CN111791255A

CN111791255A - Mechanical arm

Info

Publication number: CN111791255A
Application number: CN202010818407.0A
Authority: CN
Inventors: 刘金贵
Original assignee: Vicino Technology Co ltd
Current assignee: Vicino Technology Co ltd; Visionox Technology Inc
Priority date: 2020-08-14
Filing date: 2020-08-14
Publication date: 2020-10-20
Anticipated expiration: 2040-08-14
Also published as: CN111791255B

Abstract

The invention provides a manipulator, which solves the problem that a finger-type manipulator in the prior art is easy to droop when carrying a glass substrate. The manipulator includes: a plurality of fingers arranged at intervals, wherein each finger comprises a supporting surface, and the supporting surfaces of the fingers are coplanar; and the adsorption pieces are arranged on the supporting surfaces of the fingers, and each adsorption piece is in sliding connection with the finger where the adsorption piece is located. The connecting line of the at least two adsorption pieces positioned on different fingers penetrates through the interval area between the two fingers, and the sliding tracks of the at least two adsorption pieces are collinear and the sliding directions are opposite.

Description

Mechanical arm

Technical Field

The invention relates to the technical field of machine automation, in particular to a manipulator.

Background

In the field of manufacturing display panels, a glass substrate transfer operation is generally performed by a robot hand of a robot, and the robot hand for transferring a glass substrate is generally of a fork tooth type. Fig. 1 is a schematic view showing a state in which a glass substrate is on a robot in the related art. As shown in fig. 1, the robot includes a plurality of fingers 1, and a region S of the glass substrate 2 between adjacent fingers 1 tends to sag due to gravity.

Disclosure of Invention

In view of this, embodiments of the present invention provide a robot to solve the problem in the prior art that a finger-type robot is prone to sag when carrying a glass substrate.

The present invention provides a manipulator including: the device comprises a plurality of fingers which are arranged at intervals, wherein each finger comprises a supporting surface, and the supporting surfaces of the fingers are coplanar; and a plurality of adsorption pieces which are arranged on the supporting surfaces of the fingers, and each adsorption piece is connected with the finger where the adsorption piece is positioned in a sliding way. The connecting line of at least two adsorption parts positioned on different fingers penetrates through the interval area between the two fingers, and the sliding tracks of the at least two adsorption parts are collinear and the sliding directions are opposite.

In one embodiment, the plurality of fingers includes a first finger and a second finger; the first finger comprises at least one first adsorption part, the second finger comprises at least one second adsorption part, and the at least one first adsorption part and the at least one second adsorption part are in one-to-one correspondence; the sliding tracks of the first suction piece and the second suction piece which correspond to each other are collinear and the sliding directions are opposite.

In one embodiment, the first finger comprises a plurality of suction members, and the sliding directions of the suction members on the first finger are parallel.

In one embodiment, the plurality of fingers further includes a third finger and a fourth finger; the third finger is positioned on the side of the first finger far away from the second finger, and the fourth finger is positioned on the side of the second finger far away from the first finger. The third finger comprises at least one third adsorption piece, the at least one third adsorption piece is in one-to-one correspondence with the at least one first adsorption piece, and the sliding tracks of the mutually corresponding third adsorption piece and the sliding tracks of the first adsorption piece are collinear and the sliding directions are the same. The fourth finger comprises at least one fourth adsorption piece, the at least one fourth adsorption piece is in one-to-one correspondence with the at least one second adsorption piece, and the sliding tracks of the fourth adsorption piece and the second adsorption piece which are in mutual correspondence are collinear and the sliding directions are the same.

In one embodiment, for two suction members sliding in the same direction, the sliding distance of the suction member on the third finger is greater than the sliding distance of the suction member on the first finger, and the sliding distance of the suction member on the fourth finger is greater than the sliding distance of the suction member on the second finger.

In one embodiment, the finger is provided with a groove; the adsorption piece comprises a vacuum chuck in sliding fit with the groove and a telescopic part connected with the vacuum chuck.

In one embodiment, the vacuum chuck is connected to the first valve through a first pipe; the first pipeline is communicated with the elastic cavity through the second valve, the elastic cavity is provided with a preset stretching direction, and the preset stretching direction is perpendicular to the first pipeline.

In one embodiment, the groove is a strip-shaped groove; a hose and a hard pipe are sequentially arranged between the second valve and the elastic cavity; the outer wall of the hard tube is fixed with one end of the strip-shaped groove; the outer wall of the elastic cavity is connected with the outer wall of the first pipeline.

In one embodiment, a guide rail parallel to a preset telescopic direction is arranged on the outer wall of the first pipeline, and a spring is sleeved on the periphery of the guide rail; the outer wall of the elastic cavity is fixedly connected with the outer wall of the first pipeline through a spring.

The present invention also provides another robot for transferring a glass substrate, comprising: a plurality of fork arms arranged at intervals, wherein each fork arm comprises a supporting surface, and the supporting surfaces of the plurality of fork arms are coplanar to form a bearing surface; at least one adsorption piece is arranged on the supporting surface of each fork rod. When the glass substrate is placed on the bearing surface, the at least two adsorption pieces positioned on different fork rods adsorb the glass substrate and move towards opposite directions so as to flatten the glass substrate.

According to the manipulator provided by the invention, the connecting line of the at least two adsorption pieces penetrates through the interval area between the two fingers, the sliding directions of the at least two adsorption pieces are opposite and parallel to the connecting line of the at least two adsorption pieces, and the interval area can be stretched by utilizing the resultant force of the at least two adsorption pieces, so that the phenomenon of sagging of the interval area is relieved or even avoided.

Drawings

Fig. 1 is a schematic view showing a state in which a glass substrate is on a robot in the related art.

Fig. 2 is a schematic view illustrating a state where a glass substrate is disposed on a robot according to an embodiment of the present invention.

Fig. 3 is a schematic structural diagram of a robot provided in the first embodiment of the present invention.

Fig. 4 is a schematic structural diagram of a robot provided in a second embodiment of the present invention.

Fig. 5 is a schematic structural diagram of a robot provided in a third embodiment of the present invention.

Fig. 6 is a schematic structural diagram of a robot according to a fourth embodiment of the present invention.

Fig. 7 is a schematic structural view of an adsorbing member according to a first embodiment of the present invention.

Fig. 8 is a schematic structural view of an adsorbing member according to a second embodiment of the present invention.

Detailed Description

As described in the background art, the glass substrate 2 on a fork-type robot (hereinafter, referred to as a robot) is prone to sag in the region S between adjacent fingers 1 due to gravity, which causes various problems as follows when the glass substrate 2 is transferred from the robot to the next work cell. First, for example, when transferring to the array substrate support column, it is common that the robot carries the glass substrate 2 and positions the glass substrate at a predetermined height above the array substrate support column, then the robot is controlled to move down by a predetermined height to place the glass substrate 2 on the array substrate support column, and then the robot is pulled out from the gap of the array substrate support column. In this process, since the predetermined height does not take into account the sagging phenomenon of the glass substrate 2, the robot arm is still moving downward continuously while the sagging region of the glass substrate 2 is actually in contact with the array substrate support columns, thereby causing the sagging region to be broken. Second, the alignment error may be caused by the sagging phenomenon, which is still transferred to the array substrate supporting pillars. Thirdly, the sagging phenomenon causes the thickness of each film layer formed on the glass substrate 2 to be uneven, thereby affecting the display effect.

In order to solve at least one of the above-mentioned problems caused by the sagging of the glass substrate 2, the present invention provides a robot having a finger 1 provided with an adsorption member, when the glass substrate 2 is on the robot, the adsorption member on the finger 1 adsorbs the glass substrate 2, and two fingers 1 simultaneously move in opposite directions to flatten the glass substrate 2. In this case, the state when the glass substrate 2 is on the robot is as shown in fig. 2, thereby alleviating or even avoiding the sagging phenomenon of the glass substrate 2.

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Fig. 3 is a schematic structural diagram of a robot provided in the first embodiment of the present invention. The manipulator can be used for transferring the glass substrate, and can also be used in other fields, and for convenience of description, the specific embodiment herein takes the glass substrate as an example for transferring. As shown in fig. 3, the robot arm 10 includes a plurality of fingers 11 and a plurality of suction members 12 arranged at intervals. Each finger 11 comprises a support surface, the support surfaces of the plurality of fingers 11 being coplanar. The plurality of adsorption pieces 12 are arranged on the supporting surfaces of the plurality of fingers 11, the quantity of the adsorption pieces 12 on different fingers 11 is the same or different, and each adsorption piece 12 is connected with the finger 11 in a sliding mode. The connecting line of at least two suction pieces 12 on different fingers penetrates through the interval area between two fingers 11, and the sliding tracks of the at least two suction pieces 12 on different fingers are collinear and opposite in sliding direction.

The finger 11 is an elongated support, and may be in any shape such as a strip, a broken line, or a wave. The suction member 12 refers to an element having a suction function, such as a suction cup.

For example, referring to fig. 3, the plurality of suction members 12 includes a first suction member 121 and a second suction member 122, the first suction member 121 being positioned on the first finger 111, and the second suction member 122 being positioned on the second finger 112. The line connecting the first suction member 121 and the second suction member 122 passes through the spaced area between the first finger 111 and the second finger 112. The first and

second suction members

121 and 122 are slid in opposite directions to stretch the spaced area between the first and

second fingers

111 and 112.

For another example, with continued reference to fig. 3, the plurality of suction members 12 further includes a third suction member 123, and the third suction member 123 is located on the third finger 113. A line connecting the first suction member 121 and the second suction member 122 passes through a spaced area between the first suction member 121 and the second suction member 122, and a line connecting the second suction member 122 and the third suction member 123 passes through a spaced area between the second suction member 122 and the third suction member 123. The first and

second suction members

121 and 122 slide in opposite directions to extend a spaced area between the first and

second suction members

121 and 122. The sliding directions of the second and

third suction members

122 and 123 are the same, and the interval area between the second and

third suction members

122 and 123 can be extended by setting the sliding distance of the third suction member 123 to be greater than the sliding distance of the second suction member 122.

For another example, with reference to fig. 3, the plurality of suction members 12 further includes a fourth suction member 124 and a fifth suction member 125, the fourth suction member 124 is located on the first finger 111, and the fifth suction member 125 is located on the second finger 112. A line connecting the fourth suction member 124 and the fifth suction member 125 passes through a spaced region between the first finger 111 and the second finger 112. The distance between the lines of the fourth and

fifth suction members

124 and 125 is greater than the distance between the lines of the first and

second suction members

121 and 122 to accommodate different positions having different sizes on the spaced area. The fourth suction member 124 and the fifth suction member 125 are slid in opposite directions to further stretch the spaced area between the first finger 111 and the second finger 112.

According to the manipulator provided by this embodiment, a connecting line of the at least two suction pieces 12 is arranged to penetrate through the interval region between the two fingers 11, the sliding directions of the at least two suction pieces 12 are opposite and parallel to the connecting line of the at least two suction pieces 12, and the interval region can be stretched by using the pulling force of the at least two suction pieces 12, so as to alleviate or even avoid the sagging phenomenon of the interval region.

Fig. 4 is a schematic structural diagram of a robot provided in a second embodiment of the present invention. The robot 20 shown in fig. 4 differs from the robot 10 shown in fig. 1 only in that in the present embodiment, the plurality of fingers include a first finger 211 and a second finger 212. The first finger 211 comprises at least one first suction piece, the second finger 212 comprises at least one second suction piece, the at least one first suction piece and the at least one second suction piece are in one-to-one correspondence, and the sliding tracks of the first suction piece and the second suction piece which correspond to each other are collinear and in opposite sliding directions.

Specifically, as shown in fig. 4, the first finger 211 includes a first suction member 221, the second finger 212 includes a second suction member 222, and the sliding tracks of the first suction member 221 and the second suction member 222 are collinear and opposite to each other. Thus, the first and

second suction members

221 and 222 stretch one position of the interval area between the first and

second suction members

221 and 222. The first suction parts 221 and the second suction parts 222 form a group, when the first finger 211 comprises a plurality of first suction parts 221, the second finger 212 comprises a plurality of second suction parts 222, and the plurality of first suction parts 221 and the plurality of second suction parts 22 correspond to each other, the plurality of first suction parts 221 and the plurality of second suction parts 222 form a plurality of suction groups, and the suction parts in the plurality of suction parts respectively stretch the spacing area from different positions, thereby ensuring the stress balance of the spacing area and improving the reliability of the manipulator.

In one embodiment, as shown in FIG. 4, the plurality of fingers further includes a third finger 213 and a fourth finger 214. Third finger 213 is located on a side of first finger 211 remote from second finger 212, and fourth finger 214 is located on a side of second finger 212 remote from first finger 211. The third finger 213 includes at least one third absorption element, at least one third absorption element on the third finger 213 corresponds to at least one first absorption element on the first finger 211 one by one, and the sliding tracks of the third absorption element and the first absorption element corresponding to each other are collinear and the sliding directions are the same. The fourth finger 214 includes at least one fourth absorption piece, the at least one fourth absorption piece on the fourth finger 214 corresponds to the at least one second absorption piece on the second finger 212 one by one, and the sliding tracks of the fourth absorption piece and the second absorption piece corresponding to each other are collinear and the sliding directions are the same.

Specifically, the first suction member 221 of the first finger 211 further corresponds to the third suction member 223 of the third finger 213, the second suction member 222 of the second finger 212 further corresponds to the fourth suction member 224 of the fourth finger 214, and the sliding paths of the two suction members corresponding to each other are collinear and have the same sliding direction. Taking the example that the first finger 211, the second finger 212, the third finger 213 and the fourth finger 214 respectively include one suction member, the sliding tracks of the first suction member 221 on the first finger 211 and the third suction member 223 on the third finger 213 are collinear and have the same sliding direction, and the sliding tracks of the second suction member 222 on the second finger 212 and the fourth suction member 224 on the fourth finger 214 are collinear and have the same sliding direction. Since the sliding track of the first suction member 221 on the first finger 211 is also collinear with and slides in the opposite direction to the sliding track of the second suction member 222 on the second finger 212, that is, the first suction member 221, the second suction member 222, the third suction member 223 and the fourth suction member 224 are collinear, and the first suction member 221 and the third suction member 223 slide in the first direction, the second suction member 222 and the fourth suction member 224 slide in the second direction, and the first direction and the second direction are collinear, the glass substrate is stretched in the opposite direction on the same straight line. In this case, in comparison with the case where only first finger 211 and second finger 212 are provided, the number of spaced regions of the glass substrate is increased and the area of a single spaced region is reduced, which is equivalent to providing third finger 213 and fourth finger 214 on the periphery of first finger 211 and second finger 212, thereby reducing the degree of sagging of the spaced regions and contributing to the improvement in the reliability of the robot.

In one embodiment, referring to fig. 4, for two suction members sliding in the same direction, the sliding distance of the suction member on the third finger 213 is greater than that of the suction member on the first finger 211, and the sliding distance of the suction member on the fourth finger 214 is greater than that of the suction member on the second finger 212.

Taking the first suction member 221 and the third suction member 223 as an example, when the sliding distance of the third suction member 223 is greater than that of the first suction member 221, the first suction member 221 and the third suction member 223 generate a rightward pulling force on the spaced area therebetween in the direction of the line connecting the first suction member 221 and the third suction member 223, thereby stretching the spaced area between the first suction member 221 and the third suction member 223. Therefore, in this case, the spacing area of the whole glass substrate between any two adjacent fingers can be under the action of tensile force, and the glass substrate can be kept flat everywhere.

Fig. 5 is a schematic structural diagram of a robot provided in a third embodiment of the present invention. The robot 30 shown in fig. 5 is different from the robot 20 shown in fig. 4 only in that, in the present embodiment, the first finger 311 includes a plurality of suction members, and the sliding directions of the plurality of suction members on the first finger 311 are parallel.

Since the robot 20 shown in fig. 4 includes a plurality of connecting lines, each connecting line connects one suction member of each of the first finger 211, the second finger 212, the third finger 213, and the fourth finger 214, and the sliding directions of the four suction members on the same connecting line coincide with the connecting line. As shown in fig. 5, when the sliding directions of the plurality of suction members on the first finger 311 are parallel, the plurality of lines included in the robot 30 are parallel to each other. Since the glass substrate is generally regular, for example, rectangular, in this case, the glass substrate can be stretched from different positions of the glass substrate in the same direction, so as to ensure the stress balance of the glass substrate at each position, and the reliability is higher.

Fig. 6 is a schematic structural diagram of a robot according to a fourth embodiment of the present invention. The robot arm 40 shown in fig. 6 is different from the robot arm 30 shown in fig. 5 only in that, in the present embodiment, a plurality of fingers 41 are arranged in parallel, a plurality of suction members 42 on each finger 41 are arranged at intervals and in a line, and a plurality of suction members 42 on the plurality of fingers 41 form an array. The sliding direction of each absorption member 42 is perpendicular to the length direction of the finger 41.

In this case, the interval area between each adjacent two fingers 41 is rectangular. As for the spaced area between two adjacent fingers 41, the spaced area is subjected to a force at equal intervals in the length direction of the fingers 41. By setting the sliding distance of the absorption members 42 on the first finger 411 and the second finger 412 to be equal, the sliding distance of the absorption members 42 on the third finger 413 and the fourth finger 414 to be equal, and the sliding distance of the absorption members 42 on the first finger 411 and the second finger 412 to be smaller than the sliding distance of the absorption members 42 on the third finger 413 and the fourth finger 414, the force balance of the separation area can be ensured.

According to the manipulator that this embodiment provided, simple structure easily industrial implementation.

The invention also provides an adsorption piece for the manipulator provided by any one of the above embodiments. Fig. 7 is a schematic structural view of an adsorbing member according to a first embodiment of the present invention. As shown in fig. 7, the suction member 60 includes a vacuum cup 61 and an expansion part connected to the vacuum cup 61. In this case, the finger is provided with a groove in sliding fit with the vacuum chuck 61, so that the vacuum chuck 61 can be driven to slide along the groove by the telescopic movement of the telescopic part.

The telescopic part can be of any telescopic structure, such as a cylinder, a telescopic rod, a spring and the like.

In one embodiment, as shown in FIG. 7, the vacuum chuck 61 is connected to a first valve T1 through a first conduit 62. The first pipe 62 is communicated with the elastic cavity 63 through a second valve T2, and the elastic cavity 63 has a predetermined expansion direction L perpendicular to the first pipe 62. The elastic chamber 63 is a sealed chamber formed of an elastic material, such as rubber.

For example, in the present embodiment, the groove on the finger is a strip-shaped groove. The elastic cavity 63 includes a first end and a second end which are oppositely arranged in a preset telescopic direction L, the first end is connected with the outer wall of the first pipeline 62 through a second valve T2, and the second end is fixed at the first end A of the strip-shaped groove.

In this case, the operation of the adsorption member 60 includes:

first, the vacuum chuck 61 pulls the glass substrate 2. A vacuum cup 61 is located at the second end of the recess. The first valve T1 is opened, the second valve T2 is closed, the vacuum-pumping device starts to vacuum the first pipe 62, and the vacuum chuck 61 sucks the glass substrate. When the suction of the first pipe 61 reaches a predetermined value, the second valve T2 is opened to evacuate the elastic chamber 63. Along with the reduction of the air pressure in the elastic cavity 63, the elastic cavity 63 contracts to drive the vacuum chuck 61 to move towards the direction close to the first end A of the groove, so that the glass substrate is stretched. When the vacuum chuck 61 is moved to a predetermined position, for example, the second end of the groove, the second valve T2 and the first valve T1 are sequentially closed.

Second, the vacuum chuck returns to the initial position. The first valve T1 is opened to introduce gas into the first pipe 62, and when the pressure in the first pipe 62 is equal to the external atmospheric pressure, the vacuum chuck 61 releases the glass substrate. At this time, the second valve T2 is opened to introduce gas into the elastic cavity 63, and the elastic cavity 63 expands to drive the vacuum chuck 61 to move toward the first end a of the groove to return to the initial position.

In one embodiment, the first end a of the strip-shaped groove is provided with a guide rail 64 parallel to the predetermined stretching direction L, the guide rail 64 is rod-shaped, for example, a spring 65 is sleeved on the periphery of the guide rail 64, and the guide rail 64 is used for limiting the running track of the spring 65, so as to ensure that the spring 65 stretches along the guide rail 64. The outer wall of the elastic cavity 63 is connected with the first end A of the strip-shaped groove through a spring 65. In this case, during the second stage, that is, during the process of returning the vacuum chuck 61 to the initial position, the gas may not be introduced into the elastic chamber 63, and only the first valve T1 and the second valve T2 may be opened, so that the external air is freely charged into the elastic chamber 63. In this case, it is difficult for the elastic chamber 63 to be freely restored to the original position, and therefore, according to the present embodiment, the vacuum chuck 61 can be pushed back to the original position, i.e., the first end a of the bar groove, by the restoring force of the spring 64 by providing the spring 65 and the guide rail 64. The structure is simpler, and the cost is lower.

Fig. 8 is a schematic structural view of an adsorbing member according to a second embodiment of the present invention. The difference between the suction member 70 shown in fig. 8 and the suction member 60 shown in fig. 7 is only the structure of the expansion part. Specifically, in this embodiment, the hose 76 and the hard tube 77 are sequentially disposed between the second valve T2 and the elastic chamber 73. The outer wall of hard tube 77 is fixed with the first end A of bar groove, and the outer wall of elasticity cavity 73 is connected with the outer wall of first pipeline 72. In this way, the elastic chamber 73 is separated from the second valve T2, and the second valve T2 is prevented from being affected by expansion and contraction of the elastic chamber 73. Meanwhile, since the outer wall of the hard tube 77 is fixed to the first end a of the bar groove, the vacuum chuck 61 slides along the bar groove, and it can be seen that the initial distance between the suction member 71 and the hard tube 77 occupies the length of the bar groove. Through corresponding the setting from top to bottom with second valve T2 and elasticity cavity 73, compare in linear setting, can save the occupation to bar groove length, be favorable to improving the effective utilization in bar groove, and then do benefit to the product miniaturization.

In one embodiment, as shown in fig. 8, a guide rail 74 parallel to the predetermined telescopic direction L is provided on an outer wall of the first pipe 72, and a spring 75 is sleeved on an outer periphery of the guide rail 74. The outer wall of the elastic chamber 73 is fixedly connected to the outer wall of the first pipe 72 by a spring 75. The spring 75 and the guide rail 74 are provided to achieve the same technical effects as the spring 65 and the guide rail 64 provided to the suction member 60 shown in fig. 7, and will not be described in detail herein.

The invention also provides a manipulator which is specially used for transferring the glass substrate. The manipulator comprises a plurality of fork rods which are arranged at intervals, each fork rod comprises a supporting surface, the supporting surfaces of the fork rods are coplanar to form a bearing surface, and at least one adsorption piece is arranged on the supporting surface of each fork rod. When the glass substrate is placed on the bearing surface, the at least two adsorption pieces positioned on different fork rods adsorb the glass substrate and move towards opposite directions so as to flatten the glass substrate. The manipulator may adopt a specific structure provided by any of the above embodiments, and details of the specific structure of the manipulator are not described herein.

The foregoing description has been presented for purposes of illustration and description. Furthermore, the description is not intended to limit embodiments of the application to the form disclosed herein. While a number of example aspects and embodiments have been discussed above, those of skill in the art will recognize certain variations, modifications, alterations, additions and sub-combinations thereof.

Claims

1. A manipulator, characterized by comprising:

a plurality of fingers arranged at intervals, wherein each finger comprises a supporting surface, and the supporting surfaces of the fingers are coplanar; and

the plurality of adsorption pieces are arranged on the supporting surfaces of the plurality of fingers, and each adsorption piece is connected with the finger in a sliding mode;

the connecting line of the adsorption parts on at least two different fingers penetrates through the interval area between the two fingers, and the sliding tracks of the adsorption parts are collinear and the sliding directions are opposite.

2. The manipulator according to claim 1, wherein the plurality of fingers includes a first finger and a second finger; the first finger comprises at least one first adsorption piece, the second finger comprises at least one second adsorption piece, and the at least one first adsorption piece and the at least one second adsorption piece are in one-to-one correspondence; the sliding tracks of the first suction piece and the second suction piece which correspond to each other are collinear and have opposite sliding directions.

3. The robot hand according to claim 2, wherein the first finger includes a plurality of the suction members, and sliding directions of the plurality of suction members on the first finger are parallel to each other.

4. The manipulator according to claim 2 or 3, wherein the plurality of fingers further includes a third finger and a fourth finger; the third finger is positioned on the side of the first finger far away from the second finger, and the fourth finger is positioned on the side of the second finger far away from the first finger;

the third finger comprises at least one third adsorption piece, the at least one third adsorption piece is in one-to-one correspondence with the at least one first adsorption piece, and the sliding tracks of the third adsorption piece and the first adsorption piece which are in mutual correspondence are collinear and have the same sliding direction; the fourth finger includes at least one fourth absorption piece, at least one fourth absorption piece with at least one second absorption piece one-to-one, the mutual correspondence the fourth absorption piece with the sliding track collineation and the slip direction of second absorption piece are the same.

5. The robot hand according to claim 4, wherein a sliding distance of the suction member on the third finger is longer than a sliding distance of the suction member on the first finger, and a sliding distance of the suction member on the fourth finger is longer than a sliding distance of the suction member on the second finger, for two suction members having the same sliding direction.

6. The manipulator according to any one of claims 1 to 3, wherein a groove is provided on the finger; the adsorption piece comprises a vacuum chuck in sliding fit with the groove and a telescopic part connected with the vacuum chuck.

7. The robot hand of claim 6, wherein the vacuum chuck is connected to a first valve through a first pipe; the first pipeline is communicated with the elastic cavity through a second valve, the elastic cavity is provided with a preset telescopic direction, and the preset telescopic direction is perpendicular to the first pipeline.

8. The manipulator according to claim 7, wherein the groove is a strip-shaped groove; a hose and a hard tube are sequentially arranged between the second valve and the elastic cavity; the outer wall of the hard tube is fixed with one end of the strip-shaped groove; the outer wall of the elastic cavity is connected with the outer wall of the first pipeline.

9. The manipulator according to claim 8, wherein a guide rail parallel to the predetermined telescopic direction is arranged on the outer wall of the first pipeline, and a spring is sleeved on the periphery of the guide rail; the outer wall of the elastic cavity is fixedly connected with the outer wall of the first pipeline through the spring.

10. A manipulator for transporting glass substrates, comprising: a plurality of spaced apart prongs, each of said prongs including a support surface, said support surfaces of said plurality of prongs being coplanar to form a bearing surface; at least one adsorption piece is arranged on the supporting surface of each fork rod;

when the glass substrate is placed on the bearing surface, at least two adsorption pieces on different fork rods adsorb the glass substrate and move in opposite directions so as to flatten the glass substrate.