JP2000275140A5 - - Google Patents
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- JP2000275140A5 JP2000275140A5 JP1999080030A JP8003099A JP2000275140A5 JP 2000275140 A5 JP2000275140 A5 JP 2000275140A5 JP 1999080030 A JP1999080030 A JP 1999080030A JP 8003099 A JP8003099 A JP 8003099A JP 2000275140 A5 JP2000275140 A5 JP 2000275140A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- holding means
- inspection apparatus
- substrate holding
- glass substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 description 79
- 238000007689 inspection Methods 0.000 description 26
- 239000011521 glass Substances 0.000 description 20
- 238000005286 illumination Methods 0.000 description 4
- 230000002093 peripheral Effects 0.000 description 4
- 230000001678 irradiating Effects 0.000 description 2
Description
【特許請求の範囲】
【請求項１】 ガラス基板に照明光を照射して前記ガラス基板上の欠陥を検査する基板検査装置において、
前記ガラス基板を支持する矩形の枠部と、前記枠部の開口部に架設され、前記ガラス基板の板面を吸着する吸着部を有する補助保持部と、を備える基板保持手段と、
前記基板保持手段を回転可能に支持する回転支持手段と、
を具備したことを特徴とする基板検査装置。
【請求項２】 前記回転支持手段は、前記基板保持手段を１軸上で回転可能に支持することを特徴とする請求項１記載の基板検査装置。
【請求項３】 前記回転支持手段は、前記基板保持手段を互いに直交する2軸で回転可能に支持することを特徴とする請求項1記載の基板検査装置。
【請求項４】 前記回転支持手段は、
前記基板保持手段を、第1の回転軸を中心として回転可能に支持する第1の回転支持部と、
前記基板保持手段を、前記第1の回転軸に直交する第2の回転軸を中心として回転可能に支持する第2の回転支持部と、
を備えることを特徴とする請求項３記載の基板検査装置。
【請求項５】 前記基板保持手段は、前記基板保持手段の平面内で前記ガラス基板を回転可能に支持することを特徴とする請求項１記載の基板検査装置。
【請求項６】 前記基板保持手段を水平方向に平行移動させる移動手段を有することを特徴とする請求項１記載の基板検査装置。
【請求項７】 前記移動手段は、前記照明下で前記ガラス基板を目視観察する際に、前記基板保持手段を観察位置に移動可能であることを特徴とする請求項６記載の基板検査装置。
【請求項８】 前記移動手段は、前記基板保持手段を水平にした状態で前記ガラス基板の基板受渡し位置に移動し、前記基板受渡し位置で基板搬送手段との間で前記ガラス基板の受渡しを行うことを特徴とする請求項６記載の基板検査装置。
【請求項９】 前記基板保持手段を上下方向に平行移動させる高さ調節手段を有することを特徴とする請求項１記載の基板検査装置。
【請求項１０】 前記枠部は、前記ガラス基板の外縁部を吸着する吸着部を備えることを特徴とする請求項１記載の基板検査装置。
【請求項１１】 前記枠部は、前記ガラス基板の周縁部を挟持するための基板固定部を備えることを特徴とする請求項１記載の基板検査装置。
【請求項１２】 前記基板固定部は、前記枠部に対して回転可能に支持された鍵部によって前記基板の周縁部を挟持することを特徴とする請求項１１記載の基板検査装置。
[Claims]
[Claim 1] In a substrate inspection device that inspects a defect on the glass substrate by irradiating the glass substrate with illumination light.
A substrate holding means including a rectangular frame portion that supports the glass substrate and an auxiliary holding portion that is erected in the opening of the frame portion and has a suction portion that attracts the plate surface of the glass substrate.
Rotational support means for rotatably supporting the substrate holding means and
A substrate inspection device characterized by being provided with.
2. The substrate inspection device according to claim 1, wherein the rotary support means rotatably supports the substrate holding means on one axis.
3. The substrate inspection apparatus according to claim 1, wherein the rotary support means rotatably supports the substrate holding means on two axes orthogonal to each other.
4. The rotation support means
A first rotation support portion that rotatably supports the substrate holding means about the first rotation axis, and a first rotation support portion.
A second rotation support portion that rotatably supports the substrate holding means about a second rotation axis orthogonal to the first rotation axis, and
3. The substrate inspection apparatus according to claim 3.
Wherein said substrate holding means is rotatably board inspection apparatus according to claim 1, characterized in that to support the glass substrate in the plane of the substrate holding means.
6. The substrate inspection apparatus according to claim 1, characterized in that it comprises a moving means for moving parallel to the substrate holding means in a horizontal direction.
Wherein said moving means, when visually observing the glass substrate under the illumination board inspection apparatus according to claim 6, characterized in that the movable substrate holding means to the viewing position.
Wherein said moving means moves the substrate transfer position of the glass substrate while the horizontal said substrate holding means, for transferring the glass substrate between the substrate transfer means by the substrate transfer position The substrate inspection apparatus according to claim 6.
9. The substrate inspection apparatus according to claim 1, further comprising a height adjusting means for moving the substrate holding means in parallel in the vertical direction.
Wherein said frame unit, a substrate inspection apparatus according to claim 1, characterized in that it comprises a suction unit for sucking the outer edge of the glass substrate.
11. The substrate inspection apparatus according to claim 1, wherein the frame portion includes a substrate fixing portion for sandwiching a peripheral edge portion of the glass substrate.
12. The method of claim 11, wherein the substrate fixing portion is rotatably supported key part by the peripheral edge board inspection apparatus according to claim 11, wherein the sandwiching of the substrate relative to the frame portion.
【０００９】
【課題を解決するための手段】 本願発明の請求項１に係る発明は、ガラス基板に照明光を照射して前記ガラス基板上の欠陥を検査する基板検査装置において、ガラス基板を支持する矩形の枠部と、枠部の開口部に架設され、ガラス基板の板面を吸着する吸着部を有する補助保持部と、を備える基板保持手段と、基板保持手段を回転可能に支持する回転支持手段と、を具備したことを特徴とする基板検査装置である。
0009
[Means for solving problems] The invention according to claim 1 of the present invention is a substrate inspection apparatus for inspecting a defect on the glass substrate by irradiating the glass substrate with illumination light, a rectangular frame portion supporting the glass substrate and an opening portion of the frame portion. It is characterized in that it is provided with an auxiliary holding portion having a suction portion for sucking the plate surface of the glass substrate, a substrate holding means including the substrate holding means, and a rotation supporting means for rotatably supporting the substrate holding means. It is a board inspection device.
また、請求項２記載の発明は、回転支持手段は、基板保持手段を１軸上で回転可能に支持することを特徴とする請求項１記載の基板検査装置である。The invention according to claim 2 is the substrate inspection apparatus according to claim 1, wherein the rotary support means rotatably supports the substrate holding means on one axis.
また、請求項３記載の発明は、回転支持手段は、基板保持手段を互いに直交する2軸で回転可能に支持することを特徴とする請求項１記載の基板検査装置である。The invention according to claim 3 is the substrate inspection apparatus according to claim 1, wherein the rotary support means rotatably supports the substrate holding means on two axes orthogonal to each other.
また、請求項４記載の発明は、回転支持手段は、基板保持手段を、第1の回転軸を中心として回転可能に支持する第1の回転支持部と、基板保持手段を、第1の回転軸に直交する第2の回転軸を中心として回転可能に支持する第2の回転支持部と、を備えることを特徴とする請求項３記載の基板検査装置である。 Further, according to the invention of claim 4, the rotation support means includes a first rotation support portion that rotatably supports the substrate holding means about the first rotation axis, and a first rotation of the substrate holding means. The substrate inspection apparatus according to claim 3, further comprising a second rotation support portion that rotatably supports the second rotation axis orthogonal to the axis.
また、請求項５記載の発明は、前記基板保持手段は、前記基板保持手段の平面内で前記ガラス基板を回転可能に支持することを特徴とする請求項１記載の基板検査装置である。The invention according to claim 5 is the substrate inspection apparatus according to claim 1, wherein the substrate holding means rotatably supports the glass substrate in a plane of the substrate holding means.
また、請求項６記載の発明は、前記基板保持手段を水平方向に平行移動させる移動手段を有することを特徴とする請求項１記載の基板検査装置である。The invention according to claim 6 is the substrate inspection apparatus according to claim 1, further comprising a moving means for moving the substrate holding means in parallel in the horizontal direction.
また、請求項７記載の発明は、前記移動手段は、前記照明下で前記ガラス基板を目視観察する際に、前記基板保持手段を観察位置に移動可能であることを特徴とする請求項６記載の基板検査装置である。 The invention according to claim 6 is characterized in that the moving means can move the substrate holding means to an observation position when the glass substrate is visually observed under the illumination. It is a substrate inspection device of.
また、請求項８記載の発明は、前記移動手段は、前記基板保持手段を水平にした状態で前記ガラス基板の基板受渡し位置に移動し、前記基板受渡し位置で基板搬送手段との間で前記ガラス基板の受渡しを行うことを特徴とする請求項１記載の基板検査装置である。Further, according to the invention of claim 8, the moving means moves to the substrate delivery position of the glass substrate with the substrate holding means horizontal, and the glass is moved to the substrate transfer means at the substrate delivery position. The substrate inspection apparatus according to claim 1, wherein the substrate is delivered.
また、請求項９記載の発明は、前記基板保持手段を上下方向に平行移動させる高さ調節手段を有することを特徴とする請求項1記載の基板検査装置である。The invention according to claim 9 is the substrate inspection apparatus according to claim 1, further comprising a height adjusting means for moving the substrate holding means in parallel in the vertical direction.
また、請求項１０記載の発明は、前記枠部は、前記ガラス基板の外縁部を吸着する吸着部を備えることを特徴とする請求項１記載の基板検査装置である。 The invention according to claim 10 is the substrate inspection apparatus according to claim 1, wherein the frame portion includes a suction portion that adsorbs an outer edge portion of the glass substrate.
また、請求項１１記載の発明は、前記枠部は、前記ガラス基板の周縁部を挟持するための基板固定部を備えることを特徴とする請求項１記載の基板検査装置である。The invention according to claim 11 is the substrate inspection apparatus according to claim 1, wherein the frame portion includes a substrate fixing portion for sandwiching a peripheral edge portion of the glass substrate.
また、請求項１２記載の発明は、前記基板固定部は、前記枠部に対して回転可能に支持された鍵部によって前記基板の周縁部を挟持することを特徴とする請求項１１記載の基板検査装置である。 The substrate according to claim 12, wherein the substrate fixing portion sandwiches a peripheral edge portion of the substrate by a key portion rotatably supported with respect to the frame portion. It is an inspection device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP08003099A JP4121662B2 (en) | 1999-03-24 | 1999-03-24 | Board inspection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP08003099A JP4121662B2 (en) | 1999-03-24 | 1999-03-24 | Board inspection equipment |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007333290A Division JP2008116470A (en) | 2007-12-25 | 2007-12-25 | Substrate-inspecting device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000275140A JP2000275140A (en) | 2000-10-06 |
| JP2000275140A5 true JP2000275140A5 (en) | 2006-04-27 |
| JP4121662B2 JP4121662B2 (en) | 2008-07-23 |
Family
ID=13706884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP08003099A Expired - Fee Related JP4121662B2 (en) | 1999-03-24 | 1999-03-24 | Board inspection equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4121662B2 (en) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3752501B2 (en) * | 2001-07-02 | 2006-03-08 | オリンパス株式会社 | Substrate holding device |
| KR100641817B1 (en) * | 2002-05-30 | 2006-11-02 | 삼성코닝정밀유리 주식회사 | Glass substrate handler |
| TWI393875B (en) * | 2004-09-27 | 2013-04-21 | Olympus Corp | Panel holder of panel testing apparatus and panel testing apparatus |
| JP2006133099A (en) * | 2004-11-08 | 2006-05-25 | Micronics Japan Co Ltd | Inspection device of display panel |
| JP4700365B2 (en) * | 2005-02-09 | 2011-06-15 | オリンパス株式会社 | Board inspection equipment |
| KR100748106B1 (en) * | 2005-09-05 | 2007-08-09 | 코리아테크노(주) | The naked eye inspection apparatus for photo mask |
| KR100743427B1 (en) | 2006-08-07 | 2007-07-30 | (주)오엘케이 | Apparatus for macro inspection of flat display panel |
| KR100813117B1 (en) | 2006-10-17 | 2008-03-17 | 최보경 | Pallet having support means of display module |
| KR100783618B1 (en) | 2006-10-31 | 2007-12-07 | (주)오엘케이 | Apparatus for inspecting flat display panel |
| KR100881631B1 (en) | 2007-07-02 | 2009-02-04 | 주식회사 에이디피엔지니어링 | Electron beam testing system and testing method |
| KR101077898B1 (en) | 2009-09-15 | 2011-10-31 | 태산엘시디 주식회사 | Pannel installing apparatus |
| CN112816486A (en) * | 2020-12-31 | 2021-05-18 | 立讯智造(浙江)有限公司 | Detection jig |
-
1999
- 1999-03-24 JP JP08003099A patent/JP4121662B2/en not_active Expired - Fee Related
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