JP6142214B2 - Proximity exposure apparatus and proximity exposure method - Google Patents

Description

The present invention relates to a proximity exposure apparatus and a proximity exposure method, and more particularly, a proximity exposure apparatus suitable for exposing and transferring a mask pattern onto a substrate such as a large flat panel display such as a liquid crystal display or a plasma display. And a proximity exposure method.

In proximity exposure, a translucent substrate (material to be exposed) coated with a photosensitive agent on the surface is held on a work stage of an exposure apparatus, and the substrate is brought close to a mask held by a mask holder of a mask stage. The gap between the two is set to, for example, several tens of μm to several hundreds of μm, and the pattern drawn on the mask is exposed and transferred onto the substrate by irradiating the exposure light toward the mask by the irradiation device from the opposite side of the substrate of the mask. It is a thing.

By the way, in proximity exposure, there is a method in which the mask is made the same size as the substrate and is exposed in a lump. However, in such a method, when the mask pattern is exposed and transferred onto a large substrate, the mask becomes large and the mask is exposed. This causes problems in terms of the influence on the pattern accuracy due to the bending of the pattern and the cost. Under these circumstances, conventionally, when a mask pattern is exposed and transferred onto a large substrate, a mask smaller than the substrate is used, the work stage is moved stepwise relative to the mask, and the mask is moved to the substrate for each step. There is a case where a so-called stepwise proximity exposure method is used in which pattern exposure light is irradiated in a state of being closely arranged, whereby a plurality of patterns drawn on a mask are exposed and transferred onto a substrate.

The deflection of the mask has a great influence on the exposure accuracy. In particular, in a large mask, the deflection of the mask tends to increase, and it is desirable to reduce the deflection as much as possible. Conventionally, as a mask holding device for correcting the bending of a mask, the mask is sucked and held through a mask suction path formed in the mask holder, and an air suction path and an air are formed in a space constituted by the mask, the mask holder and the upper lid. It is known that an introduction path is connected, the pressure in the space is adjusted to a pressure that balances the weight of the mask, and the mask is bent in the direction opposite to the direction of gravity to cancel the deflection of the weight of the mask. (For example, refer to Patent Document 1). In addition, an exhaust pipe connected to the exhaust device and an introduction pipe connected to the air introduction device are connected to the space surrounded by the mask, the transparent plate, and the frame body to discharge the air in the space, An exposure apparatus in which air is introduced to correct the deflection of the mask is disclosed (for example, refer to Patent Document 2). In addition, the transparent plate glass is fixedly arranged in the frame of the vacuum suction frame for vacuum-sucking the mask, and the mask is vacuum-sucked by the vacuum suction frame and the transparent plate glass by vacuum suction of the air between the transparent plate glass and the mask. Some have improved mask holding power to prevent mask displacement (see, for example, Patent Document 3).

JP 2009-277900 A JP-A-8-82919 JP 2006-93604 A

  However, according to Patent Document 1, since the air supplied from the air introduction path is supplied to the air suction path and the mask suction path through the joint surface between the mask holder and the mask, only a small amount of air comes from the joint surface. Not supplied. Therefore, there is a possibility that the upper lid and the mask are immediately bent toward the inside of the mask holder and the mask and the upper lid are broken. Further, Patent Document 2 is for connecting an exhaust pipe connected to an exhaust apparatus and an introduction pipe connected to an air introduction apparatus to a space to discharge air, and to introduce and control the pressure in the space. Many control devices are required around the vacuum generator. Moreover, since the mask is attached to the frame-like body using a rubber pad, there is a risk that the cost will increase. According to Patent Document 3, there is no mechanism for introducing air from the outside, and there is a possibility that the inside of the space becomes excessively negative pressure and the mask and the transparent plate glass are damaged.

The present invention has been made in view of the above-described problems, and an object of the present invention is to be able to hold the mask while correcting the deflection of the mask with a relatively simple configuration, and to perform exposure transfer with high accuracy. An object of the present invention is to provide a proximity exposure apparatus and a proximity exposure method that can be used.

The above object of the present invention can be achieved by the following constitution.
(1) a substrate stage for holding a substrate as an exposed material;
A mask stage for holding a mask having a pattern to be exposed;
Irradiating means for irradiating the substrate with light for pattern exposure through the mask, and the mask and the substrate are placed close to each other with a predetermined exposure gap on the substrate. A proximity exposure apparatus for exposing and transferring the pattern of the mask,
The mask stage is
A mask holder for vacuum-sucking and holding the mask on the lower surface;
A cover glass held on the upper surface side of the mask holder;
A suction mechanism for sucking air in a space defined by at least the mask holder, the mask, and the cover glass to depressurize the space;
At least one air introduction path for supplying air from the outside into the decompressed space;
A mask frame that is vacuum-adsorbed and held on the lower surface of the mask holder and is driven by a mask drive unit;
Equipped with a,
The proximity exposure apparatus , wherein the air introduction path is an air introduction groove disposed at a joint portion between the cover glass and the mask holder .
( 2 ) The mask holder includes a protrusion or a recess on an upper surface, the mask frame includes a recess or a protrusion on a lower surface, and the protrusion or the recess of the mask holder is the recess or the protrusion of the mask frame. The proximity exposure apparatus according to (1), wherein the mask holder is held on a lower surface of the mask frame by engaging with a portion.
(3) the mask frame is described in the above (1) or (2), characterized by further comprising a mask holder backup mechanism for preventing falling from the mask frame of said mask holder and supporting said mask holder Proximity exposure equipment.
( 4 ) The proximity exposure apparatus according to (1), wherein the mask holder includes a holding mechanism that holds the cover glass at a predetermined position of the mask holder.
( 5 ) The proximity exposure apparatus according to ( 4 ), wherein the mask holder is selected so that the surface density thereof is higher than the surface density of the mask.
( 6 ) Using the proximity exposure apparatus according to any one of (1) to ( 5 ) above, the mask and the substrate are placed close to each other with a predetermined exposure gap, and the mask is placed on the substrate. A proximity exposure method for exposing and transferring a pattern,
Holding the mask by vacuum suction of the mask to the lower surface of the mask holder;
Adjusting the pressure in the space to a predetermined pressure by sucking the pressure in the space by the suction mechanism and supplying the external air to the space through the air introduction path; A proximity exposure method comprising:

According to the proximity exposure apparatus and the proximity exposure method of the present invention, the mask stage includes a mask holder that holds the mask by vacuum suction on the lower surface, a cover glass that is held on the upper surface side of the mask holder, at least the mask holder, the mask And a suction mechanism for sucking air in the space defined by the cover glass to decompress the space, at least one air introduction path for supplying air from the outside into the decompressed space, and a mask holder A mask frame that is vacuum-adsorbed and held on the lower surface and is driven by a mask driving unit. The mask is vacuum-sucked on the lower surface of the mask holder to hold the mask, and the suction mechanism sucks the pressure in the space and supplies external air to the space through the air introduction path. The internal pressure is adjusted to a predetermined pressure. As a result, the mask stage can hold the mask while correcting the deflection of the mask with a relatively simple configuration, and the mask pattern can be exposed and transferred onto the substrate with high accuracy. Further, since the mask frame holds the mask holder by vacuum suction on the lower surface, the mask frame and the mask holder can be easily disassembled, and repair work when the mask holder is damaged can be easily performed. Furthermore, since the air introduction path is an air introduction groove disposed at the joint between the cover glass and the mask holder, the air introduction groove can be provided inexpensively and simply by performing a slight process on the mask holder. .

It is a partially broken front view for demonstrating the proximity exposure apparatus of 1st Embodiment which concerns on this invention. It is sectional drawing which shows schematic structure of the mask stage shown in FIG. It is sectional drawing of the mask stage which a mask frame hold | maintains a mask holder with a short span. It is sectional drawing which decomposes | disassembles and shows the mask stage shown in FIG. It is a 1st modification of the proximity exposure apparatus of 1st Embodiment, and is principal part sectional drawing of the mask stage which shows the state which the protrusion part of a mask holder engages with the recessed part of a mask frame. It is a 2nd modification of the proximity exposure apparatus of 1st Embodiment, and is mechanism explanatory drawing of a mask holder backup mechanism. (A) is a principal part expanded sectional view of the mask stage of the 3rd modification of 1st Embodiment, (b) is a principal part expanded sectional view of the mask stage of a 4th modification. (A) is sectional drawing which shows schematic structure of the mask stage of 2nd Embodiment based on this invention, (b) is sectional drawing which shows the air introduction groove | channel formed in the junction part of a mask frame and a mask holder. It is sectional drawing equivalent to Fig.8 (a) which shows schematic structure of the mask stage of the modification of 2nd Embodiment.

Embodiments of a proximity exposure apparatus according to the present invention will be described below in detail with reference to the drawings. First Embodiment FIG. 1 is a partially broken front view of a proximity exposure apparatus according to a first embodiment of the present invention. As shown in FIG. 1, the proximity exposure apparatus PE uses a mask M smaller than the substrate W as a material to be exposed, holds the mask M on the mask stage 1, holds the substrate W on the work stage 2, and mask M The pattern of the mask M is exposed and transferred onto the substrate W by irradiating the mask M with pattern exposure light from the irradiating means 3 in a state where the substrate W and the substrate W are arranged close to each other with a predetermined exposure gap. To do. Further, the work stage 2 is moved stepwise relative to the mask M in the two axial directions of the X axis direction and the Y axis direction, and exposure transfer is performed for each step.

In order to move the work stage 2 stepwise in the X-axis direction, an X-axis stage feed mechanism 5 for stepping the X-axis feed base 5a as the first stage in the X-axis direction is installed on the apparatus base 4. On the X-axis feed base 5a of the X-axis stage feed mechanism 5, in order to move the work stage 2 stepwise in the Y-axis direction, a Y-axis stage in which the Y-axis feed base 6a as the second stage is step-moved in the Y-axis direction. A feed mechanism 6 is installed. The work stage 2 is installed on the Y-axis feed base 6 a of the Y-axis stage feed mechanism 6. On the upper surface of the work stage 2, the substrate W is held in a vacuum sucked state by a work chuck or the like. Further, a substrate side displacement sensor 15 for measuring the lower surface height of the mask M is disposed on the side portion of the work stage 2. Therefore, the substrate side displacement sensor 15 can move in the X and Y axis directions together with the work stage 2.

On the apparatus base 4, a plurality of (four in the embodiment shown in the figure) X-axis linear guide rails 51 are arranged in the X-axis direction, and each guide rail 51 has a lower surface of the X-axis feed base 5 a. A slider 52 fixed to the bridge is straddled. Thereby, the X-axis feed base 5 a is driven by the first linear motor 20 of the X-axis stage feed mechanism 5 and can reciprocate along the guide rail 51 in the X-axis direction. A plurality of guide rails 53 for Y-axis linear guides are arranged on the X-axis feed base 5a in the Y-axis direction. Each guide rail 53 has a slider 54 fixed to the lower surface of the Y-axis feed base 6a. Is straddled. Accordingly, the Y-axis feed base 6 a is driven by the second linear motor 21 of the Y-axis stage feed mechanism 6 and can reciprocate in the Y-axis direction along the guide rail 53.

  Between the Y-axis stage feed mechanism 6 and the work stage 2, since the work stage 2 is moved in the vertical direction, the vertical coarse motion device 7 having a relatively coarse positioning resolution but a large moving stroke and moving speed, and the vertical coarse motion Positioning with high resolution is possible as compared with the apparatus 7, and an up / down fine movement device 8 is installed to finely adjust the gap between the opposing surfaces of the mask M and the substrate W to a predetermined amount by finely moving the work stage 2 up and down. .

  The vertical coarse movement device 7 moves the work stage 2 up and down with respect to the fine movement stage 6b by an appropriate drive mechanism provided on the fine movement stage 6b described later. The stage coarse movement shafts 14 fixed at four positions on the bottom surface of the work stage 2 are engaged with linear motion bearings 14a fixed to the fine movement stage 6b, and are guided in the vertical direction with respect to the fine movement stage 6b. In addition, it is desirable that the vertical coarse motion device 7 has high repeated positioning accuracy even if the resolution is low.

  The vertical fine movement device 8 includes a fixed base 9 fixed to the Y-axis feed base 6a, and a linear guide guide rail 10 attached to the fixed base 9 with its inner end inclined obliquely downward. A ball screw nut (not shown) is coupled to a slide body 12 that reciprocates along the guide rail 10 via a slider 11 straddling the guide rail 10, and an upper end surface of the slide body 12. Is in contact with the flange 12a fixed to the fine movement stage 6b so as to be slidable in the horizontal direction.

  Then, when the screw shaft of the ball screw is rotationally driven by the motor 17 attached to the fixed base 9, the nut, the slider 11 and the slide body 12 are integrally moved along the guide rail 10 in an oblique direction. The flange 12a is finely moved up and down. Note that the vertical fine movement device 8 may drive the slide body 12 by a linear motor instead of driving the slide body 12 by the motor 17 and the ball screw.

The vertical fine movement device 8 is installed on one end side (left end side in FIG. 1) in the Y-axis direction of the Z-axis feed base 6a and two on the other end side, for a total of three units, and each is independently driven and controlled. It has become so. Accordingly, the vertical fine movement device 8 increases the heights of the three flanges 12a based on the measurement results of the gap amounts between the mask M and the substrate W at a plurality of locations by the gap sensor constituting the mask side displacement sensor 27 described later. Finely adjust the height and inclination of the work stage 2 by fine adjustment independently. In addition, when the height of the work stage 2 can be sufficiently adjusted by the vertical fine movement device 8, the vertical coarse movement device 7 may be omitted.

  On the Y-axis feed base 6a, a bar mirror 19 facing the Y-axis laser interferometer 18 that detects the position of the work stage 2 in the Y direction, and an X-axis laser that detects the position of the work stage 2 in the X-axis direction. A bar mirror (both not shown) facing the interferometer is installed. The bar mirror 19 facing the Y-axis laser interferometer 18 is arranged along the X-axis direction on one side of the Y-axis feed base 6a, and the bar mirror facing the X-axis laser interferometer is located on the Y-axis feed base 6a. It is arranged along the Y-axis direction on one end side.

  The Y-axis laser interferometer 18 and the X-axis laser interferometer are arranged so as to always face the corresponding bar mirrors and supported by the apparatus base 4. Two Y-axis laser interferometers 18 are installed apart from each other in the X-axis direction. The two Y-axis laser interferometers 18 detect the position of the Y-axis feed base 6a and consequently the work stage 2 in the Y-axis direction and the yawing error via the bar mirror 19. In addition, the X-axis laser interferometer detects the position of the X-axis feed base 5a and eventually the work stage 2 in the X-axis direction via the opposing bar mirror.

Referring also to FIG. 2, the mask stage 1 includes a mask base frame 24 formed of a substantially rectangular frame, and a central opening of the mask base frame 24 inserted through a gap so that X, Y, θ directions ( And a mask frame 25 supported so as to be movable in the X and Y planes. The mask base frame 24 is held at a fixed position above the work stage 2 by a support column 4a protruding from the apparatus base 4. Yes.

  A frame-shaped mask holder 26 is provided on the lower surface of the central opening of the mask frame 25. That is, a plurality of mask holder suction grooves 30 connected to a vacuum suction device (not shown) are provided on the lower surface of the mask frame 25, and the mask holder 26 passes through the plurality of mask holder suction grooves 30. Is adsorbed and retained.

A plurality of mask suction grooves 31 are formed on the lower surface of the mask holder 26 for sucking the peripheral edge of the mask M on which the mask pattern is not drawn. The mask M is not shown through the mask suction grooves 31. It is detachably held on the lower surface of the mask holder 26 by a vacuum suction device. A cover glass 32 is placed on the upper surface of the mask holder 26 so as to cover the opening of the mask holder 26. Thereby, the space 33 is defined by the mask holder 26, the mask M, and the cover glass 32.

A suction path 34 communicating with the space 33 is formed in the mask holder 26, and the suction path 34 is connected to the suction mechanism 40. Furthermore, on the upper surface of the mask holder 26, at least one (in this embodiment, a plurality) air introduction grooves that communicate the space 33 and the outside with a part of the joint that contacts the placed cover glass 32. An (air introduction path) 35 is formed. Therefore, the space 33 is in a state of being closed from the outside except for the air introduction groove 35. In FIG. 2, the mask suction groove 31, the suction path 34, and the air introduction groove 35 are shown in the same cross section. However, the present invention is not limited to this, and the suction path 34 and the air introduction groove 35 are at desired positions in a top view. Can be formed. For example, the suction path 34 may be formed at any position as long as the space 33 communicates with the outside of the mask holder 26. In addition, the dimension of the air introduction groove 35, that is, the cross-sectional dimension formed by the air introduction groove 35 and the cover glass 32 is set to a size that allows sufficient pressure adjustment by the suction mechanism 40.

The suction mechanism 40 includes a blower 42 and a negative pressure auxiliary tank 43 that are connected to the space 33 via the connection pipe 41 and suck the air in the space 33. In the middle of the connection pipe 41, a flow meter 44, a flow rate adjusting mechanism 45, and a pressure adjusting mechanism 46 are provided, and the pressure of the space 33 is adjusted to a predetermined pressure using these.

Specifically, by adjusting the flow rate adjusting mechanism 45 and the pressure adjusting mechanism 46, the air in the space 33 is sucked by the blower 42 and the negative pressure auxiliary tank 43 to reduce the pressure in the space 33. This corrects the bending of the mask M that is to be bent downward. Moreover, since external air flows into the space 33 through the air introduction groove 35 as the pressure in the space 33 is reduced, the pressure in the space 33 is the air from the space 33 by the blower 42 or the negative pressure auxiliary tank 43. It is determined by the balance between the suction amount and the inflow amount of the external air flowing in from the air introduction groove 35. Further, the thickness t of the mask holder 26 may be selected so that the surface density thereof is higher than the surface density of the mask M so that the mask holder 26 does not bend due to its own weight.

Accordingly, the pressure in the space 33 is measured by measuring the pressure difference between the pressure in the space 33 and the atmospheric pressure, or the pressure difference between the pressure in the space 33 and the mask suction groove 31 with a pressure gauge (not shown). The pressure can be adjusted to a predetermined pressure by adjusting the meter 44, the flow rate adjusting mechanism 45 or the pressure adjusting mechanism 46. In addition, except for the initial startup for achieving the above balance between the air introduction groove 35 and the suction mechanism 40, air is simply sucked from the space 33 by the suction mechanism 40 during operation. A stable pressure within 33 is obtained, whereby the deflection of the mask M can be corrected.

Further, when the pressure in the space 33 decreases, external air flows into the space 33 through the air introduction groove 35, so that the air in the space 33 is continuously sucked by the blower 42 and the negative pressure auxiliary tank 43. Even if it continues, the pressure in the space 33 will not fall too much, and the mask M and the cover glass 32 will not be damaged by an excessive pressure difference. The suction mechanism 40 may have a configuration having at least one flow meter 44, or may have a configuration having either one of the flow rate adjustment mechanism 45 or the pressure adjustment mechanism 46.

Further, as shown in FIG. 3, the mask frame 25 may be divided into a plurality of pieces so as to be close to and away from each other. Thereby, the mask holder 26 can be held with a short span in accordance with the size of the mask M (mask holder 26), and the deflection of the mask holder 26 can be corrected. As a result, the influence of the bending of the mask holder 26 can be suppressed, and the exposure accuracy is further improved.

Moreover, as shown in FIG. 4, since each member which comprises the mask stage 1 is adsorbed-held by vacuum adsorption, it can be decomposed | disassembled easily. Therefore, for example, when the mask M is sucked and held on the mask holder 26 by a robot (not shown), the mask holding surface (lower surface) of the mask holder 26 is scratched due to interference between the mask M and the mask holder 26. It becomes easy to disassemble and polish and repair the mask holding surface.

Returning to FIG. 1, above the mask holder 26, the mask side that constitutes a gap sensor that measures the height of the upper surface of the substrate W and measures the gap between the opposing surfaces of the mask M and the substrate W is measured. The alignment mark (not shown) of the displacement sensor 27 and the mask M, the alignment mark (not shown) provided on the substrate W side, or the reference alignment mark (not shown) provided on the work stage 2 or the mask base frame 24 Alignment cameras 28 as means for imaging (not shown) are movably arranged. The masking aperture mechanism 29 has a light shielding blade (not shown) that limits the exposure range by shielding the exposure light in an arbitrary range on the mask M held by the mask frame 25 as necessary.

As described above, according to the proximity exposure apparatus PE of the present embodiment, the mask stage 1 includes the mask holder 26 that holds the mask M by vacuum suction on the lower surface, and the cover that is held on the upper surface side of the mask holder 26. A suction mechanism 40 that sucks air in a space 33 defined by the glass 32, the mask holder 26, the mask M, and the cover glass 32 to depressurize the space 33, and the decompressed space 33 from the outside. And at least one air introduction groove 35 for supplying air. Then, the mask M is vacuum-sucked to the lower surface of the mask holder 26 to hold the mask M, the pressure in the space 33 is sucked by the suction mechanism 40, and external air is sucked into the space 33 through the air introduction groove 35. The pressure in the space 33 is adjusted to a predetermined pressure. As a result, the mask stage 1 can hold the mask M while correcting the deflection of the mask M with a simple configuration, and the pattern of the mask M can be exposed and transferred onto the substrate W with high accuracy.

Further, since the air introduction groove 35 is disposed at the joint portion between the cover glass 32 and the mask holder 26, the air introduction groove 35 can be provided easily and inexpensively by performing slight processing on the mask holder 26. it can.

Furthermore, since the mask stage 1 includes the mask frame 25 that holds the mask holder 26 by vacuum suction on the lower surface and is driven by the mask drive unit, the mask frame 25 and the mask holder 26 can be easily disassembled. The repair work when the mask holder 26 is damaged can be easily performed.

FIG. 5 is a first modification of the first embodiment, and the mask frame 25 has a recess 25 a formed on the joint surface with the mask holder 26. Further, the mask holder 26 is formed with a projection 26a opposite to the recess 25a. When the mask holder 26 is vacuum-sucked to the mask frame 25, the mask frame 25 can be held on the mask holder 26 with high positional accuracy by engaging the protrusions 26a with the recesses 25a.

Further, when the mask holder 26 is bent, slipping may occur between the mask holder 26 and the mask M, and the bending state of the mask M may change. However, the concave portion 25a of the mask frame 25 and the mask holder 26 may be changed. By engaging the projection 26a, the bending of the mask holder 26 is suppressed, and the influence on the mask M is reduced. Furthermore, the engagement between the recess 25a and the protrusion 26a also functions as a fall prevention device for the mask holder 26. In addition, although the recessed part 25a was formed in the mask frame 25 and the projection part 26a was formed in the mask holder 26, conversely, the projection part was provided in the mask frame 25, the recessed part was provided in the mask holder 26, and both were engaged. You may make it do.

FIG. 6 is a second modification of the first embodiment and is a mechanism explanatory view of a mask holder backup mechanism. The mask holder backup mechanism 60 includes a mask holder support 61 and a drive mechanism 62. A mask holder receiving portion 61 a that is an inclined surface that can be engaged with an inclined surface 26 b provided on the lower outer peripheral edge portion of the mask holder 26 is formed at the tip of the mask holder support 61. The mask holder support 61 is guided by a guide member 63 provided on the lower surface of the mask frame 25 and can move in a direction approaching or separating from the mask holder 26.

The drive mechanism 62 is an air cylinder mechanism, and the mask holder support 61 is fixed to the piston rod 65 of the air cylinder 64. Then, by operating the air cylinder 64 and extending the piston rod 65, the mask holder receiving portion 61a of the mask holder support 61 is engaged with the inclined surface 26b of the mask holder 26 to support the mask holder 26 from below. Even if the pressure in the mask holder suction groove 30 fluctuates, the mask holder 26 can be reliably prevented from falling from the mask frame 25.

The mask holder 26 has a mechanism similar to the mask holder backup mechanism 60, and a mask backup mechanism configured not to protrude downward from the lower surface of the mask M is disposed to support the lower surface of the mask M, The mask M may be prevented from falling or bending.

FIG. 7A is an enlarged cross-sectional view of a main part of a mask stage according to a third modification of the first embodiment, and a holding mechanism that holds the cover glass 32 placed on the upper surface of the mask holder 26 in a predetermined position. 70. The holding mechanism 70 is rotatable about a base 71 fixed to the upper surface of the mask holder 26 and a pin 72 provided on the base 71, and is a glass presser arranged over the entire circumference of the mask holder 26. 73. As shown by a broken line in the figure, the glass presser 73 is placed in a vertical state after the cover glass 32 is placed on the upper surface of the mask holder 26, and then rotated approximately 90 ° to be in a horizontal state. The cover glass 32 is fixed to a predetermined position of the mask holder 26 by pressing the upper surface. Thereby, the deviation of the cover glass 32 is prevented, and the influence on the exposure accuracy due to the deviation of the cover glass 32 is eliminated.

FIG. 7B is an enlarged cross-sectional view of a main part of a mask stage according to a fourth modification of the first embodiment. As a holding mechanism, a rubber is provided between the periphery of the cover glass 32 and the step of the mask holder 26. A packing 74 formed of an elastic body such as is arranged. Thereby, the cover glass 32 is fixed to the predetermined position of the mask holder 26, and the shift | offset | difference of the cover glass 32 can be prevented. In the third and fourth modifications, the holding mechanism 70 and the packing 74 may be arranged so that the air introduction groove 35 is secured, or the holding mechanism 70 formed on the entire circumference of the cover glass 32 or The air introduction groove 35 may be formed so as to bypass the packing 74.

Second Embodiment FIG. 8A is a cross-sectional view showing a schematic configuration of a mask stage according to a second embodiment of the present invention, and FIG. 8B is a cross-sectional view showing an air introduction groove. The present embodiment is different from the first embodiment in the configuration of the mask stage, and the other parts are the same as those in the first embodiment. Therefore, the same or equivalent parts as those in the first embodiment have the same reference numerals or equivalents. The description is simplified or omitted with reference numerals.

A plurality of cover glass adsorption grooves 36 for adsorbing the peripheral edge of the cover glass 32 are formed on the lower surface of the mask frame 25, and the cover glass 32 is vacuum-sucked (not shown) via the cover glass adsorption groove 36. The apparatus is held by vacuum suction on the mask frame 25 by the apparatus. A mask holder 26 is fixed to the lower surface of the mask frame 25 substantially integrally with the mask frame 25 by a fastening member such as a bolt. As a result, a space 33 is defined by the mask frame 25, the mask holder 26, the mask M, and the cover glass 32.

Further, as shown in FIG. 8B, the space 33 and the outside communicate with a part of the joint portion with the mask holder 26 on the side of the mask frame 25 where the cover glass suction groove 36 is not opened. At least one air introduction groove (air introduction path) 35 is formed. It is preferable to provide an air introduction groove (air introduction path) 35 at the center of the mask holder 26 so that a pressure difference does not occur inside the mask holder 26. Therefore, the space 33 is in a state of being closed from the outside except for the air introduction groove 35. In the present embodiment, the air introduction groove 35 is formed on the mask frame 25 side, but may be formed on the mask holder 26 side, and the number of the air introduction grooves 35 is arbitrary.

As described above, according to the proximity exposure apparatus PE of the present embodiment, the mask stage 1 includes the mask frame 25 to which the mask holder 26 is attached to the lower surface and the cover glass 32 is vacuum-sucked and held on the lower surface, Since the space 33 defined by the mask frame 25, the mask holder 26, the mask M, and the cover glass 32 communicates with the outside by the air introduction groove 35 provided at the joint between the mask frame 25 and the mask holder 26, The same effect as the proximity exposure apparatus PE of the first embodiment shown in FIG.

FIG. 9 is a schematic configuration of a mask stage according to a modification of the second embodiment, and is a cross-sectional view corresponding to FIG. In the mask stage 1 of this modification, a seal member 37 such as an O-ring is disposed outside the cover glass suction groove 36 at the joint between the cover glass 32 and the mask frame 25 held by vacuum suction. Air leakage is prevented. Note that the air introduction groove (not shown) is a part of the joint between the mask frame 25 and the mask holder 26 on the side of the mask frame 25 where the cover glass adsorption groove 36 is not opened, as in FIG. 8B. Is formed.

In addition, this invention is not limited to each embodiment and modification which were mentioned above, A deformation | transformation, improvement, etc. are possible suitably. In addition, in the said embodiment, although the air introduction path of this invention was comprised by the air introduction groove | channel 35, it is not restricted to this, For example, the through-hole which connects the space 33 and the exterior is made into the mask holder 26 or cover glass. You may comprise by forming in 32.

M Mask PE Proximity exposure apparatus W Substrate 1 Mask stage 2 Work stage (substrate stage) 3 Irradiation means 25 Mask frame 25a Recess 26 Mask holder 26a Projection 32 Cover glass 33 Space 35 Air introduction groove (air introduction path) 40 Suction mechanism 60 Mask holder backup mechanism 70 Holding mechanism 73 Glass presser (holding mechanism) 74 Packing (holding mechanism)

Claims (6)

A substrate stage for holding a substrate as an exposed material;
A mask stage for holding a mask having a pattern to be exposed;
Irradiating means for irradiating the substrate with light for pattern exposure through the mask;
A proximity exposure apparatus that exposes and transfers a pattern of the mask onto the substrate in a state in which the mask and the substrate are placed close to each other with a predetermined exposure gap.
The mask stage is
A mask holder for vacuum-sucking and holding the mask on the lower surface;
A cover glass held on the upper surface side of the mask holder;
A suction mechanism for sucking air in a space defined by at least the mask holder, the mask, and the cover glass to depressurize the space;
At least one air introduction path for supplying air from the outside into the decompressed space;
A mask frame that is vacuum-adsorbed and held on the lower surface of the mask holder and is driven by a mask drive unit;
Equipped with a,
The proximity exposure apparatus , wherein the air introduction path is an air introduction groove disposed at a joint portion between the cover glass and the mask holder . The mask holder includes a protrusion or a recess on the upper surface,
The mask frame includes a recess or a protrusion on the lower surface,
The said mask holder is hold | maintained on the lower surface of the said mask frame by the said projection part or recessed part of the said mask holder engaging with the said recessed part or projection part of the said mask frame. Proximity exposure device. The mask frame, proximity exposure apparatus according to claim 1 or 2, further comprising a mask holder backup mechanism for preventing falling from the mask frame of said mask holder and supporting said mask holder. The proximity exposure apparatus according to claim 1, wherein the mask holder includes a holding mechanism that holds the cover glass at a predetermined position of the mask holder. 5. The proximity exposure apparatus according to claim 4 , wherein the mask holder is selected so that the surface density thereof is higher than the surface density of the mask. Using the proximity exposure apparatus according to any one of claims 1 to 5 , the pattern of the mask is formed on the substrate in a state where the mask and the substrate are placed close to each other with a predetermined exposure gap. A proximity exposure method for exposure transfer,
Holding the mask by vacuum suction of the mask to the lower surface of the mask holder;
Adjusting the pressure in the space to a predetermined pressure by sucking the pressure in the space by the suction mechanism and supplying the external air to the space through the air introduction path; A proximity exposure method comprising: