JP2016049620A - Method and device of sucking workpiece - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a workpiece sucking device which can suck without bending a sheet-like base material without a significant design change.SOLUTION: A workpiece sucking device includes: a base 5 having a mounting surface 2 for mounting a workpiece W; a sucking unit 10 which is arranged on both sides of the workpiece W and sucks and holds both sides in a length direction of the workpiece W by a negative pressure at a sucking surface 2 formed on a lower surface; a separating unit 30 which separates the workpiece W sucked by the sucking unit 10 from the mounting surface 2; and a bending eliminating unit 40 which eliminates bending from between both sides by applying tensile force between both sides of the workpiece in separating or after separating the workpiece from the mounting surface 2 by the separating unit 30.SELECTED DRAWING: Figure 8b

Description

  The present invention relates to a method and apparatus for adsorbing and holding a workpiece such as a sheet-like substrate.

  2. Description of the Related Art Conventionally, there is known a work suction device for sucking a sheet-like base material or the like in various fields (for example, see Patent Document 1).

  In the work suction device shown in Patent Document 1, a cylinder is connected to a suction pad, the inside of the cylinder is evacuated, and the work is sucked to the suction pad by a suction force by vacuum.

JP 2001-00882 A

  By the way, when using such a workpiece suction device, in particular, when sucking and transporting a large sheet and a large area as a workpiece, for example, a thin sheet-like substrate having a thickness of about 20 μm, the suction pad 70 is an elastic body. As shown in FIGS. 9A and 9B, because of the weight of the base material W1, the suction portion by the suction pad 70 is pulled inward and the inside of the suction portion is bent as a result. The whole base material W1 will bend. When the base material is transported in this state, the base material may be bent by the wind during transport, and the base material may be dented or bent.

  Accordingly, the present invention has been made with the above problem as an example of an object, and it is an object of the present invention to provide a workpiece suction device and the like that can suck a sheet-like base material without bending it without making a significant design change. .

  In order to solve the above problems, the present invention employs the following configuration.

  In other words, the workpiece suction device (K) according to claim 1 is formed on the lower surface, disposed on both sides of the base (5) having a mounting surface (2) on which the workpiece (W) is mounted. A suction unit (10) for sucking and holding both sides of the work (W) by negative pressure on the sucked surface (12), and a work surface (W) sucked by the suction unit (10) as described above (2) The tension between the both sides of the workpiece (W) when the workpiece (W) is separated from the placement surface (2) by the separation unit (30) and the separation unit (30), or after the workpiece (W) is separated from the placement surface (2). And a deflection removing unit (40) for removing deflection from between both sides.

  Further, in the work suction device according to claim 2, the generation of the negative pressure by the suction unit (10) is performed by the manual pump (63), and the magnitude of the negative pressure is visualized by the gauge (65). It is characterized by that.

  Further, the workpiece suction device according to claim 3 is the workpiece suction device according to claim 1 or 2, wherein the deflection removing unit (40) is configured to support the workpiece (W) attracted by the suction unit (10). A pressing means (45) for applying a tension between the both sides of the work (W) by pressing a portion inside each of the both sides downward is provided.

  The workpiece suction device according to claim 4 is the workpiece suction device according to claim 3, wherein a cushion member (43a) is provided at a position where the pressing means (45) contacts the workpiece (W). It is characterized by.

  Moreover, the workpiece | work adsorption | suction apparatus which concerns on Claim 5 is a workpiece | work adsorption | suction apparatus of Claim 1 or Claim 2, The said deflection | deviation removal unit (40) is the said both sides of the workpiece | work (W) in an adsorption | suction unit (10). A moving means (62) for applying a tension between the both sides of the workpiece (W) by moving each sucked portion toward the outside of the workpiece (W) is provided.

  In the work suction method according to claim 6, the work (W) is placed on the placement surface (2) of the base (5), and the suction surfaces (10) of the suction unit (10) ( 12) are brought into contact with each other, the workpiece (W) is sucked and held on the suction surface (12) by a negative pressure, and the workpiece (W) is lifted while being lifted or lifted from the placement surface (2). ) To remove the deflection from both sides.

  The workpiece suction method according to claim 7 is the workpiece suction method according to claim 6, wherein the generation of the negative pressure is performed by a manual pump (63), and the magnitude of the negative pressure is confirmed by a gauge (65). However, the manual pump (63) is operated.

  According to the present invention, it is possible to easily and reliably prevent the deflection of the workpiece W after suction with simple equipment.

It is a schematic diagram which shows the example of an external appearance of a workpiece | work adsorption | suction apparatus. It is a front view of the workpiece | work adsorption | suction apparatus which concerns on Embodiment 1. FIG. 1 is a plan view of a workpiece suction device according to Embodiment 1. FIG. FIG. 6 is an explanatory diagram illustrating a suction operation of the workpiece suction device according to the first embodiment. It is a front view of the workpiece | work adsorption | suction apparatus which concerns on Embodiment 2. FIG. FIG. 6 is a plan view of a workpiece suction device according to a second embodiment. FIG. 10 is an explanatory diagram illustrating a suction operation of the workpiece suction device according to the second embodiment. It is a front view of the workpiece | work adsorption | suction apparatus which concerns on Embodiment 3. FIG. 6 is a plan view of a workpiece suction device according to a third embodiment. It is a front view of the workpiece | work adsorption | suction apparatus which concerns on Embodiment 4. FIG. 10 is a plan view of a workpiece suction device according to a fourth embodiment. FIG. 10 is an explanatory diagram illustrating a suction operation of a workpiece suction device according to a fourth embodiment. It is explanatory drawing which shows the workpiece | work lifting operation | movement of the workpiece | work adsorption | suction apparatus which concerns on Embodiment 4. It is explanatory drawing which shows the state at the time of the workpiece | work conveyance of the workpiece | work adsorption | suction apparatus which concerns on Embodiment 4. FIG. 9A is a schematic diagram showing the configuration of the workpiece suction device, and FIG. 9B is an enlarged view of the portion A in FIG. 9A.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  In the following description of the workpiece suction device K, for the sake of convenience, the left and right directions shown in FIG. 1 will be described as the length (front and back) direction of the workpiece W, and the front and depth directions will be described as the width (left and right) direction of the workpiece W. .

  The workpiece suction device K of the present invention is applied to a workpiece suction device that sucks a workpiece W and a transfer device that includes the workpiece suction device. Further, the workpiece W is, for example, a sheet-like base material, and a thin sheet-like base material that is formed in a strip shape that is long in the front-rear direction is assumed, but the size and the like are particularly limited. It is not a thing. Moreover, as a base material used for this embodiment, although the metal thin film of thickness 0.5mm or less is used as an example, the material etc. are not specifically limited.

<Embodiment 1>
As shown in FIG. 1, the workpiece suction device K includes a base 5 having a placement surface 2 on which a workpiece W is placed, a suction unit 10 that sucks the workpiece W, and the suction unit 10 as a workpiece W. Is placed close to the placement surface 2 on which the workpiece W is placed, and after the suction unit 10 sucks the workpiece W, the separation unit 30 that separates the workpiece W from the placement surface 2 together with the suction unit 10 and the workpiece W is the suction unit. And a deflection removing unit 40 that removes the deflection generated in the workpiece W when it is attracted by 10 and lifted above the placement surface 2 by the separation unit 30.

  The base 5 includes a flat base 3 having a mounting surface 2 and a base 4 that supports the base 3, and the base 3 is held at a predetermined height by the base 4. Further, for example, casters 4a are attached to the four corners of the lower end portion of the gantry 4 as needed, and the work suction device K can freely move the floor surface by the casters 4a.

  The suction unit 10 sucks and holds the workpiece W by a negative pressure on a suction surface 12 of a suction head 13 to be described later. As shown in FIG. 2, the suction unit 10 is disposed on both sides of the work W, and has a suction head 13 having a suction surface 12 that sucks the work W, and a holding unit that holds the suction head 13 above the work W. 20 is provided.

  The suction head 13 includes a hollow support body 14 extending downward, and a head body 15 attached to the distal end portion of the support body 14, and the head body 15 has a diameter dimension from the base end portion toward the distal end portion. The diameter is increased so as to increase, and is formed in a substantially bowl shape. An opening 13 a communicating with the atmosphere is formed on the lower surface of the head body 15, and this opening 13 a functions as the suction surface 12 that sucks the workpiece W.

  The opening 13a of the suction head 13 is brought into contact with the surface of the work W, and the work W is sucked by bringing the space formed in the entire inner peripheral side of the head body 15 into a negative pressure state.

  A nozzle 16 that functions as a communication passage communicating with the inside of the head main body 15 is attached to the support body 14, and this nozzle 16 is connected to a mechanical or electrical opening / closing valve 17, and an opening 13 a of the suction head 13 is connected to a work piece. After being closed with W, the on-off valve 17 is closed to form a sealed space inside the head body 15.

  The work W is attracted to the suction head 13 when the opening / closing valve 17 is closed with the opening 13a of the suction head 13 in contact with the surface of the work W and the open / close valve 17 is closed. . On the other hand, when the opening / closing valve 17 is opened, the air in the head main body 15 is released to the atmosphere, the space in the head main body 15 is returned to atmospheric pressure, and the workpiece W is separated (released) from the suction head 13.

  The head main body 15 is formed of, for example, a rubber elastic member, and is elastically deformed, so that the head main body 15 is easily brought into close contact with the workpiece W. The material of the head main body 15 can be appropriately changed depending on the nature of the workpiece W to be attracted, and may be formed of, for example, a metal or resin member that does not elastically deform. As this material, silicon rubber, Teflon (registered trademark) resin, nitrile rubber, polyurethane rubber, fluorine rubber, or the like is preferably used.

  As shown in FIGS. 2 a and 2 b, the holding unit 20 is detachably attached to the base 5, an arm 22 provided above the work W so as to cross the workpiece W, and a suction head 13 attached to the arm 22. And a bracket 25 for holding the workpiece W above the workpiece W.

  The arm 22 is constituted by, for example, a hollow rectangular pipe and is formed longer than the length of the workpiece W in the length direction. An opening / closing valve 17 is attached to the arm 22 at a position that is easy for an operator to operate, and the opening / closing valve 17 is operated by the operator.

  The bracket 25 includes a plate-like base 27 formed in a substantially rectangular shape in which a plurality of suction heads 13 are provided in the width direction of the workpiece W, and a connecting body 28 that is erected on the base 27 and connected to the arm 22. Prepare.

  A rectangular hole 28 a is formed at the upper end of the coupling body 28, and the arm 22 is inserted into the hole 28 a, and the coupling body 28 is provided to be slidable in the length direction of the arm 22. . Further, the connecting body 28 is fixed at a predetermined position of the arm 22 by a fixing device 29 such as a screw.

  Accordingly, the bracket 25 can freely move in the length direction of the workpiece W, and the position of the suction head 13 can be adjusted according to the shape of the workpiece W.

  The separation unit 30 is configured as a stretchable body 31 that hangs down from both ends of the arm 22. For this stretchable body 31, for example, an elastic body such as a spring is used. A foot member 30a is fixed to the lower end of the stretchable body 31 so as to come into contact with and away from the mounting surface 2 of the base 5 and hold an upper part from the stretchable body 31 in an integrated and stable stationary state.

  When a downward force is applied to the arm 22 by the operator, the telescopic body 31 is contracted, so that the arm 22 is lowered, the head body 15 of the suction unit 10 is brought close to the workpiece W, and the suction surface 12 is moved to the workpiece. By being able to contact W and removing the force on the arm 22, the arm 22 is lifted and returned to the original position by the restoring force of the telescopic body 31, and the head main body 15 of the suction head 13 is placed on the mounting surface 2. It is possible to leave.

  The stretchable body 31 is not limited to a mechanical mechanism such as a spring, and an electrical mechanism such as a pneumatic or hydraulic cylinder device may be used.

  The deflection removing unit 40 includes a tension mechanism 41 that generates tension between both sides of the workpiece W by pulling both sides in the length direction of the workpiece W attracted by the suction surface 12 to the outside of the workpiece W. The tension mechanism 41 is provided close to the inside of the work W with respect to the suction heads 13 arranged on both sides of the work W. After the work W is sucked and lifted by the suction head 13, both sides of the work W are provided. By pressing the inside of the portion sucked by the suction heads 13 and 13 downward, the both sides of the workpiece W are pulled outward to apply tension between both sides of the workpiece W, thereby lifting the sucked workpiece W The deflection of the workpiece W that occurs when it is applied is removed.

  The tension mechanism 41 includes a contact body 43 that contacts the surface of the workpiece W, a pressing member 45 that presses the contact body 43 against the workpiece W after suction, and the contact body 43 via the pressing member 45. Holding body 47 to hold.

  The contact body 43 is, for example, a flat plate member having a predetermined ground contact area. The contact body 43 is made of metal, resin, or the like, and the pressing member 45 is made of an elastic body such as a stretchable spring. The holding body 47 is attached to the bracket 25 so as to be disposed inside the head main body 15 of the suction head 13.

  Further, the length of the spring and the holding body is adjusted so that the contact body 43 is disposed below the tip of the head main body 15 of the suction head 13 in order to press against the workpiece W after suction.

  When the suction head 13 sucks the workpiece W, as shown in FIG. 3B, the pressing member 45 is contracted by the pressing force from the placement surface 2, and the workpiece W is moved by the suction head 13. When attracted and lifted, as shown in FIG. 3C, the contact body 43 is pressed against the workpiece W by the elastic force of the pressing member 45, and the workpiece W is pressed downward. Thereby, the workpiece | work W is pulled outside and generation | occurrence | production of a bending is prevented.

  Further, as shown in FIGS. 1 and 2A and 2B, for example, the suction heads 13 are provided side by side in the left-right direction of the base 27 of the bracket 25 as a set of three. Both sides including the corners are configured to be sucked by the suction head 13. Note that the number of suction heads 13 to be mounted is appropriately set depending on the size and the like.

  In addition, for example, the two pulling mechanism portions 41 are provided inside the suction head 13 and on both the left and right sides of the base 27 of the bracket 25 as a set, and the vicinity of the four corners of the work W is the pulling mechanism portion 41. The contact body 43 is configured to be pressed. It should be noted that the number and the like of the tension mechanism 41 are appropriately set depending on the size and the like.

  Further, the workpiece suction device K includes a detection device that detects the position of the workpiece W placed on the placement surface 2. As shown in FIGS. 1 and 2 (a) and 2 (b), the workpiece suction device K includes a pair of first sensors 51 and 51 that respectively detect the positions of the side edges of the workpiece W in the longitudinal direction. The second sensor 52 for detecting the position of one end in the width direction of the workpiece W is electrically connected to the first and second sensors 51 and 52 via cables, and each sensor 51 , 52 and the position information of the workpiece W defined in advance are compared to determine whether the position of the workpiece W is correct or not, and a notification device 55 that notifies the operator of the result is provided. The first and second sensors 51 and 52 and the notification device 55 are positioned and attached to the arm 22, and the operator receives the notification from the notification device 55 to determine whether the position of the workpiece W is correct or not. .

  Next, a series of suction operations of the workpiece W will be described with reference to FIGS. 2 (a) and 2 (b) and FIGS. 3 (a), 3 (b) and 3 (c).

  The workpiece suction device K of the present embodiment is operated by an operator's manual operation.

  It should be noted that the following series of operations may be automatically performed using a driving means such as a motor.

  First, in the state shown in FIGS. 2A, 2 </ b> B, and 3 </ b> A, a force is applied to the arm 22 by an operator, so that the arm 22 is made of the stretchable body 31 (elastic body) of the separation unit 30. As shown in FIG. 3 (b), the valve body is further moved against the elastic force, and the head body 15 of the suction head 13 is further pressed against the surface of the work W, and then the opening / closing valve 17 is closed.

  As a result, the head main body 15 is pressed against the workpiece W and deformed, and the open / close valve 17 is closed in a state where the air inside the head main body 15 is removed. Therefore, a negative pressure is applied to the internal space by the restoring force of the head main body 15. The resulting workpiece W is adsorbed.

  At this time, the pressing member 45 (elastic body) of the deflection removing unit 40 is held in a contracted state by receiving a pressing force from the mounting surface 2 as indicated by an arrow in FIG. Is done.

  Next, when the force applied to the arm 22 is removed by the operator, the arm 22 is lifted by the restoring force of the elastic body 31 (elastic body), and the workpiece W is separated from the placement surface 2.

  As shown in FIG. 3C, with the separation of the workpiece W from the mounting surface 2, the pressing member 45 (elastic body) of the deflection removing unit 40 extends due to its restoring force, and the workpiece W is moved downward. Press. As a result, since the workpiece W attracted on both sides in the length direction by the head body 15 of the suction head 13 is pulled outward, the workpiece W is lifted without causing the workpiece W to bend.

  Next, the arm 22 is lifted upward by the operator. Thereby, the foot member 30a is separated from the mounting surface 2 of the base 5, and the part from the arm 22 to the foot member 30a is integrally transported to a place away from the base 5. For example, it is transported to another base (not shown) for the next process. During this conveyance, as shown in FIG. 3C, the workpiece W is held in the state where it is attracted to the suction head 13 and is stretched without being bent due to tension. The

  When the portion from the arm 22 to the foot member 30a is integrated and transported onto the other base, and the foot member 30a is applied to the mounting surface of the base, as shown in FIG. Similarly, a portion from the arm 22 to the foot member 30a is left on the placement surface. At this time, the workpiece W is in an extended state in which the tension is applied by the deflection removing unit and the deflection is eliminated, as shown in FIG.

  Therefore, when the operator applies a pressing force to the arm 22, the arm 22 descends against the elastic force of the stretchable body 31 (elastic body) of the separation unit 30, as shown in FIG. The workpiece W together with the suction head 13 is pressed against the mounting surface of another base.

  Subsequently, the opening / closing valve 17 is opened, and the work W is released from the suction head 13 by introducing the atmosphere into the head main body 15.

  And if the press with respect to the arm 22 by an operator is cancelled | released, the arm 22 will raise by the restoring force of the expansion-contraction body 31 (elastic body). Thereby, the workpiece | work W remains on the mounting surface of another base.

  The suction head 13 that has released the workpiece W is returned to, for example, the original base 5 together with the arm 22 and the like, and used for suction processing of another workpiece W.

  In addition, after the arm 22 is lifted upward by the operator, the base 5 may be replaced with another base for the next step. Also in this case, the workpiece W can be set on another base in an extended state by the same operation as the above-described operation.

  As described above, the workpiece suction device K according to the present embodiment has a pressing function as a pressing unit that presses the inside of the contact portion of the workpiece W in contact with the suction head 13 downward after the suction head 13 attracts the workpiece W. The member 45 and the contact body 43 are provided, and the work W is pressed downward by the contact body 43, whereby both sides of the work W after the suction are pulled outward, and the work W after the suction is bent with simple equipment. Can be prevented easily and reliably.

<Embodiment 2>
Based on FIG. 4 (a) (b), the workpiece | work adsorption | suction apparatus K1 provided with the deflection | deviation removal unit of another form is demonstrated.

  The workpiece suction device K shown in FIGS. 1 to 3 presses the contact body 43 disposed inside the suction head 13 against the workpiece W while the workpiece W is sucked and lifted by the suction head 13. 4 (a) and 4 (b), the workpiece suction device K1 shown in FIGS. 4 (a) and 4 (b) is configured so that the suction head 13 is moved to the workpiece W in a state where the workpiece W is sucked and lifted by the suction head 13. It is moved to the outside and a tensile force is applied between both sides of the workpiece W.

  As shown in FIGS. 4A and 4B, the workpiece suction device K1 includes a base 5 having a placement surface 2 on which the workpiece W is placed, a suction unit 10 that sucks the workpiece W, and this suction. A separation unit 30 that moves to bring the unit 10 close to or away from the workpiece W, and a deflection removal unit 40 that removes the deflection of the workpiece W that is generated when the unit 10 is attracted and lifted by the suction unit 10 are provided. .

  The base 5, the suction unit 10, and the separation unit 30 are the same as the workpiece suction device K shown in FIGS. 1 to 3, and thus detailed description thereof will be omitted, and only the deflection removing unit 40 will be described. .

  The deflection removing unit 40 includes a tension mechanism unit 60 that pulls the suction head 13 to the outside of the workpiece W. The pulling mechanism 60 is, for example, stretchable bodies 62 and 62 provided between the bracket 25 that holds the suction head and both end portions of the arm 22, respectively. For example, an elastic member 62 a such as a spring is applied to the stretchable body 62.

  As shown in FIG. 5A, the bracket 25 is freely movable in the length direction of the arm 22 within the range of the elastic limit of the elastic member 62a. For example, the bracket 25 moves to the inside of the arm 22. In this case, a force is applied to the bracket 25 so that the bracket 25 can be moved against the elastic force of the elastic member 62a. On the other hand, by removing the force, as shown in FIG. 5B, the original position is restored by the restoring force of the elastic member 62a.

  Next, a series of workpiece suction operations according to the present embodiment will be described with reference to FIGS. 4 (a), 4 (b), 5 (a), and 5 (b).

  The workpiece suction device K1 of the present embodiment is operated by an operator's manual operation.

  It should be noted that the following series of operations may be automatically performed using a driving means such as a motor.

  First, a force is applied to the bracket 25 by an operator, and the bracket 25 is moved to the inside of the arm 22 so that the suction head 13 is disposed above a predetermined position on both sides of the workpiece W as shown in FIG. The bracket 25 is fixed to the arm 22 by the fixing device 29.

  Next, a force is applied to the arm 22 by the operator, and the arm 22 shown in FIG. 4 is lowered against the elastic force of the expansion / contraction body 31 (elastic body), and the suction head 13 is placed on the surface of the workpiece W. After pressing, the opening / closing valve 17 is operated to be closed.

  As a result, the head main body 15 is pressed against the workpiece W and deformed, and the open / close valve 17 is closed in a state where the air inside the head main body 15 is removed. Therefore, a negative pressure is applied to the internal space by the restoring force of the head main body 15. The resulting workpiece W is adsorbed.

  Next, when the force applied to the arm is removed by the operator and the fixation by the fixing device 29 is removed, the bracket 25 is returned to the original position by the restoring force of the elastic member 62a as shown in FIG. Move back. As a result, since both sides of the workpiece W are pulled outward, the workpiece W is lifted without causing the workpiece W to bend.

  Thereafter, operations and processes similar to those in the first embodiment are performed.

  As described above, the workpiece suction device K1 according to the present embodiment includes the extendable body 62 (elastic member 62a) as a moving unit that moves the bracket 25 outward after the suction head 13 attracts the workpiece W. The suction head 13 is moved outwardly of the workpiece W to pull both sides of the workpiece W after the suction outward, and it is possible to easily and reliably prevent the deflection of the workpiece W after the suction with simple equipment. be able to.

<Embodiment 3>
As shown in FIGS. 6A and 6B, in the third embodiment, the foot member 30a is formed longer in the width direction of the workpiece W than in the first and second embodiments. Thereby, the stability of the attitude | position on the base 5 of a workpiece | work adsorption | suction apparatus increases.

  Further, the contact body 43 that is brought into contact with the surface of the workpiece W in the tension mechanism 41 of the pressing means is formed longer in the width direction of the workpiece W than in the first and second embodiments. As a result, the workpiece W is pressed downward with a more uniform force, and the deflection from the workpiece W is more suitably removed.

  Further, a cushion member 43a made of soft silicone rubber or the like is attached to the back surface of the contact body 43, which is a portion that comes into contact with the workpiece W in the pressing means. As a result, a tensile force is applied to the workpiece W without difficulty, and the deflection is smoothly removed from the workpiece W.

  In the third embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals, and redundant description is omitted.

<Embodiment 4>
As shown in FIGS. 7A and 7B, in the fourth embodiment, when the work W is sucked and held on the suction surface 12 of the suction head 13 by negative pressure, means for generating this negative pressure is provided. As a manual pump 63 is provided.

  The manual pump 63 includes a cylinder 63a, a piston 63b that can reciprocate within the cylinder 63a, and a piston rod 63c that can operate the piston 63b from outside the cylinder 63a. The manual pump 63 is fixed to the arm 22, for example.

  The piston rod 63c is operated by an operator, and the piston 63b is moved in the suction direction in the cylinder 63a, whereby a negative pressure is generated in the cylinder 63a.

  The cylinder 63 a of the manual pump 63 and the suction head 13 are connected by a conduit 64. A gauge 65 that displays the magnitude of the negative pressure generated in the cylinder 63a and the open / close valve 17 are connected to the conduit 64.

  Although the opening / closing valve 17 is always closed, the inside of the conduit can be opened to the atmosphere by an operator opening the valve. The open / close valve 17 is provided for each suction head 13, but may be provided only at one location.

  When the piston rod 63c of the manual pump 63 is operated by the operator when the suction surface 12 of the suction head 13 is brought into contact with the workpiece W, the space between the inside of the conduit 64 and the suction head 13 is lower than the atmospheric pressure. Negative pressure. As a result, the workpiece W is sucked by the suction head 13. The magnitude of the negative pressure is visualized by a gauge 65, and it is confirmed whether or not the work W is properly held by the suction head 13 by an operator operating the manual pump 63. When it is confirmed by the numerical value indicated by the gauge 65 that the workpiece W is held by the suction head 13, the operation of the manual pump 63 is stopped. The negative pressure in the suction head 13 is held until the opening / closing valve 17 is opened, and the workpiece W is sucked by the suction head 13.

  Next, a series of suction operations of the workpiece W will be described with reference to FIGS. 8A, 8B, and 8C.

  The workpiece suction device K of the present embodiment is operated by an operator's manual operation.

  First, in the state shown in FIGS. 7A and 7B, a force is applied to the arm 22 by the operator, so that the arm 22 becomes elastic to the elastic body 31 (elastic body) of the separation unit 30. The head body 15 of the suction head 13 is further pressed against the surface of the workpiece W as shown in FIG.

  Therefore, the manual pump 63 is suctioned by the operator, and whether or not the workpiece W is properly sucked by the suction head 13 is determined by observing the gauge 65.

  When the operator determines that the magnitude of the negative pressure has reached an appropriate value by observing the gauge 65, the suction operation of the manual pump 63 is stopped. In a state where the suction operation is stopped, the head main body 15 is pressed against the workpiece W to be deformed, and holds the workpiece W by suction.

  At this time, as shown in FIG. 8A, the pressing member 45 (elastic body) of the deflection removing unit 40 receives the pressing force from the mounting surface 2 and is in a contracted state.

  Next, when the force applied to the arm 22 is removed by the operator, as shown in FIG. 8B, the arm 22 is lifted by the restoring force of the elastic body 31 (elastic body), and the workpiece W is placed on the placement surface 2. Get away from.

  Further, as shown in FIG. 8B, with the separation of the workpiece W from the mounting surface 2, the pressing member 45 (elastic body) of the deflection removing unit 40 extends by its restoring force, and the workpiece W is Press down. As a result, since both sides of the workpiece W attracted on both sides in the length direction by the head body 15 of the suction head 13 are pulled outward, the workpiece W is lifted without causing the workpiece W to bend.

  Next, as shown in FIG. 8C, the arm 22 is lifted upward by the operator. Thereby, the foot member 30a is separated from the mounting surface 2 of the base 5, and the part from the arm 22 to the foot member 30a is integrally transported to a place away from the base 5. For example, it is transported to another base (not shown) for the next process. During this conveyance, as shown in FIG. 8C, the workpiece W is kept in the state of being attracted to the suction head 13, and is held in the state of being stretched without being deflected by being applied with tension. .

  When the portion from the arm 22 to the foot member 30a is integrated and transported onto another base (not shown), the foot member 30a is applied to the mounting surface of the base, as shown in FIG. In the same manner as described above, the portion from the arm 22 to the foot member 30a is left on the placement surface. At this time, as shown in FIG. 8C, the workpiece W is in an extended state in which the tension is applied by the deflection removing unit 40 and the deflection is eliminated.

  Therefore, when the operator applies a pressing force to the arm 22, the arm 22 descends against the elastic force of the elastic body 31 (elastic body) of the separation unit 30, and as shown in FIG. The workpiece W together with the suction head 13 is pressed against the mounting surface of another base.

  Subsequently, the opening / closing valve 17 is opened, and the work W is released from the suction head 13 by introducing the atmosphere into the head main body 15.

  And if the press with respect to the arm 22 by an operator is cancelled | released, the arm 22 will raise by the restoring force of the expansion-contraction body 31 (elastic body). Thereby, the workpiece | work W remains on the mounting surface of said other base similarly to having shown to Fig.7 (a).

  The suction head 13 that has released the workpiece W is returned to, for example, the original base 5 together with the arm 22 and the like, and used for suction processing of another workpiece W.

  In addition, after the arm 22 is lifted upward by the operator as shown in FIG. 8C, the base 5 may be replaced with another base for the next step. . Also in this case, the workpiece W can be set on another base in an extended state by the same operation as the above-described operation.

  In the fourth embodiment, the same parts as those in the first to third embodiments are denoted by the same reference numerals, and redundant description is omitted.

  In addition, this invention is not limited to the said embodiment, A various change is possible within the range of the summary of this invention.

K, K1 ... Work suction device W ... Work 2 ... Placement surface 5 ... Base 10 ... Suction unit 30 ... Separation unit 40 ... Deflection removal unit 43a ... Cushion member 63 ... Manual pump 65 ... Gauge

Claims (7)

  A base having a mounting surface on which a work is placed, a suction unit that is disposed on both sides of the work, and that sucks and holds both sides of the work with negative pressure on a suction surface formed on the lower surface, and is sucked by the suction unit A separation unit that separates the workpiece from the placement surface, and when the workpiece is separated from the placement surface by the separation unit, or after the separation, the tension is applied between the both sides of the workpiece. A workpiece suction device comprising: a deflection removing unit that removes deflection from between.   2. The workpiece suction device according to claim 1, wherein generation of the negative pressure by the suction unit is performed by a manual pump, and the magnitude of the negative pressure is visualized by a gauge.   The deflection removing unit includes a pressing unit that applies tension between the both sides of the workpiece by pressing downward a position inside each of the both sides of the workpiece adsorbed by the adsorption unit. Claim | item 1 or the workpiece adsorption | suction apparatus of Claim 2.   The work adsorbing device according to claim 3, wherein a cushion member is provided at a location where the pressing means contacts the work.   The deflection removing unit includes a moving unit that applies tension between the both sides of the workpiece by moving the portions of the suction unit that adsorb both sides of the workpiece to the outside of the workpiece, respectively. Claim | item 1 or the workpiece adsorption | suction apparatus of Claim 2.   Place the workpiece on the mounting surface of the base, bring the suction surface of the suction unit into contact with both sides of the workpiece, hold the workpiece by suction with this suction surface, lift the workpiece from the mounting surface, or A workpiece adsorption method, comprising: removing the deflection from both sides of the workpiece by applying a tension between the two sides after lifting.   The work suction method according to claim 6, wherein the negative pressure is generated by a manual pump, and the manual pump is operated while checking a magnitude of the negative pressure with a gauge.

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