WO2006035733A1

WO2006035733A1 - Substrate holder for substrate inspecting apparatus, and substrate inspecting apparatus

Info

Publication number: WO2006035733A1
Application number: PCT/JP2005/017652
Authority: WO
Inventors: Hiroyuki Okahira
Original assignee: Olympus Corporation
Priority date: 2004-09-27
Filing date: 2005-09-26
Publication date: 2006-04-06
Also published as: KR101244266B1; KR20070103354A; TW200628781A; CN101027547A; TWI393875B; CN101027547B; JP4377918B2; JPWO2006035733A1

Abstract

A substrate inspecting apparatus is provided with a substrate holder (6) for holding a substrate (W). The substrate holder (6) is provided with a plurality of supporting arm parts (10), which extend parallel to each other at equal intervals from a base part (7) attached to a multijoint robot (8) and have a comb teeth shape as a whole. On an upper plane (10a) of each supporting arm part (10), a suction part (12) is arranged for holding the substrate (W) by suction. Furthermore, on each of the sides of a base end part (11a) and the leading end part (11b) of the supporting arm part (10), a bar (15) is attached, and on the outer plane of the external supporting arm part (10), a bar (17) is attached. The side edges of the substrate (W) are held by the bars (15, 17).

Description

Specification

Substrate holder and substrate inspection device of substrate inspection device

Technical field

The present invention relates to a macro inspection apparatus for visually inspecting a transparent substrate for manufacturing a flat panel display (FPD), and a substrate holder used for a macro inspection apparatus.

Priority is claimed on Japanese Patent Application No. 2004-279989, filed Sep. 27, 2004, the content of which is incorporated herein by reference.

Background art

As a transparent substrate manufactured in each manufacturing process, for example, there is an inspection process for visually inspecting (macro inspection) the appearance of a master glass substrate (hereinafter simply referred to as a glass substrate). 2. Description of the Related Art A macro inspection apparatus is used which inspects a defect on a glass substrate by irradiating a macro illumination light upward with the holder holding the glass substrate raised to a predetermined angle.

This type of macro inspection apparatus includes a rectangular frame-shaped holder main body having an opening slightly smaller than a rectangular glass substrate, and the substrate holder sucks and holds the peripheral portion of the rear surface of the glass substrate on the upper surface of the holder main body. Is configured. Here, when the substrate is large, the central portion of the substrate is easily deformed if only the peripheral portion of the substrate is held, so a plurality of elongated rod-like substrate support portions are bridged in parallel in the opening and each substrate support portion For this purpose, it is known to suppress deformation and stagnation of the substrate by providing a support pin in contact with the back surface of the glass substrate and an adsorption portion to support the glass substrate at many points. For example, see Patent Document 1 and Patent Document 2). In addition, since it is sufficient for the substrate support portion to have a support strength to a degree that prevents warping and the like of the glass substrate, the substrate support portion is manufactured to be extremely thin and lightweight compared to the holder main body.

However, in this type of substrate holder, the weight of the substrate is mainly supported by the holder main body, and the holder main body is manufactured to be thick and strong because it is pivoted and rocked at a predetermined angle. Needs to be increased, and the substrate holder is becoming very heavy with the increase in size of the substrate. In recent years, glass substrates larger than 2000 mm have appeared, and thus glass substrates When the size of the substrate holder increases, the size of the substrate holder supporting the peripheral portion has to be increased. In order to rotate such a large and heavy substrate holder to a predetermined angle for macro inspection, a large driving force is required, and there is a problem that the entire inspection apparatus becomes large. The

In addition, when the glass substrate is enlarged, the length of the substrate support becomes longer in proportion to the size of the substrate, and the support itself is easily vibrated in the vertical direction by the rotation or swinging operation of the substrate holder. Another problem is that stagnation easily occurs due to the weight of the member itself. If the rigidity of the substrate support portion is increased to prevent this, the weight of the substrate holder is further increased, which is not preferable.

Patent Document 1: Japanese Patent Application Laid-Open No. 9-18964

Patent Document 2: Japanese Patent Application Laid-Open No. 2003-232742

Disclosure of the invention

Problem that invention tries to solve

The present invention has been made in view of such circumstances, and an object of the present invention is to miniaturize a substrate holder and lighten the weight, and further to enlarge a macro inspection apparatus. It is to prevent.

Means to solve the problem

[0005] A first aspect of the present invention is a substrate holder attached to the tip of a drive unit and moving the substrate while holding the substrate, the base unit connected to the drive unit, and A plurality of support portions extending in parallel in a comb-tooth shape from a base portion, and an adsorption portion which adsorbs and holds the substrate on the support portion, the plurality of support portions hold the substrate. It is a substrate holder of a substrate inspection apparatus characterized by having strength.

[0006] A second aspect of the present invention is the substrate holder of the substrate inspection apparatus, wherein the height of the support is determined according to the distance of the base end force which is a portion attached to the base. It is characterized by having been changed.

[0007] A third aspect of the present invention is a substrate holder of the substrate inspection apparatus, wherein a base end portion which is a portion attached to the base portion of the support portion and a base portion of the support portion The peripheral portion of the substrate is held by suction at each of the tip portions, which are A holder frame to be held is provided to be orthogonal to the support portion.

[0008] A fourth aspect of the present invention is a substrate holder of the substrate inspection apparatus, wherein a peripheral edge of the substrate is provided from the outer surface of the support portion provided on the outermost side among the plurality of support portions. It is characterized in that a beam supporting the part is extended.

According to a fifth aspect of the present invention, there is provided a fifth aspect of the present invention, comprising: the substrate holder; an articulated robot, which is the drive unit for swingably supporting the substrate holder; and a light source for emitting predetermined visible light. It is a substrate inspection apparatus characterized in that the substrate is irradiated with visible light from the light source so that an appearance inspection of the substrate can be performed.

Effect of the invention

According to the present invention, since the support portion for supporting the substrate is provided in a comb shape, the size and weight can be reduced as compared with the case where the peripheral portion of the substrate is supported by the rectangular holder main body. it can. Also, this makes it possible to reduce the load of an articulated robot or the like that performs rocking or rotation of the substrate holder, and the substrate inspection apparatus can be miniaturized.

Brief description of the drawings

[FIG. 1] FIG. 1 is a view showing a schematic configuration of a substrate inspection apparatus provided with a substrate holder in the embodiment of the present invention.

[FIG. 2] FIG. 2 is a plan view of a substrate holder and a transfer robot.

[FIG. 3] FIG. 3 is a cross-sectional view taken along the ridge-edge line of FIG.

[FIG. 4] FIG. 4 is a side view of a substrate holder.

[FIG. 5] FIG. 5 is a plan view of a substrate holder and a transfer robot.

[FIG. 6] FIG. 6 is a side view of a substrate holder.

Explanation of sign

1) Substrate inspection apparatus

3 light source

8 Articulated arm robot for inspection

6, 30 substrate holder

7 Base

10 Support 10a top surface

10b inclined surface

10c side

lOd slope

11a proximal end

l ib inclined surface

12 adsorption section

13 rods,

14 Suction pad

15 Holder frame

16 suction pad

17 beams

18 support pins

20 Transfer robot

21 arm

22 Robotics,

23 fingers

24 adsorption section

30 board Honoreda

31 adsorption section

32 beams

W substrate

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. However, the present invention is not limited to the following embodiments. For example, the components of these embodiments may be appropriately combined.

The best mode for carrying out the invention will be described in detail with reference to the drawings.

Figure 1 shows a side view of the board inspection system. The macro inspection apparatus 1 has an apparatus main body 2 which is disposed in a clean room and surrounded by side walls whose upper and lower surfaces are open. A filter for enhancing the degree of cleanliness in the device body is attached to the upper surface of the device body 2. Further, a light source 3 for macro illumination such as a metal lamp and a sodium lamp, for example, and a reflection mirror 4 on the optical axis of the illumination light emitted from the light source 3 are installed on the top of the device body 2. It is done. A Fresnel lens 5 for converging the illumination light from the light source 3 and guiding it to the substrate W is disposed below the reflecting mirror 4. The Fresnel lens 5 is used to converge the divergent light from the light source 3. In this Fresnel lens, a transmission type liquid crystal scattering plate having a scattering function for changing the divergent light of the light source power into a uniform surface light source is disposed in proximity to the Fresnel lens. The macro illumination optical system may simultaneously illuminate the entire transparent substrate such as a liquid crystal display or a plasma display, or may partially illuminate and scan the illumination light in a one-dimensional direction or a two-dimensional direction.

The substrate W is a transparent substrate for a flat panel display (FP D) which is transparent to illumination light and which is a plane-parallel plate, and is horizontally oriented by a substrate transfer device as shown by a phantom line in FIG. It is carried onto the placed substrate holder 6.

[0016] As shown in FIG. 2, the substrate holder 6 has a base portion 7 having a flat mounting surface 7a for mounting a support described later, and the base 7 has a base 7 opposite to the mounting surface 7a. At the side surface, a driving unit which is pivoted at least in the macro observation direction is connected. The drive unit may have a rotation axis in the longitudinal direction of the base 7 and a motor connected to the rotation axis. In the present embodiment, an inspection articulated arm robot (hereinafter simply referred to as inspection robot) 8 which is freely driven in multiple directions (indicated by arrows A, B, C) is used as a drive unit. The base 7 is connected to a tip arm 9 of the multiple indirect arm of the inspection robot 8.

A plurality of support portions 10 are disposed on the mounting surface 7a of the base portion 7 along the longitudinal direction with a sufficient distance, and in the form of a comb as a whole. Each supporting portion 10 is a metal plate material having a height that is longer than the width as shown in FIG. 3, and at least the upper end of the upper and lower ends supports the illumination light transmitted through the substrate W. The inclined surfaces 10b and 10d are formed so as to be directed to the outside of the observation field of view so as not to be reflected at the upper end face of 10 and obstruct the observation. At the upper end of the support portion 10, suction portions 12 are disposed at predetermined intervals along the length direction. As shown in FIG. 3, the suction unit 12 has a suction pad 14 attached to the back of the substrate W attached to the tip of the rod 13 erected from the support unit 10, and the suction pad 14 and the rod 13 An air flow hole (not shown) penetrating vertically is formed, and this air flow hole is connected to a suction pump.

As shown in FIG. 4, the rod 13 can be inserted between the upper end of the support portion 10 and the substrate W between the fingers 23 of the transfer robot 20 described later, and sufficient space for vertical movement. The height of the rod 13 is adjusted.

Here, the suction unit 12 is attached to an upper surface 10 a formed by flattening a part of the upper end side top portion of the support unit 10. At the upper end of the support portion 10, an inclined surface 10b which opens downward in a downward direction is continuous with both sides. The inclined surface 10b has a function to prevent the irradiation light transmitted through the substrate W at the time of macro inspection from being reflected toward the observer. The lower end of the inclined surface 10b is continuous with the side surface 10c perpendicular to the upper surface 10a, and the lower end of the side surface 10c is formed such that the inclined surface 1 Od is closed downward. The inclined surface 10d prevents the reflected light from being reflected toward the observer when the back surface of the substrate W is subjected to macro inspection when the substrate holder 6 is inverted.

As shown in FIG. 4, the upper surface 10a of the support 10 is lower than the force support 10 which is horizontal to the substrate W, that is, the ridge line formed by the lower inclined surface 10d is on the base 7 side. In the case of the base end portion 11a of the support portion 10, the force is also inclined so as to decrease the height in the vertical direction of the support portion 10 toward the tip portion l ib. By thus changing the height of the support portion 10 in accordance with the distance from the base portion 7, the weight of the substrate W is suppressed while securing the support strength of the support portion 10, thereby achieving weight reduction.

Furthermore, as shown in FIG. 2, the upper and lower peripheral edge portions of the substrate W are attracted to the upper surface 10 a on the base end portion 11 a side of the support portion 10 and the distal end portion l ib side so as to be orthogonal to the support portion 10. A holder frame 15 is fixed which aims to reduce the weight by holding a thin metal plate material. The holder frame 15 has its both ends 15a bent perpendicularly to the direction in which the holder frames 15 approach each other. The length and the arrangement interval of each holder frame 15 are set to match the horizontal dimension and the vertical dimension of the substrate W shown by imaginary lines, and the suction pads 16 are spaced from the upper surface of each holder frame 15 by a predetermined distance. Are arranged in multiples There is. The suction pad 16 is connected to a suction pump, and suctions and holds the substrate W together with the suction unit 12.

Furthermore, a plurality of beams 17 for supporting the support pins 18 for supporting the side edges of the substrate W are arranged at predetermined intervals on the outer side surface 10c of the outermost support portion 10 of the respective support portions 10. It is set up. As shown in FIG. 3, the beam 17 extends perpendicularly to the support portion 10, and a support pin 18 is provided upright on the top surface of the tip. The tip of the support pin 18 is provided with a ball made of an abrasive which has a hardness smaller than that of a glass substrate of Teflon (the Teflon is a registered trademark) and which is excellent in abrasion resistance. Each support pin 18 is disposed to support both side edges of the substrate W. In the present embodiment, the support pin 18 is disposed on the beam 17. Instead of this, the suction portion 12 may be disposed.

As shown in FIG. 1 and FIG. 2, the inspection robot 8 attached with the base portion 7 of the substrate holder 6 is horizontally arranged, for example, as shown by a phantom line in FIG. The substrate holder 6 is rotated or pivoted in the direction of arrow A from the position where the posture is maintained to the position where the substrate holder 6 is raised at a predetermined inclination angle as shown by the solid line in FIG. The substrate holder 6 can be moved to the left and right in the direction of arrow D by rotating it in the direction of arrow C, moving the substrate holder 6 up and down in the direction of arrow B, and so on. By using this inspection robot 8, the entire surface of the substrate W is moved by moving the substrate holder 6 vertically and horizontally while raising the substrate holder 6 to an angle suitable for observation under macro illumination. The macro illumination light can be scanned. When the macro illumination optical system is provided to be movable in the X and Y directions, the inspection robot may rotate or swing in the arrow A direction, rotate in the arrow C direction, and move up and down in the arrow B direction.

When the substrate holder 6 is lifted, an opening is formed in the apparatus main body 2 at a position on the front side of the substrate holder 6, and the observer visually observes the appearance of the substrate W in the lifted state. It has become possible.

Here, FIG. 2 illustrates a transfer robot 20 used when loading and unloading the substrate W into and from the substrate holder 6. The transfer robot 20 used in this way is, for example, a multi-indirect arm robot in which a plurality of arms 21 are connected, and a robot hand 22 is attached to the tip. The robot hand 22 has a plurality of fingers 23 arranged in a comb shape. Substrate hole The suction portion 12 on the side of the cover 6 is disposed so as not to interfere with the finger 23 as shown in FIG. Furthermore, as shown in FIG. 4, the thickness of the finger 23 is sufficiently thin as compared to its height. An adsorbing portion 24 is disposed on the upper portion of such a finger 23 so as to adsorb and hold the substrate W shown by a phantom line in FIG.

The operation of this embodiment will be described.

First, as shown by imaginary lines in FIG. 1, the substrate holder 6 is made to stand by at a horizontal position suitable for loading and unloading of the substrate W. The transfer robot 20 suctions and holds one substrate W from the cassette and takes it out, and transfers the substrate W above the substrate holder 6. At this time, as shown in FIGS. 2 and 4, the fingers 23 of the transfer robot 20 are inserted in a horizontal state with respect to the support portions 10 of the substrate holder 6 in a direction orthogonal to the plan view. When the robot hand 22 holding the substrate W is lowered by the transfer robot 20 while maintaining the horizontal posture, the fingers 23 pass between the suction portion 12, the support pin 18, and the beam 15. Go down to the position shown by the phantom line in Fig.4. During this time, the suction unit 12, the support pins 18, and the suction pads 16 abut the back surface of the substrate W, the substrate W is supported by these, and the substrate W is transferred from the transfer robot 20 to the substrate holder 6. When transfer of the substrate W is completed, the arm 21 of the transfer robot 20 is retracted, and the finger 23 is pulled out between the substrate W and the substrate holder 6.

When the substrate inspection apparatus 1 aligns the substrate W to a reference position on the substrate holder 6 by alignment means (not shown), the substrate W is adsorbed and held by the adsorption unit 12 and the adsorption pad 16 at that position. Further, the inspection robot 8 raises the substrate W from the horizontal position as shown by the solid line in FIG. In this state, the observer performs a macro inspection while illuminating the substrate W from above with the illumination light from the light source 3. At this time, the macro inspection may be performed while swinging the substrate holder 6 vertically or horizontally at a minute angle by the inspection robot 8 and changing the incident angle of the illumination light with respect to the substrate W. Further, when the macro inspection of the back surface of the substrate W is performed, the substrate W may be reversed by the inspection robot 8 and the macro inspection may be performed with the back surface of the substrate W directed in the illumination direction. Furthermore, a backlight device (not shown) may be provided, and observation may be performed while looking at the back side force of the substrate W.

After completion of the macro inspection, the substrate holder 6 is returned to the horizontal position, and then the suction holding by the suction unit 12 and the suction node 16 is released. When taking out the substrate W, the transfer robot 20 Thus, the robot hand 22 is moved horizontally to insert the finger 23 between the substrate W and the support 10. Further, the robot nozzle 22 is raised and the substrate W is transferred to the transfer robot 20, and then the arm 21 is retracted to carry it out for the cassette.

According to this embodiment, the substrate holder 6 for macro inspection has a comb-like frame structure, and the support arms 10 corresponding to the comb teeth have strength for holding the substrate W. Therefore, compared to a substrate holder having a rectangular frame as in the prior art, the outer shape of the substrate holder 6 can be miniaturized, and the entire apparatus can be miniaturized. Furthermore, since the substrate holder 6 is lighter than in the prior art, the substrate holder 6 can be moved quickly, and the inspection time can be shortened. Further, the substrate holder 6 is reduced in weight and can reduce the moment of inertia since there is no load dispersion, and the load on the articulated arm robot used as the inspection robot 8 can be reduced. Therefore, it becomes possible to use a miniaturized multi-joint arm robot. In addition, it is possible to minimize the light blocking when performing at the time of transmitted light inspection using a knock light.

In addition, when the substrate holder 6 is raised, the support portion 10 is disposed to support the back surface of the substrate W in the vertical direction, that is, the upper surface of the substrate W from the upper side. Deflection or vibration of the substrate W can be suppressed during macro observation. The holder frame 16 is provided on the base end portion 11a and the front end portion l ib of the support portion 10 arranged in a comb shape, and the loading direction of the substrate W is released, whereby the fingers 23 of the transfer robot 20 It is possible to safely carry the substrate W in and out without interference. In addition, since the side of the substrate W which is not supported by the support portion 10 is extended by supporting the beam 17 from the support portion 10 disposed on the outside, the peripheral portion of the substrate W on the loading and unloading side is assured It is possible to further reduce the weight by holding the holder frames on both sides and saving the holder frames.

Next, a second embodiment of the present invention will be described with reference to the drawings. The same components as those of the first embodiment are denoted by the same reference numerals. In addition, redundant explanations are omitted.

As shown in FIGS. 5 and 6, the substrate holder 30 has a base 7 attached to the tip of the arm 9 of the inspection robot (artificially articulated robot for inspection) 8, and the base 7 is attached. In the plane 7a, a plurality of support portions 10 are parallel to the base portion 7 at a predetermined interval so Are located in The base portion 7 has a thickness substantially equal to the height dimension of the proximal end portion 11a of the support portion 10, and is formed thinner than the base portion of the first embodiment to achieve weight reduction. There is. The upper surface of the support portion 10 is formed into a flat surface, and is disposed at a position higher than the upper surface of the base portion 7. The upper surfaces of the base portion 7 and the support portion 10 may be flush with each other and the base portion 7 may hold the one side edge of the substrate W by suction. Further, openings are formed on the upper surface of the support arm 10, and suction portions 31 in which suction pads are inserted are disposed at predetermined intervals in the respective openings. The suction unit 31 is connected to a suction pump via a flow hole formed in the support unit 10. A beam 32 is disposed on the outer surface of the outermost support arm 10. The beam 32 is vertically extended from the support portion 10 and supports the back surface of the substrate W on the upper surface thereof. For example, the suction portion 31 may be attached to the upper surface of the beam 32. The action will be described.

First, the substrate holder 30 is made to stand by at a horizontal position suitable for loading and unloading of the substrate W. The transfer port bot 20 transfers the substrate W above the substrate holder 6. At this time, the fingers 23 of the transfer robot 20 are arranged such that the fingers 23 are disposed between two adjacent support arms 10 in parallel with each support 10 of the substrate holder 30 in plan view, that is, The support portion 10 of the substrate holder 30 and the fingers 23 of the transfer robot 20 are inserted so as to be in contact with each other. When the robot hand 22 holding the substrate W is lowered by the transfer robot 20 after the suction with respect to the substrate W is released, since the finger 23 is lowered between the support portions 10, the finger 23 is lowered. The back surface of the substrate W abuts on the support arm 10 and the beam 32 respectively, and the substrate W is transferred from the transfer robot 20 to the substrate holder 30. When the transfer of the substrate W is completed, the arm 21 of the transfer robot 20 is retracted horizontally, and the finger 23 is pulled out from between the substrate W and the substrate holder. When raising the substrate holder 30 to a predetermined angle by the inspection robot 8 and swinging it vertically or horizontally, if it is a position that does not interfere with the substrate holder 30, the transfer position of the substrate W or The robot hand 22 may stand by at the retracted position lowered below the delivery position.

Furthermore, when the substrate W is aligned at the reference position on the substrate holder 30 by alignment means (not shown), the substrate W is adsorbed and held by the suction unit 31 at that position. In addition, inspection robot The jig 8 raises the substrate W to the observer with the substrate holder 30 in the horizontal position, raises the substrate W to the upper position, and irradiates the substrate W with the upward illumination light to perform macro inspection.

After completion of the macro inspection, the substrate holder 30 is returned to the horizontal position, and then the suction holding by the suction unit 31 is released. The finger 23 of the transfer robot 20 is inserted between the substrate W and the support 10 and then raised, the substrate W is transferred to the transfer robot 20, and the substrate W is unloaded toward the cassette.

According to this embodiment, since the substrate holder 30 has a comb-like frame configuration, and the tip end side thereof is opened, the transport robot 20 is engaged between the support portions 10. Can be inserted in parallel. Since the substrate W can be directly delivered between the transfer robot 20 and the substrate holder 30 by performing the delivery of the substrate W in this state of being bonded, the substrate can be transferred to the substrate holder 30 side. There is no need to provide a lift mechanism for receiving W, and the configuration can be simplified, and the time for delivery of the substrate W can be shortened. Furthermore, by omitting the holder frame, the substrate holder 30 can be made smaller and lighter. The reduction in size, weight reduction, and effects associated therewith of the substrate holder 30 are the same as in the first embodiment.

Note that the present invention can be widely applied without being limited to the above embodiment.

For example, in the substrate holder 6 as shown in FIG. 2, the support portion 10 may be provided with a support pin 18 in contact with the back surface of the substrate W. In this case, the support pins 18 and the suction portions 12 may be alternately arranged in the support portions 10, or the support pins 18 or the suction portions 12 may be disposed for each of the support portions 10.

Further, in the substrate holder 30 as shown in FIG. 5, the tip end sides of the respective support portions 10 may be connected by a plate-like long crosspiece. The crosspiece can suppress the vibration of each support portion 10 by connecting the tip portion l ib of the support portion 10. It is preferable that the crosspiece be provided on the lower surface of the support 10 or that the crosspiece be provided with a notch conforming to the shape of the finger so that the fingers 23 of the transport robot 20 do not interfere with the crosspiece.

Further, as shown in FIG. 2, in the substrate holder 6, the holder frame 15 is formed into a U-shape open at one end according to the shape of the rectangular glass substrate W, and the side force substrate W open at one Good even if it is carried in and out. The holder frame 15 shown in FIG. Alternatively, one side edge portion of the substrate W may be held by suction by the base portion 7.

Industrial applicability

According to the present invention, since the support portion for supporting the substrate is provided in a comb shape, the size and weight can be reduced as compared with the case where the peripheral portion of the substrate is supported by the rectangular holder main body. Also, this makes it possible to reduce the load of an articulated robot or the like that performs rocking or rotation of the substrate holder, and the substrate inspection apparatus can be miniaturized.

Claims

The scope of the claims

[1] A substrate holder of a substrate inspection apparatus, which is attached to the tip of a drive unit and moves the substrate while holding the substrate,

A base connected to the drive;

A plurality of support portions extending in parallel in a comb-tooth shape, and the base portion force;

And a suction unit for holding the substrate by suction on the support unit,

The substrate holder of a substrate inspection apparatus, wherein the plurality of support portions have strength to hold the substrate.

[2] The substrate of the substrate inspection apparatus according to claim 1, wherein the height of the support portion is changed in accordance with the distance of the proximal end force which is a portion attached to the base portion. holder.

[3] The peripheral portion of the substrate is provided on each of the base end portion of the support portion attached to the base portion and the tip end portion of the support portion located far from the base portion force. The substrate holder of the substrate inspection apparatus according to claim 1, wherein a holder frame for holding by suction is provided to be orthogonal to the support portion.

[4] The beam for supporting the peripheral portion of the substrate is extended from the outer surface of the support portion provided on the outermost side among the plurality of support portions. Substrate holder for substrate inspection equipment.

[5] A substrate holder according to claim 1;

The robot includes: an articulated robot which is the drive unit which swingably supports the substrate holder; and a light source which emits predetermined visible light.

A substrate inspection apparatus characterized in that the substrate is irradiated with visible light from the light source so that an appearance inspection of the substrate can be performed.