JP4016622B2

JP4016622B2 - Suction holder, transfer device, substrate transfer method, and electro-optical device manufacturing method

Info

Publication number: JP4016622B2
Application number: JP2001258212A
Authority: JP
Inventors: 務佐々木
Original assignee: Seiko Epson Corp
Current assignee: Seiko Epson Corp
Priority date: 2001-08-28
Filing date: 2001-08-28
Publication date: 2007-12-05
Anticipated expiration: 2021-08-28
Also published as: JP2003068824A

Abstract

PROBLEM TO BE SOLVED: To provide a suctional holder that can smoothly take substrates in and out of a substrate housing section even when the substrates are thin in thickness and largely flexed due to their dead weights, and to provide a transporter provided with the holder and a method of transporting the substrates. SOLUTION: In a magazine 50, a number of substrates 110 are housed in a state where their outer edges 110b are supported by left and right locking protrusions 51. When the substrates 110 are taken in and out of the magazine 50, the substrates 110 are locked by the locking protrusions 51 in the magazine 50 by inserting the paired arms 21 of the suctional holder into the magazine 50 or, conversely, the substrates 110 are sucked and held by means of sucking members 22 respectively installed to the arms 21. The arms 21 are constituted to hold the substrates 110 in a state where the arms 21 support the vicinities of the outer edges 110b of the substrates from the bottom side. In addition, since the sucking members 22 are attached to the arms 21 in inclinable states, the substrates 110 are held in curved states where their central parts 110a are hung down.

Description

【０００１】
【発明の属する技術分野】
本発明は、吸着保持器、搬送装置、基板の搬送方法、及び、電気光学装置の製造方法に係り、特に、電気光学装置の一部を構成する基板を搬送する搬送装置及び搬送方法として好適な搬送技術に関する。
【０００２】
【従来の技術】
電気光学装置の一種である液晶表示装置を製造する場合には、複数の液晶表示装置を構成可能な大判の基板を貼り合わせて大判パネルを構成し、この大判パネルを分割して液晶パネルを形成する場合がある。このような方法を用いる製造工程においては、大判の基板（マザーガラス）上に透明導電体からなる導体パターンを形成する工程、ＳｉＯ_２やＴｉＯ_２などの硬質保護膜を形成する工程、配向膜を形成する工程、配向膜に配向処理（ラビング処理）を施す工程、反射層（反射電極）を形成する工程、カラーフィルタを形成する工程などがあり、これらの工程間においてそれぞれ基板を搬送する必要がある。
【０００３】
上記の基板を搬送するには、図９に示すような略コ字型の平面形状を有する吸着保持器１０を備えた搬送装置を用いる場合がある。この吸着保持器１０は、相互に所定間隔を隔てて平行に配置された一対のアーム１１，１１を有し、これらのアーム１１上にはそれぞれ吸着部１１ａが設けられ、これらの吸着部１１ａによって基板１１０の下面を下方から吸着保持することができるようになっている。この吸着保持器１０を備えた搬送装置は、上記各製造工程間において図９に示す多段式のマガジン５０に対して基板１１０を出し入れしたり、各種処理装置に対して基板１１０を給材したり除材したりする場合に用いられる。
【０００４】
上記マガジン５０内には、ガラス等で構成された基板１１０が上下方向に多数配列された状態で収容されている。マガジン５０内の基板１１０は、その対向する一対の外縁１１０ｂがマガジン５０の左右内面にそれぞれ設けられた係合部５１により支持された状態で配置されている。上記マガジン５０は多数の基板１１０を一括して搬送するための搬送用カセットとして使用されることもあり、また、多数の基板１１０に対して洗浄等の処理を施すための処理用カセットとして使用される場合もある。なお、液晶パネルの製造工程において用いる基板１１０としては、通常、厚さ０．３〜１．２ｍｍ程度、幅３００〜５００、長さ５００〜８００ｍｍ程度の矩形の平面形状を有するガラス板で構成され、図示のように自重によって中央１１０ａが下方に下がる態様で湾曲している。
【０００５】
上記のように構成されたマガジン５０から基板１１０を取り出す場合には、図示点線で示すように吸着保持器１０のアーム１１を上下の基板１１０の間に挿入し、アーム１１をゆっくりと上昇させて吸着部１１ａを基板１１０の下面に当接させ、図示実線で示すように元基板１１０をやや持ち上げてから吸着部１１ａによって吸着保持させる。そして、そのまま吸着保持した基板１１０とともに水平方向手前にアーム１１を移動させ、基板１１０をマガジン５０の外側へと引き出すようにしている。
【０００６】
一方、上記とは逆に基板１１０をマガジン５０内に収納する場合には、アーム１１の吸着部１１ａにて基板１１０を吸着保持した状態で、図示実線のようにマガジン５０内に基板１１０及びアーム１１を挿入し、その後、吸着部１１ａの吸着を解除した後に、ゆっくりと吸着保持器１０のアーム１１を下降させることにより、図示点線で示すように基板１１０の外縁１１０ｂがマガジン５０内の左右の係合部５１に支持されるようにし、さらに吸着保持器１０を降下させてアーム１１の吸着部１１ａを基板１１０の下面から離反させ、その後、アーム１１をマガジン５０の外部へと引き出すようにしている。
【０００７】
【発明が解決しようとする課題】
ところで、近年、携帯機器の小型化・軽量化の要請から液晶表示パネルを構成する基板の厚さが急速に薄くなってきているため、上記のように基板１１０をマガジン５０内に収容した場合、以前に較べると基板１１０がより大きく湾曲するようになってきている。この場合、基板１１０は、吸着保持器１０によってほとんど湾曲しない平坦な状態でマガジン５０に対して出し入れされるので、出し入れ時に上下に隣接する湾曲した他の基板１１０に接近し、接触してしまう恐れがあるため、基板１１０の出し入れ作業が困難になってきているという問題点がある。
【０００８】
より具体的には、基板１１０同士が接触すると基板１１０の表面に形成された電極パターン等が損傷を受けたり異物が付着したりする危険性があるので、出し入れしようとする基板１１０と、これに隣接する基板とが接触しないように、吸着保持器１０の位置制御を精密に行う必要があり、また、基板１１０の出し入れ作業を慎重に行う必要があるので、作業に時間がかかり、製造効率が低下する。一方、マガジン５０内の基板１１０の収容密度を低下させて（すなわち、マガジン５０内に収容される基板１１０の間隔を広げて）基板１１０同士の抵触を防止しようとすると、マガジン５０の収容枚数が低下し、或いは、マガジン５０のサイズが大きくなってその取り扱いが困難になる。
【０００９】
そこで本発明は上記問題点を解決するものであり、その課題は、自重による撓み量が大きい薄い基板であっても支障なく基板収容部に対して出し入れすることができる吸着保持器及びこれを備えた搬送装置、或いは、基板の搬送方法を提供することにある。また、このような搬送方法を用いることによって効率的に製造を行うことのできる電気光学装置の製造方法を実現することにある。
【００１０】
【課題を解決するための手段】
本発明のある態様では、搬送装置が、相互に間隔を隔てて配置された一対のアームと、
前記一対のアームのそれぞれに配置されることで対をなしていて、保持対象物を下方から支持した状態で保持すると共に、前記一対のアームの幅方向中央より外側の位置にそれぞれ配置されている一対の保持部位と、前記一対のアームの一方の先端側と基端側とに設けられた２つの検出器と、移動機構と、を備えている。そして、前記一対の保持部位のうち少なくとも一方の前記保持部位には、前記保持対象物の外縁を支持するように、前記アームの外側に向けて開放する開口部の内部に、前記保持対象物を吸着保持するための吸着部が設けられ、前記吸着部の前記保持対象物に対する吸着面が少なくとも所定角度範囲内で他方の前記保持部位の側に傾斜可能に構成されている。さらに、前記一対のアームが前記移動機構によってほぼ水平に移動させられた後で前記２つの検出器によって前記先端側と前記基端側との双方に前記保持対象物が存在することが確認された場合に、前記一対の保持部位が前記保持対象物に当接するように前記一対のアームが前記移動機構によってほぼ垂直に移動させられる。
【００１１】
保持部位がアームの幅方向中央より外側の位置に配置されていることにより、保持対象物の外縁が支持されるように構成された設置場所に対して保持対象物を出し入れする際に、
アームを設置場所に干渉させることなく、保持対象物の保持姿勢を設置場所の設置姿勢に近い状態とすることが可能になるため、当該設置場所に対する出し入れ作業を容易に行うことが可能になる。
【００１２】
他の態様では、前記吸着部は前記一対の保持部位のいずれにも設けられている。
【００１３】
さらに他の態様では、前記吸着部を有しない前記保持部位には、支持突起が設けられている。
【００１４】
本発明のある態様によれば、搬送装置が、相互に間隔を隔てて配置された一対のアームと、前記一対のアームのそれぞれに配置されることで対をなしていて、保持対象物を保持すると共に、前記一対のアームの幅方向中央より外側の位置にそれぞれ配置されている一対の保持部位と、前記一対のアームの一方の先端側と基端側とに設けられた２つの検出器と、移動機構と、を備えている。そして、前記一対の保持部位には、前記保持対象物の外縁を支持するように、前記アームの外側に向けて開放する開口部の内部に、前記保持対象物を吸着保持するための吸着部が設けられ、前記吸着部の前記保持対象物に対する吸着面が、前記一対の保持部位の間に最下点を有する湾曲面に沿う方向に、少なくとも所定角度範囲内で傾斜可能に構成されている。さらに、前記一対のアームが前記移動機構によってほぼ水平に移動させられた後で前記２つの検出器によって前記先端側と前記基端側との双方に前記保持対象物が存在することが確認された場合に、前記一対の保持部位が前記保持対象物に当接するように前記一対のアームが前記移動機構によってほぼ垂直に移動させられる。
【００１５】
他の態様では、前記吸着部は、前記吸着面が少なくとも所定角度範囲内で全方位に向けて傾斜自在に構成されている。
【００１６】
さらに他の態様では、複数の前記保持部位がそれぞれ並列してなる一対の保持列が相互に間隔を隔てて配置されている。
【００１７】
さらに他の態様によれば、前記搬送装置が、前記移動機構を制御する制御手段を有している。ここで、前記制御手段は、前記一対のアームを前進させるステップ、前記一対のアームを上昇させるステップ、前記吸着部により前記保持対象物を下方から吸着保持させるステップ、及び、前記一対のアームを後退させるステップを順次実行する引き取り動作モードと、前記一対のアームを前進させるステップ、前記吸着部による前記保持対象物の吸着保持状態を解除させるステップ、前記一対のアームを下降させるステップ、及び、前記一対のアームを後退させるステップを順次実行する引き渡し動作モードと、を実行可能に構成されている。
【００１８】
本発明のある態様によれば、相互に間隔を隔てて配置された一対のアームと、前記一対のアームのそれぞれに配置されることで対をなし、前記一対のアームの幅方向中央より外側の位置にそれぞれ配置されると共に、基板を吸着保持するための吸着部が、基板の外縁を支持するように、前記アームの外側に向けて開放する開口部の内部に設けられる一対の保持部位と、前記一対のアームの一方の先端側と基端側とに設けられた２つの検出器と、
を備えた搬送装置により基板を保持して搬送する基板の搬送方法が、前記一対のアームがほぼ水平に移動させられた後で前記２つの検出器によって前記先端側と前記基端側との双方に前記基板が存在することが確認された場合に、前記一対の保持部位が前記基板の対向する一対の外縁の近傍に当接するように前記一対のアームをほぼ垂直に移動させ、当接された前記一対の保持部位により前記一対の外縁の近傍を支持し、前記基板を前記一対の外縁間が下方に湾曲した状態で搬送する。
【００１９】
本発明の他の態様によれば、相互に間隔を隔てて配置された一対のアームと、前記一対のアームのそれぞれに配置されることで対をなし、前記一対のアームの幅方向中央より外側の位置にそれぞれ配置されると共に、基板を吸着保持するための吸着部が、基板の外縁を支持するように、前記アームの外側に向けて開放する開口部の内部に設けられる一対の保持部位と、前記一対のアームの一方の先端側と基端側とに設けられた２つの検出器と、
を備えた搬送装置により、電気光学装置の一部を構成する基板を搬送する工程を有する電気光学装置の製造方法が、前記一対のアームがほぼ水平に移動させられた後で前記２つの検出器によって前記先端側と前記基端側との双方に前記基板が存在することが確認された場合に、前記一対の保持部位が前記基板の対向する一対の外縁の近傍に当接するように前記一対のアームをほぼ垂直に移動させ、当接された前記一対の保持部位により前記一対の外縁の近傍を支持し、前記基板を前記一対の外縁間が下方に湾曲した状態で搬送する。
【００２０】
他の態様によれば、前記湾曲した状態は、前記基板の対向する一対の外縁を支持した場合に前記基板が自重で湾曲する自然湾曲状態と実質的に等しい状態である。
【００２１】
さらに他の態様によれば、上記電気光学装置の製造方法が、前記保持部位により前記基板を下方から支持することを含んでいる。
【００２２】
さらに他の態様では、前記一対の保持部位は、外側から前記基板の全幅の１／４の距離だけ内側に移動した位置にある４半部位よりも外側で前記基板を保持する。
【００２３】
さらに他の態様では、上記電気光学装置の製造方法が、複数の前記保持部位がそれぞれ並列してなる一対の保持列を相互に間隔を隔てて配置することと、前記一対の保持列にそれぞれ含まれる複数の保持部位により前記基板を保持することと、を含んでいる。
【００２４】
さらに他の態様では、上記電気光学装置の製造方法が、基板収容部内において前記基板の対向する一対の外縁を支持し、前記基板を前記一対の外縁間で下方に湾曲させた状態で収容された状態とし、前記一対のアームを前記基板収容部内に導入し、前記基板の前記一対の外縁の近傍を前記保持部位にて保持し、前記基板を湾曲させたままで引き取り、前記基板収容部から搬出する。
【００２５】
さらに他の態様にでは、上記電気光学装置の製造方法が、前記保持部位にて保持された前記基板を基板収容部内に導入し、前記基板収容部内において前記基板を湾曲させた状態のまま引き渡し、前記基板の前記一対の外縁が支持された状態で収容する。
【００５８】
【発明の実施の形態】
次に、図面を参照して本発明に係る吸着保持器、搬送装置、基板の搬送方法、及び電気光学装置の製造方法の実施形態について詳細に説明する。
【００５９】
［第１実施形態］
まず、図１乃至図５を参照して本発明における第１実施形態について説明する。図１は本発明に係る第１実施形態の吸着保持器２０とマガジン５０に収納された基板１１０との関係を模式的に示す概略断面図、図２は吸着保持器２０とマガジン５０に収容された基板１１０との関係を示す概略斜視図、図３は吸着保持器２０の全体構造を示す概略斜視図、図４（ａ）は吸着保持器２０の細部構造を示す拡大平面図、図４（ｂ）は吸着保持器２０の細部構造を示す拡大断面図である。図５は第１実施形態の搬送装置２００の主要部分を模式的に示す概略斜視図である。
【００６０】
（吸着保持器の構造）
最初に、吸着保持器２０の構造について説明する。図３に示すように、吸着保持器２０は全体として略コ字状の平面形状を有し、ロボット機構などに取り付けられる基部２０Ａに対して一対のアーム２１，２１が所定の間隔を隔てて相互に平行に設けられている。アーム２１には吸着部材２２が設置された保持部位が２つずつ配置されている。これらの保持部位は、アーム２１の幅方向中央よりも外側（すなわち、他方のアーム２１とは反対側）にシフトされた位置に配置されている。また、一方のアーム２１には、上記２つの保持部位の近傍に（すなわち、アーム２１の先端側と基端側に）それぞれ光学センサ等からなる検出器２９が配置されている。
【００６１】
図４（ａ）及び（ｂ）は上記保持部位の近傍を拡大して示すものである。上記アーム２１には、アーム２１の外側に向けて開放された形状の（すなわちアーム２１の外側面から切り込まれてなる切り欠き状に形成された）開口部２１ａが設けられ、この開口部２１ａの内部に吸着部が設けられている。この吸着部には、上面が吸着面２２ａとして構成された上記の吸着部材２２と、アーム２２に取り付けられた第１回転軸２３と、第１回転軸２３に取り付けられた軸支部材２４と、軸支部材２４に取り付けられた一対の第２回転軸２５，２５とが含まれる。ここで、第２回転軸２５は上記吸着部材２２に接続されている。
【００６２】
軸支部材２４は第１回転軸２３を介してアーム２２に対して第１回転軸２３の軸線周りに回転自在に構成され、また、吸着部材２２は第２回転軸２５を介して軸支部材２４に対して第２回転軸２５の軸線周りに回転自在に構成されている。この結果、吸着部材２２の吸着面２２ａは、アーム２１に対してその周囲の全方位に向けて傾斜自在に取り付けられている。ただし、吸着部材２２の外周面と上記軸支部材２４の内面との間、及び、軸支部材２４の外面とアーム２１の開口部２１ａの内面との間にはそれぞれ僅かな隙間しか存在しないので、実際には吸着部材２２の吸着面２２ａの傾斜可能な角度範囲は所定の角度以内に限定されている。この所定の角度は保持対象物に応じて適宜に設定されることが好ましいが、例えば後述する液晶パネルを構成するための基板を吸着保持する場合には５〜１０度、好ましくは７〜８度程度とすることが望ましい。
【００６３】
吸着部材２２は、保持対象物に損傷を与えないように保持対象物よりも柔らかい素材や弾性素材（ウレタン樹脂や合成ゴムなど）で構成されていることが好ましい。本実施形態では、吸着部材２２はＰＥＥＫ（ポリエーテルエーテルケトン polyetheretherketone）で構成されている。このＰＥＥＫはきわめて安定な樹脂素材であり、特に電気光学装置の製造工程に影響を与え難い素材として知られている。
【００６４】
吸着部材２２は、その吸着面２２ａ内に凹部２２ｂを有し、凹部２２ｂ内には吸気路２２ｃが開口している。吸着部材２２には接続管２６が取り付けられ、この接続管２６は上記吸気路２２ｃに連通している。接続管２６は可撓性チューブ２７に接続され、この可撓性チューブ２７は接続管２８を介してアーム２１内に構成された吸気路２１ｂに接続されている。吸気路２１ｂは図示しない排気手段に接続され、この排気手段により吸着部材２２の凹部２２ｂ内から上記吸気路２２ｃ、接続管２６、可撓性チューブ２７及び接続管２８を通って空気が排出されるように構成されている。なお、吸着部材２２の吸着面２２ａは、周囲部分（アーム２１の上面）よりも僅かに（１〜５ｍｍ程度、より好ましくは１．５ｍｍ程度）高くなるように形成されている。
【００６５】
（搬送装置の構成）
次に、上記吸着保持器２０を備えた搬送装置２００の構成例を図５に模式的に示す。この搬送装置２００は、制御手段２１０と、移動機構２２０と、排気手段２３０とを備えている。制御手段２１０はＭＰＵ（マイクロプロセッサユニット）等で構成され、駆動回路２１１に移動機構２２０に対する制御指令を送出するとともに、入出力回路２１２を介して各種センサ信号を受信したり、その他の制御対象に対して制御指令を送出したりするように構成されている。
【００６６】
移動機構２２０は、基部２２１と、この基部２２１に対して上下動可能及び回転可能に構成された垂直軸部２２２と、垂直軸部２２２の上端に接続されて水平に伸びる水平軸部２２３と、水平軸部２２３に取り付けられ吸着保持器２０を水平軸部の長手方向に移動させるスライダ２２４とを有している。上記垂直軸部２２２、水平軸部２２３及びスライダ２２４はいずれも駆動回路２１１による駆動信号によって動作するように構成されている。
【００６７】
移動機構２２０の各部にはそれぞれ位置検出用の各種センサが取り付けられ、これらのセンサからの信号は入出力回路２１２を介して上記制御手段２１０に送られる。また、上記検出器２９の出力信号もまた同様に制御手段２１０に送られる。
【００６８】
吸着保持器２０には排気手段２３０が制御弁２３１を介して接続されている。制御手段２１０は、入出力回路２１２を介して制御弁２３１を開閉駆動し、吸着部材２２による吸着保持状態を制御するように構成されている。
【００６９】
上記搬送装置２００は、制御手段２１０による移動機構２２０の制御駆動により吸着保持器２０を適宜に移動させる。そして、図２に示すマガジン５０から基板１１０を取り出し、搬送して、図５に示す基板載置台６０上に、或いは、その他の製造装置に供給したり、その逆に、他の場所から搬送して図２に示すマガジン５０に基板１１０を格納したりする。なお、図５に示す基板載置台６０は、垂直に立設された複数の支柱６１を有し、これらの支柱の上端部で基板１１０を支持するように構成されている。この基板載置台６０は、載置された基板１１０の上面に対して種々の処理を施す支持台として使用することができ、或いは、基板１１０を受け渡す中継台として使用することもできる。なお、図示点線に示すように、基板載置台６０としては、基板１１０をほぼ平坦に支持するように構成されていてもよい。
【００７０】
（吸着保持器及び搬送装置の動作、並びに、基板の搬送方法）
次に、上述の吸着保持器２０及びこれを備えた搬送装置２００によって基板１１０を搬送する方法について説明する。まず、図１及び図２に示すマガジン５０内に収容されている基板１１０を取り出す際の手順について以下に説明する。
【００７１】
マガジン５０内においては、係合部５１によって基板１１０の対向する一対の外縁１１０ｂが下方から支持され、これによって基板１１０は全体として中央１１０ａが下方に下がるように湾曲した状態となっている。そして、このように湾曲した基板１１０はマガジン５０内において上下方向に所定間隔で多数配置されている。
【００７２】
最初に、図２に示すように吸着保持器２０をマガジン５０内に導入する。このとき、図１に点線で示すように、吸着保持器２０のアーム２１をマガジン５０内に収容された上下の基板１１０に抵触しないように両基板の間に挿入し、アーム２１が完全にマガジン５０内に配置されるようにする。次に、検出器２９によってアーム２１の先端部と基端部の双方の上に基板１１０が共に存在していることを確認した後に、吸着保持器２０を上昇させ、アーム２１に設けられた吸着部材２２が上方に配置された基板１１０の下面に当接し、基板１１０をやや上方に持ち上げるようにする。ここで、吸着部材２２によって持ち上げられた基板１１０は、マガジン５０の係合部５１に近い部位にて吸着部材２２により下方され支持されているので、係合部５１によって外縁１１０ｂが支持されていたときとほぼ同様の湾曲した状態となっている。その後、制御弁２３１を開いて吸着部材２２により基板１１０の下面を吸着保持する。このとき、基板１１０は上記のように湾曲した状態となっているので、吸着部材２２は基板１１０の湾曲した下面にその吸着面２２ａを合わせるように内側に自律的に傾斜し、基板１１０の湾曲状態をほとんど変えることなく吸着保持する。このようにして吸着保持部２０に吸着保持された基板１１０は、図１に実線で示すように、マガジン５０の係合部５１に支持されていた収容時の湾曲状態にほぼ等しい湾曲状態となっている。したがって、マガジン５０に対して基板１１０を出し入れする際に、出し入れする基板１１０と上下に隣接する他の基板とが接触する可能性を従来よりも低減することができる。また、マガジン５０内の基板の設置間隔を従来よりも低減することができる。
【００７３】
特に、本実施形態の場合、吸着保持器２０の一対のアーム２１は、マガジン５０の左右内壁に設けられた一対の係合部５１の内側に隣接した位置に配置されていて、その結果、マガジン５０内において基板１１０が一対の係合部５１によって支持される外縁１１０ｂのすぐ内側の部位が吸着部材２２によって吸着保持されるようになっている。このとき、一対のアーム２１の外側部がマガジン５０の係合部５１の内端に抵触しないように、一対のアーム２１の外側部の間隔は左右の係合部の内端の間隔よりも小さくしなければならないが、本実施形態では上記のようにアーム２１の幅方向中央よりも外側にシフトして吸着部材２２が取り付けられているので、アーム２１と係合部５１との抵触を避けながら、吸着部材２２によって吸着保持される基板部位を基板の外縁１１０ｂに近い位置に設定することが可能になっている。例えば、アーム２１の外側部と、マガジン５０の係合部５１の内端との間隔は、抵触事故を避けるために３〜８ｍｍ程度確保することが望ましいが、この程度の間隔を設けても、基板１１０をマガジン５０の係合部５１が支持する部位と、吸着部材２２が吸着保持する中心部位との距離は５〜１０ｍｍ程度とすることができる。このようにマガジン５０の係合部５１によって支持される基板１１０の外縁１１０ｂと、吸着部材２２によって吸着保持される基板部位との距離が小さいことによって、係合部５１に支持された基板１１０のマガジン５０内での収容姿勢の湾曲度合と、吸着保持器２０に吸着保持された基板１１０の搬送姿勢の湾曲度合とを実質的に同程度にすることができる。したがって、マガジン５０内において吸着保持器２０によって吸着保持される基板１１０と、上下に隣接する他の基板１１０との抵触の危険性をさらに低減することができ、また、マガジン５０内の基板１１０の収容間隔もさらに狭めることが可能になる。
【００７４】
ところで、従来の図８及び図９に示す吸着保持器１０においては、基本的に吸着保持された基板１１０が平坦になるように構成されている。より具体的に言えば、吸着保持器１０のアーム１１に設けられた吸着部１１ａは、基板１１０の全幅を４等分したときの中央１１０ａ寄りの部分と外側の部分との境界部位（換言すれば、基板１１０の外縁１１０ｂから全幅の１／４の距離だけ中央１１０ａ側に移動した位置にある部分、以下、単に「４半部位」という。）を吸着保持するように構成されていることにより、吸着保持する部位の内側にある基板部分の重量と外側にある基板部分の重量とがほぼバランスし、しかも、吸着部１１ａの吸着面は水平姿勢で固定されているので、吸着保持したときに基板を水平姿勢に矯正するように作用するため、基板１１０は吸着保持器１０によって吸着保持されている状態ではほぼ平坦な姿勢となる。
【００７５】
一方、本実施形態の吸着保持器２０では、基板１１０の４半部位よりも外側の部位を吸着部材２２によって吸着保持するように構成されているので、基板１１０は自重によって中央１１０ａが下方に垂れ下がるように湾曲する。また、吸着保持器２０の吸着部材２２は傾斜自在に構成されているので、基板１１０が自重によって自ら湾曲することを妨げず、特に、吸着部材２２が吸着した基板部位の近傍においても基板１１０の自然湾曲状態がそのまま維持される。
【００７６】
上記のようにしてマガジン５０内で基板１１０を吸着保持した吸着保持器２０は、図５に示す移動機構２２０によってマガジン５０から導出され、図３に示す状態で吸着保持した基板１１０をマガジン５０の外部へ搬出する。
【００７７】
次に、上記説明とは逆に、図３に示すように吸着保持器２０により基板１１０が湾曲状態で吸着保持された状態で搬送され、図１及び図２に示すマガジン５０に基板１１０を格納する場合について説明する。この場合には、基板１１０を吸着保持した吸着保持器２０を図２に示すようにマガジン５０に導入する。具体的には、図１に実線で示すように、吸着保持されている基板１１０の外縁１１０ｂが係合部５１よりもやや上方に位置する高さに配置されるように、吸着保持器２０をマガジン５０内に挿入する。その後、図５に示す制御弁２３１を切り換えて吸着部材２２の吸着作用を解除してから、ゆっくりと吸着保持器２０を降下させることにより、図１に点線で示すように基板１１０の外縁１１０ｂがマガジン５０の係合部５１に係合して支持されるようにし、さらに、吸着保持器２０を下降させて基板１１０の下面から吸着部材２２の吸着面２２ａを離反させ、その後、吸着保持器２０をマガジン５０の外側へ退出させる。
【００７８】
以上説明した本実施形態では、基板１１０をその自然湾曲状態に近い状態で湾曲させたまま搬送するように構成されているので、搬送時の基板１１０の姿勢が安定し、基板１１０の搬送時の振動や変形を低減することができるという２次的な効果も得られる。
【００７９】
［第２実施形態］
次に、図６及び図７を参照して、本発明における第２実施形態の吸着保持器について説明する。この実施形態の吸着保持器３０は、第１実施形態と同様の搬送装置に用いることができ、基本的には同様に動作するので、以下、共通部分についての説明は省略する。
【００８０】
図６に示すように、吸着保持器３０は、第１実施形態とほぼ同様に略コ字状の平面形状を有し、相互に平行に伸びる一対のアーム３１，３１を備えている。アーム３１にはそれぞれ吸着部材３２が取り付けられ、また、アーム３１の長さ方向にほぼ均等に分散した位置に複数（図示例では３つ）の支持ピン３８が取り付けられている。また、一方のアーム３１にはアーム３１の長さ方向に離隔した位置（図示例ではアーム３１の先端側と基端側の２箇所）に検出器３９が取り付けられている。
【００８１】
吸着部材３２には、図７に示すように、その上部に設けられた吸着面３２ａ内に凹部３２ｂが設けられ、この凹部３２ｂ内には吸気路３２ｃが開口している。この吸着部材３２は第１実施形態と同様の素材で構成される。また、吸着部材３２は、凸球面状の凸状外周面を有する内側部材３３Ａと、凹球面状の凹状内周面を有する外側部材３３Ｂとが相互に摺動自在に構成されてなる球面自在継手３３を介してアーム３１に取り付けられ、この球面自在継手３３によってアーム３１の上面に対して全方位に向けて傾斜自在に構成されている。ただし、吸着部材３２はアーム３１の凹部３１ａ内に収容され、凹部３１ａの内周面と吸着部材３２の外周縁との間隔は僅かであるので、吸着部材３２の傾斜可能な角度範囲はほぼ第１実施形態と同様に制限されている。
【００８２】
吸着部材３２はガスケット３５を介して接続部材３４と接続され、接続部材３４は接続管３６を介して可撓性チューブ３７に接続されているので、吸着部材３２内の吸気路３２ｃは接続部材３４及び接続管３６を経て可撓性チューブ３７の内部と連通している。この可撓性チューブ３７は第１実施形態と同様に図５に示す排気手段２３０に接続される。
【００８３】
一方、支持ピン３８は、アーム３１に設けられた穴部に嵌合され、図示しない止めネジ等の固定手段によって固定されている。支持ピン３８は吸着部材３２と同じ素材（好ましくはＰＥＥＫ）で構成されることが好ましい。支持ピン３８は、周囲部分に対する上記吸着部材３２の突出高さとほぼ等しい高さとなるように、アーム３１の上面よりも僅かに突出している。なお、実用上、支持ピン３８の高さは調節可能に構成されていることが好ましい。
【００８４】
この実施形態では、基板１１０の湾曲方向の吸着部位３２の位置などは第１実施形態とほぼ同様に構成されているが、一対のアーム３１のそれぞれに配置された複数の保持部位において、保持部位の一つにのみ吸着部材３２が設けられ、その他の保持部位には支持ピン３８が設けられている点で第１実施形態とは異なる。この支持ピン３８は、基板１１０を吸着保持する機能は備えていないけれども、基板１１０を下方から支持することにより保持する機能を有しているので、一対のアーム３１にそれぞれ最低一つずつ設けられていれば基板１１０の安定性に寄与し得る。
【００８５】
この実施形態においては、第１実施形態とは異なり、吸着部材３２が一対のアーム３１にそれぞれ一つずつ設けられているだけであるので、吸着保持部３０の構造の簡略化や軽量化を図ることができるとともに、基板１１０は、その湾曲中心（中央１１０ａ）の両側においてそれぞれ一箇所だけで吸着保持されているので、吸着部材から複雑な応力を受けることが少なくなるため、搬送時における歪を低減できる。すなわち、吸着部材３２が設けられている部位以外の保持部位には単に下方から基板を支持するだけの支持ピン３８が設けられているだけであるので、基板１１０の形状に複雑な矯正力を与えることが少なくなり、自然な湾曲状態により近い状態で搬送することが可能になる。
【００８６】
上記実施形態の吸着保持器２０，３０においては、２箇所以上の保持部位に吸着部を設けているが、最低１箇所に吸着部が設けられていれば、基板その他の保持対象物を吸着保持することができる。また、上記実施形態ではいずれも保持対象物を下方から支持することにより保持するようにしているが、逆に、保持対象物を上方から吸着保持することも可能である。この場合、上記の基板１１０を上方から吸着保持するには、基板の湾曲方向に間隔を隔てて配置された一対の吸着保持部が設けられていることが、基板を確実且つ実用的に保持し、搬送する上で好ましい。
【００８７】
［電気光学装置の製造方法］
次に、図１０を参照して本発明に係る電気光学装置（液晶パネル）の製造方法について説明する。
【００８８】
液晶パネルの製造方法としては、複数の液晶パネルを構成し得る大判の基板を貼り合わせて大判パネルを構成し、この大判パネルを分割して個々の液晶パネルを製造する方法が知られている。この方法は、特に小形の液晶パネルを製造する場合に、製造効率を高め、製造コストを低減する上で有利である。このように大判の基板を用いる製造方法では、基板の厚さに比して平面サイズが大きくなるので、その分だけ基板の自重による撓み量が大きくなり、その取り扱いが困難になるから、このような製造方法に本発明を適用することが特に効果的である。もちろん、本発明の電気光学装置の製造方法はこのような大判の基板を用いる製造方法に限定されるものではない。
【００８９】
この製造方法においては、図１０（ａ）に示す大判の基板１１０，１２０の内面に、それぞれＩＴＯ（インジウムスズ酸化物）等の透明導電体で構成された電極パターンをスパッタリング法やフォトリソグラフィ技術を用いて形成し、この電極パターンの上に、配向膜を塗布形成する。配向膜には所定の配向処理（ラビング処理など）が施される。また、製造される液晶パネルの構造に応じて、カラーフィルタや反射層などが適宜に形成される。例えば、カラー表示液晶パネルを製造する場合には、基板の表面上にカラーフィルタが形成され、その後、上記電極パターンが形成される。また、反射型液晶パネル（反射半透過型液晶パネルを含む。）を製造する場合には、反射層を形成し、その上に透明絶縁膜を形成してから、上記電極パターンを形成する。この場合、透明導電体で構成された電極パターンを形成する代わりに、反射層と電極とを兼ねる反射電極を形成する場合もある。
【００９０】
上記の製造工程は、いずれも大判の基板１１０，１２０に対して各種処理を行うものであり、スパッタリングや蒸着などの成膜技術、印刷やスピンコーティングなどの塗布技術、露光処理などが施される。また、ソフトエッチングや洗浄処理を行ったり、単に一時的に保管したりする場合もある。このような工程中においては、大判の基板１１０，１２０を適宜に移し変えるなどの移載作業（例えば、上記マガジン５０に多数の基板を収容して一括して洗浄処理を施したり、マガジン５０毎別の場所に搬送したりする場合に、マガジン５０に対して基板を出し入れする作業）、或る程度の距離基板を移動させる移動作業、製造装置などに基板を供給する給材作業、製造装置から基板を排除する除材作業などが必要になる。
【００９１】
上記の各種作業においては、上記第１実施形態及び第２実施形態にて説明した吸着保持器２０，３０を用いて基板１１０，１２０を保持し、搬送装置２００を用いて、基板の搬送を行ったり、マガジン５０や基板載置台６０などに対して基板を出し入れしたりする。
【００９２】
その後、基板１１０と基板１２０とが図示しないシール材を介して貼り合わせられ、図１０（ａ）に示す大判パネル１００が形成される。そして、大判パネル１００のパネル基板１１０，１２０の外面上には、図示Ｘ方向に伸びるスクライブ溝１００ｘが刻設され、このスクライブ溝１００ｘに沿ってパネル基板１１０，１２０が破断され、図１３（ｂ）に示す短冊状の中間パネル１３０が形成される。この中間パネル１３０に対しては、露出したシール材の開口部から液晶が注入され、その後、シール材の開口部は閉鎖され、液晶が中間パネル１３０内に封入される。さらに、中間パネル１３０に対しては図示Ｙ方向に伸びるスクライブ溝１００ｙが刻設され、このスクライブ溝１００ｙに沿って中間基板１３１，１３２が破断されることによって、図１３（ｃ）に示す液晶パネル１４０が形成される。
【００９３】
図１４及び図１５には、上記のようにして構成された液晶パネル１４０の平面透視図及び概略断面図を示す。液晶パネル１４０は、基板１４１と１４２とがシール材１４３によって貼り合わせられ、その間に液晶１４４が封入されている。ここで、シール材１４３には液晶注入用の開口部１４３ａが設けられ、この開口部１４３ａは封止材１４５によって封鎖されている。基板１４１の内面上には、上記基板１１０の電極パターンに設けられていた電極１１１、配線１１２及び入力端子１１３が配置されている。電極１１１の表面上には配向膜１４７が形成されている。また、基板１４２の内面上にも、基板１２０の電極パターンに設けられていた電極１２１、配線１２２及び入力端子１２３が配置され、電極１２１の表面上には配向膜１４９が形成されている。ここで、電極１１１，１２１はシール材１４３によって囲まれる液晶封入領域内に構成されており、この液晶封入領域内から配線１１２，１２２が基板張出部１４１Ｔ，１４２Ｔの表面上まで引き出され、その先端が入力端子部１１３，１２３となっている。
【００９４】
尚、本発明の吸着器及びこれを備えた搬送装置は、上述の図示例にのみ限定されるものではなく、本発明の要旨を逸脱しない範囲内において種々変更を加え得ることは勿論である。例えば、上記製造方法では複数の液晶パネルを製造するための大判の基板に対する搬送作業等の説明をしたが、本発明はこのような場合に限定されるものではなく、単一の液晶パネルを構成する基板を搬送する場合に適用させてもよい。また、本発明は、液晶パネル以外の電気光学装置、例えば、エレクトロルミネッセンスパネルの製造工程に適用することも可能である。
【００９５】
【発明の効果】
以上、説明したように本発明によれば、相互に間隔を隔てて配置された一対の保持部位によって保持対象物を保持し、少なくとも一方の保持部位に傾斜可能な吸着部を設けることによって、保持対象物を湾曲させた状態のまま保持することができるようになることから、保持対象物の収納姿勢と搬送姿勢との差異を低減し、保持対象物の取り扱いを容易化できる。
【図面の簡単な説明】
【図１】本発明に係る第１実施形態の吸着保持器とマガジンに収納された基板との関係を模式的に示す概略断面図である。
【図２】第１実施形態の吸着保持器とマガジンに収納された基板との関係を模式的に示す概略斜視図である。
【図３】第１実施形態の吸着保持器の構造を示す概略斜視図である。
【図４】第１実施形態の吸着保持器の細部構造を示す拡大平面図（ａ）及び拡大断面図（ｂ）である。
【図５】第１実施形態の搬送装置の概略構成例を示す概略斜視図である。
【図６】第２実施形態の吸着保持器の構造を示す概略斜視図である。
【図７】第２実施形態の吸着保持器の細部構造を示す拡大平面図（ａ）及び拡大断面図（ｂ）である。
【図８】従来の吸着保持器とマガジンに収納された基板との関係を模式的に示す概略断面図である。
【図９】従来の吸着保持器とマガジンに収納された基板との関係を模式的に示す概略斜視図である。
【図１０】液晶パネルの製造工程を模式的に示す概略斜視図（ａ）〜（ｃ）である。
【図１１】液晶パネルの構造を模式的に示す概略平面透視図である。
【図１２】液晶パネルの構造を模式的に示す概略断面図である。
【符号の説明】
１０，２０，３０吸着保持器
１１，２１，３１アーム
２２，３２吸着部材
２２ａ，３２ａ吸着面
５０マガジン
５１係合部
６０基板載置台
６１支柱
１１０，１２０基板
１１０ａ中央
１１０ｂ外縁
２００搬送装置
２１０制御手段
２１１駆動回路
２１２入出力回路
２２０移動機構[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a suction holder, a transport device, a substrate transport method, and an electro-optical device manufacturing method, and particularly suitable as a transport device and a transport method for transporting a substrate constituting a part of the electro-optical device. Concerning transport technology.
[0002]
[Prior art]
When manufacturing a liquid crystal display device, which is a type of electro-optical device, a large-sized panel is formed by laminating large-sized substrates that can form a plurality of liquid crystal display devices, and this large-sized panel is divided to form a liquid crystal panel There is a case. In the manufacturing process using such a method, a process of forming a conductive pattern made of a transparent conductor on a large substrate (mother glass), SiO₂And TiO₂There are a process of forming a hard protective film, a process of forming an alignment film, a process of performing an alignment process (rubbing process) on the alignment film, a process of forming a reflective layer (reflective electrode), a process of forming a color filter, etc. It is necessary to transport the substrate between these processes.
[0003]
In order to transport the above-described substrate, a transport device including a suction holder 10 having a substantially U-shaped planar shape as shown in FIG. 9 may be used. The suction holder 10 has a pair of arms 11 and 11 arranged in parallel with a predetermined distance from each other. A suction part 11a is provided on each of the arms 11, and the suction part 11a The lower surface of the substrate 110 can be sucked and held from below. The transfer device including the suction holder 10 can take in and out the substrate 110 with respect to the multistage magazine 50 shown in FIG. 9 between the above manufacturing processes, and can supply the substrate 110 to various processing apparatuses. Used when removing material.
[0004]
In the magazine 50, a large number of substrates 110 made of glass or the like are accommodated in a state of being arranged in the vertical direction. The substrate 110 in the magazine 50 is arranged in a state where a pair of opposing outer edges 110b are supported by engaging portions 51 provided on the left and right inner surfaces of the magazine 50, respectively. The magazine 50 may be used as a transport cassette for transporting a large number of substrates 110 in a lump, and may be used as a processing cassette for performing processing such as cleaning on the large number of substrates 110. There is also a case. The substrate 110 used in the manufacturing process of the liquid crystal panel is usually composed of a glass plate having a rectangular planar shape with a thickness of about 0.3 to 1.2 mm, a width of 300 to 500, and a length of about 500 to 800 mm. As shown in the figure, the center 110a is bent by its own weight so as to be lowered.
[0005]
When taking out the substrate 110 from the magazine 50 configured as described above, the arm 11 of the suction holder 10 is inserted between the upper and lower substrates 110 as shown by the dotted lines in the figure, and the arm 11 is slowly raised. The suction portion 11a is brought into contact with the lower surface of the substrate 110, and the original substrate 110 is slightly lifted and held by the suction portion 11a as shown by a solid line in the drawing. Then, the arm 11 is moved to the front side in the horizontal direction together with the substrate 110 sucked and held as it is, and the substrate 110 is pulled out of the magazine 50.
[0006]
On the other hand, when the substrate 110 is stored in the magazine 50 contrary to the above, the substrate 110 and the arm are placed in the magazine 50 as indicated by the solid line in a state where the substrate 110 is sucked and held by the suction portion 11a of the arm 11. 11 and then the suction of the suction portion 11a is released, and then the arm 11 of the suction holder 10 is slowly lowered, so that the outer edge 110b of the substrate 110 is placed on the left and right sides of the magazine 50 as shown by the dotted lines in the figure. It is supported by the engaging portion 51, and the suction holder 10 is further lowered to separate the suction portion 11 a of the arm 11 from the lower surface of the substrate 110, and then the arm 11 is pulled out of the magazine 50. Yes.
[0007]
[Problems to be solved by the invention]
By the way, in recent years, since the thickness of the substrate constituting the liquid crystal display panel has been rapidly reduced due to the demand for miniaturization and weight reduction of portable devices, when the substrate 110 is accommodated in the magazine 50 as described above, Compared to before, the substrate 110 is more greatly curved. In this case, the substrate 110 is taken into and out of the magazine 50 in a flat state that is hardly curved by the suction holder 10, so that it may approach and come into contact with another curved substrate 110 adjacent to the upper and lower sides when taking in and out. Therefore, there is a problem that it is difficult to take in and out the substrate 110.
[0008]
More specifically, since there is a risk that an electrode pattern or the like formed on the surface of the substrate 110 may be damaged or foreign matter may adhere when the substrates 110 come into contact with each other. It is necessary to precisely control the position of the suction holder 10 so that adjacent substrates do not come into contact with each other, and the substrate 110 needs to be taken in and out carefully. descend. On the other hand, if the accommodation density of the substrates 110 in the magazine 50 is reduced (that is, the interval between the substrates 110 accommodated in the magazine 50 is increased) to prevent the conflict between the substrates 110, the number of magazines 50 accommodated is reduced. The magazine 50 is reduced or the size of the magazine 50 is increased, making it difficult to handle.
[0009]
Therefore, the present invention solves the above-mentioned problems, and the problem is that it is provided with a suction holder that can be inserted into and removed from the substrate housing portion without any trouble even if it is a thin substrate with a large amount of deflection due to its own weight. Another object of the present invention is to provide a method for transporting a substrate or a substrate. Another object of the present invention is to realize a method of manufacturing an electro-optical device that can be efficiently manufactured by using such a transport method.
[0010]
[Means for Solving the Problems]
  In one aspect of the present invention, the transfer device includes a pair of arms that are spaced apart from each other,
A pair is formed by being disposed on each of the pair of arms, and the object to be held is held in a supported state from below.And a pair of arms arranged at positions outside the center in the width direction.A pair of holding portions; two detectors provided on one of the distal end side and the proximal end side of the pair of arms; and a moving mechanism. And at least one said holding | maintenance site | part among said pair of holding | maintenance parts, Inside the opening that opens toward the outside of the arm so as to support the outer edge of the object to be held,An adsorption part for adsorbing and holding the object to be held is provided, and an adsorption surface of the adsorption part with respect to the object to be held is configured to be tiltable toward the other holding part at least within a predetermined angle range. Further, after the pair of arms are moved substantially horizontally by the moving mechanism, it is confirmed by the two detectors that the holding object exists on both the distal end side and the proximal end side. In this case, the pair of arms are moved substantially vertically by the moving mechanism so that the pair of holding portions abut on the holding object.
[0011]
When the holding part is arranged at a position outside the center in the width direction of the arm, when the holding object is taken in and out of the installation place configured to support the outer edge of the holding object,
Since the holding posture of the holding object can be brought close to the installation posture of the installation location without causing the arm to interfere with the installation location, it is possible to easily take in and out the installation location.
[0012]
  In another aspect, the adsorbing portion is provided in any of the pair of holding portions.
[0013]
  In still another aspect, a support protrusion is provided at the holding portion that does not have the suction portion.
[0014]
  According to an aspect of the present invention, the transfer device is paired by being disposed on each of the pair of arms and the pair of arms that are spaced apart from each other, and holds the holding object. DoAnd a pair of arms arranged at positions outside the center in the width direction.A pair of holding portions; two detectors provided on one of the distal end side and the proximal end side of the pair of arms; and a moving mechanism. And in the pair of holding parts,, Inside the opening that opens toward the outside of the arm so as to support the outer edge of the object to be held,An adsorption part for adsorbing and holding the holding object is provided, and an adsorption surface of the adsorption part with respect to the holding object is at least in a direction along a curved surface having a lowest point between the pair of holding parts. It is configured to be tiltable within a predetermined angle range. Further, after the pair of arms are moved substantially horizontally by the moving mechanism, it is confirmed by the two detectors that the holding object exists on both the distal end side and the proximal end side. In this case, the pair of arms are moved substantially vertically by the moving mechanism so that the pair of holding portions abut on the holding object.
[0015]
  In another aspect, the suction portion is configured such that the suction surface is tiltable in all directions within at least a predetermined angle range.
[0016]
  In yet another aspect, a pair of holding rows each having a plurality of the holding portions arranged in parallel are arranged at intervals.
[0017]
  According to still another aspect, the transport device includes a control unit that controls the moving mechanism. Here, the control means includes a step of moving the pair of arms forward, a step of lifting the pair of arms, a step of sucking and holding the holding object from below by the suction portion, and a step of retracting the pair of arms. A take-out operation mode that sequentially executes the step, a step of moving the pair of arms forward, a step of releasing the suction holding state of the holding object by the suction unit, a step of lowering the pair of arms, and the pair of And a delivery operation mode in which the steps of retracting the arm are sequentially executed.
[0018]
  According to an aspect of the present invention, a pair of arms arranged at a distance from each other and a pair of arms arranged on the pair of arms are formed.And an opening that is disposed at a position outside the center in the width direction of the pair of arms and that opens to the outside of the arms so that a suction portion for sucking and holding the substrate supports the outer edge of the substrate. Provided inside the partA pair of holding portions, and two detectors provided on one of the distal end side and the proximal end side of the pair of arms,
A substrate transport method for holding and transporting a substrate by a transport device provided with both the distal end side and the proximal end side by the two detectors after the pair of arms are moved substantially horizontally. When the substrate is confirmed to exist, the pair of arms are moved substantially vertically so that the pair of holding parts abuts in the vicinity of a pair of opposing outer edges of the substrate, The pair of holding portions support the vicinity of the pair of outer edges, and convey the substrate in a state where the space between the pair of outer edges is curved downward.
[0019]
  According to another aspect of the present invention, a pair of arms arranged at a distance from each other and a pair of arms arranged on the pair of arms are formed.And an opening that is disposed at a position outside the center in the width direction of the pair of arms and that opens to the outside of the arms so that a suction portion for sucking and holding the substrate supports the outer edge of the substrate. Provided inside the partA pair of holding portions, and two detectors provided on one of the distal end side and the proximal end side of the pair of arms,
The method of manufacturing an electro-optical device having a step of transporting a substrate constituting a part of the electro-optical device by a transport device provided with the two detectors after the pair of arms are moved substantially horizontally When the pair of holding parts are in contact with the vicinity of the pair of opposing outer edges of the substrate when the substrate is confirmed to exist on both the distal end side and the proximal end side by The arm is moved substantially vertically, the vicinity of the pair of outer edges is supported by the pair of holding portions brought into contact with each other, and the substrate is transported in a state where the space between the pair of outer edges is curved downward.
[0020]
  According to another aspect, the curved state is a state substantially equal to a natural curved state in which the substrate is bent by its own weight when a pair of opposing outer edges of the substrate is supported.
[0021]
  According to still another aspect, the method of manufacturing the electro-optical device includes supporting the substrate from below by the holding portion.
[0022]
  In yet another aspect, the pair of holding portions hold the substrate on the outer side than the four-half portion located at a position moved from the outside by a distance of 1/4 of the full width of the substrate.
[0023]
  In still another aspect, the electro-optical device manufacturing method includes a pair of holding rows each having a plurality of the holding portions arranged in parallel with each other spaced apart from each other, and each of the pair of holding rows includes Holding the substrate by a plurality of holding portions.
[0024]
  In still another aspect, the electro-optical device manufacturing method supports a pair of opposing outer edges of the substrate in the substrate accommodating portion, and is accommodated in a state in which the substrate is curved downward between the pair of outer edges. In this state, the pair of arms are introduced into the substrate housing portion, the vicinity of the pair of outer edges of the substrate is held at the holding portion, the substrate is taken out while being curved, and is taken out from the substrate housing portion. .
[0025]
  In yet another aspect, the electro-optical device manufacturing method introduces the substrate held by the holding portion into the substrate housing portion, and delivers the substrate in a curved state in the substrate housing portion, The pair of outer edges of the substrate are accommodated in a supported state.
[0058]
DETAILED DESCRIPTION OF THE INVENTION
Next, embodiments of a suction holder, a transport device, a substrate transport method, and an electro-optical device manufacturing method according to the present invention will be described in detail with reference to the drawings.
[0059]
[First Embodiment]
First, a first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a schematic sectional view schematically showing the relationship between the suction holder 20 of the first embodiment according to the present invention and the substrate 110 stored in the magazine 50, and FIG. 2 is stored in the suction holder 20 and the magazine 50. 3 is a schematic perspective view showing the relationship with the substrate 110, FIG. 3 is a schematic perspective view showing the entire structure of the suction holder 20, FIG. 4 (a) is an enlarged plan view showing the detailed structure of the suction holder 20, and FIG. b) is an enlarged cross-sectional view showing a detailed structure of the suction holder 20. FIG. 5 is a schematic perspective view schematically showing the main part of the transport apparatus 200 of the first embodiment.
[0060]
(Adsorption cage structure)
First, the structure of the suction holder 20 will be described. As shown in FIG. 3, the suction holder 20 has a substantially U-shaped planar shape as a whole, and a pair of arms 21 and 21 are mutually spaced apart from each other with respect to a base portion 20A attached to a robot mechanism or the like. It is provided in parallel with. The arm 21 is provided with two holding portions each provided with the suction member 22. These holding portions are arranged at positions shifted outward from the center in the width direction of the arm 21 (that is, opposite to the other arm 21). One arm 21 is provided with detectors 29 each composed of an optical sensor or the like in the vicinity of the two holding portions (that is, on the distal end side and the proximal end side of the arm 21).
[0061]
4A and 4B are enlarged views showing the vicinity of the holding portion. The arm 21 is provided with an opening 21a that is open toward the outside of the arm 21 (that is, formed in a notch shape that is cut from the outer surface of the arm 21), and the opening 21a. Is provided with a suction portion. The suction portion includes the suction member 22 having an upper surface configured as a suction surface 22a, a first rotating shaft 23 attached to the arm 22, a shaft support member 24 attached to the first rotating shaft 23, A pair of second rotating shafts 25 and 25 attached to the shaft support member 24 is included. Here, the second rotating shaft 25 is connected to the suction member 22.
[0062]
The shaft support member 24 is configured to be rotatable around the axis of the first rotation shaft 23 with respect to the arm 22 via the first rotation shaft 23, and the suction member 22 is supported by the shaft support member via the second rotation shaft 25. 24 is configured to be rotatable around the axis of the second rotation shaft 25. As a result, the suction surface 22a of the suction member 22 is attached to the arm 21 so as to be tiltable in all directions around it. However, there are only slight gaps between the outer peripheral surface of the adsorption member 22 and the inner surface of the shaft support member 24 and between the outer surface of the shaft support member 24 and the inner surface of the opening 21a of the arm 21. Actually, the angle range in which the suction surface 22a of the suction member 22 can be tilted is limited to a predetermined angle. The predetermined angle is preferably set as appropriate according to the object to be held. For example, in the case of holding a substrate for constituting a liquid crystal panel described later by suction, it is 5 to 10 degrees, preferably 7 to 8 degrees. It is desirable to set the degree.
[0063]
The adsorption member 22 is preferably made of a softer material or an elastic material (such as urethane resin or synthetic rubber) than the holding object so as not to damage the holding object. In the present embodiment, the adsorbing member 22 is made of PEEK (polyetheretherketone). This PEEK is a very stable resin material, and is particularly known as a material that hardly affects the manufacturing process of the electro-optical device.
[0064]
The suction member 22 has a recess 22b in the suction surface 22a, and an intake passage 22c is opened in the recess 22b. A connecting pipe 26 is attached to the adsorbing member 22, and the connecting pipe 26 communicates with the intake passage 22c. The connection pipe 26 is connected to a flexible tube 27, and the flexible tube 27 is connected to an intake passage 21 b formed in the arm 21 via a connection pipe 28. The intake passage 21b is connected to an exhaust means (not shown), and air is discharged from the recess 22b of the adsorption member 22 through the intake passage 22c, the connecting pipe 26, the flexible tube 27, and the connecting pipe 28 by the exhaust means. It is configured as follows. The suction surface 22a of the suction member 22 is formed to be slightly higher (about 1 to 5 mm, more preferably about 1.5 mm) than the surrounding portion (the upper surface of the arm 21).
[0065]
(Conveyor configuration)
Next, FIG. 5 schematically shows a configuration example of the transport apparatus 200 including the suction holder 20. The transport apparatus 200 includes a control unit 210, a moving mechanism 220, and an exhaust unit 230. The control unit 210 is constituted by an MPU (microprocessor unit) or the like, and sends a control command for the moving mechanism 220 to the drive circuit 211, receives various sensor signals via the input / output circuit 212, and other control targets. On the other hand, a control command is transmitted.
[0066]
The moving mechanism 220 includes a base 221, a vertical shaft 222 configured to be movable up and down and rotatable with respect to the base 221, a horizontal shaft 223 connected to the upper end of the vertical shaft 222 and extending horizontally, The slider 224 is attached to the horizontal shaft portion 223 and moves the suction holder 20 in the longitudinal direction of the horizontal shaft portion. The vertical shaft portion 222, the horizontal shaft portion 223, and the slider 224 are all configured to operate according to a drive signal from the drive circuit 211.
[0067]
Various parts for position detection are attached to each part of the moving mechanism 220, and signals from these sensors are sent to the control means 210 via the input / output circuit 212. The output signal of the detector 29 is also sent to the control means 210 in the same manner.
[0068]
An exhaust unit 230 is connected to the adsorption holder 20 via a control valve 231. The control unit 210 is configured to open and close the control valve 231 via the input / output circuit 212 to control the suction holding state by the suction member 22.
[0069]
The transport device 200 appropriately moves the suction holder 20 by the control drive of the moving mechanism 220 by the control means 210. Then, the substrate 110 is taken out from the magazine 50 shown in FIG. 2 and transported to be supplied to the substrate mounting table 60 shown in FIG. 5 or to another manufacturing apparatus, and vice versa. Then, the substrate 110 is stored in the magazine 50 shown in FIG. Note that the substrate mounting table 60 shown in FIG. 5 has a plurality of vertically supporting columns 61 and is configured to support the substrate 110 at the upper ends of these columns. The substrate mounting table 60 can be used as a support table for performing various processes on the upper surface of the mounted substrate 110, or can be used as a relay table for transferring the substrate 110. As shown by the dotted line in the figure, the substrate mounting table 60 may be configured to support the substrate 110 substantially flat.
[0070]
(Operation of suction holder and transfer device, and substrate transfer method)
Next, a method for transporting the substrate 110 by the above-described suction holder 20 and the transport apparatus 200 including the same will be described. First, a procedure for taking out the substrate 110 accommodated in the magazine 50 shown in FIGS. 1 and 2 will be described below.
[0071]
In the magazine 50, the pair of outer edges 110b facing the substrate 110 are supported from below by the engaging portion 51, whereby the substrate 110 is curved so that the center 110a as a whole descends downward. A large number of the curved substrates 110 are arranged in the magazine 50 at predetermined intervals in the vertical direction.
[0072]
First, the suction holder 20 is introduced into the magazine 50 as shown in FIG. At this time, as shown by a dotted line in FIG. 1, the arm 21 of the suction holder 20 is inserted between the two substrates so as not to touch the upper and lower substrates 110 accommodated in the magazine 50, and the arm 21 is completely inserted into the magazine. 50. Next, after it is confirmed by the detector 29 that both the substrate 110 are present on both the distal end portion and the proximal end portion of the arm 21, the suction holder 20 is lifted, and the suction provided in the arm 21. The member 22 abuts on the lower surface of the substrate 110 disposed above, and the substrate 110 is lifted slightly upward. Here, since the substrate 110 lifted by the suction member 22 is supported by being lowered by the suction member 22 at a portion close to the engagement portion 51 of the magazine 50, the outer edge 110 b is supported by the engagement portion 51. The curved state is almost the same as when. Thereafter, the control valve 231 is opened and the lower surface of the substrate 110 is sucked and held by the suction member 22. At this time, since the substrate 110 is in a curved state as described above, the adsorption member 22 is autonomously inclined inward so that the adsorption surface 22a is aligned with the curved lower surface of the substrate 110, and the substrate 110 is curved. Adsorb and hold almost without changing the state. The substrate 110 sucked and held in this manner by the suction holding unit 20 is in a curved state substantially equal to the curved state at the time of accommodation, which is supported by the engaging portion 51 of the magazine 50, as indicated by a solid line in FIG. ing. Therefore, when the board | substrate 110 is taken in / out with respect to the magazine 50, the possibility that the board | substrate 110 to put in / out will contact with another board | substrate adjacent up and down can be reduced rather than before. Moreover, the installation interval of the substrates in the magazine 50 can be reduced as compared with the conventional case.
[0073]
In particular, in the case of this embodiment, the pair of arms 21 of the suction holder 20 are disposed at positions adjacent to the inside of the pair of engaging portions 51 provided on the left and right inner walls of the magazine 50, and as a result, the magazine 50, the portion immediately inside the outer edge 110 b where the substrate 110 is supported by the pair of engaging portions 51 is sucked and held by the sucking member 22. At this time, the interval between the outer portions of the pair of arms 21 is smaller than the interval between the inner ends of the left and right engaging portions so that the outer portions of the pair of arms 21 do not touch the inner ends of the engaging portions 51 of the magazine 50. However, in the present embodiment, as described above, the adsorption member 22 is attached while being shifted outward from the center in the width direction of the arm 21, so that the arm 21 and the engagement portion 51 are avoided from conflicting. It is possible to set the substrate portion sucked and held by the suction member 22 at a position close to the outer edge 110b of the substrate. For example, the distance between the outer portion of the arm 21 and the inner end of the engaging portion 51 of the magazine 50 is preferably about 3 to 8 mm in order to avoid a collision accident. The distance between the portion where the engaging portion 51 of the magazine 50 supports the substrate 110 and the central portion where the suction member 22 is sucked and held can be about 5 to 10 mm. As described above, since the distance between the outer edge 110b of the substrate 110 supported by the engaging portion 51 of the magazine 50 and the substrate portion that is sucked and held by the suction member 22, the substrate 110 supported by the engaging portion 51 is reduced. The degree of curvature of the storage posture in the magazine 50 and the degree of curvature of the transport posture of the substrate 110 sucked and held by the suction holder 20 can be made substantially the same. Accordingly, it is possible to further reduce the risk of conflict between the substrate 110 sucked and held by the suction holder 20 in the magazine 50 and the other substrates 110 adjacent in the vertical direction. The accommodation interval can be further reduced.
[0074]
By the way, in the conventional suction holder 10 shown in FIGS. 8 and 9, the substrate 110 held by suction is basically configured to be flat. More specifically, the suction portion 11a provided on the arm 11 of the suction holder 10 is a boundary portion (in other words, a portion between the portion near the center 110a and the outer portion when the entire width of the substrate 110 is divided into four equal parts. For example, a portion at a position moved to the center 110a side by a distance of 1/4 of the full width from the outer edge 110b of the substrate 110 (hereinafter simply referred to as “four-half portion”) is sucked and held. The weight of the substrate portion inside the portion to be sucked and held is substantially balanced with the weight of the substrate portion outside, and the suction surface of the suction portion 11a is fixed in a horizontal posture. Since the substrate 110 acts to correct the substrate in a horizontal posture, the substrate 110 is in a substantially flat posture when being sucked and held by the suction holder 10.
[0075]
On the other hand, the suction holder 20 of the present embodiment is configured so that the suction member 22 sucks and holds a portion outside the four-half portion of the substrate 110, so that the center 110a hangs downward due to its own weight. To bend. In addition, since the suction member 22 of the suction holder 20 is configured to be freely tilted, it does not prevent the substrate 110 from being bent by its own weight, and in particular, in the vicinity of the substrate portion on which the suction member 22 is sucked. The natural curved state is maintained as it is.
[0076]
The suction holder 20 that sucks and holds the substrate 110 in the magazine 50 as described above is led out from the magazine 50 by the moving mechanism 220 shown in FIG. 5, and the substrate 110 sucked and held in the state shown in FIG. Take it out.
[0077]
Next, contrary to the above description, as shown in FIG. 3, the substrate 110 is conveyed by the suction holder 20 while being sucked and held in a curved state, and the substrate 110 is stored in the magazine 50 shown in FIGS. The case where it does is demonstrated. In this case, the suction holder 20 holding the substrate 110 is introduced into the magazine 50 as shown in FIG. Specifically, as shown by the solid line in FIG. 1, the suction holder 20 is placed so that the outer edge 110 b of the substrate 110 that is sucked and held is disposed at a height slightly above the engaging portion 51. Insert into the magazine 50. Thereafter, the control valve 231 shown in FIG. 5 is switched to release the suction action of the suction member 22, and then the suction holder 20 is slowly lowered so that the outer edge 110b of the substrate 110 is moved as shown by the dotted line in FIG. Further, the suction holder 20 is lowered to separate the suction surface 22a of the suction member 22 from the lower surface of the substrate 110, and then the suction holder 20 is supported. To the outside of the magazine 50.
[0078]
In the present embodiment described above, the substrate 110 is configured to be transported while being curved in a state close to its natural curved state, so that the posture of the substrate 110 during transportation is stabilized, and the substrate 110 is transported during transportation. A secondary effect that vibration and deformation can be reduced is also obtained.
[0079]
[Second Embodiment]
Next, with reference to FIG.6 and FIG.7, the adsorption holder of 2nd Embodiment in this invention is demonstrated. The suction holder 30 of this embodiment can be used in the same transport apparatus as that of the first embodiment, and basically operates in the same manner. Therefore, description of common parts is omitted below.
[0080]
As shown in FIG. 6, the suction holder 30 has a pair of arms 31, 31 that have a substantially U-shaped planar shape and extend in parallel to each other in substantially the same manner as in the first embodiment. A suction member 32 is attached to each arm 31, and a plurality of (three in the illustrated example) support pins 38 are attached at positions that are substantially evenly distributed in the length direction of the arm 31. Further, a detector 39 is attached to one arm 31 at positions separated in the length direction of the arm 31 (in the illustrated example, two locations on the distal end side and the proximal end side of the arm 31).
[0081]
As shown in FIG. 7, the adsorbing member 32 is provided with a recess 32b in an adsorbing surface 32a provided at an upper portion thereof, and an intake passage 32c is opened in the recess 32b. The adsorbing member 32 is made of the same material as in the first embodiment. The adsorbing member 32 is a spherical universal joint in which an inner member 33A having a convex spherical outer peripheral surface and an outer member 33B having a concave spherical inner peripheral surface are slidable with respect to each other. The spherical universal joint 33 is configured to be tiltable in all directions with respect to the upper surface of the arm 31. However, since the adsorption member 32 is accommodated in the recess 31a of the arm 31, and the distance between the inner peripheral surface of the recess 31a and the outer peripheral edge of the adsorption member 32 is small, the angle range in which the adsorption member 32 can be tilted is substantially the first. Restricted as in one embodiment.
[0082]
Since the suction member 32 is connected to the connection member 34 via the gasket 35, and the connection member 34 is connected to the flexible tube 37 via the connection pipe 36, the intake path 32 c in the suction member 32 is connected to the connection member 34. And, it communicates with the inside of the flexible tube 37 via the connecting pipe 36. The flexible tube 37 is connected to the exhaust means 230 shown in FIG. 5 as in the first embodiment.
[0083]
On the other hand, the support pin 38 is fitted into a hole provided in the arm 31 and is fixed by a fixing means such as a set screw (not shown). The support pin 38 is preferably made of the same material as the adsorption member 32 (preferably PEEK). The support pin 38 slightly protrudes from the upper surface of the arm 31 so as to have a height substantially equal to the protrusion height of the suction member 32 with respect to the surrounding portion. In practice, the height of the support pin 38 is preferably configured to be adjustable.
[0084]
In this embodiment, the position of the suction portion 32 in the bending direction of the substrate 110 is configured in substantially the same manner as in the first embodiment. However, in the plurality of holding portions arranged on each of the pair of arms 31, the holding portion The first embodiment is different from the first embodiment in that the suction member 32 is provided in only one of them, and the support pin 38 is provided in the other holding portion. Although the support pin 38 does not have a function of holding the substrate 110 by suction, it has a function of holding the substrate 110 by supporting it from below. If so, it can contribute to the stability of the substrate 110.
[0085]
In this embodiment, unlike the first embodiment, only one suction member 32 is provided on each of the pair of arms 31, so that the structure of the suction holding portion 30 is simplified and the weight is reduced. In addition, since the substrate 110 is attracted and held at only one place on both sides of the center of curvature (center 110a), it is less likely to receive complicated stress from the attracting member. Can be reduced. In other words, since the holding portion other than the portion where the adsorption member 32 is provided is simply provided with the support pins 38 that support the substrate from below, a complicated correction force is given to the shape of the substrate 110. Therefore, it is possible to carry the sheet closer to a natural curved state.
[0086]
In the suction holders 20 and 30 of the above-described embodiment, suction portions are provided at two or more holding portions. However, if at least one suction portion is provided, a substrate or other holding object is suction-held. can do. In any of the above embodiments, the object to be held is held by being supported from below, but conversely, the object to be held can also be sucked and held from above. In this case, in order to suck and hold the substrate 110 from above, a pair of suction holding portions arranged at an interval in the bending direction of the substrate is provided to reliably and practically hold the substrate. It is preferable for transporting.
[0087]
[Method of manufacturing electro-optical device]
Next, a method for manufacturing an electro-optical device (liquid crystal panel) according to the present invention will be described with reference to FIG.
[0088]
As a method for manufacturing a liquid crystal panel, there is known a method in which a large-sized panel is formed by bonding large-sized substrates that can form a plurality of liquid crystal panels, and each large-sized panel is divided to manufacture individual liquid crystal panels. This method is advantageous in increasing the manufacturing efficiency and reducing the manufacturing cost, particularly when manufacturing a small liquid crystal panel. In such a manufacturing method using a large-sized substrate, since the planar size is larger than the thickness of the substrate, the amount of bending due to the weight of the substrate is increased correspondingly, and the handling becomes difficult. It is particularly effective to apply the present invention to a simple manufacturing method. Of course, the manufacturing method of the electro-optical device of the present invention is not limited to the manufacturing method using such a large substrate.
[0089]
In this manufacturing method, an electrode pattern made of a transparent conductor such as ITO (indium tin oxide) is formed on the inner surfaces of large substrates 110 and 120 shown in FIG. An alignment film is applied and formed on the electrode pattern. The alignment film is subjected to a predetermined alignment process (rubbing process or the like). In addition, a color filter, a reflective layer, and the like are appropriately formed according to the structure of the manufactured liquid crystal panel. For example, when manufacturing a color display liquid crystal panel, a color filter is formed on the surface of the substrate, and then the electrode pattern is formed. When manufacturing a reflective liquid crystal panel (including a reflective transflective liquid crystal panel), a reflective layer is formed, a transparent insulating film is formed thereon, and then the electrode pattern is formed. In this case, instead of forming an electrode pattern made of a transparent conductor, a reflective electrode serving as both a reflective layer and an electrode may be formed.
[0090]
Each of the above manufacturing processes is to perform various processes on the large-sized substrates 110 and 120, and film forming techniques such as sputtering and vapor deposition, coating techniques such as printing and spin coating, and exposure processes are performed. . In some cases, soft etching or cleaning treatment is performed, or only temporary storage is performed. During such a process, transfer work such as transferring large-sized substrates 110 and 120 as appropriate (for example, a large number of substrates are accommodated in the magazine 50 and subjected to a cleaning process in a batch, or for each magazine 50). When transporting the substrate to another location, the operation of moving the substrate in and out of the magazine 50), the moving operation of moving the substrate to a certain distance, the supply operation of supplying the substrate to the manufacturing apparatus, etc., from the manufacturing apparatus Material removal work to remove the substrate is required.
[0091]
In the various operations described above, the substrates 110 and 120 are held using the suction holders 20 and 30 described in the first and second embodiments, and the substrates are transferred using the transfer device 200. In addition, the substrate is taken in and out of the magazine 50, the substrate mounting table 60, and the like.
[0092]
Then, the board | substrate 110 and the board | substrate 120 are bonded together through the sealing material which is not shown in figure, and the large format panel 100 shown to Fig.10 (a) is formed. A scribe groove 100x extending in the X direction shown in the drawing is formed on the outer surface of the panel substrates 110 and 120 of the large panel 100, and the panel substrates 110 and 120 are broken along the scribe groove 100x. A strip-shaped intermediate panel 130 shown in FIG. Liquid crystal is injected into the intermediate panel 130 from the exposed opening of the sealing material, and then the opening of the sealing material is closed, and the liquid crystal is sealed in the intermediate panel 130. Further, a scribe groove 100y extending in the Y direction shown in the figure is formed in the intermediate panel 130, and the intermediate substrates 131 and 132 are broken along the scribe groove 100y, whereby the liquid crystal panel shown in FIG. 140 is formed.
[0093]
14 and 15 are a plan perspective view and a schematic cross-sectional view of the liquid crystal panel 140 configured as described above. In the liquid crystal panel 140, substrates 141 and 142 are bonded together by a sealing material 143, and a liquid crystal 144 is sealed therebetween. Here, the sealing material 143 is provided with an opening 143 a for injecting liquid crystal, and the opening 143 a is sealed with a sealing material 145. On the inner surface of the substrate 141, the electrode 111, the wiring 112, and the input terminal 113 provided in the electrode pattern of the substrate 110 are disposed. An alignment film 147 is formed on the surface of the electrode 111. Further, the electrode 121, the wiring 122, and the input terminal 123 provided in the electrode pattern of the substrate 120 are also arranged on the inner surface of the substrate 142, and the alignment film 149 is formed on the surface of the electrode 121. Here, the electrodes 111 and 121 are configured in a liquid crystal sealing region surrounded by the sealing material 143, and the wirings 112 and 122 are drawn out from the liquid crystal sealing region to the surface of the substrate extension portions 141T and 142T. The front ends are input terminal portions 113 and 123.
[0094]
Note that the adsorber of the present invention and the transport apparatus including the adsorber are not limited to the above-described illustrated examples, and it is needless to say that various changes can be made without departing from the scope of the present invention. For example, in the above manufacturing method, the conveyance operation for a large-sized substrate for manufacturing a plurality of liquid crystal panels has been described, but the present invention is not limited to such a case, and a single liquid crystal panel is configured. You may make it apply when conveying the board | substrate to perform. The present invention can also be applied to a manufacturing process of an electro-optical device other than a liquid crystal panel, for example, an electroluminescence panel.
[0095]
【The invention's effect】
As described above, according to the present invention, the object to be held is held by a pair of holding parts that are spaced apart from each other, and at least one holding part is provided with an inclining suction portion. Since the object can be held in a curved state, the difference between the storage posture and the transport posture of the holding object can be reduced, and handling of the holding object can be facilitated.
[Brief description of the drawings]
FIG. 1 is a schematic cross-sectional view schematically showing a relationship between a suction holder according to a first embodiment of the present invention and a substrate stored in a magazine.
FIG. 2 is a schematic perspective view schematically showing a relationship between the suction holder according to the first embodiment and a substrate stored in a magazine.
FIG. 3 is a schematic perspective view showing the structure of the suction holder according to the first embodiment.
FIGS. 4A and 4B are an enlarged plan view (a) and an enlarged cross-sectional view (b) showing a detailed structure of the suction cage according to the first embodiment. FIGS.
FIG. 5 is a schematic perspective view illustrating a schematic configuration example of a transport apparatus according to the first embodiment.
FIG. 6 is a schematic perspective view showing a structure of a suction holder according to a second embodiment.
FIGS. 7A and 7B are an enlarged plan view (a) and an enlarged cross-sectional view (b) showing a detailed structure of the suction cage according to the second embodiment. FIGS.
FIG. 8 is a schematic cross-sectional view schematically showing the relationship between a conventional suction holder and a substrate stored in a magazine.
FIG. 9 is a schematic perspective view schematically showing the relationship between a conventional suction holder and a substrate housed in a magazine.
FIG. 10 is a schematic perspective view (a) to (c) schematically showing a manufacturing process of a liquid crystal panel.
FIG. 11 is a schematic perspective plan view schematically showing the structure of a liquid crystal panel.
FIG. 12 is a schematic cross-sectional view schematically showing the structure of a liquid crystal panel.
[Explanation of symbols]
10, 20, 30 Adsorption cage
11, 21, 31 arm
22, 32 Adsorption member
22a, 32a adsorption surface
50 magazines
51 engaging part
60 Substrate mounting table
61 prop
110, 120 substrate
110a center
110b outer edge
200 Conveyor
210 Control means
211 Drive circuit
212 I / O circuit
220 Moving mechanism

Claims

A pair of arms spaced from each other;
The pair of arms are paired by being arranged, hold the object to be held from below, and are arranged at positions outside the center in the width direction of the pair of arms. A pair of holding sites;
Two detectors provided on one distal end side and proximal end side of the pair of arms;
A moving mechanism,
At least one of the pair of holding parts holds the holding object inside the opening that opens toward the outside of the arm so as to support the outer edge of the holding object. An adsorbing part is provided,
The suction surface of the suction portion with respect to the holding object is configured to be tiltable toward the other holding portion at least within a predetermined angle range,
When it is confirmed that the holding object exists on both the distal end side and the proximal end side by the two detectors after the pair of arms are moved substantially horizontally by the moving mechanism. The pair of arms are moved substantially vertically by the moving mechanism so that the pair of holding portions abut on the holding object.
A conveying apparatus characterized by that.

The transport device according to claim 1, wherein the suction portion is provided in any of the pair of holding portions.

The conveying device according to claim 1, wherein a support protrusion is provided in the holding portion that does not have the suction portion.

A pair of arms spaced from each other;
A pair of holding portions that are paired by being arranged on each of the pair of arms, hold a holding object, and are arranged at positions outside the center in the width direction of the pair of arms, and
Two detectors provided on one distal end side and proximal end side of the pair of arms;
A moving mechanism,
In the pair of holding portions, a suction portion for sucking and holding the holding object is provided inside an opening that opens toward the outside of the arm so as to support an outer edge of the holding object. ,
The suction surface of the suction portion with respect to the holding object is configured to be tiltable at least within a predetermined angle range in a direction along a curved surface having a lowest point between the pair of holding portions,
When it is confirmed that the holding object exists on both the distal end side and the proximal end side by the two detectors after the pair of arms are moved substantially horizontally by the moving mechanism. The pair of arms are moved substantially vertically by the moving mechanism so that the pair of holding portions abut on the holding object.
A conveying apparatus characterized by that.

5. The transport device according to claim 1, wherein the suction portion is configured such that the suction surface is tiltable in all directions within at least a predetermined angle range.

The transport apparatus according to any one of claims 1 to 5, wherein a pair of holding rows each having a plurality of the holding portions arranged in parallel are arranged with a space therebetween.

The control means for controlling the moving mechanism, the control means,
A take-up operation for sequentially executing the step of moving the pair of arms forward, the step of raising the pair of arms, the step of sucking and holding the object to be held from below by the sucking portion, and the step of moving the pair of arms backward. Mode,
Delivery that sequentially executes the step of moving the pair of arms forward, the step of releasing the suction and holding state of the object to be held by the suction portion, the step of lowering the pair of arms, and the step of retracting the pair of arms Operation mode,
The transport apparatus according to claim 1, wherein the transport apparatus is configured to be capable of executing the following.

A pair of arms spaced from each other;
Each of the pair of arms is paired to form a pair, and each of the pair of arms is disposed at a position outside the center in the width direction, and a suction portion for sucking and holding the substrate has an outer edge of the substrate. A pair of holding portions provided inside the opening that opens toward the outside of the arm so as to support ;
Two detectors provided on one distal end side and proximal end side of the pair of arms;
A substrate transport method for holding and transporting a substrate by a transport device comprising:
The pair of holding portions when the two detectors confirm that the substrate exists on both the distal end side and the proximal end side after the pair of arms are moved substantially horizontally. Moving the pair of arms substantially vertically so that the abutment is in the vicinity of a pair of opposing outer edges of the substrate,
By adsorbing and supporting the vicinity of the pair of outer edges by the adsorbing portion of the pair of holding portions that are in contact with each other,
A method for transporting a substrate, comprising transporting the substrate in a state where the space between the pair of outer edges is curved downward.

A pair of arms spaced from each other;
Each of the pair of arms is paired to form a pair, and each of the pair of arms is disposed at a position outside the center in the width direction, and a suction portion for sucking and holding the substrate has an outer edge of the substrate. A pair of holding portions provided inside the opening that opens toward the outside of the arm so as to support ;
Two detectors provided on one distal end side and proximal end side of the pair of arms;
An electro-optical device manufacturing method including a step of transporting a substrate constituting a part of the electro-optical device by a transport device comprising:
The pair of holding portions when the two detectors confirm that the substrate exists on both the distal end side and the proximal end side after the pair of arms are moved substantially horizontally. Moving the pair of arms substantially vertically so that the abutment is in the vicinity of a pair of opposing outer edges of the substrate,
By adsorbing and supporting the vicinity of the pair of outer edges by the adsorbing portion of the pair of holding portions that are in contact with each other,
A method of manufacturing an electro-optical device, wherein the substrate is transported in a state where the space between the pair of outer edges is curved downward.

10. The electro-optic according to claim 9 , wherein the curved state is a state substantially equal to a natural curved state in which the substrate is bent by its own weight when a pair of opposing outer edges of the substrate are supported. Device manufacturing method.

The method of manufacturing an electro-optical device according to claim 9 or claim 10, characterized in that for supporting the substrate from below by the holding portion.

The pair of holding portions are claims 9 to, characterized in that for holding the substrate outside than 4 half-site at the position moved from the outside only to the inside 1/4 distance of the entire width of the substrate 11. The method of manufacturing an electro-optical device according to claim 11 .

A plurality of the holding portions are arranged in parallel, and a pair of holding rows are arranged at intervals from each other,
The method of manufacturing an electro-optical device according to any one of claims 9 to 12, characterized in that for holding the substrate by a plurality of holding portions included in each of said pair of holding column.

Supporting a pair of opposing outer edges of the substrate in the substrate accommodating portion, the substrate being accommodated in a state of being curved downward between the pair of outer edges,
The pair of arms are introduced into the substrate housing portion, the vicinity of the pair of outer edges of the substrate is held at the holding portion, the substrate is taken out while being curved, and is carried out from the substrate housing portion. the method of manufacturing an electro-optical device according to any one of claims 9 to 15,.

Introducing the substrate held at the holding portion into the substrate housing portion;
15. The substrate according to any one of claims 9 to 14 , wherein the substrate is delivered in a curved state in the substrate housing portion, and is housed in a state where the pair of outer edges of the substrate are supported. Manufacturing method of the electro-optical device.