KR20040053375A - Device for appearance inspection - Google Patents

Abstract

BACKGROUND OF THE INVENTION Field of the Invention [0001] The present invention relates to a light transmitting apparatus for external inspection used for external inspection of a large substrate such as a liquid crystal glass substrate, comprising: an illumination light source, a reflection optical system for reflecting light from the illumination light source toward an inspection object, and the reflection optical system And a condensing optical system arranged in a reflected optical path of light, wherein the condensing optical system is divided into at least two parts, and the entire surface of the member under test can be irradiated by the luminous flux from each of the divided condensing optical systems.

Description

Appearance Inspection Device {DEVICE FOR APPEARANCE INSPECTION}

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a light emitting device for external inspection used for external inspection of large substrates such as liquid crystal glass substrates.

In order to maintain the quality of the glass substrate of a conventional liquid crystal display, the surface inspection of the pattern printed on the substrate or the turbulence or stain of the pattern printed on the substrate, as well as the appearance inspection of the film thickness of the resist or the like on the substrate or the pinhole on the ITO film, etc. Visual inspection of adhered dust and scratches is becoming very important. The appearance inspection of such a substrate includes the appearance inspection disclosed in Japanese Patent Application Laid-Open No. 93-232040, Japanese Patent Application Laid-Open No. 93-232032, Japanese Patent Application Laid-Open No. 97-273996, and Japanese Patent Application Laid-Open No. 2000-97864. A flood projector is used.

Fig. 7 is a view showing a schematic configuration of a light emitting device for visual inspection disclosed in Japanese Patent Laid-Open No. 93-232032. In the external light inspection apparatus shown in Fig. 7, the external appearance inspection such as unevenness of the film thickness of a resist on a glass substrate and pinholes on an ITO film is performed.

An elliptical rotating mirror 102 is disposed behind the light source 101. The illumination light from the light source 101 is reflected by the elliptic rotation mirror 102 and is collected at the gate 104 through the heat ray absorption filter 103. In addition, the illumination light is incident on the condensing Fresnel lens 106 through the filter 105, and is regulated by the parallel light flux. The glass substrate 107, which is the member to be inspected, is arranged at a predetermined angle with respect to the optical axis in the parallel light beam regulated by the light collecting Fresnel lens 106.

In the external light inspection apparatus having such a configuration, the surface of the glass substrate 107 is illuminated without spots, and the observer 108 can observe the minute scattered light generated from the surface of the glass substrate 107 with the naked eye. . As a result, unevenness of the film thickness of the resist or the like on the glass substrate 107 or defective portions 109 such as the pinhole on the ITO film are detected.

Fig. 8 is a diagram showing a schematic configuration of a light emitting device for visual inspection disclosed in Japanese Patent Laid-Open No. 93-232032. In FIG. 8, the same code | symbol is attached | subjected to the same part as FIG. In the external inspection light transmitting device shown in Fig. 8, the external inspection such as turbulence or stain of the pattern printed on the glass substrate, dust or scratches attached to the surface of the substrate is performed.

In FIG. 8, in addition to the configuration of FIG. 7, the light transmitting Fresnel lens 110 is further disposed in the parallel light beam regulated by the light collecting Fresnel lens 106. A glass substrate 107, which is a member to be inspected, is disposed at a predetermined angle with respect to the optical axis in the optical path just in front of the convergence position A of the light beams by the light-transmitting Fresnel lens 110.

In the external inspection light transmitting device having such a configuration, the surface of the glass substrate 107 is illuminated without spots, and the observer 108 has the glass substrate 107 near the convergence position S of the reflected light from the glass substrate 107. The fine scattered light generated from the surface of can be observed by the naked eye. Thereby, the defect part 111, such as turbulence or a stain of the pattern printed on the glass substrate 107, or the dust or a dent attached to the surface of the glass substrate 107, is detected.

Recently, however, liquid crystal displays have tended to be larger in size. Accompanying this, the glass substrate used for the liquid crystal display is enlarged, and there is also a size of 1,000 mm × 1,200 mm.

However, in any of the external light inspection apparatuses having the above-described configuration, if the glass substrate is enlarged, the light collecting fresnel lens 106 or the light transmitting fresnel lens 110 equal to or larger than the size of the glass substrate is required. . For this reason, these light collecting fresnel lenses 106 and light transmitting fresnel lenses 110 tend to be larger in size.

In the current technology, it is difficult to make the lens diameter larger than necessary to keep the lens performance constant, thus making it difficult to illuminate the glass substrate 107 without spots. For this reason, there exists a problem that the reliability of the external inspection of a large board | substrate falls. In addition, when the large light collecting fresnel lens 106 or the light emitting fresnel lens 110 is used, it is difficult to attach the device to the lens so that the lens does not bend due to its own weight, and the size of the device cannot be avoided. Occurs.

An object of the present invention is to provide an appearance inspection apparatus which can reduce the height of the device by minimizing the light from the light source. Another object of the present invention is to provide a visual inspection apparatus capable of miniaturizing the height of the device by reducing the focal length of the illumination system by dividing the condensing optical system into a plurality.

(1) An external light inspection apparatus according to the present invention includes an illumination light source, a reflection optical system for reflecting light from the illumination light source toward an inspected member, and a condensing optical system disposed in the reflection optical path of the reflection optical system. The condensing optical system is divided into at least two parts, and the entire surface of the member under test can be irradiated by the luminous flux from each of the divided condensing optical systems.

(2) The light transmitting apparatus for visual inspection of the present invention is the apparatus described in the above (1), and the illumination light beams from the respective condensing optical systems respectively irradiate partial regions of the inspected member.

(3) The light transmitting apparatus for inspecting the appearance of the present invention is the apparatus described in the above (1), and the illumination light source and the reflection optical system are provided for each condensing optical system.

(4) The light transmitting device for visual inspection of the present invention is the device described in (1) above, and further crosses or concentrates the optical axes of the respective light condensing optical systems near the focal point.

(5) The light transmitting device for inspecting the appearance of the present invention is the device described in (1) above, and the illumination light source is provided in common for a plurality of pairs of the condensing optical systems.

(6) The light transmitting apparatus for inspecting the appearance of the present invention is the apparatus described in the above (1), wherein the reflecting optical system consists of a first reflecting member and a second reflecting member, and the first reflecting member is separated from the illumination light source. Is reflected toward the second reflecting member, and the second reflecting member reflects the light from the first reflecting member toward the inspected member.

(7) The light transmitting apparatus for inspecting the appearance of the present invention is the apparatus according to the above (6), and the second reflecting member is swingable.

(8) The light emitting device for external inspection of the present invention is the device described in (7) above, and the irradiation area of the member under test can be changed by interlocking the illumination light source and the first reflecting member.

(9) The light-emitting device for visual inspection of the present invention is the device according to any one of (1) to (8), and further enables the illumination light source and the condensing optical system to be moved relatively in the optical axis direction.

BRIEF DESCRIPTION OF THE DRAWINGS The side view which shows schematic structure of the light transmission device for visual inspection which concerns on 1st Embodiment of this invention.

Fig. 2 is a front view showing a schematic configuration of a light emitting device for inspecting appearance according to the first embodiment of the present invention.

Fig. 3 is a side view showing the schematic configuration of a light transmitting device for visual inspection according to a second embodiment of the present invention.

4 is a front view showing a schematic configuration of a light transmitting apparatus for visual inspection according to a second embodiment of the present invention.

Fig. 5 is a side view showing a schematic configuration of a light transmitting device for visual inspection according to a third embodiment of the present invention.

Fig. 6 is a bottom view showing a schematic configuration of a light transmitting apparatus for visual inspection according to a third embodiment of the present invention.

7 is a view showing a schematic configuration of a light emitting device for inspecting appearance according to a conventional example.

8 is a view showing a schematic configuration of another light-emitting device for visual inspection according to a conventional example.

※ Explanation of symbols for main parts of drawing

1: device body 2: holder

3: glass substrate 4, 8, 10, 21: illumination light source

5, 22, 51: Reflective mirror 6: Condensing optical system

7: illumination light 20: illumination optical system

31: area of the forearm half 32: area of the fore half

52: support 61: first Fresnel lens

62: second Fresnel lens

Embodiments of the present invention will be described below with reference to the drawings.

BRIEF DESCRIPTION OF THE DRAWINGS It is a side view which shows schematic structure of the light transmission device for visual inspection which concerns on 1st Embodiment of this invention. 1, the holder 2 is arrange | positioned inside the apparatus main body 1. As shown in FIG. This holder 2 holds a large glass substrate 3 used for a flat display such as an LCD, for example. The center of the holder 2 is rotatably supported, and the holder 2 is capable of rising and falling (swinging) or reversing in the front-rear direction in a range of a predetermined angle about the supporting portion. It is also possible to swing the holder 2 in the left and right directions or in the front and rear and left and right directions.

A plurality of first illumination light sources 4 are provided above the inside of the apparatus body 1. The illumination light source 4 consists of a metal halogen lamp, for example. The illumination light source 4 is arrange | positioned 4 in total in the front-back, left-right direction toward the front side of the apparatus main body 1. As shown in FIG. In FIG. 1, only the two illumination light sources 4 and 4 are shown for the sake of convenience.

In addition, a plurality of reflecting mirrors 5, which are reflecting optical systems, are respectively provided on the upper side of the apparatus main body 1 in correspondence with the respective illumination light sources 4. Four reflecting mirrors 5 are arranged in front, rear, left and right directions toward the front side. Each reflecting mirror 5 is arranged at a predetermined angle with respect to the horizontal direction. The two reflective mirrors 5 on the front side face the front side downward so as to reflect the light from each illumination light source 4 on the front side in the glass substrate direction described later. The rear two reflecting mirrors 5 face the rear side downwards so as to reflect the light from the respective illumination light sources 4 on the rear side in the glass substrate direction described later.

The light converging optical system 6 divided into four reflection optical paths of these reflection mirrors 5 is arranged. Each condensing optical system 6 has a first Fresnel lens 61 and a second Fresnel lens 62 formed in a rectangular shape. The first Fresnel lens 61 enters illumination light from the reflecting mirror 5 and emits parallel light beams. The second Fresnel lens 62 converges the parallel light beam incident from the first Fresnel lens 61 and irradiates the glass substrate 3 as the illumination light beam 7.

These four condensing optical systems 6 (6FL, 6FR, 6RL, 6RR) are arranged side by side in the front and rear and left and right directions of the apparatus main body 1, respectively. In FIG. 1, for convenience, only two condensing optical systems 6 (6FL, 6RL) are shown. The two condensing optical systems 6 (6FL, 6FR) positioned bilaterally symmetrically on the front side of the apparatus main body 1 have width dimensions for the two condensing optical systems 6 (6RL, 6RR) symmetrically positioned on the rear side. The right and left dimensions are the same, and the depth dimension (front and rear dimensions) is slightly short. The two condensing optical systems 6 (6RL, 6RR) positioned symmetrically on the rear side of the apparatus main body 1 have the same width dimension with respect to the two condensing optical systems 6 (6FL, 6FR) on the front side. The dimension is formed slightly longer.

In addition, a plurality of second illumination light sources 8 are provided above the inside of the apparatus body 1. The illumination light source 8 consists of sodium lamps, for example. The illumination light source 8 is arrange | positioned four in total in the front-back, left-right direction toward the front side of the apparatus main body 1. As shown in FIG. These illumination light sources 8 irradiate the glass substrate 3 with the light of the wavelength different from the metal halogen lamp of the illumination light source 4 through the reflection mirror 5 and the condensing optical system 6, respectively.

Fig. 2 is a front view showing the schematic configuration of the light emitting device for visual inspection. In FIG. 2, the same code | symbol is attached | subjected to the same part as FIG. As shown in FIG. 2, each one side edge of the two condensing optical systems 6 (6FL, 6FR) on the front side of the apparatus main body 1 is in contact with each other near the center of the width direction of the apparatus main body 1. Each condensing optical system 6 (6FL, 6FR) arranged on the front side is inclined downward by a predetermined angle θ1 around each side edge that is in contact. At this time, the luminous fluxes 7 and 7 from each condensing optical system 6 (6FL, 6FR) intersect or concentrate the optical axes of each condensing optical system 6 near the focal point so that a part of them overlaps on the glass substrate 3. . As a result, the area 31 of the front half of the glass substrate 3 is partially illuminated.

Moreover, one side edge of the two condensing optical systems 6 (6RL, 6RR) behind the apparatus main body 1 is in contact with each other near the center in the width direction of the apparatus main body 1 as described above. And each condensing optical system 6 (6RL, 6RR) arrange | positioned at the rear side is inclined downward by the predetermined angle (theta) 1 about each side edge which contact | connects. At this time, the luminous fluxes 7 and 7 from each condensing optical system 6 (6RL, 6RR) intersect or concentrate the optical axes of each condensing optical system 6 near the focal point so that a part of them overlap each other on the glass substrate 3. . Thereby, the region 32 of the rear half on the glass substrate 3 is partially illuminated.

In addition, the two condensing optical systems 6 (6RL, 6RR) located on the rear side of the apparatus main body 1 are also prescribed downwards with respect to the two condensing optical systems 6 (6FL, 6FR) located on the front side of the apparatus main body 1. Inclined by angle Accordingly, each converging light of each condensing optical system 6FR and 6FL or 6RR and 6RL arranged before and after converges to different positions A, A ', B, and B' near the focal point.

Accordingly, the converged light of the four condensing optical systems 6 (6FL, 6FR, 6RL, 6RR) arranged on the front, rear, left, and right sides partially overlaps the entire converged light on the glass substrate 3.

Incidentally, the inclination angles of the front, rear, left, and right of the condensing optical system 6 are determined by the light beams 7 transmitted through the condensing optical system 6 even when the glass substrate 3 is rotated together with the holder 2. It is set at an arbitrary angle so that the entire surface can be uniformly illuminated. In addition, two condensing optical systems 6 (6FL, 6FR) located at the front of the apparatus main body 1 and two condensing optical systems 6 (6RL, 6RR) located at the rear of the apparatus main body 1 have approximately focal lengths. I'm using the equivalent However, for example, the focal lengths of the two condensing optical systems 6 (6FL, 6FR) located at the front side of the apparatus main body 1 are set short, and the two condensing optical systems 6 (located at the rear of the apparatus main body 1 ( 6RL, 6RR) may be set longer.

Next, the operation of the external light inspection apparatus configured as described above will be described. First, the observer places the glass substrate 3, which is the member to be inspected, on the holder 2 and holds it. Next, the observer raises the holder 2 corresponding to the height of the gaze as shown in FIG. 1 and inclines it at a predetermined angle.

In this state, the light from each illumination light source 4 is reflected by each reflection mirror 5, and is incident on each of four condensing optical systems 6. Then, the condensing optical system 6 emits parallel light beams from the first Fresnel lens 61, emits light beams 7 from the second Fresnel lens 62, and the glass substrate on the holder 2. Irradiate the partial region of 3) uniformly. As a result, the observer can visually inspect the entire surface of the glass substrate 3 illuminated by the illumination light beams 7, such as scratches and dirts.

According to the first embodiment, the light from each illumination light source 4 is reflected on the glass substrate 3 side with the reflecting mirror 5, respectively, and the condensing optical system 6 is disposed in the reflecting light path. Four condensing optical systems 6 are provided, and the entire surface of the glass substrate 3 is illuminated by irradiating the light beams 7 from these condensing optical systems 6 to the partial region of the glass substrate 3. For this reason, even if the glass substrate 3 becomes large, the whole surface of a board | substrate can be illuminated without spots, and macro observation which inspects a flaw and a dirt etc. can be performed with high precision.

Fig. 3 is a side view showing a schematic configuration of a light transmitting apparatus for visual inspection according to a second embodiment of the present invention. In FIG. 3, the same code | symbol is attached | subjected to the same part as FIG.

In FIG. 3, two illumination light sources 10 are provided above the four condensing optical systems 6 arranged side by side in the front and rear directions of the apparatus body 1. The illumination light source 10 consists of a metal halogen lamp, for example. The illumination light sources 10 are arranged side by side in the left and right direction toward the front side of the apparatus body 1. Further, each condensing optical system 6 (6FL, 6FR, 6RL, 6RR) is inclined toward the center of the glass substrate 3 as in the first embodiment, and each converging light has a different position (A, near the convergence point). A ', B, B'), and part of the whole converged light overlaps on the glass substrate 3.

In FIG. 3, only one illumination light source 10 on the left side is shown for convenience. These illumination light sources 10 are rotatable in a range of 180 ° in the direction of the arrow in the drawing with respect to the vertical direction by a drive mechanism (not shown).

4 is a front view showing a schematic configuration of the light emitting device for visual inspection. In FIG. 4, the same code | symbol is attached | subjected to the same part as FIG. In this configuration, each illumination light source 10 is rotated 180 ° in the same direction, and the light from each illumination light source 10 is reflected in the state toward the respective reflection mirror 5 on the front side of the apparatus body 1, respectively. It is irradiated to the area | region 31 of the front half on the glass substrate 3 via the mirror 5 and each condensing optical system 6.

In addition, each light source 10 is rotated 180 degrees in the other direction, and the light from each light source 10 is reflected in each of the reflection mirrors 5 at the rear of the apparatus body 1, respectively. (5) and each condensing optical system 6 are irradiated to the area 32 of the rear half on the glass substrate 3.

That is, by changing the irradiation direction by rotating the illumination light source 10 180 °, it is possible to alternately illuminate each area of the front half and rear half of the glass substrate (3). Thereby, the macro observation which inspects the flaw, the dirt, etc. of the glass substrate 3 can be performed with high precision.

According to the second embodiment, since the two illumination light sources 10 can be configured, the number of parts is smaller than that of the first embodiment, so that the device can be miniaturized and manufactured at low cost.

Fig. 5 is a side view showing a schematic configuration of a light emitting device for visual inspection according to a third embodiment of the present invention. In FIG. 5, the same code | symbol is attached | subjected to the same part as FIG. In FIG. 5, a plurality of pairs (two pairs in the illustrated example) of a drive type illumination optical system 20 including an illumination light source 21 and a reflection mirror 22 are provided above the inside of the apparatus main body 1. The illumination light source 21 consists of a metal halogen lamp, for example. The illumination optical system 20 is arrange | positioned 2 pairs in the left-right direction toward the front side of the apparatus main body 1 in total. 5 shows only the illumination optical system 20 (20L) on the left side for convenience.

In addition, a plurality of reflecting mirrors 51, which are reflecting optical systems, are respectively provided above the inside of the apparatus main body 1 in correspondence with the respective illumination optical systems 20 (20L, 20R). Two reflecting mirrors 51 are disposed in the rear left and right directions toward the front side. The angular reflection mirror 51 can swing in the front-rear direction in the range of a predetermined angle about the support part 52, and reflects the light from each illumination optical system 20 (20L, 20R) in the glass substrate direction mentioned later.

The condensing optical system 6 divided | segmented into each reflection optical path of these reflection mirrors 51 is arrange | positioned. These two light converging optical systems 6 (6L, 6R) are inclined downward by a predetermined angle and are arranged side by side in the left and right directions of the apparatus main body 1. At this time, each converging light of each condensing optical system 6L, 6R converges to different positions A, A 'near the convergence point, and a part of the whole converging light overlaps on the glass substrate 3. 5 shows only one condensing optical system 6 (6L) on the left side for convenience.

Fig. 6 is a bottom view showing the schematic configuration of the light emitting device for visual inspection. In FIG. 6, the same code | symbol is attached | subjected to the same part as FIG. In each of the illumination optical systems 20 (20L, 20R), the illumination light source 21 and the reflection mirror 22 are driven in the left and right directions, and the reflection mirror 22 is rotated by a cam mechanism not shown. Each illumination light source 21 of the illumination optical system 20 (20L, 20R) irradiates light to a left direction and a right direction, respectively. The reflection mirror 22 is arrange | positioned at the optical path of each illumination light source 21, respectively. Each reflecting mirror 22 reflects the light from each illumination light source 21 toward the reflecting mirror 51 in the inclined direction.

When each of the illumination optical systems 20 (20L, 20R) is driven from the state of A to the state of B, each illumination light source 21 moves in the outer direction (left direction, right direction) of the apparatus body 1, respectively. In response to each illumination light source 21, each reflecting mirror 22 moves in the outward direction and rotates slightly outward by the cam mechanism. Light from each illumination light source 21 is irradiated in the inclined direction by the reflection mirror 22, respectively. As a result, the light from each of the illumination optical systems 20 (20L and 20R) is irradiated to the outside (left and right) regions on the glass substrate 3 through the respective reflection mirrors 51 and the condensing optical systems 6, respectively. . Each of the illumination optical systems 20L and 20R may be driven independently or may be driven in the same direction.

In addition, when each illumination optical system 20 (20L, 20R) is driven from the state of B to the state of A, each illumination light source 21 moves inwardly (left direction, right direction) of the apparatus main body 1, respectively. . In response to each of the illumination light sources 21, each of the reflection mirrors 22 moves in the corresponding inward direction and rotates slightly inward by the cam mechanism. Light from each illumination light source 21 is irradiated in the inclined direction by the reflection mirror 22, respectively. As a result, light from each of the illumination optical systems 20 (20L and 20R) is irradiated to the inside (right and left) regions on the glass substrate 3 through the respective reflection mirrors 51 and the light condensing optical system 6, respectively. .

That is, the illumination optical system 20 (20L, 20R), which is composed of the illumination light source 21 and the reflection mirror 22 and is arranged symmetrically, can be moved in the left and right directions, and the respective reflection mirrors 51 are moved forward and backward. By enabling the rotational movement, the irradiated light can be scanned front, back, left, and right to illuminate each region on the glass substrate 3 arbitrarily. As a result, illumination light can be scanned on the entire surface of the glass substrate 3 by the reflection mirrors 22 and 51, and macro observation for inspecting the scratches and dirts of the glass substrate 3 can be performed with high accuracy. have.

According to the third embodiment, since it can be composed of two illumination light sources 21 and two reflection mirrors 51, the number of parts is smaller than that of the first and second embodiments, and the device can be downsized. It can be produced at low cost.

In the first to third embodiments described above, the entire surface on the glass substrate 3 is uniformly illuminated by using four or two condensing optical systems 6. Not only this but the area | region of partial illumination on the glass substrate 3 may be subdivided again using three or more condensing optical systems 6. If the light beam diameter of the condensing optical system 6 can be reduced by subdividing the illumination region, the condensing lens can also be configured instead of the Fresnel lens.

In the second embodiment, only the illumination light source 10 is rotated, but one illumination light source 10 and one reflection mirror 5 can be driven in conjunction with each other so that the front half on the glass substrate 3 Each area of the posterior half may be illuminated alternately. In this way, the number of parts is further reduced, so that the device can be miniaturized and manufactured at low cost.

Moreover, you may make it moveable with respect to the reflection mirror 5, 5, 22 (optical axis direction) by the drive mechanism which does not show the illumination light source 4, 10, 21 in the said 1st-3rd embodiment, respectively. . In this case, the light beam reflected from the reflecting mirrors 5, 5, 22 becomes wider as the illumination light sources 4, 10, 21 are closer to the reflecting mirrors 5, 5, 22, so that the irradiation range on the glass substrate 3 Becomes large. Also, as the illumination light sources 4, 10 and 21 move away from the reflecting mirrors 5, 5 and 22, the light beam reflected from the reflecting mirrors 5, 5 and 22 narrows, so that the irradiation range on the glass substrate 3 is reduced. Becomes smaller.

Similarly, the light converging optical system 6 may be movable with respect to the reflective mirrors 5, 5, 51 (optical axis direction) by a drive mechanism not shown. In this case, as the light converging optical system 6 is brought closer to the reflecting mirrors 5, 5, 51, the light beam reflected from the reflecting mirrors 5, 5, 51 becomes wider, so that the irradiation range on the glass substrate 3 becomes larger. Further, as the light converging optical system 6 is moved away from the reflecting mirrors 5, 5 and 51, the light beam reflected from the reflecting mirrors 5, 5 and 51 becomes narrower, so that the irradiation range on the glass substrate 3 becomes smaller. In addition, each illumination light source and each condensing optical system can be individually moved, and the inclination angle of each condensing optical system can be adjusted individually.

Thus, the irradiation range can be adjusted to the size of the glass substrate 3 by moving the illumination light source and the condensing optical system relatively and shifting the position of the illumination light source in the optical axis direction with respect to the focal position of the condensing optical system.

Further, a liquid crystal scattering plate (transmissive liquid crystal plate) that can be opaque or transparent can be provided for the purpose of giving a predetermined optical characteristic to the converged light beam guided from the condensing optical system. With the lighter illuminator using this liquid crystal scattering plate, the entire surface of the large substrate can be illuminated without spots, and defects such as spots of the film thickness and pinholes on the transparent conductive film can be detected well.

According to the present invention as described above, the entire surface of the large inspected member can be illuminated without spots, and macro inspection such as scratches and dirts can be performed with high accuracy. In addition, the device can be miniaturized by returning light from the illumination system to the mirror, dividing the condensing optical system into a plurality, and reducing the height of the apparatus by shortening the focal length of the illumination system.

This invention is not limited only to each said embodiment, It can implement by deforming timely in the range which does not change a summary.

According to the present invention, it is possible to provide a compact external inspection light emitting device capable of illuminating the entire large inspection object without spots.

Claims (12)

In the appearance inspection apparatus that examines the surface of a large substrate and performs a macro inspection on the surface of the substrate, A holder for holding the large substrate, the holder being rotatably installed so as to rise and tilt in the front and rear directions within the apparatus body; An illumination light source disposed above the inside of the apparatus body to illuminate a surface of the large substrate; A first reflection mirror disposed on an emission light axis of the illumination light source and reflecting the illumination light emitted from the illumination light source upwardly inclined; A second reflection mirror disposed above the holder and reflecting the illumination light reflected by the first reflection mirror toward the substrate surface of the large substrate held by the holder; And a condensing optical system disposed between the second reflecting mirror and the holder to converge the illumination light reflected by the second reflecting mirror to irradiate the surface of the large substrate. The method of claim 1, The illumination light source is arranged so that the emission light axis is substantially horizontal, the first reflection mirror is installed to be movable on the emission light axis of the illumination light source, and the illumination light is moved to the second reflection mirror by moving the first reflection mirror. Appearance inspection apparatus, characterized in that scanning through the surface of the large substrate through. The method of claim 1, The illumination light source is disposed so that the emission light axis is substantially horizontal, and the illumination light source is installed to be movable along the emission light axis, and the first reflection mirror is connected to the illumination light source to be movable along the emission light axis. And the second reflection mirror is installed to be rotatable in a direction crossing the moving direction of the first reflection mirror, and the movement of the illumination light source and the first reflection mirror and the rotation movement of the second reflection mirror. And scanning the illumination light reflected by the first and second reflection mirrors on the large substrate. The method of claim 1, The illumination light source is disposed so that the emission light axis is approximately horizontal, and the illumination light source is installed to be movable in the horizontal direction along the emission light axis toward the front of the apparatus main body, and the first reflection mirror is mounted on the illumination light source. Cooperating with the exiting optical axis so as to be movable in the left and right directions, and installing the second reflecting mirror so as to be rotatable in the front and rear directions with respect to the left and right directions, and installing the illumination light source and the first reflecting mirror. Appearance inspection apparatus characterized by scanning the illumination light reflected by the first and second reflection mirror in the front and rear, left and right directions on the large substrate by moving in the left and right direction and rotating the second reflection mirror in the front and rear directions. . The method of claim 1, The condensing optical system is arranged in at least two divided light reflection paths between the second reflecting mirror and the large substrate, and inclines each divided condensing optical system so that a part of the converged light from each condensing optical system overlaps each other on the large substrate. Appearance inspection apparatus, characterized in that. The method of claim 1, The illumination light source and the first reflection mirror are disposed in two pairs in the left and right directions with respect to the front of the apparatus main body, and the second reflection mirrors are arranged in two in the left and right directions corresponding to the respective reflection light paths of the first reflection mirrors. And the condensing optical system is divided into two parts in the left and right directions so as to correspond to the reflection light paths of the second reflection mirrors. The method according to claim 5 or 6, The condensing optical system includes a Fresnel lens divided into a plurality of second reflecting mirrors, and condenses the illumination light reflected by the second reflecting mirrors to illuminate a surface of the large substrate. Visual inspection device. The method of claim 1, The condensing optical system is composed of a plurality of Fresnel lenses corresponding to the second reflecting mirror, and includes a transmissive liquid crystal plate that provides scattering characteristics with respect to the luminous flux converged by the Fresnel lens. Device. The method according to any one of claims 2 to 4, wherein The first reflecting mirror moves along the emission light axis in conjunction with the illumination light source, and rotates so that the reflecting surface of the first reflecting mirror faces the second reflecting mirror by a cam mechanism. Inspection device. The method of claim 1, The illumination light source and the first reflecting mirror are two pairs of symmetrically disposed above the apparatus body, and each of the illumination light source and each of the first reflection mirror is installed to be movable along the output light axis of the respective illumination light source, The second reflecting mirrors corresponding to the first reflecting mirrors may be rotatably installed in a direction crossing the moving direction of the first reflecting mirrors, and the first reflecting mirrors and the second reflecting mirrors are independently moved. And two-dimensionally scanning the entire surface of the large substrate through the condensing optical system by rotating. The method of claim 1, And changing an interval between the first reflecting mirror and the illumination light source corresponding to the first reflecting mirror and adjusting an irradiation range of the illumination light irradiated onto the large substrate surface through the first and second reflecting mirrors. The method of claim 1, And changing an interval between the condensing optical system and the second reflecting mirror and adjusting an irradiation range of the illumination light irradiated onto the large substrate surface through the first and second reflecting mirrors.