KR20170101812A - Lighting apparatus and inspection apparatus - Google Patents

Abstract

The present invention relates to a lighting apparatus and an inspection apparatus. The light apparatus comprises a light-emitting row and a reflection part. The light-emitting row includes a plurality of light-emitting parts arranged in a predetermined arrangement direction to emit light in a predetermined emitting direction. The reflection part is disposed to be perpendicular to the arrangement direction when viewed from a plane in a cross direction of crossing the arrangement direction. Moreover, the light-emitting parts include at least two light-emitting parts to emit the same type of light. At least two light-emitting parts include a first light-emitting part and a second light-emitting part arranged in order from a side close to the reflection surface. When viewed from a plane in a cross direction, a first gap between the first light-emitting part and the reflection surface is less than or equal to a half of a second gap between the first light-emitting part and the second light-emitting part.

Description

[0001] LIGHTING APPARATUS AND INSPECTION APPARATUS [0002]

The present invention relates to a lighting apparatus and a testing apparatus having the lighting apparatus.

A technique for inspecting the appearance of various substrates such as a printed board is known (see, for example, Patent Documents 1 to 5). In this technique, for example, an image can be obtained by imaging by an image pickup sensor or the like on a substrate on which various structures such as soldering portions and metal wiring patterns are formed, and the image is automatically Various structures and defects can be detected.

However, in a general printed circuit board or the like, a large number of irregularities such as rolling marks may exist on the surface of a metal wiring pattern. In this case, for example, when vertical illumination (direct illumination) for irradiating light on the front surface with respect to the inspection target area (also referred to as inspection target area) is adopted, for example, the surface irregularities have an excessively strong contrast It may be picked up as a part. At this time, it is difficult to separate a portion having an excessively strong contrast and another portion by image processing alone, and it is not easy to properly detect a defect or the like from the image.

Thus, by using the so-called diffuse illumination in which the angle range (also referred to as the irradiation angle range) of the light irradiated to the inspection target area is broadened by reflecting the light from the light source on the inner surface of the hemispherical dome and irradiating the inspection target area (For example, Patent Document 1, etc.). This makes it possible to suppress defects that are picked up as portions having a contrast that is excessively strong in the image.

On the other hand, if the inspection target area is a specular surface having a small unevenness such as a rolling edge, if the light is irradiated by diffusion illumination, the inspection target area can be picked up as a very dark area. For this reason, for example, illumination in which vertical illumination is combined with diffuse illumination using a hemispherical dome is considered (for example, Patent Document 2, etc.). For example, an illumination (also referred to as coaxial vertical illumination) for irradiating the inspection target area with light having a light flux whose center axis is the optical axis of the imaging lens provided for the image sensor by the half mirror can be employed.

Japanese Patent Application Laid-Open No. 2004-125644 Japanese Patent Application Laid-Open No. 11-84258 Japanese Patent Application Laid-Open No. 8-29138 Japanese Patent Application Laid-Open No. 2000-266681 Japanese Patent Application Laid-Open No. 11-69651

For example, in the technique of Patent Document 1, light reflected from the inner surface of the hemispherical dome is irradiated substantially uniformly over a large circular area. For this reason, for example, when a line sensor and a rectangular area sensor are used, light is also irradiated to an area not picked up by the sensor, resulting in a decrease in light utilization efficiency.

In addition, for example, in the technique of Patent Document 2, the presence of the half mirror for coaxial vertical illumination reduces the intensity of light from the inspection target area to the image sensor, and the use efficiency of light decreases.

Further, for example, in the technique of Patent Document 3, a blue LED is arranged in a hemispherical frame, and irradiation light is irradiated to all the reflection surfaces of the inspected object. For this reason, for example, it is necessary to arrange a plurality of blue LEDs, and the increase in the number of blue LEDs increases the material and cost required for manufacturing the inspection apparatus, Resulting in an increase.

Further, for example, in the technique of Patent Document 4, the light exit surface of the light guide forms an approximately semi-cylindrical surface surrounding the linear irradiated region of the inspected object. For this reason, for example, an illumination apparatus including a light source also causes an excessive increase in size. In particular, for example, in a mode in which imaging is performed while the imaging device is being scanned with the light source, defects such as an increase in the size of the illumination device and an increase in energy consumption required for scanning various configurations may occur.

Further, for example, in the technique of Patent Document 5, vertical illumination is not performed only by diffusion illumination. Therefore, if the inspection target area has a mirror-like shape with few irregularities such as rolling marks, it is necessary to increase the quantity of emitted light to brightly image the inspection target area, and defects such as an increase in energy consumption in the illuminating device have.

That is, in the inspection techniques of Patent Documents 1 to 5, for example, there is a room for improving the utilization efficiency of light with a simple configuration while suppressing an increase in consumed energy. Such a problem is not limited to the inspection apparatus but is common to the general technique of irradiating light to a desired area.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and it is an object of the present invention to provide a technique capable of easily increasing the irradiation intensity of light per unit area in an object.

According to a first aspect of the present invention, there is provided an illuminating device comprising: an emitting unit array arranged along a predetermined arrangement direction and having a plurality of emitting units emitting light in respective predetermined emitting directions; Wherein the plurality of light output sections include at least two light output sections for outputting light of the same kind, wherein the plurality of light output sections include at least two light output sections for outputting light of the same kind, Wherein the at least two outgoing portions include a first outgoing portion and a second outgoing portion that are arranged in order from the nearest side of the reflective surface, The first interval of the output portion is less than half of the second interval between the first output portion and the second output portion.

The illuminating device according to the second aspect is the illuminating device according to the first aspect, wherein the plurality of emitting portions include at least two first emitting portions for emitting the first kind of light, and at least two first emitting portions for emitting the second- Wherein the at least two first light output sections include a first light output section and a second light output section arranged in order from the side closer to the reflection surface and a second light output section, Wherein the second emitting portion includes a first emitting portion and a second emitting portion which are arranged in order from the side closer to the reflecting surface, wherein the reflecting surface and the first reflecting surface Th third output section is less than half the fourth interval between the first output section of the first and the first output section of the second output section, And a fifth interval of the first outgoing portion of the first First of the second output portion and the second below said second half of the second emitting interval sixth portion, said fifth gap is shorter than the third distance, the sixth interval is shorter than the fourth distance.

An illumination device according to a third aspect is the illumination device according to the second aspect, wherein the first type of light includes red light and the second type of light includes blue light.

An illumination device according to a fourth aspect is the illumination device according to the second or third aspect, wherein the first type emitting state in which the first kind of light is emitted from the at least two first emitting portions, And a control unit selectively set to one of two or more outgoing states including a second outgoing state in which the second type of light is emitted from the second outgoing unit.

An illuminating device according to a fifth aspect is the illuminating device according to any one of the first to third aspects, wherein the illuminating device has a plurality of the emitting heat rows, the plurality of emitting row heaters are arranged along the arrangement direction A first emission section row having a first plurality of emission sections each emitting light in a first emission direction and a second emission section array arranged along the arrangement direction and having a second plurality of emission sections each emitting light in a second emission direction A first lighting state in which the first emission direction and the second emission direction intersect with each other and light is emitted from the first plurality of emission portions and And a second lighting state in which light is emitted from the second plurality of emission units, and a second lighting state including a second lighting state in which light is emitted from the second plurality of emission units.

An inspection apparatus according to a sixth aspect of the present invention is an inspection apparatus according to any one of the first to fifth aspects, wherein the inspection apparatus according to the sixth aspect further comprises: an illumination device according to any one of the first to fifth aspects, wherein light from the inspection target area located on a straight line drawn virtually in the emergence direction And a light receiving sensor capable of obtaining a signal according to a spatial distribution of the intensity of light from the inspection target region.

An inspection apparatus according to a seventh aspect of the present invention is an inspection apparatus according to any one of the second to fourth aspects of the present invention, And a light receiving sensor capable of obtaining a signal in accordance with a spatial distribution with respect to the intensity of light from the inspection target area, wherein the light receiving sensor is arranged along a direction corresponding to the arrangement direction, And a plurality of diodes capable of acquiring signals according to the intensity, respectively.

With the illuminating device according to any one of the first to fifth aspects, since the emergent heat is pseudo-stretched due to the presence of the reflecting surface, for example, the irradiation intensity of light per unit area of the object is easily improved .

The illumination device according to any one of the second to fourth aspects enables, for example, illumination according to the light-receiving sensitivity of the light-receiving sensor.

According to the illuminating device according to any one of the third and fourth aspects, illumination according to a light receiving sensor having a lower sensitivity to blue than red, for example, becomes possible.

According to the illumination device according to the fifth aspect, it is possible to switch the irradiation angle of light, for example, according to the state of the object.

The intensity of the signal according to the spatial distribution of the intensity of light from the object to be inspected obtained by the light receiving sensor can be easily increased even with the inspection apparatus according to any one of the sixth and seventh aspects. Thus, for example, the accuracy of the inspection can be enhanced.

According to the inspection apparatus according to the seventh aspect, for example, the illumination state corresponding to the light receiving sensitivity of the light receiving sensor is realized, whereby the accuracy of inspection can be enhanced.

BRIEF DESCRIPTION OF DRAWINGS FIG. 1 is a schematic top view illustrating a schematic configuration of an inspection apparatus. FIG.
2 is a front schematic view illustrating a schematic configuration of the inspection apparatus.
3 is a front schematic view illustrating a schematic configuration of the scanner unit.
Fig. 4 is a perspective view illustrating an arrangement of lenses in the illumination unit. Fig.
5 is a diagram schematically showing a specific example of an object to be inspected.
6 is a diagram schematically showing a specific example of an object to be inspected.
7 is a side schematic view illustrating a schematic configuration of the lighting module.
8 is a front schematic view illustrating a schematic configuration of the lighting module.
9 is a reference diagram for explaining the role of the lenticular lens.
10 is a view for explaining the role of the lenticular lens.
11 is a diagram for explaining the arrangement condition of the reflection portion.
12 is a side view schematically illustrating a schematic configuration of a lighting module according to a first modified example.
13 is a side schematic view illustrating a schematic configuration of a lighting module according to a second modification.

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention and various modifications will be described below with reference to the drawings. In the drawings, parts having the same configuration and function are denoted by the same reference numerals, and redundant description is omitted in the following description. It should be noted that the drawings are schematically shown, and the size, positional relationship, etc. of various structures in each drawing can be appropriately changed. 1 to 6 and 8 show the case where the scanning direction (the right direction in FIG. 1) of the measuring section 5 is the + X direction and the moving direction of the sample supporting table 3 (the upward direction in FIG. 1) XYZ coordinate system of the right-handed coordinate system is attached. 7 and 9 to 13, an arrow indicating the Y direction is attached to the XYZ coordinate system.

<(1) Outline of test apparatus>

Fig. 1 is a top view schematically illustrating a schematic configuration of an inspection apparatus 1 according to an embodiment. 2 is a front schematic view illustrating a schematic configuration of the inspection apparatus 1 according to one embodiment. The inspection apparatus 1 is an apparatus for inspecting the state of an object. Here, the object may include various industrial products such as various substrates, for example. The state of the object may include, for example, a state of various industrially formed structures such as a state of a wiring pattern formed on a printed board, and the like. Incidentally, the state of the structure may include, for example, missing or broken wiring patterns.

1 and 2, the inspection apparatus 1 includes, for example, a base 2, a sample support 3, a gate structure 4, a measurement unit 5, a cable bearing 6, (Registered trademark) and a control unit 7 are provided.

The base portion 2 is a portion serving as a base of the inspection apparatus 1. The base portion 2 has, for example, a main body portion 21 and linear guides 22L and 22R. The main body portion 21 is, for example, a thick plate-shaped portion having a substantially flat upper surface 21U. The linear guides 22L and 22R have two rail portions 22Lr and 22Rr and slider portions 22Ls and 22Rs which are formed on the upper surface 21U and extend in parallel and spaced apart from each other. In this case, for example, the two rail portions 22Lr and 22Rr extend in the + Y direction. In the linear guide 22L, the slider 22Ls is slidably mounted on the rail 22Lr along the extending direction of the rail 22Lr (in this case, the + -Y direction). In the linear guide 22R, the slider portion 22Rs is provided so as to be slidable along the rail portion 22Rr along the extending direction of the rail portion 22Rr (here, in the ± Y direction).

The sample support table 3 is, for example, a plate-like portion having a substantially flat upper surface 3U. The sample supporter 3 is attached on the slider portions 22Ls and 22Rs. That is, the sample support base 3 is provided so as to be slidable in the ± Y direction with respect to the base portion 2. In addition, the sample support table 3 can slide along the linear guides 22L, 22R by adding a driving force by a driving unit (not shown). On the upper surface 3U, an object (also referred to as an object to be inspected) W1 to be inspected is placed. Here, the area where the object W1 to be inspected is drawn is indicated by the one-dot chain line.

The door-like structure 4 is a portion provided on the base 2 in a door shape. Here, the door-like structure 4 is fixed to the base 2. A space SP0 through which the sample supporting table 3 can pass is formed between the door-like structure 4 and the base 2. The door-like structure 4 has a beam portion 41 extending in the horizontal direction and a linear guide 42 provided on the upper surface of the beam portion 41. The linear guide 42 has a rail portion 42r extending in the + X direction and a slider portion 42s slidably provided with respect to the rail portion 42r.

The measuring section 5 has, for example, a case section 51 and a scanner section 52. The case portion 51 is attached to the slider portion 42s. That is, the case portion 51 is provided so as to be slidable in the ± X direction with respect to the beam portion 41. In addition, the case portion 51 can slide along the linear guide 42 by adding a driving force by a driving portion (not shown). The scanner unit 52 is capable of capturing an image of the inspected object W1 placed on the upper surface 3U of the sample supporting table 3, for example, On the surface of the case portion 51 which is opposed to the sample support 3, there is provided a window portion allowing the image of the inspection object W1 to be picked up by the scanner portion 52. [ The window may be, for example, a simple aperture or may be formed by a light-transmitting member such as a glass plate. In this case, movement (main scanning) in the + X direction of the measuring unit 5 and movement (sub scanning) in the + Y direction of the sample support 3 on which the inspection object W1 is mounted are alternately performed , An image obtained by two-dimensionally grasping the inspection object W1 on the upper surface side can be acquired. Further, for example, when the scanning path of the measuring section 5 is covered with the light shielding member, the light irradiated from the scanner section 52 to the inspection object W1 does not leak to the periphery, and the working environment can be improved.

The cable bear 6 supports a wiring cable connectable between the measuring unit 5 and the control unit 7 while allowing the measurement unit 5 to move in the ± X direction.

The control unit 7 can control the entire operation of the inspection apparatus 1 and can acquire images obtained by the measuring unit 5 and perform various calculations. The state of the object W1 to be inspected can be inspected by these various calculations. Here, for example, various defects and the like can be detected by comparing an image obtained by the measuring unit 5 or an image obtained by adding image processing to the image and an image representing a reference structure. Here, the overall operation of the inspection apparatus 1 includes, for example, movement (main scanning) in the ± X direction of the measuring unit 5, movement (sub scanning) in the + Y direction of the sample support table 3, The operation of the unit 52 is included. As the control unit 7, for example, a memory unit, a processor capable of reading out a program stored in the memory unit, an executable processor, and a memory capable of temporarily storing data can be employed. As an example of the control unit 7, a personal computer or the like can be mentioned.

<(2) Scanner section>

&Lt; (2-1) Schematic Configuration of Scanner Unit &

3 is a front schematic view illustrating a schematic configuration of the scanner unit 52. As shown in Fig. 3, the scanner unit 52 includes an illumination unit 521 and a light receiving sensor 522. [

The illumination unit 521 includes first to ninth illumination modules M1 to M9. The first to ninth lighting modules M1 to M9 each have substantially the same configuration and have a rotationally symmetric relationship with respect to a point Ps0 located on the inspection object W1 as viewed in a plane in the + I have. The point Ps0 is a region (also referred to as a region to be irradiated) (As0) irradiated with light extending linearly in the + Y direction on the inspection object W1 when viewed in a plane in the -Z direction, (See Fig. 7, etc.).

In Fig. 3, the optical axes Lpm of the m-th (m is an integer of 1 to 9) mth illumination modules Mm are respectively drawn. Here, in the m-th lighting module Mm, for example, from an emergent heat array ELm having a plurality of emergent portions Em arranged in the + Y direction as a predetermined direction (also referred to as an array direction) The light is emitted in a direction along the first direction. The light emitted in the direction along the optical axis Lpm is incident on the point Ps0 (irradiated area As0) through the first lens unit Lma and the second lens unit Lmb, for example, . For each of the light emitting units Em, for example, a light source having high directivity such as a light emitting diode (LED) can be applied.

Fig. 4 is a perspective view illustrating an arrangement of the first lens unit Lma and the second lens unit Lmb in the illumination unit 521. Fig. 4, since attention is paid to the first lens unit Lma and the second lens unit Lmb, the description of the plurality of outgoing portions E1 to E9 and the reflecting portion Rf1 Are omitted. 4, in the m-th lighting module Mm, the first lens unit Lma and the second lens unit Lmb are arranged such that the arrangement direction (+ Y direction) of the plurality of emission units Em is Therefore, it is extended. Therefore, the second lens portions L1b to L9b of the first to ninth lighting modules M1 to M9 are arranged in a semi-cylindrical shape. That is, the second lens units L1b to L9b are arranged so as to surround the semicircular space Asc. In addition, the first lens portions L1a to L9a are arranged outside the second lens portions L1b to L9b in a semi-cylindrical shape. That is, the first lens units L1a to L9a are arranged so as to surround the semicircular columnar space. In other words, the first lens units L1a to L9a and the second lens units L1b to L9b are arranged so as to have a semi-cylindrical space Ahc therebetween.

Here, for example, the reflecting portion Rf1 (see Fig. 7 and the like) is disposed at one end (the end on the -Y side) of the semi-cylindrical space Ahc and the other end (The end portion on the + Y side) is provided with a reflection portion Rf1 (see Fig. 7, etc.). The reflector Rf1 is disposed at one end (the end on the -Y side) of the semicircular columnar space Asc and the other end (the end on the + Y side) of the semicircular column Asc Rf1) (see Fig. 7, etc.) are disposed.

3, the optical axes Lp1 to Lp9 of the first to ninth lighting modules M1 to M9 are arranged so that the virtual normal Lv0 of the inspection object W1 is 52.5, 37.5, 22.5, 7.5, -22.5, -37.5, -52.5, and -67.5 degrees counterclockwise around the point Ps0.

Therefore, for example, in a plane in the + Y direction, the optical axis Lp1 of the first illumination module M1 is inclined by 67.5 degrees in the counterclockwise direction with respect to the normal line Lv0 about the point Ps0 , The optical axis Lp2 of the second illumination module M2 is inclined by 52.5 degrees in the counterclockwise direction about the point Ps0 with respect to the normal line Lv0. In the plane view in the + Y direction, the optical axis Lp3 of the third illumination module M3 is inclined by 37.5 degrees in the counterclockwise direction about the point Ps0 with respect to the normal Lv0, The optical axis Lp4 of the third lens M4 is inclined by 22.5 degrees in the counterclockwise direction about the point Ps0 with respect to the normal Lv0. In the plane view in the + Y direction, the optical axis Lp5 of the fifth illumination module M5 is inclined by 7.5 degrees in the counterclockwise direction about the point Ps0 with respect to the normal line Lv0. In the plane view in the + Y direction, the optical axis Lp6 of the sixth illumination module M6 is inclined by 22.5 degrees with respect to the normal Lv0 clockwise around the point Ps0, and the seventh illumination module M7 is inclined by 37.5 degrees in the clockwise direction with respect to the normal line Lv0 centered on the point Ps0. In the plane view in the + Y direction, the optical axis Lp8 of the eighth illumination module M8 is inclined by 52.5 degrees in the clockwise direction with respect to the normal line Lv0 centered on the point Ps0, M9 is inclined at 67.5 degrees with respect to the normal line Lv0 in the clockwise direction centered on the point Ps0.

According to the first to ninth illumination modules M1 to M9, the point Ps0 (irradiation target area As0) on the inspection object W1 can be illuminated from various angles. At this time, in each m-th lighting module Mm, on the optical axis Lpm extending linearly in the direction in which the light is emitted from the plurality of outgoing portions Em (also referred to as the outgoing direction) (As0)).

In this case, the lighting unit 521 can be controlled to be turned on or off under the control of the control unit 7. The lighting unit 521 may be regarded as constituting the lighting apparatus 8 and the constitution including the lighting unit 521 and the control unit 7 is regarded as constituting the lighting apparatus 8 .

When the illumination device 8 includes the illumination unit 521 and the control unit 7, the control unit 7 controls the illumination unit 8 such that the first to ninth illumination modules M1 to M9 are turned on The state can be controlled. For example, one or more of the first to ninth lighting modules M1 to M9 may be set to be selectively turned on. Specifically, for example, it is possible to set at least one light-on state among a state in which light is emitted from a plurality of light-emitting portions Em in the m-th lighting module Mm (also referred to as an m-lighted state) have. For example, it may be selectively set to one of two or more lighting states including a first lighting state and a second lighting state.

The light receiving sensor 522 has, for example, a line sensor Ls1. The line sensor Ls1 includes a plurality of light receiving elements Ae1 arranged in a direction corresponding to the arrangement direction (+ Y direction). In each light-receiving element Ae1, for example, a signal corresponding to the intensity of light received by a diode such as a silicon diode can be obtained. As a specific example of the light receiving sensor 522, for example, a CMOS sensor or the like can be considered. Here, the direction corresponding to the arrangement direction (+ Y direction) includes, for example, an arrangement direction (+ Y direction) itself and an optically equivalent direction when the optical path is bent by reflection and refraction .

Then, for example, a signal corresponding to the spatial distribution of the intensity of light from the object to be inspected W1 is acquired by the light receiving sensor 522 for the object to be inspected W1 illuminated by the illumination unit 521 . Here, for example, when the measuring section 5 including the scanner section 52 is moved once in the + X direction or the -X direction, the scanner section 52 in the + Y direction among the objects to be inspected W1 A signal corresponding to a spatial distribution about the intensity of light can be acquired for an elongated region having a width along the length extending in the + Y direction and a length in the + X direction.

The signal obtained by the light receiving sensor 522 is sent out to the control unit 7 through the cable bear 6, for example. The light receiving sensor 522 receives light from the irradiation target area As0 illuminated by, for example, at least one of the first through 9th illumination modules M1 to M9, A signal according to a spatial distribution regarding the intensity of light from the region AsO can be acquired.

Incidentally, when viewed in a plane in the + Y direction, the optical axis Ln1 of the light receiving sensor 522 is inclined clockwise from the normal Lv0 by 7.5 degrees around the point Ps0. Therefore, the optical axis Ln1 of the light receiving sensor 522 and the optical axis Lp5 of the fifth illumination module M5 have a line symmetry relationship with the normal line Lv0 as a symmetrical axis when viewed in a plane in the + Y direction have. Therefore, when the upper surface of the inspection object W1 is substantially flat, for example, when the surface of the inspection object W1 is illuminated by the fifth illumination module M5, The reflected light can be received by the light-receiving sensor 522. That is, for example, regularly reflected light generated in the inspection object W1 by the illumination by the fifth illumination module M5 is received by the light receiving sensor 522, and the first through fourth and sixth through ninth illumination modules M1 The scattered light generated in the inspection object W1 by the illumination by the light receiving sensors 522 to M4 and M6 to M9 can be received by the light receiving sensor 522. [ Therefore, the fifth illumination module M5 substantially serves as direct illumination as seen from the light receiving sensor 522, and the first through fourth and sixth through ninth illumination modules M1 through M4 and M6 through M9 are substantially It can serve as a scattering light.

Therefore, in the present embodiment, for example, the fifth illumination module M5 can set the light receiving sensor 522 to a state (also referred to as a direct lighting state) in which regularly reflected light is received from the inspection object W1 have. The first to fourth and sixth to ninth lighting modules M1 to M4 and M6 to M9 may be arranged in a state in which the light receiving sensor 522 receives scattered light from the inspection object W1 ). &Lt; / RTI &gt; For example, the light receiving sensor 522 receives the regular reflection light from the inspection object W1 by the fifth illumination module M5 and the first through fourth and sixth through ninth illumination modules M1 to M4 and M6 to M9. (Also referred to as a mixed illumination state) can be realized. By adopting an illumination state suitable for the state of the object W1, inspection accuracy of the object W1 can be improved.

Here, for example, when the surface of the object W1 to be inspected is of a mirror surface shape, when the scattering illumination state is set, the intensity of the signal obtained by the light receiving sensor 522 is lowered, 522 can be enhanced. However, if it is set to the direct illumination state, excessive contrast may be generated in the unevenness, and therefore, it may be set appropriately in the mixed illumination state.

5 and 6 are diagrams schematically showing specific examples of the object W1 to be inspected. 5 and 6, it is assumed that the object to be inspected W1 is a substrate Bs0 made of resin on which the wiring pattern Cu0 is formed, for example. In this case, when the direct lighting state is set, regularly reflected light toward the light-receiving sensor 522 is likely to be generated in the wiring pattern Cu0 of the same metal, and light is scattered on the substrate Bs0, It is difficult for regular reflection light to be generated. As a result, in the signal obtained by the light receiving sensor 522, the intensity of the signal according to the wiring pattern Cu0 can be made higher than the intensity of the signal according to the substrate Bs0. As a result, the disconnection Df1 and the missing Df2 of the wiring pattern Cu0 can be detected with high precision.

However, when the irregularities on the surface of the wiring pattern (Cu0) are large, for example, when the irregularities are set in the mixed illumination state, excessive contrast in the irregularities hardly occurs. At this time, in the signal obtained by the light-receiving sensor 522, a change in the intensity of the signal with respect to the contour portion of the wiring pattern Cu0 is somewhat large, and a change in the signal intensity with respect to the concavo- Can be reduced. As a result, the disconnection Df1 and the missing Df2 of the wiring pattern Cu0 can be detected with high precision.

For example, when the inspection object W1 is made of metal and it is desired to inspect the presence or absence of scratches and scratches on the metal surface, if the inspection object W1 is set in the scattered illumination state instead of the direct illumination state, It can be picked up by the light-receiving sensor 522 in a state in which scratches and scratches on the surface are easily visible. At this time, an angle (also referred to as an irradiation angle) at which light is irradiated to the object W1 to be inspected is appropriately determined by the first to fourth and sixth to ninth illumination modules M1 to M4 and M6 to M9 It is possible to adjust the susceptibility to scratches and scratches on the metal surface.

<(2-2) Lighting module>

Fig. 7 is a side view schematically illustrating the schematic configuration of the first to ninth lighting modules M1 to M9. As shown in Fig. 3, the first to ninth lighting modules M1 to M9 have a rotation symmetrical relationship with each other, and have substantially the same configuration as each other. Therefore, the structure of the fifth illumination module M5 will be described here as an example. 8 is a front schematic view illustrating a schematic configuration of the fifth lighting module M5.

As shown in Fig. 7, the fifth illumination module M5 includes an emergent column heat EL5 and a reflector Rf1.

The emission top row EL5 has a plurality of emission portions E5 arranged in a predetermined arrangement direction (+ Y direction). Each emitting portion E5 emits light in a predetermined emitting direction. As a result, the irradiation target area As0 on the upper surface of the object W1 can be illuminated. Here, the plurality of outgoing portions E5 have substantially the same configuration, and include two or more outgoing portions E5 for emitting the same kind of light. In the present embodiment, the plurality of output portions E5 and the two or more output portions E5 are the same. In the emergent heat array EL5, for example, a plurality of outgoing portions E5 are arranged at a constant pitch (interval) P0. The &quot; same kind of light &quot; as used herein may include, for example, light having the same wavelength band and light having the same energy intensity. As the light in the same wavelength range, for example, light of the same color may be included.

The reflecting portion Rf1 is a reflecting surface (reflecting surface) arranged so as to be orthogonal to the arrangement direction (+ Y direction) as viewed in plan from a direction intersecting the arrangement direction (+ Y direction) of the plurality of emission portions E5 Sf1. Thus, the light emitted from the plurality of outgoing portions E5 can be reflected by the reflecting surface Sf1 and irradiated toward the object W1 to be inspected. At this time, in the inspection object W1, the emergent heat array EL5 can be pseudo-extended by the presence of the reflecting surface Sf1. That is, although the number of the outputting portions E5 is not actually increased, a state equivalent to the case where the number of the outputting portions E5 is increased can be realized. As a result, the irradiation intensity of light per unit area of the object to be inspected W1 can be easily improved with a simple configuration without causing the apparatus to be large-sized. In this case, defects in which the irradiation intensity of the light in the vicinity of both ends of the irradiation subject region As0 is lowered can be solved, in particular. In the present embodiment, the arrangement direction (+ Y direction) and the intersection direction are orthogonal, and the reflection surface Sf1 is a surface parallel to the XY plane orthogonal to the arrangement direction. If the arrangement relationship of the plurality of exit portions E5 and the reflecting surface Sf1 is adopted, for example, the design and manufacture of the fifth illumination module M5 can be easily realized.

Incidentally, the two or more outgoing portions E5 constituting the outgoing heat column EL5 are respectively provided with the first outgoing portion E5f arranged in order from the side nearest to the reflection surface Sf1, (E5s) are included. Here, the interval (also referred to as the first distance) M0 between the reflecting surface Sf1 and the first emitting portion E5f, as viewed in plan from the intersecting direction, is equal to the distance between the first emitting portion E5f and the first emitting portion E5f, Half of the interval (also referred to as the second interval) P0 of the second emission sections E5s. That is, the following relation (1) is satisfied.

M0? P0 / 2 (1)

As a result, the pitch of the pseudo-emergence portion E5 in the pseudo-extended emergence heat row EL5 becomes equal to or smaller than the pitch P0 of the actual emergence portion E5. As a result, the irradiation intensity of light per unit area in the inspection object W1 can be easily improved. Here, theoretically, for example, if the relationship of M0 = P0 / 2 is satisfied, the pitch of the pseudo-emergent portion E5 in the pseudo-extended emergent heat EL5 is larger than the pitch Becomes equal to the pitch P0 of the object E5 and the irradiation intensity of light per unit area of the object W1 can be easily improved.

However, a phenomenon that the light from a region near both ends in the irradiation subject region As0 tends to be detected as light with a weaker intensity than the light from the other region due to the performance of the imaging lens of the light receiving sensor 522 May be referred to as &quot; photosensitive &quot;). In this case, for example, if the exit portion E5 and the reflection surface Sf1 are disposed so as to satisfy the relationship of M0 &lt; P0 / 2, a pseudo emission A portion where the pitch of the portion E5 becomes less than the pitch P0 of the actual output portion E5 is generated, and the influence of the ambient light can be reduced.

When the reflecting surface Sf1 is arranged so as not to overlap the irradiation target area As0 of the inspected object W1 when viewed from the plane in the emitting direction of the emitting portion E5 for example, , A part of the light emitted from the emitting portion E5 is blocked, and defects irradiated to the irradiation target region As0 are hardly generated.

7 and 8, in the fifth illumination module M5, for example, light emitted from a plurality of outgoing portions E5 is irradiated onto the surface of the inspection object W1 in a linear irradiation The first lens unit L5a and the second lens unit L5b are designed so as to be converged on the object area As0. In this embodiment, as shown in Figs. 3 and 8, the convergence angle of each of the first to ninth lighting modules M1 to M9 is set to about 10 to 15 degrees, but the present invention is not limited to this, For example, it may be set to about 10 to 20 degrees.

Specifically, as shown in Fig. 8, for example, the light flux diffused in the X direction and the Z direction in the light emitted from the emitting portion E5 passes through the first lens portion L5a and the second lens portion L5a, Can be condensed on the linear irradiation target area As0 by the irradiation area L5b. Here, the first lens unit L5a and the second lens unit L5b may be constituted by, for example, a cylinder lens or a linear Fresnel lens. For example, when the function of diffusing light in the ± Y direction is added to the second lens unit L5b, light is irradiated in the linear irradiation target area As0 on the inspection object W1 It is difficult to cause variation in strength. Here, for example, when a lenticular lens or a diffusing plate for scattering light in one direction (for example, light shaping diffusers of Luminit Co., Ltd.) is added, light is diffused in the ± Y direction to the second lens unit L5b Function can be added. Here, for example, a configuration in which a lenticular lens or a diffusion plate or the like is disposed separately from the surface of the second lens unit L5b on the first lens unit L5a side or the second lens unit L5b is employed .

In this embodiment, a lenticular lens is attached to the first lens portion L5a side of the second lens portion L5b. More specifically, in the present embodiment, the light to which the light flux emitted from the light emitting portion E5 is diffused is changed to + Y (f) by the linear Fresnel lens having the focal length f of 15 mm as the first lens portion L5a The light flux can be converted into approximately parallel light in plan view. Further, as the second lens unit L5b, a lenticular lens is formed on the first lens unit L5a side of the linear Fresnel lens having the focal length f of 50 mm, so that the luminous flux in the + Y direction The approximately parallel light can be converted into light to be reduced in the light flux and can be condensed on the linear irradiation target area As0 of the inspection object W1.

Figs. 9 and 10 are views for explaining the role of the lenticular lens. Fig. 9 shows a case where the lens Lc0 from which the lenticular lens has been removed from the second lens portion L5b of the fifth illumination module M5 of the present embodiment is employed, The path of the light irradiated to the point Pe1 is schematically shown as a reference example. 10 schematically shows the path of light irradiated to one point Pe1 of the irradiation target area As0 in the fifth illumination module M5 of the present embodiment. In the reference example shown in Fig. 9, there is shown a state in which light is irradiated to one point (Pe1) in nine paths from nine outgoing portions E5. On the contrary, as shown in Fig. 10, the path of light from nine outgoing portions E5 to one point Pe1 can be increased from nine by the presence of the lenticular lens. As a result, light is irradiated from more angles to the area to be irradiated As0. As a result, variations in the intensity of the irradiated light are less likely to occur in the linear irradiation area As0.

11, the distance between the reflecting surface Sf1 and the emitting portion E5 is S0, the distance between the reflecting surface Sf1 and the emitting portion E5 of the inspected object W1 and the emitting portion E5 in the emitting direction of the emitting portion E5, Let the distance be L0. The distance from the reflecting surface Sf1 to the most distant portion of the inspection object W1 from the reflecting surface Sf1 when the inspection object W1 is viewed in a plane in the emitting direction of the emitting portion E5 Is set to F0.

At this time, since the distance SO approaches, for example, as close to zero as possible, it is possible to easily realize the deliberate extension of the emergent heat string EL5 by the reflection surface Sf1 as seen from the inspection object W1 . Also, depending on the structure of the fifth illumination module M5, for example, it may be difficult to make the distance S0 close to zero. In this case, the light emitted from the first exit portion E5f closest to the reflection surface Sf1 is reflected by the reflection surface Sf1, and the light reflected from the reflection surface Sf1 of the inspected object W1 The distance S0 may be set so as to satisfy the relation of the following expression (2) from the geometrical arrangement such that the distance S is irradiated to the far portion.

S0? M0 占 L0 / (F0 + M0) (2)

However, when the angle (also referred to as diffusion angle) at which the light flux of the light emitted from the first emission section E5f is diffused is small, the distance S0 may be appropriately set in accordance with the diffusion angle.

<(3) Summary of one embodiment>

As described above, in the illuminating device 8 according to the present embodiment, for example, in each of the lighting modules M1 to M9, the crossing direction (+ Y direction) intersecting the arrangement direction (+ Y direction) , A reflecting surface Sf1 orthogonal to the arrangement direction (+ Y direction) is provided. Here, with respect to the first outputting section E5f and the second outputting section E5s, which are arranged in order from the side closer to the reflecting surface Sf1, when viewed in a plane in the intersecting direction, The first interval M0 between the first output port Eff and the first output port E5f is equal to or less than half the second interval P0 between the first output port E5f and the second output port E5s . As a result, when viewed from the inspection object W1, the emergent heat EL5 can be pseudo-stretched by the reflective surface Sf1. The pseudo-emergence portion E5 of the pseudo-extended emergence heat EL5 is equal to or smaller than the pitch of the actual emergence portion E5 and the ratio of the per unit area of the inspected object W1 The irradiation intensity of light can be easily improved.

In the inspection apparatus 1 according to the present embodiment, the light receiving sensor 522 irradiates the inspection object W1 illuminated by the illumination section 521 with the light from the inspection object W1 A signal according to the spatial distribution about the intensity can be obtained. At this time, the intensity of the signal in accordance with the spatial distribution of the intensity of light from the object to be inspected W1 obtained by the light-receiving sensor 522 can be easily increased by the illumination unit 521 according to the present embodiment . As a result, for example, the accuracy of the inspection can be enhanced

&Lt; (4) Modifications &gt;

The present invention is not limited to the above-described embodiment, but various modifications and improvements can be made without departing from the gist of the present invention.

&Lt; (4-1) First Modified Example &gt;

For example, in the above-described embodiment, the LEDs as the light source that emits self-light are applied to the emitting units E1 to E9 that emit light, but the present invention is not limited thereto. For example, a light source may be provided in addition to the outgoing portions E1 to E9, and the light may be guided to the outgoing portions E1 to E9 by a light guide portion such as an optical fiber.

12 is a side view schematically illustrating a schematic configuration of the first to ninth lighting modules M1A to M9A according to the first modified example (also referred to as an m-th lighting module (MmA) if m is an integer of 1 to 9) . The first to ninth lighting modules M1A to M9A have a rotation symmetrical relationship with each other and can have substantially the same configuration as each other. Therefore, the structure of the fifth illumination module M5A will be described here as an example.

12, for example, the light emitted from the light source box EB1 is guided to the fifth lighting module M5A by the fiber bundle BF1, which is a bundle of optical fibers, E5, the light can be emitted from each of the outgoing portions E5.

If such a configuration is employed, for example, it is easy to reduce the diameter of the optical fiber than the diameter of the LED, and it is possible to arrange more emission portions E5 at a high density in one emission column EL5. Thus, for example, light can be irradiated from a larger angle to one point Pe1 on the irradiation area As0. As a result, even if the second lens unit L5b such as a lenticular lens or a diffusion plate is not provided with a function of diffusing light in the ± Y direction as in the above-described embodiment, in the linear irradiation target area As0 , It is difficult for the intensity of the irradiated light to vary.

&Lt; (4-2) Second Modification Example &gt;

In the embodiment described above, light of the same kind is emitted from all of the outgoing portions E1 to E9 included in each of the outgoing heat rows EL1 to EL9, but the present invention is not limited to this. For example, the emergent heat arrays EL1B to EL9B (also referred to as emergent heat arrays ELmB, where m is an integer of 1 to 9) may be employed, in which two or more kinds of output units for emitting different types of light are arranged, respectively.

13 is a side view schematically illustrating a schematic configuration of the first to ninth lighting modules M1B to M9B according to the second modified example (also referred to as an m-th lighting module MmB when m is an integer of 1 to 9) . The first to ninth lighting modules M1B to M9B have a rotation symmetrical relationship with each other and can have substantially the same configuration as each other. Therefore, the structure of the fifth illumination module M5B will be described here as an example.

As shown in Fig. 13, for example, a plurality of light output sections constituting the output column heat EL5B include two or more first light output sections R5 for emitting light of the first kind, And two or more second light emitting units B5 for emitting light. In the example shown in Fig. 13, the plurality of emitting units constituting the emitting column EL5B includes two or more third emitting units G5 for emitting the third type of light. In the example shown in Fig. 13, the emission column EL5B is composed of 21 emission sections including five first emission sections R5, 10 second emission sections B5, and 6 third emission sections G5, .

Here, for example, out of the 21 outgoing portions arranged along the + Y direction, the six third outgoing portions G5 are arranged at the 1st, 5th, 9th, 13th, 17th and 21st positions in the + Y direction will be. In addition, for example, out of the 21 outgoing portions arranged along the + Y direction, the five first outgoing portions R5 are arranged at 3, 7, 11, 15, and 19 in the + Y direction. For example, out of the 21 outgoing portions arranged along the + Y direction, the 10 second outgoing portions B5 are arranged in the + Y direction at 2, 4, 6, 8, 10, 12, 14, 16, 18, and 20, respectively. In this modified example, for example, 21 emission portions are arranged at substantially equal intervals (approximately equal pitch) along the + Y direction. That is, for example, five first output portions R5 are arranged at substantially the same pitch Pr0, and ten second output portions B5 are arranged at a pitch of about 1/2 of the pitch Pr0 Pb0). In addition, for example, six third emission portions G5 are arranged at substantially the same pitch Pr0. The third emission sections G5 located at both ends of the 21 emission sections are arranged on the extension line of the reflection surface Sf1, for example.

For example, two or more first outgoing radiation sections R5 are provided with a first outgoing radiation section R5f arranged in order from the side nearest to the reflection surface Sf1 and a second outgoing radiation section R5f And a portion R5s. For example, in the two or more second outgoing portions B5, the first and second outgoing portions B5f and B5f arranged in order from the side closer to the reflecting surface Sf1, And a portion B5s. The reflecting surface Sf1 and the reflecting surface Sf2 of the first emitting portion Sf2 are disposed in a plane in the direction (intersecting direction) corresponding to the reflecting surface Sf1 intersecting the arrangement direction (+ Y direction) of the 21 emission portions E5. (Also referred to as a third interval) Mr0 of the first output port R5f is equal to the interval (also referred to as a fourth interval) between the first output port R5f and the second output port R5s Pr0). That is, for example, for two or more outgoing portions emitting the same kind of light, the interval between the reflecting surface Sf1 and the first emitting portion as seen from the plane in the intersecting direction is larger than the distance between the first emitting portion Half of the interval between the first and second light output portions of the second. The interval (also referred to as a fifth interval) Mb0 between the reflecting surface Sf1 and the first second outputting section B5f, as viewed in plan from the intersecting direction, Half of the interval (also referred to as the sixth interval) Pb0 between the first and second light emitting units B5a and B5f and the second second light emitting unit B5s. The fifth interval Mb0 is shorter than the third interval Mr0 and the sixth interval Pb0 is shorter than the fourth interval Pr0.

When such a configuration is adopted, for example, the control unit 7 may be configured to control the state in which the first kind of light is emitted from two or more first output units R5 (also referred to as a first output state) , One of two or more outgoing states including a state in which a second kind of light is emitted from two or more second outgoing portions B5 (also referred to as a second outgoing state) It can be assumed that In addition, two or more kinds of emitting states may include, for example, a state in which a third kind of light is emitted from two or more third emitting portions G5 (also referred to as a third emitting state). At this time, for example, when two or more first outgoing portions R5 and two or more second outgoing portions B5 are individually turned on, the presence of the reflecting surface Sf1 in the inspected object W1 , The emergent heating column EL5B can be pseudo-elongated. The pitch of the pseudo first exit portion R5 in the pseudoically extended exit column EL5B is equal to or smaller than the actual pitch Pr0 of the first exit portion R5, The pitch of the pseudo second outgoing portion B5 in the outgoing heat column EL5B can be equal to or smaller than the pitch Pb0 of the actual second outgoing portion B5. As a result, in the condition that the same kind of light is irradiated, the irradiation intensity of light per unit area of the inspection object W1 can be easily improved.

Here, the number of arrangements of the two or more second outgoing portions B5 is larger than the number of arrangements of the two or more first outgoing portions R5. Therefore, in the light-receiving sensor 522, the light-receiving sensitivity to the light of the first kind emitted from the two or more first output portions R5 is greater than the light-receiving sensitivity of the second The light receiving sensitivity of the light receiving sensor 522 can be illuminated, for example, even if the light receiving sensitivity to light of the type is low.

If the first type of light includes red light and the second type of light includes blue light, for example, the light receiving sensitivity to blue light is lower than that of red light, The illumination according to the illumination light 522 becomes possible. In the present embodiment, the first type of light is red light, the second type of light is blue light, and the third type of light is green light. Here, for example, it is assumed that the light receiving sensor 522 is arranged along the corresponding direction in the + Y direction and includes a plurality of diodes capable of acquiring signals corresponding to the intensity of light received. At this time, the plurality of diodes generally have a lower light receiving sensitivity to blue light than red light, for example. Accordingly, for example, the illumination state corresponding to the light-receiving sensitivity of the light-receiving sensor 522 is realized, so that the accuracy of inspection of the object to be inspected W1 can be enhanced.

Here, for example, the red light is a light having a wavelength of about 600 to 760 nm, the green light is a light having a wavelength of about 500 to 570 nm, the blue light has a wavelength of about 400 to 500 nm . Here, as the plurality of diodes, for example, a silicon diode or the like may be employed. As the light-receiving sensor 522, for example, a line sensor Ls1 in which a plurality of light-receiving elements Ae1 such as a plurality of diodes are arranged in one direction may be employed. Here, for example, in a configuration in which the color filter is disposed on the front surface of each light receiving element, when the ratio of the light receiving elements in which the color filter of the desired color (for example, blue) is disposed is increased in all the light receiving elements , The light receiving sensitivity to the light of the desired color can be appropriately adjusted.

For example, if the object W1 to be inspected is a printed circuit board on which an equivalent metal wiring pattern is formed on a resin substrate, the absorption rate of the red light in the substrate made of resin It is supposed that the absorption rate of red light is relatively high. In this case, for example, when the red light is irradiated to the printed board, the wiring pattern may be bright and the resin-made substrate as the background may be darkly illuminated. On the other hand, it is assumed that the absorption rate of the blue light in the resin substrate is relatively lower than the absorption rate of the blue light in the wiring pattern. At this time, for example, when the blue light is irradiated onto the printed substrate, the wiring pattern may become dark and the resin-made substrate as the background may be brightly illuminated. When blue light is irradiated to the printed substrate from the illumination module having an optical axis having a greater angle with respect to the normal Lv0 of the upper surface of the printed substrate as the inspection object W1, It can be in a state of being brightly illuminated. For example, if the presence or absence of sebum contamination adhering to the surface of the object to be inspected W1 is to be inspected, it is preferable that the absorption rate of the blue light in the sebum is higher than the absorption rate of the other part Is higher than the absorption rate of blue light in the case of the blue light. At this time, for example, when the inspection object W1 is irradiated with blue light, the portion to which sebum contamination is attached may be dark and the other portion may be brightly illuminated. When a polyimide substrate is employed, red light is easily transmitted through the substrate, and blue light is difficult to transmit through the substrate. Therefore, for example, when a wiring pattern is formed also on the back surface of the substrate, the inspection on the surface of the substrate can be appropriately performed on the side not illuminated with red light but illuminated with blue light. However, in the case where the thickness of the substrate made of polyimide is large and the wiring pattern is not formed on the back surface of the substrate, the side of the wiring pattern illuminated with the red light, which can be relatively brightly illuminated, The inspection can be properly performed.

Therefore, for example, when the inspection object W1 is irradiated with the red light and the blue light, which is to be inspected, the inspection accuracy can be increased.

Here, instead of using green light as the third type of light, for example, infrared light (IR light) may be used. Here, as infrared light, for example, light having a wavelength of about 800 nm may be employed. In this case, for example, if the object W1 to be inspected is a printed board on which a wiring pattern is formed, the absorptivity of infrared light on the substrate is significantly higher than the absorptivity of infrared light on the wiring pattern. Therefore, when the infrared light is irradiated on the object W1, the accuracy of the inspection can be enhanced. As the third type of light, for example, ultraviolet light (UV light) may be employed. That is, the term &quot; light &quot; in the present application includes not only visible light, but also infrared light (IR light) and ultraviolet light (UV light).

&Lt; (4-3) Other Modifications &gt;

For example, in each of the m-th lighting modules Mm in the above-described embodiment, the plurality of emission portions Em arranged in the + Y direction as the arrangement direction are, for example, a straight line extending in the + Y direction As shown in Fig.

In the above-described embodiment, the emergent heat array ELm in which a plurality of emission sections Em are arranged in a line is employed for each of the mth illumination modules Mm. However, the present invention is not limited to this. For example, each of the m-th lighting modules Mm may have two or more rows of emergent heat elements ELm arranged substantially in parallel with each other. At this time, for example, when the three kinds of output portions for emitting the first to third kinds of light are arranged so as to form the checkered pattern, the installation density of the plurality of outgoing portions Em is improved, The intensity of the irradiated light can be increased.

In the above-described embodiment, the pitch at which the plurality of outgoing portions Em are arranged in each outgoing heat array ELm is substantially constant, but the present invention is not limited thereto. For example, in order to reduce the influence of ambient light which may be caused by the performance of the imaging lens of the light-receiving sensor 522, it is preferable that a plurality of The pitch at which the emission portions Em are arranged may be set to be short.

In the above-described embodiment, the reflecting surfaces Sf1 are arranged vertically with respect to the arrangement direction of the plurality of outgoing portions Em in each of the outgoing heat elements ELm, but the present invention is not limited thereto. For example, if it satisfies a condition perpendicular to a virtual plane (also referred to as a virtual plane) including an emitting direction and an arranging direction in which light is emitted from a plurality of emitting units Em, It may be slightly inclined with respect to the sub heat (ELm). At this time, if the reflecting surface Sf1 is tilted so as to rotate in the direction away from the emergent heat string ELm, the pitch of the pseudo emitters Em seen from the inspected object W1 becomes the actual emitter Em, Of the pitch. Further, for example, if the condition perpendicular to the virtual plane is satisfied, the reflecting surface Sf1 may be slightly irregular.

In the above-described embodiment, the illumination section 521 has nine illumination modules M1 to M9, but is not limited thereto. For example, the illumination unit 521 may include a fifth illumination module M5 for realizing the direct illumination state, first to fourth and sixth to ninth illumination modules M1 to M4 and M6 to M9 for realizing the scattered illumination state, May be changed to an illumination section in which at least one illumination module is disposed, or an illumination section in which any two or more illumination modules of the nine illumination modules M1 to M9 are arranged. In this case, the angle formed between the emitting direction of the light emitted from the two or more lighting modules and the upper surface of the inspection object W1 can be appropriately changed.

When the illumination unit having two or more illumination modules is employed as described above, the illumination unit has a plurality of emergent heat arrays, and the plurality of emergent heat arrays include a first emergent unit row having a first plurality of emergent units, And a second outgoing heat row having a row of outgoing rows. Here, the first plurality of output sections constituting the first output sub-array are arranged along the arrangement direction (for example, the + Y direction) and emit light in the first output direction, respectively. In addition, the second plurality of outgoing portions constituting the second outgoing heat row are arranged along the arrangement direction (for example, + Y direction) and emit light in the second outgoing direction, respectively. When the first emission direction and the second emission direction intersect at a point Ps0 (i.e., the irradiation target area As0) as viewed in a plane in the arrangement direction, for example, the state of the inspection object W1 The irradiation angle of the light with respect to the object W1 to be inspected can be switched.

In addition, for example, the illumination section 521 may be changed to an illumination section in which one of the nine illumination modules M1 to M9 is arranged. However, at this time, the function of switching the irradiation angle of the light to the inspection object W1 is omitted.

In the above embodiment, the main scanning and the auxiliary scanning are alternately performed in the inspection apparatus 1, but the present invention is not limited to this. For example, a configuration in which scanning of either the main scanning or the sub scanning is performed may be adopted.

In the embodiment described above, the line sensor Ls1 is employed as the light-receiving sensor 522, but the present invention is not limited to this. For example, when the light-receiving sensor 522 is disposed parallel to each other including a plurality of light-receiving elements arranged in the direction corresponding to the arrangement direction of the plurality of light-emitting units Em in the m-th light module Mm It may be changed to have a row of a plurality of light receiving elements.

In the embodiment described above, in the respective mth illumination modules Mm, the light is focused on the irradiation target area As0 by the first lens unit Lma and the second lens unit Lmb, It is not limited. For example, light may be condensed on the irradiation target area As0 by one lens part, and light with high directivity having a thin flat plate-shaped optical path is emitted from each of the emission parts Em, Both the portion Lma and the second lens portion Lmb may be omitted.

All or a part of each of the above-described embodiment and various modifications may be combined within a range that does not contradict with the above. It is possible to apply the features of the other modified examples to the first and second modified examples within a range not appropriately contradictory.

1: inspection apparatus 5: measuring section
7: Control unit 8: Lighting unit
521: illumination part 522: light receiving sensor
Ae1: light receiving element B5: second output portion
B5f: first emission section B5s of the first: second emission section of the second
E1 to E9 (Em): emitting portion E5f: first emitting portion
E5s: second outgoing section
EL1 to EL9 (ELm), EL1B to EL9B (ELmB)
G5: Third emission section Ls1: Line sensor
Lv0: normal M0: first interval
M1 to M9 (Mm), M1A to M9A (MmA), M1B to M9B (MmB): 1st to 9th lighting modules (mth lighting module)
Mb0: fifth interval Mr0: third interval
P0: second interval Pb0: sixth interval
Pr0: fourth interval R5: first emission section
R5f: first emission section R5s of the first: second emission section
Rf1: Reflecting portion Sf1: Reflecting surface
W1: object to be inspected

Claims (7)

An emission section row arranged along a predetermined arrangement direction and having a plurality of emission sections for emitting light in respective predetermined emission directions,
And a reflecting portion disposed so as to be orthogonal to the arrangement direction and having a reflecting surface capable of reflecting light in a crossing direction intersecting with the arrangement direction,
Wherein the plurality of outgoing portions include at least two outgoing portions for emitting the same kind of light,
Wherein the at least two outgoing portions include a first outgoing portion and a second outgoing portion that are arranged in order from a side close to the reflection surface,
Wherein the first interval between the reflection surface and the first emission section is less than or equal to half of the second interval between the first emission section and the second emission section as viewed in a plane in the cross direction. The method according to claim 1,
Wherein the plurality of outgoing portions include at least two first outgoing portions for emitting a first type of light and at least two second outgoing portions for emitting a second type of light,
Wherein the at least two first outgoing portions include a first outgoing portion and a second outgoing portion, the first outgoing portion being arranged in order from the side closer to the reflecting surface,
Wherein the at least two second outgoing portions include a first outgoing second portion and a second outgoing portion that are arranged in order from a side closer to the reflective surface,
Wherein a third interval between the reflective surface and the first output section of the first light emitting device is a half of a fourth interval between the first output section of the first light emitting device and the first output section of the second light emitting device, Or less,
Wherein a fifth interval between the reflective surface and the first second output section is half the sixth interval between the first output section and the second output section as viewed in a plane in the cross direction, Or less,
The fifth interval is shorter than the third interval,
And the sixth gap is shorter than the fourth gap. The method of claim 2,
Wherein the first type of light comprises red light,
And the second type of light comprises blue light. The method of claim 2,
A first longitudinal emergence state in which light of the first type is emitted from each of the at least two first outgoing portions and a second longitudinal emergence state in which light of the second type is emitted from the at least two second outgoing portions, And an outputting state of one of two or more kinds of emitting states including the light emitting element. The method according to claim 1,
A plurality of said output heat rows,
Wherein the plurality of outgoing heat rows
A first emission section row arranged along the arrangement direction and having a first plurality of emission sections for emitting light in the first emission direction,
And a second outgoing heat array arranged along the arrangement direction and having a second plurality of outgoing sections for respectively emitting light in a second outgoing direction,
The first emission direction and the second emission direction intersect in a plane in the arrangement direction,
And a second lighting state including a first lighting state in which light is emitted from the first plurality of emitting units and a second lighting state in which light is emitted from the second plurality of emitting units, And a control unit capable of setting the brightness of the light. A lighting device according to any one of claims 1 to 5,
A light receiving sensor capable of receiving light from an inspection target area located on a straight line drawn virtually in the outgoing direction from the plurality of output units and obtaining a signal according to a spatial distribution about the intensity of light from the inspection target area, . A lighting device according to any one of claims 2 to 4,
A light receiving sensor capable of receiving light from an inspection target area located on a straight line drawn virtually in the outgoing direction from the plurality of output units and obtaining a signal according to a spatial distribution about the intensity of light from the inspection target area, And,
Wherein the light-
And a plurality of diodes arranged along a direction corresponding to the arrangement direction and capable of acquiring signals corresponding to the intensity of light received, respectively.

Images