JP4377918B2 - Board holder - Google Patents

Description

The present invention relates to a macro inspection apparatus that visually inspects a transparent substrate for manufacturing a flat panel display (FPD), and a substrate holder used in the macro inspection apparatus.
This application claims priority with respect to Japanese Patent Application No. 2004-279899 for which it applied on September 27, 2004, and uses the content here.

As a transparent substrate manufactured in each manufacturing process, for example, there is an inspection process for visually inspecting (macro inspection) the appearance of a master glass substrate (hereinafter simply referred to as a glass substrate). In this inspection process, a glass substrate is used. A macro inspection apparatus that inspects defects on a glass substrate by irradiating macro illumination light from above in a state where a held holder is raised at a predetermined angle is used.
In this type of macro inspection apparatus, the substrate holder includes a rectangular frame-shaped holder body having an opening that is slightly smaller than the rectangular glass substrate, and the peripheral edge of the back surface of the glass substrate is sucked and held on the upper surface of the holder body. It is configured. Here, when the substrate is large, holding only the peripheral portion of the substrate easily deforms the central portion of the substrate. Therefore, a plurality of elongated rod-like substrate support portions are installed in parallel in the opening, and each substrate support portion is Is known to suppress deformation and bending of the substrate by providing support pins and suction portions that contact the back surface of the glass substrate and supporting the glass substrate at a number of points (for example, Patent Document 1). , See Patent Document 2). In addition, since it is sufficient for the substrate supporting portion to have a supporting strength that prevents warping of the glass substrate, the substrate supporting portion is manufactured to be extremely thin and lightweight compared to the holder body.

However, in this type of substrate holder, since the weight of the substrate is mainly supported by the holder body and is rotated and swung by a predetermined angle, the holder body needs to be manufactured thick to increase its strength. In addition, as the size of the substrate increases, the substrate holder becomes very heavy. In recent years, a glass substrate having a large size exceeding 2000 mm has appeared, and when the glass substrate becomes large in this way, the substrate holder that supports the peripheral portion has to be increased in size and weight. In order to rotate such a large and heavy substrate holder to a predetermined angle for macro inspection, a large drive mechanism is required, which causes a problem that the entire inspection apparatus is increased in size.
Further, when the glass substrate is enlarged, the length of the substrate support portion becomes longer in proportion to the substrate size, and the support portion itself is easily vibrated in the vertical direction by the rotation or swinging motion of the substrate holder, and the support member A new problem arises that bending is likely to occur due to its own weight. If the rigidity of the substrate support portion is increased to prevent this, the weight of the substrate holder is further increased, which is not preferable.
Japanese Patent Laid-Open No. 9-189441 JP 2003-232742 A

  The present invention has been made in view of such circumstances, and an object of the present invention is to reduce the size and weight of the substrate holder, and to prevent the macro inspection apparatus from becoming larger. is there.

According to a first aspect of the present invention, a substrate placed on a finger of a transport robot and transported in a horizontal direction is set as an inspection target, and the substrate is held in a horizontal posture from the lower side by a drive unit . The substrate is raised from a position held in a horizontal posture, raised to an angle suitable for visual observation for an observer to inspect, and visually inspected by irradiating the substrate with macro illumination light. A substrate holder for use in a substrate inspection apparatus, wherein a plurality of base portions connected to the drive unit and a plurality of the base portions are arranged at intervals in the base portion, and a horizontal upper surface is formed with respect to the substrate. A plurality of support portions made of a plate material having a long height dimension from the upper surface to the lower side with respect to a width dimension along the direction in which the interval is provided, and a shape of a cross section along the direction in which the gap is provided; Top of section A plurality of rods is erected, and a suction portion which has the suction pad is configured mounted for attracting and holding the back surface of the substrate to the tip is above the plurality of rods, horizontally the substrate from the lower side thereof In the posture to hold the posture, the height of the rod in the vertical direction is adjusted so that the finger of the transfer robot can be inserted horizontally between the upper end of the support portion and the substrate and can be moved up and down. In the state where the support unit is held at a position where the substrate can be held in a horizontal state by the drive unit, the finger of the transfer robot is set in a horizontal state, and the position of the suction pad After lowering from above and transferring the substrate onto the suction pad, the finger of the transfer robot is lowered to a position where it does not come into contact with the substrate and the upper end of the support portion, and then retracted horizontally. Was a board holder you characterized in that to be able to transfer the substrate on the suction pad by the transfer robot.

According to a second aspect of the present invention, there is provided the substrate holder, wherein at least the upper ends of the plurality of support portions are arranged on the upper surface of the support portions in a posture in which the substrate is held in a horizontal posture from the lower side. The macro illumination light irradiated from the front surface of the substrate toward the back surface side in a state where an inclined surface that crosses and opens downward is formed and the back surface of the substrate is sucked and held by the suction portion. It is characterized by reflecting on an inclined surface .

According to a third aspect of the present invention, the inclined surface is formed on both sides of the upper surface of the support portion along a direction in which the support portion is extended .

According to the present invention , the substrate is directly placed between the transfer robot and the substrate holder by providing the suction pad for sucking and holding the back surface of the substrate via the plurality of rods at the upper ends of the support portions that are arranged at intervals. Therefore, a lift mechanism for receiving the substrate on the substrate holder side becomes unnecessary, the configuration can be simplified, and the time for delivering the substrate can be shortened .

FIG. 1 is a diagram showing a schematic configuration of a substrate inspection apparatus including a substrate holder in the embodiment of the present invention. FIG. 2 is a plan view of the substrate holder and the transfer robot. 3 is a cross-sectional view taken along line III-III in FIG. FIG. 4 is a side view of the substrate holder. FIG. 5 is a plan view of the substrate holder and the transfer robot. FIG. 6 is a side view of the substrate holder.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Board | substrate inspection apparatus 3 Light source 8 Inspection articulated arm robot 6,30 Board | substrate holder 7 Base part 10 Support part 10a Upper surface 10b Inclined surface 10c Side surface 10d Inclined surface 11a Base end part 11b Inclined surface 12 Adsorption part 13 Rod 14 Adsorption pad 15 Holder frame 16 Suction pad 17 Beam 18 Support pin 20 Transfer robot 21 Arm 22 Robot hand 23 Finger 24 Suction unit 30 Substrate holder 31 Suction unit 32 Beam W Substrate

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. However, the present invention is not limited to the following embodiments, and for example, the constituent elements of these embodiments may be appropriately combined.

The best mode for carrying out the invention will be described in detail with reference to the drawings.
FIG. 1 shows a side view of the substrate inspection apparatus.
The macro inspection apparatus 1 includes an apparatus main body 2 that is disposed in a clean room and is surrounded by side walls that are open at the upper and lower surfaces. A filter for increasing the cleanliness in the apparatus main body is attached to the upper surface of the apparatus main body 2. Further, on the upper part of the apparatus main body 2, for example, a light source 3 for macro illumination such as a metal halide lamp or a sodium lamp, and a reflection mirror 4 is installed on the optical axis of illumination light emitted from the light source 3. . A Fresnel lens 5 that converges the illumination light from the light source 3 and guides it to the substrate W is disposed below the reflection mirror 4. The Fresnel lens 5 is used to make divergent light from the light source 3 into convergent light. In addition to this Fresnel lens, a transmissive liquid crystal scattering plate having a scattering function for changing divergent light from the light source into a uniform surface light source is disposed in close proximity. The macro illumination optical system may collectively illuminate the entire transparent substrate such as a liquid crystal display or a plasma display, or may partially illuminate and scan the illumination light in one or two-dimensional directions.

  The substrate W is a transparent substrate for a flat panel display (FPD) composed of a parallel flat plate transparent to illumination light, and a substrate holder 6 arranged horizontally by a substrate transfer device as indicated by a virtual line in FIG. It is supposed to be carried over.

As shown in FIG. 2, the substrate holder 6 has a base portion 7 having a flat mounting surface 7a for mounting a support portion described later, and on the side surface opposite to the mounting surface 7a of the base portion 7, A drive unit that rotates at least in the macro observation direction is connected. As a drive part, what has a rotating shaft in the longitudinal direction of the base part 7, and connected the motor to this rotating shaft may be used. In the present embodiment, an inspection articulated arm robot (hereinafter simply referred to as an inspection robot) 8 that is freely driven in multiple directions (arrows A, B, and C shown in the figure) is used as the drive unit. The base portion 7 is connected to the tip arm 9 of the articulated arm of the inspection robot 8.
On the attachment surface 7a of the base portion 7, a plurality of support portions 10 are arranged with sufficient intervals along the longitudinal direction thereof, and have a comb-like shape as a whole. As shown in FIG. 3, each support portion 10 is made of a metal plate material whose height is longer than the width size, and illumination light transmitted through the substrate W is at least at the upper end among the upper end and the lower end. The inclined surfaces 10b and 10d are formed so as to be reflected out of the observation field of view so as not to interfere with the observation by being reflected from the upper end surface.
At the upper end of the support portion 10, suction portions 12 are arranged at predetermined intervals along the length direction. As shown in FIG. 3, the suction part 12 is configured such that a suction pad 14 that comes into contact with the back surface of the substrate W is attached to the tip of a rod 13 erected from the support part 10. An air circulation hole (not shown) penetrating vertically is formed, and this air circulation hole is connected to a suction pump.
As shown in FIG. 4, the rod 13 can be inserted between the upper end of the support portion 10 and the substrate W and a sufficient space can be secured to move up and down. The height of 13 is adjusted.

  Here, the adsorption part 12 is attached to the upper surface 10a in which a part of the top part on the upper end side of the support part 10 is formed flat. An inclined surface 10b that opens downward is connected to both ends of the upper end of the support portion 10. The inclined surface 10b has an effect of preventing the irradiation light transmitted through the substrate W during the macro inspection from being reflected toward the observer. The lower end of the inclined surface 10b is connected to the side surface 10c perpendicular to the upper surface 10a, and the lower end of the side surface 10c is formed so that the inclined surface 10d is closed downward. The inclined surface 10d prevents the irradiation light from being reflected toward the observer when the substrate holder 6 is reversed to perform the macro inspection of the back surface of the substrate W.

  As shown in FIG. 4, the upper surface 10 a of the support portion 10 is horizontal to the substrate W, but the lower end of the support portion 10, that is, the ridge line formed by the lower inclined surface 10 d, the base portion 7 side is supported by the support portion 10. In the case of 10 base end portions 11a, the support portion 10 is inclined so as to decrease the height in the vertical direction from the end portion 11b toward the distal end portion 11b. In this way, by changing the height of the support portion 10 according to the distance from the base portion 7, the weight of the substrate W is reduced while the support strength of the support portion 10 is secured, thereby achieving weight reduction.

Further, as shown in FIG. 2, a thin metal that attracts and holds the upper and lower peripheral edges of the substrate W so as to be orthogonal to the support portion 10 on the upper surface 10 a on the base end portion 11 a side of the support portion 10 and the tip end portion 11 b side. A holder frame 15 made of a plate material made of light weight is fixed. Both end portions 15a of the holder frame 15 are bent vertically in a direction in which they are close to each other. The length and arrangement interval of each holder frame 15 are set so as to match the horizontal dimension and the vertical dimension of the substrate W indicated by phantom lines, and suction pads 16 are arranged on the upper surface of each holder frame 15 at a predetermined interval. A plurality are arranged. The suction pad 16 is connected to a suction pump and sucks and holds the substrate W together with the suction unit 12.
Further, a plurality of beams 17 that support support pins 18 that support both side edges of the substrate W are arranged at predetermined intervals on the outer surface 10c of the support portion 10 that is located on the outermost side of each support portion 10. Has been. As shown in FIG. 3, the beam 17 extends perpendicularly to the support portion 10, and a support pin 18 is erected on the top surface of the tip portion. The tip of the support pin 18 is provided with a sphere made of an antifriction material having a smaller hardness than that of a glass substrate such as Teflon (registered trademark). Each support pin 18 is disposed so as to support both side edges of the substrate W. In the present embodiment, the support pin 18 is disposed on the beam 17, but the suction portion 12 may be disposed instead.

As shown in FIGS. 1 and 2, the inspection robot 8 to which the base portion 7 of the substrate holder 6 is attached is held in a horizontal position by a control device (not shown), for example, as indicated by a virtual line in FIG. The substrate holder 6 is rotated or swung in the direction of arrow A from the position where the substrate holder 6 is raised at a predetermined inclination angle as shown by the solid line in FIG. The substrate holder 6 can be moved in the direction of the arrow B, the substrate holder 6 can be moved up and down in the direction of the arrow B, and the substrate holder 6 can be moved left and right in the direction of the arrow D. By using this inspection robot 8, the substrate holder 6 is moved up and down and left and right in a state where the substrate holder 6 is raised at an angle suitable for observation under macro illumination. Macro illumination light can be scanned. When the macro illumination optical system is provided so as to be movable in the X and Y directions, the inspection robot only needs to be able to rotate or swing in the direction of arrow A, rotate in the direction of arrow C, and move up and down in the direction of arrow B.
When the substrate holder 6 is raised, an opening is formed in the apparatus main body 2 at a position corresponding to the front side of the substrate holder 6, and an observer visually observes the appearance of the substrate W in the raised state. It can be done.

Here, FIG. 2 shows a transfer robot 20 used when the substrate W is carried into and out of the substrate holder 6. The transfer robot 20 used in this way is, for example, an articulated arm robot in which a plurality of arms 21 are connected, and a robot hand 22 is attached to the tip. The robot hand 22 has a plurality of fingers 23 arranged in a comb shape. The suction part 12 on the substrate holder 6 side is arranged so as not to interfere with the finger 23 as shown in FIG. Furthermore, as shown in FIG. 4, the thickness of the finger 23 is sufficiently thin compared to the height. At the upper part of such a finger 23, an adsorbing portion 24 is disposed, and adsorbs and holds the substrate W indicated by an imaginary line in FIG.

The operation of this embodiment will be described.
First, as shown by a virtual line in FIG. 1, the substrate holder 6 is put on standby at a horizontal position suitable for loading and unloading the substrate W. The transfer robot 20 picks up and holds one substrate W from the cassette and transfers the substrate W to above the substrate holder 6. At this time, as shown in FIGS. 2 and 4, the fingers 23 of the transfer robot 20 are inserted in a horizontal state from the directions orthogonal to the respective support portions 10 of the substrate holder 6 in plan view. When the robot hand 22 holding the substrate W is lowered by the transfer robot 20 while maintaining a horizontal posture, the finger 23 passes between the suction portion 12, the support pin 18, and the beam 15 as shown in FIG. To the position indicated by the imaginary line. During this time, the suction portion 12, the support pins 18, and the suction pads 16 abut on the back surface of the substrate W, the substrate W is supported by these, and the substrate W is transferred from the transfer robot 20 to the substrate holder 6. When the transfer of the substrate W is completed, the arm 21 of the transfer robot 20 is retracted, and the finger 23 is pulled out between the substrate W and the substrate holder 6.
When the substrate inspection apparatus 1 aligns the substrate W at the reference position on the substrate holder 6 by an alignment unit (not shown), the substrate inspection apparatus 1 sucks and holds the substrate W by the suction portion 12 and the suction pad 16 at that position. Further, the inspection robot 8 raises the substrate W from the horizontal position toward the observer as shown by a solid line in FIG. In this state, the observer performs a macro inspection while illuminating the substrate W from above with the illumination light from the light source 3. At this time, the macro inspection may be performed while changing the incident angle of the illumination light with respect to the substrate W by swinging the substrate holder 6 in the vertical direction or the horizontal direction by a minute angle by the inspection robot 8. Further, when performing a macro inspection of the back surface of the substrate W, the macro inspection may be performed by inverting the substrate W by the inspection robot 8 and directing the back surface of the substrate W in the illumination direction. Furthermore, a backlight device (not shown) may be provided, and observation may be performed while illuminating from the back side of the substrate W.

  When the macro inspection is completed, the substrate holder 6 is returned to the horizontal position, and the suction holding by the suction unit 12 and the suction pad 16 is released. In unloading the substrate W, the robot hand 22 is moved horizontally by the transfer robot 20 and the finger 23 is inserted between the substrate W and the support unit 10. Further, the robot hand 22 is raised and the substrate W is transferred to the transfer robot 20, and then the arm 21 is moved backward and carried out toward the cassette.

According to this embodiment, since the substrate holder 6 for macro inspection has a comb-like frame structure and each support arm portion 10 corresponding to the comb teeth has a strength for holding the substrate W, Thus, as compared with the substrate holder having a rectangular frame, the outer shape of the substrate holder 6 can be reduced, and the entire apparatus can be reduced in size. Furthermore, since the substrate holder 6 is lighter than the conventional one, the substrate holder 6 can be moved quickly, and the inspection time can be shortened. Further, the substrate holder 6 is light in weight, and since there is no load distribution, the moment of inertia can be reduced, and the load applied to the articulated arm robot used as the inspection robot 8 can be reduced. Therefore, it becomes possible to use a miniature articulated arm robot. Further, when performing a transmitted illumination inspection using a backlight, it is possible to minimize light blocking.
Further, when the substrate holder 6 is raised and raised, the support portion 10 is arranged to support the vertical direction, that is, the back surface of the substrate W from the upper side to the lower side, and holds the back surface of the substrate W by suction. It is possible to suppress the deflection and vibration of the substrate W during macro observation. The holder frame 16 is provided at the base end portion 11a and the tip end portion 11b of the support portion 10 arranged in a comb shape, and the finger 23 of the transfer robot 20 interferes with the substrate holder 6 by opening the loading direction of the substrate W. Therefore, the substrate W can be safely carried in and out. Further, since the side of the substrate W that is not supported by the support portion 10 is supported by extending the beam 17 from the support portion 10 disposed outside, the peripheral portion of the substrate W on the carry-in / out side is securely held. It is possible to further reduce the weight by omitting the holder frames on both sides.

Next, a second embodiment of the present invention will be described with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same component as 1st Embodiment. In addition, overlapping explanation is omitted.
As shown in FIGS. 5 and 6, the substrate holder 30 has a base portion 7 attached to the tip of an arm 9 of an inspection robot (inspection articulated arm robot) 8, and an attachment surface of the base portion 7. 7 a has a plurality of support portions 10 arranged in parallel at a predetermined interval so as to be orthogonal to the base portion 7. The base part 7 has a thickness dimension substantially equal to the height dimension of the base end part 11a of the support part 10, and is formed thinner than the base part of the first embodiment, thereby reducing the weight. Yes. The upper surface of the support portion 10 is formed as a flat surface and is disposed at a position higher than the upper surface of the base portion 7. The upper surfaces of the base portion 7 and the support portion 10 may be flush with each other so that one side edge portion of the substrate W is sucked and held by the base portion 7. On the upper surface of the supporting sandwiching member 10, an opening portion is formed, the suction unit 31 is fitted a suction pad to the respective openings are arranged at predetermined intervals. The suction portion 31 is connected to a suction pump through a flow hole formed in the support portion 10. The outer surface of the supporting lifting portion 10 of the outermost beams 32 are arranged. The beam 32 extends vertically from the support unit 10 and supports the back surface of the substrate W on its upper surface. For example, the suction unit 31 may be attached to the upper surface of the beam 32.

The operation of this embodiment will be described.
First, the substrate holder 30 is put on standby in a horizontal position suitable for loading and unloading the substrate W. The transfer robot 20 transfers the substrate W to above the substrate holder 6. At this time, fingers 23 of the transfer robot 20, so that in parallel in plan view, the fingers 23 between two supporting region 10 adjacent are disposed on each support 10 of the substrate holder 30, i.e. the substrate The support portion 10 of the holder 30 and the finger 23 of the transfer robot 20 are inserted so as to mesh with each other. After releasing the suction to the substrate W, when the robot hand 22 holding the substrate W is lowered by the transfer robot 20 while maintaining the horizontal posture, the fingers 23 are lowered between the support portions 10. W rear surface supporting lifting portion 10 of the contacts respectively to the beam 32, the substrate W is transferred from the transfer robot 20 to the substrate holder 30. When the transfer of the substrate W is completed, the arm 21 of the transfer robot 20 is horizontally retracted, and the finger 23 is pulled out from between the substrate W and the substrate holder. When the substrate holder 30 is raised to a predetermined angle by the inspection robot 8 and is swung in the vertical direction or the left-right direction, the position where the substrate W is transferred or the transfer position is provided as long as the position does not interfere with the substrate holder 30. The robot hand 22 may be waited at a retracted position that is lowered below the position.
Further, when the substrate W is aligned at a reference position on the substrate holder 30 by an alignment means (not shown), the substrate W is sucked and held by the suction portion 31 at that position. Further, the inspection robot 8 raises the substrate holder 30 from the horizontal position toward the observer, and performs a macro inspection by irradiating the substrate W with illumination light from above.

  When the macro inspection is completed, the substrate holder 30 is returned to the horizontal position, and the suction holding by the suction unit 31 is released. The finger 23 of the transfer robot 20 is inserted between the substrate W and the support unit 10 and then lifted, the substrate W is transferred to the transfer robot 20, and the substrate W is unloaded toward the cassette.

  According to this embodiment, since the substrate holder 30 has a comb-like frame configuration and the tip side is opened, the transfer robot 20 is inserted in parallel so as to be engaged between the support portions 10. be able to. By transferring the substrate W in this state of engagement, the substrate W can be directly transferred between the transfer robot 20 and the substrate holder 30, so that the substrate W can be received on the substrate holder 30 side. There is no need to provide a lift mechanism, the configuration can be simplified, and the time for transferring the substrate W can be shortened. Furthermore, by omitting the holder frame, the substrate holder 30 can be reduced in size and weight. The substrate holder 30 is reduced in size and weight, and the effects associated therewith are the same as those in the first embodiment.

Note that the present invention can be widely applied without being limited to the above-described embodiment.
For example, in the substrate holder 6 as shown in FIG. 2, support pins 18 that contact the back surface of the substrate W may be provided on the support portion 10. In this case, the support pins 18 and the suction portions 12 may be alternately arranged on the support portions 10, or the support pins 18 or the suction portions 12 may be arranged for each support portion 10.
Further, in the substrate holder 30 as shown in FIG. 5, the front end side of each support portion 10 may be connected by a plate-like long bar. This crosspiece can suppress the vibration of each support portion 10 by connecting the front end portion 11b of the support portion 10. In order to prevent the finger 23 of the transfer robot 20 from interfering with the crosspiece, this crosspiece may be provided on the lower surface of the support portion 10 or a notch corresponding to the shape of the finger may be provided on the crosspiece.
In addition, as shown in FIG. 2, in the substrate holder 6, the holder frame 15 is formed in a U-shape with one side open according to the shape of the rectangular glass substrate W, and the substrate W is carried out from the side where one side is open. You may enter. The holder frame 15 shown in FIG. 2 may be provided only on the distal end side of the support portion 10, and one side edge portion of the substrate W may be sucked and held by the base portion 7.

  According to the present invention, since the support portion for supporting the substrate is provided in a comb shape, the size and weight can be reduced as compared with the case where the peripheral portion of the substrate is supported by the rectangular holder body. In addition, this makes it possible to reduce the load on an articulated robot that swings or rotates the substrate holder, and to reduce the size of the substrate inspection apparatus.

Claims (3)

As inspected substrate transferred is placed on the finger of the transfer robot in the horizontal direction, the substrate horizontally attitude holding from its lower side, by the drive unit, rotating the posture holding position to the horizontal The substrate used for a substrate inspection apparatus for moving the substrate up to an angle suitable for visual observation for an observer who performs inspection, and irradiating the substrate with macro illumination light for visual inspection A holder,
A base portion coupled to the driving portion;
A plurality of the base portions are arranged at intervals, a top surface that is horizontal with respect to the substrate is formed, and a cross-sectional shape along the direction in which the intervals are provided has a width dimension along the direction in which the intervals are provided. A plurality of support portions made of a plate material having a long height dimension from the upper surface to the lower side;
A plurality of rods erected at the upper ends of the plurality of support portions, and a suction portion configured by attaching a suction pad that sucks and holds the back surface of the substrate to the top end of the plurality of rods ,
In the posture of holding the substrate horizontally from the lower side, the height of the rod in the vertical direction is such that the finger of the transfer robot is inserted horizontally between the upper end of the support portion and the substrate. , And adjusted to a height that can move up and down,
In a state where the support unit is held at a position where the substrate can be held in a horizontal state by the driving unit, the finger of the transfer robot is set in a horizontal state and is lowered from above the position of the suction pad. After the substrate is transferred onto the suction pad, the finger of the transfer robot is lowered to a position where it does not come into contact with the substrate and the upper end of the support portion, and is moved backward in the horizontal direction. A substrate holder, wherein the substrate can be transferred onto the suction pad . In the posture of holding the substrate horizontally from the lower side thereof, at least the upper ends of the plurality of support portions are formed with inclined surfaces that intersect the upper surface of the support portions and open downward.
2. The substrate according to claim 1, wherein the macro illumination light irradiated from the front surface of the substrate toward the back surface side is reflected by the inclined surface in a state where the back surface of the substrate is sucked and held by the suction portion. holder. The substrate holder according to claim 2 , wherein the inclined surface is formed on both sides of the upper surface of the support portion along a direction in which the support portion is extended .

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