TWI622765B - Lighting apparatus and inspection apparatus - Google Patents

Abstract

The present invention can easily increase the irradiation intensity of light per unit area of an object. An illumination device according to the present invention includes a row of emitting portions and a reflecting portion. Here, the emitting section row has a plurality of emitting sections arranged in a predetermined arrangement direction and each emitting light in a predetermined emitting direction. The reflecting portion has a reflecting surface which is arranged so as to be orthogonal to the arrangement direction when viewed from the crossing direction which intersects with the arrangement direction and can reflect light. In addition, the plurality of emitting portions include two or more emitting portions that emit the same kind of light, and the two or more emitting portions include a first emitting portion and a second emitting portion that are sequentially arranged from the side near the reflecting surface. In addition, when viewed from above in the cross direction, the first interval between the reflecting surface and the first emitting portion is equal to or less than one and a half of the second interval between the first emitting portion and the second emitting portion.

Description

Lighting device and inspection device

The present invention relates to a lighting device and an inspection device including the same.

There is known a technique for inspecting the appearance of various substrates such as a printed substrate (for example, Patent Documents 1 to 5). In this technology, for example, a substrate having various structures such as a soldering portion, a metal wiring pattern, and the like is obtained by taking an image using a camera sensor or the like, and the image is used as an object. Image processing, and can automatically detect the status and defects of various structures. However, in general printed boards and the like, there may be irregularities such as a plurality of rolling marks on the surface of a metal wiring pattern. In this case, for example, if epi-illumination (direct illumination) is used to irradiate light from the front to the inspection target area (also referred to as the inspection target area), for example, the unevenness of the surface is photographed as a part with excessive contrast Situation. At this time, it is difficult to distinguish a portion having an excessively strong contrast from other portions only by image processing, and it is difficult to appropriately detect a defect or the like from an image. Therefore, a method has been proposed in which light from a light source is reflected on the inner surface of a hemispherical dome to irradiate the inspection target area, thereby increasing the angular range of the light irradiated on the inspection target area (also referred to as irradiation angle range, irradiation (Solid angle) technology called diffuse lighting (for example, Patent Document 1). Thereby, it is possible to suppress the abnormality in the image where the unevenness is photographed as a part having an excessively high contrast. On the other hand, as long as the inspection target area is a mirror-like surface with less unevenness such as a rolling mark, when the light is irradiated with diffused illumination, the inspection target area can be photographed as an extremely dark area. For this reason, for example, a combination of diffuse illumination using a hemispherical dome and epi-illumination (for example, Patent Document 2) is considered. For example, an illumination (also referred to as coaxial epi-illumination) with a light beam having a central axis of the optical axis of the imaging lens provided for the imaging sensor as the inspection object area by a half mirror can be used. [Prior Art Literature] [Patent Literature] [Patent Literature 1] Japanese Patent Laid-Open No. 2004-125644 [Patent Literature 2] Japanese Patent Laid-Open No. 11-84258 [Patent Literature 3] Japanese Patent Laid-Open No. 8-29138 Gazette [Patent Document 4] Japanese Patent Laid-Open No. 2000-266681 [Patent Document 5] Japanese Patent Laid-Open No. 2011-69651

[Problems to be Solved by the Invention] However, in the technique of Patent Document 1, for example, light reflected by the inner surface of a hemispherical dome is irradiated substantially uniformly over a wide area in a circle. Therefore, for example, when a linear sensor or a rectangular area sensor is used, the area not captured by the sensor is also irradiated with light, resulting in a decrease in light utilization efficiency. In addition, for example, in the technique of Patent Document 2, the presence of a semi-reflective mirror for coaxial epi-illumination reduces the intensity of the light reaching the imaging sensor from the inspection target area, and the light utilization efficiency decreases. In addition, for example, in the technique of Patent Document 3, a blue LED (Light Emitting Diode) is arranged on a hemispherical frame, and all the reflection surfaces of the object to be inspected are irradiated with light. Therefore, for example, it is necessary to arrange a plurality of blue LEDs, and as the number of blue LEDs is increased, the materials and costs required for the manufacture of the inspection device are increased, and the energy consumption of the inspection device is increased. In addition, for example, in the technique of Patent Document 4, the light exit surface of the light guide is formed into a substantially semi-cylindrical surface that surrounds the linear irradiation area of the inspection object. Therefore, for example, an excessively large size of a lighting device including a light source is caused. In particular, in the case where the imaging element and the light source are scanned and photographed together, abnormalities such as an increase in the size of the lighting device and an increase in the amount of energy required to scan various structures may occur. In addition, for example, in the technique of Patent Document 5, not only epi-illumination is performed with diffuse illumination. Therefore, as long as the inspection target area is a mirror-like surface with less unevenness such as rolling marks, in order to shoot the inspection target area brighter, it is necessary to increase the amount of light emission, which may increase the energy consumption of the lighting device and the like. abnormal. That is, in the inspection techniques of the aforementioned Patent Documents 1 to 5, for example, there is room for suppressing an increase in energy consumption and improving the light utilization efficiency with a simple structure. Such a problem is not limited to an inspection device, but is a general technique that is common in that a desired area is irradiated with light. This invention was made in view of the said subject, and an object of this invention is to provide the technique which can increase the irradiation intensity of the light per unit area of an object easily. [Technical means to solve the problem] In order to solve the above-mentioned problem, the lighting device of the first aspect includes an emitting unit row having a plurality of emitting units that are arranged in a predetermined arrangement direction and each emit light in a predetermined emitting direction; And a reflecting part having a reflecting surface arranged in a manner orthogonal to the above-mentioned arrangement direction and capable of reflecting light when viewed from a crossing direction crossing the above-mentioned arrangement direction; and the plurality of emitting parts include two emitting the same kind of light The above-mentioned emitting portion; the above-mentioned two or more emitting portions include a first emitting portion and a second emitting portion which are sequentially arranged from a side close to the reflecting surface; and the reflecting surface and the first emitting portion are arranged in a plan view in the crossing direction. The first interval between one emitting portion is equal to or less than one and a half of the second interval between the first emitting portion and the second emitting portion. The lighting device of the second aspect is the lighting device of the first aspect, wherein the plurality of emitting portions include two or more first emitting portions that emit the first light, and two or more of the second emitting portions. The second emitting portion; and the two or more first emitting portions include the first first emitting portion and the second first emitting portion arranged in order from the side close to the reflecting surface; The second emitting portion includes a first second emitting portion and a second second emitting portion which are sequentially arranged from a side close to the reflecting surface. When viewed in a plan view in the crossing direction, the reflecting surface and the first first emitting portion are arranged. The third interval between the emitting portions is equal to or less than one and a half of the fourth interval between the first first emitting portion and the second first emitting portion. When viewed in the cross direction, the reflecting surface and the first second emitting portion are emitted. The fifth interval of the part is equal to or less than one and a half of the sixth interval between the first and second emission units; the fifth interval is shorter than the third interval; and the sixth interval is shorter than the first interval. 4 intervals. The lighting device of the third aspect is the lighting device of the second aspect, wherein the first light includes red light and the second light includes blue light. The fourth aspect of the illuminating device is the second or third aspect of the illuminating device. The illuminating device includes a control unit that can be selectively set to include emitting the first type from the two or more first emitting portions. One of two or more kinds of emitting states of the first kind of light emitting state and two or more kinds of emitting states of the second kind of light emitting from the two or more second emitting sections. The lighting device of the fifth aspect is the lighting device of any one of the first to third aspects, and includes: a plurality of rows of the above-mentioned emission section rows; and the plurality of rows of the emission section rows have: a first emission section row, which A first plurality of emitting portions arranged along the above-mentioned arrangement direction and each emitting light in the first emitting direction; and a second emitting portion row having a second complex number arranged in the above-mentioned arrangement direction and each emitting light in the second emitting direction And the first emitting direction intersects the second emitting direction when viewed in plan from the arrangement direction; and the lighting device includes a control unit that can be selectively set to include the first plurality of emitting units. One of the first lighting state of the emitted light and two or more lighting states of the second lighting state of the light emitted from the second plurality of emitting portions. The inspection device of the sixth aspect includes: the illumination device of any one of the first to fifth aspects; and a light receiving sensor that receives the light from a straight line that extends virtually from the plurality of emitting portions toward the emitting direction. A signal corresponding to the spatial distribution of the intensity of the light from the inspection target area can be obtained by inspecting the light of the inspection target area. The inspection device of the seventh aspect includes: the illumination device of any one of the second to fourth aspects; and a light receiving sensor that receives light from a straight line that extends virtually from the plurality of emitting portions in the emitting direction. The light of the inspection object area can obtain a signal corresponding to the spatial distribution of the intensity of the light from the inspection object area; and the light receiving sensor includes: a plurality of diodes, which are arranged along the The directions are aligned and a signal corresponding to the intensity of the received light can be obtained. [Effects of the Invention] According to the lighting device of any of the first to fifth aspects, for example, because the reflecting surface is present, the emission section is extended in a simulated manner. Therefore, it is possible to easily increase the light per unit area of the object. strength. According to the lighting device of any one of the second to fourth aspects, for example, lighting corresponding to the light receiving sensitivity of the light receiving sensor can be realized. According to the lighting device of the third or fourth aspect, for example, lighting corresponding to a light receiving sensor whose blue sensitivity is lower than that of red can be realized. According to the lighting device of the fifth aspect, for example, the irradiation angle of light can be switched in accordance with the state of the object. According to the inspection device of the sixth or seventh aspect, for example, it is possible to easily increase the intensity of a signal corresponding to the spatial distribution of the intensity of light from the inspection object obtained by the light receiving sensor. Therefore, for example, the accuracy of inspection can be improved. According to the inspection device of the seventh aspect, for example, by realizing an illumination state corresponding to the light receiving sensitivity of the light receiving sensor, the accuracy of the inspection can be improved.

Hereinafter, one embodiment and various modifications of the present invention will be described based on the drawings. In the drawings, parts having the same structure and function are denoted by the same reference numerals, and repeated descriptions are omitted in the following description. In addition, the drawing is a schematic display, and the size and positional relationship of various structures of each drawing can be changed as appropriate. In addition, in FIG. 1 to FIG. 6 and FIG. 8, it is marked that the scanning direction (right direction in FIG. 1) of the measurement unit 5 is + X direction, and the moving direction of the sample support table 3 (upward direction in FIG. 1). XYZ coordinate system for right-handed system in + Y direction. In addition, in FIG. 7 and FIGS. 9 to 13, arrows indicating the Y direction in the XYZ coordinate system are marked. <(1) Outline of Inspection Apparatus> FIG. 1 is a schematic plan view illustrating a schematic configuration of an inspection apparatus 1 according to an embodiment. FIG. 2 is a schematic front view illustrating a schematic configuration of the inspection device 1 according to an embodiment. The inspection device 1 is a device for inspecting the state of an object. Here, the object may include, for example, various industrial products such as various substrates. The state of the object may include, for example, a state of various industrially formed structures such as a state of a wiring pattern formed on a wiring substrate. In addition, the state of the structure may include, for example, defects in the wiring pattern, disconnection, and the like. As shown in FIGS. 1 and 2, the inspection device 1 includes, for example, a base section 2, a sample support table 3, a gate structure 4, a measurement section 5, a cable protection chain 6 (Cableveyor, registered trademark), and a control section 7. . The base portion 2 is a portion that becomes the base of the inspection device 1. The base section 2 includes, for example, a main body section 21 and linear guides 22L and 22R. The main body portion 21 is, for example, a thick plate-shaped portion having a substantially flat upper surface 21U. The linear guides 22L and 22R have two rail portions 22Lr and 22Rr and two sliding portions 22Ls and 22Rs formed on the upper surface 21U, which are spaced apart from each other and extend in parallel. Here, for example, the two rail portions 22Lr and 22Rr extend in the + Y direction. In the linear guide 22L, the sliding portion 22Ls is slidably provided on the rail portion 22Lr along the extending direction of the rail portion 22Lr (here, the ± Y direction). In the linear guide 22R, the sliding portion 22Rs is slidably provided on the rail portion 22Rr along the extending direction of the rail portion 22Rr (here, the ± Y direction). The sample support 3 is, for example, a thick plate-shaped portion having a substantially flat upper surface 3U. The sample supporting table 3 is mounted on the sliding portions 22Ls and 22Rs. That is, the sample support table 3 is provided so as to be slidable in the ± Y direction with respect to the base section 2. In addition, the sample supporting table 3 can slide along the linear guides 22L and 22R by applying a driving force using a driving section (not shown). An inspection object (also referred to as an inspection object) W1 is placed on the upper surface 3U. Here, a region where the inspection object W1 is placed is drawn with a one-dot chain line. The gate-shaped structure 4 is a gate-shaped portion provided on the base portion 2. Here, the gate structure 4 is fixed to the base part 2. A space SP0 is formed between the gate structure 4 and the base portion 2 so that the sample support 3 can pass through. The portal structure 4 includes a beam portion 41 extending in the horizontal direction and a linear guide 42 provided on the upper surface of the beam portion 41. The linear guide 42 includes a rail portion 42r extending in the + X direction, and a slide portion 42s provided slidably with respect to the rail portion 42r. The measurement section 5 includes, for example, a housing section 51 and a scanning section 52. The case portion 51 is attached to the sliding portion 42s. That is, the housing portion 51 is provided so as to be slidable in the ± X direction with respect to the beam portion 41. The housing portion 51 is slidable along the linear guide 42 by applying a driving force using a driving portion (not shown). The scanning section 52 is provided in the housing section 51, for example, and can acquire an image capturing the inspection object W1 placed on the upper surface 3U of the sample support table 3. A window portion on the surface of the housing portion 51 facing the sample support 3 is provided with a scanning portion 52 that allows imaging of the inspection object W1. The window portion may be, for example, a simple opening, or may be formed by a light-transmitting member such as a glass plate. In addition, here, the measurement unit 5 is moved in the ± X direction (main scan) and the sample support table 3 on which the inspection object W1 is placed is moved in the + Y direction (sub-scan). In addition, an image of the inspection object W1 can be captured two-dimensionally from the upper surface side. In addition, for example, if the scanning path of the measurement section 5 is covered with a light-shielding member, the light irradiated from the scanning section 52 to the inspection object W1 does not leak to the surroundings, and can be a good working environment. The cable protection chain 6 supports a portion equipped with a cable, which allows the measurement section 5 to move in the ± X direction on the one hand, and connects the measurement section 5 and the control section 7 on the other. The control unit 7 can control the overall operation of the inspection device 1, and obtains an image obtained by the measurement unit 5 and performs various calculations. By these various calculations, the state of the inspection object W1 can be checked. Here, for example, various defects and the like can be detected by comparing an image obtained by the measurement unit 5 or an image obtained by applying image processing to the image and an image showing a reference structure. Here, the entire operation of the inspection device 1 includes, for example, movement of the measurement section 5 in the ± X direction (main scanning), movement of the sample support table 3 in the + Y direction (sub-scanning), and operation of the scanning section 52. As the control unit 7, for example, a memory unit, a processor that can read and execute a program stored in the memory unit, and a memory that can temporarily store data can be used. An example of the control unit 7 is a personal computer. <(2) Scanning Section><(2-1) Schematic Configuration of Scanning Section> FIG. 3 is a schematic front view illustrating the schematic configuration of the scanning section 52. As shown in FIG. 3, the scanning section 52 includes an illumination section 521 and a light receiving sensor 522. The lighting unit 521 includes first to ninth lighting modules M1 to M9. Each of the first to ninth lighting modules M1 to M9 has substantially the same structure, and has a rotationally symmetrical relationship centered on a point Ps0 located on the inspection object W1 when viewed from the + Y direction. In addition, when this point Ps0 is viewed from the -Z direction, it corresponds to an area (also referred to as an irradiation target area) As0 (see, for example, an irradiation target area) illuminated by light extending linearly in the + Y direction on the inspection object W1 (see FIG. 7 and the like). ). In FIG. 3, the optical axis Lpm of the m-th (m is an integer from 1 to 9) m-th lighting module Mm is depicted. Here, in the m-th lighting module Mm, for example, an emission portion row ELm having a plurality of emission portions Em arranged in a + Y direction which is a preset direction (also referred to as an arrangement direction) is directed along the optical axis. Light was emitted in the direction of Lpm. The light emitted in the direction along the optical axis Lpm is irradiated to the point Ps0 (the irradiation target area As0), for example, via the first lens portion Lma and the second lens portion Lmb. For each of the emitting portions Em, for example, a light source having a high directivity such as a light emitting diode (LED) can be applied. FIG. 4 is a perspective view illustrating an arrangement state of the first lens portion Lma and the second lens portion Lmb of the illumination portion 521. In FIG. 4, attention is paid to the first lens portion Lma and the second lens portion Lmb, and therefore the description of the plurality of emission portions E1 to E9 and the reflection portion Rf1 (see FIG. 7 and the like) is appropriately omitted. As shown in FIG. 4, in the m-th lighting module Mm, each of the first lens portion Lma and the second lens portion Lmb extends along the arrangement direction (+ Y direction) of the plurality of emitting portions Em. Therefore, the second lens portions L1b to L9b of the first to ninth lighting modules M1 to M9 are arranged in a semi-cylindrical shape. That is, the second lens portions L1b to L9b are arranged so as to surround the semi-cylindrical space Asc. Further, the first lens portions L1a to L9a are arranged in a semi-cylindrical shape further outside than the second lens portions L1b to L9b. That is, the first lens portions L1a to L9a are arranged so as to surround a semi-cylindrical space. From another viewpoint, the first lens portions L1a to L9a and the second lens portions L1b to L9b are arranged so as to face each other with a semi-cylindrical space Ahc. Here, for example, a reflection portion Rf1 (see FIG. 7 and the like) is disposed at one end (the end portion on the −Y side) of the semi-cylindrical space Ahc, and the other end (the end on the + Y side) of the semi-cylindrical space Ahc. Section) is provided with a reflection section Rf1 (see FIG. 7 and the like). A reflecting portion Rf1 is arranged at one end (the end portion on the −Y side) of the semi-cylindrical space Asc, and a reflecting portion Rf1 is arranged at the other end (the end portion on the + Y side) of the semi-cylindrical space Asc (see FIG. Figure 7 etc.). As shown in FIG. 3, when viewed from the + Y direction, the optical axes Lp1 to Lp9 of the first to ninth lighting modules M1 to M9 correspond to the virtual normal line Lv0 of the inspection object W1 with the point Ps0 as A straight line obtained by rotating the center counterclockwise by 67.5, 52.5, 37.5, 22.5, 7.5, -22.5, -37.5, -52.5, and -67.5 degrees. Therefore, for example, if viewed from the + Y direction, the optical axis Lp1 of the first lighting module M1 is inclined 67.5 degrees counterclockwise with respect to the normal line Lv0, and the light of the second lighting module M2 The axis Lp2 is inclined by 52.5 degrees with respect to the normal line Lv0 in a direction of counterclockwise rotation with the point Ps0 as the center. When viewed from the + Y direction, the optical axis Lp3 of the third lighting module M3 is inclined 37.5 degrees with respect to the normal line Lv0 in a direction of counterclockwise rotation with the point Ps0 as the center, and the optical axis Lp4 of the fourth lighting module M4 It is tilted 22.5 degrees with respect to the normal line Lv0 in the direction of counterclockwise rotation with the point Ps0 as the center. In addition, when viewed from the + Y direction, the optical axis Lp5 of the fifth lighting module M5 is inclined 7.5 degrees with respect to the normal line Lv0 in a direction of counterclockwise rotation with the point Ps0 as the center. In addition, when viewed in the + Y direction, the optical axis Lp6 of the sixth lighting module M6 is inclined 22.5 degrees with respect to the normal line Lv0 in a clockwise direction with the point Ps0 as the center, and the optical axis Lp7 of the seventh lighting module M7 It is tilted 37.5 degrees with respect to the normal line Lv0 in the direction of clockwise rotation with the point Ps0 as the center. In addition, when viewed from the + Y direction, the optical axis Lp8 of the eighth lighting module M8 is tilted 52.5 degrees with respect to the normal line Lv0 in a clockwise direction with the point Ps0 as the center, and the optical axis Lp9 of the ninth lighting module M9 With respect to the normal line Lv0, it is inclined by 67.5 degrees in the direction of clockwise rotation with the point Ps0 as the center. According to the first to ninth lighting modules M1 to M9, the point Ps0 (irradiation target area As0) on the inspection object W1 can be illuminated from various angles. At this time, in each of the m-th lighting modules Mm, the point Ps0 (the irradiation target area As0) is located on the optical axis Lpm that extends linearly along the direction (also referred to as the emission direction) where the light exits from the plurality of emission portions Em. However, here, the lighting of the lighting unit 521 can be controlled by the control of the control unit 7. Therefore, the illuminating device 8 may be regarded as being constituted by a single illuminating unit 521, or may be regarded as being constituted by a structure including the illuminating unit 521 and the control unit 7. When the lighting device 8 includes the lighting unit 521 and the control unit 7, the lighting unit 8 can control the lighting states of the first to ninth lighting modules M1 to M9 by the control unit 7. For example, one or more of the first to ninth lighting modules M1 to M9 may be selectively set to a lighted state. Specifically, for example, at least one of the states (also referred to as the m-th lighting state) in which light is emitted from the plurality of emitting sections Em of the m-th lighting module Mm may be set. For example, it is possible to selectively set one lighting state including two or more lighting states of the first lighting state and the second lighting state. The light receiving sensor 522 includes, for example, a linear sensor Ls1. The linear sensor Ls1 includes a plurality of light receiving elements Ae1 arranged in a direction corresponding to the arrangement direction (+ Y direction). In each light-receiving element Ae1, for example, a signal corresponding to the intensity of the received light can be obtained by a diode such as a silicon diode. As a specific example of the light receiving sensor 522, for example, a CMOS (Complementary Metal Oxide Semiconductor) sensor can be considered. Here, the direction corresponding to the arrangement direction (+ Y direction) may include, for example, the arrangement direction (+ Y direction) itself, and an optically equivalent direction when the optical path is tortuous due to reflection, refraction, or the like. And, for example, for the inspection object W1 illuminated by the illumination section 521, the light receiving sensor 522 can also obtain a signal corresponding to the spatial distribution of the intensity of the light from the inspection object W1. Here, for example, by moving the measurement section 5 including the scanning section 52 once in the + X direction or the -X direction, it is possible to have the scanning object 52 in the + Y direction and the scanning section 52 in the + Y direction. The length extending in the direction corresponds to the width and the + X direction is a slender area in the length direction, and a signal corresponding to the spatial distribution of the intensity of light is obtained. The signal obtained by the light receiving sensor 522 is sent to the control unit 7 via the cable protection chain 6, for example. In addition, the light receiving sensor 522 receives, for example, light from the irradiation target area As0 illuminated by at least one of the first to ninth lighting modules M1 to M9, and obtains the light from the irradiation target. The signal corresponding to the spatial distribution of the intensity of the light in the region As0. However, when viewed from the + Y direction, the optical axis Ln1 of the light receiving sensor 522 is tilted 7.5 degrees clockwise from the normal line Lv0 with the point Ps0 as the center. Therefore, when viewed from the + Y direction, the optical axis Ln1 of the light receiving sensor 522 and the optical axis Lp5 of the fifth lighting module M5 have a linear symmetry relationship with the normal line Lv0 as a symmetry axis. Thus, for example, when the upper surface of the inspection object W1 is substantially flat, and when the surface of the inspection object W1 is illuminated by the fifth lighting module M5, the inspection can be received by the light receiving sensor 522 for inspection. The specular reflection light generated by the object W1. That is, for example, the light-receiving sensor 522 can receive the regular reflected light generated by the inspection object W1 by the illumination using the fifth illumination module M5, and the light-receiving sensor 522 can receive and use the first to fourth, six to nine, and the like. The scattered light generated by the illumination modules M1 to M4 and M6 to M9 is generated by the inspection object W1. Therefore, from the perspective of the light receiving sensor 522, the fifth lighting module M5 can substantially function as direct lighting, and the first to fourth, sixth to nine lighting modules M1 to M4, and M6 to M9 can substantially function as The role of diffuse lighting. Therefore, in this embodiment, for example, the fifth illumination module M5 can be set to a state (also referred to as a direct illumination state) in which the light receiving sensor 522 receives regular reflected light from the inspection object W1. In addition, for example, the first to fourth and sixth to nineth illumination modules M1 to M4 and M6 to M9 can be set to a state in which the light receiving sensor 522 receives scattered light from the inspection object W1 (also referred to as a scattered illumination state). ). In addition, for example, by using the fifth lighting module M5 and the first to fourth and sixth to nine lighting modules M1 to M4 and M6 to M9, it is possible to realize that the light receiving sensor 522 receives regular reflected light and scattering from the inspection object W1. The state of both lights (also called mixed lighting state). In addition, by using a lighting state suitable for the state of the inspection object W1, the inspection accuracy of the inspection object W1 can be improved. Here, for example, when the surface of the inspection object W1 is mirror-shaped, if it is set to the diffused illumination state, the intensity of the signal obtained by the light receiving sensor 522 becomes low, and if it is set to the direct illumination state, it may be The intensity of the signal obtained by the light receiving sensor 522 is increased. However, if it is set to the direct lighting state, the unevenness may cause excessive contrast, so it may be appropriately set to the mixed lighting state. 5 and 6 are diagrams schematically showing a specific example of the inspection object W1. As shown in FIGS. 5 and 6, for example, it is assumed that the inspection object W1 is a resin substrate Bs0 on which a wiring pattern Cu0 is formed. In this case, if it is set to the direct lighting state, regular reflection light toward the light receiving sensor 522 is easily generated in the wiring pattern Cu0 of metal such as copper, and it is difficult to generate the light toward the light receiving sensor due to light scattering in the substrate Bs0. 522 of the regular reflected light. As a result, among the signals obtained by the light receiving sensor 522, the intensity of the signal of the wiring pattern Cu0 may become relatively higher than the intensity of the signal of the substrate Bs0. Thereby, the disconnection Df1 or the defect Df2 of the wiring pattern Cu0 can be accurately detected. However, for example, when the unevenness on the surface of the wiring pattern Cu0 is large, if the mixed lighting state is set, the unevenness is unlikely to cause excessive contrast. At this time, in the signal obtained by the light receiving sensor 522, the intensity change of the signal of the outline portion of the wiring pattern Cu0 can be increased to a certain degree, and the intensity of the signal of the unevenness on the wiring pattern Cu0 can be changed. Reduce to some extent. Thereby, the disconnection Df1 or the defect Df2 of the wiring pattern Cu0 can be accurately detected. In addition, for example, when the inspection object W1 is made of metal and the metal surface is to be inspected for damage or scratches, if it is set to a scattered illumination state instead of a direct illumination state, the damage and In a state where the scratches are easily noticeable, the light is captured by the light receiving sensor 522. Furthermore, at this time, for example, by using the first to fourth, sixth to ninth illumination modules M1 to M4, and M6 to M9, the angle (also referred to as the irradiation angle) of irradiating light to the inspection object W1 may be appropriately changed, and Adjust the visibility of damage and scratches on metal surfaces. <(2-2) Lighting Module> FIG. 7 is a schematic side view illustrating the schematic configuration of the first to ninth lighting modules M1 to M9. As shown in FIG. 3, the first to ninth lighting modules M1 to M9 have a rotationally symmetrical relationship with each other, and have substantially the same configuration as each other. Therefore, the configuration of the fifth lighting module M5 will be described here as an example. FIG. 8 is a schematic front view illustrating a schematic configuration of a fifth lighting module M5. As shown in FIG. 7, the fifth lighting module M5 includes an emission unit row EL5 and a reflection unit Rf1. The emission unit row EL5 includes a plurality of emission units E5 arranged in a predetermined arrangement direction (+ Y direction). Each of the emitting portions E5 emits light in a predetermined emitting direction. Thereby, the irradiation target area As0 on the upper surface of the inspection target W1 can be illuminated. Here, the plurality of emitting portions E5 have substantially the same configuration, and include two or more emitting portions E5 that emit the same kind of light. In this embodiment, the plurality of emitting portions E5 are the same as the two or more emitting portions E5. Further, in the emission unit row EL5, for example, a plurality of emission units E5 are arranged at a certain interval (interval) P0. In addition, "the same kind of light" mentioned here may include, for example, light having the same wavelength range and light having the same energy intensity. The light in the same wavelength range may include, for example, light of the same color. The reflecting portion Rf1 has a reflecting surface arranged orthogonally to the arrangement direction (+ Y direction) when viewed from a direction (also referred to as a crossing direction) crossing the arrangement direction (+ Y direction) of the plurality of emitting portions E5. Sf1. Thereby, light emitted from the plurality of emitting portions E5 can be reflected on the reflecting surface Sf1 and can be irradiated toward the inspection object W1. At this time, when viewed from the inspection object W1, since the reflection surface Sf1 is present, the emission unit row EL5 can be extended in an analog manner. That is, the number of emission portions E5 is not actually increased, but a state equivalent to the case where the number of emission portions E5 is increased can be achieved. As a result, without increasing the size of the device, it is possible to easily increase the light irradiation intensity of the average unit area of the inspection object W1 with a simple structure. In this case, in particular, it is possible to eliminate an abnormality in which the irradiation intensity of light in the vicinity of both ends of the irradiation target area As0 decreases. In this embodiment, the arrangement direction (+ Y direction) is orthogonal to the crossing direction, and the reflection surface Sf1 is a plane parallel to the XY plane orthogonal to the arrangement direction. If such an arrangement relationship between the plurality of emitting portions E5 and the reflecting surface Sf1 is adopted, for example, the design and manufacture of the fifth lighting module M5 can be easily realized. However, the two or more emitting portions E5 constituting the emitting portion row EL5 include a first emitting portion E5f and a second emitting portion E5s which are sequentially arranged from the side close to the reflection surface Sf1. Here, when viewed from the above-mentioned intersection direction, the interval (also referred to as the first interval) M0 between the reflection surface Sf1 and the first exit portion E5f is the interval (also referred to as the interval between the first exit portion E5f and the second exit portion E5s). The second interval) is less than one and a half of P0. That is, the relationship of the following formula (1) is satisfied. As a result, the distance between the simulated emitting portions E5 of the emitting portion rows EL5 that extend analogously is equal to or less than the distance P0 between the actual emitting portions E5. As a result, the irradiation intensity of light per unit area of the inspection object W1 can be easily increased. Here, in theory, for example, if the relationship of M0 = P0 / 2 is satisfied, the distance between the simulated emission portions E5 of the emission portion row EL5 that is extended analogously is the same as the distance P0 between the actual emission portions E5, and can be easily improved. The average irradiation intensity of light per unit area of the inspection object W1. However, depending on the performance of the imaging lens of the light-receiving sensor 522, there is a tendency to detect light from areas near both ends of the irradiation target area As0 as light having a weaker intensity than light from other areas. Phenomenon (also known as peripheral dimming). In this case, for example, if the emitting part E5 and the reflecting surface Sf1 are arranged in a manner to satisfy the relationship of M0 <P0 / 2, the distance between the simulated emitting part E5 of the emitting part row EL5 which is simulated to be generated may not reach the actual value. The distance between the emitting part E5 and P0 can reduce the influence of peripheral dimming. For example, when the emission direction of the self-emission part E5 is viewed from the top, if the reflection surface Sf1 is arranged so as not to overlap the irradiation target area As0 of the inspection object W1, the self-emission part E5 is blocked by the reflection surface Sf1. A part of the emitted light is unlikely to cause abnormality in the irradiation target area As0. As shown in FIGS. 7 and 8, in the fifth lighting module M5, for example, light emitted from the plurality of emitting portions E5 is condensed on a linear irradiation target area As0 of the surface of the inspection target W1. System, the first lens portion L5a and the second lens portion L5b are designed. In this embodiment, as shown in FIG. 3 and FIG. 8, the focusing angle of each of the first to ninth lighting modules M1 to M9 is set to about 10 to 15 degrees, but it is not limited to this. For example, It can also be set to about 10-20 degrees. Specifically, as shown in FIG. 8, for example, the light beams expanding in the X direction and the Z direction among the light emitted from the emission portion E5 can be condensed to a line shape by the first lens portion L5a and the second lens portion L5b. The irradiation target area As0. Here, the first lens portion L5a and the second lens portion L5b may be constituted by, for example, a cylindrical lens, a linear Fresnel lens, or the like. For example, if a function of diffusing light in the ± Y direction is added to the second lens portion L5b, unevenness in the intensity of the irradiated light is unlikely to occur in the linear irradiation target area As0 on the inspection object W1. Here, for example, if a lenticular lens or a diffusion plate that diffuses light in a certain direction is added (for example, light-shaping Diffusers from Luminit, USA), the second lens portion L5b may be added. Light scattering function in the ± Y direction. Here, for example, it is possible to adopt a configuration in which a lenticular lens, a diffusion plate, or the like is arranged on the surface of the second lens portion L5b on the surface of the first lens portion L5a side, or separately from the second lens portion L5b. In this embodiment, a lenticular lens is added to the first lens portion L5a side of the second lens portion L5b. More specifically, in this embodiment, the expanded light emitted from the light emitting portion E5 can be converted into the + Y direction by a linear Fresnel lens having a focal length f of 15 mm as the first lens portion L5a. When viewed from above, the light beams are substantially parallel. Furthermore, by forming a lenticular lens as the second lens portion L5b on the first lens portion L5a side of the linear Fresnel lens having a focal distance f of 50 mm, the light beams can be approximately parallel when viewed from the + Y direction. The light converted into the light beam is reduced, and the light is focused on the linear irradiation target area As0 of the inspection target W1. 9 and 10 are diagrams for explaining the effect of the lenticular lens. In FIG. 9, assuming that the lens Lc0 of the lenticular lens is removed from the second lens portion L5b of the fifth lighting module M5 of this embodiment, the light irradiated to one point Pe1 of the irradiation target area As0 is schematically displayed. The path is used as a reference example. In FIG. 10, a path of light of the fifth illumination module M5 of the present embodiment irradiating one point Pe1 of the irradiation target area As0 is schematically shown. In the reference example shown in FIG. 9, a case where light is irradiated to one point Pe1 from nine emission portions E5 in nine paths is shown. On the other hand, as shown in FIG. 10, the presence of a lenticular lens can increase the number of light paths from the nine exit portions E5 to one point Pe1 to more than nine. Thereby, the irradiation target area As0 is irradiated with light from more angles. As a result, unevenness in the intensity of the irradiated light is unlikely to occur in the linear irradiation target area As0. Here, as shown in FIG. 11, in the emission direction of the emission portion E5, the distance between the reflection surface Sf1 and the emission portion E5 is S0, and the distance between the inspection object W1 and the emission portion E5 is L0. When the emission direction of the emission portion E5 is viewed from the top of the inspection object W1, the distance between the reflection surface Sf1 and the inspection object W1 and the farthest part of the reflection surface Sf1 is set to F0. At this time, by making the distance S0 as close to zero as possible, for example, and viewing from the inspection object W1, it is possible to easily realize the simulation extension of the emission unit row EL5 using the reflection surface Sf1. In addition, for example, according to the structure of the fifth lighting module M5, a case where it is difficult to make the distance S0 close to zero can be assumed. In this case, the light emitted from the first exit portion E5 closest to the reflection surface Sf1 is reflected on the reflection surface Sf1 and is irradiated to the portion of the inspection object W1 that is farthest from the reflection surface Sf1, As far as the geometric configuration is concerned, the distance S0 can be set in a manner to satisfy the relationship of the following formula (2). However, in the case where the expanded angle (also referred to as the expanded angle) of the light beam emitted from the first emitting portion E5f is narrow, the distance S0 may be appropriately set according to the expanded angle. <(3) Summary of one embodiment> As described above, in the lighting device 8 of the present embodiment, for example, in each of the lighting modules M1 to M9, it intersects with the arrangement direction (+ Y direction) of the plurality of emitting portions E5. When the crossing direction is viewed from the top, a reflecting surface Sf1 orthogonal to the arrangement direction (+ Y direction) is provided. Here, in the case where the first emission portion E5f and the second emission portion E5s are sequentially arranged from the side close to the reflection surface Sf1, the reflection surface Sf1 and the first emission portion are viewed from above in the crossing direction. The first interval M0 of E5f is equal to or less than one and a half of the second interval P0 of the first emission portion E5f and the second emission portion E5s. Therefore, when viewed from the inspection object W1, the reflection surface Sf1 is present, so that the emission unit row EL5 is extended in a simulated manner. In addition, by setting the distance between the simulated emission portions E5 of the emission portion rows EL5 that extend in a simulated manner to be less than the actual emission portion E5 distance, the irradiation intensity of light per unit area of the inspection object W1 can be easily increased. In addition, in the inspection device 1 of this embodiment, for example, for the inspection object W1 illuminated by the illumination section 521, the light receiving sensor 522 can be used to obtain a spatial distribution corresponding to the intensity of the light from the inspection object W1. The signal. At this time, according to the illumination section 521 of this embodiment, for example, it is possible to easily increase the signal intensity corresponding to the spatial distribution of the intensity of the light from the inspection object W1 obtained by the light receiving sensor 522. As a result, the accuracy of the inspection can be improved, for example. <(4) Modifications> The present invention is not limited to one of the above embodiments, and various changes, improvements, and the like can be made without departing from the gist of the present invention. <(4-1) First Modification Example> For example, in the above-mentioned embodiment, LEDs as self-luminous light sources are applied to the light emitting portions E1 to E9 that emit light, but the invention is not limited to this. For example, a light source may be provided in addition to the emission sections E1 to E9, and light may be guided to the emission sections E1 to E9 by a light guide section such as an optical fiber. FIG. 12 is a side view schematic diagram illustrating a schematic configuration of the first to ninth lighting modules M1A to M9A (if m is an integer of 1 to 9, it is also referred to as an mth lighting group MmA). The first to ninth lighting modules M1A to M9A may have a rotationally symmetrical relationship with each other, and may have substantially the same configuration as each other. Therefore, the configuration of the fifth lighting module M5A will be described here as an example. As shown in FIG. 12, for example, the light emitted by the light source box EB1 is guided to the fifth lighting module M5A by the optical fiber bundle, that is, the optical fiber bundle BF1, and further, the optical fiber can be emitted from each of the emission portions E5 by branching the optical fiber The part E5 emits light. With such a configuration, for example, the diameter of the optical fiber can be easily made smaller than that of the LED, and more emission portions E5 can be arranged at a higher density in one emission portion row EL5. Thereby, for example, one point Pe1 on the irradiation target area As0 can be irradiated with light from more angles. As a result, even if the second lens portion L5b such as a lenticular lens, a diffusing plate, or the like is not added with the function of diffusing light in the ± Y direction, as in the above embodiment, the linear irradiation target area As0, The intensity of the irradiated light is also less prone to unevenness. <(4-2) Second Modification Example> In the above-mentioned embodiment, the same kind of light is emitted from all the emission sections E1 to E9 included in each of the emission section rows EL1 to EL9, but it is not limited to this. For example, an emission unit line EL1B to EL9B in which two or more kinds of emission units each emitting different kinds of light are arranged may be used (if m is an integer of 1 to 9, it is also referred to as an emission unit line ELmB). FIG. 13 is a schematic side view illustrating a schematic configuration of the first to ninth lighting modules M1B to M9B of the second modification (if m is an integer of 1 to 9, it is also referred to as an mth lighting group MmB). The first to ninth lighting modules M1B to M9B may have a rotationally symmetrical relationship with each other, and may have substantially the same configuration as each other. Therefore, here, the configuration of the fifth lighting module M5B will be described as an example. As shown in FIG. 13, for example, the plurality of emitting portions constituting the emitting portion row EL5B include two or more first emitting portions R5 that emit the first light, and two or more second emitting portions that emit the second light. B5. Further, in the example shown in FIG. 13, the plurality of emitting portions constituting the emitting portion row EL5B include two or more third emitting portions G5 that emit the third kind of light. In the example shown in FIG. 13, the emission unit row EL5B is composed of 21 emission units including five first emission units R5, ten second emission units B5, and six third emission units G5. Here, for example, of the 21 emitting portions juxtaposed in the + Y direction, 6 third emitting portions G5 are arranged in the + Y direction at the 1st, 5th, 9th, 13th, 17th, and 21st ones. Also, for example, among the 21 emitting portions juxtaposed in the + Y direction, five first emitting portions R5 are arranged in the + Y direction at the 3rd, 7th, 11th, 15th, and 19th. In addition, for example, of the 21 emitting portions juxtaposed in the + Y direction, 10 second emitting portions B5 are arranged in the + Y direction at the 2nd, 4th, 6th, 8th, 10th, 12th, 14th, 16th, 18th. 20 people. In this modification, for example, the 21 emitting portions are arranged at substantially equal intervals (approximately equal intervals) in the + Y direction. That is, for example, the five first emitting portions R5 are arranged at approximately the same distance Pr0, and the ten second emitting portions B5 are arranged at a distance Pb0 of about 1/2 of the pitch Pr0. For example, the six third emission portions G5 are arranged at approximately the same pitch Pr0. In addition, for example, the third emission portions G5 located at both ends of the 21 emission portions are, for example, each disposed on an extension line of the reflection surface Sf1. However, for example, the two or more first emitting portions R5 include the first first emitting portion R5f and the second first emitting portion R5s which are sequentially arranged from the side close to the reflection surface Sf1. In addition, for example, the two or more second emitting portions B5 include a first second emitting portion B5f and a second second emitting portion B5s which are sequentially arranged from the side close to the reflection surface Sf1. Here, when viewed in a direction (crossing direction) of the reflecting surface Sf1 crossing the arrangement direction (+ Y direction) of the 21 emitting portions E5, the interval between the reflecting surface Sf1 and the first first emitting portion R5f (also The third interval) Mr0 is less than one and a half of the interval (also referred to as the fourth interval) Pr0 between the first first emitting portion R5f and the second first emitting portion R5s. That is, for example, for two or more emitting portions that emit the same kind of light, the interval between the reflection surface Sf1 and the first emitting portion is the interval between the first emitting portion and the second first emitting portion when viewed from above the cross direction. Less than one and a half. In addition, when viewed from above the crossing direction, the interval (also referred to as the fifth interval) Mb0 between the reflective surface Sf1 and the first second exit portion B5f is the first second exit portion B5f and the second second exit portion B5s. The interval (also referred to as the sixth interval) is less than one and a half of Pb0. The fifth interval Mb0 is shorter than the third interval Mr0, and the sixth interval Pb0 is shorter than the fourth interval Pr0. With this configuration, for example, suppose the following situation: The control unit 7 can be selectively set to include a state in which the first light is emitted from two or more first emission units R5 (also referred to as a first emission) State), and one of two or more kinds of emitting states in which the second kind of light (also referred to as a second kind of emitting state) is emitted from the two or more second emitting sections B5. In addition, the two or more kinds of emission states may include, for example, states in which the third kind of light is emitted from the two or more third emitting parts G5 (also referred to as a third kind of emission state). At this time, for example, if two or more first emitting portions R5 and two or more second emitting portions B5 are individually lighted, when viewed from the inspection object W1, the reflecting surface Sf1 exists, so the emitting portion Row EL5B is extended analogously. In addition, the distance between the simulated first emission portions R5 of the extension line EL5B which is analogously extended may be less than Pr0 between the actual first emission portions R5 and the simulation second emission portion of the line EL5B. The distance between B5 may be equal to or less than the distance Pb0 between the actual second emission portions B5. As a result, under the condition that the same kind of light is irradiated, the irradiation intensity of light per unit area of the inspection object W1 can be easily increased. Here, the number of arrays of two or more second emission portions B5 is greater than the number of arrays of two or more first emission portions R5. Therefore, in the light-receiving sensor 522, even if the light sensitivity of the second light emitted from the two or more second emitting portions B5 is lower than the first light emitted from the two or more first emitting portions R5, The light receiving sensitivity can also achieve, for example, illumination corresponding to the light receiving sensitivity of the light receiving sensor 522. In addition, if the first type of light includes red light and the second type of light includes blue light, for example, illumination corresponding to the light receiving sensor 522 having a lower sensitivity to blue light than the red light can be realized. In this embodiment, the first light is red light, the second light is blue light, and the third light is green light. Here, for example, the imaginary light receiving sensor 522 includes a plurality of diodes arranged in a direction corresponding to the + Y direction and each of which can obtain a signal corresponding to the intensity of the received light. At this time, the plurality of diodes is generally a case where the light receiving sensitivity to blue light is lower than that of red light, for example. Therefore, for example, by realizing an illumination state corresponding to the light receiving sensitivity of the light receiving sensor 522, the accuracy of the inspection for the inspection object W1 can be improved. Here, for example, red light is light having a wavelength of about 600 to 760 nm, green light is light having a wavelength of about 500 to 570 nm, and blue light is light having a wavelength of about 400 to 500 nm. Here, as the plurality of diodes, for example, a silicon diode can be used. As the light receiving sensor 522, for example, a linear sensor Ls1 or the like in which a plurality of light receiving elements Ae1 such as a plurality of diodes are arranged in one direction can be used. In addition, for example, in a state where a color filter is arranged on the front of each light receiving element, if a light receiving element with a color filter of a desired color (for example, blue) is added to all light receiving elements The proportion of light can be appropriately adjusted to the light sensitivity of the light of the desired color. However, for example, if the inspection object W1 is a printed substrate in which a metal wiring pattern such as copper is formed on a resin substrate, the absorption rate of red light of the hypothetical resin substrate is relatively higher than that of the red light of the wiring pattern. Rate situation. In this case, for example, if the printed substrate is irradiated with red light, it can be in a state where the wiring pattern is illuminated and the substrate made of resin as the background is dim. On the other hand, it is assumed that the absorption rate of blue light of a resin-made substrate is relatively lower than the absorption rate of blue light of a wiring pattern. At this time, for example, when the printed substrate is irradiated with blue light, the wiring pattern can be dimly lit and the substrate made of resin as the background can be bright. In addition, if an illumination module having an optical axis having a large angle with respect to the normal line Lv0 of the upper surface of the printed substrate as the inspection target object W1 is irradiated with blue light to the printed substrate, the substrate made of resin can be made more easily. The wiring pattern is illuminated in a relatively bright state. For example, if the presence of sebum contamination attached to the surface of the inspection object W1 is the object of inspection, it is assumed that, for example, the absorption rate of blue light of sebum is higher than the absorption rate of blue light of other parts without sebum. . At this time, for example, if the inspection object W1 is irradiated with blue light, the illumination may be in a state where the part where the sebum is adhered is dim and the other part is bright. When a substrate made of polyimide is used, red light easily passes through the substrate, and blue light does not easily pass through the substrate. Therefore, for example, when a wiring pattern is also formed on the back surface of the substrate, blue light is radiated instead of red light, and the inspection of the surface of the substrate can be performed more appropriately. However, in the case where the substrate made of polyimide is thick, and when a wiring pattern is not formed on the back surface of the substrate, the wiring pattern can be illuminated with relatively bright red light by irradiation, and the surface of the substrate can be more appropriately performed. Its check. Therefore, for example, if one of the red and blue light is irradiated to the inspection object W1 according to the inspection content of the inspection object W1, the inspection accuracy can be improved. Here, as the third light, instead of green light, for example, infrared light (IR (Infrared) light) may be used. Here, as the infrared light, for example, light of about 800 nm can be used. In this case, for example, if the inspection object W1 is a printed substrate on which a wiring pattern is formed, the infrared light absorption rate of the substrate is significantly higher than the infrared light absorption rate of the wiring pattern. Therefore, if the inspection object W1 is irradiated with infrared light, the accuracy of the inspection can be improved. In addition, as the third light, for example, ultraviolet (Ultraviolet) light may be used. That is, "light" in the present application includes not only visible light, but also infrared light (IR light) and ultraviolet light (UV light). <(4-3) Other Modifications> For example, in each of the m-th lighting module Mm of the above-mentioned embodiment, a plurality of emitting portions Em arranged in the + Y direction as the arrangement direction may be arranged, for example, in the self- + A slightly offset position on a straight line extending virtually in the Y direction. Moreover, in the above-mentioned one embodiment, for each m-th lighting module Mm, an emission unit row ELm in which a plurality of emission units Em are arranged in a line is used, but it is not limited to this. For example, each of the m-th lighting modules Mm may have two or more emission unit rows ELm that are arranged side by side approximately parallel to each other. At this time, for example, if the emission sections emitting the first to third kinds of light are arranged in a checkerboard pattern, the arrangement density of the plurality of emission sections Em is increased, and the intensity of the light irradiated to the inspection object W1 can be increased. . Furthermore, in the above-mentioned embodiment, the distance between the plurality of emission portions Em arranged in each emission portion row ELm is substantially constant, but it is not limited to this. For example, in order to reduce the influence of peripheral dimming that may be caused by the performance of the imaging lens of the light sensor 522, etc., it may be closer to the two ends near the center of the array direction in the emission line ELm, so that It is set such that the distance between the plurality of emitting portions Em is arranged to be shorter. Furthermore, in the above-mentioned embodiment, the reflecting surface Sf1 is arranged vertically with respect to the arrangement direction of the plurality of emitting portions Em of each emitting portion row ELm, but it is not limited to this. For example, as long as the condition that the virtual plane (also referred to as a virtual plane) including the exit direction of the light emitted from the plurality of exit portions Em and the arrangement direction is perpendicular is satisfied, the reflection surface Sf1 may also be slightly relative to the ELm of the exit portion. tilt. However, at this time, if the reflection surface Sf1 is tilted so as to rotate in a direction separated from the emitting portion row ELm, the distance between the simulated emitting portions Em seen from the inspection object W1 may be equal to or less than the actual emitting portion Em distance. . In addition, for example, as long as the condition that is perpendicular to the virtual plane is satisfied, a plurality of irregularities may be provided on the reflection surface Sf1. Furthermore, in the above-mentioned embodiment, the lighting unit 521 includes nine lighting modules M1 to M9, but it is not limited to this. For example, the lighting unit 521 may be changed to at least one of the fifth lighting module M5 that realizes the direct lighting state and the first to fourth, 6 to 9 lighting modules M1 to M4, and M6 to M9 that realize the diffused lighting state. The lighting section of one lighting module can also be changed to a lighting section in which any two or more of the nine lighting modules M1 to M9 are arranged. In this case, the direction of the light emitted from the two or more lighting modules and the angle formed by the upper surface of the inspection object W1 can be changed as appropriate. If an illumination unit having two or more lighting modules is used as described above, the illumination unit includes a plurality of emission unit rows, and the plurality of emission unit rows include a first emission unit row having a first plurality of emission units and a first emission unit row having The second exit section line of the plurality of exit section lines. Here, the first plurality of emitting portions constituting the first emitting portion line are arranged in the arrangement direction (for example, + Y direction), and each emits light in the first emitting direction. In addition, the second plurality of emitting portions constituting the second emitting portion line are arranged along the above-mentioned arrangement direction (for example, + Y direction), and each emits light in the second emitting direction. Moreover, when the first emission direction and the second emission direction intersect at a point Ps0 (that is, the irradiation target area As0) when viewed from the above-mentioned arrangement direction, the inspection target may be switched to correspond to the state of the inspection target W1, for example. Light irradiation angle of the object W1. In addition, for example, the lighting unit 521 may be changed to a lighting unit in which one of the nine lighting modules M1 to M9 is arranged. However, at this time, the function of switching the light irradiation angle to the inspection object W1 is omitted. Furthermore, in the above-mentioned embodiment, the main scanning and the sub scanning are alternately performed in the inspection device 1, but the present invention is not limited to this. For example, a configuration in which either one of the main scanning and the sub-scanning is performed may be adopted. Furthermore, in the above-mentioned embodiment, the linear sensor Ls1 is used as the light receiving sensor 522, but it is not limited to this. For example, the light-receiving sensor 522 may be changed to a row having a plurality of light-receiving elements that are parallel to each other, and the rows of the light-receiving elements each include an arrangement direction of the plurality of emitting portions Em corresponding to the m-th lighting module Mm. The plurality of light receiving elements are arranged in the directions. Moreover, in the above-mentioned one embodiment, in each m-th lighting module Mm, the first lens portion Lma and the second lens portion Lmb focus light onto the irradiation target area As0, but the invention is not limited to this. For example, it is also possible to condense light to the irradiation target area As0 by a single lens portion, and to emit light with a strong directivity having a thin flat plate-shaped light path from each of the emitting portions Em, which may be omitted. Both the first lens portion Lma and the second lens portion Lmb. It is needless to say that all or a part of the above-mentioned one embodiment and various modifications may be appropriately combined within a range not contradictory. In addition, the features of the other modification examples can be appropriately applied to the first modification example and the second modification example to the extent that they do not contradict each other.

1‧‧‧Inspection device

2‧‧‧ abutment department

3‧‧‧ sample support

3U‧‧‧Upper surface

4‧‧‧ Gate Structure

5‧‧‧Measurement Department

6‧‧‧ cable protection chain

7‧‧‧Control Department

8‧‧‧ Lighting

21‧‧‧Body

21U‧‧‧ Top surface

22L‧‧‧Linear Guide

22Lr‧‧‧Track Department

22Ls‧‧‧Sliding part

22R‧‧‧Linear Guide

22Rr‧‧‧Track Department

22Rs‧‧‧Sliding part

41‧‧‧Beam

42‧‧‧ Linear Guide

42r‧‧‧Track Department

42s‧‧‧Sliding part

51‧‧‧shell

52‧‧‧Scanning Department

521‧‧‧Lighting Department

522‧‧‧Light receiving sensor

Ae1‧‧‧ light receiving element

Ahc‧‧‧space

As0‧‧‧irradiation target area

Asc‧‧‧Space

B5‧‧‧ 2nd shot

B5f‧‧‧ the first 2nd shot

B5s‧‧‧2nd 2nd Shot

BF1‧‧‧ Fiber Bundle

Bs0‧‧‧ substrate

Cu0‧‧‧wiring pattern

Df1‧‧‧ disconnected

Df2‧‧‧ Defect

E‧‧‧ Shooting Department

E1 ～ E9‧‧‧Emission Department

E5‧‧‧ Shooting Department

E5f‧‧‧The first shot

E5s‧‧‧The second shot

EB1‧‧‧light box

EL1 ～ EL9‧‧‧Exit Department

EL5‧‧‧ Shooting Department

ELm‧‧‧ Shooting Department

EL1B ～ EL9B‧‧‧Exit Department

ELmB‧‧‧Exit Department

Em‧‧‧ Shooting Department

F0‧‧‧Distance

G5‧‧‧ 3rd shot

L0‧‧‧Distance

L1a ～ L9a‧‧‧The first lens section

L5a‧‧‧1st lens unit

L5b‧‧‧Second lens section

L5b ～ L9b‧‧‧Second lens section

Lc0‧‧‧lens

Ln1‧‧‧ Optical axis

Lp1 ～ Lp9‧‧‧Optical axis

Ls1‧‧‧Line Sexy Sensor

Lv0‧‧‧normal

M0‧‧‧1st interval

M1 ～ M9 (Mm) ‧‧‧1st-9th lighting module (mth lighting module)

M1A ～ M9A (MmA) ‧‧‧1st-9th lighting module (mth lighting module)

M1B ～ M9B (MmB) ‧‧‧1st to 9th lighting modules (mth lighting module)

Mb0‧‧‧5th interval

Mr0‧‧‧3rd interval

P0‧‧‧ 2nd interval

Pb0‧‧‧6th interval

Pe11‧‧‧point

Pr0‧‧‧4th interval

Ps0‧‧‧ points

R5‧‧‧The first shot

R5f‧‧‧1st 1st shot

R5s‧‧‧ 2nd 1st shot

Rf1‧‧‧Reflection

S0‧‧‧Distance

SP0‧‧‧Space

Sf1‧‧‧Reflective surface

W1‧‧‧ Inspection object

X‧‧‧ direction

Y‧‧‧ direction

Z‧‧‧ direction

FIG. 1 is a schematic plan view illustrating a schematic configuration of the inspection device. FIG. 2 is a schematic front view illustrating a schematic configuration of the inspection device. FIG. 3 is a schematic front view illustrating a schematic configuration of a scanning unit. FIG. 4 is a perspective view illustrating an arrangement state of lenses of an illumination unit. FIG. 5 is a diagram schematically showing a specific example of an inspection target. FIG. 6 is a diagram schematically showing a specific example of an inspection target. FIG. 7 is a schematic side view illustrating a schematic configuration of a lighting module. FIG. 8 is a schematic front view illustrating a schematic configuration of a lighting module. FIG. 9 is a reference diagram for explaining the effect of the lenticular lens. FIG. 10 is a diagram for explaining the effect of a lenticular lens. FIG. 11 is a diagram for explaining an arrangement condition of the reflecting portion. FIG. 12 is a schematic side view illustrating a schematic configuration of a lighting module according to a first modification. FIG. 13 is a schematic side view illustrating a schematic configuration of a lighting module according to a second modification.

Claims (5)

An illuminating device includes a row of emitting sections having a plurality of emitting sections arranged in a predetermined arrangement direction and each emitting light in a predetermined emitting direction; and a reflecting section having a section intersecting with the arrangement direction. When viewed in a crosswise direction, the reflecting surfaces are arranged orthogonally to the arrangement direction and can reflect light; and the plurality of emitting portions include two or more emitting portions that emit the same kind of light; the two or more emitting portions include The first emitting portion and the second emitting portion are arranged in order from the side close to the reflecting surface. When viewed from the cross direction, the first interval between the reflecting surface and the first emitting portion is the first emitting portion. Less than one and a half of the second interval between the second light emitting part and the second light emitting part; the plurality of light emitting parts include two or more first light emitting parts that emit the first light, and two or more second light emitting parts that emit the second light. And the two or more first emitting portions include the first first emitting portion and the second first emitting portion arranged in order from the side close to the reflecting surface; the two or more second emitting portions Self-proximity The first 2nd emitting part and the 2nd 2nd emitting part are arranged in order from the side of the reflecting surface; when viewed from above in the crossing direction, the third interval between the reflecting surface and the first 1st emitting part is The fourth interval between the first first emitting portion and the second first emitting portion is less than one and a half; when viewed in the cross direction, the fifth interval between the reflecting surface and the first second emitting portion is the above The sixth interval between the first second emitting portion and the second second emitting portion is less than one and a half; the fifth interval is shorter than the third interval; and the sixth interval is shorter than the fourth interval. The lighting device according to claim 1, wherein the first type of light includes red light and the second type of light includes blue light. For example, the lighting device of claim 1 includes a control unit that can be selectively set to include a first emission state in which the first light is emitted from the two or more first emission units, and a second emission state from the two Each of the two or more second emitting units emits one of the two or more of the two emitting states of the second light. An inspection device comprising: the illuminating device according to any one of claims 1 to 3; and a light receiving sensor that receives an inspection object from a straight line that virtually extends from the plurality of emitting portions toward the emitting direction. Area light, and a signal corresponding to the spatial distribution of the intensity of the light from the inspection target area can be obtained. An inspection device comprising: the illuminating device according to any one of claims 1 to 3; and a light receiving sensor that receives an inspection object from a straight line that virtually extends from the plurality of emission portions toward the emission direction. Area light, and a signal corresponding to the spatial distribution of the intensity of the light from the inspection object area can be obtained; and the light receiving sensor includes: a plurality of diodes arranged in a direction corresponding to the above-mentioned arrangement direction and Signals corresponding to the intensity of the received light can be obtained individually.