KR100641817B1 - Glass substrate handler - Google Patents

Abstract

The present invention discloses a handler for a glass substrate for handling to inspect for defects in the glass substrate. The present invention is a rotary column which is installed to the Z-axis rotational movement on the upper portion of the base, and the motion girder and Z-axis motion girder installed to the Z-axis translational and X-axis translational movement relative to the rotary column Z It comprises a first drive means for axial translation, a holding means for holding the glass substrate close to the motion girder, and a second drive means for X-axis rotational movement of the holding means with respect to the motion girder. According to the present invention, by holding the glass substrate stably and accurately and inspecting it while carrying out a multiple degree of freedom movement, it is possible to inspect a large and thin glass substrate very simply and efficiently. In addition, the glass substrate can be automatically handled, and accurate and stable chucking can effectively prevent breakage of the glass substrate. And by simply inspecting both sides of the glass substrate there is an effect that can greatly improve the reliability of the inspection.

Description

Handler for glass substrates {GLASS SUBSTRATE HANDLER}

1 is a front view showing the overall configuration of a handler according to the present invention;

2 is a plan view partially showing a rotary column, a motion girder and a holding device of the handler according to the present invention;

3 is a side view showing the configuration of a handler according to the present invention;

4 is a front view showing a holding device of the handler according to the present invention;

5 is a plan view showing for explaining the operation of aligning the glass substrate by the pushing unit of the handler according to the present invention;

6 is a plan view illustrating the operation of chucking the glass substrate by the side chucking unit of the handler according to the present invention;

7A and 7B are side views illustrating an operation of chucking a glass substrate by an upper chucking unit of a handler according to the present invention;

8 is a plan view partially shown for explaining the operation of locking the rim assembly of the holding device by the first locking device of the handler according to the present invention;

9 is a side view partially cut away to explain the operation of locking the rim assembly of the holding device by the second locking device of the handler according to the invention.

♣ Explanation of symbols for the main parts of the drawing ♣

1: glass substrate 10: rotary column

14: Z axis linear motion guide 20: motion girder

21: X axis linear motion guide 30: Up-down air cylinder

40: holding device 50: rim assembly

51-54: 1st-4th support bar 56: Rest

60: side chucking unit 70: pushing unit

80: upper chucking unit 90: holder assembly

91 to 93: first to third support bar 100: rotary actuator

100: first locking device 115: locking air cylinder

116: locking block 120: second locking device

125: locking air cylinder 130: locking block

The present invention relates to a handler for a glass substrate, and more particularly to a handler for a glass substrate to automatically handle in order to inspect the defect of the glass substrate.

As is well known, glass substrates used in the manufacture of flat panel displays, such as thin film transistor-liquid crystal displays (TFT-LCDs), plasma display panels (PDPs), and electro luminescent (EL), Glass melted in glass melting furnace) is manufactured through molding process and cutting process. Many defects occur in such glass substrates due to various factors. Therefore, in order to manufacture high quality flat panel display, the thickness, warpage, flatness, transmittance, bubble, foreign matter, scratch, irregularities, contamination, linearity, and size error of glass substrate are examined and measured. Finding the bad factors and finding out the cause and correcting them.

In general, bubbles, scratches, irregularities, contamination, linearity, and size error of glass substrates are carried out by visual inspection and sampling inspection. In the visual inspection of the glass substrate, the size of the glass substrate that a worker can handle freely is about 550 mm long and 650 mm wide. However, as the size of glass substrates is gradually increased in size and thickness to about 1100 mm in length, 1250 mm in width, and 0.5 to 1 mm in thickness, many difficulties are involved in the handling of workers. Glass substrates are highly susceptible to changes in properties or easily contaminated by physical contact when handling the operator. In this case, since a thin film coated on the surface of the glass substrate, for example, an insulator (SiO ₂ ) film as an insulating film and an indium tin oxide (ITO) film as a conductive film, causes physical contact of the glass substrate. It is common to allow a chucking area for handling the glass substrate within 5 to 8 mm from each edge, and this chucking area is cut off and removed in a later step. As such, it is very difficult and difficult for the operator to chuck the edges of the large and thin glass substrates with limited chucking, and the glass substrates are easily broken due to the bending deformation, causing a safety accident.

On the other hand, looking at the inspection stage for the liquid crystal panel of Japanese Patent Laid-Open Nos. 11-14956 and 11-14957, both ends of the liquid crystal panel are held by the holder at the loading position and loaded into the inspection position for the lighting test of the liquid crystal panel. Then, a technique for unloading the liquid crystal panel from which the inspection is completed from the inspection position to the loading position is disclosed. In addition, the liquid crystal panel gripper of Korean Patent Laid-Open Publication No. 1999-65369 chucks both ends of the liquid crystal panel to be sucked by the suction means of the worktable, and the liquid crystal panel is moved by the worktable while the X-axis and the Y-axis movement are rotated. An inspection technique is disclosed. However, these technologies are not applicable to the handling of large and thin glass substrates, as well as the problem of not being able to inspect both sides of the glass substrate, since the liquid crystal panel must be held in the holder by manual operation by the operator. The glass substrate loading / exporting device of Korean Patent Laid-Open Publication No. 2001-58165 discloses a technique in which a glass substrate stored in a cassette is sucked and loaded by vacuum, and the movement of the fork is controlled by a servomotor. However, due to vacuum adsorption of glass substrates, it is difficult to support the weight of glass substrates during loading and unloading of large and thin glass substrates, and there is a high possibility of causing serious safety accidents when glass substrates are separated from forks. Have

The present invention has been made in order to solve the various problems of the prior art as described above, an object of the present invention is to handle a large and thin glass substrate automatically by a handler for a glass substrate that can be inspected very simply and efficiently To provide.                         

Another object of the present invention to provide a handler for a glass substrate that can effectively prevent the breakage of the glass substrate by chucking the glass substrate accurately and stably.

Another object of the present invention is to provide a handler for a glass substrate that can improve the reliability by simply inspecting both sides of the glass substrate.

Features of the present invention for achieving the above object, the rotary column which is installed to the Z-axis rotational movement on the top of the base; A motion girder installed to allow Z-axis translation and X-axis translation with respect to the rotary column; First driving means for translating the Z-axis motion motion along the rotary column; Holding means installed close to the motion girder and holding the glass substrate; And a second driving means for moving the holding means in the X-axis rotational motion with respect to the motion girder.

Hereinafter, a preferred embodiment of a handler for a glass substrate according to the present invention will be described in detail with reference to the accompanying drawings.

First, referring to FIGS. 1 and 3, the handler of the present invention is provided between a loading station for supplying the glass substrate 1 and an unloading station for discharging the glass substrate 1. The glass substrate 1 is provided in an inspection station for inspecting by the naked eye of an operator. The inspection station includes, for example, an illumination device for illuminating the glass substrate 1 for inspection of the glass substrate 1, and a CCD camera for inspecting bubbles, etc. contained in the glass substrate 1. Inspection equipment is provided.

On the other hand, the handler of the present invention is a vertical rotary column (Rotary column: 10), and the rotary column 10 with respect to the rotary column 10 to move up or down, ie Z-axis translational movement A motion girder 20 is provided. The outer surface of the rotary column 10 is formed with a slot (10a) in the longitudinal direction, the rotary column 10 is Z-axis by the support of the bearing 13 mounted on the shaft 12 of the base 11 It is installed vertically so that it can rotate. And the rotary column 10 may be rotated by the operation of a well-known servo motor.

As shown in FIG. 1 and FIG. 2, the lifting motion of the motion girder 20 is guided by the Z-axis linear motion guide 14. The Z-axis linear motion guide 14 is mounted on the outer surface of the rotary column 10 so as to slide along a guide rail 14a and a pair of guide rails 14a mounted in parallel in the longitudinal direction. It consists of a pair of slide block 14b and the carriage 14c attached to the slide block 14b and to which the motion girder 20 is attached. The rise and fall positions of the motion girder 20 are limited by the upper stopper 15a mounted on the upper end of the rotary column 10 and the lower stopper 15b mounted in the center of the rotary column 10. . The side stopper 15c is mounted at the left end of the carriage 14c of the Z-axis linear motion guide 14, and the rear side of the motion girder 20 is caught by the side stopper 15c and the X of the motion girder 20 is mounted. A dog 15d for restraining the axial translation is mounted.

1 to 3, the handler of the present invention includes an up-down air cylinder 30 as first driving means for lifting and lowering the motion girder 20 along the rotary column 10. The up-down air cylinder 30 is mounted inside the rotary column 10, and the cylinder rod 31 of the up-down air cylinder 30 passes through the slot 10a of the rotary column 10. By the motion girder 20 is connected to the carriage 14c of the Z-axis linear motion guide 14 is fixed. In this embodiment, the up-down air cylinder 30 is constituted by a balance cylinder for smooth movement of the motion girder 20. The first driving means of the motion head 20 includes a ball screw that rotates by driving the servomotor, a nut that moves along the ball screw to move the motion girder 20, and a motion girder 20 It is also possible to apply a linear motion actuator consisting of a linear motion guide for guiding the motion of the ss. In addition, the linear motion actuator includes a guide rail, a slide block sliding the motion girder 20 by sliding along the guide rail, and a linear motor built into the slide block to slide the slide block along the guide rail. It can also be replaced by a linear motor guide consisting of).

Referring back to Figures 1 and 2, the motion girder 20 is X-axis translational motion is guided by the X-axis linear motion guide (21). The X-axis linear motion guide 21 is a guide block 21a mounted on the front of the carriage 14c and a slide mounted on the rear of the motion girder 20 to slide along the guide block 21a. It is comprised by the rail 21b.

As shown in Fig. 1 and Fig. 4, a holding device 40 for holding the glass substrate 1 is provided at the tip of the motion girder 20. The rectangular rim assembly 50 of the holding device 40 is formed with the first and second support bars 51 and 52 of the upper and lower sides and parallel to each other so as to be spaced apart from each side of the glass substrate 1. The third and fourth support bars (53, 54) of the air cylinder 83, each of the first to fourth support bars (51 to 54) are connected by an elbow (55). The second support bar 52 of the rim assembly 50 is equipped with a plurality of rests 56 supporting the lower end of the glass substrate 1. In this embodiment, the rim assembly 50 is designed to accommodate a glass substrate 1 having a size of, for example, about 1100 mm long and about 1250 mm wide.

1 and 4 to 6, a plurality of side chucking units 60 for chucking both ends of the glass substrate 1 on the outer surfaces of each of the third and fourth support bars 53 and 54. ) Is installed. The side chucking unit 60 is fixed to the third and fourth support bars 53 and 54, and rotates about the pivot 62 relative to the fixed gripper 61 to rotate the glass substrate ( And a chucking air cylinder 64 for rotating the movable gripper 63 about the pivot 62, and the movable gripper 63 mounted so as to chuck both ends of 1). The cylinder rod 64a of the chucking air cylinder 64 is connected to one end of the movable gripper 63 by the pivot 65a, and the rear end of the chucking air cylinder 64 is clamped by the pivot 65b. Is connected to. The clamp 66 is fixed to the third and fourth support bars 53 and 54.

As shown in FIGS. 1, 4 and 5, the third support bar 53 of the rim assembly 50 is pushed to align the glass substrate 1 toward the fourth support bar 54. A plurality of pushing units 70 are mounted. The pushing unit 70 is an air cylinder 72 attached to the clamp 71 fixed to the third support bar 53 and a pusher attached to the tip of the cylinder rod 72a of the air cylinder 72. It consists of 73. The pusher 73 is linearly moved by the guide of the guide bar 74 passing through the clamp 71. The pushing unit 70 may be mounted on the fourth support bar 54 so as to push the glass substrate 1 from the fourth support bar 54 toward the third support bar 53.

1, 4 and 7A and 7B, an upper chucking unit 80 is provided on the upper portion of the rim assembly 50 to chuck the upper end of the glass substrate 1 with respect to the rest 56. The upper chucking unit 80 is fixed to the first support bar 51 of the rim assembly 50 and rotates by a plurality of clamps 81 having bearings 81a and bearings 81a of the clamps 81. The first support bar (51) of the air cylinder (83) to which the shaft (82) supported so that it can be supported and the cylinder rod (83a) is connected to rotate the shaft (82). The cylinder rod 83a of the air cylinder 83 is connected to one end of the shaft 82 by the coupler 84a, and the air cylinder 83 is connected to the third support of the rim assembly 50 by the coupler 84b. It is connected to the bar 53. In addition, the upper chucking unit 80 includes a plurality of fixed grippers 85 and fixed grippers that are fixed to the first support bar 51 of the rim assembly 50 to support the upper end of the glass substrate 1. It has a plurality of movable grippers 86 mounted to the shaft 82 so as to chuck the upper end of the glass substrate 1 in cooperation with 85. Each of the fixed and movable grippers 85 and 86 has pads 85a and 86a having flexibility to protect the glass substrate 1.

1, 3 and 4, the rim assembly 50 is mounted to the holder assembly 90 to rotate. The holder assembly 90 is connected to the first support bar 91 disposed in parallel with the first support bar 51 of the rim assembly 50 and the upper and lower ends of the first support bar 91 in parallel with each other. It consists of the 2nd support bar 92 and the 3rd support bar 93 which exist. The second and third support bars 92 and 93 of the holder assembly 90 are connected to the upper and lower ends of the first support bar 91 by elbows 94 so as to form a "c" shape. First and second support bars 51 and 52 of the rim assembly 50 around the pivot 95a of the clamp 95 at the ends of the second and third support bars 92 and 93 of the holder assembly 90. ) Is connected to the center of rotation. In addition, the center of the first support bar 91 of the holder assembly 90 is connected to the rotor 100a of the rotary actuator 100 and the coupler 101 by a second driving means. 100 is fixed to the tip of the motion girder 20.

As shown in detail in FIG. 4, the initial rotational position of the rotary actuator 100 is determined by the positioning device 102. The positioning device 102 is mounted to the hole 102b of the positioning block 102a so that the stopper 102d receiving the spring 102c elasticity can be projected. The stopper 102d of the positioning device 102 is fitted to the groove 102e formed in the outer surface of the rotor 100a to restrain the initial rotational position of the rotor 100a. The initial rotational position of the rotary actuator 100 is a well-known loading / unloading means for chucking and loading and unloading the glass substrate 1, and thus the rim assembly 50 of the holding device 40 from a transporter or a robot. It is set to be able to take over or take over from the rim assembly 50 of the holding device 40 to the loading / unloading means.

As shown in FIGS. 1 and 8, the motion of the rim assembly 50 is constrained by a first locking device 110 mounted on the top surface of the base 11 to approach the rotary column 10. . The first locking device 110 has a guide rail 111 is mounted on the upper surface of the base 11, the slide block 112 for sliding along the guide rail 111, the setting screw on the guide rail 111 It is fixed by 112a. The setting block 113 is mounted by the fastening of the bolts 114 so that the height can be adjusted along the slot 112a of the slide block 112, and a pair of locking air cylinders 115 are provided on the upper part of the setting block 113. ) Are mounted to face each other. The locking block 116 is attached to the elbow 55 connecting the second support bar 52 and the third support bar 53 of the rim assembly 50, and the locking air cylinder 115 is attached to the locking block 116. Is formed with a locking hole 117 through which the cylinder rod 115a of ( Although the locking air cylinder 115 has been described as being configured in pairs, only one may be used and may be replaced by a solenoid.

As shown in FIGS. 1 and 9, the handler of the present invention includes a second locking device 120 that constrains the motion of the rim assembly 50. The second locking device 120 has a guide rail 121 mounted on the upper surface of the base 11 so as to be close to the fourth support bar 54 of the rim assembly 50, and the guide rail 121 has a guide rail 121. The slide block 122 sliding along the 121 is fixed by the setting screw 123. The setting block 123 is mounted by fastening the bolt 124 to adjust the height along the slot 122a of the slide block 122, and the locking air cylinder 125 is provided on the side of the setting block 123. It is mounted to face each other. The cylinder rod 125a of the locking air cylinder 125 is connected to the lower end of the lever 127 which rotates about the pivot 126 fixed to the setting block 123, and the other end of the lever 127 The locking roller 128 is mounted. The conical setting pin 129 is mounted on the upper surface of the setting block 123. The locking block 130 is attached to the elbow 55 connecting the second support bar 52 and the fourth support bar 54 of the rim assembly 50. The front surface of the locking block 130 is formed with a locking hole 131 to which the locking roller 128 is fitted, and a setting hole 132 to which the setting pin 129 is fitted is formed on the bottom surface. The initial position of the handler is set so that the movement of the rim assembly 50 is constrained by the first and second locking devices 110 and 120 to take over the glass substrate 1 from the transporter and take over to the transporter again. .

The operation of the glass substrate handler according to the present invention having the above configuration will now be described.

1, 8 and 9, the rim assembly 50 of the holding device 40 is adapted to receive the glass substrate 1 loaded by the loading / unloading means. It is set at the initial position constrained by the cooperation of (110, 120). As shown in FIG. 7, if the cylinder rod 115a of the locking air cylinder 115 of the first locking device 110 is locked in the locking hole 117 of the locking block 116, the rim assembly 50 ) Is constrained. 9, the locking roller 128 of the second locking device 120 is locked in the locking hole 131 of the locking block 130, the setting pin 129 of the locking block 130 When locked in the setting hole 132, the movement of the rim assembly 50 is restrained.

In addition, as shown in FIG. 5, the movable gripper 63 of the side chucking unit 60 has a fixed gripper in order to take over the glass substrate 1 loaded by the loading / unloading means to the rim assembly 50. And the pusher 73 of the pushing unit 70 is retracted. As shown in FIG. 7B, the movable gripper 86 of the upper chucking unit 80 is opened from the fixed gripper 85.

Next, referring to FIGS. 1 and 4, the operator supports the lower end of the glass substrate 1 loaded by the loading / unloading means to the rest 56 and the both ends of the side chucking unit 60 are fixed. While supporting the gripper 61, the upper end is supported by the fixed gripper 85 of the upper chucking unit 80.

Referring to FIG. 5 again, when the air cylinder 72 of the pushing unit 70 is operated to advance the cylinder rod 72a, the pusher 73 is removed from the third support bar 53 of the rim assembly 50. 4, one side end of the glass substrate 1 is pushed toward the support bar 54. Thus, the vertical center axis of the glass substrate 1 is aligned with the vertical center axis of the rim assembly 50. After the alignment of the glass substrate 1, when the air cylinder 72 is operated to retract the cylinder rod 72a, the pusher 73 returns to the initial position.

As shown in FIGS. 5 and 6, when the chucking air cylinder 64 of the side chucking unit 60 is operated to advance the cylinder rod 64a, the movable gripper 63 is centered on the pivot 62. The rotating and rotating movable gripper 63 cooperates with the fixed gripper 61 to chuck both ends of the glass substrate 1. As shown in FIGS. 7A and 7B, when the air cylinder 83 of the upper chucking unit 80 is operated to advance the cylinder rod 83a, the shaft (around the bearing 81a of the clamp 81) 82 is rotated to rotate the movable gripper 86 relative to the fixed gripper 85, and the movable gripper 86 cooperates with the fixed gripper 85 to chuck the upper end of the glass substrate 1.

4 and 8, after the glass substrate 1 is held on the rim assembly 50 of the holding device 40, the locking air cylinder 115 of the first locking device 110 is operated to operate the cylinder rod. When 115a is retracted, the cylinder rod 115a is released from the locking hole 117 of the locking block 116 to release the restraint of the rim assembly 50. 4 and 9, when the locking air cylinder 125 of the second locking device 120 is operated to retract the cylinder rod 125a, the lever 127 is rotated about the pivot 126. The locking roller 128 is released from the locking hole 131 of the locking block 130 to release the restraint assembly 50. When the cylinder rod 31 is advanced by the operation of the up-down air cylinder 30, the entire holding device 40 together with the motion girder 20 is raised along the rotary column 10, and the setting hole of the locking block 130 is increased. 132 is separated from the setting pin 129.

1 to 3, the operator performs a visual inspection while the glass substrate 1 held on the rim assembly 50 of the holding device 40 is freely moved. The rim assembly 50 rotates about the pivot 95a of the holder assembly 90, and the holder assembly 90 may rotate in the X axis by the operation of the rotary actuator 100. When the cylinder rod 31 is advanced or retracted by the operation of the up-down air cylinder 30, the motion girder 20 and the holding device 40 are moved up or down along the rotary column 10. Can be. When the rotary column 10 is rotated about the shaft 122 of the base 11, the entire motion girder 20 and the holding device 40 may be rotated in the Z axis. When the guide rail 21b of the motion girder 20 is linearly moved along the guide block 21a of the X-axis linear motion guide 139 in the X-axis direction, the entire holding device 40 is moved by the motion girder 20. X-axis translation can be done. The operator can easily and safely inspect the defects of the glass substrate 1 while freely handling the glass substrate 1 held by the rim assembly 50 of the holding device 40 by the multi-degree of freedom movement of the handler.

Referring to FIG. 1, when the inspection of the glass substrate 1 is completed, the operator restrains the rim assembly 50 of the holding device 40 by the first and second locking devices 110 and 120. At this time, when the setting pin 129 of the second locking device 120 is fitted to the setting hole 132 of the locking block 130, the rim assembly 50 is correctly aligned at the initial position. As a result, the cylinder rod 115a of the locking air cylinder 115 is also aligned with the locking hole 117 of the locking block 116. Therefore, the locking operation of the rim assembly 50 by the first and second locking devices 110 and 120 can be performed accurately.

In addition, after the rim assembly 50 of the holding device 40 is restrained, the up-down air cylinder 83 of the upper chucking unit 80 is operated to retract the cylinder rod 83a. As a result, the movable gripper 86 is released from the fixed gripper 85 to release the chucking of the glass substrate 1. When the chucking air cylinder 64 of the side chucking unit 60 is operated to retract the cylinder rod 64a, the movable gripper 63 is spaced apart from both ends of the glass substrate 1 to release the chucking. After the chucking of the glass substrate 1 by the side chucking unit 60 and the upper chucking unit 80 is released, the glass substrate 1 placed on the rim assembly 50 of the holding device 40 is loaded. Unloading to the unloading station by the unloading means, and the subsequent glass substrate 1 is loaded into the rim assembly 50 of the holding device 40 to inspect the glass substrate 1 sequentially.

The above embodiments are merely illustrative of preferred embodiments of the present invention, and the scope of the present invention is not limited to the described embodiments, and various modifications may be made by those skilled in the art within the spirit and scope of the present invention. Modifications, variations, or substitutions may be made, and such embodiments are to be understood as being within the scope of the present invention.

As described above, according to the handler for a glass substrate according to the present invention, by holding the glass substrate stably and accurately and inspecting it while moving freely, it is possible to inspect a large and thin glass substrate very simply and efficiently. In addition, the glass substrate can be automatically handled, and accurate and stable chucking can effectively prevent breakage of the glass substrate. And by simply inspecting both sides of the glass substrate there is an effect that can greatly improve the reliability of the inspection.

Claims (8)

A rotary column installed at an upper portion of the base to allow Z-axis rotational movement; A motion girder installed to allow Z-axis translation and X-axis translation with respect to the rotary column; First driving means for Z-axis translation of the motion girder along the rotary column; Holding means installed close to the motion girder and holding the glass substrate; And a second driving means for rotating the holding means in the X axis with respect to the motion girder. The glass substrate handler of claim 1, wherein the first driving means comprises an up-down air cylinder, and the second driving means comprises a rotary actuator. The method of claim 1, wherein the holding means, A rim assembly for accommodating the glass substrate and having upper and lower first and second support bars arranged in parallel with each other so as to be spaced apart from each side of the glass substrate and third and fourth support bars on the left and right sides; A plurality of rests mounted on the second support bar of the rim assembly to support the lower end of the glass substrate; A plurality of side chucking units mounted on the third and fourth support bars of the rim assembly to chuck both side ends of the glass substrate; And a holder assembly coupled to the rotary actuator, wherein the rim assembly is rotatably mounted. The method of claim 3, wherein the side chucking unit, A fixed gripper fixed to the third and fourth support bars of the rim assembly to support both ends of the glass substrate; A movable gripper mounted to rotate the pivot about the fixed gripper and to chuck both ends of the glass substrate; And a chucking air cylinder configured to rotate the movable gripper about the pivot. According to claim 3 or 4, wherein the holding means is further mounted to the pushing unit to align the glass substrate toward the other one of the third and fourth support bar of the rim assembly, Pushing unit is a glass substrate handler consisting of an air cylinder mounted to any one of the third and fourth support bar, and a pusher for pushing the glass substrate by the operation of the air cylinder. 5. The handler for a glass substrate according to claim 3 or 4, further comprising upper chucking means for chucking an upper end of the glass substrate supported on the rest on the rim assembly. The method of claim 6, wherein the upper chucking means, A plurality of clamps fixed to the first support bar of the rim assembly and having bearings; A shaft supported to rotate by a bearing of the clamp; An air cylinder for rotating the shaft; A plurality of fixed grippers fixed to the first support bar of the rim assembly to support the upper end of the glass substrate; And a plurality of movable grippers mounted on the shaft to chuck the upper end of the glass substrate in cooperation with the fixed gripper. 5. The handler for a glass substrate according to claim 3 or 4, further comprising locking means for constraining the position of the rim assembly to load the glass substrate onto the rim assembly of the holding means.

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