KR20140137873A - Align equipment of glass and mask - Google Patents

Abstract

Disclosed is a device for aligning a glass and a mask. A device for aligning a glass and a mask according to an embodiment of the present invention, includes a stage unit including a plurality of elevating contact modules which mutually touches a plurality of regions of a first object loaded in a deposition chamber, wherein the elevating contact modules is mounted to be elevated in the deposition chamber; a horizontality adjusting unit which includes an elevating driving module which selects at least one of the elevating contact modules and moves the elevating contact module in a vertical direction and can adjust horizontality of the first object by operating the elevating driving module; and a position aligning unit which is combined with the elevating driving module and rotates or moves a stage unit on a predetermined plane to align the firs object on a second object which is separated from the first object.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a glass-

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for aligning a glass and a mask, and more particularly to an apparatus for aligning a glass and a mask used for aligning a glass and a mask in a glass deposition process.

OLED (Organic Light-Emitting Diode) refers to a 'self-emitting organic material' that emits light by using an electroluminescence phenomenon that emits light when an electric current flows through a fluorescent organic compound.

OLEDs can be driven at low voltages and can be made thinner, have a wide viewing angle, and have a fast response time, making them a next-generation display device that can replace current LCDs.

The manufacturing process of the OLED includes a pattern forming process, an organic thin film deposition process, a sealing process, and a bonding process in which a substrate having an organic thin film deposited thereon and a sealing process are attached to the substrate.

OLEDs require deposition patterns of fine pitch (± 5 microns) for full color in the deposition process. A shadow mask of a metal is used in the deposition process to form such a fixed pattern of deposition.

In this deposition process, the glass used as the substrate of the OLED is supported on the fork hand of the transport robot and moved to the deposition chamber. The glass is moved to the deposition chamber and then placed precisely on the mask so that deposition errors do not occur.

In order to increase the accuracy of the deposition pattern, it is important that not only the pattern of the 'shadow mask' itself needs to be precise, but also that the glass and mask are mechanically precisely aligned.

That is, precise alignment of the glass and the mask is performed before the deposition pattern is formed on the glass. In this alignment, an OLED horizontal aligner with a glass and mask key alignment function for x, y, and θ is used. At this time, the glass and the mask should be as close as possible to each other because the deposition material penetrates between the glass and the mask and a shadow phenomenon occurs in the deposition pattern.

However, in the case of the conventional bottom-up deposition method, since a glass, a mask, an align mechanism, etc. exist in the upper part of the deposition chamber, the structure supporting them is inevitably unstable and the mask and glass are sagged, The alignment process was not easy.

The sagging phenomenon of these glasses could be solved by using magnets. That is, by arranging the magnets so as to generate a uniform magnetic field on the entire surface of the mask and the glass, the adhesion of the glass and the mask can be maximized.

As the glass becomes larger, the degree of glass deflection and the horizontal accuracy of the glass to mask against the mask become important factors in the glass key & mask key alignment.

Recently, large-sized glass is becoming larger and more sagging phenomenon becomes more severe. It is difficult to cope with precise alignment of glass and mask having severe sagging phenomenon by conventional horizontal aligner. That is, the conventional OLED horizontal aligner had no problem in small size glass alignment, but recently caused a problem in large size glass alignment.

Korean Patent Application Publication No. 2006-0000704

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide an apparatus for aligning a glass and a mask capable of coping with deflection phenomenon of a glass by accurately aligning a glass and a mask not only in x, y, will be.

According to an aspect of the present invention, there is provided a substrate processing apparatus comprising: a plurality of lifting contact modules mutually corresponding to and contacting with a plurality of regions of a first object to be loaded into a deposition chamber, Stage unit; A horizontal adjustment unit including an elevation driving module capable of selecting at least one of the plurality of elevation contact modules and moving the elevation driving module in a vertical direction, the elevation driving module being operable to adjust a horizontal degree of the first object; And a positioning unit coupled to the elevation drive module and capable of moving or rotating the stage unit in a predetermined plane so that the first object is aligned with a second object disposed apart from the first object, And a mask aligning device may be provided.

The stage unit may further include a plurality of lifting and lowering rod modules mounted on the upper portion of the deposition chamber respectively corresponding to the plurality of lifting contact modules.

The lift rod module includes: a plurality of lifting and lowering rods installed in the deposition chamber so as to be able to move up and down; And a lift panel coupled to a lower end of the plurality of lift rods.

The lifting contact module includes: a support panel spaced apart from the lift panel; And a stage bracket coupling the support panel to the lift panel.

Wherein the first object is a glass on which an evaporation material is deposited and the second object is a mask for providing a deposition pattern, the support panel being disposed adjacent to the four corner of the glass, And a stage panel coupled to the support panel to provide a support tab for supporting the edge of the glass.

Wherein the stage panel is provided with four stages for supporting the glass in a divided manner so that one of the four stage panels is capable of loading the glass onto the remaining three stage panels while the glass is being loaded, And can be moved upward by the module.

The horizontal adjustment unit may further include a horizontal detection sensor installed on the alignment unit to detect the horizontality of the glass.

The above-described apparatus for aligning a glass and a mask further includes a mask frame on which the mask is supported, wherein the stage panel is inserted into the mask frame such that when the stage panel is lowered, the glass is supported on the mask A seating groove can be provided.

The lifting and lowering driving module includes: a lifting base installed on the positioning unit; A plurality of elevation guide portions standing upright on both sides of the elevating base; A lifting / lowering part installed on the lifting / lowering guide part so as to be movable up and down; And a lifting and lowering driving unit connected to the lifting and lowering unit to raise and lower the lifting and lowering unit.

The lifting and lowering unit includes a plurality of lifting and lowering brackets, An upper lifting plate supported and coupled on the plurality of lifting brackets; A lower steel plate spaced downwardly from the upper steel plate; And a plurality of coupling frames coupling the upper lift steel plate and the lower lift steel plate.

The elevating guide unit includes a guide body installed to stand on the elevating base; And a guide block coupled to the guide body, wherein the guide block is provided along the guide body in a vertical direction.

The elevation driving unit may include a screw round bar provided in the guide passage of the guide block; An arm screw installed on the screw round bar to be vertically moved by the screw round bar and coupled to the lift bracket; And an elevation driving motor installed on the elevating base to drive the screw round bar.

The lifting and lowering driving unit may include: a first timing pulley installed on a rotary shaft of the elevation driving motor; A second timing pulley installed at a lower end of the screw round bar; And a timing belt installed in the first timing pulley and the second timing pulley to rotate the second timing pulley by the first timing pulley.

Wherein the first object is a glass on which a deposition material is deposited and the second object is a mask for providing a deposition pattern, the positioning unit comprising: a moving base installed to support the lifting and lowering module; An alignment base installed at a lower portion of the moving base; A plurality of camera units installed at a lower portion of the alignment base; And moving the glass based on a position of a reference point of the mask provided from the camera unit so as to move or rotate the moving base in an XY plane by coupling the moving base and the alignment base, And an aligner for aligning the glass to a predetermined position.

Wherein the aligner comprises: a plurality of linear driving modules installed on the alignment base and capable of moving the moving base; And

And a plurality of idle modules mounted on the moving base and the alignment base, the linear module allowing linear movement and rotation of the moving base.

The idle module includes: a rotary cross roller coupled to a bottom surface of the moving base to allow rotation of the moving base; An X-axis moving unit coupled to the rotary cross roller, the X-axis moving unit capable of moving along the X-axis of the moving base; And a Y-axis moving unit coupled to an upper portion of the X-axis moving unit to allow movement along the Y-axis.

According to the present invention, there are provided a stage unit for supporting and dividing a glass into a plurality of regions, a horizontality adjusting unit capable of lifting and lowering a plurality of regions of the glass by the stage unit, and a position capable of moving or rotating the stage unit in a predetermined plane It is possible to provide an apparatus for aligning a glass and a mask capable of coping with the deflection phenomenon of the glass by aligning the glass and the mask not only in x, y, and θ but also in the z direction during the deposition process by the alignment unit.

1 is a perspective view of an apparatus for aligning a mask and a mask according to an embodiment of the present invention.
2 is a front view of Fig.
Fig. 3 is a perspective view of the stage unit and the leveling unit of Fig. 1. Fig.
4 is a plan view of Fig.
5 is a plan view of the alignment unit of Fig.
Figure 6 is a schematic side view of Figure 5;
Figure 7 is a perspective view of the idle module of Figure 5;

In order to fully understand the present invention, operational advantages of the present invention, and objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the accompanying drawings which illustrate preferred embodiments of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference symbols in the drawings denote like elements. Hereinafter, a variety of materials for manufacturing a large-area panel such as an OLED display panel and a solar panel, such as a flexible substrate, can be used as the substrate used in the deposition process. The glass is indicated as "G" The mask frame is indicated by "F" and the deposition chamber is indicated by "C ". The mask is shown in dashed lines in the mask frame.

According to the present embodiment, the apparatus for aligning the glass and the mask can arrange the glass on the mask through precise image alignment (Vision Align) in the deposition chamber. Such an apparatus is configured such that the glass is divided into four parts by horizontally adjusting the alignment, the alignment mark is recognized by the image device, the position of the glass is aligned with respect to the mask, And can include elements that can be lowered on the main body.

FIG. 2 is a front view of FIG. 1, FIG. 3 is a three-dimensional view of the stage unit and the horizontality adjusting unit of FIG. 1, and FIG. 4 is a plan view of Fig.

1 to 3, an apparatus for aligning a mask and a mask according to an exemplary embodiment of the present invention includes a plurality of lifting contact portions that are in contact with and contact with a plurality of regions of a first object to be loaded into a deposition chamber, A stage unit 100 including a module 110 and a plurality of lifting and contacting modules 110 installed in the deposition chamber so as to be able to move up and down respectively and at least one of the lifting and contacting modules 110, And a horizontal degree adjusting unit 120 including a lift driving module 125 which can adjust the horizontal level of the first object by operating the elevation driving module 125. [

The elevation driving module 125 of the leveling control unit 120 can move or rotate the stage unit 100 in a predetermined plane so that the first object is aligned with the second object disposed apart from the first object Which is positioned on the alignment unit 130.

The glass and mask alignment apparatus according to the present embodiment may be installed in a deposition chamber in which the deposition material flows upward and the deposition process proceeds. Here, the first object may be a panel-shaped glass on which a deposition material is deposited, and the second object may be a mask that provides a deposition pattern. The above-described position alignment unit 130 may be installed to be supported on the upper portion of the deposition chamber.

The glass can be loaded into the lift contact module 110 of the stage unit 100 disposed inside the deposition chamber by a transport robot, not shown, as an OLED substrate glass. At this time, the mask supported on the mask frame is disposed below the glass so as to be spaced apart from the glass. The glass and mask alignment apparatus according to this embodiment processes the alignment process between the glass and the mask before the deposition process proceeds.

As the glass gradually increases in size and the deflection caused by the increase of the distance to the supporting point causes the horizontal areas to vary depending on the supporting areas, the mismatch of the horizontal areas causes the supporting areas corresponding to the plurality of areas of the glass to move up and down The horizontal adjustment unit 120 can be adjusted appropriately.

That is, the glass can be arranged on the mask by being aligned with the alignment unit 130 by aligning unit 130 after the horizontal degree is adjusted so that the error of the deposition pattern formation is not generated by the horizontal alignment unit 120.

Hereinafter, components of an apparatus for aligning a mask and a mask according to the present embodiment will be described in detail with reference to FIGS. 1 to 4. FIG.

First, as shown in FIGS. 1 to 4, the stage unit 100 of the apparatus for aligning glasses and the mask according to the present embodiment is capable of being raised and lowered in the upper part of the deposition chamber corresponding to each of the plurality of lifting contact modules 110 And a plurality of lifting rod modules 115 coupled to the lifting contact module 110 in the deposition chamber so that the glass can be loaded and disposed.

The lifting rod module 115 is coupled to the lifting contact module 110 described above so as to lift the lifting contact module 110 inside the deposition chamber. To this end, the lift rod module 115 may include a plurality of lift rods 141 that are installed in the deposition chamber so as to be able to move up and down, and a lift panel 142 that is coupled to the lower ends of the plurality of lift rods 141. The lifting panel 142 corresponds to a rectangular frame having a rectangular shape, and four lifting rods 141 can be coupled to four corners at right angles to each other.

The lift rod 141 is slidably installed in the deposition chamber. The lift rod 141 is coupled to a lower portion of the lift driving module 125 to connect the lift panel 142 to the lift driving module 125. A bellows 143 is provided in the upper portion of the lifting rod 141 to maintain airtightness of the deposition chamber during slide movement in the deposition chamber.

The elevating rod module 115 is disposed on all sides of the glass so that the glass can be divided and supported, and the elevating contact module 110 is also provided corresponding thereto. That is, the lifting contact module 110 can support the glass in four directions by dividing the glass. The lift contact module 110 may include a support panel 144 disposed away from the lift panel 142 and a stage bracket 145 that engages the support panel 144 with the lift panel 142 .

Such a stage bracket 145 may be arranged long in the vertical direction so that the support panel 144 is spaced from the lift panel 142 by the length thereof. The upper and lower portions of the stage bracket 145 may be perpendicular to the vertical direction so as to be easily coupled to the lift panel 142 and the support panel 144, respectively.

The support panel 144 according to the present embodiment is disposed adjacent to the four corners of the glass, and the lift contact module 110 is coupled to the support panel 144 to support the edge of the glass, (Not shown).

At this time, the stage panel 146 is four pieces to support the glass in a divided manner, and one of the four stage panels 146 has a function of loading the glass onto the remaining three stage panels 146 while the glass is being loaded And can be moved upward by the elevation drive module 125 so that the elevation drive module 125 can be operated.

That is, the stage panel 146, which is short-length or long-length interfering with the glass, can be raised so that the glass can enter the loading space provided by the four stage panels 146, thereby opening the loading space.

The elevation of this one stage panel 146 is possible by activating the corresponding elevation drive module 125 as described below. After the glass is placed on the three stage panels 146, the other stage panel 146 is lowered to support the glass.

The stage panel 146 may be coupled to each of the support panels 144 in a pair, and the support jaw 147 is provided to support a corner margin corresponding to the support area at the bottom of the glass.

As described above, the glass on which the evaporation material is deposited is loaded on the four stage panels 146 in a hanging arrangement by the four stage brackets 145, and then lowered in the horizontal and alignment state to form a mask As shown in FIG.

The horizontal adjustment unit 120 for horizontal alignment of the glass further includes a horizontal detection sensor 150 installed in the alignment unit 130 so as to detect the horizontality of the glass as shown in FIG. can do.

For example, when the horizontal detection sensor 150 is a laser distance measurement type laser distance measurement sensor, the distance to the four quadrant regions of the glass can be detected to calculate the horizontal degree of the glass.

At this time, when the distance between one or both of the four quadrant-dividing regions differs from the distance reference value due to the warping of the glass, the stage panel 146 supporting the corresponding region is moved up or down to correct the error .

The glass is placed on the mask by the lowering of the stage panel 146 after the horizontal degree is adjusted. At this time, the stage panel 146 is lowered toward the mask frame, and is moved downward from the upper end of the mask so that the glass is disposed on the mask.

To this end, the mask frame according to the present embodiment may be provided with a seating groove 151 into which the stage panel 146 is inserted so that the glass is supported on the mask when the stage panel 146 is lowered. The seating groove 151 provides a depth at which the stage panel 146 can be sufficiently lowered to a predetermined position.

Each of the elevation drive modules 125 for elevating and lowering the four stage panels 146 includes an elevation base 155 installed on the alignment unit 130 and an elevation base 155 installed on both sides of the elevation base 155 A lifting and lowering portion 160 that is vertically movable on the lifting and lowering guide portion 156 and a lifting and lowering portion 160 that is connected to the lifting and lowering portion 160 to lift the lifting and lowering portion 160 And may include a lifting driver 170.

The elevation guide unit 156 according to the present embodiment includes a guide body 157 mounted on an elevating base 155 so as to stand up on the guide base body 157, And a guide block 158 on which a passage (not shown) is provided. The guide block 158 is provided with a linear guide 159 which can guide an arm screw (not shown), which will be described later, up and down.

The elevating and moving unit 160 according to the present embodiment includes a pair of elevating brackets 161 that are provided so as to be capable of elevating in correspondence to the pair of elevating guide units 156 and a pair of elevating brackets 161, A lower lifting plate 164 installed to be spaced downward from the upper lifting plate 162 and a lower lifting plate 164 coupled to the upper lifting plate 162 and the lower lifting plate 164, And may include four combined frames 165.

The lifting and lowering drive unit 170 is provided with a screw round bar 171 provided in a guide passage (not shown) of the guide block 158 and a screw round bar 171 which is vertically moved by a screw round bar 171, An arm screw (not shown) coupled to the bracket 161 and an elevation driving motor 173 installed on the elevating base 155 to drive the screw round bar 171.

 The lifting and lowering drive unit 170 includes a first timing pulley 175 provided on a rotary shaft (not shown) of the elevation drive motor 173, a pair of screw rods 171 provided on the lower end of the pair of screw round rods 171, 2 timing pulley 176 and a timing belt 177 mounted on the first timing pulley 175 and the second timing pulley 176 to rotate the second timing pulley 176 by the first timing pulley 175. [ ).

The first timing pulley 175 and the pair of second timing pulleys 176 are arranged in a triangle and the timing belt 177 is connected to the first timing pulley 175 and the pair of second timing pulleys 176 Are arranged in a triangular shape.

The first timing pulley 175 is rotated by the rotation of the elevation driving motor 173 and the timing belt 171 is rotated according to the rotation of the first timing pulley 175. In the elevation driving module 125 according to the present embodiment, The second timing pulley 176 is simultaneously rotated by the second timing pulley 177 and the screw round bar 171 coupled to the second timing pulley 176 is rotated so that the arm screw (not shown) can be moved up or down.

Accordingly, the lifting bracket 161 coupled to the arm screw (not shown) is moved, and the upper lifting plate 162 coupled to the lifting bracket 161 is moved. Since the upper lift steel plate 162 is coupled to the lower lift plate 164, the lift rod module 115 coupled to the lower lift plate 164 is moved, and the lift contact module 110 are moved.

On the other hand, the glass is aligned with respect to the mask so that the deposition pattern of the mask can be formed without error when the glass is placed on the mask. The alignment of the glass with respect to such mask is performed by the alignment unit 130. [

Fig. 5 is a plan view of the alignment unit of Fig. 1, Fig. 6 is a schematic side view of Fig. 5, and Fig. 7 is a perspective view of the idle module of Fig.

5 to 7, the positioning unit 130 according to this embodiment includes a moving base 180 installed to support the lifting and lowering driving module 125, Four camera units 185 mounted on the lower part of the alignment base 181 and a movable base 180 coupled to the alignment base 181 and movable base 180 in XY And an aligner 190 which is provided to move or rotate in a plane and moves the glass based on the position of the reference point of the mask provided from the camera unit 185 to align the glass to a predetermined position.

The aligner 190 includes three linear drive modules 191 and 192 provided on the alignment base 181 and arranged in a triangular arrangement so as to move the movable base 180, 181 and may include four idle modules 195 that permit linear movement and rotation of the mobile base 180.

The aligner 190 is a technique commonly known as a UVW aligning apparatus. As described above, a three-axis motor is used. When the U axis is the X axis, when the VW is moved to the same value, , The Z-axis rotation, that is, theta rotation, which is perpendicular to the XY plane, is possible by moving the UVW by a predetermined value. Alignment using these alignment elements of UVW is a commonly used technique for aligning two objects in the display manufacturing process.

One linear drive module 191 can provide X-axis movement, and a pair of linear drive modules 192 arranged at right angles can provide movement along the Y-axis. The pair of linear drive modules 192 can operate at mutually different speeds to rotate the movable base 180 about the Z axis orthogonal to the XY plane. At this time, the center of the upper surface of the movable base 180 is assumed to be the origin of the XY plane, and the axis perpendicular to the upper surface of the mobile base 180 at the origin is assumed as the Z axis.

The idle module 195 may include an orthogonal linear guide element along the X-axis and Y-axis directions and a rotation guide element disposed on the upper portion thereof and coupled to the bottom of the movement base 180 to allow rotation.

The idle module 195 includes a rotary cross roller 196 coupled to the bottom surface of the movable base 180 to allow the rotation of the movable base 180 and a movable cross roller 196 coupled to the rotary cross roller 196, A Y-axis moving unit 198 coupled to the upper portion of the X-axis moving unit 197 and capable of moving along the Y-axis, .

On the other hand, as shown in Fig. 2, the camera unit 185 according to the present embodiment is provided so as to face the glass at the bottom portion of the alignment base 181. Fig. The position of the predetermined reference point on the glass is photographed and collected by the camera unit 185 and aligned with the reference point designated on the mask by the aligner 190. [

At this time, the reference points of the glass and the mask can be displayed at a plurality of positions by marking and other methods, and it can be said that the alignment is performed when the mutual projections projected on the plane are matched.

As described above, the apparatus for aligning the glass and the mask according to the embodiment of the present invention has been described. However, the scope of the present invention is not limited to this deposition process, and the first object and the second object, It can be applied to all processes requiring alignment at the upper and lower positions of the object.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.

G: glass F: mask frame C: deposition chamber
100: stage unit 110: lifting contact module
115: lifting / lowering load module 120: leveling control unit
125: Lift driving module 130: Position alignment unit
141: lift rod 142: lift panel
143: Bellows 144: Support panel
145: stage bracket 146: stage panel
147: Support jaw 150: Horizontal detection sensor
151: seat groove 155: lifting base
156: lifting guide part 157: guide body
158: guide block 160:
161: lifting bracket 162: upper lifting plate
164: lower lifting plate 165: engaging frame
170: lift driving part 171: screw round bar
173: lifting drive motor 175: first timing pulley 176: second timing pulley
177: timing belt 180: moving base
181: alignment base 185: camera unit
190: aligner 191, 192: linear drive module
195: idle module 196: rotary cross roller
197: X-axis moving unit 198: Y-axis moving unit

Claims (16)

A stage unit including a plurality of lifting contact modules mutually correspondingly contacted with a plurality of regions of a first object to be loaded into the deposition chamber, wherein the plurality of lifting contact modules are each liftably installed in the deposition chamber;
A horizontal adjustment unit including an elevation driving module capable of selecting at least one of the plurality of elevation contact modules and moving the elevation driving module in a vertical direction, the elevation driving module being operable to adjust a horizontal degree of the first object; And
And a position alignment unit capable of moving or rotating the stage unit in a predetermined plane so that the first object is aligned with a second object arranged to be spaced apart from the first object, And a mask for aligning the mask with the mask. The method according to claim 1,
Wherein the stage unit further comprises a plurality of lifting and lowering rod modules vertically installed on the upper portion of the deposition chamber in correspondence with the plurality of lifting contact modules. 3. The method of claim 2,
The lift rod module includes:
A plurality of lifting and lowering rods installed in the deposition chamber so as to be able to move up and down; And
And a lifting and lowering panel coupled to a lower end of the plurality of lifting and lowering rods. The method of claim 3,
The lift contact module includes:
A support panel spaced apart from the lift panel; And
And a stage bracket for coupling the support panel to the lifting panel. 5. The method of claim 4,
The first object is a glass on which an evaporation material is deposited,
Wherein the second object is a mask for providing a deposition pattern,
Wherein the support panel is disposed adjacent to the four corner portions of the glass,
Wherein the lifting contact module further comprises a stage panel coupled to the support panel and providing a support tab for supporting a corner of the glass. 6. The method of claim 5,
The stage panel is provided with four pieces for supporting the glass in a divided manner,
Wherein one of the four stage panels is moved upward by the elevation drive module so that the glass can be loaded onto the remaining three stage panels while the glass is being loaded. . 6. The method of claim 5,
Wherein the horizontal alignment unit further comprises a horizontal sensor disposed on the alignment unit to sense the horizontality of the glass. 6. The method of claim 5,
And a mask frame on which the mask is supported,
Wherein the mask frame is provided with a seating groove into which the stage panel is inserted so that the glass is supported on the mask when the stage panel is lowered. The method of claim 3,
The elevation drive module comprises:
A lifting base installed on the positioning unit;
A plurality of elevation guide portions standing upright on both sides of the elevating base;
A lifting / lowering part installed on the lifting / lowering guide part so as to be movable up and down; And
And an elevation driving unit connected to the elevation moving unit to elevate the elevation moving unit. 10. The method of claim 9,
The elevating /
A plurality of lifting and lowering brackets provided so as to be movable up and down respectively corresponding to the plurality of lifting guide portions;
An upper lifting plate supported and coupled on the plurality of lifting brackets;
A lower steel plate spaced downwardly from the upper steel plate; And
And a plurality of joining frames for joining the upper steel plate and the lower steel plate. 11. The method of claim 10,
The lifting /
A guide body installed to stand on the lifting base; And
And a guide block coupled to the guide body, wherein the guide block is vertically provided along the guide body. 12. The method of claim 11,
The lift-
A screw round bar provided in the guide passage of the guide block;
An arm screw installed on the screw round bar to be vertically moved by the screw round bar and coupled to the lift bracket; And
And an elevation driving motor provided on the elevating base to drive the screw round bar. 13. The method of claim 12,
The lift-
A first timing pulley installed on a rotary shaft of the elevation driving motor;
A second timing pulley installed at a lower end of the screw round bar; And
Further comprising a timing belt installed in the first timing pulley and the second timing pulley to rotate the second timing pulley by the first timing pulley. 3. The method of claim 2,
The first object is a glass on which an evaporation material is deposited,
Wherein the second object is a mask for providing a deposition pattern,
Wherein the positioning unit comprises:
A moving base installed to support the elevation driving module;
An alignment base installed at a lower portion of the moving base;
A plurality of camera units installed at a lower portion of the alignment base; And
The glass is moved on the basis of the position of the reference point of the mask provided from the camera unit so as to move the movable base in the XY plane and to move the movable base in the XY plane, And an aligner for aligning the mask and the mask in a predetermined position. 15. The method of claim 14,
The above-
A plurality of linear driving modules installed on the alignment bases and capable of moving the moving base; And
And a plurality of idle modules provided on the moving base and the alignment base, the plurality of idle modules allowing linear movement and rotation of the moving base. 16. The method of claim 15,
The idle module includes:
A rotary cross roller coupled to a bottom surface of the moving base to allow rotation of the moving base;
An X-axis moving unit coupled to the rotary cross roller, the X-axis moving unit capable of moving along the X-axis of the moving base; And
And a Y-axis moving unit coupled to an upper portion of the X-axis moving unit to allow movement along the Y-axis.

Images