TW200302345A - Substrate inspection device - Google Patents

Substrate inspection device Download PDF

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Publication number
TW200302345A
TW200302345A TW091132539A TW91132539A TW200302345A TW 200302345 A TW200302345 A TW 200302345A TW 091132539 A TW091132539 A TW 091132539A TW 91132539 A TW91132539 A TW 91132539A TW 200302345 A TW200302345 A TW 200302345A
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TW
Taiwan
Prior art keywords
inspection
heads
aforementioned
patent application
glass substrate
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Application number
TW091132539A
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Chinese (zh)
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TWI264532B (en
Inventor
Nobuo Fujisaki
Kazuya Ito
Original Assignee
Olympus Optical Co
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Priority claimed from JP2001339938A external-priority patent/JP3929285B2/en
Priority claimed from JP2002000767A external-priority patent/JP2003202209A/en
Application filed by Olympus Optical Co filed Critical Olympus Optical Co
Publication of TW200302345A publication Critical patent/TW200302345A/en
Application granted granted Critical
Publication of TWI264532B publication Critical patent/TWI264532B/en

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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N21/95607Inspecting patterns on the surface of objects using a comparative method

Abstract

A substrate inspecting device of the present invention comprises a fixed stage for placing a subject, a gantry type arm disposed astride the subject placed on the fixed stage, and two inspection heads disposed back to back with the horizontal beam of the gantry type arm interposed between them.

Description

200302345 E6 F6 五、發明之詳細説明: 〔發明之領域〕 “ 本發明用以檢查例如:液晶顯示器(LCD )等平面顯示器 (請先閱讀背面之注意事項再行繪製) (FPD )玻璃基板、彩色濾光片等大型玻璃基板缺陷的基板檢 查裝置。 〔發明之背景〕 液晶顯示器的玻璃基板正逐年邁入大型尺寸化,最近已 出現超過1000mm尺寸的機種;這種大型玻璃基板爲了提昇相 同面板尺寸的使用效率,於是便依據面板尺寸採用9面、6 面、4面等多倒角。 圖十二表示傳統基板檢查裝置的構成圖;這種基板檢查 裝置已記載於特開平8-171057號;此基板檢查裝置是在基座 (201)上設有,可透過Y向的導軌(202)移動下載物台 (stage)(203);此下載物台(203)上則設有,可透過X向導軌(204) 移動上載物台(205);此上載物台(205)上則裝載了大型玻璃基 板(206)。 此外,基座(201)上則設有手臂(arm)(207),此手臂(207) 側面則設有,可透過導軌(20.8)將二個光學頭(209)、(210)移動 到X向;此光學頭(209)、(210)則各自安裝了電視接收攝影機 (television camera) ( TV 攝影機)(211)、(212)。 經濟部中央標準局員工消費合作社印製 這種基板檢查裝置,是藉由大型玻璃基板(206)尺寸,而 改變倒角數與圖樣間隔,因此會將光學頭(209)、(210)彼此的 間隔,調整爲符合圖樣的間隔等。 完成光學頭(209)、(210)間隔的設定後,只要移動下載物 台(203)與上載物台(205),就可在大型玻璃基板(206)上,同時 觀察二個比鄰圖樣的相周部份。 近年來,隨著液晶顯示器產量急速成長,因而要求縮短 4 _' · 一' —..... ...... 本紙張尺度適用中國國家標準(CNS ) Α4規格(21 ΟΧ297公釐) 200302345 E6 __F6 五、發明之詳細説明: : (請先閱讀背面之注意事項再行繪製) 檢查基板的所需測量間隔時間、檢查裝置主體的輕薄短小 化;而且製造商爲了抑制設備投資額,也紛紛要求輕薄短小 型的檢查裝置主體;隨著顯示器的大型尺寸發展,而出現了 尺寸超過1000mm的大型玻璃基板,因此從運輸與成本面來 看,確實需要將檢查裝置主體做成輕薄短小尺寸。 與這種觀念不同的是,上述基板檢查裝置爲了將下載物 台(203)、上載物台(205)移動到XY向,而需要高於基板尺寸 4倍以上的空間,光是這個空間就足以讓裝置主體偏向於大型 化發展。 圖十三表示傳統基板檢查裝置的構成圖;這種基板檢查 、裝置已記載於特開平1 1-94756號公報,屬於輕薄短小型的裝 置主體;這種基板檢查裝置是在載物台(301)上,設置裝載大 型玻璃基板(302)的支撐架(holder)(303)。 在載物台(301)兩端各設置導軌(304)、(304),並在這些導 軌(304)、(304)上設有可移動到Y向的門型顯微鏡頭移動載物 台(305);此顯微鏡頭移動載物台(305)的水平波束(beam)(306) 上,則設有可移動到X向的顯微鏡頭(307)。 經濟部中央標準局員工消費合作社印製 顯微鏡頭移動載物台(305)的底板上,則設有透線照明 (308);顯微鏡頭(307)則在精密觀察組件(309)上,設有物鏡(3 10) 及目鏡(311);此外,顯微鏡頭(307)上,則設有巨集照明(312) 及指標用照明(313)。 精細觀察組件(309)上,則有安裝TV攝影機(314);用此 TV攝影機(3 14)所拍攝之大型玻璃基板(302)的觀察圖像,則會 顯示於TV顯示器(315);控制部(3 16)負責管理缺限位置的座 標、微鏡頭移動載物台(305)與顯微鏡頭(307)的移動控制。 只要擁有這種基板檢查裝置,就可沿著微鏡頭移動載物 台305,朝X向直線移動顯微鏡頭(307),並沿著導軌(304)、 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 200302345 E6 F6 >五、發明之詳細説明· (304),直線移動微鏡頭移動載物台(305);在固定大型玻璃基 板(302)的狀態下,對整個大型玻璃基板(302)光柵(raster)掃描 顯微鏡頭(307),就可執行檢查。 但是,圖十三所示的基板檢查裝置,必須將顯微鏡頭(307) 設置於微鏡頭移動載物台(305)上,以觀察整個大型坡璃基板 (302);因此載物台(301)上就必須在卸除支撐架(303)的位置 上,有微鏡頭移動載物台(305)的移動空間A,光是此移動空 間A就足以讓載物台(301)偏向大型尺寸。 此外,也要求需縮短用於檢查基板的測量間隔時間,但 因屬於用一個顯微鏡頭(307),測量1000m.角尺寸的大型玻璃 基板(302),因此縮短測量間隔時間則有它的限度。 圖十四表示傳統FPD等玻璃基板表面外觀圖;圖十四所 示之玻璃基板的四角,在FPD等各製程上會複印定位標印 (200);圖十四表示用所定製程所複印的標印(200);對塗佈於 基板的抗蝕劑正確複印遮光罩上所形成的圖樣時,在玻璃基 板四角上所形成的標印(200),會正確的配合遮光罩四角上所 形成的標印而曝光。 各製程下游,則會檢查輸送帶所送達之玻璃基板上的各 標印焦點有無模糊、缺陷、或標印有無位移;當這些標印沒 有缺陷或位移時,則會順利的予以複印,並正確判定上游端 的定位。 在此輸送帶上設置4台TV攝影機,以同時拍攝與檢查四 角的標印;但這種構成方式屬於設置4台TV攝影機,因此成 本較高。 本發明之目的在於,提供縮短檢查基板的所需測量間隔 時間、輕薄短小型裝置主體的基板檢查裝置。 〔發明揭示內容〕 6 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公麓) (請先閲讀背面之注意事項再行繪製) 訂 經濟部中央標準局員工消費合作社印製 200302345 E6 F6 五、發明之詳細説明: (請先閲讀背面之注意事項再行繪製) 本發禪之基板檢查裝置具備了’裝載被檢查體的固定載 物台、以跨過被裝載於此固定載物台上之前述被檢查體方式 所設置而成的門型手臂、並於透過此門型手臂之水平波束, 以彼此背對貼合的狀態所設置的二個檢查頭。 〔圖面之簡單說明〕 圖一係本發明第一實施例基板檢查裝置構成的外觀斜視圖。 圖二係本發明第一實施例基板檢查裝置構成的側視圖。 圖三係本發明第一實施例基板檢查裝置檢查輸送帶的移動狀 態圖。 . 圖四A係本發明第一實施例檢查輸送帶的觀察領域表示圖。 圖四B係本發明第一實施例檢查輸送帶的觀察領域表示圖。 圖五係本發明第二實施例基板檢查裝置構成的構成側視圖。 圖六係本發明第三實施例基板檢查裝置構成的構成側視剖面 圖。 圖七係本發明第三實施例基板檢查裝置構成的外觀斜視圖。 圖八係本發明第三實施例滾輪輸送帶的構成上視圖。 經濟部中央標準局員工消費合作社印製 圖九係本發明第三實施例整體機構的各機構的構成側視圖。 圖十係本發明第三實施例整體機構的各機構的構成側視圖。 圖係本發明第四實施例基板檢查裝置構成的外觀斜視 圖。 圖十二係習用基板檢查裝置的構成表示圖。 圖十三係習用基板檢查裝置的構成表示圖。 圖十四係本發明實施例及習用的玻璃基板的表面外觀圖。 【符號之說明】 1……載物台 2……玻璃基板 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 200302345 E6 F6 五、發明之詳細説明: 經濟部中央標準局員工消費合作社印製 3...... 載物台 4…… 固定構件 5…… 導軌 6…… 玻璃基板 7…… 載物台 10.... ..控制部 11.... ..Y標度 12.... ..X標度 13…. ..TV螢幕 14…. ..照明 41,42 定向機構 43 … .·汽缸 51,52 ......定向機構 71…·· ..水平波束 81,82 ……檢查頭 83 …·. ..物鏡 91,92 ......透鏡 93,94 ......攝影機 95,96 ......攝影鏡 97 …·. ..支撐構件 100… ...落射用照明 101··· ...透鏡 102… ...反射鏡 103… ...物鏡 104,105......反射鏡 106"· ...透鏡 107… ...檢查頭 108… ...玻璃基板 (請先閲讀背面之注意事項再行繪製) 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 200302345 E6 F6 經濟部中央標準局員工消費合作社印製 五、發明之詳細説明: 109……基座 ,:, 110……載物台 111……水平波束 113,114……相機 115,116……攝影機 117……控制部 118……TV顯示器 120……支撐構件 121……支撐軸 122.. ....滾輪 、 123……皮帶輪 124……皮帶 125,126,127……反射型光電傳感器 200……標印 201……基座 202,204……導軌 203,205……載物台 206……玻璃基板 207.. ....手臂 208,304……導軌 209,210……光學頭 211,212……TV攝影機 301,305……載物台 302……玻璃基板 303……支撐架 306……水平波束 307……顯微鏡頭 308……透線照明 (請先閱讀背面之注意事項再行繪製)200302345 E6 F6 V. Detailed description of the invention: [Field of invention] "This invention is used to inspect flat displays such as liquid crystal displays (LCD) (please read the precautions on the back before drawing) (FPD) glass substrate, color A substrate inspection device for large glass substrate defects such as filters. [Background of the Invention] The glass substrates of liquid crystal displays are gradually becoming larger in size. Recently, more than 1000mm models have appeared. This large glass substrate is designed to improve the same panel size. According to the panel size, 9-sided, 6-sided, and 4-sided chamfers are used. Figure 12 shows the structure of a conventional substrate inspection device; this substrate inspection device has been described in Japanese Patent Application Laid-Open No. 8-171057; The substrate inspection device is provided on the base (201), and the download stage (203) can be moved through the Y-direction guide rail (202); the download stage (203) is provided, and can be transmitted through the X The stage (205) is moved to the guide rail (204); a large glass substrate (206) is mounted on the stage (205). In addition, an arm (207) is provided on the base (201), This hand (207) On the side, two optical heads (209) and (210) can be moved to the X direction through the guide rail (20.8); the optical heads (209) and (210) are each equipped with a television receiving camera (television camera) (TV camera) (211), (212). This type of substrate inspection device is printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs, and the number of chamfers and pattern intervals are changed by the size of a large glass substrate (206). Therefore, the interval between the optical heads (209) and (210) will be adjusted to match the pattern, etc. After setting the interval between the optical heads (209) and (210), as long as the download stage (203) and the uploading object are moved The stage (205) allows simultaneous observation of the two adjacent patterns on the large glass substrate (206). In recent years, with the rapid growth of liquid crystal display output, it is required to shorten 4_ '· 一' —. .......... This paper size applies to the Chinese National Standard (CNS) Α4 specification (21 〇 × 297 mm) 200302345 E6 __F6 V. Detailed description of the invention: (Please read the precautions on the back before drawing ) Check the required measurement interval of the substrate In order to reduce the investment in equipment, manufacturers have also demanded light, thin, short and small inspection device bodies. With the development of the large size of displays, large glass substrates with dimensions exceeding 1000 mm have appeared. From the perspective of transportation and cost, it is necessary to make the main body of the inspection device thin and short. Unlike this concept, the above substrate inspection device moves the download stage (203) and the upload stage (205) to XY. It requires more than 4 times the size of the substrate, and this space alone is enough to make the device body lean towards large-scale development. FIG. 13 shows a configuration diagram of a conventional substrate inspection device; such a substrate inspection device is described in Japanese Patent Application Laid-Open No. 1 1-94756 and belongs to a thin, short, and compact device body; such a substrate inspection device is mounted on a stage (301 ), A holder (303) on which a large glass substrate (302) is mounted is provided. Guide rails (304) and (304) are provided at both ends of the stage (301), and a gate type microscope stage (305) that can be moved to the Y direction is provided on the guide rails (304) and (304). ); On the horizontal beam (306) of the microscope moving table (305), a microscope head (307) is provided which can be moved to the X direction. On the bottom plate of the mobile microscope stage (305) printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs, there is a translucent illumination (308); the microscope lens (307) is provided on the precision observation module (309). Objective lens (3 10) and eyepiece (311); In addition, the microscope head (307) is provided with macro illumination (312) and indicator illumination (313). On the fine observation component (309), there is a TV camera (314) installed; the observation image of the large glass substrate (302) taken by this TV camera (3 14) will be displayed on the TV monitor (315); control The department (3, 16) is responsible for managing the coordinates of the missing position, the movement control of the micro lens moving stage (305) and the microscope head (307). As long as you have this kind of substrate inspection device, you can move the stage 305 along the micro lens, move the microscope head (307) linearly in the X direction, and follow the guide rail (304). This paper standard applies to the Chinese National Standard (CNS) A4 Specifications (210X297 mm) 200302345 E6 F6 > V. Detailed description of the invention (304), linear moving micro lens moving stage (305); under the state of fixed large glass substrate (302), the entire large glass The substrate (302) raster scans the microscope head (307) to perform inspection. However, for the substrate inspection device shown in FIG. 13, the microscope head (307) must be set on the micro lens moving stage (305) to observe the entire large slope glass substrate (302); therefore, the stage (301) There must be a moving space A of the micro lens moving stage (305) at the position where the support frame (303) is removed. The movement space A alone is enough to bias the stage (301) to a large size. In addition, it is required to shorten the measurement interval time for inspecting the substrate. However, since it is a large glass substrate (302) measuring an angular size of 1000m with a microscope head (307), there is a limit to shortening the measurement interval time. Figure 14 shows the surface appearance of traditional glass substrates such as FPD; the four corners of the glass substrate shown in Figure 14 will be used to copy the positioning marks (200) on each process such as FPD; Figure 14 shows the labels copied using the customized process (200); When the pattern formed on the hood is correctly copied to the resist coated on the substrate, the marks (200) formed on the four corners of the glass substrate will correctly match the formed on the four corners of the hood Mark and expose. Downstream of each process, the focus of each mark on the glass substrate delivered by the conveyor will be checked for blurring, defects, or displacement of the mark; when these marks are free of defects or displacement, they will be copied smoothly and correctly Determine the positioning of the upstream end. Four TV cameras are set on this conveyor belt to simultaneously capture and inspect the marks on the four corners; however, this configuration method involves setting up four TV cameras, so the cost is high. An object of the present invention is to provide a substrate inspection apparatus that shortens the measurement interval time required for inspecting a substrate, and is thin and short and has a small and large apparatus body. [Disclosure of the Invention] 6 This paper size is applicable to Chinese National Standard (CNS) A4 specification (210X297 feet) (Please read the precautions on the back before drawing) Order printed by the Consumer Standards Cooperative of the Central Standards Bureau of the Ministry of Economy 200302345 E6 F6 5 2. Detailed description of the invention: (Please read the precautions on the back before drawing.) The board inspection device of this zen is equipped with a 'fixed stage on which the object to be inspected is mounted so as to straddle the fixed stage. Two inspection heads provided with the portal-type arm set in the aforementioned way of inspection and passing through the horizontal beam of the portal-type arm with their backs facing each other. [Brief Description of the Drawings] FIG. 1 is an external perspective view of the structure of the substrate inspection device according to the first embodiment of the present invention. FIG. 2 is a side view showing the structure of a substrate inspection device according to the first embodiment of the present invention. Fig. 3 is a diagram showing a moving state of the inspection belt by the substrate inspection apparatus according to the first embodiment of the present invention. Fig. 4A is a diagram showing an observation area of the inspection conveyor belt according to the first embodiment of the present invention. FIG. 4B is a diagram showing an observation field of the inspection conveyor belt according to the first embodiment of the present invention. FIG. 5 is a structural side view of a structure of a substrate inspection apparatus according to a second embodiment of the present invention. Fig. 6 is a sectional side view showing the structure of a substrate inspection apparatus according to a third embodiment of the present invention. FIG. 7 is an external perspective view of a structure of a substrate inspection device according to a third embodiment of the present invention. Fig. 8 is a top view of the structure of a roller conveyor belt according to a third embodiment of the present invention. Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. Figure 9 is a side view of the structure of each mechanism of the overall mechanism of the third embodiment of the present invention. Fig. 10 is a side view showing the structure of each mechanism of the overall mechanism of the third embodiment of the present invention. FIG. Is an external perspective view of the structure of a substrate inspection apparatus according to a fourth embodiment of the present invention. FIG. 12 is a diagram showing a configuration of a conventional substrate inspection apparatus. FIG. 13 is a diagram showing a configuration of a conventional substrate inspection apparatus of the thirteenth series. FIG. 14 is a surface appearance view of a glass substrate according to an embodiment of the present invention and a conventional glass substrate. [Explanation of Symbols] 1 ... Stage 2 ... Glass substrate The paper size is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) 200302345 E6 F6 V. Detailed description of the invention: Staff consumption of the Central Standards Bureau of the Ministry of Economic Affairs Cooperative print 3 ... Stage 4 ... Fixing member 5 ... Guide rail 6 ... Glass substrate 7 ... Stage 10 ...... Control section 11 .... ..Y Scale 12 ...... X scale 13 ..... TV screen 14 ..... Illumination 41, 42 Orientation mechanism 43 ..... Cylinder 51, 52 ... Orientation mechanism 71 ...... .. Horizontal beam 81, 82… Inspection head 83… .. Objective lens 91, 92… Lens 93, 94… Camera 95, 96… Camera lens 97 … .. .. support member 100… epi-illumination 101 101… lens 102… mirror 103… objective lens 104, 105… mirror 106 &… .Lens 107 ... ... Check head 108 ... ... Glass substrate (please read the precautions on the back before drawing) This paper size applies to China National Standard (CNS) A4 (210X297 mm) 200302345 E6 F6 Ministry of Economic Affairs Central Bureau of Standards Cooperative printed 5. Detailed description of the invention: 109 ... base,:, 110 ... stage 111 ... horizontal beam 113, 114 ... camera 115, 116 ... camera 117 ... control unit 118 ... TV monitor 120 ... Supporting member 121 ... supporting shaft 122 ..... roller, 123 ... pulley 124 ... belt 125,126,127 ... reflection photoelectric sensor 200 ... mark 201 ... base 202,204 ... rail 203,205 ... Table 206 ... Glass substrate 207 ..... Arm 208,304 ... Guide 209,210 ... Optical head 211,212 ... TV camera 301,305 ... Stage 302 ... Glass substrate 303 ... Support frame 306 ... Horizontal beam 307 …… Microscope head 308 …… Transparent illumination (please read the precautions on the back before drawing)

、1T 本紙張尺度適用中國國家標準(CNS ) A4規格(210 X 297公釐) 200302345 E6 F6 五、發明之詳細説明: 309……組件 „ 310……物鏡 311......目鏡 (請先閱讀背面之注意事項再行繪製) 312……巨集照明 313……指標用照明 314……TV攝影機 315……TV顯示器 316……控制部 402……支撐構件 403……汽缸 404……活動部 405……固定部 406……連接構件 .41 1,412,421,422 ……機構 511……活動部 512……插梢 513……汽缸 514……活動部 4050......軸 經濟部中央標準局員工消費合作社印製 405 1……突出片 5111……縱板 5112……橫板 〔發明之最佳實施例〕 以下將參閱圖式說明本發明的實施型態。 圖一及圖二表示本發明第1實施型態之相關基板檢查裝 置的構成圖;圖一爲外觀立體圖;圖二爲側視圖。 此基板檢查裝置是在載物台(1)上,固定住裝載大型玻璃 10 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 200302345 E6 F6 五、發明之詳細説明: 基板(2)的載物台(固定載物台)(3);此載物台(3)則在規定位 置上,設有數個基板固定構件(4);這數個基板固定構件(4), 則以例如吸附方式支撐大型玻璃基板(2)。 (請先閲讀背面之注意事項再行繪製) 載物台(1)的左方與右方各設有導軌(6)、(6);這些導軌 (6) 、(6)上則設有,可朝Y向移動的橫跨門型檢查頭移動載物 台(門型手臂)(7)、載物台(3)。 此檢查頭移動載物台(7)的水平波束(71)上,則設有夾住 水平波束(71),以呈彼此背對貼合狀態的二個檢查頭(81)、 (82);這些檢查頭(81)、(82)則藉由馬達旋|專,而設置於水平 波束(71)內的滾珠導軌,可沿著夺平波束(71)朝X向移動;檢 查頭(81)、(82)可用於放大檢視各檢查頭(例如:缺陷或圖 樣)、測量圖樣形狀、執行彩色濾光片的分光測光之用。 檢查頭(81)、(82)上各有安裝物鏡(83)、(83);檢查頭(81)、 (82)上還各安裝了透過連結用透鏡(91)、(92)的TV攝影機 (93) 、 (94)。 檢查頭(81)、(82)上則設有,可移動到垂直方向(X向) 的檢查頭移動載物台的移動方向(Y向);檢查頭(81)、(82) 則夾住水平波束(71),以規定間隔配置同於檢查頭移動載物台 (7) 的移動方向。 經濟部中央標準局員工消費合作社印製 如圖二所示,檢查頭(81)、(82)的各物系光軸間距F,在 檢查頭(81)、(82)的排列方向(Y向)上,則設定了低於大型 玻璃基板(2)尺寸D的1/2以下。 檢查頭(81)、(82)上的構成要素爲,形成各載物台(3)上所 支撐的大型玻璃基板(2)圖像,且包含物鏡(83)、(83)的形成圖 像光學系、照明大型玻璃基板(2)的照明光學系、觀察大型玻 璃基板(2)圖像的觀察系、以及在大型玻璃基板(2)上進行對焦 的對焦裝置等。 11 本紙張尺度適用中國國家標準(CNS〉A4規格UlOX297公釐) 200302345 E6 F6 五、發明之詳細説明: 形成圖,像光學系擁有物鏡(83)的轉換功能(旋轉器 〜 (請先閲讀背面之注意事項再行繪製) (revolver))與對焦功能(自動對焦);照明光學系則擁有落射 照明功能;觀察系則具備上述TV攝影機(93)、(94);物鏡(83) 的轉換功能與對焦功能,則被做成電動式,可從控制部(10) 進行遠端操控。 各TV攝影機(93)、(94)則拍攝,由各檢查頭(81)、(82)所 觀察到的大型玻璃基板(2)觀察圖像,再輸出各影像信號;這 些影像信號則被傳輸到控制部(10)。 再者,如圖一所示,載物台(1)上設有Y標度(scale)(ll); 檢查頭移動載物台(7)上則設有X標度(12);控制部(10)則擁有 管理Y標度(11)及X標度(12)的位置座標、移動與控制檢查頭 移動載物台(7)及檢查頭(81)、(82)的功能。 此外,控制部(10)則輸入來自於TV攝影機(93)、(94)所輸 出的各影像信號,這些影像信號則擁有,選擇任一種或單方 或雙方影像信號(選擇手段),讓該影像信號的大型玻璃基板 (2)的觀察圖像,顯示於TV螢幕(顯示器裝置)(13)的功能。 當控制部(10)移動與控制檢查頭移動載物台(7)及檢查頭 (81)、(82),且針對檢查頭(81)、(81)的大型玻璃基板(2),讓 各觀察領域移動到XY向時,則具有讓這些觀察領域的邊界部 份相互重疊的功能。 經濟部中央標準局員工消費合作社印製 接下來,將說明上述構成之基板檢查裝置的動作;當大 型玻璃基板(2)被供應於載物台(3)時,大型玻璃基板(2)會藉由 數個基板固定構件(4)以進行定位,且對載物台(3)進行吸附與 支撐。 圖三表示檢查頭的移動狀態圖;控制部(10)則點亮透線照 明(14)、(14),且讓檢查頭移動載物台(7)及檢查頭(93)、(94), 移動到圖三所示的座標原點位置〇 ;接下來,控制部(10)則讓 檢查頭移動載物台(7)及檢查頭(81)、(82),移動到X-Y向再進 12 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 經濟部中央標準局員工消費合作社印製 200302345 E6 F6 !五、發明之詳細説明: 行控制,並移動檢查頭C81)、(82)的各觀察位置。 換言之,檢查頭移動載物台(7)是沿著導軌(6)、(6),直接 移動到Y向,各檢查頭(81)、(82)則沿著檢查頭移動載物台(7) 的水平波束(71),直接移動到X向。 此時,各檢查頭(81)、(82),則如圖四A、圖四B所示, 會在占整個大型玻璃基板(2)約1 /2領域所構成之各檢查頭的 觀察領域h、P2內進行移動;換言之,如圖四A所示,有一 端的檢查頭(81)物鏡(83),會在檢查頭觀察領域Pi內移動;並 如圖四B所示,另一端的檢查頭(82)物鏡(83),會在檢查頭觀 察領域P2內移動;換言之,檢查頭移動載夠台⑺及檢查頭 (81)、(82),會在整個大型玻璃基板(2)的1/2領域內進行移動。 再者,控制部(10)則移動與控制檢查頭移動載物台(7)及 檢查頭(81)、(82),讓檢查頭(81)、(82)的各光軸(物鏡(83)、 (83)的各光軸)在各觀察領域Pi、P2內進行移動時,會在這些 檢查頭觀察領域P!、P2的邊界上,彼此重疊部份領域P,、p2。 TV攝影機(93)則拍攝出,由檢查頭(81)的物鏡(83)所觀察 之檢查頭觀察領域P!內的大型玻璃基板(2)觀察圖像後,再輸 出影像信號;同時,TV攝影機(94)則拍攝出,由檢查頭(82) 的物鏡(83)所觀察之檢查頭觀察領域P2內的大型玻璃基板(2) 觀察圖像後,再輸出影像信號;這些影像信號則被傳輸到控 制部(10)。 控制部(10)則輸入由TV攝影機(93)、(94)所輸出的各影像 信號,再選擇這些影像信號中的任一個或單方或雙方影像信 號後,再將該影像信號的大型玻璃基板(2)的觀察圖像顯示於 TV螢幕(13)。再者,控制部(10)則輸入由TV攝影機(93)、(94) 所輸出的各影像信號,再將TV螢幕(13)分割成2個畫面,各 分割畫面上也可顯示出,各檢查頭觀察領域Pi、p2之大型玻 璃基板(2)的觀察圖像。 13 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) ----------— (請先閲讀背面之注意事項再行繪製) -、1Τ' 200302345 E6 F6 五、發明之詳細説明: (請先閲讀背面之注意事項再行繪製) 控制部(10)會讀取由其他巨集檢查裝置所掌握之大型玻 璃基板(2)的各缺陷座標資料,再基於Y標度(11)及X標度(12) 的數據,求出缺陷的位置座標,爲了讓檢查頭(81)光軸與缺陷 部互爲一致,而移動與控制檢查頭移動載物台(7)及檢查頭 (81)〇 藉由這種方式,讓缺陷部進入檢查頭(81)的物鏡(83)視野 內,再透過物鏡(83)放大此缺陷部;接下來,被放大的缺陷部 圖像,則透過TV攝影機(93)進行拍攝,再顯示於TV螢幕(13)。 光柵掃描整個大型玻璃基板(2)時,控制部(10)會讓檢查 頭移動載物台(7)移動到Y向的同時,讓檢.查頭(81)、(82)移動 到X、向,同樣的也可用檢查頭(81)、(82)的TV攝影機(93)、 (94),輸入已載入的放大影像資料。 完成此精密觀察後,若對控制部(10)執行規定的指示,檢 查頭移動載物台(7)及檢查頭(81)、(82)則會回到起始位置;.接 下來,則卸除由載物台(3)完成檢查的大型玻璃基板(2),再將 新的未檢查大型玻璃基板(2),安置於載物台(3)。 經濟部中央標準局員工消費合作社印製 在上述第1實施型態的基板檢查裝置上,則橫跨設有裝 載大型玻璃基板(2)的載物台(3)、以及在此載物台(3)所裝載的 大型玻璃基板(2)上,對載物台(3)設有可移動到Y向的檢查頭 移動載物台(7)、以及可讓此檢查頭移動載物台(7)的移動方向 朝垂直方向(X向)移動,而且還備有在各物鏡(83)、(83)位 於外側的狀態下,在同於檢查頭移動載物台(7)移動方向的規 定間隔上所配置的二個檢查頭(81)、(82)。 藉由這種方式,可將檢查頭移動載物台(7)及檢查頭 (81)、(82),收納於在載物台〇)的空間內設有導軌(5)的空間 內’還可將裝置主體尺寸控制在極限範圍內;具體而言,如 圖二及圖三所示,可將裝置主體的深度尺寸S,縮小到僅略大 於大型玻璃基板(2)的Y向尺寸D ;此外,在執行檢查時,檢 14 ^ 一 ^—— _______________________ 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 200302345 E6 F6 __ 五、發明之詳細説明: 查頭(81)、(82)不會突出於大型玻璃基板(2)的外側,两;,可實現 節省裝置的設置空間。 (請先閱讀背面之注意事項再行繪製) 如圖三所示,可將裝置主體寬幅尺寸S2,縮小到僅略大 於在大型玻璃基板(2)的寬幅,並施加2根檢查頭移動載物台 (7)的支柱寬幅。 如圖四A及圖四B所示,二個檢查頭(81)、(82),只要在 整個大型玻璃基板(2)之1/2的各檢查頭觀察領域P,、p2內進 行移動即可;因此,與具備一個檢查頭的情況相較之下,可 將檢查頭移動載物台(7)的Y向移動行程縮短1/2,還能縮短 測量的間隔時間;只要縮短此檢查頭移動攀物台(7)的移動距 離,以及在水平波束(71)上貼合二個檢查頭(81)、(82),再配 置成對稱狀態,就可針對檢查頭移動載物台(7)的水平波束 (71),改善檢查頭(81)、(82)的平衡,並可減輕對驅動系的負 荷。 換言之,在液晶顯示器進入量產階段的情況下,能縮短 檢查基板的所需測量間隔時間,還能抑制用戶所要求的設備 投資額,並符合小型裝置主體的要求。 經濟部中央標準局員工消費合作社印製 此外,還將二個檢查頭(81)、(82)的各物系光軸間距F, 設定爲大型玻璃基板(2)深度的尺寸1/2以下,並以彼此背對 貼合檢查頭(81)、(82)的方式予以配置;如此一來,二個檢查 頭(81)、(82),就不會大幅突出於大型玻璃基板(2)的外側,而 可確實觀察到整個大型玻璃基板(2)。 此外,讓二個檢查頭(81)、(82),在各檢查頭觀察領域p,、 P2內進行移動時,在這些觀察領域P!、P2的邊界上,彼此重 疊部份領域P!、P2後,也能確實檢查觀察頭領域P,、p2的邊 界。 圖五表示本發明第2實施型態之相關基板檢查裝置構成 圖;圖五則在同於圖一的部份上有標示出相同符號。 15 本紙張尺度適用中國國家標準(CNS ) A4規格(210 X 297公釐) 200302345 E6 F6___ 1五、發明之詳細説明: , 圖五表示設置1台TV攝影檄時的光學系構成圖;二個檢 (請先閲讀背面之注意事項再行繪製) 查頭(81)、(82)屬於相同構成;舉例來說,要說明以一個檢查 頭(8 1)爲例的構成情況時,這屬於設有落射用照明(1 〇〇),並 在此落射用照明(100)所輸出的落射用照明燈的光程上,設有 透過透鏡(10)的半透明反射鏡(half mirror)(102);在此半透明 反射鏡(102)的反射光程上,則設有物鏡(1〇3);在由此物鏡(1〇3) 透過半透明反射鏡(102)的透過光程上,則設有光程曲折反射 鏡(104);另一個檢查頭(82)的構成,則同於檢查頭(81),因而 省略說明。 這些檢查頭(81)、(82)的各光程曲折反射鏡(1〇4)、(104) 之間’則設有光程選擇反射鏡(選釋手段)(105);此光程選 擇反射鏡(105),會將各檢查頭(81)、(82)的任一個圖像,反射 到透過形成圖像鏡(106)而設置的1台TV攝影機(93);此TV 攝影機(93),.可設置於檢查頭(81)、(82)任一處的上方。 只要屬於這種構成方式,各檢查頭(81)、(81),就可讓各 落射用照明(100)所輸出的落射用照明光,透過透鏡(101)、(101) 入射到半透明反射鏡(102)、(102),再藉由此半透明反射鏡 (102)、(102)所反射的物鏡(103)、(103),照射於大型玻璃基板 (2)上。 經濟部中央標準局員工消費合作社印製 這種大型玻璃基板(2)上圖像,是從物鏡(103)、(103)入射 到半透明反射鏡(102)、(102),再透過此半透明反射鏡(102)、 (102),入射到光程曲折反射鏡(104)、(104),在此經由反射後 再入射到光程選擇反射鏡(105)。 可藉由旋轉光程選擇反射鏡(105),透過形成圖像透鏡 (106),讓檢查頭(107)、(108)的任一種圖像,朝一台TV攝影 機(93)反射;TV攝影機(93)則拍攝來自於入射大型玻璃基板(2) 面的圖像,再輸出該影像信號。 控制部(10)則輸入TV攝影機(93)所輸出的影像信號,處 16 本紙張尺度適用中國國家標準(CNS )A4規格(210 X 297公釐) 200302345 E6 F6 「五、發明之詳細説明: 理該影像信號後,在TV顯示器(13)顯示出大型玻璃基板2的 觀察圖像。 (請先閲讀背面之注意事項再行繪製) 只要依據上述第2實施型態,就可藉由光程選擇反射鏡 (105),透過形成圖像透鏡(106),讓檢查頭(81)、(82)的任一種 圖像,朝一台TV攝影機(93)入射,因此不須設置2台TV攝 影機,還能簡化裝置的構成。< 再者,在此已針對上述第1、第2實施型態,說明過設置 二個檢查頭(81)、(82)的情況,不過也可對檢查頭移動載物台 (7),移動設置由二個檢查頭(81)、(82)所構成的數個檢查頭; 舉例來說,設置2組由二個檢查頭(81)、(8?)所構成的檢查頭, 就可將一個檢查頭的觀察領域,縮小到整個大型玻璃基板(6) 約1/4領域,還能縮短測量間隔時間。 此外,上述基板檢查裝置,除了用於液晶顯示器的大型 玻璃基板(6)之外,也可適用於平面顯示器(FPD)玻璃基板、 彩色濾光片等大型玻璃基板的缺陷檢查上。 圖六表示本發明第3實施型態之相關基板檢查裝置的外 觀側視剖面圖;圖七表示正視圖;此基板檢查裝置,在FPD 生產線上設置,可在二個製程之間搬運大型玻璃基板的輸送 經濟部中央標準局員工消費合作社印製 在橫跨滾輪輸送帶(101)基座(109)左右兩端,設有門型檢 查頭移動載物台(門型手臂)(110);檢查頭移動載物台(110) 的水平波束111上則設有,透過支撐構件(105),並藉由馬達 與滾珠螺絲,可對輸送帶(101)的流動方向(Y向)呈直交移 動的二個檢查頭(103)、(104);此檢查頭(103)、(104),則對水 平波束(111),以一定間隔密合配置而呈;檢查頭(103)、(104), 爲了可調整雙方物鏡(106)、(107)的間隔Ly,而用線性馬達等 驅動裝置,對支撐構件(105)朝箭頭方向(Y向)移動的方式 所設置而成。 17 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 經濟部中央標準局員工消費合作社印製 200302345 E6 F6 五、發明之詳細説明: 爲了能在玻璃基板(1Q8)上,如圖十四所示放大四角標印 (200),而設置了 檢查頭(103)、(104);檢查頭(103)、(104)上, 則各安裝物鏡(106) ' (107),並透過相機鏡頭(113)、(114),安 裝TV攝影機(115)、(116);這些檢查頭(103)、(104),則如後 述內容所示,設有受輸送帶(101)所支撐的玻璃基板(108)圖 像,且包含物鏡(106)、(107)的形成影像光學系、照明玻璃基 板(108)的照明光學系、觀察大型玻璃基板(108)圖像的觀察 系、以及在大型玻璃基板(108)上進行對焦的對焦裝置等。 形成圖像光學系擁有物鏡(106)、(107)的轉換功能(旋轉 器)與對焦功能(自動對焦);照明光學系.則擁有落射照明功 能;觀察系則具備上述TV攝影機(115)、(116);物鏡(106)、 (107)的轉換功能與對焦功能,則被做成電動式,可從控制部 (117) 以進行遠端操控;各TV攝影機(115)、(116)則拍攝由各 檢查頭(103)、(104)所觀察到的大型玻璃基板(1〇8)觀察圖像, 再輸出各影像信號;這些影像信號則被傳輸到控制部(117)。 控制部(117)則擁有管理馬達編碼器的脈衝位置座標、以 及移動與控制檢查頭移動載物台(110)與檢查頭(103)、(104)的 功能、以及輸入各TV攝影機(115)、(11 6)所輸出的各影像信 號,再將該玻璃基板108圖像顯示於TV顯示器(螢幕裝置) (118) 的功能。 圖八表示滾輪輸送帶(101)的構成圖;滾輪輸送帶(101)的 支撐構件(120)、(120),可旋轉支撐圓柱型棒狀所構成的數個 滾輪支撐軸(121);各滾輪支撐軸(121),則受到形成規定間隔 的數個滾輪(122)所支撐;各滾輪支撐軸(121)的一端則貫穿支 撐構件(120),該端部上則有安裝皮帶輪(pulley)(123);各皮帶 輪(123)則掛有朝向Y向的皮帶(124)。 輸送帶(101),則藉由馬達所構成的驅動機構以旋轉末端 皮帶輪(123),再透過各皮帶輪(123),朝向Y向旋轉皮帶 18 本紙張尺度適用中國國家標準(CNS ) A4規格(210X 297公釐) (請先閱讀背面之注意事項再行繪製)、 1T This paper size is applicable to Chinese National Standard (CNS) A4 specification (210 X 297 mm) 200302345 E6 F6 5. Detailed description of the invention: 309 …… components 310 310 objective lens 311 ... eyepiece (please Read the notes on the back before drawing) 312 ... Macro lighting 313 ... Indicator lighting 314 ... TV camera 315 ... TV display 316 ... Control unit 402 ... Support member 403 ... Cylinder 404 ... Activities Department 405 ... Fixed section 406 ... Connecting member. 41 1,412,421,422 ... Organization 511 ... Moving section 512 ... Pipe 513 ... Cylinder 514 ... Moving section 4050 ... Axial Economy Department Central Standards Bureau staff 405 printed by the consumer cooperative 1 ... protruding piece 5111 ... vertical plate 5112 ... horizontal plate [best embodiment of the invention] The following describes the embodiment of the present invention with reference to the drawings. Figures 1 and 2 show the first embodiment of the present invention. Figure 1 shows the structure of the relevant substrate inspection device; Figure 1 is a perspective view of the appearance; Figure 2 is a side view. This substrate inspection device is fixed on the stage (1) and loaded with large glass. National standard (CNS) A4 specification (210X297 mm) 200302345 E6 F6 5. Detailed description of the invention: The stage (fixed stage) (3) of the substrate (2); this stage (3) is at the specified position There are several substrate fixing members (4); these several substrate fixing members (4) support large glass substrates (2) by, for example, suction. (Please read the precautions on the back before drawing) Stage ( 1) There are guide rails (6) and (6) on the left and right sides respectively; these guide rails (6) and (6) are provided with a cross-gate inspection head moving stage that can move in the Y direction (Gantry arm) (7), stage (3). This inspection head moves the horizontal beam (71) of the stage (7), and there is a clamping horizontal beam (71) to face away from each other Two inspection heads (81) and (82) in the fitted state; these inspection heads (81) and (82) are rotated by a motor, and the ball guides set in the horizontal beam (71) can be moved along The flattening beam (71) moves in the X direction; the inspection heads (81) and (82) can be used to magnify and inspect each inspection head (for example, a defect or a pattern), measure the shape of the pattern, and execute the color filter. For spectrophotometry, the inspection heads (81) and (82) are respectively equipped with objective lenses (83) and (83); the inspection heads (81) and (82) are also equipped with transmission connection lenses (91) and (82). TV cameras (93) and (94) of 92). The inspection heads (81) and (82) are provided with the inspection head moving direction (Y direction) which can be moved to the vertical direction (X direction). ; The inspection heads (81) and (82) sandwich the horizontal beam (71) and arrange the movement direction of the inspection head moving stage (7) at a predetermined interval. Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs as shown in Figure 2. The optical axis distance F of each system of the inspection heads (81) and (82) is in the direction of the arrangement of the inspection heads (81) and (82). ), It is set to less than 1/2 of the size D of the large glass substrate (2). The constituent elements on the inspection heads (81) and (82) are to form an image of a large glass substrate (2) supported on each stage (3), and to include formed images of the objective lenses (83), (83). An optical system, an illumination optical system that illuminates a large glass substrate (2), an observation system that observes an image of the large glass substrate (2), and a focusing device that focuses on the large glass substrate (2). 11 This paper size applies to Chinese national standards (CNS> A4 specification UlOX297 mm) 200302345 E6 F6 5. Detailed description of the invention: Form the image, like the optical system has the conversion function of the objective lens (83) (rotator ~ (Please read the back first) (Revolver)) and focusing function (autofocus); the illumination optics system has epi-illumination function; the observation system has the above-mentioned TV camera (93), (94); objective lens (83) conversion function And the focus function is made electric and can be remotely controlled from the control unit (10). The TV cameras (93) and (94) take pictures, observe the images from the large glass substrate (2) observed by the inspection heads (81), (82), and output each image signal; these image signals are transmitted Go to the control section (10). Furthermore, as shown in FIG. 1, a Y scale (ll) is provided on the stage (1); an X scale (12) is provided on the inspection head moving stage (7); a control section (10) It has the functions of managing the position coordinates of the Y scale (11) and X scale (12), moving and controlling the inspection head, moving the stage (7), and the inspection heads (81), (82). In addition, the control unit (10) inputs each image signal output from the TV cameras (93) and (94), and these image signals have, and select any one or one or both image signals (selection means), so that the image The observation image of the large glass substrate (2) of the signal is displayed on the TV screen (display device) (13). When the control unit (10) moves and controls the inspection head to move the stage (7) and inspection heads (81), (82), and for the large glass substrate (2) of the inspection heads (81), (81), When the observation area moves to the XY direction, it has the function of making the boundary parts of these observation areas overlap each other. Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs Next, the operation of the substrate inspection device configured as described above will be explained. When the large glass substrate (2) is supplied to the stage (3), the large glass substrate (2) A plurality of substrates are used to fix the member (4) for positioning, and the stage (3) is adsorbed and supported. Figure 3 shows the moving state of the inspection head; the control unit (10) lights up the translucent illumination (14), (14), and moves the inspection head to the stage (7) and inspection heads (93), (94) , Move to the coordinate origin position shown in Figure 3; Next, the control unit (10) moves the inspection head to the stage (7) and inspection heads (81) and (82), and then moves to the XY direction and then advances. 12 This paper size applies to China National Standard (CNS) A4 (210X297 mm) Printed by the Employees' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs, 200302345 E6 F6! V. Detailed description of the invention: Line control, and moving the inspection head C81), ( 82). In other words, the inspection head moving stage (7) moves directly to the Y direction along the guide rails (6), (6), and each inspection head (81), (82) moves the stage (7) along the inspection head. ) Of the horizontal beam (71), move directly to the X direction. At this time, each of the inspection heads (81) and (82), as shown in Figs. 4A and 4B, will occupy the observation area of each inspection head constituted by about 1/2 of the entire large glass substrate (2). h, P2 move; in other words, as shown in Figure 4A, the inspection head (81) objective lens (83) at one end will move within the inspection area Pi of the inspection head; and as shown in Figure 4B, the inspection at the other end The objective lens (83) of the head (82) moves within the inspection area P2 of the inspection head; in other words, the inspection head moves enough to carry the stage and inspection heads (81), (82), and it will move 1 Move within the / 2 field. In addition, the control unit (10) moves and controls the inspection head to move the stage (7) and the inspection heads (81) and (82) so that each optical axis of the inspection heads (81) and (82) (objective lens (83 ), (83) each optical axis) When moving within each observation area Pi, P2, on the boundary of these inspection head observation areas P !, P2, some areas P ,, p2 overlap each other. The TV camera (93) captures the large glass substrate (2) in the inspection head observation area P! Observed by the objective lens (83) of the inspection head (81) and outputs the image signal after observing the image; at the same time, the TV The camera (94) captures the large glass substrate (2) in the inspection head observation area P2 observed by the objective lens (83) of the inspection head (82), and then outputs image signals after observing the images; these image signals are Transmission to the control unit (10). The control unit (10) inputs the video signals output by the TV cameras (93) and (94), and then selects one or one or both of these video signals, and then the large glass substrate of the video signals (2) The observation image is displayed on the TV screen (13). In addition, the control unit (10) inputs the video signals output by the TV cameras (93) and (94), and divides the TV screen (13) into two screens. Each of the divided screens can also be displayed. Observation image of the large glass substrate (2) in the inspection area Pi, p2. 13 This paper size applies to China National Standard (CNS) A4 specification (210X297 mm) ------------ (Please read the notes on the back before drawing)-, 1T '200302345 E6 F6 V. Detailed description of the invention: (Please read the precautions on the back before drawing) The control unit (10) will read the defect coordinate data of the large glass substrate (2) grasped by other macro inspection devices, and then based on the Y standard The data of degree (11) and X scale (12) are used to find the coordinates of the position of the defect. In order to make the optical axis of the inspection head (81) coincide with the defect part, move and control the inspection head to move the stage (7) And inspection head (81). In this way, the defective part is brought into the field of view of the objective lens (83) of the inspection head (81), and the defective part is enlarged through the objective lens (83). Next, the enlarged defect part is The image is shot through a TV camera (93) and displayed on a TV screen (13). When raster scanning the entire large glass substrate (2), the control unit (10) will move the inspection head to the Y-direction while moving the inspection stage (7) to the inspection head. The inspection heads (81), (82) will move to X, You can also use the TV cameras (93) and (94) of the inspection heads (81) and (82) to input the loaded magnified image data. After the precise observation is completed, if the control unit (10) executes the prescribed instructions, the inspection head moves the stage (7) and the inspection heads (81), (82) will return to the starting position; then, The large glass substrate (2) that has been inspected by the stage (3) is removed, and a new large glass substrate (2) that is not inspected is placed on the stage (3). Printed on the substrate inspection device of the first embodiment described above by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs, a stage (3) on which a large glass substrate (2) is mounted and a stage ( 3) On the large glass substrate (2) loaded, the stage (3) is provided with an inspection head moving stage (7) that can be moved to the Y direction, and the inspection head can move the stage (7) ) Moves in the vertical direction (X direction), and it also provides a predetermined interval in the same direction as the inspection head moving stage (7) with the objective lenses (83) and (83) on the outside. The two inspection heads (81) and (82) configured above. In this way, the inspection head can move the stage (7) and inspection heads (81), (82) in a space provided with a guide rail (5) in the space of the stage 0). The size of the device body can be controlled within the limit; specifically, as shown in Figures 2 and 3, the depth dimension S of the device body can be reduced to only slightly larger than the Y dimension D of the large glass substrate (2); In addition, when performing inspection, inspection 14 ^ ^ —— _______________________ This paper size applies Chinese National Standard (CNS) A4 specifications (210X297 mm) 200302345 E6 F6 __ 5. Detailed description of the invention: Check head (81), ( 82) It will not protrude from the outside of the large glass substrate (2), two; can save the installation space of the device. (Please read the precautions on the back before drawing) As shown in Figure 3, you can reduce the width S2 of the device body to only slightly larger than the width on the large glass substrate (2), and apply 2 inspection heads to move The pillars of the stage (7) are wide. As shown in Figure 4A and Figure 4B, as long as the two inspection heads (81) and (82) are moved within the inspection areas P, and p2 of 1/2 of the entire large glass substrate (2), Yes; therefore, compared with the case with one inspection head, the Y-movement stroke of the inspection head moving stage (7) can be shortened by 1/2, and the measurement interval can also be shortened; as long as the inspection head is shortened The moving distance of the mobile climbing platform (7), and two inspection heads (81) and (82) attached to the horizontal beam (71), and then configured in a symmetrical state, the stage (7) can be moved for the inspection head. ) Horizontal beam (71), improving the balance of the inspection heads (81), (82), and reducing the load on the drive train. In other words, when the liquid crystal display enters the mass production stage, the measurement interval required to inspect the substrate can be shortened, the amount of equipment investment required by the user can be suppressed, and the requirements of the small device body can be met. Printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs. In addition, the optical axis distance F of each system of the two inspection heads (81) and (82) is set to 1/2 or less of the depth of the large glass substrate (2). And arrange them in such a way that the inspection heads (81) and (82) are attached to each other; therefore, the two inspection heads (81) and (82) will not protrude significantly from the large glass substrate (2). Outside, and the entire large glass substrate (2) can be definitely observed. In addition, when the two inspection heads (81) and (82) are moved in the inspection areas p, and P2 of each inspection head, the areas P !, P2 overlap each other on the boundary of these observation areas P !, P2. After P2, the boundaries of the observation head areas P, and p2 can also be checked. Fig. 5 shows the structure of a related substrate inspection device according to the second embodiment of the present invention; Fig. 5 shows the same symbols on the same parts as in Fig. 1. 15 This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 200302345 E6 F6___ 1 Detailed description of the invention:, Figure 5 shows the composition of the optical system when a TV camera is set up; two Inspection (please read the precautions on the back before drawing) The check heads (81) and (82) belong to the same structure; for example, to explain the configuration using an inspection head (8 1) as an example, this is a design An epi-illumination (100) is provided, and a half mirror (102) through a lens (10) is provided on the optical path of the epi-illumination lamp output by the epi-illumination (100). On the reflected optical path of this translucent mirror (102), an objective lens (103) is provided; on the transmitted optical path of the objective lens (103) through the semi-transparent mirror (102), then An optical path zigzag mirror (104) is provided; the structure of the other inspection head (82) is the same as that of the inspection head (81), so the description is omitted. These inspection heads (81), (82) are provided with optical path selection mirrors (104), (104) between the optical path tortuous mirrors (104), (104); this optical path selection The reflecting mirror (105) reflects any of the images of each of the inspection heads (81) and (82) to a TV camera (93) provided through the image mirror (106); the TV camera (93 ), Can be set above any of the inspection heads (81), (82). As long as this configuration method is adopted, each inspection head (81) and (81) can allow the epi-illumination illumination light output by each epi-illumination illumination (100) to pass through the lenses (101) and (101) and enter the translucent reflection The mirrors (102), (102), and the objective lenses (103), (103) reflected by the translucent mirrors (102), (102) are irradiated on the large glass substrate (2). The image printed on this large glass substrate (2) by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs is incident from the objective lenses (103) and (103) to the semi-transparent mirrors (102) and (102), and then transmitted through the semi-transparent mirrors (102). The transparent mirrors (102) and (102) are incident on the optical path meandering mirrors (104) and (104), and are then reflected and then incident on the optical path selection mirror (105). By rotating the optical path selection mirror (105), the image lens (106) is formed to reflect any of the images of the inspection heads (107) and (108) toward a TV camera (93); the TV camera ( 93) An image is taken from the surface (2) of the incident large glass substrate, and the image signal is output. The control unit (10) inputs the image signal output from the TV camera (93) and applies 16 paper sizes to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 200302345 E6 F6 "Fifth, the detailed description of the invention: After processing this image signal, the TV monitor (13) displays the observation image of the large glass substrate 2. (Please read the precautions on the back before drawing) As long as it is based on the second embodiment, the optical path can be used. The mirror (105) is selected, and the image lens (106) is formed to allow any image of the inspection heads (81) and (82) to be incident on a TV camera (93). Therefore, it is not necessary to install two TV cameras. The structure of the device can also be simplified. ≪ Furthermore, the case where two inspection heads (81) and (82) are provided has been described for the first and second embodiments described above, but the inspection heads can also be moved. The stage (7) is provided with a plurality of inspection heads composed of two inspection heads (81) and (82). For example, two groups of inspection heads (81) and (8?) Are provided. The inspection head can reduce the observation area of one inspection head to the entire large glass. The plate (6) can reduce the measurement interval time by about 1/4 area. In addition, the above substrate inspection device can be used for flat-panel display (FPD) glass substrates in addition to large glass substrates (6) for liquid crystal displays. For large glass substrates, such as color filters, defect inspection. Figure 6 shows the external side sectional view of the related substrate inspection device of the third embodiment of the present invention; Figure 7 shows the front view; this substrate inspection device is in the FPD production line It is installed on the top and can transport large glass substrates between two processes. It is printed on the left and right ends of the roller conveyor belt (101) and the base (109) by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. It has door-type inspection heads. The moving stage (door-type arm) (110); the inspection head is provided on the horizontal beam 111 of the moving stage (110). Through the support member (105), the conveyor belt can be adjusted by the motor and ball screws. The two inspection heads (103) and (104) moving orthogonally in the flow direction (Y) of (101); the inspection heads (103) and (104) are closely aligned with the horizontal beam (111) at a certain interval Configuration is presented; check (103) and (104) are provided to adjust the distance Ly between the objective lenses (106) and (107) on both sides, and a driving device such as a linear motor is used to move the support member (105) in the direction of the arrow (Y direction). 17 This paper size applies to Chinese National Standard (CNS) A4 (210X297 mm) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs, 200302345 E6 F6 5. Detailed description of the invention: In order to be able to be printed on glass substrate (1Q8) As shown in FIG. 14, the four-corner mark (200) is enlarged, and the inspection heads (103) and (104) are provided. On the inspection heads (103) and (104), each objective lens (106) '(107) is installed. , And through the camera lens (113), (114), TV cameras (115), (116) are installed; these inspection heads (103), (104), as shown below, are equipped with a conveyor belt (101) An image of the supported glass substrate (108), and an image forming optical system including an objective lens (106), (107), an illumination optical system that illuminates the glass substrate (108), and an observation system that observes an image of the large glass substrate (108) And focusing device for focusing on large glass substrate (108) . The image forming optical system has the conversion function (rotator) and focusing function (autofocus) of the objective lenses (106) and (107); the illumination optical system has the epi-illumination function; the observation system has the above-mentioned TV camera (115), (116); The conversion function and focusing function of the objective lens (106), (107) are made electric, which can be remotely controlled from the control unit (117); each TV camera (115), (116) is The images of the large glass substrate (108) observed by the inspection heads (103) and (104) are captured, and then each image signal is output; these image signals are transmitted to the control unit (117). The control unit (117) has the functions of managing the pulse position coordinates of the motor encoder, the function of moving and controlling the inspection head, the moving stage (110), the inspection heads (103), (104), and input to each TV camera (115). , (11 6) The function of displaying the image of the glass substrate 108 on a TV display (screen device) (118) for each image signal output. Figure 8 shows the configuration diagram of the roller conveyor belt (101); the roller conveyor belt (101) support members (120), (120), rotatably support a plurality of roller support shafts (121) formed by cylindrical rods; each The roller support shaft (121) is supported by a plurality of rollers (122) formed at a predetermined interval; one end of each of the roller support shafts (121) penetrates the support member (120), and a pulley is mounted on the end (123); Each pulley (123) is hung with a belt (124) facing the Y direction. The conveyor belt (101) rotates the end pulley (123) by a driving mechanism composed of a motor, and then rotates the belt 18 in the Y direction through each pulley (123). 210X 297 mm) (Please read the notes on the back before drawing)

200302345 E6 F6 !五、發明之詳細説明· (請先閱讀背面之注意事項再行繪製) (124) ;由於是藉用這種方式,讓各皮/帶輪(123)朝Y向旋轉, 因此會隨著各滾輪支撐軸(121)的旋轉,讓各滾輪(122)朝Y向 旋轉,並將數個滾輪(122)上所搭載的玻璃基板(108)搬運到Y 向。 輸送帶(101)上游入口附近的基座(109)上,設有偵測出玻 璃基板(108)送達的反射型光電傳感器(photo sensor)(125);在 輸送帶101下游出口附近的基座(109)上,沿著玻璃基板(108) 的行進方向(Y向),設有二個可偵測出送達玻璃基板(108) 的反射型光電傳感器(126)、(127)。 此外,在輸送帶(101)的上游與下游,則設有讓流過來的 玻璃基板(108),各朝Y向定向的定向機構(41)、(42);定向機 構(41)、(42)則各包含二個機構(411)、(412)及(421)、(422), 機構(411)、(412)及機構(421)、(422),則從各支撐構件(120)、 (120)之間的中心,被配置成等間隔狀態;各機構(411)、(412) 及(421)、(422),則包含後述的汽缸(43)等。 輸送帶(101)的兩端則沿著支撐構件(120)、(120),設有讓 送達的玻璃基板(108),各朝X向進行定向的定向機構(51)、 (52);各定向機構(51)、(52),則如後述內容一樣包含活動板 (511)、二個插梢(pin)(512)、(512)、二組汽缸(513)、(513)等。 再者,藉由控制部(117)控制上述馬達、光電傳感器 經濟部中央標準局員工消費合作社印製 (125) 、(126)、(127)、定向機構(41)、(42)、(51)、(51)之各汽 缸等。 圖九表示定向機構(41)、(42)之各機構(411)、(412)、 (421)、(422)的構成側視圖;圖九機構是在基座(109)上,安裝 支撐驅動部(410)的支撐構件(402);支撐構件(402),則被立設 於形成板狀的基座(109)上,在該側面上則固定了構成驅動部 (410)的汽缸(403);汽缸(403)則被安裝成可讓該活動部(404) 朝向Y向移動的型態。 19 本紙張尺度適用中國國家標準(CNS ) A4規格(210父297公^ 200302345 E6 F6 __ 五、發明之詳細説明: (請先閲讀背面之注意事項再行繪製) 此外,支撐構件(402)上端側面,則支撐著用以固定r玻璃 基板(108)邊緣的可轉動固定部(405);而且汽缸(403)的活動部 (404)前端,則有安裝連接構件(406),該連接構件(406)與固定 部(405),則以可相互轉動的方式所連接而成。 當輸送帶(101)上沒有玻璃基板(108)時’各機構(411)、 (412)、(421)、(422)的活動部(404),則被收納於汽缸(403)內, 固定部(405)的突出片(4051),則自玻璃基板(108)的通過面a 朝下方疏散。 圖十表示構成定向機構(51)、(5 2)的側視圖;圖十的機 構,在基座(109)上並列裝載二組汽缸(513).;活動板(511)的剖 面則形成L型,該P板(5111)上則有安裝各汽缸(513)的活動 部(414)前端;此外,活動板(5 11)的橫板(5 112)上,則朝Y向 保有規定間隔,並受到可轉動的二個插梢(512)所支撐。 當輸送帶(101)上沒有玻璃基板(108)時,各定向機構 (51)、(52)的活動部(514)、(514),則從各汽缸(513)、(5 13)內 押出,且具備插梢(512)、(5 12)的各活動板(511)、(511),則疏 散到各支撐構件(120)、(120)。 接下來,將說明上述裝置的動作。 經濟部中央標準局員工消費合作社印製 在上游製程中完成處理的玻璃基板(108),是透過輸送帶 搬運到輸送帶(101)的上游入口交給輸送帶(101);此玻璃基板 (108),是藉由上述馬達驅動讓輸送帶(1〇1)流入γ向,當前端 到達光電傳感器(125)的位置後,光電傳感器就會偵測已送達 之玻璃基板(108)的輸送帶(101)。 當玻璃基板(108)前端到達光電傳感器(126)位置後,光電 傳感器(126)則偵測送達的玻璃基板(1〇8);當光電傳感器(126) 偵測到已送達的玻璃基板(108)後,控制部(117)就會讓上述驅 動馬達減速;藉由這種方式,讓玻璃基板(108)朝Y向減速; 接下來,當玻璃基板(108)前端到達光電傳感器(127)的位置 20 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公楚) 200302345 E6 F6__ 五、發明之詳細説明_· (請先閱讀背面之注意事項再行繪製) 後,光電傳感器(127)就會偵測送達的玻璃基板(108);當光電 傳感器(127)偵測到已送達玻璃基板(108)後,控制部(117)就會 讓上述馬達停止驅動;藉由這種方式,讓玻璃基板(108)停止 於輸送帶(101)中央附近的檢查位置。 控制部(117)會驅動定向機構(51)、(52);此時,控制部(117) 會將定向機構(51)、(52)的各活動部(514),同時拉回汽缸(513) 內;各定向機構(51)、(52),則讓各活動板(511)、(511),朝輸 送帶(101)中央移動到X向;如此一來,玻璃基板(108)的兩側 邊緣,便藉由各插梢(5 12),押入輸送帶(101)的中央;其結果, 玻璃基板(4)便定位於輸送帶(101)的X向正.中央處。 控制部(117),則驅動定向撵構(41)、(42);此時,控制部 (1Π)會將機構(411)、(412)、(421)、(422)的各活動部(404), 同時從汽缸(403)內押出;如此一來,各機構(411)、(412)、 (421)、(422),則隨著移動到連接構件(406)的前方,讓固定部 (405)在軸(4050)周圍轉動,各固定部(405)的突出片(4051)則以 幾乎和通過面(a)成直交狀態下立起;玻璃基板(108)的前端, 則藉由機械(421)、(422)的各突出片(4051),押往上游端的同 p,後緣則藉由機械(421)、.(422)的各突出片(4051)押往下游 端;此時,鄰接玻璃基板(108)各端緣的各插梢(512),則隨著 玻璃基板(108)的Y向移動而旋轉;其結果,玻璃基板(1〇8)則 被定位於輸送帶(101)上的X向與Y向正中央處。 經濟部中央標準局員工消費合作社印製 接下來,檢查人員對控制部(117)採取規定操作後,控制 部(117)則沿著檢查頭移動載物台(110),讓檢查頭(1〇3)、(104) 朝X向移動,讓各檢查頭(103)、(104)物鏡(106)、(107)位於, 對輸送帶(101)流向呈左側位置玻璃基板(108)之各標印 (200)、(200)上;再者,物鏡(1〇6)與物鏡(107)的光軸間隔,則 事先予以調整’以便於符合並列於Y向之二個標印(200)、(200) 之間的距離;並在控制部(117)輸入,玻璃基板(108)四角處所 21 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公蝥) 200302345 E6 F6 五、發明之詳細説明·· 形成之四個標印(200)的Y向間隔尺寸Ly與X向間隔尺寸Lx。 TV攝影機(11 5)則拍攝檢查頭(103)物鏡(106)所觀察到的 上游端標印(200)圖像,再輸出該影像信號;同時,TV攝影機 (請先閲讀背面之注意事項再行繪製) (116) 則拍攝檢查頭(104)物鏡(107)所觀察到的下游端標印(200) 圖像,再輸出該影像信號;這些影像信號則被送往控制部 (117) 〇 控制部(11 7)則輸入各TV攝影機(115)、(11 6)所輸出的各 影像信號後,在TV顯示器(11 8)上顯示出各標印200的觀察圖 像;檢查人員則檢視TV顯示器(11 8)的影像,檢查各標印(200) 上有無發生焦點模糊、缺陷等缺陷或尺寸的偏差。 接下來,檢查人員對控制部(117)採取規定操作後,控制 部(117)則沿著檢查頭移動載物台(110),讓檢查頭(103)、(104) 只朝事先設定的X向間隔尺寸Lx移動,並讓各檢查頭(103)、 (104)的物鏡(106)、(107)位於,對輸送帶(101)流向呈右側位置 之玻璃基板108的各標印(200)、(200)上。 TV攝影機(115)則拍攝檢查頭(103物鏡(106)所觀察到的 上游端標印(200)圖像,再輸出該影像信號;同時,TV攝影機 (11 6)則拍攝檢查頭(104)物鏡(107)所觀察到的下游端標印(200) 圖像,再輸出該影像信號;這些影像信號則被送往控制部 (117)。 控制部(117)則輸入各TV攝影機(115)、(116)所輸出的各 經濟部中央標準局員工消費合作社印製 影像信號後,在TV顯示器(118)上顯示出各標印(200)的觀察 圖像;檢查人員則檢視TV顯示器(11 8)的影像,檢查各標印 (200)上有無發生焦點模糊、缺陷等缺陷或尺寸的偏差。 接下來,當玻璃基板(108)上的所有標印皆無異常時,檢 查人員對控制部(117)採取規定操作後,控制部(117)則驅動定 向機構(51)、(52);此時,控制部(117)將機構(51)、(52)的各 活動部(514),自汽缸(5 13)內押出;各定向機構(51)、(52)則讓 22 本紙張尺度適用中國國家標準(CNS ) A4規格(210 X 297公釐) 200302345 E6 F6 ___ 五、發明之詳細説明·· 各活動板(511)、(511),朝支撐構件(120)、(120)端移動到X — 向;再從玻璃基板(108)的兩測端疏散各插梢(512。 (請先閱讀背面之注意事項再行繪裂) 接下來,控制部(117),則驅動定向機構(41)、(42);此時’ 控制部(117)會將機構(411)、(412)、(421)、(422)的各活動部 (404),同時拉回到汽缸(403)內;如此一來,各機構(411)、 (412)、(421)、(422),則隨著移動到連接構件(406)的後方,讓 固定部(405)在軸(4050)周圍轉動,各固定部(405)的突出片 (405 1)則自通過面(a)疏散到下方。 控制部(117)則再度驅動上述馬達;玻璃基板(108)則讓輸 送帶(101)流入下游端的製程。 . 再者,當玻璃基板(108)上的任一個標印有異常時,檢查 人員則自輸送帶(101)撤除玻璃基板(108)。 此外,檢查尺寸不同的玻璃基板108上的標印時,則讓 檢查頭(103)、)104)移動到到支撐構件(105)的規定距離,控制 部(117)可藉由輸入該玻璃基板(108)四個標印(200)之輸送帶 (101)上的位置資料予以因應。 此外,只要事先在控制部(117)的記憶體上,登錄來自於 設計資料的各種玻璃基板(108)上的標印X向間隔尺寸與Y向 間隔尺寸,將玻璃基板的種類資料輸入到控制部(117),就可 自動設定各檢查頭(103)、(104)物鏡(106)、(107)之Y向間隔, 與檢查頭(103)、(104)之X向移動距離。 經濟部中央標準局員工消費合作社印製 根據上述第3實施型態得知,可在將玻璃基板搬入製程 的滾輪輸送帶上,檢查出玻璃基板在待機時的定位標印,而 且還可檢查出用二個檢查頭同時定位的標印,因此可縮短處 理時間;此外,只要事先將二個檢查頭設定於相同方向(X 向)以控制距離,就可在四角標印上輕鬆定位各檢查頭。 再者,只要調整二個檢查頭的間隔與X向移動距離,就 可因應各種尺寸的玻璃基板。 23 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 200302345 E6 F6 ____ 五、發明之詳細説明: . 將滾輪輸送帶所送達的玻璃基板,定位於檢查位置上, 就可將二個檢查頭正確定位於各標印上。 (請先閲讀背面之注意事項再行繪製) 換言之,根據上述第3實施型態的基板檢查裝置得知, 可用低價的構成方式,在短時間內藉由滾輪輸送帶,對上游 製程送來的標的基板,進行至少四角標印的缺陷判定或測量 尺寸,讓前述標的基板可流入下游製程。 此外,在滾輪輸送帶上定位標的基板後,就可讓二個檢 查頭正確定位於各標的標印上;再者,只要調整二個檢查頭 水平波束方向的移動距離、及二個檢查頭之間的間隔,就可 支援各種尺寸的基板。 . 再者,上述玻璃基板上的四角標印、檢查,不侷限於上述 第3實施型態所構成的基板檢查裝置,也可用上述第1、第2 實施型態,由可移動檢查頭移動載物台所構成的基板檢查裝 置予以實施。. 此時,爲了得以調整雙方物鏡(83)、(83)的間隔,可用線 性馬達等驅動裝置,將檢查頭(81)、(82)設置成,對水平波束 (71)呈箭頭方向(Y向)移動的狀態;藉由這種方式,讓標印 Y向間隔尺寸與物鏡(83)、(83)間隔尺寸互爲一致,還可檢查 並列於Y向的二個標印;接下來,讓檢查頭(81)、(82)朝X向 的規定距離移動,就可檢查二個標印。 經濟部中央標準局員工消費合作社印製 圖十一表示構成本發明第4實施型態之相關基板檢查裝 置的外觀立體圖;圖十一付有部份同於圖一的符號。 檢查頭移動載物台(7)的水平波束(71)上,設有支撐構件 (97),此支撐構件(97)的兩端,則以夾住水平波束(71)的狀態, 安裝了用作各檢查頭之用的TV攝影機(93)、(94) ; TV攝影機 (93)、(94)上,則有安裝各攝影鏡疼(95)、(96);具備TV攝影 機(93)、(94)的支撐構件(97),則透過被設置於水平波束(71) 下方的導軌,可藉由馬達呈現一體型後,沿著水平波束(71) 24 本紙張尺度適用中國國家標準(CNS ) A4規格(210 X 297公嫠) 200302345 E6 F6 五、發明之詳細説明: 移動到X向。 / - ' 、 在上述第4實施型態的基板檢查裝置上,以同於檢查頭 移動載物台(7)之移動方向的規定間隔,設置二個TV攝影機 (93)、(94)後,就可拍攝玻璃基板表面的任一個部份。 再者,本發明不僅限於上述各實施型態,只要在不變更 要旨的範圍內都可適當變形後再實施。 〔產業上利用的可能性〕 本發明用以提供,得以縮短檢查基板所需之測量間隔時 間、及做成輕薄短小型裝置主體的基板檢查裝置。 經濟部中央標準局員工消費合作社印製 (請先閲讀背面之注意事項再行繪製) 25 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐)200302345 E6 F6! V. Detailed description of the invention · (Please read the precautions on the back before drawing) (124); Because this method is used, each leather / belt wheel (123) rotates in the Y direction, so As each roller support shaft (121) rotates, each roller (122) is rotated in the Y direction, and the glass substrate (108) mounted on the plurality of rollers (122) is carried in the Y direction. The base (109) near the upstream entrance of the conveyor belt (101) is provided with a reflective photo sensor (125) that detects the arrival of the glass substrate (108); the base near the downstream exit of the conveyor belt 101 On (109), two reflective photoelectric sensors (126) and (127) are provided along the travel direction (Y direction) of the glass substrate (108) and can detect the glass substrate (108). In addition, on the upstream and downstream of the conveyor belt (101), there are orientation mechanisms (41) and (42) for allowing the glass substrate (108) to flow over, and orientations in the Y direction; orientation mechanisms (41), (42) ) Each includes two mechanisms (411), (412), (421), (422), and (411), (412) and (421), (422), then each support member (120), The centers between (120) are arranged at equal intervals; each mechanism (411), (412), (421), (422) includes a cylinder (43) and the like described later. Both ends of the conveyor belt (101) are provided along the supporting members (120), (120), and glass substrates (108) are provided for delivery, and orientation mechanisms (51), (52) are oriented in the X direction; The orientation mechanisms (51) and (52) include a movable plate (511), two pins (512), (512), two sets of cylinders (513), and (513), as described later. In addition, the control unit (117) controls the above-mentioned motors, photoelectric sensors, and prints (125), (126), (127), orientation agencies (41), (42), (51) ), Each cylinder of (51), etc. Figure 9 shows the side view of the components (411), (412), (421), and (422) of the orientation mechanism (41) and (42); Figure 9 shows the structure on the base (109), which supports the drive The supporting member (402) of the section (410); the supporting member (402) is erected on a base (109) formed in a plate shape, and a cylinder (403) constituting the driving section (410) is fixed on the side surface. ); The cylinder (403) is installed in a shape that allows the movable part (404) to move in the Y direction. 19 This paper size is in accordance with Chinese National Standard (CNS) A4 specifications (210 fathers 297 males 20032003345 E6 F6 __ V. Detailed description of the invention: (Please read the precautions on the back before drawing) In addition, the upper end of the supporting member (402) On the side, a rotatable fixing portion (405) for fixing the edge of the glass substrate (108) is supported; and at the front end of the movable portion (404) of the cylinder (403), there is a mounting connection member (406), which 406) and the fixed portion (405) are connected in a mutually rotatable manner. When the glass substrate (108) is not provided on the conveyor belt (101), the respective mechanisms (411), (412), (421), The movable part (404) of (422) is stored in the cylinder (403), and the protruding piece (4051) of the fixed part (405) is evacuated downward from the passing surface a of the glass substrate (108). Figure 10 shows The side view of the orientation mechanism (51), (5 2); the mechanism of Fig. 10, two sets of cylinders (513) are mounted side by side on the base (109); the cross section of the movable plate (511) is formed into an L-shaped, The P plate (5111) has the front end of the movable part (414) where each cylinder (513) is installed; in addition, the movable plate (5 11) On the horizontal plate (5 112), a predetermined interval is maintained in the Y direction and it is supported by two rotatable pins (512). When there is no glass substrate (108) on the conveyor belt (101), each orientation mechanism ( 51), (52), the movable parts (514), (514) are pushed out from the cylinders (513), (5 13), and each movable plate (511) is provided with a plug (512), (5 12) ), (511), they are evacuated to each support member (120), (120). Next, the operation of the above device will be explained. The Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs prints a glass substrate that is processed in the upstream process ( 108), which is conveyed to the upstream entrance of the conveyor belt (101) through the conveyor belt, and handed over to the conveyor belt (101); the glass substrate (108) is driven by the motor to flow the conveyor belt (101) into the γ direction, After the front end reaches the position of the photoelectric sensor (125), the photoelectric sensor will detect the conveyor belt (101) of the glass substrate (108) that has been delivered. When the front end of the glass substrate (108) reaches the position of the photoelectric sensor (126), the photoelectricity The sensor (126) detects the delivered glass substrate (108); when the photoelectric sensor (126) detects After detecting the delivered glass substrate (108), the control unit (117) will slow down the driving motor; in this way, the glass substrate (108) is slowed down in the Y direction; next, when the glass substrate (108) ) The front end reaches the position of the photoelectric sensor (127). 20 This paper size applies the Chinese National Standard (CNS) A4 specification (210X297). 200302345 E6 F6__ 5. Detailed description of the invention _ (Please read the precautions on the back before drawing ), The photoelectric sensor (127) detects the delivered glass substrate (108); when the photoelectric sensor (127) detects that the glass substrate (108) has been delivered, the control unit (117) stops the motor In this way, the glass substrate (108) is stopped at the inspection position near the center of the conveyor belt (101). The control unit (117) will drive the orientation mechanisms (51), (52); at this time, the control unit (117) will pull the movable parts (514) of the orientation mechanism (51), (52) and simultaneously return the cylinder (513) ); Each orientation mechanism (51), (52) allows each movable plate (511), (511) to move toward the center of the conveyor belt (101) to the X direction; in this way, the two of the glass substrate (108) The side edge is pushed into the center of the conveyor belt (101) with each insert (5 12); as a result, the glass substrate (4) is positioned in the X-direction. Center of the conveyor belt (101). The control unit (117) drives the directional structures (41) and (42); at this time, the control unit (1Π) will move each of the moving units (411), (412), (421), (422) ( 404), while being pushed out of the cylinder (403); in this way, each mechanism (411), (412), (421), (422) will move to the front of the connecting member (406) and let the fixed part (405) Rotate around the shaft (4050), and the protruding piece (4051) of each fixed portion (405) stands up almost perpendicular to the passing surface (a); the front end of the glass substrate (108) is The protruding pieces (4051) of the machines (421) and (422) are pushed to the same end as the p, and the trailing edge is pushed to the downstream end by the protruding pieces (4051) of the machines (421) and (422); this At this time, each pin (512) adjacent to each end edge of the glass substrate (108) rotates as the glass substrate (108) moves in the Y direction; as a result, the glass substrate (108) is positioned on the conveyor belt At the center of X direction and Y direction on (101). Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. Next, after the inspectors take prescribed actions on the control unit (117), the control unit (117) moves the stage (110) along the inspection head to let the inspection head (1〇 3), (104) move in the X direction so that each inspection head (103), (104) objective lens (106), (107) is located, and each mark of the glass substrate (108) on the left side of the conveyor belt (101) flows. (200), (200); Furthermore, the optical axis distance between the objective lens (106) and the objective lens (107) is adjusted in advance to facilitate compliance with the two markings (200), (200) distance; and input in the control department (117), glass substrate (108) four corners of the space 21 This paper size applies to Chinese National Standard (CNS) A4 specifications (210X297 cm) 200302345 E6 F6 V. Details of the invention Explanation ·· The Y-direction interval dimension Ly and X-direction interval dimension Lx of the four marks (200) formed. The TV camera (11 5) captures the upstream end mark (200) image observed by the inspection head (103) objective lens (106), and then outputs the image signal; at the same time, the TV camera (please read the precautions on the back first) (Line drawing) (116), the downstream end mark (200) image observed by the inspection head (104) objective lens (107) is captured, and the image signal is output; these image signals are sent to the control unit (117). The control unit (11 7) inputs the video signals output by the TV cameras (115) and (116), and displays the observation image of each mark 200 on the TV monitor (118); the inspector inspects TV monitor (11 8) image, check each mark (200) for defects such as focus blurring, defects, or size deviation. Next, after the inspector takes a predetermined operation on the control unit (117), the control unit (117) moves the stage (110) along the inspection head so that the inspection heads (103) and (104) only face the X set in advance. Move to the interval dimension Lx, and place the objective lenses (106) and (107) of each inspection head (103), (104) on the respective marks (200) of the glass substrate 108 which flows to the right side of the conveyor belt (101). , (200). The TV camera (115) captures the image of the upstream end marking (200) observed by the inspection head (103 objective lens (106) and outputs the image signal; at the same time, the TV camera (116) captures the inspection head (104) The downstream end mark (200) image observed by the objective lens (107), and then output the image signal; these image signals are sent to the control section (117). The control section (117) is input to each TV camera (115) (116) After outputting the image signal printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs, the observation image of each mark (200) is displayed on the TV monitor (118); the inspector inspects the TV monitor (11 8) image, check whether there are defects such as focus blurring, defects, etc. on each mark (200). Next, when all marks on the glass substrate (108) are normal, the inspector checks the control unit ( 117) After taking the prescribed operation, the control unit (117) drives the orienting mechanisms (51) and (52); at this time, the control unit (117) moves the movable units (514) of the mechanisms (51) and (52) to The cylinder (5 13) is pushed out; each orientation mechanism (51), (52) allows 22 pieces of paper The dimensions are applicable to the Chinese National Standard (CNS) A4 specifications (210 X 297 mm) 200302345 E6 F6 ___ V. Detailed description of the invention ·· Each movable plate (511), (511), facing support members (120), (120) End to X-direction; then evacuate the pins (512 from the two test ends of the glass substrate (108). (Please read the precautions on the back before drawing)) Next, the control unit (117) drives the orientation Mechanisms (41), (42); At this time, the control unit (117) will pull the active parts (404) of the mechanisms (411), (412), (421), (422) back to the cylinder (403) ); In this way, each mechanism (411), (412), (421), (422) moves to the rear of the connecting member (406), so that the fixed portion (405) is around the shaft (4050) Turning, the protruding piece (405 1) of each fixing portion (405) is evacuated from the passing surface (a) to the lower side. The control portion (117) drives the motor again; the glass substrate (108) allows the conveyor belt (101) to flow in The downstream process. Moreover, when any of the glass substrate (108) is marked with an abnormality, the inspector removes the glass substrate from the conveyor belt (101) ( 108). In addition, when checking marks on glass substrates 108 of different sizes, the inspection heads (103, 104) are moved to a predetermined distance from the support member (105), and the control unit (117) can input by The position data on the conveyor belt (101) of the four markings (200) of the glass substrate (108) are responded to. In addition, as long as the mark X-direction interval size and Y-direction interval size of various glass substrates (108) from the design data are registered in the memory of the control unit (117) in advance, the type information of the glass substrate is input to the control The unit (117) can automatically set the Y-direction interval of each inspection head (103), (104) objective lens (106), (107) and the X-direction movement distance of the inspection head (103), (104). Printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs. According to the above-mentioned third embodiment, it can be checked on the roller conveyor belt that carries the glass substrate into the process, and the positioning mark of the glass substrate during standby can be checked. Marking with two inspection heads positioned at the same time can reduce processing time; In addition, as long as the two inspection heads are set in the same direction (X direction) to control the distance, each inspection head can be easily positioned on the four-corner mark . Furthermore, as long as the interval between the two inspection heads and the X-direction moving distance are adjusted, glass substrates of various sizes can be used. 23 This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 200302345 E6 F6 ____ V. Detailed description of the invention:. Position the glass substrate delivered by the roller conveyor belt at the inspection position. An inspection head is correctly positioned on each mark. (Please read the precautions on the back before drawing.) In other words, according to the substrate inspection device of the third embodiment described above, it can be sent to the upstream process by a roller conveyor belt in a short time using a low-cost configuration. For the target substrate, the defect determination or measurement of at least four corners is performed, so that the target substrate can flow into the downstream process. In addition, after positioning the target substrate on the roller conveyor belt, the two inspection heads can be correctly positioned on the marks of each target; further, as long as the moving distance of the two inspection heads in the horizontal beam direction and the two inspection heads are adjusted The space between them can support substrates of various sizes. In addition, the four-corner marking and inspection on the glass substrate is not limited to the substrate inspection device constructed in the third embodiment, and may be moved by a movable inspection head in the first and second embodiments. A substrate inspection apparatus composed of a stage is implemented. At this time, in order to adjust the interval between the two objective lenses (83) and (83), the inspection heads (81) and (82) can be set in a direction of an arrow (Y Direction); in this way, the Y dimension of the mark in the Y direction is consistent with the distance dimension of the objective lens (83), (83), and the two marks in the Y direction can also be checked. Next, By moving the inspection heads (81) and (82) toward a predetermined distance in the X direction, two marks can be inspected. Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs Figure 11 shows the external perspective view of the relevant substrate inspection device constituting the fourth embodiment of the present invention; Figure 11 is partially marked with the same symbol as Figure 1. A support member (97) is provided on the horizontal beam (71) of the inspection head moving stage (7), and both ends of the support member (97) are installed in a state of clamping the horizontal beam (71). TV cameras (93), (94) for each inspection head; TV cameras (93), (94), there are mounting mirrors (95), (96); TV cameras (93), The support member (97) of (94) is guided along the horizontal beam (71) through the guide rail provided below the horizontal beam (71). The paper size applies the Chinese national standard (CNS) ) A4 specification (210 X 297 male) 200302345 E6 F6 5. Detailed description of the invention: Move to X direction. /-'After installing two TV cameras (93) and (94) at a predetermined interval on the substrate inspection device of the fourth embodiment described above at a predetermined interval in the direction of movement of the inspection head moving stage (7), You can photograph any part of the surface of the glass substrate. In addition, the present invention is not limited to the above-mentioned embodiments, and may be implemented after being appropriately modified as long as the gist is not changed. [Possibility of Industrial Utilization] The present invention is to provide a substrate inspection device capable of shortening a measurement interval time required for inspecting a substrate and making a thin, short, and compact device body. Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the notes on the back before drawing) 25 This paper size applies to China National Standard (CNS) A4 (210X297 mm)

Claims (1)

200302345 A8 B8 C8 D8__ 六、申請專利範圍 [申請專利範圍] / 1· 一種基板檢查裝置,其特徵在於:具備了裝載被檢查體的 固定載物台、以跨過被裝載於此固定載物台上之前述被檢查 體方式所設置而成的門型手臂、並於透過此門型手臂之水平 波束,以彼此背對貼合的狀態所設置的二個檢查頭。 2·如申請專利範圍第1 .項所述之基板檢查裝置,其中前述各 檢查頭係自檢查光軸到前述水平波束端之構成元件爲其特 徵者。 3·如申請專利範圍第1 .項所述之基板檢查裝置,其中前述門 型手臂可對上述固定載物台朝定向移動,前述二個檢查頭則 被設置於,可對前述門型手臂的移動方向呈垂直方向移動之 狀態,且用同於前述手臂之移動方向的規定間隔所配置而成 爲其特徵者。 4·如申請專利範圍第1 ·項所述之基板檢查裝置,其中前述二 個檢查頭之檢查光軸間的距離,低於前述各檢查頭排列方向 之前述被檢查體尺寸1/2以下爲其特徵者。 5. 如申請專利範圍第1 ·項所述之基板檢查裝置,其中具備了 被安裝於前述二個檢查頭的二個攝影裝置、至少選擇一個前 述二個攝影裝置的選擇手段、藉由此選擇手段,輸入由前述 攝影裝置所輸出的影像信號,再顯示出前述被檢查體影像之 顯示部爲其特徵者。 6. 如申請專利範圍第1 .項所述之基板檢查裝置,其中具備了 從前述二個檢查頭選擇一個各觀察圖像的選擇手段、藉由此 26 ___________________ …_ …_______.....___________________________________________ __________ - .................. ........................ .......... ——— 本紙張尺度適用中國國家標準(CNS ) Α4規格(2丨〇><297公釐) (請先閲讀背面之注意事項再填寫本頁) 、tr 經濟部中央標準局員工消費合作社印製 200302345 A8 B8 C8 D8 經濟部中央標準局員工消費合作社印家 六、申請專利範圍 選擇手段拍攝前述觀察圖像之攝影手段、輸入前述攝影裝置 所輸出的影像信號,以顯示出前述被檢查體影像之顯示部爲 其特徵者。 7. 如申請專利範圍第1 .項所述之基板檢查裝置,其中移動前 述二個檢查頭時,有部份前述被檢查體之各觀察領域屬於互 爲重複爲其特徵者。 8. 如申請專利範圍第1 ·項所述之基板檢查裝置,其中前述二 個檢查頭,由各TV攝影機所構成爲其特徵者。 9. 如申請專利範圍第1 .項所述之基板檢查裝置,其中具備了 前述固定載物台,是由搬運至少在四個邊角上所規定之標 印,所形成之前述被檢查體的滾輪輸送帶所構成,前述二個 檢查頭被設置成,可沿著前述門型手臂的水平波束,對前述 被檢查體的移動方向朝直交方向移動,且以同於前述被檢查 體之移動方向的規定間隔所配置而成;再者,拍攝各設置於 前述二個檢查頭之前述被檢查體上之前述標印的二個攝影 手段、只要同時移動與控制事先設定的前述二個檢查頭距 離,再用前述二個攝影手段,拍攝設定位置上的前述各標 印’再讓前述各標印的觀察圖像顯示於顯示部之顯示控制手 段爲其特徵者。 10. 如申請專利範圍第9.項所述之基板檢查裝置,其中具備了 在前述固定載物台上,將前述被檢查體定位於規定檢查位置 之定位手段爲其特徵者。 11·如申請專利範圍第9·項所述之基板檢查裝置,其中前述二 27 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) (請先閲讀背面之注意事項再填寫本頁) 、1T 200302345 A8 B8 C8 D8 申請專利範圍 個檢查頭,沿著前述門型手臂的水平波束,以背對貼合方式 被配置於可移動支撐構件上,且設置成可移動狀態,以便調 整前述二者檢查頭間隔爲其特徵者。 經濟部中央標準局員工消費合作社印製 (請先閱讀背面之注意事項再填寫本頁) 28 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐)200302345 A8 B8 C8 D8__ VI. Scope of patent application [Scope of patent application] / 1 · A substrate inspection device, characterized in that it is equipped with a fixed stage for loading the object to be inspected to step over the fixed stage The two inspection heads provided with the portal-type arm set in the aforementioned method of inspecting the object and passing through the horizontal beam of the portal-type arm with their backs facing each other. 2. The substrate inspection device according to item 1 of the scope of patent application, wherein each of the aforementioned inspection heads is a constituent element from the inspection optical axis to the aforementioned horizontal beam end. 3. The substrate inspection device according to item 1 in the scope of the patent application, wherein the gate arm can be moved in a directional manner toward the fixed stage, and the two inspection heads are provided to allow the inspection of the gate arm. The moving direction is a state of moving in a vertical direction, and is characterized by being arranged at a predetermined interval same as the moving direction of the aforementioned arm. 4. The substrate inspection device according to item 1 of the scope of the patent application, wherein the distance between the inspection optical axes of the two inspection heads is less than 1/2 of the size of the inspection object below the arrangement direction of the inspection heads. Its characteristics. 5. The substrate inspection device according to item 1 of the scope of the patent application, which includes two imaging devices installed on the two inspection heads, and a selection means for selecting at least one of the two imaging devices. Means, inputting an image signal output from the imaging device, and displaying a display portion of the subject image as a feature. 6. The substrate inspection device described in item 1. of the scope of patent application, which includes a selection means for selecting one of the observation images from the two inspection heads described above, thereby 26 ___________________ __ ________..... ___________________________________________ __________-.................................................... ..... ——— This paper size applies the Chinese National Standard (CNS) Α4 specification (2 丨 〇 > < 297 mm) (Please read the precautions on the back before filling this page), tr Central Ministry of Economic Affairs Printed by the Consumer Cooperatives of the Bureau of Standards 200302345 A8 B8 C8 D8 The Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs Printed by the Consumer ’s Cooperatives of the Central Standards Bureau of the Ministry of Economy The display part showing the image of the subject is the feature. 7. The substrate inspection device described in item 1. of the patent application scope, in which when moving the two inspection heads mentioned above, some of the observation fields of some of the aforementioned inspection objects are those whose features overlap each other. 8. The substrate inspection device according to item 1 of the scope of the patent application, in which the aforementioned two inspection heads are each characterized by a TV camera. 9. The substrate inspection device according to item 1 of the scope of patent application, which includes the aforementioned fixed stage, and is formed by carrying the marks specified on at least four corners of the inspection object. The two inspection heads are configured by a roller conveyor belt, and can be moved along the horizontal beam of the portal arm toward the direction of orthogonal movement of the object to be inspected, and in the same direction as the object of inspection. It is arranged at a predetermined interval; in addition, two photographing means for photographing the aforementioned markings on the subject to be inspected respectively set on the aforementioned two inspection heads, as long as they move and control the distance between the aforementioned two inspection heads set in advance Then, the aforementioned two photographing means are used to photograph the respective marks at the set position, and then the observation control means for displaying the respective marks on the display section is a characteristic of the display control means. 10. The substrate inspection device according to item 9 of the scope of the patent application, which includes a positioning means for positioning the object to be inspected at a predetermined inspection position on the fixed stage. 11. The substrate inspection device as described in item 9 of the scope of the patent application, in which the above 27 paper sizes are applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling this page ), 1T 200302345 A8 B8 C8 D8 patent application scope inspection head, along the horizontal beam of the aforementioned portal arm, is arranged on the movable support member in a back-to-back fit manner, and is set to a movable state in order to adjust the aforementioned Both check head intervals are characteristic of them. Printed by the Employees' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs (Please read the notes on the back before filling out this page) 28 This paper size applies to China National Standard (CNS) A4 (210X297 mm)
TW091132539A 2001-11-05 2002-11-04 Substrate inspection device TWI264532B (en)

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KR100634652B1 (en) 2006-10-13
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