CN114590595A

CN114590595A - Actuator, robot, and substrate transfer method

Info

Publication number: CN114590595A
Application number: CN202210406642.6A
Authority: CN
Inventors: 刘晓刚; 曹斌; 金俊杰; 王健; 宋建业; 李建松
Original assignee: BOE Technology Group Co Ltd; Beijing BOE Display Technology Co Ltd
Current assignee: BOE Technology Group Co Ltd; Beijing BOE Display Technology Co Ltd
Priority date: 2022-04-18
Filing date: 2022-04-18
Publication date: 2022-06-07

Abstract

The present application relates to an actuator, a robot and a substrate transfer method, wherein the actuator includes: a mounting seat; the fixing arms comprise fixing arm bodies and fixing structures, and the fixing structures are arranged on the fixing arm bodies, so that the single fixing arm can fix the target object. The technical scheme of this application has solved the problem of the damage that leads to because the deformation of base plate among the prior art effectively.

Description

Actuator, robot, and substrate transfer method

Technical Field

The application relates to the technical field of display substrates, in particular to an actuator, a robot and a substrate transferring method.

Background

In the manufacturing process of flat display substrate glass, the demand for thinning glass substrates is increasing, and the substrates are generally transported by using a robot frame to place the substrates on the robot frame. In the substrate production process, the process of conveying the end effector of the robot to the storage device is an important link, and whether the end effector of the robot can stably realize the conveying is an important link for ensuring the substrate production. Generally, the thin glass is easy to deform, and the thin glass is abnormally bent and deformed on the manipulator frame due to external force such as self gravity in the process of carrying the manipulator frame. Due to the bending deformation, the substrate often interferes with the memory device in the production process, resulting in abnormal failure of the substrate.

Disclosure of Invention

The application provides an executor, a robot and a substrate transferring method, which are used for solving the problem of damage of a substrate caused by deformation in the prior art.

In order to solve the above problem, the present application provides an actuator including: a mounting seat; the fixing arms comprise fixing arm bodies and fixing structures, the fixing structures are fixed on the fixing arm bodies, and the fixing structures are fixed on the target objects respectively.

Furthermore, the holding arm body is movably arranged on the mounting seat, and the actuator further comprises a driving assembly which is arranged on the mounting seat and connected with the holding arm body.

Further, the drive assembly drives the holding arm body to move linearly in the first direction.

Furthermore, each holding arm main body is provided with a plurality of holding structures, and the holding structures of each holding arm main body are arranged at intervals along the second direction.

Further, the actuator also comprises a supporting arm, the supporting arm is positioned between the two holding arm main bodies, and the supporting arm is arranged on the mounting seat.

Further, the support arm includes a support arm body and a bearing structure disposed on the support arm body.

Further, the support structure includes an arcuate region that contacts the target object.

Further, the support arm main part is hollow rod, and the lateral wall of support arm main part has the installation through-hole, and bearing structure includes the ball, and the ball is installed in the installation through-hole.

Furthermore, the holding structure comprises a negative pressure adsorber arranged on the holding arm body.

Furthermore, the fixing arm body is a hollow rod, the side wall of the fixing arm body is provided with a fixing through hole which is communicated with the inside of the fixing arm body and the outside of the fixing arm body, and the negative pressure absorber is fixedly arranged in the fixing through hole.

Furthermore, the holding structure also comprises a communicating pipe which is arranged in the hollow structure of the holding arm main body in a penetrating way and is communicated with the negative pressure absorber.

Furthermore, a plurality of negative pressure adsorbers are arranged on the same fixing arm main body, and the plurality of negative pressure adsorbers are arranged on the fixing arm main body at intervals along the axial direction of the fixing arm main body.

Further, the supporting arms are multiple, and the supporting arms are located between two adjacent holding arms.

Further, the executor still includes deformation detector, and deformation detector sets up on the mount pad.

According to another aspect of the application, a robot is also provided, which comprises an actuator, wherein the actuator is the actuator.

According to another aspect of the present application, there is also provided a substrate transfer method using the actuator described above, the substrate transfer method including the steps of: acquiring an initial deformation data signal of the substrate, and driving a holding arm of the actuator to move towards a second distance direction if the initial deformation data signal exceeds a first threshold value; and acquiring a real-time deformation data signal of the substrate, and stopping the movement of the holding arm of the actuator if the real-time deformation data signal is lower than a first threshold value.

Compared with the prior art, the technical scheme provided by the embodiment of the application has the following advantages:

according to the technical scheme, the fixing structure on the fixing arm main body fixes the target object, when the target object deforms, the at least two fixing arms move to the second distance from the first distance, and the second distance is larger than the first distance, so that the target object is tensioned, the target object is guaranteed to keep a preset shape, and damage caused by deformation of the target object is avoided. The technical scheme of this application has solved the problem of the damage that leads to because the deformation of base plate among the prior art effectively.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention.

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without inventive exercise.

Fig. 1 shows a schematic structural view of an actuator of the present embodiment;

FIG. 2 shows a schematic front view of the holding arm and drive assembly of the actuator of FIG. 1 mated;

FIG. 3 shows a top view schematic of the engagement of the retaining arm and drive assembly of the actuator of FIG. 2;

FIG. 4 shows an enlarged partial schematic view of the retention arm of FIG. 2 mated;

FIG. 5 shows a schematic diagram of the holding structure of the actuator of FIG. 1;

FIG. 6 shows a schematic view of the holding structure of the actuator of FIG. 1;

FIG. 7 shows a simulated view of the bending of a substrate when the substrate is positioned on an actuator.

Wherein the figures include the following reference numerals:

10. a mounting seat; 20. a holding arm; 21. a holding arm body; 22. a holding structure; 30. a drive assembly; 40. a support arm; 41. a support arm body; 42. a support structure; 421. a ball bearing; 422. a ball seat; 50. a deformation detector; 100. an object.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

As shown in fig. 1 to 7, the actuator of the present embodiment includes: a mount 10 and a plurality of retaining arms 20. The plurality of holding arms 20 are mounted on the mounting base 10, at least two holding arms 20 have a first distance and a second distance, the second distance is greater than the first distance, the holding arms 20 include holding arm bodies 21 and holding structures 22, and each holding arm body 21 is provided with a holding structure 22, so that the single holding arm 20 holds the target 100.

According to the technical scheme of the embodiment, the holding structure 22 on the holding arm main body 21 holds the target object 100, when the target object 100 deforms, the at least two holding arms 20 move from the first distance to the second distance, and the second distance is larger than the first distance, so that the target object 100 is tensioned, the target object 100 is ensured to keep a preset shape, and damage to the target object 100 due to deformation is avoided. The technical scheme of this application has solved the problem of the damage that leads to because the deformation of the base plate among the prior art effectively. The target 100 in this embodiment is a substrate.

In the solution of this embodiment, the holding arm body 21 is movably mounted on the mounting base 10, and the actuator further includes a driving assembly 30, and the driving assembly 30 is disposed on the mounting base 10 and connected to the holding arm body 21. The drive assembly 30 is configured to effect movement of the retaining arm body 21 in a predetermined manner. It should be noted that, in the solution of the present embodiment, the mounting seat 10 is a rod-shaped structure, and when the two holding arm main bodies 21 are relatively far apart along the axis of the mounting seat 10, the two holding arm main bodies 21 always keep a parallel state. This is because the target is a thinned substrate, and some thinned substrates have a thickness of about 0.3 mm to 0.4 mm, and the thinned substrate is placed on the actuator and bent and deformed due to the action of gravity, and the pulling force is applied to the thinned substrate by the separation between the two holding arms 20, and the bent and deformed thinned substrate is prevented by the action of the pulling force.

As shown in fig. 1 to 3, under the action of the present embodiment, a threaded hole is formed on the holding arm 20, and the driving assembly 30 includes a driving motor and a lead screw disposed on an output shaft of the driving motor, and the lead screw is adapted to the threaded hole. The above-described transmission structure makes the movement of the holding arm 20 relatively smooth. It should be noted that the threaded hole may be formed in the holding arm main body 21, or may be formed separately by a threaded block, the threaded block is fixedly connected to the holding arm main body 21 by a fastener, the threaded block is provided with a threaded hole, and the screw rod is inserted into the threaded hole. The threaded rod and the threaded hole are both of preset lengths, so that the contact surface between the threaded rod and the threaded hole is larger, and the transmission stability of the holding arm 20 is further ensured. Specifically, the screw comprises a ball screw, and the structure enables the friction loss between the holding arm 20 and the ball screw to be smaller, and is more beneficial to ensuring the stability of the holding arm 20. In the technical scheme of the embodiment, the actuator is further provided with a locking block which can limit the rotation between the screw rod and the threaded hole, so that the situation that the retaining arm 20 moves due to the rotation of the screw rod after the retaining arm 20 moves in place can be effectively avoided. The locking block can be a moving block arranged on the fixing arm, when the locking block needs to be locked, the moving block moves to be clamped with the lead screw, and when the locking block needs to be moved, the moving block avoids being in contact with the lead screw. The driving motor of the embodiment is connected with the screw rod through the coupler.

As another embodiment, the driving assembly 30 is not limited to the structure of the motor and the lead screw, and may be in the form of a hydraulic push rod, an electric push rod, or the like. The embodiment of the electric push rod is explained, the electric push rod is fixed on the mounting base 10, one end of the electric push rod is connected with the holding arm 20, the mode of the electric push rod is convenient, for example, the above embodiment can be performed when electricity exists. The first direction of the present embodiment is the X direction in fig. 1, and the second direction is the Y direction in the figure.

As shown in fig. 3, in the solution of the present embodiment, a sliding rail structure is disposed between the holding arm body 21 and the mounting base 10. The arrangement of the slide rail structure ensures that the holding arm 20 moves stably and accurately on one hand, and ensures that the holding arm 20 moves along a predetermined track on the other hand. It should be noted that, in the technical solution of the present embodiment, sliding rail structures are respectively disposed between the upper surface of the holding arm main body 21 and the lower surface of the holding arm main body 21 and the mounting seat 10, and such structures further ensure the stability of movement and the accuracy of operation of the holding arm 20.

As shown in fig. 3, in the technical solution of the present embodiment, a slide rail is disposed on the mounting seat 10, and a sliding groove adapted to the slide rail is disposed on the holding arm main body 21; or, the mounting seat 10 is provided with a sliding groove, and the holding arm body 21 is provided with a sliding rail adapted to the sliding groove. It should be noted that, in the technical solution of the present embodiment, the sliding groove is a dovetail groove structure, so that the stability of the position limitation and the matching between the holding arm main body 21 and the mounting seat 10 can be further ensured.

As shown in fig. 6, in the solution of the present embodiment, the holding structure 22 includes a suction cup, and the suction cup is disposed on the holding arm main body 21. The fixing mode of the sucker and the substrate is adopted, so that the base is not easy to damage, for example, the base is not easy to scratch. When the substrate is required to be fixed on the holding arm 20, the suction plate is applied with a negative pressure, and when the substrate is required to be released, the pressure between the suction plate and the substrate is recovered to the same pressure as the atmospheric pressure or a pressure slightly higher than the atmospheric pressure. The structure is convenient to operate and the substrate is not easy to damage.

In the technical solution of the present embodiment, the holding arm main body 21 is a hollow rod, the sidewall of the holding arm main body 21 has a fixing through hole communicating the inside of the holding arm main body 21 and the outside of the holding arm main body 21, and the suction cup is fixedly mounted in the fixing through hole. The structure is compact, and the problem of interference among all parts can be avoided. Specifically, the sucking disc includes absorption section and installation section, the absorption section is the horn mouth form, the macrostoma of horn mouth is towards the base plate, the osculum and the installation section of horn mouth link to each other, the outside of installation section has the recess, the both sides of recess are protruding, the bellied diameter of recess both sides is greater than the diameter of fixed through hole, the diameter of recess is less than or equal to the diameter of installation through hole, the recess card is established on the lateral wall of holding arm main part 21, the arch of recess both sides forms spacingly, the sucking disc just can be fixed on holding arm main part 21 like this, the installation section is located and has the cooperation end in the cavity of holding arm, cooperation end connection communicating pipe.

In the technical solution of this embodiment, the holding structure 22 further includes a communication pipe, and the communication pipe is inserted into the hollow structure of the holding arm main body 21 and is communicated with the suction cup. The structure is compact, and the service cycle is long. The communicating pipe is located inside the holding arm main body 21, so that the communicating pipe is not easily interfered by external acting force, and further the connection between the communicating pipe and the sucker is not easily damaged.

In the technical solution of the present embodiment, a plurality of suction cups are disposed on the same holding arm main body 21, and the suction cups are disposed on the holding arm main body 21 at intervals along the axial direction of the holding arm main body 21. The stability that the base plate is fixed has been guaranteed in setting up of a plurality of sucking discs, and a plurality of sucking discs can use a fixing hole, also can set up a plurality of fixing hole for a plurality of sucking discs, and each sucking disc sets up with each fixing hole one-to-one. In the technical scheme of the embodiment, the suckers are fixedly arranged in a one-to-one corresponding arrangement mode with the fixing through holes.

In the solution of the present embodiment (not shown in the figure), a plurality of suction cups on the same holding arm main body 21 are connected in series with the same communication pipe. The pressure of the plurality of suckers on the same holding arm main body 21 is easily controlled in a manner that the same communication pipe is connected in series with the plurality of suckers on the same holding arm main body 21, that is, the pressure of the plurality of suckers on the same holding arm main body 21 is kept consistent. As another embodiment, one communicating pipe may be separately disposed on one suction cup, and the suction cups are disposed in parallel, but certainly, a communicating pipe may be used to communicate a plurality of suction cups, and the plurality of suction cups on the same holding arm main body 21 may be disposed in a manner of two communicating pipes or three communicating pipes, for example, a suction cup at the far end of the same holding arm main body 21 may be disposed in a manner of communicating two suction cups with one communicating pipe, and a suction cup at the near end of the same holding arm main body 21 may be disposed in a manner of communicating four suction cups with one communicating pipe. Or, the number of the suckers communicated with the communicating pipes on the same holding arm main body 21 is the same, the sucker at the far end on the same holding arm main body 21 is communicated with the sucker by using the thicker communicating pipe, and the sucker at the near end on the same holding arm main body 21 is communicated with the sucker by using the thinner communicating pipe.

In the technical solution of the present embodiment, there are two holding arms 20, the two holding arms 20 are respectively disposed at two ends of the mounting base 10, there are two sets of driving assemblies 30, and the two sets of driving assemblies 30 are connected with the two holding arms 20 in a one-to-one correspondence manner. The arrangement of two holding arms 20 at both ends of the mounting base 10 can realize a larger area where the two holding arms 20 can stretch the substrate. The structure saves cost and space. It should be noted that if necessary, the two holding arms 20 may be disposed at the end of the mounting seat 10 and the middle of the mounting seat 10. Or three holding arms 20 are arranged, two holding arms 20 are respectively arranged at two ends of the mounting seat 10, and one holding arm 20 is arranged at the middle part of the mounting seat 10. The two holding arms 20 may be moved for either holding arm 20 or both holding arms 20 may be moved simultaneously.

In the technical solution of the present embodiment, the mounting seat 10 is a rod-shaped structure, the holding arms 20 are arranged in parallel, that is, the holding arms 20 are arranged in parallel when in the initial position, and the holding arms 20 are always in a parallel state during the moving process.

As shown in fig. 1 to 5, in the solution of the present embodiment, the actuator further includes a supporting arm 40, the supporting arm 40 is disposed on the mounting base 10, and the supporting arm 40 and the plurality of holding arms 20 are located on the same plane. The arrangement of the supporting arm 40 enables the actuator to work on a large substrate, namely, the actuator does not need to be arranged in the form of the fixing arm 20, the supporting arm 40 supports the substrate, and the arrangement of the structure can also play a role in reducing cost. As another embodiment, the holding arms 20 may not be in the same plane, for example, the substrate has a curved structure, so that the holding arms 20 can be adapted to the substrate according to the shape of the substrate. Likewise, the support arm 40 may not be coplanar with the plurality of retaining arms 20. When a plurality of support arms 40 are provided, the support arms 40 may not be in the same plane.

The above description of the plurality of holding arms 20 may not be in the same plane, and the shape of the single holding arm 20 is described below, the surface where the single holding arm 20 meets the substrate may be in an arc shape, that is, the two sides of the single holding arm 20 along the axial extension direction of the holding arm 20 may be in an arc shape, or the holding arm 20 from the direction close to the mounting seat 10 to the direction away from the mounting seat 10 may be in an arc shape, for example, the substrate itself is in a curved shape. It should be noted that the holding arm 20 and the supporting arm 40 may be arc-shaped to fit the substrate.

Similarly, the surface of the single support arm 40 contacting the substrate may be arc-shaped, that is, both sides of the single support arm 40 along the axial extension direction of the support arm 40 may be arc-shaped, or the support arm 40 from the direction close to the mounting base 10 to the direction away from the mounting base 10 may be arc-shaped, and the shape of the support arm 40 is determined according to the shape of the substrate.

The single holding arm 20 may also be stepped, and for the same reason, the single support arm 40 may also be stepped.

As shown in fig. 4 and 5, in the present embodiment, the support arm 40 includes a support arm main body 41 and a holding structure 42 provided on the support arm main body 41. When the substrate is stretched, the support structure 42 can reduce friction and abrasion to the substrate. It should be noted that the support structure 42 is located on the same side as the suction cups and the substrate is placed on the actuator. Taking a substrate as an example, the holding arm 20 and the supporting arm 40 are located on the same plane, and when the substrate is placed on the actuator, the holding arm 20 and the supporting arm 40 support the substrate together, so that the deformation of the substrate can be greatly reduced. A plurality of receiving structures 42 are provided on the same support arm main body 41, and the plurality of receiving structures 42 are arranged at intervals along the axial direction of the support arm main body 41.

As shown in fig. 1 to 5, in the solution of the present embodiment, the support arm main body 41 is a hollow rod, the side wall of the support arm main body 41 has a mounting through hole, the supporting structure 42 includes a ball 421, and the ball 421 is mounted in the mounting through hole. The structure is compact, and the processing cost is low. The bearing area of the substrate supported by the balls 421 can be greatly reduced, that is, the substrate and the balls 421 are in point contact in a circular arc shape, so that the substrate is less likely to be scratched and has less friction. The balls 421 have smaller frictional force than the arc-shaped point contact of the arc-shaped substrate, because the balls rotate, the static friction between the balls and the substrate is converted into dynamic friction. It should be noted that the axial directions of the supporting arm main bodies 41 are parallel, specifically, the axial directions of the supporting arm main bodies are parallel to the holding arm main bodies 21, and the above structure is easy to arrange, convenient to operate, and balanced in force application. The anti-friction structure further includes a ball seat 422, the ball 421 is mounted on the ball seat 422, the ball 421 is mounted in the mounting through hole through the ball seat 422, and the ball 421 is at least partially located outside the support arm main body 41, thus supporting and reducing friction to the substrate. The arrangement of the ball seat 422 ensures the installation of the ball 421 on the one hand and ensures the good matching of the ball seat 422 and the support arm body 41 on the other hand.

The supporting structure 42 is not limited to the balls 421, and the supporting structure 42 may further include a cylindrical roller, and the rolling direction of the cylindrical roller is the direction away from the holding arm 20, so that the substrate can be limited in the stretching direction by the cylindrical roller.

As shown in fig. 1, in the present embodiment, the number of the supporting arms 40 is multiple, and the supporting arms 40 are located between two adjacent holding arms 20. The support arm 40 serves as a support, and the holding arm 20 serves to support the substrate and also serves to fix the substrate by suction. I.e. the support arms 40 and the holding arms 20 together form a support for the substrate, which ensures that the substrate is not easily deformed even under the influence of gravity. When the substrate is deformed, the holding arm 20 is located at the outer side, so that the holding arm 20 can stretch most of the substrate, the structure is reasonable, and the cost is saved.

As shown in fig. 1, in the solution of the present embodiment, the actuator further includes a deformation detector 50, and the deformation detector 50 is disposed on the mounting base 10. The arrangement of the deformation detector 50 greatly reduces the labor intensity and realizes the automation of the substrate detection. Specifically, the actuator further includes a controller, and the deformation detector 50 is electrically connected to the controller, so that real-time monitoring of the substrate can be realized through the controller. Further, the driving assembly 30 is electrically connected to the controller, when the deformation detector 50 detects that the substrate is bent, a signal is transmitted to the controller, and the controller controls the driving assembly 30 to enable the holding arm to stretch the substrate, so that automatic detection and stretching of the substrate can be achieved.

Specifically, the deformation detectors 50 are provided in plural numbers, and the deformation detectors 50 are provided between the holding arm 20 and the support arm 40, or between the support arm 40 and the support arm 40, and since the position where the substrate is bent is most likely to occur between the holding arm 20 and the support arm 40, or between the support arm 40 and the support arm 40, the deformation detectors 50 are provided between the support arm 40 and the holding arm 20, and the deformation detectors 50 are provided between the support arm 40 and the support arm 40, it is possible to achieve a preferable effect of the deformation detectors 50 in detecting the bending of the substrate. When the strain detector 50 is disposed between the support arm 40 and the holding arm 20, the strain detector 50 is disposed at an intermediate position between the support arm 40 and the holding arm 20, and when the strain detector 50 is disposed between the support arm 40 and the support arm 40, the strain detector 50 is disposed at an intermediate position between the support arm 40 and the support arm 40, and the intermediate position is a position at which the substrate is most deformed by gravity. The deformation detector 50 may be an infrared detector, a laser detector, or a photodetector. The base plate is the easiest to be out of shape, and the great position of deflection can set up three deformation detector 50, and three deformation detector 50 is two liang to carry out the information interaction, can realize like this that the base plate is in three-dimensional position location.

The application also provides a robot comprising an actuator. The actuator is the actuator described above. Such a robot can effectively achieve correction of substrate warpage.

The application also provides a substrate transferring method, the actuator is adopted in the substrate transferring method, and the substrate transferring method comprises the following steps: a substrate transfer instruction is acquired. And outputting a rising instruction of the actuator according to the moving-to-position signal of the actuator. The actuator ascends to support the substrate to be transferred and returns to the ascending in-place signal after reaching the preset stroke. And after the signal of reaching the target is acquired, the actuator stops rising. An initial deformation data signal of the substrate is obtained, and if the deformation data signal exceeds a first threshold value, the holding arm 20 of the actuator is driven to move towards the second distance direction. Acquiring a real-time deformation data signal of the substrate, and stopping the movement of the holding arm 20 of the actuator if the real-time deformation data signal is lower than a first threshold value. The initial deformation data signal of the substrate, which is a continuously acquired process, drives the holding arm 20 of the actuator to move in the second distance direction when the deformation of the substrate exceeds the first threshold. The first threshold may be a range, for example, when the substrate is deformed by more than a first value, the actuator stretches the substrate, and when the substrate is deformed by less than a second value, the actuator stops operating, and the first value is larger than the second value.

Detecting a substrate on the actuator; when the deformation of the substrate is detected, the at least two holding arms 20 move to the positions far away from each other to stretch the substrate; when a substrate on the actuator is detected as satisfactory, the holding arms 20 stop moving away from each other. The substrate transfer method can effectively adjust the bent substrate.

As can be seen from the above, after the substrate is placed on the actuator, the support carriers of the substrate on the actuator are the suction cups and the balls 421, the suction cups are respectively disposed on the holding arms on the left and right sides (see fig. 1 in the specification), the number of the suction cups is 12 in this embodiment, and the substrate (glass substrate) can be firmly fixed on the holding arm 20 by the vacuum effect. The vacuum chuck has a structure as shown in fig. 6, and the two middle support arms 40 are support arms, and balls 421 are respectively provided on the support arm main bodies 41 for supporting the glass substrate. When the thinned glass is placed on the actuator, the glass is bent and deformed due to gravity, and the bending state analyzed by software simulation is shown in fig. 7, and the maximum sagging amount of the glass is 9 mm. In order to realize stable conveyance of the actuator, the degree of bending of the glass substrate is detected in real time by the strain detector 50 provided on the mounting base 10, and the data of the bending of the glass substrate is fed back to the controller of the robot in real time, and the data fed back by the strain detector is controlled by the robot to control the holding arm 20 in real time, so that the glass substrate which has been bent and deformed is automatically straightened by the holding arm 20 under the driving of the driving motor. The function of automatically correcting the sagging degree of the glass substrate is realized. The two holding arms 20 are respectively fixed on an upper rail and a lower rail of the mounting base 10 (the upper and lower directions of the present application are for easy explanation and are not meant to be limited according to the drawings), the rails play a role of limiting the horizontal movement of the holding arms 20, and the output power is driven by the driving motor in cooperation with the coupling and the screw rod to drive the holding arms 20, so that the holding arms 20 perform the horizontal pulling movement. Therefore, the electric control system controls the driving motor, and the driving motor drives the holding arm 20 to horizontally level the bent and deformed substrate, so that the glass substrate can be smoothly transferred to a downstream storage device by the mechanical arm, and the defect of glass collision and damage caused by glass sagging can be avoided. The executor is at the in-process of level correction, in order to guarantee the horizontal frictional force minimizing of glass substrate, prevent that glass from leading to rectifying unusually because of frictional force is too big, bearing structure 42 has been set up very much, bearing structure 42 includes ball 421 and ball seat 422, the ball of bearing structure 42 can 360 slide on ball seat 422, thereby can guarantee that glass substrate can realize the slip of little frictional resistance when rectifying glass substrate level, thereby ensure that the executor realizes the function of leveling the glass substrate level of bending deformation.

It is noted that, in this document, relational terms such as "first" and "second," and the like, may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

The foregoing are merely exemplary embodiments of the present invention, which enable those skilled in the art to understand or practice the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An actuator, comprising:

a mounting seat (10);

a plurality of holding arms (20), wherein the holding arms (20) are all installed on the installation seat (10), at least two holding arms (20) have a first distance and a second distance, the second distance is larger than the first distance, the holding arms (20) comprise holding arm bodies (21) and holding structures (22), each holding arm body (21) is fixed with a holding structure (22), and each holding structure (22) is respectively held on a target object (100).

2. Actuator according to claim 1, wherein the retaining arm body (21) is movably mounted on the mounting (10), the actuator further comprising a drive assembly (30), the drive assembly (30) being arranged on the mounting (10) and being connected to the retaining arm body (21).

3. The actuator of claim 2, wherein the drive assembly (30) drives the holding arm body (21) to move linearly in a first direction.

4. The actuator according to claim 1, wherein a plurality of said holding structures (22) are provided on each of said holding arm bodies (21), and a plurality of said holding structures (22) of each of said holding arm bodies (21) are arranged in a spaced-apart relationship in the second direction.

5. Actuator according to claim 1, further comprising a support arm (40), said support arm (40) being located between the two retaining arm bodies (21), said support arm (40) being provided on the mount (10).

6. The actuator according to claim 5, characterized in that the support arm (40) comprises a support arm body (41) and a holding structure (42) provided on the support arm body (41).

7. The actuator according to claim 6, characterized in that said holding structure (42) comprises an arc-shaped zone, said arc-shaped zone being in contact with said object (100).

8. The actuator according to claim 7, characterized in that said support arm body (41) is a hollow rod, the side walls of said support arm body (41) having mounting through holes, said holding structure (42) comprising balls (421), said balls (421) being mounted in said mounting through holes.

9. The actuator according to claim 1, characterized in that the holding structure (22) comprises a negative pressure adsorber provided on the holding arm body (21).

10. The actuator according to claim 9, wherein the holding arm body (21) is a hollow rod, the side wall of the holding arm body (21) has a fixing through hole communicating the inside of the holding arm body (21) and the outside of the holding arm body (21), and the negative pressure suction device is fixedly mounted in the fixing through hole.

11. The actuator according to claim 10, characterized in that the holding structure (22) further comprises a communication pipe which is arranged in the hollow structure of the holding arm body (21) and is communicated with the negative pressure adsorber.

12. The actuator according to claim 9, wherein a plurality of the negative pressure adsorbers are arranged on the same holding arm body (21), and the plurality of negative pressure adsorbers are arranged on the holding arm body (21) at intervals along the axial direction of the holding arm body (21).

13. The actuator according to any one of claims 1 to 12, further comprising a deformation detector (50), the deformation detector (50) being provided on the mount (10).

14. A robot comprising an actuator, wherein the actuator is according to any of claims 1 to 13.

15. A substrate transfer method using the actuator according to any one of claims 1 to 13, comprising the steps of:

acquiring an initial deformation data signal of the substrate, and driving the holding arm (20) of the actuator to move towards a second distance direction if the deformation data signal exceeds a first threshold value;

a real-time deformation data signal of the substrate is acquired, and if the real-time deformation data signal is lower than a first threshold value, the movement of the holding arm (20) of the actuator is stopped.