KR20120079982A - Apparatus for transferring the substarate vertically - Google Patents

Apparatus for transferring the substarate vertically Download PDF

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Publication number
KR20120079982A
KR20120079982A KR1020110001374A KR20110001374A KR20120079982A KR 20120079982 A KR20120079982 A KR 20120079982A KR 1020110001374 A KR1020110001374 A KR 1020110001374A KR 20110001374 A KR20110001374 A KR 20110001374A KR 20120079982 A KR20120079982 A KR 20120079982A
Authority
KR
South Korea
Prior art keywords
substrate
vacuum suction
support
elevating
pair
Prior art date
Application number
KR1020110001374A
Other languages
Korean (ko)
Inventor
박성갑
Original Assignee
주식회사 글로벌비유티에스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 글로벌비유티에스 filed Critical 주식회사 글로벌비유티에스
Priority to KR1020110001374A priority Critical patent/KR20120079982A/en
Publication of KR20120079982A publication Critical patent/KR20120079982A/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Abstract

PURPOSE: A substrate horizontal transfer device is provided to prevent the fall of a substrate by adsorbing the side of the substrate through two vacuum suction modules. CONSTITUTION: A pair of elevating plates(10) is separately installed as a constant interval. The pair of elevating plates is opposite. A plate lifting unit(20) raises the pair of elevating plates upward and downward. The plate lifting unit comprises a guide(24) for accurate drive of upward and downward directions. A substrate support unit(30) is combined with the pair of elevating plates to be projected to the center portion of the pair of elevating plates. The substrate support unit supports a substrate by vacuum suction force. First and second vacuum suction modules are separately installed at the upper side of a support stand.

Description

Board Vertical Transporter {APPARATUS FOR TRANSFERRING THE SUBSTARATE VERTICALLY}

The present invention relates to a substrate vertical transfer apparatus, and more particularly, a substrate support unit for suctioning and supporting a substrate by a vacuum suction force includes two vacuum suction modules to stably support and vertically transfer a substrate to a thin substrate. It relates to a substrate vertical transfer device.

In general, in order to manufacture a flat panel display (FPD) panel, a very complicated and various process such as deposition, exposure, etching, and cleaning is performed. In order to carry out such complex various processes, a transfer process of moving a glass substrate is performed at each process position where the process is performed.

In particular, for the manufacture of Liquid Crystal Display (LCD) or Organic Light Emitting Diode (OLED) devices, a very thin glass substrate with a thickness of 0.7 mm or less while moving a large area glass substrate to various process positions The process proceeds. The transfer of the glass substrate must be carried out while complying with a very precise height and horizontal position, if not this can cause a fatal problem such as breakage of the substrate during the process.

Conventionally, a substrate transfer robot is used to transfer such a substrate. The substrate transfer robot is generally composed of a plurality of joints to convert the rotational motion into a horizontal motion, a drive unit for driving the robot arm, a wrist plate coupled to the robot arm, the end of the wrist plate It is composed of a plurality of end effectors coupled to and for loading the substrate.

When the substrate is transferred using the substrate transfer robot, the substrate transfer robot receives the substrate loaded in the cassette or the substrate vertical transfer apparatus and sends the substrate to the process position or transfers the substrate transferred from the process position to the cassette or substrate vertical transfer apparatus. Will pass.

In this case, the substrate vertical transfer device vertically transfers the substrate while supporting only both sides of a very thin large area glass substrate having a thickness of 0.7 mm or less. However, when the substrate is so thin that only both sides are supported, a phenomenon in which the central portion of the substrate is excessively sagging occurs, and in the case of excessively sagging, the substrate itself may also fall. In order to prevent this, the conventional substrate vertical transfer apparatus has a structure of forcibly absorbing the lower surface of the substrate by using a vacuum suction force to prevent the substrate from falling.

However, even when the substrate is adsorbed and supported by the vacuum suction force, the phenomenon in which the substrate is not properly adsorbed due to excessive bending or sagging of the substrate and the substrate falls continuously occurs.

The technical problem to be solved by the present invention is to provide a substrate vertical transfer apparatus capable of stably supporting and vertically transporting a substrate with respect to a thin substrate by having a substrate support portion for supporting a substrate by vacuum suction force having two vacuum suction modules. To provide.

According to an aspect of the present invention, there is provided a substrate vertical transfer apparatus including a pair of elevating plates that are installed to face each other at regular intervals and are moved up and down; Plate elevating units coupled to each of the elevating plates to elevate the elevating plate in an up and down direction; And a substrate support coupled to the elevating plate so as to protrude toward the center of the pair of elevating plates, and supporting the substrate by suction.

The substrate vertical transfer device in the present invention, the support is coupled to the inner side of the elevating plate; It is preferable to include; the first, the second vacuum suction module is installed on the upper surface of the support spaced apart.

The first vacuum suction module may be installed at the end of the support, and the second vacuum suction module may be spaced apart from the first vacuum suction module by 20 to 40 mm.

In addition, the first vacuum suction module may be fixedly installed at the end of the support, and the second vacuum suction module may be installed to be movable on the support.

In addition, in the present invention, it is preferable to separately control the vacuum suction force of the second vacuum suction module and the vacuum suction force of the first vacuum suction module, and to control differently from each other.

According to the substrate vertical transfer apparatus of the present invention, by adsorbing the side of the substrate by the two vacuum suction module, there is an advantage that can prevent the fall of the substrate, and minimize the phenomenon of sagging in the center portion of the substrate.

1 is a perspective view showing the structure of a substrate vertical transfer apparatus according to an embodiment of the present invention.
2 is a side view showing the structure of a substrate support according to an embodiment of the present invention.
3 is a side view showing the structure of a substrate support according to another embodiment of the present invention.

Hereinafter, with reference to the accompanying drawings will be described in detail a specific embodiment of the present invention.

As shown in FIG. 1, the substrate vertical transfer apparatus 1 according to the present exemplary embodiment includes a lifting plate 10, a plate lifting part 20, and a substrate support part 30.

First, as shown in FIG. 1, the elevating plate 10 is installed to face each other at a predetermined interval, and has a pair of plate structures which are lifted up and down. It is preferable that the space | interval between this pair of lifting plates is adjusted larger than the width | variety of the board | substrate S to be conveyed.

Next, the plate lifting unit 20 is coupled to each of the lifting plate 10 is a component for elevating the lifting plate in the vertical direction. The plate elevating unit 20 may have various structures for elevating the elevating plate 10. For example, the plate elevating unit 20 may include a cylinder, a servo motor, or the like. ) May be further provided.

On the other hand, the plate lifting unit 20 is installed on each of the lifting plate 10, respectively independently lift the lifting plate. At this time, the pair of lifting plate 10 is linked to the lifting and lowering at the same speed and height, it is necessary to accurately control the plate lifting unit 20.

Next, the substrate support 30 is coupled to the lifting plate 10 so as to protrude toward the center of the pair of lifting plates 10, and is a component that suctions and supports the substrate by a vacuum suction force.

In this embodiment, as shown in Figures 1 and 2, it is preferable that the substrate support 30 is composed of a support 32 and the first, second vacuum suction module (34, 36).

First, the support 32 is coupled to the inner side of the elevating plate 10, is a component that is installed to protrude in the center direction, a plurality of support 32 is spaced at a predetermined interval on one elevating plate 10 It is preferable to install. At this time, the interval between the support 32 is preferably installed as wide as possible, the length of the support 32 is preferably set to a minimum.

Next, the vacuum suction module is installed on the upper surface of the support 32 at regular intervals, and in this embodiment, it is preferable to install two of the first and second vacuum suction modules 34 and 36. . The vacuum suction module is connected to a vacuum suction line (not shown) provided separately to function to vacuum suction the lower surface of the substrate (S).

First, as shown in FIG. 2, the first vacuum suction module 34 is preferably installed close to the end of the support 32, and the second vacuum suction module 36 is the first vacuum. It is installed spaced apart from the suction module 34 at a predetermined interval.

At this time, the interval d between the first and second vacuum suction modules is preferably 20 to 40 mm. If the distance d between the first and second vacuum suction modules is less than 20 mm, the substrate may fall due to failure to properly support the substrate as in the case where one vacuum suction module is installed. In addition, when the distance d between the first and second vacuum suction modules exceeds 40 mm, a portion of the first and second vacuum suction modules may also be bent, thereby deforming the substrate.

Meanwhile, as shown in FIG. 3, the first vacuum suction module 34 is fixedly installed at the end of the support 32, and the second vacuum suction module 36 is movable on the support 32. It may be installed. In this case, the distance between the first and second vacuum suction modules 34 and 36 may be adjusted according to the size or thickness of the substrate S to be transferred. Even in this case, the interval between the first and second vacuum suction 34 and 36 modules is preferably adjusted within a range of 20 to 40 mm.

Finally, a control unit (not shown) for controlling the substrate vertical transfer device 1 according to the present embodiment includes a vacuum suction force of the second vacuum suction module 36 and a vacuum suction force of the first vacuum suction module 34. It is preferable to control separately. For example, in the state where the vacuum suction force of the second vacuum suction module 36 is increased to strongly adsorb the end of the substrate, the vacuum suction force of the first vacuum suction module 34 is changed to the second vacuum suction module 36. It is weaker than that of the substrate can effectively prevent the deflection or deformation of the substrate.

1 substrate vertical feeder 10 lifting plate
20 plate lift portion 30 substrate support portion
S: Substrate

Claims (5)

A pair of elevating plates which are installed to face each other at a predetermined interval, and are lifted up and down;
Plate elevating units coupled to each of the elevating plates to elevate the elevating plate in an up and down direction;
And a substrate support coupled to the elevating plate to protrude toward the center of the pair of elevating plates and supporting the substrate by a vacuum suction force. The method of claim 1, wherein the substrate vertical transfer device,
A support coupled to an inner side of the elevating plate;
And a first and second vacuum suction module installed on the upper surface of the support at predetermined intervals. The method of claim 1,
The first vacuum suction module is installed at the end of the support,
The second vacuum suction module is a substrate vertical transfer device, characterized in that the first vacuum suction module is spaced apart 20 ~ 40mm spaced apart. The method of claim 2,
The first vacuum suction module is installed fixed to the end of the support,
And the second vacuum suction module is installed to be movable on the support. The method of claim 2,
And vertically control the vacuum suction force of the second vacuum suction module and the vacuum suction force of the first vacuum suction module.
KR1020110001374A 2011-01-06 2011-01-06 Apparatus for transferring the substarate vertically KR20120079982A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020110001374A KR20120079982A (en) 2011-01-06 2011-01-06 Apparatus for transferring the substarate vertically

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020110001374A KR20120079982A (en) 2011-01-06 2011-01-06 Apparatus for transferring the substarate vertically

Publications (1)

Publication Number Publication Date
KR20120079982A true KR20120079982A (en) 2012-07-16

Family

ID=46712763

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110001374A KR20120079982A (en) 2011-01-06 2011-01-06 Apparatus for transferring the substarate vertically

Country Status (1)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101364735B1 (en) * 2013-04-26 2014-02-21 주식회사 썬닉스 Apparatus for sensing a broken substrate and method thereof
CN110668184A (en) * 2019-10-27 2020-01-10 张肖 Rack is used in glass production and processing
CN111923610A (en) * 2020-09-10 2020-11-13 季华实验室 Lifting device, control method thereof and ink-jet printing equipment

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101364735B1 (en) * 2013-04-26 2014-02-21 주식회사 썬닉스 Apparatus for sensing a broken substrate and method thereof
CN110668184A (en) * 2019-10-27 2020-01-10 张肖 Rack is used in glass production and processing
CN111923610A (en) * 2020-09-10 2020-11-13 季华实验室 Lifting device, control method thereof and ink-jet printing equipment
CN111923610B (en) * 2020-09-10 2021-04-20 季华实验室 Lifting device, control method thereof and ink-jet printing equipment

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