CN105572928A - Maintenance device and system - Google Patents
Maintenance device and system Download PDFInfo
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- CN105572928A CN105572928A CN201610150842.4A CN201610150842A CN105572928A CN 105572928 A CN105572928 A CN 105572928A CN 201610150842 A CN201610150842 A CN 201610150842A CN 105572928 A CN105572928 A CN 105572928A
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- baffle plate
- guide rail
- laser beam
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- 238000012423 maintenance Methods 0.000 title claims abstract description 80
- 230000007547 defect Effects 0.000 claims abstract description 75
- 239000000758 substrate Substances 0.000 claims abstract description 38
- 239000006185 dispersion Substances 0.000 claims abstract description 10
- 239000000428 dust Substances 0.000 claims description 54
- 239000012528 membrane Substances 0.000 claims description 29
- 238000010521 absorption reaction Methods 0.000 claims description 26
- 238000009825 accumulation Methods 0.000 claims description 9
- 238000012360 testing method Methods 0.000 claims description 8
- 238000009434 installation Methods 0.000 claims description 5
- 241000405070 Percophidae Species 0.000 claims description 4
- 239000013307 optical fiber Substances 0.000 claims description 4
- 239000002699 waste material Substances 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 12
- 230000008439 repair process Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 9
- 238000004380 ashing Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000000407 epitaxy Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 238000013501 data transformation Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011143 downstream manufacturing Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
- G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Mathematical Physics (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention provides a maintenance device and system. A colored film substrate is arranged by using a platform; laser emitted by a laser emission device is gathered by using a baffle cover above the platform; a laser beam dispersion part is used for dispersing laser into a plurality of laser beams, and each laser beam can illuminate a plurality of defect points of the colored film substrate respectively, so that one laser source can illuminate the plurality of defect points of the colored film substrate simultaneously, the maintenance time of the defect points is shortened and the maintenance efficiency is improved; and even if one colored film substrate has the plurality of defect points, simultaneous maintenance can be carried out, and wastes caused by the fact that maintenance is abandoned are avoided.
Description
Technical field
The present invention relates to semiconductor equipment manufacturing technology field, be specifically related to a kind of maintenance unit and system.
Background technology
Color membrane substrates is in processing procedure process, if by the foreign substance pollution such as environment or device interior dust, foreign matter can remain in each rete of color membrane substrates and form defect point, form 2 points, dim spot, bright line etc. in the final product bad, so must keep in repair defect point in actual production, promote yields.
The conventional bad method for maintaining of color membrane substrates is laser method, and the method utilizes infrared laser light beam, carries out radium-shine to defect point, makes bad foreign matter ashing, thus realizes maintenance.But in actual application, owing to color membrane substrates existing certain pixel and black surround matrix, maintenance defect point time must guarantee normal pixel and black surround matrix unaffected, the defect point that area is larger relates to multiple pixel, and existing radium-shine technology can only be keeped in repair one by one to the open area of each pixel, with ensure black surround matrix area and normal pixel unaffected.
There is following technological deficiency in existing laser scheme:
1, usual, the defect point of a general size needs radium-shine at least 30 ~ 40 times, on average radium-shine once about 40 seconds consuming time, maintenance individual defect point length consuming time.In addition, the integrality guaranteeing black surround matrix is needed while radium-shine, must carry out radium-shine one by one to the bad defect point of black in peristome one by one, for bulk defect point or account for the more defect point of pixel, keeping in repair consuming timely about needs 30min, maintenance efficiency is low, cannot meet the demand of actual production efficiency.
2, in the manufacture process of TFT/LCD substrate, modal technique is adopt mask plate exposure to manufacture the colored filter with certain pixel period, if mask plate is subject to foreign substance pollution in exposure process, common defects can be produced, i.e. defect that is symmetrical, homomorphosis in substrate in exposure.As shown in Figure 1, it is a color membrane substrates in figure, stain represents the defect point of homomorphosis, positional symmetry, common defects is generally the defect of bulk generation, but because defect different in same substrate needs to keep in repair one by one, length consuming time, efficiency is low, have to when common defects point is more abandon maintenance, cause great waste.
Summary of the invention
The present invention is directed to above shortcomings in prior art, a kind of maintenance unit and system are provided, in order to solve the inefficient problem of laser.
The present invention, for solving the problems of the technologies described above, adopts following technical scheme:
The invention provides a kind of maintenance unit, comprise: for placing platform and at least one group of maintenance department of color membrane substrates, maintenance department is arranged on the top of platform, comprising: laser beam discrete part, for the generating laser of Emission Lasers and the baffle plate cover for gathering laser;
Generating laser is arranged at the top of baffle plate cover, and by laser conduction optical fiber by laser conduction in baffle plate cover;
Laser beam discrete part is arranged in baffle plate cover, for being multiple laser beam by the laser dispersion of laser transmitter projects, to make multiple defect points of the radium-shine color membrane substrates of described laser beam difference.
Preferably, described laser beam discrete part comprises mutually vertical and the first baffle group that height and position is different and second baffle group, first baffle group comprises multiple first baffle plate that can rotate, second baffle group comprises multiple second baffle that can rotate, first baffle plate and second baffle can form multiple open area, to make laser by described open area, and be broken up into multiple laser beam.
Preferably, described first baffle group also comprises the first drive division, and the first drive division is connected with the first baffle plate, for driving the first flapper, to make to form slit between the first adjacent between two baffle plate;
Described second baffle group also comprises the second drive division, and the second drive division is connected with second baffle, for driving second baffle to rotate, to make to form slit between second baffle adjacent between two;
Form slit between the slit formed between the first adjacent between two baffle plate and second baffle adjacent between two and form described open area, when each first baffle plate is all in horizontality, first baffle group closes, and when each second baffle is all in horizontality, second baffle group closes.
Preferably, the width of each first baffle plate is equal, and the width of each second baffle is equal.
Preferably, the sidewall of described baffle plate cover is provided with one group of first slide rail and one group of second slide rail, and the first slide rail is relatively arranged on the sidewall of baffle plate cover at the two ends of the first baffle plate, and the second slide rail is relatively arranged on the sidewall at the two ends of second baffle;
Be provided with the first slide block in first slide rail, the first slide block can slide in the first slide rail, and the first slide block being arranged on the first baffle plate two ends can drive the two ends inclined in opposite directions of the first baffle plate respectively;
Be provided with the second slide block in second slide rail, the second slide block can slide in the second slide rail, and the second slide block being arranged on second baffle two ends can drive the two ends inclined in opposite directions of second baffle respectively.
Further, also comprise microscope, microscope is arranged at the below of described laser beam discrete part.
Preferably, the top of described platform is provided with at least one first guide rail and at least one second guide rail, and the first guide rail is mutually vertical with the second guide rail, and the first guide rail can move along the second guide rail;
Described generating laser is fixed on the first guide rail, and described laser beam discrete part and baffle plate cover are fixed on the first guide rail by installing backboard, and described installation backboard can move along the first guide rail.
Preferably, described second guide rail is two, and two the second guide rail parallels are arranged, and the two ends of the first guide rail can be moved respectively on described two the second guide rails;
When described first guide rail is multiple, and when each first guide rail is provided with multiple maintenance department, the identical and position of the maintenance department's quantity on each first guide rail correspondence is arranged.
Further, described maintenance unit also comprises dust absorbing device, dust absorbing device is arranged on described installation backboard, and between described laser beam discrete part and platform, comprising: dust collector, dust accumulation device and the absorption tube for generation of negative pressure;
The front end of absorption tube is provided with opening, and the end of absorption tube is connected with dust collector, can utilize the dust that negative pressure absorbing laser defect point produces;
Dust accumulation device is arc-shaped, is arranged at the opening part of the front end of absorption tube, for collecting the dust that laser defect point produces temporarily.
Further, described dust absorbing device also comprises the gas blow pipe for generation of air-flow, and described gas blow pipe is Duckbill type, and the opening of described gas blow pipe is lower than the opening of described absorption tube.
Preferably, Open Side Down and in bell mouth shape for described absorption tube.
The present invention also provides a kind of maintenance system, comprising: testing fixture, controller and foregoing maintenance unit,
Testing fixture is used for, and determines the coordinate of defect point;
Controller is used for, according to the coordinate of described defect point, and the size of the defect point of user's input, control the laser beam discrete part of described maintenance unit, above described defect point, be laser beam identical, equal-sized with described defect point quantity by the laser dispersion of laser transmitter projects.
The present invention can realize following beneficial effect:
The present invention utilizes platform to place color membrane substrates, above platform, utilize baffle plate cover to gather the laser of laser transmitter projects, and utilize laser beam discrete part to be multiple laser beam by laser dispersion, to make multiple defect points of the radium-shine color membrane substrates of each laser beam difference, thus the multiple defect points while of realizing utilizing a lasing light emitter on radium-shine color membrane substrates, shorten the servicing time of defect point, improve maintenance efficiency; Even if there is more defect point in a color membrane substrates, also can synchronous epitaxy, avoid abandoning keeping in repair the waste brought.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of common defects point on color membrane substrates;
The front view of the maintenance unit that Fig. 2 a provides for the embodiment of the present invention;
The vertical view of the maintenance unit that Fig. 2 b provides for the embodiment of the present invention;
The stereographic map of the laser beam discrete part that Fig. 3 provides for the embodiment of the present invention;
Fig. 4 a is schematic diagram when X-direction baffle plate that the embodiment of the present invention provides closes;
Fig. 4 b opens the schematic diagram forming slit for X-direction baffle plate that the embodiment of the present invention provides;
Fig. 4 c is schematic diagram when Y-direction baffle plate that the embodiment of the present invention provides closes;
Fig. 4 d opens the schematic diagram forming slit for Y-direction baffle plate that the embodiment of the present invention provides;
The vertical view of the laser beam discrete part that Fig. 5 provides for the embodiment of the present invention;
The structural representation of the maintenance system that Fig. 6 provides for the embodiment of the present invention.
Marginal data:
1, platform 2, maintenance department 3, generating laser
4, baffle plate cover 5, rotating shaft 6, first drive division
7, the second drive division 8, open area 9, microscope
10, backboard 11, first guide rail 12, second guide rail is installed
13, dust collector 14, dust accumulation device 15, gas blow pipe
16, absorption tube 41, first slide rail 42, second slide rail
411, the first slide block 421, second slide block 61, testing fixture
62, controller 63, maintenance unit
Embodiment
Below in conjunction with the accompanying drawing in the present invention, carry out clear, complete description to the technical scheme in the present invention, obviously, described embodiment is a part of embodiment of the present invention, instead of whole embodiments.Based on the embodiment in the present invention, the every other embodiment that those of ordinary skill in the art obtain under the prerequisite not making creative work, all belongs to the scope of protection of the invention.
The present invention by arranging maintenance department above color membrane substrates, laser is divided multiple defect points of spreading as the radium-shine color membrane substrates of multiple laser beam difference, realize the synchronous epitaxy of multiple defect point on a color membrane substrates, shorten the servicing time of defect point, improve maintenance efficiency.
Below in conjunction with Fig. 2 a-4d, describe technical scheme of the present invention in detail.
Shown in composition graphs 2a and Fig. 2 b, the embodiment of the present invention provides a kind of maintenance unit, comprise: for placing platform 1 and at least one group of maintenance department 2 of color membrane substrates, maintenance department 2 is arranged on the top of platform 1, comprising: laser beam discrete part, for the generating laser 3 of Emission Lasers and the baffle plate cover 4 for gathering laser.Generating laser 3 is arranged at the top of baffle plate cover 4, and by laser conduction optical fiber by laser conduction in baffle plate cover 4.Laser beam discrete part is arranged in baffle plate cover 4, and the laser dispersion for being launched by generating laser 3 is multiple laser beam, to make multiple defect points of the radium-shine color membrane substrates of described laser beam difference.Laser beam discrete part divides the shape and size of the laser beam shed adjustable.
Generating laser 3 provides the LASER Light Source used during radium-shine reparation, and generating laser 3 adopts existing generating laser to realize, and does not repeat them here.The cubic shaped of baffle plate cover 4 in inner hollow, and lower opening, for gathering laser.The laser conduction that generating laser 3 produces by laser conduction optical fiber, in the laser beam discrete part in baffle plate cover 4, realizes light splitting by laser beam discrete part, by a point associated disadvantages point for the radium-shine color membrane substrates of laser beam shed.
The present invention utilizes platform to place color membrane substrates, above platform, utilize baffle plate cover to gather the laser of laser transmitter projects, and utilize laser beam discrete part to be multiple laser beam by laser dispersion, to make multiple defect points of the radium-shine color membrane substrates of each laser beam difference, thus the multiple defect points while of realizing utilizing a lasing light emitter on radium-shine color membrane substrates, shorten the servicing time of defect point, improve maintenance efficiency; Even if there is more defect point in a color membrane substrates, also can synchronous epitaxy, avoid abandoning keeping in repair the waste brought.
Below in conjunction with Fig. 3 and Fig. 4 a-4d, describe the structure of laser beam discrete part in detail.Laser beam discrete part is made up of two groups of baffle group, and as shown in Figure 3, described laser beam discrete part comprises the first baffle group X and second baffle group Y, and the first baffle group X and second baffle group Y are mutually vertical and height and position different.In embodiments of the present invention, as shown in Figure 3, the first baffle group X is positioned at the below of second baffle group Y, certainly, those skilled in the art are known, and the height and position of the first baffle group X and second baffle group Y is not limited thereto, such as, also the first baffle group X can be arranged on the below of second baffle group Y.
Be the constitutional diagram that the first baffle group X all closes see Fig. 4 a-4b, Fig. 4 a, Fig. 4 b is the first baffle group X carries out rotating rear formation slit constitutional diagram according to certain angle.First baffle group X comprises multiple first baffle plate that can rotate, according to the first baffle plate put in order for its coding X1-Xi, i be more than or equal to 2 natural number.The two ends of the first baffle plate X1-Xi are provided with rotating shaft 5, first baffle plate X1-Xi and can 5 rotate around the shaft.First baffle group X also comprises the first drive division 6, first drive division 6 and is arranged on baffle plate cover 4, and is connected with the rotating shaft 5 of the first baffle plate X1-Xi, and the rotating shaft 5 of the first baffle plate X1-Xi can be driven to rotate, to make to form slit d between the first adjacent between two baffle plate
i-2.
Be the constitutional diagram that second baffle group Y all closes see Fig. 4 c-4d, Fig. 4 c, Fig. 4 d is second baffle group Y carries out rotating rear formation slit constitutional diagram according to certain angle.Second baffle group Y comprises multiple second baffle that can rotate, according to second baffle put in order for its coding Y1-Yj, j be more than or equal to 2 natural number.Second baffle Y1-Yj two ends are provided with rotating shaft 5, and second baffle Y1-Yj can 5 rotate around the shaft.Second baffle group Y also comprises the second drive division 7, second drive division 7 and is arranged on baffle plate cover 4, and is connected with the rotating shaft 5 of second baffle Y1-Yj, and the rotating shaft 5 of second baffle Y1-Yj can be driven to rotate, to make to form slit d between second baffle adjacent between two
j-2.
The slit d formed between the first adjacent between two baffle plate X1-Xi
i-2and form slit d between second baffle Y1-Yj adjacent between two
j-2multiple open area 8 can be formed, be broken up into multiple laser beam to make laser by open area 8.Open area 8 is corresponding with the position of maintenance area (defect point), and shape, area are identical.
When each first baffle plate X1-Xi is all in horizontality, the first baffle group X closes, and now, does not have slit between second baffle adjacent between two; When each second baffle Y1-Yj is all in horizontality, second baffle group Y closes, and now, does not have slit between second baffle adjacent between two; When each first baffle plate X1-Xi and each second baffle Y1-Yj is all in horizontality, can not form open area 8, now, the state of laser beam discrete part is the state shown in Fig. 3.
By controlling the angle of the first baffle plate X1-Xi and second baffle Y1-Yj, the folding condition of the first baffle group and second baffle group can be controlled, concrete, by forming the open area 8 be consistent with maintenance area (i.e. defect point), when laser irradiating laser light beam discrete part, the open area 8 that laser can be formed by the first baffle plate and second baffle, form laser beam, this open area 8 is transmission region.And laser cannot by being in the first baffle plate and the second baffle of closure state, this part is light tight region.Because laser beam discrete part can form multiple open area 8 simultaneously, thus repair while realizing multiple pixel, and light tight region can not impact the reparation of defect point.
Open area 8 size continuous variable, reconfigurable save.The first baffle plate X1-Xi of the first baffle group X and the second baffle Y1-Yj of second baffle group Y is not controlled by the first drive division 6 and the second drive division 7, can realize the rotation of 360 degree of continuous angles, thus forms the slit d of different in width
i-2and d
j-2, thus realize the control to open area size.
Preferably, the width of each first baffle plate X1-Xi is equal, and the width of each second baffle Y1-Yj is equal, is convenient to the position of accurate location defect point.
It should be noted that, the structure of laser beam discrete part is not limited to the baffle group structure that the embodiment of the present invention relates to, and any structure that can realize dispersion laser bundle is all within protection scope of the present invention.
Shown in composition graphs 3, the sidewall of baffle plate cover 4 is provided with one group of first slide rail 41 and one group of second slide rail 42, first slide rail 41 is relatively arranged on the sidewall of the baffle plate cover 4 at the two ends of the first baffle plate X1-Xi, and the second slide rail 42 is relatively arranged on the sidewall at the two ends of second baffle Y1-Yj.
Composition graphs 3 and Fig. 5, the first slide block 411 is provided with in first slide rail 41, first slide block 411 can slide in the first slide rail 41, and the first slide block 411 being arranged on the first baffle plate X1-Xi two ends can drive rotating shaft 5 inclined in opposite directions at the first baffle plate X1-Xi two ends respectively.Be provided with the second slide block 421, second slide block 421 in second slide rail 42 to slide in the second slide rail 42, the second slide block 421 being arranged on second baffle Y1-Yj two ends can drive rotating shaft 5 inclined in opposite directions at second baffle Y1-Yj two ends respectively.
When defect point is the region with certain angle of inclination, move round about by controlling two the first slide blocks 411, and/or, control two the second slide blocks 421 to move round about, thus the open area 8 with certain angle of inclination can be formed, open area 8 can carry out the change of size and angle according to the actual requirements.
By arranging the first slide block at the two ends of the first baffle plate, at the two ends of second baffle, the second slide block is set, the contrary movement in opposite directions of the first slide block by the first baffle plate two ends, and the contrary movement in opposite directions of second slide block at second baffle two ends, the shape of open area can be regulated, form the open area of inclination, to adapt to defect point in irregular shape, make laser region more accurate.
Further, as shown in Figure 2 a, described maintenance unit can also comprise the microscope 9 for optically focused, and microscope 9 is arranged at the below of described laser beam discrete part.
Shown in composition graphs 2a and Fig. 2 b, the top of platform 1 be provided with at least one first guide rail 11 and at least one second guide rail 12, first guide rail 11 mutual vertical with the second guide rail 12, the first guide rail 11 can move along the second guide rail 12.
Generating laser 3 is fixed on the first guide rail 11, and described laser beam discrete part and baffle plate cover 4 are fixed on the first guide rail 11 by installing backboard 10, and installing backboard 10 can move along the first guide rail 11.
As shown in Figure 2 b, the second guide rail 12 is two, and two the second guide rails 12 be arranged in parallel, and the two ends of the first guide rail 11 can be moved respectively on two the second guide rails 12.
In order to tackle for same color membrane substrates occurs homomorphosis, positional symmetry concomitant defect bad, the problem causing maintenance efficiency low is keeped in repair respectively to often locating common defects point, maintenance of equipment of the present invention can arrange multiple first guide rail, and arranges multiple maintenance department on each first guide rail.
When the first guide rail 11 is multiple, and when each first guide rail 11 is provided with multiple maintenance department, the identical and position of the maintenance department's quantity on each first guide rail 11 correspondence is arranged.
Preferably, each first guide rail 11 can arrange 2 ~ 6 maintenance departments.
By arranging multiple first guide rail, each first guide rail arranges multiple maintenance departments of equal number, and the maintenance department's correspondence on each first guide rail is arranged, the concomitant defect point in many places of homomorphosis, positional symmetry on same color membrane substrates can be keeped in repair simultaneously, significantly promote maintenance efficiency.
In embodiments of the present invention, 2 the first guide rails 11 and 2 the second guide rails 12 are set, and on each first guide rail 11,2 maintenance departments and two generating lasers 3 are installed, like this, one has the concomitant defect point in 4 places that color membrane substrates can keep in repair simultaneously in 4 maintenance departments, maintenance efficiency can be improved 4 times.
In radium-shine process, due to reasons such as defect point are larger, can produce a large amount of dust after radium-shine ashing, existing laser scheme does not arrange any dust removal protection device, and dust directly drops in contiguous pixel.And due to radium-shine energy comparatively large, dust granules is very fine and closely woven, is difficult to cleaning removing, causes on the contrary and again pollute, cause keeping in repair unsuccessfully in the cleaning process of downstream processing procedure.In order to solve the problem, further, described maintenance unit can also comprise dust absorbing device, and dust absorbing device is arranged on described installation backboard 10, and between laser beam discrete part and platform 1.As shown in Figure 2 a, described dust absorbing device comprises: dust collector 13, dust accumulation device 14 and the absorption tube 16 for generation of negative pressure.The front end of absorption tube 16 is provided with opening, and the end of absorption tube 16 is connected with dust collector 13, can utilize the dust that negative pressure absorbing laser defect point produces.Dust accumulation device 14, in arc-shaped, is arranged at the opening part of the front end of absorption tube 16, for collecting the dust that laser defect point produces temporarily.
By arranging dust absorbing device between laser beam discrete part and platform, air-flow is utilized to prevent dust from dropping on the surface of color membrane substrates, dust converges in dust accumulation device along with air-flow, dust collector is entered again by absorption tube, realize the collection of dust, prevent dust to be scattered and pollute normal pixel region on color membrane substrates.
Due to laser foreign matter ashing speed quickly, the negative pressure separately adopting absorption tube 16 to produce is difficult to the foreign matter of ashing (dust) to absorb completely, and therefore, described dust absorbing device can also comprise the gas blow pipe 15 for generation of air-flow.Preferably, gas blow pipe 15 is in Duckbill type, and the opening of gas blow pipe 15 is lower than the opening of the front end of absorption tube 16.
Adopt duckbill, position is lower than the gas blow pipe 15 of the opening of absorption tube 16, the dust of generation blows afloat by the air-flow that the gas blow pipe 15 being positioned at below produces, the disturbance be divided into is caused while ashing, prevent dust from dropping on substrate layer surface, dust can converge near dust accumulation device 14 along with air-flow simultaneously, then enters dust collector 13 under the suction of absorption tube 16, realizes the collection of dust, prevent dust to be scattered, pollute the normal pixel region on substrate.Dust after absorption is stored in dust collector 13, regularly clears up it
Preferably, Open Side Down and in bell mouth shape, be more conducive to absorption and the collection of dust, make dust more easily enter absorption tube 16 for absorption tube 16.
The embodiment of the present invention also provides a kind of maintenance system, and as shown in Figure 6, described maintenance system comprises: testing fixture 61, controller 62 and foregoing maintenance unit 63.
Testing fixture 61 for, determine the coordinate of defect point.
Controller 62 for, according to the coordinate of described defect point, and the size of the defect point of user's input, control the laser beam discrete part of maintenance unit 63, above described defect point, be laser beam identical, equal-sized with described defect point quantity by the laser dispersion of laser transmitter projects.
Maintenance system in actual use, by testing fixture 61, the coordinate information of the defect point of required maintenance is passed to controller 62, user sets the size (length and width, angle) of defect point on the software interface of controller 62, the size Control of controller 62 set by user, the position regulating the open area of maintenance unit 63 and size, form the light transmission part be consistent with the size of the defect point of required reparation.
Concrete, controller 62 sends the settings that user inputs to data transformations device (i.e. signal converter, do not illustrate in figure), the setting value of user is converted into steering order by data transformations device, and steering order is sent to the first drive division 6 and the second drive division 7, first drive division 6 and the second drive division 7 control the first baffle group according to instruction and second baffle group is rotated, the open area required for formation.After setting, user starts laser repairing button, maintenance department is moved by control first guide rail and the second guide rail, maintenance department is moved to the top at the coordinate place of defect point, laser generator 3 Emission Lasers, laser is by after laser beam discrete part, be broken up into several laser beams, laser beam is radium-shine at defect point place by microscope 9, carries out ashing process to defect point, the defect point covering multiple pixel can be keeped in repair simultaneously, greatly improve the efficiency of maintenance.
Be understandable that, the illustrative embodiments that above embodiment is only used to principle of the present invention is described and adopts, but the present invention is not limited thereto.For those skilled in the art, without departing from the spirit and substance in the present invention, can make various modification and improvement, these modification and improvement are also considered as protection scope of the present invention.
Claims (12)
1. a maintenance unit, it is characterized in that, comprise: for placing platform and at least one group of maintenance department of color membrane substrates, maintenance department is arranged on the top of platform, comprising: laser beam discrete part, for the generating laser of Emission Lasers and the baffle plate cover for gathering laser;
Generating laser is arranged at the top of baffle plate cover, and by laser conduction optical fiber by laser conduction in baffle plate cover;
Laser beam discrete part is arranged in baffle plate cover, for being multiple laser beam by the laser dispersion of laser transmitter projects, to make multiple defect points of the radium-shine color membrane substrates of described laser beam difference.
2. maintenance unit as claimed in claim 1, it is characterized in that, described laser beam discrete part comprises mutually vertical and the first baffle group that height and position is different and second baffle group, first baffle group comprises multiple first baffle plate that can rotate, second baffle group comprises multiple second baffle that can rotate, first baffle plate and second baffle can form multiple open area, to make laser by described open area, and are broken up into multiple laser beam.
3. maintenance unit as claimed in claim 2, it is characterized in that, described first baffle group also comprises the first drive division, and the first drive division is connected with the first baffle plate, for driving the first flapper, to make to form slit between the first adjacent between two baffle plate;
Described second baffle group also comprises the second drive division, and the second drive division is connected with second baffle, for driving second baffle to rotate, to make to form slit between second baffle adjacent between two;
Form slit between the slit formed between the first adjacent between two baffle plate and second baffle adjacent between two and form described open area, when each first baffle plate is all in horizontality, first baffle group closes, and when each second baffle is all in horizontality, second baffle group closes.
4. maintenance unit as claimed in claim 3, it is characterized in that, the width of each first baffle plate is equal, and the width of each second baffle is equal.
5. maintenance unit as claimed in claim 3, it is characterized in that, the sidewall of described baffle plate cover is provided with one group of first slide rail and one group of second slide rail, first slide rail is relatively arranged on the sidewall of baffle plate cover at the two ends of the first baffle plate, and the second slide rail is relatively arranged on the sidewall at the two ends of second baffle;
Be provided with the first slide block in first slide rail, the first slide block can slide in the first slide rail, and the first slide block being arranged on the first baffle plate two ends can drive the two ends inclined in opposite directions of the first baffle plate respectively;
Be provided with the second slide block in second slide rail, the second slide block can slide in the second slide rail, and the second slide block being arranged on second baffle two ends can drive the two ends inclined in opposite directions of second baffle respectively.
6. maintenance unit as claimed in claim 2, it is characterized in that, also comprise microscope, microscope is arranged at the below of described laser beam discrete part.
7. the maintenance unit as described in any one of claim 1-6, is characterized in that, the top of described platform is provided with at least one first guide rail and at least one second guide rail, and the first guide rail is mutually vertical with the second guide rail, and the first guide rail can move along the second guide rail;
Described generating laser is fixed on the first guide rail, and described laser beam discrete part and baffle plate cover are fixed on the first guide rail by installing backboard, and described installation backboard can move along the first guide rail.
8. maintenance unit as claimed in claim 7, it is characterized in that, described second guide rail is two, and two the second guide rail parallels are arranged, and the two ends of the first guide rail can be moved respectively on described two the second guide rails;
When described first guide rail is multiple, and when each first guide rail is provided with multiple maintenance department, the identical and position of the maintenance department's quantity on each first guide rail correspondence is arranged.
9. maintenance unit as claimed in claim 7, it is characterized in that, described maintenance unit also comprises dust absorbing device, dust absorbing device is arranged on described installation backboard, and between described laser beam discrete part and platform, comprising: dust collector, dust accumulation device and the absorption tube for generation of negative pressure;
The front end of absorption tube is provided with opening, and the end of absorption tube is connected with dust collector, can utilize the dust that negative pressure absorbing laser defect point produces;
Dust accumulation device is arc-shaped, is arranged at the opening part of the front end of absorption tube, for collecting the dust that laser defect point produces temporarily.
10. maintenance unit as claimed in claim 9, it is characterized in that, described dust absorbing device also comprises the gas blow pipe for generation of air-flow, and described gas blow pipe is Duckbill type, and the opening of described gas blow pipe is lower than the opening of described absorption tube.
11. maintenance units as claimed in claim 9, is characterized in that, Open Side Down and in bell mouth shape for described absorption tube.
12. 1 kinds of maintenance systems, is characterized in that, comprising: testing fixture, controller and the maintenance unit as described in any one of claim 1-11,
Testing fixture is used for, and determines the coordinate of defect point;
Controller is used for, according to the coordinate of described defect point, and the size of the defect point of user's input, control the laser beam discrete part of described maintenance unit, above described defect point, be laser beam identical, equal-sized with described defect point quantity by the laser dispersion of laser transmitter projects.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610150842.4A CN105572928B (en) | 2016-03-16 | 2016-03-16 | A kind of maintenance unit and system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610150842.4A CN105572928B (en) | 2016-03-16 | 2016-03-16 | A kind of maintenance unit and system |
Publications (2)
| Publication Number | Publication Date |
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| CN105572928A true CN105572928A (en) | 2016-05-11 |
| CN105572928B CN105572928B (en) | 2018-09-28 |
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| CN201610150842.4A Expired - Fee Related CN105572928B (en) | 2016-03-16 | 2016-03-16 | A kind of maintenance unit and system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113492268A (en) * | 2021-09-10 | 2021-10-12 | 徐州市威尔玛科技有限公司 | Metal plate cutting device |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1821836A (en) * | 2005-02-15 | 2006-08-23 | 三星电子株式会社 | Reparing device and repairing method for display device |
| CN101221299A (en) * | 2007-01-10 | 2008-07-16 | Charm&Ci株式会社 | Method and apparatus for repairing liquid crystal display panel |
| JP2008292494A (en) * | 1997-09-24 | 2008-12-04 | Olympus Corp | Substrate-inspecting device |
| CN201773238U (en) * | 2010-03-11 | 2011-03-23 | 晶彩科技股份有限公司 | Repairing device for display provided with color filter |
| KR20120029100A (en) * | 2010-09-16 | 2012-03-26 | (주)미래컴퍼니 | Method and device for repairing brightness defect of liquid crystal display panel |
| CN102902033A (en) * | 2012-09-19 | 2013-01-30 | 京东方科技集团股份有限公司 | Laser baffle structure, optical filter repairing method and device |
-
2016
- 2016-03-16 CN CN201610150842.4A patent/CN105572928B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008292494A (en) * | 1997-09-24 | 2008-12-04 | Olympus Corp | Substrate-inspecting device |
| CN1821836A (en) * | 2005-02-15 | 2006-08-23 | 三星电子株式会社 | Reparing device and repairing method for display device |
| CN101221299A (en) * | 2007-01-10 | 2008-07-16 | Charm&Ci株式会社 | Method and apparatus for repairing liquid crystal display panel |
| CN201773238U (en) * | 2010-03-11 | 2011-03-23 | 晶彩科技股份有限公司 | Repairing device for display provided with color filter |
| KR20120029100A (en) * | 2010-09-16 | 2012-03-26 | (주)미래컴퍼니 | Method and device for repairing brightness defect of liquid crystal display panel |
| CN102902033A (en) * | 2012-09-19 | 2013-01-30 | 京东方科技集团股份有限公司 | Laser baffle structure, optical filter repairing method and device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113492268A (en) * | 2021-09-10 | 2021-10-12 | 徐州市威尔玛科技有限公司 | Metal plate cutting device |
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| CN105572928B (en) | 2018-09-28 |
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