CN1784779A - Substrate suction device - Google Patents

Substrate suction device Download PDF

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Publication number
CN1784779A
CN1784779A CN 200480012097 CN200480012097A CN1784779A CN 1784779 A CN1784779 A CN 1784779A CN 200480012097 CN200480012097 CN 200480012097 CN 200480012097 A CN200480012097 A CN 200480012097A CN 1784779 A CN1784779 A CN 1784779A
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China
Prior art keywords
absorption
substrate
pedestal
absorption device
housing
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Granted
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CN 200480012097
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Chinese (zh)
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CN100362643C (en
Inventor
林贵人
平户功二
木下齐
城崎修哉
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Olympus Corp
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Olympus Corp
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Publication of CN1784779A publication Critical patent/CN1784779A/en
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Publication of CN100362643C publication Critical patent/CN100362643C/en
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  • Hooks, Suction Cups, And Attachment By Adhesive Means (AREA)

Abstract

A suction pad (16) is placed on a tube member (15) in an opening portion (1b) of a housing (1). The suction pad (16) has a suction portion (16a) and a hemispherically curved contact surface portion (16c) being in point-contact at at least three points with the inner wall of the opening portion of the housing (1). A fine thread (24) is stretched between the suction pad (16) and a sliding member (9).

Description

Substrate absorption device
Technical field
The present invention relates to adsorbent equipment to for example thin plate substrates such as the glass substrate of use and semiconductor wafer adsorb and kept on flat-panel monitor (following province is FPD slightly).
Background technology
In absorption and when keeping large-scale laminal glass substrate,, also must adsorb reliably even glass substrate produces warpage or bending.Therefore require the adsorption section can imitate the distortion or the bending of glass substrate, and the degree of freedom is operated than the highland.In the disclosed adsorbent equipment of Japanese kokai publication hei 10-86086 communique, absorption pedestal (pad) and push and have the gap between the framework can make the absorption basement tilt by this gap.If increase the gradient of this absorption pedestal, then since absorption pedestal and push gap between the stake body when the absorption glass substrate, can move by along continuous straight runs.If the absorption base level moves, then can cause the glass substrate dislocation.Therefore, can not position to high precision, simultaneously, in carrying, because glass substrate swing, and can not carry out stable carrying glass substrate.
If for high precision ground positions glass substrate, make glass substrate no longer swing in carrying, and the gap between adsorption tool and the accepting hole is reduced, then the mobile of adsorption tool adipping is restricted.Therefore, warpage or the bending that is difficult to imitate glass substrate tilted.
Summary of the invention
According to main points of view of the present invention, a kind of substrate absorption device can be provided, it comprises: housing, it forms hollow form and has peristome at leading section; Absorption base supports parts are arranged in the hollow shape of housing, and are provided with the air path of navigation of suction air; The absorption pedestal, it is being positioned under state outstanding from the peristome of housing on the absorption base supports parts, carries out at least contacting on 3 o'clock with the peristome of housing and can yaw, and is provided with the air that is communicated with airtightly with the air path of navigation and takes out and draw the hole; And absorption pedestal holding device, it will adsorb the peristome that pedestal remains on housing.
Description of drawings
Fig. 1 is the structure chart of the 1st execution mode of expression substrate absorption device of the present invention.
Fig. 2 is the structure chart of another one example of the adsorption section of the absorption pedestal of expression in the same apparatus.
Fig. 3 is the structure chart of the 1st and the 2nd supporting bracket in the expression same apparatus.
Fig. 4 A is the figure that the absorption pedestal of expression in the same apparatus begins to imitate the state of crooked glass substrate.
Fig. 4 B is the figure of the state of the crooked glass substrate of the absorption pedestal absorption in the expression same apparatus.
Fig. 4 C is the action of glass substrate is corrected in expression by the absorption pedestal in the same apparatus figure.
Fig. 5 is the plan structure figure that the air suspension transport device of same apparatus is used in expression.
Fig. 6 is the side-looking structure chart of expression same apparatus.
Fig. 7 is the structure chart of the inspection desk (stage) of the expression large substrate testing fixture that uses same apparatus.
Fig. 8 is the structure chart of characteristic of the 2nd execution mode of expression substrate absorption device of the present invention.
Fig. 9 A is the structure chart that uses the variation of metal (wire) in the expression same apparatus.
Fig. 9 B is the structure chart that uses variation wiry in the expression same apparatus.
Figure 10 is the structure chart of the variation of the absorption pedestal in the expression same apparatus.
Figure 11 is the structure chart of the 3rd execution mode of expression substrate absorption device of the present invention.
Figure 12 A is the figure that the absorption pedestal of expression same apparatus begins to adsorb the action of glass substrate.
Figure 12 B is the absorption pedestal of expression same apparatus and the figure of glass substrate butt state.
Figure 12 C is the figure that the absorption pedestal of expression same apparatus adsorbs the state of glass substrate.
Figure 13 is the structure chart of the 4th execution mode of expression substrate absorption device of the present invention.
Figure 14 is to use the large substrate of same apparatus to carry the structure chart of the arm of using device automatically.
Figure 15 is illustrated in the structure chart that uses the 5th execution mode of the 1st and the 2nd substrate absorption device on the air suspension transport device.
Figure 16 is the figure that is illustrated in the air vacuum suction system that uses on the same substrate adsorbent equipment.
Figure 17 is illustrated in the structure chart that uses the 6th execution mode of substrate absorption device on the air suspension transport device.
Figure 18 is illustrated in the structure chart that uses the 6th execution mode of substrate absorption device on the air suspension transport device.
Figure 19 is the figure of the variation of the air vacuum suction system in the expression substrate absorption device of the present invention.
Figure 20 A is the figure of variation of shape of the contact face of expression absorption pedestal.
Figure 20 B is the figure of variation of shape of the contact face of expression absorption pedestal.
Figure 20 C is the figure of variation of shape of the contact face of expression absorption pedestal.
Figure 20 D is the figure of variation of shape of the contact face of expression absorption pedestal.
Figure 20 E is the figure of variation of shape of the contact face of expression absorption pedestal.
Embodiment
Followingly the 1st execution mode of the present invention is described with reference to accompanying drawing.
Fig. 1 is substrate absorption device E 1Structure chart.The cylindric of hollow shape made, formed to housing 1 usefulness metal, and portion forms hollow bulb 2 within it.Tip side at an end of this housing 1 forms the peristome 1b with rounded ends 1a.Bottom peristome inwall at the other end of this housing 1 is provided with threaded portion 1c.The bottom of this housing 1 is installed on the apparatus main body (unit body) 4, and this apparatus main body 4 is installed in substrate absorption device E 1With erecting bed 3 on.
Apparatus main body 4 has the external diameter unanimous on the whole with the internal diameter of housing 1, and forms the hollow shape that inside is provided with air path of navigation 5.Threaded portion 4a is set on the outer peripheral face of this apparatus main body 4.Thus, by screwing togather of threaded portion 1c and threaded portion 4a, make housing 1 can install, dismantle with respect to apparatus main body 4.The outstanding threaded portion 4b that is provided with in the bottom of apparatus main body 4 is with respect to substrate absorption device E 1With erecting bed 3 install.By with threaded portion 4b and substrate absorption device E 1With the threaded portion of erecting bed 3 screw togather, this apparatus main body 4 can be installed, dismantle with respect to erecting bed 3.
Hollow shape inside at this apparatus main body 4 is provided with threaded portion 4c.And, threaded portion 4d is set on the outer peripheral face of apparatus main body 4.On the 4d of this threaded portion, screw togather nut 6.This nut 6 is fixed the housing 1 and the installation site of apparatus main body 4 by screwing tight on the 4d of threaded portion.
On the circumferencial direction of the internal face of the bottom of housing 1, groove 7 is set.The position of this groove 7 is corresponding with the top ends of apparatus main body 3.Clamping has the O type ring 8 that the air leak of preventing is used in this groove 7 and between the top ends of apparatus main body 3.
In the hollow bulb 2 of housing 1 and in top ends one side of apparatus main body 3, slide unit 9 is set.This slide unit 9 can slide in the hollow bulb 2 of housing 1 along the direction of hollow bulb 2.This slide unit 9 forms with thick cyclinder portion 10 and thin cylinder portion 11.
Thick cyclinder portion 10 forms the internal diameter diameter unanimous on the whole with the hollow bulb 2 of housing 1, and its outer peripheral face is close on the inner face of hollow bulb 2 of housing 1.Groove 12 is set on the outer peripheral face of this thick cyclinder portion 10, V word sealing gasket 13 is set in this groove 12.This V word sealing gasket 13 is opened into the V word when the air path of navigation 5 from apparatus main body 4 carries out vacuum draw, can prevent the hollow bulb 2 of housing 1 and the air leak between the slide unit 9, to keep air-tightness.
Thin cylinder portion 11 forms the internal diameter diameter unanimous on the whole with the air path of navigation 5 of apparatus main body 4, and its outer peripheral face is close in the air path of navigation 5 of apparatus main body 4.These thin cylinder portion 11 relative air path of navigation, 5 inside can be inserted with taking off and are provided with.
Inside in thick cyclinder portion 10 and thin cylinder portion 11 is provided with air path of navigation 14, and this air path of navigation 14 is connected with the air path of navigation 5 of apparatus main body 4.
Be provided as the duct member 15 of absorption base supports parts on the top of slide unit 9.This duct member 15 forms cylindric by elastomeric material, and forms the bend 17 that is close to the accordion-like on the absorption pedestal 16 on top.This duct member 15 screws togather in the air path of navigation 14 that is installed in the slide unit 9 by threaded portion 18.Inside at this duct member 15 forms air path of navigation 19.This air path of navigation 19 is communicated with airtightly with the air path of navigation 14 of slide unit 9.
Absorption pedestal 16 is positioned in the top of duct member 15.This absorption pedestal 16 is outstanding from the openend 1a of housing 1.This absorption pedestal 16, for example make by resins such as engineering plastics.This absorption pedestal 16 is by by being positioned on the duct member 15, can be on duct member 15 yaw.This absorption pedestal 16 has: adsorption section 16b, and it has the adsorption plane 16a of flat shape from the teeth outwards; And contacting facial 16c, it has flexure plane sagging at the back side of this adsorption section 16b and that form.Central portion at this adsorption section 16b is provided with air SS 16d.Adsorption section 16b forms the external diameter identical with housing 1.When absorption pedestal 16 descended in housing 1, the neighboring 16e at the 16b back side, this adsorption section carried out face with the openend 1a of housing 1 and contacts, and making descends stops.Therefore, the openend 1a of housing 1 becomes the stop part that absorption pedestal 16 descends, and becomes the datum plane that the inclination of will adsorb the adsorption plane 16a of pedestal 16 is maintained in level simultaneously.
Adsorption section 16b forms the external diameter identical with housing 1 and gets final product, but as shown in Figure 2, also can form from the outer peripheral face of housing 1 and grow length D to outer circumferential side.If such adsorption section 16b, then the area of adsorption plane 16a becomes big, even any part of adsorption plane 16a contacts with glass substrate, the application point and the distance of the center P of adsorption section 16b of the power that applies are elongated in when contact, just make by reinforcing a little thus and adsorb pedestal 16 yaw on duct member 15.
Contact facial 16c and be cylindric, its outer peripheral face is bent to form that to have the hemisphere of maximum gauge planar for the pars intermedia at above-below direction.The internal diameter size that this maximum outside diameter size that contacts facial 16c is slightly less than the hollow bulb 2 (openend 1a) of housing 1 inserts in the peristome 1b of housing 1 along the vertical direction movably.This contacts facial 16c and is supported at least with respect to the inwall 2a of the hollow bulb 2 of housing 1 and locates to carry out a contact at 3.This contacts contacting between the inwall 2a of facial 16c and the hollow bulb 2 of housing 1 needn't only be defined in 3 points, yaw by absorption pedestal 16, a plurality of somes place contacts on the line of the same Zhou Fangxiang that contacts facial 16c, is perhaps contacting with the enterprising line of the line of Zhou Fangxiang.By contacting between the inwall 2a of the facial 16c of this contact and the hollow bulb 2 of housing 1, can reduce the frictional resistance between the inwall 2a of the facial 16c of contact and housing 1, absorption pedestal 16a can carry out stably that yaw moves.
The step difference 20 of ring-type is set in the air SS 16d of absorption pedestal 16.The 1st supporting bracket 21 as shown in Figure 3 is set on this step difference 20.The 1st supporting bracket 21 forms discoideus, is provided with two hole 21a, 21b being used to ventilate.
The step difference 22 of ring-type is set in the air path of navigation 14 of slide unit 9.2nd supporting bracket 23 identical with the 1st supporting bracket 21 shapes is set on this step difference 22.
Between the 1st supporting bracket 21 and the 2nd supporting bracket 23, utilize as the linear material that links parts for example filament 24 connect.Filament 24 adopts bigger, the soft linear material of intensity that can not extend and break for tension force, for example makes by nylon resin.This filament 24 is by duct member 15, interval between the 1st and the 2nd supporting bracket 21,23 is remained necessarily, and be tensioned by the tension force that the elastic force (pay force) that the yaw state that can remove absorption pedestal 16 reverts to flat-hand position is given duct member 15.And, by the tension force of this fine rule 24 bend 17 of duct member 15 can not broken away from from adsorption section 16a, and can carry out the yaw action along with the inclination of adsorption section 16a.The tension force of this filament 24 can be between the 1st and the 2nd supporting bracket 21,23 be adjusted during tensioning, for example can adjust by the winding state when filament 24 being entangled on the 1st and the 2nd supporting bracket 21,23.The 1st supporting bracket the 21, the 2nd supporting bracket 23 and filament 24 constitute absorption pedestal holding device.
It is spring 25 that the inside of the air path of navigation 14 in the thin cylinder portion 11 in slide unit 9 and the air path of navigation 5 of apparatus main body 4 is provided with elastomeric element.This spring 25 is given elastic force to the openend 1a of housing 1 side to absorption pedestal 16, duct member 15 and slide unit 9 integral body from the slide unit 9 in the hollow bulb 2 of housing 1.The downside of this spring 25 is only blocked to be regulated on the parts 26 at spring.
On the outer peripheral face of spring adjusting parts 26, threaded portion 26a is set.The threaded portion 4c of the air path of navigation 5 of the bolt part 26a of this spring adjusting portion 26 and apparatus main body 4 is screwed togather, thereby be installed in the air path of navigation 5.This spring is regulated parts 26 and is formed ring-type, and empty therein portion is provided with air path of navigation 26b.This spring is regulated parts 26 and is rotated by threaded portion 26a and screwing togather of threaded portion 4c, thereby moves up and down the elastic force of adjusting spring 25 thus in air path of navigation 5.
Absorption base height adjusting mechanism 27 is set in the hollow bulb 2 of housing 1.This absorption base height adjusting mechanism 27 has the adjustment endless member 29 that screws togather with the threaded portion 28 that forms in the hollow bulb 2 of housing 1.This adjustment with endless member 29 by moving up and down in the hollow bulb 2 at housing 1 in rotation on the threaded portion 28.Corresponding with moving up and down of endless member 29 with this adjustment, absorption pedestal 16, duct member 15 and slide unit 9 move up and down in the hollow bulb 2 of housing 1 integratedly.Thus, can adjust absorption pedestal 16 with respect to housing 1 openend 1a height and position A.
Then, with reference to Fig. 4 A～Fig. 4 C to above-mentioned such device E that constitutes 1The action of absorption glass substrate S describes.
Glass substrate S is carried to substrate absorption device E 1The top time, this substrate absorption device E 1Rise by lowering or hoisting gear.Glass substrate S 1For example produce warpage or crooked and tilt.By substrate absorption device E 1Rising, shown in Fig. 4 A, the part of the adsorption plane 16a of absorption pedestal 16 and the back side butt that produces warpage or crooked glass substrate 40.
Absorption pedestal 16 is positioned on the duct member 15, and by the lower side drawing of filament 24 quilts to housing 1.Thus, apply elastic force in absorption on the pedestal 16, this elastic force can make its yaw on duct member 15, and only otherwise adding external force does not just carry out yaw and move, and revert to static posture, be the posture that adsorption plane 16a becomes horizontal direction.
Thereby, owing to, absorption pedestal 16 is contacted, with the back side of glass substrate S so shown in Fig. 4 B by slight butt reinforcing from the below of glass substrate S, absorption pedestal 16 becomes the yaw state, with warpage or the crooked inclination that form of imitation owing to glass substrate S.That is, on one side because absorption pedestal 16 inserts in the peristome 1b of housing 1 the facial 16c of contact, Yi Bian carry out yaw, so maximum can tilt to the swaying angle of the end 1a butt of the neighboring 16e at the back side of adsorption section 16b and housing 1.
Owing to make on one side facial 16c of the contact of absorption pedestal 16 and the inwall of the peristome 1b of housing 1 on 3 o'clock, carry out at least contacting, move Yi Bian carry out yaw, so the frictional resistance that contacts between the inwall of peristome 1b of facial 16c and housing 1 is little.Consequently, even the warpage of glass substrate S or bending are bigger, the adsorption plane 16a of absorption pedestal 16 also can imitate the warpage of glass substrate S or crooked and be close on the back side of glass substrate S.
Because adsorption section 16a forms the external diameter identical with housing 1, so the distance of the center of the application point of reinforcing and adsorption section 16a is elongated when glass substrate S contacts the neighboring of adsorption section 16a.Thus, by with the contacting a little when the neighboring of adsorption section 16a applies contact force of glass substrate S, this contact force becomes the bigger revolving force that makes absorption pedestal 16 yaws by leverage.
Under this state, when the air path of navigation 5 of apparatus main body 4 carries out vacuum draw through the air SS 16d of the air path of navigation 19 of the air path of navigation 14 of slide units 9, duct member 15 and absorption pedestal 16 to air, sealed and become negative pressure in these air path of navigation 5,14,19 and the air SS 16 by vacuum draw.Thus, the adsorption plane 16a of absorption pedestal 16 adsorbs the back side of glass substrate S.At this moment, even glass substrate S produces warpage or bending,,, reliably glass substrate S is carried out vacuum draw so air can not leak because the adsorption plane 16a of absorption pedestal 16 also can be close on the back side of glass substrate S with imitating.
Meanwhile, owing to become negative pressure by vacuum draw in each air path of navigation 5,14,19 and the air SS 16, so by this negative pressure, the elastic force that absorption pedestal 16, duct member 15 and slide unit 9 can antagonistic springs 25, decline the hollow bulb 2 of housing 1 in naturally.Thus, shown in Fig. 4 C, the whole of the neighboring 16e at the back side of absorption pedestal 16 carry out the face contact on the openend 1a of housing 1, because the openend 1a of housing 1 is a datum plane, so the adsorption plane 16a of absorption pedestal 22 can be disposed in the horizontal direction.Consequently, glass substrate S can be kept in the horizontal direction.
Because the facial 16c of contact contacts with the peristome inwall of housing 1, so can limit 16 horizontal the moving of absorption pedestal.By this restriction, even under the state at the back side of adsorbing pedestal 16 absorption glass substrate S, glass substrate S can not misplace yet, and can keep the hi-Fix state.
According to above-mentioned the 1st execution mode, because mounting absorption pedestal 16 on the duct member 15 in the peristome 1b of housing 1, this absorption pedestal 16 is formed with adsorption section 16a; And it is planar and carried out the facial 16c of a some contact that contacts with the peristome inwall of housing 1 at least on 3 o'clock to bend to hemisphere, and between this absorption pedestal 16 and slide unit 9, set up filament 24, so absorption pedestal 16 can tilt with bigger angle of inclination, even and because when tilting, contact facial 16c and also contact, so absorption pedestal 16 can be at transversion malposition with the peristome inwall of housing 1.
The swaying angle of absorption pedestal 16 is big, and just can carry out yaw reposefully with less frictional resistance slyness by afterburning a little, can imitate glass substrate S because of warpage or crooked form inclination, be close on the back side of glass substrate S, thereby can leakage air, can adsorb glass substrate S reliably.
Because the distance between the application point of the contact force on the adsorption section 16b when making contact glass substrate S and the center of adsorption section 16b is elongated, so the afterburning a little absorption pedestal 16 that just can make carries out the yaw action, can imitate bigger warpage or the bending of glass substrate S immediately.
During absorption pedestal 16 absorption glass substrate S, negative pressure in each air guiding path 5,14,19 and the air SS 16d overcomes the elastic force of spring 25, absorption pedestal 16 is descended, carry out face with the openend 1a of housing 1 and contact, 16a is limited in level with adsorption plane.By this restriction, can with by the warpage of the glass substrate S of absorption pedestal 16 absorption or detorsion to level, and can hold it on the datum plane accurately.
Because absorption pedestal 16 is connected by filament 24, so can not break away from the openend 1a of housing 1.
Because absorption base height adjusting mechanism 27 is set, so the height and position A that can begin from the end 1a of housing 1 according to the maintained height and position adjustment absorption of glass substrate S pedestal 16.
Then, with reference to the structure chart of Fig. 5 and air suspension transport device shown in Figure 6 to substrate absorption device E with above-mentioned the 1st execution mode explanation 1When being used for air suspension transport device embodiment describe.And Fig. 5 is a vertical view, and Fig. 6 is an end view.
A plurality of air are set on suspension transport platform 30 blow out hole 31.Blow out the air pressure blow out air of hole 31 from these air with homogeneous.By blowing out of this air, between suspension transport platform 30 and glass substrate S, form air layer, glass substrate S is suspended on suspension transport platform 30.Each guide rail 32,33 of linearity is set respectively on two sides of suspension transport platform 30.Being provided with respectively on these guide rails 32,33 can synchronization-moving each trucking department 34,35.On these trucking departments 34,35, absorption mounting table 37 is set by each lifting support component 36.Each lifting support component 36 makes absorption mounting table 37 in above-below direction (Z direction) lifting.
On this absorption mounting table 37, on the direction identical, be set up in parallel a plurality of, 5 aforesaid substrate adsorbent equipment E for example with the carrying direction T of glass substrate S 1Substrate absorption device E in addition 1Number be not limited to 5, can be provided with arbitrarily.These substrate absorption devices E 1Respectively adsorb the height and position of pedestal 16 by adjusting respectively, and be engaged in identical height and position.
In this air suspension transport device, at suspension transport platform 30 enterprising line space gas suspensions or mounting glass substrate S.Under this state, each trucking department 34,35 is moved at the two ends of the leading section of glass substrate S.Each lifting support component 36 of these trucking departments 34,35 makes respectively and respectively adsorbs mounting table 37 risings.Thus, each substrate absorption device E 1The pedestal 16 that respectively adsorbs contact with the back side of glass substrate S.When these absorption pedestals 16 contacted with the back side of glass substrate S, identical with above-mentioned the 1st execution mode, by the butt additional force to glass substrate S, each adsorbed pedestal 16 and carries out yaw, made the inclination at the back side of adsorption plane 16a imitation glass substrate S.Meanwhile, by the vacuum draw of air, maintenance is adsorbed at the back side that adsorption plane 16a is close to glass substrate S.
Afterwards, if each trucking department 34,35 carries out respectively moving synchronously on each guide rail 32,33, the glass substrate S that then carries out the air suspension is by the mobile traction of each trucking department 34,35, and T carries out the air carrying with high speed on carrying platform 30 along the carrying direction.
If like this with substrate absorption device E 1Be used for air suspension transport device,, make each substrate absorption device E even, also can imitate warpage or the bending of glass substrate S then suspending by air to having produced under the situation that warpage or crooked glass substrate S carry 1 Absorption pedestal 16 be adsorbed on reliably on the back side of glass substrate S.Because absorption pedestal 16 can not misplace, so can not make glass substrate S dislocation during the back side that absorption keeps glass substrate S.Therefore, for example air suspension transport device is arranged on the LCDs production line, glass substrate S to LCDs carries out under the situation of air carrying, in adjustment part in production line and the inspection portion, can make adjusted glass substrate S do not misplace ground, adsorb maintenance accurately.Even the height and position of a plurality of absorption pedestals 16 has deviation, also can adsorb the position that base height adjusting mechanism 27 is adjusted to the height and position of each absorption pedestal 16 sustained height by each.
Then, with reference to the structure chart of inspection desk shown in Figure 7 substrate absorption device E to will above-mentioned the 1st execution mode illustrating 1Embodiment when being used on the inspection desk of large substrate testing fixture describes.
Inspection desk 40 has: platform main body 41, and it forms the frame shape of hollow structure, and is rectangle; And a plurality of bendings prevent crosspiece 43, separate predetermined spaced and parallel ground and be provided with in the hollow bulb 42 of this main body 41.Inner periphery portion at the hollow bulb 42 of platform main body 41 buries a plurality of substrate absorption device E underground at each predetermined interval 1Prevent to hold up on the crosspiece 43 in each bending a plurality of supporting pins 44 are set.
If upload the glass substrate S that buys property and given birth to warpage at this inspection desk 40, each substrate absorption device E then 1The pedestal 16 that respectively adsorbs contact with the back side of glass substrate S.Identical with above-mentioned the 1st execution mode, these absorption pedestals 16 carry out yaw action, make the back side of adsorption plane 16a imitation glass substrate S, are close to the back side of glass substrate S by the vacuum draw of air, and absorption keeps glass substrate S reliably.Therefore, be positioned on the inspection desk 40, also can adsorb reliably and keep glass substrate S even will produce the glass substrate S of warpage or bending.And can adjust the height and position of adsorption plane 16a by each absorption base height adjusting mechanism 27, uprise by the height and position A that makes absorption pedestal 16 simultaneously, even going up, glass substrate S produces bigger warpage or bending, also can correct, remain on glass substrate S absorption on the inspection desk 40 and improve its flatness these warpages or bending.
Then, the 2nd execution mode of the present invention is described.And the part identical with Fig. 1 uses same-sign to represent, omits its detailed description.
Fig. 8 is expression substrate absorption device E 1The structure chart of characteristic.Wire 45 tying (Department end) between the 1st supporting bracket 21 and the 2nd supporting bracket 23.This wire 45 has torsional rigid, is for example made by metal material etc.This wire 45 comprises: bar-shaped wire main body 46; The 1st engaging part (Department at the hook-type of an end setting of this metal master 46 ends portion) 47; And the 2nd engaging part 48 of the J word shape that is provided with at the other end of metal master 47.The 1st engaging part 47 by from each hole 21a, 21b of the 1st supporting bracket 21, pass for example the silk etc. linear material 49 hitch.The 2nd engaging part by tying on each hole 21a, 21b of the 2nd supporting bracket 23.
For example when glass substrate S is carried out air suspension transport, by substrate absorption device E 1When absorption has produced the glass substrate S of warpage or bending, make substrate absorption device E 1Meet to glass substrate S and adsorb.At this moment, substrate absorption device E 1Absorption pedestal 16 sometimes a little the rotation.When the rotation of absorption pedestal 16 is accumulated, keep the torsional capacity of the filament 24 of traction between the 1st supporting bracket 21 and the 2nd supporting bracket 23 of the mechanism of absorption pedestal 16 to become big gradually.So it is big that the tension force of filament 24 becomes, make absorption pedestal 16 descend gradually, absorption pedestal 16 is little from the outstanding quantitative change of the end 1a of housing 1.Therefore, when absorption has produced warpage or crooked glass substrate S, make the inclination at the original back side that makes absorption pedestal 16 imitation glass substrate S tilt and the absorption of adsorb is moved and is difficult to carry out.
According to above-mentioned the 2nd execution mode,, also can limit the rotation of this absorption pedestal 16 by wire 45 even on absorption pedestal 16, apply revolving force.Therefore, the rotation of absorption pedestal 16 can not accumulate in time, and the height and position A that can begin the end 1a from housing 1 keeps.
And the above-mentioned the 1st and the 2nd execution mode also can followingly form.
Fig. 9 A is the structure chart of the variation of expression wire 45.For example, this wire 45 is provided with small diameter part 49a in the 1st engaging part 47 sides of wire main body 46.This small diameter part 49a forms the diameter less than wire main body 46, though should freely tilt by less external force on the thin directly top of 49a, suppresses the revolving force of absorption pedestal 16.
Fig. 9 B also is the structure chart of the variation of expression wire 45.The 1st engaging part 47 of this wire 45 separates with wire main body 46, in the lower end of the 1st engaging part 47 bulb 49b is set.Wire main body 46 is provided with the 49c of the portion of bearing of bulb 49b in the end of separating with the 1st engaging part 47.This bears the 49c of portion and keeps bulb 49b and it can be rotated.Therefore, even apply twisting resistance on wire 45, bulb 49b also can rotate in bearing the 49c of portion.Thus, even 16 rotations of absorption pedestal, wire 45 can not reverse yet.
Duct member 15 for example also can use the duct member 15a that forms wrinkle as shown in Figure 10.
Then, the 3rd execution mode of the present invention is described.
Figure 11 is substrate absorption device E 2 Structure chart.Housing 50 for example forms cylindric by the material that aluminium etc. has a rigidity.Top ends at this housing 50 is provided with the retaining hole 51 that pedestal cylindraceous is used.The state of giving prominence to a little with the openend 51a from this retaining hole 51 in this retaining hole 51 can keep absorption pedestal 52 rotatably.
It is cylindric that this absorption pedestal 52 utilizes resin-shaped to become, and this pedestal side promptly contacts facial 52a and forms dome shape.The hollow bulb cylindraceous 53 that below the inside of absorption pedestal 52 is provided with, opens wide.On the top of this absorption pedestal 52 plane adsorption plane 54 is set.The slightly base recess 54a of the degree of depth is set on this adsorption plane 54, simultaneously the air SS 54b that the vacuum draw that is communicated with hollow bulb 53 is used is set at central portion.
The retaining hole 51 of housing 50 forms a little little internal diameter of size than the facial 52a of contact of absorption pedestal 52.What the curvature of spherical shape that is provided with the facial 52a of contact of imitation absorption pedestal 52 at the peristome of retaining hole 51 was pushed (Twisted Ru) squeezes shape portion (Twisted り shape portion) 55.This squeezes shape portion 55 and constitutes the absorption pedestal holding device that keeps absorption pedestal 52 in retaining hole 51.
The facial 52a that contacts of the retaining hole 51 of housing 50 and absorption pedestal 52 becomes the structure that makes the accurate matched in clearance that absorption pedestal 52 can rotate in the retaining hole 51 of housing 50.Therefore, hold absorption during pedestal 52 in retaining hole 51, the carrying out on 3 o'clock at least of the internal face of facial 52a of the contact of absorption pedestal 52 and retaining hole 51 contacts.Contact between the internal face of facial 52a of the contact of absorption pedestal 52 and retaining hole 51 needn't be only limited to 3 contacts, yaw by absorption pedestal 52, a plurality of points on the line of the same circumferencial direction that contacts facial 52a contact, and are perhaps contacting with the enterprising line of the line of circumferencial direction.By the contact between the inwall of facial 52a of such contact and retaining hole 51, the frictional resistance that contacts between the internal face of facial 52a and retaining hole 51 becomes very little, absorption pedestal 52 is maintained in the retaining hole 51, and external force absorbing head 52 just can be along for example direction rotation of arrow F of whole circumference direction a little, and yaw moves thereby can carry out stably.
Bottom in the retaining hole 51 of housing 50 is provided with the bearing plane 56 that supports absorption pedestal 52.This bearing plane 56 is made of planar portions 57 and the tapered portion 58 that is provided with in the neighboring of this planar portions 57.Planar portions 57 limits the angle of inclination of absorption pedestal 52 along arrow F direction by the bottom butt with absorption pedestal 52.When absorption pedestal 52 tilted, the angle of inclination of absorption pedestal 52 was that adsorption plane 54 is not hidden in the scope in the retaining hole 51.Tapered portion 58 forms the angle of the curvature of the spherical shape that imitates the facial 52a of contact that adsorbs pedestal 52.This tapered portion 58 moves downwards with restriction absorption pedestal 52 with absorption pedestal 52 butts that descend in retaining hole 51.
Hollow hole 59 is set in housing 50.The internal diameter of this hollow hole 59 is less than the internal diameter of retaining hole 51.Absorption base supports parts 60 are set in this hollow hole 59 and in the hollow bulb 53 of absorption pedestal 52.
These absorption base supports parts 60 form the shape of hollow by the rubber elastomeric material, and portion is provided with air path of navigation 61 within it.Top ends at these absorption base supports parts 60 forms corrugated part (bellows) 60a with less elastic force.The thickness of the top ends of this corrugated part 60a forms thinner than the bottom, and forms accordion-like and can stretch.This corrugated part 60a is close on the air SS 54b of absorption pedestal 52 airtightly.The bottom of absorption base supports parts 60 and the top end face of apparatus main body 62 link airtightly.
Housing 50 is screwed by threaded portion 63 and apparatus main body 62.Make housing 50 relative apparatus main body 62 rotations, change the stroke of corrugated part 60a, adjust the revolving force of absorption pedestal 52.This adjustment is the external force that acts on when being subjected to adsorbing pedestal 52 with glass substrate S butt, the inching in 52 scopes that can rotate of absorption pedestal.
Can adjust the height and position of absorption pedestal 52 by housing 50 relative apparatus main body 62 rotations.So, the housing 50 when the height and position of the stroke of adjusting corrugated part 60a (elastic force) or absorption pedestal 52 is fixed on the apparatus main body 62 by the screwing tight of lock nut 64 that is screwed on the threaded portion 63.
Air path of navigation 65 is set on apparatus main body 62.This air path of navigation 65 is communicated with the air path of navigation 61 of absorption base supports parts 60.Air SS 54b, each air path of navigation 61,65 form the vacuum draw path.
Then, with reference to the substrate absorption device E of Figure 12 A～Figure 12 C to said structure 2Absorption action to glass substrate S describes.
Figure 12 A is that expression is carried to substrate absorption device E with glass substrate S 2The state of top.Absorption pedestal 52 for example tilts the back side parallel deviate state of adsorption plane 54 relative glass substrate S in the retaining hole 51 of housing 50.At this state infrabasal plate adsorbent equipment E 2When rising, make the part on summit of adsorption plane 54 of absorption pedestal 52 of inclination and the back side butt of glass substrate S by elevating mechanism.
Because absorption pedestal 52 is held with a contact in the retaining hole 51 of housing 50, so and the frictional resistance between the internal face of retaining hole 51 is very little, the afterburning absorption pedestal 52 that just can make of slight butt rotates along arrow F direction in retaining hole 51 from the back side of glass substrate S.
Therefore, slight butt reinforcing makes substrate absorption device E from the below of glass substrate S 2When contacting with the back side of glass substrate S, make the rotation of absorption pedestal 52, shown in Fig. 2 B, adsorption plane 54 imitates, thereby becomes identical with the direction at the back side of glass substrate S.At this moment, even absorption pedestal 52 tilts or glass substrate has produced warpage or bending, absorption pedestal 52 also can rotate, and makes adsorption plane 54 be close to the back side of glass substrate S.
Under this state, if air is carried out vacuum draw, then under airtight conditions, become negative pressure in the base recess 54a of adsorption plane 52, air SS 54b and each the air path of navigation 61,65 by vacuum draw via each air path of navigation 61,65 and air SS 54b.Thus, adsorb at the back side of 54 couples of glass substrate S of adsorption plane of absorption pedestal 52.Even produced warpage or bending on the glass substrate S, but because absorption pedestal imitation pushes against the back side that is attached to glass substrate S,, and reliably glass substrate S is carried out vacuum draw so air can not leak.
Meanwhile, when forming negative pressure in base recess 54a, air SS 54b and each the air path of navigation 61,65, the absorption base supports parts of being made by elastomeric material 60 mainly make corrugated part 60a shrink.By the contraction of corrugated part 60a, absorption pedestal 52 is descended in retaining hole 51, shown in Figure 12 C, its bottom stops to descend with tapered portion 58 butts after touch.Thus, absorption pedestal 52 is fixed in the retaining hole 51.
According to above-mentioned the 3rd execution mode, the absorption pedestal 52 that will have the facial 52a of contact that forms spherical shape owing to the some contact by accurate matched in clearance structure remains in the retaining hole 51 of housing 50, absorption pedestal 52 can be rotated along the whole circumference direction in the retaining hole 51, so the frictional resistance of absorption pedestal 52 in retaining hole 51 is very little, applies external force a little and just can rotate along the whole circumference direction.Therefore, contact with the back side of glass substrate S with slight butt additional force by below from glass substrate S, absorption pedestal 52 just can imitate the incline direction at the back side of glass substrate S, by vacuum draw that can not leakage air, and is adsorbed on reliably on the back side of glass substrate S.Thus, even glass substrate S produces warpage or bending, absorption pedestal 52 also can imitate these and tilt, and adsorbs reliably.
Because absorption pedestal 52 remains in the retaining hole 51 of housing 50 by the structure of accurate matched in clearance, the dislocation of absorption pedestal 52 in retaining hole 51 is very little.Thus, when absorption keeps glass substrate S, can position to high precision.
When absorption pedestal 52 is adsorbed on the back side of glass substrate S, owing to corrugated part 60a is shunk by the negative pressure in the absorption base supports parts 60, absorption pedestal 52 limits its moving downwards with tapered portion 58 butts, so can be fixed on the correct height position under the state of absorption glass substrate S.
Owing to make relative apparatus main bodies 62 rotations of housing 50, thereby adjust the stroke of corrugated part 60a, thus can with absorption pedestal 52 with respect to the butt additional force of glass substrate S adjust to just when, can adjust the height and position that adsorbs pedestal 52 simultaneously.
Owing on housing 50, be provided with and squeeze shape portion 55,, spherical absorption pedestal 52 do not come off so can not flying out in the retaining hole 51.
Aforesaid substrate adsorbent equipment E 2The substrate absorption device E that can replace above-mentioned Fig. 5 and air suspension transport device shown in Figure 6 1If with substrate absorption device E 2Use is on air suspension transport device, and is then identical as above-mentioned the 1st execution mode, can imitate warpage or the bending of glass substrate S, with each substrate absorption device E 2Absorption pedestal 52 be adsorbed on reliably on the back side of glass substrate S, and can not make glass substrate S dislocation.
Then, the 4th execution mode of the present invention is described.And the part identical with Figure 11 uses same-sign to represent, omits its detailed description.
Figure 13 is expression substrate absorption device E 3Structure chart.This substrate absorption device E 3Can replace the substrate absorption device E on the inspection desk of large substrate testing fixture shown in Figure 7 1Be provided with.Housing 50 screws togather with the threaded portion 71 that is formed at each recess 70 bottom, screws tight by lock nut 72 and threaded portion 71 to be fixed.Thus, if make housing 50 relative threaded portion 71 rotations, then can adjust the stroke of corrugated part 60.This controlled state is fixed by screwing tight lock nut 72.On platform main body 41 and each bending prevent each base 73 of crosspiece 43, be provided with adsorb base supports parts 60 in the air suction path 74 that is communicated with of air path of navigation 61.
If be provided with this substrate absorption device E 3Inspection desk, then can adsorb reliably and keep having warpage or crooked glass substrate S, and, can correct warpage or the bending of glass substrate S, and can improve the absorption of flatness ground and keep glass substrate S by adjusting the height and position of absorption pedestal 52.
Substrate absorption device E 3Can on carrying arm R with device automatically, use large substrate shown in Figure 14.This arm R separates predetermined space and is provided with a plurality of, 4 arms 81 for example in parallel to each other on arm support portion 80.A plurality of substrate absorption device E are set on these arms 81 3
The automatic Handling device of this large substrate makes arm support portion 80 insert the accommodation section, takes out large-scale glass substrate S, and it is carried on the inspection desk or transfer line of inspection portion.When being positioned in glass substrate S on each arm 81, glass substrate S produces crooked.At this moment, the inclination at the back side of the adsorption plane 54 imitation glass substrate S of absorption pedestal 52 is close to the back side of glass substrate S by the vacuum draw of air, adsorbs fixing glass substrate S reliably.
According to above-mentioned the 4th execution mode, the height of housing 50 is reduced, make its miniaturization, be applicable to that the inspection desk of large substrate testing fixture or large substrate carry with the arm of device etc. automatically, can not make glass substrate S dislocation, warpage or the bending of imitation glass substrate S can be adsorbed maintenance reliably.
Then, with reference to accompanying drawing the 5th execution mode of the present invention is described.And the part identical with Fig. 1, Figure 11, Fig. 5 and Fig. 6 used the identical expression that meets, and omits its detailed description.
The 5th execution mode is substrate absorption device (hereinafter referred to as the 1st substrate absorption device) E that uses above-mentioned the 1st execution mode on Fig. 5 and air suspension transport device shown in Figure 6 1Substrate absorption device (hereinafter referred to as the 2nd substrate absorption device) E with the 3rd execution mode 2
Figure 15 is illustrated in and respectively adsorbs the 1st substrate absorption device E that is provided with on the mounting table 57 1With the 2nd substrate absorption device E 2And, owing in identical figure, use the symbol very complicated that can become, therefore, the symbol of the necessary part of expression only.On the direction identical, be set up in parallel the a plurality of the 1st and the 2nd substrate absorption device E with the carrying direction T of glass substrate S 1, E 2In top ends side a plurality of, two the 1st substrate sucking device E for example are set along the glass substrate S of the carrying direction T of glass substrate S 1With respect to the 1st substrate absorption device E 1In the rearward end side a plurality of, six the 2nd substrate absorption device E for example are set 2These the 1st and the 2nd substrate absorption device E 1, E 2Under the state of absorption glass substrate S, carry out Height Adjustment, make that respectively adsorbing each adsorption plane 16a of pedestal 16,52,54 height and position and datum plane H is consistent.To each the 1st substrate absorption device E 1Carry out Height Adjustment, make absorption pedestal 16 in housing 1, descend and make with height and position and datum plane H that end 1a carries out the adsorption plane 16a of face when contacting and be consistent.Because the 1st and the 2nd substrate absorption device E 1, E 2Height difference separately is so be provided with step difference G on absorption mounting table 57.
Figure 16 is the figure of expression air vacuum suction system.The carrying direction T of relative glass substrate S, each the 1st substrate absorption device E in the left side 1On respectively each air suction road by another system connect each adjuster 90,91, and at each the 1st substrate absorption device E on right side 1On connect adjuster 92,93 respectively.These adjusters 90,91 ..., 93 respectively with each the 1st substrate absorption device E 1Be controlled to be predefined each suction force individually.
On the other hand, the carrying direction T of relative glass substrate S, the 2nd substrate absorption device E in the left side 2On connect respectively each adjuster 94-1,94-2 ..., 94-n, and at the 2nd substrate absorption device E on right side 2On also connect each adjuster 95-1,95-2 ..., 95-n.These adjusters 94-1,94-2 ..., 94-n, 95-1,95-2 ..., 95-n is respectively with each the 2nd plate adsorbent equipment E 2Be controlled to be predefined each air suction force individually.
Relatively the carrying direction T of glass substrate S jointly connects vacuum valve 96 on each adjuster 90,91 in left side, in the same manner each adjuster 94-1, the 94-2 in left side ..., jointly connect vacuum valve 97 on the 94-n.In addition, each adjuster 90,91 of each vacuum valve 96,97,94-1,94-2 ..., 94-n one side is provided with each air pressure gage 98,99 respectively.
Air pressure gage 98 is measured from the air suction force of each adjuster 90,91 suction, when this air suction force is not less than the setting suction force, interrupt signal is delivered to vacuum valve 96, and this vacuum valve 96 cuts out.Air pressure gage 99 measure from each adjuster 94-1 ..., 94-n suction air pressure, be not less than when setting suction force in this air suction force, interrupt signal is delivered to vacuum valve 97, this vacuum valve 97 cuts out.Equally, relatively the carrying direction T of glass substrate S jointly connects vacuum valve 100 on each adjuster 92,93 on right side, in the same manner each adjuster 95-1 on right side ..., jointly connect vacuum valve 101 on the 95-n.Each adjusters 92,93 of these vacuum valves 100,101,95-1 ..., the 95-n side is provided with each air pressure gage 102,103 respectively.These air pressure gages 102,103 measure respectively from each adjuster 92,93,95-1 ..., 95-n suction each air suction force, be not less than when setting suction force in this air suction force, interrupt signal delivered to vacuum valve 96 and make it to close.
Each the 1st substrate absorption device E 1Each vacuum valve 96,100 of side jointly is connected with master selector 104a, and master selector 104a is connected with air suction source 105.Equally, each the 2nd substrate absorption device E 2Each vacuum valve 97,101 of side jointly is connected with master selector 104b, and master selector 104b is connected with air suction source 105.In addition, each vacuum valve 96,97,100,101 side at each adjuster 104a, 104b are connected with air pressure gage 106a, 106b.
Below, the action of the device as above-mentioned structure being adsorbed glass substrate S describes.
Under glass substrate S being suspended or is positioned in state on the suspension transport platform 30, make and respectively adsorb mounting table 57 when rising, as shown in figure 15, each the 1st and the 2nd substrate absorption device E 1, E 2The pedestal 16,52 that respectively adsorbs on the back side of glass substrate S, rise.When the carrying direction T of relative glass substrate S produces warpage or bending in front, at first, the 1st substrate absorption device E 1An end of absorption pedestal 16 contact with the back side of glass substrate S.Become more greatly to front warpage or bending more though carry direction T, glass substrate S relatively, can adjust the 1st substrate absorption device E of the height that respectively adsorbs pedestal 16 by relative carrying direction T front setting 1, can make and respectively adsorb pedestal 16 contacts on the back side of the glass substrate S that has produced warpage or bending.By slight butt reinforcing, these absorption pedestals 16 contacts with the back side of glass substrate S, and imitate the warpage of glass substrate S or yaw is carried out in the inclination of bending, thereby adsorption plane 36 is close on the back side of glass substrate S from the below of glass substrate S.
Under this state, if air suction source 105 begins to carry out the air suction action, then relative each the 1st and the 2nd substrate absorption device E 1, E 2, from each adjuster 90,91 ..., 93 and each adjuster 94-1,94-2 ..., 94-n, 95-1,95-2 ..., 95-n carries out air suction by each vacuum valve 96,97,100,101, master selector 104.Thus, the 1st substrate sucking device E 1Identical with above-mentioned the 1st execution mode, the adsorption plane 16a of absorption pedestal 16 imitates the back side of the glass substrate S of generation warpage or bending and is close to it, thereby air can not carry out vacuum suction to glass substrate S with leaking reliably.Meanwhile, the neighboring 16e at the back side of absorption pedestal 16 contacts with the face of the end 1a of housing 1 decline is stopped, and is plane with warpage or the detorsion of glass substrate S.
At this moment, the back side of glass substrate S and a plurality of the 2nd substrate absorption device E 2Respectively to adsorb pedestal 52 approaching.These the 2nd substrate absorption devices E 2Contact with the back side of glass substrate S with slight butt additional force by below, make and respectively adsorb pedestal 52 rotation and imitate, so that the face direction of adsorption plane 54 is identical with the direction at the back side of glass substrate S from glass substrate S.
Under this state, if carry out vacuum draw through base recess 54a, air SS 54b and 61,65 pairs of air of each air path of navigation, the adsorption plane 54 that then adsorbs pedestal 52 is adsorbed on the back side of glass substrate S.Meanwhile, because by air vacuum suction, corrugated part 60 shrinks,, and stop behind tapered portion 58 butts so absorption pedestal 52 descends in retaining hole 51.Consequently, if by the 1st and the 2nd substrate absorption device E 1, E 2Absorption keeps the back side of glass substrate S, warpage or the bending that then can correct glass substrate S, and it is flatly remained on the datum plane H.
Afterwards, if make each trucking department 34,35 same moved further on each guide rail 32,33 respectively, the glass substrate S that then carries out the air suspension is carried on carrying platform 30 along carrying direction T apace by the mobile traction of each trucking department 34,35.
According to above-mentioned the 5th execution mode, though bigger in front warpage or the amount of bow of the carrying direction T of glass substrate S, the back side that also can adsorb maintenance glass substrate S by absorption pedestal 16 reliably.Because by each the 1st substrate absorption device E 1The front of the glass substrate S that absorption maintenance warpage or amount of bow are bigger makes it descend to datum plane H, so can make the back side of glass substrate S move closer to the 2nd substrate absorption device E 2, by each the 2nd substrate absorption device E 2Can adsorb the back side that keeps glass substrate S reliably.
Because the 1st and the 2nd substrate absorption device E 1, E 2Respectively each adjuster 90,91 by different system ..., 95-n carries out the suction of air, even so place absorption pedestal 16 or 52 do not adsorb the back side of glass substrate S and make escape of air, also only need to the absorption pedestal 16 or 52 corresponding the 1st substrate absorption device E of this leakage air 1Or the 2nd substrate absorption device E 2Stop air and supply with, and the production line of LCD is promptly stopped, finishing other the 1st substrate absorption device E up to processing 1With the 2nd substrate absorption device E 2Can both keep separately absorption pedestal 16 or 52 absorption action.Thus, the absorption of glass substrate S remains on midway and can not stop, and can improve fail safe, and only need repair the absorption pedestal 16 of leakage air or 52 the 1st or the 2nd substrate absorption device E 1, E 2System get final product, aspect repairing, also have advantage.And, by will be to each the 1st substrate absorption device E 1With the 2nd substrate absorption device E 2Air supply forms two systems, even a side master selector 104a or 104b break down, because the opposing party's master selector 104b or 104a normally move, all can not carry out the problem that air aspirates so can solve whole respectively the 1st substrate absorption device A and each the 2nd substrate absorption device B.
In above-mentioned the 5th execution mode, used the 1st and the 2nd substrate absorption device E 1, E 2, but also can all use the 1st substrate absorption device E 1In this case, adjust the height that adsorbs pedestal 16, feasible each the 1st substrate absorption device E by adjusting mechanism 27 1The height of absorption pedestal 16 uprise successively towards the carrying direction T of glass substrate S.
Then, the 6th execution mode of the present invention is described.And the part identical with Fig. 5 and Fig. 6 used identical symbolic representation, omits its detailed description.
Figure 17 is the structure chart that can be used as the air suspension transport device of inspection desk use.Be provided with a plurality of, for example 3 absorption mounting table 37a, 37b, 37c.These mounting tables 37a, 37b, 37c are separately positioned on leading section side, rearward end side and the pars intermedia of the carrying direction T of relative glass substrate S.On these absorption mounting tables 37a, 37b, 37c, be set up in parallel a plurality of the 1st substrate absorption device E respectively 1Or the 2nd substrate absorption device E 2Under the state of absorption glass substrate S, to these the 1st substrate absorption devices E 1Or the 2nd substrate absorption device E 2Carry out Height Adjustment, make that respectively adsorbing each adsorption plane 16a of pedestal 16,52,54 height and position and datum plane H is consistent.Identical with above-mentioned the 5th execution mode, these the 1st substrate absorption device E 1Or the 2nd substrate absorption device E 2Air path of navigation separately by different systems is connected with each adjuster respectively, even for example at 1 the 1st substrate absorption device E 1Or the 2nd substrate absorption device E 2Last generation escape of air, and at other the 1st substrate absorption device E 1Or the 2nd substrate absorption device E 2On can keep absorption action, so the absorption of glass substrate S keeps can not stopping halfway, can improve fail safe.
To these the 1st substrate absorption devices E 1Or the 2nd substrate absorption device E 2Absorption control method be at first, to make each the 1st substrate absorption device E on the absorption mounting table 37c that is arranged on central portion 1Or the 2nd substrate absorption device E 2Begin to adsorb action.Then, make each the 1st substrate absorption device E on the absorption mounting table 37a that is arranged on leading section or rearward end or the 37b 1Or the 2nd substrate absorption device E 2Begin to adsorb action.
If use this absorption control method, on suspension transport platform 30, adsorb when keeping, by each the 1st substrate absorption device E from the absorption mounting table 37c that is arranged on the less pars intermedia of warpage to carrying out glass substrate S that air suspends 1Or the 2nd substrate absorption device E 2Begin to adsorb action, and can pass through each the 1st substrate absorption device E 1Or the 2nd substrate absorption device E 2Central portion to glass substrate S adsorbs maintenance.At this moment, because glass substrate S passes through each middle the 1st substrate absorption device E 1Or the 2nd substrate absorption device E 2Be adsorbed maintenance, so that the warpage of glass substrate S or bending reduce.
Then, be arranged on the absorption mounting table 37a of leading section or rearward end or each the 1st substrate absorption device E on the 37b 1Or the 2nd substrate absorption device E 2Begin to adsorb action.Thus, each the 1st substrate absorption device E of leading section 1Or the 2nd substrate absorption device E 2Begin the forward end side from the central portion side and contact with the back side of glass substrate S successively, adsorb maintenance.
Because begin to adsorb successively from leading section from the pars intermedia of the less glass substrate S of warpage to the bigger glass substrate S of warpage or rearward end, so on one side can correct warpage or the bending of glass substrate S, Yi Bian adsorb maintenance reliably.And the absorption mounting table is not limited to central portion, leading section, rearward end three places, can increase according to the size of glass substrate S, and also can be provided with to the bigger zone of warpage from the less part of warpage beyond the central portion.
Then, the 7th execution mode of the present invention is described.The part identical with Fig. 5 and Fig. 6 used identical symbolic representation, omits its detailed description.
Figure 18 is the structure chart of air suspension transport device.1 absorption mounting table 37 is set respectively on two sides of suspension transport platform 1.On this absorption mounting table 37, be set up in parallel a plurality of the 1st substrate absorption device E along the direction identical with the carrying direction of glass substrate S 1Or the 2nd substrate absorption device E 2Identical with above-mentioned the 5th execution mode, these the 1st substrate absorption device E 1Or the 2nd substrate absorption device E 2Air path of navigation separately by different systems is connected with each adjuster respectively.
For these the 1st substrate absorption devices E 1Or the 2nd substrate absorption device E 2Absorption control method be to make each the 1st substrate absorption device E 1Or the 2nd substrate absorption device E 2Begin to begin the absorption action in turn from the less central portion side of the warpage of glass substrate S to the bigger end side of warpage.
If use this absorption control method, then on suspension transport platform 30, adsorb when keeping each the 1st substrate absorption device E to carrying out glass substrate S that air suspends 1Or the 2nd substrate absorption device E 2Begin the back side that forward end in turn contacts glass substrate S from the pars intermedia side of glass substrate S, adsorb maintenance.Keep the warpage that in turn to correct glass substrate S from the pars intermedia side to end side, each the 1st substrate absorption device E by this absorption 1Or the 2nd substrate absorption device E 2Begin reliably glass substrate S to be adsorbed maintenance from the pars intermedia side to end side.
And, even each the 1st substrate absorption device E 1Or the 2nd substrate absorption device E 2Adsorb action simultaneously, owing to begin to begin absorption in turn to the bigger part of warpage from the less part of the warpage of glass substrate S, so can be with warpage or the bending level of correcting on datum plane H of glass substrate S.
According to above-mentioned the 7th execution mode, even absorption pedestal 52 projecting height less the 2nd substrate absorption device E 2Or well-known substrate absorption device, also can adsorb reliably and keep the bigger glass substrate S of warpage.
In addition, the invention is not restricted to the respective embodiments described above, also can as following, be out of shape.
For example, the respective embodiments described above can be used for the air suspension transport of glass substrate S, but also can use under situation about in the inspection portion of glass substrate S glass substrate S absorption being remained on the inspection desk.
As shown in figure 19, make a plurality of substrate absorption device E 1Or E 2Form one group and be used as sub-assembly (block) H 1～H 2, simultaneously also can be to each sub-assembly H 1～H 4Form the air vacuum suction system.Each the 1st substrate absorption device group H 1～H 4Carrying direction T along glass substrate S arranges a plurality of substrate absorption device group E respectively 1Each the 1st substrate absorption device group H wherein 1, H 2Adjacent setting, each the 1st substrate absorption device group H 3, H 4Adjacent setting.And, these the 1st substrate absorption device groups H 1, H 2Also can use the 2nd substrate absorption device E 2
These the 1st substrate absorption devices H 1～H 4In each the 1st substrate absorption device E 1Be connected with each adjuster 110, and each the 1st substrate absorption device group H 1～H 4Connect jointly individually, be connected with vacuum valve 111～114 again.With the 1st substrate absorption device group H 1And H 3Each corresponding vacuum valve 111,113 jointly connects, and is connected on the master selector 115a.And, with the 1st substrate absorption device group H 2And H 4Each corresponding vacuum valve 112,114 jointly connects, and is connected on the master selector 115b.
If use this air vacuum suction system, identical with above-mentioned the 5th execution mode, even at one the 1st and the 2nd substrate absorption device E 1, E 2Last generation escape of air also can be kept the absorption action to glass substrate S, improves fail safe.And, the 1st substrate absorption device group H 1And H 2, H 3And H 4Be adjacent to be provided with, wherein a side the 1st substrate absorption device group H 1, H 3The 1st substrate absorption device group H with the opposing party 2, H 4Constitute air vacuum suction system separately respectively, even an adjacent side's the 1st substrate absorption device group H 1, H 3Can not aspirate, also can be by another substrate absorption device H of adjacency 2Absorption keeps glass substrate S reliably.For example, even the 1st substrate absorption device group H 1Escape of air all takes place, by the 1st substrate absorption device group H of adjacency 2Also can keep absorption action to glass substrate S.
And the shape of the facial 16c of the contact of the absorption pedestal 16 in above-mentioned the 1st execution mode can be deformed into the shape of the vertical view shown in the fragmentary cross-sectional view shown in Figure 20 A and even Figure 20 D and Figure 20 E.The facial 16c of contact shown in Figure 20 A intersects each inclined plane 120,121, forms the summit 122 that for example has the obtuse angle.This summit 122 forms on the whole circumference direction of the facial 16c of contact.If the facial 16c of the contact of this absorption pedestal 16, the inwall 2a that then contacts the summit 122 relative housings 1 of facial 16c carries out the line contact in the whole circumference direction.
The facial 16c of contact shown in Figure 20 B, formation for example has the convex body 124 on the summit 123 at obtuse angle.This contacts facial 16c also makes the inwall 2a of the summit 123 relative housings 1 of convex body 124 carry out the line contact in the whole circumference direction.
The facial 16c of contact shown in Figure 20 C forms hemispheric convex body 126 on the curved surface main body 125 of tubular.If the facial 16c of this contact, then the inwall 2a of convex body 126 relative housings 1 carries out the line contact in the whole circumference direction.
The facial 16c of contact shown in Figure 20 D forms projection body 127 on the curved surface main body 125 of tubular.If the facial 16c of this contact, the inwall 2a of projection body 127 relative housings 1 carries out the line contact in the whole circumference direction.
The facial 16c of contact shown in Figure 20 E forms more than 3 on the outer peripheral face of the curved surface main body 125 of tubular at least, for example 4 projection bodies 128.If the facial 16c of this contact, then the inwall 2a of each projection body 128 relative housing 1 carries out a contact respectively.
If the shape of the facial 16c of contact of these absorption pedestals 16, then adsorbing pedestal 16 can be at transversion malposition, and can carry out the yaw action reposefully with less frictional resistance slyness.
The respective embodiments described above are illustrated the situation of utilizing air suspension transport glass substrate S, suspend but be not limited to air, also are applicable to the carrying that suspends glass substrate S is suspended by electrostatic suspension, ultrasonic wave.
Below, other features of the present invention are described.
A first aspect of the present invention is a kind of substrate attracting method, keep described substrate by a plurality of substrate absorption device absorption of arranging along the side edge part of substrate, it is characterized in that, in described each substrate absorption device, front for described substrate, utilize bigger the 1st substrate absorption device absorption of outstanding height to keep described substrate, described substrate is corrected into level, by described the 1st substrate absorption device described glass substrate is being corrected under the horizontal state, used less the 2nd substrate absorption device absorption of projecting height to keep described glass substrate.
A second aspect of the present invention on the basis of first aspect present invention, is characterized in that, makes described the 1st substrate absorption device begin to adsorb action, then makes described the 2nd substrate absorption device begin to adsorb action.
The third aspect of the present invention on the basis of a first aspect of the present invention, is characterized in that, described the 1st substrate absorption device and described the 2nd substrate absorption device begin the absorption action simultaneously.
A fourth aspect of the present invention is a kind of substrate attracting method, keep described substrate by a plurality of substrate absorption device absorption of arranging along the side edge part of substrate, it is characterized in that, from the less corresponding described substrate absorption device of part of the warpage of described substrate to beginning the absorption action successively with the bigger corresponding described substrate absorption device of part of the warpage of described substrate.
A fifth aspect of the present invention is a kind of substrate attracting method, keep described substrate by a plurality of substrate absorption device absorption of arranging along the side edge part of substrate, it is characterized in that, on each of one of described substrate absorption device and a plurality of sub-assemblies, air vacuum suction system separately is set, described each air vacuum suction system is moved simultaneously, from the less part of the warpage of described substrate to the bigger part of warpage, the described relatively substrate of described each substrate absorption device is adsorbed successively, correct the warpage of described substrate.
The possibility of utilizing on the industry
The present invention is applicable to, the carrying of the glass substrate of the LCDs in for example LCD production line, The field of the semiconductor wafer in the semiconductor production line or the carrying of various parts.
Claims
(according to the modification of the 19th of treaty)
1 (revising the back), a kind of substrate absorption device is characterized in that, comprising:
The housing of tubular, it forms hollow form;
The absorption pedestal, it is arranged in the top hollow bulb of described housing and can moves along the vertical direction, and the direction yaw that can intersect along the axle with described housing;
Absorption base supports parts, it is arranged in the described housing, is flexibly supporting described absorption pedestal, and has the air path of navigation;
Aspirator, the described air path of navigation of itself and described absorption base supports parts link and carry out suction action; And
Stop part, the decline of the described absorption pedestal that causes when being used to limit the suction running by described aspirator.
2 (revising the back), substrate absorption device according to claim 1 is characterized in that,
Described stop part is when limiting the decline of the described absorption pedestal that is caused by the suction action of described aspirator, and it is level that the inclination of described absorption pedestal is corrected.
3 (revising the back), substrate absorption device according to claim 1 is characterized in that described absorption pedestal has the adsorption section, and this adsorption section forms the external diameter greater than the peristome of described housing,
By described adsorption section is also used as described stop part, in the decline of the described absorption pedestal that the openend restriction that utilizes described housing is caused by the suction action of described aspirator, by making the face contact of described adsorption section on the described openend of described housing, it is level that described absorption pedestal is corrected.
4 (revising the back), substrate absorption device according to claim 1, it is characterized in that, described stop part is provided with the plane bearing plane of the bottom of bearing described absorption pedestal in described housing, in the decline of the described absorption pedestal that when utilizing the restriction of described bearing plane, causes by the suction action of described aspirator, being connected on the described bearing plane by the bottom that makes described absorption pedestal, is level and the inclination of described absorption pedestal is corrected.
5 (revising the back), substrate absorption device according to claim 5 is characterized in that described absorption pedestal comprises:
The adsorption section, its have from the top ends of described housing outstanding, form plane absorption to; And
Contact is facial, and itself and described adsorption section form as one, and is supported on the internal face of top ends of described housing with 3 contacts at least.
6 (revising the back), substrate absorption device according to claim 5 is characterized in that, the facial curved surface that contacts with the described internal face of described housing along circumferencial direction that forms of described contact.
7 (revise back), substrate absorption device according to claim 5 is characterized in that, described contact is facial to form and make that to carry out the cross sectional shape that line contacts along the circumferencial direction and the described internal face of described housing be the jut of triangle.
8 (revise back), substrate absorption device according to claim 5 is characterized in that, described contact is facial to form and make that to carry out the cross sectional shape that line contacts along the circumferencial direction and the described internal face of described housing be hemispheric jut.
9 (revising the back), substrate absorption device according to claim 5 is characterized in that, facial being formed with the described internal face of described housing of described contact along the circumferential direction carried out a jut that contacts at least on 3 o'clock.
10 (revising the back), substrate absorption device according to claim 1 is characterized in that, described absorption pedestal is maintained in the hollow bulb of described top by absorption pedestal holding device, so that it can not deviate from from the described top hollow bulb of described housing.
11 (revising the back), substrate absorption device according to claim 10 is characterized in that described absorption pedestal holding device comprises: be arranged on first support portion on the described absorption pedestal; Through the described air path of navigation of described absorption base supports parts, be arranged on second support portion in the described housing; And be connected wire link between described the 1st support portion and described the 2nd support portion.
12 (revising the back), substrate absorption device according to claim 11, it is characterized in that, described link is made of filament, this filament can be adjusted the elastic force with respect to described absorption base supports parts, so that described absorption pedestal reverts to flat-hand position, described elastic force is adjusted by the winding state of described filament.
13 (revising the back), substrate absorption device according to claim 11, it is characterized in that, described link is made of the wire with the torsional rigid that prevents the rotation of described absorption pedestal, with described two ends wiry tying on described first and second support portion.
14 (revising the back), substrate absorption device according to claim 1, it is characterized in that, described housing is provided with height adjuster, be used to make described absorption pedestal and described absorption base supports portion to move along described enclosure interior integratedly, adjust from the height of the adsorption plane of the outstanding described absorption pedestal of the end face of described housing.
15 (revising the back), substrate absorption device according to claim 14 is characterized in that described height adjuster comprises: the threaded portion that forms on the hollow bulb inwall of described housing; And, be rotated by being screwed on the described threaded portion, and the endless member that described absorption base supports portion and described absorption pedestal are moved up and down in described housing integratedly.
16 (revising the back), substrate absorption device according to claim 1, it is characterized in that, described absorption base supports parts are made of the duct member of rubber system, be formed with the bend of accordion-like on the top of this duct member, the back side, this adsorption section that this bend is close to the adsorption section that has of absorption pedestal form the peristome of external diameter greater than described housing
Negative pressure during suction action by described aspirator is shunk the bend of described accordion-like, the absorption pedestal that has adsorbed the object substrate that should adsorb is descended in described housing, and described absorption object substrate is positioned on the datum plane.
17, (deletion)
18, (deletion)
19, (deletion)
20, (deletion)
21, (deletion)
22, (deletion)
23, (deletion)
24, (deletion)
25, (deletion)

Claims (25)

1, a kind of substrate absorption device is characterized in that, comprising:
Housing, it forms hollow form, and at one end has peristome;
Absorption base supports parts, it is arranged in the described hollow shape of described housing, and is provided with the air path of navigation of suction air;
The absorption pedestal, it is positioned on the described absorption base supports parts under the state outstanding from the described peristome of described housing, at least on 3 o'clock, carry out contacting with the described peristome of described housing, and can yaw, and be provided with the air SS that is communicated with airtightly with described air path of navigation; And
Adsorb the pedestal holding device, described absorption pedestal is remained on the described peristome of described housing.
2, substrate absorption device according to claim 1 is characterized in that,
Described absorption pedestal comprises: have the adsorption section that forms plane adsorption plane, and contact face with described adsorption section forms, the internal face of the facial described peristome with described housing of described contact carried out contacting at least on 3 o'clock.
3, substrate absorption device according to claim 2 is characterized in that, described contact is facial to be contacted on the facial same circumferencial direction described with the each point contact position of described internal face.
4, substrate absorption device according to claim 2 is characterized in that, described contact face carries out line with the internal face of the described peristome of described housing and contacts.
5, substrate absorption device according to claim 2 is characterized in that, described contact face is cylindric, and forming pars intermedia at above-below direction, to have the hemisphere of maximum gauge planar.
6, substrate absorption device according to claim 2 is characterized in that, described adsorption section forms the identical diameter of external diameter with the described peristome of described housing.
7, substrate absorption device according to claim 2 is characterized in that, described adsorption section forms the external diameter greater than the described peristome external diameter of described housing.
8, substrate absorption device according to claim 2 is characterized in that, the described adsorption section of described absorption pedestal is made by elastomeric material with the described face that contacts.
9, substrate absorption device according to claim 1 is characterized in that, the back side butt of the end of the described peristome of described housing and described absorption pedestal becomes the stop part that limits the decline of described absorption pedestal in the described hollow shape of described housing.
10, substrate absorption device according to claim 8 is characterized in that, the described end of the described peristome of described housing contacts with the back side of described absorption pedestal, and datum plane is corrected in the inclination of the described adsorption section of described absorption pedestal.
11, substrate absorption device according to claim 2 is characterized in that, described absorption base supports parts are made of the duct member that uses elastomeric material to make.
12, substrate absorption device according to claim 11 is characterized in that, described duct member is formed with the bend of the accordion-like of being close to described absorption pedestal at an upper portion thereof.
13, substrate absorption device according to claim 1 is characterized in that, described absorption pedestal holding device comprises: the 1st supporting bracket that is provided with on described absorption pedestal; The 2nd supporting bracket that is provided with at the other end of described housing; And pass through described absorption base supports components interior, and be connected the link between described the 1st supporting bracket and described the 2nd supporting bracket.
14, substrate absorption device according to claim 13 is characterized in that, described link is a linear material.
15, substrate absorption device according to claim 13 is characterized in that, described link is the wire with torsional rigid.
16, substrate absorption device according to claim 1, it is characterized in that, in described housing, be provided with absorption base height adjusting mechanism, be used to make described absorption pedestal, described absorption base supports parts and described absorption pedestal holding device in the described hollow shape of described housing, to move integratedly, to adjust the height and position of described absorption pedestal with respect to the end of the described peristome of described housing.
17, substrate absorption device according to claim 1 is characterized in that, described absorption pedestal comprises: spherical Base body, and it had with the described internal face of the described peristome of described housing carried out a contact face that contacts at least on 3 o'clock; And plane adsorption plane, it is formed on the described Base body, and described air SS is set on described adsorption plane, by the described absorption pedestal of described absorption base supports member supporting.
18, substrate absorption device according to claim 17 is characterized in that, described absorption pedestal is retained from the outstanding state in the end of the described peristome of described housing.
19, substrate absorption device according to claim 17 is characterized in that, described contact is facial to be contacted on the facial same circumferencial direction described with the each point contact position of described internal face.
20, substrate absorption device according to claim 17 is characterized in that, described contact face carries out line with the internal face of the described peristome of described housing and contacts.
21, substrate absorption device according to claim 17 is characterized in that, the internal face of the described peristome of described contact face and described housing has the structure of accurate matched in clearance.
22, substrate absorption device according to claim 17 is characterized in that, the described peristome of described housing imitates the facial shape of described contact of described absorption pedestal and forms.
23, substrate absorption device according to claim 17, it is characterized in that, the described peristome of described housing has planar portions that is provided with in the bottom and the tapered portion that is provided with in the neighboring of described planar portions, the bottom butt of described planar portions and described absorption pedestal is to limit the angle of inclination of described absorption pedestal.
24, substrate absorption device according to claim 17, it is characterized in that, described absorption pedestal holding device has fastener, and this fastener is arranged on the end of the described peristome of described housing, described absorption pedestal is remained in the described peristome of described housing.
25, substrate absorption device according to claim 24 is characterized in that, described fastener is arranged on the end of described peristome, forms the shape that described peristome is pushed to the inside.
CNB2004800120972A 2003-05-06 2004-04-26 Substrate suction device Expired - Fee Related CN100362643C (en)

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JP2003128054 2003-05-06
JP128054/2003 2003-05-06
JP192141/2003 2003-07-04
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CN102765091A (en) * 2011-05-05 2012-11-07 通用汽车环球科技运作有限责任公司 Reconfigurable tool module for an end-effector employed with a robotic arm
CN103372825A (en) * 2012-04-27 2013-10-30 三星钻石工业股份有限公司 Substrate adsorption unit
CN103693438A (en) * 2013-12-18 2014-04-02 京东方科技集团股份有限公司 Supporting device for substrate and substrate conveying method thereof
CN104918757A (en) * 2013-01-15 2015-09-16 名幸电子有限公司 Reduced pressure adhesion device
CN113716335A (en) * 2021-09-02 2021-11-30 武鹏 Sheet metal plate adsorption type carrying device for manufacturing new energy automobile

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JPH05318368A (en) * 1992-05-18 1993-12-03 Tokyo Electron Yamanashi Kk Suction conveying device
JPH08143147A (en) * 1994-11-18 1996-06-04 Metsukusu:Kk Sucking device for sheet-form work
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Cited By (9)

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Publication number Priority date Publication date Assignee Title
CN102765091A (en) * 2011-05-05 2012-11-07 通用汽车环球科技运作有限责任公司 Reconfigurable tool module for an end-effector employed with a robotic arm
CN102765091B (en) * 2011-05-05 2014-12-24 通用汽车环球科技运作有限责任公司 Reconfigurable tool module for an end-effector employed with a robotic arm
CN103372825A (en) * 2012-04-27 2013-10-30 三星钻石工业股份有限公司 Substrate adsorption unit
CN104918757A (en) * 2013-01-15 2015-09-16 名幸电子有限公司 Reduced pressure adhesion device
CN104918757B (en) * 2013-01-15 2016-10-19 名幸电子有限公司 Adsorbent equipment
CN103693438A (en) * 2013-12-18 2014-04-02 京东方科技集团股份有限公司 Supporting device for substrate and substrate conveying method thereof
CN103693438B (en) * 2013-12-18 2016-06-01 京东方科技集团股份有限公司 For the bracing or strutting arrangement of substrate and the method for transport substrate thereof
CN113716335A (en) * 2021-09-02 2021-11-30 武鹏 Sheet metal plate adsorption type carrying device for manufacturing new energy automobile
CN113716335B (en) * 2021-09-02 2022-12-27 湖北中程科技产业技术研究院有限公司 Sheet metal plate adsorption type carrying device for manufacturing new energy automobile

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