201233996 " 六、發明說明： c發明所屬技術領域3 發明領域 本發明係有關於一種進行用於液晶顯示器（LCD)、電漿 顯示器（PDP)等平板顯示器（FPD)之製造之大型基板之檢查 的基板檢查系統。 L先前技袖r 3 發明背景 習知’用於平板顯示器之基板之檢查有目視檢查（手動 巨觀檢查），該目視檢查係在將基板以預定角度立起之狀態 • 下，從基板表面側，照射巨觀照射光，從基板之反射光之 散亂狀態’以目視判別缺陷，或在將基板垂直地立起之狀 態下，從基板之背面側照射背光照明光，從穿透光之散亂 狀態，以目視判別缺陷。又，有以顯微鏡等微觀檢查部放 大基板上之任意部位，以觀察缺陷之微觀檢查。 而隨著近年之平板顯示器之大型化，將平板顯示器多 面取之素玻璃基板亦大型化，例如出現了 15〇〇xl8〇〇mm以 上之大型基板。隨著此素玻璃之大型化，包含手動巨觀檢 查裝置及微觀檢查裝置之基板之製造線亦大型化。 疋故，提出藉以單一之裝置進行手動巨觀檢查及微觀 檢查’謀求省$間化之技術(例如參照專利文獻1及2)。進行 此種手動巨觀檢查及微觀檢查之裝置具有使微觀檢查裝置 之基板搭載部（基板保持器）上升至作業員側之驅動部，而可 在使基板搭載部直立之狀態下，從基板之上方，照射巨觀 3 201233996 照明光，以目視進行檢查。 先行技術文獻 專利文獻 專利文獻1 曰本專利公開公報2003-344294號 專利文獻2 曰本專利公開公報2000-28537號 【發明内容】 發明概要 發明欲解決之課題 而在習知之手動巨觀檢查中，為在使保持基板之基板 保持器升起至適合檢查者之目視觀察之傾斜角度的狀態 下’從基板之上方照射巨觀照明光，以檢測反射光，或者， 在使基板保持器垂直地升起之狀態下，從基板之後方照射 为光照明光’檢測穿透光，基板保持器宜使用僅保持基板 周緣之中間貫穿構造者。 然而，當使用中間貫穿之基板保持器時，由於在基板 中間邰之基板保持力弱，故易於基板產生搖動，在進行放 大觀察之微觀檢查中’產生影像搖晃等弊端，此，在微 觀檢查宜使用以將基板全體保持水平之—片板形成之基板 保持器。 a如此，以單一裝置進行手動巨觀檢查及微觀檢查時， =使，觀檢查優先時’便選擇以—片板形成之基板保持 器。當使用-片板之基板保持器時，因玻璃基板為透明， 201233996 j ' 故不僅可看到基板保持器上之傷痕等，而且為錯誤檢測之 主要原因，而有無法進行背光照明之目視檢查之問題。 再者，使用共通之基板保持器，進行手動巨觀檢查與 微觀檢查時，藉使微觀檢查裝置之基板搭載部升起，而進 行手動巨觀檢查，故無法同時進行手動巨觀檢查與微觀檢 查，檢查生產節拍時間增長，進而亦產生無法提高基板之 生產效率之問題。 本發明之課題係鑑於上述習知之實際情況，提供可不 使生產效率及檢查性能下滑，而謀求省空間化之大型基板 用基板檢查糸統。 . 用以欲解決課題之手段 本發明之基板檢查系統係以複數檢查方法檢查被檢查 對象基板者，其特徵在於包含有自動檢查裝置、架台、手 動巨觀檢查裝置及基板搬送機器人，該自動檢查裝置係以 拍攝部拍攝前述被檢查對象基板而檢查者；該架台係具有 跨越前述自動檢查裝置之門型形狀腳部者；該手動巨觀檢 查裝置係配置於前述架台上，直視前述被檢查對象基板而 目視檢查者；該基板搬送機器人係使前述被檢查對象基板 於前述自動檢查裝置及前述手動巨觀檢查裝置搬入搬出 者；該前述手動巨觀檢查裝置藉由前述架台獨立配置於前 述自動檢查裝置之上方。 發明效果 在本發明中，由於手動巨觀檢查裝置與自動檢查裝置 係相互獨立之裝置，故可同時進行手動巨觀檢查裝置及自 201233996 動檢查裝置之檢查，而不致使兩檢查之運作效率降低，即 使將手動巨觀檢查裝置配置於自動檢查裝置之上方，謀求 省空間化，生產效率也不致下滑。 再者，由於可不使用在手動巨觀檢查裝置與自動檢查 裝置共通之基板保持部，而使用適合各檢查裝置之基板保 持部，故檢查性能不致下滑。 是故，根據本發明，可在不使生產效率及檢查性能下 滑下，謀求基板檢查系統之省空間化。 圖式簡單說明 第1圖係透視顯示本發明一實施形態之基板檢查系統 之内部構造的正面圖。 第2圖係顯示本發明一實施形態之基板檢查系統之基 板搬入狀態之概略左側視圖。 第3圖係透視顯示本發明另一實施形態之基板檢查系 統之内部構造的正面圖。 I：實施方式3 用以實施發明之形態 以下，就本發明實施形態之基板檢查系統，一面參照 圖式，一面說明。 一實施形態 第1圖係透視顯示本發明一實施形態之基板檢查系統1 之内部構造的正面圖。 第2圖係顯示基板檢查系統1之基板搬入狀態之概略左 側視圖。 201233996 如第1圖所示，基板檢查系統i包含有作為目視觀察裝 置’作業貝可以目視觀察之手動域檢查裝置ig、作為自 動檢查裝置，將以數位顯微鏡(拍攝部)所拍攝之圖像進行圖 像處理’以檢測缺陷之微觀檢查裝置2〇、外殼2(以2點鍵線 顯示）’讀查作為被檢查對象基才反，為—邊15〇〇_以上 之大型玻«板之平板顯示㈣素玻璃基板(之後，僅稱為 玻璃基板)G。 手動巨觀檢查裝置10具有作為基板保持部，保持破璃 基板G之基板保持器u、將此基板保持器丨丨傾斜成適合作業 員之目視檢查之角度的搖動機構、從保持於以此搖動機構 而傾斜之基板保持器11之玻璃基板〇之上方照射的巨觀照 明光源16。再者，手動巨觀檢查裝置㈣有在立起基板保 持器11之狀態下’從玻璃基板G之背面側照射穿透光之背光 照明光源17(以2點鏈線顯示）。 搖動機構具有軸支設於基板保持器丨丨之兩側邊之幾乎 中央的保持器旋動軸11a之2個滑動部12、將此滑動部12支 支撐成可滑動之2個框架13、使該等框架13旋動成預定角度 之驅動部。驅動部由將各框架13以可旋轉之方式支撐於手 動巨觀檢查裝置之架台，於與此旋轉支撐軸相反之側之各 框架13的一端連結2個臂部14，作為使該等臂部14上下移動 之滑動軸驅動部之2個傾斜轴15構成。驅動部亦可為使驅動 馬達連結於2個框架13之旋轉軸者。 此外，滑動部12、框架13、臂部14及傾斜軸15分別各 配置2個，由於在第〖圖之正面圖重疊存在，故僅於圖顯示 201233996 刖面側。 手動巨觀檢查裝置10配置於微觀檢查裝置20之上方， 可與此微觀檢查裝置20之微觀檢查獨立地目視檢查。 於手動巨觀檢查裝置10採用之基板保持器丨丨呈保持形 成矩形之玻璃基板G之周緣之中間貫穿矩形框構造，且可以 保持器旋動軸1 la為中心而旋動。此外，如第2圖所示，基 板保持器11以複數周緣保持部lib，保持玻璃基板g之周緣。 此基板保持器11為將薄玻璃基板G保持水平達不挽曲 之程度，而宜以使於矩形框内部截面形狀形成長方形之支 樓構件低於基板保持器11之上面之狀態配置成格子狀，且 於支撐構件上設吸附保持玻璃基板G之吸附墊。藉以此吸附 塾吸附玻璃基板G之背面，可於基板保持器11搖動之際，壓 制玻璃基板G之搖晃。 滑動部12以在基板保持器11之相互對向之2邊之中央 軸支基板保持器11的左右一對之1組配置，且對平行配置之 —對框架13可滑動地卡合於以圖中實線與圖示鍵線所示之 位置(標號12-2，12-3)。藉此滑動部12沿著框架13滑動，軸 支於滑動部12之基板保持器11亦可沿著框架13 ’滑動至以 圖示實線與圖示2鏈線所示之位置(標號ii_2，11-3)。 各框架13以形成於連結有臂部14之相反側之一端側之 作為軸承部的凸緣13a’可旋轉地支撐於固定在圖中未示之 目視檢查用架台之固定軸18。藉連結於各框架13之臂部14 沿著於鉛直方向延伸之傾斜軸15，上下移動（標號14-1， 14-2) ’各框架13旋動成玻璃基板g之搬出搬入時之水平狀 8 201233996 , •態（標?虎13-1)及適合檢查者3之目視觀察之傾斜狀態（標號 Π-2)。又’藉料㈣13之旋動，基板保持別及滑動部 12亦一同旋動（標號 11-1，1U2，121，12 2)。 此外’手動巨觀檢查裝置用架台具有門型形狀之腳 部，且配置成跨越為自動檢查裝置之微觀檢查裝置2〇。手 動巨觀檢查裝置10之架台與微觀檢查裝置2〇之架台獨立而 分開配置。因此手動巨觀檢查裝置1〇係可供檢查者3目視玻 璃基板而觀察之裝置，故來自外部及内部之振動之影響 少，而可對無塵室之地板不設隔振台而直接放置。由於為 自動檢查裝置之微觀檢查裝置因來自外部之振動之影響， • 所拍攝之圖像搖晃而無法進行正確之檢查，故宜於架台設 使來自外邛之振動衣減之隔振台。如此，宜將手動巨觀檢 查裝置用架台與微觀檢查用架台24分開構成。 微觀檢查裝置20具有將安裝於微觀檢查裝置用架台24 之玻璃基板G載置成水平之台21、配置成跨越此台21，而呈 門i形狀之固疋式尚架22、設於此高架22，以線性馬達等 驅動設備，於與玻璃基板G之搬送方向垂直相交之1軸方向 (垂直於第1圖之紙面之方向）移動之顯微鏡23、保持玻璃基 板G ’而於搬送方向搬送之圖中未示之基板搬送部。 口21可使用浮起台、轉動台或滾子輸送機等基板搬送 ° α亥浮起台係在以空氣使玻璃基板G浮起之狀態下，在通 過玻璃基板G之端部或玻璃基板g之重 心之中心線上以基 板搬送部保持而搬送者，該轉動台係在以活輥等旋轉體支 樓玻璃基板G之狀態下，以基板搬送部保持玻璃基板〇而搬 201233996 送者’該滚子輸送機係以在接觸玻璃基板G之背面，支撐玻 璃基板G之狀態下旋轉驅動之驅動輥搬送者。 又’採用使高架22沿著台21移動之移動式高架時，可 採用使台21固定於架台24上之固定式台。 手動巨锐檢查農置1〇之基板保持器丨丨及框架丨3等以不 與微觀檢查裝置20之高架22、台21或基板搬送機器人4之手 臂4a干擾之狀態，配置於微觀檢查裝置2〇之空間區域。 於覆蓋手動巨觀檢查裝置10與微觀檢查裝置（自動檢 查裝置）全體之外殼2形成有用於手動巨觀檢查裝置1〇之玻 璃基板G之搬出搬入的基板搬出搬入用窗部2a、用於微觀檢 查裝置20之玻璃基板G之搬出搬入用之基板搬出搬入用窗 部2b。 手動巨觀檢查裝置10側之基板搬出搬入用窗部2a與微 觀檢查裝置20側之基板搬出搬入用窗部2b同一形狀、同一 面積，且設於窗部2b之正上方。基板搬出搬入用窗部2&及 2b配置成與將玻璃基板G搬送至第1層之微觀檢查裝置（自 動檢查裝置）與第2層之手動巨觀檢查裝置之第2圖所示之 基板搬送機器人4的手臂4a之上下移動方向一致。如此，藉 對應於基板搬出搬入用窗部2a及2b之兩裝置之基板搬入空 間配置成上下相同之關係，可以1個基板搬送機器人4將玻 璃基板G供至配置於第1層之檢查裝置20之基板搬入空間與 配置於第2層之檢查裝置10之基板搬入空間。又，在將基板 搬送機器人4固定於地板之狀態下，僅使手臂4a上下移動， 在基板搬出搬入用窗部2a及2b，手臂4a之對位容易。於手 201233996 動巨觀檢查裝置10之架台形成有供檢查者3進行目視檢崔 用之作為檢查作業空間2c之檢查作業台。 以下’就使用了上述基板檢查系統1之玻璃基板G之产 查作說明。 基板檢查系統1由於手動巨觀檢查裝置10與微觀檢杳 裝置20係相互獨立之裝置，故可同時進行手動巨觀檢查及 微觀檢查。 首先’就手動巨觀檢查作說明。 以第2圖所示之基板搬送機器人4將以複數條手臂知支 撐之玻璃基板G從外殼2之基板搬出搬入用窗部2a搬入至手 動巨觀檢查裝置10。此時，傾斜軸15使臂部14移動至下方， 框架13維持在水平狀態（13-1)。X ’基板保持器11亦維持在 與框架13平行之水平狀態（1M)。 當玻璃基板G定位保持於基板保持器11上之基準位置 時’傾斜軸15使臂部14移動至上方。藉此，連結於臂部14 之框架13以固定軸18為中心旋動，而傾斜至檢查者3進行目 視檢查之位置（13-2)。 又Φ以保持器旋動軸Ua為中心，使基板保持器 搖動同時動部12使基板保持器明檢查者之視野 置（η度位置)於上下方向移動’ -面藉檢查者3目 視巨觀㈣辆、㈣統Η透 進行玻璃基板0之年軏 面進行手動找h 檢查。此外，將朗基板G之背 觀檢轰時，於基板 框架13稍微倒下至兀办 了隹便 一巨觀照明光源16干擾之位置之狀態 201233996 下，以保持器旋動軸lla為中心，使基板保持器丨丨反轉。 又，使用背光照明光源17之穿透光，以目視進行巨觀 檢查時，亦可將基板保持器U立起至基板保持器U不干擾 巨觀照明光源16之程度，同時，將框架13立起，而使基板 保持器11靠近檢查者3。再者，亦可在將基板保持立起 之狀態下，設成可移動成背光照明光源17靠近基板保持器 11之背面。當巨觀檢查結束後，藉以傾斜軸15使臂部14下 降，可使框架13旋動成水平狀態，同時，使基板保持器“ 回復至水平狀態，而可以基板搬送機器人4從基板搬出搬入 用窗部2a搬出玻璃基板G。 關於微觀檢查，首先，以第2圖所示之基板搬送機器人 4’從外殼2之搬出搬入用窗部2b，將玻璃基板G搬入至微觀 檢查裝置20。 當將玻璃基板G載置於台21上時，將此玻璃基板G定位 於基準位置。定位後，以圖中未示之基板搬送部使玻璃基 板G移動至預定位置，顯微鏡23於與此基板搬送部之搬送方 向（第1圖之左右方向）垂直相交之方向（與第1圖之紙面垂直 之方向）移動’而可以顯微鏡23進行玻璃基板G之微觀檢查。 微觀檢查結束後，以圖中未示之基板搬送部將玻璃基 板G搬回至搬出位置，以基板搬送機器人4將玻璃基板G從 窗部2b搬出。 在以上所說明之本實施形態中，由於檢查者3因檢查而 不介於微觀檢查裝置（自動檢查裝置)20之裝置内，故可將微 觀檢查裝置（自動檢查裝置)20之高度壓低至與高架22同等 12 201233996 之咼度。藉利用此微觀檢查褒置（自動檢查裝置）20之上空之 空間，配置手動巨觀檢查裝置10，作為2層構造，而可較併 設兩裴置者，縮小設置空間。 又’由於手動巨觀檢查裝置10與微觀檢查裝置（自動檢 查裝置）20係相互獨立之裝置’故可同時進行巨觀檢查裝置 10與微觀檢查裝置（自動檢查襞置)2〇之檢查，而不致使兩檢 查之運作效率降低’即使將手動巨觀檢查裝置1〇配置於微 觀檢查裝置20之上方，謀求省空間化，生產效率亦不致 下滑。 再者，由於不使用在手動巨觀檢查裝置1〇與微觀檢查 裴置2〇(自動檢查裝置）20共通之基板保持部，而可使用適合 各檢查裝置1〇、20之基板保持部（基板保持器u、台21)，故 檢查性能不致下滑。 是故，根據本實施形態，可不在使生產效率及檢查性 成下滑下，謀求基板檢查系統1之省空間化。 又，在本實施形態中，由於將比手動巨觀檢查襞置1〇 易受振動之影響之微觀檢查裝置20配置於手動巨觀檢查裝 置10之下方’且使手動巨觀檢查裝置1〇與微觀檢查裝置（自 動檢查裝置)2〇分離，設置於地板，故來自手動巨觀檢杳裝 置10之振動不致傳達至微觀檢查裝置2〇,而可進行精確产 阿之微觀檢查。又’藉使手動巨觀檢查裝置1〇與微觀檢杳 裝置20為分開構造，在現場之組裝容易，且可易將手動巨 觀檢查裝置1〇與微觀檢查裝置20分開輸送。 此外’自動檢查裝置不限於本實施形態之微觀檢杳裝 13 201233996 置20，舉例言之，可為如線寬測定裝置、分光測光裝置、 雷射修復裝置等，包含具有放大檢查部（例如顯微鏡)及拍攝 以放大檢查部放大之影像之拍攝部的放大檢查裝置者。 又，自動檢查裝置亦包含以線掃瞄照相機拍攝玻璃基板全 體之自動巨觀檢查裝置。即，自動檢查裝置與如手動檢查 裝置般，檢查者貼在裝置，直視玻璃基板而檢查者不同， 只要檢查者可在離開裝置之位置作業者即可。此自動檢查 裝置於檢查、觀察時，檢查者不需貼上。因此，由於在自 動檢查裝置，檢查者不致進入運作中之裝置内檢查，故可 將自動檢查裝置之最大高度壓低不需檢查者移動之檢查作 業空間之量。 舉例言之，自動檢查裝置之最大高度係支撐檢查頭之 門型之高架上面為最大高度。在自動檢查裝置，因拍攝基 板之檢查頭為裝置之高度之決定主要原因，故安裝此檢查 頭之高架上面為自動檢查裝置之最大高度位置。藉使手動 巨觀檢查裝置以不干擾之狀態靠近配置於此自動檢查裝置 之高架，可使手動巨觀檢查裝置之設置高度低。 又，本實施形態之微觀檢查裝置20就高架22為固定 式，將玻璃基板G在台21上搬送之例作了說明，而以高架22 為移動式，在使玻璃基板G靜止之狀態下，進行檢查或觀 察，藉此，可縮小將玻璃基板水平載置之台，而可謀求進 一步之省空間化。 又，採用移動式高架時，藉將手動巨觀檢查裝置之檢 查作業台配置於比高架之移動距離空間還上方，可將手動 14 201233996 * ' 巨觀檢查裝置之設置高度壓低降下檢查作業台夕旦 σ〜里。如 此，可將手動巨觀檢查裝置之高度壓低降下檢查作業^ 之量。 此時，將微觀檢查裝置（自動檢查裝置）之基板搬入空門 設於手動巨觀檢查裝置之檢查作業台側’將此微觀檢杳_ 置（自動檢查裝置）於從手動巨觀檢查裝置之檢查作業^離 開之方向錯開而配置，藉此，可於錯開檢查裝置之第〖層部 份之空間區域配置手動巨觀檢查裝置之檢查作業台。 ° 错设 此空間區域，可在不干擾微觀檢查裝置下，將手動巨觀檢 查裝置之檢查作業台配置於低之位置。 . 其他實施形態 第3圖係透視顯示本發明另一實施形態之基板於杳〆 統31之内部構造的正面圖。 上述一實施形態之基板檢查系統1因在微觀檢查裝置 20之上方之空間，進行為大型基板之玻璃基板G之手動巨觀 檢查，故亦有裝置之總高度超過6m之情形，因工薇不同，天 花板之高度不同之點，而有無法配置基板檢查系統丨之情形。 是故，本實施形態之基板檢查系統3.1為可比上述基板 檢查系統1更抑制高度之結構。 如第3圖所示，基板檢查系統31包含有作為手動檢查裝 置之手動巨觀檢查裝置40、作為自動檢查裝置之微觀檢查 裝置50、外殼32。 手動巨觀裝置40具有保持作為大型基板之玻璃基板G 之基板保持器41、將此基板保持器41傾斜成適合檢查者33 15 201233996 之目視觀察之角度的榣動機構、及從保持於以此搖動機構 而傾斜之基板保持器41之被檢查對象基板（玻璃基板）〇之 上方照射的巨觀照明光源46。再者，手動巨觀檢查裝置4〇 具有用於穿射光所作之檢查之背光照明光源47。 搖動機構具有軸支基板保持器4丨之保持器旋動軸4 i a 之2個滑動部42、將此滑動部42支撐成可滑動之2個框架 43、使該等框架43旋動成預定角度之驅動部。此驅動部具 有-端連結於各_43之2個臂料、雜傾斜配置於微觀 檢查裝置5G之上方之臂部44之剩餘另—端的2個傾斜轴 45。為此實施形態時，框架43為傾斜成預定角度之狀態即 可’亦可使框架43以傾斜成第3圖之實線所示之預定角度之 狀態固定。此時，若在將框架43傾斜成預定角度之狀態下， 框架43之一端側（基端側）延伸而出至低於微觀檢查褒置（自 動檢查裝置）50之最大高度位置8之位置時，可使基板保持 器4!向前突出至微觀檢查裝置（自動檢查裝置)敗外側。較 佳為藉使框架43延伸而出至微觀檢查裝置（自動檢查裝 置)50之台51之外側’而可使基板保持器41向前突出至台^ 之外側。 於框架43固定成預定角度時，使基板保持_在搬送 機器人4之基板搬入位置旋動成水平狀態，並且，使基板保 持器41在目視觀察位置旋動成適合基板目視觀察之角度 即可。 此外，在本實施形態中，滑動部42、框架43、臂部料 及傾斜軸45亦分別配置有2個，由於在第3圖之正面圖重 201233996 « * 疊存在，故僅於圖顯示前面侧。 手動巨觀檢查裝置4〇之框架43之一部份、臂部44、傾 斜軸45、背光照明光源47等（有時為基板保持器41及滑動部 42)配置於微觀檢查裝置5〇之上方。此時，微觀檢杳裝置（自 動檢查裝置）5〇於罪近配置於上方之手動巨觀檢查裝置4〇 之檢查作業空間32c之側设玻璃基板g之基板搬入空間 (32b) ’於此基板搬入空間（32b)之内側配置以跨越台51之狀 態而呈門型形狀之固定式高架52。於此微觀檢查裝置5〇之 基板搬入空間（32b)設定第2圖所示之搬送機器人4用以使 玻璃基板G於台51上搬入、搬出之手臂如的上下移動動作 空間。 • 藉於微觀檢查裝置50之上方將手動巨觀檢查裝置40配 置成微觀檢查裝置50之基板搬入空間（32b)與手動巨觀檢查 裝置40之搬入空間（32a) 一致，而可將手動巨觀檢查裝置4〇 降低設置至不與微觀檢查裝置5〇干擾之低位置。 基板保持器41呈保持形成矩形之玻璃基板G之周緣 的中間貝穿矩形框構造，而可以保持器旋動抽仏為中心 旋動。 ’月動部42以在基板保持_之相互對向之2邊之中央 :反保持器41的左右―對之丨組配置，且對平行配置之 一對框架43⑼躺卡合(標號42-2 ，42-3)。藉此滑動部42 ^支於滑動部42之基板保持器41亦移動(標號 41-2，41-3) 〇 基板保持器41沿著框架43移動至位於微觀檢查 17 201233996 裝置50之上方之位置（標號41_2)與一部份（亦可為全部）位於 微觀檢查裝置50之上端（面s)還下方之位置（標號41-3)。 各框架43以形成於一端（下側）之凸緣43a，連結於固定 在圖中未示之架台之固定軸48。此固定軸48設於比微觀檢 查裝置50之台51還前方，且比微觀檢查裝置50之最上方高 度位置（面S)還下方。框架43以固定軸48為旋轉中心，在 圖中所示箭號之範圍旋動，俾不與微觀檢查裝置50之台51 干擾。 如此’使固定軸48配置於從微觀檢查裝置50之台51偏 離之前方，而使框架43之一端側（基端側）向前突出至比微觀 檢查裝置50之台51還外側。藉使滑動部42移動至此向前突 出之框架43之部份，可移動地設於滑動部42之基板保持器 41向前突出至低於微觀檢查裝置5〇之最上方高度位置之台 51的前方。在本實施形態中，藉使基板保持器41向前突出 至為自動檢查裝置之微觀檢查裝置5〇之前方，可將作為檢 查作業空間32c之檢查作業台設於從微觀檢查裝置（自動檢 查裝置）5〇偏離之前方。 檢查作業空間32c係檢查者33沿著手動巨觀檢查裝置 40之目視觀察用窗配置。手動巨觀檢查裝置4〇之目視觀察 用窗配合沿著框架43 ’移動至最下方時之基板保持器歡 停止位置而設。檢查作業空間32e之檢查作#台（作業用地 板部份）配置於比目視觀察用f還下側，而形成為可供檢查 者33為目視觀察而移動之通路^此檢查作業台設於低於目 視觀察用窗之下側開口之位置，例如，降低·〜漏腿， 18 201233996 而使檢查者之腰之位置為下側開口邊之位置。藉降低此檢 查作業台，可將從基板上方照射巨觀照明光之巨觀照明光 源46之安裝位置減低，故可減低手動巨觀檢查裝置4〇之高度。 由於為檢查者33之觀察高度位置之目視觀察用窗與巨 觀照明光源46之配置位置關係為一定距離，故可將巨觀照 明光源46之安裝位置降低將目視觀察用窗降低之量，而可 將裝置全體之高度壓低。 此外’於檢查作業空間32c之至少一端設有可供檢查者 33攀爬之階梯。 於各框架43之另一端側連結有臂部44。此臂部44以傾 斜配置之傾斜軸45推拉，各框架43可在對水平面傾斜之範 圍内，在本實施形態為在玻璃基板G之搬出搬入時之傾斜狀 態（標號43-1)與適合檢查者33之目視觀察之傾斜狀態（標號 43-2)間旋動。藉此框架43之旋動，基板保持器41及滑動部 42亦一同旋動（標號41-1，41-2，42-1，42·2)。 此外，由於固定軸48位於比作為微觀檢查裝置50之最 大高度位置之高架52的上端（面S)還下方，故框架43之一部 份位於比微觀檢查裝置50之最大高度還下方。 微觀檢查裝置50與上述一實施形態之微觀檢查裝置20 同樣地，具有台51、固定式高架52、作為檢查部之顯微鏡 53、架台54及圖中未示之基板搬送部。此外，作為微觀檢 查裝置50之最大高度之上端（面S)在本實施形態中為高架52 之上端。 於外殼32與上述一實施形態之外殼2同樣地，形成有2 19 201233996 個基板搬出搬入用窗部32a、32b及檢查作業空間32c。 以下，就使用上述基板檢查系統3 i之基板檢查作說明。 首先’就手動巨觀檢查作說明。 與上述第1實施形態同樣地，以基板搬送機器人4將玻 璃基板G從外殼32之基板搬出搬入用窗部32a搬入至手動巨 觀檢查裝置4〇。此時，框架43因如上述在從水平狀態傾斜 之範圍内旋動，故不旋動成水平狀態（4H),而基板保持器 41以保持器旋動軸41a為中心，與框架43獨立地旋動成水平 狀態（41-1)。 虽將玻瑀基板G保持於水平狀態之基板保持器4丨時，首 先’以保持器旋動軸41a為中心，使基板保持器做動至與 框架43平行之狀g。然後，藉傾斜軸45按壓臂部44，連結 於臂部44之框架43以固定⑽為中⑽旋動，傾斜至檢i 者33進行目視檢查之位置⑷_2)。如此，藉以基板保持器 41、框架43之順序使料_，或使基板保持純及框架 43同時旋動，可料基板保持糾之移動空間。 然後，-面使基板保持器43搖動，同時，以滑動部们 使基板保持器41移動，—面騎查者33目视巨觀照明光源 二射光或背光照明光源47之穿透光，進行玻璃基板G 觀檢查。此外，將玻璃基板G之背面進行手動巨觀 檢查時，錢_43_倒下至林私干擾 ，以保持器旋動轴化為^，使基板保持 當手動巨觀檢查結 束後，以傾斜軸45將臂部44拉回 20 .201233996 使框架43倒下後⑷」），使基板保持器概動成水平狀態 (41-1)，以圖中未示之基板搬送機器人，從基板搬出搬入用 窗部32a將玻璃基板G搬出。此時，以框架心、基板保持器 41之順序制等旋動，或藉使框如及基板保持㈣同時 旋動，可縮小基板保持器41之移動空間。 關於微觀檢查，由於與上述一實施形態相同，故省略 說明。 在以上所說明之本實施形態中，亦與上述-實施形態 同樣地’由於檢查者33因檢查而不介於微觀檢查裝置（自動 檢查裝置）50之裝置内，故可將微觀檢查裝置（自動檢查裝 置）5G之高度壓低至與高架52同等之高度。藉利用此微觀檢 查裝置（自動檢查裝置）50之上空之空間，配置手動巨觀檢查 裝置40，而可較併設兩裝置者，縮小設置空間。 又，由於手動巨觀檢查裝置40與微觀檢查裝置（自動檢 查裝置)50係相互獨立之裝置，故可同時進行手動巨觀檢查 裝置40與微觀檢查裝置（自動檢查裝置）50之微觀檢查，而不 致使兩檢查之運作效率降低，即使將手動巨觀檢查裝置4〇 配置於微觀檢查裝置（自動檢查裝置）5〇之上方，謀求省空間 化’生產效率亦不致下滑。 再者’由於可不使用在手動巨檢查裝置4〇與微觀檢杳 裝置（自動檢查裝置）50共通之基板保持部（基板保持器 41)，而使用適合各檢查裝置40、50之基板保持部，故檢查 性能不致下滑。 是故’根據本實施形態，亦可在不使生產效率及檢杳 21 201233996 性能下滑下，謀求基板檢查系統31之省空間化。 又，在本實施形態中，將比手動巨觀檢查裝置40易受 振動之影響之微觀檢查裝置50配置於手動巨觀檢查裝置4〇 之下方，且使手動巨觀檢查裝置40與微觀檢查裝置50分 離，設置於地板，故來自手動巨觀檢查裝置40之振動不致 傳達至微觀檢查裝置50，而可進行精確度高之檢查。又， 藉使手動巨觀檢查裝置40與微觀檢查裝置50分離，在現場 之組裝容易，且可易輸送。 又，於檢查作業空間32c側設玻璃基板G之搬入空間’ 將高架52固定設於從作為此基板搬入空間之第2圖所示之 基板搬送機器人4之手臂4a之上下移動動作空間偏離的位 置。藉使此高架52遠離檢查作業空間（檢查作業台）32c側’ 可於作為檢查作業空間32c側之台51之上方之基板搬入空 間32b，即，手臂4a之上下移動動作空間上形成大空間。 如此，藉將手動巨觀檢查裝置40之檢查作業空間（檢查 作業台）配置於不與微觀檢查裝置（自動檢查裝置）5〇干擾之 空間區域，將檢查作業台降低至低位置而設置，可將裝置 全體之高度壓低降低此檢查作業台之量。 又，藉將手動巨觀檢查裝置40配置於位於微觀檢查裝 置50之基板搬入空間之上方的空間，可於微觀檢查裝置50 之一部份重疊配置手動巨觀檢查裝置40之一部份，故相較 於將微觀檢查裝置50與手動檢查裝置40並列配置之情形’ 可謀求基板檢查系統31之省空間化達重疊之量。 又，在本實施形態中，由於為框架43之旋動中心之固 22 201233996 定軸48位於比作為微觀檢查裝置50之最大高度仿置之上端 (面S)還下方，故可使手動巨觀檢查裝置4〇之框架43向前突 出至微觀檢查裝置50之台51之前方及下方。藉此，由於可 將手動巨觀檢查裝置40之目視觀察用窗下降至下方框架43 向前突出至下方之量，故可進一步壓低裝置全體之高度。 又，可將滑動部42可移動地設於框架43，進—步，將 基板保持器41可移動地設於此滑動部42，藉此，可使基板 保持器41移動至比框架43之基端部更下方。如此，藉使基 板保持器41為以2階段滑動之結構，可使基板保持器41移動 至比微觀檢查裝置（自動檢查裝置）5〇之最上方高度位置更 低之位置。藉此，由於可使目視觀察用窗低，而壓低與此 目視觀察用窗具有一定距離關係之巨觀照明位置，故可易 抑制裝置全體之高度。 又’藉傾斜軸45位於微觀檢查裝置50之上方，可謀求 基板檢查系統31之省空間化。 又，在本實施形態，框架43在對水平面傾斜之範圍内 旋動(43-1，43-2)，基板保持器41於玻璃基板G之搬出搬入 時’與樞架43獨立地旋動成水平狀態。藉此，可抑制框架 43之移動空間，而可更進一步謀求基板檢查系統31之省空 間化。 又，如本實施形態般，於搬入玻璃基板G時，以基板保 持器41、框架43之順序（或同時)使該等旋動，於搬出玻璃基 板0時，以框架43、基板保持器41之順序（或同時)使該等旋 動’可縮小基板保持器41之移動空間，因而，可更進一步 23 201233996 謀求基板檢查系統31之省空間化。 此外，在本實施形態中，如上述，由於將作為框架驅 動部之傾斜軸45配置於微觀檢查裝置之上方，故可謀求基 板檢查系統31之更進一步之省空間化，亦可將框架驅動部 直接連接於固定轴48。此時，驅動系統容量增大，藉將框 架驅動部配置於側邊而非玻璃基板G之上方，可進行清潔性 優異之檢查，而可更進一步提高檢查性能。 又，在上述各實施形態中，以將自動檢查裝置之高架 固定於從基板搬入空間偏離之位置之例說明，亦可採用可 移動地設於基板搬入空間之移動式高架。採用此移動式高 架時，亦可使框架13、42之基端（下端）延伸而出至比基板搬 送機器人之上下動移動動作空間還上方之位置。 C圖式簡單說明3 第1圖係透視顯示本發明一實施形態之基板檢查系統 之内部構造的正面圖。 第2圖係顯示本發明一實施形態之基板檢查系統之基 板搬入狀態之概略左側視圖。 第3圖係透視顯示本發明另一實施形態之基板檢查系 統之内部構造的正面圖。 2c，32c...檢查作業空間 3，33...檢查者 4...基板搬送機器人 4a…手臂 【主要元件符號說明 1，31...基板檢查系統 2，32…外殼 2a，2b，32a，32b...基板搬出搬 入用窗部 24 201233996 10，40..手動巨觀檢查裝置 11，41...基板保持器 11a，4la...保持器旋轉轴 11-1-11-3 ， 12-1-12-3 ， 14-1 ， 14-2...位置 12，42...滑動部 13，43...框架 13a，43a_··凸緣 13-1...水平狀態 13-2，43-；1，43-2...傾斜狀態 14，44...臂部 15，45...傾斜軸 16，46...巨觀照明光源 17，47...背光照明光源 18，48...固定軸 20，50...微觀檢查裝置 21，51...台 22，52...高架 23，53...顯微鏡 24，54...架台 32a...搬入空間 32b...基板搬入空間 41- 1，41-2，41-3，42-1，42-2， 42- 3...位置 G...玻璃基板 S ·. ·面 25201233996 " INSTRUCTION DESCRIPTION: C FIELD OF THE INVENTION The present invention relates to the inspection of large substrates for the manufacture of flat panel displays (FPDs) such as liquid crystal displays (LCDs), plasma display units (PDPs), etc. Substrate inspection system. BACKGROUND OF THE INVENTION [Inspection of a substrate for a flat panel display has a visual inspection (manual macro inspection) in a state where the substrate is raised at a predetermined angle. , irradiating the giant illuminating light, and discriminating the defect visually from the scattered state of the reflected light of the substrate, or illuminating the backlight from the back side of the substrate in a state where the substrate is vertically erected, and scattering from the transmitted light State to visually identify defects. Further, an arbitrary portion on the substrate is enlarged by a microscopic inspection portion such as a microscope to observe a microscopic inspection of the defect. With the increase in the size of flat panel displays in recent years, the flat glass display has been enlarged in many ways, for example, a large substrate of 15 〇〇 x 18 mm or more has appeared. With the increase in the size of the glass, the manufacturing line of the substrate including the manual giant inspection apparatus and the micro inspection apparatus has also been enlarged. For this reason, a technique of performing manual macroscopic inspection and microscopic inspection by a single device has been proposed (see, for example, Patent Documents 1 and 2). In the apparatus for performing the above-described manual inspection and microscopic inspection, the substrate mounting portion (substrate holder) of the microscopic inspection device is raised to the driving portion on the worker side, and the substrate mounting portion can be erected from the substrate. Above, illuminate the giant view 3 201233996 illumination light and check it visually. CITATION LIST Patent Literature Patent Literature 1 Patent Publication No. 2003-344294 Patent Document 2 PCT Patent Publication No. 2000-28537 SUMMARY OF INVENTION Summary of the Invention In the conventional manual inspection, The main illumination light is irradiated from above the substrate to detect the reflected light in a state where the substrate holder holding the substrate is raised to an inclination angle suitable for visual inspection by the examiner, or the substrate holder is raised vertically. In this state, the light is irradiated from the rear of the substrate to detect the transmitted light, and the substrate holder is preferably a structure that penetrates only the middle of the periphery of the substrate. However, when the intermediate substrate holder is used, since the substrate holding force in the middle of the substrate is weak, the substrate is easily shaken, and in the microscopic inspection for magnifying observation, the image is shaken, and the microscopic inspection is suitable. A substrate holder formed by a sheet to keep the entire substrate horizontal is used. a In this case, when performing manual macroscopic inspection and microscopic inspection with a single device, the substrate holder formed by the sheet is selected when the inspection is prioritized. When the substrate holder of the sheet is used, since the glass substrate is transparent, not only can the scratch on the substrate holder be observed, but also the main cause of the error detection, and the visual inspection of the backlight cannot be performed. The problem. In addition, when a manual substrate inspection and microscopic inspection are performed using a common substrate holder, manual substrate inspection is performed by raising the substrate mounting portion of the micro inspection apparatus, and manual macro inspection and micro inspection cannot be performed at the same time. The inspection of the production tact time is increased, which in turn causes problems in that the production efficiency of the substrate cannot be improved. In view of the above-described conventional circumstances, the present invention provides a substrate inspection system for large substrates that can save space without reducing production efficiency and inspection performance. . Means for Solving the Problem The substrate inspection system of the present invention is characterized in that the inspection target substrate is inspected by a plurality of inspection methods, and includes an automatic inspection device, a gantry, a manual giant inspection device, and a substrate transfer robot, and the automatic inspection device Inspecting the substrate to be inspected by the imaging unit; the gantry has a gate-shaped leg that spans the automatic inspection device; the manual inspection device is disposed on the gantry and directly views the substrate to be inspected And the substrate transfer robot that causes the inspection target substrate to be carried in and out of the automatic inspection device and the manual giant inspection device; the manual giant inspection device is independently disposed on the automatic inspection device by the gantry Above. Advantageous Effects of Invention In the present invention, since the manual giant inspection device and the automatic inspection device are independent devices, the manual giant inspection device and the inspection from the 201233996 dynamic inspection device can be simultaneously performed without causing the operational efficiency of the two inspections to be lowered. Even if the manual giant inspection device is placed above the automatic inspection device, space is saved, and production efficiency does not fall. Further, since the substrate holding portion common to the manual inspection device and the automatic inspection device can be used, and the substrate holding portion suitable for each inspection device can be used, the inspection performance does not fall. Therefore, according to the present invention, it is possible to reduce the space efficiency of the substrate inspection system without slipping down the production efficiency and the inspection performance. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front elevational view showing the internal structure of a substrate inspection system according to an embodiment of the present invention. Fig. 2 is a schematic left side view showing a state in which a substrate of a substrate inspection system according to an embodiment of the present invention is carried. Fig. 3 is a front elevational view showing the internal structure of a substrate inspection system according to another embodiment of the present invention. I. Embodiment 3 Mode for Carrying Out the Invention Hereinafter, a substrate inspection system according to an embodiment of the present invention will be described with reference to the drawings. (Embodiment) FIG. 1 is a front view showing the internal structure of a substrate inspection system 1 according to an embodiment of the present invention. Fig. 2 is a schematic left side view showing the state in which the substrate of the substrate inspection system 1 is carried. 201233996 As shown in Fig. 1, the substrate inspection system i includes a manual field inspection device ig which can be visually observed as a visual observation device, and an image which is taken by a digital microscope (photographing unit) as an automatic inspection device. The image processing 'microscopic inspection device 2 〇 and the outer casing 2 (shown by the 2-point key line) for detecting defects are read as the base of the object to be inspected, and the plate of the large glass plate is 15 〇〇 _ or more. A (four) prime glass substrate (hereinafter, simply referred to as a glass substrate) G is displayed. The manual giant inspection device 10 includes a substrate holder u that holds the glass substrate G as a substrate holding portion, and a tilt mechanism that tilts the substrate holder 成 to an angle suitable for visual inspection by a worker, and is held by shaking The giant illumination source 16 that is illuminated above the glass substrate 基板 of the substrate holder 11 that is tilted by the mechanism. Further, the manual giant inspection device (4) has a backlight illumination source 17 (shown by a 2-dot chain line) that illuminates the light from the back side of the glass substrate G in a state where the substrate holder 11 is erected. The rocking mechanism has two sliding portions 12 of the retainer rotating shaft 11a that are axially supported on the both sides of the substrate holder, and the sliding portion 12 is supported by the two frames 13 that are slidable. The frames 13 are rotated to drive portions of a predetermined angle. The drive unit is configured such that each of the frames 13 is rotatably supported by a manual inspection apparatus, and two arm portions 14 are coupled to one end of each of the frames 13 on the side opposite to the rotation support shaft as the arm portions. 14 is composed of two tilting shafts 15 of the sliding shaft driving portion that moves up and down. The drive unit may be a rotating shaft that connects the drive motor to the two frames 13. Further, two of the sliding portion 12, the frame 13, the arm portion 14, and the tilting shaft 15 are disposed, and since the front view of the drawing overlaps, only the side of the figure 201233996 is displayed. The manual giant inspection device 10 is disposed above the microscopic inspection device 20 and can be visually inspected independently of the microscopic inspection of the microscopic inspection device 20. The substrate holder 采用 used in the manual giant inspection apparatus 10 has a rectangular frame structure in the middle of the periphery of the rectangular glass substrate G, and is rotatable about the holder rotation axis 1 la. Further, as shown in Fig. 2, the substrate holder 11 holds the peripheral edge of the glass substrate g by a plurality of peripheral edge holding portions 11b. The substrate holder 11 is such that the thin glass substrate G is horizontally unfolded, and is preferably arranged in a lattice shape so that the rectangular frame member having a rectangular cross-sectional shape inside the rectangular frame is lower than the upper surface of the substrate holder 11. And an adsorption pad for adsorbing and holding the glass substrate G is provided on the support member. By adsorbing the back surface of the glass substrate G by adsorption, the glass substrate G can be shaken while the substrate holder 11 is shaken. The sliding portion 12 is disposed in a pair of right and left pairs of the substrate holders 11 which are axially supported on the opposite sides of the substrate holder 11, and is slidably engaged with the frame 13 in parallel. The position in the middle solid line and the illustrated key line (reference 12-2, 12-3). Thereby, the sliding portion 12 slides along the frame 13, and the substrate holder 11 pivotally supported by the sliding portion 12 can also slide along the frame 13' to the position shown by the solid line in the figure and the chain line of the figure 2 (reference numeral ii_2, 11-3). Each of the frames 13 is rotatably supported by a flange 13a' as a bearing portion formed on one end side of the opposite side of the arm portion 14 to be fixed to a fixed shaft 18 of a visual inspection stand (not shown). The arm portion 14 connected to each frame 13 moves up and down along the tilt axis 15 extending in the vertical direction (reference numeral 14-1, 14-2). 'The frame 13 is rotated to the horizontal position when the glass substrate g is carried in and out. 8 201233996, • State (Standard Tiger 13-1) and the tilt state (labeled Π-2) for visual inspection of Inspector 3. Further, by the rotation of the material (four) 13, the substrate holding member and the sliding portion 12 are also rotated together (reference numerals 11-1, 1U2, 121, 12 2). Further, the gantry for the manual inspection apparatus has a gate-shaped foot portion and is disposed to cross the microscopic inspection device 2 of the automatic inspection device. The gantry of the mobile giant inspection device 10 is disposed separately from the gantry of the microscopic inspection device. Therefore, the manual giant inspection apparatus 1 is a device that can be observed by the inspector 3 by visually viewing the glass substrate, so that the influence from the external and internal vibrations is small, and the floor of the clean room can be directly placed without the vibration isolation table. Since the microscopic inspection device for the automatic inspection device is affected by external vibrations, and the captured image is shaken and cannot be properly inspected, it is preferable to reduce the vibration isolation table from the outer casing. Thus, it is preferable to separate the manual giant inspection apparatus from the gantry and the microscopic inspection gantry 24. The microscopic inspection device 20 has a table 21 on which a glass substrate G attached to the gantry 24 for microscopic inspection devices is placed horizontally, and a solid frame 20 which is arranged to cross the table 21 and has a shape of a door i. In a driving device such as a linear motor, the microscope 23 that moves in a direction perpendicular to the conveying direction of the glass substrate G (perpendicular to the direction of the paper surface of the first drawing) holds the glass substrate G′ and is transported in the conveying direction. A substrate transfer unit not shown. The port 21 can be transported by using a substrate such as a floating table, a rotary table, or a roller conveyor. The α-floating system is in the state where the glass substrate G is floated by air, and the end portion of the glass substrate G or the glass substrate g is passed. In the center line of the center of gravity, the carrier is held by the substrate transfer unit, and the rotating table is held in the state in which the glass substrate G is rotated by the rotating body, and the glass substrate is held by the substrate transfer unit, and the holder is moved to 201233996. The sub-conveyor is a drive roller conveyer that is rotationally driven while supporting the glass substrate G on the back surface of the contact glass substrate G. Further, when a movable overhead that moves the overhead frame 22 along the table 21 is employed, a fixed table that fixes the table 21 to the gantry 24 can be used. The substrate holder 丨丨3 and the frame 丨3 of the micro-inspection device are placed in the micro-inspection device 2 in a state of not interfering with the overhead 22 of the micro-inspection device 20, the table 21, or the arm 4a of the substrate transfer robot 4. The space area of 〇. A substrate carrying-in/out window portion 2a for carrying out the loading and unloading of the glass substrate G for the manual giant inspection device 1 is formed on the outer casing 2 covering the entire manual inspection apparatus 10 and the micro inspection apparatus (automatic inspection apparatus), and is used for microscopic The substrate loading/unloading window portion 2b for loading and unloading of the glass substrate G of the inspection device 20 is inspected. The substrate loading/unloading window portion 2a on the side of the manual inspection device 10 has the same shape and the same area as the substrate loading/unloading window portion 2b on the side of the micro inspection device 20, and is provided directly above the window portion 2b. The substrate loading/unloading window portions 2& and 2b are disposed to be transported to the substrate as shown in Fig. 2 of the microscopic inspection device (automatic inspection device) that transports the glass substrate G to the first layer and the manual macroscopic inspection device of the second layer. The upper and lower moving directions of the arm 4a of the robot 4 are the same. In this way, the substrate loading space of the two devices corresponding to the substrate loading/unloading window portions 2a and 2b is arranged in the same vertical relationship, and the one substrate transfer robot 4 can supply the glass substrate G to the inspection device 20 disposed on the first layer. The substrate loading space and the substrate loading space of the inspection device 10 disposed in the second layer. In the state where the substrate transfer robot 4 is fixed to the floor, only the arm 4a is moved up and down, and the arm 4a is easily aligned in the substrate carry-in/out window portions 2a and 2b. In the hand of the 201233996 motion inspection apparatus 10, an inspection work station for inspecting the work space 2c for the visual inspection by the examiner 3 is formed. Hereinafter, the production of the glass substrate G of the above-described substrate inspection system 1 will be described. Since the manual inspection apparatus 10 and the microscopic inspection apparatus 20 are independent of each other, the substrate inspection system 1 can simultaneously perform manual macroscopic inspection and microscopic inspection. First, let's explain the manual giant inspection. The substrate transfer robot 4 shown in Fig. 2 carries the glass substrate G supported by the plurality of arms from the substrate carry-in/out window portion 2a of the outer casing 2 to the manual giant inspection device 10. At this time, the tilt shaft 15 moves the arm portion 14 downward, and the frame 13 is maintained in the horizontal state (13-1). The X' substrate holder 11 is also maintained in a horizontal state (1M) parallel to the frame 13. When the glass substrate G is positioned and held at the reference position on the substrate holder 11, the tilting shaft 15 moves the arm portion 14 upward. Thereby, the frame 13 coupled to the arm portion 14 is rotated about the fixed shaft 18, and is inclined to a position (13-2) where the examiner 3 performs visual inspection. Further, Φ is centered on the holder rotation axis Ua, and the substrate holder is shaken while the movable portion 12 moves the substrate holder to the inspector's field of view (n-degree position) in the up-and-down direction. (4) The vehicle and (4) shall perform the manual h-check on the surface of the glass substrate. In addition, when the back surface of the slab substrate G is inspected, the substrate frame 13 is slightly lowered to the position where the squatting of the illuminating light source 16 is disturbed, and the state is rotated around the holder rotating shaft 11a. The substrate holder 丨丨 is reversed. Moreover, when the penetrating light of the backlight source 17 is used for visual inspection, the substrate holder U can be raised until the substrate holder U does not interfere with the giant illumination source 16, and the frame 13 is set up. The substrate holder 11 is brought close to the examiner 3. Further, in a state in which the substrate is held up, the backlight source 17 can be moved so as to be close to the back surface of the substrate holder 11. When the macroscopic inspection is completed, the arm portion 14 is lowered by the tilting shaft 15, and the frame 13 can be rotated to a horizontal state, and the substrate holder can be "returned to the horizontal state, and the substrate transfer robot 4 can be carried out and carried out from the substrate. The window portion 2a carries out the glass substrate G. First, the substrate transfer robot 4' shown in Fig. 2 is carried out from the outer casing 2 to carry out the loading window portion 2b, and the glass substrate G is carried into the microscopic inspection device 20. When the glass substrate G is placed on the stage 21, the glass substrate G is positioned at the reference position. After the positioning, the glass substrate G is moved to a predetermined position by a substrate transfer unit (not shown), and the microscope 23 is transferred to the substrate. The direction in which the conveyance direction (the left-right direction of FIG. 1) intersects vertically (the direction perpendicular to the plane of the paper of FIG. 1) is moved, and the microscopic inspection of the glass substrate G can be performed by the microscope 23. After the microscopic inspection is completed, it is not shown in the drawing. The substrate transfer unit carries the glass substrate G back to the carry-out position, and the substrate transfer robot 4 carries the glass substrate G out of the window portion 2b. In the present embodiment described above, Since the inspector 3 is not in the apparatus of the microscopic inspection apparatus (automatic inspection apparatus) 20, the height of the microscopic inspection apparatus (automatic inspection apparatus) 20 can be lowered to the same degree as that of the elevated 22 2012. The space above the microscopic inspection device (automatic inspection device) 20 is arranged with the manual giant inspection device 10 as a two-layer structure, and two sets of devices can be provided to reduce the installation space. 10 and the micro-inspection device (automatic inspection device) 20 are independent devices. Therefore, the inspection of the giant inspection device 10 and the micro-inspection device (automatic inspection device) can be performed simultaneously without causing the operation efficiency of the two inspections to be lowered. 'Even if the manual giant inspection device 1 is placed above the micro inspection device 20, space saving is achieved, and the production efficiency is not degraded. Furthermore, since the manual inspection device 1 and the micro inspection device are not used 2 In the substrate holding portion common to the 自动 (automatic inspection device) 20, a substrate holding portion (substrate holder u, stage 21) suitable for each of the inspection devices 1 and 20 can be used. Therefore, according to the present embodiment, it is possible to reduce the space efficiency of the substrate inspection system 1 without causing the production efficiency and the inspection property to fall. Further, in the present embodiment, the inspection is performed more than manual inspection. The microscopic inspection device 20 that is susceptible to vibration is disposed below the manual giant inspection device 10 and separates the manual giant inspection device 1 from the micro inspection device (automatic inspection device) 2 Therefore, the vibration from the manual giant inspection device 10 is not transmitted to the microscopic inspection device 2, but the microscopic inspection of the precise production can be performed. Moreover, the manual giant inspection device 1 is separated from the microscopic inspection device 20 The construction is easy to assemble on site, and the manual giant inspection device 1 can be easily transported separately from the micro inspection device 20. Further, the 'automatic inspection device is not limited to the microscopic inspection device 13 201233996 of the present embodiment. For example, it may be a line width measuring device, a spectroscopic device, a laser repair device, or the like, and includes an enlarged inspection portion (for example, a microscope). And an enlargement inspection device that captures an imaging unit that enlarges the image of the enlarged portion of the inspection unit. Further, the automatic inspection device also includes an automatic giant inspection device that photographs the entire glass substrate with a line scan camera. That is, the automatic inspection device, like the manual inspection device, is attached to the device, and the glass substrate is directly viewed from the examiner, as long as the examiner can move the device away from the device. When the automatic inspection device is inspected and observed, the examiner does not need to attach it. Therefore, since the inspector does not enter the in-service inspection in the automatic inspection device, the maximum height of the automatic inspection device can be reduced to the amount of inspection work space that does not require the inspector to move. For example, the maximum height of the automatic inspection device is the maximum height above the overhead of the door type supporting the inspection head. In the automatic inspection device, since the inspection head of the photographing substrate is the main cause of the determination of the height of the device, the upper surface of the inspection head is the maximum height position of the automatic inspection device. If the manual giant inspection device is placed close to the overhead of the automatic inspection device in a state of no interference, the setting height of the manual giant inspection device can be made low. Further, in the microscopic inspection apparatus 20 of the present embodiment, the case where the overhead frame 22 is of a fixed type and the glass substrate G is conveyed on the stage 21 is described, and the elevated frame 22 is moved, and the glass substrate G is placed in a stationary state. By performing inspection or observation, it is possible to reduce the number of places on which the glass substrate is horizontally placed, and further space saving can be achieved. Moreover, when the mobile overhead frame is used, the inspection work table of the manual giant inspection device is disposed above the moving distance of the overhead frame, and the setting height of the manual 14 201233996 * 'the giant inspection device can be lowered to lower the inspection work platform. Dan σ ~ Li. As a result, the height of the manual giant inspection device can be lowered to lower the amount of inspection work. At this time, the substrate of the microscopic inspection device (automatic inspection device) is placed in the empty door and is placed on the inspection workbench side of the manual giant inspection device. 'This microscopic inspection _ is placed (automatic inspection device) on the inspection from the manual giant inspection device. The direction in which the work is separated is arranged in a staggered manner, whereby the inspection work table of the manual giant inspection device can be disposed in the space region of the layer portion of the inspection device. ° Misplaced This space area allows the inspection table of the manual giant inspection device to be placed in a low position without disturbing the microscopic inspection device. . Other Embodiments Fig. 3 is a front elevational view showing the internal structure of a substrate in a system 31 according to another embodiment of the present invention. In the substrate inspection system 1 of the above-described embodiment, the manual inspection of the glass substrate G of the large substrate is performed in the space above the micro-inspection device 20. Therefore, the total height of the device exceeds 6 m. The height of the ceiling is different, and there is a case where the substrate inspection system cannot be configured. Therefore, the substrate inspection system of this embodiment 3. 1 is a structure that can suppress the height more than the above-described substrate inspection system 1. As shown in Fig. 3, the substrate inspection system 31 includes a manual giant inspection device 40 as a manual inspection device, a micro inspection device 50 as an automatic inspection device, and a casing 32. The manual megascopic device 40 has a substrate holder 41 that holds the glass substrate G as a large substrate, and tilts the substrate holder 41 to a viewing angle suitable for visual inspection by the examiner 33 15 201233996, and holds it from The giant illumination source 46 that is irradiated above the substrate to be inspected (glass substrate) of the substrate holder 41 that is tilted by the rocking mechanism. Further, the manual giant inspection device 4 has a backlight illumination source 47 for inspection by the light. The rocking mechanism has two sliding portions 42 of the retainer rotating shaft 4 ia of the shaft supporting substrate holder 4, and the sliding portion 42 is supported as two frames 43 that are slidable, and the frames 43 are rotated to a predetermined angle. Drive unit. The driving portion has two tilting shafts 45 whose ends are connected to the two arms of the respective _43 and which are disposed at the remaining other ends of the arm portion 44 which are disposed obliquely above the microscopic inspection device 5G. In this embodiment, the frame 43 is tilted to a predetermined angle, and the frame 43 can be fixed in a state of being inclined at a predetermined angle indicated by a solid line in Fig. 3 . At this time, when the frame 43 is inclined at a predetermined angle, one end side (base end side) of the frame 43 is extended to a position lower than the maximum height position 8 of the microscopic inspection device (automatic inspection device) 50. The substrate holder 4! can be protruded forward to the outside of the microscopic inspection device (automatic inspection device). Preferably, the substrate holder 41 is protruded forward to the outside of the stage by extending the frame 43 to the outer side of the stage 51 of the microscopic inspection apparatus (automatic inspection apparatus) 50. When the frame 43 is fixed at a predetermined angle, the substrate is held _ in the horizontal position of the substrate loading position of the transfer robot 4, and the substrate holder 41 is rotated at a visual observation position so as to be suitable for visual observation of the substrate. Further, in the present embodiment, the sliding portion 42, the frame 43, the arm member, and the tilting shaft 45 are also disposed in two, and since the front view of Fig. 3 is heavy, the 201233996 « * stack exists, so only the front side is shown in the figure. . One part of the frame 43 of the manual giant inspection device 4, the arm portion 44, the tilting shaft 45, the backlight illumination source 47, and the like (sometimes the substrate holder 41 and the sliding portion 42) are disposed above the microscopic inspection device 5 . At this time, the microscopic inspection device (automatic inspection device) 5 is provided with a substrate loading space (32b) of the glass substrate g on the side of the inspection work space 32c of the manual giant inspection device 4 disposed on the upper side. A fixed overhead 52 having a gate shape across the state of the stage 51 is disposed inside the loading space (32b). In the substrate loading space (32b) of the microscopic inspection device 5, the transport robot 4 shown in Fig. 2 is used to move the glass substrate G up and down, and the arm that moves in and out of the table 51 moves up and down. • The manual inspection apparatus 40 is disposed above the micro inspection apparatus 50 so that the substrate loading space (32b) of the micro inspection apparatus 50 coincides with the moving space (32a) of the manual giant inspection apparatus 40, and the manual macro view can be The inspection device 4 is lowered to a position that does not interfere with the microscopic inspection device 5〇. The substrate holder 41 has a rectangular frame structure in which the periphery of the glass substrate G which is formed in a rectangular shape is held, and the holder can be rotated about the center of the twitch. The lunar portion 42 is disposed in the center of the two sides opposite to each other in the substrate holding state: the left and right sides of the counter holder 41, and the pair of parallel arrangements are placed on the frame 43 (9) to be engaged (reference numeral 42-2) , 42-3). Thereby, the substrate holder 41 supported by the sliding portion 42 is also moved (reference numeral 41-2, 41-3). The substrate holder 41 is moved along the frame 43 to a position above the microscopic inspection 17 201233996 device 50. (reference numeral 41_2) and a portion (may be all) are located below the upper end (face s) of the microscopic inspection device 50 (reference numeral 41-3). Each of the frames 43 is coupled to a fixed shaft 48 fixed to a gantry (not shown) by a flange 43a formed at one end (lower side). The fixed shaft 48 is disposed in front of the table 51 of the microscopic inspection device 50 and below the uppermost height position (surface S) of the microscopic inspection device 50. The frame 43 is rotated about the fixed axis 48 and is rotated in the range of the arrow shown in the figure so as not to interfere with the table 51 of the microscopic inspection device 50. Thus, the fixed shaft 48 is disposed before the stage 51 of the microscopic inspection apparatus 50, and one end side (base end side) of the frame 43 is projected forward to the outside of the stage 51 of the microscopic inspection apparatus 50. By the sliding portion 42 moving to the portion of the frame 43 which protrudes forward, the substrate holder 41 movably provided on the sliding portion 42 protrudes forward to the stage 51 which is lower than the uppermost height position of the microscopic inspection device 5A. In front. In the present embodiment, the substrate holder 41 is protruded forward to the front of the microscopic inspection device 5 of the automatic inspection device, and the inspection work table as the inspection work space 32c can be set in the micro inspection device (automatic inspection device). ) 5〇 deviates from the previous side. The inspection work space 32c is arranged along the visual observation window of the manual giant inspection device 40. The visual observation of the manual giant inspection device 4 is provided by the window holder in the case where the frame holder 43' is moved to the lowest position. The inspection work space 32e is placed at a lower side than the visual observation f, and is formed as a passage that can be moved by the examiner 33 for visual observation. The position of the opening on the lower side of the window is visually observed, for example, the position of the waist of the inspector is lowered by the position of the lower side of the examiner. By lowering the inspection workbench, the installation position of the giant illumination source 46 that illuminates the giant illumination light from above the substrate can be reduced, so that the height of the manual giant inspection device can be reduced. Since the positional relationship between the visual observation window and the giant illumination source 46 for the observation height position of the examiner 33 is a certain distance, the installation position of the giant illumination source 46 can be lowered to reduce the amount of the visual observation window. The height of the entire device can be lowered. Further, at least one end of the inspection work space 32c is provided with a ladder for the inspector 33 to climb. An arm portion 44 is coupled to the other end side of each of the frames 43. The arm portion 44 is pushed and pulled by the inclined shaft 45 disposed obliquely, and each of the frames 43 is tiltable to the horizontal plane. In the present embodiment, the tilting state (reference numeral 43-1) and the inspection are performed when the glass substrate G is carried in and out. The slanted state (reference numeral 43-2) of the visual observation of the person 33 is rotated. By the rotation of the frame 43, the substrate holder 41 and the sliding portion 42 are also rotated together (reference numerals 41-1, 41-2, 42-1, 42·2). Further, since the fixed shaft 48 is located below the upper end (face S) of the elevated frame 52 which is the maximum height position of the microscopic inspection device 50, one portion of the frame 43 is located below the maximum height of the microscopic inspection device 50. Similarly to the microscopic inspection apparatus 20 of the above-described embodiment, the microscopic inspection apparatus 50 includes a stage 51, a stationary overhead 52, a microscope 53 as an inspection unit, a gantry 54 and a substrate transfer unit (not shown). Further, the upper end (surface S) which is the maximum height of the microscopic inspection device 50 is the upper end of the elevated frame 52 in this embodiment. In the outer casing 32, in the same manner as the outer casing 2 of the above-described embodiment, 2 19 201233996 substrate carrying-in/out window portions 32a and 32b and an inspection working space 32c are formed. Hereinafter, the substrate inspection using the substrate inspection system 3 i will be described. First, let's explain the manual giant inspection. In the same manner as in the above-described first embodiment, the substrate transfer robot 4 carries the glass substrate G from the substrate carry-in/out window portion 32a of the casing 32 to the manual giant inspection device 4A. At this time, since the frame 43 is rotated in the range inclined from the horizontal state as described above, the frame 43 is not rotated to the horizontal state (4H), and the substrate holder 41 is centered on the holder rotating shaft 41a, independently of the frame 43. Rotate to a horizontal state (41-1). When the substrate holder 4 is held in the horizontal state by the substrate holder G, the substrate holder is first moved to a shape g parallel to the frame 43 around the holder rotation axis 41a. Then, the arm portion 44 is pressed by the tilt shaft 45, and the frame 43 connected to the arm portion 44 is rotated by the fixing (10) to the middle (10), and is tilted to a position (4)_2) where the examiner 33 performs visual inspection. Thus, by the substrate holder 41, the frame 43 in the order of the material, or the substrate is kept pure and the frame 43 is simultaneously rotated, the substrate can be kept in a moving space. Then, the substrate holder 43 is shaken, and at the same time, the substrate holder 41 is moved by the sliding portion, and the surface rider 33 visually views the light of the giant illumination source or the backlight illumination source 47 to perform the glass. The substrate G is inspected. In addition, when the back side of the glass substrate G is subjected to the manual giant inspection, the money _43_ falls down to the forest private interference, and the holder is rotated to the axis, so that the substrate is held after the manual giant inspection is completed, and the tilting axis is used. 45 pulls the arm 44 back to 20. After the frame 43 is lowered (4), the substrate holder is moved to the horizontal state (41-1), and the substrate transfer robot (not shown) moves the glass substrate G from the substrate carry-in/out window portion 32a. At this time, the movement of the substrate holder 41 can be reduced by rotating the frame core and the substrate holder 41 in the order of the frame or by rotating the frame and the substrate simultaneously (four). Since the microscopic examination is the same as that of the above-described embodiment, the description thereof is omitted. In the present embodiment described above, similarly to the above-described embodiment, since the examiner 33 is not in the apparatus of the microscopic inspection apparatus (automatic inspection apparatus) 50 due to the inspection, the microscopic inspection apparatus (automatic The height of the inspection device 5G is as low as the height of the overhead frame 52. By using the space above the microscopic inspection device (automatic inspection device) 50, the manual giant inspection device 40 is disposed, and the two installation devices can be provided to reduce the installation space. Further, since the manual giant inspection device 40 and the microscopic inspection device (automatic inspection device) 50 are independent devices, the microscopic examination of the manual giant inspection device 40 and the micro inspection device (automatic inspection device) 50 can be simultaneously performed. It is not necessary to reduce the operational efficiency of the two inspections, and even if the manual inspection apparatus 4 is placed above the micro-inspection apparatus (automatic inspection apparatus) 5, the space is saved and the production efficiency does not fall. In addition, the substrate holding portion (substrate holder 41) common to the micro-inspection device (automatic inspection device) 50 can be used without using the substrate holding portion suitable for each of the inspection devices 40 and 50. Therefore, the inspection performance will not decline. Therefore, according to the present embodiment, it is possible to reduce the space saving of the substrate inspection system 31 without deteriorating the production efficiency and the performance of the inspection 21 201233996. Further, in the present embodiment, the microscopic inspection device 50 which is more susceptible to vibration than the manual giant inspection device 40 is disposed below the manual giant inspection device 4, and the manual giant inspection device 40 and the micro inspection device are disposed. The 50 is separated and placed on the floor, so that the vibration from the manual giant inspection device 40 is not transmitted to the microscopic inspection device 50, and the inspection with high accuracy can be performed. Further, by separating the manual giant inspection device 40 from the microscopic inspection device 50, assembly at the site is easy and transportation is easy. In addition, the loading space of the glass substrate G is provided on the side of the inspection work space 32c. The elevated frame 52 is fixed to the position where the movement space is shifted from the arm 4a of the substrate transfer robot 4 shown in Fig. 2 as the substrate loading space. . The elevated frame 52 is moved away from the inspection work space (inspection workbench) 32c side by the space 32b on the substrate above the table 51 on the inspection work space 32c side, that is, the arm 4a is moved upward and downward to form a large space. In this manner, the inspection work space (inspection workbench) of the manual giant inspection device 40 is disposed in a space region that does not interfere with the microscopic inspection device (automatic inspection device) 5, and the inspection work platform is lowered to a low position. The height of the entire device is lowered to reduce the amount of the inspection workbench. Further, by arranging the manual giant inspection device 40 in a space above the substrate loading space of the micro inspection device 50, one part of the manual inspection device 40 can be overlapped and disposed on one of the micro inspection devices 50. Compared with the case where the micro-inspection device 50 and the manual inspection device 40 are arranged in parallel, it is possible to reduce the space saving of the substrate inspection system 31 by an amount. Further, in the present embodiment, since the fixed shaft 22 of the center of the rotation of the frame 43 201233996 is located below the upper end (surface S) of the maximum height of the microscopic inspection device 50, the manual macro view can be made. The frame 43 of the inspection device 4 protrudes forward to the front and below of the stage 51 of the microscopic inspection device 50. Thereby, since the visual observation window of the manual giant inspection device 40 can be lowered to the amount in which the lower frame 43 projects forward to the lower side, the height of the entire device can be further lowered. Further, the sliding portion 42 can be movably provided to the frame 43, and the substrate holder 41 can be movably provided to the sliding portion 42, whereby the substrate holder 41 can be moved to the base of the frame 43. The end is further below. Thus, by the structure in which the substrate holder 41 is slid in two stages, the substrate holder 41 can be moved to a position lower than the uppermost height position of the microscopic inspection device (automatic inspection device). As a result, since the visual observation window is made low and the giant illumination position having a certain distance relationship with the visual observation window is lowered, the height of the entire apparatus can be easily suppressed. Further, the tilting axis 45 is positioned above the microscopic inspection apparatus 50, and the space saving of the substrate inspection system 31 can be achieved. Further, in the present embodiment, the frame 43 is rotated (43-1, 43-2) in a range inclined to the horizontal plane, and the substrate holder 41 is rotated independently of the pivot frame 43 when the glass substrate G is carried in and out. Horizontal status. Thereby, the movement space of the frame 43 can be suppressed, and the space saving of the substrate inspection system 31 can be further achieved. Further, as in the case of the present embodiment, when the glass substrate G is loaded, the substrate holder 41 and the frame 43 are rotated in the order (or at the same time), and when the glass substrate 0 is carried out, the frame 43 and the substrate holder 41 are used. The order (or at the same time) allows the rotations to reduce the movement space of the substrate holder 41. Therefore, it is possible to further reduce the space saving of the substrate inspection system 31 by 201233996. Further, in the present embodiment, as described above, since the tilting shaft 45 as the frame driving portion is disposed above the microscopic inspection device, the substrate inspection system 31 can be further saved in space, and the frame driving portion can be used. Directly connected to the fixed shaft 48. At this time, the capacity of the drive system is increased, and by arranging the frame drive unit on the side instead of the glass substrate G, it is possible to perform an excellent cleaning test, and the inspection performance can be further improved. Further, in each of the above embodiments, a description will be given of an example in which the overhead of the automatic inspection device is fixed to a position shifted from the substrate loading space, and a movable overhead that is movably provided in the substrate loading space may be used. When the mobile overhead frame is used, the base end (lower end) of the frames 13, 42 can be extended to a position above the lower moving movement space above the substrate transfer robot. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front elevational view showing the internal structure of a substrate inspection system according to an embodiment of the present invention. Fig. 2 is a schematic left side view showing a state in which a substrate of a substrate inspection system according to an embodiment of the present invention is carried. Fig. 3 is a front elevational view showing the internal structure of a substrate inspection system according to another embodiment of the present invention. 2c, 32c. . . Check the work space 3,33. . . Inspector 4. . . Substrate transfer robot 4a...arm [Main component symbol description 1,31. . . Substrate inspection system 2, 32... housing 2a, 2b, 32a, 32b. . . Substrate carry-out window portion 24 201233996 10,40. . Manual giant inspection device 11,41. . . Substrate holder 11a, 4la. . . Holder rotation axis 11-1-11-3, 12-1-12-3, 14-1, 14-2. . . Location 12,42. . . Sliding portion 13,43. . . Frame 13a, 43a_··Flange 13-1. . . Horizontal state 13-2,43-;1,43-2. . . Tilted state 14,44. . . Arm 15,45. . . Tilting shaft 16,46. . . Giant view lighting source 17,47. . . Backlight source 18,48. . . Fixed shaft 20, 50. . . Microscopic inspection device 21, 51. . . Taiwan 22,52. . . Elevated 23,53. . . Microscope 24,54. . . Stand 32a. . . Move into space 32b. . . The substrate is moved into the space 41- 1, 41-2, 41-3, 42-1, 42-2, 42- 3. . . Location G. . . Glass substrate S ·. ·Face 25