TW200628781A - Panel holder of panel testing apparatus and panel testing apparatus - Google Patents

Panel holder of panel testing apparatus and panel testing apparatus

Info

Publication number
TW200628781A
TW200628781A TW094132824A TW94132824A TW200628781A TW 200628781 A TW200628781 A TW 200628781A TW 094132824 A TW094132824 A TW 094132824A TW 94132824 A TW94132824 A TW 94132824A TW 200628781 A TW200628781 A TW 200628781A
Authority
TW
Taiwan
Prior art keywords
panel
testing apparatus
holder
suspension arms
attached
Prior art date
Application number
TW094132824A
Other languages
Chinese (zh)
Other versions
TWI393875B (en
Inventor
Hiroyuki Okahira
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of TW200628781A publication Critical patent/TW200628781A/en
Application granted granted Critical
Publication of TWI393875B publication Critical patent/TWI393875B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Manipulator (AREA)

Abstract

A panel testing apparatus of the present invention includes a panel holder 6 which holds a panel W. The panel holder 6 includes multiple suspension arms 10 which are parallel to each other, extending from a base portion 7 of an articulated robot 8 with a certain interval, and in a pectinated form as a group. An upper side lOa of each of the suspension arms 10 provides suction portions 12 which suction and hold the panel W. Moreover, a holder frame 15 is attached to each of a root portion II a and a head portion 11b of the suspension arms IO, a beam 17 is attached to the outermost suspension arms 10, and the edge of the panel W can be held by the holder frame 15 and the beam 17.
TW094132824A 2004-09-27 2005-09-22 Panel holder of panel testing apparatus and panel testing apparatus TWI393875B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004279989 2004-09-27

Publications (2)

Publication Number Publication Date
TW200628781A true TW200628781A (en) 2006-08-16
TWI393875B TWI393875B (en) 2013-04-21

Family

ID=36118878

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094132824A TWI393875B (en) 2004-09-27 2005-09-22 Panel holder of panel testing apparatus and panel testing apparatus

Country Status (5)

Country Link
JP (1) JP4377918B2 (en)
KR (1) KR101244266B1 (en)
CN (1) CN101027547B (en)
TW (1) TWI393875B (en)
WO (1) WO2006035733A1 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5445038B2 (en) * 2009-09-14 2014-03-19 株式会社リコー CAMERA BODY, IMAGE PICKUP UNIT AND IMAGE PICKUP DEVICE detachably attached to the camera body
KR101870293B1 (en) * 2011-11-09 2018-06-22 엘지디스플레이 주식회사 Rubbing system and substrate transporting robot therefor
CN102495492A (en) * 2011-12-02 2012-06-13 深圳市华星光电技术有限公司 Chip picking and placing method in universal virtual machine (UVM) manufacture process and chip picking combination device used for implementing same
CN102642714B (en) * 2012-04-27 2015-02-18 深圳市华星光电技术有限公司 Base plate removing device
CN102928429B (en) * 2012-11-08 2015-04-22 中国建材检验认证集团秦皇岛有限公司 Device for observing weathering of glass and test method for observing weathering of glass by using device
CN103523485B (en) * 2013-10-18 2016-01-20 台龙电子（昆山）有限公司 Visual inspection conveyor line
CN103680369A (en) * 2013-12-03 2014-03-26 京东方科技集团股份有限公司 Testing device and testing method of displayer module
CN104909046A (en) * 2015-05-08 2015-09-16 合肥鑫晟光电科技有限公司 Substrate carrying device and system
JP7476117B2 (en) * 2018-06-25 2024-04-30 アプライド マテリアルズ インコーポレイテッド Carrier for substrates and method for transporting substrates - Patents.com
CN111547504B (en) * 2020-05-15 2021-09-03 苏州精濑光电有限公司 Product double-face full-detection equipment and detection method thereof
CN111537516B (en) * 2020-05-15 2023-08-11 苏州精濑光电有限公司 Product double-sided full-inspection equipment and detection method thereof
CN113960824A (en) * 2021-10-18 2022-01-21 江苏宏芯亿泰智能装备有限公司 Substrate upturning mechanism and substrate detection method
CN114590595A (en) * 2022-04-18 2022-06-07 京东方科技集团股份有限公司 Actuator, robot, and substrate transfer method

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3365781B2 (en) * 1991-10-15 2003-01-14 オリンパス光学工業株式会社 Board appearance inspection device
JP3881062B2 (en) * 1996-08-14 2007-02-14 大日本スクリーン製造株式会社 Substrate holding mechanism and substrate processing apparatus
JP3999863B2 (en) * 1997-12-22 2007-10-31 株式会社日本マイクロニクス Substrate inspection device
AU2186099A (en) * 1998-02-09 1999-08-23 Nikon Corporation Apparatus for supporting base plate, apparatus and method for transferring base plate, method of replacing base plate, and exposure apparatus and method of manufacturing the same
JPH11322069A (en) * 1998-05-12 1999-11-24 Canon Inc Board carrying finger assembly
JP4175697B2 (en) * 1998-06-18 2008-11-05 オリンパス株式会社 Glass substrate holder
JP4121662B2 (en) * 1999-03-24 2008-07-23 オリンパス株式会社 Board inspection equipment
JP4605332B2 (en) * 2001-03-07 2011-01-05 株式会社日立ハイテクノロジーズ Substrate overlay device
JP3523848B2 (en) * 2001-05-25 2004-04-26 オリンパス株式会社 Lighting equipment for visual inspection
JP3752501B2 (en) * 2001-07-02 2006-03-08 オリンパス株式会社 Substrate holding device
JP4079651B2 (en) * 2002-02-12 2008-04-23 オリンパス株式会社 Substrate support device
ATE421103T1 (en) * 2002-03-18 2009-01-15 Hilti Ag ELECTRO-OPTICAL PARA-AXIAL DISTANCE MEASUREMENT SYSTEM
JP2003282684A (en) * 2002-03-22 2003-10-03 Olympus Optical Co Ltd Glass board supporting jig
KR100596054B1 (en) * 2002-10-31 2006-07-03 삼성코닝정밀유리 주식회사 Glass substrate inspecting system
CN1181348C (en) * 2003-07-22 2004-12-22 北京航空航天大学 Full automatic cartridge unit for chip to be aligned and bonded

Also Published As

Publication number Publication date
TWI393875B (en) 2013-04-21
JP4377918B2 (en) 2009-12-02
KR20070103354A (en) 2007-10-23
CN101027547A (en) 2007-08-29
JPWO2006035733A1 (en) 2008-07-31
WO2006035733A1 (en) 2006-04-06
KR101244266B1 (en) 2013-03-18
CN101027547B (en) 2011-02-02

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees