TWI327986B - Substrate absorption device - Google Patents

Description

1327986 V. Technical Field of the Invention The present invention relates to a substrate adsorption device for adsorbing and supporting a thin plate substrate such as a glass substrate or a semiconductor wafer which is used for a flat panel display (hereinafter abbreviated as FPD). [Prior Art] When adsorbing and supporting a large-sized thin glass substrate, even if the glass substrate is turned over or bent, it must be reliably adsorbed. Therefore, the adsorption portion must simulate the inversion and bending of the glass substrate to have a high movable space. In the adsorption device disclosed in Japanese Laid-Open Patent Publication No. Hei No. Hei. No. Hei. With this gap, the adsorption pad can be tilted. When the inclination of the adsorption pad is increased, the horizontal movement will occur when the glass substrate is adsorbed by the gap between the adsorption pad and the pressure frame. Once the pad moves horizontally, the position of the glass substrate moves. Therefore, the position of the glass substrate cannot be determined with high precision, and the glass substrate during transportation is shaken and cannot be stably transported. In order to accurately determine the position of the glass substrate and prevent the glass substrate from being shaken during transportation, the gap between the suction tool and the housing hole is reduced, so that the movement of the suction tool in the oblique direction can be restricted. Therefore, it is difficult for the adsorption pad to mimic the inversion, bending, and the like of the glass substrate. SUMMARY OF THE INVENTION According to the present invention, the main point of view of the present invention is to provide a housing having a hollow and open-ended opening, and an adsorption pad provided in the hollow of the casing and provided with an air suction passage for sucking air. Support member, and protruding cover

1327986 V. INSTRUCTIONS (2) The state of the opening portion is downloaded from the adsorption pad of the air suction hole which is placed on the adsorption pad supporting member and is movable at least at the point of contact with the opening of the casing at least at 3 o'clock and provided with the air suction passage in airtight communication. And a substrate adsorption device such as a suction pad supporting means for fixing the adsorption pad to the opening of the sheath. [Embodiment] Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a structural view of the substrate adsorption device E1. The housing 1 is a hollow cylindrical shape of metal, and the inside thereof is formed by the hollow portion 2. The front end side of the housing 1 is formed by an opening portion 1b having a circular end portion 1a. The housing 1 is provided with a screw portion 1c on the inner wall of the bottom opening portion at the other end. The bottom of the casing 1 is attached to the module body 4 provided on the mounting table 3 for the substrate adsorption device E1. The module body 4 is formed by a hollow shape in which the outer diameter is substantially coincident with the inner diameter of the casing 1 and the air guiding passage 5 is provided inside. A screw portion 4a is provided on the outer surface of the unit body_4. In this way, the casing 1 can be attached to the assembly body 4 by the screw portion 1c and the screw portion 4a, and can be detached. The lower portion of the component body 4 is provided with a screw portion 4b which is attached to the mounting table 3 for the substrate suction device E1 and protrudes. The assembly main body 4 is attached to the mounting table 3 by tightening the screw portion 4M to the screw of the mounting table 3 of the suction device E1, and is detachable. Inside the hollow shape of the module body 4, a screw portion 4c is provided. Further, on the outer peripheral surface of the module body 4, a screw portion 4d is provided. The screw part

1327986 V. Inventive Note (3) 4d, tightly locked with the nut 6. The nut 6 is fixed to the mounting position of the assembly body 4 by being locked to the screw portion 4d. A groove 7 is provided in the direction around the inner wall surface of the lower portion of the casing 1. The position of the groove 7 corresponds to the tip end portion of the module body 3. An O-ring 8 for preventing air leakage is interposed between the inside of the groove 7 and the leading end of the module body 3. Inside the hollow portion 2 of the casing 1 and on the tip end portion of the assembly member 3, a folding member 9 is provided. The folding member 9 can be folded in the direction of the hollow portion 2 in the hollow portion 2 of the casing 1. The folding member 9 is integrally formed of a thick cylindrical portion 10 and a thin cylindrical portion 1 1 .

The thick cylindrical portion 10 has a diameter that substantially coincides with the inner diameter of the hollow portion 2 of the casing 1, and the outer peripheral surface is in close contact with the inner surface of the hollow portion 2 of the casing 1. A groove 1 2 is provided on the outer peripheral surface of the thick cylindrical portion 10, and a V-shaped pad 13 is provided in the groove 12. When the V-shaped pad 13 is vacuum guided from the air guiding passage 5 of the module body 4, the V-shape is opened, and the airtight state is maintained to prevent air leakage between the hollow portion 2 of the casing 1 and the folding member 9. . The thin cylindrical portion 1 1 has a diameter substantially identical to the inner diameter of the air guiding passage 5 of the module body 4, and the peripheral surface is tightly fitted to the air guiding passage 5 of the module body 4. The thin cylindrical portion 11 is freely detachable from the air guiding passage 5.

An air guiding passage 14 is provided inside the thick cylindrical portion 10 and the thin cylindrical portion 11. The air guiding passage 14 is in communication with the air guiding passage 5 of the module body 4. An upper portion of the folding member 9 is provided with a suction pad fixing member hose member 15 . The hose member 15 is a cylindrical shape formed of an elastic member, and the upper portion is opposite to the upper portion

Page 8 1327986 V. DESCRIPTION OF THE INVENTION (4) The position of the adsorption pad 16 has a bellows-like buckling portion 17. The hose member 15 is opposed to the folding member 9 by the locking attachment of the screw portion 18. The inside of the hose member 15 is formed by an air guiding passage 19. The air guiding passage 19 communicates with the air guiding passage 4 of the folding member 9 in an airtight state. The adsorption pad 16 is placed on the hose member 15 on the road. The adsorption pad 16 6 protrudes from the open end 1 a of the sheath 1 . The adsorption pad 16 is formed of a resin such as an engineering plastic. The suction pad 16 can be rocked on the hose member 15 by being placed on the hose member 15. The adsorption pad 16 is composed of a suction surface 16a having a surface plane and a contact surface 16c having a curved surface integrally formed from the inner surface of the adsorption portion 16b. An air suction hole 16d is provided in a central portion of the adsorption portion 16b. The adsorption portion 16b has an outer diameter that coincides with the outer diameter of the sheath 1. The adsorption portion 16b, when the adsorption pad 16 is lowered into the casing 1, the outer peripheral edge 16e will be in surface contact with the open end 1a of the casing 1 to stop falling. Therefore, the open end 1 a of the casing 1 can be used as a reference plane for maintaining the inclination of the suction surface 16 a of the suction pad 16 in addition to the lowering of the suction pad 16 . The adsorption portion 16b may be substantially identical to the outer diameter of the sheath 1, but as shown in Fig. 2, the length D may extend outward from the peripheral surface of the sheath 1. If the adsorption portion 16 6 protrudes outward, the area of the adsorption surface 16 a will become large, and when any portion of the adsorption surface 16 6 is in contact with the glass substrate, the point of application of the force and the center position of the adsorption portion 16 b The distance of P will become longer, so that with a little effort, the suction pad 16 will shake the head on the hose member 15. The contact surface portion 16c has a cylindrical shape, and the intermediate portion in the up-and-down direction of the outer peripheral surface is a hemispherical curved shape having the largest diameter. The contact surface portion 16c has a maximum outer diameter smaller than the inner diameter of the hollow portion 2 (open end 1a) of the sheath 1

Page 9 1327986 V. Description of the invention (5) Small, it can move in the vertical direction in the opening 1 b of the casing 1 . The contact surface portion 1 6 c ' with respect to the inner wall 2 a of the hollow portion 2 of the sheath 1 requires at least 3 points of point contact to be fixedly supported. The contact between the contact face i 6c and the inner wall 2a of the hollow portion 2 of the casing 1 is not necessarily limited to a point contact requiring at least 3 points. The surface of the contact face portion 16c is in the same circumferential direction by the shaking of the head of the adsorption pad 16. Produce a complex number of point contacts, or create line contacts in the same circumferential direction. As a result, the contact between the contact face portion 16c and the inner wall 2a of the hollow portion 2 of the sheath 1 is less resistant to friction between the two, and the suction pad 16 can smoothly shake the head. The adsorption pad 16 has an annular step 20 in the air suction hole for 16 d. On the difference of 20, the first fixing plate 2 shown in Fig. 3 is provided, and the first fixing plate 21 is in the shape of a disk. For the air to flow, two small holes 2 1 a and 2 1 b are left. The folding member 9 is provided with an annular step 2 2 in the air guiding passage 14 . In the step 22, a second fixing plate 23' having the same shape as the second fixing plate 21 is provided. The first fixing plate 21 and the second fixing plate 23 are connected by a line connecting the members such as the thin wires 24. . The thin wire 24 is formed of a soft wire which is resistant to tension and has a strong unbroken strength, such as a nylon resin. The thin wire 2 4 ′ maintains the interval between the first and second fixing plates 2 1 and 2 3 by the hose member 15 , and is given by the urging force of the horizontal posture in which the shaking state of the suction pad 16 can be released. The hose member 15 tension causes the hose member 15 to extend. Further, the tension of the thin wire 24 can prevent the bent portion 17 of the hose member 15 from moving away from the adsorption portion 16a, and the shaking operation can be caused by the inclination of the adsorption portion 16a. The tension of the thin wire 24 can be between the first and second fixing plates 2 1 and 2 3

1327986 V. INSTRUCTIONS (6) Adjustments are made during stretching, for example, when the thin wires 24 are attached to the first or second fixing plates 21, 2 3, the tightness of the binding can be adjusted. The first fixing plate 2 and the second fixing plate 23 and the thin wire 24 constitute a suction pad fixing means. The air guiding passage 14 in the thin cylindrical portion 1 1 of the folding member 9 and the air guiding passage 5 in the module body 4 are provided with an elastic member spring 25. The spring 25 is integrally formed with the suction pad 16 and the hose member 15 and the folding member 9 in the hollow portion 2 of the casing 1, and is biased by the folding member 9 toward the open end 1a of the casing 1. The lower side of the spring 25 is fixed to the spring regulating member 26. On the peripheral surface of the spring regulating member 26, a screw portion 26a is provided. The spring adjusting member 26, the screw portion is locked to the screw portion 4c of the air guiding passage 5 of the module body 4, and is housed in the air guiding passage 5. The magazine adjusting member 26 has an annular shape, and the hollow portion is provided with an air guiding passage 26b. The spring adjusting member 26 can be rotated by the locking of the screw portion 26a and the screw portion 4c to move the inside of the empty guide passage 5 up and down, thereby adjusting the biasing force of the spring 25. In the hollow portion 2 of the casing 1, a suction pad height adjusting structure 27 is provided. The suction pad height adjusting structure 27 has an adjustment annular member 29 that is locked to the screw portion 28 formed in the hollow portion 2 of the casing 1. The adjustment annular member 209 can be moved up and down in the hollow portion 2 of the casing 1 by the rotation of the screw portion 28. As the adjustment annular member 29 moves up and down, the suction pad 16 and the hose member 15 are integrally formed with the folding member 9, and are moved up and down in the hollow portion 2 of the casing 1. In this way, the height position of the adsorption pad 16 relative to the open end 1 a of the casing 1 can be adjusted. Next, the adsorption of the glass substrate S by the device E 1 constructed as described above

Page 11 1327986 V. Description of the Invention (7) The description will be made with reference to Figs. 4A to 4C. When the glass substrate skin is transported to the substrate adsorbing device jg 1, the substrate adsorbing device E1' will rise by the lifting structure. The glass substrate s is tilted by turning or bending. By the rise of the substrate adsorbing means, a part of the adsorption pad 16a of the adsorption pad 16a, as shown in Fig. 4, is brought into contact with the inner surface of the glass substrate 40 which is inverted or bent. The adsorption pad 16 is placed on the hose member 15 and pulled to the lower side of the casing 1 by the thin wire 24. In this way, the 'adsorption pad 16 will shake the head on the hose part 15' and will not return to the original position unless the external force is applied. That is, the suction pad 丨6a^ to restore the strength of the horizontal position. Therefore, the adsorption pad 16 6 can be brought into contact with the inner surface of the glass substrate S by applying a slight force from below the glass substrate s. Therefore, as shown in FIG. 4b, a pattern in which the glass substrate S is reversed and curved is formed. Presenting a state of shaking head. That is, because the adsorption pad 16 inserts the contact surface portion 16c into the opening portion 1b of the casing i, it also shakes the head, so that the outer edge of the inner surface of the adsorption portion 16b. 1 6 e can be tilted to the maximum of 1 The angle of the head that contacts the end 1 a. The adsorption pad 16 6 ' is in contact with at least three points on the inner wall of the opening portion 1 b of the casing 1 due to the contact surface portion 1 6 c, and at the same time, a shaking action is generated, so that between the contact face portion 16c and the inner wall of the opening portion 1 b of the casing 1 The friction resistance is small. As a result, even if the glass substrate S is turned upside down and bent, the adsorption surface 16 6 A of the adsorption crucible 16 can be tilted and bent obliquely, and closely adheres to the inner surface of the glass substrate S. . The outer diameter of the adsorption portion 16a is the same as the outer diameter of the sheath 1, so the glass

1327986 V. INSTRUCTION DESCRIPTION (8) When the substrate S contacts the peripheral edge of the adsorption portion 16a, the distance between the applied point of the force applied and the :: position is elongated. Therefore, the contact force with the glass base will be transparent: the second attachment portion... the peripheral edge is slightly applied with a contact force, the soil joint. The large rotating material 9 that causes the adsorption pad 16 to shake the head to generate the air guiding passage 7 the air guiding passage 5 of the assembly body 4 through the folding portion 空气 16 air suction bow hole, the hose portion 15 air guiding passage 19 and When the air is adsorbed by 14 or 19 spots and the air is sucked, these air bows guide the passage 5 and the negative pressure. : When the suction = 夂 16 inside 'will be sealed and formed by the vacuum suction, the adsorption surface 16a can be closely adhered even if the glass substrate 5 is turned over, and the adsorption surface i6a can mimic the glass substrate s. Inner surface substrate. W, can also prevent air leakage and vacuum suction of the soil at the same time, each empty g PI 4# due to vacuum suction; 1 丨: two roads 5, 14, 19 and air suction holes 16, the folding parts 9 will be / 丄 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , touch. Shell! The opening is placed in contact with the open end U of the casing. The suction of the suction port 22 is the reference plane, so it is aligned in the horizontal direction. And the attached surface 16a. As a result, the glass substrate S can be maintained horizontally, and the contact surface portion 16c is in contact with the inner wall of the opening portion of the casing 1, so that the adsorption 16 can restrict the lateral movement. With this limitation, even in the state where the adsorption 塾16 adsorbs the inner surface of the sill substrate S, the glass substrate

Page 13 1327986 V. Invention Description (9) ---- Will not shift ' and maintain a high-precision positioning state. According to the first embodiment, the hose portion 15 in the opening portion 丨b of the casing 1 has the adsorption portion 丨6a placed thereon, and the hemispherical shape is curved and at least three portions of the contact surface are formed on the inner wall of the opening of the casing 1. The contact pad of the point contact [6, the thin wire 24 is stretched between the adsorption pad 16 and the folding member 9, so that the adsorption pad 16 can be inclined at a large angle, and the contact surface i 6c and the sheath are inclined when tilted 1 The inner wall of the opening is in contact, so the suction pad 6 is not laterally displaced. The adsorption pad 16 6' has a large shaking angle, and can be slightly applied to generate a slight frictional resistance, so that the moving head movement is smoother and smoother, and the s s can be overturned and f-curved and tightly... The glass substrate 3: the surface glass The base plate is reliably adsorbed to the glass substrate S without air leakage. When the glass substrate is in contact, the distance between the contact force point on the adsorption portion 16b and the center position of the adsorption portion 16b is long, so that only one contact force can cause the adsorption jaw 16 to shake the head' and immediately It simulates the overturning, bending, and the like of the glass substrate S. When the adsorption 塾16 adsorbs the glass substrate S, the negative pressure in each of the air guiding passages 14, 14, 19 and the air suction hole 16d will exceed the elastic force of the elastic yellow 25, causing the adsorption pad 16 to descend and the open end U of the casing 1 Face contact is created to limit n and the boundary 16a to a horizontal state. By this limitation, the adsorption 塾丨6 causes the glass substrate S to be adsorbed to be inverted and bent to be horizontally and horizontally separated, and the high precision of the reference plane is maintained. Since the suction pad 16 6 is connected by the thin wire 24, the opening end la of the casing 1 is not detached. Since the adsorption pad height adjustment device 27 is provided, it can be broken.

1327986 V. DESCRIPTION OF THE INVENTION (10) The height position of the substrate is adjusted to adjust the position of the adsorption pad 16 from the end of the sheath 1 at a position of 1 a or more. Next, an example in which the substrate adsorption device E1 described in the first embodiment is applied to an air floating upper transfer device will be described with reference to the structural diagrams of the air floating upper transfer device shown in Figs. 5 and 6 . In addition, FIG. 5 is a top view and FIG. 6 is a side view. On the upper surface of the floating transport platform 3, a plurality of air blowing holes 31 are provided. From these air blowing holes 31, air can be ejected in accordance with a uniform air pressure. By the ejection of the air, an air layer is formed between the floating upper transfer platform 30 and the glass substrate S, and the glass substrate S thus floats up to the floating transfer platform 30. Linear guide rails 32 and 33 are provided on both side surfaces of the floating transport platform 30. Further, these guide rails 32, 33 are provided with transporting portions 34, 35 which are movable at the same time. The conveyance units 34 and 35 are provided with an adsorption mounting table 37 through the respective attachment supporting members 36. Each of the lifting and lowering support members 36' allows the adsorption mounting table 37 to move up and down in the vertical direction (Z direction). On the adsorption mounting table 37, about five substrate adsorption devices E1 are provided in the same direction in the glass substrate S transport direction T. Further, the number of the substrate adsorbing devices E 1 is not limited to five, and may be any number. These substrate adsorbing devices E 1 can adjust the heights of the respective adsorption pads 16 to be uniform. In such an air floating upper transfer device, air is floated on the floating transport platform 3, or the glass substrate S is placed thereon. In this state, the respective conveying portions 34, 3 5 can be moved to both ends of the leading end portion of the substrate s. Each of the lifting and lowering support members 3 6 of the conveying portions 3 4 and 35 can lift the respective adsorption placing portions 37, respectively. In this way, each adsorption pad 16 of each substrate adsorption device E1 will be combined with glass

Page 15 1327986 V. INSTRUCTION DESCRIPTION (11) The inner surface of the substrate S is in contact. When the adsorption pad 6 is in contact with the inner surface of the glass substrate s, as in the first embodiment, the suction pad 16 can be shaken by the contact force to the glass substrate S, and the adsorption surface 16 can be made. a Simulates the inclination of the inner surface of the glass substrate S. At the same time, the adsorption surface 16a which is attracted by the air vacuum is closely adsorbed and fixed on the inner side surface of the glass substrate s. After that, when each of the conveyance units 34 and 35 moves through the respective guides 32 and 33 at the same time, the traction of the respective conveyance units 34 and 35 by the glass substrate S′ on which the air floats is transmitted through the floating transport platform 30, and the high speed is high. The ground is transported by air in the direction of transport τ. In this case, when the substrate adsorption device E1 is applied to the air-floating and transporting device, the glass substrate S that has been inverted and bent can be transported by floating the air, and the substrate can be inverted and bent. The adsorption pad 16 of the adsorption device E 1 is surely adsorbed on the inner side surface of the glass substrate S. Since the adsorption pad 16 is not displaced, the position of the glass substrate s is not moved when the inner surface of the glass substrate S is adsorbed and fixed. Therefore, when the air floating transport device is installed on the liquid crystal display screen and the glass substrate S of the liquid crystal display screen is transported by air, the position of the aligned glass substrate S will not be located in the alignment portion of the manufacturing line and the inspection portion. It moves and can be fixed and fixed with high precision. Even if the height positions of the plurality of adsorption pads 16 do not coincide with each other, the height positions of the respective adsorption pads 16 can be adjusted to the same height by the respective adsorption pad height adjusting devices 27. Next, with reference to an example in which the substrate adsorption device E1 described in the first embodiment is applied to an inspection platform of a large substrate inspection device,

Page 16 1327986 V. INSTRUCTIONS (12) The structural diagram of the inspection platform shown in Figure 7 is explained below. The inspection platform 40 is formed of a plurality of frame preventing bodies 43 which are frame-shaped and rectangular in a hollow structure and which are disposed in parallel with the plurality of bending preventing stacks 43 which are provided in the hollow portion 42 of the platform body 41 at regular intervals. A plurality of substrate adsorbing devices E1 are embedded in the inner peripheral edge portion of the hollow portion 4 2 of the platform body 41 at regular intervals. On each of the bending prevention stacks 43, a plurality of support pins 44 are erected. When the glass substrate s which is bent is placed on the inspection platform 40, the adsorption pads 16 of the respective substrate adsorption devices E1 will contact the inner surface of the glass substrate s. In the same manner as in the above-described first embodiment, the adsorption pad 16 generates a shaking action, and the adsorption surface 16 a shape mimics the inner surface of the glass substrate S by vacuum suction of air to closely adhere to the inner surface of the glass substrate S. The solid glass substrate S is fixedly adsorbed by reading. Therefore, even if the inverted and curved glass substrate S is placed on the inspection platform 40, the glass substrate S can be surely adsorbed and fixed. By adjusting the height position of each adsorption surface 16a by each adsorption pad height adjusting device 27, by increasing the south position of the adsorption 塾16, even if the glass S is greatly inverted and bent, the turn can be corrected. Bending, the flatness of the fixed glass substrate S will be highly adsorbed on the inspection platform. Next, a second embodiment of the present invention will be described. In addition, the detailed description of the same parts as those of the first embodiment and the same reference numerals will be omitted herein. Fig. 8 is a structural view showing a characteristic portion of the substrate adsorption device E1. The wire 45 is terminated between the first fixing 21 and the second fixing plate 23. The steel wire 45 has a 'twisting rigidity' formed of a metal material or the like. The wire 45 includes a bar-shaped wire body 46, and a hook-shaped first stopper portion 47 provided at the end of the wire body 46, and is provided on the wire body 46. A J-shaped second stop 48 at one end. The first - hiding & jJl · § Ρ

1327986 V. INSTRUCTION OF THE INVENTION (13) 47' is passed through the holes 21a, 21b of the first fixing plate 21 and is tied by a wire 49 such as a wire. When the second stopper portion 48 is pressed against the respective holes 21a and 21b of the second fixing plate 23, for example, when the glass substrate S is floated and transported by air, when the glass substrate s which is inverted and curved is adsorbed by the substrate adsorption device E1, The substrate adsorption device E1 will adsorb toward the glass substrate S. At this time, the adsorption pad 16 of the substrate adsorption device E is rotated only. After the rotation of the adsorption pad 16 is accumulated to a certain extent, the amount of twist of the thin wire 24 which is pulled between the first fixing plate 21 and the second fixing plate 23 by the means for fixing the adsorption pad 16 will gradually increase. Then, the tension of the thin wire 24 becomes large, the suction pad 16 gradually descends, and the amount of protrusion of the adsorption pad 16 which protrudes from the end portion 1a of the sheath 1 becomes small. Therefore, when the folded and curved glass substrate S is adsorbed, the adsorption pad 16 is inclined to mimic the inclination of the inner surface of the glass substrate S, making the original adsorption operation more difficult. According to the second embodiment described above, even if the urging force is applied to the adsorption pad 16, the rotation of the adsorption pad 16 can be restricted by the wire 45. Therefore, the suction pad 16 will not continue to accumulate, and will remain at the height position A above the end 1a of the casing 1. Further, the first and second embodiments described above may be formed in the following manner. Fig. 9A is a structural diagram of a deformed row of the steel wire 45; the wire 45 is provided with a small diameter portion 4 9 a on the side of the first stopper portion 47 of the wire body 46. The small diameter portion 4 9 a is thinner than the diameter of the wire main body 46, and the upper portion of the small diameter portion 49a can be freely inclined with a slight external force, but the rotational force of the adsorption potential 16 can be suppressed. Fig. 9B is also a structural diagram of the deformation column of the wire 45. The wire 4 5, the first IHI IH18, page 18, 1327986. 5. The invention (14) The first portion 47 is separated from the wire body 46, and a ball 4 9 b is disposed at the lower end of the first stopping portion 47. . The wire main body 46 is provided with a receiving portion 49c of a ball 49b at an end separated from the first stopping portion 47. The receiving portion 49c can rotate the ball 4 9 b. Therefore, even if the wire 45 is subjected to a twisting force, the ball 4 9 W is rotated in the receiving portion 49c. As a result, even if the adsorption pad 16 is rotated, the wire 45 is not twisted. As shown in Fig. 10, the hose member 15, as shown in Fig. 10, can also be used to form a hose member 15a. Next, a third embodiment of the present invention will be described. Figure 11 is a structural view of the substrate adsorption device E 2 . The casing 50 is formed of a cylindrical material having a rigid material such as aluminum. A fixing hole 51 for a cylindrical spacer is provided on the tip end portion of the casing 50. In the fixing hole 51, the adsorption pad 52 is rotated in a state of slightly protruding from the opening end 51a of the fixing hole 51. The suction pad 52 is a cylindrical shape formed of a resin, and the contact surface portion 5 2 a of the side surface of the pad is spherical. Inside the adsorption pad 52, a cylindrical hollow portion 53 opened downward is provided. A flat adsorption surface 54 is provided on the upper portion of the adsorption pad 52. The suction surface 54 is provided with a cushion recess portion 5 4 a having a slight depth, and a vacuum suction air suction hole 5 4 b communicating with the central hollow portion 53 is provided. The fixing hole 5 of the casing 50 has a smaller inner diameter than the surface 52a of the suction pad 52. The opening portion of the fixing hole 51 is provided with a twisted shape portion 5 which is twisted by the curvature of the spherical surface of the face portion 5 2 a. The twisted portion 55 constitutes a suction pad fixing means for fixing the adsorption pad 52 in the fixing hole 51. The contact hole 5 1 of the casing 50 and the contact surface 5 2 a of the adsorption pad 5 2 are protected

Page 19 1327986 V. INSTRUCTION OF THE INVENTION (15) The precision structure in which the suction 塾 52 can be rotated in the fixing hole 51 of the casing 50. Therefore, once the adsorption pad 52 is housed in the fixing hole 51, at least three points of contact between the contact surface portion 52a of the adsorption pad 52 and the inner wall surface of the fixing hole 51 are made. The contact between the contact surface portion 52 2 a of the adsorption pad 5 2 and the inner wall surface of the fixing hole 51 is not necessarily limited to three point contacts, but may be the same on the contact surface portion 52 a by the shaking action of the adsorption pad 52. A plurality of point contacts are generated on the line in the circumferential direction, or a line contact is generated on the line in the same circumferential direction. By the contact between the contact surface portion 52a and the inner wall surface of the fixing hole 51, the frictional resistance between the contact surface portion 52a and the inner wall surface of the fixing hole 51 is extremely small, and the adsorption pad 52 has only a small external force in the fixing hole 51. It is possible to maintain the rotation in the direction of the entire circumference, as in the direction of the arrow F, and smoothly generate the shaking action. The bottom of the fixing hole 5 1 of the casing 50 is provided with a receiving surface 56 for receiving the adsorption pad 52. The receiving surface 56 is formed by a tapered portion 58 provided at the peripheral edge of the flat portion 57 and the flat portion 57. The flat portion 57, by contacting the bottom of the adsorption pad 52, limits the angle at which the adsorption pad 52 is inclined in the direction of the arrow F. When the adsorption pad 52 is inclined, the adsorption surface 54 is not hidden in the range of the fixing hole '5 1 when the adsorption pad 52 is inclined. The tapered portion 58 is formed by mimicking the angle at which the adsorption pad 52 touches the spherical curvature of the face 5 2 a. The tapered portion 58 contacts the descending adsorption pad 52 in the fixing hole 51, and restricts the adsorption pad 52 from moving downward. In the casing 50, a hollow hole 59 is provided. The hollow hole 5.9 has an inner diameter smaller than the inner diameter of the fixing hole 51. Inside the hollow hole 59 and the hollow portion 53 of the adsorption pad 52, a suction pad fixing member 60 is provided. The suction pad fixing member 60 is formed in a hollow shape made of an elastic member such as rubber, and is provided with an air guiding passage therein. The adsorption pad fixing member 60

Page 20 1327986 V. Invention description (16) on the shackle 'forms a bellows that obtains less elasticity 6 〇 ^ The first * ft 4 ' of the bellows 6 〇 3 is thinner than the bottom and forms a bellows And scalable. The bellows 60 is airtightly bonded to the air suction hole 54b of the suction weir 52. The bottom of the adsorption pad fixing member 60 is hermetically connected to the front end surface of the module body 62.

The casing 50' faces the assembly body 62 and is locked by the screw portion 63. The casing 50 is rotatable facing the unit body 62, and changes the telescopic stem of the bellows 6a, and adjusts the turning force of the suction weir 52. This adjustment is made when the adsorption 塾 52 contacts the glass substrate S, and the adsorption pad 52 which is subjected to an external force is finely adjusted in a rotatable range. The protective member 50' can adjust the height position of the adsorption pad 52 by facing the rotation of the assembly body 62. When the amount of expansion and contraction (elastic force) of the bellows 60 a or the height position of the suction port 5 2 is adjusted in this way, the casing 50 is fixed to the module body 62 by the lock nut locked to the screw portion 63. An air guiding passage 65 is provided on the module body 62. The air guiding passage 65 communicates with the air guiding passage of the suction fixing member 60. The air suction holes 54b and the air guiding passages 65 are formed to form a vacuum suction flow path.

Next, the adsorption operation of the glass substrate s of the substrate adsorption device E2 described above will be described below with reference to FIGS. 12A to 12C. Fig. 12 is a state in which the glass substrate is conveyed to the upper side of the substrate adsorption belt E2. The adsorption 塾 5 2 ' is inclined in the fixing hole 5 1 of the casing 50, and the parallel state of the adsorption surface 54 to the inner surface of the glass substrate S is broken. In this state, the substrate adsorption device E 2 is raised by the lifting device, and the adsorption pad 5 2 is adsorbed.

Page 21 1327986 V. INSTRUCTION DESCRIPTION (17) The portion of the face 504 that forms the apex will contact the inside surface of the glass substrate S. It is only necessary to apply a contact force to the inner surface of the glass substrate S, and it is possible to rotate in the direction of the fixed J arrow F. The inside of the suction pad 5 2 is maintained in point contact with the inside of the fixing hole 5 1 of the casing 50, and the friction between the inner wall surface of the fixing hole 51 and the inner wall surface of the fixing hole 51 is extremely resistant, so that '·' When the substrate adsorption device E2 is in contact with the inner surface of the glass substrate S by a little contact force from under the glass substrate s, the adsorption 塾 5 2 will rotate, and as shown in FIG. 2B, the adsorption surface 54 will be combined with the glass substrate. The direction of the inside surface of s is the same. At this time, even if the adsorption pad 52 is inclined or the glass substrate s is simultaneously inverted or bent, the adsorption pad 52 is rotated and the adsorption surface 54 is in close contact with the inner surface of the glass substrate S. In this state, when the air is sucked by the air through the air guiding passages 6 and 65 and the air suction holes 54b, the gasket recess 54a of the suction pad 52, the air suction hole 504b, and each of the air guiding passages 6 The negative pressure is formed by vacuum suction in an airtight state. As a result, the adsorption surface 5 4 ' of the adsorption pad 52 will be adsorbed on the inner surface of the glass substrate s. Even if the glass substrate S is reversed or bent, the suction/attachment surface 5 4 can closely adhere to the inner surface of the glass substrate S, so that the glass substrate S can be surely sucked without any air leakage.

At the same time, the main portion of the bellows 6a, which is formed by the pad recess 54a, the air suction hole 541) and the respective air guiding passages 6 and which form the negative pressure 'elastic member'. The suction pad 52 is lowered in the fixing hole 51 by the reduction of the bellows a 0 a , and the bottom thereof comes into contact with the tapered portion 58 to stop as shown in Fig. 12 c. As a result, the adsorption 塾52 will be fixed to the solid

Page 22 1327986

Fixed hole 5 1 inside. According to the third embodiment, the adsorption pad 52 having the spherical contact surface portion 52a is fixed in a point contact manner in the fixing hole 51 of the casing 5〇 by a precise fitting structure, so that the adsorption pad 52 can be fixed in the hole. Since the inside of the 51 is rotated in the entire circumferential direction, the frictional resistance in the adsorption pad 52 and the fixing hole 5 is extremely small, and it is possible to rotate in the entire circumferential direction as long as the force is slightly applied. Therefore, the small contact force from under the glass substrate S contacts the inner surface of the glass substrate s, so that the adsorption pad 52 can simulate the oblique direction of the inner surface of the glass substrate S without vacuum leakage, and can reliably adsorb the glass substrate S. Inside surface. As a result, even if the glass substrate S is turned over or bent, the adsorption pad 52 can be surely adsorbed by mimicking these conditions. The suction pad 52' is fixed by the fitting structure in the fixing hole 51 of the casing 50, so that the displacement of the adsorption pad 52 in the fixing hole 51 is extremely small. In this way, when the glass substrate S is fixedly adsorbed, positioning can be performed with high precision. When the adsorption pad 5 1 adsorbs the inner surface of the glass substrate S, the bellows 60 a is reduced by the negative pressure in the adsorption 塾 fixing member 60, and the suction pad 5 2 is brought into contact with the tapered portion 58 8' to restrict the movement downward. Therefore, in the state in which the glass substrate $ is adsorbed, the height can be accurately fixed. The casing 50 is rotated toward the module body 62, and the amount of expansion and contraction of the bellows 6〇3 can be adjusted. Therefore, the contact force of the adsorption pad 52 to the glass substrate S can be adjusted to an optimum value, and the adsorption pad 52 can be adjusted. Height position. 5 vines set 50 s and have a twisted shape Zou 5 5 ' Therefore, the spherical adsorption 塾 5 2 does not bounce out of the fixing hole 5 1 . The substrate adsorption device Ε2 may be replaced by the above-mentioned FIG. 5 and FIG.

1327986 V. INSTRUCTION OF THE INVENTION (19) The substrate adsorption device E1 of the air floating transport device. When the substrate adsorption device E 2 is applied to the air floating upper transfer device, as in the first embodiment, the adsorption pad 5 2 of each substrate adsorption device E2 can be loosely adsorbed on the inner side of the glass substrate S by the inversion and bending of the glass substrate S. On the surface, the glass substrate S does not shift. Next, a fourth embodiment of the present invention will be described. In addition, the detailed description of the same parts as those of the drawings and the same reference numerals will be omitted herein. Figure 13 is a structural view of the substrate adsorption device Ε3. The substrate adsorbing device Ε3 can replace the substrate adsorbing device Ε 1 on the large substrate inspection device inspection platform shown in Fig. 7. The screw portion 7 of the casing 50 locked to the bottom of each recess 70 is fixed by the screw portion 71 attached to the lock nut 72. If the casing 50 is rotated by the screw portion 7, the amount of expansion and contraction of the bellows 60 can be adjusted. This adjustment state can be fixed by locking the lock nut 72. An air suction passage 74 that communicates with the air/air guiding passage 61 in the suction pad fixing member 60 is provided on each of the base body 411 of each of the platform main body 41 and each of the bending prevention stacks 4 3 . If the inspection platform of the substrate adsorption device Ε3 is provided, the inverted and curved glass substrate S can be surely adsorbed, and the inverted or curved shape can be corrected by adjusting the height position of the adsorption pad 52, and the glass substrate S can be highly adsorbed and fixed. The flatness "substrate adsorption device" 3 can also be applied to the large substrate transfer robot R shown in FIG. The arm fixing portion 80 of the robot arm R is provided with plural numbers, for example, four arms 181, and arranged in parallel at regular intervals. These arms 8 1 are provided with a plurality of substrate adsorbing devices Ε 3 .

1327986 V. OBJECT OF THE INVENTION (20) The large-sized substrate transporting robot arm inserts the arm fixing portion 8A into the receiving portion' and takes out the large-sized glass substrate S' and transports it to the inspector platform or the transport line. When the glass substrate s is placed on each arm 81, the glass substrate is bent. At this time, the adsorption pad 5 2 'adsorption surface 54 mimics the inclination of the inner surface of the glass substrate S, and is closely adhered to the inner surface of the glass substrate S by vacuum suction, thereby reliably adsorbing and fixing the glass substrate. According to the fourth embodiment, the height of the low-profile case 5 可调 can be reduced to be small, and the glass substrate can be prevented from being moved to the large substrate inspection device inspection platform or the arm portion of the large substrate transfer robot. The position can simulate the inversion and bending of the glass substrate S, and is surely adsorbed and fixed. Next, a fifth embodiment of the present invention will be described. In addition, detailed descriptions of the same portions as those of the first, the eleventh, the fifth, and the sixth, and the same reference numerals will be omitted herein. In the fifth embodiment, the air-floating and transporting apparatus shown in FIG. 5 and FIG. 6 is applied to the substrate adsorbing apparatus (hereinafter simply referred to as the first substrate/adsorbing apparatus) E of the first embodiment and the substrate of the third embodiment. An adsorption device (hereinafter simply referred to as a second substrate adsorption device) E2. Fig. 15 shows a substrate adsorption device E of the first embodiment provided on each adsorption mounting table 57, and a substrate adsorption device E2 of the second embodiment. In addition, it is cumbersome to add a symbol to the same figure, so the symbol is attached only to the necessary part. The first and second substrate adsorption devices E, E2, are plurally arranged in the same direction as the glass substrate S transport direction τ. The first substrate adsorbing device E1' is provided in plural, for example, two at the tip end side of the glass substrate S along the glass substrate direction T. The second substrate adsorption device E 2 is in the first

Page 25 1327986 V. INSTRUCTION DESCRIPTION (21) A plurality of substrate adsorption devices E1 are provided on the rear end side, for example, six. The first and second substrate adsorbing devices E1, E2 adjust the height positions of the respective adsorption faces 16a, 54 of the respective adsorption ports 16, 52 in a state where the glass substrate S is adsorbed to be aligned with the reference plane. In each of the first substrate adsorption devices E1, the height position of the adsorption surface 16a when the adsorption crucible 16 is lowered into the casing 1 and brought into contact with the end portion la is adjusted to be equal to the reference plane H. Since the first and second substrate adsorbing devices E, E 2 ' are different in degree, a step G is provided on the adsorption mounting table. Figure 16. is an air vacuum suction system. The first substrate adsorption device E1 on the left side with respect to the transport direction τ of the glass substrate s passes through the respective air guides of the other systems, and is connected to the respective regulators (regulat〇r) 9〇, 91, and the first one on the right side. The substrate adsorption device E is connected to each of the regulators (^舀111&1;〇1') 92, 93. These regulators (1^811131: 〇1^9〇, 9 1 , ..., 9 3 ' individually control the preset air attraction forces of the first substrate adsorption device E 。. On the other hand, relative to the glass substrate S The second substrate adsorption device E2 on the left side of the transport direction τ is respectively connected to each regulator (regulat〇r) 94_b 94- 2 ..... 94-n, and the second substrate adsorption device on the right side is £ 2 is also connected to each of the regulators 95-1, 95-2..... 95 - η. These regulators 94-1, 94-2, ..., 94-η, 95-1, 95- 2, ..., 95-η, individually control the respective air suction forces preset by the respective second substrate adsorption devices 。2. Adjustments to the left side of the transport direction Τ of the glass substrate S (1^811131: 〇1') 90, 91' and vacuum tube 96 are connected in common; similarly, left

Page 26 1327986 V. INSTRUCTIONS (22) Side regulators 941, 94_2..... 94-11 are also commonly connected to vacuum tube 97. Further, on the respective regulators 90, 9 94, 94, 94, ..., 94-n sides of the respective vacuum tubes 96, 97, respective air pressure gauges 98, 99 are provided. The air pressure gauge 98 measures the air attraction force from each regulator (regulat〇r) 9〇, 9 1 , and when the air suction force is not lower than the set attraction force, an error signal is sent to the vacuum tube 96 to interrupt the vacuum tube. 96. The air pressure gauge 99 measures the air attraction force from each regulator (regUiat〇r) 94-b 94-2 ..... 94-n, and the air attraction force is not lower than the set attraction force' An error signal is issued to interrupt the vacuum tube 97. Similarly, the regulator 92' 93 on the right side with respect to the transport direction τ of the glass substrate s is connected to the vacuum tube 1 ;; similarly, 9 5 - η is also the right regulator 95-1 95-2 is connected to the vacuum tube 101 in common. Each of the vacuum tubes 1〇0, 1〇1 regulators 92, 93, 95-b 95-2 ..... 95-n side is provided with respective air pressure gauges 102, 103. These air pressure gauges 1〇2, 1〇3, respectively measure the air gravitational forces from the regulators 92, 93, 95-1, 95-2..... 95_n, which are not low in air attractiveness. When setting the attraction force, the vacuum tube 9 is sent an error signal and then blocked. Each of the vacuum tubes 96, 100 on the side of each of the first substrate adsorption devices E1 is connected in common to a main regulator 104a, and then the main regulator 104a is connected to the air suction source 1A5. Similarly, each of the vacuum tubes 707 and 010 on the side of each of the second substrate adsorbing devices E1 is connected in common to the main regulator 104b, and then the main regulator

Page 27 1327986 V. Inventive Note (23) (regulator) 1 0 4b is connected to the air suction source 1 () 5 again. Further, the respective vacuum tubes 96, 97, 100, and 1 0 1 side of the main regulators 104a and 104b are connected to the air pressure gauges 1 〇 6 a and 1 0 6 b. Next, the adsorption operation of the apparatus of the above configuration on the glass substrate S will be described.

In the state in which the glass substrate s is floated or placed on the floating transport platform 30, when the respective adsorption mounting tables 57 are raised, the respective adsorption ports of the first and second substrate adsorption devices E1 and E2 are 16 and 5 2 will rise toward the inner side surface of the glass substrate S as shown in FIG. When the tip end side is reversed or bent with respect to the conveyance direction T of the glass substrate S, first, one end of the adsorption pad 16 of the first substrate adsorption device E 1 will contact the inner surface of the glass substrate s. The glass substrate S' is reversed with respect to the tip end side of the transport direction T, and the amount of warpage is increased. However, the first substrate adsorbing device E1 that can adjust the height of each of the adsorption pads 16 is disposed on the tip end side facing the transport direction T, Each of the adsorption crucibles 16 can be brought into contact with the inner surface of the glass substrate S which is turned over and bent. These adsorption 塾16 can only contact the inner side surface of the glass substrate S from the glass substrate S under a small 'small contact force, and shake the head by mimicking the inclination caused by the inversion and bending of the glass substrate S, and the adsorption surface 3 6 will closely fit the inner surface of the glass substrate.

In this state, when the air suction source 105 starts the air suction operation, the regulators 90, 91, ..., 93 and the respective first and second substrate adsorption devices E1, E2 are Regulators 94-1, 94_2, ..., 94-n, 95-1, 95-2, ..., 95-η will pass through the main vacuum tubes 96, 97, 1〇〇, ι〇1. Main regulator

1327986 V. Inventive Note (24) (regulator) l〇4 for air suction. The apparatus E1' thus attached will be the same as the first embodiment described above, and the suction cloth ''substrate suction 1 6 a will be attached to the inner surface of the glass substrate S which is mimicked and bent. * 16 6 adsorption surface without air leakage and vacuum suction glass Simultaneously, the substrate S» is closely attached, and the peripheral edge of the side surface 16 6 e stops the surface contact of the glass substrate S in the adsorption pad 16 at the end 1 of the casing 1 and is corrected to be planar contact 7 . The inner surface of the glass substrate S is approached to the respective adsorption pads 52 of the plurality of devices E2. These second substrates absorb and correct a substrate to be adsorbed by "- side first ^ in soil u "tsc 4 , heart tsr teeth" - iG nTi eight long small contact force can be connected from the bottom of the glass substrate S, set E2 The surface is moved in the surface direction, and the respective adsorption pads 52 are rotated, and the direction of the inner surface of the glass substrate S of the adsorption surface substrate S is uniform. In this state, if the air is immersed in the recesses 54a, _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ With the 塾52 falling in the fixing hole 51 and stopping the contact with the tapered portion 58··° and the attachment 52, the suction surface 5 4 will be adsorbed on the inner surface i of the glass substrate S, and the bellows 60 will be The air is vacuumed and contracted, so that the inner surface of the plate S is fixed by the first and second substrate adsorption devices E1 and the surface of the slab, and the inversion and bending of the glass substrate S will be adsorbed to the τE2 'And the dimension level is on the reference plane Η. ¥ @ Then, when the respective conveying portions 34 and 35 move on the respective guide rails 32 and 33 simultaneously, the glass substrate s on which the air floats is transported by the respective transporting portions 34 and 35, and is transported on the floating transport platform 30. The direction τ is carried by air at a high speed. S 二八 According to the fifth embodiment described above, the first direction of the glass substrate S transport direction τ

1

Page 29 Ϊ 327986 V. SUMMARY OF THE INVENTION (25) Even if a large amount of inversion and bending occurs on the end side, the inner surface of the glass substrate S can be surely adsorbed and fixed by the adsorption pad 16. The tip end side of the glass substrate S which is inverted and bent in a large amount can be adsorbed and fixed by the respective first substrate adsorption devices E1, and can be lowered toward the reference plane, so that the inner surface of the glass substrate S can be gradually approached to the adsorption of the respective second substrates. The device Ε 2 is fixedly fixed to the inner surface of the glass substrate s by the respective second substrate adsorption devices Ε 2 '. The first and second substrate adsorbing devices Ε1 and Ε2 are respectively passed through the regulators 其他6 of the other systems, and the air suction W is performed by 111&1:〇::) 90, 91-., 95-11, respectively, Even if one of the adsorption pads 16 or 52 does not adsorb the glass substrate S and leaks, only the first substrate adsorption device 1 or the second substrate adsorption device E2 with respect to the adsorption pad 16 or 52 relative to the air leakage is stopped. The air supply maintains the adsorption operation with the other first substrate adsorption device Ε1 and the second substrate adsorption device E2 by the respective adsorptions 16 or 5 2 before the end of the treatment. In this way, the adsorption and fixation of the glass substrate S does not stop midway and the safety can be improved, and the first or second substrate adsorption device El, E2 system of the adsorption pad 16 or 51 that can repair the air leakage is also advantageous. Maintenance. Further, by the two systems that supply air to each of the first substrate adsorbing device E1 and each of the second substrate adsorbing devices ε 2, the main regulator (regUiat〇r) i〇4a or 104b fails. The main regulator on one side (^舀11131:〇〇104诚1043 will continue to operate, so the problem that all the first substrate adsorption device A and each of the second substrate adsorption devices B cannot be attracted by air can be solved. In the fifth embodiment, the first substrate adsorbing devices £1 and E2' are used, but the first substrate adsorbing device may be used in all. In this case, the height of each of the first substrate adsorbing devices E1 adsorbing the pad 16 may be By adjusting

Page 30 1327986 V. INSTRUCTIONS (26) Apparatus 2 7 adjusts the height of the suction pad 16 and gradually increases in accordance with the transport direction of the glass substrate s. Next, a sixth embodiment of the present invention will be described. In addition, the detailed descriptions of the same parts as those in the figures of FIG. 5 and FIG. 6 are omitted here, and the detailed description of the air floating upper conveying device which can be used as an inspection platform is provided with plural numbers. For example, three adsorption mounts 37a, 37b, 37c. These suction mounts 37a, 37b, 37c are attached to the tip end side and the rear end side and the intermediate portion with respect to the glass substrate 搬 transport direction T. On the adsorption loading stages 37a' 3 7b, 3 7c, a plurality of first or second substrate suction means Eh E2 are arranged side by side. The first or second substrate adsorption devices E] and Ε2 adjust the height position of each adsorption surface 1 (3a'' 54 of each adsorption pad 16 and 5 2 to a reference in a state in which the glass substrate S is adsorbed. Η Η 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 Or the second substrate adsorption device can prevent the adsorption and fixation of the adsorption operation glass substrate S from being stopped even if the first or second substrate adsorption device E E2 is present, and the safety can be improved. The adsorption control method of the first or second substrate adsorption device Eb E2 first starts the adsorption operation on each of the first or second substrate adsorption devices Ε1 or E2 on the adsorption mounting table 37c provided at the center portion. δ is further applied to each of the first or second substrate adsorption devices Ε1 or Ε2 on the adsorption stage 37a or 37b at the tip end or the rear end portion Adsorption started operation.

Page 31 1327986

V. Description of invention (27) If such adsorption control is also gentleman, t ^

Adsorption is fixed on the floating transfer platform 3 Γ. 吸附 吸附 的 的 的 的 的 的 的 的 的 37 37 37 37 37 37 37 37 37 37 37 37 37 37 37 37 37 37 37 37 37 37 37 37 37 37 37 37 37 37 37 37 37 37 37 37 37 37 The substrate adsorption device E1 ^ machi's central portion of the glass substrate S is surely adsorbed and fixed by each of the first or second substrate adsorption devices £1 or £2. At this time, the central portion of the glass substrate S is fixed by adsorption of each of the first or second substrate adsorption devices E1 or E2, thereby reducing the inversion and bending of the glass substrate. Next, the adsorption operation is performed on each of the first or second substrate adsorption devices E? or E2 on the adsorption mounting table 37*1 or 371) provided at the tip end portion or the rear end portion. In this way, the first or second substrate adsorbing device of the first end portion has a thickness of 1 or 2, and the inner surface of the glass substrate S is sequentially contacted and adsorbed from the center portion side toward the tip end portion side.

From the intermediate portion where the reversal is small, the adsorption to the tip end portion or the rear end portion which is largely reversed can not only be reversed or twisted by the glass substrate S, but also can be surely adsorbed and fixed. Further, the adsorption mounting table is not limited to the center portion, the tip end portion, and the rear end portion 3, and may be increased depending on the size of the glass substrate S, and may be disposed from a portion where the center portion is not turned over to a region where the turnover is large. . Next, a seventh embodiment of the present invention will be described. In addition, the detailed description of the same portions as those in FIGS. 5 and 6 is omitted here. Fig. 18 is a structural view of the air floating upper conveying device. On both sides of the floating transport platform 1, one adsorption mount 37 is provided. The adsorption mounting table 37 is juxtaposed in the same direction as the transport direction T of the glass substrate S.

Page 32 1327986 V. INSTRUCTIONS (28) A plurality of first or second substrate adsorption devices E1 or E2 are provided. The first or wall-one substrate-adsorbing device E1 or E2 is connected to each of the regulators to the first or second substrate adsorbing devices E1 through the respective air suction paths of the other systems, as in the fifth embodiment. In the adsorption control method of the E 2 or the second substrate adsorption device E1 or E2, the glass substrate S is turned over from the center portion side of the d to the larger end portion, and the adsorption operation is sequentially performed. 0 such an adsorption control method, 'when the glass substrate S floating on the air is adsorbed and fixed on the floating transfer platform 30', each of the first or second substrate adsorption devices E1 or > from the intermediate portion side of the glass substrate S to the apex The side portions sequentially contact the inner surface ' of the glass substrate S and are adsorbed and fixed. By the adsorption fixing, the inversion of the glass substrate S is sequentially obtained from the intermediate side to the end side, and the first or second substrate adsorption devices E 1 or E 2 are from the intermediate portion to the end side. The glass substrate S is fixedly adsorbed. In addition, even if the first or second substrate adsorption devices E1 or E2 are operated at the same time, the glass substrate S is turned over from a small portion to a large portion to be sequentially adsorbed, thereby taking the winter glass substrate s according to the reference plane. The second substrate adsorption device E2 having a small degree of protrusion of the adsorption pad 52 can be surely adsorbed and fixed, and the glass substrate S which is greatly inverted on the well-known substrate device can be surely adsorbed and fixed according to the seventh embodiment described above. . Furthermore, the present invention is not limited to the above embodiments, and the following modifications may be made, for example, in the above embodiments, although they are used for the glass substrate S.

Page 33 !327986 V. INSTRUCTIONS (29) The air floats and transports, but it is also suitable for adsorbing and fixing the glass substrate S on the inspection platform on the glass substrate inspection unit. As shown in FIG. 19, a plurality of substrate adsorption devices E1 or £2 are a group of blocks (1) 1〇〇1〇111~114' and each block (131〇〇1〇111~114 may also be used). An individual air vacuum guiding system is formed. Each of the first substrate adsorbing device groups Η1 to Η4' is arranged with a plurality of substrate adsorbing device groups 沿着1 along the transport direction of the glass substrate S. Each of the first substrate adsorbing device groups m and Η2 Adjacent to each other, each of the first substrate adsorption device groups H3 and H4 is adjacent to each other. Further, the first substrate adsorption device groups H1 to H4 may be used for the second substrate adsorption device E2. Each of the first substrate adsorption devices Ε1' in the Η4 is connected to each of the regulators 110, and then the first substrate adsorption device groups Η1 to Η4 are connected to the other common vacuum tubes 1 1 1 to 1 1 4 . The first substrate adsorption device group Η 1 and the vacuum tubes in and 11 3 of the crucible 3 are connected in common, and are connected to the main regulator 1 15 5 . In addition, the vacuum tubes corresponding to the first substrate adsorption device groups H2 and H4 112, 114 are commonly connected, and in turn with the main regulator 115b According to the fifth embodiment, the first or second substrate adsorption device, E丨, and E2 can continue to adsorb the glass substrate S# even if air leakage occurs. In addition, the first substrate adsorption device group and H2, "and" are disposed adjacent to each other, wherein one of the first substrate adsorption device group and the other side of the first substrate adsorption device group 2 And Η 4 respectively constitute an individual air vacuum guiding system, and even if the adjacent first substrate adsorption device group Hb Η3 cannot be attracted, the adjacent adjacent substrate adsorption device Η2/Β|

1327986 V. INSTRUCTIONS (30) Glass substrate S. For example, the entire first substrate adsorption device group Η 1 can continuously adsorb and fix the glass substrate S by the adjacent first substrate adsorption device group 2 even if the gas is leaked.

Further, in the first embodiment, the shape of the contact surface portion 16c of the suction pad 16 may be a partial cross-sectional view as shown in Figs. 20A and 20D, and the top view shown in Fig. 20E. Deformation. The contact surface portion 16c shown in Fig. 20A intersects the inclined surfaces 120 and 121 to form an apex 122 having an obtuse angle. This vertex 122 is formed in the entire circumferential direction of the contact surface portion 16c. If such a suction pad 16 contacts the face portion 16c, the vertex 1 2 2 of the face portion 16c is contacted, and the inner wall 2a of the casing 1 is in line contact in the entire circumferential direction. The contact face 1 6 c shown in Fig. 20B forms a convex body 1 2 4 having an obtuse angle vertex 1 2 3 . The contact face portion 16c, the apex 1 2 3 of the convex body 1 2 4 also makes line contact with the inner wall 2 a of the sheath 1 in the entire circumferential direction. The contact surface portion 16c shown in Fig. 20C forms a hemispherical convex body 126 on the cylindrical curved surface body 125. In the case of the contact surface portion 16c, the convex body 12 6 also produces 'line contact with the inner wall 2a of the casing 1 in the 'peripheral direction'. The contact surface portion 16c shown in Fig. 20D is formed with a protruding strip body 127 on the cylindrical curved body 125. In the contact surface portion 16c, the protruding strip body 12 7 also makes line contact with the inner wall 2a of the sheath 1 in the entire circumferential direction.

In the contact surface portion 16c shown in Fig. 20E, at least three or more, for example, four protrusions 1 28 are formed on the outer peripheral surface of the cylindrical curved body 125. In the case of the contact surface portion 16c, each of the projections 12 will have a point contact with the inner wall 2a of the casing 1. In the above embodiments, it is described that the air is transported by air.

Page 35 1327986 V. INSTRUCTION OF THE INVENTION (31) The glass substrate is suspended by the first substrate of the first substrate, and the substrate is sucked by the substrate. In the case where the substrate on which the substrate is first adsorbed is electrostatically floated on the upper surface S, it is not limited to the air floating and the like, and is also applicable to the transport of the glass substrate S. Other features of the invention will be described below. According to a feature of the present invention, in a substrate adsorption method in which a substrate is adsorbed and fixed by a double adsorption device arranged along a side edge portion of a substrate, a substrate having a large projection height is used on the substrate tip end side of the substrate adsorption device, and the respective substrates are adsorbed and fixed. The substrate adsorption device and the substrate are horizontally separated, and the substrate is in the shape of a @ 丨丨 @ “ “ “ “ “ “ “ “ “ 第一 第一 第一 第一 第一 第一 第一 第一 第一 第一 第一 第一 第一 第一 第一 第一 第一 第一 第一 第一

= Adsorption and fixation of the glass substrate 'in the above-mentioned; = two features of the present invention. In the first feature of the present invention, the adsorption operation of the substrate adsorption device is performed before: The adsorption of the attached device is an ultra-fine substrate adsorption method. According to a first aspect of the present invention, in the feature of the first aspect of the present invention, the substrate adsorption method is characterized by the attachment of the device and the second substrate adsorption device. She started to absorb her

According to a fourth aspect of the present invention, the substrate adsorbing side of the substrate is adsorbed by the adsorption device of the substrate along the side edge of the substrate, and the substrate is adsorbed by the substrate in a smaller portion of the substrate. 2 For the substrate adsorption method characterized by the above. Q% V. The present invention features a substrate adsorption method 7 for adsorbing and fixing the substrate along the side edge of the substrate.

Mil

Page 36 1327986 V. Description of the Invention (32) Each of the plurality of substrate adsorption devices is provided with an air vacuum guiding system for each of the above air vacuum guiding systems to operate simultaneously. The substrate is flipped to a larger portion, and the substrate adsorption device sequentially adsorbs the substrate, thereby correcting the inversion of the substrate, and the substrate adsorption method of the above feature. Industrial Applicability The present invention is applicable to the transportation of a glass substrate of a liquid crystal screen on an LCD manufacturing line, and the transfer of a semiconductor wafer and various parts on a semiconductor manufacturing line.

Page 37 1327986 Brief Description of the Drawings Brief Description of the Drawings Fig. 1 is a configuration diagram of a first embodiment of the substrate adsorption apparatus of the present invention. Fig. 2 is a configuration diagram showing another example of the adsorption portion of the adsorption pad of the substrate adsorption device of the present invention. Figure 3 is a configuration diagram of the first and second support plates of the substrate adsorption device. Fig. 4A is a view showing a state in which the adsorption pad of the substrate adsorption device starts to simulate a curved glass substrate. Fig. 4B is a view showing the state of adsorption of the adsorption pad of the substrate adsorption device and the glass substrate which is bent. Fig. 4 is a diagram showing the corrective action when the adsorption pad of the substrate adsorption device and the glass substrate for bending are adsorbed. Fig. 5 is a top view showing the configuration of an air floating upper transfer device to which the substrate adsorption device of the present invention is applied. Fig. 6 is a side view showing the configuration of an air floating upper transfer device to which the substrate adsorption device of the present invention is applied. Fig. 7 is a view showing the configuration of an inspection procedure of a large-sized substrate inspection apparatus to which the substrate to the present invention and the attached device are applied. Fig. 8 is a view showing the configuration of a characteristic portion of a second embodiment of the substrate adsorbing device of the present invention. Fig. 9A is a configuration diagram showing a modification of a steel wire used in the substrate adsorption apparatus of the present invention. Fig. 9B is a configuration diagram showing another modification of the steel wire used in the substrate adsorption apparatus of the present invention. Figure 10 is a configuration of a modification of the adsorption pad of the substrate adsorption device of the present invention.

Page 38 1327986 Schematic description of the diagram. Figure 11 is a configuration diagram of a third embodiment of the substrate adsorption device of the present invention. Fig. 12 is a view showing the state in which the adsorption pad and the glass substrate of the substrate adsorption device start to be adsorbed. Fig. 12 is a view showing a state in which the adsorption pad of the substrate adsorption device and the glass substrate are in proper contact with each other. Fig. 12 is a view showing the state of adsorption of the adsorption pad and the glass substrate of the substrate adsorption device of the C system.

Figure 13 is a view showing the configuration of a characteristic portion of a fourth embodiment of the substrate adsorbing device of the present invention. Fig. 14 is a view showing the configuration of a large-sized substrate transfer robot to which the substrate adsorption device of the present invention is applied. Fig. 15 is a view showing the configuration of an air floating upper conveying device to which the first and second substrate adsorbing devices are applied in the fifth embodiment of the present invention. Fig. 16 is a view showing an air vacuum suction system used in the substrate adsorption apparatus of the present invention. Fig. 17 is a configuration diagram of an air floating upper transfer device applied to a substrate adsorption device in a sixth embodiment of the present invention.

Fig. 18 is another configuration diagram of an air floating upper conveying device which is applied to the substrate adsorbing device in the sixth embodiment of the present invention. Fig. 19 is a view showing another modification of the air vacuum suction system used in the substrate adsorption device of the present invention. Fig. 20A is a deformation diagram showing the shape of the contact surface of the adsorption pad. Figure 20B is another deformation diagram showing the shape of the contact surface of the adsorption pad.

Page 39 1327986 BRIEF DESCRIPTION OF THE DRAWINGS Figure 20c shows still another variation of the shape of the contact surface of the adsorption pad. Figure 20D shows still another modification of the shape of the contact surface of the adsorption pad. Fig. 20E shows another deformation diagram of the shape of the contact surface of the adsorption pad. DESCRIPTION OF SYMBOLS 1...................Shell 2 ................... Hollow part 3 ... ................Installation table 4........................ Body 5 .......... .........Air Guide Path Lu 6........................Nuts 7 .............. .....Ditch 8 .................. 0-shaped 裒9................... .Folding member 10 ................... Thick cylindrical portion 11···...................... Cylinder. 12 ...................

13 .................. V-shaped I 14 .................. Air guiding path 15 ... ................Hose parts Lu 16........................Adsorption pad 16c....... ............Contact face 16d...................Air suction hole 17............ .......flexion

Page 40 1327986 Simple illustration of the figure 18 ................... Screw part 19 ................... Air guiding passage 20 . . ....... ring segment difference 21 ................... first fixing plate 22 ................... Annular section difference 23........................Second fixing plate 24 .. .................Network 25 ...................Spring 26 ......... ..........Spring adjustment member 27 ................... Height adjustment structure calls 28 ............ .......screws 29 ...................annular parts 30 ................. .. floating on the transport platform 31...................air blowout hole 32.................. Rail 33 ................... Guide rail 34 ...................Transportation section 3 5... ................Transporting section 36...................Supporting material 37 ......... ..........Adsorption device Tailu 37a...................Adsorption device table 37b............ .......Adsorption device table 37c...................Adsorption device table 4 0............... ....curved glass substrate

Page 41 1327986 Schematic description 41.................. Platform body 4 2.................. • Hollow portion 43........................ Bending prevention stack 44................... Support bolt 45. ..................Thread 46...................Wire body 47....... ............first stop 48...................second stop 49....... ............Wire 4 9b...................sphere · 49c............ ...... • Receiving part 50 ...................Shell 51 .................. .Fixed hole 5 2...................Adsorption pad 52a..................Contact face 53.. ................. Hollow part · · 5 4.................. • Adsorption surface 54a..... .............pad recess 54b..................air suction hole 55........... ........Twisted shape part Φ 5 6................... Accepting surface 5 7............. ...planar portion 58...................Conical portion 5 9................ .. hollow

Page 42 1327986 Schematic description 60......... 60a........ 61......... 62......... 63.. ....... 65.........70 .........71 .........72 ......... 73 .. ....... 7 4......... 80......... 81......... 90 ......... 91 . ........ 92 ......... 93 ......... 94-1... 94-2... 94- 3... 9 4 - η... ... 95- 1...... 95-2... 95-3...... .Fixed material bellows. Air guide passage assembly body screw part air guide passage recessed screw anti-loose nut base air arm arm manual hand adjustment The road junction reference squirt § 々卩々卩々卩 is the same with the same 03⁄4 σ<σ mouth ts&B1s0ttt\D"0Bf\&"0"° section of the same week

Page 43 1327986 Schematic description 9 5 - η................ Regulator 96 ................... Vacuum tube 97 ...................vacuum tube 98 ...................air pressure gauge 99 .... ...............air pressure gauge 100 ..................vacuum tube 101 ........... ....... vacuum tube 102...................air pressure gauge 103 .................. Air Pressure Gauge 104 .................. • Main Regulator Lu 104a·.· . . . ....... Master Regulator 104b..................main regulator 105...................air suction source 106a.... ........... • Air pressure gauge 106b................air pressure gauge 110 .............. ....••Regulator 111 .................. Vacuum tube 112.................. Vacuum tube 114. ................. Vacuum tube 1 15a...................Main regulator called 1 15a..... ..............Main regulator 120 .................. • Inclined surface 121 .......... ........ • Inclined surface 122 ................... vertex

Page 44 1327986 Schematic description 123......................................................................................................................................................................... • convex body 125 ................... cylindrical curved body 126 .................. • convex Body 127 ...................protrusion band 128 ...................protrusion ΙΙΙΙΙ··ΙΙΙΙΙ 45 pages

Claims (1)

1327986 Patent No. 93111648 Patent Application Revision 1 1. A substrate adsorption device having: 96/4/21 Μ a casing: a hollow hollow body; and an adsorption pad: disposed in a hollow shape of the casing to move up and down, and can swing the head in a direction crossing the casing axis; and the adsorption pad supporting member: in the foregoing The air guiding passage is provided in the casing for elastically supporting the adsorption pad; and the suction device is configured to perform the suction of the air guiding passage of the adsorption pad supporting member to perform the suction operation; and stopping the cup. The suction action of the suction device To limit the decrease of the above adsorption enthalpy; the above components are characterized as being characteristic. 2. The substrate adsorbing device according to claim </RTI> wherein the suctioning action of the suction device restricts the lowering of the upper ship _, and the slanting horizontal state is also corrected. 3. The substrate adsorption device according to claim 2, wherein the lining pad has a contact portion having an outer diameter larger than that of the opening d of the sheath, and the rhyme portion serves as a stop rod, When the suction action of the suction device is performed, the descending adsorption portion of the cover of the sheath is also characterized by the horizontal contact with the surface of the open end of the sheath. The substrate adsorption device of the above aspect, wherein the stop rod is inside the sheath The bottom of the adsorption pad is provided with an adsorption portion having a planar adsorption surface, and the suction operation of the suction device is performed while restricting the lowering of the adsorption pad by the adsorption surface. The bottom of the adsorption portion corrects the inclination of the adsorption pad by the contact with the adsorption surface. The horizontal state is its characteristic. The substrate adsorption device according to the first aspect of the invention, wherein the lining is formed by an adsorption portion having a absorbing surface formed in a plane protruding more than a front end of the vine; and integrally formed with the adsorption portion A contact surface having at least three points of support contact with the inner wall surface of the brittle end is a feature. The substrate adsorption device according to claim 5, wherein the contact surface portion is characterized by a contact curved surface with a circumferential direction of an inner wall surface of the sheath. The substrate adsorption device according to claim 5, wherein the contact surface of the substrate is characterized in that a triangular contact portion is formed in a line contact cross section corresponding to the inner wall surface of the casing. The substrate adsorbing device according to the above aspect, wherein the contact surface portion is characterized in that a line-shaped contact portion corresponding to a peripheral direction of the inner wall surface of the sheath forms a hemispherical projection. The substrate adsorbing device according to the invention, wherein the contact surface is characterized in that the inner surface of the casing has three or more point contacts formed corresponding to the peripheral direction of the inner wall surface of the casing. For example, in the substrate adsorption device described in the above-mentioned patent application, the cartridge is configured such that the adsorption pad is not pulled out from the hollow end of the front end of the casing, and is held in the hollow portion of the front end by the adsorption 塾 fixing member. Its characteristics. The substrate adsorption device according to claim 10, wherein the adsorption pad fixing member is composed of a first support portion provided on the adsorption pad, and an air provided in the adsorption pad fixing portion of the sheath. The second support portion of the guide passage and the linear connecting member connecting the first and second support portions are characterized by the configuration. The substrate adsorption device according to claim 10, wherein the connecting member is formed by reciprocating horizontally adjusting a force applied to the support portion of the adsorption pad by the adsorption pad, by which the string is tied The situation to adjust the power generated is its characteristic. The substrate adsorption device according to claim 10, wherein the connecting member is composed of a steel wire having a twisting rigidity to prevent the adsorption pad from rotating, and both ends of the steel wire are fixed at the first and The second support portion is characterized by it. The substrate adsorption device according to claim 1, wherein the adsorption enthalpy on the sheath and the movement of the attachment portion-body along the inner surface of the sheath can adjust the height of the suction surface protruding from the front end surface. An adsorption portion having an adsorption surface formed on a flat surface having a more protruding front end; and a measuring surface having at least three points of contact with the adsorption portion-body and the front end portion of the sheath _ the wall is provided with suction _ And the suction member is integrated with the front ship _ Xia Shou (4) and moves inside the hollow shape and the inside of the hollow shell, and the south side adjusting device for adjusting the adsorption surface of the adsorption pad at the end of the protective shell is Its characteristics. The substrate adsorption device according to claim 14, wherein the height adjustment device is a screw portion formed in an inner wall surface of the hollow portion of the sheath, and a retractable suction rod screwed to the screw The material adsorption device described in claim 1, wherein the adsorption device is The support portion is composed of an aluminum (four) hose member formed on the upper portion of the bellows buckling portion adhered to the inner surface of the adsorption pad, and a negative pressure at the time of suction operation by the suction device, because of the contraction of the bellows-shaped buckling portion, adsorption The adsorption pad of the substrate to be adsorbed is lowered in the casing to determine the position of the substrate to be adsorbed on the reference plane.