CN1181348C - Full automatic cartridge unit for chip to be aligned and bonded - Google Patents
Full automatic cartridge unit for chip to be aligned and bonded Download PDFInfo
- Publication number
- CN1181348C CN1181348C CNB031502288A CN03150228A CN1181348C CN 1181348 C CN1181348 C CN 1181348C CN B031502288 A CNB031502288 A CN B031502288A CN 03150228 A CN03150228 A CN 03150228A CN 1181348 C CN1181348 C CN 1181348C
- Authority
- CN
- China
- Prior art keywords
- chuck
- support
- vacuum
- sucker
- toggle mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Manipulator (AREA)
Abstract
The present invention discloses a full automatic chuck device used for aligning and bonding chips. The present invention comprises a chuck, a manipulator, a prealignment toggle mechanism, an alignment toggle mechanism and a bonding toggle mechanism, wherein the chuck is used for chucking substrates and covers, the manipulator is used for transporting the chuck, the prealignment toggle mechanism is used for chucking the substrates and the covers automatically and fixing preliminary positions of the substrates, and both the alignment toggle mechanism and the bonding toggle mechanism are used for loosing and clamping the substrates and the covers automatically. By using the present invention to align and bond the substrates and the covers, the full automation of the whole process of preparation for micro fluidic chips can be realized, and thereby, the production efficiency is increased and the production cost is reduced. The micro fluidic chips prepared by the present invention can be widely used in biological medicine, environmental monitoring and food sanitation. Criminal science and national defense can be important application fields of the present invention.
Description
Technical field
The present invention relates to a kind of micro-fluidic chip chuck assembly of using the biological medicine aspect of being used for, be meant especially a kind ofly to be used for that chip is aimed at and the full-automatic chuck assembly of bonding.
Background technology
Micro-fluidic chip is a new and high technology that grows up the latter stage nineties, and from its analytical performance, its following application will be very extensive, but present emphasis is obviously aspect biological medicine.
The appearance of micro-fluidic chip not only can make precious Biosample and reagent consumption be reduced to microlitre greatly even receive upgrading, and make the analysis speed tenfold become hundred times of ground to improve, expense tenfold, hundred times of ground of one-tenth descend, thereby have created condition for analysis and testing technology spreads to huge numbers of families.
Preparation micro-fluidic chip conventional method is to adopt the thermocompression bonding method at present, and it is the comparatively general method of a kind of use.In the thermocompression bonding method, chuck is to the alignment precision and the bonding quality decisive role of chip.Have some structure differences, the chuck that principle is different at present both at home and abroad.Use these chucks to prepare micro-fluidic chip, automaticity is not high, needs a lot of artificial back works, for example chip be put on the chuck, chip on chuck first location and chuck delivered to the bonding chamber all need the people to participate in.When with these chucks micro-fluidic chip being produced in enormous quantities, its production efficiency is very low.
Summary of the invention
The objective of the invention is in order to overcome the not high and low shortcoming of production efficiency of said apparatus automaticity, and a kind of auxiliary high chuck assembly of full automatic production efficiency for preparing micro-fluidic chip is provided.
Of the present inventionly a kind ofly be used for that chip is aimed at and the full-automatic chuck assembly of bonding, comprise chuck, mechanical arm, prealignment toggle mechanism, aligning toggle mechanism and bonding toggle mechanism, wherein chuck be used to be installed substrate and cover plate; Mechanical arm is used to carry chuck; The prealignment toggle mechanism is used for tightening automatically substrate and cover plate and substrate is carried out location just; And aligning toggle mechanism and bonding toggle mechanism all are used for pine card substrate and cover plate automatically.Wherein, toggle mechanism is divided into the prealignment toggle mechanism, aims at toggle mechanism and bonding toggle mechanism according to the difference of station, and three different toggle mechanisms are installed in respectively on prealignment platform, alignment tool and the bonding platform.
The chuck pilot hole is arranged on the chuck body of chuck, and the chuck pilot hole is installed in chuck on the chuck sucker by the chuck reference column, and there are left conveying hole and right conveying hole in the side of chuck body, and anti-featherway is arranged in the right conveying hole; Three substrate reference columns are arranged on the objective table, and stage surface has vacuum channel and vacuum hole; Objective table, vacuum elbow joint, clamping body, claw spacing ring, substrate location are dialled pincers and are dialled the pincers limited post and be installed on the chuck body, and the vacuum elbow joint is installed in the indentation, there of chuck body, constitutes chuck.Clamping body moves in the claw spacing ring, one end of claw is installed on the claw support bar by nut, and the other end of claw has Improved mat, on the claw support bar boss is arranged, compression spring is sleeved between boss and the claw, and the end of claw support bar is equipped with passive driving lever.The substrate location is dialled pincers and is installed on the chuck body by shipping and reselling on another market, and extension spring is installed on the spring hangering nail.
The prealignment toggle mechanism, initiatively driving lever and cylindrical cam are installed on the extension arm, and extension arm is installed on the driven gear, and pen cylinder is installed on the pen cylinder support, and the pen cylinder support is installed on the support by screw; Driven gear, driving gear, motor are fixed on the support.Vacuum tube joint and chuck reference column are installed on the chuck sucker, and vacuum channel, vacuum hole, the extension arm recess of stepping down is arranged on the chuck sucker, and chuck sucker and support are fixedly mounted on the base of prealignment platform, constitute the prealignment toggle mechanism.
Aim at toggle mechanism, initiatively driving lever and cylindrical cam are installed on the extension arm, extension arm is installed on the driven gear, driven gear and driving gear, motor are fixed on the support, objective table vacuum feed pipe adapter is installed on the objective table vacuum feed hole of chuck sucker, chuck sucker vacuum feed pipe adapter is installed on the chuck sucker vacuum feed hole of chuck sucker, the chuck reference column is installed on the chuck sucker, have on the chuck sucker and dial that pincers are imbedded recess, claw is imbedded recess, support and chuck sucker are installed on the base of alignment tool, constitute to aim at toggle mechanism.
The bonding toggle mechanism, initiatively driving lever and cylindrical cam are installed on the extension arm, extension arm is installed on the driven gear, driven gear, driving gear and motor are installed on the support, the chuck reference column is installed on the chuck reference column support, and chuck reference column support is installed in down on the bonding head, has three screws to imbed recess on the following bonding head, following bonding head and support are installed on the base of bonding platform, constitute the bonding toggle mechanism.
Mechanical arm, right carrying refers to be equipped with baffle plate, little cylinder is installed on the stingy jar support, extension spring is installed on two extension spring hooks, left side carrying refers to, right carrying refers to, plastics sucker and stingy jar support are installed on the support arm of mechanical arm, constitute mechanical arm, mechanical arm is installed on the terminal arm of robot by wrist.
Utilize this chuck assembly to substrate with cover plate is aimed at and bonding, it is full-automatic that the whole process of preparation micro-fluidic chip is realized, thereby enhance productivity, and reduces production costs.
Chuck assembly advantage of the present invention is:
1, owing to realized the full-automation of micro-fluidic chip preparation,, carries out pipelining, thereby enhance productivity greatly, reduce the manufacturing cost of each micro-fluidic chip so this device can be equipped on the streamline;
2, utilize this chuck assembly, two optical lens on the alignment tool just can be placed on the below of chuck chip is aimed at, and like this, the structure of whole alignment tool is compact, and volume has also obviously reduced;
3, because two optical lens are that the below that is placed on chuck is come chip is aimed at, thus the interference of external vibration can be reduced greatly to optical lens, thus improved the alignment precision of chip;
4, utilize this chuck assembly, need only the objective table of selecting respective model according to the micro-fluidic chip size for use, just can prepare the micro-fluidic chip of different size within the specific limits;
5, can come vacuum channel on the Design and Machining objective table according to the shape of little raceway groove on the substrate and position, allow the vacuum channel on the objective table avoid on-chip little raceway groove, to guarantee the good bonding quality of micro-fluidic chip.
Description of drawings
Fig. 1 is the structural representation of chuck of the present invention.
Fig. 2 is the upward view of Fig. 1.
Fig. 3 is the structural representation of clamping body of the present invention.
Fig. 4 is the structural representation that pincers are dialled in substrate of the present invention location.
Fig. 5 is the structural representation of prealignment toggle mechanism of the present invention.
Fig. 6 is the upward view of Fig. 5.
Fig. 7 is the work synoptic diagram of prealignment chuck assembly of the present invention.
Fig. 8 is the structural representation that the present invention aims at toggle mechanism.
Fig. 9 is the upward view of Fig. 8.
Figure 10 is the work synoptic diagram that the present invention aims at chuck assembly.
Figure 11 is the structural representation of bonding toggle mechanism of the present invention.
Figure 12 is the work synoptic diagram of bonding chuck assembly of the present invention.
Figure 13 is the structural representation of mechanical arm of the present invention.
Among the figure:
1. left conveying hole 2. chuck bodies 3. chuck pilot holes 4. substrate reference columns 5. objective tables
6. lack 7. vacuum elbow joints, 8. clamping bodies, 9. right conveying hole 10. claw spacing rings
11. 14. groups of pincers of pincers limited post is dialled in vacuum channel 12. vacuum holes 13. substrates location
15. screw 16. Improved mats 17. claws 18. claw support bars 19. passive driving levers
20. location, compression spring 21. nuts, 22. left side driving lever 23. left socles 24. right location driving levers
27. extension springs, 28. spring hangering nails, 29. cover plates 25. right support 26. is shipped and resell on another market
30. substrate
101. support 102. chuck suckers 103. chuck reference columns 104. extension arms 105. are driving lever initiatively
106. cylindrical cam 107. driven gears 108. driving gears 109. motors 110. vacuum channel
The recess 113. pen cylinder supports 111. vacuum hole 112. extension arms are stepped down
114. pen cylinder 115. screws 116. vacuum tube joints
201. support 202. objective table vacuum feed holes 203. extension arms 204. are driving lever initiatively
205. cylindrical cam 206. chuck reference columns 207. driven gears 208. driving gears 209. motors
210. 211. groups of pincers of chuck sucker are imbedded recess 212. claws and are imbedded recess
213. vacuum channel 214. chuck sucker vacuum feed holes 215. objective table vacuum feed pipe adapters
216. chuck sucker vacuum feed pipe adapter
301. support 302. chuck reference columns 303. chuck reference column supports 304. cylindrical cams
305. initiatively 307. times bonding head 308. head of screws of driving lever 306. extension arms are imbedded recess
309. driven gear 310. driving gears 311. motors
401. stingy jar support 402. extension springs are linked up with 403. baffle plates
404. extension spring 405. stingy cylinder 406. right carryings refer to 407. blocks, 408. wrists
409. 411. left side carryings of support arm 410. plastics suckers refer to
Embodiment
Below in conjunction with accompanying drawing the present invention is done detailed explanation.
The present invention is a kind of full-automatic chuck assembly that is used for chip aligning and bonding, comprise chuck, toggle mechanism, mechanical arm, its toggle mechanism can be divided into the prealignment toggle mechanism, aim at toggle mechanism and bonding toggle mechanism according to the difference of station, and three different toggle mechanisms are installed in respectively on prealignment platform, alignment tool and the bonding platform.
Chuck is by left conveying hole 1, chuck body 2, chuck pilot hole 3, substrate reference column 4, objective table 5, breach 6, vacuum elbow joint 7, clamping body 8, right conveying hole 9, claw spacing ring 10, vacuum channel 11, vacuum hole 12, pincers 13 are dialled in the substrate location, dial pincers limited post 14 and screw 15 compositions, chuck pilot hole 3 is arranged on the chuck body 2, chuck pilot hole 3 is installed in chuck on the chuck sucker 102 by chuck reference column 103, there are left conveying hole 1 and right conveying hole 9 in the side of chuck body 2, in the right conveying hole 9 anti-featherway is arranged, three substrate reference columns 4 are arranged on the objective table 5, there are vacuum channel 11 and vacuum hole 12 in objective table 5 surfaces, objective table 5, vacuum elbow joint 7, clamping body 8, claw spacing ring 10, the substrate location is dialled pincers 13 and is dialled pincers limited post 14 and is installed on the chuck body 2, vacuum elbow joint 7 is installed in breach 6 places of chuck body 2, constitutes chuck.Clamping body 8 moves in claw spacing ring 10.
Clamping body 8 is made of Improved mat 16, claw 17, claw support bar 18, passive driving lever 19, compression spring 20 and nut 21, one end of claw 17 is installed on the claw support bar 18 by nut 21, the other end of claw 17 has Improved mat 16, on the claw support bar 18 boss is arranged, compression spring 20 is sleeved between boss and the claw 17, and the end of claw support bar 18 is equipped with passive driving lever 19.
Substrate location dial pincers 13 by location, left side driving lever 22, left socle 23, right location driving lever 24, right support 25, ship and resell on another market 26, extension spring 27 and spring hangering nail 28 form, substrate location is dialled pincers 13 and 26 is installed on the chuck body 2 by shipping and reselling on another market, and extension spring 27 is installed on the spring hangering nail 28.
The prealignment toggle mechanism is by support 101, chuck sucker 102, chuck reference column 103, extension arm 104, active driving lever 105, cylindrical cam 106, driven gear 107, driving gear 108, motor 109, vacuum channel 110, vacuum hole 111, the extension arm recess 112 of stepping down, pen cylinder support 113, pen cylinder 114, screw 115 and vacuum tube joint 116 are formed, initiatively driving lever 105 and cylindrical cam 106 are installed on the extension arm 104, extension arm 104 is installed on the driven gear 107, pen cylinder 114 is installed on the pen cylinder support 113, pen cylinder support 113 is installed on the support 101 by screw 115, driven gear 107, driving gear 108, motor 109 is fixed on the support 101, vacuum tube joint 116 and chuck reference column 103 are installed on the chuck sucker 102, vacuum channel 110 is arranged on the chuck sucker 102, vacuum hole 111, the extension arm recess 112 of stepping down, chuck sucker 102 and support 101 are fixedly mounted on the base of prealignment platform, constitute the prealignment toggle mechanism.
Aim at toggle mechanism by support 201, objective table vacuum feed hole 202, extension arm 203, active driving lever 204, cylindrical cam 205, chuck reference column 206, driven gear 207, driving gear 208, motor 209, chuck sucker 210, dial pincers and imbed recess 211, claw is imbedded recess 212, vacuum channel 213, chuck sucker vacuum feed hole 214, objective table vacuum feed pipe adapter 215 and chuck sucker vacuum feed pipe adapter 216 are formed, initiatively driving lever 204 and cylindrical cam 205 are installed on the extension arm 203, extension arm 203 is installed on the driven gear 207, driven gear 207 and driving gear 208, motor 109 is fixed on the support 201, objective table vacuum feed pipe adapter 215 is installed on the objective table vacuum feed hole 202 of chuck sucker 210, chuck sucker vacuum feed pipe adapter 216 is installed on the chuck sucker vacuum feed hole 214 of chuck sucker 210, chuck reference column 206 is installed on the chuck sucker 210, there are the pincers of dialling to imbed recess 211 on the chuck sucker 210, claw is imbedded recess 212, support 201 and chuck sucker 210 are installed on the base of alignment tool, constitute to aim at toggle mechanism.
The bonding toggle mechanism is imbedded recess 308, driven gear 309, driving gear 310 and motor 311 and is formed by support 301, chuck reference column 302, chuck reference column support 303, cylindrical cam 304, active driving lever 305, extension arm 306, following bonding head 307, screw; Initiatively driving lever 305 and cylindrical cam 304 are installed on the extension arm 306, extension arm 306 is installed on the driven gear 309, driven gear 309, driving gear 310 and motor 311 are installed on the support 301, chuck reference column 302 is installed on the chuck reference column support 303, chuck reference column support 303 is installed in down on the bonding head 307, have three screws to imbed recess 308 on the following bonding head 307, following bonding head 307 and support 301 are installed on the base of bonding platform, constitute the bonding toggle mechanism.
Mechanical arm is by stingy jar support 401, extension spring hook 402, baffle plate 403, extension spring 404, stingy cylinder 405, right carrying refers to 406, block 407, wrist 408, support arm 409, plastics sucker 410 and left side carrying refer to that 411 form, right carrying refers to be equipped with on 406 baffle plate 403 and block 407, stingy cylinder 405 is installed on the stingy jar support 401, extension spring 404 is installed on two extension spring hooks 402, left side carrying refers to 411, right carrying refers to 406, plastics sucker 410 and stingy jar support 401 are installed on the support arm 409 of mechanical arm, constitute mechanical arm, mechanical arm is installed on the terminal arm of robot by wrist 408.
Micro-fluidic chip is meant and is used for the separating liquid molecule to what substrate and cover plate were bonded together so that analyze and a kind of specific purpose tool of tracer liquid composition.Chip comprises substrate 30 and cover plate 29.
The unique design of full-automatic chuck assembly of the present invention is interpreted as:
(A) on the objective table 5 processing be used to adsorb the shape of vacuum channel 11 of substrate 30 and position and can make flexible design according to the size of shape, position and the chip of little raceway groove on the substrate 30, to get rid of the negative effect of vacuum channel to the chip bonding quality; In addition, objective table 5 surfaces are coated with adherent layer, are sticking to behind the bonding on the objective table 5 to prevent substrate 30.
(B) substrate location is installed on the chuck body 2 and dials pincers 13, it and substrate reference column 4 and pen cylinder 114 collaborative works can realize the first location automatically of substrate 30, are used to limit the initial position that pincers 13 are dialled in the substrate location and dial pincers limited post 14.
(C) be separately installed with initiatively driving lever (105,204,305) and cylindrical cam (106,205,304) on the driven gear (107,207,309), can control claw 17 on the chuck clamping body 8 and move up and down by certain time sequence relation and rotate, with the automatic chucking of realizing substrate 30 and cover plate 29 with loosen.
(D) clamping body 8 and claw spacing ring 10 are installed on the chuck body 2, they and toggle mechanism collaborative work can realize the automatic chucking of substrate 30 and cover plate 29 and loosen, and the effect of claw spacing ring 10 is the chucking position and the release position of restriction claw 17.
(E) design has two breach 6 on chuck body 2, when mechanical arm tipped upside down on chuck on the chuck sucker 210, chuck can not bump with the active driving lever 204 and the cylindrical cam 205 that are installed in the extension arm 203 on the driven gear 207 and be installed on the extension arm 203.
(F) be separately installed with chuck reference column 103,206 and be processed with vacuum channel 110,213 on the chuck sucker 102,210, be convenient to location and absorption chuck.
(G) objective table vacuum feed pipe adapter 215 is installed on the chuck sucker 210, so that be communicated with vacuum elbow joint 7 on being installed in objective table 5 by the objective table vacuum feed hole 202 on the chuck sucker 210, for the vacuum channel on the objective table 5 11 provides vacuum source.
(H) claw 17 ends post Improved mat 16, to prevent substrate 30 and cover plate 29 slip dislocation in the process of carrying chuck, influence the alignment precision of substrate 30 and cover plate 29.
(I) design has two through holes that are used to carry (left conveying hole 01 and right conveying hole 09) on the chuck body 2, and wherein right conveying hole 9 also is processed with anti-featherway, to prevent that chuck is from machinery slippage on hand.
(J) on the mechanical arm except be equipped with absorption chip plastics sucker 410, also be equipped with two carryings refer to (left side carrying refer to 411 and right carrying refer to 406), be used to carry chuck, wherein carrying refers to be equipped with on 406 baffle plate 403 and block 407 on the right side again, carrying refers to that 406 roots are equipped with extension spring 404 and stingy cylinder 405 and on the right side, like this, when right side carrying refers to 406 when injecting right conveying hole 09, stingy cylinder 405 drives baffle plate 403, allow right carrying refer to that 406 rotate to an angle, make block 407 retainings on chuck, leave the position of anti-featherway, thereby can prevent that chuck is from machinery slippage on hand.In the time will discharging chuck, stingy cylinder 405 disconnects sources of the gas, right carrying refer to 406 under the effect of extension spring 404 return, thereby block 407 is also got back to the position of anti-featherway, mechanical arm just can be extracted out from chuck then.
Prealignment chuck assembly (as shown in Figure 7) is responsible for the first location of load and substrate 30.During work, mechanical arm is put into chuck on the chuck sucker 102 earlier, vacuum channel 110 on the chuck sucker 102 produces vacuum chuck is held, mechanical arm is put into substrate 30 on the objective table 5 and drives substrate location group 13 pairs of substrates 30 of pincers by pen cylinder 114 again and carries out location just, mechanical arm is put into cover plate 29 on the substrate 30 more then, drive clamping body 8 by toggle mechanism at last substrate 30 and cover plate 29 are clamped on the objective table 5, unclamp the substrate location this moment and dial pincers 13 and cancel vacuum.
Mechanical arm takes off the chuck that installs substrate 30 and cover plate 29 from the prealignment chuck assembly, and chuck is turned over turnback tip upside down on the chuck sucker 210 of aiming at chuck assembly (as shown in figure 10), chuck sucker 210 is opened vacuum chuck is held, alignment motion platform (being carved with vacuum channel on the platform surface) moves upward and withstands on the cover plate 29 then, unclamp clamping body this moment, vacuum channel generation vacuum on objective table 5 and the alignment motion platform holds substrate 30 and cover plate 29 respectively simultaneously, then the alignment motion platform moves downward again, substrate 30 is separated with cover plate 29 and accurately aim at, last alignment motion platform moves upward, substrate 30 and cover plate 29 after accurately aiming at are lumped together and tightened by clamping body, cancel all vacuum this moment, and aligning finishes.
Mechanical arm takes off the chuck that aligning finishes from aiming at chuck assembly, and just be placed on the following bonding head 307 of bonding chuck assembly (as shown in figure 12) after chuck turned over turnback again, last bonding head on the bonding platform moves downward to be pressed on the cover plate 29 and also chuck is compressed simultaneously simultaneously, then unclamp clamping body substrate 30 and cover plate 29 are carried out bonding, be clamped on the chuck by the clamping body micro-fluidic chip that bonding is good again after bonding is intact, at last, by mechanical arm chuck is sent again.
Micro-fluidic chip through full-automatic chuck assembly preparation of the present invention can be widely used in biological medicine aspect, environmental monitoring, food hygiene, and criminal science and national defence aspect also can become the important use field.
Claims (7)
1, a kind of full-automatic chuck assembly that is used for chip aligning and bonding, comprise chuck, toggle mechanism, it is characterized in that: also comprise mechanical arm, its toggle mechanism can be divided into the prealignment toggle mechanism, aim at toggle mechanism and bonding toggle mechanism according to the difference of station, three different toggle mechanisms are installed in respectively on prealignment platform, alignment tool and the bonding platform
Chuck is by left conveying hole (1), chuck body (2), chuck pilot hole (3), substrate reference column (4), objective table (5), breach (6), vacuum elbow joint (7), clamping body (8), right conveying hole (9), claw spacing ring (10), vacuum channel (11), vacuum hole (12), pincers (13) are dialled in the substrate location, dialling pincers limited post (14) and screw (15) forms, chuck pilot hole (3) is arranged on the chuck body (2), chuck pilot hole (3) is installed in chuck on the chuck sucker (102) by chuck reference column (103), there are left conveying hole (1) and right conveying hole (9) in the side of chuck body (2), in the right conveying hole (9) anti-featherway is arranged, three substrate reference columns (4) are arranged on the objective table (5), there are vacuum channel (11) and vacuum hole (12) in objective table (5) surface, objective table (5), vacuum elbow joint (7), clamping body (8), claw spacing ring (10), the substrate location is dialled pincers (13) and is dialled pincers limited posts (14) and is installed on the chuck body (2), vacuum elbow joint (7) is installed in the breach (6) of chuck body (2) and locates, constitute chuck, clamping body (8) moves in claw spacing ring (10)
Wherein, clamping body (8) is made of Improved mat (16), claw (17), claw support bar (18), passive driving lever (19), compression spring (20) and nut (21), one end of claw (17) is installed on the claw support bar (18) by nut (21), the other end of claw (17) has Improved mat (16), the claw support bar has boss on (18), compression spring (20) is sleeved between boss and the claw (17), and the end of claw support bar (18) is equipped with passive driving lever (19)
Wherein, the substrate location is dialled pincers (13) and is made up of location, left side driving lever (22), left socle (23), right location driving lever (24), right support (25), ship and resell on another market (26), extension spring (27) and spring hangering nail (28), the substrate location is dialled pincers (13) and is installed on the chuck body (2) by ship and resell on another market (26), and extension spring (27) is installed on the spring hangering nail (28);
The prealignment toggle mechanism is by support (101), chuck sucker (102), chuck reference column (103), extension arm (104), active driving lever (105), cylindrical cam (106), driven gear (107), driving gear (108), motor (109), vacuum channel (110), vacuum hole (111), the extension arm recess (112) of stepping down, pen cylinder support (113), pen cylinder (114), screw (115) and vacuum tube joint (116) are formed, initiatively driving lever (105) and cylindrical cam (106) are installed on the extension arm (104), extension arm (104) is installed on the driven gear (107), pen cylinder (114) is installed on the pen cylinder support (113), pen cylinder support (113) is installed on the support (101) by screw (115), driven gear (107), driving gear (108), motor (109) is fixed on the support (101), vacuum tube joint (116) and chuck reference column (103) are installed on the chuck sucker (102), vacuum channel (110) is arranged on the chuck sucker (102), vacuum hole (111), the extension arm recess (112) of stepping down, chuck sucker (102) and support (101) are fixedly mounted on the base of prealignment platform, constitute the prealignment toggle mechanism;
Aim at toggle mechanism by support (201), objective table vacuum feed hole (202), extension arm (203), active driving lever (204), cylindrical cam (205), chuck reference column (206), driven gear (207), driving gear (208), motor (209), chuck sucker (210), dial pincers and imbed recess (211), claw is imbedded recess (212), vacuum channel (213), chuck sucker vacuum feed hole (214), objective table vacuum feed pipe adapter (215) and chuck sucker vacuum feed pipe adapter (216) are formed, initiatively driving lever (204) and cylindrical cam (205) are installed on the extension arm (203), extension arm (203) is installed on the driven gear (207), driven gear (207) and driving gear (208), motor (109) is fixed on the support (201), objective table vacuum feed pipe adapter (215) is installed on the objective table vacuum feed hole (202) of chuck sucker (210), chuck sucker vacuum feed pipe adapter (216) is installed on the chuck sucker vacuum feed hole (214) of chuck sucker (210), chuck reference column (206) is installed on the chuck sucker (210), there are the pincers of dialling to imbed recess (211) on the chuck sucker (210), claw is imbedded recess (212), support (201) and chuck sucker (210) are installed on the base of alignment tool, constitute to aim at toggle mechanism;
The bonding toggle mechanism is by support (301), chuck reference column (302), chuck reference column support (303), cylindrical cam (304), active driving lever (305), extension arm (306), following bonding head (307), screw is imbedded recess (308), driven gear (309), driving gear (310) and motor (311) are formed, initiatively driving lever (305) and cylindrical cam (304) are installed on the extension arm (306), extension arm (306) is installed on the driven gear (309), driven gear (309), driving gear (310) and motor (311) are installed on the support (301), chuck reference column (302) is installed on the chuck reference column support (303), chuck reference column support (303) is installed in down on the bonding head (307), there are three screws to imbed recess (308) on the following bonding head (307), following bonding head (307) and support (301) are installed on the base of bonding platform, constitute the bonding toggle mechanism;
Mechanical arm is by stingy jar support (401), extension spring hook (402), baffle plate (403), extension spring (404), little cylinder (405), right carrying refers to (406), block (407), wrist (408), support arm (409), plastics sucker (410) and left side carrying refer to (411) composition, right carrying refers to be equipped with on (406) baffle plate (403) and block (407), little cylinder (405) is installed on the stingy jar support (401), extension spring (404) is installed on two extension spring hooks (402), left side carrying refers to (411), right carrying refers to (406), plastics sucker (410) and stingy jar support (401) are installed on the support arm (409) of mechanical arm, constitute mechanical arm, mechanical arm is installed on the terminal arm of robot by wrist (408).
2, full-automatic chuck assembly according to claim 1, it is characterized in that, decide according to shape, position, the size of the little raceway groove on the substrate (30) shape and the position of the vacuum channel (11) on the objective table (5), to get rid of the negative effect of vacuum channel (11) to the chip bonding quality, spraying adherent layer in objective table (5) surface is sticking to behind the bonding on the objective table (5) to prevent chip.
3, full-automatic chuck assembly according to claim 1, it is characterized in that, pincers (13), substrate reference column (4) are dialled in substrate location on the chuck body (2), and the first automatically location of the realization substrate of pen cylinder (114) collaborative work on the support (101) (30), dial and clamp the initial position that limited posts (14) are used to limit substrate location group pincers (13).
4, full-automatic chuck assembly according to claim 1, it is characterized in that, be separately installed with initiatively driving lever (105,204,305) and cylindrical cam (106,205,304) on the driven gear (107,207,309), can control claw (17) on the clamping body (8) and move up and down by certain time sequence relation and rotate, realize the automatic chucking of chip and loosen.
5, full-automatic chuck assembly according to claim 1, it is characterized in that, objective table vacuum feed pipe adapter (215) on the chuck sucker (210) is used for the objective table vacuum feed hole (202) on the chuck sucker (210) is communicated with vacuum elbow joint (7) on the objective table (5), for the vacuum channel (11) on the objective table (5) provides vacuum source.
6, full-automatic chuck assembly according to claim 1 is characterized in that, claw (17) end posts Improved mat (16), to prevent the process chips slip dislocation at the carrying chuck, influences the alignment precision of chip.
7, full-automatic chuck assembly according to claim 1, it is characterized in that, go up design two breach (6) at chuck body (2), when making mechanical arm tip upside down on chuck on the chuck sucker (210), chuck can not bump with the active driving lever (204) and the cylindrical cam (205) that are installed in the extension arm (203) on the driven gear (207) and be installed on the extension arm (203).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031502288A CN1181348C (en) | 2003-07-22 | 2003-07-22 | Full automatic cartridge unit for chip to be aligned and bonded |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031502288A CN1181348C (en) | 2003-07-22 | 2003-07-22 | Full automatic cartridge unit for chip to be aligned and bonded |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1480725A CN1480725A (en) | 2004-03-10 |
| CN1181348C true CN1181348C (en) | 2004-12-22 |
Family
ID=34156456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB031502288A Expired - Fee Related CN1181348C (en) | 2003-07-22 | 2003-07-22 | Full automatic cartridge unit for chip to be aligned and bonded |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1181348C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101027547B (en) * | 2004-09-27 | 2011-02-02 | 奥林巴斯株式会社 | Substrate holder for substrate inspecting apparatus, and substrate inspecting apparatus |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4912096B2 (en) * | 2006-09-07 | 2012-04-04 | ローム株式会社 | Microchip inspection device |
| CN101634814B (en) * | 2009-08-19 | 2011-09-07 | 株洲南车时代电气股份有限公司 | Primary aligning device and primary aligning system |
| CN102059641B (en) * | 2010-11-02 | 2012-12-05 | 宇骏(潍坊)新能源科技有限公司 | On-board fixture for loading and unloading |
| CN106582911B (en) * | 2017-01-06 | 2020-04-17 | 广东顺德工业设计研究院(广东顺德创新设计研究院) | Detection system and micro-fluidic chip clamp thereof |
| CN108340080B (en) * | 2017-01-24 | 2020-04-03 | 大族激光科技产业集团股份有限公司 | Automatic alignment jig |
| CN108761057A (en) * | 2018-04-26 | 2018-11-06 | 桂兆林 | A kind of Animal diseases detection analysis instrument |
| CN108861476A (en) * | 2018-07-19 | 2018-11-23 | 广州明森科技股份有限公司 | A kind of chip rotary positioning apparatus |
| CN109108473B (en) * | 2018-09-06 | 2020-03-31 | 重庆科技学院 | Use method of overhead biochip object stage |
| CN110058035A (en) * | 2019-03-25 | 2019-07-26 | 广东腾飞基因科技股份有限公司 | A kind of load of sample, detection and analysis integration apparatus and its detection method |
| CN113188433B (en) * | 2021-06-30 | 2021-09-28 | 江苏振宁半导体研究院有限公司 | Diameter measuring device for semiconductor material device |
-
2003
- 2003-07-22 CN CNB031502288A patent/CN1181348C/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101027547B (en) * | 2004-09-27 | 2011-02-02 | 奥林巴斯株式会社 | Substrate holder for substrate inspecting apparatus, and substrate inspecting apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1480725A (en) | 2004-03-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1181348C (en) | Full automatic cartridge unit for chip to be aligned and bonded | |
| CN109865995B (en) | Lampshade assembling device | |
| CN201105371Y (en) | Semi-automatic clamp fixing machine | |
| CN206336508U (en) | Automatic film tearing device | |
| CN107756026B (en) | Automatic assembling machine for quick-opening ceramic valve core semi-finished product | |
| CN105750906A (en) | Turntable device of socket assembling machine | |
| CN1685470A (en) | Device and method for applying semiconductor chips to carriers | |
| CN114083126A (en) | Full-automatic assembling and welding equipment for BOSS column and upright column | |
| CN107971818B (en) | Liquid blowing and chip removing device for CNC production line | |
| CN105128326A (en) | Cross-flow fan blade robot integrating system | |
| CN111113184A (en) | Thermos cup assembly line | |
| CN216575139U (en) | Automatic punching machine for end plate | |
| CN215784529U (en) | Multi-station dispensing locking and attaching equipment | |
| CN202943174U (en) | Novel automatic riveting system | |
| CN209753281U (en) | device special for automatic assembling and dispensing of LED lampshade | |
| CN211708609U (en) | Down lamp reverse side equipment | |
| CN208945711U (en) | Rotation positioning device in a kind of workpiece for automating machining production line | |
| CN208964110U (en) | Dissipate bottle stacking composite fixture | |
| CN108015517B (en) | Automatic crimping of lamp body device and manipulator clamp thereof | |
| CN206316679U (en) | Special-shaped aluminum frame robot gripper | |
| CN221231963U (en) | Automatic assembly line for mop head | |
| CN214924531U (en) | Robot end effector with composite functions | |
| CN108942142A (en) | A kind of installation equipment separating lamp bar | |
| CN209867411U (en) | Pneumatic double-acting chuck | |
| CN109648321B (en) | Automatic assembly machine for assembling heating rod framework and sucker of fish tank |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |