JP2008292494A - Substrate-inspecting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate-inspecting device achieving size reduction and enabling high-accuracy inspection for defects on a target substrate with high efficiency. <P>SOLUTION: The coordinates of the position of a defective part are detected by a position-coordinate detecting unit from amounts of displacement in X and Y directions of reflectors obtained, when a substrate holder for holding the rectangular target substrate is raised to have a predetermined angle for visual observation from a horizontal state; the upper surface of the target substrate is irradiated with macroscopic illumination light from above in this state; laser beams emitted from a laser light source are split to direct in the X and Y directions by a light path splitting means; the split laser beams are reflected toward the target substrate by these two reflectors movably provided on X-direction and Y-direction guide members; and the reflectors are moved in the X and Y directions and the laser beams are reflected by the reflectors to be focused on the defective part on the target substrate. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a substrate inspection apparatus used for defect inspection of a glass substrate of a liquid crystal display (LCD), for example.

Conventionally, in a device for inspecting defects in a glass substrate used in an LCD, a macro observation in which illumination light is applied to the surface of the glass substrate and a defect portion such as a scratch on the surface of the glass substrate is observed from an optical change of reflected light. And a micro-observation that magnifies and observes a defect portion detected by this macro-observation.
For example, in Patent Document 1, a macro observation system and a micro observation system are provided corresponding to an XY stage that can move horizontally in the X and Y directions, and a substrate to be inspected is placed on the XY stage. The surface of the substrate to be inspected is moved by moving the XY stage in a two-dimensional direction in the X and Y directions and positioning the inspection site of the substrate to be inspected in the observation region of the macro observation system or the micro observation system. An apparatus that enables macro observation or micro observation of a defective portion of the above is disclosed.
JP-A-5-322783

By the way, recently, the size of the glass substrate tends to increase as the size of the LCD increases. For this reason, in the defect inspection of such a large-sized glass substrate, in the apparatus in which the XY stage as described above is horizontally moved in the two-dimensional direction of the X and Y directions, the movement of the XY stage is performed. The range needs to be four times as large as the area of the glass substrate, and the size of the glass substrate is increased and the size of the apparatus is unavoidable.
Further, in the apparatus configured as described above, since the surface of the substrate to be inspected is far away from the position of the eye of the inspector, it is difficult to inspect minute scratches. Furthermore, since it is difficult to acquire the positional information of the detected defective portion on the surface of the substrate to be inspected, there is a problem that a highly accurate defect inspection cannot be performed.
An object of the present invention is to provide a substrate inspection apparatus capable of realizing downsizing and efficiently performing highly accurate defect inspection on a substrate to be inspected.

  A substrate inspection apparatus according to a main aspect of the present invention includes: a substrate holder that holds a rectangular substrate to be inspected; a drive unit that raises the substrate holder to a predetermined angle for visual observation from a horizontal state; A macro illumination light source that irradiates the top surface of the substrate to be inspected with macro illumination light from above the substrate to be inspected in a state where the substrate is inspected, and along the X direction and the Y direction at least at the side edges of the substrate to be inspected Each of the guide members in the X direction and the Y direction integrally provided on the substrate holder, a laser light source that emits laser light, and an optical path that divides the laser light emitted from the laser light source into the X direction and the Y direction. A splitting means, and two reflectors that are movably provided on the guide members in the X direction and the Y direction, respectively, and reflect each laser beam split by the optical path splitting means toward the substrate to be inspected. Each reflector is moved to each guide member in the X direction and Y direction, reflected by each reflector, and each laser beam is made to coincide with a defective portion on the substrate to be inspected. And a position coordinate detection unit for detecting the position coordinates of the defect portion from each displacement amount in the Y direction.

  Another substrate inspection apparatus according to a main aspect of the present invention includes a substrate holder that holds a rectangular substrate to be inspected, a drive unit that raises the substrate holder to a predetermined angle for visual observation from a horizontal state, and a substrate holder A macro-illumination light source that irradiates the top surface of the substrate to be inspected with macro illumination light from above the substrate to be inspected at a predetermined angle, and an X direction and a Y direction that are at least perpendicular to the side edges of the substrate to be inspected. A guide member in the X direction and the Y direction integrally provided on the substrate holder along the X direction, a laser light source for the X direction that emits laser light in the X direction, and a laser light in the Y direction. A Y-direction laser light source that emits, a first reflector that is movably provided on the X-direction guide member and reflects the laser light emitted from the X-direction laser light source toward the substrate to be inspected; Direction Guy A second reflector that is movably provided on the member and reflects the laser light emitted from the laser light source for the Y direction toward the substrate to be inspected, and the first reflector is moved to the guide member in the X direction. When the second reflector is moved to the guide member in the Y direction and each laser beam is made to coincide with the defective portion on the substrate to be inspected, the amount of displacement of the first reflector in the X direction and the second reflection A position coordinate detection unit that detects the position coordinates of the defect portion from the amount of displacement of the body in the Y direction.

  In the substrate inspection apparatus of the present invention, each of the substrate inspection apparatuses has a storage unit that stores the position coordinates of the defective portion of the substrate to be inspected detected by the position coordinate detection unit, and the substrate holder is returned to the horizontal position. A pair of observation unit support guides provided parallel to both sides of the substrate holder, a pair of support columns movably provided on the pair of observation unit support guides, and a horizontal arm connecting the support columns And a substrate to be inspected, which is provided on the substrate holder so as to be movable in a direction perpendicular to the direction in which the observation unit support guide is provided, and along the horizontal arm portion. A micro inspection unit having an objective lens for enlarging the upper surface of the observation unit, and an observation unit support unit and a micro inspection unit based on the position coordinates of each defect portion read from the storage unit And a control unit for turning control.

  ADVANTAGE OF THE INVENTION According to this invention, while being able to implement | achieve size reduction, the board | substrate inspection apparatus which can perform a highly accurate defect inspection efficiently with respect to a to-be-inspected board | substrate can be provided.

  (First Embodiment) FIGS. 1 to 3 are views showing a configuration of a substrate inspection apparatus according to a first embodiment of the present invention. FIG. 1 is a perspective view, FIG. 2 is a side view, and FIG. 3 is a top view. 1 to 3, a holder 2 for holding a substrate to be inspected 3 is provided on the apparatus main body 1. As shown in FIG. 2, the base 2 of the holder 2 is rotatably supported with respect to the apparatus main body 1 by a support shaft 15, and a pulley 16 is provided around the support shaft 15. The apparatus main body 1 is provided with a motor 18, and a ring-shaped belt 17 is hung on the rotating shaft 181 and the pulley 16 of the motor 18. By transmitting the rotational driving force of the motor 18 from the rotating shaft 181 to the pulley 16 via the belt 17, the holder 2 is moved from the horizontal state around the support shaft 15 to the position of the two-dot chain line, for example, a predetermined angle θ. Can be tilted up.

  Further, the holder 2 has a frame shape, and a large substrate to be inspected 3 such as a glass substrate used for the LCD is placed and held on the peripheral edge thereof. In the holder 2, the void surrounded by the peripheral edge thereof has a rectangular shape, and the area of the void is slightly smaller than the area of the substrate 3 to be inspected. A substrate positioning member 201 made up of a plurality of cylindrical pins in the X-axis direction and the Y-axis direction is arranged on the holder 2 so as to slightly protrude from the surface of the holder 2 along the peripheral edge. The substrate to be inspected 3 is positioned by bringing the two sides of the substrate to be inspected 3 into contact with the sides of each substrate positioning member 201 on the holder 2. Further, the peripheral portion of the substrate 3 to be inspected is adsorbed to the surface of the holder 2 by a suction device (not shown) from a plurality of holes (adsorption pads) (not shown) provided along the entire periphery of the holder 2. The inspection substrate 3 is held on the holder 2 so as not to drop off.

  The holder 2 is further provided with guide scales 19 and 20 for detecting the position coordinates of the defective portion in the inspected substrate 3 along the Y-axis direction and the X-axis direction of the side edge of the inspected substrate 3. . The guide scale 19 is provided with a reflector (mirror) 215 in the Y-axis direction and the guide scale 20 is provided with a reflector (mirror) 216 in the X-axis direction so as to be movable along the guide scales 19 and 20. . The holder 2 is fixed with a beam splitter 214 at a position where the extension lines of the guide scales 19 and 20 intersect with each other, and a position slightly separated from the guide scale 20 with respect to the beam splitter 214 (guide scale). A laser light source 21 described later is provided on the extended line 20).

As shown in FIGS. 1 to 3, a pair of guide rails 4, 4 are arranged on the apparatus main body 1 in parallel in the Y-axis direction along both side edges of the holder 2. Further, an observation unit support portion 5 is disposed above the holder 2 so as to straddle the holder 2, and the observation unit support portion 5 extends along the guide rails 4 and 4 above the substrate 3 to be inspected, that is, the holder 2. The upper part is provided so as to be movable in the Y-axis direction.
The observation unit support 5 supports the observation unit 6 so as to be movable along a guide rail (not shown) in a direction (X-axis direction) orthogonal to the movement direction (Y-axis direction) of the observation unit support 5. Yes. Further, the observation unit support 5 is provided with a transmission line illumination light source 7 so as to face the moving line of the observation unit 6. The transmission line illumination light source 7 is arranged along the X-axis direction on the back plate 51 of the support portion 5 that passes under the holder 2 and performs linear transmission illumination from below the substrate 3 to be inspected. The observation unit support 5 can be moved in the Y-axis direction.

  The observation unit 6 includes a micro observation unit 9 provided with an indicator illumination light source 8 and a partial macro illumination light source 10 for macro observation. The indicator illumination light source 8 is for specifying a defect position on the inspected substrate 3 and projects the optically condensed spot light onto the surface of the inspected substrate 3. Since the reflected light from the surface of the substrate 3 to be inspected by the spot light is brighter than the reflected light from the surface of the substrate 3 to be inspected by the partial macro illumination light source 10, the spot light can be visually observed during the macro observation by the partial macro illumination light source 10. Can be observed.

The micro observation unit 9 has a microscope function having an objective lens 91, an eyepiece lens 92, and an epi-illumination light source (not shown), and the inspector uses the eyepiece lens 92 to pass an image of the surface of the substrate 3 to be inspected through the objective lens 91. Can be observed. A TV camera 93 is attached to the micro observation unit 9 via a trinocular tube. If visual micro observation is not required, only the TV camera 93 can be attached via a straight tube. The TV camera 93 captures an observation image of the surface of the inspected substrate 3 obtained by the objective lens 91 and sends it to the control unit 11. The control unit 11 displays an observation image captured by the TV camera 93 on the TV monitor 12. The control unit 11 is connected to an input unit 111 for an inspector to perform operation instructions and data input.
The partial macro illumination light source 10 is used for macro observation, and irradiates a part of the surface of the substrate 3 to be inspected on the holder 2 with the macro illumination light 101. Moreover, the illumination angle of the partial macro illumination light source 10 with respect to the surface of the substrate 3 to be inspected can be adjusted to an optimum angle for macro observation.

  FIG. 4 is a diagram illustrating a configuration example of the transmission line illumination light source 7. The transmission line illumination light source 7 includes a light source unit 71 and a solid glass rod 72. The light emitted from the light source unit 71 and diffusely reflected by the reflecting plate 712 is incident on the end of the glass rod 72 and is totally reflected and transmitted in the glass rod 72 and is coated along the back (lower part) of the glass rod 72. By being diffused by the white stripes 73, line-shaped light is emitted upward by the lens action of the glass rod 72. The transmission line illumination is not limited to the above configuration, and may be line illumination using a fluorescent lamp, for example.

  FIG. 5 is a diagram illustrating a configuration of a position detection unit in the substrate inspection apparatus. In FIG. 5, the same parts as those in FIGS. 1 and 3 are denoted by the same reference numerals. The position detection unit includes a laser light source 21 including a laser light source unit 211 and cylindrical lenses 212 and 213, and a beam splitter 214 that divides the laser light emitted from the laser light source unit 211 in the X-axis direction and the Y-axis direction. And reflectors (mirrors) 215 and 216 provided on the guide scales 19 and 20, respectively. The beam splitter 214 and the reflectors 215 and 216 are erected so as to form a right angle or an acute angle with respect to the surface of the substrate 3 to be inspected.

  The laser light emitted from the laser light source 211 and transmitted through the cylindrical lenses 212 and 213 becomes a planar laser light substantially perpendicular to the surface of the substrate 3 to be inspected, and is emitted in the X-axis direction. The laser beam is split in the X-axis direction and the Y-axis direction by the beam splitter 214, and the laser beam split in one X-axis direction is reflected by the reflector 216 in the right-angle direction, that is, the Y-axis direction, and is inspected. The laser beam 217 has a planar shape substantially perpendicular to the surface, and the other laser beam divided in the Y-axis direction is reflected by the reflector 215 in the right-angle direction, that is, in the X-axis direction. The laser beam 218 becomes a vertical plane.

  The inspector moves the reflector 215 along the guide scale 19 with respect to the defective portion on the surface of the substrate 3 to be inspected so that the laser beam 218 coincides with the defective portion, and similarly the reflector 216 along the guide scale 20. Is moved so that the laser beam 217 coincides with the defect portion. Thereafter, the inspector turns on a foot switch (not shown). Then, the values 19 and 20 of the guide scale at this time, that is, the origins of the reflectors 215 and 216 (shown in FIG. 3, the foremost side of the guide scale 19 and the rightmost side of the guide scale 20), the Y-axis direction, the X-axis A displacement amount in the direction is detected as a position coordinate (X, Y) of the defective portion by a detection unit (not shown) of the guide scales 19 and 20, and the detection result is output from the detection unit to the control unit 11.

  FIG. 6 is a diagram showing an inspection situation in the substrate inspection apparatus. Above the apparatus main body 1, a full surface macro illumination light source 30 that irradiates the entire surface of the substrate 3 to be inspected on the holder 2 is installed. The full surface macro illumination light source 30 includes a metal halide lamp 31 as a point light source, a reflection mirror 32 disposed so as to face the metal halide lamp 31, and a Fresnel lens 33 disposed below the reflection mirror 32. The reflection mirror 32 is provided at an angle of approximately 45 ° with respect to the apparatus main body 1, reflects light from the metal halide lamp 31, and gives it to the Fresnel lens 33. The Fresnel lens 33 irradiates the entire surface of the inspected substrate 3 on the holder 2 with the light reflected by the reflecting mirror 32 as converged light as shown in the figure. As shown in FIG. 1, the apparatus main body 1 is provided with a Y scale 13 for detecting the position coordinates in the Y-axis direction of the observation unit support 5. The observation unit support 5 has an observation unit 6. An X scale 14 is provided for detecting position coordinates in the X-axis direction.

  Further, the control unit 11 shown in FIG. 1 has an observation unit detected by the position coordinates (X, Y) of the defective portion on the substrate 3 to be inspected detected by the guide scales 19 and 20, the Y scale 13 and the X scale 14. In addition to managing the position coordinates of the support unit 5 and the observation unit 6, control of movement of the observation unit support unit 5 and the observation unit 6 by each drive mechanism (not shown) is performed. Further, the control unit 11 stores in advance a memory X (not shown) of an interval X0 between the optical axis of the indicator illumination light source 8 and the optical axis of the objective lens 91. The control unit 11 supports the observation unit so that the observation axis of the objective lens 91 in the micro observation unit 9 matches the position coordinates (X, Y) of the defect portion on the inspected substrate 3 given from the guide scales 19 and 20. The movement of the unit 5 and the observation unit 6 is controlled.

  Further, when the inspector gives a predetermined instruction from the input unit 111 in a state where the spot center of the indicator illumination light source 8 is positioned at the defective portion on the substrate 3 to be inspected, the control unit 11 The position coordinate of the defective portion is obtained from the position coordinate data detected by a detection unit (not shown) of the X scale 14, and the distance between the obtained position coordinate and the optical axis of the indicator illumination light source 8 and the optical axis of the objective lens 91. Based on the data indicating X 0, the movement of the observation unit support 5 and the observation unit 6 is controlled so that the observation axis of the objective lens 91 coincides with the defective portion on the substrate 3 to be inspected.

  The operation of the substrate inspection apparatus configured as described above will be described. First, when performing macro observation of the surface of the substrate 3 to be inspected, the inspector gives a predetermined instruction to the control unit 11 from the input unit 111, and the observation unit support unit 5 is shown in FIG. Move back to the initial position. Thereafter, the substrate to be inspected 3 is supplied onto the holder 2 in a horizontal state by the inspector. In this state, the substrate to be inspected 3 is pressed against the plurality of substrate positioning members 201 and positioned, and the substrate to be inspected 3 is sucked and held by the suction device so as not to fall off from the holder 2, and defect inspection by macro observation is performed. Is started.

  Next, a description will be given of a case where the entire surface of the inspected substrate 3 is macro-observed collectively using macro illumination. In the case of this full-scale macro observation, the inspector starts the motor 18 shown in FIG. 2 and rotates the support shaft 15 by the pulley 16 via the rotation shaft 181 and the belt 17, and the holder 2 is moved around the support shaft 15. After tilting to a predetermined angle θ, preferably 30 to 45 °, the motor 18 is stopped and the holder 2 is stopped. Next, the inspector turns on the metal halide lamp 31 shown in FIG. 6, and irradiates light from the metal halide lamp 31 on the entire surface of the inspected substrate 3 on the holder 2 as convergent light through the reflection mirror 32 and the Fresnel lens 33. In this state, the inspector visually inspects the substrate to be inspected 3 on the holder 2 to inspect for defects such as scratches and dirt on the substrate 3 to be inspected. Not only the defect inspection is performed with the holder 2 tilted at a predetermined angle and stopped, but the control unit 11 controls the rotation direction of the motor 18 to change periodically, so that the support shaft 15 is centered. It is also possible to perform defect inspection while swinging the holder 2 within an angle within a predetermined range. In this case, since the incident angle of the irradiation light from the metal halide lamp 31 to the inspection substrate 3 is variable, the inspection substrate 3 can be observed with the irradiation light incident from various angles.

  FIG. 7 is a view showing the holder 2 on which the inspected substrate 3 having a defective portion is placed. In the macro observation as described above, when the inspector recognizes the defective portion a on the inspected substrate 3 as shown in FIG. 7 for example, the inspector first places the reflector 215 along the guide scale 19 against the defective portion a. The laser beam 218 is moved to coincide with the defect portion a, and the reflector 216 is moved along the guide scale 20 to cause the laser beam 217 to coincide with the defect portion a. At this time, the position coordinates (X, Y) of the defective portion a are detected by reading the values of the guide scales 19 and 20 where the reflectors 215 and 216 are positioned by the detection units of the guide scales 19 and 20. . The detection result is input from the detection unit to the control unit 11, and data indicating the position coordinates (X, Y) of the defective part a is stored in the memory in the control unit 11. Thereafter, the same operation is repeated every time the inspector recognizes the defective portion on the substrate 3 to be inspected, whereby data indicating each position coordinate (X, Y) of each defective portion is captured and stored in the control unit 11. The When the inspector completes the macro observation as described above for the entire surface of the substrate 3 to be inspected, the motor 18 is started again, and the support shaft 15 is moved in the direction opposite to the above by the pulley 16 via the rotating shaft 181 and the belt 17. Rotate to return the holder 2 to the initial horizontal state.

Next, a case where micro observation is performed by the micro observation unit 9 for each defect detected by the macro observation described above will be described. First, the control unit 11 reads out the position coordinates (X, Y) of the defective part stored in the memory, and subsequently, the observation axis of the objective lens 91 in the micro observation unit 9 is read to the position coordinates (X, Y). The observation unit support 5 and the observation unit 6 are controlled to move along the guide rails 4 and 4 and the guide rail (not shown).
Thus, the inspector can look at the eyepiece lens 92 of the micro observation unit 9 to microscopically observe the defect portion on the inspected substrate 3 obtained through the objective lens 91 with a microscope. Further, a defect portion on the surface of the substrate to be inspected 3 obtained by the objective lens 91 is picked up by the TV camera 93, and the image is displayed on the TV monitor 12, and microscopic observation is performed by the inspector viewing the image.

  Next, a case where macro observation is performed using the partial macro illumination light source 10 and then micro observation by the micro observation unit 9 is performed will be described. Also in this case, as described above, the inspector positions the inspected substrate 3 on the holder 2 and holds it by suction. From this state, the inspector turns on the partial macro illumination light source 10 of the observation unit 6 and irradiates the surface of the inspected substrate 3 on the holder 2 with the partial macro illumination light 101.

Subsequently, the inspector operates an operation unit (joystick) (not shown) to move the observation unit 6 linearly in the X-axis direction along the guide rail of the observation unit support unit 5 as shown in FIG. The observation unit support 5 is linearly moved along the guide rails 4 and 4 in the Y-axis direction. At this time, while the raster scanning is performed on the substrate 3 to be inspected by the macro illumination light 101, the inspector performs a defect inspection such as a scratch or a stain on the entire surface of the substrate 3 to be inspected. In this case, the irradiation angle of the macro illumination light 101 on the substrate 3 to be inspected is adjusted to an angle at which the optimum partial macro observation can be performed.
In partial macro observation using such a partial macro illumination light source 10, when an inspector recognizes a defective part in the macro illumination light 101 on the substrate 3 to be inspected, the observation unit 6 is moved to X, by operating the operation unit. The spot light of the indicator illumination light source 8 is positioned on the defect portion on the substrate 3 to be inspected by moving in the Y-axis direction.

  The control unit 11 obtains the position coordinates of the defective portion on the inspected substrate 3 based on the position coordinate data detected by the Y scale 13 and the X scale 14, and then stores the position coordinate data in advance. The movement of the observation unit support unit 5 and the observation unit 6 is controlled using data indicating the distance X0 between the optical axis of the indicator illumination light source 8 and the optical axis of the objective lens 91, and the designated inspection target substrate 3 is set. The optical axis of the objective lens 91 coincides with the defective portion.

  Thereby, since the designated defect portion is brought into the center of the visual field of the objective lens 91, the inspector can perform micro observation of the defect portion through the objective lens 91. At the same time, a defect portion on the surface of the inspected substrate 3 obtained by the objective lens 91 is imaged by the TV camera 93, so that the inspector can perform micro observation on the TV monitor 12. In this case, the inspector can perform micro observation by switching between the epi-illumination and the transmission illumination according to the defect and the type of the substrate to be inspected.

  Thereafter, when the inspection unit instructs the macro observation from the input unit 111 to the control unit 11 again, the defective part on the inspected substrate 3 is returned to the irradiation range of the macro illumination light 101, and the inspector confirms the defect by the macro observation. Can be done. When observing another defective part continuously, the above-described operation is repeated. When the defect inspection is completed, the observer again gives a predetermined instruction from the input unit 111 to the control unit 11 to return the observation unit support unit 5 to the initial position and remove the inspected substrate 3 to be inspected from the holder 2. Then, a new inspected substrate 3 is placed and held on the holder 2.

  In the above description, the case where the macro observation is performed while partially illuminating the surface of the substrate to be inspected 3 on the holder 2 by the partial macro illumination light source 10 and the defect is recognized on the substrate to be inspected 3 will be transferred to the micro observation. It was. Here, when performing only macro observation with the partial macro illumination light source 10, the inspector retracts the observation unit support portion 5 to the initial position, and starts the partial macro illumination from the state in which the substrate 3 to be inspected is placed and held on the holder 2. The light source 10 is turned on to irradiate the surface of the substrate 3 to be inspected on the holder 2 with partial macro illumination light 101. From this state, the inspector moves the observation unit 6 linearly in the X-axis direction along the guide rail of the observation unit support 5 by the operation unit, and further moves the observation unit support 5 along the guide rails 4 and 4. By performing a raster scan on the substrate 3 to be inspected by the macro illumination light 101 while moving linearly in the Y-axis direction, the entire surface of the substrate 3 to be inspected is inspected for defects by the inspector. In this case, by aligning the spot light of the indicator illumination light source 8 with each defect portion in the macro illumination light 101, the position coordinates of each defect portion are detected by each detection portion (not shown) of the X scale 14 and the Y scale 13, It can be stored in the memory of the control unit 11.

  When performing micro observation by the micro observation unit 9 on the defect portion stored in the memory of the control unit 11, the inspector moves the observation unit support portion 5 back to the initial position and places the substrate 3 to be inspected on the holder 2. In this state, the transmission line illumination light source 7 is turned on to irradiate the line-shaped transmission illumination from below the holder 2 in the X-axis direction. From this state, the micro observation unit 9 is linearly moved in the X-axis direction along the guide rail of the observation unit support 5 by the drive control of the control unit 11, thereby moving the objective lens 91 along the transmission line illumination light source 7 to the X-axis. By moving the observation unit support unit 5 linearly in the direction and further moving the observation unit support unit 5 along the guide rails 4 and 4 in the Y-axis direction. Can be performed. At the same time, the surface of the substrate 3 to be inspected is imaged by the TV camera 93 and the image is displayed on the TV monitor 12. Also in this case, it is possible to switch from transmitted illumination to epi-illumination according to the inspected substrate 3 and the type of defect.

  According to this substrate inspection apparatus, the holder 2 holding the substrate to be inspected 3 is rotated about the support shaft 15 and raised by a predetermined angle, so that the inspector can perform macro inspection of the substrate 3 to be inspected at a position close to the eyes. Therefore, the defect inspection can be performed with an easy posture. In addition, one laser light source 21 for detecting a defect position of the substrate 3 to be inspected, a beam splitter 214, reflectors 215 and 216, and guide scales 19 and 20 are mounted on a holder 2 that can be rotated in the vertical direction. By providing them integrally, the coordinate position of the defective portion of the inspected substrate 3 can always be detected on the same plane regardless of the inclination angle of the holder 2. Therefore, the coordinate position can be detected with high accuracy, and complicated processing for correcting the coordinate position data in accordance with the inclination angle is not required. Further, the position coordinates of the defective portion (only by obtaining the position matching the defective portion while manually moving the reflectors 215 and 216 along the guide scales 19 and 20 provided along the side edges of the substrate 3 to be inspected). X, Y) can be detected, so that position information relating to the defective portion can be easily extracted.

  Further, the observation unit 6 is moved with respect to the holder 2 along the direction of the observation unit support 5 on the surface of the substrate 3 to be inspected, and the observation unit 6 is moved in a direction orthogonal to the movement direction of the observation unit support 5. 6 can be moved to any position on the substrate 3 to be inspected. Therefore, the area of the holder 2 can be kept substantially the same as the area of the substrate 3 to be inspected, the substrate inspection apparatus can be downsized, and the installation area of the substrate inspection apparatus can be greatly reduced.

  (Second Embodiment) FIG. 8 is a diagram showing a configuration of a position detection unit in a substrate inspection apparatus according to a second embodiment of the present invention. In FIG. 8, the same parts as those in FIG. This position detection unit is applied to the substrate inspection apparatus shown in the first embodiment. This position detection unit includes two light sources 21 and 22 and reflectors (mirrors) 215 and 216. The light sources 21 and 22 include the laser light source unit 211 and the cylindrical lenses 212 and 213 shown in FIG.

  As shown in FIG. 8, the holder 2 has guide scales 19 and 20 for detecting the position coordinates of the defective portion on the inspected substrate 3 along the Y-axis direction and the X-axis direction of the side edge of the inspected substrate 3. Is arranged. The guide scale 19 is provided with a reflector (mirror) 215 in the Y-axis direction and the guide scale 20 is provided with a reflector (mirror) 216 in the X-axis direction so as to be movable along the guide scales 19 and 20. . The reflectors 215 and 216 are erected so as to form a right angle or an acute angle with respect to the surface of the substrate 3 to be inspected. The holder 2 is provided with a laser light source 21 at a position slightly distant from the guide scale 20 (on the extension line of the guide scale 20) and at a position slightly distant from the guide scale 19 (extension of the guide scale 19). A laser light source 22 is provided on the line).

  The laser light emitted from the laser light source section 211 of the light source 21 and transmitted through the cylindrical lenses 212 and 213 becomes a planar laser light substantially perpendicular to the surface of the substrate 3 to be inspected, and is emitted in the X-axis direction. This laser light is reflected by the reflector 216 in the perpendicular direction, that is, in the Y-axis direction, to become a planar laser light 217 substantially perpendicular to the surface of the substrate 3 to be inspected. Further, the laser light emitted from the laser light source unit 211 of the light source 22 and transmitted through the cylindrical lenses 212 and 213 becomes a planar laser light substantially perpendicular to the surface of the substrate 3 to be inspected, and is emitted in the Y-axis direction. . This laser light is reflected by the reflector 215 in the right-angle direction, that is, in the X-axis direction, and becomes a planar laser light 218 that is substantially perpendicular to the surface of the substrate 3 to be inspected.

As in the first embodiment, the inspector moves the reflector 215 along the guide scale 19 with respect to the defect portion a on the surface of the substrate 3 to be inspected so that the laser beam 218 coincides with the defect portion a. Similarly, the reflector 216 is moved along the guide scale 20 so that the laser beam 217 coincides with the defect portion a. Thereafter, the inspector turns on the foot switch. Then, the values 19 and 20 of the guide scale at this time, that is, the origins of the reflectors 215 and 216 (shown in FIG. 3, the foremost side of the guide scale 19 and the rightmost side of the guide scale 20), the Y-axis direction, the X-axis A displacement amount in the direction is detected as a position coordinate (X, Y) of the defective portion a by a detection unit (not shown), and the detection result is output from the detection unit to the control unit 11.
According to the substrate inspection apparatus of the second embodiment, as in the first embodiment, the position information on the defect portion can be easily obtained by manually moving the reflectors 215 and 216 by the inspector. Can be taken out.

  (Third Embodiment) FIG. 9 is a diagram showing the configuration of a position detection unit in a substrate inspection apparatus according to a third embodiment of the present invention. 9, the same parts as those in FIG. 7 are denoted by the same reference numerals. This position detection unit is applied to the substrate inspection apparatus shown in the first embodiment.

  In FIG. 9, holding members 301 and 302 are attached to one side surface of the holder 2 in the Y-axis direction and one side surface in the X-axis direction, respectively. The surfaces of the holding members 301 and 302 are positioned below so as to form a step with respect to the surface of the holder 2. The holding members 301 and 302 are provided with guide rails 303 and 304 along the Y-axis direction and the X-axis direction of the side edge of the holder 2, respectively. Further, guide moving portions 305 and 306 are provided so as to be movable along the guide rails 303 and 304 so as to straddle the guide rails 303 and 304, respectively.

  Pullies 307 and 308 and pulleys 309 and 310 are pivotally supported at both ends of the holding member 301 and the holding member 302, respectively. A belt 311 is hung on the pulley 307 and the pulley 308, and a belt 312 is hung on the pulley 309 and the pulley 310. A guide moving unit 305 is engaged with a part of the belt 311, and a guide moving unit 306 is engaged with a part of the belt 312. Rotating shafts 315 and 316 of motors 313 and 314 are fitted into the pulleys 307 and 310, respectively. Optical sensors 317, 318 and 319, 320 for detecting the presence of the guide moving parts 305, 306 are provided on one side surface in the Y-axis direction and one side surface in the X-axis direction of the holder 2, respectively.

  A Y-axis direction reflector (mirror) 215 is formed on the guide moving unit 305, and an X-axis direction reflector (mirror) 216 is formed on the guide moving unit 306 at a right angle or an acute angle with respect to the surface of the substrate 3 to be inspected. It is erected. A holding member 321 having substantially the same height as the holder 2 is provided at a position where the holding members 301 and 302 intersect. On the holding member 321, the beam splitter 214 is erected at a position where the extension lines of the guide rails 303 and 304 intersect with each other so as to form a right angle or an acute angle with respect to the surface of the substrate 3 to be inspected. On the holding member 321, the laser light source 21 is provided at a position (on the extended line of the guide rail 304) slightly away from the beam splitter 214 to the right side. The laser light source 21 includes the laser light source unit 211 and the cylindrical lenses 212 and 213 shown in FIG.

  The laser light emitted from the laser light source section 211 of the light source 21 and transmitted through the cylindrical lenses 212 and 213 becomes a planar laser light substantially perpendicular to the surface of the substrate 3 to be inspected, and is emitted in the X-axis direction. The laser beam is split in the X-axis direction and the Y-axis direction by the beam splitter 214, and the laser beam split in one X-axis direction is reflected by the reflector 216 in the right-angle direction, that is, the Y-axis direction, and is inspected. The laser beam 217 has a planar shape substantially perpendicular to the surface, and the other laser beam divided in the Y-axis direction is reflected by the reflector 215 in the right-angle direction, that is, in the X-axis direction. The laser beam 218 becomes a vertical plane.

  The inspector operates the operation unit (joystick) to drive the motor 313 to rotate the rotating shaft 315 in one direction, thereby operating the belt 311 in one direction of the Y axis via the pulleys 307 and 308. Alternatively, the belt 311 is operated in the other direction of the Y axis via the pulleys 307 and 308 by operating the operation unit and driving the motor 313 to rotate the rotating shaft 315 in the other direction. Thereby, the reflector 215 on the guide moving part 305 is moved along the guide rail 303 with respect to the defect part a on the surface of the substrate 3 to be inspected, so that the laser beam 218 coincides with the defect part a.

  Further, the inspector operates the operation unit to drive the motor 314 to rotate the rotating shaft 316 in one direction, thereby operating the belt 312 in one direction of the X axis via the pulleys 310 and 309, or By operating the operation unit and driving the motor 316 to rotate the rotating shaft 316 in the other direction, the belt 312 is operated in the other direction of the X axis via the pulleys 310 and 309. Thereby, the reflector 216 on the guide moving part 306 is moved along the guide rail 304 with respect to the defective part a on the surface of the substrate 3 to be inspected, so that the laser beam 217 coincides with the defective part a.

Thereafter, the inspector turns on the foot switch. Then, the values of the guide scales (not shown) provided on the guide rails 303 and 304 at this time, that is, the displacement amounts from the origins of the reflectors 215 and 216 (positions of the sensors 318 and 319) in the Y-axis direction and the X-axis direction. Are detected as position coordinates (X, Y) of the defective portion a by each detection unit (not shown) of each guide scale, and the detection result is output from the detection unit to the control unit 11.
Note that when the presence of the guide moving unit 305 is detected by the sensor 317 or 318, the driving of the motor 313 is automatically stopped by the control unit 11. That is, the guide moving unit 305 can reciprocate only in the section on the guide rail 303 corresponding to the sensors 317 and 318. Similarly, when the presence of the guide moving unit 306 is detected by the sensor 319 or 320, the driving of the motor 314 is automatically stopped by the control unit 11. That is, the guide moving unit 306 can reciprocate only in the section on the guide rail 304 corresponding to the sensor 319, 320.

According to the substrate inspection apparatus of the third embodiment, by using one laser light source 21 and electrically driving the guide moving units 305 and 306 provided with the reflectors 215 and 216, the inspector can The operation of the reflectors 215 and 216 can be controlled by operating the operation unit. Therefore, when inspecting a particularly large substrate to be inspected, position information can be easily extracted even from a defect portion far away from the inspector. In addition, in order to drive the guide moving parts 305 and 306, a ball screw with a guide or a linear motor can be used.
In this substrate inspection apparatus, as in the second embodiment, two light source parts are provided on the holder 2 without providing a beam splitter, and light is emitted from the light source parts to the reflectors 215 and 216, respectively. It can also be configured.

(Fourth Embodiment) FIG. 10 is a diagram showing a configuration of a position detection unit in a substrate inspection apparatus according to a fourth embodiment of the present invention. 10, the same parts as those in FIG. 7 are denoted by the same reference numerals. This position detection unit is applied to the substrate inspection apparatus shown in the first embodiment. This position detection unit includes two laser light sources 401 and 402. The laser light sources 401 and 402 include the laser light source unit 211 and the cylindrical lenses 212 and 213 shown in FIG.
As shown in FIG. 10, the holder 2 has guide scales 19 and 20 for detecting the position coordinates of the defective portion in the inspected substrate 3 along the Y-axis direction and the X-axis direction of the side edge of the inspected substrate 3. Is arranged. A laser light source 401 is provided on the guide scale 19, and a laser light source 402 is provided on the guide scale 20 so as to be movable along the guide scales 19 and 20.

  Laser light emitted from the laser light source unit 211 of the laser light source 401 and transmitted through the cylindrical lenses 212 and 213 becomes a planar laser light 403 substantially perpendicular to the surface of the substrate 3 to be inspected, and is emitted in the X-axis direction. . The laser light emitted from the laser light source unit 211 of the laser light source 402 and transmitted through the cylindrical lenses 212 and 213 becomes a planar laser light 404 substantially perpendicular to the surface of the substrate 3 to be inspected, and is emitted in the Y-axis direction. Is done.

  Similar to the first embodiment, the inspector moves the laser light source 401 along the guide scale 19 with respect to the defective portion a on the surface of the substrate 3 to be inspected so that the laser light 403 coincides with the defective portion a. Similarly, the laser light source 402 is moved along the guide scale 20 so that the laser light 404 coincides with the defect portion a. Thereafter, the inspector turns on the foot switch. Then, the values 19 and 20 of the guide scale at this time, that is, the origins of the laser light sources 401 and 402 (the frontmost side of the guide scale 19 and the rightmost side of the guide scale 20 shown in FIG. 10), the Y axis direction, and the X axis A displacement amount in the direction is detected as a position coordinate (X, Y) of the defective portion a by a detection unit (not shown), and the detection result is output from the detection unit to the control unit 11.

  According to the substrate inspection apparatus of the fourth embodiment, compared with the configuration according to the first and second embodiments, two laser light sources 401 and 402 are used as a guide scale without using a beam splitter or a reflector. 19 and 20, and the inspector manually moves the laser light sources 401 and 402, the position information on the defective portion can be easily taken out. In the substrate inspection apparatus, similarly to the third embodiment, the laser light sources 401 and 402 are installed in the guide moving units 305 and 306, and are configured to move electrically along the guide scales 19 and 20. You can also.

  (Fifth Embodiment) FIGS. 11 and 12 are views showing the configuration of a substrate inspection apparatus according to a fifth embodiment of the present invention. FIG. 11 is a perspective view and FIG. 12 is a side view. . 11 and 12, the same parts as those in FIGS. 1 and 2 are denoted by the same reference numerals, and detailed description thereof is omitted. In the board inspection apparatus shown in FIGS. 1 and 2, the rotational driving force of the motor 18 is transmitted from the rotating shaft 181 to the pulley 16 via the belt 17, so that the holder 2 is moved from the horizontal state with the support shaft 15 as an axis. The system was raised to a predetermined angle and tilted. In the substrate inspection apparatus according to the fifth embodiment, the holder 2 is swung by the link mechanism, and is tilted up to a predetermined angle.

As shown in FIG. 11, an elongated hole 501 is provided on the apparatus main body 1 along the side of the holder 2 in a horizontal state, and a connecting member 502 is inserted through the hole 501. A hook 503 is provided on the side surface of the holder 2 so as to be orthogonal to the surface on which the substrate 3 to be inspected is placed. One end of a connecting member 502 is rotatably connected to the hook 503 via a rotating shaft 504. The other end of the connecting member 502 is rotatably connected to the moving piece 506 via a rotating shaft 505 as shown in FIG.
As shown in FIG. 12, pulleys 509 and 510 are pivotally supported at the respective ends of the holding members 507 and 508 below the apparatus main body 1. A belt 511 is looped around the pulleys 509 and 510. A moving piece 506 is attached to a part of the belt 511. A rotation shaft 512 of a motor (not shown) is fitted into the pulley 509.

The inspector operates a holder operation unit (not shown), drives the motor to rotate the rotating shaft 512 counterclockwise, and operates the belt 511 in one direction of the Y axis via the pulleys 509 and 510. Alternatively, the belt 511 is operated in the positive direction of the Y axis via the pulleys 509 and 510 by driving the motor and rotating the rotary shaft 512 clockwise. As a result, the moving piece 506 engaged with the belt 511 moves in the −Y and + Y directions (forward and backward with respect to the holder 2).
As shown in FIG. 12, when the moving piece 506 moves in the −Y direction while the holder 2 is horizontal, the other end of the connecting member 502 connected to the moving piece 506 is rotated clockwise by the rotation shaft 505. Therefore, the connecting member 502 gradually stands up from the inclined state. Accordingly, one end of the connecting member 502 pushes up the holder 2 through the hook 503 while rotating around the rotation shaft 504, so that the holder 2 moves from a horizontal state to a position of a two-dot chain line about the support shaft 15. That is, it is rotated to an angle of about 30 °, and is raised and inclined. After tilting the holder 2 in this manner, the inspector stops the motor and stops the holder 2 to perform macro observation.

When the inspector finishes the macro observation on the entire surface of the substrate 3 to be inspected, the operator operates the holder operation unit again, drives the motor, and rotates the rotating shaft 512 clockwise, whereby the pulleys 509 and 510 and the belt are rotated. The moving piece 506 is moved in the + Y direction via 511. When the moving piece 506 moves in the + Y direction, the other end of the connecting member 502 connected to the moving piece 506 is rotated counterclockwise by the rotating shaft 505, so that the connecting member 502 is gradually inclined from the standing state. Accordingly, one end of the connecting member 502 is rotated around the rotation shaft 504 and the holder 2 is pulled down via the hook 503, so that the holder 2 eventually returns to the initial horizontal state. In this state, the inspector performs micro observation. Instead of moving the moving piece 506 by the belt, the moving piece 506 may be moved back and forth by a known ball screw or linear motor.
As described above, by using the link mechanism for swinging the holder 2, the holder 2 can be raised and inclined to an angle of about 30 °, and the holder 2 is supported by the connecting member 502 when it is raised. Therefore, macro observation can be performed with the holder 2 being more stable.

(Sixth Embodiment) FIG. 13 is a side view showing a configuration of a substrate inspection apparatus according to a sixth embodiment of the present invention. In FIG. 13, the same parts as those in FIG. 12 are denoted by the same reference numerals, and detailed description thereof is omitted. In the fifth embodiment, the link mechanism is configured by using one connecting member. In the sixth embodiment, the link mechanism is configured by using two connecting members.
As shown in FIG. 13, the base end of the first connecting member 601 is pivotally supported on the apparatus main body 1 by a rotating shaft 602, and the back surface of the holder 2 rolls on the free end of the first connecting member 601. A roller 600 is rotatably supported on the shaft. In the vicinity of the free end of the first connecting member 601, one end of the second connecting member 604 is rotatably connected via a rotating shaft 603. The other end of the second connecting member 604 is rotatably connected to the moving piece 506 via the rotating shaft 605 below the apparatus main body 1.

  As shown in FIG. 13, when the moving piece 506 moves in the −Y direction while the holder 2 is horizontal, the other end of the second connecting member 604 connected to the moving piece 506 is rotated clockwise by the rotation shaft 605. Therefore, the second connecting member 604 gradually rises from the tilted state. Accordingly, one end of the second connecting member 604 pushes up the first connecting member 601 while rotating around the rotation shaft 603. Along with this, the roller 600 of the first connecting member 601 rolls on the back surface of the holder 2 and pushes up the holder 2, so that the holder 2 is in a horizontal state up to the position of the two-dot chain line about the support shaft 15, that is, about 60 It is raised to an angle of ° and tilted. After tilting the holder 2 in this manner, the inspector stops the motor and stops the holder 2 to perform macro observation.

  When the moving piece 506 moves in the + Y direction from this state, the other end of the second connecting member 604 connected to the moving piece 506 is rotated counterclockwise by the rotating shaft 605, so that the second connecting member 604 is raised. Gradually lean from the state. Accordingly, one end of the second connecting member 604 pulls down the first connecting member 601 while rotating around the rotation shaft 603. Along with this, the holder 2 is pulled down following the roller 600 of the first connecting member 601, so that the holder 2 eventually returns to the initial horizontal state. In this state, the inspector performs micro observation.

  As described above, by configuring the link mechanism using two connecting members for swinging the holder 2, the holder 2 can be raised and inclined to an angle of about 60 °. In the fifth embodiment, when the holder 2 is raised to an angle of about 60 ° with one connecting member, a very long connecting member is required, and a large space is required to configure the apparatus. . However, in the sixth embodiment, by forming a double link mechanism using two connecting members, the holder 2 can be swung up to an angle of about 60 °, and a short connection can be achieved. Since the link mechanism can be configured using two members, the space of the apparatus can be saved.

  The link mechanisms shown in the fifth and sixth embodiments can be applied to the board inspection apparatus shown in the first to fourth embodiments. The present invention is not limited only to the above-described embodiments, and can be appropriately modified without departing from the spirit of the invention.

The perspective view which shows the structure of the board | substrate inspection apparatus which concerns on the 1st Embodiment of this invention. The side view which shows the structure of the same apparatus. The top view which shows the structure of the apparatus. The figure which shows the structural example of the transmission line illumination in the apparatus. The figure which shows the structure of the position detection part in the apparatus. The figure which shows the inspection condition in the board | substrate inspection apparatus in the same apparatus. The figure which shows the holder in the apparatus. The figure which shows the structure of the position detection part which concerns on the 2nd Embodiment of this invention. The figure which shows the structure of the position detection part which concerns on the 3rd Embodiment of this invention. The figure which shows the structure of the position detection part which concerns on the 4th Embodiment of this invention. The perspective view which shows the structure of the board | substrate inspection apparatus which concerns on the 5th Embodiment of this invention. The side view which shows the structure of the same apparatus. The side view which shows the structure of the board | substrate inspection apparatus which concerns on the 6th Embodiment of this invention.

Explanation of symbols

  1: device main body, 2: holder, 3: substrate to be inspected, 4: guide rail, 5: observation unit support, 51: back plate, 6: observation unit, 7: transmission line illumination light source, 71: light source unit, 72 : Glass rod, 73: white stripe, 8: illumination light source for indicators, 9: micro observation unit, 91: objective lens, 92: eyepiece lens, 93: TV camera, 10: partial macro illumination light source, 101: macro illumination light, 11: control unit, 111: input unit, 12: TV monitor, 13: Y scale, 14: X scale, 15: support shaft, 16: pulley, 17: belt, 18: motor, 181: rotating shaft, 19, 20 : Guide scale, 21 and 22: Laser light source, 201: Substrate positioning member, 211: Laser light source unit, 212, 213: Cylindrical lens, 214: Beam spooler, 2 5, 216: Reflector (mirror), 217, 218: Laser light, 30: Full surface macro illumination light source, 31: Metal halide lamp, 32: Reflection mirror, 33: Fresnel lens, 301, 302: Holding member, 303, 304: Guide rails, 305 and 306: guide moving units, 307 to 310: pulleys, 311 and 312: belts, 313 and 314: motors, 315 and 316: rotating shafts, 317 to 320: sensors, 401 and 402: laser light sources, 403 404: Laser light, 501: Hole, 502: Connecting member, 503: Hook, 504, 505: Rotating shaft, 506: Moving piece, 507, 508: Holding member, 509, 510: Pulley, 511: Belt, 600: Roller, 601: first connecting member, 602, 603, 605: rotating shaft, 604: second connecting member.

Claims (4)

A substrate holder for holding a rectangular substrate to be inspected;
A drive unit that raises the substrate holder to a predetermined angle for visual observation from a horizontal state;
A macro illumination light source that irradiates the top surface of the substrate to be inspected with macro illumination light from above the substrate to be inspected in a state where the substrate holder is raised at the predetermined angle;
Guide members in the X direction and the Y direction, which are integrally provided on the substrate holder along the X direction and the Y direction at least at the side edges of the substrate to be inspected,
A laser light source that emits laser light;
An optical path dividing means for dividing the laser light emitted from the laser light source into the X direction and the Y direction;
Two reflectors that are movably provided on the guide members in the X direction and the Y direction, respectively, and reflect the laser beams divided by the optical path dividing means toward the substrate to be inspected, respectively.
The respective reflectors are moved to the respective guide members in the X direction and the Y direction, respectively, reflected by the respective reflectors, and the respective laser beams coincide with the defect portions on the inspected substrate. A position coordinate detection unit for detecting a position coordinate of the defect part from each displacement amount in the X direction and the Y direction of each reflector;
A board inspection apparatus comprising: A substrate holder for holding a rectangular substrate to be inspected;
A drive unit that raises the substrate holder to a predetermined angle for visual observation from a horizontal state;
A macro illumination light source that irradiates the top surface of the substrate to be inspected with macro illumination light from above the substrate to be inspected in a state where the substrate holder is raised at the predetermined angle;
Guide members in the X direction and the Y direction, which are integrally provided on the substrate holder along the X direction and the Y direction at least at the side edges of the substrate to be inspected,
A laser light source for X direction that emits laser light in the X direction;
A laser light source for the Y direction that emits laser light in the Y direction;
A first reflector that is movably provided on the X direction guide member and reflects the laser light emitted from the X direction laser light source toward the substrate to be inspected;
A second reflector that is movably provided on the guide member in the Y direction and reflects the laser light emitted from the laser light source for the Y direction toward the substrate to be inspected;
The first reflector is moved to the guide member in the X direction, and the second reflector is moved to the guide member in the Y direction so that the laser beams coincide with the defective portions on the substrate to be inspected. A position coordinate detection unit that detects a position coordinate of the defect portion from the amount of displacement of the first reflector in the X direction and the amount of displacement of the second reflector in the Y direction,
A substrate inspection apparatus comprising: A storage unit for storing the position coordinates of the defective portion of the inspection substrate detected by the position coordinate detection unit;
A pair of observation unit support guides provided parallel to both sides of the substrate holder in a state where the substrate holder is returned to a horizontal position;
An observation unit support unit having a pair of support columns movably provided in the pair of observation unit support guides, and a horizontal arm unit connecting the support columns;
An enlarged view of the upper surface of the substrate to be inspected held on the substrate holder is provided along the horizontal arm portion and movable in a direction perpendicular to the direction in which the observation unit support guide is provided. A micro inspection unit having an objective lens;
A control unit that controls movement of the observation unit support unit and the micro inspection unit based on the position coordinates of the defect units read from the storage unit;
The board inspection apparatus according to claim 1, further comprising: The laser light source includes a laser light source unit that emits the laser light;
A cylindrical lens for converting the laser light emitted from the laser light source unit into a planar laser light perpendicular to the surface of the substrate to be inspected;
The substrate inspection apparatus according to claim 1, further comprising:

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