus

Country Status (3)

Country Link
KR (1) KR100786620B1 (en)
CN (1) CN100428001C (en)
TW (1) TWI307929B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI610115B (en) * 2013-03-21 2018-01-01 住友化學股份有限公司 Detector, laser light irradiation apparatus, and apparatus for manufacturing optical member sticking workpiece

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100912401B1 (en) * 2008-01-29 2009-08-14 주식회사 쓰리비 시스템 Apparatus for inspecting optical film
JP5559644B2 (en) * 2010-09-03 2014-07-23 株式会社トプコン Inspection device
JP2012073036A (en) * 2010-09-27 2012-04-12 Hitachi High-Technologies Corp Glass substrate defect checkup device and glass substrate defect checkup method
CN102759531A (en) * 2012-07-25 2012-10-31 深圳市华星光电技术有限公司 Automatic optical detection device
KR102606278B1 (en) * 2016-03-25 2023-11-27 삼성디스플레이 주식회사 Apparatus for manufacturing a display apparatus
CN107489688A (en) * 2016-06-13 2017-12-19 睿励科学仪器（上海）有限公司 Acetabula device and installation method with horizontal adjustment function
KR20190036007A (en) * 2017-09-26 2019-04-04 삼성전자주식회사 Grip apparatus and substrate inspecting system including the same

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000111483A (en) * 1998-10-02 2000-04-21 Dainippon Printing Co Ltd Method and apparatus for inspection of cyclic pattern
JP2000193604A (en) * 1998-12-25 2000-07-14 Takano Co Ltd Automatic inspection device for substrate
DE10057036C2 (en) * 2000-11-17 2002-12-12 Basler Ag Inspection system for flat glasses in display production
JP2002181714A (en) * 2000-12-19 2002-06-26 Ishikawajima Harima Heavy Ind Co Ltd Thin plate inspection device
JP4276867B2 (en) * 2003-03-18 2009-06-10 オリンパス株式会社 Substrate holder and surface inspection apparatus provided with the same
JP4310622B2 (en) * 2003-04-11 2009-08-12 株式会社日立ハイテクノロジーズ Substrate surface inspection method and inspection apparatus
KR100506702B1 (en) * 2003-05-06 2005-08-09 주식회사 디이엔티 Substrate Inspection Apparatus
JP4426276B2 (en) * 2003-10-06 2010-03-03 住友重機械工業株式会社 Conveying device, coating system, and inspection system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI610115B (en) * 2013-03-21 2018-01-01 住友化學股份有限公司 Detector, laser light irradiation apparatus, and apparatus for manufacturing optical member sticking workpiece

Also Published As

Publication number Publication date
KR20060117220A (en) 2006-11-16
TWI307929B (en) 2009-03-21
KR100786620B1 (en) 2007-12-21
CN1862319A (en) 2006-11-15
CN100428001C (en) 2008-10-22

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees