JP3639837B1 - Lighting device - Google Patents

Abstract

An object of the present invention is to provide an illuminating device capable of making inspection accuracy uniform by setting each light source in the same state and obtaining an image with high accuracy for inspection.
SOLUTION: A plurality of light emitting members 1 composed of LEDs 11 for irradiating light to an inspection substrate 7 and a line sensor 6 for receiving light reflected by an inspection object among the light irradiated from the light emitting member 1 are provided. In the lighting device 100 formed as described above, each light emitting member 1 is configured in a straight plane, and a plurality of light emitting member mounting portions 30 corresponding to the mounting angles of the respective light emitting members 1 are provided on the bracket 3. Each light emitting member 1 is attached to 30. In addition, each light emitting member 11 is provided so as to have the same configuration, and correspondingly, the light emitting member mounting portion 30 is configured to have the same size.
[Selection] Figure 1

Description

  The present invention relates to a lighting device used when inspecting an inspection object such as a printed circuit board.

  As an apparatus for inspecting a pad, a resist, or the like formed on a substrate surface, there is one as described in Patent Document 1 below.

The substrate inspection apparatus described in Patent Document 1 includes an illuminating device that irradiates the substrate surface with hue light, and a CCD camera that captures a reflected light image of each hue light irradiated on the substrate surface for each hue light. Thus, the substrate surface is inspected based on the image pickup pattern for each hue light obtained from the CCD camera. The illumination device incorporated in the substrate inspection apparatus includes a red LED group, a green LED group, and a blue LED group that are arranged in three stages concentrically so that the irradiation angle to the substrate surface is different about the imaging axis of the CCD camera. And a diffuser plate that is arranged on the light irradiation direction side of these LED groups and diffuses three-color hue light from these LED groups, and contains these red LED group, green LED group, blue LED group, and diffuser plate The CCD camera is provided with an illumination hood having a camera hole for capturing a reflected light image on the substrate surface.
JP 2002-340814 A

  By the way, in such a board | substrate inspection apparatus, it is known that a test | inspection precision will be greatly influenced by the angle of the irradiated light. For this reason, in order to obtain the same inspection accuracy for each board inspection apparatus, the LED group must be accurately mounted at a predetermined angle. However, in the illuminating device described in Patent Document 1, the LED groups are attached in a concentric circle shape (hemispherical shape) around the imaging axis of the CCD camera, so that the LED groups can be attached at an accurate angle. It was difficult. Further, in the conventional board inspection apparatus, the angle is individually adjusted for each LED group. Therefore, if the setting angle of the LED group and the distance to the board are set incorrectly, the same inspection accuracy is obtained for each apparatus. Had the problem of not being able to.

  Furthermore, when inspecting a substrate using such an apparatus, the image obtained by the difference in hue light is different, for example, it is known that an image suitable for resist inspection can be obtained when a green LED is used. In addition, it is known that when a red LED is used, an image suitable for pad inspection can be obtained. And it is preferable to irradiate such various hue lights from various angles in order to inspect protrusions and defects of the inspection object.

  However, the inspection apparatus described in Patent Document 1 can irradiate only one hue light from one preset angle, and cannot obtain an accurate image suitable for inspection. Further, in Patent Document 1, since the CCD camera is mounted vertically above the LED group whose angle is set, a large angle setting between the LED group and the CCD camera cannot be performed. Therefore, there is a problem that an appropriate image cannot be obtained.

  Therefore, the present invention has been made paying attention to the above-described problem, and by setting each light source in the same state, the inspection apparatus can have uniform inspection accuracy and can obtain an accurate image for inspection. The purpose is to provide.

In order to solve the above-described problems, the present invention provides a plurality of linear planar light emitting members that irradiate light to an inspection object and a plurality of light emitting member mounting portions corresponding to the mounting angles of the respective linear planar light emitting members. A single bracket having a diffusion member mounting portion for detachably attaching a plurality of anisotropic diffusion members to the inner peripheral portion from the lower side, and removable to the single bracket And a light receiving device that receives light reflected by the inspection object among the light emitted from the light emitting member having a linear plane attached to the light receiving member.

If comprised in this way, the angle of each light emitting member can be set at once only by attaching a some light emitting member to a single bracket, and the reproducibility of angle setting can be improved now. In addition, since the linear light emitting member is used, the angle of the light emitting member can be easily and accurately set only by attaching both ends of the pair of opposing brackets. Furthermore, a light emitting member mounting portion is provided on the outer peripheral portion of the bracket, and a diffusion member mounting portion for detachably attaching a plurality of anisotropic diffusing members from the lower side is provided on the inner peripheral portion. When inspecting the shape of the object to be inspected, the anisotropic diffusion member is attached, and when inspecting in detail the presence of a minute scratch, the anisotropic diffusion member can be removed and inspected. It becomes like this.

Moreover, in 2nd invention, what stuck the anisotropic diffusion film on the lower surface side of a transparent plastic member is used as said anisotropic diffusion member.

  With this configuration, the anisotropic diffusion film can be positioned on the side closer to the inspection substrate, and light is widely irradiated outside the light receiving area of the line sensor, resulting in poor irradiation efficiency. Can be eliminated.

Furthermore, in the third invention, as the light emitting member, a substrate provided with a substrate on which an LED is mounted and a reinforcing member for preventing the substrate from being bent by attaching the substrate to a bracket is used.

  If comprised in this way, a board | substrate can be attached now to a bracket in the state which prevented the bending of the board | substrate which mounted LED.

In addition, in the fourth aspect of the invention, the bracket is attached along a semicircular side opening provided below a pair of opposing side plates.

  If comprised in this way, the inside of the light emitting member attached to the semi-cylindrical shape can be visually recognized, and a tool etc. can be inserted from the side opening part side, and an anisotropic diffusion member can be attached or detached. become. Furthermore, if it is a structure that does not provide such a side opening, the light diffused by the anisotropic diffusion member is reflected by the side and irradiated to the inspection substrate, only the vicinity of the side plate becomes bright, When such a side opening is provided, there is no reflection in the vicinity of the side surface, so that light can be uniformly irradiated.

Moreover, in 5th invention, the cover body which covers the outer peripheral part of the said light emitting member is attached to the light emitting member attaching part of a bracket via a spacer.

Moreover, in 6th invention, it comprises so that a light-receiving device can be moved to the position corresponding to the attachment angle of a light emitting member.

  If comprised in this way, if the light emitting member of any angle attached so that attachment or detachment is possible will be removed and light receiving devices, such as a line sensor, will be attached in that position, the angle of a light emitting member and a light receiving device will be secured large. The image can be acquired from a position suitable for light reception.

The illumination device according to the present invention includes a plurality of linear planar light emitting members for irradiating light to the inspection object and a plurality of light emitting member mounting portions corresponding to the mounting angles of the respective linear planar light emitting members at the outer peripheral portion. A single bracket having a diffusion member mounting portion for detachably mounting a plurality of anisotropic diffusion members from the lower side to the inner peripheral portion, and the single bracket is detachably mounted Since it is configured to provide a light receiving device that receives the light reflected by the inspection object among the light irradiated from the linear planar light emitting member, only by attaching a plurality of light emitting members to a single bracket, The angles of the light emitting members can be set at a time, and the reproducibility of the angle setting can be improved. Further, since the linear light emitting member is used, the angle of the light emitting member can be easily and accurately set only by attaching both ends of the light emitting member to a pair of opposing brackets. Furthermore, a light emitting member mounting portion is provided on the outer peripheral portion of the bracket, and a diffusion member mounting portion for detachably attaching a plurality of anisotropic diffusing members from the lower side is provided on the inner peripheral portion. When inspecting the shape of the object to be inspected, the anisotropic diffusion member is attached, and when inspecting in detail the presence of a minute scratch, the anisotropic diffusion member can be removed and inspected. It becomes like this.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 shows a central cross-sectional schematic view of the substrate inspection apparatus 101 in the vicinity of the illumination device 100. FIG. 2 shows a front view of the illumination device 100 with the cover 4 removed, and FIG. These are figures which show the state which removed the board | substrate 10 in FIG. FIG. 4 shows an arrangement state of the LEDs 11 of the light emitting member 1 attached to the lighting device 100, and FIG. 5 attaches the substrate 11, the reinforcing member 13, the plastic member 21, and the anisotropic diffusion film 20 to the bracket 3. Indicates the state. FIG. 6 shows a state diagram in which a part of the light emitting members 1 is removed and a line sensor 6 as a light receiving device is provided at the removed position.

  The illumination device 100 in this embodiment is incorporated in the substrate inspection apparatus 101. As shown in FIGS. 2 and 3, the support 5 having a pair of side plates 50 facing each other, and the side plate of the support 5 A semicircular arc bracket 3 attached to the inner side of 50 (see FIG. 3), and a light emitting member 1 and an anisotropic diffusion member 2 configured in an elongated linear plane that is detachably attached to the bracket 3; (Refer to FIG. 5), which includes a line sensor 6 that is a light receiving device that receives light reflected by the inspection substrate 7 among the light emitted from the light emitting member 1. Hereinafter, the specific configuration of the illumination device 100 will be described in detail.

  As shown in FIGS. 4 and 5, each of the plurality of light emitting members 1 constituting the lighting device 100 includes a substrate 10 on which a plurality of LEDs 11 that are point light sources are mounted, and a substrate 10 for attaching the substrate 10 to the bracket 3. The reinforcing member 13 is provided and configured in common. The substrate 10 is configured on a straight plane having a certain width. For example, the dimension in the lateral direction is about 1 cm to 2 cm, and the dimension in the longitudinal direction is about 40 cm to 50 cm. Then, the LEDs 11 are attached to the substrate 10 so as to form a plurality of rows along the longitudinal direction, and as shown in FIG. 4, each LED 11 has a staggered shape, that is, the LEDs 11 and 11 in the same row. The LED 11 in the adjacent row is disposed between them. These LEDs 11 are configured by providing LEDs 11 of the same color along the column direction, and the LEDs 11 in adjacent columns are configured by LEDs 11 having different hue light. In this embodiment, four rows of LEDs 11 of red LEDs 11 (R), green LEDs 11 (G), red LEDs 11 (R), and green LEDs 11 (G) are provided in a staggered manner. Then, as shown in FIG. 2, such an LED 11 is connected to a control unit via a connector 12 provided at an end of each substrate 10, and the control unit controls lighting, extinction, light amount adjustment, and the like. Is done. This control is performed for each of the light emitting members 1 provided in plurality, and also in each light emitting member 1 for each row and for each predetermined number of LEDs along the longitudinal direction (for example, for every 10 LEDs). ) Is also done.

  Further, the reinforcing member 13 provided on the LED mounting surface side of the light emitting member 1 is configured in a linear plane shape having substantially the same outer shape as the substrate 10, and aluminum is used to prevent the substrate 10 from being bent. It is composed of a relatively rigid member such as a member. As shown in FIG. 5, a plurality of holes 14 for accommodating the LEDs 11 are provided inside the reinforcing member 13, and the LED 11 is accommodated in the holes 14, that is, the substrate 10 and the reinforcing member 13 are reinforced. The member 13 is fixed on the light emitting member mounting portion 30 of the bracket 3 with the thickness dimension being reduced.

  The bracket 3 has a substantially semicircular arc shape having a certain thickness so that both ends of the light emitting member 1 can be placed, more precisely, a semi-regular polygon shape having a flat portion corresponding to the mounting angle of the light emitting member 1 in advance. The light emitting member attaching part 30 for fixing the edge part of the light emitting member 1 is provided in the outer peripheral part. The length of the mounting surface of the light emitting member mounting portion 30 in the longitudinal direction is substantially the same as the dimension of the light emitting member 1 in the short direction, and a plurality of screw holes are provided on the upper surface thereof. The light emitting member 1 can be detachably fixed by a fixing member 15 such as a screw from above. The light emitting member 1 is attached to all the light emitting member attaching portions 30 except for the light receiving portion of the line sensor 6, and in this way, as shown in FIG. 1, a slit S is provided at the apex portion having a semi-cylindrical shape. It is attached in this way.

  Moreover, the cover body 4 is attached to the light emitting member attaching portion 30 of the bracket 3 via a spacer 40 (see FIG. 1). This cover body 4 is constituted by a thin metal plate that covers the outer peripheral portion of the light emitting member 1, and is provided with an opening 41 corresponding to the slit S at the top. The cover body 4 is fixed by a fixing member or the like in a state where a spacer 40 is attached to a screw hole provided in the light emitting member attaching portion 30 and a clearance with the light emitting member 1 is secured by the spacer 40.

  Further, as shown in FIG. 5, a plurality of anisotropic diffusion members 2 configured in common are attached to the inner peripheral portion of the bracket 3. The anisotropic diffusion member 2 is configured by adhering an anisotropic diffusion film 20 to the lower surface side of a transparent plastic member 21, and the light irradiated from the LED 11 is irradiated in the longitudinal direction of the anisotropic diffusion film 20. The substantially linear light receiving area of the line sensor 6 is uniformly irradiated with light emitted from the plurality of LEDs 11. In this embodiment, the anisotropic diffusion film 20 diffuses input linear light in the longitudinal direction, for example, at an angle of about 40 degrees, and diffuses in the lateral direction at an angle of about 5 degrees. For this reason, when the distance between the anisotropic diffusion film 20 and the inspection substrate 7 is long, light is widely irradiated outside the light receiving region of the line sensor 6 at an angle of about 5 degrees which is the diffusion angle in the short direction. Irradiation efficiency will deteriorate. For this reason, in the present embodiment, the anisotropic diffusion member 2 is provided on the inner peripheral portion of the bracket 3 that is closer to the inspection substrate 7 and the lower surface of the plastic member 21 that is closer to the inspection substrate 7. The anisotropic diffusion film 20 is attached to the side. If this anisotropic diffusing member 2 is used, the minute scratches formed on the inspection substrate 7 can be made inconspicuous, so that the shape of the inspection object is inspected with the minute scratches removed. In the case where the anisotropic diffusion member 2 is attached, and the presence of minute scratches is inspected in detail, the anisotropic diffusion member 2 is removed for inspection.

  About the diffusion member attachment part 31 of the bracket 3 for attaching the anisotropic diffusion member 2, as in the light emitting member attachment part 30, the dimension in the short direction of the anisotropic diffusion member 2 configured in common is substantially the same. Configured to the same dimensions. A plurality of screw holes (not shown) are provided on the surface portion of the bracket 3 so as to be detachable from the lower side of the bracket 3. Similarly, when the anisotropic diffusion member 2 is attached to the bracket 3, the anisotropic diffusion member 2 is attached so that the slit S can be formed in the light receiving portion of the line sensor 6. Further, when removing the anisotropic diffusion member 2 attached to the diffusion member attachment portion 31, the fixing member 22 such as a screw attached from below the anisotropic diffusion member 2 is removed.

  Then, the bracket 3 and the light emitting member 1 configured as described above are fixed by the support 5 as shown in FIGS. The support 5 is configured by bending a relatively thick metal plate into a substantially U shape, and is configured to have a pair of side plates 50 facing each other. A side opening 51 cut into a semicircular shape is provided below the opposing side plate 50, and the bracket 3 is attached along the edge portion of the side opening 51 by a fixing member 32 (see FIG. 1). It is like that. When the side opening 51 is provided in this manner, the inside of the light emitting member 1 attached in a semi-cylindrical shape can be visually recognized, and a tool or the like is inserted from the side opening 51 to insert the anisotropic diffusion member 2. Can be attached and detached. Further, if the structure is such that the side opening 51 is not provided, the light diffused by the anisotropic diffusion member 2 is reflected by the side plate 50 and irradiated to the inspection substrate 7, and only in the vicinity of the side plate 50. However, if such a side opening 51 is provided, there is no reflection in the vicinity of the side surface, so that there is an advantage that light can be irradiated uniformly.

  On the other hand, the line sensor 6 receives reflected light in a linear region among the light irradiated on the inspection substrate 7 and adjusts the position of the arm member 60 along the longitudinal direction as shown in FIGS. It is slidably attached via the mechanism 61. The position adjusting mechanism 61 includes a U-shaped holding member 62 that wraps the arm member 60, and a fixing member 63 such as a screw that fixes the relative position of the holding member 62 and the arm member 60. The fixing member 63 is loosened and slid on the arm member 60, and the line sensor 6 is moved to a desired position and fixed. The arm member 60 is attached to a skeleton member constituting the substrate inspection apparatus 101, and is provided so that the light receiving axis of the line sensor 6 coincides with the slit direction.

  Next, an assembling method of the illumination device 100 configured as described above and an operation state of the substrate inspection apparatus 101 using the illumination device 100 will be described.

  First, when assembling the lighting device 100, the brackets 3 are attached so as to face the inner side of the opposing side plates 50 of the metal support body 5 configured in a substantially U shape. Adjust the position. Then, the light emitting member 1 and the anisotropic diffusion member 2 are attached to the support 5 to which the bracket 3 is attached. When the light emitting member 1 is attached, both ends of the LED 11 are placed on the light emitting member attaching portion 30 of the bracket 3 in a state where the LED 11 is accommodated in the hole portion 14 formed in the aluminum reinforcing member 13, and a screw or the like is attached from above. The fixing members 15 are sequentially fixed. At this time, the light emitting member 1 is not attached to the uppermost light emitting member attaching portion 30, but the portion is opened as a slit S. When attaching the anisotropic diffusion member 2, first, the anisotropic diffusion film 20 is first attached to the plastic member 21, and the diffusion member attachment portion so that the anisotropic diffusion film 20 faces the lower surface side. The fixing member 22 such as a screw is sequentially fixed to 31. At that time, similarly, the anisotropic diffusion member 2 is not attached to the diffusion member attachment portion 31 located at the uppermost portion, and the portion is opened as a slit S. In addition, when attaching the light emitting member 1 and the anisotropic diffusion member 2 in this way, since each light emitting member 1 and the anisotropic diffusion member 2 are configured in common, any light emitting member 1 or anisotropic diffusion member is formed. The member 2 can be selected and attached. And after attaching the light emitting member 1 and the anisotropic diffusion member 2 in this way, the support body 5 configured in a substantially U shape is fixed to a skeleton member provided in the substrate inspection apparatus 101 and a fixing member such as a screw. Finally, the spacer 40 is attached to the screw hole of the light emitting member attaching portion 30 provided at the uppermost portion of the bracket 3 to attach the cover body 4. Next, the line sensor 6 is attached on the arm member 60, and the light receiving position is adjusted by sliding the line sensor 6 to an arbitrary position on the arm member 60, and the reflected light from the slit S is received.

  When the inspection substrate 7 is inspected using the illumination device 100 configured as described above, first, the stage 70 on which the inspection substrate 7 is placed is slid to be moved into the arch-shaped illumination device 100, and each light emitting member. 1 is irradiated with light. At this time, in response to the size of the inspection substrate 7, for example, when inspecting a small inspection substrate 7, the number of LEDs 11 that emit light is set to about 10 and the hue light provided in each light emitting member 1. Light is emitted from LEDs 11 (R) and (G) having different sizes. And the formation state of the test | inspection board | substrate 7 is test | inspected by processing the received image.

As described above, according to the embodiment, the plurality of linear planar light emitting members 1 that irradiate the inspection substrate 7 and the plurality of light emitting members corresponding to the mounting angles of the respective linear planar light emitting members 1. A single bracket 3 having a diffusing member mounting portion 31 for detachably mounting the plurality of anisotropic diffusing members 2 from the lower side to the inner peripheral portion, with the mounting portion 30 on the outer peripheral portion, Since the line sensor 6 for receiving the light reflected by the inspection substrate 7 out of the light emitted from the LED 11 of the linear planar light emitting member 1 detachably attached to the bracket 3 is provided. The attachment angle of the member 1 can be set at a time, and the reproducibility of the angle setting can be improved. Further, since all the angles can be set only by fixing both ends of the relatively long light emitting member 1 to the bracket 3, the angle of the light emitting member 1 can be easily and accurately set. Further, when the shape of the inspection substrate 7 is inspected with the minute scratch removed, the anisotropic diffusion member 2 is attached. When the presence of the minute scratch is inspected in detail, the anisotropic diffusion member 2 is attached. The member can be removed from the lower side and inspected.

In addition, since the anisotropic diffusion member 2 having the anisotropic diffusion film 20 attached to the lower surface side of the transparent plastic member 21 is used, an anisotropic diffusion film is provided on the side close to the inspection substrate 7. It is possible to prevent such a problem that the light is widely irradiated outside the light receiving region of the line sensor 6 and the irradiation efficiency is deteriorated.

Furthermore, since the light emitting member 1 is configured by providing the substrate 10 on which the LED 11 is mounted and the reinforcing member 13 for attaching the substrate 10 to the bracket 3 to prevent the substrate 10 from being bent, the substrate 10 is bent. In this state, the substrate 10 can be attached to the bracket 3.

In addition, since the bracket 3 is attached along the semicircular side opening 51 provided below the pair of side plates 50 facing each other, the inside of the light emitting member 1 attached in a semicylindrical shape is provided. The anisotropic diffusion member 2 can be attached and detached by inserting a tool or the like from the side opening 51 side. Furthermore, when the side opening 51 is not provided, the light diffused by the anisotropic diffusing member 2 is reflected by the side plate 50 and applied to the inspection substrate 7, and only the vicinity of the side plate 50 is bright. However, if such a side opening 51 is provided, there is no reflection in the vicinity of the side surface, so that light can be uniformly irradiated.

  Further, the cover body 4 that covers the outer peripheral portion of the light emitting member 1 is attached to the light emitting member attaching portion 30 of the bracket 3 via the spacer 40.

  In addition, since the line sensor 6 as the light receiving device is configured to be moved to a position corresponding to the mounting angle of the light emitting member 1, the light emitting member 1 at any angle that is detachably attached is removed, and the line sensor 6 is moved to that position. If the line sensor 6 is attached, a large angle between the light emitting member 1 and the line sensor 6 can be secured, and an image can be acquired from a position suitable for light reception.

  In addition, this invention is not limited to the said embodiment, It can implement in a various aspect.

  For example, in the above-described embodiment, the case of inspecting the inspection substrate 7 having a pad or a resist has been described. However, the present invention is not limited to this, and such an illumination device 100 is incorporated in an inspection device that inspects any object. Anyway.

  Moreover, in the said embodiment, although the line sensor 6 is attached to a perpendicular direction, it is not restricted to this, You may make it incline the light-receiving axis of the line sensor 6. FIG. In this case, as shown in FIG. 6, for example, one light emitting member 1 is removed from the plurality of light emitting members 1 configured in a semi-cylindrical shape, and the light receiving axis is positioned at the slit S formed by the removal. It is preferable to provide such an angle adjustment mechanism 64 and attach the line sensor 6. With this configuration, it is possible to secure a reflection angle of a little less than 180 degrees at the maximum, and an image having a reflection angle suitable for inspection of the inspection object can be acquired within this range.

  Furthermore, although the case where one line sensor 6 is provided has been described in the above embodiment, a plurality of line sensors 6 are attached on the arm member 60, and the position of each line sensor 6 is determined using the slide mechanism of the arm member 60. The reflected light from the inspection substrate 7 may be received by adjusting.

  In addition, in the above-described embodiment, the light emitting member 1 is attached to a pair of brackets 3 having a substantially arc shape. However, the present invention is not limited to this, and a plurality of light emitting members 1 are attached to a bracket having a 1/4 arc shape. A plurality of light emitting members 1 may be attached to one bracket, for example. In addition, the shape of the bracket is not limited to the arc shape, and may be any shape as long as the mounting angle of the light emitting member 1 can be set.

  Moreover, in the said embodiment, although LED11 from which hue light differs for every row | line | column is attached, when a comparatively large light quantity is securable, LED11 from which hue light differs alternately in each row | line | column. May be provided.

Schematic sectional view of the center of the lighting device in one embodiment of the present invention Schematic front view of lighting device in the same form The state figure which removed the board | substrate of the illuminating device in FIG. The figure which shows the arrangement state of LED in the same form The figure which shows the attachment state to the bracket in the form The figure which shows the state which changed the position of the line sensor in the same form

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Light emitting member 2 ... Anisotropic diffusion member 3 ... Bracket 4 ... Cover body 6 ... Line sensor 7 ... Inspection board 10 ... Board | substrate 11 ... LED
DESCRIPTION OF SYMBOLS 20 ... Anisotropic diffusion film 21 ... Plastic member 30 ... Light emitting member attachment part 31 ... Diffusion member attachment part 40 ... Spacer 50 ... Side surface 51 ... Side surface opening part 100- ..Lighting devices

Claims (6)

A plurality of linear planar light emitting members for irradiating light to the inspection object, and a plurality of light emitting member mounting portions corresponding to the mounting angles of the respective linear planar light emitting members on the outer peripheral portion, From a single bracket having a diffusing member attaching portion for detachably attaching a plurality of anisotropic diffusing members from the lower side , and a linear planar light emitting member detachably attached to the single bracket An illuminating device comprising: a light receiving device that receives light reflected by an inspection object among irradiated light. The lighting device according to claim 1 , wherein the anisotropic diffusion member is configured by attaching an anisotropic diffusion film to a lower surface side of a transparent plastic member. The light emitting member includes a board mounted with LED, illumination apparatus according to claim 1 or 2 in which is formed by providing a reinforcing member for preventing the deflection of the substrate by attaching a substrate to the bracket. The lighting device according to any one of claims 1 to 3 , wherein the bracket is attached along a semicircular side opening provided below a pair of opposing side plates. The lighting device according to any one of claims 1 to 4, wherein a cover body that covers an outer peripheral portion of the light emitting member is attached to a light emitting member attaching portion of the bracket via a spacer. The light receiving device, the lighting device according to claims 1 to 5 any one of those which are movable to a position corresponding to each mounting angle of the light emitting member.

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