KR20060008319A - Substrate suction device - Google Patents

Abstract

A suction pad (16) is placed on a tube member (15) in an opening portion (1b) of a housing (1). The suction pad (16) has a suction portion (16a) and a hemispherically curved contact surface portion (16c) being in point-contact at at least three points with the inner wall of the opening portion of the housing (1). A fine thread (24) is stretched between the suction pad (16) and a sliding member (9).

Description

Substrate adsorption device {SUBSTRATE SUCTION DEVICE}

TECHNICAL FIELD This invention relates to the board | substrate adsorption apparatus which adsorbs and hold | maintains thin board | substrates, such as a glass substrate or a semiconductor wafer, used for a flat panel display (it abbreviates to FPD hereafter), for example.

In order to adsorb | suck and hold a large thin plate-shaped glass substrate, it is necessary to reliably adsorb | suck even if a curvature and a deflection generate | occur | produce in a glass substrate. For this reason, it is required for the adsorption part to move with high degree of freedom in accordance with the bending and deflection of the glass substrate. In the adsorption | suction apparatus disclosed by Unexamined-Japanese-Patent No. 10-86086, the clearance gap is provided between a suction pad and a press body. This gap can tilt the adsorption pad. When the inclination of the adsorption pad is increased, the glass substrate is moved in the horizontal direction when the glass substrate is adsorbed due to the gap between the adsorption pad and the pressing frame. If a suction pad moves horizontally, a glass substrate will shift | deviate. For this reason, while positioning a glass substrate with high precision becomes impossible, a glass substrate shakes during conveyance and it cannot become stable conveyance.

In order to position the glass substrate with high accuracy or to prevent the glass substrate from swinging during transportation, if the gap between the suction tool and the receiving hole is made small, the movement of the suction tool in the tilting direction is regulated. For this reason, it becomes difficult to incline a suction pad according to the curvature or deflection of a glass substrate.

According to a main aspect of the present invention, the suction pad support member is formed in a hollow shape, has a opening portion at an end portion, is provided in a hollow shape of the housing, and is provided with an air suction passage for sucking air. An adsorption pad mounted on the adsorption pad support member in a protruding state and capable of shaking by contacting the opening of the housing with at least three points, and having an air suction hole in airtight communication with the air suction passage; There is provided a substrate adsorption device provided with an adsorption pad holding means for holding an adsorption pad in an opening of a housing.

BRIEF DESCRIPTION OF THE DRAWINGS The block diagram which shows 1st Embodiment of the board | substrate adsorption apparatus which concerns on this invention.

2 is a configuration diagram showing another example of an adsorption portion of an adsorption pad in the apparatus.

3 is a configuration diagram of first and second support plates in the apparatus.

4A is a diagram showing a starting state along a deflected glass substrate of an adsorption pad in the apparatus.

Fig. 4B is a diagram showing the adsorption state of the adsorption pad on the deflected glass substrate in the apparatus.

Fig. 4C is a diagram showing the corrective operation of the glass substrate by the suction pad in the apparatus.

5 is a top configuration diagram of an air flotation conveying device to which the device is applied.

6 is a side configuration diagram of the device.

7 is a configuration diagram of an inspection stage of a large substrate inspection device to which the device is applied.

It is a block diagram which shows the characteristic part of 2nd Embodiment of the board | substrate adsorption apparatus which concerns on this invention.

Fig. 9A is a configuration diagram showing deformation heat using a wire in the apparatus.

Fig. 9B is a configuration diagram showing deformation heat using a wire in the apparatus.

10A is a diagram illustrating a modification of the adsorption pad in the apparatus.

It is a block diagram which shows 3rd embodiment of the board | substrate adsorption apparatus which concerns on this invention.

It is a figure which shows the start state of the adsorption operation | movement to the glass substrate of the adsorption pad in the same apparatus.

It is a figure which shows the state which contact | connects the glass substrate of the adsorption pad in the same apparatus.

It is a figure which shows the adsorption state to the glass substrate of the adsorption pad in the same apparatus.

It is a block diagram which shows 4th embodiment of the board | substrate adsorption apparatus which concerns on this invention.

It is a block diagram of the arm part of the large board | substrate conveyance robot which applied the same apparatus.

FIG. 15: is a block diagram which shows 5th Embodiment which applied the 1st and 2nd board | substrate adsorption apparatus which concerns on this invention to an air floating conveyance apparatus. FIG.

The figure which shows the air vacuum suction system used for the said board | substrate adsorption apparatus.

It is a block diagram which shows 6th Embodiment which applied the board | substrate adsorption apparatus which concerns on this invention to the air floating conveyance apparatus.

18 is a configuration diagram showing a sixth embodiment in which the substrate adsorption device according to the present invention is applied to an air floating conveyance device.

It is a figure which shows the modified example of the air vacuum suction system in the board | substrate adsorption apparatus which concerns on this invention.

20A is a diagram showing a modification of the shape of the contact surface portion of the suction pad.

20B is a view showing a modification of the shape of the contact surface portion of the suction pad.

20C is a diagram illustrating a modification of the shape of the contact surface portion of the suction pad.

20D is a diagram showing a modification of the shape of the contact surface portion of the suction pad.

20E is a diagram showing a modification of the shape of the contact surface portion of the suction pad.

EMBODIMENT OF THE INVENTION Hereinafter, 1st Embodiment of this invention is described with reference to drawings.

1 is a configuration diagram of a substrate adsorption device E ₁ . The housing 1 is formed in a cylindrical shape having a hollow shape by a metal, and a hollow part 2 is formed therein. The opening part 1b which has the circular edge part 1a is formed in the front end side which is one end of this housing | casing 1. As shown in FIG. The screw part 1c is provided in the inner wall of the opening part of the original part which is the other end of this housing 1. As shown in FIG. Moped of the housing (1) is attached to the unit body 4 is installed on the mounting base (3) for the substrate adsorption unit (E _1).

The unit main body 4 has an outer diameter substantially coincident with the inner diameter of the housing 1, and is formed in the hollow shape which provided the air suction passage 5 inside. The thread part 4a is provided in the outer peripheral surface of this unit main body 4. As shown in FIG. Thereby, the housing 1 can be attached and detached with respect to the unit main body 4 by the screwing of the screw part 1c and the screw part 4a. A lower portion of the unit body 4, the threaded portion (4b) is provided so as to protrude for attachment with respect to the mounting base (3) for the substrate adsorption unit (E _1). The unit body 4 is attached about a threaded portion (4b) in the mounting base 3 by being coupled to the threaded portion and the thread of the mounting base (3) for the substrate adsorption unit (E _1), it can be desorbed.

The screw part 4c is provided in the hollow shape of this unit main body 4. As shown in FIG. Moreover, the screw part 4d is provided in the outer peripheral surface of the unit main body 4. As shown in FIG. The nut 6 is screwed on this screw part 4d. This nut 6 fixes the installation position of the unit main body 4 with respect to the housing | casing 1 by fastening to the screw part 4d.

The groove 7 is provided in the circumferential direction of the inner wall surface of the lower part of the housing 1. The position of this groove 7 corresponds to the tip end of the unit main body 3. An O-ring 8 for preventing air leakage is inserted between the groove 7 and the distal end of the unit body 3.

The sliding member 9 is provided in the hollow part 2 of the housing 1 and on the front end part side of the unit main body 3. This sliding member 9 can slide in the hollow part 2 of the housing 1 along the direction of the hollow part 2. This sliding member 9 integrally forms a thick cylindrical portion 10 and a thin cylindrical portion 11.

The thick cylindrical portion 10 is formed to a diameter approximately equal to the inner diameter of the hollow portion 2 of the housing 1, and its outer peripheral surface is in close contact with the inner surface of the hollow portion 2 of the housing 1. . The outer circumferential surface of the thick cylindrical portion 10 is provided with a groove 12, and a V-shaped packing 13 is provided in the groove 12. The V-shaped packing 13 is opened in a V-shape when vacuum suction is performed from the air suction passage 5 of the unit main body 4 and between the hollow portion 2 of the housing 1 and the sliding member 9. Maintain confidentiality by preventing air missing.

The thin cylindrical portion 11 is formed to a diameter approximately equal to the inner diameter of the air suction passage 5 of the unit main body 4, and its outer circumferential surface closely adheres to the air suction passage 5 of the unit main body 4. Doing. This thin cylindrical portion 11 is provided to be detachable from the air suction passage 5.

An air suction passage 14 is provided inside the thick cylindrical portion 10 and the thin cylindrical portion 11. This air suction passage 14 communicates with the air suction passage 5 of the unit main body 4.

In the upper part of the sliding member 9, the tube member 15 which is a suction pad support member is provided. The tube member 15 is formed in a cylindrical shape by an elastic member, and a curved portion 17 in the shape of a corrugated pipe (Japanese name: bellows) that is in close contact with the suction pad 16 is formed. This tube member 15 is screwed and mounted in the air suction passage 14 in the sliding member 9 by the screw portion 18. An air suction passage 19 is formed inside the tube member 15. The air suction passage 19 is in airtight communication with the air suction passage 14 of the sliding member 9.

The suction pad 16 is placed on the upper part of the tube member 15. This suction pad 16 protrudes from the opening end 1a of the housing 1. This suction pad 16 is formed of resin, such as engineering plastics, for example. The suction pad 16 is mounted on the tube member 15, so that the suction pad 16 can be shaken on the tube member 15. The adsorption pad 16 has an adsorption portion 16b having a planar adsorption surface 16a on its surface, and a contact surface portion 16c having a curved surface formed integrally on the back surface of the adsorption portion 16b. Is done. The air suction hole 16d is provided in the center part of this suction part 16b. The adsorption part 16b forms the outer diameter like the outer diameter of the housing 1. When the adsorption pad 16 descends in the housing 1, this adsorption | suction part 16b stops lowering by making the outer periphery edge 16e of surface contact with the opening end 1a of the housing 1 surface contact. Therefore, the opening end 1a of the housing 1 serves as a stopper for lowering the adsorption pad 16 and also maintains the inclination of the adsorption surface 16a of the adsorption pad 16 to become a reference plane. .

Although the adsorption | suction part 16b may be formed substantially equal to the outer diameter of the housing 1, even if it forms in the outer peripheral side from the outer peripheral surface of the housing 1 by length D as long as it shows in FIG. good. In the case of such an adsorption part 16b, the area of the adsorption surface 16a becomes large, and even if a glass substrate contacts any part of this adsorption surface 16a, the action point and the adsorption part of the force applied when this contact is made The distance from the center position P of 16b becomes long, and by this very small force, the adsorption pad 16 shakes on the tube member 15. As shown in FIG.

The contact surface part 16c is cylindrical, and the outer peripheral surface is curved in the hemispherical shape which has the largest diameter in the middle part of an up-down direction, and is formed. This contact surface part 16c has a largest outer diameter dimension slightly smaller than the inner diameter dimension of the hollow part 2 (opening end 1a) of the housing 1, and is the up-down direction in the opening part 1b of the housing 1. It is inserted to be movable to. The contact surface portion 16c is supported in point contact with at least three points with respect to the inner wall 2a of the hollow portion 2 of the housing 1. The contact between the contact surface portion 16c and the inner wall 2a of the hollow portion 2 of the housing 1 is not limited to only at least three points of contact, but the neck of the suction pad 16 As a result, the plurality of points in the same circumferential direction are in contact with the contact surface portion 16c, or they are in line contact on the line in the circumferential direction. The friction between the contact surface 16c and the inner wall 2a of the housing 1 by the contact between such a contact surface portion 16c and the inner wall 2a of the hollow portion 2 of the housing 1. The resistance is small, and the suction pad 16 can smoothly shake.

An annular step 20 is provided in the air suction hole 16d of the suction pad 16. The first support plate 21 shown in FIG. 3 is provided in this step 20. The first supporting plate 21 is formed in a disc shape, and two holes 21a and 21b for distributing air are provided.

In the air suction passage 14 of the sliding member 9, an annular step 22 is provided. The step 22 is provided with a second support plate 23 having the same shape as the first support plate 21.

Between these 1st support plate 21 and the 2nd support plate 23, it is connected by the thin thread 24 as a wire rod which is a connection member, for example. The thin thread 24 is not stretched with respect to tension and has a strong strength against disconnection, and is formed of, for example, a nylon resin as a soft wire. This thin thread 24 is always horizontally spaced apart from the first and second support plates 21 and 23 via the tube member 15, and is also horizontal to loosen the shaking state of the suction pad 16. It spreads by the tension which gives the tube member 15 the pushing force which enables return to a posture. In addition, with the tension of the thin thread 24, the bent portion 17 of the tube member 15 does not move away from the adsorption portion 16a, and it is possible to follow the inclination of the adsorption portion 16a and to shake the neck. Is letting go. The tension of this thin thread 24 can be adjusted when it unfolds between the 1st and 2nd support plates 21 and 23, for example, and the thin thread 24 is 1st or 2nd support plate 21, for example. , 23) can be adjusted to the bundle state when tied. The 1st support plate 21, the 2nd support plate 23, and the thin thread 24 comprise adsorption pad holding means.

The spring 25 which is an elastic member is provided in the air suction passage 14 in the thin cylindrical part 11 in the sliding member 9, and the air suction passage 5 of the unit main body 4. As shown in FIG. The spring 25 is formed by the sliding member 9 from the sliding member 9 in the hollow portion 2 of the housing 1 by integrating the suction pad 16, the tube member 15, and the sliding member 9. The pushing force is applied toward the opening end 1a side. The lower side of this spring 25 is locked by the spring adjustment member 26.

On the outer circumferential surface of the spring adjustment member 26, a threaded portion 26a is provided. The spring adjusting member 26 is screwed into the air suction passage 5 by screwing the screw portion 26a to the screw portion 4c of the air suction passage 5 of the unit main body 4. This spring adjustment member 26 is formed in an annular shape, and the air suction passage 26b is provided in the hollow part. The spring adjusting member 26 rotates by screwing the threaded portion 26a and the threaded portion 4c up and down in the air suction passage 5 to adjust the pushing force of the spring 25.

In the hollow part 2 of the housing 1, the suction pad height adjustment mechanism 27 is provided. The suction pad height adjustment mechanism 27 has an annular member 29 for adjustment that is screwed to the threaded portion 28 formed in the hollow portion 2 of the housing 1. This adjustment annular member 29 moves up and down in the hollow part 2 of the housing 1 by rotating about the screw part 28. As the up-and-down movement of the adjustment annular member 29 moves, the suction pad 16, the tube member 15, and the sliding member 9 are integrated to move up and down in the hollow portion 2 of the housing 1. Thereby, the height position A of the suction pad 16 with respect to the opening end 1a of the housing 1 is adjusted.

Next, it will be described with Fig. 4A ~ with respect to the absorption operation to a glass substrate (S) of the device (E ₁₎ configured as described above with reference to FIG 4C.

When the glass substrate (S) are conveyed on top of the substrate adsorption unit (E _1), the substrate adsorption device (E ₁₎ is raised by the lift mechanism. The glass substrate S is inclined, for example, by bending and deflection. A part of the adsorption surface 16a of the adsorption pad 16 comes into contact with the back surface of the glass substrate 40 in which the bending and deflection generate | occur | produce as shown in FIG. 4A by a raise of a board | substrate adsorption apparatus.

The suction pad 16 is placed on the tube member 15, and is pulled to the lower side of the housing 1 by the thin thread 24. As a result, the suction pad 16 can be shaken on the tube member 15, and the original posture, i.e., the suction surface 16a, which is stopped without shaking is not provided unless external force is applied. The pushing force which returns to a posture becoming a direction is added.

Therefore, since the adsorption pad 16 contacts the back surface of the glass substrate S with a very small adhesion force from the lower part of the glass substrate S, as shown in FIG. 4B, by the bending and deflection of the glass substrate S, You'll be shaken to follow the slope. That is, since the suction pad 16 shakes while inserting the contact surface part 16c into the opening part 1b of the housing 1, the outer peripheral edge 16e of the back surface of the adsorption part 16b is maximized by the housing ( It is possible to tilt to the angle of the neck contacting the end 1a of 1).

The suction pad 16 is shaken while the contact surface 16c is in point contact with at least three points of the inner wall of the opening 1b of the housing 1, so that the contact surface 16c and the opening of the housing 1 The frictional resistance between the inner wall of 1b) is small. As a result, even if the deflection and deflection of the glass substrate S are large, the adsorption surface 16a of the suction pad 16 is formed on the rear surface of the glass substrate S due to the inclination due to the deflection and deflection of the glass substrate S. As shown in FIG. Close contact

Since the outer diameter of the adsorption part 16a is formed the same as the outer diameter of the housing 1, the action point of the force applied when the glass substrate S contacts the outer periphery edge of the adsorption part 16a, and the adsorption part ( The distance from the center position of 16a) becomes long. Thereby, when a very small contact force is applied to the outer periphery edge of the adsorption part 16a by the contact with glass substrate S, the said contact force is a large rotational force which shakes the adsorption pad 16 by the action of a lever. Becomes

In this state, the air suction passage 14 of the sliding member 9, the air suction passage 19 of the tube member 15, and the air of the suction pad 16 from the air suction passage 5 of the unit body 4. When vacuum is sucked in through the suction hole 16d, these air suction passages 5, 14 and 19 and the air suction hole 16 are sealed and become negative pressure by vacuum suction. Thereby, the adsorption surface 16a of the adsorption pad 16 adsorb | sucks to the back surface of glass substrate S. As shown in FIG. At this time, even if the suction surface 16a of the suction pad 16 is bent or deflected on the glass substrate S, the suction surface 16a is in close contact with the rear surface of the glass substrate S. Vacuum suction of the glass substrate S reliably without leaking.

In addition, since each of the air suction passages 5, 14, 19 and the air suction hole 16 become negative pressure by vacuum suction, the suction pad 16, the tube member 15, and the sliding member 9 are caused by this negative pressure. ) Lowers the inside of the hollow part 2 of the housing 1 by resisting the spring force of the spring 25. As a result, the front surface of the outer circumferential edge 16e of the rear surface of the suction pad 16 is in surface contact with the opening end 1a of the housing 1 as shown in FIG. 4C. Since the opening end 1a of the housing 1 is a reference plane, the suction surface 16a of the suction pad 22 is arranged in the horizontal direction. As a result, glass substrate S is hold | maintained in a horizontal direction.

Since the contact surface part 16c and the inner wall of the opening part of the housing 1 contact, the adsorption pad 16 is restrict | limited in the horizontal direction. Even if the adsorption pad 16 adsorb | sucked to the back surface of glass substrate S by this restriction, glass substrate S can maintain a positioning state with high precision, without position shift.

As described above, according to the first embodiment, the housing 1 is curved on at least three points on the tube member 15 in the opening 1b of the housing 1 in a hemispherical shape. The adsorption pad 16 which formed the contact surface part 16c which contact-contacts the inner wall of the opening part of the opening part was mounted, and the thin thread 24 between the adsorption pad 16 and the sliding member 9 was lined up, Since the adsorption pad 16 can be inclined at a large inclination angle and the contact surface portion 16c and the inner wall of the opening of the housing 1 are in contact with each other even when inclined, the adsorption pad 16 is not shifted in the horizontal direction. .

The suction pad 16 has a high neck angle and a very small external force is applied, so that the neck movement can be performed smoothly and smoothly with a small frictional resistance, and the large bending and deflection of the glass substrate S can be achieved. By the inclination by this, it can adhere to the back surface of glass substrate S, and can adsorb | suck glass substrate S reliably, without leaking air.

Since the distance between the working point of the contact force on the adsorption part 16b and the center position of the adsorption part 16b when the glass substrate S contacted was lengthened, the adsorption pad 16 can be shaken with a very small contact force. It can be immediately followed by the large deflection and deflection of the glass substrate S. FIG.

When the adsorption pad 16 adsorb | sucks the glass substrate S, the negative pressure in each air suction passage 5, 14, and 19 and the air suction hole 16d beats the spring force of the spring 25, and the adsorption pad 16 is carried out. Is lowered, and the adsorption surface 16a is horizontally regulated by surface contact with the opening end 1a of the housing 1. By this restriction, the warpage and deflection of the glass substrate S adsorbed by the adsorption pad 16 can be horizontally corrected and can be maintained with high accuracy on the reference plane.

Since the suction pad 16 is connected by the thin thread 24, it does not depart from the opening end 1a of the housing 1.

Since the suction pad height adjustment mechanism 27 is provided, the height position A from the end 1a of the housing 1 of the suction pad 16 depends on the held height position of the glass substrate S. FIG. I can adjust it.

Next, with reference to the configuration of the second air portion carrying apparatus shown in FIGS. 5 and 6 with respect to the embodiment of the case of applying the substrate adsorption unit (E ₁₎ described in Embodiment 1 the air emerging transport apparatus Explain. 5 is a top view and FIG. 6 is a side view.

On the upper surface of the floating conveyance stage 30, a plurality of air injection holes 31 are provided. From these air injection holes 31, air is blown off by uniform air pressure. By spraying this air, an air layer is formed between the floating conveyance stage 30 and the glass substrate S, and the glass substrate S floats on the floating conveyance stage 30. The guide rails 32 and 33 of linear shape are provided in the both side surfaces of the floating conveyance stage 30, respectively. On these guide rails 32 and 33, each conveyance part 34 and 35 is provided so that a movement is possible in synchronization. On these conveyance parts 34 and 35, the adsorption mounting base 37 is provided through each lifting support member 36. As shown in FIG. Each lifting support member 36 raises and lowers the suction placing table 37 in the vertical direction (Z direction).

The adsorption formed on the mounting table (37), wherein the substrate adsorption unit (E _1), for a plurality, for example, in the transport direction (T) and the same direction of the glass substrate (S) is provided with five parallel. In addition, the number of the substrate adsorption unit (E ₁₎ is not limited to five, may be provided for any number of. These substrate adsorption unit (E ₁₎ are respectively aligned to the same height position by adjusting the height of each suction pad 16.

In such an air floating conveyance apparatus, the glass substrate S is floated or mounted on the floating conveyance stage 30. In this state, each conveyance part 34 and 35 is moved to the both ends of the front-end | tip part of glass substrate S. FIG. Each lifting support member 36 of these conveyance parts 34 and 35 raises each adsorption mounting base 37, respectively. In this way, each substrate adsorption device, each suction pad 16 of the (E ₁₎ is in contact with the back surface of the glass substrate (S). When these adsorption pads 16 contact the back surface of the glass substrate S, like the said 1st Embodiment, each adsorption pad 16 shakes by the adhesion force with respect to the glass substrate S, and an adsorption surface 16a follows the inclination of the back surface of the glass substrate S. FIG. At the same time, the suction surface 16a is held in close contact with the rear surface of the glass substrate S by vacuum suction of air.

After that, when each conveyance part 34 and 35 moves in synchronization with each guide rail 32 and 33, respectively, the airborne glass substrate S will be moved to the movement of each conveyance part 34 and 35. The air is conveyed at high speed in the conveying direction T on the floating conveyance stage 30.

When the substrate adsorption device E ₁ is applied to the air floating conveying device in this way, even when conveying the glass substrate S that caused the warpage or deflection by air flotation, the angle of the glass substrate S depends on the warpage and the deflection of the glass substrate S. a suction pad 16 of the substrate adsorption unit (E ₁₎ can be securely adsorbed to the back surface of the glass substrate (S). Since the adsorption pad 16 does not shift in position, when adsorbing-holds the back surface of glass substrate S, it does not shift position of glass substrate S. FIG. Therefore, when installing an air flotation conveying apparatus in the manufacturing line of a liquid crystal display, for example, and carrying out the air conveyance of the glass substrate S of a liquid crystal display, in the alignment part and test | inspection part in a manufacturing line, the glass substrate ( Suction can be maintained with high accuracy without shifting the position of S).

Even if there are gaps in the height positions of the plurality of suction pads 16, the height positions of the respective suction pads 16 can be adjusted to the same height position by the respective suction pad height adjustment mechanisms 27.

Next, a description will be given with reference to the block diagram of the inspection stage with respect to the embodiment of the case of applying the substrate adsorption unit (E ₁₎ described in the embodiments of the first to check the stage of the large board testing apparatus shown in Fig. 7 .

The inspection stage 40 includes a stage body 41 formed in a rectangular shape with a hollow structure and a plurality of deflection preventions provided in parallel with each other at predetermined intervals in the hollow portion 42 of the stage body 41. It consists of a grate 43. A plurality of substrate adsorption devices E ₁ are embedded at predetermined intervals at the inner circumferential edge portion of the hollow part 42 in the stage main body 41. On each deflection prevention grate 43, a plurality of support pins 44 are provided.

When mounting the glass substrate (S) warping occurs on such a test stage 40, and each suction pad 16 of each substrate adsorption device (E ₁₎ in contact with the back surface of the glass substrate (S). These adsorption pads 16 are shaken operation similarly to the said 1st Embodiment, and the adsorption surface 16a is the back surface of the glass substrate S by vacuum suction of air along the back surface of the glass substrate S. As shown in FIG. In close contact with the glass substrate S, and the glass substrate S is adsorbed and reliably held. Therefore, even if the glass substrate S with curvature and deflection is placed on the test stage 40, the glass substrate S can be reliably attracted and held. The height position of each adsorption surface 16a can be adjusted by each adsorption pad height adjustment mechanism 27, and the height position A of the adsorption pad 16 is made high to the glass substrate S. Even if there is a large deflection or deflection, these deflections and deflections can be corrected, and the glass substrate S can be adsorbed and held on the inspection stage 40 with high flatness.

Next, a second embodiment of the present invention will be described. In addition, the same code | symbol is attached | subjected to the same part as FIG. 1, and the detailed description is abbreviate | omitted.

Figure 8 is a block diagram showing a characteristic portion of the substrate adsorption unit (E _1). The wire 45 is locked between the first support plate 21 and the second support plate 23. The wire 45 has torsional rigidity and is formed of, for example, a metal material. This wire 45 is provided in the rod-shaped wire main body 46, the hook-shaped 1st locking part 47 provided in the one end part of this wire main body 46, and the other end part of the wire main body 47. The second locking portion 48 has a J shape. The first locking portion 47 is connected by, for example, a wire 49 such as a thread through the holes 21a and 21b of the first supporting plate 21. The second locking portion 48 is locked to each of the holes 21a and 21b of the second supporting plate 23.

For example, when transporting the air portion of the glass substrate (S), when adsorbed by the substrate adsorption unit (E ₁₎ A glass substrate (S) that the warp or deflection occurs, the substrate adsorption device (E ₁₎ is glass It adsorb | sucks so that the board | substrate S may face. At this time, the adsorption pad 16 of the substrate adsorption device E ₁ may rotate slightly. When the rotation of the suction pad 16 accumulates, the amount of twisting of the thin thread 24 in which the mechanism holding the suction pad 16 spreads between the first support plate 21 and the second support plate 23 gradually increases. Grows Then, the tension of the thin thread 24 becomes large, and the adsorption pad 16 falls gradually, and the amount of protrusion of the adsorption pad 16 from the edge part 1a of the housing 1 becomes small. For this reason, when adsorb | sucking the glass substrate S in which curvature and deflection generate | occur | produce, it becomes difficult to perform the original adsorption operation | movement which the suction pad 16 inclines and adsorb | sucks according to the inclination of the back surface of the glass substrate S.

In the second embodiment, even if a rotational force is applied to the suction pad 16, the rotation of the suction pad 16 can be regulated by the wire 45. Accordingly, the suction pad 16 does not accumulate rotation over time, and is held at the height position A from the end 1a of the housing 1.

Moreover, you may form the said 1st and 2nd embodiment as follows.

9A is a configuration diagram showing a strain column of the wire 45. The wire 45 is provided with a tapered diameter portion 49a on the first locking portion 47 side of the wire body 46, for example. The thin portion 49a is formed to be thinner than the diameter of the wire body 46, and the thin portion is freely inclined at an upper portion than the diameter portion 49a by a small external force, but the rotational force of the suction pad 16 is smaller. Suppress

FIG. 9B is also a configuration diagram showing the heat of deformation of the wire 45. The wire 45 separates the first locking portion 47 from the wire main body 46, and the first locking portion 47. The ball 49b is provided in the lower end of the (). The wire main body 46 provides the accommodating part 49c of the ball 49b in the edge part isolate | separated from the 1st locking part 47. As shown in FIG. This storage part 49c hold | maintains the ball 49b rotatably. Therefore, even if a twisting force is applied to the wire 45, the ball 49b rotates in the accommodating part 49c. Thereby, even if the adsorption pad 16 rotates, the wire 45 does not twist.

As the tube member 15, for example, as shown in FIG. 10, a tube member 15a formed of a corrugated pipe may be used.

Next, a third embodiment of the present invention will be described.

11 is a configuration diagram of the substrate adsorption device E ₂ . The housing 50 is formed in cylindrical shape by the material which has rigidity, such as aluminum, for example. At the distal end of the housing 50, a cylindrical holding hole 51 is provided. In this holding hole 51, the suction pad 52 is rotatably held in the state which protruded only a little from the open end 51a of the holding hole 51. As shown in FIG.

This adsorption pad 52 is formed in a cylindrical shape using resin, and the contact surface part 52a which is the side surface of the pad is formed in spherical shape. Inside the suction pad 52, the cylindrical hollow part 53 which opened the lower part is provided. On the upper side of this suction pad 52, the planar suction surface 54 is provided. In this suction surface 54, a pad recess 54a having a very small depth is provided, and an air suction hole 54b for vacuum suction communicating with the hollow portion 53 is provided in the center portion.

The holding hole 51 of the housing 50 is formed in the inner diameter which is just a little smaller than the dimension of the contact surface part 52a of the suction pad 52. In the opening part of the holding hole 51, the tightening-shaped part 55 narrowed according to the curvature of the spherical shape of the contact surface part 52a of the suction pad 52 is provided. The tightening portion 55 constitutes suction pad holding means for holding the suction pad 52 into the holding hole 51.

The contact hole 52a of the retaining hole 51 of the housing 50 and the suction pad 52 has a precision gap fitting in which the suction pad 52 is rotatable within the retaining hole 51 of the housing 50. It is structured. Therefore, when the suction pad 52 is accommodated in the holding hole 51, the contact pad 52 a of the suction pad 52 and the inner wall surface of the holding hole 51 are in point contact with at least three points. The contact between the contact surface portion 52a of the suction pad 52 and the inner wall surface of the retaining hole 51 is not limited to only at least three points of contact, but by shaking the suction pad 52. Contact is made by a plurality of linear points in the same circumferential direction in the contact surface portion 52a, or linear contact is made on a line in the same circumferential direction. By the contact between the contact surface 52a and the inner wall surface of the retaining hole 51, the frictional resistance between the contact surface 52a and the inner wall surface of the retaining hole 51 becomes extremely small, and the suction pad In the holding hole 51, 52 is rotatably held, for example in the direction of an arrow F, with all the circumferential directions by a very small external force, and smooth shaking operation | movement is attained.

In the bottom part of the holding hole 51 of the housing 50, the storage surface 56 which receives the suction pad 52 is provided. This storage surface 56 is formed by the flat part 57 and the taper part 58 provided in the outer periphery of this flat part 57. The flat part 57 regulates the inclination angle with respect to the arrow F direction of the suction pad 52 by contacting the bottom part of the suction pad 52. The inclination angle of the suction pad 52 is a range in which the suction surface 54 is not hidden in the holding hole 51 when the suction pad 52 is tilted. The taper part 58 is formed at the angle according to the curvature of the spherical shape of the contact surface part 52a of the suction pad 52. The taper portion 58 is in contact with the adsorption pad 52 descending in the holding hole 51 to restrict movement to the lower portion of the adsorption pad 52.

The housing 50 is provided with a hollow hole 59. The hollow hole 59 is formed with an inner diameter smaller than the inner diameter of the holding hole 51. The suction pad support member 60 is provided in the hollow hole 59 and the hollow portion 53 of the suction pad 52.

The suction pad support member 60 is formed in a hollow shape by an elastic member such as rubber, and an air suction passage 61 is provided therein. The bellows 60a which obtains a small elastic force is formed in the front-end | tip part of this suction pad support member 60. As shown in FIG. The tip end of the bellows 60a is formed thinner than the original part, and is formed in a corrugated pipe shape and can be stretched. The bellows 60 is hermetically adhered to the air suction hole 54b of the suction pad 52. The original part of the suction pad support member 60 is hermetically connected to the front end surface of the unit main body 62.

The housing 50 is screwed to the unit main body 62 via the screw part 63. The housing 50 rotates with respect to the unit main body 62, changes the amount of expansion and contraction of the bellows 60a, and adjusts the rotational force of the suction pad 52. FIG. This adjustment is a fine adjustment within the range which the adsorption pad 52 can rotate by receiving the external force which acts when the adsorption pad 52 contact | connects the glass substrate S. FIG.

The housing 50 can adjust the height position of the suction pad 52 by rotating with respect to the unit main body 62. In this way, the housing 50 at the time of adjusting the amount of elasticity (elastic force) of the bellows 60a or the height position of the suction pad 52 is tightened by the lock nut 64 which is screwed to the threaded portion 63. It is fixed at 62.

The air suction passage 65 is provided in the unit main body 62. The air suction passage 65 communicates with the air suction passage 61 of the suction pad support member 60. The vacuum suction flow path is formed in the air suction hole 54b and each of the air suction passages 61 and 65.

Next, it will be explained with reference to FIGs 12A ~ for the adsorption action of the glass substrate (S) of the substrate adsorption device (E ₂₎ configured as described above with reference to FIG 12C.

12A shows a state in which the glass substrate S is conveyed on the upper side of the substrate adsorption device E ₂ . The suction pad 52 is inclined, for example, in the holding hole 51 of the housing 50, and the suction surface 54 is displaced in a parallel state with respect to the rear surface of the glass substrate S. In this state raised by the lifting mechanism the substrate adsorption device (E _2), a portion that is the apex of the suction face 54 of the suction pads 52, inclined tangent to the back surface of the glass substrate (S).

Since the suction pad 52 is held in point contact in the holding hole 51 of the housing 50, the frictional resistance between the suction hole 51 and the inner wall surface of the holding hole 51 is extremely small, and the back surface of the glass substrate S is provided. It rotates in the direction of arrow F in the retaining hole 51 with a very small attachment force to.

Therefore, when the substrate adsorption device E ₂ contacts the rear surface of the glass substrate S with a very small adhesion force from the bottom of the glass substrate S, the adsorption pad 52 rotates, and adsorption is performed as shown in FIG. 2B. It follows so that surface 54 may become the same as the direction of the back surface of glass substrate S. FIG. At this time, even if the adsorption pad 52 is inclined or the glass substrate S is bent or deflected, the adsorption pad 52 rotates, and the adsorption surface 54 comes into close contact with the rear surface of the glass substrate S. FIG. .

In this state, when the air is vacuum sucked through the air suction passages 61 and 65 and the air suction holes 54b, the pad recesses 54a, the air suction holes 54b, and the angles of the suction pads 52, respectively. The air suction passages 61 and 65 become underpressure by vacuum suction in an airtight state. Thereby, the adsorption surface 54 of the adsorption pad 52 adsorb | sucks to the back surface of the glass substrate S. As shown in FIG. Since the adsorption pad 52 closely adheres along the back surface of the glass substrate S even when the adsorption surface 54 is bent or deflected on the glass substrate S, the glass substrate S is reliably without air leakage. Vacuum suction.

With this, when the pad recess 54a, the air suction hole 54b, and the respective air suction passages 61 and 65 become negative pressure, the bellows 60A mainly of the suction pad support member 60 formed of an elastic member is formed. Decreases. The suction pad 52 descends the inside of the holding hole 51 by shrinking the bellows 60a, and the bottom thereof comes into contact with the tapered portion 58 to stop as shown in FIG. 12C. As a result, the suction pad 52 is fixed in the holding hole 51.

Thus, according to the said 3rd Embodiment, the suction pad 52 which has the contact surface part 52a formed in spherical shape is inserted into the precision clearance fitting structure in the holding hole 51 of the housing 50. As shown in FIG. And the suction pad 52 is rotatable in all the circumferential directions in the holding hole 51, so that the suction pad 52 has a very small frictional resistance in the holding hole 51, With very little external force it can rotate in all circumferential directions. Therefore, by contacting the rear surface of the glass substrate S with a very small adhesion force from the lower portion of the glass substrate S, the suction pad 52 is vacuumed without air leakage along the inclination direction of the rear surface of the glass substrate S. It can suck and reliably adsorb | suck to the back surface of glass substrate (S). Thereby, even if there exists a curvature or deflection in the glass substrate S, the adsorption pad 52 can incline and reliably adsorb | suck according to these.

Since the suction pad 52 is held by the structure of the precision clearance fitting in the holding hole 51 of the housing 50, the position shift of the suction pad 52 in the holding hole 51 is extremely small. Thereby, high-precision positioning becomes possible when the glass substrate S is adsorbed-held.

When the adsorption pad 52 adsorbs on the back surface of the glass substrate S, the bellows 60A is reduced by the negative pressure in the adsorption pad support member 60, and the adsorption pad 52 contacts the tapered portion 58 and the lower portion thereof. Since the movement to the resin is regulated, the glass substrate S can be fixed at the correct height in a state of adsorbing the glass substrate S.

Since the amount of expansion and contraction of the bellows 60a is adjusted by rotating the housing 50 relative to the unit main body 62, the adsorption pad 52 can be adjusted to the optimum value to the glass substrate S, and adsorption is performed. The height position of the pad 52 can be adjusted.

Since the tightening part 55 is provided in the housing 50, the spherical suction pad 52 does not protrude from the holding hole 51, and does not fall out.

Wherein the substrate adsorption unit (E ₂₎ it is possible to, instead, the substrate adsorption device (E ₁₎ of the air emerging carrying apparatus shown in FIGS. When the substrate adsorption device E ₂ is applied to the air floating conveying device, the adsorption pad 52 of each substrate adsorption device E ₂ is bent in accordance with the deflection or deflection of the glass substrate S as in the first embodiment. Can be reliably adsorbed on the back surface of the glass substrate S, and the glass substrate S is not shifted.

Next, a fourth embodiment of the present invention will be described. In addition, the same code | symbol is attached | subjected to the same part as FIG. 11, and the detailed description is abbreviate | omitted.

13 shows a configuration diagram of the substrate adsorption device E ₃ . The substrate adsorption device (E ₃₎ it is possible to arrange in place of the substrate adsorption unit (E ₁₎ on the inspection stage of a large board testing apparatus shown in FIG. The housing 50 is screwed with respect to the screw part 71 formed in the bottom part of each recessed part 70, and is fixed by tightening with respect to the screw part 71 of the lock nut 72. FIG. Thereby, when the housing 50 is rotated with respect to the screw part 71, the amount of expansion and contraction of the bellows 60 can be adjusted. This adjusted state is fixed by tightening the lock nut 72. The air suction passage 74 communicating with the air suction passage 61 in the suction pad support member 60 is provided in each base 73 of the stage main body 41 and each deflection prevention grate 43.

If the provided inspection stages such substrate adsorption unit (E _3), and can reliably maintain the adsorption of the glass substrate (S) with a warp or deflection, and written by adjusting the height position of the suction pad 52, the warpage and deflection By correcting this, the glass substrate S can be adsorbed and held in a high plan view.

Substrate adsorption unit (E _3), it is also applicable to the arm (R) of the large substrate carrying robot for that shown in Fig. In the arm portion R, a plurality of, for example, four arms 81 are provided in the arm support portion 80 in parallel with each other at predetermined intervals. On these arms 81, a plurality of substrate adsorption devices E ₃ are provided.

This large substrate conveyance robot inserts the arm support part 80 into a storage part, takes out the large glass substrate S, and conveys it on the stage of a test | inspection part, or a conveyance line. If the glass substrate S is placed on each arm 81, deflection will arise in the glass substrate S. FIG. At this time, the adsorption pad 52 adhere | attaches the back surface of the glass substrate S by vacuum suction of air according to the inclination of the back surface of the glass substrate S, and adheres the glass substrate S to it. Keep adsorption firmly.

As described above, according to the fourth embodiment, the height of the housing 50 can be reduced to reduce the size, and the glass substrate S can be applied to an inspection stage of a large substrate inspection apparatus, an arm portion of a large substrate transfer robot, or the like. It can reliably adsorb | suck and hold according to the curvature or deflection which generate | occur | produces in the glass substrate S, without shifting the position.

Next, a fifth embodiment of the present invention will be described with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same part as FIG. 1, FIG. 11, FIG. 5 and FIG. 6, and the detailed description is abbreviate | omitted.

Embodiment of the first 5, 5 and the air in the portion carrying apparatus, the substrate adsorption of an embodiment of the first apparatus shown in Fig. 6 (E _1, Hereinafter, the 1st board | substrate adsorption apparatus) and the board | substrate adsorption apparatus (E2 below, _2nd board | substrate adsorption apparatus) of the said 3rd embodiment were applied.

FIG. 15 shows a first substrate adsorption device E ₁ and a second substrate adsorption device E ₂ provided on each adsorption table 57. In addition, in the same figure, since a code | symbol becomes complicated, only a code | symbol of a required part is attached | subjected. The first substrate and the adsorber (E _1, E ₂₎ of the second is disposed in parallel with a plurality of transport direction (T) and the same direction of the glass substrate (S). The substrate adsorption device (E ₁₎ of claim 1, a plurality of the distal end portion of the glass substrate (S), for example, installed two along the transport direction (T) of the glass substrate (S). The substrate adsorption device (E ₂₎ of claim 2, the plurality of the rear end side of the substrate adsorption unit (E ₁₎ of 1, for example, there is provided six. These height of the first and the substrate adsorption unit (E _1, E ₂₎ of the second, in the state adsorbed to the glass substrate (S), each of the attraction surface (16a, 54) of each absorption pad (16, 52) The height is adjusted so that the position coincides with the reference plane H. The substrate adsorption device (E ₁₎ of each of the first, the height position of the attracting surface (16a) when the contact surface on the end portion (1a) to the suction pad 16 descends in the housing (1) the reference plane (H) The height is adjusted to match. Since the heights of the first and second substrate adsorption devices E ₁ and E ₂ are different from each other, the step G is provided on the adsorption placing table 57.

16 is a diagram illustrating an air vacuum suction system. Each regulator 90, 91 is connected to each _1st board | substrate adsorption apparatus E1 on the left with respect to the conveyance direction T of glass substrate S through each air suction path of a separate system, Each regulator 92 and 93 is respectively connected to each _1st board | substrate adsorption apparatus E1 of the right side. These regulators 90, 91, ..., 93 respectively control individually the air suction force preset with respect to each _1st board | substrate adsorption apparatus E1.

On the other hand, a glass substrate (S) conveying direction (T) with respect to In, respectively, each regulator (94-1, 94-2, ..., 94 -n) a substrate adsorption unit (E ₂₎ of the second to the left of the connected , may also have a second of the substrate adsorption device (E ₂₎ in each regulator (95-1, 95-2, ..., 95 -n) it is connected to the display. These regulators 94-1, 94-2, ..., 94-n, 95-1, 95-2, ..., 95-n are each preset with respect to each _2nd board | substrate adsorption apparatus E2, respectively. Individually controlled by air suction.

The vacuum valve 96 is commonly connected to each of the regulators 90 and 91 on the left side with respect to the conveyance direction T of the glass substrate S, and similarly to each of the regulators 94-1, 94-2, ..., 94 on the left side. The vacuum valve 97 is commonly connected to -n). Moreover, each air pressure gauge 98, 99 is provided in the regulators 90, 91, 94-1, ..., 94-n side of each vacuum valve 96, 97, respectively.

The air pressure gauge 98 measures the air suction force sucked by the regulators 90 and 91, and sends an error signal to the vacuum valve 96 when the air suction force does not become lower than the set suction force, and the vacuum valve ( 96). The air pressure gauge 99 measures the air pressure sucked from the regulators 94-1, ..., 94-n, and sends an error signal to the vacuum valve 97 when the air suction force does not become lower than the set suction force. Then, the vacuum valve 97 is shut off. Similarly, the vacuum valve 100 is commonly connected to each of the regulators 92 and 93 on the right side with respect to the conveyance direction T of the glass substrate S, and similarly the respective regulators 95-1 to 95-n on the right side. ), A vacuum valve 101 is commonly connected. On each of the regulators 92, 93, 95-1, ..., 95-n of these vacuum valves 100 and 101, each air pressure gauge 102 and 103 is provided. These air pressure gauges 102 and 103 respectively measure the air suction force sucked from each regulator 92, 93, 95-1, ..., 95-n, and an error when this air suction force does not become lower than the set suction force. The signal is sent to the vacuum valve 96 and cut off.

Each of the vacuum valves 96 and 100 on the _first substrate adsorption device E ₁ side is commonly connected to the main regulator 104a, and an air suction source 105 is connected to the main regulator 104. . Similarly, each of the vacuum valves 97 and 101 on each side of the _second substrate adsorption device E ₂ is commonly connected to the main regulator 104b, and an air suction source 105 is connected to the main regulator 104b. have. Moreover, the air pressure gauges 106a and 106b are connected to the vacuum valves 96, 97, 10O and 101 side of each main regulator 104a and 104b.

Next, the adsorption | suction operation | movement to the glass substrate S of the apparatus comprised as mentioned above is demonstrated.

A glass substrate (S) on top conveying stage 30 in the state where that is injured or mounted, if raising the respective adsorption mounting table 57, the first and each substrate adsorption device of Claim 2 (E _1, E ₂₎ As shown in FIG. 15, each of the adsorption pads 16 and 52 rises toward the rear surface of the glass substrate S. FIG. If bending and deflection are occurring at the tip end side with respect to the transport direction T of the glass substrate S, first, one end of the adsorption pad 16 in the first substrate adsorption device E ₁ is the glass substrate ( It contacts the back of S). The glass substrate S has a larger amount of warpage and deflection as the tip side of the conveying direction T increases, but the first substrate capable of height-adjusting the respective adsorption pads 16 on the tip side with respect to the conveying direction T is high. by placing the suction device (E _1), it is possible to contact the respective suction pads 16 on the back surface of the warp or the glass substrate (S), which generates the deflection. These adsorption pads 16 contact the back surface of the glass substrate S with a very small adhesion force from the lower part of the glass substrate S, and shake with the inclination by the curvature and deflection of the glass substrate S, and adsorption | suction The surface 36 adheres to the back surface of the glass substrate S. FIG.

In this state, when the air suction source 105 starts the air suction operation, the respective regulators 90, 91, ..., 93 for each of the first and second substrate adsorption devices E ₁ and E ₂ , and The vacuum regulators 96, 97, 100, 101 and the main regulator 104 from the respective regulators 94-1, 94-2, ..., 94-n, 95-1, 95-2, ..., 95-n Air suction is performed through the. In this way, the substrate suction device (E ₁₎ of claim 1, in the in the same manner as in embodiment 1, the suction pad 16 suction face (16a), the bending or glass substrate (S), which deflection is caused in the It adheres along the back surface and vacuum-absorbs the glass substrate S reliably without air leakage. At the same time, the outer circumferential edge 16e of the rear surface of the suction pad 16 is brought into surface contact with the end 1a of the housing 1 to stop, and the bending and deflection of the glass substrate S are corrected in a planar shape.

At this time, the back surface of the glass substrate (S) is, the access to each of the suction pad 52 of the substrate adsorption device (E ₂₎ of the plurality of second. The substrate adsorption device (E ₂₎ of these second, to write to that in contact with the back surface of the glass substrate (S) with a small adhesive force from the lower portion of the glass substrate (S), each suction pad 52 is rotated, the attracting surface It follows so that the surface direction of 54 may become the same as the direction of the back surface of glass substrate S. FIG.

In this state, when the air is sucked under vacuum through the pad recess 54a, the air suction hole 54b and the respective air suction passages 61 and 65, the suction surface 54 of the suction pad 52 is formed of a glass substrate. It adsorb | sucks on the back surface of (S). At the same time, since the bellows 60 is reduced by air vacuum suction, the suction pad 52 descends the inside of the holding hole 51 to engage the taper portion 58 and stop. When the result, the first and the substrate adsorption device of Claim ₂ (E _1, E 2) on the back surface of the glass substrate (S) sucked and held by the glass substrate (S) is, the bending or deflection is corrected to the reference plane (H Stay horizontally on

After that, when each conveyance part 34 and 35 moves in synchronization with each guide rail 32 and 33, respectively, the airborne glass substrate S will be moved to the movement of each conveyance part 34 and 35. The air is conveyed at high speed in the conveying direction T on the floating conveyance stage 30.

Thus, according to the said 5th Embodiment, even if the curvature and the deflection amount in the tip side of the conveyance direction T of the glass substrate S are large, the back surface of this glass substrate S is reliably made into the adsorption pad 16. FIG. Adsorption can be maintained. Since the front end side of the large glass substrate S of deflection or deflection amount is adsorbed and held by the first substrate adsorption device E1 and lowered toward the reference plane H, the back surface of the glass substrate S is made of each agent. It is possible to approach the _second substrate adsorption device E ₂ gradually, and the back surface of the glass substrate S can be reliably adsorbed and held by each second substrate adsorption device E ₂ .

The first and second substrate adsorption unit (E _1, E ₂₎ are, since each row of the suction of air through the respective regulator (90, 91, ..., 95 -n) of another system, although the suction pad of the one portion of the (16 or 52) even if an air leakage does not adsorb on the back surface of the glass substrate (S), the substrate adsorption device of claim 1, for the air which leaks suction pad (16 or 52) (E ₁₎ or substrate of the second The air supply to the adsorption device E ₂ is only stopped, and there is no need to stop the LCD manufacturing line emergencyly, and the adsorption of the other first substrate adsorption device E ₁ and the second substrate until the process is completed. The device E ₂ can maintain the adsorption operation at each adsorption pad 16 or 52. In this way, there is a suction holding of the glass substrate (S) can improve the safety not happen to stop in the middle, and the air first or substrate adsorption of the second of the leakage absorption pad (16 or 52), the device (E ₁ , E ₂ ) only need to repair the system, it is advantageous in terms of maintenance. Further, by turning on the substrate adsorption unit (E ₁₎ and the air supply to the substrate adsorption unit (E ₂₎ of each of the second of each of the first two strains, and I is the main regulator (104a or 104b) on one side fault, Since the other main regulator 104b or 104a is working, the problem that air suction in all the 1st board | substrate adsorption apparatus A and each 2nd board | substrate adsorption apparatus B cannot be eliminated is eliminated. can do.

In the fifth embodiment, the first and second substrate adsorption devices E ₁ and E ₂ are used, but all may be used as the first substrate adsorption device E ₁ . In this case, the height of each of the first substrate adsorption unit (E _1), the suction pad 16 so as to increases sequentially the height of the suction pads 16 towards the transport direction (T) of the glass substrate (S) of the adjusting mechanism Adjust by (27).

Next, a sixth embodiment of the present invention will be described. In addition, the same code | symbol is attached | subjected to FIG. 5 and FIG. 6, and the detailed description is abbreviate | omitted.

It is a block diagram of the air floating conveyance apparatus which can be used also as an inspection stage. Plural, for example, three adsorption support bases 37a, 37b, 37c are provided. These adsorption mounting bases 37a, 37b, 37c are provided in the front-end | tip side, the rear-end | tip side, and intermediate part, respectively with respect to the conveyance direction T of the glass substrate S. As shown in FIG. These adsorption placed is provided in parallel to the stand (37a, 37b, 37c) formed on each of the first or the substrate adsorption device of Claim ₂ (E _1, E 2) with a plurality. Height positions of these first or substrate adsorption unit (E _1, E ₂₎ of the second glass substrate in a state of adsorbing the (S), each of the attraction surface (16a, 54) of each absorption pad (16, 52) Is height adjusted to match the reference plane (H). The first or substrate adsorption unit (E _1, E ₂₎ of the second, as in the embodiment of the fifth and each regulator is connected to each through a respective air suction of another system, for example, one first or substrate adsorption device of claim ₂ (E _1, E 2) Air missing be occur, it is possible to maintain the adsorption action in the other first or substrate adsorption device of claim ₂ (E _1, E 2), the glass substrate from ( The adsorption holding of S) does not stop in the middle, and safety can be improved.

Suction control method for these first or substrate adsorption unit (E _1, E ₂₎ of the second, the first, each of the first or the substrate adsorption device of Claim 2 on the suction mounting table (37c) provided in a central portion (E _1, or The adsorption operation for E ₂ ) is started. Discloses a suction operation for each of the first or the substrate adsorption device of Claim 2 (E ₁ or E ₂₎ and then on the suction provided at the distal end or the rear end to the mounting table (37a or 37b).

According to this adsorption control method, when adsorbing and holding the glass substrate S floating on the air on the floating conveyance stage 30, each of the first or second substrates on the adsorption placing table 37c provided in the intermediate portion with small warpage. By starting the adsorption operation from the adsorption device E ₁ or E ₂ , the central portion of the glass substrate S is reliably held by the first or second substrate adsorption device E ₁ or E ₂ . do. At this time, by being sucked and held by the glass substrate (S) a substrate adsorption unit of the respective intermediate portion of claim 1 or claim 2 (E ₁ or E _2), the bending or deflection of the glass substrate (S) is lowered.

Next, the start of each first or the suction operation of the substrate adsorption device 2 (E ₁ or E ₂₎ adsorbed on the mounting table installed on the front end or the rear end (37a or 37b). In this way, each of the first or the substrate adsorption unit (E ₁ or E ₂₎ of the second tip, and toward the distal end side from the center side in contact with the back surface of the glass substrate in sequence (S), and suction.

In this way, adsorption is sequentially started from the middle portion of the glass substrate S having a small warpage toward the front end portion or the rear end of the glass substrate S having a large warpage, thereby reliably correcting the warpage and the deflection of the glass substrate S. Adsorption can be maintained. In addition, the adsorption mounting base is not limited to three places of a center part, a front end part, and a rear end part, It can increase according to the size of the glass substrate S, and you may arrange | position in the area | region where the curvature is large from the part with small warpage other than a center part. .

Next, a seventh embodiment of the present invention will be described. In addition, the same code | symbol is attached | subjected to the same part as FIG. 5 and FIG. 6, and the detailed description is abbreviate | omitted.

It is a block diagram of the air floating conveyance apparatus. One suction mounting table 37 is provided on both side surfaces of the floating conveying stage 1, respectively. This adsorption mounting table 37 is formed on the first or substrate adsorption device of Claim 2 (E ₁ or E ₂₎ are provided in plurality in parallel in the transport direction (T) and the same direction of the glass substrate (S). These first or substrate adsorption device of Claim 2 (E ₁ or E _2), there is each regulator is connected as in the embodiment of the fifth through the air sucked into each of the separate systems, respectively.

Of these first or second substrate adsorption unit (E ₁ or E ₂₎ absorption control method is, a glass substrate (S) with respect to each of the first or the substrate adsorption device in the second (E ₁ or E ₂₎ for the A suction operation | movement is started in order from the center part side with a little bow toward the end part with a big bow.

Thus for the same adsorption control method, the air which is emerging as to maintain the adsorption of the glass substrate (S), each of the first or the substrate adsorption device of Claim 2 (E ₁ or E ₂₎ on top conveying stage 30, a glass substrate The back side of the glass substrate S is sequentially contacted and hold | maintained from the middle part side of (S) toward the front-end | tip part side. By keeping the absorption, warping of the glass substrate (S) is, and sequentially corrects the side end portions from an intermediate portion side, each of the first or the substrate adsorption device of Claim 2 (E ₁ or E ₂₎ is, the end side from the intermediate portion side The glass substrate S is adsorbed and held reliably toward the surface.

Further, even if each of the first or at the same time operation adsorbent substrate adsorption unit (E ₁ or E ₂₎ of Figure 2, toward the larger the bending portion from a small warp of the glass substrate (S) to be adsorbed is started sequentially The warpage and deflection of the glass substrate S are horizontally corrected on the reference plane H. As shown in FIG.

According to the seventh embodiment, the second substrate adsorption device E ₂ having a small protruding height of the adsorption pad 52 or a well known substrate adsorption device reliably adsorbs and holds the glass substrate S having large warpage. It becomes possible.

In addition, this invention is not limited to said each embodiment, You may modify as follows.

For example, although each said embodiment is used for air floating conveyance of glass substrate S, it is applicable also when the glass substrate S is adsorbed-held on an inspection stage in the inspection part of glass substrate S. Can be.

With also the block (H ₁ ~ H ₄₎ to a plurality of the substrate adsorption unit (E ₁ or E ₂₎ twos 1 19, the air vacuum system for each block (H ₁ ~ H ₄₎ You may make it. The substrate adsorption device of each of the group ₁ (H 1 ~ H ₄₎ is arranged and a plurality of the substrate adsorption device group (E ₁₎ along the transport direction (T) of the glass substrate (S), respectively. Of these, the first substrate adsorption device groups H ₁ and H ₂ are provided adjacent to each other, and the first substrate adsorption device groups H ₃ and H ₄ are provided adjacent to each other. Further, the substrate adsorption device, the group (H ₁ ~ H ₄₎ of the first of these is, may be used a substrate adsorption unit (E ₂₎ of the second.

In these first substrate adsorption device (H ₁ ~ H ₄₎ of the substrate adsorption unit (E ₁₎ of each of the first is connected to each regulator (110), and the group The substrate adsorption device of each of the first (H ₁ to H ₄ ) are commonly connected to each vacuum valve 111 to 114. Claim is connected to the first substrate adsorption device group ((H ₁ and H _3), each vacuum valve (111, 113) are commonly connected to the main regulator (115a) corresponding to the addition, the substrate adsorption device, the group of the first ( H ₂ and H _4), each vacuum valve (112, 114 corresponding to a) are commonly connected and connected to the main regulator (115b).

In the case of such an air vacuum suction system, similarly to the fifth embodiment, the adsorption operation on the glass substrate S is performed even if air is missing from one of the first or second substrate adsorption devices E ₁ and E ₂ . Maintenance can improve safety. The first of the substrate adsorption device group (H ₁ and H ₂₎ and the first substrate adsorption group in (H ₃ and H ₄₎ are adjacent are provided in the substrate adsorption group in the first of the one (H ₁ , H ₃ ) and the other first substrate adsorption device group H ₂ , H ₄ , which are configured by different air vacuum suction systems, respectively, so that the adjacent first substrate adsorption device H ₁ , H ₃₎ that can be ensured in the other substrate adsorption device (H ₂₎ to be sucked out of the adjacent maintaining adsorbing a glass substrate (S). For example, it is possible to maintain the adsorption action for the first of the substrate adsorption device group first substrate adsorption device group (H ₂₎ of glass substrate (S) in that FIG., Adjacent to the total air leakage (H _1).

In addition, the shape of the contact surface part 16c of the adsorption pad 16 in the said 1st Embodiment may be modified so that it may show in partial sectional drawing shown to FIG. 20A-2OD, and the top view shown in FIG. 2OE. good. The contact surface portion 16c shown in FIG. 20A intersects the inclined surfaces 120 and 121 to form a vertex 122 having an obtuse angle, for example. This vertex 122 is formed in all the circumferential directions of the contact surface portion 16c. If it is the contact surface part 16c of this suction pad 16, the vertex 122 of the contact surface part 16c will make linear contact with the inner wall 2a of the housing 1 in all the circumferential directions.

The contact surface part 16c shown in FIG. 2OB forms the convex shape 124 which has the obtuse angle vertex 123, for example. The contact surface 16c and the vertex 123 of the convex body 124 make linear contact with the inner wall 2a of the housing 1 in all the circumferential directions.

The contact surface part 16c shown in FIG. 20C forms the hemispherical convex body 126 in the cylindrical curved main body 125. As shown in FIG. If it is this contact surface part 16c, the convex body 126 will make linear contact with the inner wall 2a of the housing 1 in all the circumferential directions.

The contact surface part 16c shown in FIG. 20D forms the projection body 127 in the cylindrical curved main body 125. As shown in FIG. If it is this contact surface part 16c, the protrusion 127 will make linear contact with the inner wall 2a of the housing 1 in all the circumferential directions.

The contact surface portion 16c shown in FIG. 20E forms at least three or more, for example, four projections 128 on the outer circumferential surface of the cylindrical curved body 125. If it is this contact surface part 16c, each protrusion 128 will make point contact with the inner wall 2a of the housing | casing 1, respectively.

If it is the shape of the contact surface part 16c of these adsorption pad 16, the adsorption pad 16 can operate smoothly and smoothly with little frictional resistance, without a positional shift in a horizontal direction.

Although each said embodiment demonstrated the case where the airborne conveyance of the glass substrate S was carried out, it is not limited to air injury, but can also apply to conveyance of the glass substrate S which floated by the electrostatic injury and the ultrasonic injury. .

Hereinafter, the other feature of this invention is demonstrated.

A first aspect of the present invention provides a substrate adsorption method in which the substrate is adsorbed and held by a plurality of substrate adsorption apparatuses arranged along the side edges of the substrate, the protruding height being greater than the tip end of the substrate in each of the substrate adsorption apparatuses. The substrate is horizontally calibrated by adsorbing and holding the substrate using a first substrate adsorption device, and the second substrate adsorption having a small protrusion height is performed while the glass substrate is horizontally calibrated by the first substrate adsorption device. It is a board | substrate adsorption method characterized by holding and adsorb | sucking the said glass substrate using an apparatus.

According to a second aspect of the present invention, in the first aspect of the present invention, adsorption operation of the first substrate adsorption device is started, and then adsorption operation of the second substrate adsorption device is started. It is a way.

According to a third aspect of the present invention, in the first aspect of the present invention, the first substrate adsorption device and the second substrate adsorption device simultaneously start an adsorption operation.

A fourth aspect of the present invention provides a substrate adsorption method for adsorbing and holding the substrate by a plurality of substrate adsorption devices arranged along the side edges of the substrate, wherein the substrate adsorption device corresponds to a portion where the warpage is small. A substrate adsorption method, characterized in that an adsorption operation is started toward the substrate adsorption device corresponding to a large portion of the warpage of the substrate.

The fifth aspect of the present invention provides a substrate adsorption method for adsorbing and holding the substrate by a plurality of substrate adsorption devices arranged along the side edges of the substrate, wherein each air vacuum suction system is provided for each one or a plurality of blocks of the substrate adsorption device. And simultaneously operating the respective air vacuum suction systems to adsorb the substrate adsorption device to the substrate sequentially from the small portion of the substrate to the larger portion of the substrate to correct the bending of the substrate. It is a board | substrate adsorption method characterized by the above-mentioned.

This invention is applicable also to the conveyance field of the glass substrate of the liquid crystal display in a LCD manufacturing line, the semiconductor wafer in a semiconductor manufacturing line, and various members, for example.

Claims (25)

A housing formed in a hollow shape and having an opening at one end thereof; A suction pad support member provided in the hollow shape of the housing and provided with an air suction passage for sucking air; An air suction hole which is mounted on the suction pad support member in a state of protruding from the opening of the housing, which is in point contact with the opening of the housing by at least three points, and which is shaken, and which is in airtight communication with the air suction passage; The adsorption pad provided, And a suction pad holding means for holding the suction pad in the opening of the housing. The method of claim 1, The adsorption pad has an adsorption portion having an adsorption surface formed in a planar shape, and a contact surface portion integrally formed with the adsorption portion, wherein the contact surface portion is in point contact with the at least three points with respect to the inner wall surface of the opening of the housing. Substrate adsorption device, characterized in that. The method of claim 2, The point which the point contact of the said contact surface part and the said inner wall surface is on the same circumferential direction in the said contact surface part is characterized by the above-mentioned. The method of claim 2, And said contact surface portion makes linear contact with said inner wall surface of said opening portion of said housing. The method of claim 2, The said contact surface part is a cylindrical shape, The board | substrate adsorption apparatus characterized by being formed in the hemispherical shape which has the largest diameter in the middle part of a vertical direction. The method of claim 2, And said adsorption portion is formed to have the same diameter as the outer diameter of said opening of said housing. The method of claim 2, And said adsorption portion is formed with an outer diameter larger than the outer diameter of said opening of said housing. The method of claim 2, The adsorption | suction part and the contact surface part of the said adsorption pad are formed by the elastic member, The board | substrate adsorption apparatus characterized by the above-mentioned. The method of claim 1, An end portion of the opening of the housing is in contact with a rear surface of the suction pad and serves as a stopper for limiting the drop of the suction pad in the hollow shape of the housing. The method of claim 8, The said end part of the said opening part of the said housing contact | connects the said back surface of the said adsorption pad, and correct | amends the inclination of the said adsorption part of the said adsorption pad to the reference plane, The board | substrate adsorption apparatus characterized by the above-mentioned. The method of claim 2, The said adsorption pad support member is comprised by the tube member formed by the elastic member, The board | substrate adsorption apparatus characterized by the above-mentioned. The method of claim 11, The said tube member is a board | substrate adsorption | suction apparatus characterized by the formation of the corrugation pipe-shaped bending part in close contact with the said adsorption pad. The method of claim 1, The suction pad holding means supports the suction pad between a first support plate provided on the suction pad, a second support plate provided on the other end side of the housing, and the first support plate and the second support plate. A substrate adsorption device having a connecting member connected through the member. The method of claim 13, The said connecting member is a wire rod, The board | substrate adsorption apparatus characterized by the above-mentioned. The method of claim 13, The said connection member is a board | substrate adsorption apparatus characterized by the above-mentioned. The method of claim 1, In said housing, the said adsorption pad, the said adsorption pad support member, and the said adsorption pad holding means are integrally moved in the said hollow shape of the said housing, and the height position of the said adsorption pad with respect to the edge part of the said opening part of the said housing is adjusted. A substrate adsorption device comprising a suction pad height adjustment mechanism. The method of claim 1, The suction pad has a spherical pad body having a contact surface portion which is in point contact with at least three points of the inner wall surface of the opening of the housing, and a planar suction surface formed on the pad body. The said air suction hole is provided in the surface, and is supported by the said adsorption pad support member, The board | substrate adsorption apparatus characterized by the above-mentioned. The method of claim 17, And said adsorption pad is maintained in a state protruding from an end of said opening of said housing. The method of claim 17, The point which the point contact of the said contact surface part and the said inner wall surface is on the same circumferential direction in the said contact surface part is characterized by the above-mentioned. The method of claim 17, And the contact surface portion and the inner wall surface of the opening portion of the housing are in line contact with each other. The method of claim 17, The said contact surface part and the inner wall surface of the said opening part of the said housing have a precision clearance fitting structure, The board | substrate adsorption apparatus characterized by the above-mentioned. The method of claim 17, The opening of the housing is formed in accordance with the shape of the contact surface portion of the adsorption pad. The method of claim 17, The opening portion of the housing has a flat portion provided at a bottom portion and a tapered portion provided at an outer circumferential edge of the flat portion, wherein the flat portion has a bottom portion of the suction pad contacted to regulate an inclination angle of the suction pad. Adsorption device. The method of claim 17, The suction pad holding means is provided at an end of the opening of the housing and has a locking portion for holding the suction pad in the opening of the housing. The method of claim 24, The locking portion is provided at an end portion of the opening portion, and formed in a shape in which the opening portion is tightened inward.

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