JP2012145336A - Substrate inspection system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate inspection system for a large substrate in which space may be saved without degrading production efficiency and inspection performance.SOLUTION: A substrate inspection system (31) for inspecting a target substrate (G) to be inspected by a plurality of inspection methods comprises: an automatic inspection device (50) for inspecting the target substrate (G) with an image thereof captured by an imaging part; a platform having portal-shaped legs striding over the automatic inspection device (50); a manual macro inspection device (40) disposed on the platform for directly visually inspecting the target substrate (G); and a substrate conveying robot for carrying the target substrate (G) to and from the automatic inspection device (50) and the manual macro inspection device (40). The manual macro inspection device (40) is independently disposed above the automatic inspection device (50) via the platform.

Description

  The present invention relates to a substrate inspection system for inspecting a large substrate used for manufacturing a flat panel display (FPD) such as a liquid crystal display (LCD) or a plasma display (PDP).

  Conventionally, for inspecting a substrate used in a flat panel display, a macro illumination light from the substrate surface side is irradiated with the substrate raised at a predetermined angle, and reflected light from the substrate or the substrate is raised vertically. There is a visual inspection (manual macro inspection) in which the backlight illumination light is irradiated from the back side of the substrate in the state and the defect is visually determined from the scattered state of the transmitted light. In addition, there is a micro inspection in which an arbitrary portion on a substrate is enlarged by a micro inspection section such as a microscope to observe defects.

  By the way, with the recent increase in the size of flat displays, the mother glass substrate that multi-planarizes the flat display has also increased in size. For example, a large mother glass substrate of 1500 mm × 1800 mm or more has appeared. With the increase in the size of the mother glass, the production line of the substrate including the manual macro inspection device and the micro inspection device is also increasing in size.

  Therefore, a technique for saving space by performing manual macro inspection and micro inspection with a single device has been proposed (see, for example, Patent Documents 1 and 2). An apparatus for performing such manual macro inspection and micro inspection includes, for example, a drive unit that raises the substrate mounting portion (substrate holder) of the micro inspection device to the worker side, and the substrate mounting portion is raised while the substrate mounting portion is raised. A macro illumination light is irradiated from above to allow visual inspection.

JP 2003-344294 A JP 2000-28537 A

  By the way, in the conventional manual macro inspection, the reflected light is detected by irradiating the macro illumination light from above the substrate in a state where the substrate holder holding the substrate is raised at an inclination angle suitable for visual inspection by the inspector. Alternatively, in order to detect the transmitted light by irradiating the backlight illumination light from the rear side of the substrate with the substrate holder raised vertically, the substrate holder has a hollow structure that holds only the periphery of the substrate. It is desirable to use

  However, when a hollow substrate holder is used, the substrate holding force at the substrate intermediate portion is weak, so that the substrate is likely to be shaken, and inconveniences such as image shake are generated in the micro inspection in which magnified observation is performed. Therefore, in the micro inspection, it is desirable to use a substrate holder formed of a single plate that holds the entire substrate horizontally.

  As described above, when manual macro inspection and micro inspection are performed with a single apparatus, if micro inspection is prioritized, a substrate holder formed of a single plate is selected. When a single substrate holder is used, the glass substrate is transparent, so that scratches and the like on the substrate holder can be seen and cause false detection, and there is a problem that visual inspection with backlight illumination cannot be performed.

  Furthermore, when manual macro inspection and micro inspection are performed using a common substrate holder, manual macro inspection and micro inspection are performed at the same time in order to perform manual macro inspection by raising the substrate mounting part of the micro inspection device. This cannot be performed, and the inspection tact time becomes long. As a result, there arises a problem that the production efficiency of the substrate cannot be increased.

  An object of the present invention is to provide a substrate inspection system for a large substrate that can save space without reducing production efficiency and inspection performance in view of the above-described conventional situation.

  The substrate inspection system of the present invention is a substrate inspection system for inspecting a substrate to be inspected by a plurality of inspection methods, and straddles the automatic inspection device that images and inspects the substrate to be inspected by an imaging unit and the automatic inspection device. A gantry having a gate-shaped leg, a manual macro inspection device that is arranged on the gantry and visually inspects the substrate to be inspected directly, the automatic inspection device, and the manual macro inspection device to be inspected. The manual macro inspection apparatus is arranged independently above the automatic inspection apparatus via the gantry, with a substrate transfer robot for loading and unloading the target substrate.

  In the present invention, since the manual macro inspection device and the automatic inspection device are independent from each other, the manual macro inspection device and the automatic inspection device can be inspected at the same time, which can reduce the operating efficiency of both inspections. Even if a manual macro inspection device is arranged above the automatic inspection device to save space, production efficiency does not decrease.

  Further, since the substrate holding part suitable for each inspection apparatus can be used without using the common substrate holding part for the manual macro inspection apparatus and the automatic inspection apparatus, the inspection performance does not deteriorate.

  Therefore, according to the present invention, it is possible to save the space of the substrate inspection system without reducing the production efficiency and the inspection performance.

It is a front view which shows transparently the internal structure of the board | substrate inspection system which concerns on one embodiment of this invention. It is a schematic left view which shows the board | substrate carrying-in state of the board | substrate inspection system which concerns on one embodiment of this invention. It is a front view which shows transparently the internal structure of the board | substrate inspection system which concerns on other embodiment of this invention.

  Hereinafter, a substrate inspection system according to an embodiment of the present invention will be described with reference to the drawings.

<One embodiment>
FIG. 1 is a front view transparently showing the internal structure of a substrate inspection system 1 according to an embodiment of the present invention.
FIG. 2 is a schematic left side view showing the substrate loading state of the substrate inspection system 1.

  As shown in FIG. 1, the substrate inspection system 1 performs image processing on an image captured by a manual macro inspection apparatus 10 that is visually observed by an operator as a visual observation apparatus and a digital microscope (imaging unit) as an automatic inspection apparatus. A mother glass substrate for flat panel display (hereinafter referred to as a large glass substrate having a side of 1500 mm or more) as a substrate to be inspected, including a micro inspection device 20 for detecting defects and an exterior 2 (illustrated by a two-dot chain line). G is inspected (simply called glass substrate).

  The manual macro inspection apparatus 10 is tilted by a substrate holder 11 that holds a glass substrate G as a substrate holder, a swing mechanism that tilts the substrate holder 11 at an angle suitable for visual inspection by an operator, and the swing mechanism. And a macro illumination light source 16 for irradiating from above the glass substrate G held by the substrate holder 11. Further, the manual macro inspection apparatus 10 includes a backlight illumination light source 17 (illustrated by a two-dot chain line) that irradiates transmitted light from the back side of the glass substrate G with the substrate holder 11 raised.

  The swing mechanism includes two slide portions 12 that support a holder rotation shaft 11a provided at substantially the center of both sides of the substrate holder 11, two frames 13 that support the slide portion 12 so as to be slidable, And a drive unit that rotates the frame 13 to a predetermined angle. For example, the drive unit rotatably supports each frame 13 on a frame of a manual macro inspection apparatus, and connects two arm portions 14 to one end of each frame 13 opposite to the rotation support shaft. It is comprised from the two tilt shafts 15 as a slide shaft drive part which moves up and down. The drive unit may have a drive motor coupled to the rotation shafts of the two frames 13.

  In addition, although the slide part 12, the frame 13, the arm part 14, and the tilt shaft 15 are each arrange | positioned 2 each, since it is located in the front view of FIG. 1 and overlaps, only the near side appears in the figure.

The manual macro inspection apparatus 10 is disposed above the micro inspection apparatus 20 and can be visually inspected independently of the micro inspection by the micro inspection apparatus 20.
The substrate holder 11 employed in the manual macro inspection apparatus 10 has a hollow rectangular frame structure that holds the periphery of the glass substrate G formed in a rectangular shape, and can rotate around the holder rotation shaft 11a. It has become. As shown in FIG. 2, the substrate holder 11 holds the periphery of the glass substrate G by a plurality of periphery holding portions 11b.

  In order to hold the thin glass substrate G horizontally so that the thin glass substrate G is not bent, the substrate holder 11 has a support member having a rectangular cross section formed in a rectangular frame so that the support member is lower than the upper surface of the substrate holder 11. Preferably, a suction pad that sucks and holds the glass substrate G is provided on the support member. By sucking the back surface of the glass substrate G with this suction pad, the swing of the glass substrate G can be suppressed when the substrate holder 11 swings.

  The slide portion 12 is arranged as a pair of left and right pairs that pivotally support the substrate holder 11 at, for example, the centers of the two opposite sides of the substrate holder 11, and is illustrated with a solid line and a single point illustrated with respect to the pair of frames 13 arranged in parallel. They are slidably engaged at positions indicated by chain lines (reference numerals 12-2 and 12-3). As the slide portion 12 slides along the frame 13, the substrate holder 11 pivotally supported by the slide portion 12 also slides along the frame 13 to the position indicated by the solid line and double-dot chain line in the drawing (reference numeral 11-2). 11-3).

  Each frame 13 is rotatably supported by a fixed shaft 18 fixed to a visual inspection stand (not shown) by a flange 13a as a bearing portion formed on one end side of the opposite side to which the arm portion 14 is connected. When the arm part 14 connected to each frame 13 moves up and down along the tilt shaft 15 extending in the vertical direction (reference numerals 14-1 and 14-2), each frame 13 carries in and out the glass substrate G. It rotates in a horizontal state (reference numeral 13-1) and an inclined state (reference numeral 13-2) suitable for visual observation by the inspector 3. In addition, the substrate holder 11 and the slide portion 12 are also rotated by the rotation of the frame 13 (reference numerals 11-1, 11-2, 12-1, 12-2).

  The frame for the manual macro inspection apparatus has a gate-shaped leg portion and is disposed so as to straddle the micro inspection apparatus 20 which is an automatic inspection apparatus. The mount of the manual macro inspection apparatus 10 is arranged separately from the mount of the micro inspection apparatus 20. Since this manual macro inspection apparatus 10 is an apparatus in which the inspector 3 visually observes the glass substrate, the influence of vibration from the outside and the inside is small, and a vibration isolation table is provided on the floor of the clean room. Can be placed directly. In the micro inspection apparatus which is an automatic inspection apparatus, an image picked up due to the influence of external vibrations is shaken and accurate inspection cannot be performed. In this way, it is desirable to configure the manual macro inspection apparatus gantry and the micro inspection gantry 24 separately.

  The micro inspection apparatus 20 includes a stage 21 that is attached to the micro inspection apparatus mount 24 and horizontally places the glass substrate G, a stationary gantry 22 that is disposed across the stage 21 and has a portal shape, A microscope 23 that is provided in the gantry 22 and moves in a uniaxial direction (direction perpendicular to the paper surface of FIG. 1) perpendicular to the transport direction of the glass substrate G by driving means such as a linear motor, and the transport direction while holding the glass substrate G And a substrate transfer unit (not shown) for transferring to the substrate.

  As the stage 21, for example, a floating stage that holds and conveys the center line passing through the end of the glass substrate G or the center of gravity of the glass substrate G in a state where the glass substrate G is floated by air, or a glass The substrate G is supported by a rotating body such as a free roller, and the glass substrate G is held by the substrate transport unit and transported, or the glass substrate G is supported while being in contact with the back surface of the glass substrate G and rotated. A substrate transport stage such as a roller conveyor that transports with a driving roller can be used.

  Further, when a movable gantry that moves the gantry 22 along the stage 21 is employed, a fixed stage in which the stage 21 is fixed on the gantry 24 can be employed.

  The substrate holder 11 and the frame 13 of the manual macro inspection apparatus 10 are arranged in the space region of the micro inspection apparatus 20 so as not to interfere with the gantry 22 and the stage 21 of the micro inspection apparatus 20 or the hand arm 4a of the substrate transfer robot 4. Yes.

  The exterior 2 that covers the entire manual macro inspection apparatus 10 and the micro inspection apparatus (automatic inspection apparatus) has a substrate loading / unloading window 2a used for loading and unloading the glass substrate G in the manual macro inspection apparatus 10, and a micro inspection apparatus. A substrate carry-in / out window portion 2b used for carrying in / out the glass substrate G at 20 is formed.

  The substrate carry-in / out window portion 2a on the manual macro inspection apparatus 10 side has the same shape and the same area as the substrate carry-in / out window portion 2b on the micro inspection apparatus 20 side, and is provided directly above the window portion 2b. Substrate carry-in / out windows 2a and 2b are provided for the hand arm 4a of the substrate transfer robot 4 shown in FIG. 2, which transfers the glass substrate G to the first floor micro inspection device (automatic inspection device) and the second floor manual macro inspection device. Arranged so as to coincide with the vertical movement direction. In this way, by arranging the substrate loading spaces of both apparatuses corresponding to the substrate loading / unloading window portions 2a and 2b to have the same relationship in the vertical direction, the glass substrate G is moved to the first floor by the single substrate transfer robot 4. It can supply to the board | substrate carrying-in space of the micro inspection apparatus 20 arrange | positioned, and the board | substrate carrying-in space of the manual macro inspection apparatus 10 arrange | positioned on the 2nd floor. Further, the hand arm 4a can be easily aligned with the substrate loading / unloading windows 2a and 2b only by moving the hand arm 4a up and down while the substrate transfer robot 4 is fixed to the floor. On the gantry of the manual macro inspection apparatus 10, an inspection work table serving as an inspection work space 2c for the inspector 3 to perform visual inspection is formed.

Hereinafter, the inspection of the glass substrate G using the above-described substrate inspection system 1 will be described.
In the substrate inspection system 1, since the manual macro inspection apparatus 10 and the micro inspection apparatus 20 are independent of each other, manual macro inspection and micro inspection can be performed simultaneously.

First, manual macro inspection will be described.
The glass substrate G supported by the plurality of hand arms 4a is carried into the manual macro inspection apparatus 10 from the substrate carry-in / out window portion 2a of the exterior 2 by the substrate carrying robot 4 shown in FIG. At this time, the tilt shaft 15 moves the arm portion 14 downward, and the frame 13 is maintained in a horizontal state (13-1). The substrate holder 11 is also maintained in a horizontal state (11-1) parallel to the frame 13.

  When the glass substrate G is positioned and held at the reference position on the substrate holder 11, the tilt shaft 15 moves the arm portion 14 upward. As a result, the frame 13 connected to the arm portion 14 rotates about the fixed shaft 18 and tilts to a position where the inspector 3 performs visual inspection (13-2).

  Then, the substrate holder 11 is swung around the holder rotating shaft 11a, and the slide holder 12 moves the substrate holder 11 in the vertical direction with respect to the visual field position (eye height position) of the inspector. A manual macro inspection of the glass substrate G is performed when the inspector 3 visually observes the reflected light from the light source 16 or the transmitted light from the backlight illumination light source 17. When manual macro inspection is performed on the back surface of the glass substrate G, the frame 13 is slightly laid down to a position where it does not interfere with the macro illumination light source 16 when the substrate holder 11 is reversed, and the holder rotation shaft 11a is the center. The substrate holder 11 is reversed.

  Further, in the case of performing a macro inspection by visual observation using light transmitted by the backlight illumination light source 17, the substrate holder 11 is raised so that the substrate holder 11 does not interfere with the macro illumination light source 16, and the substrate holder 11 is inspected by the inspector 3. You may make it raise | start the flame | frame 13 so that it may approach. Further, the backlight illumination light source 17 may be movably provided so as to approach the back surface of the substrate holder 11 in a state where the substrate holder 11 is raised. After completion of the macro inspection, the arm 14 is lowered by the tilt shaft 15 to rotate the frame 13 to the horizontal state and return the substrate holder 11 to the horizontal state, and the substrate transport robot 4 causes the substrate loading / unloading window portion 2a. The glass substrate G is carried out from the above.

For the micro inspection, first, the glass substrate G is carried into the micro inspection apparatus 20 from the loading / unloading window 2b of the exterior 2 by the substrate transfer robot 4 shown in FIG.
When the glass substrate G is placed on the stage 21, the glass substrate G is positioned at the reference position. After positioning, the glass substrate G is moved to a predetermined position by a substrate transport unit (not shown), and the microscope is in a direction (perpendicular to the paper surface of FIG. 1) perpendicular to the transport direction of the substrate transport unit (left-right direction in FIG. 1). By moving 23, the micro inspection of the glass substrate G is performed by the microscope 23.

  After the micro-inspection is completed, the glass substrate G is returned to the carry-out position by a substrate carrying unit (not shown), and the glass substrate G is carried out from the window 2b by the substrate carrying robot 4.

  In the present embodiment described above, since the inspector 3 does not intervene in the apparatus of the micro inspection apparatus (automatic inspection apparatus) 20 for the inspection, the height of the micro inspection apparatus (automatic inspection apparatus) 20 is set to the gantry 22. It can be kept low to the same height. By using the space above this micro inspection device (automatic inspection device) 20 to arrange the manual macro inspection device 10 to have a two-story structure, the installation space can be reduced compared to the case where both devices are provided. .

  Further, since the manual macro inspection apparatus 10 and the micro inspection apparatus (automatic inspection apparatus) 20 are independent from each other, the macro inspection apparatus 10 and the micro inspection apparatus (automatic inspection apparatus) 20 can perform inspection simultaneously. Even if the manual macro inspection apparatus 10 is arranged above the micro inspection apparatus 20 to save space without lowering the operating efficiency of both inspections, the production efficiency does not decrease.

  Furthermore, the manual macro inspection apparatus 10 and the micro inspection apparatus (automatic inspection apparatus) 20 do not use a common substrate holding section, and a substrate holding section (substrate holder 11, stage 21) suitable for each inspection apparatus 10, 20 is provided. Since it can be used, inspection performance does not deteriorate.

  Therefore, according to the present embodiment, it is possible to save the space of the substrate inspection system 1 without reducing the production efficiency and the inspection performance.

  In the present embodiment, the micro inspection device 20 that is more susceptible to vibration than the manual macro inspection device 10 is disposed below the manual macro inspection device 10, and the manual macro inspection device 10 and the micro inspection device (automatic inspection) Since the apparatus 20 can be separated and installed on the floor, vibrations from the manual macro inspection apparatus 10 are not transmitted to the micro inspection apparatus 20 and high-precision micro inspection is possible. Further, by making the manual macro inspection device 10 and the micro inspection device 20 separate structures, the assembly at the site is facilitated, and the manual macro inspection device 10 and the micro inspection device 20 can be easily transported separately. become.

  Note that the automatic inspection apparatus is not limited to the micro inspection apparatus 20 of the present embodiment, and for example, an enlarged inspection unit (for example, a microscope) and an enlarged inspection such as a line width measuring apparatus, a spectrophotometric apparatus, and a laser repair apparatus. A magnification inspection apparatus having an imaging unit that captures an image magnified by the unit is included. Moreover, as an automatic inspection apparatus, the automatic macro inspection apparatus which images the whole glass substrate with a line sensor camera is also contained. In other words, the automatic inspection device is different from the one in which the inspector sticks to the device and inspects the glass substrate directly like the manual inspection device, as long as the inspector can work at a position away from the device. Good. This automatic inspection device does not require an inspector to stick at the time of inspection / observation. For this reason, in the automatic inspection apparatus, since the inspector does not enter and inspect the apparatus in operation, the maximum height of the automatic inspection apparatus is kept low so that the inspection work space for the inspector to move becomes unnecessary. be able to.

  For example, the maximum height of the automatic inspection apparatus is the maximum height of the upper surface of the portal gantry that supports the inspection head. In the automatic inspection apparatus, since the inspection head for imaging the substrate is a determining factor of the height of the apparatus, the upper surface of the gantry to which the inspection head is attached is the maximum height position of the automatic inspection apparatus. By placing the manual macro inspection apparatus close to each other so as not to interfere with the gantry of the automatic inspection apparatus, the installation height of the manual macro inspection apparatus can be lowered.

  In the micro inspection apparatus 20 of the present embodiment, the example in which the gantry 22 is fixed and the glass substrate G is transported on the stage 21 has been described. However, the gantry 22 is movable and the glass substrate G is stationary. By performing inspection or observation, the stage on which the glass substrate G is horizontally placed can be reduced, and further space saving can be achieved.

  In addition, when a mobile gantry is used, the manual macro inspection device installation height is lowered by lowering the inspection work table by placing the inspection work table of the manual macro inspection device above the moving space of the gantry. Can be suppressed. Thus, the height of the manual macro inspection apparatus can be reduced by the amount that the inspection work table is lowered.

  In this case, the board loading space of the micro inspection device (automatic inspection device) is provided on the inspection work table side of the manual macro inspection device, and the micro inspection device (automatic inspection device) is away from the inspection work table of the manual macro inspection device. By disposing, the inspection work table of the manual macro inspection apparatus can be disposed in the space area of the first floor portion where the micro inspection apparatus is shifted. By providing this space region, it is possible to arrange the inspection work table of the manual macro inspection apparatus at a low position without interfering with the micro inspection apparatus.

<Other embodiments>
FIG. 3 is a front view transparently showing the internal structure of the substrate inspection system 31 according to another embodiment of the present invention.

  Since the substrate inspection system 1 of the above-described embodiment performs manual macro inspection of the glass substrate G that is a large substrate in the space above the micro inspection device 20, the total height of the device may exceed 6 m, for example. Depending on the factory, the board inspection system 1 may not be arranged in terms of ceiling height.

Therefore, the substrate inspection system 31 of the present embodiment has a configuration that can further suppress the height as compared with the substrate inspection system 1.
As shown in FIG. 3, the board inspection system 31 includes a manual macro inspection device 40 as a manual inspection device, a micro inspection device 50 as an automatic inspection device, and an exterior 32.

  The manual macro inspection apparatus 40 includes a substrate holder 41 that holds a glass substrate G as a large substrate, a swinging mechanism that tilts the substrate holder 41 to an angle suitable for visual inspection by an inspector 33, and tilting by the swinging mechanism. And a macro illumination light source 46 that irradiates from above the inspection target substrate (glass substrate) G held by the substrate holder 41. Further, the manual macro inspection apparatus 40 has a backlight illumination light source 47 used for inspection with transmitted light.

  The swing mechanism includes two slide portions 42 that support the holder rotation shaft 41a of the substrate holder 41, two frames 43 that support the slide portion 42 so as to be slidable, and the frames 43 that rotate at a predetermined angle. And a driving unit to be operated. The drive unit includes two arm portions 44 having one end connected to each frame 43, and two tilt shafts 45 that are inclined above the micro inspection apparatus 50 and push the other end of the arm portion 44. Have In the case of this embodiment, the frame 43 only needs to be tilted to a predetermined angle. For example, the frame 43 may be fixed in a state tilted to a predetermined angle indicated by a solid line in FIG. In this case, if one end side (base end side) of the frame 43 extends to a position lower than the maximum height position S of the micro inspection apparatus (automatic inspection apparatus) 50 with the frame 43 inclined at a predetermined angle. The substrate holder 41 can be pushed out of the micro inspection apparatus (automatic inspection apparatus) 50. Preferably, by extending the frame 43 to the outside of the stage 51 of the micro inspection apparatus (automatic inspection apparatus) 50, the substrate holder 41 can be pushed out of the stage 51.

  When the frame 43 is fixed at a predetermined angle, the substrate holder 41 is rotated horizontally at the substrate loading position by the transport robot 4 and the substrate holder 41 is rotated at an angle suitable for the substrate visual observation at the visual observation position. Good.

  Also in this embodiment, the slide part 42, the frame 43, the arm part 44, and the tilt shaft 45 are arranged two by two. However, in the front view of FIG. Is shown in the figure.

  In the manual macro inspection apparatus 40, a part of the frame 43, an arm part 44, a tilt shaft 45, a backlight illumination light source 47, etc. (temporarily the substrate holder 41 and the slide part 42) are arranged above the micro inspection apparatus 50. The In this case, the micro inspection apparatus (automatic inspection apparatus) 50 is provided with a substrate carry-in space (32b) for the glass substrate G on the side close to the inspection work space 32c of the manual macro inspection apparatus 40 disposed above. A fixed gantry 52 having a gate shape is disposed on the back side of the space (32b) so as to straddle the stage 51. In the substrate carry-in space (32b) of the micro inspection apparatus 50, a vertical movement operation space of the hand arm 4a for the carrying robot 4 shown in FIG. 2 to carry the glass substrate G onto / from the stage 51 is set.

  By placing the manual macro inspection device 40 above the micro inspection device 50 so that the board carrying space (32b) of the micro inspection device 50 and the carry-in space (32a) of the manual macro inspection device 40 coincide, 40 can be lowered to a low position where it does not interfere with the micro inspection apparatus 50.

The substrate holder 41 has a hollow rectangular frame structure that holds the periphery of the glass substrate G formed in a rectangular shape, and is rotatable about a holder rotation shaft 41a.
The slide part 42 is arranged in a pair of left and right for pivotally supporting the substrate holder 41, for example, at the center of two opposite sides of the substrate holder 41, and is movably engaged with a pair of frames 43 arranged in parallel. (Reference numerals 42-2 and 42-3). By the movement of the slide portion 42, the substrate holder 41 pivotally supported by the slide portion 42 is also moved (reference numerals 41-2 and 41-3).

  The substrate holder 41 has a position (reference numeral 41-2) above the micro inspection apparatus 50 and a part (or all) of the substrate holder 41 is below the upper end (surface S) of the micro inspection apparatus 50. It moves along the frame 43 to the position (reference numeral 41-3).

  Each frame 43 is connected to a fixed shaft 48 fixed to a gantry (not shown) by a flange 43a formed at one end (lower side). The fixed shaft 48 is provided in front of the stage 51 of the micro inspection apparatus 50 and below the uppermost height position (surface S) of the micro inspection apparatus 50. The frame 43 is rotated within the range indicated by the arrow with the fixed shaft 48 as the center of rotation so as not to interfere with the stage 51 of the micro inspection apparatus 50.

  In this manner, the fixed shaft 48 is disposed in front of the stage 51 of the micro inspection apparatus 50, and one end side (base end side) of the frame 43 is pushed outward from the stage 51 of the micro inspection apparatus 50. By moving the slide portion 42 to the protruding portion of the frame 43, the substrate holder 41 movably provided on the slide portion 42 approaches the front of the stage 51 that is lower than the highest height position of the micro inspection apparatus 50. Can be issued. In the present embodiment, the inspection work table serving as the inspection work space 32c is removed from the micro inspection apparatus (automatic inspection apparatus) 50 by pushing the substrate holder 41 forward of the micro inspection apparatus 50 that is an automatic inspection apparatus. It becomes possible to provide in the front.

  The inspection work space 32 c is arranged along the visual observation window of the manual macro inspection apparatus 40 by the inspector 33. The visual observation window of the manual macro inspection apparatus 40 is provided in accordance with the stop position of the substrate holder 41 when moved downward along the frame 43. The inspection work table (working floor portion) of the inspection work space 32c is disposed below the visual observation window, and serves as a passage through which the inspector 33 moves for visual observation. This inspection work table is provided at a position lower than the lower opening side of the visual observation window, for example, a position lowered by 750 to 1000 mm so that the position of the examiner's waist becomes the lower opening side. By lowering the inspection work table, it is possible to lower the mounting position of the macro illumination light source 46 that irradiates the macro illumination light from above the substrate, so that the height of the manual macro inspection apparatus 40 can be reduced.

  Since the positional relationship between the visual observation window and the macro illumination light source 46 at the observation height position of the inspector 33 is a fixed distance, the attachment position of the macro illumination light source 46 can be lowered by the amount that the visual observation window is lowered. And the overall height of the apparatus can be kept low.

  Note that a staircase on which the inspector 33 can climb is provided at at least one end of the inspection work space 32c.

  An arm portion 44 is connected to the other end side of each frame 43. The arm portion 44 is pushed and pulled by the tilt shaft 45 disposed in an inclined manner, whereby each frame 43 is within a range inclined with respect to the horizontal plane, in the present embodiment, when the glass substrate G is carried in and out. It rotates between the inclined state (reference numeral 43-1) and the inclined state (reference numeral 43-2) suitable for the visual observation of the inspector 33. As the frame 43 is rotated, the substrate holder 41 and the slide portion 42 are also rotated (reference numerals 41-1, 41-2, 42-1, 42-2).

  Since the fixed shaft 48 is positioned below the upper end (surface S) of the gantry 52 that is the maximum height position of the micro inspection apparatus 50, a part of the frame 43 is below the maximum height of the micro inspection apparatus 50. To position.

  Similar to the micro-inspection apparatus 20 of the above-described embodiment, the micro-inspection apparatus 50 includes a stage 51, a fixed gantry 52, a microscope 53 as an inspection unit, a pedestal 54, and a substrate transport unit (not shown). Have Note that the upper end (surface S) that is the maximum height of the micro inspection apparatus 50 is the upper end of the gantry 52 in the present embodiment.

  In the exterior 32, two substrate loading / unloading windows 32a and 32b and an inspection work space 32c are formed as in the exterior 2 of the above-described embodiment.

Hereinafter, substrate inspection using the above-described substrate inspection system 31 will be described.
First, manual macro inspection will be described.
Similarly to the first embodiment, the substrate transfer robot 4 loads the glass substrate G into the manual macro inspection apparatus 40 from the substrate loading / unloading window 32 a of the exterior 32. At this time, the frame 43 rotates within the range inclined from the horizontal state as described above, and thus does not rotate to the horizontal state (43-1), but the substrate holder 41 is centered on the holder rotation shaft 41a. It rotates horizontally (41-1) independently of the frame 43.

  When the glass substrate G is held by the horizontal substrate holder 41, the substrate holder 41 is first rotated to a state parallel to the frame 43 around the holder rotation shaft 41a. When the tilt shaft 45 pushes the arm portion 44, the frame 43 connected to the arm portion 44 rotates about the fixed shaft 48 and tilts to a position where the inspector 33 performs visual inspection (43-). 2). Thus, by rotating the substrate holder 41 and the frame 43 in this order, or by rotating the substrate holder 41 and the frame 43 simultaneously, the movement space of the substrate holder 41 can be reduced.

  Then, the inspector 33 visually observes the reflected light from the macro illumination light source 46 or the transmitted light from the backlight illumination light source 47 while swinging the substrate holder 43 and moving the substrate holder 41 by the slide portion 42. Perform manual macro inspection. When manual macro inspection is performed on the back surface of the glass substrate G, the substrate holder 41 is inverted around the holder rotation shaft 41a with the frame 43 lying slightly so as not to interfere with the macro illumination light source 46.

  After the manual macro inspection is completed, the arm portion 44 is pulled back by the tilt shaft 45 and the frame 43 is laid down (43-1). Then, the substrate holder 41 is rotated horizontally (41-1), and a substrate transfer robot (not shown). Thus, the glass substrate G is carried out from the substrate carry-in / out window portion 32a. At this time, the moving space of the substrate holder 41 can be reduced by rotating the frame 43 and the substrate holder 41 in this order, or simultaneously rotating the frame 43 and the substrate holder 41.

Since the micro inspection is the same as that of the above-described embodiment, the description thereof is omitted.
Also in the present embodiment described above, since the inspector 33 does not intervene in the apparatus of the micro inspection apparatus (automatic inspection apparatus) 50 as in the above-described embodiment, the micro inspection apparatus (automatic) The height of the (inspection apparatus) 50 can be kept low to the same level as the gantry 52. By installing the manual macro inspection apparatus 40 using the space above the micro inspection apparatus (automatic inspection apparatus) 50, the installation space can be reduced as compared with the apparatus equipped with both apparatuses.

  Further, since the manual macro inspection apparatus 40 and the micro inspection apparatus (automatic inspection apparatus) 50 are independent from each other, the micro inspection by the manual macro inspection apparatus 40 and the micro inspection apparatus (automatic inspection apparatus) 50 is performed simultaneously. Therefore, the operation efficiency of both inspections is not reduced, and even if the manual macro inspection device 40 is arranged above the micro inspection device (automatic inspection device) 50 to save space, the production efficiency does not decrease.

  In addition, the manual macro inspection apparatus 40 and the micro inspection apparatus (automatic inspection apparatus) 50 do not use a common substrate holding section (substrate holder 41), but use a substrate holding section suitable for each inspection apparatus 40, 50. Because it can, inspection performance does not fall.

  Therefore, according to the present embodiment, it is possible to save the space of the substrate inspection system 31 without reducing the production efficiency and the inspection performance.

  In this embodiment, the micro inspection device 50 that is more susceptible to vibration than the manual macro inspection device 40 is disposed below the manual macro inspection device 40, and the manual macro inspection device 40 and the micro inspection device 50 are separated. Therefore, the vibration from the manual macro inspection device 40 is not transmitted to the micro inspection device 50, and high-precision micro inspection is possible. Further, by separating the manual macro inspection device 40 and the micro inspection device 50, the assembly at the site becomes easy and the transportation becomes easy.

  Further, a space for carrying in the glass substrate G is provided on the inspection work space 32c side, and the gantry 52 is fixed at a position deviating from the vertically moving operation space of the hand arm 4a of the substrate transport robot 4 shown in FIG. Provide. By moving the gantry 52 away from the inspection work space (inspection work table) 32c side, a large space is provided above the substrate carry-in space 32b above the stage 51 on the inspection work space 32c side, that is, the vertical movement operation space of the hand arm 4a. It becomes possible to make.

  In this way, the inspection work space (inspection work table) of the manual macro inspection device 40 is arranged in a space area that does not interfere with the micro inspection device (automatic inspection device) 50, so that the inspection work table is lowered and installed. The height of the entire apparatus can be kept low by the amount that the inspection work table is lowered.

  In addition, by placing the manual macro inspection apparatus 40 in a space above the board loading space of the micro inspection apparatus 50, a part of the manual macro inspection apparatus 40 can be placed on a part of the micro inspection apparatus 50. Therefore, as compared with the case where the micro inspection device 50 and the manual macro inspection device 40 are arranged side by side, it is possible to save the space of the substrate inspection system 31 by the amount of overlap.

  Further, in the present embodiment, the fixed shaft 48 that is the rotation center of the frame 43 is positioned below the upper end (surface S) that is the maximum height position of the micro inspection apparatus 50, and thus the manual macro inspection apparatus 40. The frame 43 can be pushed forward and downward of the stage 51 of the micro inspection apparatus 50. As a result, the visual observation window of the manual macro inspection apparatus 40 can be lowered downward by the amount that the frame 43 protrudes downward, so that the height of the entire apparatus can be further reduced.

  In addition, the slide part 42 is movably provided on the frame 43, and the substrate holder 41 is movably provided on the slide part 42, thereby moving the substrate holder 41 further below the base end part of the frame 43. It becomes possible. Thus, by making the substrate holder 41 slide in two stages, the substrate holder 41 can be moved to a position lower than the highest height position of the micro inspection apparatus (automatic inspection apparatus) 50. Thereby, since the visual observation window can be lowered and the macro illumination position having a certain distance relationship with the visual observation window can be suppressed low, the height of the entire apparatus can be easily suppressed.

In addition, since the tilt shaft 45 is positioned above the micro inspection apparatus 50, space saving of the substrate inspection system 31 can be achieved.
In the present embodiment, the frame 43 is rotated within a range inclined with respect to the horizontal plane (43-1, 43-2), and the substrate holder 41 is separated from the frame 43 when the glass substrate G is carried in and out. Rotate horizontally independently. Thereby, the movement space of the flame | frame 43 can be restrained and the space-saving of the board | substrate inspection system 31 can be achieved further.

  Further, as in the present embodiment, when the glass substrate G is loaded, the substrate holder 41 and the frame 43 are rotated in the order (or simultaneously), and when the glass substrate G is unloaded, the frame 43 and the substrate holder 41 are sequentially moved ( (Or simultaneously), the movement space of the substrate holder 41 can be reduced, and therefore the space of the substrate inspection system 31 can be further reduced.

  In the present embodiment, as described above, since the tilt shaft 45 as the frame driving unit is arranged above the micro inspection apparatus, the board inspection system 31 can be further saved in space. However, the frame driving unit may be directly connected to the fixed shaft 48. In this case, the drive system capacity is increased, but the frame drive unit is arranged on the side instead of above the glass substrate G, so that inspection with excellent cleanliness can be performed and inspection performance is further improved. Can do.

  In each of the above-described embodiments, the example in which the gantry of the automatic inspection apparatus is fixed at a position away from the substrate carry-in space has been described. However, a movable gantry provided to be movable in the substrate carry-in space may be employed. it can. When this movable gantry is employed, the base ends (lower ends) of the frames 13 and 42 can be extended to a position above the vertical movement movement operation space of the substrate transfer robot.

DESCRIPTION OF SYMBOLS 1 Substrate inspection system 2 Exterior 2a, 2b Substrate carry-in / out window portion 2c Inspection work space 3 Inspector 4 Substrate transport robot 4a Hand arm 10 Manual macro inspection device 11 Substrate holder 11a Holder rotating shaft 11b Perimeter holding portion 12 Slide portion 13 Frame 13a Flange 14 Arm 15 Tilt shaft 16 Macro illumination light source 17 Backlight illumination light source 18 Fixed shaft 20 Micro inspection device (automatic inspection device)
21 stage 22 gantry 23 microscope 24 mount 31 substrate inspection system 32 exterior 32a, 32b substrate loading / unloading window portion 32c inspection work space 33 inspector 40 manual macro inspection device 41 substrate holder 41a holder rotating shaft 42 slide portion 43 frame 43a flange 44 Arm portion 45 Tilt axis 46 Macro illumination light source 47 Backlight illumination light source 48 Fixed axis 50 Micro inspection device (automatic inspection device)
51 stage 52 gantry 53 microscope 54 mount

Claims (12)

In a substrate inspection system that inspects a substrate to be inspected by a plurality of inspection methods,
An automatic inspection apparatus that images and inspects the substrate to be inspected by an imaging unit;
A gantry having a gate-shaped leg straddling the automatic inspection device;
A manual macro inspection device that is arranged on the gantry and visually inspects the substrate to be inspected directly;
A substrate transfer robot that carries the substrate to be inspected into and out of the automatic inspection device and the manual macro inspection device;
The manual macro inspection apparatus is arranged independently above the automatic inspection apparatus via the gantry.   The manual macro inspection apparatus includes a substrate holding unit that holds the substrate to be inspected, and a pair of frames that are arranged at a predetermined angle and slidably support the substrate holding unit. 2. The substrate inspection system according to 1.   The substrate inspection system according to claim 2, wherein the frame has a base end extended to a position lower than a maximum height position of the automatic inspection apparatus.   The automatic inspection apparatus includes a gantry that supports the imaging unit, which is the maximum height position, and the gantry is provided to be fixed to the outside of the vertical movement operation space of the substrate transfer robot, and the base end side of the frame The board inspection system according to claim 3, wherein the board inspection system is extended to a position that does not interfere with the gantry and the vertical movement space.   The automatic inspection apparatus has a gantry that supports the imaging unit, which is the maximum height position, the gantry is provided to be movable along a loading space of the inspection target substrate, and a base end portion of the frame is provided 4. The substrate inspection system according to claim 3, wherein the substrate inspection system is extended to a position where it does not interfere with a moving area of the gantry.   The substrate inspection system according to claim 2, wherein a base end side of the frame protrudes outward from a stage of the automatic inspection apparatus. The substrate holding part moves to a position where at least a part is below the upper end of the automatic inspection apparatus;
The substrate inspection system according to claim 1. The manual macro inspection apparatus has an inspection work table visually inspected by an inspector,
The substrate inspection system according to claim 1, wherein the inspection workbench is disposed in a space area that does not interfere with the automatic inspection apparatus.   9. The substrate inspection system according to claim 8, wherein the inspection workbench is disposed in a spatial region in which the automatic inspection apparatus is shifted from the manual macro inspection apparatus. The automatic inspection apparatus has a movable gantry to which an inspection head is attached,
The substrate inspection system according to claim 8, wherein the inspection work table is disposed in a spatial region above a moving space of the movable gantry.   The substrate inspection system according to claim 1, wherein the automatic inspection apparatus is installed on a floor via a vibration isolation table, and the manual macro inspection apparatus is installed on the floor via the mount. The substrate transfer robot has a hand arm movable to the automatic inspection apparatus arranged on the first floor and the manual macro inspection apparatus arranged on the second floor,
2. The substrate inspection system according to claim 1, wherein a substrate carry-in space for the manual macro inspection device is arranged on a substrate carry-in space for the automatic inspection device along the vertical movement direction of the hand arm.