TWI381161B - Four-gantry inspection device - Google Patents

Description

Four-gantry inspection machine

The invention relates to a panel image detecting technology, in particular to a four-gantry detecting machine.

Due to the increasing demand for large-size substrates worldwide, the detection speed of the double-gantry inspection machine designed for detecting images of substrates below 8.5 generations has become slower when detecting images of substrates of 8.5 generations or more.

In the process of detecting TFTLCD, there is a pair of gantry-type inspection machines behind the visual inspection machine, which is equipped with detection equipment on the gantry mechanism. Referring to FIG. 1, the prior art double gantry type detecting machine (10), as shown, includes a first moving arm (12) and a second moving arm (14), the first moving arm (12) And a detection unit is disposed on each of the second moving arms (14). The substrate (16) is guided into the detection position via the transport device, and the image is captured after scanning the defects (161, 162, 163, 164), so that the substrate (16) is defective in the process (161, 162, 163, 164), can be reconfirmed by the double gantry type inspection machine (10).

However, when the double gantry type detecting machine (10) detects the defects (161, 162, 163, 164) for the known coordinate position, the first moving arm (12) and the second moving arm (14) respectively Slide to defect (161), defect (163), and capture the image from the detection unit set on it, and then slide to defect (164), defect (162), and continue to pick up the detection unit set on it. image. In short, at the same time, the double gantry type detection machine (10) only divides the substrate (16) into two areas, left and right, so that the image detection range to be performed by a single moving arm is large. . Moreover, as the generation of the substrate increases, the size thereof also increases, and the speed of the double gantry type detecting machine in detecting the substrate (26) gradually fails to meet the requirements of the customer.

In view of the above disadvantages, the utility of the prior art double gantry type inspection machine (10) is limited, so it must be modified to shorten the time required for image detection.

In order to solve the above problems, one of the objects of the present invention is to provide a four-gantry type detecting machine that divides the base into four detecting areas and performs detection with four moving arms to increase the detecting speed.

One of the objectives of the present invention is to provide a four-gantry type detecting machine comprising a base, a first measuring mechanism and a second measuring mechanism, wherein the first measuring mechanism comprises a first moving arm and a second moving arm, the first movement One side or both sides of the arm and the second moving arm are respectively connected to the first driving unit, and the first driving unit is connected to the base; the second measuring mechanism includes the third moving arm and the fourth moving arm One or both sides of the third moving arm and the fourth moving arm are respectively connected to the second driving unit, and the second driving unit is connected to the base; the first moving arm and the second moving arm are The third moving arm and the fourth moving arm are respectively connected with at least one movable detecting unit on the inner side.

The purpose, technical content, features, and effects achieved by the present invention will become more apparent from the detailed description of the appended claims.

The above object of the present invention, as well as its structural and functional features, will be described in accordance with the preferred embodiments of the drawings.

Referring to Figures 2 and 3, a four-gantry inspection machine in accordance with a preferred embodiment of the present invention includes a base (20), a first assay mechanism (22), and a second assay mechanism (24). The first measuring mechanism (22) is disposed on one half of the base (20), and includes a first moving arm (222) and a second moving arm (224), and the first moving arm (222) and the second moving arm One side of (224) is respectively connected to the first driving unit (226) (as shown in FIG. 3), and the first driving unit (226) is connected to the base (20).

The second measuring mechanism (24) is disposed on the other half of the base (20), and includes a third moving arm (242) and a fourth moving arm (244), and a third moving arm (242), One side of the four moving arms (244) is respectively connected to the second driving unit (246) (as shown in FIG. 3), and the second driving unit (246) is connected to the base (20).

As shown in FIG. 2, a movable detecting unit (223) and a detecting unit (225) are respectively connected to opposite inner sides of the first moving arm (222) and the second moving arm (224) via the first driving unit (226). ) to move the first moving arm (222) and its detecting unit (223), the second moving arm (224) and its detecting unit (225) to the defect (262) of the substrate (26), and the defect (261) Where the detection unit (223, 225) captures the image of the defect (261, 262) and returns the location of the defect or only the location of the defect. The substrate (26) is a planar object to be tested.

A movable detecting unit (243) and a detecting unit (245) are respectively connected to opposite inner sides of the third moving arm (242) and the fourth moving arm (244), and the third moving unit (246) is used to make the third moving The arm (242) and its detecting unit (243), the fourth moving arm (244) and its detecting unit (245) are respectively moved to the defect (263) of the substrate (26) at the defect (264) for the detection. The unit (243, 245) retrieves the image of the defect (263, 264) and returns the location of the defect or only the location of the defect.

a first rail (227) is connected to one side of the first moving arm (222) and the second moving arm (224), and the first rail (227) is disposed on one side of the base (20). A second rail (228) is connected to the other side of the moving arm (222) and the second moving arm (224), and the second rail (228) is disposed at a middle portion of the base (20). An exhaust device can be connected to the second rail (228), and the exhaust device can be used to discharge the dust generated by the second rail (228) to prevent the dust from adversely affecting the detection process.

a third rail (247) is connected to one side of the third moving arm (242) and the fourth moving arm (244), and the third rail (247) is disposed on one side of the base (20). The other side of the three moving arm (242) and the fourth moving arm (244) is connected to the fourth rail (248), and the fourth rail (248) is disposed at a middle portion of the base (20). An exhaust device can be connected to the fourth rail (248), and the exhaust device can be used to discharge the dust generated by the fourth rail (248) to prevent the dust from adversely affecting the detection process.

The first driving unit (226) and the second driving unit (246) may be a linear motor or a magnetic floating machine with high precision, strong rigidity, fast reaching and positioning, and running smoothly at low speed. Or a ball screw, or a chain, or a belt, etc. A computer can be disposed on the base (20), and a detecting software is pre-implanted in the computer to refer to the first moving arm (222), the second moving arm (224), and the third moving arm (242) of the bow 1. And a detection path of the fourth moving arm (244). A transport device can be disposed on the base (20) for transporting the substrate (26) to a position to be detected.

In summary, the four-gantry inspection machine of the present invention divides the substrate (26) into four detection zones, and performs detection with four moving arms at the same time, so that the range of detections to be performed by each moving arm is relatively reduced. At the same time, the substrate size (26) which can be detected by the present invention is relatively increased, as shown in FIG. Therefore, the simulation estimates that there are 100 defects in the average position on the single substrate (26), and at the same time, using the conventional double gantry type detecting machine and the present invention for testing, it takes about 85 seconds to use the double gantry type detecting machine. The invention takes only about 54 seconds. Therefore, the present invention is significantly faster than the conventional double gantry type detecting machine.

The embodiments described above are merely illustrative of the technical spirit and the features of the present invention, and the objects of the present invention can be understood by those skilled in the art, and the scope of the present invention cannot be limited thereto. That is, the equivalent variations or modifications made by the spirit of the present invention should still be included in the scope of the present invention.

10. . . Double gantry type inspection machine

12. . . First moving arm

14. . . Second moving arm

16. . . Substrate

161. . . defect

162. . . defect

163. . . defect

164. . . defect

20. . . Pedestal

twenty two. . . First measuring mechanism

222. . . First moving arm

223. . . Detection unit

224. . . Second moving arm

225. . . Detection unit

226. . . First drive unit

227. . . First rail

228. . . Second rail

twenty four. . . Second measuring mechanism

242. . . Third moving arm

243. . . Detection unit

244. . . Fourth moving arm

245. . . Detection unit

246. . . Second drive unit

247. . . Third rail

248. . . Fourth rail

26. . . Substrate

261. . . defect

262. . . defect

263. . . defect

264. . . defect

1 is a top plan view of a prior art double gantry type inspection machine.

2 is a top plan view of a four-gantry inspection machine of the present invention.

Figure 3 is a side elevational view of the four gantry type inspection machine of the present invention.

4 is a schematic view showing the implementation of the four-gantry type detecting machine of the present invention.

20. . . Pedestal

twenty two. . . First measuring mechanism

222. . . First moving arm

223. . . Detection unit

224. . . Second moving arm

225. . . Detection unit

227. . . First rail

228. . . Second rail

twenty four. . . Second measuring mechanism

242. . . Third moving arm

243. . . Detection unit

244. . . Fourth moving arm

245. . . Detection unit

247. . . Third rail

248. . . Fourth rail

26. . . Substrate

261. . . defect

262. . . defect

263. . . defect

264. . . defect

Claims (9)

A four-gantry inspection machine includes: a base; and a first measuring mechanism disposed on one side of the base, including a first moving arm and a second moving arm, the first movement The arm and the second moving arm are respectively connected to a first driving unit, and the first driving unit is connected to the base; and a second measuring mechanism is disposed on the other half of the base. The third moving arm and the fourth moving arm are respectively connected to a second driving unit, and the second driving unit is connected to the base; wherein the The first moving arm, the second moving arm, the third moving arm and the fourth moving arm are respectively connected with at least one movable detecting unit opposite to the inner side, and the first driving unit and the second driving unit are configured to make the first A moving arm, the second moving arm, the third moving arm and the fourth moving arm and the detecting unit thereof are moved to a defect of a substrate, so that the detecting unit captures an image of the defect. The four-gantry inspection machine of claim 1, wherein one of the first moving arm and the second moving arm is flanked by a first rail, and the first rail is disposed on one side of the base A second rail is disposed on the other side of the first moving arm and the second moving arm, and the second rail is disposed at a middle portion of the base. The four-gantry inspection machine of claim 2, wherein the second rail is connected with an exhaust device for discharging the dust generated by the second rail. The fourth gantry detecting machine of claim 1, wherein one of the third moving arm and the fourth moving arm is laterally connected with a third rail, and the third rail is disposed on one side of the base. A fourth rail is disposed on the other side of the third moving arm and the fourth moving arm, and the fourth rail is disposed at a middle portion of the base. The four-gantry inspection machine of claim 4, wherein the fourth rail is connected with an exhaust device for discharging the dust generated by the fourth rail. The four-gantry inspection machine of claim 1, wherein the first driving unit and the second driving unit are a magnetic float, a ball screw, a chain, a belt or a linear motor. The four-gantry inspection machine of claim 1, wherein a transport device is disposed on the base to transport the substrate to a position to be detected. The four-gantry inspection machine of claim 1 or 7, wherein the substrate is a planar object to be tested. The four-gantry inspection machine of claim 1, wherein the detection unit moves to the defect of the substrate, and the position of the defect is transmitted back to a computer unit.