201230237 六、發明說明： 【發明所屬之技術销域】 發明領域 本發明係有關於一種檢查特別是平板顯示器用玻璃基 板、半導體基板或印刷基板等之檢查裝置。 【先前技術】 發明背景 近年，有在玻璃基板、半導體基板、或印刷基板(以下 稱為基板）等之製造中，進行基板之檢查等之處理的檢查裝 置。檢查裝置具有以拍攝等，進行基板之檢查處理之處理 邛、從外部將基板往處理部搬送或從處理部將基板往外部 搬送之搬送部。 處理部將照明光照射於基板之表面，以線型感測器照 相機擷取其反射光，取得全體像後，使用顯微鏡等，取得 基板上之預定處之配線圖形等圖像，以進行基板之檢查。 搬送部具有於搬送基板之搬送面具有複數空氣孔，藉 從此二氣孔吹出空氣，而使基板浮起之浮起板、具有吸附 保持基板之吸附部，並可於搬送方向移動之吸附墊。搬送 藉在σ及附部吸附保持藉浮起板浮起之基板之狀態下，使 °寸塾移動，而進行基板之搬送。此外，基板之支撐亦有 使用以可沿著搬送方向旋轉之活輥支撐基板之支撐構件者 來取代浮起板。 又’揭示有一種於通過基板之約重心之直線上設吸附 吸附支撐基板之重心，以搬送基板之搬送裝置作為上 201230237 述搬送部（例如參照專利文獻1)。在此搬送裝置中，由於抑 制因搬送基板時之基板之重量與搬送速度引起之旋轉轉矩 的作用，而搬送基板，故可穩定地搬送基板。 先行技術文獻 專利文獻 專利文獻1日本專利公開公報2007-281285號 【發明内容】 發明概要 發明欲解決之課題 然而，專利文獻1揭示之搬送裝置由於吸附部位於基板 之重心位置，故於在處理部，進行基板之拍攝之際有拍 入吸附部，而使使用所取得之基板圖像之檢查之精確度下 降的問題。 本發明料鑑於上述而發明者，其目⑽提供可於拍攝 基板之際，減輕吸附保持基板之吸附部之拍入的檢查裝置。 用以欲解決課題之手段 為解決上述課題，達成目的，本發明之檢查裝置係包 含有對檢查對象之基板施行預定處理之檢查部、及載置前 述基板，以搬送該基板之搬送台者，糾徵在於前述搬送 台具有支#機構、複數保持部、及驅動部，該支揮 至少以可於搬送前述基板之搬送方㈣動之方式直接或間 接地支樓前絲板者；料魏保持部如可沿著盘前i 搬送方向平行地延伸之搬送軸料之方核持前述基板， 並且可升降者；該驅動部係使前述鱗部沿著前述 201230237 者；該檢查裝置並包含有當前述保持部位於前述檢查 部之處理位置時，進行使該保持部下降之控制之控制部。 發明效果 由於本發明之檢查裝置當保持基板之吸附部在線型感 測器照相機之拍攝區域内時，將吸附部從基板拉開間隔， 故可發揮於拍攝基板之際，減輕吸附部之拍入的效果。 圖式簡單說明 第1圖係示意顯示本發明第1實施形態之平板顯示器 (FPD)檢查裝置之結構的俯視圖。 第2圖係示意顯示本發明第1實施形態之FpD檢查裝置 之結構的側視圖。 第3圖係顯示第1圖所示之FPD檢查裝置之A-A線截面 的部份截面圖。 ' 第4圖係顯示本發明第1實施形態之FPD檢查裝置之基 板搬送的示意圖。 第5圖係顯示本發明第1實施形態之FPD檢查裝置之基 板搬送的示意圖。 第6圖係顯示本發明第1實施形態之FPD檢查裝置之基 板搬送的示意圖。 第7圖係顯示本發明第1實施形態之FPD檢查裝置之基 板搬送的示意圖。 第8圖係顯示本第1實施形態之FPD檢查裝置之變形例 的示意圖。 第9圖係顯示本第1實施形態之FPD檢查裝置之變形例 201230237 的示意圖。 第10圖係顯示本發明第2實施形態之FPD檢查裝置之 基板搬送的示意圖。 第11圖係顯示本發明第2實施形態之F P D檢查裝置之 基板搬送的不意圖。 第12圖係顯示本發明第3實施形態之FPD檢查裝置之 基板搬送的不意圖。 第13圖係顯示本發明第3實施形態之FPD檢查裝置之 基板搬送的示意圖。 第14圖係顯示本發明第3實施形態之FPD檢查裝置之 基板搬送的示意圖。 第15圖係顯示本發明第3實施形態之FPD檢查裝置之 基板搬送的示意圖。 第16圖係示意顯示本發明第4實施形態之FPD檢查裝 置之結構的俯視圖。 I：實施方式3 用以實施發明之形態 以下，將用以實施本發明之形態與圖式一同詳細說 明。此外，本發明非以以下實施形態限定者。又，在以下 之說明中參照之各圖僅概略地顯示形狀、大小及位置關係 至可理解本發明之内容之程度。即，本發明非僅以各圖所 例示之形狀、大小及位置關係限定者。 第1實施形態 首先，就本發明第1實施形態之檢查裝置，參照圖式， 201230237 ' f羊細地說明。此外’在以下之說明中，舉基板之檢查裝置 為例來說明。檢查裂置可為線上型、亦可為離線型。 第1圖係顯示本第1實施形態之平板顯示器（FPD)檢查 裝置之概略結構的俯視圖。第2圖係示意顯示本第1 實施形 態之FPD檢查裝置之結構的側視圖。如第1圖所示，FPD檢 查裝置1包含有檢測所搬送之構成矩形之基板W的缺陷之 基板處理部la、進行基板處理部la全體之控制之控制部 lb。又’基板處理部13具有保持檢測基板冒之缺陷之檢查 單元100之高架台10、搬送基板W之搬送台12、20 、21及取 得基板w之全體像之全體像取得部13。 尚架台10、搬送台12、20、21及全體像取得部13固定 於第1圖、第2圖所示之架台u。架台n以組合了塊狀大理 石或鋼材之框架等耐震性高之構件構成。而且，於架台丄丄 與設置面（例如地板）間以彈簧及油壓阻尼器等構成之振動 吸收設備14。藉此，可進一步防止高架台1〇、搬送台I]、 20、21及全體像取得部13之振動。 搬送台12、20、21具有複數板狀構件沿著與基板貨之 搬送方向D垂直之方向並排成竹簾狀之構造。藉將此搬送台 12、20、21沿者搬送方向D並排’而形成基板w之搬送路徑。 於各搬送台12、20、21之板狀構件分別設有以上面保持基 板W，並可沿著搬送方向D旋轉之作為支撐機構之活輥 121、201、211。於搬送台20之為垂直於搬送方向d之方向 的寬度方向之中央設於搬送方向D驅動，以吸附搬送基板w 之驅動設備30。又，於搬送口 2〇之外周設使載置之基板w 201230237 排列之排列讀4G、4卜而可以排列設備4Q、41訂定搬入 之基板W之載置位置。此外，活觀121、施、2ιι宜以如拉 格月日點:k不致產生基板w之撓曲之間隔配置。 驅動設備3G具有在平行於搬送方向〇之搬送㈣上移 動之驅動部32、支㈣部Μ，並錢送_平行地延 伸之支樓構件33、支撐於支樓構件33，並藉圖中未示之系 之吸氣吸附保持基板W之吸附墊34 ^吸附墊34由沿著支撐 構件33而設之3個吸附墊34A〜34C構成。驅動設備3〇藉使用 線性馬達導件作為搬送軸31，並且，使用線性馬達作為驅 動部32而實現。 此外，驅動設備3〇藉設於搬送台之寬度方向之中央， 可保持包含搬入至搬送台之基板W之重心位置的區域，而 可進行穩定之基板搬送。又，只要搬送軸31至少通過線型 感測器照相機13B及/或檢查單元1〇〇之拍攝範圍内，而在不 損傷基板W下搬送，驅動設備30對搬送台之寬度方向之配 設位置不論為任何位置皆可，亦可設有複數驅動設備3〇。 第3圖係顯示第1圖所示之FPD檢查裝置之A-A線截面 的部份截面圖。此外，在第3圖中，顯示檢查單元1〇〇位於 搬送台12之寬度方向之中央的情形。如第3圖所示，吸附墊 34A〜34C分別具有藉圖中未示之泵之吸氣吸附保持基板w 之吸附部34a(保持部）、將吸附部34a支撐成可於鉛直方向升 降之升降部34b。此外，升降部34b在控制部lb之控制下， 以氣缸或電動馬達等，使吸附部34a升降。 排列設備40、41設於搬送台20之外周側，在控制部lb 201230237 之控制下，可在以活輥201之上端支撐基板W之高度與搬送 台20之下部間升降。排列設備4〇 ' 41具有與基板W抵接， 構成約圓筒狀之抵接構件40a、41a、支撐抵接構件40a，可 於搬送方向D平行地延伸之延伸部4〇b、41b。 排列設備40、41對應於基板W之各邊而設1〜2個，各延 伸部40b、41b分別延伸，使抵接構件4〇a、41b抵接基板W 之對應之邊並夾住，藉此，進行基板W之定位。舉例言之， 排列設備40係將排列設備40A〜40C分別配置成夾住基板W 之對邊。又’同樣地，在排列設備41，亦將排列設備41A〜41C 分別配置成夾住基板W之另一對邊。於基板w之定位後， 當以吸附墊34吸附保持基板w時，排列設備40、41解除基 板W之夾持狀態，而退離至搬送台2〇之下方。 如第3圖所示，全體像取得部13具有照明基板w之照明 構件13A、擷取來自照明構件13A之照明光之反射光，以取 得基板w之全體像之線型感測器照相機13B。線型感測器照 相機13B配設於可擷取如第3圖中之虛線所示之基板琢反射 之來自照明構件13A的反射光之位置。 檢查單位100具有圖中未示之拍攝部，該拍攝部係藉由 顯微鏡101拍攝通過設定於搬送台12形成之搬送路徑上，且 平行於搬送台12之寬度方向之檢查線u的基板|者。藉解 析以此檢查單元1〇〇取得之圖像，可檢測基板w是否存在缺 陷。此外’檢查單元100可沿著檢查線L1移動。在本發明中， 將可設檢查單元1〇〇之區域稱為檢查空間pRl(檢查部）。 又，將k查空間PR1以外之區域稱為搬送空間TR1、。 201230237 此外，檢查單元100亦可置換成對基板w之缺陷部份進 行之雷射照射修復或塗佈修正等之修復單元、觀察、保存 圖像之拍攝單元、進行配線等之尺寸測定、膜厚測定顏 色測定等之測定單元等在預定位置施行處理的其他處理單 元。即，處理單元包含檢查單元、修復單元、拍攝單元、 曝光單元、測定單元等。又，本實施形態2FPD檢查裝置 亦包含在載置基板W之台上，上述處理單元對基板w進行 各處理之結構。 又’ FPD檢查裝置1若包含有包圍檢查空間pR1及搬送 空間TR1、TR2之外部時，由於可形成内部空間（無塵室）， 故較佳。此無塵室係基板之搬入口及搬出口以及下部之導 管以外之密閉的空間。外部於檢查單元100之上方具有將潔 淨之空氣（以下稱為潔淨空氣)送入内部空間2FFU。 FFU送出已去除粒子等之灰塵之潔淨空氣。結果，特 別使檢查單元100之附近及檢查線L1周邊(檢查空間PR1)呈 灰塵少之潔淨狀態。又，集中於檢查單元1〇〇附近及檢查線 L1周邊而送出之潔淨之空氣在無塵室内形成降流後’從排 氣口排出。 在上述FPD檢查裝置1，對從外部搬入至搬送台2〇之基 板w在控制部讣之控制下，排列設備4〇進行基板w之載置 位置之調整後，以吸附墊34吸附保持基板w，於搬送方向D 搬送，以全體像取得部13取得全體像，然後以檢查單元1〇〇 進行基板w之缺陷檢查等。此時，⑽墊34使基板观過 全體像取得部13後，再度返回至搬送台2()，再度使其於搬 10 201230237 送方向D移動卩進行檢查單元所作之缺陷檢查。此外， 從全體像取得部13至檢查單元議之距離對基板w相當長 時，於全體像取得部13取得全體像後，可在不使基板〜返 回搬送台2G下，進行檢查單元1GG所作之缺陷檢查。 第4圖〜第7圖係顯示本第丄實施形態之FpD檢查裝置之 基板搬送的示意圖。首先，如第4圖所示，當驅動部32驅動 時（圖中箭號方向），吸附保持於吸附塾34之基板職線型感 測器照相機13 B方向移動。在此，搬送轴3丄具有具沿著搬送 轴31之座;f不；成之線性標度31a。χ，驅動部具有從線性 標度3la讀取座標資訊之讀取部32a。 如第5圖所示’讀取部323於吸附墊34八到達線型感測器 . 13B之拍攝區域之際，從線性標度31a讀取此位置之座標， 將座標資訊輸出至控制部lb。控制部化從所得之座標資訊 判斷吸附墊34A疋否在拍攝區域内。當控制部lb判斷吸附塾 34A在拍攝區域内時，驅動升降部34b，使符合之吸附墊％ 下降（第6®)。此時，㈣部lb至少使⑽部地下降至吸附 部3 4 a之上端比拍攝基板w之線型感測器照相機丨3 b之焦點 深度下方之位置。201230237 SUMMARY OF THE INVENTION [Technical Field] The present invention relates to an inspection apparatus for inspecting a glass substrate, a semiconductor substrate or a printed substrate, particularly for a flat panel display. [Prior Art] In the past, there has been an inspection apparatus for performing processing such as inspection of a substrate on the manufacture of a glass substrate, a semiconductor substrate, or a printed substrate (hereinafter referred to as a substrate). The inspection device has a process of performing inspection processing of the substrate by photographing, etc., and transporting the substrate to the processing unit from the outside or transporting the substrate to the outside from the processing unit. The processing unit irradiates the surface of the substrate with the illumination light, extracts the reflected light from the linear sensor camera, acquires the entire image, and obtains an image such as a wiring pattern at a predetermined position on the substrate using a microscope or the like to perform inspection of the substrate. . The transport unit has a plurality of air holes on the transport surface of the transport substrate, and a floating plate for ejecting air from the two air holes to float the substrate, and an adsorption pad that adsorbs and holds the adsorption portion of the substrate and moves in the transport direction. In the state where the σ and the attached part are adsorbed and held by the floating substrate, the substrate is moved and the substrate is transported. Further, the support of the substrate is also replaced by a support member for supporting the substrate by a movable roller which is rotatable in the conveyance direction. Furthermore, it is disclosed that the center of gravity of the adsorption-adsorbing support substrate is provided on the straight line passing through the center of gravity of the substrate, and the transport apparatus for transporting the substrate is referred to as the transport unit of the above-mentioned 201230237 (see, for example, Patent Document 1). In this transfer apparatus, since the substrate is transported by suppressing the action of the rotational torque due to the weight of the substrate and the transport speed at the time of transporting the substrate, the substrate can be stably transported. SUMMARY OF THE INVENTION PROBLEMS TO BE SOLVED BY THE INVENTION However, in the transport apparatus disclosed in Patent Document 1, since the adsorption unit is located at the center of gravity of the substrate, the processing unit is in the processing unit. When the substrate is photographed, there is a problem that the adsorption portion is taken, and the accuracy of the inspection using the obtained substrate image is lowered. The present invention has been made in view of the above, and an object of the invention is to provide an inspection apparatus capable of reducing the pick-up of the adsorption portion of the adsorption holding substrate when the substrate is photographed. In order to solve the problem, the inspection apparatus of the present invention includes an inspection unit that performs predetermined processing on a substrate to be inspected, and a transfer table on which the substrate is placed to transport the substrate. It is to be noted that the transfer table has a support mechanism, a plurality of holding portions, and a drive unit, and the support member directly or indirectly supports the front wire plate at least in a manner capable of transporting the transfer side of the substrate (four); The substrate can be erected by the side of the transporting shaft extending parallel to the front of the disk, and can be lifted and lowered; the driving portion is such that the scale is along the aforementioned 201230237; the inspection device includes the foregoing When the holding portion is located at the processing position of the inspection unit, a control unit that controls the lowering of the holding portion is performed. Advantageous Effects of Invention When the inspection apparatus of the present invention holds the adsorption portion of the substrate in the imaging region of the in-line sensor camera, the adsorption portion is separated from the substrate, so that the capture portion can be reduced when the substrate is captured. Effect. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing the structure of a flat panel display (FPD) inspection apparatus according to a first embodiment of the present invention. Fig. 2 is a side view showing the structure of an FpD inspection apparatus according to a first embodiment of the present invention. Fig. 3 is a partial cross-sectional view showing the A-A line cross section of the FPD inspection apparatus shown in Fig. 1. Fig. 4 is a schematic view showing the substrate conveyance of the FPD inspection apparatus according to the first embodiment of the present invention. Fig. 5 is a schematic view showing the substrate conveyance of the FPD inspection apparatus according to the first embodiment of the present invention. Fig. 6 is a schematic view showing the substrate conveyance of the FPD inspection apparatus according to the first embodiment of the present invention. Fig. 7 is a schematic view showing the substrate conveyance of the FPD inspection apparatus according to the first embodiment of the present invention. Fig. 8 is a schematic view showing a modification of the FPD inspection apparatus according to the first embodiment. Fig. 9 is a schematic view showing a modification 201230237 of the FPD inspection apparatus according to the first embodiment. Fig. 10 is a schematic view showing the substrate conveyance of the FPD inspection apparatus according to the second embodiment of the present invention. Fig. 11 is a view showing the substrate transport of the F P D inspection apparatus according to the second embodiment of the present invention. Fig. 12 is a view showing the substrate transport of the FPD inspection apparatus according to the third embodiment of the present invention. Fig. 13 is a schematic view showing the substrate conveyance of the FPD inspection apparatus according to the third embodiment of the present invention. Fig. 14 is a schematic view showing the substrate conveyance of the FPD inspection apparatus according to the third embodiment of the present invention. Fig. 15 is a view showing the substrate conveyance of the FPD inspection apparatus according to the third embodiment of the present invention. Fig. 16 is a plan view showing the structure of an FPD inspection apparatus according to a fourth embodiment of the present invention. I. Embodiment 3 Mode for Carrying Out the Invention Hereinafter, the mode for carrying out the invention will be described in detail together with the drawings. Further, the present invention is not limited to the following embodiments. Further, in the drawings referred to in the following description, only the shapes, sizes, and positional relationships are roughly shown to the extent that the contents of the present invention can be understood. That is, the present invention is not limited to the shape, size, and positional relationship exemplified in the respective drawings. First Embodiment First, an inspection apparatus according to a first embodiment of the present invention will be described in detail with reference to the drawings, 201230237. Further, in the following description, an inspection apparatus for a substrate will be described as an example. The inspection split can be either on-line or off-line. Fig. 1 is a plan view showing a schematic configuration of a flat panel display (FPD) inspection apparatus according to the first embodiment. Fig. 2 is a side view schematically showing the structure of the FPD inspection apparatus of the first embodiment. As shown in Fig. 1, the FPD inspection apparatus 1 includes a substrate processing unit 1a for detecting a defect of the substrate W having a rectangular shape to be conveyed, and a control unit lb for controlling the entire substrate processing unit 1a. Further, the substrate processing unit 13 has an overhead stage 10 for holding the inspection unit 100 for detecting a defect in the substrate, a transfer table 12, 20, and 21 for transporting the substrate W, and an entire image acquisition unit 13 for taking an overall image of the substrate w. The gantry 10, the transfer tables 12, 20, and 21 and the entire image acquisition unit 13 are fixed to the gantry u shown in Figs. 1 and 2 . The gantry n is composed of a member having a high shock resistance such as a frame of a block marble or steel. Further, a vibration absorbing device 14 is constructed of a spring and a hydraulic damper between the gantry and the installation surface (e.g., the floor). Thereby, the vibration of the overhead stage 1 and the conveyance stages I], 20, and 21 and the whole image acquisition part 13 can be further prevented. The transfer tables 12, 20, and 21 have a structure in which a plurality of plate-like members are arranged in a bamboo curtain shape in a direction perpendicular to the transport direction D of the substrate. The transport path of the substrate w is formed by the transport stages 12, 20, and 21 along the transport direction D. The plate-shaped members of the respective transfer tables 12, 20, and 21 are provided with movable rolls 121, 201, and 211 as support means for holding the substrate W on the upper surface and rotating in the transport direction D. The center of the transport stage 20 in the width direction perpendicular to the transport direction d is driven in the transport direction D to adsorb and transport the drive device 30 of the substrate w. Further, the arrangement of the substrates w 201230237 arranged on the other side of the transfer port 2 is read 4G and 4, and the placement positions of the substrates W loaded by the devices 4Q and 41 can be arranged. In addition, the viewing angles 121, 2, and 2 ι are preferably arranged at intervals such as the Lagge date point: k without causing the deflection of the substrate w. The drive device 3G has a drive unit 32 and a branch (four) that move in parallel with the transport direction (four) in the transport direction, and the support member 33 that extends in parallel and supports the branch member 33 and is supported by the branch member 33. The adsorption pad 34 of the suction adsorption holding substrate W shown in the figure is composed of three adsorption pads 34A to 34C provided along the support member 33. The drive device 3 is realized by using a linear motor guide as the transfer shaft 31 and using a linear motor as the drive portion 32. Further, the drive device 3 is placed in the center in the width direction of the transfer table, and can hold a region including the center of gravity of the substrate W carried into the transfer table, thereby enabling stable substrate transfer. Further, as long as the transport shaft 31 passes through at least the imaging range of the line sensor camera 13B and/or the inspection unit 1 and is transported without damaging the substrate W, the position of the drive device 30 in the width direction of the transport table is regardless of It can be used in any position, or it can be equipped with multiple drive devices. Fig. 3 is a partial cross-sectional view showing the A-A line cross section of the FPD inspection apparatus shown in Fig. 1. Further, in Fig. 3, the case where the inspection unit 1 is positioned at the center in the width direction of the conveyance table 12 is displayed. As shown in Fig. 3, each of the adsorption pads 34A to 34C has an adsorption portion 34a (holding portion) that sucks and holds the substrate w by a pump (not shown), and supports the adsorption portion 34a so as to be lifted and lowered in the vertical direction. Part 34b. Further, the elevation unit 34b raises and lowers the adsorption unit 34a by a cylinder, an electric motor or the like under the control of the control unit lb. The aligning devices 40 and 41 are provided on the outer peripheral side of the transfer table 20, and under the control of the control unit lb 201230237, the height of the substrate W supported by the upper end of the movable roller 201 and the lower portion of the transfer table 20 can be raised and lowered. The aligning device 4'' has abutting members 40a and 41a and a supporting abutting member 40a which are in contact with the substrate W, and can extend in the conveying direction D in parallel with the extending portions 4〇b and 41b. The aligning devices 40 and 41 are provided corresponding to each side of the substrate W, and 1 to 2 are provided, and the extending portions 40b and 41b are respectively extended, and the abutting members 4A and 41b are abutted against the corresponding sides of the substrate W, and are clamped. Thereby, the positioning of the substrate W is performed. For example, the arranging device 40 arranges the arranging devices 40A to 40C to sandwich the opposite sides of the substrate W, respectively. Further, similarly, in the aligning device 41, the arranging devices 41A to 41C are also arranged to sandwich the other pair of sides of the substrate W. After the substrate w is positioned, when the substrate w is adsorbed and held by the adsorption pad 34, the alignment devices 40 and 41 release the sandwiched state of the substrate W, and are retracted below the transfer table 2A. As shown in Fig. 3, the entire image acquisition unit 13 includes an illumination member 13A for illuminating the substrate w, and a line sensor camera 13B that extracts the reflected light from the illumination member 13A to obtain an overall image of the substrate w. The line sensor camera 13B is disposed at a position where the reflected light from the illumination member 13A reflected by the substrate shown by the broken line in Fig. 3 can be taken. The inspection unit 100 has an imaging unit (not shown) that captures a substrate|seat that passes through the inspection path formed on the conveyance stage 12 and is parallel to the inspection line u in the width direction of the conveyance stage 12 by the microscope 101. . By analyzing the image obtained by the inspection unit 1 , it is possible to detect whether or not the substrate w is defective. Further, the inspection unit 100 can be moved along the inspection line L1. In the present invention, an area in which the inspection unit 1A can be set is referred to as an inspection space pR1 (inspection unit). Further, an area other than the k-check space PR1 is referred to as a transport space TR1. 201230237 In addition, the inspection unit 100 may be replaced with a repair unit such as a laser irradiation repair or a coating correction for a defective portion of the substrate w, an imaging unit for observing and storing an image, a size measurement for wiring, and the like, and a film thickness. Other processing means for performing processing at a predetermined position, such as a measurement unit such as color measurement, are measured. That is, the processing unit includes an inspection unit, a repair unit, a photographing unit, an exposure unit, a measurement unit, and the like. Further, the FPD inspection apparatus according to the second embodiment is also included in the stage on which the substrate W is placed, and the processing unit performs each processing on the substrate w. Further, when the FPD inspection apparatus 1 includes the outside of the inspection space pR1 and the transportation spaces TR1 and TR2, the internal space (clean room) can be formed, which is preferable. A sealed space other than the inlet and the outlet of the clean room substrate and the lower guide pipe. The outside of the inspection unit 100 has a clean air (hereinafter referred to as clean air) fed into the internal space 2FFU. The FFU delivers clean air that has been removed from dust such as particles. As a result, in particular, the vicinity of the inspection unit 100 and the periphery of the inspection line L1 (the inspection space PR1) are cleaned in a state where dust is small. Further, the clean air sent out in the vicinity of the inspection unit 1A and around the inspection line L1 is discharged after being formed in the clean room, and is discharged from the exhaust port. In the FPD inspection apparatus 1, the substrate w that is carried into the transfer table 2 from the outside is controlled by the control unit ,, and the alignment device 4 adjusts the placement position of the substrate w, and then adsorbs and holds the substrate w by the adsorption pad 34. In the transport direction D, the entire image acquisition unit 13 acquires the entire image, and then the inspection unit 1 detects the defect of the substrate w. At this time, the (10) pad 34 causes the substrate to pass through the entire image acquisition unit 13, and then returns to the transfer table 2 () again, and moves it again in the transport direction D 201210237, and performs defect inspection by the inspection unit. In addition, when the distance from the entire image acquisition unit 13 to the inspection unit is relatively long, the entire image acquisition unit 13 acquires the entire image, and the inspection unit 1GG can perform the inspection without the substrate returning to the transfer table 2G. Defect inspection. Fig. 4 to Fig. 7 are views showing the substrate transfer of the FpD inspection apparatus according to the embodiment of the present invention. First, as shown in Fig. 4, when the driving unit 32 is driven (in the direction of the arrow in the figure), the substrate is moved in the direction of the substrate line sensor 13B held by the adsorption cassette 34. Here, the transport shaft 3 has a seat along the transport axis 31; f is not formed; a linear scale 31a is formed. In other words, the drive unit has a reading unit 32a that reads coordinate information from the linear scale 3la. As shown in Fig. 5, the reading unit 323 reads the coordinates of the position from the linear scale 31a when the adsorption pad 34 reaches the imaging area of the line sensor 13B, and outputs the coordinate information to the control unit 1b. The control unit determines from the obtained coordinate information whether or not the adsorption pad 34A is in the imaging area. When the control unit 1b determines that the suction 塾 34A is in the imaging region, the lift unit 34b is driven to lower the compliance pad % (6th). At this time, the (four) portion lb lowers at least the portion (10) to a position below the focal depth of the linear sensor head 丨 3 b of the substrate w at the upper end of the adsorption portion 34 4 a.
之後，連動於驅動部32之移動，讀取部32a從線性標度 31a4取座;負§孔，依序輸出至控制部比。控制部讣從所得 之座標資訊，反覆進行吸附塾是否在拍攝區域内之判斷， 當如第7圖般，吸附墊34B進入拍攝區域内時，使吸附墊34B 之吸附部34a下降。此外，關於吸附墊34C，亦以同樣之處 理’使吸附部下降。 201230237 如上述第1實施形態般，保持基板w之吸附部在線 型感測器照相機13B之拍攝區域内時，由於使吸附部34a從 基板拉開間隔，故拍攝基板之際，可減輕吸附部之拍入。 此外，由於即使任一吸附部從基板拉開間隔，其他吸附部仍 吸附保持基板，故可在不影響基板之保持及搬送下，處理。 又，為防止因使吸附部下降，基板在檢查位置撓曲，亦可於 不形成檢查之妨礙之位置、例如板狀構件間設防止撓曲輥。 此外，在本第1實施形態，以吸附墊有3個者作了說明， 但只要可進行基板之保持、搬送，亦可為具有2個者亦可 為具有4個以上者。又，為抑制因吸附部下降而引發之振 動，亦可使剩餘之吸附部上升或下降。 變形例 第8圖、第9圖係顯示本第1實施形態之FPD檢查裝置之 變形例的示意圖。第8圖、第9圖對應於第4圖等所示之示意 圖。驅動設備30a具有各自相鄰配設之3組吸附墊341A及 342A、341B及342B、341C及342C。吸附保持及升降之設 備與第1實施形態同樣地，由吸附部及升降部進行。如第8 圖所示’對以各吸附墊341A、342A、341B、342B、341C、 342C吸附保持而搬送之基板w ,讀取部32a讀取線性標度 31a之座標資訊，將之輸出至控制部比。 此時，如第9圖所示，當吸附墊μια進入線型感測器照 相機13B之拍攝區域時，以從讀取部32a輸出之座標資訊為 基礎，控制部lb判斷吸附墊34iA在拍攝區域，而使吸附墊 341A之吸附部34a下降。之後，關於各吸附墊342A、341B、 ⑧ 12 201230237 342B、341C、342C，也以控制部比進行同樣之判斷，在拍 攝區域，吸附部34a下降。 上述第1實施形態之變形例之驅動設備3〇a由於吸附墊 相鄰而設，故可減輕基板之拍攝中之吸附部之拍入，並且 可進行較第1實施形態更加穩定之基板之搬送。 第2實施形態 第10圖、第11圖係顯示本發明第2實施形態之FPD檢查 裝置之基板搬送的示意圖。在第2實施形態之驅動機構 30b，於搬送軸31之對應於線型感測器照相機13B之拍攝區 域之鉛直下方的位置設位置檢測感測器（位置檢測機構），並 且，於支撐構件33之對應於吸附墊34A〜34C之位置設檢測 對象。此外，關於與第1圖等所示之結構相同之結構，標上 同一標號。 如第10圖所示，位置檢測感測器使用磁鄰近感測器31b 來貫現’檢測作為檢測對象而使用之磁鐵等磁性材33a〜33c 之任一個，並將檢測結果輸出至控制部lb。如第11圖所示， 當控制部1 b從磁鄰近感測器31 b接收磁檢測之檢測結果 時’便使符合之吸附墊34A下降。 由於上述第2實施形態與上述第1實施形態同樣地，當 保持基板之吸附部在線型感測器照相機之拍攝區域内時， 使吸附部從基板拉開間隔，故可於拍攝基板之際，減輕吸 附部之拍入。 此外’在本第2實施形態中，亦可為下述結構，前述結 構係支撐構件具有對應於各吸附塾而設，朝搬送軸Η側發 13 201230237 光之照明部（檢測對象），且搬送軸31具有檢測此照明部之光 之光感測器（位置檢測機構）。 第3實施形態 第12圖〜第15圖係顯示本發明第3實施形態之F p D檢查 裝置之基板搬送的示意圖。在第3實施形態之驅動設備3〇c 中，在不設檢測吸附墊之位置之設備下，控制部以驅動部 之驅動速度及驅動時間為基礎，求出吸附塾之仅置，進行 下降之控制。此外，關於與第丨圖等所示之結構同樣之結 構，標上同一標號。 首先，如第12圖所示，在驅動部32之驅動開始位置’ 舉例言之’在本第3實施形態中’以支#構件33之端部為基 準，並令此位置為時間T0。之後，驅動驅動部32，經過時 間们之際，由於吸附塾34A進入線型感測器照相機i3B之拍 攝區域内’故控制部純吸附墊34A之吸附部^下降（第Η 圖）。此時之吸附部34a之下降時間設定為以驅動部Μ之移 動速度為频，上升而再度吸輯板”，⑽部％不致 拍入圖像中之時間。 接著，如第14圖所示，經過時間丁2時，使吸附塾· 之吸附口P34a下降。X，如第15圓所示，經過時間乃時使 吸附塾34C之吸附部34a下降。如此進行，每逢各吸附塾 3从〜34C進入線型感測器照相機UB之拍攝區域内之時間 點為驅動部32之預定驅動時間，便使各吸附部下降。此外， 動。”2細已知之速度程式移動作為條件，料控制容 易，以以一定速度移動為較佳。 14 201230237 由於上述第3實施形態與上述第1實施形態同樣地，當 保持基板之吸附部在線型感測器照相機之拍攝區域内時’ 使吸附部從基板拉開間隔，故可於拍攝基板之際，減輕吸 附部之拍入，並且，不需設檢測位置之設備，而可使裝置 結構簡略化，而縮短處理時間。 此外，在上述第2、第3實施形態中亦可適用第1實施形 態之變形例之吸附墊的結構。 第4實施形態 第16圖係示意顯示本發明第4實施形態之FPD檢查裝 置之俯視圖。如第16圖所示，FDP檢查裝置2包含有檢測所 搬送之構成矩形之基板W之缺陷的基板處理部2a、進行基 板處理部2a全體之控制之控制部2b。在第4實施形態中，以 作為支撐機構之空氣使載置於浮起搬送台50〜52之基板W 浮起，消除與基板W之摩擦，而防止因摩擦引發之基板w 之損傷，而進行搬送。又，與第1實施形態同樣地，將可設 具有在檢查線L2上移動之檢查單元1〇〇之高架台1〇等之區 域作為檢查空間PR2(檢查部）’並將檢查空間pR2以外之區 域作為搬送空間TR3、TR4。此外’關於與第1圖等所示之 結構相同之結構，標上同一標號。 浮起搬送台50〜52具有於搬送方向D延伸，使基板貿在 搬送面上浮起而載置之構成約板狀之複數浮起板。藉將各 浮起搬送台50〜52沿著搬送方向D並排，可形成基板w之搬 送路徑。 舉例言之，浮起搬送台51具有各浮起板沿著垂直於搬 15 201230237 送方向D之方向並排成竹簾狀之構造。於各浮起板設藉來自 空氣供給部60之空氣之供給，朝鉛直上方吹出空氣之複數 吹出孔511。此外，在浮起搬送台50、52中，各浮起板亦具 有吹出孔501、521。 又，於浮起搬送台50〜52之寬度方向之中央設上述驅動 設備30。以與第1〜第3實施形態同樣之結構，吸附保持基板 W來搬送，並且，在控制部2b之控制下，吸附部下降，藉 此’防止拍攝基板時之吸附部之拍入。又，浮起搬送台5〇 支撐於第2圖所示之振動吸收設備14。 由於上述第4實施形態與上述第1實施形態同樣地，保 持基板W之吸附部34a在線型感測器照相機13B之拍攝區域 内時’使吸附部從基板拉開間隔，故可於拍攝基板之際， 減輕吸附部之拍入，並且，由於以空氣支撐基板，故可消 除施加於基板之摩擦力，而更加確實地防止基板之損傷。 此外，在上述第1〜第4實施形態中，在檢查空間PR1、 PR2不設檢查單元100(高架台10)，而僅為全體像取得部13 之結構，取得基板之全體像之檢查裝置亦可適用。又，驅 動設備30只要可個別控制，亦可設複數。 如以上，本發明之檢查裝置對減輕取得基板之圖像之 際之其他構件的拍入有用。 【圖式簡單說明】 第1圖係示意顯示本發明第1實施形態之平板顯示器 (FPD)檢查裝置之結構的俯視圖。 第2圖係示意顯示本發明第1實施形態之FPD檢查裝置 ⑻ 16 201230237 之結構的側視圖。 第3圖係顯示第1圖所示之FPD檢查裝置之A-A線截面 的部份截面圖。 第4圖係顯示本發明第1實施形態之FPD檢查裝置之基 板搬送的示意圖。 第5圖係顯示本發明第1實施形態之FPD檢查裝置之基 板搬送的示意圖。 第6圖係顯示本發明第1實施形態之FPD檢查裝置之基 板搬送的示意圖。 第7圖係顯示本發明第1實施形態之F P D檢查裝置之基 板搬送的示意圖。 第8圖係顯示本第1實施形態之FPD檢查裝置之變形例 的示意圖。 第9圖係顯示本第1實施形態之FPD檢查裝置之變形例 的示意圖。 第10圖係顯示本發明第2實施形態之FPD檢查裝置之 基板搬送的示意圖。 第11圖係顯示本發明第2實施形態之FPD檢查裝置之 基板搬送的示意圖。 第12圖係顯示本發明第3實施形態之FPD檢查裝置之 基板搬送的示意圖。 第13圖係顯示本發明第3實施形態之FPD檢查裝置之 基板搬送的示意圖。 第14圖係顯示本發明第3實施形態之FPD檢查裝置之 17 201230237 基板搬送的示意圖。 第15圖係顯示本發明第3實施形態之FPD檢查裝置之 基板搬送的示意圖。 第16圖係示意顯示本發明第4實施形態之FPD檢查裝 置之結構的俯視圖。 【主要元件符號說明】 1 ’ 2...FPD檢查裝置 la，2a·.·基板處理部 lb，2b...控制部 10.. _尚架台 11…架台 12 ’ 20，21·.·搬送台 13··.全體像取得部 13A...照明構件 13B...線型感測器照相機 14.. .振動吸收設備 30，30a-30c...驅動設備 31.. .搬送軸 3 la...線性標度 3 lb...磁鄰近感測器 32.. .驅動部 32a...讀取部 33.. .支撐構件 33a-33c...磁性材 34，34A-34C...吸附墊 34a...吸附部 34b...升降部 40，40A-40C，4卜 41A-41C.·· 排列設備 40a，41a...抵接構件 40b，41b...延伸部 50-52...浮起搬送台 60.. .空氣供給部 100…檢查單元 101.. .顯微鏡 121，201，211··.活輥 341A-341C，342A-342C...吸附墊 501，511，521...吹出孔 D...搬送方向 LI，L2...檢查線 PR1，PR2...檢查空間 TR1-TR4...搬送空間 T0-T3...時間 W...基板 18Thereafter, in conjunction with the movement of the drive unit 32, the reading unit 32a takes a seat from the linear scale 31a4; the negative § hole is sequentially outputted to the control unit ratio. The control unit 反 repeatedly judges whether or not the adsorption 在 is in the imaging region from the obtained coordinate information. When the adsorption pad 34B enters the imaging region as shown in Fig. 7, the adsorption portion 34a of the adsorption pad 34B is lowered. Further, regarding the adsorption pad 34C, the adsorption portion is also lowered in the same manner. 201230237 When the adsorption unit of the substrate w is held in the imaging region of the in-line sensor camera 13B as in the first embodiment, the adsorption portion 34a is separated from the substrate, so that the adsorption portion can be reduced when the substrate is imaged. Take in. Further, even if any of the adsorption portions are spaced apart from the substrate, the other adsorption portions suck and hold the substrate, so that the treatment can be performed without affecting the holding and transport of the substrate. Further, in order to prevent the substrate from being deflected at the inspection position by lowering the adsorption portion, it is also possible to provide a deflection preventing roller at a position where the inspection is not hindered, for example, between the plate members. In the first embodiment, the number of the adsorption pads is three. However, as long as the substrate can be held and transported, it is also possible to have two or more. Further, in order to suppress the vibration caused by the drop of the adsorption portion, the remaining adsorption portion may be raised or lowered. (Modifications) Figs. 8 and 9 are views showing a modification of the FPD inspection apparatus according to the first embodiment. Figs. 8 and 9 correspond to the schematic views shown in Fig. 4 and the like. The driving device 30a has three sets of adsorption pads 341A and 342A, 341B and 342B, 341C and 342C which are disposed adjacent to each other. The apparatus for adsorbing and holding and lifting is carried out by the adsorption unit and the elevation unit in the same manner as in the first embodiment. As shown in Fig. 8, 'the substrate w transported by the respective adsorption pads 341A, 342A, 341B, 342B, 341C, and 342C and held, the reading unit 32a reads the coordinate information of the linear scale 31a, and outputs it to the control. Department ratio. At this time, as shown in FIG. 9, when the adsorption pad μια enters the imaging region of the line sensor camera 13B, based on the coordinate information output from the reading portion 32a, the control portion 1b determines that the adsorption pad 34iA is in the imaging region. The adsorption portion 34a of the adsorption pad 341A is lowered. Then, with respect to each of the adsorption pads 342A, 341B, and 8 12 201230237 342B, 341C, and 342C, the control unit ratio is also determined in the same manner, and the adsorption portion 34a is lowered in the photographing region. Since the driving device 3A of the modification of the first embodiment is provided adjacent to the adsorption pad, it is possible to reduce the pickup of the adsorption portion during the imaging of the substrate, and to carry out the substrate transfer which is more stable than the first embodiment. . (Second Embodiment) Fig. 10 and Fig. 11 are schematic views showing the substrate transport of the FPD inspection apparatus according to the second embodiment of the present invention. In the drive mechanism 30b of the second embodiment, a position detecting sensor (position detecting mechanism) is provided at a position vertically below the imaging region of the transport axis camera 31 corresponding to the line sensor camera 13B, and is provided at the support member 33. The detection target is set corresponding to the positions of the adsorption pads 34A to 34C. Incidentally, the same structures as those shown in Fig. 1 and the like are denoted by the same reference numerals. As shown in Fig. 10, the position detecting sensor uses the magnetic proximity sensor 31b to "detect" any one of the magnetic materials 33a to 33c such as a magnet used as a detection target, and outputs the detection result to the control portion lb. . As shown in Fig. 11, when the control portion 1b receives the detection result of the magnetic detection from the magnetic proximity sensor 31b, the conforming adsorption pad 34A is lowered. In the second embodiment, as in the first embodiment, when the adsorption portion of the substrate is held in the imaging region of the in-line sensor camera, the adsorption portion is separated from the substrate, so that the substrate can be photographed. Reduce the capture of the adsorption section. In addition, in the second embodiment, the structure support member may be provided with an illumination unit (detection target) that transmits 13 201230237 light to the transport axis 对应 side, and is transported. The shaft 31 has a photo sensor (position detecting mechanism) that detects the light of the illumination portion. (Third Embodiment) Fig. 12 to Fig. 15 are views showing the substrate transfer of the F p D inspection apparatus according to the third embodiment of the present invention. In the drive device 3〇c of the third embodiment, the control unit determines the position of the suction unit based on the driving speed and the driving time of the driving unit, and reduces the position of the suction unit. control. Further, the same structures as those shown in the drawings and the like are denoted by the same reference numerals. First, as shown in Fig. 12, the driving start position of the driving unit 32 is exemplified by the end portion of the branch member 33 in the third embodiment, and the position is made time T0. Thereafter, when the driving unit 32 is driven, the adsorption 塾 34A enters the shooting area of the line sensor camera i3B, and the adsorption unit of the control unit pure adsorption pad 34A is lowered (Fig. 1). At this time, the fall time of the adsorption portion 34a is set to be the time at which the moving speed of the driving portion 为 is increased, and the plate is again sucked up, and the portion (10) is not captured in the image. Next, as shown in Fig. 14, When the elapsed time is 2, the adsorption port P34a of the adsorption enthalpy is lowered. X, as indicated by the fifteenth circle, the adsorption portion 34a of the adsorption enthalpy 34C is lowered by the elapse of time. When the time point of the 34C entering the imaging area of the line sensor camera UB is the predetermined driving time of the driving unit 32, the respective adsorption units are lowered. Further, the movement of the speed program is known as a condition, and the material control is easy. It is better to move at a certain speed. In the third embodiment, the third embodiment is similar to the above-described first embodiment, and when the adsorption portion of the substrate is held in the imaging region of the in-line sensor camera, the adsorption portion is separated from the substrate, so that the substrate can be photographed. In addition, the pick-up of the adsorption section is alleviated, and the apparatus for detecting the position is not required, and the structure of the apparatus can be simplified, and the processing time can be shortened. Further, in the second and third embodiments described above, the configuration of the adsorption pad of the modification of the first embodiment can be applied. (Fourth Embodiment) Fig. 16 is a plan view showing an FPD inspection apparatus according to a fourth embodiment of the present invention. As shown in Fig. 16, the FDP inspection apparatus 2 includes a substrate processing unit 2a that detects defects of the substrate W that is transported in a rectangular shape, and a control unit 2b that controls the entire substrate processing unit 2a. In the fourth embodiment, the substrate W placed on the floating transfer tables 50 to 52 is floated by the air serving as the support mechanism, and the friction with the substrate W is eliminated, thereby preventing the damage of the substrate w caused by the friction. Transfer. In the same manner as in the first embodiment, an area in which the inspection unit 1A having the inspection unit 1 moved on the inspection line L2 can be set as the inspection space PR2 (inspection unit)' and the inspection space pR2 is excluded. The area serves as the transport spaces TR3 and TR4. Further, the same structures as those shown in Fig. 1 and the like are denoted by the same reference numerals. The floating transfer tables 50 to 52 have a plurality of floating plates which are formed in a plate shape and which are extended in the transport direction D and are placed on the transfer surface. The transport path of the substrate w can be formed by arranging the floating transport stages 50 to 52 in the transport direction D. For example, the floating transfer table 51 has a structure in which the floating plates are arranged in a bamboo curtain shape in a direction perpendicular to the transport direction D of the 201230237. Each of the floating plates is provided with a supply of air from the air supply unit 60, and a plurality of air blowing holes 511 are blown upward in the vertical direction. Further, in the floating transfer tables 50, 52, each of the floating plates also has blow-out holes 501, 521. Further, the drive device 30 is provided at the center in the width direction of the floating transfer tables 50 to 52. In the same configuration as in the first to third embodiments, the substrate W is adsorbed and held, and the adsorption portion is lowered under the control of the control unit 2b, thereby preventing the pickup of the adsorption portion when the substrate is photographed. Further, the floating transfer table 5 is supported by the vibration absorbing device 14 shown in Fig. 2 . In the fourth embodiment, as in the first embodiment, when the adsorption portion 34a of the substrate W is held in the imaging region of the in-line sensor camera 13B, the adsorption portion is separated from the substrate, so that the substrate can be photographed. In addition, since the substrate of the adsorption portion is reduced, and the substrate is supported by the air, the frictional force applied to the substrate can be eliminated, and the damage of the substrate can be more reliably prevented. In addition, in the above-described first to fourth embodiments, the inspection unit 100 (the overhead platform 10) is not provided in the inspection spaces PR1 and PR2, and only the entire image acquisition unit 13 is configured, and the inspection apparatus for obtaining the entire image of the substrate is also provided. applicable. Further, the drive device 30 may be provided in plural as long as it can be individually controlled. As described above, the inspection apparatus of the present invention is useful for reducing the taking of other members at the time of obtaining an image of the substrate. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing the structure of a flat panel display (FPD) inspection apparatus according to a first embodiment of the present invention. Fig. 2 is a side view showing the structure of an FPD inspection apparatus (8) 16 201230237 according to the first embodiment of the present invention. Fig. 3 is a partial cross-sectional view showing the A-A line cross section of the FPD inspection apparatus shown in Fig. 1. Fig. 4 is a schematic view showing the substrate conveyance of the FPD inspection apparatus according to the first embodiment of the present invention. Fig. 5 is a schematic view showing the substrate conveyance of the FPD inspection apparatus according to the first embodiment of the present invention. Fig. 6 is a schematic view showing the substrate conveyance of the FPD inspection apparatus according to the first embodiment of the present invention. Fig. 7 is a schematic view showing the substrate conveyance of the F P D inspection apparatus according to the first embodiment of the present invention. Fig. 8 is a schematic view showing a modification of the FPD inspection apparatus according to the first embodiment. Fig. 9 is a schematic view showing a modification of the FPD inspection apparatus according to the first embodiment. Fig. 10 is a schematic view showing the substrate conveyance of the FPD inspection apparatus according to the second embodiment of the present invention. Fig. 11 is a schematic view showing the substrate conveyance of the FPD inspection apparatus according to the second embodiment of the present invention. Fig. 12 is a schematic view showing the substrate conveyance of the FPD inspection apparatus according to the third embodiment of the present invention. Fig. 13 is a schematic view showing the substrate conveyance of the FPD inspection apparatus according to the third embodiment of the present invention. Fig. 14 is a schematic view showing the substrate transport of the 2012 20120237 of the FPD inspection apparatus according to the third embodiment of the present invention. Fig. 15 is a view showing the substrate conveyance of the FPD inspection apparatus according to the third embodiment of the present invention. Fig. 16 is a plan view showing the structure of an FPD inspection apparatus according to a fourth embodiment of the present invention. [Description of main component symbols] 1 ' 2...FPD inspection device la, 2a·.·Substrate processing unit lb, 2b...Control unit 10.._尚架台11...架台12 '20,21···Transport Table 13··. overall image acquisition unit 13A... illumination member 13B... line sensor camera 14... vibration absorption device 30, 30a-30c... drive device 31.. transport axis 3 la. .. linear scale 3 lb... magnetic proximity sensor 32.. drive unit 32a... reading unit 33.. support member 33a-33c... magnetic material 34, 34A-34C... Adsorption pad 34a...adsorption unit 34b...lifting unit 40, 40A-40C, 4b 41A-41C.· Arrangement device 40a, 41a... abutment member 40b, 41b... extension 50-52 ...floating transfer table 60..air supply unit 100...inspection unit 101..microscope 121,201,211··.live rolls 341A-341C, 342A-342C...adsorption pads 501,511,521 ...blowing hole D...transport direction LI, L2...inspection line PR1,PR2...inspection space TR1-TR4...transport space T0-T3...time W...substrate 18