KR100661759B1 - Equipment for inspecting flat display panel having two multi-dof robots - Google Patents

Abstract

A flat display panel inspecting apparatus having two multi-joint robots is provided to arrange glass substrates in various manners using robots having relatively small supporting weight. An apparatus for inspecting a flat display panel includes a glass holder, a first multi-joint robot(20), and a second multi-joint robot(30). The glass holder holds the flat display panel such that the flat display panel is inspected with the naked eye. The first multi-joint robot is connected to one side of the glass holder and supports the glass holder. The second multi-joint robot is connected to the other side of the glass holder and supports the glass holder. Each of the first and second multi-joint robots includes a base having a rotary driver, a first arm having a first end connected to the rotary driver, a second arm having a first end connected to a second end of the first arm and a second end that is rotatable with respect to the length direction axis thereof, a third arm having a first end connected to a second end of the second arm and a second end that is rotatable with respect to the length direction axis thereof and a flange connecting the second end of the third arm to the side of the glass holder.

Description

Flat display panel inspection device with two articulated robots {EQUIPMENT FOR INSPECTING FLAT DISPLAY PANEL HAVING TWO MULTI-DOF ROBOTS}

1 is a view schematically showing a flat panel display panel inspection apparatus using a conventional robot,

2 is a plan view of a flat panel display panel inspection apparatus according to an embodiment of the present invention,

3 is a side view of a flat panel display panel inspection apparatus according to an embodiment of the present invention;

4 is a view showing the operation of the articulated robot used in the flat panel display panel inspection apparatus according to the present invention,

5 is a plan view of a flat panel display panel inspection apparatus according to another embodiment of the present invention;

FIG. 6 is a view showing a state of loading / unloading a glass substrate in the inspection apparatus shown in FIG. 4. FIG.
<Explanation of symbols for the main parts of the drawings>
10: glass holder
12: glass clamping device
14: glass alignment device
20: first articulated robot
21: Donation of the first articulated robot
22: rotation drive of the first articulated robot
23: First arm of the first articulated robot
24: second arm of the first articulated robot
25: Third arm of the first articulated robot
26: flange of the first articulated robot
30: second articulated robot
40: backlight unit
50: front lighting device
60: Zoom Stereo Microscope
100: glass transfer unit
110: base of the glass transfer unit
120: glass support bar
122: vacuum adsorption device
200: cassette station

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat panel display inspection apparatus, and more particularly, an apparatus including two articulated robots as a macro inspection apparatus for visually inspecting a defect of a glass substrate used for manufacturing a liquid crystal display panel, for example. It is about.

Generally, in the process of manufacturing the glass substrate of a flat panel display panel, for example, a liquid crystal display panel, as a test | inspection of a defect of a board | substrate, macro inspection which consists of visual observation and micro inspection using equipment, such as a microscope, is performed. In the macro inspection, the surface of the glass substrate is irradiated with illumination light or the backlight unit is illuminated with the illumination light on the rear surface of the glass substrate so that the operator visually detects defects such as flaws and contamination on the surface of the substrate. Detecting defects such as foreign matter, scratches, and defective patterns on the substrate pattern by magnifying and observing the glass substrate with a microscopic optical system for defects that are not visible to the naked eye.

On the other hand, with the recent trend toward larger display devices, the size of glass substrates is gradually increasing. For example, so-called 8th and 9th generation glass substrates have sizes of 1950 mm x 2250 mm and 2400 mm x 2800 mm, respectively. Accordingly, the size of the macro inspection apparatus for inspecting the glass substrate should also be increased. In the case of using a macro inspection apparatus having a structure as in the related art, there is a problem in that the apparatus occupies too much space and the efficiency decreases.

In this regard, the present applicant has proposed a macro inspection apparatus that can be used in various forms while occupying a relatively small space by supporting a glass holder portion holding a glass substrate with a articulated robot in Korean Patent Application No. 10-2004-117910. have. 1 shows a macro inspection apparatus using a robot proposed in the above application. However, in the macro inspection apparatus having such a configuration, when the robot is operated with the glass substrate mounted, a considerable load is applied to the connection portion between the arm of the robot and the glass holder portion. In addition, the glass holder portion has a problem that the side of the side away from the upper connection portion because the mechanical stiffness is inferior to the side with the connection portion, and thus the alignment of the glass substrate is not easy. This problem can be solved by increasing the mechanical rigidity of the connection part and the glass holder part. However, the structure of the connection part and the holder part is complicated and the weight is increased because the reinforcement must be used to increase the mechanical rigidity. This means that a robot with a large supporting load must be used, which increases the cost and the space occupied by the device.

The present invention was conceived to solve the above problems, and an object of the present invention is to provide a macro inspection apparatus using a robot capable of arranging various glass substrates while using a robot having a relatively small support load.

In order to achieve the above object, the present invention provides an apparatus for visual inspection of a flat panel display panel, comprising: a glass holder unit for holding a flat panel display panel to be inspected and performing visual inspection; A first articulated robot connected to one side of the glass holder part to support the glass holder part; And a second articulated robot connected to the other side of the glass holder part to support the glass holder part. The first articulated robot and the second articulated robot of the device each have a base provided with a rotatable rotational drive portion, and a first end portion connected to the rotational drive portion, the predetermined angle of which is orthogonal to its longitudinal axis. A first arm that can pivot within an angular range and an axis that is orthogonal to an axis perpendicular to the longitudinal axis of the first arm, which can pivot within a predetermined angular range, the first end being a second end of the first arm A second arm, the second end of which is rotatable about its longitudinal axis and pivots about an axis orthogonal to the longitudinal axis of the second arm, the first arm being pivoted within a predetermined angle range; A third arm, the end of which is connected with the second end of the second arm, the second end being rotatable about its longitudinal axis, and a connection between the second end of the third arm and the side of the glass holder portion. It is provided with flange .

The second articulated robot may further include a glass transfer unit that provides a flat panel display panel to be inspected to the glass holder.

Preferably, the second articulated robot can move along a rail mounted on the floor, and the flange of the second articulated robot is detachably connected to the other side of the glass holder part.

In addition, the glass transfer unit included in the second articulated robot preferably has a plurality of glass support arms extending in the same direction as the flange.

The glass support arm of the glass transfer unit may be provided with a glass gripping device for holding a flat panel display panel to be inspected, the glass gripping device as a plurality of vacuum suction gripping unit for holding a flat panel display panel to be inspected using a vacuum Can be provided.

The glass transfer unit may include a glass clamping device for clamping a flat panel display panel to be inspected.

The glass holder may have a glass alignment device for setting a position of a flat panel display panel to be inspected and a glass clamping device for holding a flat panel display panel having a position. When the second articulated robot transfers the flat panel display panel to be inspected and disposed on the glass holder part, and the flange of the second articulated robot is connected to the other side of the glass holder part, the glass alignment device and the The glass clamping device is operated sequentially.

It is preferable that one side and the other side of the glass holder portion to which the first articulated robot is connected to the glass holder portion face each other.

Hereinafter, with reference to the accompanying drawings will be described a preferred embodiment of the present invention.

2 and 3 are respectively a front view and a side view of a flat panel display panel inspection apparatus according to an embodiment of the present invention.

As shown in FIG. 2, the flat panel display panel inspection apparatus according to an exemplary embodiment of the present invention is connected to a glass holder 10 supporting a glass substrate and one side of the glass holder 10, and thus the glass holder portion. A first articulated robot (20) supporting the (10) and a second articulated robot (30) connected to the other side of the glass holder portion (10).

The glass holder 10 grips the glass substrate and provides it for the operator to inspect. The glass substrate is housed in a cassette station (not shown) and is provided to the glass holder portion 10 in the direction of arrow A shown in FIG. 2 by a loading / unloading robot (not shown). The glass holder part 10 is equipped with the apparatus which grips a glass substrate so that the glass substrate mounted for inspection may not separate and fall. In this embodiment, a plurality of glass clamping devices 12 are provided along each side of the glass holder part 10. The glass holder portion 10 and the glass clapping device 12 may have a technical configuration, for example, as disclosed in Korean Patent No. 483,368, “Glass Clamping Device and Glass Support Device With The Same” of the applicant. Can be used. The glass holder part 10 may include a vacuum suction device (not shown) in addition to the glass clamping device 12. The vacuum suction device adsorbs and supports it in contact with the surface of the glass substrate. In addition, the glass holder unit 10 may further include a glass alignment device 14. When the glass substrate is mounted on the glass holder portion 10 by a loading / unloading robot, the apparatus is first placed in an appropriate position before clamping the glass substrate.

In the present embodiment, the first and second articulated robots 20 and 30 have the same technical configuration except that they have a symmetrical shape with each other. Therefore, the following description focuses on the technical configuration of the first articulated robot.

As the articulated robot 20 according to the preferred embodiment of the present invention, a robot having six degrees of freedom is applied. Figure 4 shows the operation of the six degree of freedom robot used in the present invention.

The articulated robot (20; 30) having six degrees of freedom has a base (21; 31), a rotary drive portion (22; 32), and three arms (23, 24, 25; 33, 34, 35). The rotary drive units 22 and 32 are mounted on the bases 21 and 31 so as to be rotatable about a generally vertical axis of rotation. The first arm 23; 33 is connected to the rotational drive portion 22; 32 so as to be pivotable about an axis perpendicular to its longitudinal direction. At the end not connected to the rotary drive part 22; 32 of the first arm 23; 33, the second arm 24; 34 is pivotally connected about an axis perpendicular to its longitudinal direction. The other end of the second arm 24; 34 is rotatable about its longitudinal axis. The third arm 25; 35 is pivotally connected to the other end of the second arm about an axis perpendicular to its longitudinal direction. Here, the pivot axis of the second arm and the pivot axis of the third arm are preferably set to be perpendicular to each other. The end of the third arm 25; 35, which is far from the second arm, is likewise rotatable about its longitudinal axis. In addition, the side of the glass holder portion 10 is connected to an end portion of the third arm 25; 35 that is far from the second arm via a connecting member, for example, a flange 26; 26.

On the other hand, in the inspection apparatus according to an embodiment of the present invention, two articulated robots 20 and 30 are used. Preferably, the two robots are preferably connected to opposite sides of the glass holder portion 10, respectively (see Fig. 2). When using two articulated robots to support the glass holder, a robot having a relatively small supporting load can be used as compared to the case of using one articulated robot. In the case of using one articulated robot, for example, if the articulated robot having a support load of 600 kg is to be used, the articulated robot having a support load of about 150 kg may be used when using the two articulated robots. Even when used, stable inspection can be performed. Accordingly, the space occupied by the articulated robot can be reduced, and the equipment cost can be reduced.

As shown in FIG. 3, the flat panel display panel inspecting apparatus according to an embodiment of the present invention further includes a backlight unit 40, a front lighting device 50, and a zoom stereo microscope 60. do.

The backlight unit 40 irradiates generally horizontal light toward the glass substrate from the rear of the inspection apparatus based on the position of the operator. Accordingly, the operator can observe the light passing through the glass substrate to determine whether the substrate is defective. The front lighting apparatus 50 irradiates light toward the surface of the glass substrate from the front and the upper side of the inspection apparatus based on the position of the operator. The front illuminator 50 is provided with a plurality of illuminators, each illuminator being movable in the horizontal and vertical directions so as to inspect the glass substrate under various conditions, and preferably pivotable about the horizontal and vertical axes. Zoom stereo microscope (60) is a device that assists the operator visual inspection, and magnifies the surface of the glass substrate to display this image on the monitor, allowing the operator to perform detailed visual inspection. .

Referring to the process of the inspection operation using the flat panel display panel inspection apparatus having the above technical configuration as follows.

Glass substrates selected for inspection in the substrate manufacturing process are stored in a cassette station (not shown). The glass substrate thus stored is provided to the inspection apparatus according to the present embodiment in the direction of arrow A of FIG. 2 by a substrate transfer device (not shown). At this time, the articulated robots 20 and 30 move the glass holder portion 10 in an arrangement where the glass substrate can be easily supplied. For example, the glass holder 10 may be disposed to be horizontal with respect to the bottom surface. When a glass substrate is supplied to the glass holder part 10, the glass aligning apparatus 14 provided in the glass holder part places a glass substrate in a suitable position. When the alignment is completed, the glass clamping device 12 and the vacuum suction device (not shown) hold the glass substrate. The operator checks whether the glass substrate is safely held in the glass holder 10 and performs the inspection operation. In the inspection operation, a backlight unit 40, a front lighting device 50, a zoom stereo microscope 60, and the like are used. After the inspection work is completed, the articulated robots 20 and 30 adjust the glass holder 10 to conveniently place the glass substrate unloaded. The arrangement of the glass holder part 10 at this time may be the same as the arrangement when providing the glass substrate to the glass holder part 10. The inspection is completed, the glass substrate is unloaded from the glass holder portion 10 in the direction opposite to the arrow A shown in FIG.

5 shows a flat panel display panel inspection apparatus according to another embodiment of the present invention.

The inspection apparatus shown in FIG. 5 has the same technical configuration and operation as the above-described embodiment except that the second articulated robot further includes a glass transfer unit 100 and performs a glass loading / unloading operation. . Therefore, hereinafter, only features that differ from the above-described embodiment of the present embodiment will be described. In the following description and the associated drawings, the same components as those in the foregoing embodiments are denoted by the same reference numerals.

In the inspection apparatus according to the present embodiment, the glass transfer unit 100 for loading / unloading the glass with respect to the glass holder part 10 is provided in the second articulated robot 30. The glass transfer unit 100 generally has a comb shape, a base 110 connected to a second end or a flange 36 of the third arm 35 of the second articulated robot 30, and the base 110. It has a plurality of glass support bar 120 extending from). The base 110 is fixedly connected to the second end of the third arm 35 or the flange 36 connected thereto to enable pivoting or rotational movement in accordance with the operation of the third arm 35. A plurality of glass support bars 120 are installed on the base 110, and three glass support bars 120 are shown in this embodiment. The glass support bar 120 extends in the same direction as the flange 36, that is, toward the glass holder part 10. Each support bar 120 is preferably provided with a device for holding the glass substrate for safe transport operation. For example, the vacuum adsorption device 122 having the same technical configuration as that described in the above-described embodiment of the glass holder unit 10 may be disposed at intervals along the longitudinal direction of the glass support bar 120. Can be. Korean Patent Application No. 10-2004-90911, "Glass adsorption support device" of the present applicant shows an example of a vacuum adsorption device that can be applied to the present invention.

According to this configuration, during the inspection operation in which the second articulated robot 30 supports the glass holder part 10, the glass support bar 120 is disposed in the direction toward the glass holder part 10. However, when the second articulated robot 30 carries out the operation of transporting the glass substrate, the glass support bar 120 is disposed to face the cassette station 200, for example. The arrangement of the glass support bar 120 is realized by the pivoting motion of the third arm 35 of the second articulated robot 30. In addition, unlike the above-described embodiment, the third arm and the glass holder 10 of the second articulated robot 30 should be detachably connected to each other. For example, one end of the flange 36 may be secured to the third arm of the second articulated robot 30 and the other end may be detachably connected to the glass holder portion 10.

On the other hand, in the present embodiment, during the inspection operation after the transfer operation is completed, in the state that the second articulated robot 30 supports the glass holder unit 10, the glass support bar of the glass transfer unit 100 The vacuum adsorption device 122 provided at 120 may continue to hold the glass substrate. In this case, only the glass clamping device 12 and the glass aligning device 14 for clamping the glass substrate may be provided in the glass holder 10, and the vacuum suction device may be omitted. That is, the vacuum adsorption device 122 of the glass support bar 120 may have a function of supporting the glass substrate during the transfer operation as well as during the inspection operation.

In addition, in the above-described embodiment, the second articulated robot is described as being fixedly installed on the bottom surface. However, in the present embodiment, the second articulated robot may be configured to move for a smoother transfer operation. For example, a rail can be installed on the floor and a second articulated robot can move along this rail. In particular, this configuration is advantageous when there are a plurality of cassette stations.

As such, when the second articulated robot performs the loading / unloading process of the glass, there is no need to provide a separate glass loading / unloading device, thereby reducing the space occupied by the entire inspection device.

Referring to the process of the inspection operation using the flat panel display panel inspection apparatus according to another embodiment of the present invention.

The glass substrate selected as the inspection target in the substrate manufacturing process is stored in the cassette station 200. When the operator instructs to load a new glass substrate, after the glass holder portion 10 is placed in an easy loading / unloading position by the operation of the articulated robots 20, 30, the second articulated robot ( The third arm of 30 is separated from the glass holder portion 10. Next, the third arm 35 of the second articulated robot 30 pivots, so that the glass transfer unit 100 connected to the end of the third arm is directed toward the cassette station 200. The glass transfer unit 100 is moved to a position where it is easy to load the glass substrate to be transferred by the operation of the second articulated robot. When the glass substrate to be inspected is supported by the glass support bar 120 and the vacuum adsorption apparatus provided therein is operated, the glass substrate is safely gripped by the glass transfer apparatus 100. In this state, the third arm 35 of the second articulated robot 30 pivots so that the glass support bar 120 faces the glass holder part 10. Next, the third arm 35 and the glass holder portion 10 of the second articulated robot 30 are connected. As in the above embodiment, the glass alignment device 14 provided in the glass holder portion 10 adjusts the arrangement of the glass substrate. At this time, the vacuum adsorption device provided in the glass support bar 120 stops the operation so that the glass substrate can move freely. When the alignment is completed, the glass clamping device 14 of the glass holder 10 and the vacuum suction device 122 of the glass support bar 120 is operated to hold the glass substrate. When the vacuum suction device is provided in the glass holder 10, the vacuum suction device 122 of the glass support bar 120 may not hold the glass substrate during the inspection process. The operator checks whether the glass substrate is safely held in the glass holder 10 and performs the inspection operation. In the inspection operation, a backlight unit 40, a front lighting device 50, and a zoom stereo microscope 60 are used. After the inspection work is completed, the articulated robots 20 and 30 adjust the glass holder 10 to conveniently place the glass substrate unloaded. The arrangement of the glass holder part 10 at this time may be the same as the arrangement when providing the glass substrate to the glass holder part 10. After the inspection is completed, the glass substrate is unloaded from the glass holder part 10 while being held by the glass support bar 120. That is, the glass clamping device 14 of the glass holder unit 10 stops the operation during the unloading operation, but the vacuum adsorption device 122 provided on the glass support bar 120 continues to hold the glass substrate. It is good. In this state, the unloading operation is performed in the reverse process when the glass substrate is held.

As mentioned above, although this invention was demonstrated based on the preferred embodiment and drawing, this does not intend to limit this invention to this embodiment, The person of ordinary skill in the art to which this invention belongs is given in the attached claim. Various modifications or changes may be made to the invention within the scope and equivalents thereof.

According to the present invention, there is provided a flat panel display panel inspection apparatus using two articulated robots, which can arrange various glass substrates while using a robot having a relatively low load. In the case of using two articulated robots, there is an expected effect of improving the holding ratio and reducing the shaking phenomenon, compared with the case of using one articulated robot.

In addition, when one of the two articulated robots performs the glass loading / unloading process, a separate glass loading / unloading robot is not required, thereby reducing the space occupied by the facility and reducing the cost of the facility. have.

Claims (15)

Apparatus for visual inspection of a flat panel display panel, A glass holder unit which grips the flat panel display panel to be inspected and provides visual inspection; A first articulated robot having six degrees of freedom connected to one side of the glass holder to support the glass holder; And A second articulated robot having six degrees of freedom, which is detachably connected to the other side of the glass holder part and supports the glass holder part. Including; The first articulated robot and the second articulated robot, respectively A base provided with a rotatable driving part, A first arm connected to the rotation driving unit and capable of turning within a predetermined angle range with respect to an axis perpendicular to its longitudinal axis; Pivot about an axis orthogonal to the longitudinal axis of the first arm, the first end being connected to the second end of the first arm, and the second end to its longitudinal axis. A second arm rotatable against, Pivot about an axis orthogonal to the longitudinal axis of the second arm, the first end being connected to the second end of the second arm and the second end being connected to its longitudinal axis. A third arm rotatable against, and A flange connecting between the second end of the third arm and the side of the glass holder portion, And the second articulated robot includes a glass transfer unit providing a flat panel display panel to be inspected to the glass holder part. delete The method according to claim 1, And a glass transfer unit provided in the second articulated robot having a plurality of glass support arms extending in the same direction as the flange. The method according to claim 3, And a glass gripping apparatus for gripping the flat display panel to be inspected on the glass support arm of the glass transfer unit. The method according to claim 4, And the glass gripping apparatus provided on the glass support arm includes a plurality of vacuum suction gripping units for holding a flat panel display panel to be inspected using a vacuum. The method according to claim 4, And the glass transfer unit includes a glass clamping device for clamping the flat display panel to be inspected. The method according to claim 1, The glass holder unit has a glass alignment device for setting a position of the flat panel display panel to be inspected and a glass clamping device for holding a flat panel display panel in which the position is set, and the second articulated robot transports the flat panel display panel to be inspected and the glass And a glass display device, wherein the glass alignment device and the glass clamping device are sequentially operated when the flange of the second articulated robot and the other side of the glass holder are connected to each other. . The method according to claim 1, And one side portion and the other side portion of the glass holder portion to which the first articulated robot is connected to the glass holder portion face each other. Apparatus for visual inspection of a flat panel display panel, A glass holder unit which grips the flat panel display panel to be inspected and provides visual inspection; A first articulated robot connected to one side of the glass holder part and supporting the glass holder part and having six degrees of freedom; And A second articulated robot connected to the other side of the glass holder part and supporting the glass holder part and having six degrees of freedom Including; And the second articulated robot includes a glass transfer unit detachably connected to the other side of the glass holder and providing a flat panel display panel to be inspected by the glass holder. The method according to claim 9, Each of the first articulated robot and the second articulated robot has a base having a rotatable rotary drive unit and a first end connected to the rotary driving unit, and within a predetermined angle range with respect to an axis perpendicular to its longitudinal axis. A first arm pivotable at and a pivotable angle within an angle range relative to an axis orthogonal to the longitudinal axis of the first arm, the first end being coupled to the second end of the first arm and A second arm with a second end rotatable about its longitudinal axis and an axis orthogonal to the axis orthogonal to the longitudinal axis of the second arm, the first end being pivotable; A third arm connected with a second end of the second arm, the second end being rotatable about its longitudinal axis, and a flange connecting between the second end of the third arm and the side of the glass holder portion; Having A flat panel display panel inspection device. The method according to claim 9, And a glass transfer unit provided in the second articulated robot has a plurality of glass support arms extending in the same direction as the flange. The method according to claim 11, And a glass gripping apparatus for gripping the flat display panel to be inspected on the glass support arm of the glass transfer unit. The method according to claim 12, And the glass gripping apparatus provided on the glass support arm includes a plurality of vacuum suction gripping units for holding a flat panel display panel to be inspected using a vacuum. The method according to claim 9, And the glass transfer unit includes a glass clamping device for clamping the flat display panel to be inspected. The method according to claim 9, The glass holder unit has a glass alignment device for setting a position of the flat panel display panel to be inspected and a glass clamping device for holding a flat panel display panel in which the position is set, and the second articulated robot transports the flat panel display panel to be inspected and the glass And the glass arranging device and the glass clamping device are sequentially operated when the second articulated robot and the other side of the glass holder are connected to each other.

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