JP5181321B2 - Light irradiation device - Google Patents
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- JP5181321B2 JP5181321B2 JP2006287013A JP2006287013A JP5181321B2 JP 5181321 B2 JP5181321 B2 JP 5181321B2 JP 2006287013 A JP2006287013 A JP 2006287013A JP 2006287013 A JP2006287013 A JP 2006287013A JP 5181321 B2 JP5181321 B2 JP 5181321B2
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Description
本発明は、配線基板等の例えばラインカメラによる表面検査等において好適に用いられる光照射装置に関するものである。 The present invention relates to a light irradiation apparatus suitably used for surface inspection of a wiring board or the like using, for example, a line camera.
様々な配線基板の表面検査方式のうち、検査速度、検査精度の点で優れたものとして、ラインカメラ（ラインＣＣＤ等）を用いて配線基板上を走査しながら撮像していくラインスキャン方式のものが知られている。 Among various surface inspection methods for wiring boards, the line scanning method, which is superior in terms of inspection speed and inspection accuracy, uses a line camera (line CCD, etc.) to scan the wiring board while taking images. It has been known.
このラインスキャン方式においては、ある方向からローアングルのライン光を配線基板のライン状撮影領域に照射し、その反射光を配線基板に対向して配置したラインカメラで見ることでプリント配線の欠陥等を検査する。
ところで、周知のように配線部分は、他の部分に比べて少し盛り上がる金属であり、しかもその表面がざらざらとした梨地状になっているため、ローアングル光を照射すると、その光はこの配線部分の特に光照射側の端縁で強く乱反射する。したがって、ラインカメラの撮影画像をみると、基本的に配線部分が明るく見えるが、特にローアングル光を配線に対して直交方向から照射すると、配線の側縁部分が強く光って、配線が太く見える。また，表面の凹凸部で異常な濃淡差を生じてしまう． By the way, as is well known, the wiring part is a metal that rises slightly compared to other parts, and the surface is rough and has a textured surface. In particular, the light is strongly diffusely reflected at the edge on the light irradiation side. Therefore, when looking at the image taken by the line camera, the wiring part basically looks bright, but when the low-angle light is irradiated from the direction orthogonal to the wiring, the side edge part of the wiring shines strongly and the wiring looks thick. . In addition, an abnormal density difference occurs on the surface irregularities.
しかしながら、プリント配線が非常に細密になってきている今般、ローアングル光による照明方式では光の照射方向によっては、上述した現象によって配線形状を正確に撮像できないといった不具合が生じ得る。 However, recently, printed wiring has become very fine. In the illumination method using low-angle light, there is a problem that the wiring shape cannot be accurately imaged due to the phenomenon described above depending on the light irradiation direction.
これに対し、照明光を全方位、全照射立体角度から照射するドーム照明方式を用いれば、ある一定方向の線の太りといった不具合は解決できる。ところが今度は、発光面を均一な面発光とすると、非常に大きな照度が必要になると考えられる。また、光源の写り込みや照度むらも生じるため、面光源ではない光源から直射光を照射することはできない。こういった点が問題になって、これまでドーム照明方式が実際に適用された例は見当たらない。 On the other hand, the use of a dome illumination method that irradiates illumination light from all directions and all irradiation solid angles can solve problems such as thickening of lines in a certain direction. However, this time, if the light emitting surface is uniform surface light emission, it is considered that a very large illuminance is required. In addition, since the light source is reflected and the illuminance is uneven, direct light cannot be emitted from a light source that is not a surface light source. There are no examples where the dome lighting system has actually been applied so far.
そこで本発明は、基本的にはドーム型照明方式の考え方を用い、ローアングル光照明方式の不具合を解消しながらも、その場合に生じ得る照度不足や写り込み、照度ムラといった新たな問題点を解決し、若干盛り上がった（又はくぼんだ）梨地状の光沢面を表面の一部に有する配線基板等のような検査対象の検査をより精度良く行えるようにすべく図ったものである。 Therefore, the present invention basically uses the idea of a dome-shaped illumination method, and solves the problems of the low-angle light illumination method, but also solves new problems such as insufficient illuminance, reflections, and uneven illumination. In order to solve this problem, the inspection object such as a wiring board having a slightly raised (or hollow) satin-like gloss surface on a part of the surface can be inspected more accurately.
すなわち、本発明は、配線基板等の表面検査に用いられる表面検査用光照射装置であって、光透過性及び光拡散性を有し検査用カメラが撮影する検査領域を覆うように近接配置される概略平板状又はドーム型の光拡散部材と、その光拡散部材の外側に離間して配置され前記検査領域に当該光拡散部材を透過させて光を照射する複数の光照射部材と、前記光拡散部材に設けられた撮影用観測孔の周囲からカメラの方向に延びる筒状体と、を備え、前記カメラが、それら筒状体及び観測孔を介し、なおかつそれらに視野を遮られない状態で前記検査領域を撮影できるように構成するとともに、前記筒状体のカメラ側の開口に、前記光照射部材からの直射光（直接光）が入らないように構成し、検査領域にその直射光が照射されないようにしていることを特徴とする。 That is, the present invention is a light irradiation apparatus for surface inspection used for surface inspection of a wiring board or the like, and is arranged close to cover an inspection area photographed by an inspection camera having light transmittance and light diffusibility. A flat plate-shaped or dome-shaped light diffusing member, a plurality of light irradiating members arranged to be spaced apart from the light diffusing member and irradiating the inspection region with light transmitted through the light diffusing member, and the light A cylindrical body extending in the direction of the camera from the periphery of the observation hole for photographing provided in the diffusing member, and the camera passes through the cylindrical body and the observation hole and is not obstructed by the field of view. It is configured so that the inspection area can be photographed, and is configured such that direct light (direct light) from the light irradiation member does not enter the opening on the camera side of the cylindrical body, and the direct light is incident on the inspection area. I try not to be irradiated And wherein the door.
前記筒状体は前記観測孔が充分小さければ遮光性を有する部材で形成してもかまわないが、前記観測孔が大きい場合は無視できない範囲で観測孔からの照明光が照射されないことになるため、大きな照度ムラを生じる恐れがある。これを解決するには、前記筒状体を、前記光拡散部材とほぼ同様の光透過性及び光拡散性を有するものとすればよい。このことによって、筒状体を介して観測孔からも照明光が供給されるようになる。 The cylindrical body may be formed of a light-shielding member if the observation hole is sufficiently small. However, if the observation hole is large, illumination light from the observation hole is not irradiated within a non-negligible range. There is a risk of large illuminance unevenness. In order to solve this, the cylindrical body may have light transmittance and light diffusibility substantially the same as those of the light diffusing member. As a result, illumination light is also supplied from the observation hole through the cylindrical body.
その好適な具体的態様としては、前記筒状体と光拡散部材とを一体成型しているものを挙げることができる。 As a preferred specific embodiment, there may be mentioned one in which the cylindrical body and the light diffusing member are integrally molded.
本発明の効果が特に顕著となる具体的態様としては、前記カメラがラインカメラであり、観測孔が長孔状をなして、ライン状の検査領域に対向配置されるものを挙げることができる。 As a specific aspect in which the effect of the present invention is particularly remarkable, the camera is a line camera, and the observation hole has a long hole shape and is arranged opposite to the line-shaped inspection region.
このように構成した本発明によれば、光拡散部材を検査領域の近傍に配置するとともに、その外側の離間した位置に光照射部材を配置するようにしているので、多数の光照射部材を無理なく設けることができ、それらからの光を検査領域に集光させて十分な照度を得ることができる。 According to the present invention configured as described above, the light diffusing member is disposed in the vicinity of the inspection region, and the light irradiating member is disposed at a spaced position outside the inspection region. It is possible to provide a sufficient illuminance by condensing the light from them onto the inspection region.
一方、それだけの構成であると、光照射部材を離間配置していることから、光拡散部材に設けた観測孔から光照射部材からの直接光が入り込み、撮影画像に光照射部材の写り込みが生じたり（一種の照度ムラとも言える）、観測孔のエッジが光って検査の邪魔をしたりするところ、本発明では、観測孔の周囲からカメラの方向に延びる筒状体を設けて、光照射部材からの直接光が入り込まない構成にしているので、上述した不具合を防止することができる。 On the other hand, since the light irradiating members are spaced apart from each other, direct light from the light irradiating member enters from the observation hole provided in the light diffusing member, and the light irradiating member is reflected in the photographed image. In the present invention, a cylindrical body extending from the periphery of the observation hole in the direction of the camera is provided to irradiate the light. Since the direct light from the member does not enter, the above-described problems can be prevented.
以下に本発明の一実施形態について図面を参照して説明する。
本実施形態に係る光照射装置１００は、図１に示すように、ラインカメラ３００を用いて配線基板２００の表面を走査しながら検査をするときに用いられるものである。そしてその構成としては、図１、図２等に示すように、ケーシング１と、前記ラインカメラ３００が撮影するライン状検査領域２０ａを覆うように近接配置される概略ドーム型の光拡散部材２と、その光拡散部材２に設けられた観測孔２ａの周囲からラインカメラ３００の方向に延びる筒状体３と、前記光拡散部材２の外側から当該光拡散部材２を透過させて前記検査領域２０ａに光を照射する複数の光照射部材４と、を備えている。
An embodiment of the present invention will be described below with reference to the drawings.
As shown in FIG. 1, the light irradiation apparatus 100 according to the present embodiment is used when an inspection is performed while scanning the surface of the wiring board 200 using a line camera 300. As shown in FIG. 1, FIG. 2, and the like, the casing 1 and a generally dome-shaped light diffusing member 2 disposed close to the line-shaped inspection area 20a photographed by the line camera 300 are provided. The cylindrical body 3 extending from the periphery of the observation hole 2a provided in the light diffusing member 2 in the direction of the line camera 300, and the light diffusing member 2 from the outside of the light diffusing member 2 are transmitted through the inspection region 20a. And a plurality of light irradiation members 4 for irradiating light.
各部を説明する。
ケーシング１は、遮光性のある素材で作られた中空のもので、ラインカメラ３００に取り付けるための取付ポート１ａを一面に有し、その対向面に光拡散部材２を取り付けるための開口部１ｂを有している。そしてその内部に、前述した光拡散部材２、光照射部材４、筒状体３等を保持する。
Each part will be described.
The casing 1 is a hollow one made of a light-shielding material, has a mounting port 1a for mounting on the line camera 300 on one side, and has an opening 1b for mounting the light diffusing member 2 on the opposite surface. Have. And the light-diffusion member 2, the light irradiation member 4, the cylindrical body 3 etc. which were mentioned above are hold | maintained in the inside.
光拡散部材２は、図２〜図７に示すように、例えば透明樹脂の表面にサンドブラスト加工などを施して、光拡散性と透光性とを具備させた部分球形をなす等厚な板材であり、その中央部分には厚み方向に貫通する前記観測孔２ａが設けられている。この観測孔２ａは、長孔状をなすものであり、後でも述べるが、ラインカメラ３００で配線基板２００を見たときに、その視野に検査領域２０ａが入るほぼ最小の大きさに設定されている。 As shown in FIGS. 2 to 7, the light diffusing member 2 is a plate material having a uniform spherical shape having a partial spherical shape that is provided with a light diffusing property and a light transmitting property by, for example, sandblasting the surface of a transparent resin. The observation hole 2a penetrating in the thickness direction is provided in the central portion. The observation hole 2a has a long hole shape. As will be described later, the observation hole 2a is set to a minimum size that allows the inspection region 20a to enter the visual field when the wiring board 200 is viewed with the line camera 300. Yes.
光照射部材４は、図２に示すように、連続して２００ｍＡ以上の電流で駆動できる超高輝度タイプのいわゆるパワーＬＥＤ４１と、そのＬＥＤ４１に取り付けた透明な光学素子４２とからなるもので、ＬＥＤ４１から出た光を光学素子４２で反射屈折させ、より指向性の強い光にして射出するものである。なお、前記光学素子４２は、ＬＥＤ４１から所定角度以上側方に広がる光はその側周面で内方に全反射させ、それ以外の光とともに先端面から屈折させて照射する高効率複合タイプのものである。 As shown in FIG. 2, the light irradiation member 4 includes a so-called high-intensity type LED 41 that can be continuously driven with a current of 200 mA or more, and a transparent optical element 42 attached to the LED 41. The light emitted from the optical element 42 is reflected and refracted by the optical element 42 and emitted as light having higher directivity. The optical element 42 is a high-efficiency composite type that irradiates light that spreads laterally from the LED 41 by a predetermined angle or more by totally reflecting inward on its side peripheral surface and refracting it from the tip surface together with other light. It is.
この実施形態では、このような光照射部材４が、多数、ケーシング１の内壁面に設けた部分凹球面状をなす保持面１ｃに敷設保持されて、前記光拡散部材２を覆うように配置されている。各光照射部材４は、検査領域２０ａのほぼ中心に向かって光を照射するように各々の向きが設定されており、ライン状検査領域２０ａの長さとほぼ同径あるいはそれより若干大きい径の概略円形状の光照射領域ＡＲ（図１参照）が形成されるように構成してある。 In this embodiment, a large number of such light irradiation members 4 are laid and held on a holding surface 1 c having a partially concave spherical shape provided on the inner wall surface of the casing 1 so as to cover the light diffusion member 2. ing. Each light irradiating member 4 is set so that its direction is irradiated so as to irradiate light substantially toward the center of the inspection region 20a, and has a diameter substantially the same as or slightly larger than the length of the line inspection region 20a. A circular light irradiation area AR (see FIG. 1) is formed.
なお、光照射部材４と光拡散部材２との離間距離は、離れれば離れるほど、光照射部材４の配置面積を大きくとれ、また放熱も有利になるので、多くの光照射部材４を配することができる。したがって、必要な照度を担保するだけの光照射部材４の個数と、そのときの放熱量から、前記離間距離を定めればよい。具体的に、光照射部材４と光拡散部材２との離間距離を、検査領域２０ａと光拡散部材２と離間距離の、２倍〜５倍くらいに設定している。 In addition, since the arrangement | positioning area of the light irradiation member 4 can be taken, and heat dissipation becomes advantageous, so that the separation distance of the light irradiation member 4 and the light-diffusion member 2 is separated, many light irradiation members 4 are arranged. be able to. Therefore, the said separation distance should just be determined from the number of the light irradiation members 4 which ensure the required illumination intensity, and the heat dissipation at that time. Specifically, the separation distance between the light irradiation member 4 and the light diffusion member 2 is set to about 2 to 5 times the separation distance between the inspection region 20 a and the light diffusion member 2.
筒状体３は、図２〜図７に示すように、観測孔２ａの周囲からラインカメラ３００方向に延びるほぼ等厚のもので、ラインカメラ３００の撮像軸Ｃにその中心軸を合致させて配置されている。この筒状体３は、観測孔２ａ近傍では、観測孔２ａの外形に合わせて横断面が長孔形状をなし、そこからラインカメラ３００側に行くに連れ、徐々に横断面が拡大しながらその形状が変化して、ラインカメラ３００側の端面３ａでは、横断面がほぼ円形状をなすように構成されている。なお、このように横断面形状を変化させているのは、本実施形態のラインカメラ３００の対物レンズが円形状であり、それに合わせたためであって、横断面形状を、例えば比例的に大きくなるように設定してももちろんかまわない。要は、ラインカメラ３００から、筒状体３及び観測孔２ａを介して、配線基板２００の検査領域２０ａを見たときに、筒状体３及び観測孔２ａの内面が、検査領域２０ａに著しく干渉しないぎりぎり（最小）の大きさに構成しておけばよいのである。 As shown in FIGS. 2 to 7, the cylindrical body 3 has a substantially equal thickness extending in the direction of the line camera 300 from the periphery of the observation hole 2 a, and its central axis is aligned with the imaging axis C of the line camera 300. Has been placed. In the vicinity of the observation hole 2a, the cylindrical body 3 has a long cross-sectional shape corresponding to the outer shape of the observation hole 2a, and gradually increases in cross-section as it goes to the line camera 300 side. The shape is changed, and the end surface 3a on the side of the line camera 300 is configured so that the cross section is substantially circular. The reason why the cross-sectional shape is changed in this way is that the objective lens of the line camera 300 according to the present embodiment is circular, and the cross-sectional shape is proportionally increased. Of course, it does not matter if it is set as above. In short, when the inspection area 20a of the wiring board 200 is viewed from the line camera 300 through the cylindrical body 3 and the observation hole 2a, the inner surfaces of the cylindrical body 3 and the observation hole 2a are significantly in the inspection area 20a. What is necessary is just to comprise at the limit (minimum) size which does not interfere.
この筒状体３の延伸長さは、光照射部材４と光照射部材４との離間距離にほぼ等しいか、それより長ければ良い。要は、筒状体３のラインカメラ３００側の端面が、光照射部材４の光照射面より外側に位置させて、その端面に光照射部材４からの直射光が入らないようにすればよい。 The extending length of the cylindrical body 3 may be approximately equal to or longer than the distance between the light irradiation member 4 and the light irradiation member 4. The point is that the end surface of the tubular body 3 on the line camera 300 side is positioned outside the light irradiation surface of the light irradiation member 4 so that the direct light from the light irradiation member 4 does not enter the end surface. .
さらにこの実施形態では、この筒状体３を、前記光拡散部材２と同じ素材で型によって一体に成形するとともに、その表面にサンドブラスト加工などを施して、前記光拡散部材２と同様の光拡散性と透光性とを具備させている。 Furthermore, in this embodiment, the cylindrical body 3 is integrally molded with the same material as the light diffusing member 2 by a mold, and the surface thereof is subjected to sand blasting or the like, so that the same light diffusion as the light diffusing member 2 is performed. And translucency.
しかして、このように構成した光照射装置１００によれば、光拡散部材２によって、検査領域２０ａに対する平面視ほほ全ての方向及びほぼ全ての立体角から光を照射できるうえに、光拡散部材２を検査領域２０ａの近傍に配置するとともに、その外側の離間した位置に光照射部材４を配置するようにしているので、多数の光照射部材４を無理なく設けることができ、それらからの光を検査領域２０ａに集光させて十分な照度を得ることができる。 Thus, according to the light irradiation device 100 configured as described above, the light diffusing member 2 can irradiate light from almost all directions and almost all solid angles in the plan view with respect to the inspection region 20a. Is arranged in the vicinity of the inspection region 20a, and the light irradiation member 4 is arranged at a position apart from the outside of the inspection region 20a. Therefore, a large number of light irradiation members 4 can be provided without difficulty, and light from them can be provided. A sufficient illuminance can be obtained by focusing the light on the inspection region 20a.
一方、それだけの構成であると、光照射部材４を離間配置していることから、光拡散部材２に設けた観測孔２ａから光照射部材４からの直接光が入り込み、撮影画像に光照射部材４の映り込みが生じたり（一種の照度ムラとも言える）、観測孔２ａのエッジが光って検査の邪魔をしたりするところ、本光照射装置１００では、観測孔２ａの周囲からカメラの方向に延びる筒状体３を設けて、光照射部材４からの直接光が入り込まない構成にしているので、上述した不具合を防止することができる。 On the other hand, since the light irradiating member 4 is spaced apart from the light irradiating member 4, direct light from the light irradiating member 4 enters from the observation hole 2 a provided in the light diffusing member 2, and the light irradiating member enters the photographed image. 4 may occur (also referred to as a kind of uneven illuminance), or the edge of the observation hole 2a may shine and interfere with the inspection. In the present light irradiation device 100, from the periphery of the observation hole 2a toward the camera. Since the extending cylindrical body 3 is provided so that direct light from the light irradiation member 4 does not enter, the above-described problems can be prevented.
さらに、前記筒状体３を、前記光拡散部材２とほぼ同様の光透過性及び光拡散性を有するものとしているので、筒状体３を介して観測孔２ａからも照明光が供給されるようになり、検査領域２０ａにおける照度ムラを可及的に小さくすることができる。また筒状体３と光拡散部材２とを一体成形しているので、製作も非常に容易である。 Furthermore, since the cylindrical body 3 has substantially the same light transmission and light diffusibility as the light diffusing member 2, illumination light is also supplied from the observation hole 2a via the cylindrical body 3. As a result, the illuminance unevenness in the inspection area 20a can be reduced as much as possible. Moreover, since the cylindrical body 3 and the light diffusing member 2 are integrally formed, the manufacture is very easy.
なお、本発明は前記実施形態に限られるものではない。 The present invention is not limited to the above embodiment.
例えば、前記筒状体を遮光性部材で形成してもかまわない。その場合、外面を白色にしておくことが照度の関係で好ましいが、その外面での反射光がケーシング内で変に反射し、迷光が増加する懸念が大きい場合は、黒色にしておくほうが良い。 For example, the cylindrical body may be formed of a light shielding member. In that case, it is preferable to make the outer surface white in terms of illuminance. However, if there is a great concern that the reflected light on the outer surface will be reflected in the casing and the stray light will increase, it is better to make it black.
光拡散部材は、前記実施形態よりもさらに深く湾曲するドーム型でもよいし、そのドーム型にしても、部分球状に限られず、部分楕円球のものなどでもよい。その場合は光照射部材もそれに合わせて部分楕円凹球面に配置するのが好ましい。さらに、検査領域により近接させるなどの状況であれば、平板またはそれに近いものでもかまわない。 The light diffusing member may be a dome shape that is curved more deeply than in the above-described embodiment, or the dome shape may be a partial elliptical sphere or the like without being limited to a partial sphere. In that case, it is preferable to arrange the light irradiation member on the partially elliptic concave spherical surface accordingly. Furthermore, a flat plate or a material close to it may be used as long as it is closer to the inspection area.
また観測孔を、前記実施形態では、ライン状検査領域にあわせて長孔状（スリット状）としていたが、例えばエリア検査であれば、円状あるいは正方形状のものなどにしてもよい。それに応じて筒状体の外形状がかわるのはもちろんである。 In the above embodiment, the observation hole has a long hole shape (slit shape) in accordance with the line-shaped inspection region. However, for example, in the case of area inspection, the observation hole may have a circular shape or a square shape. Of course, the outer shape of the cylindrical body changes accordingly.
さらに言うならば、本光照射装置を配線基板検査のみならず、他のワーク表面検査に適用することも可能である。 Furthermore, if it says, this light irradiation apparatus can be applied not only to a wiring board inspection but also to other workpiece surface inspections.
その他本発明は、その趣旨を逸脱しない範囲で種々変形が可能である。 In addition, the present invention can be variously modified without departing from the spirit of the present invention.
１００・・・表面検査用光照射装置
２００・・・配線基板
３００・・・カメラ
２０ａ・・・検査領域
２・・・光拡散部材
２ａ・・・観測孔
３・・・筒状体
４・・・光照射部材
DESCRIPTION OF SYMBOLS 100 ... Light irradiation apparatus 200 for surface inspection ... Wiring board 300 ... Camera 20a ... Inspection area 2 ... Light diffusion member 2a ... Observation hole 3 ... Cylindrical body 4 ...・ Light irradiation member
Claims (6)
光透過性及び光拡散性を有し、検査用ラインカメラが撮影する検査領域を覆うように近接配置される概略平板状又はドーム状をなす光拡散部材と、
その光拡散部材の外側に離間して配置され、前記検査領域に当該光拡散部材を透過させて光を照射する複数の光照射部材と、
前記光拡散部材に設けられた撮影用の長孔形状をなす観測孔の周囲からラインカメラの方向に延びる筒状体と、を備え、
前記ラインカメラがそれら筒状体及び観測孔を介して前記検査領域を撮影できるように構成してあるとともに、前記筒状体の横断面が、前記観測孔近傍では該観測孔の外形に合わせて長孔形状をなし、そこからラインカメラ側に行くに連れ、徐々に拡大しながら、かつ、その形状が徐々に変化してラインカメラ側の端面ではほぼ円形状をなすように構成してあることを特徴とする表面検査用光照射装置。 Used for surface inspection of inspection object,
A light diffusing member having a light transmission property and a light diffusing property, and having a substantially flat plate shape or a dome shape so as to cover an inspection region imaged by the inspection line camera;
A plurality of light irradiating members that are spaced apart from the light diffusing member and irradiate light through the light diffusing member through the inspection region;
And a tubular body Ru extending in the direction of the line camera from the surrounding observation hole forming a long hole shape for photography which is provided on the light diffusing member,
Together with the line camera is configured to be photographed the examination region through their tubular body and the observation hole, the cross section of the tubular body, wherein an observation hole near to fit the outer shape of the observation hole It is configured to have a long hole shape, gradually expanding as it goes from there to the line camera side, and gradually changing its shape to form a substantially circular shape on the end surface on the line camera side. A light irradiation device for surface inspection characterized by the above.
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